Tektronix 82-DOS Instruction Manual

Model 82-DOS Simultaneous C-V

Instruction Manual

A GREATER MEASURE OF CONFIDENCE

WARRANTY

Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year
from date of shipment.

Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable
batteries, diskettes, and documentation.

During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.

To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio.
You will be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service
facility. Repairs will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for
the balance of the original warranty period, or at least 90 days.

LIMITATION OF WARRANTY

This warranty does not apply to defects resulting from product modification without Keithley’s express written consent, or
misuse of any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from
battery leakage, or problems arising from normal wear or failure to follow instructions.

THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PRO­VIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.

NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT,
INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS
INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE
OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIM­ITED TO: COSTS OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY
PERSON, OR DAMAGE TO PROPERTY.

Keithley Instruments, Inc. 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: [phone]

1-888-KEITHLEY (534-8453) • www.keithley.com

Sales Offices: BELGIUM: Bergensesteenweg 709 • B-1600 Sint-Pieters-Leeuw • 02-363 00 40 • Fax: [phone]

CHINA: Yuan Chen Xin Building, Room 705 • 12 Yumin Road, Dewai, Madian • Beijing 100029 • 8610-8225-1886 • Fax: [phone]
FINLAND: Tietäjäntie 2 • 02130 Espoo • Phone: [phone] • Fax: [phone]
FRANCE: 3, allée des Garays • 91127 Palaiseau Cédex • 01-64 53 20 20 • Fax: [phone]
GERMANY: Landsberger Strasse 65 • 82110 Germering • 089/84 93 07-40 • Fax: [phone]
GREAT BRITAIN: Unit 2 Commerce Park, Brunel Road • Theale • Berkshire RG7 4AB • 0118 929 7500 • Fax: [phone]
INDIA: 1/5 Eagles Street • Langford Town • Bangalore 560 025 • 080 212 8027 • Fax: [phone]
ITALY: Viale San Gimignano, 38 • 20146 Milano • 02-48 39 16 01 • Fax: [phone]
JAPAN: New Pier Takeshiba North Tower 13F • 11-1, Kaigan 1-chome • Minato-ku, Tokyo 105-0022 • 81-3-5733-7555 • Fax: [phone]
KOREA: 2FL., URI Building • 2-14 Yangjae-Dong • Seocho-Gu, Seoul 137-888 • 82-2-574-7778 • Fax: [phone]
NETHERLANDS: Postbus 559 • 4200 AN Gorinchem • 0183-635333 • Fax: [phone]
SWEDEN: c/o Regus Business Centre • Frosundaviks Allé 15, 4tr • 169 70 Solna • 08-509 04 600 • Fax: [phone]
TAIWAN: 13F-3, No. 6, Lane 99, Pu-Ding Road • Hsinchu, Taiwan, R.O.C. • 886-3-572-9077 • Fax: [phone]

2/03

Model 82-DOS Simultaneous C-V

Instruction Manual

0 1988, Keithley Instruments, Inc.

Test Instrumentation Group

All rights reserved.

Cleveland, Ohio, U.S.A.

May 1988, Fourth Printing

Document Number: 5957-901-01 Rev. D

All Keithley product names are trademarks or registered trademarks of Keitbley Inshuments. Inc.
Other brand and product names are trademarks or registered trademarks of their respective holders.

Safety Precautions

The following safety precautions should be observed before using
this product and any associated instrumentation. Although some in­struments and accessories would normally be used with non-haz­ardous voltages, there are situations where hazardous conditions
may be present.

This product is intended for use by qualified personnel who recog­nize shock hazards and are familiar with the safety precautions re­quired to avoid possible injury. Read and follow all installation,
operation, and maintenance information carefully before using the
product. Refer to the manual for complete product specifications.

If the product is used in a manner not specified, the protection pro­vided by the product may be impaired.

The types of product users are:

Responsible body is the individual or group responsible for the use

and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for en­suring that operators are adequately trained.

Operators use the product for its intended function. They must be

trained in electrical safety procedures and proper use of the instru­ment. They must be protected from electric shock and contact with
hazardous live circuits.

Maintenance personnel perform routine procedures on the product

to keep it operating properly, for example, setting the line voltage
or replacing consumable materials. Maintenance procedures are de­scribed in the manual. The procedures explicitly state if the operator
may perform them. Otherwise, they should be performed only by
service personnel.

Service personnel are trained to work on live circuits, and perform

safe installations and repairs of products. Only properly trained ser­vice personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that
are rated Installation Category I and Installation Category II, as de­scribed in the International Electrotechnical Commission (IEC)
Standard IEC 60664. Most measurement, control, and data I/O sig­nals are Installation Category I and must not be directly connected
to mains voltage or to voltage sources with high transient over-volt­ages. Installation Category II connections require protection for
high transient over-voltages often associated with local AC mains
connections. Assume all measurement, control, and data I/O con­nections are for connection to Category I sources unless otherwise
marked or described in the Manual.

Exercise extreme caution when a shock hazard is present. Lethal
voltage may be present on cable connector jacks or test fixtures. The
American National Standards Institute (ANSI) states that a shock
hazard exists when voltage levels greater than 30V RMS, 42.4V
peak, or 60VDC are present. A good safety practice is to expect

that hazardous voltage is present in any unknown circuit before
measuring.

Operators of this product must be protected from electric shock at
all times. The responsible body must ensure that operators are pre­vented access and/or insulated from every connection point. In
some cases, connections must be exposed to potential human con­tact. Product operators in these circumstances must be trained to
protect themselves from the risk of electric shock. If the circuit is
capable of operating at or above 1000 volts, no conductive part of

the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits.
They are intended to be used with impedance limited sources.
NEVER connect switching cards directly to AC mains. When con­necting sources to switching cards, install protective devices to lim­it fault current and voltage to the card.

Before operating an instrument, make sure the line cord is connect­ed to a properly grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks
before each use.

When installing equipment where access to the main power cord is
restricted, such as rack mounting, a separate main input power dis­connect device must be provided, in close proximity to the equip­ment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any
other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge
any capacitors before: connecting or disconnecting cables or jump­ers, installing or removing switching cards, or making internal
changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the com­mon side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated
surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its
specifications and operating instructions or the safety of the equip­ment may be impaired.

Do not exceed the maximum signal levels of the instruments and ac­cessories, as defined in the specifications and operating informa­tion, and as shown on the instrument or test fixture panels, or
switching card.

When fuses are used in a product, replace with same type and rating
for continued protection against fire hazard.

Chassis connections must only be used as shield connections for
measuring circuits, NOT as safety earth ground connections.

If you are using a test fixture, keep the lid closed while power is ap­plied to the device under test. Safe operation requires the use of a
lid interlock.

5/02

If or is present, connect it to safety earth ground using the
wire recommended in the user documentation.

!

The symbol on an instrument indicates that the user should re­fer to the operating instructions located in the manual.

The symbol on an instrument shows that it can source or mea­sure 1000 volts or more, including the combined effect of normal
and common mode voltages. Use standard safety precautions to
avoid personal contact with these voltages.

The WARNING heading in a manual explains dangers that might
result in personal injury or death. Always read the associated infor­mation very carefully before performing the indicated procedure.

The CAUTION heading in a manual explains hazards that could
damage the instrument. Such damage may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and
all test cables.

To maintain protection from electric shock and fire, replacement
components in mains circuits, including the power transformer, test
leads, and input jacks, must be purchased from Keithley Instru­ments. Standard fuses, with applicable national safety approvals,
may be used if the rating and type are the same. Other components
that are not safety related may be purchased from other suppliers as
long as they are equivalent to the original component. (Note that se­lected parts should be purchased only through Keithley Instruments
to maintain accuracy and functionality of the product.) If you are
unsure about the applicability of a replacement component, call a
Keithley Instruments office for information.

To clean an instrument, use a damp cloth or mild, water based
cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill
on the instrument. Products that consist of a circuit board with no
case or chassis (e.g., data acquisition board for installation into a
computer) should never require cleaning if handled according to in­structions. If the board becomes contaminated and operation is af­fected, the board should be returned to the factory for proper
cleaning/servicing.

