The following safety precautions should be observed before using the
Model 7153 and the associated instruments.
This matrix card is intended for use by qualified personnel who recognize
shock hazards and are familiar with the safety precautions required to
avoid possible injury. Read over this manual carefully before using the
card.
ALWAYS remove power from the entire system (mainframe, test instruments, DUT, etc.) and discharge any capacitors before doing any of the
following:
1. Installing or removing the matrix card from the mainframe.
2. Connecting or disconnecting cables from the matrix card.
Exercise extreme caution when a shock hazard is present at the test fixture.
User-supplied lethal voltages may be present on the fixture or the connector jack. The American National Standards Institute (ANSI) states that a
shock hazard exists when voltage levels greater than 30V RMS or 42.4V
peak are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.
Do not exceed 1300V between any two pins or between any pin and chassis ground.
Inspect the connecting cables and test leads for possible wear, cracks, or
breaks before each use.
For maximum safety, do not touch the test fixture, test cables or any instruments while power is applied to the circuit under test.
Do not touch any object which could provide a current path to the common side of the circuit under test or power line (earth) ground.
Do not exceed the maximum signal levels of the test fixture, as defined in
the specifications and operation section of this manual.
Do not connect the matrix card (or any other instrumentation) to humans.
Do not connect the matrix card directly to unlimited power circuits. This
product is intended to be used with impedance limited sources. NEVER
connect the tmatrix card directly to AC mains.
When connecting sources, install protective devices to limit fault current
and voltage to the card.
The chassis connections must only be used as shield connections for
measuring circuits; NOT as safety earth ground connections.
The outer shields (including the triax connector shells) of the Model
7153-TRX are not connected to safety earth ground. NEVER apply more
than 30V to these shields.
To prevent voltages from being exposed or connections from shorting together, make sure cables are properly connected before applying voltage.
Do not apply power to cables that are not connected.
Model
MATRIX CONFIGIJRATION: 4 TOWS by 5 columns.
CROSSPOINT CONFIGURATION (Signal and Guard): Z-pole Form A.
CONNECTORTYPE: Miniature coax, M-Series Receptacle.
RELAY DRWE CURRENT: 40mA (per crosspoint).
MAx,MuM SlGNAL LEVEL:
IA carry / 0.5A switched.
IOVA peak (resistive load).
Maximum Between Any 2 Pins or Chassis: 13OOV.
Max,mum Between Signal and Guard: 200”.
CONTACT LIPB:
Cold Switching: 108closures.
Maximum Signal Level: lo5 closures.
PATH RESISTANCE: <IO per contact to rated life.
ACTUATION TIME: <2ms evctusivc of mainframe.
ISOLATION:
Path to Path: >lOW and <IpF.
Differential (Signal to Guard): >lO”Q and 4OOpF.
Gammon Mode 6tgnat and Guard to Chassis): >lOQ and 4OOpP.
CROSSTALK (Adjacent Path to Path): <-50dB at IMHz, 50 n load.
INSERTION LOSS (1 MHz, 5On Source, 5On Load): 0.1 dB typical.
3dB BANDWIDTH (500 Load): 60 MHz typical.
OPPSET CURRENT (Signal to Guard): 4pA (1OfA typical)
CONTACT POTENTIAL (Signal to Guard): <5OpV typical.
ENVIRONMENT:
Isolation and Offset Current Specifications: WC, 40% R.H.
~,~~wAI;~~~~“,;~~$$ up to 35°C at 70% R.H.
7153
Specifications
c
VIMENSIONS, WEIGHT: 30mm high x 114mm wide x 288mm long
x 11.34 in.,. Net weight 0.60 kg (20.0 oz.).
)RY
ACCESSC
surrLif3.D:
Insttiction manual
(1.18 in. x
SECTION 1
General Information
Contains information on Model 7153 features, specifications,
and accessories.
SECTION 2
Operation
Details installation of the Model 7153 High Voltage Low Current Matrix Card within theModel 705 and 706 scanners. covers
card connections, and also discusses matrix mainfrake programming and measurement considerations.
SECTION 3
Applications
Gives three typical applications for the Model 7153, including
semiconductor switching matrix, van der Pauw resistivity mearurements, and semiconductor parameter analysis using the HP
41150.
SECTION 4
Service information
Contains Matrix card cleaning and performance verification
procedures for the matrix card.
