S470 Parametric Test System
User’s Manual
S470-900-01 Rev. A / August 2004
www.keithley.com
A GREATER MEASURE OF CONFIDENCE
WARRANTY
S350, S400, S600, & S900 Warranty
Hardware
Keithley Instruments, Inc. warrants that for a period of one (1) year (from the date of shipment) the Keithley manufactured portion or the “Keithley Hardware” product will be free from defects in materials or workmanship; provided that such defect has not been caused by use of the Keithley Hardware
which is not in accordance with the instructions therefore. This warranty shall be nu ll and void upon: (1) any modification of Keithley Hardware which is
made by other than Keithley and not approved in writing by Keithley or (2) operation of the Keithley Hardware outside of the environmental specifications therefore.
If Keithley receives notification of a defec t in the Keithl ey Hardware which is covered by this warranty during the warranty period, Keithley will,
at its option, either repair or replace such Keithley Hardware. During the first ninety days of the warranty period, Keithley will, at its option, supply the necessary on-site labor to return the product to the condition prior to the notification of a defect. Failure to notify Keithley of a defect during the warranty shall relieve Keithley of its obligations and liabilities under this warranty.
The portion of the product which is not manufactured by Keithley (the “Other Hardware”) shall not be covered by this warranty, and Keithley
shall have no duty of obligation to enforce any manufacturers’ warranties on behalf of the customer.
Software
Keithley warrants that for a period of one (1) year (from the date of sh ipment) the Keit hley produced portion of the softwar e or firmware (the “Keithley
Software”) will conform in all material respects with the published specifications; provided such Keithley Software is used on the product for which it
is intended and otherwise in accordance with the instructions therefore. Keithley does not warrant that operation of the Keithley Software will be uninterrupted or error-free and/or that the Keithley Software will be adequate for the customer’s intended application and/or use. This warranty shall be null
and void upon any modification of the Keithley Software which is made by other than Keithley and not approved in writing by Keithley.
If Keithley receives notification of a Keithley Software nonconformity which is covered by this warranty during the warranty period, Keithley
will review the conditions described in such notice. Such notice must state the published specification(s) to which the Keithley Software fails to
conform and the manner in which the Keithley Software fails to conform to such published specification(s) with sufficient specificity to permit
Keithley to correct such nonconformity. If Keithley determines that the Keithley Software does not conform with the published specifications,
Keithley will, at its option, provide either the programming services necessary to correct such nonconformity or develop a program change to
bypass such nonconformity in the Keithley Software. Failure to notify Keithley of a nonconformity during the warranty shall relieve Keithley of
its obligations and liabilities under this warranty .
OEM software which is not produced by Keithley (the “Other Software”) shall not be covered by this warranty and Keithley shall have no duty or
obligation to enforce any OEM’s warranties on behalf of the customer.
Disclaimer of Warranties
EXCEPT FOR THE EXPRESS WARRANTIES ABOVE KEITHLEY DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR IMPLIED,
INCLUDING WITHOUT LIMITATION, ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR
PURPOSE. KEITHLEY DISCLAIMS ALL WARRANTIES WITH RESPECT TO THE OTHER HARDWARE AND OTHER SOFTWARE.
Limitation of Liability
KEITHLEY INSTRUMENTS SHALL IN NO EVENT , REGARDLESS OF CAUSE, ASSUME RESPONSIBILITY FOR OR BE LIABLE FOR: (1)
ECONOMICAL, INCIDENTAL, CONSEQUENTIAL, INDIRECT, SPECIAL, PUNITIVE OR EXEMPLARY DAMAGES, WHETHER
CLAIMED UNDER CONTRACT, TORT OR ANY OTHER LEGAL THEORY, (2) LOSS OF OR DAMAGE TO THE CUSTOMER’S DATA OR
PROGRAMMING, OR (3) PENALTIES OR PENALTY CLAUSES OF ANY DESCRIPTION OR INDEMNIFICATION OF THE CUSTOMER OR
OTHERS FOR COSTS, DAMAGES, OR EXPENSES RELATED TO THE GOODS OR SERVICES PROVIDED UNDER THIS WARRANTY.
A G R E A T E R M E A S U R E O F C O N F I D E N C E
Keithley Instruments, Inc.
Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY (534-8453) • www.keithley.com
Belgium: Sint-Pieters-Leeuw • 02-363 00 40 • Fax: 02-363 00 64 • www.keithley.nl Italy: Milano • 02-48 39 16 01 • Fax: 02- 48 39 16 28 • www.keithley.it
China: Beijing • 8610-82251886 • Fax: 8610-82251892 • www.keithley.com.cn Japan: Tokyo • 81-3-5733-7555 • Fax: 81-3-5733-7556 • www.keithley.jp
Finland: Helsinki • 09-5306-6560 • Fax: 09-5306-6565 • www.keithley.com Korea: Seoul • 82-2-574-7778 • Fax: 82-2-574-7838 • www.keithley.com
France: Saint-Aubin • 01-64 53 20 20 • Fax: 01-60 11 77 26 • www.keithley.fr Netherlands: Gorinchem • 0183-635333 • Fax: 0183-630821 • www.keithley.nl
Germany: Germering • 089/84 93 07-40 • Fax: 089/84 93 07-34 • www.keithley.de Singapore: Singapore • 65-6747-9077 • Fax: 65-6747-2991 • www.keithley.com
Great Britain: Theale • 0118 929 7500 • Fax: 0118 929 7519 • www.keithley.co.uk Sweden: Solna • 08-509 04 600 • Fax: 08-655 26 10 • www.keithley.com
India: Bangalore • 91-80 2212 8027 • Fax: 91-80 2212 8005 • www.keithley.com Tai wa n : Hsinchu • 886-3-572-9077 • Fax: 886-3-572-9031 • www.keithley.com.tw
.
3/04
S470
Parametric Test System
User’s Manual
©2004, Keithley Instruments, Inc.
All rights reserved.
Cleveland, Ohio, U.S.A.
First Printing, August 2004
Document Number: S470-900-01 Rev. A
Manual Print History
The print history shown below lists the printing dates of all Revisions and Addenda created for this manual. The Revision
Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between Revisions, contain important change information that the user should incorporate immediately into the manual. Addenda are numbered sequentially. When a new Revision is created, all Addenda associated with the previous Revision of the manual are
incorporated into the new Revision of the manual. Each new Revision includes a revised copy of this print history page.
Revision A (Document Number S470-900-01).................................................................................... August 2004
All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc.
Other brand and product names are trademarks or registered trademarks of their respective holders.
Safety Precautions
The following safety precautions should be observed before using
this product and any associated instrumentation. Although some instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions
may be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read the operating information
carefully before using the product.
The types of product users are:
Responsible body is the individual or group responsible for the use
and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be
trained in electrical safety procedures and proper use of the instrument. They must be protected from electri c s hock and contact with
hazardous live circuits.
Maintenance personnel perform routine procedures on the product
to keep it operating, for example, setting the line voltage or replacing consumable materials. Maintenance procedures are described in
the manual. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service
personnel.
Service personnel are trained to work on live circuits, and perform
safe installations and repairs of products. Only properly trained service personnel may perform installation and service procedures.
Keithley products are designed for use with electrical signals that
are rated Installation Category I and Installation Category II, as described in the International Electrotechnical Commission (IEC)
Standard IEC 60664. Most measurement, control, and data I/O signals are Installation Category I and must not be directly connected
to mains voltage or to voltage sources with high transient overvoltages. Installation Category II connections require protection
for high transient over-voltages often associated with local AC
mains connections. The user should assume all measurement, control, and data I/O connections are for connection to Category I
sources unless otherwise marked or described in the Manual.
Exercise extreme caution when a shock hazard is present. Lethal
voltage may be present on cable connector jacks or test fixtures.
The American National Standards Institute (ANSI) states that a
shock hazard exists when voltage levels greater than 30V RMS,
42.4V peak, or 60VDC are present. A good safety practice is to ex-
pect that hazardous voltage is present in any unknown circuit
before measuring.
Users of this product must be protected from electric shock at all
times. The responsible body must ensure that users are prevented
access and/or insulated from every connection point. In some cases,
connections must be exposed to potential human contact. Product
users in these circumstances must be trained to protect themselves
from the risk of electric shock. If the circuit is capable of operating
at or above 1000 volts, no conductive part of the circuit may be
exposed.
Do not connect switching cards directly to unlimited power circuits.
They are intended to be used with impedance limited sources.
NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.
Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks
before each use.
When installing equipment where access to the main power cord is
restricted, such as rack mounting, a separate main input power disconnect device must be provided, in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any
other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge
any capacitors before: connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal
changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the
common side of the circuit under test or power line (earth) ground.