MODEL 82-DOS SPECIFICATIONS

ANALYSIS CAPABILITIES
CONSTANTS:

GRAPHICS:

Measured:

Calculated:

Flatband C and V
Threshold Voltage
Bulk Doping
Effective Oxide Charge
Work Function
Doping Type
Average Doping
Best Depth

Simultaneous C vs. Gate Voltage
High Frequency C vs. Gate Voltage
Quasistatic C vs. Gate Voltage
Conductance vs. Gate Voltage
Q/t Current VS, Gate Voltage
Quasistatic C and Q/t Current vs. Delay Time
Interface Trap Density vs. Trap Energy
Doping vs. Depletion Depth
Ziegler (MC0 Doping vs. Depth
Depletion Depth vs. GateVoltage
High Frequency l/C’ vs. Gate Voltage
Band Bending vs. Gate Voltage
High Frequency C vs. Band Bending
Quasistatic C vs. Band Bending

VOLTAGE MEASUREMENT

ACCURACY (1 Year. W-‘WC): S,.O5% rdg + 5OmV).
RESOLUTION: IOmV.
TEMPERATURE COEFFICIENT W-18” & 28=40”0:

*.(0.005% + ImV)/“C.

OUASISTATIC CAPACITANCE*

TEMPERATURE COEFFICIENT W-18” & 28”-4O”C):

k(O.O2% rdg + 0.1 pW”C.

HIGH FREQUENCY CAPACITANCE*

SHUNT CAPACITANCE LOADING EFFECT: 0.1% of reading addi-

tionalerrorperlOOpFloadwithequalshuntloadoninputandoutput.
TEST VOLTAGE: 15m” m ? 10%.
TEST FREQUENCY TOLERANCE: 3.1%.

MAxIMIJM SWEEP SPAN, I v,,, - v,,, I : 40”.
MAXIMLM OUTPUT CURRENT: ztzm.4 @I%, +20%).

SWEEPSTEP”OL’TAGESELECTIONS: lOm”,2Om”,5Om”, 1OOm”.
DC OUTPDTRESISTANCE: <IOR.

GENERAL

READINGRATES: 41/2readingspersecondtoonereadingevery400

seconds.
DATA BUFFER: 1000 points maximum.
GRAPHICALO~~S:Computerdisplayordigitalplottersupport-

ininE,, with IEEE-488 interface; also “screen cop)+’ to compatible

DIGITAL UO: Consists of one output, four inputs, +5V (series limited

with 33R). and COMMON referenced to IEEE488 COMMON. Out-

put wi” drive one TI’L load. Inputs represent one TTL load.
MAXIMLM INPUT: 30V peak, DC to 6OHz sine wave.
MAXMUM COMMON MODE VOLTAGE: 30V maximum, DC to

6OHz sine wave.
OPERATING ENVIRONMENT: 0’ to 40°C 70% non-condensing RH

up to 35°C.
STORAGE ENVIRONMENT: -25” to +65”C.
WARM-w: 2 hours to rated accuracy.

Specifications subject to change without notice.

‘NOTES

MINIMUM COMPUTER CONFIGURATION:

IBM AT, FS/Z, or 100% compatible DOS 3.2 or greater
640k of memory Hard disk drive

CGA, EGA, VGA, or Hercules Graphics adapter.
IEEE-488 (GPIB) INTERFACE CARDS SUPPORTED:
Using IOtech Driver488 software “2.60 o* earlier:

CapitalEquipmentPC-488,4x488;IBMGPIBAdapter;IOtechGP488,
GP488A, GP488B+, MP488, Mp488CT Keithley PC488-CEC, 4488.
CEC-OM, 4488-CEC-1M; Metmbyte KM488DD. KM488-ROM; Na­tional INtNments PC-U, PC-UA, PC-III.

Using IOtech Driver488 software W-61:

IOtech GP48SB+, MP488, MP488CT

IOtech Personal 48812 is required for PS/2 operation.
MODEL S&DOS COMPONENTS:

Model 230-l: Programmable Voltage Source
Model 595: Quasistatic cv Meter
Model 590: IOOk/lM CV Analvzer
Model 5909: Calibration Source;
Model 5957:
Model 5951:

4801:
7007-l:
7007-2:
7051-2:

Model 82.DOS CV Software and Manual
Remote Input Coupler-Includes Models:
Low Noise BNC Cable, 1 .?m (4 ft.) (5 supplied)
Shielded IEEE488 Cable, Im (3.3 ft.) (2 supplied)
Shielded IEEE-488 Cable, 2m (6.6 ft.) (1 supplied)
RG-58C BNC to BNC Cable, 0.6m (2 ft.) 0 supplied)

MODEL 5957 SIMULTANEOUS C-V SOFTWARE

OVERVIEW
INSTRUMENTS CONTROLLED: Model 590/100k/lM C-V Analyzer,

Model 595 Quasistatic C-V Meter, Model 230-I Voltage Source.

SYSTEM ACCESSORIES SUPPORTED: Model 5951 Remote Input

Coupler (controlled through the Model 230-l) and Model 5909 Calibra­tion Capacitors.

TESTS: Controls inshuments to acquire and analyze C-V data.

Simultaneous Quasistatic and High Frequency C-V Measurement:

The K182CV program controls the Model 8%DOS system to measure
high frequency and quasistatic C-V in the same voltage sweep.

HighFrequencyC-VMeasurement: TheKL590CVprogramcan~~olsthe

Model 590/100k/lM to measue 1OOkHz or 1MHz capadtance and
conductance (or resistance) versus voltage.

Quasistatic C-V Measurement: The KI595CV program controls the

Mode1595 tomeasurequasistatiiccapacitanceandQ/t”ersus”oltage.

DATA DISPLAY: Graphic or list display of data arrays. Tabular display

of calculated parameters.

FILES:

C-V Parameter File (.PAR): Contains all selup parameters far C-V

Measurements.

Data Destination Files LDAT): Each contains C-V we data, user-

input device parameters, and derived results. Compatible with
Model 5958.

Cable Calibration File (PKGB?CAL.CAL): Contains reference capaci-

tor values and calibration constants to calibrate particular range and
frequency combinations of the Model 59D,,OOk,,M and Mode, 595.

Material Constants File (MATERIAL.CON): Specifies material con-

stants to be used in analysis such as insulator and semiconductor
permittivity, bandgap energy, inbinsic carrier concentration, metal
work function, and electron affinity

CAPACITANCE MEASUREMENT CAPABILITY:

Test Signal Frequency: Quasistatic and IOOkHz or IMHz.
Quasistatic Measurement Ranges: 200pF and 2OOOpF.
lOO!cHz Measurement Ranges: 200pF/ZO@uS, and 2nF/2mS.
IMHz Measurement Ranges: 200pF/2mS, 2nF,2OmS.
BiasVoltage: ~120VmaximumuslngMadel595intemal”oltagesource

coupled with Model 230-l external voltage source.
Bias Voltage Waveform: Stair waveform.
Selectablemeasurementfilter, quasistaticcapacitance leakage current

correction, and series or parallel device model.

CABLE CALIBRATION PROGRAM: The CABLECAL.EXE Utility con-

trolstheMadel590tocorredfor cableconnection p&effects. Themenu­driven utility stores reference capacitor values and measwed cable
cahbration parameters for the Model 590 in the PKG82CALCAL file.
DuringModel5957executio~theseparametersaresemtotheModel590
f”xn the file.

ANALYSIS
KI82CV PROGRAM:

MIS Analysis Constants: Oxide capacitance and thickness, gate area,

series resistance, equilibrium minimum capadtance, average doping,

bulk doping, bulk potential, Debye length, tlatband capacitance and
“Oltage, work function difference, threshold voltage, effective oxide
charge and charge concentration, d&ice type, best depth, and
capacitance gain and offset.

Doping Profile: Interface hap corrected depletion approximation dop

ing versus depletion depth and depth versus gate voltage, Ziegler
method Majority Carrier Corrected (MC0 doping profile.

Interface T*ap Density: Interface trap density “emus hap energy, band

bending “emus Sate voltage and capacitance versus band bending.

KI59OCVPROGRAM:

MIS Analysis Constants: Oxide capacitance and thickness, gate area,

series resistance, equilibrium minimum capacitance, average doping,
bulk doping, bulk potential, Debye length, flatband capacitance and
voltage, work function difference, threshold voltage, effective oxide
chargeandchargeconcen~ation,devicetype,bestdepth,and capaci­tance gain and offset.

