Tektronix Package 82 Simultaneous CV Instruction Manual Rev. C Instruction Manual
Package 82 Simultaneous CV
Instruction Manual
Chntains Operating Information
Publication Date: November 1968
Document Number: 5956-901-01 Rev. C
WARRANTY
Keithley Instruments, Inc. warrants this product to be free from defects in material and
workmanship for a period of 1 year from date of shipment. During the warranty period, we
will, at our option, either repair or replace any product that proves to be defective.
To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio. You will be given prompt assistance and return instructions. Send the instrument, transportation prepaid, to the indicated service facility. Repairs will be made and the instrument returned, transportation prepaid. Repaired products
are warranted for the balance of the original warranty period, or at least 90 days.
LIMITATION OF WARRANTY
This warranty does not apply to defects resulting from unauthorized modification or misuse
of any product or part. This warranty also does not apply to fuses, batteries, or damage from
battery leakage.
This warranty is in lieu of all other warranties, expressed or implied, including any implied
warranty of merchantability or fitness for a particular use. Keithley Instruments, Inc. shall
not be liable for any indirect, special or consequential damages.
STATEMENT OF CALIBRATION
This instrument has been inspected and tested in accordance with specifications published
by Keithley Instruments, Inc.
The accuracy and calibration of this instrument are traceable to the National Bureau of Standards through equipment which is calibrated at planned intervals by comparison to certified standards maintained in the Laboratories of Keithley Instruments, Inc.
WEST GERMANY: Kdtldq lnrtrrrmcatr GmbIi / Hdglhok 5 / Mmtdwn 70 I O+3WlOOZ-O I T&C 32-12160 / Tel&~ &35Via?ZS9
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Kdtblq lnstmmmta Sill I Wale B. N 4/A / 20145 Miho / 02420360 or 02-4136!540 / Tdefa 02.4121245’
Dubadaf / 014214444 / T&x 323 VT / Tdohrc 072%315%
I 01330.35333 / T&x 24 684 / Telfax 01&.3MOSZl
Instruction Manual
Package 82
Simultaneous CV
@NW, Keithley Instruments, Inc.
Instruments Division
Cleveland, Ohio, U.S.A.
Document Number 5956901-01
Hewlett-Packard is a registered trademark of Hewlett-Packard Company.
IBM and AT are registered trademarks of Internation Business Machines, Inc.
SPECIFICATIONS
ANALYSIS CAPABILITIES
CONSTANTS: Flatband C and V
GRAPHICS:
Measured:
CaIcnIated: Interface Trap Density vs. Trap Energy
Threshold Voltage
Bulk Doping
Effective Oxide Charge
Work Function
Doping Type
‘Best Depth’
Simuitaneous C vs. Gate Voltage
High Frequency C vs. Gate Voltage
Quasistatic C vs. Gate Voltage
Conductance vs. Gate Voltage
Q/t Current vs. Gate Voltage
Quasistatic C and Q/t Current
vs. Delay Time
Doping vs. Depletion Depth
Depletion Depth vs. Gate Voltage
High Frequency l/C’ vs. Gate Voltage
Band Bending vs. Gate Voltage
High Frequency C vs. Band Bending
Quasistatic C vs. Band Bending
VOLTAGE MEASUREMENT
ACCURACY (1Year,18°-280C): *(O.QS% rdg + SOmV).
RESOLUTION: 1OmV.
TEMPERATURECOEFFICIENT (O"-180&2So~oC):
*(O.OOS% + 1mV)K.
HIGH FREQUENCY CAPACITANCE*
1ookHz:
RANGE LUTION i(%rdg+ pF)
mo PF
lMHz:
RANGE LUTION ff%rdg+ pR
~PP
SHUNT CAPACITANCE LOADING EFFECT 0.1% of reading
TEST VOLTAGE: 15mV mu f 10%.
TEST FREQUENCY TOLERANCE: *O.l%.
RESCh QYe~,18~-28~C) too-lS" L 28°-400CJ NOISE
10 a
looa
2nF
RESO- 11 Year, 18"-28°C) (0"-18' (t 28°400C) NOISE
10 fF 0.9 + 0.05
2nF loofF 1.4 + 0.5 0.14
additional error per 1OOpF load with equal shunt load on input
and output.
ACCURACY
0.7 + 0.05 0.03
0.9 + 0.5 0.08
ACCURACY
TEMPERATURE
COEFFICIENT
i (% rdgvc
TEMPERATURE
COERIClENT
k(% rd@l'C
0.03 2cafF
P-P
18ofF
18LMfF
P-P
4lmfF
QUASISTATIC CAPACITANCE*
RANGE LUTION
XIIJ PF
RESO- (1Year,18°-280C)
10 fF 1.0 + 0.1
1mfF
2nP
ACCURACY
rekdg + pm
0.8 + 0.2 (0.09% rdg + 0.13 pF) x
NOISE P-P
(typic&
(0.12% rdg + 0.13 pF) x
(100 mV/STEP V) + 0.01 pF
(100 mV/STEP V) + 0.1 pF
VOLTAGE SOURCE
VOLTAGE (0.1 Hz to 10 Hz) RESOLUTION
S2OV
>iuvtol2ov
ll)@ally 3 mV up to 75 MHz.
MAXIMUM SWEEP SPAN, 1 V,,, - V,r 1: 40V.
MAXIMUM OUTPUT CURRENT: f2mA (-0%. +a%).
SWEEP STEP VOLTAGE SELECMONS: lOmV, 2OmV, SOmV,
1OOHlV.
DC OUTPUT RESISTANCE: Clof.2.
P-PNOISE'
EJl rv
23 rv
10 mV
100 mV
GENERAL
RE&NfN~TES: 444 readings per second to one reading every
DATA BUFFER: 1000 points maximum.
GRAPHICAL OUTPUTS: Computer display or digital plotter
supporting HPGL with IEEE-488 interface; also “screen copy”
to compatiiIe printer.
DIGITAL I/O: Consists of one output, four inputs, +5V (series
limited with 33Q), and COMMON referenced to IEEE-W
COMMON. Output will drive one TI’L load. Inputs represent
one TIL load.
MAXIMUM INPUT: 30V peak, dc to 6oHz sine wave.
MAXIMUM COMMON MODE VOLTAGE: 3OV maximum, dc
to 6OHz sine wave.
OPERATING ENVIRONMENT:
densing RH up to 35°C.
STORAGE ENVIRONMENT: -29’ to +65X
O” to 40°C, 70% non-con-
TEMPERATURECOEFFICIENT @"-lt30&2W'-400C):
*(0.02% rdg + 0.1 pF)K.
*NOTES
Specifkationa are based on parallel RC model and Quality Factor s 20.
Assumes pfopa cable cone&on and open circuit suppression.
~~capsdturerruracyisexdusivcofnoise,for~VrO.OSV
and DEUY TIME s 1 second. For other parameters, derate by
(SmV/STEP V) x (DELAY TIME/l second) in pF at 23OC. Double the
derating for every 10°C rise in ambient temperature above 23°C.
l)pical allowable noniquilbrium current plus leakage current: <ZOpA
on ZOOpF range; cZOOpA on 2nF range during capacitance measurements.
WARMUP: 2 hours to rated accuracy.
SYSTEM CONFIGURATION: Models 22&l, 590,595, and 5951
connected as shown in manual. Controller is HP Series 200 or
300 with BASIC 4.0. Requires 1 Mbyte of memory.
