Tektronix 6517 User manual
c
Model
Electrometer
User’s
6517
Manual
Contains Operating and Programming Information
WARRANTY
Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year from date of
shipment.
Keithley Instruments, Inc. warrants the following items for
90
days from the date of shipment: probes, cables, rechargeable batteries,
diskettes, and documentation.
During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.
To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio. You will
be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service facility. Repairs
will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for the balance of the origi-
nal
warranty period, or at least
90
days.
LIMITATION
OF
WARRANTY
This warranty does not apply to defects resulting from product modification without Keithley’s express written consent, or misuse of
any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from battery leakage, or
problems arising from normal wear or failure to follow instructions.
THIS WARRANTY
WARRANTY
IS
IN LIEU
OF
MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PROVIDED HEREIN ARE
OF
ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY IMPLIED
BUYER’S SOLE AND EXCLUSIVE REMEDIES.
NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY
RECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT
SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE
OF
ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT, INDI-
OF
THE USE
OF
ITS INSTRUMENTS AND
OF
THE POSSIBILITY OF
SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS OF REMOVAL
AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT
Test Instrumentation
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Model
User’s Manual
651
7
Electrometer
01
994, Keithley Instruments, Inc.
Test Instrumentation Group
All
rights reserved.
Cleveland, Ohio,
Fourth Printing July 1995
Document Number: 651 7-900-01 Rev.
U.S.A.
D
Manual
Print History
The print history shown below lists the printing dates of all Revisions and Addenda created for this manual. The Revision
Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between Revisions, contain important change information that the user should incorporate immediately into the manual. Addenda are numbered sequentially. When a new Revision is created, all Addenda associated with the previous Revision of the manual are
of
incorporated into the new Revision of the manual. Each new Revision includes a revised copy
this print history page.
Revision A (Document Number 6517-900-01)
B
Revision
Addendum B (Document Number 6517-900-0
Addendum
Revision
Addendum
Revision D (Document Number 6517-900-01)
(Document Number 6517-900-01)
B
(Document Number 6517-900-03)
C
(Document Number 6517-900-01)
C
(Document Number 6517-900-02)
...............................................................
.........................................
.....................................
..............................................................................
..........................
September 1994
October 1994
December 1994
February 1995
.........
....................................................................
.........................................................................................
March 1995
June 1995
July 1995
All Keithley product names are trademarks
Other brand and product names are trademarks
or
registered trademarks
or
registered trademarks
of
Keithley Instruments, Inc.
of
their respective holders.
Safety Precautions
The following safety precautions should be observed before using
this product and any associated instrumentation. Although some instruments and accessories would normally be used with non-haz-
ardous voltages, there are situations where hazardous conditions
may be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required
to
avoid possible injury. Read the operating information
carefully before using the product.
Exercise extreme caution when a shock hazard is present. Lethal
voltage may be present on cable connector jacks
The American National Standards Institute (ANSI) states that
shock hazard exists when voltage levels greater than 30V
42.4V peak,
or
60VDC are present.
A
good
or
test fixtures.
RMS,
safety practice is to ex-
pect that hazardous voltage is present in any unknown circuit
before measuring.
Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks,
before each use.
For
maximum safety, do not touch the product, test cables,
other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge
any capacitors before: connecting
ers, installing
changes, such as installing
Do not touch any object that could provide a current path to the
common side of the circuit under test
Always make measurements with dry hands while standing on
dry, insulated surface capable of withstanding the voltage being
measured.
or
removing switching cards,
or
disconnecting cables
or
removing jumpers.
or
power line (earth) ground.
or
or
breaks
or
any
or
jump-
making internal
Do
not exceed the maximum signal levels of the instruments and
accessories, as defined in the specifications and operating information, and as shown on the instrument
switching card.
Do
not connect switching cards directly to unlimited power circuits.
They are intended to be used with impedance limited sources.
NEVER connect switching cards directly
necting sources to switching cards, install protective devices to limit fault current and voltage to the card.
When fuses are used in
for continued protection against fire hazard.
a
Chassis connections must only be used
measuring circuits,
If you are using a test fixture, keep the lid closed whilc power
plied to the device under test. Safe operation requires the
lid interlock.
If a
@
screw is present, connect
#18
AWG
or
larger wire.
The
f
symbol on an instrument
or
more may be present on the terminals. Refer to the product man-
ual for detailed operating information.
Instrumentation and accessories should not be connected to
mans.
Maintenance should be performed by qualilicd service pcrsonncl.
Before performing any maintenance. disconnect the line cord and
a
all test cables.
a
product. replace with same typc and rating
NOT
as safety earth ground connections.
or
test fixture rear panel.
to
AC main. When con-
as
shield conncctions for
it
to safety earth ground using
or
accessory indicates
use
that
or
is
ap-
of a
IOOOV
hu-
Table of Contents
1 General Information
1.1 Introduction......................................................................................................................................................... 1-1
1.2 Features ............................................................................................................................................................... 1-1
1.3 Warranty information.......................................................................................................................................... 1-2
1.4 Manual addenda .................................................................................................................................................. 1-2
1.5 Safety symbols and terms ................................................................................................................................... 1-2
1.6 Specifications ...................................................................................................................................................... 1-2
1.7 Inspection ............................................................................................................................................................ 1-2
1.8 Options and accessories ...................................................................................................................................... 1-2
2 Front Panel Operation
2.1 Introduction......................................................................................................................................................... 2-1
2.2 Power-up ............................................................................................................................................................. 2-2
2.2.1 Line power connections ...............................................................................................................................2-2
2.2.2 Line fuse replacement .................................................................................................................................. 2-2
2.2.3 Power-up sequence ......................................................................................................................................2-3
2.2.4 Power-on default conditions ........................................................................................................................2-3
2.2.5 Warm-up period ........................................................................................................................................... 2-4
2.2.6 IEEE-488 primary address ........................................................................................................................... 2-4
2.3 Display ................................................................................................................................................................ 2-4
2.3.1 Exponent mode (Engineering or Scientific)................................................................................................. 2-4
2.3.2 Information messages ..................................................................................................................................2-4
2.3.3 Status and error messages ............................................................................................................................2-5
2.3.4 Multiple displays..........................................................................................................................................2-7
2.3.5 Navigating menus ........................................................................................................................................2-9
2.4 Connections — electrometer, high-resistance meter and V-source .................................................................... 2-9
2.4.1 Electrometer input connector ....................................................................................................................... 2-9
2.4.2 High-resistance meter connections ............................................................................................................2-11
2.4.3 Voltage source output connections ............................................................................................................2-11
2.4.4 Low noise cables, shielding and guarding .................................................................................................2-12
2.4.5 Floating circuits.......................................................................................................................................... 2-13
2.4.6 Test fixtures................................................................................................................................................ 2-15
2.5 Voltage measurements ...................................................................................................................................... 2-18
2.5.1 Basic measurement procedure ................................................................................................................... 2-18
2.5.2 Volts configuration ....................................................................................................................................2-21
2.5.3 Voltage measurement considerations......................................................................................................... 2-22
2.6 Current measurements....................................................................................................................................... 2-24
2.6.1 Basic measurement procedure .................................................................................................................. 2-24
2.6.2 Amps configuration................................................................................................................................... 2-27
2.6.3 Current measurement considerations ......................................................................................................... 2-28
i
2.7 Resistance and resistivity measurements........................................................................................................... 2-32
2.7.1 Resistance measurements .......................................................................................................................... 2-33
2.7.2 Resistivity measurements .......................................................................................................................... 2-36
2.7.3 Ohms configuration ....................................................................................................................................2-39
2.7.4 Multiple display..........................................................................................................................................2-42
2.7.5 Ohms measurement considerations ............................................................................................................2-42
2.8 Charge measurements (Q) ................................................................................................................................. 2-42
2.8.1 Basic measurement procedure................................................................................................................... 2-43
2.8.2 Coulombs configuration ............................................................................................................................ 2-43