Doping Profile: Depletion approximation doping versus depletion

depthanddepth”ersusgate”oltage,ZieglermethodMajorityCarrier
Corrected (MC0 doping profile.

KI595CV PROGRAM:

MISAnalysisConstants: Oxidecapacitanceandthickness,gateareaand

capacitance gain and offset.

FILEMERGEPROGRAM: TheFILF.MRG.EXEutitycombines quasistatic

C-V data from the Made, 5957V2.0 with high-frequency C-V data

from~59OCVorhomtheMode15958tocreat~eddatafile(.DAT)suitable

for analysis by both the Model 5957”2.0 and Model 5958.

SYSTEM REQUIREMENTS
RECOMMENDED COMPUTER CONFIGURATION: IBM compatible

80386with80287or80387mathcoprocessoranddiskca~e,blOkBRAM,
hard disk drive, 1.2MB 5*-inch or 720kB 3%inch floppy drive, EGA or
VGA monitor, Microsoft or Lagitech mouse.

MINIMUM COMPUTER CONFIGURATION: IBM AT. PS/2. or 100%

compatible, 64OkB RAM, hard disk drive, 1.2MB 51,~.inch or 720kB 31~.

inch “aon” drive.
OPERATING SYSTEM: M&DOS or PC-DOS3.2 (minimum).
GRAPHICS ADAPTBR:~ CGA, EGA, VGA (EGA made), or Hercules

Graphics Adapter.

MEMORY and DISK STORAGE REQUIREMENTS: 3MB of hard disk

space (prior to installation) and SOOkB free conventional RAM.

IEEE.488 (GPIB) INTERFACE CARDS SUPPORTED:

Using IOtech Driver 488 software V2.60 or earlier:

CapitalEquipmentPC-488,4x488; IBMGPIB Adapter; IOtechGP488,
GI’488A, GI’488B+, MP488, MP488a; KeithIey PC-48&CEC, 4-488.
CEC-OM, 4-488-CEC-IM: M&mbyte KM48&DD, KM488-ROM;

National Insments PC-II, PC-LIA, PC-III.

Using IOtech Driver 488 software V261:

IOtech GP488B+, MI’488, MP488CT.

IOtech Personal 48812 is required far PS/2 operation.

COMPATIBLEPmRS: CannonBJ80; C.ItohProwriter; CItah24LQ;

Epson FX, RX, MX, LQ1500; HP ThinkJet, LaserJet+; IBM Graphic or

Professional; NEC 8023,802S; NEC Pinwriter P Series; Okidata 92,93,

192+; Smith Corona DlOO; Tekhonix 4695/6; Toshiba 24 pin.

COhlPATIBLE PLOTIXRS: Epson HI-SO; Hewlett-Packard 7470,X75,

7440; Houston DMPXX; Roland DXY-800; Watanabe Dig&plot.

COMPATIBLE MOUSE: Microsoft or Lo@tech mouse with MOUSE.SYS

installed.

MATERIALS PROVIDED:

I”stNcti0” manual.
Diskettes containing installation, programs, source code, and sample

data.

*Note: Microsoft BASIC 7.1 required to modify source code.

Specifications subject to change without notice.

Table of Contents

SECTION 1

1.1

1.2

1.3

1.4

1.5

1.6

1.7

1.7.1

1.7.2

1.8

1.9

1.9.1

1.9.2

1.9.3

1.9.4

1.9.5

1.10

1.11

1.11.1

1.11.2

1.11.3

INTRODUCTION ...................

FEATURES..
WARRANTY INFORMATION

MANUAL ADDENDA ...............

sAFETYsYMBoLsANDTERMs .......

SPECIFICATIONS ..................

UNPACKING AND INSPECTION ......

Unpacking Procedure

Supplied Equipment

REPACKING FOR SHIPMENT .........

COMPUTER REQUIREMENTS ........

Computer Hardware Requirements ....

Supported Graphics Card ...........

Supported IEEE488 Interfaces .......

Recommended Printers and Plotters ...

System Software Requirements

SERVICE AND CALIBRATION
OPTIONAL ACCESSORIES

Connecting Cables

Rack Mount Kits

Software utilities

- General Information

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..............

...............

.........

l-l
l-l
l-2
1-2
1-2
l-2
l-2
l-2

1-2
l-3
l-3
l-3
l-3
l-3
14
14
l-5
l-5
l-5
l-5

l-5

SECTION 2 - Getting Started

2.1

2.2

2.2.1

2.2.2

2.2.3

2.2.4

2.2.5

2.3

2.3.1

2.3.2

2.3.3

2.3.4

2.3.5

2.3.6

2.4

2.4.1

2.4.2

2.4.3

INTRODUCTION
HARDWARE CONFIGURATION

System Block Diagram

Remote Input Coupler

System Connections

IEEE-488 Bus Connections

Remote Coupler Mounting

SYSTEM POWER UP

Instrument Power Requirements
Power Connections
Environmental Conditions .

WarmUpPeriod......................................

Power Up Procedure

LineFrequency.......................................

COMPUTER HARDWARE AND SOFTWARE INSTALLATION

Interface Card Installation

Softwarebackup ,,..._........_...._.......,..........

Memory and Hard Disk Considerations

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....... 2-1

.......

.......

.......

....... 2-5

....... 2-6

.......

....... 2-8

....... 2-8

....... 2-8

....... 2-8

....... 2-8

....... 2-8

....... 2-9

.......

.......

....... 2-9

.......

2-l
2-l

2-2

2-6

2-9
2-9

2-10

2.4.4

2.4.5

2.4.6

2.4.7

2.4.8

2.4.9

2.4.10

2.5

2.5.1

2.5.2

2.5.3

2.5.4

2.5.5

2.5.6 RehmingtoDOS..

2.6 SYSTEM CHECKOUT

2.6.1

2.6.2 System Troubleshooting

Model 82 Software Installation
IEEE-488 Driver Software Installation
CONFIG.SYS Modification
lnstallationverification
Plotter and Printer Considerations
RumingtheSoftware
Default Material Constants

SOFTWAREOVERVIEW

SystemReset
System Characterization
Compensating for Series Resistance and Determining Device Parameters
Device Measurement
Data Analysis and Plotting

CheckoutProcedure

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SECTION 3 - Measurement

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2-10
2-12

...

:

2-12
2-12
2-13
2-14
2-15
2-15
2-15

2-15

2-15
2-16
2-17

2-17
2-17
2-17
2-17

3.1

3.2

3.3

3.4

3.4.1

3.4.2

3.4.3

3.4.4

3.4.5

3.5

3.5.1

3.5.2

3.5.3

3.5.4

3.5.5

3.6

3.6.1

3.6.2

3.6.3

3.6.4

3.7

3.7.1

3.7.2

3.7.3

3.7.4

3.7.5

3.7.6

3.8

3.8.1

INTRODUCTION
MEASUREMENTSEQUENCE..
SYSTEMRESET
TESTING AND CORRECT!NG FOR SYSTEM LEAKAGES AND STRAY5

TestandCorrectionMenu
ParameterSelection
ViewingLeakageLevels
System Leakage Test Sweep
OffsetSuppression

CORRECTING FOR CABLING EFFECTS

When to Perform Cable Correction

Recommendedsources
SourceConnections
CorrectionProcedure
Optimiziig Correction Accuracy to Probe Tips

CHARACTERIZING DEVICE PARAMF.TJZRS

Device Characterization Menu
Running and Analyzing a Diagnostic C-V Sweep
Detetig Series Resistance, Oxide Capacitance, Oxide Thickness, and Gate Area
Determining CMIN and Optimum Delay Time

MAKINGC-VMEASUREMENTS

C-VMeasurementMenu

Programmin g Measurement Parameters .
Selecting Optimum C-V Measurement Parameters
ManualC-VSweep
AutoC-VSweep

UsingConwtedCapacitance .................................................

LIGHTCONNECTIONS

DigitalI/OPortTerminals

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3-1
3-1
3-3
34
34
3-5
3-8
3-10
3-13
3-13
3-13
3-14
3-14
3-15
3-15
3-15
3-15
3-17
3-19
3-21
3-25
3-25
3-25
3-29
3-29
3-31
3-31
3-33
3-33

3.8.2

3.8.3

3.9

3.9.1

3.9.2

3.9.3

3.9.4

3.9.5

3.9.6

3.9.7

3.9.8

LED Connections ....................