PACRAGE 82 COMPONENTS:
ModeI 230-k Prognmnublc Voltage Source
Model 595:
Model 590:
Model 5909: Calibration Sources
Model 5956:
Model 5951:
Spe&cationa subject to change without notice.
Quaiatatic cv Meter
look/lMcv‘4nalyBer
Packa@? 82 CV Software and Manual
Remote Input Coupler-Includes Models:
Low Noise BNC Cable, 1.2m (4 ft.) (5 supplied)
rllwI1:
7OW1: Shielded IEEEaB Cable, Im (3.3 ft.) (2 supplied)
7007-2: Shielded IEEE488 Cable, Zm (6.6 ft.) (1 supplied)
7051-2: RG-58C BNC to BNC Cable, 0.6m (2 ft.) (3 supplied)
Contains information on Package 82 features, specifi-
cations, and supplied accessories.
Gives information to aid in getting your simulta-
neous CV system up and running as quickly as
possible, including hardware and software configuration.
Covers detailed operation including system calibration, correction, and taking data.
SECTION 1 1
General Information j
SECTION 2
Getting Started
SECTION 3 1
Measurement /
Details analysis functions of the Package 82.
Discusses system block diagram, the remote input
coupler, and quasistatic and high-frequency CV
principles.
SECTION 4
SECTION 5
Principles of Operation
Table of Contents
SECTION l-GENERAL INFORMATION
1.1
1.2
1.3
1.4
5
i-L
ii2
1.8
1.9
1.9.1
1.9.2
1.10
INTRODUCT’ION ...............................
FEfmJREs
WARRANTY INFORMATION
MANUAL ADDENDA
sm SYMBOLS AND TERMS
SPECIFICAI'IONS
UNPACKING AND INSPECTION
Unpa~gPK>cedure
SuppiiedEquipment
REFACKING FOR SHIPMENT
COMPUTER CONFIGURATION
Series 200 and 300
IBM AT
SERVICE AND CALIBRATION.
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SECTION P-GETTING STARTED
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i-:.
2:2.1
2.2.2
2.2.3
2.2.4
2.2.5
2.3
2.3.1
2.3.2
2.3.3
2.3.4
2.3.5
2.3.6
2.4
2.4.1
2.4.2
2.4.3
2.4.4
El
2:5:2
2.5.3
2.5.4
2.5.5
2.5.6
2.6
2.6.1
2.6.2
2.7
2.7.1
2.7.2
2.7.3
2.7.4
INTRODUCI’ION
HARDWARE CONFIGURATION
SystemBlockDiagram
RemoteInputCoupler..
SystemConnections
IEEE-483 Bus Connections
Remote Coupler Mounting
SYSTEM POWER UP
Instrument Power Requirements
Power Connections
Environmental Conditions
Warm Up Period
Power Up Procedure
Line Frequency
SOFTWARE CONFIGURAl’ION
Computer Boot Up
Software Backup
Software Initialization
Software Files
SOFIWARE OVERVIEW
System Reset
System Characterization
Cable Correction
C& and Delay Time Determination
Device Measurement
Data Analysis and Plotting
SYSTEM CHECKOUT
Checkout Procedure
System Troubleshooting
USING THE PACKAGE 82 WITH THE IBM AT
Installation
Software Backup
Configuration File Modification
Booting the System
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l-1
l-l
l-l
l-1
l-l
l-2
l-2
l-2
l-2
l-2
l-2
l-2
l-2
2-1
2-l
2-l
2-l
2-4
2-6
2-6
2-7
2-7
2-7
2-7
2-a
i:
2-9
2-9
2-9
..- .................... 2-9
;I;
2-9
2-9
2-10
2-11
2-n
2-U
2-11
2-n
2-ll
;I:
2-33
2-l3
2-B
i
2.7.5
.......................................................................................................
27.6
Modifyingtheprintpath...................................... . . . . . . . . . . ..*......*........a..
Operational Check. . . . . . .
SECTION 3--MEASUREMENT
. . . . . . . . . . . . . . . . . . ..*............................*.............*....
2-14
2-14
3.1
3.2
3*3
3.4
3.4.1
3.4.2
3.4.3
3.4.4
3.45
3.5
3.5.1
3.5.2
3.5.3
3.54
3.5.5
3.5.6
3.6
3.6.1
36.2
3.6.3
3.6.4
El
3?2
3.7.3
37.4
37.5
3.8
38.1
38.2
3.8.3
3.9
3.9.1
3.9.2
3.9.3
3.9.4
3.9.5
INTRODUCTION
MEASUREMENT SEQUENCE
SYSTEM RESET
TESTING AND CORRECTING FOR SYSTEM LEAKAGES AND !XFWt’S
Test and Correction Menu
.............................................................................. 3-l
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...............................................................................
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Parameter Selection
Viewing Leakage Levels
System Leakage Test Sweep
Offset Suppression
CORRECT’ING FOR CABLING EFFECTS
When to Perform Cable Correction.
RecommendedSources
Source Connections
.........................................................................
~oha.re Mciiflcation
Y **
Correction Procedure
Optimizhg Correction Accuracy to Probe Tips
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DETERMNNG OXIDE CAPACTIXNCE AND EQUILIBRIUM DELAY TIME
& and Delay Time Menu
Running and Analyzing a Diagnostic CV Sweep
...... .... .. .
........... ........
..........
Determining Oxide Capacitance, Oxide Thickness, and Gate Area
Determining Optimum Delay lime
MAKINGCVMF&lIGMEMS
CVMeasurementMenu
....
...........................................................
...............................................................
........................................................................................................................
Programming Measurement Parameters
Manual CV Sweep
......................................................................................................................................................
Auto CV Sweep
Using Corrected Capacitance
LIGHT CONNECX’IONS
Digital I/O Port Tixminals
LED collnectioIls
...........................................................................
Relaycontrol.......................................~
MEASUREMENT CDNSID~ONS
Potential Error Sources
AvoidmgCapacitanceEm>rs
Correcting Residual Errors
Interpreting CV Curves
DynamicRangecOnsideratio~
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1.
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3-3
3-3
g
3-9
3-13
3-13
3-13
3-h
r) -se
zfi
346
3-16
3-X
3-18
3-20
3-22
3-26
322
3-29
3-30
3-33
3-33
3-33
3-34
3-34
g;
3-z
3-39
3-40
SECTION 4-ANALYSIS
4.1
4.2
4.21
INTRODUCTlON
CONSWNTS AND SYMBOLS USED FOR ANALYSIS
constants.
4.2.2 Raw Data Symbols
42.3
4.3
4.3.1
4.3.2
4.4
44.1
4.4.2
Calculated Data Symbols
OB’UINNG IN-FOlWiAIlON FROM BASIC CV CURVES
Basic CV Curves
Dgtermining Device~e
ANAIXING CV DAIX
PlotterandPxinter Requirements..
Analysis Menu
ii
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41
E;
41
42
42
42
44
44
4-4
45
4.4.3
4.4.4
4.4.5
4.4.6
4.4.7
4.4.8
4.4.9
4.4.10
4.4.11
4.4.12
4.4.13
4.4.14
4.5
4.5.1
4.5.2
4.5.3
4.6
4.6.1
4.6.2
Saving andRecalling Data
Displaying and Printing the Reading and Graphics Arrays
Graphing Data
AnalysisTools .............................................................................. 410
Reading Array
Calculated Data Array (Graphics Array)
Constants Used for Analysis
Graphing the Reading Array
Doping Profile
Flatband Capacitance
Interface Trap Density Analysis.