2.8.3 Charge measurement considerations ..........................................................................................................2-45
2.9 Voltage source ................................................................................................................................................... 2-46
2.9.1 Sourcing options........................................................................................................................................ 2-46
2.9.2 Setting voltage source value...................................................................................................................... 2-48
2.9.3 Voltage and current limit............................................................................................................................2-49
2.9.4 Interlock and test fixtures ...........................................................................................................................2-50
2.9.5 Operate .......................................................................................................................................................2-50
2.10 Analog outputs................................................................................................................................................... 2-50
2.10.1 2V analog output ....................................................................................................................................... 2-51
2.10.2 Preamp out................................................................................................................................................. 2-52
2.11 Using external feedback .................................................................................................................................... 2-54
2.11.1 Electrometer input circuitry....................................................................................................................... 2-54
2.11.2 Shielded fixture construction..................................................................................................................... 2-54
2.11.3 External feedback procedure ..................................................................................................................... 2-55
2.11.4 Non-standard coulombs ranges ................................................................................................................. 2-56
2.11.5 Logarithmic currents ..................................................................................................................................2-56
2.11.6 Non-decade current gains ...........................................................................................................................2-57
2.12 Range and resolution ......................................................................................................................................... 2-57
2.12.1 Measurement range ....................................................................................................................................2-57
2.12.2 Display resolution.......................................................................................................................................2-57
2.13 Zero check, relative and zero correct .................................................................................................................2-58
2.13.1 Zero check ..................................................................................................................................................2-58
2.13.2 Relative (REL)............................................................................................................................................2-59
2.13.3 Zero correct ................................................................................................................................................2-60
2.14 Test sequences ....................................................................................................................................................2-60
2.14.1 Test descriptions.........................................................................................................................................2-60
2.14.2 Configure Test Sequence............................................................................................................................2-68
2.14.3 Running the selected test ............................................................................................................................2-70
2.15 Triggers...............................................................................................................................................................2-71
2.15.1 Trigger model .............................................................................................................................................2-73
2.15.2 Basic trigger configuration .........................................................................................................................2-76
2.15.3 Advanced trigger configuration..................................................................................................................2-77
2.15.4 External triggering......................................................................................................................................2-81
2.15.5 Trigger Link................................................................................................................................................2-83
2.16 Buffer..................................................................................................................................................................2-94
2.16.1 Configuring data storage ............................................................................................................................2-96
2.16.2 Storing and recalling readings ....................................................................................................................2-98
2.16.3 Buffer multiple displays ...........................................................................................................................2-100
2.17 Filters................................................................................................................................................................2-100
2.17.1 Digital Filters............................................................................................................................................2-101
2.17.2 Median filter .............................................................................................................................................2-101
2.17.3 Configuring the filters ..............................................................................................................................2-103
2.18 Math..................................................................................................................................................................2-105
2.18.1 Polynomial................................................................................................................................................2-105
2.18.2 Percent ......................................................................................................................................................2-105
ii
2.18.3 Percent deviation......................................................................................................................................2-105
2.18.4 Deviation.................................................................................................................................................. 2-105
2.18.5 Ratio ......................................................................................................................................................... 2-106
2.18.6 Logarithmic.............................................................................................................................................. 2-106
2.18.7 Selecting and configuring math ...............................................................................................................2-106
2.18.8 Calculate multiple display........................................................................................................................ 2-107
2.19 Menu ................................................................................................................................................................2-107
2.19.1 SAVESETUP ........................................................................................................................................... 2-110
2.19.2 COMMUNICATION...............................................................................................................................2-116
2.19.3 CAL.......................................................................................................................................................... 2-117
2.19.4 TEST ........................................................................................................................................................ 2-118
2.19.5 LIMITS ....................................................................................................................................................2-118
2.19.6 STATUS-MSG......................................................................................................................................... 2-120
2.19.7 GENERAL ............................................................................................................................................... 2-120
2.20 Scanning...........................................................................................................................................................2-123
2.20.1 Internal scanning ...................................................................................................................................... 2-123
2.20.2 External scanning..................................................................................................................................... 2-123
2.21 Other measurement considerations .................................................................................................................. 2-124
2.21.1 Ground loops............................................................................................................................................2-124
2.21.2 Triboelectric effects .................................................................................................................................2-124
2.21.3 Piezoelectric and stored charge effects ....................................................................................................2-124
2.21.4 Electrochemical effects ............................................................................................................................ 2-125
2.21.5 Humidity ..................................................................................................................................................2-125
2.21.6 Light ......................................................................................................................................................... 2-125
2.21.7 Electrostatic interference.......................................................................................................................... 2-125
2.21.8 Magnetic fields......................................................................................................................................... 2-125
2.21.9 Electromagnetic interference (EMI) ........................................................................................................2-126
2.22 Relative humidity and external temperature readings...................................................................................... 2-126
3 IEEE-488 Reference
3.1 Introduction......................................................................................................................................................... 3-1
3.2 Connections......................................................................................................................................................... 3-2
3.2.1 IEEE-488 bus connections ........................................................................................................................... 3-2
3.2.2 RS-232 serial interface connections............................................................................................................. 3-3
3.3 GPIB primary address selection.......................................................................................................................... 3-3
3.4 GPIB programming language selection .............................................................................................................. 3-4
3.5 QuickBASIC 4.5 programming .......................................................................................................................... 3-4
3.6 General bus commands ....................................................................................................................................... 3-5
3.6.1 REN (remote enable) ...................................................................................................................................3-5
3.6.2 IFC (interface clear) ..................................................................................................................................... 3-5
3.6.3 LLO (local lockout) .....................................................................................................................................3-6