Relay Control .......................

MEASUREMENT CONSIDERATIONS

Potential Error Sources ................

Avoiding Capacitance Errors ............

Correcting Residual Errors .............

Interpreting c-v Curves ...............

Dynamic Range Considerations ..........

Series and Parallel Model Equivalent Circuits

Device Considerations ................

Test Equipment Considerations ..........

SECTION 4 - Analysis

......

...........

...........

...........

...........

...........

...........

...........

...........

...........

...........

...........

3-33
3-33
3-35
3-35
3-37
3-38
3-38
340
341
342
3-43

4.1

4.2

4.2.1

4.2.2

4.2.3

4.3

4.3.1

4.3.2

4.4

4.4.1

4.4.2

4.4.3

4.4.4

4.5

4.5.1

4.5.2

4.5.3

4.5.4

4.5.5

4.5.6

4.5.7

4.5.8

4.5.9

4.5.10

4.5.11

4.5.12

4.6

4.6.1

4.6.2

4.6.3

4.6.4

4.6.5

4.6.6

4.6.7

INTRODUCTION
CONSTANTS AND SYMBOLS USED FOR ANALYSIS

Default Constants ..............................

Raw Data Symbols

Calculated Data Symbols ........................

OBTAINING INFORMATION FROM BASIC C-V CURVES

Basic C-V Curves ..............................

Determining Device Type ........................

ANALYZING C-V DATA ..........................

Plotter and Printer Requirements
AnalysisMenu

Saving and Recalling Data ........................

Displaying and Printing the Reading and Graphics Arrays

ANALYSIS CONSTANTS ..........................

Oxide Capacitance, Thickness, and Area Calculations

Series Resistance Calculations .....................

ChangingNsm ...............................

Changing C
Flatband Capacitance and Flatband Voltage

Threshold Voltage .............................

Metal Semiconductor Work Function Difference

Effective Oxide Charge ..........................

Effective Oxide Charge Concentration

Average Doping Concentration ....................

Best Depth ...................................

GainandOffset

GRAPHICAL ANALYSIS ..........................

Analysis Took ................................

GraphingData ................................

Reading Array ......................

Graphics Amy ......................

Graphing the Reading Array ............

Doping Profile ......................

Ziegler (MC0 Doping Profile ...........

................................

....

.............................

..................

................................

m ................................

..........

.......

...............

................................

...

4-1
4-l
4-l
4-2
4-2
4-3
4-3
44
44
44
4-5
4-5
4-6
4-10
4-12
4-12
4-14
4-14
4-14
4-14
4-15
4-15
4-16
4-16
4-16
4-17
4-17
4-17
4-18
4-19
4-20
4-20
4-26

4-30

4.6.8

4.7

4.7.1

4.7.2

4.7.3

4.8 REFERENCES AND BIBLIOGRAPHY OF C-V MEASUIUZMENTS AND RELATED TOPICS

4.8.1

4.8.2

Interface Trap Density Analysis .............................................

MOBILE IONIC CHARGE CONCENTRATION MEASUREMENT

Flatband Voltage Shift Method .............................................

Triangular Voltage Sweep Method
Using Effective Charge to Determine Mobile Ion Drift

References ............................................................

Bibliography of C-V Measurements and Related Topics

.......................................... 4-36

............................

........................... 440

.................... 4-35

SECTION 5 - Principles of Operation

4-31

4-36

440
4-40
440

5.1 INTRODUCTION

5.2

5.3 REMOTE INPUT COUPLER

5.3.1 Tuned Circuits .

5.3.2 Frequency Control

5.4 QUASISTATIC C-V

5.4.1 Quasistatic C-V Configuration

5.4.2

5.5 HIGH FREQUENCY C-V

5.5.1 High Frequency System Configuration

5.5.2 High-Frequency Measurements.

5.6

SYSTEM BLOCK DIAGRAM

Measurement Method

SIMULTANEOUS C-V

SECTION 6 - Replaceable Parts

6.1 INTRODUCTION .............................................

6.2 PARTSLIST. ................................................

6.3 ORDERING INFORMATION

6.4

6.5

FACTORYSERVICE ...........................................

COMPONENT LAYOUTS AND SCHEMATIC DIAGRAMS .............

....................................

5-l

........

........

........

........

........

........... 6-l

...........

...........

...........

........... 6-l

5-l
5-1
5-3
5-3
5-3
5-3
5-3
5-5
5-5
5-5
s-6

6-l
6-l
6-l

APPENDICES

A
B
C
D
E

F

G
H

F

Material Constants File Modification
Analysis Constants
Summary of Analysis Equations
Prefixes of unit Values
Using the Model 590 and 595 Programs
Graphic 4.0 Functions Used by Model 82-DOS

Cable Calibration Utility
File Merge Utility
Data File Format
Software Modification

List of Illustrations

SECTION 2 - Getting Started

Figure 2-l

Figure 2-2

Figure 2-3
Figure 24

Figure 2-5
Figure 2-6
Figure 2-7

Figure 2-8

System Blodc Diagram
Model 5951 Front Panel
Model 5951 Rear Panel
System Front Panel Connections
System Rear Panel Connections
System IEEE488 Connections
Remote Coupling Mounting
Main Menu

SECTION 3 - Measurement

Figure 3-l

Figure 3-2

Figure 3-3
Figure 3-4
Figure 3-5
Figure 3-6

Figure 3-7

Figure 3-8
Figure 3-9
Figure 3-10
Figure 3-11
Figure 3-12
Figure 3-13
Figure 3-14
Figure 3-15
Figure 3-16
Figure 3-17
Figure 3-18
Figure 3-19
Figure 3-20
Figure 3-21
Figure 3-22
Figure 3-23
Figure 3-24
Figure 3-25
Figure 3-26
Figure 3-27
Figure 3-28

Figure 3-29

Figure 3-30

Figure 3-31

Measurement Sequence ................................

Model 82 Main Menu ..................................

Stray Capacitance and Leakage Current Menu

Parameter Selection Menu ...............................

Save/Load Parameter Menu .............................

Monitor Leakage Menu .................................

Diagnostic Sweep Menu ................................

Leakage Due to Constant Current
Q/t Curve with Leakage Resistance
Constant Leakage Current Increases Quasistatic Capacitance
Quasistatic Capacitance with and without Leakage Current
Cable Correction Connections
Device Characterization Menu
C-V Characteristics of n-type Material
C-V Characteristics of p-type Material
Series Resistance and Oxide Capacitance
CmandDelayTimeMenu
Q/tandCavs.DelayTimeExample
Choosing Optimum Delay Time
Capacitance and Leakage Current Using Corrected Capacitance
Device Measurement and Analysis Menu

Parameter Selection Menu ...............................

Manual Sweep Menu ...........................

Auto Sweep Menu .............................

Digital I/O Port Terminal Arrangement

Direct LED Control .............................

Relay Light Control
C-V Curve with Capacitance Offset
C-V Curve with Added Noise
C-V Curve Resulting from Gain Error
Curve Tilt Cause by Voltage Dependent Leakage

.............................

...........................

..............................

..........................

............................

.....................

.........................

.......................

......................

......................

....................

.......................

...................

.............

.................

...............

............

............

............

............

............

...........

...........

...............

......

.....

......

.......

....... 2-3

.......

....... 2-5

.......

....... 2-7

.......

.......

2-2

2-4

2-6

2-7
2-16

3-2
3-3
34
3-5
3-7
3-9
3-11
3-12
3-12
3-12
3-13
3-14
3-16
3-18
3-18
3-20
3-22
3-23

3-24
3-24
3-26
3-27
3-30
3-32
3-33
3-34
3-34
3-35
3-35
3-35
3-36

Figure 3-32
Figure 3-33 Normal C-V Curve Results When Device is kept in Equilibrium
Figure 3-34
Figure 3-35 Curve Distortion when Hold Time is too Short
Figure 3-36 Series and Parallel Impedances

C-V Curve Caused by Nonlinearity

Curve Hysteresis Resulting When Sweep is too Rapid

SECTION 4 - Analysis

......... 3-36

......... 3-39

......... 3-39

......... 3-40

......... 3-41

Figure 4-1
Figure 42
Figure 4-3
Figure 4-4
Figure 4-5
Figure 4-6
Figure 4-7 Analysis Constant Display
Figure 48 G-V Curve without Series Resistance Compensation (RSERIES zlOOW)
Figure 49 G-V Curve with Series Resistance Compensation (Rsms =lOOW)
Figure 4-10
Figure 4-11 Graphics Control Menu

Figure 4-12 Quasistatic Capacitance vs. Gate Voltage Example ......................