SECTION 5
Replaceable Parts
Lists replacement pans, and also includes component layout
and schematic drawing for the Model 7153
This section contains general information about the Model 7153 High
Voltage Low Current Matrix Card and is arranged as follows:
1.2 Features
1.3 Warranty Information
1.4 Manual Addenda
1.5 Safety Symbols and Terms
1.6 Specifications
1.7 Unpacking and Inspection
1.8 Repacking for Shipment
1.9 Optional Accessories
1.2 FEATURES
Key features of the Model 7153 High Voltage Low Current Matrix Card in-
clude:
. 4 x 5 (four row by five column) switching matrix.
l
Low offset current for low-current measurements.
1-1
SECTION 1
General
Information
1.3 WARRANTY INFORMATION
Warranty information is located on the inside front coverofthis instruction
manual. Should your Model 7153 require warranty service, contact the
Keithley representative or authorized repair facility in your area for further
information. When returning the matrix card for repair, be sure to fill out
and include the service form at the back of this manual in order to provide
the repair facility with the necessary information.
1.4 MANUAL ADDENDA
Any improvements or changes concerning the matrix card or manual will
be explained in an addendum included with the the unit. Be sure to note
these changes and incorporate them into the manual before using or serv-
icing the unit.
1.5 SAFETY SYMBOLS AND TERMS
The following symbols and terms may be found on an instrument or used
in this manual.
The A
the operating instructions located in the instruction manual.
The
sent on the terminal(s). Use standard safety precautions to avoid personal
contact with these voltages.
The WARNING heading used in this manual explains dangers that might
result in personal injury or death. Always read the associated information
carefully before performing the indicated procedure.
The CAUTION heading used in this manual explains hazards that could
damage the matrix card. Such damage may invalidate the warranty.
1-2
symbol on an instrument indicates that the user should refer to
symbol on an instrument shows that 1 kV or greater may be pre-
i
General Information
SECTION 1
1.6 SPECIFICATIONS
Model 7153 specifications are located at the front of this manual. These
specifications are exclusive of the mainframe specifications, which are located in their respective instruction manuals.
1.7 UNPACKING AND INSPECTION
1.7.1 Inspection for Damage
Upon receiving the Model 7153, carefully unpack it from its shipping carton and inspect the card for any obvious signs of physical damage. Report
any such damage to the shipping agent immediately. Save the original
packing carton for possible future reshipment.
1.72 Shipment Contents
The following items are included with every Model 7153 order:
. Model 7153 Iiigh Voltage Low Current Matrix Card.
. Model 7153 Instruction Manual.
. Additional accessories as ordered.
1.7.3
If an additional instruction manual is required, order the manual package,
Keithley part number 7153-901-00. The manual package includes an in-
struction manual and any pertinent addenda.
Additional Instruction Manual
1.8 REPACKING FOR SHIPMENT
Should it become necessary to return the Model 7153 for repair, carefully
pack the unit in its original packing carton or the equivalent, and include
the following information:
. Advise as to the warranty status of the matrix card.
l-3
SECTION 1
General Information
l
Write ATTENTION REPAIR DEPARTMENT on the shipping label.
. Fill out and include the service form located at the back ofthis manual.
1.9 OPTIONAL CABLE ASSEMBLY
The following cable assembly is available to make connections to the
Model 7153.
Model 7153-TRX - This 2-meter cable assembly is made up of five individual triax cables. One end of the cable assembly is terminated with a
miniature, multiple-contact plug that will mate to the matrix card receptacles. The other end of the cable assembly is terminated with five 3.slot
male triax connectors.
NOTE
Adapters that are available from Keithley are listed in Table
2-1.
l-4
SECTION 2
Operation
2.1 INTRODUCTION
This section contains information on aspects of matrix card operation and
is arranged as follows:
2.2 Handling Precautions: Details precautions that should be observed
when handling the matrix card to ensure that its performance is not de-
graded due to contamination.
2.3 Environmental Considerations: Outlines environmental aspects of
using the Model 7153.
2.4 Equivalent Circuit: Provides the simplified matrixcard circuitforthe
Model 7153.
2.5 Card Installation and Removal: Covers the basic procedures for installing and removing the matrix card from the Model 705 or 706 main-
frame.
2.6 Connections: Discusses card connectors, cables and adapters, and
typical connections to other instrumentation and DUT test fixtures.
2.7 Matrix Expansion: Shows how to expand the matrix by connecting
two or more matrix cards together.
2.8 Mainframe Control of Matrix Card: Covers the operating aspects
specific to the Model 71 S3.