CalculatedAccuracyofNandD~.
MOBIL,E IONIC CHARGE CONCENTTWHON MEASUREMENT .................................
Flatband Voltage Shift Method.
Triangular Voltage Sweep Method
Using Effective Charge to Determine Mobile Ion Drift
REFERENCES AND BIBLIOGRAPHY OF CV MEASUREMENTS AND RELAI’ED TOPICS.
References
Bibliography of CV Measurements and Related Topics
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SECTION 5-PRINCIPLES OF OPERATION
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4-6
46
49
413
413
413
419
423
4-23
429
429
4-29
433
433
433
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::1
El
5:3:2
5.4
5.4.1
5.4.2
5.5
5.5.1
5.5.2
5.6
INTRODUCTION
SYSTEM BLOCK DIAGRAM
REMOTE INPUT COUPLER
Tuned Circuits
Frequency Control
QUASISTATIC CV.
Quasistatic~ Configuration
Measurement Method
HIGH FREQUENCY CV
High Frequency System Configuration
High-Fluency Measurements
SIMUJXWEOUS CV
SECTION 6-REPLACEABLE PARTS
6.1
6.2
E
k5
INTRODUCT’ION
Pm LIST ..................................................................................
ORDERING INFORMAlTON
FACRJRY SERVICE ...........................................................................
COMPONENT LAYOUTS AND
................................................. ............................
........................................ ...........................
s
CHEMAX DIAGRAMS
APPENDICES
Appendix A
Appendix B
Appendix C
AppendixD ..................................................................................
Appendix E
AppendixF
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........................................ 6-l
5-l
5-2
5-2
5-3
5-3
5-3
53
5-5
5-6
:;
z
A-l
g:1
D-l
E-l
F-l
iii/iv
List of Illustrations
SECTION 2-GETTING STARTED
2-l
2-2
2-3
2-4
2-5
2-6
2-7
2-8 Main Menu.
System BlockDiagram
Model5951 Front Panel
Model 5951RearPanel
System Front Panel Connections
System Rear Panel Connections
System IEEE-488 Connections
Remote Coupler Mounting
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SECTION 34blEASUREMENT
3-l
3-2
3-3
2
3-6
3-7
3-8
3-9
3-10
3-11
3-22
3-13
3-14
3-15
3-16
3-v
3-18
3-19
3-20
3-21
3-22
3-23
3-24
3-25
3-26
3-27
3-28
3-29
3-30
3-31
3-32
3-33
3-34
3-35
3-36
Measurement Sequence
Package 82 Main Menu
Stray Capacitance and Leakage Current.
Parameter Selection Menu
Save/Load Parameter Menu
Monitor Leakage Menu
Diagnostic Sweep Menu
Leakage Due to Constant Current
Q/t Curve with Leakage Resistance
Constant Leakage Current .Increases*Quasistatic Capacitance
Quasistatic Capacitance with and without Leakage Current
Cable Correction Connections
Partial Listing Showing Nominal Source Values
X and Delay Time Menu
co
CV Characteristics of n-type Material
CV Characteristics of p-type Material
Oxide Capacitance Menu
Delay Time Menu
Q/t and C, vs. Delay Time Fixample
Choosing Optimum Delay Time
Capacitance and Leakage Current Using Corrected Capacitance
Device Measurement Menu
Parameter Selection Menu
Manual Sweep Menu
Auto Sweep Menu
Digital 110 Port Terminal Arrangement
Direct LED Control
Relay Light Control
CV Curve with Capacitance Offset
CV Curve with Added Noise
CvCurw Resukingfrom GainError
Curve Tilt Caused By Voltage-dependent Leakage
W Curve Caused By Nonlinearity
Normal~CurveRes&swhenDeviceisKeptinEquiBbrium..
Curve Hysteresis Resulting When Sweep is Too Rapid
DistortionWhenHoldTieisTooShort..
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2-2
2-2
2-3
2-5
2-5
2-6
2-7
2-10
3-l
3-3
3-4
3-5
3-7
3-9
3-11
3-12
3-32
3-12
3-14
3-15
3-17
3-20
3-21
3-23
3-24
3-25
3-25
3-27
3-28
3-31
3-32
3-33
3-34
3-35
3-35
3-36
3-36
3-36
3-37
3-39
3-41
3-41
V
SECTION 4-ANALYSIS
41
42
2
45
2
4-8
4-9
410
Q-11
PI2
413
414
4-15
4-16
417
418
4l9
420
42l
CV Characteristics of p-type Material
CV Characteristics of n-type Material
Data Analysis Menu
........................................................................... z
Example of Reading Array Print Out
Example of Graphics Array Print Out
Graphics Control Menu
Reading Array
Graphics &ray
...............................................................................
............................................................................... 423
....................................................................... 49
Quasistatic Capacitance vs. Gate Voltage Example (Normalized to Lx)
High-Frequency vs. Gate Voltage Example (Nonnaked to 6x)
High-Frequency and Quasistatic vs. Gate Voltage Example
Q/t vs. Gate Voltage Example
..................................................................
Conductance vs. Gate Voltage Example
Depth vs. Gate Voltage Example
Doping Profile vs. Depth Example
Kh’ vs. Gate Voltage Example
Band Bending vs. Gate Voltage Example
Quasistatic Capacitance vs. Band Bending Example
Hligh~FrequencyCapacitance vs Band Bending Examp!e
Interface Trap Density vs. Energy from Midgap Example
Model for TVS Measurement of Oxide Charge Density
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............................................................... 420
............................................................. 421
................................................................ 422
....................................................... 425
SEaION S-PRINCIPLES OF OPERATION
5-l
z
5-4
5-5
5-6
El
System Block Diagram
Simplified Schematic of Remote Input Coupler
System Configuration~for Quasistatic CV Measurements
Bxdbaclc Charge Method of Capacitance Measurements
U&age and Charge Waveforms for Quasistatic Capacitance Measurement
System Configuration for High Frequency CV Measurements
High Frequency Capacitance Measurement
Simukmeous CV Waveform.
.........................................................................
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................................... 415
....................................... 4%
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....
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.......................................... 431
.................................................. 5-2
..........................................
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..................................... 5-5
......................................................
43
423
414
417
418
426
A-w
T”
428
5-l
5-3
54
5-4
5-6
57
vi
List of Tables
SECTION l-GENERAL INFORMATION
l-1
l-2
l-3
SuppliedEquipment ...........................................................................
Minimum Computer Requirements ..............................................................
Necessary Binary Files
................................................ ..........................
SECTION 2-GETTING STARTED
2-l
;I$
Supplied Cables
Diskette Files
System Troubleshooting Summary
...............................................................................
.................................................................................
SECTON 3-MEASUREMENT
3-l
3-2
Cable Correction Sources
Digital I/O Port Terminal Assignments
......................................................................
