Tektronix 6517B User manual

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Model 6517B Electrometer

User's Manual

6517B-900-01 Rev. B August 2022

tek.com/keithley

*P6517B-900-01B*

6517B-900-01B

Electrometer

Model 6517B

User's Manual

Cleveland, Ohio, U.S.A.

Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,

without the prior written approval of Keithley Instruments, LLC, is strictly prohibited.

These are the original instructions in English.

All Keithley Instruments product names are trademarks or registered trademarks of Keithley

Instruments, LLC. Other brand names are trademarks or registered trademarks of their

respective holders.

Document number: 6517B-900-01 Rev. B August 2022

Safety precautions

The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous conditions may be present.

This product is intended for use by personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer to the user documentation for complete product specifications.

If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.

The types of product users are:

Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.

Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument. They must be protected from electric shock and contact with hazardous live circuits.

Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to mains. These instruments will be marked as category II or higher.

Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains.

Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test. ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.

When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.

Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground) connections.

If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid interlock.

If a screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.

The symbol on an instrument means caution, risk of hazard. The user must refer to the operating instructions located in the user documentation in all cases where the symbol is marked on the instrument.

The symbol on an instrument means warning, risk of electric shock. Use standard safety precautions to avoid personal contact with these voltages.

The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.

The symbol indicates a connection terminal to the equipment frame.

If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly disposed of according to federal, state, and local laws.

The WARNING heading in the user documentation explains hazards that might result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.

The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may invalidate the warranty.

The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor injury or damage the instrument. Always read the associated information very carefully before performing the indicated procedure. Damage to the instrument may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and all test cables.

To maintain protection from electric shock and fire, replacement components in mains circuits — including the power transformer, test leads, and input jacks — must be purchased from Keithley. Standard fuses with applicable national safety approvals may be used if the rating and type are the same. The detachable mains power cord provided with the instrument may only be replaced with a similarly rated power cord. Other components that are not safety-related may be purchased from other suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley office for information.

Unless otherwise noted in product-specific literature, Keithley instruments are designed to operate indoors only, in the following environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.

To clean an instrument, use a cloth dampened with deionized water or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

Safety precaution revision as of June 2018.

Table of contents

Introduction ............................................................................................................... 1-1

Welcome .............................................................................................................................. 1-1

Capabilities and features overview ...................................................................................... 1-1

Extended warranty ............................................................................................................... 1-2

Contact information .............................................................................................................. 1-2

General ratings ..................................................................................................................... 1-2

Unpacking and inspection for damage ................................................................................. 1-3

Returning instrument for service .......................................................................................... 1-3

Shipment contents ............................................................................................................... 1-3

Options and accessories ...................................................................................................... 1-3

Getting started .......................................................................................................... 2-1

Introduction .......................................................................................................................... 2-1

Front-panel overview ............................................................................................................ 2-1

Rear-panel overview ............................................................................................................ 2-4

Power the instrument on or off ............................................................................................. 2-6

Power-up sequence .................................................................................................................. 2-7

Using the menus .................................................................................................................. 2-9

Menu .................................................................................................................................... 2-9

SAVESETUP ........................................................................................................................... 2-10

COMMUNICATION ................................................................................................................. 2-11

CAL ......................................................................................................................................... 2-11

TEST ....................................................................................................................................... 2-11

LIMITS .................................................................................................................................... 2-12

STATUS-MSG ......................................................................................................................... 2-12

GENERAL ............................................................................................................................... 2-12

Display................................................................................................................................ 2-14

Exponent mode (engineering or scientific) .............................................................................. 2-14

Messages ................................................................................................................................ 2-15

Display instrument information ................................................................................................ 2-15

Measurement function displays ............................................................................................... 2-16

Saving setups ..................................................................................................................... 2-20

Save a user setup ................................................................................................................... 2-20

Restore a user setup ............................................................................................................... 2-20

Reset the instrument .......................................................................................................... 2-21

Factory default settings ........................................................................................................... 2-21

Connections .............................................................................................................. 3-1

Introduction .......................................................................................................................... 3-1

Electrometer input connector ............................................................................................... 3-1

Input configurations ................................................................................................................... 3-1

Maximum input levels ................................................................................................................ 3-2

Table of contents

User's Manual

Model 6517B Electrometer

Input protection ......................................................................................................................... 3-3

High-resistance meter connections ...................................................................................... 3-4

Voltage source output connections ...................................................................................... 3-5

Low-noise input cables......................................................................................................... 3-6

Shielding and guarding ........................................................................................................ 3-6

Noise shield............................................................................................................................... 3-7

Guard shield .............................................................................................................................. 3-8

Safety shield .............................................................................................................................. 3-9

Floating circuits .................................................................................................................. 3-10

Floating voltage source ........................................................................................................... 3-11

Test fixtures ........................................................................................................................ 3-12

Interlock................................................................................................................................... 3-12

Custom-built test fixtures ......................................................................................................... 3-14

Handling and cleaning test fixtures ......................................................................................... 3-18

Basic measurements ................................................................................................ 4-1

Introduction .......................................................................................................................... 4-1

Voltage measurements ........................................................................................................ 4-1

Basic voltage measurement procedure ..................................................................................... 4-2

Voltage configuration ................................................................................................................ 4-4

Current measurements ........................................................................................................ 4-5

Basic current measurement procedure ..................................................................................... 4-6

Current configuration ................................................................................................................. 4-8

Resistance and resistivity measurements ............................................................................ 4-9

Automatic voltage source .......................................................................................................... 4-9

Resistance ranges .................................................................................................................. 4-10

Resistance measurements ...................................................................................................... 4-11

Resistivity measurements ....................................................................................................... 4-14

Resistance configuration ......................................................................................................... 4-21

Resistance display .................................................................................................................. 4-22

Charge measurements....................................................................................................... 4-22

Basic charge measurement procedure ................................................................................... 4-23

Charge configuration ............................................................................................................... 4-24

Relative humidity and temperature readings ..................................................................... 4-26

Relative humidity ..................................................................................................................... 4-26

External temperature ............................................................................................................... 4-27

Internal scanning ................................................................................................................ 4-27

Configure internal scanner ...................................................................................................... 4-28

Perform an internal scan ......................................................................................................... 4-29

Close and open channels ........................................................................................................ 4-29

External scanning ............................................................................................................... 4-30

Trigger connections for external scanning............................................................................... 4-30

Configure external channels.................................................................................................... 4-30

Perform the scan ..................................................................................................................... 4-31

Model 6517B

of contents

Electrometer User's Manual Table

Maintenance .............................................................................................................. 5-1

Introduction .......................................................................................................................... 5-1

Line fuse ............................................................................................................................... 5-1

Line fuse replacement ............................................................................................................... 5-2

Change the line voltage ....................................................................................................... 5-3

Upgrading the firmware ........................................................................................................ 5-3

Status and error messages .................................................................................................. 5-3

Options and accessories ...........................................................1-3

Section 1

Introduction

In this section:

Welcome ...................................................................................1-1

Capabilities and features overview ...........................................1-1

Extended warranty ....................................................................1-2

Contact information ...................................................................1-2

General ratings .........................................................................1-2

Unpacking and inspection for damage ......................................1-3

Returning instrument for service ...............................................1-3

Shipment contents ....................................................................1-3

Welcome

The 6½-digit 6517B Electrometer/High Resistance Meter offers 1 fA sensitivity and > 200TΩ input impedance on voltage measurements and charge measurements down to 10 fC.

This manual provides basic instrument information to help you get started using the 6517B. It also provides information about the front and rear panels to familiarize you with the instrument.

Capabilities and features overview

The 6517B has the following measurement capabilities:

• DC voltage measurements from 1 μV to 200 V.

• DC current measurements from 10 aA to 20 mA.

• Charge measurements from 1 fC to 2 μC.

• Resistance measurements from 1 Ω to 10

• Surface resistivity measurements.

• Volume resistivity measurements.

• External temperature measurements from –25 °C to 150 °C using the supplied

Model 6517-TP thermocouple.

Ω.

• Relative humidity measurements from 0% to 100% using the optional Model 6517-RH

humidity probe.

User's Manual

100 to 240 V ac, 50 Hz or 60 Hz 100 VA maximum

See Rear-panel overview (on page 2-4).

For indoor use only

Pollution degree: 1 or 2

ection 1: Introduction Model 6517B Electrometer

Additional capabilities of the 6517B include:

• Built-in voltage source: The 100 V range provides up to ±100 V at 10 mA, while the 1000 V range

provides up to ±1000 V at 1 mA.

• Data storage (50,000 points).

• Built-in math functions.

• Average and median filtering.

• Built-in test sequences.

• Remote operation using the IEEE-488 (GPIB) bus or the RS-232 interface.

• Scan (measure) channels of an external scanner.

• Scan (measure) channels of an internal scanner card (for example, Model 6521 or Model 6522)

installed in the option slot.

Extended warranty

Additional years of warranty coverage are available on many products. These valuable contracts protect you from unbudgeted service expenses and provide additional years of protection at a fraction of the price of a repair. Extended warranties are available on new and existing products. Contact your local Keithley Instruments office, sales partner, or distributor for details.

Contact information

If you have any questions after you review the information in this documentation, please contact your local Keithley Instruments office, sales partner, or distributor. You can also call the Tektronix corporate headquarters (toll-free inside the U.S. and Canada only) at 1-800-833-9200. For worldwide contact numbers, visit tek.com/en/contact-tek

General ratings

The 6517B instrument's general ratings and connections are listed in the following table.

Category Specification

Supply voltage range

Input and output connections

Environmental conditions

1-2 6517B-900-01 Rev. B August 2022

Altitude: Maximum 2000 meters (6562 feet) above sea level Operating: 0 °C to 50 °C (32 °F to 122 °F), 70% relative humidity,

noncondensing, up to 35 °C (95 °F) Storage: −25 °C to 65 °C (−13 °F to 149 °F)

Model 6517B

Introduction

Electrometer User's Manual Section 1:

Unpacking and inspection for damage

The 6517B was carefully inspected electrically and mechanically before shipment.

There may be a protective film over the display lens, which can be removed.

Before removing the 6517B from the antistatic bag, observe the following handling precautions:

• Always grasp the 6517B by the cover.

• After removing the 6517B from its antistatic bag, inspect it for any obvious signs of physical

damage. Report any damage to the shipping agent immediately.

• When the 6517B is not installed and connected, keep the instrument in its antistatic bag and store

it in the original packing carton.

Save the original packing carton for future shipment.

Returning instrument for service

If you need to return the 6517B for repair or calibration, call 1-800-408-8165 or complete the form at

https://www.tek.com/en/services/repair/rma-request

When you request service, you need the serial number and firmware or software version of the instrument.

Shipment contents

The following items are included with every 6517B order:

• Model 6517B Electrometer with line cord

• 237-ALG-2 Low Noise Triaxial Cable, 3-slot triaxial to alligator clips, 2 m (6.6 ft)

• 8607 Safety High Voltage Test Leads

• 6517-TP Thermocouple Bead Probe

• CS-1305 Interlock Connector

• Accessories as ordered

• Certificate of calibration

Options and accessories

Check tek.com/keithley for options and accessories that are available for use with the 6517B.

6517B-900-01 Rev. B August 2022 1-3

Reset the instrument ...............................................................2-21

In this section:

Introduction ...............................................................................2-1

Front-panel overview ................................................................2-1

Rear-panel overview .................................................................2-4

Power the instrument on or off ..................................................2-6

Using the menus .......................................................................2-9

Menu .........................................................................................2-9

Display ....................................................................................2-14

Saving setups .........................................................................2-20

Introduction

Section 2

Getting started

This section provides power-up information and descriptions of the controls and components of the 6517B.

Front-panel overview

The front panel of the 6517B is shown below. The descriptions of the front panel controls follow.

Figure 1: 6517B front panel

Section

User's Manual

2: Getting started Model 6517B Electrometer

1 ANNUNCIATORS

EDIT: Editing voltage source values.

ERR: Questionable reading.

REM: In remote.

TALK: Addressed to talk.

LSTN: Addressed to listen.

SRQ: Service Request.

REL: Displayed reading has relative offset applied.

FILT: Digital filter enabled.

MATH: Math calculation enabled.

AUTO: Autoranging enabled.

ARM: Trigger armed; not in idle.

2 OPTION

Programs and operates an installed option card. Also used to scan external scanner channels.

* (asterisk): Reading is being stored.

3 HANDLE

Pull out and rotate to change the handle position.

4 VOLTAGE SOURCE OPERATE

Indicator is on when the voltage source is on. Off when in standby.

5 RANGE and AUTO

▲: When used to select a range, moves to a higher range. When used while editing values, it

increments the selected digit.

▼: When used to select a range, moves to lower range. When used while editing values,

decrements the selected digit.

AUTO: Enables or disables autorange.

6 VOLTAGE SOURCE

OPER: Toggles the voltage source between operate and standby.

▲ and ▼: Adjust the voltage source value.

2-2 6517B-900-01 Rev. B August 2022

Model 6517B

Getting started

Electrometer User's Manual Section 2:

7 OPERATION KEYS

Z-CHK: Enables or disables zero check. You must enable zero check before changing functions.

REL: Enables or disables a relative offset reading.

FILTER: Displays the digital filter status for the present function and toggles the filter.

MATH: Displays math calculation and toggles math if configured.

TRIG: Triggers the instrument to make a measurement.

SEQ: Performs the selected test sequence.

◄ and ►: Move cursor among data entry digits, menu selections, and information displays.

INFO: Shows context-sensitive information about the present display.

LOCAL: Cancels remote operation.

STORE: Enables data storage.

RECALL: Displays reading data (reading, number, time). Use the PREV and NEXT keys to

display the maximum, minimum average, and standard deviation of information in the buffer.

CONFIG: Configures functions and operations.

MENU: Saves or restores instrument conditions; sets up communications; performs calibration

and self-tests; defines limits; sets up the digital output; and other operations.

EXIT: Cancels selection or moves to previous menu option.

ENTER: Holds reading, enters selection, or moves down within the menu structure.

8 FUNCTION KEYS

Select the measurement function: Voltage (V), current (I), resistivity (R), or coulombs (Q).

9 DISPLAY KEYS

PREV and NEXT: Scroll through multiple displays of a function.

6517B-900-01 Rev. B August 2022 2-3

Section

User's Manual

2: Getting started Model 6517B Electrometer

Rear-panel overview

The rear panel of the 6517B is shown in the following figure. The descriptions of the rear-panel components follow the figure.

Figure 2: Model 6517B rear panel

1 INPUT CONNECTOR

Unguarded configuration: Disable GUARD for current, resistance, charge, and unguarded voltage measurements.