Always make measurements with dry hands while standing on a
dry, insulated surface capable of withstanding the voltage being
measured.
The instrument and accessories must be us ed in accordanc e with its
specifications and operating instructions or the safety of the equipment may be impaired.
WARNING
Do not exceed the maximum signal levels of the instruments and
accessories, as defined in the specifications and operating information, and as shown on the instrument or test fixture panels, or
switching card.
When fuses are used in a product, replace with same type and rating
for continued protection against fire hazard.
Chassis connections must only be used as shield connections for
measuring circuits, NOT as safety earth ground connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a
lid interlock.
If a screw is present, connect it to safety earth ground using the
wire recommended in the user documentation.
!
The symbol indicates that the user should refer to the operating instructions located in the manual.
The symbol indicates that voltage levels greater than 30V
RMS, 42.4V peak, or 60VDC are present. Use standard safety precautions to avoid personal contact with these voltages.
The WARNING heading in a manual explains dangers that might
result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.
!
NO FOOT ON
THIS SIDE
WARNING!
FOOT
FOOT
DO NOT SWING TEST HEAD TO POSI-
TION INDICATED. UNIT COULD TOPPLE.
NO FOOT ON
THIS SIDE
WARNING
Hazardous voltage.
No internal operator
serviceable parts.
Service by qualified
personnel following proper
safety procedures only.
HAZARDOUS VOLTAGES
COULD BE PRESENT
WHEN INTERLOCKS
ARE DEFEATED.
!
WARNING
PINCH POINT
KEEP HANDS AND FINGERS
AWAY FROM THIS AREA
CAN CAUSE PINCH INJURY
The CAUTION heading in a manual explains hazards that could
result in minor injury or damage the instrument. Such damage may
invalidate the warranty.
The ATTENTION heading in a manual explains hazards that could
damage the instrument. Such damage may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and
all test cables.
To maintain protection from electric shock and fire, replacement
components in mains circuits, including the power transformer , test
leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses, with applicable national safety approvals,
may be used if the rating and type are the same. Other components
that are not safety related may be purchased from other suppliers as
long as they are equivalent to the original component. (Note that selected parts should be purchased only through Keithley Instruments
to maintain accuracy and functionality of the product.) If you are
unsure about the applicability of a replacement component, call a
Keithley Instruments office for information.
To clean the instrument, use a damp cloth or mild, water based
cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill
on the instrument.
5/01
1 Introduction
Introduction and system description .................................................................................................................. 1-2
Standard configuration ............................................................................................................................... 1-2
Available options ....................................................................................................................................... 1-3
Additional software options ....................................................................................................................... 1-3
Instrument descriptions .............................................................................................................................. 1-3
RF hardware/software option ..................................................................................................................... 1-4
Other documentation .......................................................................................................................................... 1-5
2 Operation
Operation ............................................................................................................................................................ 2-2
Control locations ........................................................................................................................................ 2-2
Grounding (protective earthing) ................................................................................................................. 2-2
System operation ................................................................................................................................................ 2-3
Operation procedure ................................................................................................................................... 2-3
Restarting after a loss of line voltage ......................................................................................................... 2-3
Turning system off ..................................................................................................................................... 2-3
Optional remote EMO Emergency Off switches ....................................................................................... 2-4
VME controls ..................................................................................................................................................... 2-4
Executing a cassette plan ................................................................................................................................... 2-5
Table of Contents
i
ii
List of Illustrations
2 Operation
Figure 2-1 Model 9203-CPA front panel controls and indicators ............................................................................... 2-2
Figure 2-2 S400 Series Keithley Tool Pallet ............................................................................................................... 2-5
iii
iv
List of Tables
1Introduction
Table 1-1 Standard S470 system configuration ........................................................................................................ 1-2
Table 1-2 S470 options .............................................................................................................................................. 1-3
Table 1-3 Instrument descriptions ............................................................................................................................. 1-3
v
vi
1
Introduction
1-2 Introduction S470 User’s manual
Introduction and system description
This manual provides a description of S470 system operation and use. The S470 system provides complete parametric test capabilities optimized for the 130nm node. This parametric test
solution is designed for use in both technology development and production process monitoring.