SECTION 4-ANALYSIS
41
42 Displayed Constants
43 Analysis Constants
Graphical Analysis
............................................................................ 410
........................................................................... 4-10
............................................................................ 419
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.......................................................... 3-33
l-3
l-3
l-3
2-4
;I;
3-14
vii/viii
SECTION 1
’ General Information
1.1 INTRODUCTION
This section contains overview information for the Package
82 Simultaneous CV system and is arranged as follows:
1.2 Features
1.3 Warranty Information
1.4 Manual Addenda
1.5 Safety Symbols and Terms
Specifications
1.6
1.7 Unpacking and Inspection
Repacking for Shipment
1.8
1.9 Computer Configurations
Service and Calibration
1.10
1.2 FEATURES
The Package 82 is a computer-controlled system of instruments designed to make simultaneous quasistatic CV
and high frequency (1oOkHz and lMHz) CV measurements
on semiconductors. The package 82 includes a Model 590
CV Analyzer for high-frequency CV measurements, and
a Model 595 Quasistatic CV Meter, along with the
necessary input coupler, connecting and control cables,
and cable calibration sources. A Model 230-l Lbltage Souse
and software for the HP 9000 Series 2(Xl and 300 computers
(or an IBM AT with an HP BASIC language processor card)
running BASIC 4.0 are also included.
l Graphical analysis capabilities allow plotting of data on
the computer display as well as hard copy graphs using
an external digital plotter. Graphical analysis for such
parameters as doping profile and interface trap density
vs. trap energy is provided.
. Supplied external voltage source (Model 230-l) extends
the DC bias capabilities to *l2OV.
0 Supplied calibration capacitors to allow compensation for
cable effects that would otherwise reduce the accuracy
of lOOkHz and lMHz measurements.
l All necessary cables are supplied for easy system hook
UP.
1.3 WARRANTY INFORMATION
Warranty information is located on the inside front cover
of this instruction manual. Should you require warranty
service, contact your Keithley representative or the factory
for further information.
1.4 MANUAL ADDENDA
Any improvements or changes concerning the Package 82
or this instruction manual will be explained on a separate
addendum supplied with the package. Please be sure to
note these changes and incorporate them into the manual
before operating or servicing the system.
Key Package 82 features include:
0 Remote input coupler to simplify connections to the
device under test. Both the Model 595 and the Model
590 are connected to the device under test through the
coupler, allowing simultaneous quasistatic and high frequency measurement of device parameters with negligible interaction between instruments.
l Supplied menu-driven software allows easy collection
of C, G, V, and Q/t data with a minimum of effort. No
computer programming knowledge is necessary to
operate the system.
l Data can be stored on disk for later reference or analysis.
Addenda concerning the Models 250~1,590,595, and 5909
will be packed separately with those instruments.
1.5 SAFETY SYMBOLS AND TERMS
The following safety symbols and terms may be found on
one of the instruments or used in this manual:
symbol on an instrument indicates that you
Q
The ’
should consult the operating instructions in the associated
manual.
l-l
GENERAL INFORMATION
The WARNING heading used in this and other manuals
cautions against possible hazards that could lead to personal injury or death. Always read the associated information very carefully before performing the indicated
procedure.
A CAUTION heading outlines dangers that could damage
the instrument. Such damage may invalidate the warranty.
1.6 SPECIFICATIONS
Detailed specifications for the Package 82 system can be
found at the front of this manual. Specifications for the
individual instruments are located in their respective instruction manuals.
1.7 UNPACKING AND INSPECTION
1.7.1 Unpacking Procedure
Upon receiving the Package 82, carefully unpack all instruments and accessories from their respective shipping
cartons, and inspect all items for any obvious physical
damage. Report any such damage to the shipping agent
at once. Save the original packing cartons for possible
future reshipment.
l Advise as to the warranty status of the equipment.
l Write ALTENTION REPAIR DEPARTMENT
on the ship
ping label.
l Fill out and include the service form which is located
at the back of this or one of the other instruction
manuals.
1.9 COMPUTER CONFIGURATIONS
1.9.1 HP Series 200 and 300
The Package 82 is supplied with software intended for use
with the Hewlett Packard HP 9000 Series 200 and 300 computers running under BASIC 4.0. Table l-2 summarizes
minimum requirements for the computer system. Table l-3
summarizes necessary binary files.
1.9.2 IBM AT
The Package 82 can also be used with an IBM AT (or com-
patible) that is equipped with a BASIC-ROM configured
HP-8232lA Language Processor card. Paragraph 23 of this
manual gives an overview of the procedure; see the HP
documentation for detailed information.
1.10 SERVICE AND CALIBRATION
1.7.2 Supplied Equipment
Table l-l summarizes the equipment supplied with the
Package 82 system.
1.8 REPACKING FOR SHIPMENT
Should it become necessary to return any of the instruments for repair, carefully pack them in their original
packing cartons (or the equivalent), and be sure to include
the following information:
The Model 5951 Remote Input Coupler cannot be
calibrated or repaired by the user, so it must be returned
to the factory or authorized service center for repair or
calibration. If the Model 5951 is to be returned, proceed
as folIows:
1. Complete the service form at the back of the manual
and include it with the unit.
2. tZarefdy pack the unit in the original packing carton
or its equivalent.
3. Write AITENTION RJBUR DEl?A#IuENT
on the ship
ping label.
l-2
Table l-1. Supplied Equipment
GENERAL INFORMATION
w-------2
1
1
1
1
- ---- ----_
230-l Voltage Source
590 CV Analyzer
595 Quasistatic CV Meter
5951 Remote Input Coupler
5909 Capacitance Sources
:
3
.
2
1
1
4801 Low noise BNC cables (4’)
7051-2 BNC cables
7007-l Shielded IEEE488 cables (lm)
7007-2 Shielded IEEE488 cable (2m) Connect controller to instrument bus
5956 CV Software Package Control Package 82 system.
Table l-2. Minimum Computer Requirements
Hewlett-Packard HP9000
Computer
Minimum FUM
Monitor
Disk Storage
Series 200 or 300**
lM bytes*
Monochrome
HP829Olm (5%“) or
HP&TJ22 (3%“) floppy disk
IEEE-488 Interface
HP-I-B
Programming language BASIC 4.0
-Yp*.~.I”‘.
Supply *lOOV DC offset, control 5951
frequency
Measure lOOkI-&, lMHz C and G
Measure C, Q/t; supply staircase bias
waveform
Connect 590 and 595 to DUT
System configuration/calibration
Connect 5951 to DUT and instruments
Connect instrument control and
voltage signals
Connect instruments to bus
Table 1-3. Necessary Binary Files
Filename
DISC or CS80*
Comments
Depends on disc drive type
I-FIB*
CRTAorCRTB*
Depends on display type
FHPlB*
F!!KHW
IO”
*Only 5I2K bytes required with ROM-based BASIC 4.0
“An IBM-AT equipped with the HP BASIC Language
Processor Card can also be used. See paragraph 2.7.
*Driver
*Language extension
l-311-4
SECTION 2
Getting Started
2.1 INTRODUCTION
Section 2 contains introductory information to help you get
your system up and running as quickly as possible. Section 3 contains more detailed information on using the
Package 82 system.
Section 2 contains:
2.2
Hardware Configuration: Details system hardware
configuration, cable co~ections, and remote input
coupler mounting.
2.3
System Power Up: Covers the power up procedure for
the system, environmental conditions, and warm up
periods.
2.4
Software Configuration: Outlines methods for
booting up the computer, making backup copies, and
Package 82 software initialization.