Guarded configuration: Enable GUARD for guarded voltage measurements.

Refer to Input configurations (on page 3-1

) for more information.

2 PREAMP OUT

Follows the signal amplitude applied to the INPUT terminal. When GUARD is on, PREAMP OUT is internally connected to the inner shell of the INPUT triaxial connector to configure the input for guarded voltage measurements. See "Preamplifier output" in the Model 6517B Reference Manual for more information.

2-4 6517B-900-01 Rev. B August 2022

Model 6517B

Getting started

Electrometer User's Manual Section 2:

3 COMMON

4 Chassis ground

Connects the chassis to ground through the power line cord. For use with a noise shield, refer to

Connector that is internally connected to INPUT low.

Noise shield (on page 3-7

COMMON can also be grounded by plugging the chassis ground cable into COMMON.

For safety concerns when making floating measurements, refer to Floating circuits (on page

10).

5 2V OUT

Connector that provides a scaled 0 V to 2 V analog output that is referenced to COMMON. Typically connected to a measuring device such as a chart recorder. Rated at 2 V dc maximum. See “2 V analog output” in the Model 6517B Electrometer Reference Manual for more information.

6 HUMIDITY

Connect the optional Model 6517-RH humidity probe to this connector for relative humidity measurements. See Relative humidity (on page 4-26

) for more information.

7 TEMP TYPE K

Connect the Model 6517-TP type K thermocouple to this connector for temperature measurements. See External temperature (on page 4-27

) for more information.

8 Power line input module

Provides connections for the power line input and contains the line fuse. If the fuse needs to be replaced, refer to Line fuse replacement (on page 5-2, on page 5-1

9 IEEE-488 CONNECTOR

Connects the instrument to the IEEE-488 (GPIB) bus. Refer to “Remote operations” in the Model 6517B Electrometer Reference Manual.

10 INTERLOCK

Connects the safety interlock to a test fixture using an appropriate cable. See Interlock

(on page

3-12) for more information.

11 RS-232

DB-9 connector for the RS-232 interface. Refer to “Remote operations” in the Model 6517B Electrometer Reference Manual.

12 DIGITAL I/O

A male DB-9 connector for the four TTL-compatible digital output lines. Refer to “Digital I/O” in the Model 6517B Electrometer Reference Manual.

6517B-900-01 Rev. B August 2022 2-5

Section

User's Manual

2: Getting started Model 6517B Electrometer

13 TRIGGER LINK

An 8-pin micro DIN connector for sending and receiving trigger pulses to and from other instruments.

14 V-SOURCE HI and LO

Safety banana jacks for the voltage source. Rated at 1000 V maximum.

15 OPTION SLOT

Power the instrument on or off

The power cord supplied with the 6517B contains a separate protective earth (safety ground) wire for use with grounded outlets. When proper connections are made, the instrument chassis is connected to power-line ground through the ground wire in the power cord. In the event of a failure, not using a properly grounded protective earth and grounded outlet may result in personal injury or death due to electric shock.

Do not replace detachable mains supply cords with inadequately rated cords. Failure to use properly rated cords may result in personal injury or death due to electric shock.

Before powering the instrument, verify that line input voltage is set to the correct range for the power supply used to power the 6517B. See Change the line voltage (on page 5-3) if you need to change the line input voltage.

A slot for option cards, such as the Model 6521 or Model 6522 scanner card.

Operating the instrument on an incorrect line voltage may cause damage to the instrument,

ssibly voiding the warranty.

To connect the power cord:

1. Make sure that the front-panel POWER switch is in the off (O) position.

2. Connect the socket of the supplied power cord to the ac receptacle on the rear panel.

3. Connect the plug of the power cord to a grounded ac outlet.

To turn a 6517B on or off:

• Before turning the instrument on, disconnect any devices under test (DUTs) from the 6517B.

• To turn your instrument on, press the front-panel POWER switch to place it in the on (|) position.

• To turn your instrument off, press the front-panel POWER switch to place it in the off (O) position.

2-6 6517B-900-01 Rev. B August 2022

Model 6517B

Getting started

IEEE-488 address

Electrically-erasable PROM

Power-up default

Electrically-erasable PROM

Calibration constants

Electrically-erasable PROM

Calibration dates

Electrically-erasable PROM

Instrument setups

Ten in electrically-erasable PROM

Reading buffer

Nonvolatile RAM

Electrometer User's Manual Section 2:

Power-up sequence

When the 6517B is powered up, it performs the following tests:

• Self-tests on its EEPROM and RAM

• Checksum tests on data stored in nonvolatile memory

If a failure is detected, the instrument momentarily displays an error message and the ERR annunciator turns on.

If the instrument passes the tests, the firmware revision levels and the communications status are briefly displayed. An example of this display is shown as follows:

Model 6517B Rev. A01 700x SCPI: 27

The firmware revision levels (left to right) are for the main microcontroller and display microcontroller. In the example above, SCPI indicates that the SCPI language is selected and 27 is the IEEE-488

address. If the RS-232 interface is selected, the message RS-232 MODE is displayed instead of the

IEEE-488 address.

If the instrument is configured to display the calibration due date when it is turned on, the calibration due date is displayed. The format is mm/dd/yy, where mmm is the month abbreviation, dd is the day,

and yy is the year. If no calibration date is set, the display shows that it is due now.

After the power-up sequence, the instrument opens to the main display with ZeroCheck displayed.

To achieve rate accuracies, allow the instrument to warm up for at least one hour before use.

Power-up error messages

The 6517B performs the following checksum tests on power-up.

Data Type of storage

6517B-900-01 Rev. B August 2022 2-7

Section

User's Manual

Error −314

Save/recall memory lost

Instrument setup is reset to bench defaults, which are stored in EEPROM.

Error +510

Reading buffer data lost

The reading buffer controls are reset to factory defaults,

store readings in the buffer.

Error +511

GPIB address lost

GPIB address is reset to factory default (27) and stored into EEPROM.

Error +512

Power-up state lost

Power-up defaults are reset to factory defaults (bench) and stored into EEPROM.

Error +514

Calibration lost

Calibration constants are set to factory default values,

values, perform a comprehensive calibration.

Error +515

Calibration dates lost

The calibration dates are set to factory default values,

values, perform a comprehensive calibration.

2: Getting started Model 6517B Electrometer

The error messages that may be displayed during the power-up sequence are summarized in the following table. These are shown when one of the checksum tests fails.

Message Description Action

but they are not stored into NVRAM. To store the values,

but they are not stored into EEPROM. To store the

Set the power-on defaults

You can select the instrument defaults that go into effect when the instrument is powered on.

For more information on the PRESET and *RST options, refer to Reset the instrument (on page

21). For more information on user setups, refer to Saving setups (on page 2-20).

To set the power-on defaults:

1. Press the MENU key to display the main menu.

2. Select SAVESETUP.

3. Press the ENTER key. The Setup Menu is displayed.

4. Select POWERON. Press the ENTER key.

5. Select the power-on default:

 PRESET: Set the instrument to a state optimized for front-panel operation.

 *RST: Set the instrument to a state optimized for remote operation.

 USER-SETUP-NUMBER: Select a user set up. Press the ENTER key, then use the RANGE

▲ and ▼ keys to select a user setup (0 to 9).

6. Press the ENTER key to save the power-on default setting.

2-8 6517B-900-01 Rev. B August 2022

Model 6517B

Getting started

Electrometer User's Manual Section 2:

Using the menus

The 6517B has main and configure menus. The main menu accesses items for which there are no dedicated keys. The configure menus set up measurement functions and other instrument operations.

To access the main menu, press the MENU key. The top level of the main menu is displayed. The main menu options are described in the following topics.

To access a configure menu, press the CONFIG key and then the function key (V, I, R, or Q) or operation key (such as TRIG, SEQ, or STORE). The configure menu options are described in the sections that describe the functions or options that you can configure.

To select a menu item, use the ◄ and ► keys to move the cursor, then press the ENTER key. The blinking menu item or parameter indicates the cursor position.

If there are additional items you can select, an arrow (◄ or ►) is displayed. Use the ◄ and ► keys to

display them.

To enter a numeric value, move the cursor to the digit to be changed and use the RANGE ▲ or ▼ key to increment or decrement the digit.

The main menu accesses the various instrument operations for which there are no dedicated keys, such as storage setup, communication setup, calibration, self-test, and limits. The main menu structure is summarized in the following table, along with the reference section number that includes more detailed information on that menu selection.

To display the top level of the main menu, press the MENU key. Refer to Using the menus 2-9) for more information.

The main menus of the 6517B are described in the following topics.

6517B-900-01 Rev. B August 2022 2-9

(on page

Section

User's Manual

Save the present setup at a memory location (0 to 9)

Saving setups (on page 2-20)

Return the instrument to a setup that was previously stored in memory.

Saving setups (on page 2-20)

Select the instrument setup that goes into effect when the

power-on default conditions.

Set the power on defaults (on

Resets the instrument to the bench or GPIB default

conditions.

Reset the instrument (on

2: Getting started Model 6517B Electrometer

SAVESETUP

The SAVESETUP option of the main menu is used for the following operations:

• To save the present instrument configuration in nonvolatile memory

• To restore the instrument to a previously saved instrument configuration

• To set the power-up configuration of the instrument

• To reset the instrument to a factory default configuration

The SAVESETUP menu options are described in the following table.

Menu item Description Refer to:

SAVE

RESTORE

POWERON

instrument is turned on. The options are:

page 2-8)

 PRESET: Return to the bench default conditions.  *RST: Return to the remote operation

default conditions.

 USER-SETUP-NUMBER: Select a user setup as the

RESET

conditions. The RESET options are:

page 2-21)

 BENCH: The instrument returns to the bench default

conditions.

 GPIB: The instrument returns to the GPIB default

2-10 6517B-900-01 Rev. B August 2022

Model 6517B

Getting started

Options to select and configure GPIB operations:

timestamp, status, and temperature)

Remote operations

temperature, and status.

View calibration dates.

Select whether to show calibration dates at powerup.

Select to open the FRONT PANEL TESTS menu.

Verify operation of the front-panel keys. When you press a key, the name of the key is displayed.

Displays all annunciators and characters on the display and runs a check of the display. Press the ► key to move through the displays for this test.

Display the entire character set. Press the ► key to move through the displays for this test.

Electrometer User's Manual Section 2:

COMMUNICATION

The COMMUNICATION menu option allows you to select and configure the GPIB or RS-232 bus.

Menu item Description

GPIB

Refer to the following section in the Model

6517B Electrometer Reference Manual

 ADDRESS: Check or change IEEE-488 bus address (0 to 30)  ELEMENTS: Selects GPIB data elements, including readings,

units, reading number, relative humidity, channel number,

CAL

TEST

RS-232

Options to select and configure RS-232 operations:

RS-232 serial interface

 BAUD: Selects the baud rate.  TERMINATOR: Select the terminating character.  FLOW-CTRL: Select the flow control.  ELEMENTS: Select the data elements to send, such as

reading, units, reading number, relative humidity, channel number, timestamp, internal temperature, external

The CALIBRATION menu displays the calibration dates and allows you to set the option to display calibration dates on power up.

For more information on calibration, refer to “Calibration procedure” in the Model 6517B Electrometer Reference Manual.

Menu item Description

VIEW

DISPLAY-AT-POWERUP

Select TEST to open a SELF-TEST menu. The options in this menu provide diagnostic tools to isolate problems with the 6517B front-panel display.

Menu item Description

DISPLAY-TESTS

KEYS

DISPLAY-PATTERNS

CHAR-SET

6517B-900-01 Rev. B August 2022 2-11

Section

User's Manual

Settings for limit 1:

 HILIM1: Set the value of high limit 1.

Settings for limit 2:

HILIM2:

Enable or disable the limit strobe signal of digital output 4 when a trigger occurs.

Specify patterns on digital outputs to signify limit pass.

LIMITS

2: Getting started Model 6517B Electrometer

The LIMITS menu sets and controls the limit values that determine the PASS or FAIL and HI or LO status of subsequent measurements and sets the digital output patterns that signify passing or failing limit checks.

For more information on these options, refer to “Limits” in the Model 6517B Electrometer Reference Manual.

Menu item Description

LIMIT-SET-1

 CONTROL: Enable or disable the limit 1 setting.  LOLIM1: Set the value of low limit 1.

LIMIT-SET-2

 CONTROL: Enable or disable the limit 2 setting.  LOLIM2: Set the value of low limit 2. 

STROBE-CONTROL

Set the value of high limit 2.

PASS-PATTERN

STATUS-MSG

This selection enables or disables the status messages. When enabled, status messages are displayed to identify specific operations that are performed. You can select:

• ON: Enable status messages.

• OFF: Disable the status messages.

When the status messages are enabled, the instrument may become so busy displaying status messages that key presses are no longer acknowledged. To clear the messages, press the EXIT

key. You can also send the bus command :DISPlay:SMESsage OFF to stop displaying messages.

GENERAL

The GENERAL menu:

• Controls the state and sense of the digital outputs.

• Allows you to view the serial number, SCPI version, and firmware revision levels of the 6517B.

• Sets line synchronization of readings, displays the frequency of the line power, and configures the

A/D to measure humidity and external temperature.

2-12 6517B-900-01 Rev. B August 2022

Model 6517B

Getting started

Sets up the digital output lines:

sense of digital output lines.

“Digital I/O” in the Model

Displays serial number, memory option SCPI version, and firmware revisions.

Display instrument information (on page 2-15)

Settings for the analog-to-digital converter:

FAST autorange speed.

“Line synchronization” in in

Configures the timestamp:

to zero.

“Set up timestamps” in the

Display menu:

(C, K, or F).

Display (on page 2-14)

Clock menu:

24-hour format)

Time, day, and date (on page

Electrometer User's Manual Section 2:

• Configures timestamp.

• Chooses the characters displayed for decimal and select measurement units.

• Sets the real-time clock.

Menu item Description Refer to:

DIGOUT

SERIAL #

A/D-CONTROLS

TIMESTAMP

 STATE: Checks or changes the states of the

digital output lines.

 LOGIC_SENSE: Displays or changes the

 LINE-SYNC: Enables or disables line

synchronization. Also displays the power-line frequency.

 DATA-STAMP: Configures the A/D to

measure the humidity and external temperature.

 LIMIT-CTRL: Enables or disables the A/D

hardware limit.

 AUTORANGE SPEED: Select NORMAL or

 TYPE: Check or change type. RELATIVE-

TIME references the timestamp to relative time. REAL-TIME references the timestamp to real time.

