Tektronix Keithley S470 Parametric Test System User's Manual Rev A User manual

S470 Parametric Test System

User’s Manual

S470-900-01 Rev. A / August 2004

www.keithley.com

A GREATER MEASURE OF CONFIDENCE

WARRANTY

S350, S400, S600, & S900 Warranty
Hardware

Keithley Instruments, Inc. warrants that for a period of one (1) year (from the date of shipment) the Keithley manufactured portion or the “Keithley Hard­ware” product will be free from defects in materials or workmanship; provided that such defect has not been caused by use of the Keithley Hardware
which is not in accordance with the instructions therefore. This warranty shall be nu ll and void upon: (1) any modification of Keithley Hardware which is
made by other than Keithley and not approved in writing by Keithley or (2) operation of the Keithley Hardware outside of the environmental specifica­tions therefore.

If Keithley receives notification of a defec t in the Keithl ey Hardware which is covered by this warranty during the warranty period, Keithley will,
at its option, either repair or replace such Keithley Hardware. During the first ninety days of the warranty period, Keithley will, at its option, sup­ply the necessary on-site labor to return the product to the condition prior to the notification of a defect. Failure to notify Keithley of a defect dur­ing the warranty shall relieve Keithley of its obligations and liabilities under this warranty.

The portion of the product which is not manufactured by Keithley (the “Other Hardware”) shall not be covered by this warranty, and Keithley
shall have no duty of obligation to enforce any manufacturers’ warranties on behalf of the customer.

Software

Keithley warrants that for a period of one (1) year (from the date of sh ipment) the Keit hley produced portion of the softwar e or firmware (the “Keithley
Software”) will conform in all material respects with the published specifications; provided such Keithley Software is used on the product for which it
is intended and otherwise in accordance with the instructions therefore. Keithley does not warrant that operation of the Keithley Software will be unin­terrupted or error-free and/or that the Keithley Software will be adequate for the customer’s intended application and/or use. This warranty shall be null
and void upon any modification of the Keithley Software which is made by other than Keithley and not approved in writing by Keithley.

If Keithley receives notification of a Keithley Software nonconformity which is covered by this warranty during the warranty period, Keithley
will review the conditions described in such notice. Such notice must state the published specification(s) to which the Keithley Software fails to
conform and the manner in which the Keithley Software fails to conform to such published specification(s) with sufficient specificity to permit
Keithley to correct such nonconformity. If Keithley determines that the Keithley Software does not conform with the published specifications,
Keithley will, at its option, provide either the programming services necessary to correct such nonconformity or develop a program change to
bypass such nonconformity in the Keithley Software. Failure to notify Keithley of a nonconformity during the warranty shall relieve Keithley of
its obligations and liabilities under this warranty .

OEM software which is not produced by Keithley (the “Other Software”) shall not be covered by this warranty and Keithley shall have no duty or
obligation to enforce any OEM’s warranties on behalf of the customer.

Disclaimer of Warranties

EXCEPT FOR THE EXPRESS WARRANTIES ABOVE KEITHLEY DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR IMPLIED,
INCLUDING WITHOUT LIMITATION, ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR
PURPOSE. KEITHLEY DISCLAIMS ALL WARRANTIES WITH RESPECT TO THE OTHER HARDWARE AND OTHER SOFTWARE.

Limitation of Liability

KEITHLEY INSTRUMENTS SHALL IN NO EVENT , REGARDLESS OF CAUSE, ASSUME RESPONSIBILITY FOR OR BE LIABLE FOR: (1)
ECONOMICAL, INCIDENTAL, CONSEQUENTIAL, INDIRECT, SPECIAL, PUNITIVE OR EXEMPLARY DAMAGES, WHETHER
CLAIMED UNDER CONTRACT, TORT OR ANY OTHER LEGAL THEORY, (2) LOSS OF OR DAMAGE TO THE CUSTOMER’S DATA OR
PROGRAMMING, OR (3) PENALTIES OR PENALTY CLAUSES OF ANY DESCRIPTION OR INDEMNIFICATION OF THE CUSTOMER OR
OTHERS FOR COSTS, DAMAGES, OR EXPENSES RELATED TO THE GOODS OR SERVICES PROVIDED UNDER THIS WARRANTY.

A G R E A T E R M E A S U R E O F C O N F I D E N C E

Keithley Instruments, Inc.

Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: [phone] • 1-888-KEITHLEY (534-8453) • www.keithley.com

Belgium: Sint-Pieters-Leeuw • 02-363 00 40 • Fax: [phone] • www.keithley.nl Italy: Milano • 02-48 39 16 01 • Fax: [phone] • www.keithley.it

China: Beijing • 8610-82251886 • Fax: [phone] • www.keithley.com.cn Japan: Tokyo • 81-3-5733-7555 • Fax: [phone] • www.keithley.jp

Finland: Helsinki • 09-5306-6560 • Fax: [phone] • www.keithley.com Korea: Seoul • 82-2-574-7778 • Fax: [phone] • www.keithley.com

France: Saint-Aubin • 01-64 53 20 20 • Fax: [phone] • www.keithley.fr Netherlands: Gorinchem • 0183-635333 • Fax: [phone] • www.keithley.nl

Germany: Germering • 089/84 93 07-40 • Fax: [phone] • www.keithley.de Singapore: Singapore • 65-6747-9077 • Fax: [phone] • www.keithley.com

Great Britain: Theale • 0118 929 7500 • Fax: [phone] • www.keithley.co.uk Sweden: Solna • 08-509 04 600 • Fax: [phone] • www.keithley.com

India: Bangalore • 91-80 2212 8027 • Fax: [phone] • www.keithley.com Tai wa n : Hsinchu • 886-3-572-9077 • Fax: [phone] • www.keithley.com.tw

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3/04

S470

Parametric Test System

User’s Manual

©2004, Keithley Instruments, Inc.

All rights reserved.

Cleveland, Ohio, U.S.A.

First Printing, August 2004

Document Number: S470-900-01 Rev. A

Manual Print History

The print history shown below lists the printing dates of all Revisions and Addenda created for this manual. The Revision
Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between Revi­sions, contain important change information that the user should incorporate immediately into the manual. Addenda are num­bered sequentially. When a new Revision is created, all Addenda associated with the previous Revision of the manual are
incorporated into the new Revision of the manual. Each new Revision includes a revised copy of this print history page.

Revision A (Document Number S470-900-01).................................................................................... August 2004

All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc.
Other brand and product names are trademarks or registered trademarks of their respective holders.

Safety Precautions

The following safety precautions should be observed before using
this product and any associated instrumentation. Although some in­struments and accessories would normally be used with non-haz­ardous voltages, there are situations where hazardous conditions
may be present.

This product is intended for use by qualified personnel who recog­nize shock hazards and are familiar with the safety precautions re­quired to avoid possible injury. Read the operating information
carefully before using the product.

The types of product users are:
Responsible body is the individual or group responsible for the use

and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for en­suring that operators are adequately trained.

Operators use the product for its intended function. They must be
trained in electrical safety procedures and proper use of the instru­ment. They must be protected from electri c s hock and contact with
hazardous live circuits.

Maintenance personnel perform routine procedures on the product
to keep it operating, for example, setting the line voltage or replac­ing consumable materials. Maintenance procedures are described in
the manual. The procedures explicitly state if the operator may per­form them. Otherwise, they should be performed only by service
personnel.

Service personnel are trained to work on live circuits, and perform
safe installations and repairs of products. Only properly trained ser­vice personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that
are rated Installation Category I and Installation Category II, as de­scribed in the International Electrotechnical Commission (IEC)
Standard IEC 60664. Most measurement, control, and data I/O sig­nals are Installation Category I and must not be directly connected
to mains voltage or to voltage sources with high transient over­voltages. Installation Category II connections require protection
for high transient over-voltages often associated with local AC
mains connections. The user should assume all measurement, con­trol, and data I/O connections are for connection to Category I
sources unless otherwise marked or described in the Manual.

Exercise extreme caution when a shock hazard is present. Lethal
voltage may be present on cable connector jacks or test fixtures.
The American National Standards Institute (ANSI) states that a
shock hazard exists when voltage levels greater than 30V RMS,

42.4V peak, or 60VDC are present. A good safety practice is to ex-

pect that hazardous voltage is present in any unknown circuit
before measuring.

Users of this product must be protected from electric shock at all
times. The responsible body must ensure that users are prevented
access and/or insulated from every connection point. In some cases,
connections must be exposed to potential human contact. Product
users in these circumstances must be trained to protect themselves
from the risk of electric shock. If the circuit is capable of operating
at or above 1000 volts, no conductive part of the circuit may be

exposed.

Do not connect switching cards directly to unlimited power circuits.
They are intended to be used with impedance limited sources.
NEVER connect switching cards directly to AC mains. When con­necting sources to switching cards, install protective devices to lim­it fault current and voltage to the card.