3.6.4 GTL (go to local) .........................................................................................................................................3-6
3.6.5 DCL (device clear).......................................................................................................................................3-6
3.6.6 SDC (selective device clear) ........................................................................................................................ 3-6
3.6.7 GET (group execute trigger) ........................................................................................................................ 3-6
3.6.8 SPE, SPD (serial polling).............................................................................................................................3-6
3.7 Front panel aspects of IEEE-488 operation ........................................................................................................ 3-7
3.7.1 Error and status messages ............................................................................................................................3-7
3.7.2 IEEE-488 status indicators...........................................................................................................................3-7
3.7.3 LOCAL key.................................................................................................................................................. 3-7
3.8 Status structure.................................................................................................................................................... 3-7
3.8.1 Condition registers .................................................................................................................................... 3-14
iii
3.8.2 Transition filters ........................................................................................................................................ 3-14
3.8.3 Event registers ............................................................................................................................................3-15
3.8.4 Enable registers ..........................................................................................................................................3-15
3.8.5 Queues ........................................................................................................................................................3-15
3.8.6 Status byte and service request (SRQ) .......................................................................................................3-16
3.9 Trigger Model (IEEE-488 operation)................................................................................................................ 3-18
3.10 Programming syntax...........................................................................................................................................3-21
3.11 Common commands...........................................................................................................................................3-27
3.11.1 *CLS — clear status...................................................................................................................................3-27
3.11.2 *ESE <NRf> — event enable ....................................................................................................................3-28
ESE? — event enable query
3.11.3 *ESR? — event status register query .........................................................................................................3-29
3.11.4 *IDN? — identification query....................................................................................................................3-30
3.11.5 *OPC — operation complete......................................................................................................................3-31
3.11.6 *OPC? — operation complete query..........................................................................................................3-32
3.11.7 *OPT? — option identification query ........................................................................................................3-33
3.11.8 *RCL — recall ...........................................................................................................................................3-33
3.11.9 *RST — reset the Model 6517...................................................................................................................3-33
3.11.10 *SAV — save the current setup in memory...............................................................................................3-33
3.11.11 *SRE <NRf> — service request enable .....................................................................................................3-34
SRE? — service request enable query........................................................................................................3-34
3.11.12 *STB? — status byte query........................................................................................................................3-35
3.11.13 *TRG — trigger .........................................................................................................................................3-36
3.11.14 *TST? — self-test query ............................................................................................................................3-36
3.11.15 *WAI — wait-to-continue..........................................................................................................................3-36
3.12 Signal oriented measurement commands ...........................................................................................................3-38
3.13 Calculate subsystems..........................................................................................................................................3-61
3.13.1 :CALCulate[1]............................................................................................................................................3-61
3.13.2 :CALCulate2...............................................................................................................................................3-64
3.13.3 :CALCulate3...............................................................................................................................................3-66
3.14 :CALibration subsystem.....................................................................................................................................3-70
3.15 :DISPlay subsystem............................................................................................................................................3-71
3.16 :FORMat subsystem ...........................................................................................................................................3-74
3.17 Output Subsystems .............................................................................................................................................3-79
3.18 :ROUTe subsystem.............................................................................................................................................3-80
3.18.1 :CLOSe <list>.............................................................................................................................................3-80
3.18.2 :OPEN <list> ..............................................................................................................................................3-80
3.18.3 :OPEN:ALL................................................................................................................................................3-81
3.18.4 :SCAN commands ......................................................................................................................................3-81
3.19 :SENSe1 subsystem............................................................................................................................................3-84
3.19.1 [:SENSe[1]] subsystem ..............................................................................................................................3-84
3.19.2 :FUNCtion <name>....................................................................................................................................3-84
3.19.3 :DATA commands......................................................................................................................................3-84
3.19.4 :APERture <n> ...........................................................................................................................................3-85
3.19.5 :NPLCycles <n> .........................................................................................................................................3-86
3.19.6 RANGe commands.....................................................................................................................................3-88
3.19.7 :REFerence <n>..........................................................................................................................................3-93
3.19.8 :IREFerence <b> ........................................................................................................................................3-94
3.19.9 :DIGits <n>.................................................................................................................................................3-94
3.19.10 :AVERage commands ................................................................................................................................3-95
3.19.11 :MEDian Commands ..................................................................................................................................3-98
3.19.12 :DAMPing <b>...........................................................................................................................................3-98
3.19.13 :GUARd <b> ..............................................................................................................................................3-99
3.19.14 :ADIScharge Commands............................................................................................................................3-99
iv
3.19.15 :XFEedback <b> ......................................................................................................................................3-100
3.19.16 :VSControl <name> ................................................................................................................................. 3-100
3.19.17 :MSELect <name> ................................................................................................................................... 3-100
3.19.18 :RESistivity commands............................................................................................................................3-100
3.20 :SOURce subsystem......................................................................................................................................... 3-103
3.20.1 Digital Output Commands .......................................................................................................................3-103
3.20.2 V-Source Configuration Commands:....................................................................................................... 3-103
3.21 :STATus subsystem .........................................................................................................................................3-106
3.21.1 [:EVENt]? ................................................................................................................................................3-106
3.21.2 :ENABle <NRf> ......................................................................................................................................3-111
3.21.3 :PTRansition <NRf> ................................................................................................................................3-114
3.21.4 :NTRansition <NRf>................................................................................................................................ 3-121
3.21.5 :CONDition? ............................................................................................................................................ 3-123
3.21.6 :PRESet .................................................................................................................................................... 3-123
3.21.7 :QUEue commands ..................................................................................................................................3-124
3.22 :SYSTem subsystem ........................................................................................................................................3-127
3.22.1 :PRESet .................................................................................................................................................... 3-127
3.22.2 :POSetup <name> ....................................................................................................................................3-127
3.22.3 :VERSion? ...............................................................................................................................................3-127
3.22.4 :ERRor?.................................................................................................................................................... 3-127
3.22.5 :LSYNc:STATe <b> ................................................................................................................................ 3-128
3.22.6 :KEY <NRf> ............................................................................................................................................ 3-128