 RESET-TIME: Resets the relative timestamp

to zero.

 RESET-RDG#: Resets the reading number

6517B Electrometer Reference Manual

the Model 6517B Electrometer Reference Manual

Relative humidity and external temperature readings (on page 4-26)

“OUT OF LIMIT messages” and “Measurement range” in in the Model 6517B

Electrometer Reference Manual

Model 6517B Electrometer Reference Manual

DISPLAY

CLOCK

6517B-900-01 Rev. B August 2022 2-13

 NUMERIC-FORMAT: Selects measurement

units (engineering or scientific).

 TEMP-UNITS: Selects temperature units

 TIME: Checks or sets time of day.  DATE: Checks or sets date.  FORMAT: Selects clock format: (12-hour or

2-16)

Section

User's Manual

Picoamperes

-12

e-12A

Nanoamperes

10-9 A

e-9A

Microamperes

µA

10-6 A

e-6A

Milliamps

10-3 A

e-3A

Nanocoulombs

10-9 C

e-9C

Microcoulombs

µC

10-6 C

e-6C

Kilo-ohms

kΩ

103 Ω

e3Ω

Mega-ohms

MΩ

106 Ω

e6Ω

GΩ

e9Ω

Tera-ohms

TΩ

1012 Ω

e12Ω

Peta-ohms

PΩ

1015 Ω

e15Ω

2: Getting started Model 6517B Electrometer

Display

The display of the 6517B provides measurement readings with their units and types of measurements. It also displays informational messages, such as menu headings and selections. The top of the display has annunciators that indicate states of operation.

The top line of the display shows readings and units. It can also display the measurement type, hold, the math operation type, channel number, menu headings, and messages.

The bottom line of the display shows the range, voltage source value, menu items, messages, and NEXT displays. Longer text strings are indicated by arrows on either side of the text. Use the ◄ and ► keys to display the additional information.

Exponent mode (engineering or scientific)

Readings on the display can be expressed in engineering units or in scientific notation. Examples are shown in the table below. When scientific notation is selected, the exponent can be fixed to a specified value or it can be floating. When the exponent is set to float, the instrument automatically selects the exponent value.

Typical display exponent values

Engineering units Scientific notation

Value Display Value Display

Giga-ohms

109 Ω

2-14 6517B-900-01 Rev. B August 2022

Model 6517B

Getting started

Electrometer User's Manual Section 2:

To change how the readings are displayed:

1. Press the MENU key.

2. Select GENERAL.

3. Select DISPLAY.

4. Select NUMERIC-FORMAT.

5. To select:

 Engineering units: Select ENGR.

 Scientific notation: Select SCIENTIFIC.

6. Press the ENTER key.

7. If you select SCIENTIFIC, you can also select:

 Change value automatically to best fix data: FLOATING.

 A fixed value: FIXED.

8. Press the ENTER key.

Messages

Press the INFO key to view context-sensitive information on the display. An arrow on the bottom line indicates that there is more information. Use the ◄ and ► keys to view the complete line. To exit an INFO display, press the INFO, ENTER, EXIT, or a function key.

During 6517B operation and programming, the instrument may display front-panel status and error messages. To momentarily display the most recent status or error message, press the MENU key and press the PREV display key. The display is blank if no message is queued. For more information on status and error message, refer to Status and error messages (on page 5-3

Display instrument information

This item displays the serial number, SCPI version, and firmware revision levels of the instrument. The following information is displayed:

Serial #XXXXXXX Rev AYY.Y Disp:ZZZx A:E D:B H:E SCPI:1999.0

Where:

• #XXXXXXX is the serial number of the instrument

• AYY is the firmware level for the main microcontroller

• ZZZ is the firmware level for the display microcontroller

You can also use *IDN? to retrieve the serial number and firmware revision information.

6517B-900-01 Rev. B August 2022 2-15

Section

User's Manual

2: Getting started Model 6517B Electrometer

To display instrument information:

1. Press the MENU key.

2. Select the GENERAL menu.

3. Select SERIAL #.

4. Press the ENTER key.

Measurement function displays

Each measurement function has its own set of displays, shown in the bottom line of the front-panel display. Use the PREV and NEXT keys to scroll through the selections for the presently selected function.

The displays show a reading in a different form or give additional information about the reading. For example:

• Top line shows a reading.

• Bottom line shows a zero-center bar graph with adjustable limits.

• Calculations display if math is enabled.

Displays that are specific to a particular function or operation are discussed with that function or operation. The displays that are common to all measurement functions are:

• Time, day, and date

• Bar graph

• Zero-centered bar graph

• Maximum and minimum values

• Actual value without relative offset

• Calculated and actual values

• Limits bar graph

• Relative humidity and external temperature stamp

• Range and voltage source

Time, day, and date

This display provides the time, day of week, and the date. The time, date, and format (12-hour or 24hour) are set using the CLOCK menu option. An example of the time and date display is shown in the following figure.

Figure 3: Time, day, and date display

2-16 6517B-900-01 Rev. B August 2022

Model 6517B

Getting started

Electrometer User's Manual Section 2:

To set the clock:

1. On the front panel, press the MENU key.

2. Select the GENERAL menu.

3. Select CLOCK.

4. Select DATE.

5. Use the ◄ and ► cursor keys and the RANGE keys to set the date. The day of the week (such

as Sun or Mon) is automatically calculated and displayed for the date.

6. Press the ENTER key.

7. Select FORMAT.

8. Select 12-HOUR or 24-HOUR.

9. Press the ENTER key.

10. Select TIME.

11. Use the ◄ and ► cursor keys and the RANGE keys to set the time (hours:minutes:seconds). To

set the seconds to zero, press the AUTO key. If 12-HOUR is set for the FORMAT, change the hour until AM or PM is displayed correctly.

Bar graph

12. Press the ENTER key.

The normal bar graph is a graphical representation of a reading as a portion of a range, as shown in the following figure. The vertical lines displayed along the bar designate 0%, 25%, 50%, 75%, and 100% of full scale. Each full segment of the bar represents approximately 4% of the range limit.

The right endpoint of the bar graph is + full scale of the present range for positive readings and − full

scale for negative readings. When the 100% line changes to an arrow, the reading exceeds the current range.

Figure 4: Bar graph display

6517B-900-01 Rev. B August 2022 2-17

Section

User's Manual

2: Getting started Model 6517B Electrometer

Zero-centered bar graph

The zero-centered bar graph is a graphical representation of a reading with positive and negative limits, as shown in the figure below. The limits are expressed in a user-selectable percentage of range.

The vertical lines displayed along the bar designate the positive and negative limits, zero, and halfway to either limit. There are ten full segments between zero and each end, so each full segment represents 10% of the limit. When a line at the limit changes to an arrow, the reading exceeds the programmed range.

Figure 5: Zero-centered bar graph display

The plus and minus percentage of range that is programmed (0.01% to 99.99%) applies to all functions. Because of rounding, values greater than 99.5% are shown as 100% and, likewise, values greater than 1% (such as 1.67%) are shown rounded to the nearest integer percent.

To view or change the percentage of range:

1. On a measurement function display, press the CONFIG key.

2. Press the NEXT or PREV key. The following is displayed:

ZERO-BARGRAPH±50.00%

3. Use the cursor keys and the RANGE keys to enter a numeric value (0.01% to 99.99%).

4. Press the ENTER key to change the bar graph.

2-18 6517B-900-01 Rev. B August 2022

Model 6517B

Getting started

Electrometer User's Manual Section 2:

Maximum and minimum

The maximum and minimum display shows the maximum and minimum readings since the display was entered. Math functions are not applied to the minimum and maximum. An example of the display is shown in the following figure.

To reset the maximum and minimum values, do one of the following actions:

Figure 6: Maximum and minimum display

• Press the function key for the presently selected function.

• Exit the display by changing the function or entering a menu.

The resolution, units, and prefix on the bottom line are the same as those shown for top line reading.

Relative humidity and external temperature

This display can provide relative humidity and external temperature readings if the appropriate sensors are connected to the instrument and enabled.

You can change the display of the temperature readings to be °C, K, or °F.

An example of the relative humidity and temperature display is shown in the following figure.

Figure 7: Relative humidity and external temperature display

For more information, refer to Relative humidity and external temperature readings (on page 4-26)

6517B-900-01 Rev. B August 2022 2-19

Section

User's Manual

2: Getting started Model 6517B Electrometer

To change the temperature units:

1. Press the MENU key.

2. Select the GENERAL menu. Press the ENTER key.

3. Select the DISPLAY menu. Press the ENTER key.

4. Select TEMP-UNITS. Press the ENTER key.

5. Set the units to °C, K, or °F. This setting also affects the display of internal temperature measurements.

Saving setups

The 6517B can save up to ten user setups in nonvolatile memory.

You can set one of the user-saved setups as the defaults when the instrument is powered on. Refer to Set the power-on defaults (on page 2-8).

Save a user setup

To save a user set up:

1. Press the MENU key to display the main menu.

2. Select SAVESETUP. Press the ENTER key. The Setup Menu is displayed.

3. Select SAVE. Press the ENTER key.

4. Use the RANGE keys to select the memory location, 0 to 9.

6. Press the ENTER key.

Restore a user setup

Use the RESTORE menu item to return the instrument to a setup that was previously stored in memory.

To restore a user set up:

1. Press the MENU key to display the main menu.

2. Select SAVESETUP. Press the ENTER key. The Setup Menu is displayed.

3. Select RESTORE.

4. Use the RANGE keys to select the memory location, 0 to 9.

5. Press the ENTER key to restore the setup.

2-20 6517B-900-01 Rev. B August 2022

5. Press the ENTER key to save the setup.

Model 6517B

Getting started

A/D Controls:

Line Synchronization

Data Stamp:

Temperature (external)

Off

Humidity

Off

Hardware Limit

Electrometer User's Manual Section 2:

Reset the instrument

You can reset the instrument to the bench or GPIB defaults.

The bench defaults are optimized for bench operation. These defaults are the same as the SYSTem:PRESet defaults. This setup selects the advanced trigger model, takes the 6517B out of

idle, set the control source of all layers to Immediate, and set the measure layer counter to infinite. With this trigger model setup, operation goes to the measure layer and stays there to make continuous measurements. Refer to “Triggering” in the Model 6517B Reference Manual for additional information.

The GPIB defaults are optimized for remote communications. These defaults are the same as the *RST defaults.

After resetting the instrument, the instrument returns to the normal display of readings. If you selected GPIB, the instrument is returned to the Idle state.

The basic measurement procedures in this manual assume the BENCH defaults.

To reset the instrument to a set of defaults:

1. Press the MENU key to display the main menu.

2. Select SAVESETUP. Press the ENTER key. The Setup Menu is displayed.

3. Select RESET. Press the ENTER key.

4. Select the defaults:

 To select the defaults optimized for bench use: Select BENCH.

 To select the defaults optimized for remote communications: Select GPIB.

5. Press the ENTER key. A message is displayed while the instrument is resetting.

Factory default settings

The factory default settings for the bench and GPIB default selections are shown in the following table.

Function or operation Bench default

GPIB default (*RST)

(SYSTem:PRESet)

6517B-900-01 Rev. B August 2022 2-21

Section

User's Manual

Buffer:

Control

Fill and stop

Count

No effect

Timestamp

No effect

Elements

No effect

Display

Yes

Clock

No effect

Communications:

Interface (GPIB or RS-232)

No effect

GPIB:

Address

No effect

Language

No effect

Talk-Only (printer setup):

Interface

IEEE-4888

Interval

1 1 Formfeed

Off

Page Size

60 Lines

Elements

(see note)

RS-232:

Control (send/receive or talk-only)

No effect

Talk-Only (printer setup):

Interval

1 1 Formfeed

Off

Page Size

60 Lines

Baud Rate

No effect

Terminator

No effect

Flow Control

No effect

Elements

No effect

Digital Output:

States

No effect

Logic Sense

No effect

Display

Display resolution

5½

Numeric Format

Engineering

Scientific Format

Floating Exp

Decimal Character

Period

Temperature Units

°C

Filter

Off

Digital filter

Averaging

Readings

Advanced

Off

Readings

Noise Tolerance Level

Filter Mode

Moving

Repeat

2: Getting started Model 6517B Electrometer

Function or operation Bench default

(SYSTem:PRESet)

GPIB default (*RST)

2-22 6517B-900-01 Rev. B August 2022

Model 6517B

Getting started

Median Filter

Rank

Current (Amps)

Damping

Off

Range

Manual (20 mA)

Autorange

Off

Limits

Use all ranges

Limits:

Limit Set #1 and #2

Off

Low Limit

-1.0

Action

High Limit

1.0

Action

0 0 Strobe Control

Off

Pass Pattern

Math

Off

Limits

High

R (Ohms):

Thickness

1.0 mm

Electrometer User's Manual Section 2:

Function or operation Bench default

(SYSTem:PRESet)

Function Percent Target Value Polynomial Constants: "a0" "a1" "a2" % Deviation Reference Deviation Reference Ratio Reference

Q (Coulombs): Auto Discharge Range Autorange

Polynomial

1.0

0.0

1.0

0.0

1.0

Off Manual (2 µC) Off

GPIB default (*RST)

Polynomial

1.0

0.0

1.0

0.0

1.0

Off Manual (2 µC) On

6517B-900-01 Rev. B August 2022 2-23

Amps Rel Damping Measurement Type Resistivity Type Fixture Ks, Kv

R (Ohms): Auto V-source Ohms Range Autorange Limits Manual V-source Ohms Range Autorange Limits V-source

Off Off Resistance Surface User

1.0

2 MΩ Off Use all ranges

Manual (200 kΩ) Off N/A Manual

Off Off Resistance Surface User

1.0

2 MΩ On Use all ranges

Manual (200 kΩ) Off N/A Manual

Section

User's Manual

Relative Value Auto

Off

0.0

Off

0.0

Resolution

Auto (5.5 d)

Scanning:

Speed

Normal (1 PLC)

Status Messages

Off

Timestamp

No effect

Test sequence

Diode

2: Getting started Model 6517B Electrometer

Function or operation Bench default

(SYSTem:PRESet)

Scan Type Internal Scan: Channels Count Memory Scan Mode Settling Time Timer Interval V-source Limit External Scan: External Inputs Trigger source Scan Count Timer Interval Memory

Internal

All 10 Yes Voltage

0.0 s No

2.5 s Yes

10 Triglink 10 No

2.5 s Yes

GPIB default (*RST)