Before operating an instrument, make sure the line cord is connect­ed to a properly grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks
before each use.

When installing equipment where access to the main power cord is
restricted, such as rack mounting, a separate main input power dis­connect device must be provided, in close proximity to the equip­ment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any
other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge
any capacitors before: connecting or disconnecting cables or jump­ers, installing or removing switching cards, or making internal
changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the
common side of the circuit under test or power line (earth) ground.
Always make measurements with dry hands while standing on a
dry, insulated surface capable of withstanding the voltage being
measured.

The instrument and accessories must be us ed in accordanc e with its
specifications and operating instructions or the safety of the equip­ment may be impaired.

WARNING

Do not exceed the maximum signal levels of the instruments and
accessories, as defined in the specifications and operating informa­tion, and as shown on the instrument or test fixture panels, or
switching card.

When fuses are used in a product, replace with same type and rating
for continued protection against fire hazard.

Chassis connections must only be used as shield connections for
measuring circuits, NOT as safety earth ground connections.

If you are using a test fixture, keep the lid closed while power is ap­plied to the device under test. Safe operation requires the use of a
lid interlock.

If a screw is present, connect it to safety earth ground using the
wire recommended in the user documentation.

!

The symbol indicates that the user should refer to the operat­ing instructions located in the manual.

The symbol indicates that voltage levels greater than 30V
RMS, 42.4V peak, or 60VDC are present. Use standard safety pre­cautions to avoid personal contact with these voltages.

The WARNING heading in a manual explains dangers that might
result in personal injury or death. Always read the associated infor­mation very carefully before performing the indicated procedure.

!

NO FOOT ON

THIS SIDE

WARNING!

FOOT

FOOT

DO NOT SWING TEST HEAD TO POSI-

TION INDICATED. UNIT COULD TOPPLE.

NO FOOT ON

THIS SIDE

WARNING

Hazardous voltage.

No internal operator
serviceable parts.

Service by qualified
personnel following proper
safety procedures only.

HAZARDOUS VOLTAGES
COULD BE PRESENT
WHEN INTERLOCKS
ARE DEFEATED.

!

WARNING

PINCH POINT

KEEP HANDS AND FINGERS

AWAY FROM THIS AREA

CAN CAUSE PINCH INJURY

The CAUTION heading in a manual explains hazards that could
result in minor injury or damage the instrument. Such damage may
invalidate the warranty.

The ATTENTION heading in a manual explains hazards that could
damage the instrument. Such damage may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and
all test cables.

To maintain protection from electric shock and fire, replacement
components in mains circuits, including the power transformer , test
leads, and input jacks, must be purchased from Keithley Instru­ments. Standard fuses, with applicable national safety approvals,
may be used if the rating and type are the same. Other components
that are not safety related may be purchased from other suppliers as
long as they are equivalent to the original component. (Note that se­lected parts should be purchased only through Keithley Instruments
to maintain accuracy and functionality of the product.) If you are
unsure about the applicability of a replacement component, call a
Keithley Instruments office for information.

To clean the instrument, use a damp cloth or mild, water based
cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill
on the instrument.

5/01

1 Introduction

Introduction and system description .................................................................................................................. 1-2

Standard configuration ............................................................................................................................... 1-2

Available options ....................................................................................................................................... 1-3

Additional software options ....................................................................................................................... 1-3

Instrument descriptions .............................................................................................................................. 1-3

RF hardware/software option ..................................................................................................................... 1-4

Other documentation .......................................................................................................................................... 1-5

2 Operation

Operation ............................................................................................................................................................ 2-2

Control locations ........................................................................................................................................ 2-2

Grounding (protective earthing) ................................................................................................................. 2-2

System operation ................................................................................................................................................ 2-3

Operation procedure ................................................................................................................................... 2-3

Restarting after a loss of line voltage ......................................................................................................... 2-3

Turning system off ..................................................................................................................................... 2-3

Optional remote EMO Emergency Off switches ....................................................................................... 2-4

VME controls ..................................................................................................................................................... 2-4

Executing a cassette plan ................................................................................................................................... 2-5

Table of Contents

i

ii

List of Illustrations

2 Operation

Figure 2-1 Model 9203-CPA front panel controls and indicators ............................................................................... 2-2

Figure 2-2 S400 Series Keithley Tool Pallet ............................................................................................................... 2-5

iii