Figure 4-13 High-Frequency vs. Gate Voltage Example ...........................

Figure 4-14
Figure 4-15 Q/t vs. Gate Voltage Example

Figure 416 Conductance vs. Gate Voltage Example
Figure 417 Depth vs. Gate Voltage Example
Figure 4-18 Doping Profile vs. Depth Example
Figure 419
Figure 4-20
Figure 4-21 Band Bending vs. Gate Voltage Example
Figure 422
Figure 4-23

Figure 424 Interface Trap Density vs. Energy from Midgap Example ................

Figure 425 Model for TVS Measurement of Oxide Charge Density ..................

C-V Characteristics of p-type Material ...............................

C-V Characteristics of n-type Material ...............................

DataAnalysisMenu..

Example of Reading Array Print Out ................................

Example of Graphics Array Print Out ...............................

Example of Ziegler (MCC) Doping Array Print Out

Simplified Model used to Determine Series Resistance

High-Frequency and Quasistatic Capacitance vs. Gate Voltage Example

1 /C’H vs. Gate Voltage Example ...................................

Ziegler Doping Profile Example ....................................

Quasistatic Capacitance vs. Band Bending Example

High-frequency Capacitance vs. Band Bending Example

..........................................

.....................

.......................................

...................

.........................................

....................................

.............................

...................................

.................................

.............................

.....................

.................

........

...........

.....

4-3
4-4

4-5
4-7
4-8
4-9
4-l 1
4-12
4-13
4-13
4-18
4-21
4-22
4-23
4-24
4-25
4-26
4-28
4-29
4-30

4-32
4-33
4-34
4-35
4-37

SECTION 5 - Principles of Operation

Figure 5-1

Figure 5-2
Figure 5-3
Figure 5-4
Figure 5-5
Figure 5-6
Figure 5-7
Figure 5-8

Model 82-DOS System Block Diagram
Simplified Schematic of Remote Input Coupler

System Configuration for Quasistatic C-V Measurements
Feedback Charge Method of Capacitance Measurements
Voltage and Charge Waveforms for Quasistatic Capacitance Measurement
System Configuration for High Frequency C-V Measurements
High Frequency Capacitance Measurement

SimultaneousC-VWavefoml ........................................

..................................

...........................

..............................

...................

....................

...............

5-2
5-2
5-3
5-4
5-4
5-5
5-6
5-7

List of Tables

SECTION l-

Table l-l
Table l-2
Table l-3
Table 14
Table l-5
Table l-6

Table l-7

General Information

Supplied Equipment
Computer Hardware Requirements
Graphics Cards Supported by Model 82-DOS
IEEE488 Interfaces Supported by Model 82-DOS
Recommended Printers
Recommended Plotters
System Software Requirements

SECTION 2 - Getting Started

Table 2-l
Table 2-2
Table 2-3
Table 24

Table 2-5

SuppliedCables ..,,,..,,........,,..._....__......,_,,........,,,,....... 2-5

Default Directories
Graphics Cards Supported by Model 82-DOS
Supported Printers and Plotters
System Troubleshooting Summary

SECTION 3 - Measurement

Table 3-l
Table 3-2
Table 3-3

Cable Correction Sources
Digital I/O Port Terminal Assignments

Converting Series-parallel Equivalent Circuits

...................................................

.........................................

....................................

.............

.............

.............

.............

.............

l-2
l-3
l-3
l-3
14
1-4
14

2-10
2-11
2-12
2-17

3-14
3-33
3-42

SECTION 4 - Analysis

Table 4-l
Table 4-2
Table 4-3

Default Material Constants

Analysis Constants
GraphicalTools

......

........................................................

..........................................................

........................

..................

4-2

4-10
4-17

SECTION 1

General Information

1.1 INTRODUCTION

This section contains overview information for the
Model82-DOSSimultaneousC-V systemandis arranged
as follows:

1.2 Features

1.3 warranty Information

1.4 Manual Addenda

1.5 Safety Symbols and Terms

1.6 Specifications

1.7 Unpacking and Inspection

1.8 Repacking for Shipment

1.9 Computer Requirements

1.10 Service and Calibration

1.11 Optional Accessories

1.2 FEATURES

Model 82-DOSis a computer-controlled system of instru­ments designed to make simultaneous quasistatic C-V
and high frequency UOOkHz and IMHz) C-V measure­ments on semiconductors. Eachsystem includes aMode
590 C-V Analyzer for high-frequency C-V measure-
ments, and a Model 595 Quasistatic C-V Meter, along
with the necessary input coupler, connecting and control

cables, and cable calibration sources. A Model 230-l Volt­age Source is also included.

Key Model 82.DOS features include:

l Remote input coupler to simplify connections to the

device under test. Both the Model 595 and the Model

590 are connected to the device under test through tlw

coupler, allowing simultaneous quasistatic and high
frequency measurement of device parameters with
negligible interaction between instruments.

. Supplied menu-driven software allows easy collection

of C, G, V, and Q/t data with a minimum of effort. No
computer programming knowledge is necessary to
operate the system.

. Data can be stored on disk for later reference or analy-

sis.

l File merge utility allows sequentially-measured

quasistatic and high-frequency C-V data to be com-

bined for later analysis.

. Graphical analysis capabilities allow plotting of data

on the computer display as well as hard copy graphs
using an external digital plotter. Graphical analysis for
such parameters as doping profile and interface trap
density vs. trap energy is provided.

l Supplied external voltage source (Model 230-l) ex-

tends the DC bias capabilities to H2OV.

. Supplied calibration capacitors to allow compensation

for cable effects that would otherwise reduce the accu­racy of 1OOkHz and 1MHz measurements.

l Allnecessarycablesaresuppliedfor easy system hook

UP.

l-1

SECTION 1
General Information

. Supplied INSTALL program simplifies software in-

stallation.

. Supplied cable calibration utility corrects for cabling

effects.

1.3 WARRANTY INFORMATION

Warranty information is located on the inside f+ont cover

of this instruction manual. Should you require warranty
service, contact your Keithley representative or the fac­tory for further information.

1.4 MANUAL ADDENDA

Any improvements or changes concerning the Model
82-DOS or this instruction manual will be explained on a
separate addendum supplied with the package. Please be
sure to note these changes and incorporate them into tlw
manual before operating or servicing the system.

Addenda concerning the Models 230-1, 590, 595, and
5909 wiIl be packed separately with those instruments.

1.5 SAFETY SYMBOLS AND TERMS

The following safety symbols and terms may be found on
one of the instruments or used in this manual:

The WARNING heading used in this and other manuals

cautions against possible hazards that could lead to per­sonal injury or death. Always read the associated infor­mation very carefully before perfodg the indicated
procedure.

A CAUTION heading outlines dangers that could dam­age the instrument. Such damage may invalidate the

warranty.

1.6 SPECIFICATIONS

Detailed specifications for the Model 82-DOS system can
be found at tlw front of this manual. Specifications for the
individual instruments are located in their respective in-

struction manuals.

1.7 UNPACKING AND INSPECTION

1.7.1

Upon receiving the Model 82-DOS, carefully unpack alI
instruments and accessories from their respective ship­ping cartons, and inspect all items for any obvious physi­cal damage. Report any such damage to the shipping
agent at once. Save the original packing cartom for possi­ble future reshipment.

Unpacking Procedure

The Q 1 symbol on an instrument indicates that you
should consult the operating instructions in the associ-

ated manual.

Table l-l.

Supplied Equipment

Quantity Description

I

230-l Voltage Source
590 c-v Analyzer
595 Quasistatic C-V Meter
5951 Remote Input Coupler
5909 Capacitance Sources
4801 Low noise BNC cables (4’)

3
2
1

1

1

l-2

7051-2 BNC cables

7007-l Shielded IEEE-488 cables (lm)
7007-2 Shielded IEEE-488 cable (2m)
5957 C-V Software Package and manual
IOtecli Driver488 Software and manual

1.7.2

Supplied Equipment

Table l-1 summarizes the equipment supplied with the
Model 82-DOS system.