Internal

All 10 Yes Voltage

0.0 s No

2.5 s Yes

10 Triglink 10 No

2.5 s Yes

Diode: Start Voltage Stop Voltage Step Voltage Delay Capacitor: Bias Voltage Points Interval Cable: Bias Voltage Points Interval Resistor: Source V1 Delay 1 Source V2 Delay 2

Surface Resistivity: Pre-discharge Time Bias Voltage Bias Time Measure Voltage Measure Time Discharge Time

1 V 10 V 1 V 1 s

1 V 10 1 s

1 V 5 1 s

1 V 1 s 2 V 1 s

0.2 s 500 V 1 s 500 V 1 s 2 s

1 V 10 V 1 V 1 s

1 V 10 1 s

1 V 5 1 s

1 V 1 s 2 V 1 s

0.2 s 500 V 1 s 500 V 1 s 2 s

2-24 6517B-900-01 Rev. B August 2022

Model 6517B

started

Volume Resistivity:

10 s

Test sequence

Triggers

Arm layer:

Advanced (armed)

Advanced (idled)

Electrometer User's Manual Section 2: Getting

Function or operation Bench default

(SYSTem:PRESet)

Pre-discharge Time Bias Voltage Bias Time Measure Voltage Measure Time Discharge Time Alternating polarity: Offset Voltage Alternating Voltage Measurement Time Discarded Readings

500 V 1 s 500 V 1 s 2 s

0 V 10 V 15 s 3 1

Stored Readings

SIR: Bias Voltage Bias Time Measure Voltage Measure Time Square Wave Sweep: High Level High Time Low Level Low Time Cycle Count Staircase Sweep: Start Stop Step Step Time

Start source Triglink Line

50 V 1 s 100 V 1 s

1 V 1 s

-1 V 1 s 10

1 V 10 V 1 V 1 s

Manual Line #1

GPIB default (*RST)

500 V 1 s 500 V 1 s 2 s

0 V 10 V 15 s 3 1

50 V 1 s 100 V 1 s

1 V 1 s

-1 V 1 s 10

1 V 10 V 1 V 1 s

Manual Line #1

6517B-900-01 Rev. B August 2022 2-25

Advanced: Measure layer: Source Triglink Mode Triglink Input Triglink Output Delay Count Control Scan layer: Source Triglink Input Triglink Output Delay Count Control

Immediate Asynchronous Line #2 Line #1

0.0 s Infinite Acceptor

Immediate Line #2 Line #1

0.0 s Infinite Acceptor

Immediate Asynchronous Line #2 Line #1

0.0 s 1 Acceptor

Immediate Line #2 Line #1

0.0 s 1 Acceptor

Section

User's Manual

Source

Immediate

V (Volts):

V-source:

Meter Connect

Off

Zero Check

2: Getting started Model 6517B Electrometer

Function or operation Bench default

(SYSTem:PRESet)

Triglink Input Triglink Output Count Control Basic: Trigger Mode Trigger source Timer Interval

External Feedback Guard Range Autorange

Range Voltage Limit Value Resistive Current Limit

Line #2 Line #1 1 Acceptor

Continuous Immediate

0.1 s

Off Off Manual (200 V) Off

100 V Off 1000 V Off

GPIB default (*RST)

Line #2 Line #1 1 Acceptor

Continuous Immediate

0.1 s

Off Off Manual (200 V) On

100 V Off 1000 V Off

The default selects all elements except HUM, DT, and ET.

2-26 6517B-900-01 Rev. B August 2022

Test fixtures ............................................................................3-12

In this section:

Introduction ...............................................................................3-1

Electrometer input connector ....................................................3-1

High-resistance meter connections ...........................................3-4

Voltage source output connections ...........................................3-5

Low-noise input cables .............................................................3-6

Shielding and guarding .............................................................3-6

Floating circuits .......................................................................3-10

Introduction

Section 3

Connections

This section contains basic information on electrometer, high-resistance meter, and voltage source connections. It also describes the use of test fixtures, low-noise cables, shielding, guarding, and floating circuits.

Hazardous voltages may be present on the output and guard terminals. To prevent elect shock that could cause injury or death, NEVER make or break connections to the 6517B while the output is on. Power off the equipment from the front panel or disconnect the main power cord from the rear of the 6517B before handling cables connected to the outputs. Putting the equipment in standby mode does not guarantee that the outputs are not powered if a hardware or software fault occurs.

Electrometer input connector

The rear-panel triaxial INPUT connector is a 3-lug female triaxial connector that mates to a cable terminated with a 3-slot male triaxial connector.

Input configurations

For the voltage function, you can configure the input connector with guard off or guard on. For the resistance, current, and charge functions, guard is always disabled (off).

rical

The INPUT triaxial connector is also used for the source voltage, measure current configuration. This configuration uses the voltage source make resistance measurements and current measurements.

Section

3: Connections Model 6517B Electrometer

User's Manual

When guard is off, input low is connected to the inner shell of the connector, as shown in the following figure. Use this configuration for current, resistance, coulombs, and unguarded voltage measurements.

Where possible, make input low connections directly to the INPUT connector low terminal instead of using COMMON. This avoids internal voltage drops that may affect measurement accuracy.

Figure 8: Input connector configuration - unguarded (voltage, resistance, current, and charge)

When guard is on, guard is connected to the inner shell of the triaxial connector, as shown in the following figure. Input low is accessed through the COMMON connector on the rear panel. Use this configuration for guarded voltage measurements only. Refer to Guard shield (on page 3-8) for more information.

Figure 9: Input connector configuration - g

Maximum input levels

The maximum input levels of the 6517B are summarized in the following figure. The maximum input

signal is −250 V

The maximum common-m ground) is 500 V exceed this value.

, dc to 60 Hz sine wave (10 seconds maximum in the mA ranges).

RMS

. To prevent electrical shock that could cause injury or death, do not

PEAK

uarded (voltage only)

ode input voltage (the voltage between input low and chassis

Connecting PREAMP OUTPUT, COMMON, or 2V ANALOG OUTPUT to earth while floating the input may damage the instrument.

3-2 6517B-900-01 Rev. B August 2022

Model 6517B

Connections

Electrometer User's Manual Section 3:

Input protection

The 6517B incorporates protection circuitry against nominal overload conditions. However, a high voltage (>250 V) and resultant current surge could damage the input circuitry. A typical test circuit to measure the leakage current of a capacitor is shown below. When the switch is closed, an initial surge of charging current flows and the high voltage is seen across the input of the 6517B.

Figure 10: Maximum input levels

Figure 11: Capacitor test circuit without protection

Adding a resistor and two diodes (1N3595), as shown in the following figure, provides considerable extra protection. The resistor must be large enough to limit the current through the diodes to 10 mA or less. It must also be large enough to withstand the supply voltage. The protection circuit should be enclosed in a light-tight conductive shield.

This protection circuit is also useful when measuring the insulation resistance of films or high-voltage cables. Without the added protection, a pinhole or other defect could cause an arc, damaging the 6517B input.

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3: Connections Model 6517B Electrometer

Figure 12: Capacitor test circuit with protection

High-resistance meter connections

The 6517B uses the source voltage, measure current (SVMI) configuration to measure resistance. From the known voltage and measured current, the resistance is calculated (R = V/I) and displayed.

The resistance to be measured is connected to the center conductor of the INPUT triaxial connector and the V SOURCE OUT HI binding post, as shown in the following figure.

Figure 13: Source voltage, measure current - basic connections

The equivalent circuit for this configuration is shown in the following figure.

Figure 14: Source voltage, measure current - equivalent circuit

This configuration assumes the METER-CONNECT setting is enabled, which internally connects the voltage source LO to ammeter LO.

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Electrometer User's Manual Section 3:

Connections

To enable METER-CONNECT:

1. Press the CONFIG key.

2. Press the OPER key. The CONFIG V-SOURCE menu is displayed.

3. Select METER-CONNECT. Press the ENTER key.

4. Select ON to enable the internal voltage source LO to ammeter LO connection. Press the ENTER key.

The maximum common-m ground) is 500 V not exceed this value.

PEAK

ode input voltage (the voltage between input low and chassis

. To prevent electrical shock that could cause injury or death, do

Voltage source output connections

The voltage source output is accessed at the V SOURCE OUT LO and HI binding posts on the rear panel, as shown in the following figure.

Figure 15: Volage source output basic connections

Using these terminals places the independent voltage source in series with the external circuit (RL), as shown in the following figure.

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User's Manual

Figure 16: Voltage source output - equivalent circuit

You can also use the voltage source to form the source voltage, measure current configuration, as described in High-resistance meter connections (on page 3-4).

The maximum common-mode input voltage (the voltage between input low and chassis ground) is 500 V exceed this value.

. To prevent electrical shock that could cause injury or death, do not

PEAK

Low-noise input cables

Triaxial cables can generate enough triboelectric currents to corrupt the measurement. These currents are caused by friction between the center conductor and the inner shield when the cable is flexed or allowed to move around. The use of low-noise cables helps minimize these triboelectric currents.

Refer to the 6517B datasheet, available at tek.com/keithley

For voltage measurements, always use the shortest possible triaxial input cable and use guarding. The increased input capacitance caused by a long input cable can significantly slow down the reading response.

For current and resistance measurements, always use the shortest possible triaxial input cable and enable damping. The increased input capacitance caused by a long input cable can result in noisy readings. Damping reduces the noise but it also slows down the response time of the measurement.

Shielding and guarding

The following information describes the basics of using noise shields, guard shields, and safety shields. When making precision measurements, you should always use low-noise cables and use proper shielding and guarding techniques.

, for recommended cables.

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Device or circuit under test

Metal noise shield

Connect to 6517B LO, chassis ground, or both using a triaxial cable

Electrometer User's Manual Section 3:

Noise shield

A noise shield prevents unwanted signals from being induced on the electrometer input. Effective shielding encloses the circuit or device under test (DUT) and extends to the 6517B input through a triaxial cable. The generic connection for the noise shield is shown in the following figure.

Figure 17: Noise shield

Use a noise shield for:

• Unguarded voltage measurements

• Unguarded current measurements (below 1 µA)

• Low-level charge measurements

Typically, the noise shield is connected to 6517B input LO. However, sometimes better noise performance can be achieved by connecting the noise shield to both 6517B LO and chassis ground. The 6517B LO can be connected to chassis ground at the rear panel of the 6517B by installing the ground link between the COMMON binding post and the chassis ground binding post. You may have to experiment to determine which method provides the best noise performance.

Do not make floating measurements with 6517B LO connected to chassis ground. If the

ar-panel ground link is installed between COMMON and chassis ground, remove it before

re floating the instrument.

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Device or circuit under test

Metal safety shield

Metal guard shield

Connect to 6517B guard using a triaxial cable

3: Connections Model 6517B Electrometer

Guard shield

The GUARD option enables or disables guard for voltage measurements. For current, resistance, and charge measurements, guard is always disabled. When guard is disabled, the inner shell (shield) of the triaxial connector and cable is connected to meter input LO.

When guard is enabled, the inner shell (shield) of the triaxial connector and cable is connected to guard, which follows the potential of meter input HI. Guarding greatly reduces leakage current in a high-impedance test circuit. Leakage resistance exists in the input cable between conductor paths and in the test fixture at connectors and insulators. The concept of guarding is to surround the input high node or DUT with a guard shield that is at the same potential. Current cannot flow through a leakage resistance that has a 0 V drop across it. A typical connection for the guard shield is shown in the following figure. A safety shield is also used because guarded measurements can place hazardous voltages on the guard shield (see Safety shield (on page 3-9

)).

Figure 18: Guard shield

Safety earth ground

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Electrometer User's Manual Section 3:

Use guard for:

• Guarded voltage measurements

• Guarded floating current measurements

• High-impedance (≥1 GΩ) voltage measurements

• Voltage measurements that use long input cables

• Current measurements when the test circuit impedance is ≥1 Ω

• Without guarding, significant leakage could occur across a DUT through insulators and corrupt

the measurement. Input LO (inner shield of the input triaxial cable) is used as the guard.

For floating current measurements, a unique guard technique is used in a high-impedance test circuit where significant leakage current may exist between the ammeter input and test circuit common.

The voltage function does not have to be selected when you configure the guard. When the voltage function is selected, the new settings are used.

For additional information, refer to “Guarding” in the Model 6517B Electrometer Reference Manual.

To enable guard for voltage measurements:

1. Press the CONFIG key.

2. Press the V key.

3. Select the GUARD menu. Press the ENTER key.

4. Select ON. Press the ENTER key.

Safety shield

A safety shield is required whenever a hazardous voltage is present on the noise shield or guard shield, or when a test circuit is floated above earth ground at a hazardous voltage level. A shock hazard exists at a voltage level equal to or greater than 30 V may appear on the noise/guard shield when performing floating measurements or guarded measurements.

Typical connections for the safety shield are shown in the following figure. The metal safety shield must completely surround the noise or guard shield and must be connected to safety earth ground using #18 AWG or larger wire.

. Hazardous voltages up to 500 V

RMS

A safety shield must be used whenever hazardous voltages (>30

RMS

, 42 V

PEAK

) will be present in the test circuit. To prevent electrical shock that could cause injury or death, never use the 6517B in a test circuit that may contain hazardous voltages without a properly installed and configured safety shield.

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Device or circuit under test

Metal safety shield

Noise or guard shield

Connect to 6517B guard using a triaxial cable

Safety earth ground

3: Connections Model 6517B Electrometer

Figure 19: Safety shield

Floating circuits

Many measurements are performed above earth ground and, in some test situations, can result in safety concerns. The following figures show examples where the 6517B floats at a hazardous voltage level.

In the following figure, a shock hazard (100 V) exists between meter input LO and chassis ground. If meter input LO is connected to a noise shield, the shock hazard is also present on that shield.

Figure 20: Floating measurements - voltage measurement

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Connections

In the following figure, a shock hazard (200 V) exists between the meter input (HI and LO) and chassis ground. If meter input LO is connected to a noise or guard shield, the shock hazard is also present on that shield.

Figure 21: Floating measurements - current measurement

Floating voltage source

The voltage source of the 6517B can be operated above earth ground, as shown in the following figure. In this circuit, the voltage source is floating 100 V above ground. Therefore, a shock hazard (100 V) exists between voltage source LO and chassis ground. A shock hazard exists at a voltage level equal to or greater than 30 V floating circuits and shields with a safety shield. See Safety shield (on page 3-9) for more information.

. To avoid possible shock hazards, always surround exposed

RMS

The maximum common-mode voltage between electrometer LO and chassis ground is 500 V. The maximum voltage between V-source LO and earth (chassis) ground is 750 V. Exceeding these values may create a shock hazard that could cause injury or death. When floating input LO above 30 V from earth ground, hazardous voltage is present at the analog outputs (PREAMP OUT and 2V OUT). Hazardous voltage may also be present when the input voltage exceeds 30 V when the voltage function is active.