3.22.7 :CLEar...................................................................................................................................................... 3-129
3.22.8 :DATE <yr>, <mo>, <day> ..................................................................................................................... 3-130
3.22.9 :TIME <hr>, <min>, <sec>...................................................................................................................... 3-130
3.22.10 :TSTamp commands ................................................................................................................................3-130
3.22.11 :RNUMber:RESet .................................................................................................................................... 3-131
3.22.12 Zero check and zero correct commands................................................................................................... 3-131
3.22.13 A/D Controls ............................................................................................................................................ 3-132
3.22.14 RS-232 Interface Commands ................................................................................................................... 3-133
3.22.15 Basic Trigger Commands......................................................................................................................... 3-133
3.23 :TRACe subsystem ..........................................................................................................................................3-135
3.23.1 :CLEar...................................................................................................................................................... 3-135
3.23.2 :FREE? ..................................................................................................................................................... 3-135
3.23.3 :POINts <n> ............................................................................................................................................. 3-135
3.23.4 :FEED Commands ...................................................................................................................................3-136
3.23.5 :DATA?.................................................................................................................................................... 3-139
3.23.6 :TSTamp:FORMat <name> ..................................................................................................................... 3-139
3.23.7 :ELEMents <item list>............................................................................................................................. 3-139
3.24 Trigger subsystem ............................................................................................................................................ 3-140
3.24.1 :INITiate commands ................................................................................................................................3-140
3.24.2 :ABORt ....................................................................................................................................................3-140
3.24.3 :IMMediate............................................................................................................................................... 3-141
3.24.4 :COUNt <n>............................................................................................................................................. 3-141
3.24.5 :DELay <n>.............................................................................................................................................. 3-141
3.24.6 :SOURce <name> ....................................................................................................................................3-142
3.24.7 :TIMer <n>............................................................................................................................................... 3-142
3.24.8 :SIGNal ....................................................................................................................................................3-143
3.24.9 TCONfigure commands........................................................................................................................... 3-143
3.24.10 RTCLock commands ...............................................................................................................................3-145
3.25 :TSEQuence Subsystem................................................................................................................................... 3-146
3.25.1 General Test Sequence Commands.......................................................................................................... 3-146
3.25.2 :STARt <NRf>.........................................................................................................................................3-147
3.25.3 :STOP <NRf> ..........................................................................................................................................3-148
v
3.25.4 :STEP <NRf> ...........................................................................................................................................3-148
3.25.5 :MDELay <NRf> .....................................................................................................................................3-148
3.25.6 :SVOLtage <NRf> ...................................................................................................................................3-149
3.25.7 :STIMe <NRf> .........................................................................................................................................3-149
3.25.8 :DTIMe <NRf>.........................................................................................................................................3-149
3.25.9 :PDTIMe <NRf> ......................................................................................................................................3-150
3.25.10 :MVOLtage <NRf> ..................................................................................................................................3-150
3.25.11 :MTIMe <NRf>........................................................................................................................................3-151
3.25.12 :HLEVel <NRf> .......................................................................................................................................3-151
3.25.13 :HTIMe <NRf>.........................................................................................................................................3-151
3.25.14 :LLEVel <NRf> .......................................................................................................................................3-151
3.25.15 :LTIMe <NRf> .........................................................................................................................................3-152
3.25.16 :COUNt <NRf> ........................................................................................................................................3-152
3.25.17 Test sequence programming example ......................................................................................................3-152
3.26 UNIT Subsystem ..............................................................................................................................................3-153
3.27 RS-232 Serial Interface ....................................................................................................................................3-154
3.27.1 RS-232 Interface Configuration ...............................................................................................................3-154
3.27.2 RS-232 Operating Considerations............................................................................................................3-154
3.27.3 RS-232 Interface Error Messages.............................................................................................................3-155
3.27.4 Downloading commands using ProComm...............................................................................................3-155
3.28 DDC programming language ...........................................................................................................................3-155
A Specifications
B Interface Functions Codes
C ASCII Character Codes and IEEE-488 Multiline Interface Command Messages
D IEEE-488 Bus Overview
E IEEE-488 Conformance Information
F SCPI Conformance Information
G Device Dependent Command Summary
vi
List
of
Illustrations
2
Figure 2- 1
Figure 2-2
Figure 2-3
Figure 2-4
Figure 2-5
Figure 2-6
Figure 2-7
Figure 2-8
Figure 2-9
Figure 2-10
Figure 2-1 1
Figure 2-12
Figure 2- 13
Figure 2- 14
Figure 2- 15
Figure 2- 16
Figure 2- 17
Figure 2- 18
Figure 2- 19
Figure 2-20
Figure 2-21
Figure 2-22
Figure 2-23
Figure 2-24
Figure 2-25
Figure 2-26
Figure 2-27
Figure 2-28
Figure 2-29
Figure 2-30
Figure 2-3
Figure 2-32
Figure 2-33
Figure 2-34
Figure 2-35
Figure 2-36
Figure 2-37
Figure 2-38
Figure 2-39
Figure 2-40
Calibration
Line voltage
Bar graph (zero-at-left) multiple display
Zero-centered bar graph multiple display
Maximum and minimum multiple display
Input connector configurations
Maximum input levels
Capacitor test circuit without protection
Capacitor test circuit with protection
Force voltage measure current
V-source output
Noise shield
Guard shield
Safety shield
Floating measurements
Floating V-source
Test fixture to source voltage, measure current (resistance measurements)
Multi-purpose test fixture
Interlock connections
Hard-wired interlock
Typical connections for unguarded voltage measurements
Typical connections for guarded voltage measurements
Meter loading
Unguarded voltage measurements
Guarded voltage measurements
Typical connections for current measurements
Connections for guarded, floating current measurements
Voltage burden considerations
Source resistance and capacitance
High impedance current measurements
Floating current measurements
Typical connections for resistance measurements
1
Connections for resistance measurements using Model 8002A test fixture
Surface resistivity measurement technique
Circular electrode dimensions
Volume resistivity measurement technique
Connections for measurements using Model 8009 test fixture
Typical connections for charge measurements
V-source (independent configuration)
V-source (FVMI configuration)
Typical
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2V
analog output connections
.......................................................................................................
..............................................
..............................................
..................................................................
2-2
2-7
2-7
2-8
2-9
2-10
2-10
2-10
2-11
2-11
2-12
2-13
2-13
2-14
2-14
2-16
2-17
2-17
2-18
2-19
2-20
2-23
2-23
2-24
2-25
2-26
2-29
2-30
2-31
2-31
2-34
2-35
2-36
2-37
2-37
2-39
2-44
2-47
2-48
2-51
vii
Figure 2-41
Figure 2-42
Figure 2-43
Figure 2-44
Figure 2-45
Figure 2-46
Figure 2-47
Figure 2-48
Figure 2-49
Figure 2-50
Figure 2-5 1
Figure 2-52
Figure 2-53
Figure 2-54
Figure 2-55
Figure 2-56
Figure 2-57
Figure 2-58
Figure 2-59
Figure 2-60
Figure 2-61
Figure 2-62
Figure 2-63
Figure 2-64
Figure 2-65
Figure 2-66
Figure 2-67
Figure 2-68
Figure 2-69
Figure 2-70
Figure 2-7 1
Figure 2-72
Figure 2-73
Figure 2-74
Figure 2-75
Figure 2-76
Figure 2-77
Figure 2-78
Figure 2-79
Figure 2-80
Figure 2-81
Typical preamp out connections
Electrometer input circuitry (external feedback mode)
Shielded fixture construction
“Transdiode” logarithmic current configuration
Non-decade current gains
Equivalent input impedance with zero check enabled
Connections; diode leakage current test
Default measurement points; diode leakage current test
Connections; capacitor leakage test
Connections; cable insulation resistance test
Test circuit; resistor voltage coefficient test
Connections; surface insulation resistance test
Default measurement points: square wave sweep test
Default measurement points; staircase sweep test
Basic trigger model
Advanced trigger model
External triggering connectors
External triggering and asynchronous trigger link input pulse specifications
Meter complete and asynchronous trigger link output pulse specifications
DUT test system
External trigger connections
Trigger link connector
DUT test system
Trigger Link connections (asynchronous example #1)
Operation model for asynchronous trigger link example
Connections using Trigger Link adapter
DUT test system (asynchronous example #2)
Trigger Link connections (asynchronous example
Operation model for asynchronous Trigger Link example #2
Semi-synchronous Trigger Link specifications
Typical semi-synchronous mode connections
Trigger Link connections (semi-synchronous example)
Operation model for semi-synchronous Trigger Link example
Digital filter; averaging and advanced filter types
Digital filter; moving and repeating filter modes
Limits bar graph example
Using limit test to sort 100kQ resistors
Digital output port
Line cycle synchronization
Multiple ground points create a ground loop
Eliminating ground loops
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#1
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#2)
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2- 102
2-103
2- 1 19
2- 120
2- 120
2- 12
2- 124
2- 124
2-53
2-54
2-55
2.57
2-58
2-59
2-61
2-61
2-62
2-63
2-64
2-66
2-67
2-67
2-73
2-74
2-81
2-81
2-82
2-82
2-82
2-84
2-85
2-85
2-87
2-88
2-88
2-89
2-90
2-91
2-91
2-92
2-93
1
3
Figure 3- 1
Figure 3-2
Figure 3-3
Figure 3-4
Figure 3-5
Figure 3-6
Figure 3-7
Figure 3-8
Figure 3-9
...