25
Software Ovmiew: Descriks the purpose andoverall
confi8uration of the Package 82 software
2.6
System Checkout: Gives the procedure for checking
out the system to ensure that everything is working
properly.
2.2 HARDWARE CONFIGURATION
The system block diagram and connection procedure are
covered in the following paragraphs.
2.2.1 System Block Diagram
An overall block diagram of the Package 82 system is shown
in Fii 2-l. The function of each instrument is as follows:
Model 230-l Voltage Source-Supplies a DC offset voltage
of up to ~XHJV, and also controls operating frequency of
the Model 5951 Remote Input Coupler.
Model 590 CV Analyzer-Supplies a lCHWIz or lMHz test
signal and measures capacitance and conductance when
making high-frequency CV measurements.
Model 595 CV Meter-Measures low-frequency (quasistatic)
capacitance and Q/t, and also supplies the stepped bias
waveform (&2CW maximum) for simultaneous low- and
high-frequency CV measurement sweeps.
Model 5951 Remote Input Coupler-Connects the Model
590 and 595 inputs to the device under test. The input
coupler contains tuned circuits to minimize interaction between low- and high-frequency measurements.
Computer (HP 9000)-Provides the user interface to the
system and controls all instruments over the IEEE-488 bus,
processes data, and allows graphing of results.-
Model 5909 Calibration Set-Provides capacitance reference
somces for cable correcting the system to the test fixture.
2.2.2 Remote Input Coupler
The Model 5951 Remote Coupler is the link between the
test fixture (which contains the wafer under test) and the
measuring instruments, the Models 590 and 595. The unit
not only simplifies system connections, but also contains
the circuitry necessary to ensure minimal interaction between the low-frequency measurements made by the Model
595, and the high-frequency measurements made by the
Model 590.
The front and rear panels of the Model.5951 are shown in
Fiis 2-2 and 2-3 respectively. The front panel includes
input and output jacks for connections to the device under
test, as well as indicators that show the selected test frequency (l00kHz or lMI-Iz) for high-frequency measurements. The rear panel includes a binding post for chassis
ground, BNC jacks for connections to the Models 590 and
595, a ribbon cable connector (which co~ects to the Model
230-l digital I/O port), and a digital I/O port edge co~ec-
tar providing one ITL output, four TIL inputs, digital common, and +5V DC.
2-l
GETTING STARTED
Meter
7051 ’
‘I ,-
c!cmdElta
I I
Meter Input
IEEE-48S BUS
7051
1 I
I
1
Figure 2-l. System Block Diagram
1 SOS1 REMOTE INPUT COUPLER
f
OUTPUT INPUT
2oov MAX 3oV PEAK
Tf
h5qHp
l
I
’ OUTPUT and INPU’LBNC jacks used to connect
cl
the Model 5951 to the test fixture containing the
device under test.
(7 2 Frequency indicators (X&Hz and lMHz)-Shows
the selected test frequency for high-frequency
measurements.
Figure 2-2. Model 5953 Front Panel
2-2
1 OQkHI
0
I
Maximum voltage between the outer shell of
the EJNC jacks and earth ground Is 3OV RMS.
Maximum OUTPUT voltage Is 200& maximum
INPUT voltage Is 30V peak. Exceeding these
values may &eat a shock hazard.
IYHt
cl
I
I
WARNING
)
-
SYSTEM SIGNAL CONNECTIONS
GETTING STARTED
TO 2361 DIGITAL L’O
1
0
CHASSIS binding post-Provides a convenient connection to chassis ground of the Model 5951.
WARNING
Connect CHASSIS to earth ground to avoid a
possible shock hazard, Use #16 AWG or larger
Wh.
2 Ribbon cable-Connects to the Model 230-l digital
Ll
I/O port for frequency switching of the remote
coupler.
3 DIGllAL I/O-Passes through the Model 230-l
LJ
digital I/O port signals for control and sensing of
other components (for example, light control and
door closed status).
DIGITAL l/O
4 To 590 INPUT-Connects to the Model 590 INPUT
cl
jack on the front panel of the instrument.
5 ‘IO 590 OUTPUT-Connects to the Model 590 OUT
cl
PUT jack on the front panel.
6 To 595 METER INPUT-Connects to the Model 595
cl
METER INPUT jack on the rear of the instrument.
WARNING
Maximum voltage between the outer shell of
the BNC jacks and earth ground is 30V RYS.
Figure 2-3. Model 5951 Rear Panel ”
2-3
GETTING STARTED
Table 2-l. Supplied Cables
-;
Q
5
3
2
1
1
Model
4801
7051-2
7N%l
7007-2
*
Description
4’ BNC Low Noise
Auriiication
590, 595, 5951
2’ BNC (RG-58) 230-1, 590, 595
lm shielded IEEE-488
IEEE-488 instrument bus
2m shielded IEEE-488 Computer to instruments
Ribbon cable 5951 to 230-l
*Supplied with Model 5951
2.2.3 System Connections NOTE
OUTPUT should be connected to the substrate
Supplied Cables
lhble 2-l summarizes the cables supplied with the Package
82 system along with the application for each cable. Note
that low-noise cables am provided for making co~ections
between the chuck and the CV measurement instruments.
The Model 4801 cables are each four feet long. Be careful
not to use the Model 7051 BNC cables in place of the lownoise cables (Model 48Ol), as doing so will have detrimental effects on your measurements.
Connection Procedure
Use Figures 2-4 and 2-5 as a guide and co~ect the equip-
ment together as follows. Note that the stacked arrangement shown in the figures is recommended, but other
setups can be used, if desired.
NOTE
All equipment should be turned off when making coMections.
contact, and INPUT should be connected to the
gate metallization contact.
3. Connect the Model 5951 To 595 METER INPUT jack to
the Model 595 METER INPUT jack using a Model 4801
cable.
4. Connect the ribbon cable to the Model 5951, and then
connect the opposite end of the cable to the digital I/O
port of the Model 230-l. Both connectors are keyed so
that they can be installed only in one direction.
5. Using a Model 7051 cable, connect the Model 595
METERCOMPLEIEOUTPUTtothe EXTERNALTRIG
GER INPUT jack of the Model 590.
6. Using a second Model 7051 BNC cable, connect the
Model 595 VOLEAGE SOURCE OUTPUT to the OUT
PUT LO of the Model 230-l Voltage Source. In a similar
manner, use a Model 7051 BNC cable to connect the
Model 23&l OUTPUT HI to the EXTERNAL BIAS INPUT of the Model 590 CV Analyzer.
Z Connect the Model 5951 chassis ground post to earth
ground using heavy copper wire.
1. Connect a Model 4801 cable between the Model 590
INPUT jack and the To 590 INPUT jack of the Model
5951 Remote Input Coupler. Co~ect a second Model
4801 between the Model 590 OUTF’UT jack and the ‘ID
590 OUT jack of the Model 5951.
2. Connect the Model 5951 INPUT and OUTPUT jacks to
the chuck test fixture using Model 4801 cables.
2-4
WARNING
The Model 5951 must be connected to earth
grwnd using #l6 AWG or larger wire.
GETTING STARTED
595
CV Meter
590
CV Analyzer
230-l
Voltage Source
Figure 2-4. System Front Panel Connections
voltl3ga sourcs output
Figure 2-5. System Rear Panel Connections
2-5
GETTING SThtlED
2.2.4 IEEE-488 Bus Connections
In order to use the system, the instruments must be connected to one another and the computer using the supplied IEEE-488 cables. Typically the shorter cables will be
used to connect the instruments together, while the longer
cable connects the instrument group to the computer.