Connecting PREAMP OUTPUT, COMMON, or 2V ANALOG OUTPUT to earth (chassis) ground while floating the input may damage the instrument.

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3: Connections Model 6517B Electrometer

Figure 22: Floating voltage source

Test fixtures

Whenever possible, use shielded low-leakage test fixtures to make precision measurements.

The Model 8009 test fixture allows volume resistivity in the range of 10 surface resistivity in the range of 10

• A 3-lug triaxial connector and dual binding posts to simplify connections to the 6517B.

• Guarded electrodes that can accommodate samples up to 1/8" thick and 4" × 4".

• Safety Interlock: When connected to the 6517B, the voltage-source goes into standby when the

test fixture lid is open.

• Screw terminal on the test fixture chassis for connection to safety earth ground.

You can also build a custom test fixture. The following topics provide guidelines when building a test fixture.

Interlock

When a normally-open SPST momentary switch is properly implemented as a safety interlock, the voltage source goes into standby whenever the test fixture lid is open or ajar. The switch must be mounted inside the test box and must close when the lid of the test fixture is closed. Opening the lid must cause the interlock switch to open. There must never be enough clearance to allow finger access inside the box while the switch is closed. The interlock must be designed so that it cannot be defeated. The Keithley Instruments Model 8009 test fixture provides an interlock that meets these requirements.

Ω to 1017 Ω. Features include:

Ω-cm to 1018 Ω-cm, and

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Electrometer User's Manual Section 3:

Interlock is automatically enabled when the appropriate interlock cable is connected to the 6517B. Use the interlock cable as shown in General measurement procedure (on page 4-18). This cable uses an extra line to detect which resistivity measurement type is selected at the test fixture (surface or volume).

Do not connect the interlock of the 6517B to the interlock of another instrument. The interlock

designed to be connected to a single-pole interlock switch of a test fixture. If you are

is connecting two or more 6517Bs to a single test fixture, an isolated interlock switch for each instrument is required. Connecting multiple instrument interlocks to the same switch could cause the safety interlock system to fail, which could result in electrical shock that could cause injury or death.

See the following figure for typical interlock connections.

Figure 23: Interlock connections

See the following figure for typical connections for resistance measurements to the Model 8009 test fixture.

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3: Connections Model 6517B Electrometer

Figure 24: Connections for resistivity measurements using the Model 8009 test fixture

Connect the enclosure of all metal test fixtures to protective earth (safety ground). Nonconductive test fixtures must be rated to double the maximum capability of the test equipment in the system. Failure to attach the ground wires to a known protective earth may result in electric shock.

The interlock connector on the 6517B is rated at 50 Hz to 60 Hz, 140 VA maximum. The CS-1305 connector of the interlock includes four pins (left to right as viewed from rear of the 6517B):

 Pin 1: Interlock safe

 Pin 2: Ground

 Pin 3: +5 V dc output

 Pin 4: Surface/volume select (low = volume, high = surface)

Custom-built test fixtures

The following topics describe custom-built test fixtures. The following requirements, recommendations, and guidelines are provided so you can build a quality test fixture that is safe to use. After building a test fixture, you must clean it as described in Handling and cleaning test fixtures (on page 3-18).

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Electrometer User's Manual Section 3:

Test fixture chassis

The chassis of the test fixture should be metal so that it can function as a shield for the DUT or test circuit mounted inside. The chassis of the test fixture is connected to chassis ground of the 6517B through the triaxial cable.

The test box must have a lid that closes to prevent contact with live circuitry inside.

Safe operation requires that a safety interlock switch be used to place the voltage source in standby when the test fixture lid is open or ajar (see Interlock (on page 3-12 safety interlock switch may result in electric shock that could result in injury or death.

The test fixture chassis must have a screw terminal that is used exclusively for connection to safety earth ground.

)). Failure to use a

To provide protection from shock hazards, the test fixture chassis must be properly

onnected to safety earth ground. A grounding wire (#18 AWG or larger) must be attached

c securely to the test fixture at a screw terminal designed for safety grounding. The other end of the ground wire must be attached to a known safety earth ground. Failure to attach the ground wire to a known protective earth may result in electric shock that could result in injury or death.

A metal guard plate provides guarding or noise shielding for the DUT or test circuit. It also serves as a mounting panel for the DUT or test circuits. The guard plate must be insulated with 1000 V spacing from the chassis of the test fixture.

Connectors, terminals, and internal wiring

The following figures show the types of connectors that are needed to use the test fixtures with the 6517B. All connectors, except the triaxial connector, must be insulated from the chassis of the test fixture. The outer shell of the triaxial connector must be referenced to chassis ground. Do not insulate the outer shell of the triaxial connector from the metal chassis of the test fixture.

The DUT and test circuits are to be mounted on the guard plate using insulated terminals. To minimize leakage, select terminals that use virgin Teflon insulators.

Inside the chassis of the test fixture, you may use coaxial cable to extend guard from the triaxial connector to the DUT. The shield (guard) of the cable should extend as far as possible to the DUT.

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Interlock switch. When the lid is open, the switch is also open.

Guard plate.

Insulated terminal.

Screw terminal for safety earth ground. Use #18 AWG wire or larger for connections from the test fixture to safety earth ground.

Three-lug female triaxial to 6517B input.

To 6517B voltage source OUT HI banana jack.

Interlock connector to 6517B interlock.

Safety earth ground.

3: Connections Model 6517B Electrometer

Dedicated test fixture

The following figure is a dedicated test fixture for resistance measurements. It is intended for a test that sources voltage and measures current to a single device under test (DUT).

Figure 25: Test fixture to source voltage and measure current

Multipurpose test fixture

The following figure shows a multipurpose test fixture that can be used to make any 6517B measurement.

Use #18 AWG wire or larger for connections from the test fixture to safety earth ground.

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Connections

Interlock switch. When the lid is open, the switch is also open.

Guard plate.

Insulated terminal.

Screw terminal for safety earth ground. Use #18 AWG wire or larger for connections from the test fixture to safety earth ground.

Three-lug female triaxial connector to 6517B input.

To 6517B voltage source OUT dual banana jacks.

Interlock connector to 6517B interlock.

Safety earth ground.

Electrometer User's Manual Section 3:

Figure 26: Multipurpose test fixture

Device under test (DUT) or test circuit.

To 6517B COMMON banana jack.

The multipurpose test fixture assumes that ammeter input LO is connected to voltage source LO inside the 6517B.

To set the LO-to-LO connection:

1. Press the CONFIG key.

2. Press the OPER key.

3. Select METER-CONNECT. Press the ENTER key.

4. Select ON. Press the ENTER key.

5. Press the EXIT key to return to the measurement display.

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Handling and cleaning test fixtures

Dust, body oil, solder flux, and other contaminants on connector and terminal insulators can significantly decrease the leakage resistance, resulting in excessive leakage currents. Also, contaminants on DUT and test circuit components can create a leakage path. These leakage currents may be large enough to corrupt low-level measurements.

Handling tips:

• Do not touch the bodies of devices-under-test (DUTs) or test circuit components. If you must

handle them by their leads, use clean cotton gloves to install them in the test fixture.

• Do not touch any connector or terminal insulator.

• If you are installing a test circuit that is on a printed circuit board, handle the board by the edges.

Do not touch any board traces or components.

Cleaning tips:

• Use dry nitrogen gas to clean dust from connector and terminal insulators, DUT, and other test

circuit components.

• For newly build fixtures, remove any solder flux using methanol and clean foam-tipped swabs or a

soft, clean brush.

• To clean contaminated areas, use methanol and clean foam-tipped swabs. After cleaning a large

area, you may want to flush the area with methanol. Blow dry the test fixture with dry nitrogen gas.

• After cleaning, the test fixture (and any other cleaned devices or test circuits) should be allowed

to dry in a 50°C low-humidity environment for several hours.

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External scanning ...................................................................4-30

In this section:

Introduction ...............................................................................4-1

Voltage measurements .............................................................4-1

Current measurements .............................................................4-5

Resistance and resistivity measurements .................................4-9

Charge measurements ...........................................................4-22

Relative humidity and temperature readings ...........................4-26

Internal scanning .....................................................................4-27

Introduction

Section 4

Basic measurements

This section describes the basic procedures for making voltage, current, resistance, and charge measurements.

To ensure proper operation, always use the Z-CHK

displayed) before selecting another function. The Z-CHK key toggles zero check between the on and off states. The input circuit configuration changes when zero check is enabled. Refer to “Zero check” in the Model 6517B Electrometer Reference Manual for more information.

Voltage measurements

The 6517B can make unguarded or guarded voltage measurements from 1 μV to 210 V.

There are issues to be considered for making accurate voltage measurements. Refer to “Voltage measurement considerations” in the Model 6517B Electrometer Reference Manual for more information. For comprehensive information on precision measurements, refer to the Low Level Measurements Handbook. Both documents are available at tek.com/keithley

To reduce leakage current when making high-impedance voltage measurements and when making voltage measurements that use long input cables, use guarding. Refer to Guard shield (on page 3-8) and “Guarding” in the Model 6517B Electrometer Reference Manual.

key to enable zero check (ZeroCheck

Section

User's Manual

4: Basic measurements Model 6517B Electrometer

Basic voltage measurement procedure

The voltage measurement procedure is summarized in this topic.

This procedure provides instruction on how to apply an automatic relative offset. To achieve optimum accuracy for low voltage measurements, it is recommended that you apply a relative offset. For more information, refer to “Relative offset” in the Model 6517B Electrometer Reference Manual.

Hazardous voltages may be present on the inner shield of the triaxial cable when GUARD is on. A safety shield must be used whenever hazardous voltages (>30 V present in the test circuit. To prevent electrical shock that could cause injury or death, never use the 6517B in a test circuit that may contain hazardous voltages without a properly installed and configured safety shield. Refer to Shielding and guarding (on page 3-6 for detail.

RMS

, 42 V

PEAK

) will be

)

Do not apply more than 250 V 250 V

can damage the 6517B.

PEAK

(dc to 60 Hz) to the input. Applying voltages above

PEAK

To make a voltage measurement:

1. Press the Z-CHK key until zero check is enabled (ZeroCheck displayed).

2. Press the V key to select the voltage function.

3. Press the CONFIG key.

4. Press the V key.

5. Select the GUARD menu.

6. Select ON or OFF. Press the ENTER key.

7. Press the EXIT key to return to the measurement display. When guard is enabled, Grd is

displayed.

8. Use the Range ▼ key to select the lowest measurement range (2 V).

9. Press the REL key. The ZCor message is displayed. If guard is enabled, the ZCor message

replaces the Grd message. Guard is still enabled.

10. Press the AUTO key to enable autorange.

11. Connect the 6517B to the voltage to be measured. Refer to the following figures for typical

connections for unguarded and guarded measurements.

12. Press the Z-CHK key to disable zero check and start making readings.

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Electrometer User's Manual Section 4:

Figure 27: Unguarded voltage measurement connections

Figure 28: Unguarded voltage measurements - equivalent circuit

Figure 29: Guard voltage measurement connections

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4: Basic measurements Model 6517B Electrometer

Figure 30: Guarded voltage measurements - equivalent circuit

Voltage configuration

The following information describes the configuration options for the voltage function. The options in the voltage configuration menu are summarized in the following table. To access the voltage configuration menu, press CONFIG and then V.

You can configure a function if it is not the active function. When the function is selected, the saved settings are used.

The voltage source value is not set in the configuration menu. Use the VO

LTAGE SOURCE ▲ and ▼ keys to adjust the voltage source value. Place cursor on the digit and use the ▲ or ▼ key to change the value. To change the polarity, move the cursor to the sign and use ▲ or ▼ to toggle the

polarity. For more information on setting up the voltage source, refer to “Voltage source” in the Model 6517B Electrometer Reference Manual.

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GUARD

Enable or disable guard. Only available for voltage measurements. Refer to

Guard shield (on page 3-8) for detail.

EXT-FDBK

Enable or disable the external feedback feature. Refer to “Using external feedback” in the Model 6517B Electrometer Reference Manual.

SPEED

Measurement speed (integration time) menu:

NORMAL

1 power line cycle (PLC, 16.67 ms for 60 Hz, 20 ms for 50 Hz and 400 Hz).

FAST

Select 0.01 PLC.

MEDIUM

Select 0.1 PLC.

HIACCURACY

Select 10 PLC.

SET-SPEED-EXACTLY

Set integration in PLC (0.01 to 10).

SET-BY-RSLN

Optimizes the integration time for the selected resolution.

Refer to “Integration time” in the Model 6517B Electrometer Reference Manual for detail.

FILTER

Filter menu for setting the averaging and median filters:

AVERAGING

Configure digital averaging filter:

TYPE

Select type of average filter:

NONE

No average filtering performed.

AVERAGING

Program a simple average filter (1 to 100 readings).

ADVANCED

Program a simple average filter (1 to 100 readings) with noise tolerance window (0 to 100% of range).

AVERAGING-MODE

Select moving average or repeating average mode.

MEDIAN

Configure the median filter:

DISABLE

Disable the median filter.

ENABLE

Enable median filter and specify rank (1 to 5).

Refer to “Filters” in the Model 6517B Electrometer Reference Manual for detail.

Manual for detail.

Electrometer User's Manual Section 4:

Voltage configuration menu

Menu item Description

RESOLUTION AUTO

3.5, 4.5, 5.5, 6.5

Resolution menu: Default to resolution appropriate for the integration time. Select a specific resolution. Refer to “Display resolution” in the Model 6517B Electrometer Reference

Current measurements

The 6517B can make current measurements from 10 aA to 21 mA.

For other factors to consider when making current measurements, refer to “Current measurement considerations” in the Model 6517B Electrometer Reference Manual.

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4: Basic measurements Model 6517B Electrometer

Basic current measurement procedure

The following procedure describes how to make a current measurement.

To achieve optimum precision for low-level current measurements, input bias current and voltage burden can be minimized by applying a relative offset. This procedure includes steps to apply a relative offset. Refer to “Relative offset” in the Model 6517B Electrometer Reference Manual for more information.

After measuring high voltage using the voltage function, it may take a few minutes for the input c

urrent to drop to within specified limits. Input current can be verified by placing the protection cap on the INPUT triaxial connector and then connecting a jumper between COMMON and chassis ground. With the instrument on the 20 pA range and zero check disabled, allow the reading to settle until the input bias current is within specifications.

A safety shield must be used whenever hazardous voltages (>30 V

RMS

, 42 V

PEAK

) for more

information.