Vlll
IEEE-488
IEEE-488 connector
IEEE-488 connections
IEEE-488 connector locations
RS-232 interface connector
Model 65 17 status register structure
Standard event status
Operation event status
Am
Sequence event status
Reference
event status
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3-2
3-2
3-2
3-3
3-8
3-9
3-9
3-10
3-11
Figure 3-10
Figure 3-1 1
Figure 3- 12
Figure 3- 13
Figure 3-14
Figure 3- 15
Figure 3- 16
Figure 3- 17
Figure 3-18
Figure 3-19
Figure 3-20
Figure 3-21
Figure 3-22
Figure 3-23
Figure 3-24
Figure 3-25
Figure 3-26
Figure 3-27
Figure 3-28
Figure 3-29
Figure 3-30
Figure 3-3 1
Figure 3-32
Figure 3-33
Figure 3-34
Figure 3-35
Figure 3-36
Figure 3-37
Figure 3-38
Figure 3-39
Figure 3-40
Trigger event status
Measurement event status
Questionable event status
Status byte and service request (SRQ)
Trigger Model (IEEE-488 bus operation)
Standard Event Enable Register
Standard Event Status Register
Service Request Enable Register
Status Byte Register
ASCII data format
IEEE754 single precision data format (32 data bits)
IEEE754 double precision data format (64 data bits)
Measurement Event Register
Questionable Event Register
Operation Event Register
Trigger Event Register
Arm Event Register
Sequence Event Register
Measurement Event Enable Register
Questionable Event Enable Register
Operation Event Enable Register
Trigger Event Enable Register
Arm Event Enable Register
Sequence Event Enable Register
Measurement Transition Filter
Questionable Transition Filter
Operation Transition Filter
Trigger Transition Filter
Arm Transition Filter
Sequence Transition Filter
Key-press codes
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3- 12
3-13
3-14
3-16
3-19
3-29
3-29
3-34
3-35
3-75
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3-75
3-76
3- 107
3- 108
3- 109
3- 110
3-1 10
3-1 1 1
3- 112
33-1 13
3- 113
3- 113
3- 114
3- 115
3- 116
3-1 17
3- 118
3-1 19
3- 120
3-
112
129
ix
X
List
of
Tables
2
Table 2-1
Table 2-2
Table 2-3
Table 2-4
Table 2-5
Table 2-6
Table 2-7
Table 2-8
Table 2-9
Table 2-10
Table 2- 1 1
Table 2- 12
Table 2- 13
Table 2- 14
Table 2- 15
Table 2- 16
Table 2- 17
Table 2-1
Table 2- 19
Table 2-20
Table 2-2 1
Table 2-22
Table 2-23
Table 2-24
Table 2-25
Table 2-26
Table 2-27
Table 2-28
Table 2-29
Table 2-30
Front
Line fuse selection
Data checked
Power-up error messages
Typical display exponent values
Status and error messages
Multiple (Next) displays by function
EXIT key actions
CONFIGURE VOLTS menu structure
CONFIGURE AMPS menu structure
Minimum recommended source resistance values
Ohms reading rates and AUTO V-Source
CONFIGURE OHMS menu structure
CONFIGURE COULOMBS menu structure
V-Source ranges
CONFIGURE V-Source menu structure
Typical
Full-range PREAMP OUT values
8
Integration times set-by-resolution
Auto resolution (all functions)
CONFIGURE SEQUENCE menu structure
CONFIGURE TRIGGER menu structure
Maximum buffer readings
CONFIGURE DATA STORE menu structure
Fill-and-stop sequence
Continuous sequence
Pretrigger sequence
CONFIGURE FILTER menu structure
CONFIGURE MATH menu structure
MAIN MENU STRUCTURE
Factory default conditions
Panel
Operation
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on
power-up
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2V
analog output values
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2-2
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2-3
2-3
2-4
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2-9
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2-21
2-28
2-29
2-32
2-40
2-45
2-46
2-46
2-51
2-52
2-58
2-58
2-69
2-71
2-95
2-96
2-99
2-99
2-99
2-104
2- 106
2-
2-
2-5
2-7
108
1 1 1
3
Table 3-1
Table 3-2
Table 3-3
Table 3-4
Table 3-5
Table 3-6
IEEE-488
General bus commands and associated statements
IEEE-488.2 common commands and queries
Signal oriented measurement command summary
CALCulate command summary
CALibration command summary
DISPlay command summary
Reference
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3-5
3-27
3-38
3-42
3-44
3-44
xi
Table 3-7
Table 3-8
Table 3-9
Table 3- 10
Table 3- 1 1
Table 3-12
Table 3- 13
Table 3-14
Table
3-
15
Table 3- 16
Table 3- 17
FORMat command summary
OUTput command summary
ROUTe command summary
SENSe command summary
SOURce command summary
STATUS command summary
SYSTem command summary
TRACe command summary
Trigger command summary
:TSEQuence command summary
:UNIT command summary
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3-45
3-45
3-46
3-46
3-52
3-53
3-55
3-56
3-57
3-58
3-60
xii
General Information
1.1
This section contains general information about the Model
6517 ElectrometerkIigh Resistance System.
the following manner:
1.2
1.3
1.4
1.5
1.6
1.7
1.8
1.2
Some important Model 6517 features include:
Introduction
It
is arranged
Features
Warranty information
Manual addenda
Safety symbols and
Specifications
Inspection
Options
and
terms
accessories
Features
Full range of functions - Exceptional sensitivity and
accuracy for voltage, current, charge, and VfI resistance
and resistivity (surface and volume) measurements.With the Models 65 17-RH and 65 17-TP, relative
humidity and external temperature can be measured.
Voltage source - The internal lOOOV V-Source can be
configured with the ammeter to make V/I resistancehesistivity measurements, and to force voltage, measure
current.
Two-line display -Readings and front panel messages
are provided
bottom line (secondary) 32-character alphanumeric dis-
play. The multiple display provides supplemental infor-
on
the top line (primary) 20-character, and
in
mation about the reading, such as min/max readings,
bar graphs for the reading, and time and date.
Reading and setup storage - Readings and setup data
can be stored and recalled from memory. Over
readings can be stored in the buffer, and up to
ment setups can be stored
Test sequences - Built-in tests for the following applications: device characterization, resistivity. surface
sulation resistance, and voltage sweeps.