Figure 2-6 shows a typical arrangement for IEEE-488 bus
coM&ions.
2.2.5 Remote Coupier Mounting
In many cases, the wafer prober will be located inside a
faraday cage to
remote coupler itself can also be placed inside the cage for
convenience and to minimize cable lengths, assuming, of
course, there is sufficient room.
nkimize noise. In these situations, the
230-l
Voltage !3ams
The coupler can be permanently mounted to the sides or
top of the faraday cage by removing the rubber feet and
using the threaded holes in the bottom case for mounting.
Appropriate mating holes can be drilled in the faraday
cage, and the coupler should be secured to the cage with
16-32 screws of sufficient length.
CAUTION
Be sum that the mounting scmws do not extend
more than Y4” inside the Model 5951 case, or
they may contact the circuit board inside.
Figure 2-7 shows a typical installation for coupler mounting, including suggested cable routing. Note that the
Model 5951 chassis should be grounded to the faraday cage
by connecting a grounding strap or wire between the cage
and the coupler chassis ground binding post.
2-4
7UU7-2 Shiekhi Ca#e pm)
Figure 2-6. System IEEE-468 Connections
TO
Instruments
GETTING STARTEll
5951
Coupler
Probr Fixturm
Figure 2-7. Remote Coupler Mounting
2.3 SYSTEM POWER UP
Line voltage selection, power connections, environmental conditions, and instrument warm-up periods are
covered in the following paragraphs.
2.3.1 Instrument Power Requirements
The Models 2304, 590, and 595 are designed to operate
from 105425V or 2lO-250X 50 or 6OHz AC power sources
(special transformers can be factory installed for 904.W
and 195~235V AC voltage ranges). The factory setting for
each instrument is marked on the rear panel of that particular instrument. The operating voltage for each in&mment is either internally or externally selectable; see the
appropriate instruction manual for details.
CAUTION
Do not attempt to operate an instrument on a
supply voltage outside the aHowed range, or instrument damage may occur.
2.3.2 Power Connections
Each instrument should be connected to a grounded AC
outlet using the supplied AC power cord or the equivalent.
WARNING
Each instrument must be connected to a
grounded outlet using the supplied power cord
in order to ensure continued protection from
possible electric shock. Failure to use a
grounded outlet and a 3-wire power cord may
result in personal injury or death because of
electric shock.
2.3.3 Environmental Conditions
For maximum measurement accuracy, all instruments and
the remote coupler must be operated at an ambient tem-
perature between 0 and 4CPC at a relative humidity less
than 70%, and within *5T of the cable correction temperature.
2-7
GElTING STARTED
2.3.4 Warm Up Period
.
The system can be used immediately when all instruments
are first turned on; however, to achieve rated system accuracy, all instruments should be turned on and allowed
to warm up for at least two hours before use.
2.3.5 Power Up Procedure
Follow the general procedure below to power up the
Package 82 system.
1. Connect the instruments together as outlined in paragraph 2.2.3.
2. Co~ect the instruments to the IEEE-488 bus of the host
?;4puter following the procedure given in paragraph
. . .
3. Turn on the computer and boot up its operating system
in the usual manner. Refer to the computer documentation for complete details for your particular system.
4. Turn on each instrument by pressing in on its liont
panel power switch. Verify that each instrument goes
through its normal power up routine, as described
below.
Model 230-l
1. The instrument first turns on all LEDs ind segments.
2. The software revision level is then displayed as in this
example:
Bl3
3. The unit then displays the primary address:
2. Thh,““‘” then displays the programmed primary
:
IEEE ADDRESS l.5
Verify the address is 15; program it for that value if not.
3. Finally, the unit begins displaying normal readings.
Model 595
1. The instrument first displays the ROM self-test message:
to.
2. The unit then displays normal readings.
3. Press MENU and verify the primary address is 23; set
it to that value if not.
2.3.6 Line Frequency
The Models 230-l and 590 can be operated from either 50
or 6OHz power sources with no further adjustments.
However, for the Model 595 to meet its stated noise
specifications, the unit must be programmed for the line
frequency being used. To set or check the Model 595 line
frequency, proceed as follows:
1. Turn off the Model 595 if it is presently turned on.
2. Press and hold the MENU button and then turn on the
power. Release the MENU button after the display
blanks on power up.
3. Press the MENU button and note .that the frequency
selection prompt is displayed:
IEl.3
4. The unit begins normal display.
Model 590
1. The Model 590 first displays the software revision level
as in this example:
590REVDl3
2-B
Fr - 50
or,
Fr = 60
4. Use one of the ADJUST keys to toggle the unit to the
desired frequency.
5. Press SHIFT EXIT to return to normal operation. Note
that the frequency selection prompt will remain in the
menu until power is removed.
GETTING STARTED
2.4 SOFTWARE CONFIGURATION
The folIowing paragraphs discuss booting up the computer, making backup copies of the Package 82 software,
and loading and initializing the software.
2.4.1 Computer Boot Up
Before you can use the Package 82 software, the computer
must be booted up with the proper operating system software. See paragraph 1.9 for further information on computer requirements.
Turn on the computer and boot up BASIC 4.0 (if the com-
puter has ROM-based BASIC, no initialization is
necessary).
2.4.2 Software Backup
Before using the software, it is strongly recommended that
you make a working copy of the software supplied with
the Package 82. Since the software is not copy protected,
you can use the standard copy commands to duplicate
each diskette. After duplication, put the master diskette
away in a safe place and use only the working copy.
you intend to use. A typical example is:
MASS STORAGE IS “:,700,0“
Place the Package 82 software working disk in the
3.
default drive.
4.
Type in LOAD”PKG82CV” and press the EXEC key.
5.
After the program loads, press the RUN key, or type
in RUN and then press the EXEC key The main menu
shown in Figure 2-8 should appear on the computer
display.
2.4.4 Software Files
Package 82 software files that are included with the
distribution diskette are SulTLznarized in ‘Iable 2-2. Note that
“pkg82cal” is created when cable correction is performed
the first time.
2.5 SOFTWARE OVERVIEW
The main sections of the Package 82 software are discussed
in the following paragraphs. These decriptions follow the
order of the main menu shown in Figure 2-8. For detailed
information on using the software to make measurements
and analyze data, refer to Sections 3 and 4.
Use the COPY command to copy the software diskette.
A typical example is:
COPY “:I-lP9895,700,0” ‘IO “:HP9895,7OO,l”
Here, HP9895 represents the type of disk drive, 700 is the
primary address, and 0
Note that the working diskette should be formatted with
the INITIALIZE command before attempting copying.
and 1 are the disk drive numbers.
2.4.3 Software hitialization
Software initiakation is simply a matter of loading and
running a program as you would any other BASIC program, as outlined below.
1. Boot up or enter BASIC 4.0 in the usual manner.
2. If necessary, assign a mass storage specifier to the drive
2.5.1 System Reset
By selecting option I on the main menu, you can easily
reset the instruments and the software to default conditions. DCL (Device Clear) and IFC (Interface Clear) commands are sent over the bus to return the instruments to
their power-on states and remove any talkers or listeners
from the bus.