Do not apply more than 250 V ranges) to the input. Applying voltages above 250 V

(dc to 60 Hz; 10 seconds per minute maximum on the mA

PEAK

can damage the 6517B.

PEAK

To make current measurements:

1. Press the Z-CHK key to enable zero check (ZeroCheck displayed).

2. Select the I key to select the current function.

3. Use the Range ▼ key to select the lowest measurement range (20 pA).

4. Press the REL key. The REL indicator turns on and the ZCor message is displayed.

5. Press the AUTO key to enable autorange.

6. Connect the 6517B to the current to be measured. The following figure shows typical connections

for current measurements.

7. Press the Z-CHK key to disable zero check and make a reading from the front panel.

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Electrometer User's Manual Section 4:

Figure 31: Current measurements - typical connections

Figure 32: Current measurements - equivalent circuit

If you are measuring current in a floating circuit where significant leakage may exist between the ammeter input and circuit low, connect the 6517B to the circuit as shown in the following figure. Notice that ammeter input LO is connected to circuit high.

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SPEED

Measurement speed (integration time) menu:

NORMAL

1 PLC (power line cycle, 16.67 ms for 60 Hz, 20 ms for 50 Hz and 400 Hz).

FAST

0.01 PLC.

MEDIUM

0.1 PLC.

HIACCURACY

10 PLC.

SET-SPEED-EXACTLY

Set integration in PLC (0.01 to 10).

SET-BY-RSLN

Optimizes the integration time for the selected resolution.

Refer to “Integration time” in the Model 6517B Electrometer Reference Manual for detail.

FILTER

The filter menu:

AVERAGING

Configure digital averaging filter:

TYPE

Select type of average filter:

NONE

No average filtering performed.

AVERAGING

Program a simple average filter (1 to 100 readings).

ADVANCED

Program a simple average filter (1 to 100 readings) with noise tolerance window (0 to 100% of range).

4: Basic measurements Model 6517B Electrometer

Figure 33: Guarded floating current measurement connections

Current configuration

The following information explains the configuration options for the current function. The configuration menu is summarized in the following table. To access this menu, press the CONFIG key and then the I key.

A function does not have to be selected to be configured. When the function is selected, it assumes the pre-programmed status.

Current configuration menu

Menu item Description

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AVERAGING-MODE

Select moving average or repeating average mode.

MEDIAN

Configure median filter:

DISABLE

Disable median filter.

ENABLE

Enable median filter and specify rank (1 to 5). Refer to “Filters” in the Model 6517B Electrometer Reference Manual for detail.

RESOLUTION

Display resolution menu:

more detail.

AUTO-RANGE

Autorange menu:

for more detail.

DAMPING

Enable or disable damping.

detail.

Electrometer User's Manual Section 4:

Menu item Description

AUTO

3.5, 4.5, 5.5, 6.5

USE-ALL-RANGES SET-LIMITS MIN-AUTO MAX-AUTO

Default to resolution appropriate for integration time. Select a specific resolution. Refer to “Display resolution” in the Model 6517B Electrometer Reference Manual for

Use all current ranges when autoranging. Limit the ranges used in the autorange search: Specify the minimum range in the search. Specify the maximum range in the search. Refer to “Measurement range” in the Model 6517B Electrometer Reference Manual

ON: Enable current damping. OFF: Disable current damping. Refer to “Damping” in the Model 6517B Electrometer Reference Manual for more

Resistance and resistivity measurements

The 6517B can make resistance measurements and resistivity measurements (surface and volume). High resistance measurements (above 1 MΩ) may exhibit problematic background currents and can be improved using the alternating polarity test sequence.

Automatic voltage source

The 6517B has an automatic voltage source mode for resistance and resistivity measurements.

When the automatic voltage source is selected, the 6517B automatically sets the voltage source range and level to an optimum test voltage level, either 40 V or 400 V, for the measurement range. The selected test voltage and current measurement range depends on which resistance measurement range is used. The 6517B displays the resistance measurement range and the voltage source value.

When MANUAL voltage source is selected, the current range for the measurement and the voltage source value is displayed.

When the automatic voltage source is selected, you cannot manually adjust the voltage source or change the voltage source range of the resistance function.

If voltage source ohms is set to AUTO, the voltage limit of the voltage source is < 400 V, and a resistance range that requires 400 V is selected, an error occurs and the voltage source is turned off.

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200 kΩ to 2 MΩ

20TΩ to 200TΩ

40 V

400 V

200 μA

20 pA

4: Basic measurements Model 6517B Electrometer

The published specifications for resistance only apply for the specified AUTO voltage source test voltages. If you are using the MANUAL voltage source setting, you must add the voltage source errors to the current measurement range errors to determine the total resistance errors.

When the voltage source setting is set to MANUAL, you can set the voltage source to any value and change the voltage source range while using the resistance function. The 6517B displays the current range that is used for the measurement and the voltage source value.

A hazardous voltage (400 V) may automatically be set for the resistance function when AUTO voltage source is selected. See the table in Resistance ranges (on page 4-10

) for the

resistance ranges that use the high voltage.

To set the voltage source:

1. Press the CONFIG key.

2. Press the R key.

3. Select VSOURCE. Press the ENTER key.

4. Select AUTO or MANUAL. Press the ENTER key.

Resistance ranges

The reading ranges for the resistance function are listed in the following table.

To optimize range selection:

• Use autorange.

• Select the next lower range when UNDERFLOW is displayed.

• With the manual voltage source selected, press the NEXT key until the actual measured current

is displayed. This allows you to verify that the selected current range is the lowest range that can handle the measured current.

Refer to “Measurement range” in the Model 6517B Electrometer Reference Manual for additional detail.

Resistance reading ranges and automatic voltage source

Reading range

2 MΩ to 20 MΩ 20 MΩ to 200 MΩ 200 MΩ to 2 GΩ 2 GΩ to 20 GΩ 20 GΩ to 200 GΩ 200 GΩ to 2 TΩ 2 TΩ to 20 TΩ

Automatic voltage source

Test voltage Current range

40 V 40 V 40 V 40 V 40 V 400 V 400 V

20 μA 2 μA

200 nA 20 nA 2 nA 2 nA 200 pA

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Electrometer User's Manual Section 4:

Resistance measurements

The 6517B can make resistance measurements up to 1017 Ω using the source voltage, measure current (SVMI) technique. From the known sourced voltage and measured current, the 6517B calculates and displays the resultant resistance (R = V/I). The voltage source level can be set automatically by the 6517B or it can be manually set by the user.

The following procedure summarizes the basic steps to measure resistance. To ensure proper operation, always enable zero check (ZeroCheck displayed) before changing functions (V, I, R,

or Q). The Z-CHK key controls zero check.

When autorange is selected, the instrument does not go to the 2 TΩ, 20 TΩ, or 200 TΩ ranges. For optimum accuracy, leakage currents in the test fixture can be canceled by performing relative offset on the current component of the measurement. To cancel leakage current, see

leakage current (on page 4-13).

Canceling test fixture

Accurate high resistance measurements require the use of a low-leakage test fixture.

Hazardous voltages may be present on the output and guard terminals. To prevent electrical shock that could cause injury or death, NEVER make or break connections to the 6517B while the output is on. Power off the equipment from the front panel or disconnect the main power cord from the rear of the 6517B before handling cables connected to the outputs. Putting the equipment in standby mode does not guarantee that the outputs are not powered if a hardware or software fault occurs.

To measure resistance:

1. Press the Z-CHK key to enable zero check (ZeroCheck displayed).

2. Select the R key to select the resistance function.

3. Press the CONFIG key.

4. Press the R key. The resistance configuration menu is displayed.

5. Select MEAS-TYPE. Press the ENTER key.

6. Select RESISTANCE. Press the ENTER key.

7. Select VSOURCE to select the voltage source adjustment mode. Press the ENTER key.

8. Select the voltage source setting:

 AUTO: The instrument automatically selects the optimum voltage source value (40 V or

400 V) for the measurement range.

 MANUAL: You select the voltage source range and value.

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4: Basic measurements Model 6517B Electrometer

9. Press the ENTER key.

10. Press the EXIT key to return to the measurement display.

11. Connect the resistance to be measured to the 6517B, as shown in the following figure.

Figure 34: Typical connections for resistance measurements

Voltage source low is internally connected to 6517B low.

Figure 35: Typical connections for resistance measurements - equivalent circuit

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Electrometer User's Manual Section 4:

12. If VSOURCE is set to MANUAL, use the cursor keys and the VOLTAGE SOURCE adjustment

keys to set the voltage level.

13. To change the voltage source range:

a. Press the CONFIG key.

b. Press the OPER key.

c. Select RANGE. Press the ENTER key.

d. Set the value. Press the ENTER key.

e. Press the EXIT key to return to the measurement display.

To avoid a possible shock hazard that could cause injury or death, do not use a voltage level that exceeds the maximum input voltage rating of the test fixture.

14. Use the manual RANGE keys ▲ and ▼ to select the resistance measurement range or press the

AUTO key to select autorange.

15. Press the OPER key to source voltage to the DUT.

16. Press the Z-CHK key to disable zero check and start measurements.

17. When measurements are complete, press the OPER key again to place the voltage source in

standby.

If the flashing VOLTAGE SOURCE OPERATE LED flashes, it indicates that the voltage source has gone into current limit and the programmed voltage is not being applied to the load. In this situation, try using a lower voltage for the measurement.

Canceling test fixture leakage current

Significant leakage in the test fixture can corrupt a resistance measurement. You can cancel this leakage current by performing a relative offset on the current component of the resistance measurement.

The following procedure assumes that you have completed the steps before disabling zero check in the procedure in Resistance measurements (on page 4-11

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4: Basic measurements Model 6517B Electrometer

To cancel leakage current:

1. Press the OPER key to place the voltage source in standby (VOLTAGE SOURCE OPERATE

LED off).

2. Remove the device from the test fixture.

3. Press the ZCHK key to enable zero check.

4. Press the I key to select the current function.

5. Press the OPER key to source the programmed voltage source level to the test fixture.

6. Use the RANGE ▼ key to select the lowest possible measurement range. The displayed reading

is the leakage current in the test fixture.

7. Press the ZCHK key to disable zero check.

8. Press the REL key to cancel the leakage current.

9. Press the OPER key to place the voltage source in standby and enable zero check.

10. Press the CONFIG key.

11. Press the R key. The CONFIGURE OHMS menu is displayed.

12. Select AMPSREL. Press the ENTER key.

13. Select ENABLED to establish the relative offset value for the current reading. Press the

ENTER key.

14. Use the EXIT key to return to the measurement display.

15. Re-install the device under test (DUT) in the test fixture.

16. Press the R key and proceed to the step in Resistance measurements (on page 4-11

disables zero check.

Resistivity measurements

The 6517B can make surface resistivity measurements from 103 to 1017 ohms and volume resistivity

measurements from 10

Typical resistivity test fixtures, such as the Keithley Instruments Model 8009, use circular electrodes. To use these test fixtures, the insulator sample must be large enough that all the surfaces of the electrodes make contact with the sample. For volume resistivity, you need to know the thickness (in mm) of the sample. The 6517B automatically performs the calculation and displays the reading.

For additional information on resistivity measurements, refer to the application note “Volume and Surface Resistivity Measurements of Insulating Materials Using the 6517B Electrometer/High Resistance Meter,” document number 1KW-61175, available at tek.com

to 1018 ohms-cm.

) that

For detail on calculating the effective area and effective perimeter, refer to the ASTM International Standard Test Methods for DC Resistance or Conductance of Insulating Materials, ASTM Designation D257.

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Electrometer User's Manual Section 4:

Surface resistivity

Surface resistivity is the electrical resistance of the surface of an insulator material. It is measured from electrode to electrode along the surface of the insulator sample. Since the surface length is fixed, the measurement is independent of the physical dimensions (for example, thickness and diameter) of the insulator sample.

Surface resistivity is measured by applying a voltage potential across the surface of the insulator sample and measuring the resultant current, as shown in the following figure.

Figure 36: Surface resistivity measurement technique

The 6517B automatically performs the following calculation and displays the surface resistivity reading:

= KSR

Where:

• ρ

is the surface resistivity (per square).

• R is the measured resistance in ohms (V/I).

• K

= P/g, where:

 P is the effective perimeter of the guarded electrode (mm).

 g is the distance between the guarded electrode and the ring electrode (mm). Refer to the

following figure to determine dimension g.

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2.000 in.

2.125 in.

2.250 in.

0.125 in.

4: Basic measurements Model 6517B Electrometer

For circular electrodes:

Where D

P = πD

= D1 + g. Refer to the following figure to determine the dimension D0.

Figure 37: Circular electrode dimensions

Test fixture dimensions

Volume resistivity

Volume resistivity is defined as the electrical resistance through a cube of insulating material. When expressed in ohm-centimeters, it is the electrical resistance through a one-centimeter cube of insulating material. When expressed in ohm-inches, it is the electrical resistance through a one-inch cube of insulating material.

Model 8009

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Electrometer User's Manual Section 4:

The 6517B automatically performs the following calculation and displays the volume resistivity reading:

Where:

• ρ

= Volume resistivity.

• K

= The effective area of the guarded electrode for the electrode arrangement.

• τ = Average thickness of the sample (cm).

• R = Measured resistance in ohms (V/I).

For circular electrodes:

• D

= Outside diameter of guarded electrode.

• B = Effective area coefficient.

• g = Distance between the guarded electrode and the ring electrode.

Volume resistivity is measured by applying a voltage potential across opposite sides of the insulator sample and measuring the resultant current through the sample as shown in the following figure.

Figure 38: Volume resistivity measurement technique

Refer to the “Circular electrode dimensions” figure in Surface resistivity (on page 4-15) to determine dimensions D1 and g.

To calculate the effective area coefficient (B), refer to ASTM International S

tandard Test Methods for

DC Resistance or Conductance of Insulating Materials, ASTM Designation D257-14.

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4: Basic measurements Model 6517B Electrometer

General resistivity measurement procedure

The following steps summarize the basic steps to measure resistivity when a Model 8009 test fixture is used.

If the 6517B is already configured to use the Model 8009 Resistivity Test Fixture, the interlock cable must be connected to the 8009 test fixture. The measurement type (surface or volume) is selected by the switch position on the test fixture. Attempts to change the measurement type from the 6517B menu are ignored. If the interlock cable is not connected, the settings for volume or surface do not work properly and you cannot change the measurement type from the menu.