GPIB interface - Accommodates two separate languages for IEEE-488 operation. The SCPI language
conforms to the IEEE-488.2 and SCPI standards. The
617 emulation mode (DDC language) allows the instrument to be controlled using device-dependent command programming.
RS-232 interface -The instrument can instead be con-
trolled over this serial interface using SCPI commands.
Talk-only mode -From the front panel. you can set the
instrument
available over both the GPIB and RS-232 interfaces.
Scanning - The Model 6517 has an option slot that
will accommodate an optional scanner card (Models
1
652
to
operate with an external switching system (i.e.. Mod-
el 7001
Trigger link - This is a new trigger concept that pro-
vides more versatile and precise external triggering. It
is in addition to the standard Trigger Tn/Meter Complete
Out
Digital calibration - The instrument may he digitally
calibrated from either the front panel. or over the
232
to
send readings to a printer. Talk-only is
and 6522). The instrument can also be configured
or
7002) to scan external channels.
BNC external triggering techniques.
interface
or
GPIB bus (SCPI language).
in
memory.
10
15,000
instru-
in-
RS-
General Information
1.3
Warranty information is located
this instruction manual. Should your Model 6517 require
warranty service, contact the Keithley representative
thorized repair facility
When returning the instrument for repair, be sure to fill out
and include the service form at the back of this manual to
provide the repair facility with the necessary information.
1.4
Any improvements or changes concerning the instrument or
manual will be explained
manual. Be sure to note these changes and incorporate them
into the manual.
1.5
The following symbols and terms may be found
ment
Warranty information
on
in
your area for further information.
Manual
addenda
in
an addendum included with the
Safety symbols and terms
or
used in this manual.
the inside front cover of
or
au-
on
an instru-
1.7
The Model 6517 was carefully inspected, both electrically
and mechanically before shipment. After unpacking
from the shipping carton, check for any obvious signs of
physical damage that may have occurred during transit.
(Note: There may be a protective film over the display lens,
which can be removed.) Report any damage to the shipping
agent immediately. Save the original packing carton for possible future reshipment.
If an additional manual is required; order the appropriate
manual package:
Inspection
all
Model 65 17 User’s Manual - Keithley
00
Model 6517 Repair Manual - Keithley
00
Model 6517 Getting Started Manual - Keithley
65 17-903-00
Model 65 17 Calibration Manual - Keithley
905-00
P/N
65 17-900-
P/N
65 17-902-
P/N
items
P/N
65
17-
The
A
symbol
should refer to the operating instructions located
ual.
The
f
symbol
may be present
cautions to avoid personal contact with these voltages.
on
an instrument indicates that the user
in
the man-
on
an instrument shows that high voltage
on
the terminal(s). Use standard safety pre-
@
symbol indicates that the test fixture (i.e. Model The
8009) must be connected to a safety earth ground using #18
AWG wire
The WARNING heading used
gers that might result in personal injury
read the associated information very carefully before performing the indicated procedure.
The CAUTION heading used
ards that could damage the instrument. Such damage may
validate the warranty.
1.6
Full Model 65 17 specifications may be found immediately
preceding the table of contents
or
larger.
Specifications
in
this manual explains dan-
or
death. Always
in
this manual explains haz-
in
this manual.
in-
1.8
The following options and accessories are available from
Keithley for use with the Model 65 17:
Model 237-ALG-2 Triax Cable: This is a 2-meter (6.6
low noise triax cable terminated with a 3-slot male triax connector
Model 237-BNC-TRX Adapter: This is a male
lug female triax adapter (guard disconnected). It is used to
terminate a triax cable with a BNC plug. Suitable for use
with the Model 6517 V-Source
Model 237-TRX-T Adapter: This is a 3-slot male to dual 3lug female triax tee adapter for use with 7078-TRX triax cables. Suitable for use with the Model 6517 V-Source
voltage applications.
Model 237-TRX-NG Adapter: This is a 3-slot male triax to
female BNC adapter (guard removed) for non-guarded measurements. This adapter allows you to connect a BNC cable
to the triax input of the Model 6517. Suitable for use with the
Model 65 17 V-Source
Model 237-TRX-TBC Connector: This is a 3-lug female
triax bulkhead connector
panels and interface connections. Suitable for use
Model 65 17 V-Source
Options and accessories
on
one end and 3 alligator clips
in
high voltage applications.
in
high voltage applications.
with
cap for assembly of custom
in
high voltage applications.
on
the other.
BNC
in
with
ft.)
to 3-
high
the
1-2
Getierul
It
formation
Model 1050 Padded Carrying Case:
Model 6517. Includes handles and shoulder strap.
Model 4288-1 Single Fixed Rack Mount Kit:
gle Model 6517
in
a standard 19-inch rack.
Model 4288-2 Side-by-side Rack Mount Kit:
instruments (Models 182,428,486,487, 2001, 2002, 6517,
in
7001) side-by-side
a standard 19-inch rack.
Model 4288-3 Side-by-side Rack Mount Kit:
Model 6517 and a Model 199 side-by-side in a standard 19-
inch rack.
Model 4288-4 Side-by-side Rack Mount Kit:
Model 6517 and a 5Vi-inch instrument (Models 195A, 196,
220, 224, 230, 263, 595, 614, 617, 705, 740, 775, etc.) side-
by-side
in
a standard 19-inch rack.
Model 5 156 Electrometer Calibration Standard Set:
calibration fixture contains standardized resistors and capac-
itors needed to calibrate the Model 6517.
Model 6517-ILC-3 Safety Interlock Cable:
connect the lid interlock circuit of the Model 8009 test fixture to the interlock circuit of the Model 6517.
Model 6517-RH Humidity Probe with Cable:
allows the Model 651 7 to make relative humidity measurements
(0
to 100%).
A carrying case for a
Mounts a sin-
Mounts two
Mounts a
Mounts a
This
Designed to
This sensor
Model 7078-TRX-TBC Connector:
triax bulkhead connector with cap for assembly of custom
panels and interface connections. Suitable for use with the
Model 65 17 V-Source
in
high voltage applications.
Model 8002-ILC-3 Safety Interlock Cable:
connect the lid interlock circuit
ture
to
the interlock circuit of the Model 65 17.
Model 8002A High Resistance Test Fixture:
Model 65 17 to make accurate high resistance measurements
of DUT. Designed to minimize leakage currents that can corrupt the integrity of the measurement.
Model
8009
Resistivity Test Fixture:
fixture for measuring volume and surface resistivities. It can
accommodate sheet samples 64 to 102mm (2-1/2 to 4
diameter and up to 3.175mm (1/8
Models 8501-1 and 8501-2 Trigger Link Cables:
the Model 6517 to other instruments with Trigger Link connectors (e.g., Model 7001 Switch System). The Model
1 is one meter long; the Model 8501-2 is two meters long.
Model 8502 Trigger Link Adapter:
the Trigger Link of the Model 6517 to instruments that use
the standard BNC (In/Out) external triggering technique.
Model 8503:
tive humidity sensor.
Extension cable for the Model 65 17-RH rela-
This is a 3-lug female
Designed to
of
the Model
in.)