Application

Supply +lOOV DC offset, control 5951 frequency
Measure lOOkI&, 1MHz C and G
Measure C, Q/t; supply staircase bias waveform

Connect 590 and 595 to DUT

System configuration/calibration

Connect 5951 to DUT and instruments

Connect ine.trument control and voltage signals

Connect instruments to bus

Connect controller to instrument bus

‘Control Model 82 system

BEE-488 bus software driver.

General Information

SECTION 1

1.8 REPACKING FOR SHIPMENT

Should il become necessary to return any of the instn­ments for repair, carefully pack them in their original
packing cartons (or the equivalent), and be sure to in­clude the following information:

. Advise as to the warranty status of the equipment.
. Write ATI’ENTION REPAIR DEPARTMENT on the

shipping label.

e Filloutandindudetheserviceformwhichislocatedat

the back of this or one of the other instruction manuals.

1.9 COMPUTER REQUIREMENTS

The following paragraphs discuss minimum computer
requirements, supported graphics and interface cards,
supported plotters and printer, and required system soft-

ware.

Table 1-2. Computer Hardware Requirements

Description

Computer
MinimumRAM
Disk drives

Monitor/graphics

card
Instrument interface
Plotter/printer inter­face

‘Compatible 386.based machines such as the Compaq 386 can also
be used. NOTE: When using Compaq portable, select IBM graphics
mode (see Compaq manual). Compaq graphics are not supported.

IBM AT, PS/Z, or compatible*
640KB
Hard drive, one l.Z.MB 5-l/4”
or 720KB 3-l/2” floppy disk
drive
Color or monochrome (see
Table l-3)
IEEE488 (see Table 14)
Serial, parallel, or IEEE488

times. A 386-based computer is recom­mended for best performance.

1.9.2

Supported Graphics Cards

Table l-3 summarizes the graphics cards supported by
Model 82-DOS.

Table 1-3.

Graphics Cards Supported by

Model 82-DOS

Graphics Boards

1

IBM CGA or 100% compatible
IBM EGA or 100% compatible
IBM VGA or 100% compatible (EGA mode)
Tseng EVA
Tecmar Graphics Master
Hercules Monochrome or 100% comuatible
T&Video AT
T&Video HRCGB
Sigma Color 400
AT & T 6300

corona PC

corona PC400

Corona ATP
H.P. Vectra
T. I. Professional
Genoa SuperEGA HiRes

NOTE: VGA operates in EGA made.

1.9.3

Supported IEEE-488 interfaces

I

Thecomputermustbeequippedwithasuitable~EE-488

interface so that it can communicate with the Models
230-L 590, and 595. Table 14 summarizes IEEE-488 inter­faces supported by Model 82-DOS.

1.9.1 Computer Hardware Requirements

Model 82-DOS is intended to run on an IBM AT, PS/Z, or
compatible computer. Compatible 386-based machines
such as the Compaq 386 can also be used. Table 1-2 sum­marizes therequiredATcomputerconfiguration,includ­ing minimum RAM, disk drive complement, and inter­faces required.

NOTE
Although not required, a coprocessor is rec­ommended to minimize analysis calculation

Table l-4. IEEE-488 Interfaces Supported

by Model 82-DOS

Interface

GP488/GP488A/

1 Manufacturer

IOtech

Power488
PC II, PC IL4, or PC III

PC488 and 4488~CEC
GPIB
GP488/2*

‘For B/2 computers

National Instruments
Keithley Instruments
IBM
IO&h

I

l-3

SECTION 1
General Information

1.9.4

Recommended Printers and
Plotters

In order to obtain hard copy plots of your curves, it will

be necessary for you to connect a suitable printer or plot-

ter to the serial or parallel port of your computer.
Tablel-5 summarizes recommended printers, and
Table 1-6 summarizes recommended plotters. Note that
the plotters must support HPGL graphics language.

Table 1-5. Recommended Printers

Printer

NEC 8023,8025, C. Itoh Prowriter
Cannon BJSO, Epson IX, RX
Okidata 92,93
Smith Corona DlOO, Epson MX, IBM Graphics
Tektronix 4695/6
C. Itoh 24LQ, Toshiba 24 pin
Epson LQ1500, HP Laser Jet+*
Okidata 192+
HP Think Jet
NEC Pinwriter

Table 1-6. Recommended Plotters

Hewlett-Packard 7470,7475,7440
Watanabe IX&-Plot
Houston DMP-XX
Roland DXY-800

NOTE All plotters must support HPGL graphics
language.

Additional plotter and printer requirements, including
how to configure the software for the plotter and printer
type, and maximum resolutions are discussed in para­graph 2.4.8.

1.9.5 System Software Requirements

As summarized in Table l-7, the required installed sys­tem software includes MS-DOS or PC-DOS (version 3.2
or higher). IOtech Driver488 is supplied with Model
82-DOS. Microsoft BASIC 7.1 (not supplied) is required
only if you intend to modify the software in some way.

‘Compatible HI’ laser printers may also be used.

Table 1-7. System Software Requirements

I Software

MS-DOS or PC-DOS, Version 3.2 ox higher
Microsoft BASIC, Version 7.1* Compile/link source code
IOtech Driver488** or Driver488/2 IEEE-488 interface driver

‘BASIC 7.1 is not supplied and is required only for those who wish to modify one of the program.
“Driver488 is supplied with Model 82-DOS.

Additional information on software installation is cov­ered in paragraph 2.4.

I Comments

Operating system

l-4

SECTION 1

General Information

1.10 SERVICE AND CALIBRATION

Service and calibration information on the Models 590,
595, and 230-l can be found in their respective manu­als.The Model 5951 Remote Input Coupler cannot be cali­brated or repaired by the user, so it must be returned to
the factory or authorized service center for repair or cali­bration. If the Model 5951 is to be returned, proceed as
follows:

1. Complete the service form at the back of the manual
and include it with the unit.

2. Care~vuacktheunitintheori~inalpackinacarton
or its eq&lent.

3. Write ATTENTION REPAIR DEPARTMENT on the
shipping label.

-_ -

1.11 OPTIONAL ACCESSORIES

1.11.1 Connecting Cables

Model 4801 Low-noise Cable: Low-noise coaxial cable,

1.2m (48 in.) in length, with a male BNC connector on
each end.

(metric). Available as Model 7007-l Urn, 3.3 ft. long), and

Model 7007-2 (2x11,6.6 ft. long).

Model 7051 BNC to BNC Cables: 5O.Q (RG-58C) BNC to
BNC coaxial cables, available as Model 7051-2 (0.6x11,2 ft.

long), Model 7051-5 (1.5~ 5 ft. long), and Model 7051-10
(3m, 10 ft. long).

1 .l 1.2

Model 1019A-2 Fixed Rack Mount Kit: Mounts theMod­&230-l and595sidebysideinastandard19~inchrackor
equipment cabinet.

Model 2288 Fixed Rack Mount Kit: Mounts the Model
590 in a standard 19 inch rack or equipment cabinet.

Model 8000-14 Equipment Cabinet: A standard 14-inch
high, 19 inch wide equipment cabinet, which can be used
to enclose the Model 82-DOS instruments. Rack mount
kits (above) are also required.

Rack Mount Kits

Model 4803 Low-noise Kit: Includes 15m (50 ft.) of low­noise coaxial cable, 10 male BNC connectors, and five fe­male chassis-mount BNC connectors.

Model 7007 Shielded IEEE-488 Cables: Shielded
IEEE-488 cables with a shielded connector on each end

1 .I 1.3

The Model 5958 C-V Software Utilities add BTS (bias

temperature stress) and Zerbst (C-t measurement and
analysis) capabilities to the Model 82-DOS. A user-sup­plied Temptronic 0315B Thermochuck is required for the
BTS utility.