2.9 Measurement Considerations: Reviews a number of considerations
when making low-level measurements.
2-1
SECTION 2
Operation
2.2 HANDLING PRECAUTIONS
To maintain high impedance isolation, care should be taken when handling the matrix card to avoid contamination from such foreign materials
as body oils. Such contamination can substantially lower leakage resistances, degrading performance.
To avoid possible contamination, always grasp the card by the side edges.
Do not touch the edge connectors of the card and do not touch board surfaces or components. When not installed in a mainframe, keep the card in
the bag and store in the original packing carton.
Dirt build-up over a period of time is another possible source of contamination. To avoid this problem, operatethe mainframe and matrix card only
in a clean environment.
If the card should become contaminated, it should be thoroughly cleaned
as explained in paragraph 4.2.
2.3 ENVIRONMENTAL CONSIDERATIONS
For rated performance, the card should be operated within the temperature and humidity limits given in the specifications at the front of this manual. Note that current offset and path isolation values are specified within a
lower range of limits than the general operating environment.
2.4 EQUIVALENT CIRCUIT
A simplified schematic of the Model 7153 4 x 5 matrix card is shown in
Figure 2-I. Each ofthe 20 crosspoints is made up of a two-pole switch. In
this simple configuration any row can be connected to any column by
closing the appropriate crosspoint. Mainframe control of matrix
crosspoints is covered in paragraph 2.8.
2-2
SECTION 2
Operation
rI
I
I
I
1)
I
I
2>
’ now
3>
I
4)
I
I
I
I
I--
Figure 2-1. SchematicofModel7753
-
A diagram of the Model 7153 is provided in Appendix A. This
system configuration worksheet makes it convenient to plan a
matrix system. Additional space is provided for drawings and
notes.
__--------
Column
1 2 3 4 5
“2
97
NOTE
-1
I
I
I
I
I
I
I
I
I
I
I
I
I
- _I
2.5 CARD INSTALLATION AND REMOVAL
The following procedures explain how to install and remove the Model
7153 matrix card from the Models 705 and 706 mainframes.
WARNING
To prevent electrical shock which could result in injury or
death, turn off the mainframe power and disconnect the line
cord before installing or removing matrix cards. If there are
2-3
SECTION 2
Ooeration
cables connected to the card, also remove power from those
circuits before proceeding.
CAUTION
Contamination will degrade the performance of the matrix
card. To avoid contamination, always grasp the card by the
side edges. Do not touch the board surfaces or components.
2.5.1
Perform the following procedure to install the Model 7153 Imatrix card in
either the Model 705 or Model 706 mainframe. Refer to Figure 2-2 to install the card in the Model 705 and refer to Figure 2-3 to install the card in
the Model 706.
1.
2.
3.
Matrix Card Installation
Slidethe card into the desired slot as shown in the appropriate illustra-
tion. Make surethe card edges ofthe bottom shield board are properly
aligned with the grooves in the receptacle.
Once the card is almost all the way in the slot, and you encounter resistance, push firmly on the edge of the card to seat it in the edge connector.
Once the card is fully seated, lock the card in place by placing the
latches in the locked position.
2-4
SECTION 2
ODeration
Figure 2-2. Card lnstahtion in a Model 705
-
2-5
SECTION 2
Operation
‘igure 2-3.
2.5.2
To remove the matrix card, first unlock it by pulling the latches outward,
then grasp the end of the card at the edges, and pull the card out of the
mainframe.
2.6
The information in the following paragraph explains how to connect the
matrix card to external test circuitry (instruments and DUTL
2-6
INSTRUMENT AND DUT CONNECTIONS
Card hstaallation in a Model 706
Matrix Card Removal
SECTION 2
Operation
CAUTION
Do not connect the matrix card to unlimited power circuits.
This product is intended for use with impedance limited
sources. Do not connect directly to AC mains.
When connecting an impedance limited source, install appropriate protection (such as a fuse or a clamping circuit) to limit
potentially damaging fault currents to the matrix card.
CAUTION
Contamination will degrade the performance of the matrix
card. To avoid contamination, always grasp the card by the
side edges. Do not touch the board surfaces or components.
Card connectors, recommended cables and adapters, and typical connections to instruments and DUT are discussed in the following paragraphs.
2.6.1 Card Connectors
The card connectors are shown in Figure 2-4. There are two miniature coaxial, multiple contact receptacles. One ofthe receptacles is used for row
connections and the other is used for column connections. Row and column number designations are included in the illustration. Notice that one
contact of each receptacle is reserved for chassis ground. For each coaxial
connector, as shown in Figure 2-5, the center conductor is SIGNAL, and
the outer shell (shield Iis GUARD.