Allows you to connect
8002A
Used
This is a guarded test
thick.
test
fix-
with
the
in.)
in
Connect
8501-
Model 6517-TP Thermocouple with Leads:
thermocouple sensor allows the Model 65 17 to make external temperature measurements from -190°C to 1350°C.
Model 6521 Low Current Scanner Card:
low current scanner card is terminated with BNC connectors
and plugs into the option slot of the Model 6517.
This type
This 10-channel
K
Model 6522 Low CurrentLow Voltage Scanner Card:
This 10-channel low currentflow voltage scanner card is terminated with triax connectors and plugs into the option slot
of the Model 65 17.
Models 7007-1 and 7007-2 Shielded IEEE-488 Cables:
Connect the Model 65 17 to the IEEE-488 bus using shielded
cables and connectors to reduce electromagnetic interference
(EMI). The Model 7007-1 is one meter long; the Model
7007-2 is two meters long.
Models 7078-TRX-3, 7078-TRX-10 and 7078-TRX-20
Triax Cables:
both ends with 3-slot male triax connectors. The -3 model is
3 ft. (0.9m)
and the -20 model is
These are low noise triax cables terminated at
in
length, the -10 model is 10 ft. (3m)
20
ft. (6m)
in
length.
in
length,
Model 8530 IEEE-488 to Centronics Printer Adapter Cable:
Translates the IEEE-488 connector pinout and signal
level to a Centronics termination. This permits a standard
Centronics parallel printer to be connected to a Model 65 17
in
TALK-ONLY mode.
Model 8606 High Performance Probe Tip Kit:
two spade lugs, two alligator clips, and two spring hook test
probes. (The spade lugs and alligator clips are rated at 30V
RMS, 42.4V peak; the test probes are rated at
components are designed to be used with high performance
test leads terminated with banana plugs, such as the Model
8607 High Performance Banana Cables.
Model 8607 High Performance Banana Cables:
of
two high voltage (lOOOV) banana cables. The cables are
terminated
CS-751 Barrel Adapter:
you to connect two triax cables together. Both ends of the
adapter are terminated with 3-lug female triax connectors.
with
banana plugs that have retractable sheaths.
This is a barrel adapter that allows
Consists of
IOOOV.)
Consists
These
1-3
Front Panel Operation
2.1
This section contains detailed information for front panel operation of the Model 65
2.2
2.3
2.4
2.5
2.6
2.7
2.8
Introduction
17.
It is organized as follows:
Power-up
strument to line power, warm-up period, default conditions, and the power-up sequence.
Display
sociated with operation.
Connections
output: Provides basic information on the connections
used for typical electrometer and high-resistance meter
measurements. Summarizes guarding and shielding
techniques, and explains the potential hazards presented by floating circuits. Recommends cables and test
fixtures that can be used, and provides guidelines for
building a test fixture.
Voltage measurements
dure to measure voltage. Includes configuration infor-
mation and measurement considerations for the volts
function.
Current measurements
dure to measure current. Includes configuration infor-
mation and measurement considerations for the amps
function.
Resistance measurements
cedures to perform resistance and resistivity measurements. Includes configuration information, the
multiple display and measurement considerations for
the ohms function.
Charge measurements
dure to measure charge. Includes configuration infor-
-
Covers information on connecting the
-
Covers display formats, and messages as-
-
Electrometer input and voltage source
-
Provides the basic proce-
-
Provides the basic proce-
-
Provides the basic pro-
-
Provides the basic proce-
in-
mation, multiple displays and measurement considerations for the coulombs function.
Voltage source
2.9
ing how to use the safety interlock.
Analog outputs
2.10
use the 2V analog output and the preamp output.
Using external feedback
2.11
ternal feedback to extend the capabilities
6517.
Range and resolution
2.12
auto ranging and resolution.
Zero check and relative
2.13
zero check and relative (REL) features.
Test sequences
2.14
be configured and run.
Triggering
2.15
trigger sources that can be used.
Buffer
2.16
programming the buffer size, recalling data and time
2.17
2.18
2.19 Menu
2.20 Scanning
-
stamp.
Filter
-
can be used to reduce reading noise.
Math
-
formed on readings.
-
menu, such as saving instrument setups, communication configuration (GPIB and
of the optional scanner cards, and explains how to use
the Model 65 17
-
Covers V-source operation includ-
-
Provides information needed to
-
Explains how to use ex-
-
Covers both manual and
-
Provides details on the
-
Covers the test sequences that can
-
Details types of trigger modes as well as
Covers use of the reading buffer including
Covers the use of the digital filter types that
Describes the calculations that can be per-
Covers selections controlled from the main
RS-232).
-
Summarizes internal scanning using one
in
an external scanning system.
and limits.
of
the Model
2-
1
Front Panel Operation
2.21
Other measurement considerations
measurement considerations that generally apply to all
measurements.
2.22
Relative humidity and external temperature readings
-
Explains how to include these readings with
each volts, amps, ohms and coulombs measurement.
-
Covers the
proper connections are made, instrument chassis is connected to power line
ground through the ground wire in the
power cord. Failure to use a grounded
outlet may result in personal injury or
death due to electric shock.
2.2
2.2.1
Follow the procedure below to connect the Model
line power and turn
1.
Power-up
Line power connections
on
the instrument.
First check
(see Figure
tion for the operating voltage
sition is for line power
125V.
range from
at a line frequency of
The
to
see that the line voltage selection switch
2-1)
on
the rear panel is
in
a voltage range from
230V
position is for line power
18OV
to
250V.
50Hz, 60Hz
in
the correct posi-
in
your area. The
in
The instrument will operate
or
400Hz.
CAUTION
Operating the instrument on an incorrect line voltage may cause damage to
the instrument, possibly voiding the
warranty.
SELECTED
LINE VOLTAGE
Figure
Line voltage switch
2-1
6517
to
115V
po-
90V
to
a voltage
2.2.2
A rear panel fuse located below the AC receptacle protects
the power line input of the instrument. If the fuse needs to be
replaced, perform the following steps:
Line
fuse
replacement
WARNING
Make sure the instrument is disconnected from the line and other equipment
before replacing the line fuse.
1.
With the power
driver into the rear panel LINE
gently and rotate the fuse carrier one-quarter
terclockwise. Release pressure
ternal spring will push the fuse carrier out of the holder.
2.
Remove the fuse and replace
mended
in
Table
off,
place the end of a flat-blade screw-
FUSE
holder. Push
turn
on
the holder and its
it
with the type recom-
2-
1.
in
coun-
in-
CAUTION
Do
not use a fuse with a higher current
rating than specified, or instrument
damage may occur. If the instrument repeatedly blows fuses, locate and correct
the cause of the trouble before replacing
the fuse. See the optional Model
6517
Repair Manual for troubleshooting information.
Install the new fuse and fuse carrier into the holder by reversing the above procedure.
2.
Before plugging in the power cord, make sure the front
panel power switch is in the off
3.
Connect the female end of the supplied power cord to
the AC receptacle
end of the power cord to a grounded AC outlet.
on
the rear panel. Connect the other
(0)
position.