Software Utilities

1-5

SECTION 2

Getting Started

2.1 INTRODUCTION

Section 2 contains introductory infomation to help you
get your system up and running as quickly as possible.
Section 3 contains more detailed information on using
the Model 82-DOS system.

section 2 contains:

2.2 Hardware Configuration: Details system hardware
configuration, cable connections, and remote input
coupler mounting.

2.3 System Power Up: Covers the power up procedure
for the system, environmental conditions, and
warm up periods.

2.4 Computer Hardware and Softwm Installation:
Outlines methods for installation of the computer
software and hardware.

2.5 Software Overview: Desaibes the purpose and
overall configuration of the Model 82-DOS soft­ware.

2.6 SystemCheckout:Givestheprocedureforchedcing
out the system to ensure that everything is working
properly.

2.2 HARDWARE CONFIGURATION

The system block diagram and connection procedure are
covered in the following paragraphs.

2.2.1

An overall block diagram of the Model B-DOS system is
shown in Figure 2-l. The function of each instrument is
as follows:

Model 230-l Voltage Sauce: Supplies a DC offset volt­age of up to rtlOOV, and also contmls operating frequency
of the Model 5951 Remote Input Coupler.

Model 590 C-V Analyzer: Supplies a 1OOkHz or 1MHz
test signal and measures capacitance and conductance
when making high-frequency or simultaneous C-V
measurements.

Model 595 C-V Meter: Measures low-frequency (quasis­tatic) capacitance and Q/t, and also supplies the stepped
bias waveform (?zZOV maximum) for simultaneous low­and high-frequency C-V measurement sweeps.

System Block Diagram

2-1

SECTION 2
Getting Started

Figure 2-Z.

_--

I

System Block Diagram

output

TO 590 Otiput

1 0”tD”t I

Model 5951 Remote Input Coupler. Connects the Model
590 and 595 inputs to the device under test. The input
coupler contains tuned circuits to minimize interaction

between low- and high-frequency measurements.

Computer (IBM AT or PW2): Provides the user interface
to the system and controls all instruments over the
IEEE-488 bus, processes data, and allows graphing of re­sults.

Model 5909 Calibration Set: Provides capacitance refer­ence sources for cable correcting thesystem to the test fix­ture.

2.2.2 Remote Input Coupler

The Model 5951 Remote Coupler is the link between the
test fixture (which contains the wafer under test) and the

measuringinstruments,theModels590 and595.Theunit
not only simplifies system connections, but also contains
the circuitry necessary to ensure minimal interaction be­tween the low-frequency measurements made by the
Model 595, and the high-frequency measurements made
by the Model 590.

The front and rear panels of the Model 5951 are shown in
Figure 2-2 and Figure 2-3 respectively. The front panel
includes input and output jacks for connections to the de­vice under test, as well as indicators that show the se­lected test frequency 0OOkHz or lh@Iz) for high-fre­quency measurements. The rear panel includes a binding
post for chassis ground, BNC jacks for connections to the
Models 590 and 595, a ribbon cable connector (which con-

nects to the Model 230-l digital I/O port), and a digital
I/O port edge connector providing one TTL output, four
TTL inputs, digital common, and +5V IX.

2-2

SECTION 2

Getting Started

0

OUTPUT and INPUT - BNC jacks used to con­nect the Model 5951 to the test fixture containing
the device under test.

2 Frequency indicators (1OOkHz and 1MHz) -

3

Shows the selected test fxquency for high-fre­quency c-v measurements.

‘igwe 2-2.

Model 5951 Front Panel

6

WARNING
Maximum voltage between the outer shell of the BNC
iacks and earth mound is 30V RMS. Maximum OUT­PUT voltage is ZiOV; maximum INPUT voltage is 30V
peak. Exceeding these values will create a shock haz­ard.

2-3

SECTION 2
Getting Stark-d

CHASSIS binding post-Provides a convenient
connection to chassis ground of the Model 5951.

WARNING
Connect CHASSIS to earth ground to avoid a possible
shock hazard. Use #I6 AWG or larger wire.

2 Ribbon cable-connects to the Model 230-l digi-

3

talI/Oportforfrequencyswitchingoftheremote
coupler.

A

3 DIGlTAL I/O - Passes through the Model 230-l

3

dlgtal I/O port signals for control and sensing of
other components (for example, light control and
door dosed status).

‘igure 2-3.

Model 5951 Rear Panel

4 TO 590 INPUT - Connects to the Model 590 IN-

0

0

0

PUT jack on the front panel of the instrument.

5 TO 590 OUTPUT - Connects to the Model 590

OUTPUT jack on the front panel.

6 TO 595 METER INI’UT- Connects to the Model

595 METER INPUT jack on the rear of the ins&u­ment.

WARNING

Maximum voltage between the outer shell of the BNC

jacks and earth ground is 30V RMS.

2-4

SECTION 2

Getting Started

2.2.3 System Connefitions

Supplied Cables

Table 2-l summarizes the cables supplied with the
Model 82-DOS system along with the application for

each cable. Note that low-noise cables are provided for
making connections between the chuck and the C-V
measurement instruments. The Model 4801 cables are

each four feet long. Be careful not to use the Model 7051
BNC cables in place of the low-noise cables (Model 4801),
as doing so will have detrimental effects on your meas­urements.

Connection Procedure

Use Figure 2-4 and Figure 2-5 as a guide and connect the

equipment together as follows. Note that the stacked ar-

Table 2-1. Supplied Cables

rangement shown in the figures is recommended, but
other setups can be used, if desired.

NOTE
AU equipment should be turned off when
making connections.

1. Connect a Model 4801 cable between the Model 590
INPUT jack and the TO 590 INPUT jack of the Model
5951 Remote Input Coupler. Connect a second
Model 4801 between the Model 590 OUTPUT jack
and the TO 590 OUT jack of the Model 5951.

2. Connect &Model 5951 INPUT and OUTlWT jacks
to the chuck test fixture using Model 4801 cables.

NOTE

OUTPUT should be connected to the sub-

strate contact, and INPUT should be con-

netted to the gate metallization contact. This

arrangement will minimize reading noise.

I

Quantity 1 Model ( Description

5 4801 4’ BNC Low Noise
3 7051-2 2’ BNC (RG-58)
2 7007-l lm shielded IEEE-488
1 7007-2 2m shielded IEEE-488

1 1. 1 Ribbon cable

‘Supplied with Model 5951 (Pati No. CA-911

595

C-V Meter Voltage salrce

590

C-V Analyzer

OUtpUt

Input

230-l

/

/

1 Amlication

5951 Remote
Input Coupler

-- I

NOTE: Connect 5951 output 10

substrate, input to gaie

I

To Test

Fixture

Fiwre

2-4. Svstem Front Panel Connections

2-5

SECTION 2
Getting Started

590 ‘” 590

Input oulput

nnnnnnnnnnnnnn

J

I-\ 1

I I

‘I

Figure 2-5. System Rear Panel Connections

3. Connect the Model 5951 TO 595 METER INPUT jack
to the Model 595 METER INPUT jack using a Model

4801 cable.

4. Connect theribboncable totheModel5951,andthen

connect the opposite end of the cable to the digital
I/O port of the Model 230-l. Both connectors are
keyed so that they can be installed only in one direc­tion.

5. Using a Model 7051 cable, connect the Model 595

METER COMPLETE OLJTl’LlT to the EXTERNAL
TRIGGER INPUT jack of the Model 590.

6. Using a second Model 7051 BNC cable, connect the

Model 595 VOLTAGE SOURCE OUTPUT to the
OUTPUT LO of the Model 230-l Voltage Source. In a
similar manner, use a Model 7051 BNC cable to con­necttheModel230-1 OUTPUTHI to&EXTERNAL
BIAS IM’IJT of the Model 590 C-V Analyzer.

7. Connect the Model 5951 chassis ground post to earth

ground using heavy copper wi&

WARNING
The Model 5951 must be connected to earth
ground using #16 AWG or larger wire.

_

plied IEEE-488 cables. Typically the shorter cables will be
used to connect the instruments together, while the
longer cable connects the instruments group to the com­puter. Figure 2-6 shows a typical arrangement for
IEEE-488 bus connections. See paragraph 2.4 for a de­scription of IEEE-488 interfaces for the IBM computer.

2.2.5

In many cases, the wafer prober will be located inside a
faraday cage to minimize noise. In these situations, the
remotecoupleritselfcanalsobeplacedinsidethecagefor
convenience and to
course, there is sufficient room.

The coupler can be permanently mounted to the sides or
top of t&z faraday cage by rembving the rubber feet and
using the threaded holes in the bottom case for mount­ing. Appropriate mating holes can be drilled in the fara­day cage, and the coupler should be secured to the cage

with #6-32 screws of sufficient length.