2-7
SECTION 2
Operation
Note : Numbers indicate row and column paths.
Tzure 2-4. Model 7753 Connectors
&;a.;”
Max
Chassis Ground Connector
(1 Of 2)
IL----!
Warning : Do not exceed maximum
voltage levels shown.
t ‘igure 2-5. Miniature Connector Configuration
2-8
13oov
Max
SECTION 2
Operation
WARNING
Do not exceed 200V behveen SIGNAL and GUARD, or 13OOV
between SIGNAL and chassis ground, or behveen GUARD
and chassis ground or between paths (see Figure 2-5). Also,
do not exceed IA carry/500mA switched, 1OVA peak (resistive load).
CAUTION
To prevent damage to the matrix card and other equipment,
do not connect equipment such that they short out on the
same row or column.
2.6.2 Recommended Cables and Adapters
Table 2-1 summarizes the cables and adapters recommended for use with
the Model 7153.
NOTE
Equivalent user-supplied items may be substituted as long as
they are of sufficient quality (low offset current, high leakage
resistance). Using substandard cables and adapters may degrade the integrity of the measurements made using the matrix
card. See paragraph 2.9 for a discussion of measurement considerations.
The following discussion provides additional information about the recommended Keithley cable; Model 7153.TRX cable.
2-9
SECTION 2
Operation
Table 2-l. Recommended Cables and Adapters
Manufac-
tern
turer
1
Keithley
2
Keithley 6172
Keithley
Keithley 237-TRX-T
Keithley
Model or
Part No.
7153.TRX
237~BAN-3
Descriotion Applications
Matrix to triax
cable put connections
2.slot male to
3-lug female
triax adapter
3-14 female
to female triax
barrel male triax cable
3-&t male to
dual 3-lug tions for
female
3-slot triax to
male banana
plup
‘6172 is for use in low voltage kC5OOVrms) applications only.
7153 input/out-
Connect 3-slot
triax cable to
2-1~~ triax connector
Connect male
triax cable to
Dual connec-
7153.TRX
Banana plug cable
Model 7153-TRX Low Noise Matrix to Triax Cable
TheModel 7153-TRX is a 2-m&r cableassembly that is terminated with a
miniature coaxial, multiple contact plug at one end, and five 3-slot male
triax connectorsat the other end. The plug end of the cable will mate to the
ROW and COL receptacles of the matrix card. The triax connectors will
mate to standard 3-lug female triax connectors. Each triax cable is labeled
and corresponds to a ROW or COL as follows:
2-10
SECTION 2
Operation
Triax #II = Row 1 or Column 1
Triax #t2 = Row 2 or Column 2
Triax lt3 = Row 3 or Column 3
Triax $14 = Row 4 or Column 4
Triax +#5 = Column 5
On each triax connector, as shown in Figure 2-7, the center conductor is
SIGNAL, the inner shield is GUARD, and the connector shell is connected
to the outer shield of the cable. Note that this outer shield is connected to
chassis of the Model 7153.
Pill designations
molded on plug
housing
Pill
Designation
1
F
Figure 2.6.
-
Matrix Card
ROW or Column
Model 7753.TRX Pin
Note : Pin designations 1, 2. 4. 5 and 6
iv3 coaxial co”“octor~. Pill 3 is
a s,nc$e ,,I” connector for chassis
ground.
identification
2-11
SECTION 2
Ooeration
Signal
7153
Chassis
Ground
Warning : Do not exceed maximum
voltage levels shown.
Figure 2-7. Trim Connector Configuration (Model 71.53-TRN
2.6.3
The following paragraphs discuss connecting the Model 7153 to various
general classes of instrumentation such as DMMs, electrometers, sources,
and source/measure units. Because these configurations are generic in nature, some modification of the connecting schemes may be necessary for
your particular instrumentation. Also, special cables or adapters may be
necessary.
Figure 2-8 shows the general instrument connections for the discussions
below. Note that DUT guarding or shielding is not indicated here; see
Figure 2-18 and Figure 2-21 for shielding and guarding information. As
shown, all figures assume instruments are connected to rows, and the DUT
is connected to columns.
General Instrument Connections
WARNING
Do not use coaxial cables and adapters because hazardous
voltage from guard sources may be present on the cable
shields.
2-12
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