2.52 System Characterization
Option 2 on the main menu allows you to perform a
“probes up” characterization of the complete system from
the measuring instruments, through the connecting cables
and remote couple& down to the prober level:Characterization is necessary to null out (G, C#, or G), or remedy
leakage
sent in the system that could affect measurement accuracy;
the procedure also allows you to verify connection
problems.
currents, resistances, and stray capacitance pre-
2-9
GETTING STARTED
f
l * PfICKflGE 82 MAIN MENU **
1. Reset Package 82 CU System
2. Test and Correct for System Leakages and Strays
3. Correct for Cabling Effects
4. Find Dtv~ct Cox and Equilibrium Delay Time
5. Make CV Measurements
6. halyze CU Data
7. Return to BASIC
Enter number to select from menu
Figure.24. Main Menu
There are two important aspects to systemcharackrktion:
1, Quasistatic capacitance (0, high-frequency capacitance
(C,), conductance (G), and Q/t (current) are measured
at a specified bias voltage to determine system contribution of these factors. Ce, CM, and G can be suppressed
in order to maximize accuracy. If abnormally large error terms are noted, the system should be checked for
poor connections or other factors that could lead to large
erms.
2. Q/t vs. V sweeps can be performed to determine the
presence of leakage resistance and extemal le
rent sources. C vs. V sweeps can be done to test
cur-
r the
7
presence of voltage dependent capacitance in the
system.
System checkout should be performed whenever the configuration, step V, or delay time is changed. Probes-up sup
pression should precede every measurement to achiwe
rated accuracy.
2.5.3 Cable Correction
Cable correction can be performed by selecting option 3
on the main menu. Cable correction is necessary to compensate for transmission line effects of the connecting
cables and is essential for maintaining accuracy of highfrequency CV measurements. In order to cable correct the
system, you must connect the Model 5909 Calibration
Sources to the system. Refer to paragraph 3.5 Correcting
for Cabling Rffects.
Included in the cable correction procedure is a gain correction of the Model 595 CV Meter. Cable correction and
gain unmction parameters are automatically stored on disk
during cable correction and are restored when the softwam
is run ini- so that correction need not be performed
each time the system is used. Note, however, that correction should be performed whenever the ambient temperature changes by more than 5OC, or if the system configuration is changed.
240
GETTING STARTED
MOTE
The diskette for storing cable correction parameters
must be in the default drive when correction is
performed.
2.5.4 C, and Delay Time Determination
Option 4 allows you to determine optimum parameters for
measuring the device under test. The key areas of this
characterization process are:
1. A CV sweep of the device is used to find accumulation
and inversion voltages.
2. The device is biased in the accumulation region in order
to determine 6x.
3. The device is biased in inversion to determine Model
595 step time. A test for equilibrium can be performed
by monitoring the decay tune of Q/t to the system
leakage level following a step in DC bias voltage. The
user can also control a light on the device to help achieve
equilibrium.
4. A sweep of C and Q/t vs time delay is performed to
determine optimum delay time.
2.5.5 Device Measu@ment
Option 5 on the main menu allows you to perform a
simultaneous CV sweep on the device under test. As
parameters are measured, the data am stored within an
array for plotting or additional analysis, as required.
The two types of sweeps that can be performed include:
1. Accumulation to inversion: Initially, the device is biased
in accumulation, and the bias voltage is held static until Q/t reaches the system leakage level. The sweep is
then performed and the data are stored in the array.
2. inversion to accumulation: In this case, the device is first
biased in inversion, and the sweep is paused until
equilibrium is reached (when Q/t equals the system
leakage levei) . A submenu option allows you to control
a light within the test fixture (using the Model 5951
digital II0 port) as an aid in attaining the equilibrium
point. The sweep is then completed and the data are
stored in an array for further analysis.
the CRT or plotter, graphical analysis, and loading or storing array data on disk. Note that this option can also be
directly selected from menus providing sweep
measurements without having to go through the main
menu.
2.6 SYSTEM CHECKOUT
Use the basic procedure below to check out the Package
82 to determine if the system is operational. The procedure
requires the use of the Model 5909 Calibration Sources,
which are supplied with the package. Note that this pro-
cedure is not intended as an accuracy check, but is in-
cluded to show that all instruments and the system are
functioning normally.
2.6.1 Checkout Procedure
1. Connect the system together, as discussed in paragraph
2.2.
2. Power up the system using the procedure given in
paragraph 2.3.
3. Boot up the computer and load the Package 82 software,
as covered in paragraph 2.4.
4. Select option 2 on the main menu, and then option 2
on the &bsequent menu. Connect the l&F capacitor
and verify that C, is within 1% of the lkHz capacitor
value, and that Q/t is <IpA. Correct any cabling problems before proceeding.
Select the cable correction option on the main menu.
Ebllow the prompts and connect the Model 5909 Calibra-
tion Sources to the Model 5951 INPUT and OUTPUT
cables using the BNC adapters supplied with the Model
5909.
After correction, return to main menu selection 2, then
select option 2 on the submenu. Connect the 1.8nF
capacitor; verify that C, is within 1% of the lkH2
capacitance, and that CB is within 1% of the ICiXHz or
IMHz value (depending on the selected frequency).
Select option 3 on, the leakage and strays menu.
Turn on the sweep and observe the Model 590 voitage
display. Verify that the bias voltage readings step
thmugh the range of -2V to +2V in XhnV increments.
2.6.2 System lkoubleshooting
2.5.6 Data Analysis and Plotting
Option 6 on the main menu provides a window to a
number of analysis and graphing tools. Key options here
include printing out parameters, graphing array data on
Troubleshoot any system problems using the basic procedure shown in Table 2-3. For information on
troubleshooting individual instruments, refer to the respective instruction manual(s).
2-11
GE-KING STARTED
Table 2-2. Diskette Files
Filename File %e Description
PKG82CV Program
M5!3ocv* Program Model 590 program
M595cv*
P~.D~T Model 595 program
pkg82cal*
*See Appendix for details on these programs.
“this file is created/updated when cable correction is per-
formed.
Table 2-3. System liwbleshooting Summary
Symptom
No instrument responds over bus.
One instrument fails to respond.
Improper low-frequency measurements.
Improper high-frequency measurements.
5951 does not change frequency.
No DC bias applied to device.
Excessive leakage current.
Rrratic readings.
590 readings not triggered.
Probes up Q/t vs V improper.
Probes up c -3s v improper.
Main Package 82 program
Cable correction constants
Possible Cause(s)
Units not connected to controller, controller
defective.’
Unit not connected to bus, improper
primary address, unit defective.
595 not connected properly, 595 defective.
590 not connected properly ribbon cable
not cormected, 590 defective.
Ribbon cable not connected, 5951 or 230-l
defective, loose ribbon cable connection.
595 or 230-l not connected properly, 595 or
2304 defective.
Wrong cables used, dirty jacks, test fixture
contamination.
EMI interference, poor connections.
595 to 590 trigger cable not connected.
External leakage current present.
Eternal voltage-dependent capacitance
2-12
Cable correction impossible.
Reading dynamic range insufficient.
Ezt&bles used, 590 defective.
Connecting cables too long, excessive fixture capacitance.
*If using an IBM AT with the Language Processor Card, you can check to see if the card is
functioning by using the procedure covered in paragraph 2.7.6.