Remote Coupler Mounting

minimize cable lengths, assuming of

2.2.4

In order to uSe the system, the instruments must be con- case,ortheymaycontact thecircuitboardin-

netted to one another and the computer using the sup-

2-6

IEEE-488 Bus Connections

Be sure that the mountine screws do not ex­tend more than l/4” in& the Model 5951

side.

CAUTION

Getting

SECTION 2

Figure2-7showsatypicalinstallationforcouplermomt­ing, including suggested cable routing. Note that the
Model 5951 chassis should be grounded to the faraday

595

C-V Meter

Figure 2-6.

230-I

Voltage source

C-V Analyzer

System IEEE488 Connections

cage by connecting a grounding strap or wire between
the cage and the coupler chassis ground binding post.

compatible) computer

‘igure 2-7. Remote Coupling Mounting

2-7

SECTION 2

Getting Started

2.3 SYSTEM POWER UP

Line voltage selection, power connections, environ­mental conditions, and instrument warm-up periods are
covered in the following paragraphs.

2.3.1

The Model 230-1,590 and 595 are designed to operate
from 105-125V or ZO-25OV, 50 or 60Hz AC power
SOUTC~S (special transformers can be factory installed for
90-1lOV and 195-235V AC voltage ranges). The factory
setting for each instrument is marked on the rear panel of
that particular instrument. The operating voltage for
each instrument is either internally or externally selec­table; see the appropriate instruction manual for details.

Instrument Power Requirements

CAUTION

Do not attempt to operate an instrument on a
supply voltage outside the allowed range, or
instrument damage may occur.

2.3.4

The system can be used immediately when all in&u­ments are first turned on; however, to achieve rated sys­tem accuracy, all instruments should be turned on and al­lowed to warm up for at least two hours before use.

2.3.5

Follow the general procedure below to power up the
Model 82-DOS system.

1.

2.

3.

4.

Warm Up Period

Power Up Procedure

Connect the instruments together as outlined in
paragraph 2.2.3.
Connect the instruments to the IEEE-488 bus of the
host computer following the procedure given in
paragraph 2.2.4.

Turn on the computer and boot up its operating sys-

tem in the usual manner. Refer to the computer
documentationforcompletedetailsforyourparticu­lar system.
Turn on each instrument by pressing in its front
panel power switch. Verify that each instrument
goes through its normal power up routine, as de­scribed below.

2.3.2 Power Connections

Each instrument should be connected to a grounded AC
outlet using the supplied AC power cord or the equiva­lent.

WARNING
Each instrument must be connected to a
grounded outlet using the supplied power
cord in order to ensure continued protection
from possible &chic shock. Failure to use a
grounded outlet and a 3-w& power cord
may result in personal injury or death be­came of electric shock.

2.3.3 Environmental Conditions

For maximum measurement accuracy, all instruments
and the remote coupler must be operated at an ambient
temperature between 0 and 40°C at a relative humidity
less than 70%, and within *5’=C of the cable collection
temperature.

Model 230-l

The instrument first turns on all LEDs and segments.

The software revision level is then displayed as in

this example:
813
The unit then displays the primary address:
IE 13
Verify the primary address is 13; set it to that value if

not.
The unit begins normal display.

Model 590

1.

The Model 590 first displays the software revision
level as in this example:

590 REV D13

2.

The instrument then displays the programmed pri­mary address:

IEEE ADDRESS 15

Verify the address is 15; program it for that value if
not.

2-8

SECTION 2

Getting Stuarted

3. Finally, the unit begins displaying normal readings.

Model 595

The instrument first displays the ROM self-test mes­sage:

*.a
The unit then displays normal readings.

Press MENU and verify the primary address is 28;
set it to that value if not.

2.3.6 Line Frequency

The Models 230-l and 590 can be operated from either 50
or 6OHz power sources with no further adjustments.
However, for the Model595 to meet its stated noise sped­fications, the unit must be programmed for the line fre­quency being used. To set or check the Model 595 line fre­quency, proceed as follows:

1.

Turn off the Model 595 if it is presently huned on.

2.

Press and hold the MENU button and then turn on
the power. Release the MENU button after the dis­play blanks on power up.

3.

Press the MENU button and note that the frequency
selection prompt is displayed:

2.4.1

Interface Card Installation

Model 82-DOS can be used with the following IEEE-488

interfaces:

l IOtech GP488, GP488A, or Power488

. National Instruments PCIl, PCIIA, and XIII

l Keithley Instruments PC-488-CEC and 4-488~CEC
l Capitol Equipment Corp. PC-488 and 4488

. IBMGPIB
. IOtech GP488/2 (for I’S/Z)

Note that all the above cards except the Gl’488/2 canuse

the Driver488 bus driver supplied with Model 82-DOS.

Before installation, note the following interface board

settings so that you can properly configure the bus driver
software during driver software installation:

l I/O port address

. DMA status

l Interrupts
l System controller

After noting these settings, install the interface card in the

computer. Refer to the documentation supplied with the
card for detailed installation procedures.

Fr=50
or,

Fr=60

4.

Use the ADJUST keys to toggle the unit to the de­siredfrequency.

5.

Press SHIFT EXIT to return to normal operation.
Note that the frequency selection prompt will re­main in the menu until power is removed.

2.4 COMPUTER HARDWARE AND SOFTWARE INSTALLATION

The following paragraphs discuss interface installation
and installation of the supplied Model 82-DOS software.
Required installation steps include:

l IEEE488 interface card installation
l Model 82 software installation
l IEEE488 driver software installation

. CONFIG.SYS file modification.

2.4.2

Software backup

Before installing the software on your hard disk, it is
strongly recommended that you make backup copies of
each of the disks supplied with Model 82-DOS. Use the
DOS DISKCOPY command to make copies. For two­floppy disk systems, the general command syntax is:

DISKCOPY A: B: <Enter>

Here, the source disk is assumed to be in drive A, and the
target (copy) disk is in drive B.

Similarly, the command for single-floppy drive systems
is:

DISKCOI’Y A: A: <Enter>

After copying all supplied disks, put the original disks

away for safekeeping.

2-9

SECTION 2
Getting Started

2.4.3

Memory and Hard Disk
Considerations

In order to use the Model 82-DOS software, you should
have at least 500KB free RAM before running the pro­gram. A minimum of 4MB of free hard disk space is also
recommended. Of course, the amount of space required
depends on how many date and parameter files you in­tend to save.

2.4.4 Model 82-DOS Software
Installation

Follow the appropriateprocedure below to install the
Model 82-DOS software on your hard disk. The follow­ingzEeraphs discuss usingINSTALL.EXE to install the

Place the installation disk in drive A: or B:, then type:

1.

A: <Enter>

0*

B: <Enter>

Type the following to start the installation process:

2.

INSTALL <Enter>

Follow the prompts on the screen to select the direc-

3.

tories for the various Model 82-DOS files and pro­grams.Youcanselectinstallationdefaults,whichare
summarized in Table 2-2, or your own directory
names, as desired.
Continue theinstallationprocessbyselectingappro-

4.

priate graphics cards, printers, and plotters at the ap­propriate prompts. Table 2-3 summarizes graphics
cards, and Table 2-4 lists supported printers and

plotters. Also, refer to paragraph 2.4.8 below for cer-

tain plotter and printer considerations.

NOTE

INSTALL.EXE can also be used to reconfigure
the software after installation. Select the
reconfigure option to change an existing soft­ware configuration Also, you can run
EQUP.EXE to change only graphics cards,
printers, or plotters settings once installation
is complete.

Model S2-DOS will run properly on most

VGA, Super VGA, and 8514 monitor corn­putersystemsintheEGAmodeTouseMode1
82-DOS with any of these gmphics systems,
select the EGA graphics mode at the appropri­ate prompt.

NOTE

Table 2-2. Default Directories

.EXE, configuration file, configgpc
.FWI or other files needed by .EXE
cable calibration file,

CABLECAL.EXE;
CV\MODEL82\DAT
CV\MODEL82\l’AR
CV\MODEL32\SRC

NOTE: C:\IEEE488 is not created by Model &?-Do5 installation program. Refer to bus driver installation instructions.

FILEMP.G.EXE file merge,

Z-10