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Electrometer User's Manual Section 4:

To measure resistivity:

1. Press the Z-CHK key to enable zero check (ZeroCheck displayed).

2. Select the R key to select the resistance function.

3. Press the CONFIG key.

4. Press the R key. The resistance configuration menu is displayed.

5. Select MEAS-TYPE. Press the ENTER key.

6. Select RESISTIVITY. Press the ENTER key.

7. Select SURFACE or VOLUME. Press the ENTER key.

8. If you selected VOLUME:

a. Select THICKNESS. Press the ENTER key.

b. Set the thickness. Press the ENTER key.

9. Select FIXTURE-MODEL. Press the ENTER key.

10. Select MODEL-8009. Press the ENTER key.

11. Press the EXIT key twice to return to the CONFIGURE OHMS menu.

12. Select VSOURCE. Press the ENTER key.

13. Select AUTO or MANUAL:

 AUTO: The instrument automatically selects the optimum voltage source value (40 V or

400 V) for the measurement range.

 MANUAL: You select the voltage source range and value.

14. Press the EXIT key to return to the measurement display.

15. If VSOURCE is set to MANUAL:

a. Use the cursor keys and the VOLTAGE SOURCE adjustment keys to set the voltage level.

b. To change the voltage source range, press the CONFIG key and then the OPER key, then select

RANGE.

16. Connect the sample to be measured to the 6517B, as shown in the following figure.

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4: Basic measurements Model 6517B Electrometer

Figure 39: Connections for resistivity measurements using the Model 8009 test fixture

17. Use the manual RANGE keys to select the resistance measurement range or press the AUTO

key to select autorange. When autorange is selected, the instrument does not go the 2 TΩ, 20 TΩ, and 200 TΩ ranges.

18. Press the Z-CHK key to disable zero check.

19. Press the OPER key to place the voltage source in operate.

20. Wait an appropriate electrification period (bias time). Typically, a bias time of 60 seconds is used.

21. Observe the resistivity reading.

22. Press the OPER key to place the voltage source in standby.

23. Press the Z-CHK key to enable zero check.

If the VOLTAGE SOURCE OPERATE LED flashes, the voltage source is current limited and the programmed voltage is not applied to the load. If this occurs, try using a lower voltage for the measurement.

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SPEED

Measurement speed (integration time) menu:

NORMAL

1 PLC (power line cycle, 16.67 ms for 60 Hz, 20 ms for 50 Hz and 400 Hz).

FAST

0.01 PLC.

MEDIUM

0.1 PLC.

HIACCURACY

10 PLC.

SET-SPEED-EXACTLY

Set integration in PLC (0.01 to 10).

SET-BY-RSLN

Optimizes the integration time for the selected resolution.

for detail.

FILTER

Filter menu for setting the averaging and median filters:

AVERAGING

Configure digital averaging filter:

TYPE

Select type of average filter:

NONE

No average filtering performed.

AVERAGING

Program a simple average filter (1 to 100 readings).

window (0 to 100% of range).

AVERAGING-MODE

Select moving average or repeating average mode.

MEDIAN

Configure the median filter:

DISABLE

Disable the median filter.

ENABLE

Enable median filter and specify rank (1 to 5).

Refer to “Filters” in the Model 6517B Electrometer Reference Manual for detail.

RESOLUTION

Resolution menu:

Manual for detail.

AMPSREL

Enable or disable relative offset for current.

more information.

AUTORNG

Autorange menu:

Refer to Resistance ranges (on page 4-10) for additional information.

Electrometer User's Manual Section 4:

Resistance configuration

The following information explains the various configuration options for the resistance function. The configuration menu is summarized in the following table. To access this menu, press the CONFIG key and then the R key.

You do not have to select a function to configure it. When the function is selected, it assumes the programmed status.

Resistance configuration menu

Menu item Description

Refer to “Integration time” in the Model 6517B Electrometer Reference Manual

ADVANCED Program a simple average filter (1 to 100 readings) with noise tolerance

AUTO

3.5, 4.5, 5.5, 6.5

USE-ALL-RANGES

SET-LIMITS MIN-AUTO MAX-AUTO

Default to resolution appropriate for the integration time. Select a specific resolution. Refer to “Display resolution” in the Model 6517B Electrometer Reference

Refer to Canceling test fixture leakage current (on page 4-13) for

Use all ranges except the 2 TΩ, 20 TΩ, and 200 TΩ ranges when autoranging. Limit the ranges used in the autorange search: Specify the minimum range in the search. Specify the maximum range in the search.

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DAMP

Enable or disable damping.

more information.

MEAS-TYPE

Resistance measurement type menu:

RESISTANCE

Select the resistance measurement mode.

RESISTIVITY

Select the resistivity measurement mode.

SURFACE

Configure surface resistivity measurements.

VOLUME

Configure volume resistivity measurements.

THICKNESS

Use to specify (in millimeters) the thickness of the sample.

FIXTURE-MODEL

Displayed for the SURFACE and VOLUME menus

Refer to Resistivity measurements (on page 4-14) for more information.

VSOURCE

Select AUTO or MANUAL voltage source. Refer to Automatic voltage source (on page 4-9) for more information.

4: Basic measurements Model 6517B Electrometer

Menu item Description

Refer to “Damping” in the Model 6517B Electrometer Reference Manual for

Select the test fixture: MODEL-8009: The Model 8009 Resistivity Test Fixture. This option automatically sets the parameters for the volume resistivity calculation since the electrode dimensions are known. USER: Another manufacturer’s test fixture or a custom-built test fixture. This option is also used for the Model 8009 test fixture if using an effective area coefficient less than one (B < 1). After selecting this option you are prompted to enter the value for Ks or Kv.

Resistance display

When a resistance function is selected, you can display the current measurement and voltage source values.

When you press the DISPLAY NEXT key, the current measurement and voltage source values are displayed, as shown in the following figure. The resistance measurement is shown on the top line of the display.

Figure 40: Resistance measurement and source display

Charge measurements

The 6517B has four charge ranges to resolve charges as low as 10 fC (10 as 2.1 μC. In the charge function, an accurately known capacitor is placed in the feedback loop of the amplifier so that the voltage developed is proportional to the integral of the input current in accordance with the following formula:

-14

C) and measure as high

The voltage is scaled and displayed as charge.

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Electrometer User's Manual Section 4:

Basic charge measurement procedure

After measuring high voltage in the voltage function, it may take a few minutes for input current to drop to within specified limits. Input current can be verified by placing the protection cap on the INPUT triaxial connector and then connecting a jumper between COMMON and chassis ground. With the instrument on the 20 pA range and zero check disabled, allow the reading to settle until the input bias current is within specifications.

Do not apply more than 250 V 250 V

can damage the 6517B.

PEAK

(dc to 60 Hz) to the input. Applying voltages above

PEAK

The 6517B has an autodischarge feature for the charge function. When enabled, autodischarge resets the charge reading to zero when the charge reading reaches the specified level. After the integrator resets, the charge measurement process restarts at zero.

To make charge measurements:

1. Press the Z-CHK key to enable zero check (ZeroCheck displayed).

2. Select the Q key to select the charge function.

3. Press the CONFIG key.

4. Press the Q key.

5. Select AUTO-DISCHARGE. Press the ENTER key.

6. Select:

 OFF: Disable autodischarge. You can use zero check to reset the integrator.

 ON: Enable autodischarge. You are prompted to enter the discharge level. The charge

reading resets every time the specified charge level is reached.

7. Press the ENTER key.

8. Press the EXIT key to return to the measurement display.

9. Press the AUTO key to select autorange. You can also use the RANGE keys to select a manual

range.

10. Connect the test cable to the 6517B.

11. Press the Z-CHK key to disable zero check.

12. Press the REL key to set the relative offset (zero the instrument).

13. Connect the circuit to the INPUT of the 6517B as shown in the following figure.

14. Make the charge reading from the display.

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Figure 41: Typical connections for charge measurements

Figure 42: Typical connections for charge measurements - equivalent circuit

Charge configuration

The following information explains the various configuration options for the charge function. The configuration menu is summarized in the following table. This menu is accessed by pressing the CONFIG key and then the Q key.

You do not have to select a function to configure it. When the function is selected, it assumes the programmed status.

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SPEED

Measurement speed (integration time) menu:

NORMAL

Select 1 PLC (power line cycle, 16.67 ms for 60 Hz, 20 ms for 50 Hz and 400 Hz).

FAST

Select 0.01 PLC.

MEDIUM

Select 0.1 PLC.

HIACCURACY

Select 10 PLC.

SET-SPEED-EXACTLY

Set integration in PLC (0.01 to 10).

SET-BY-RSLN

Optimizes the integration time for the selected resolution.

Refer to “Integration time” in the Model 6517B Electrometer Reference Manual for detail.

FILTER

Filter menu for setting the averaging and median filters:

AVERAGING

Configure digital averaging filter:

TYPE

Select type of average filter:

NONE

No average filtering performed.

AVERAGING

Program a simple average filter (1 to 100 readings).

ADVANCED

Program a simple average filter (1 to 100 readings) with noise tolerance window (0 to 100% of range).

AVERAGING-MODE

Select moving average or repeating average mode.

MEDIAN

Configure the median filter:

DISABLE

Disable the median filter.

ENABLE

Enable median filter and specify rank (1 to 5).

Refer to “Filters” in the Model 6517B Electrometer Reference Manual for detail.

RESOLUTION

Resolution menu:

Manual for detail.

AUTO-DISCHARGE

Enable or disable autodischarge. When enabled, autodischarge resets the

overflows before the integrator resets.

AUTORANGE

Select high or low autorange limits.

Manual for detail.

Electrometer User's Manual Section 4:

Charge configuration menu

Menu item Description

AUTO

3.5, 4.5, 5.5, 6.5

Default to resolution appropriate for the integration time. Select a specific resolution. Refer to “Display resolution” in the Model 6517B Electrometer Reference

charge reading to zero at the specified level. After the integrator resets, the charge measurement process restarts at zero. OFF: Disable autodischarge. You can use zero check to reset the integrator. ON: Enable autodischarge. You are prompted to enter the discharge level. The charge reading resets every time the specified charge level is reached. If you specify a level that exceeds the measurement range, the display

LO: Limit the autorange search to the low measurement ranges (2 nC to 20 nC). HIGH: Limit the autorange search to the high measurement ranges (200 nC to 2 μC). Refer to “Measurement range” in the Model 6517B Electrometer Reference

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Relative humidity and temperature readings

With the appropriate equipment connected, the 6517B can measure relative humidity and external temperature. To view the humidity and external temperature readings on the front panel, select the NEXT display. An example of the display is shown in the following figure.

Figure 43: Relative humidity and external temperature display

These readings can also be included as data elements for the bus interfaces (GPIB and RS-232) and the buffer.

Relative humidity

The Keithley Instruments Model 6517-RH humidity probe measures relative humidity. This sensor plugs into the HUMIDITY connector on the rear panel of the 6517B. You can measure relative humidity from 0% to 100% using the Model 6517-RH.

To make relative humidity measurements:

1. Connect the 6517-RH humidity probe to the HUMIDITY connector on the rear panel.

2. On the front panel, press the MENU key.

3. Select the GENERAL menu. Press the ENTER key.

4. Select A/D CONTROLS. Press the ENTER key.

5. Select DATA-STAMP. Press the ENTER key.

6. Select HUMIDITY.

7. Use the RANGE keys to toggle relative humidity readings to ON. Press the ENTER key.

8. Press the EXIT key as needed to return to the measurement display.

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External temperature

The Keithley Instruments Model 6517-TP temperature probe is a K-type thermocouple sensor that measures external temperature. This sensor plugs into the TEMP TYPE K connector on the rear panel of the 6517B. You can measure temperatures from –25 °C to 150 °C using the Model 6517-TP temperature probe.

Do not allow the exposed thermocouple sensor to come in contact with chassis ground or to a voltage potential. This causes erroneous readings. The thermocouple must be electrically insulated before attaching it to a device that is at chassis ground or has a voltage on it.

To make temperature measurements:

1. Connect the 6517-TP temperature probe to the TEMP TYPE K connector on the rear panel.

2. On the front panel, press the MENU key.

3. Select the GENERAL menu. Press the ENTER key.

4. Select A/D CONTROLS. Press the ENTER key.

5. Select DATA-STAMP. Press the ENTER key.

6. Select TEMPERATURE.

7. Use the RANGE keys to toggle temperature readings to ON. Press the ENTER key.

8. Press the EXIT key as needed to return to the measurement display.

To change the temperature units:

1. On the front panel, press the MENU key.

2. Select the GENERAL menu. Press the ENTER key.

3. Select the DISPLAY menu. Press the ENTER key.

4. Select TEMP-UNITS. Press the ENTER key.

5. Set the units to °C, °F, or K. This setting also affects the display of internal temperature

measurements.

6. Press the ENTER key.

Internal scanning

You can use a 6517B with a scanner card, such as the Keithley Instruments Model 6521 or Model 6522, installed in the option slot. The following topics provide basic information for scanning internal channels. If the scanner card is not already installed, refer to the scanner card instruction manual.

For complete information on scanning, refer to the scanner card instruction documentation. The scanner card must be installed in the option slot to access the scan menus.

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Configure internal scanner

To configure an internal scan:

1. Press the CONFIG key.

2. Press the CARD key. The scanning options are displayed.

3. Place the cursor on INTERNAL. Press the ENTER key.

4. Select CHANNELS. Press the ENTER key. The status (on or off) for each channel is displayed.

ON indicates that the channel is included in the scan. OFF indicates that the channel is not included in the scan.

5. To change the status of the channels, place the cursor on each channel and press a RANGE ▲

or ▼ key to select the status. Press the ENTER key.

6. Select SCAN-MODE. Press the ENTER key.

7. Select the VOLTAGE scan mode. This is the fastest scan mode and can be used when break-

before-make switching is not required. Press the ENTER key.

8. Select VSRC-LIMIT. Press the ENTER key.

9. Select YES to enable the 200 V voltage source limit or NO to disable the limit. The ±200 V limit

protects the scanner card. You can also set a voltage source limit (0 to ±1000 V) from the Configure V-Source menu.

10. Select SETTLING-TIME. Press the ENTER key.

11. Set a settling time (0 to 999.999 seconds) for each channel. Press the ENTER key.

12. Press the EXIT key to return to the main menu.

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Perform an internal scan

To scan internal channels:

1. Set up the 6517B for the measurement.

2. Press CARD to display the internal scanner options (close channel or perform scan).

3. Select PERFORM-SCAN to display the scan types (internal or external).

4. Select INTERNAL to display the scan count; the scan count indicates the number of times the

scan will be repeated.