GETTING STARTED
2.7 USlNG THE PACKAGE 82 WITH THE
IBM AT
The Package 82 can be used with IBM AT computers (and
some compatibles such as the HP Vectra) that are equipped with the HP 8232lA Language Processor Card. The
HP BASIC 5.0 ROM must be installed on the processor card
in order to support the Package 82 software. Note that an
EGA monitor is recommended (a monochrome monitor
will work, but displayed graphs will be somewhat small).
The following paragraphs give a brief overview of hardware and software installation, configuration file, and
methods to change the print path to support a parallel or
serial printer. Refer to the documentation supplied with
the processor card, BASIC ROM, and programming
language for detailed information.
2.7.1 Installation
IbIlow the overall procedure below to install the hardware
and software.
1.
Install the HP BASIC ROM on the processor card, as
discussed in the HP BASIC ROM Installation Instructions. Be sure to place the ROM jumper in the RUM
IN position.
2.
Install the processor card in the IBM Al’ computer, as
discussed in the Language Processor Instructions.
3.
Connect the IEEE-488 bus of the Package 82 instruments
to the I-IPlB connector of the processor card. See paragraph 2.2.4 of this instruction manual for more information on IEEE-488 bus connections.
4.
Boot up the IBM AT computer with MS-DOS.
5.
Install the BASIC Language software, as discussed in
the HP BASIC ROM Installation hstructions.
2.7.3 Configuration File Modification
The configuration file, HPW.CON, must be modified to
redefine the display mode1 type to combined alphal
graphics for use with the Package 82. To do so, run the
CONFXXE utility from MS-DOS, and change the machine
type to “9816 combined”, Save the new configuration before
exiting the CONEEXE utility. Remember that the
I-IPW.CON file must be in the directory of the disk you
use to BOOT the system.
2.7.4 Booting the System
Use the appropriate procedure below to boot BASIC and
load the Package 82 software. These procedures assume
that you have followed the software installation instruc-
tions given in the HP BASIC ROM Installation Instructions.
Hard Disk System Boot-up
The procedure below assumes that drive C is your hard
disk, and that you have created a directory called HPW
as part of the installation procedure. All pertinent HP files
must exist under the HPW directory.
1.
Type the following:
C: <Enter>
CD \HPW <Enter>
2.
If you have.not already done do, copy the Package 82
soflwanzintotheI-IPWdirectorybyusingtheHPWUTIL
utility program supplied with HP BASIC. Select the LIP
to HPW option for copying for master disks, or use
HPW to I-IPW copy for working disks copied with
HPUTIL utility.
3.
After the disk has been copied, boot the system by typing the following:
2.7.2 Software Backup
Before using the Package 82 software, it is strongly recommended that you make working copies of the supplied
disks, and use only the working disks on a day-to-day
basis. To do so, perform an LIFto-HPW copy using the
HPWUTIL utility supplied with the HP BASIC package.
Note that disks copied to the HPW format can only be used
on MS-DOS drives along with the HP BASIC system; these
copies cannot be used on HP Series 200 or 300 drives.
BOOT e Enter >
4.
After the boot-up sequence has finished, type the
following to enter BASIC:
HPBASIC <Enter >
5.
Load the Package 82 software as follows:
LOAD ‘TKG82CV” <Enter >
(Or use ‘M59OCV or ‘M595CV filenames for those
Programs).
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GE-KING STARTED
6. RUN the program in the usual manner. Refer to the remainder of Section 2, as well as Sections 3 and 4 for
detailed operation information.
Flexible Disk System Boot-up
1. Place the HP BASIC working disk into the default drive,
and type the following:
BOOT <Enter >
2. After the boot-up procedure, enter the following:
HPBASIC <Enter >
3. Place the Package 82 working disk in the default drive,
and type the following:
LOAD “PKG82CV” <Enter>
(Or use “M59OCV” or “M595CV” filenames for those
Programs.)
4. RUN the
3, and 4 or detailed operation information.
rogram in the usual manner. See Sections 2,
4
2.7.5 Modifying the Print Path
As supplied, the Package 82 software supports a printer
connected to the HP-IB bus with a primary address of 1.
The program must be modified to support printers con-
nected to the parallel or serial ports of the IBM AT’ as
outlined below. Note that such printers must emulate HP
Think Jet bit-mapped graphics in order to properly display
graphs generated by the Package 82.
1. Boot up HP BASIC and the ‘PKG82CV” (or “M59OCV’
or “M595CV”) programs, as described above.
2.Type the following in order to locate the Printpath
variable in the program:
Printpath = 26
For the serial port (COMl), modify the Printpath as
follows:
Printpath = 9
(Note: It may also be necessary to modify the configuration file for oroner serial sort oneration. See the HP
BASIC La&rag; Programmer’s Reference Guide.)
Save the modified program under a convenient name.
4.
Use the modified program in order to support the
parallel or serial printers.
2.7.6 Operational Check
After software and hardware installation, the procedure
below can be used to determine if the language processor
card is properly communicating with the instruments.
1. Connect the instruments to the IEEE-488 connector on
the back of the IBM AT computer.
2. Turn on the computer, boot MS-DOS, then boot up HP
BASIC, as described in paragraph 2.7.4.
3. Turn on the instruments; make sure they go through
their normal power-up cycles, and that the primary addresses of the instruments are set to their default values
(2304 X3; 590, W; 595,28). If not, set or program the primary address to the correct value(s).
4. .From the HP BASIC direct mode, type in the following
command, and verify that the Model 230-1 displays XJVz
OUTPUT 7X3 ; ‘VIOXfl <Enter>
5. Type in the following, and note that the Model 590 goes
into the autorange mode:
OUTPUT 7.5; ‘W <Enter>
6. Type in the following, and verify that the Model 595
changes to the current function:
FIND ‘l%ntpatW <Enter>
3. When the computer displays the line in which Printpath
is defined, modify the variable as follows (for the parallel
Dolt. ml:
L .
I
2-14
OUTPUT 728 ; ‘TW <Enter>
SECTION 3
s
Measurement
3.1 INTRODUCTION
This section gives detailed information on using the
Package 82 Software to acquire CV data and is organized
as follows:
3.2
Measurement Sequence: Outlines the basic
measurement sequence that should be followed to
ensure accurate measurements and analysis.
33
System Reseh Describes how to reset the instruments
in the system.
3.4
Testing and Correcting for System Leakages and
Strays: Describes the procedure to test the complete
system for the presence of unwanted characteristics
such as leakage resistance, current, and capacitance.
35
Correcting for Cabling Pffecta: Details cable correction that must be used in order to ensure accuracy
of high-frequency CV measurements.
3.6
Finding Device Oxide Capacitance and Equilibrium
Delay The: Covers the procedures necessary to
determine Cax and optimum delay time to attain
device equilibrium.
3.7
Making CV Measurements: Describes in detail the
procedures necessary to measure the device under
test and store the resulting data in arrays.
38
Light Connections: Discusses connection of a light
to the system as an aid in attaining device
equilibrium.
3.9
Measurement Considerations: Outlines numerous
factors that should be taken into account in order to
maximize measurement accuracy and minimke er-
rors in analysis.
The measurements must be carried out in the proper sequence in order to ensure that the system is optimized and
ermrtermsare minimized. The basic sequence is outlined
below; Figure 3-l is a flowchart of the sequence.
0
No
rv
Figure 3-1. Measurement Sequence
N6W
Device ?
Yes
Perform
Sweep
Analyze
cv
Data
End
3-l
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