The S470 system offers all tools needed for DC and RF parametric testing such as:
• 130nm CMOS processes on 200mm wafers (optional)
• analog bipolar
• automotive
• GaAs
• telecom
• LCD devices
With the S470 system’s current measurement resolution and magnitude (up to 2A), it is able to
test most common ICs. The S470 system combines powerful software tools for test code development and modification, wide measurement ranges, high throughput, exceptional measurement
integrity, and advanced data analysis tools to provide a complete parametric test solution. (The
S470 system is based on the flexible UNIX platform.) System upgradeability handles new measurement needs, including RF S-parameter measurements at up to 40GHz.
Standard configuration
Refer to Table 1-1 for standard S470 system configuration.
Table 1 - 1
Standard S470 system configuration
Description Qty
DC Source-Measure Units (SMU) 4
100kHZ capacitance/conductance meter 1
10fA picoammeter 1
24-pin system 1
Switch matrix 1
Probe card adapter 1
Unix controller with:
-19-inch monitor
-Solaris operating system
-C language compiler
-KTE v5.1.1
-Measurement libraries (CMOS and BiCMOS)
1
S470 User’s manual Introduction 1-3
Available options
Refer to Table 1-2 for available S470 system options.
Table 1 - 2
S470 options
Description Qty
DC Source-Measure Units Additional 4
1MHz capacitance or multi-frequency meter (for advanced
dielectrics)
Micro-voltmeter (for Cu measurements) 1
Pulse generators 1
Frequency counter 1
Spectrum analyzer 1
1
Additional software options
Software options are available dependent on configuration required include:
• Adaptive test option—Automates first-level process diagnostics
• SECS/GEM option for 200mm—Integrated factory automation
• T esting at up to 40GHz with RF Option—RF as easy as DC (see “RF hardware/software
option” on page 1-4 for additional information)
Instrument descriptions
Table 1-3 contains descriptions of the available instruments with the S470 system.
NOTE Not all instruments listed in Table 1-3 are contained in standard S470
system configurations.
1-4 Introduction S470 User’s manual
Table 1 - 3
Instrument descriptions
Description Specification
DC capability (up to eight
SMUs)
Capacitance/conductance
meter
RF option • 40GHz (non-extrapolated)
Micro-voltmeter option • 100nV resolution using Keithley 2001 DMM
Medium current voltage source
option
Multi-frequency capacitance
meter option
Spectrum analyzer option • 9khz–1Ghz frequency range
Frequency counter option • 1MHz–30MHz measurement range (AC coupled)
Pulse generator option • 50ns–999 ms pul se width
Standard reference unit • NIST-traceable calibration
Switching matrix
(24 pins standard)
Probe card • Standard Kelvin probe card adapter
• 10fA and 15µV measurement resolution
• 2A and 200 V maximum output
• All channels Kelvin and fully guarded to probe tip
• 10fF–1nF measurement range
• 100kHz frequency, 45mV AC bias
• Uses standard production prober
• Voltage pulses down to 20µS
• Measure current up to 2A maximum
• 1pF–100nF measurement range
• 1kHz, 10kHz, 100kHz, and 1MHz
frequencies
• <100mV noise level (typical)
• 20ns–200ms fall/rise time
• 20V output amplitude (20V peak-to-peak)
• Based on Keithley Models 707A /7174A air matrix
• Fast settling
• Up to 36 or 48 pins, optional
• Familiar ceramic blad e technology
RF hardware/software option
This option combines DC and RF testing in a single-insertion system practical for bot h techno logy develop and process monitoring environments. The VNA (for on-wafer RF S-parameter
testing) is added, and the software supports full automation of calibration, de-embedding , RF
parameter extraction, probe contact resistance compensation, consumables tracking, data analysis, and revision control. For additional information on this option, refer to the S400RF/DC
User’s Manual, document number S400RF-901-01.
S470 User’s manual Introduction 1-5
Other documentation
NOTE This manual provides specific information about the S470 system.
In addition to the other manuals contained with your system, refer to the following for specific
information.
Receiving and unpacking the system:
• S400 Series Installation Guide, document number 4500-906-01, current revision.
Operating the system:
• S400UX Series Parametric Test System Operator’s Manual, document number 4622-900-01,
current revision.
Workstation manual:
• UNIX — S400UX Workstation User’s Manual, document number 4615-901-00, current
revision.
KTE software:
• S400UX/S600 Parametric Test Systems KTE Software Manual, document number
KTE-900-01, current revision.