5. Set the scan count. Press the ENTER key. The scan timer query is displayed. The scan timer

adds a set amount of time between scans.

6. Select YES or NO.

7. If you selected YES, set the interval in seconds. Press the ENTER key. The data to memory

prompt is displayed. This determines if scan data is stored in the reading buffer.

8. Select YES or NO.

9. If you selected YES, set the number of readings to store in the buffer. Press the ENTER key. The

message Press ENTER to begin is displayed

10. Press the ENTER key to start the scan. The display shows the measurement and channel. If data

is stored, the reading number is displayed. When the scan is complete, SCAN COMPLETE is

displayed.

11. If data was stored in the buffer, select RECALL-DATA to review the data. Press the ENTER key.

Use the RANGE ▲ and ▼ keys to scroll through the data points.

12. To repeat the scan, select SCAN-AGAIN. Press the ENTER key.

13. To return to the normal measurement mode, press the EXIT key.

You can use the RECALL key to display stored readings after you exit the scan menus.

Close and open channels

To open or close a channel on an internal scanner card:

1. Press the CARD key to display the internal scanner options.

2. Select CHANNEL-CLOSURES. Press the ENTER key.

3. To close a channel:

a. Select CLOSE-CHANNEL. Press the ENTER key.

b. Use the RANGE ▲ and ▼ keys to display the channel. Press the ENTER key.

4. To open all channels on the scanner card, select OPEN-ALL-CHANNELS. Press the

ENTER key.

6517B-900-01 Rev. B August 2022 4-29

Section

User's Manual

4: Basic measurements Model 6517B Electrometer

External scanning

You can use the 6517B with a scanner card that is installed in an external scanning mainframe, such as the 7001 or 7002 Switch System. With the use of external triggering, the 6517B can measure and store each scanned channel. For complete information on scanning, refer to the switch system and scanner card documentation.

The following steps assume that the 6517B is set to the BENCH reset default conditions and the Model 7001 or 7002 is set to the RESET default conditions.

Trigger connections for external scanning

Connect the 6517B to the switch system as shown in the following figure. Refer to “Triggering” in the Model 6517B Electrometer Reference Manual for more information on using Trigger Link.

Figure 44: Trigger Link connections between 7001 or 7002 and 6517B

Configure external channels

To set up the scan, you specify the number of channels, or external inputs, for the scan. You can select from 1 to 400 channels.

You can set up the scan with or without a scanner card in the 6517B option slot.

To set up the scan with a scan board installed:

1. Press the CONFIG key.

2. Press the CARD key.

3. Select EXTERNAL. Press the ENTER key.

4. Enter the number of channels for the scan. Press the ENTER key to continue.

5. Press the EXIT key to return to the normal measurement display.

4-30 6517B-900-01 Rev. B August 2022

Model 6517B

Basic measurements

Electrometer User's Manual Section 4:

To set up the scan with no scan board installed:

1. Press the CONFIG key.

2. Press the CARD key.

3. Enter the number of channels for the scan. Press the ENTER key to continue.

Perform the scan

To scan external channels:

1. On the 6517B, press the CARD key.

2. If a scanner card is installed in the 6517B, select PERFORM-SCAN. Press the ENTER key.

3. Select EXTERNAL. Press the ENTER key. A message is displayed.

4. On the 7001 or 7002, perform reset:

a. Press the MENU key.

b. Select SAVESETUP.

c. Select RESET. Press the ENTER key.

d. Press the ENTER key.

e. Press the EXIT key to leave the menu structure.

5. On the 7001 or 7002, press the SCAN key.

6. Select SELECT-CONTROL > NUMBER-OF-CHANS > CHAN-COUNT > INFINITE.

Do not exit from the menu structure after selecting an infinite channel count.

7. On the 6517B, press the ENTER key to display the next message.

8. Select the trigger source. If you are using the Trigger Link, select TRIGLINK. If you are using

conventional external triggering, select EXTERNAL. Press the ENTER key.

9. On the 7001 or 7002, set channel spacing as follows. The message on the 6517B tells you which

channel spacing option to select:

a. Select CHANNEL-SPACING.

b. Select TRIGLINK or EXTERNAL.

c. Press the EXIT key to return to the main display.

10. On the 6517B, press the ENTER key.

11. Use the 7001 or 7002 to define the scan list.

12. On the 6517B, press the ENTER key to display CONFIG EXT SCANNER; STEP scanner to

first channel.

13. On the 7001 or 7002, press STEP to close the first channel in the scan.

6517B-900-01 Rev. B August 2022 4-31

Section

User's Manual

4: Basic measurements Model 6517B Electrometer

14. On the 6517B, press the ENTER key to display the scan count. Change the scan count as

needed. The scan count specifies the number of scans to be performed. Press the ENTER key.

15. On the6517B, you can set a scan timer. The timer provides a time interval between each scan. If

you select YES, enter the interval (in seconds). Press the ENTER key.

16. The DATA TO MEMORY prompt is displayed. If you select YES, message indicating the total

number of readings to be stored in the buffer is displayed. Press the ENTER key to continue.

17. Press the ENTER key to start the scan process. The display shows the measurement and

channel. If data is stored, the reading number is displayed. When the scan is complete, SCAN

COMPLETE is displayed.

18. If data was stored in the buffer, select RECALL-DATA to review the data. Press the ENTER key.

Use the RANGE ▲ and ▼ keys to scroll through the data points.

19. To repeat the scan, select SCAN-AGAIN. Press the ENTER key.

20. To exit the scan, press the EXIT key.

You can use the RECALL key to display stored readings after you exit the scan menus.

4-32 6517B-900-01 Rev. B August 2022

Status and error messages .......................................................5-3

100 V or 120 V

0.630 A, 250 V, slow blow, 5 mm × 20 mm

Keithley FU-106-.630

220 V or 240 V

0.315 A, 250 V slow blow, 5 mm × 20 mm

Keithley FU-106-.315

In this section:

Introduction ...............................................................................5-1

Line fuse ...................................................................................5-1

Change the line voltage ............................................................5-3

Upgrading the firmware .............................................................5-3

Introduction

This section describes routine maintenance of the instrument that an operator can perform.

Section 5

Maintenance

Line fuse

A fuse on the 6517B rear panel protects the power line input of the instrument. See the following instructions to replace the fuse. You do not need to return your instrument for service if the fuse is damaged.

Disconnect the line cord at the rear panel and remove all test leads connected to the instrument before replacing a line fuse. Failure to do so could expose the operator to hazardous voltages that could result in personal injury or death.

Use only the correct fuse type. Failure to do so could result in injury, death, or instrument damage. If the instrument repeatedly blows fuses, locate and correct the cause of the problem before replacing the fuse. If the fuse continues to become damaged, return the instrument to Keithley Instruments for repair.

The powerline fuses for the 6517B are listed in the following table.

Fuse ratings

Line voltage Fuse rating Part number

Section

User's Manual

5: Maintenance Model 6517B Electrometer

Line fuse replacement

To replace the line fuses:

1. Power off the instrument.

2. Remove all test leads connected to the instrument.

3. Remove the line cord.

4. Locate the fuse holder, which is on the rear panel above the ac receptacle.

5. Squeeze the tabs on the fuse holder, shown in the following figure, to release the fuse drawer.

Figure 45: Fuse tabs

6. Slide the fuse drawer out.

7. Remove the damaged fuse from the drawer.

8. Replace the fuse with the same type. See Line fuse (on page 5-2, on page 5-1

) for replacement

part numbers.

9. Push the fuse drawer back into the power module. Make sure the tabs click into place.

5-2 6517B-900-01 Rev. B August 2022

Model 6517B

Maintenance

−440

Query UNTERMINATED after indefinite response

−430

Query DEADLOCKED

−420

Query UNTERMINATED

−410

Query INTERRUPTED

−363

Input buffer overrun

−350

Queue overflow

−330

Self test failed

−314

Save/recall memory lost

Electrometer User's Manual Section 5:

Change the line voltage

Line voltage is preset at the factory, but may be reset in the field.

If you change the line voltage, you also need to replace the line fuse. Use only the correct fuse type. Failure to do so could result in injury, death, or instrument damage.

To change the line voltage:

1. Remove the handle from the 6517B.

2. Use a Philips screwdriver to remove the left mounting ear (left when looking at the front panel of

the 6517B).

3. Use a small coin to change the voltage setting.

4. Replace the mounting ear and handle.

5. Replace the line fuse. See Line fuse (on page 5-2, on page 5-1

Upgrading the firmware

For instruction on upgrading the firmware, refer to the release notes for the firmware. Firmware and release notes are available on tek.com/keithley

Status and error messages

During 6517B operation and programming, the instrument may display front-panel status and error messages. The messages are listed in the following table.

To momentarily display the most recent status or error message, press the MENU key and press the

PREV display key. The display is blank if no message is queued.

Status and error messages

Number Description Event

) for more information.

. Filter by Software to locate the firmware.

6517B-900-01 Rev. B August 2022 5-3

Section

User's Manual

−285

Program syntax error

−284

Program currently running

−282

Illegal program name

−281

Cannot create program

−260

Expression error

−259

Expression error

−241

Hardware missing

−230

Data corrupt or stale

−225

Out of memory

−224

Illegal parameter value

−223

Too much data

−222

Parameter data out of range

−221

Settings conflict

−220

Parameter error

−215

Arm deadlock

−214

Trigger deadlock

−213

Init ignored

−212

Arm ignored

−211

Trigger ignored

−210

Trigger error

−203

Command protected

−202

Settings lost due to rtl

−201

Invalid while in local

−200

Execution error

−178

Expression data not allowed

−171

Invalid expression

−170

Expression error

−168

Block data not allowed

−161

Invalid block data

−160

Block data error

−158

String data not allowed

−154

String too long

−151

Invalid string data

−150

String data error

−148

Character data not allowed

−144

Character data too long

−141

Invalid character data

−140

Character data error

−128

Numeric data not allowed

−124

Too many digits in number

−123

Exponent too large

−121

Invalid character in number

−120

Numeric data error

−114

Header suffix out of range

−113

Undefined header

−112

Program mnemonic too long

5: Maintenance Model 6517B Electrometer

Number Description Event

5-4 6517B-900-01 Rev. B August 2022

Model 6517B

Maintenance

−111

Command header separator error

−110

Command header error

−109

Missing parameter

−108

Parameter not allowed

−105

GET not allowed.

−104

Data Type Error

−103

Invalid Separator

−102

Syntax Error

−101

Invalid Character

−100

Command Error

000

No Error

+101

Operation complete

+121

Device calibrating

+122

Device settling

+123

Device ranging

+124

Device sweeping

+125

Device measuring

+126

Device calculating

+161

Program running

+171

Waiting in trigger Layer

+172

Waiting in arm layer 1

+173

Waiting in arm layer 2

+174

Re-entering the idle layer

+301

Reading overflow

+302

Low limit 1 event

+303

High limit 1 event

+304

Low limit 2 event

+305

High limit 2 event

+306

Reading available

+307

Voltmeter Complete

+308

Buffer Available

+309

Buffer half-full

+310

Buffer full

+311

Buffer Overflow

+312

Buffer Pretriggered

+313

Reading out of Limit

+314

8009 fixture lid open

+315

Voltage source compliance detected

+320

Buffer and format element mismatch

+321

Buffer sizing error; set to maximum

+322

Buffer sizing error; set to minimum

the Model 6517B Electrometer Reference Manual

+510

Reading buffer data lost

+511

GPIB address lost

+512

Power-on state lost

Electrometer User's Manual Section 5:

Number Description Event

+350 to +427 Calibration commands, refer to “Calibration error codes” in

6517B-900-01 Rev. B August 2022 5-5

Section

+513

Calibration data lost

+514

DC calibration data lost

+515

Calibration dates lost

+516

Calibration tables lost

+517

Voltage offset lost

+518

Current offset lost

+519

Installed option id lost

+520

Option card not supported

+521

Cal Card Data Error

+522

GPIB communication language lost

+610

Questionable calibration

+611

Questionable temperature

+612

Questionable humidity

+613

Questionable voltage

+614

Questionable current

+615

Questionable ohms

+616

Questionable charge

+617

Questionable test sequence

+618

Resistivity: Current out of limit

+700

Low battery detected

+800

RS-232 framing error detected

+801

RS-232 parity error detected

+802

RS-232 overrun detected

+803

RS-232 break detected

+804

RS-232 noise detected

+805

Invalid system communication

+806

RS-232 settings lost

+807

RS-232 OFLO: Characters Lost

+808

ASCII only with RS-232

+809

Not allowed with RS-232

+850

Invalid test sequence setting

+851

Test sequence running

+860

Interlock violation error

+861

Voltage source limit too low for autoohms

+900

Internal system error

SE = Status event EE = Error event

5: Maintenance Model 6517B Electrometer User's Manu

Number Description Event

5-6 6517B-900-01 Rev. B August 2022

All Keithley trademarks and trade names are the property of Keithley Instruments.

Specifications are subject to change without notice.

All other trademarks and trade names are the property of their respective companies.

Keithley Instruments • 28775 Aurora Road • Cleveland, Ohio 44139 • 1-800-833-9200 • tek.com/keithley

04/2022

Tektronix 6517B User manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Safety precautions

Introduction

Welcome

Capabilities and features overview

Extended warranty

Contact information

General ratings

Unpacking and inspection for damage

Returning instrument for service

Shipment contents

Options and accessories

Introduction

Getting started

Front-panel overview

Rear-panel overview

Power the instrument on or off

Power-up sequence

Power-up error messages

Set the power-on defaults

Using the menus

Menu

SAVESETUP

COMMUNICATION

TEST

LIMITS

STATUS-MSG

GENERAL

Display

Exponent mode (engineering or scientific)

Messages

Display instrument information

Measurement function displays

Time, day, and date

Bar graph

Zero-centered bar graph

Maximum and minimum

Relative humidity and external temperature

Saving setups

Save a user setup

Restore a user setup

Reset the instrument

Factory default settings

Introduction

Connections

Electrometer input connector

Input configurations

Maximum input levels

Input protection

High-resistance meter connections

Voltage source output connections

Low-noise input cables

Shielding and guarding

Noise shield

Guard shield

Safety shield

Floating circuits

Floating voltage source

Test fixtures

Interlock

Custom-built test fixtures

Test fixture chassis

Connectors, terminals, and internal wiring

Dedicated test fixture

Multipurpose test fixture

Handling and cleaning test fixtures

Introduction

Basic measurements

Voltage measurements

Basic voltage measurement procedure

Voltage configuration

Current measurements

Basic current measurement procedure

Current configuration

Resistance and resistivity measurements

Automatic voltage source

Resistance ranges