Probers:
• S400UX/S600 Parametric Test Systems Probers and Prober Drivers, document number
60000-911-01, current revision.
Maintenance and Service:
• S400 Series Maintenance and Service Manual, document number 4022-902-01, current revi-
sion.
RF:
• S400RF/DC User’s Manual, document number S400RF-901-01, current revision.
1-6 Introduction S470 User’s manual
2
Operation
2-2 Operation S470 User’s manual
Operation
The S470 system uses the same operating information as an S400 system. This section contains
information on power controller operation and is arranged as follows:
• Control locations — Details information on the front panel controls and on the power distri-
bution unit.
• Grounding (protective earthing) — Describes proper groundin g at a site’s power receptacle.
• System operation — Provides procedures for placing system in operation, restarting after a
loss of line voltage, and turning system off.
• VME controls — Details VME controls and indicators.
Control locations
Controls are located on the front panel of the system (Figure 2-1).
Grounding (protective earthing)
The power cord connects the power controller to a protective earth ground. The safety ground
wire location (close to the phase and neutral wires) ensures a low impedance connection
between the power controller and a properly grounded outlet. The safety ground connects
directly to the chassis inside the power controller.
Ground the power controller to a properly grounded receptacle before operation. For effective
protection, a low impedance connection must be provided to the outlet (installed within your
facility). Wiring installed in accordance with local electrical codes ensures that this requirement
is met.
WARNING The power controller must be grounded to a properly grounded
receptacle before operation. Failure to properly ground the power
controller may result in severe injury or death.
Figure 2-1
Model 9203-CPA front panel controls and indicators
1
EMERGENCY OFF
RUN
5
RESET
6
SYSTEM POWER
INSTRUMENT POWER
START
ON
STANDBY
ON
OFF
1
2
3
4
EMERGENCY OFF pushbutton switch
SYSTEM POWER three positions switch: STANDBY, ON,
2
START (momentary)
3
INSTRUMENT POWER ON pushbutton switch/indicator
4
INSTRUMENT POWER OFF pushbutton switch
5
VME instrument controller RUN indicator
6
VME instrument controller RESET switch
S470 User’s manual Operation 2-3
System operation
This section contains procedures for system operation. Perform these procedures only after
becoming familiar with the operation of the power distribution unit.
Operation procedure
Use the following procedure to place the system in operation:
1. Make sure power cord is plugged into a properly grounded outlet and all DUT connections
have been removed.
2. Press SYSTEM POWER to START (Figure 2-1).
• The momentary switch will revert to the ON position when pressure is released.
• When SYSTEM POWER is in the ON position after being in the START position, the
switch is illuminated, which indicates power is applied to the system including the cabinet fans.
3. Press INSTRUMENT POWER ON.
• When INSTRUMENT POWER ON is pressed, the pushbutton will illuminate indicating
power is applied to the relay matrix and system instruments.
• DUT connections can be made, and instrument power can only be turned on after system
power is on.
4. To start the software after booting system, refer to the S400UX Workstation User’s manual
(UNIX), document number 4615-901-00.
Restarting after a loss of line voltage
The emergency shutdown circuit automatically turns off all power to the system if line power is
interrupted. This trips the EMO circuit. After the EMO circuit is tripped, it must be reset before
power can be applied to the system and the instruments. Call maintenance personnel to reset the
EMO circuit. Then start the system using the operation procedure.
Turning system off
Certain components can be turned off while leaving others on (computers, cabinet fans, etc.). In
addition, the EMERGENCY OFF pushbutton (one switch) turns off all components connected
to the power controller.
The two ways to turn off the system are as follows:
• Emergency turn off.
• Turning system power to STANDBY.
Emergency turn off
Press the EMERGENCY OFF button on the front panel of the system. Emergency off can also
be accomplished by pressing an optional remote emergency off button.
2-4 Operation S470 User’s manual
NOTE To start after an emergency turn off, use the procedure in the paragraph
"Restarting after a loss of line voltage".
Turning off the complete system
• Press the INSTRUMENT POWER OFF button.
• Press the SYSTEM POWER button to the STANDBY position.
Optional remote EMO Emergency Off switches
Optional remote EMO Emergency Off switches are available for the S400 system. The remote
EMO switches function the same as the EMO switch located on the front panel of th e system.
The switches are a normally closed, momentary action type switch, connected in series with the
front panel EMO switch. Pressing any switch disconnects the system from line power which
contains all voltages within the power controller chassis.
Two safety features are built into each remote EMO switch. The emergency OFF switches are
connected to the low voltage (24VAC) control voltage. This prevents line voltage from being
connected to the remote switches. Voltage to the remote emergency OFF switches is disconnected after an emergency off switch is pressed.
VME controls
The front panel contains the VME RUN indicator and the VME RESET switch. The VME RUN
indicator is illuminated when the instrument controller in the instrument card file
(Model 9000- ICF) is operating. Reset the instrument controller by pressing the RESET switch.
NOTE The operating software for the instrument controller must be down-
loaded to the applications processor if the instrument controller is r eset.
The instrument controller may also be reset using the local reset button
on the instrument controller itself.
S470 User’s manual Operation 2-5
Executing a cassette plan
Cassette plans may be executed one of four ways:
• Using KIDS (see Figure 2-2)
• Using KOPED and KOP (see Figure 2-2)
• Directly accessing KTXE
• From the shop floor control system (i.e., through SECS/GEM)
Figure 2-2
S400 Series Keithley Tool Pallet
Refer to the applicable manual for specific details:
S400UX Series Parametric Test System Operator’s Manual, document number 4622-900-01,
current revision.
Workstation manual, UNIX — S400UX Workstation User’s Manual, document number
4615-901-00, current revision.
KTE software, S400UX/S600 Parametric Test Systems KTE Software Manual, document num-
ber KTE-900-01, current revision.
2-6 Operation S470 User’s manual
Index
Numerics
130nm CMOS 1-2
200mm wafers 1-2
A
analog bipolar 1-2
automotive 1-2
C
Control locations 2-2
E
Emergency turn off 2-3
Executing a cassette plan 2-5
F
front panel controls 2-2
G
GaAs 1-2
Grounding 2-2
O
Operation 2-2
Operation procedure 2-3
Optional remote EMO 2-4
options 1-3
Other documentation 1-5
R
Restarting after a loss of line voltage 2-3
RF hardware/software option 1-4
S
software options 1-3
Standard configuration 1-2
System description 1-2
System operation 2-3
T
telecom 1-2
Turning off the complete system 2-4
Turning system off 2-3
U
I
Instrument descriptions 1-3
L
LCD devices 1-2
UNIX platform 1-2
V
VME controls 2-4
i-1
i-2
Specifications are subject to change without notice.
All Keithley trademarks and trade names are the property of Keithley Instruments, Inc.
All other trademarks and trade names are the property of their respective companies.
A GREATER MEASURE OF CONFIDENCE
Keithley Instruments, Inc.
Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY (534-8453) • www.keithley.com
Belgium: Sint-Pieters-Leeuw • 02-363 00 40 • Fax: 02-363 00 64 • www.keithley.nl
China: Beijing • 8610-82251886 • Fax: 8610-82251892 • www.keithley.com.cn
Finland: Helsinki • 09-5306-6560 • Fax: 09-5306-6565 • www.keithley.com
France: Saint-Aubin • 01-64 53 20 20 • Fax: 01-60 11 77 26 • www.keithley.fr
Germany: Germering • 089/84 93 07-40 • Fax: 089/84 93 07-34 • www.keithley.de
Great Britain: Theale • 0118 929 7500 • Fax: 0118 929 7519 • www.keithley.co.uk
India: Bangalore • 080 212 8027 • Fax : 080 212 8005 • www.keithley.com
© Copyright 2004 Keithley Instruments, Inc. 2/04
Printed in U.S.A
Italy: Milano • 02-48 39 16 01 • Fax: 02-48 39 16 28 • www.keithley.it
Japan: Tokyo • 81-3-5733-7555 • Fax: 81-3-5733-7556 • www.keithley.jp
Korea: Seoul • 82-2-574-7778 • Fax: 82-2-574-7838 • www.keithley.com
Netherlands: Gorinchem • 0183-635333 • Fax: 0183-630821 • www.keithley.nl
Singapore: Singapore • 65-6747-9077 • Fax: 65-6747-2991 • www.keithley.com
Sweden: Solna • 08-509 04 600 • Fax: 08-655 26 10 • www.keithley.com
Taiwan: Hsinchu • 886-3-572-9077 • Fax: 886-3-572-9031 • www.keithley.com.tw
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