WARNING
The power cord supplied with the Model
6517
contains a separate ground wire
for use with grounded outlets. When
2-2
Table
2-1
Line fiise selection
180-25OV
part no.
2.2.3
Power-up
sequence
On power-up, the Model 6517 performs self-tests on its
EPROM and RAM, and checksum tests on data stored
in
non-volatile memory. (See Table 2-2.) If a failure is detected,
the instrument momentarily displays an error message and
in
the ERR annunciator turns on. (Messages are listed
Table
2-3.)
NOTE
If a problem develops while the instrument is under warranty, return
it
to Kei-
thley Instruments, Inc. for repair.
If the instrument passes the self-tests, the firmware revision
levels and the communications status are displayed. An example of this display is shown as follows:
Model
65
17
Rev. B01 B01 IEEEAddr=27 SCPI
The firmware revision levels (left to right) are for the main
microcontroller and display microcontroller. The revision
level number may be different
in
your particular
unit.
The
IEEE-488 address is its default value of 27 and the SCPI lan-
guage is selected. DDC will be displayed
if
the DDC lan-
guage is selected instead. If the RS-232 interface is selected,
the message “RS-232 enabled” is displayed instead of the
IEEE-488 address.
Next, if the unit is configured to display the calibration due
date at power-up, the
unit
shows the following:
Model
65
17
Calibration due: mmm/dd/yy
where “mmm” is the month abbreviation, “dd”
is
the day,
and “yy” is the year. If no calibration date is set, the display
shows that
it
is due now. (See the Model 6517 Calibration
Manual to set the calibration due date and paragraph 2.19.3
of this manual to set the display option.)
After the power-up sequence, the instrument begins its normal display with zero check enabled (“Zero Check” displayed).
Table
2-2
Data
checked
Data
IEEE-488 address
Power-on default
Calibration constants
Calibration dates
Instrument setups
Reading buffer
Table
2-3
on
power-up
Type
of
Electrically-erasable PROM
Electrically-erasable PROM
Electrically-erasable PROM
Electrically-erasable PROM
10
in
electrically-erasable PROM
Non-volatile RAM
Power-up error messages
Message
Error
+5
15,
Calibration dates lost
Action
The cal dates are set to factory
default values, but they are not
stored into EEPROM.
To
do this, perform a compre-
hensive calibration.
Error
+5
14,
Calibration lost
Cal constants are set to factory
default values. but they are not
stored into EEPROM. To do
this, perform a comprehensive
calibration.
+5
Error
12,
Power-on state lost
Power-on defaults are reset to
factory defaults (bench) and
stored into EEPROM.
Error
+5
1
1,
GPIB address lost
GPIB address is reset to factory
default (27) and stored into
EEPROM.
Error
+5
10,
Reading buffer data lost
The reading buffer controls are
reset to factory defaults. but
they are not stored into
NVRAM. To do this, store read-
ings
Error -3 14,
Save/recall memory lost
Instrument setup
bench defaults are stored
EEPROM.
Note: Any of these error conditions
turned on or after replacing the firmware.
may
storage
in
the buffer.
occur the lirst
is
reset to
tinie
il
in
unil
is
Power-up error messages
Error messages that may be displayed during power-up are
summarized
in
Table 2-3. These are shown when one of the
checksum tests of Table 2-2 fails.
2-3
Front Panel Operation
2.2.4 Power-on default conditions
Power-on default conditions are those conditions the instrument assumes when
these power-on default conditions (except the primary address) by using the save setup feature that is available with
MENU
the
Depending
or ten user-defined setups can be stored, any one of which
could be selected as the power-on default.
Table 2-29
that are set at the factory to optimize bench and GPIB (IEEE-
488) operation.
key, as described
on
in
it
is first turned
in
the installed memory option, either one, five,
paragraph 2.19.2 lists the default conditions
on.
You can change
paragraph 2.19.2.
2.2.5 Warm-up period
The Model 6517 can be used within one minute after
turned
on.
However, the instrument should be turned
allowed to warm up for at least one hour before use to
achieve rated accuracy.
on
it
and
is
scientific mode, the exponent can be fixed to a specified value, or
it
can be floating. In the floating mode, the instrument
will automatically select the exponent value.
All exponent mode selections are performed from the DISPLAY option of the GENERAL menu, which is part of the
MAIN MENU (see paragraph 2.19.8 for details).
Table
2-4
Typical display exponent
Engineering units
Value
Picoamperes
Nanocoulombs
Microamperes
Milliamps
Kilo-ohms
Mega-ohms
Giga-ohms
Tera-ohms
Peta-ohms
values
Display
PA
nC
PA
mA
kR
MR
GR
TR
PR
Scientific notation
Value
10-”A
1
O-~C
1
Oa6A
~o-~A
1
o30
1
06R
1
09~
10’2R
1015~
Display
e- 12A
e-9C
e-6A
e-3A
e3R
e6R
e9R
el20
e15R
2.2.6
The IEEE-488 primary address
same as the primary address you specify
programming language. The default primary address of the
instrument is 27, but you can set the address to any value
from
2.19.3 for step-by-step instructions
address.
2.3
The display of the Model 65 17 is primarily used to display
readings along with the units and type of measurement.
When
messages, such as menu headings and selections. At the top
of the display are annunciators to indicate various states of
operation.
2.3.1
Readings
units or in scientific notation as shown
IEEE-488
0
to 30 by using the
primary
MENU
address
of
the instrument must be the
in
the controller‘s
key. Refer to paragraph
on
setting the primary
Display
not
displaying readings, it is used for informational
Exponent
on
mode (Engineering or Scientific)
the display can be expressed
in
Table 2-4. In the
in
engineering
2.3.2 Information messages
Press the INFO key to view context-sensitive information
from most of the displays. An arrow
tom line indicates that there is more information. Use the
(4
and
b
)
cursor keys
an INFO display, just press INFO, ENTER, EXIT or a function key.
2.3.3 Status
During Model 6517 operation and programming, you will
encounter a number of front panel messages. Typical messages are either of status or error variety, as listed
5.
The most recent status or error messages can be momentarily
displayed. Just enter a configuration menu or the main menu,
and press the PREV range key. (The display is blank
message is queued.)
and
to view the complete line.
error messages
(4
or
b
)
on
the bot-
To
in
Table
exit
if
2-
no
2-4
Table
2-5
Status and
error
messages
Table
2-5
(cont.)
Status and error messages
Front Panel Operation
Vumber
4lO
.430
.420
-410
-350
-330
-314
-285
-284
-282
-28 1
-260
-24 1
-230
-224
-223
-222
-22 1
-220
-215
-214
-213
-212
-21 1
-210
-202
-201
-200
-178
-171
-170
-168
-161
-160
-158
-154
-151
-150
-148
-144
-141
-140
Description
‘Query UNTERMINATED after
indefinite response”
‘Query DEADLOCKED”
‘Query UNTERMINATED”
‘Query INTERRUPTED”
‘Queue overflow”
‘Self Test failed”
‘Save/recall memory lost”
‘Program syntax error”
‘Program currently running”
‘Illegal program name”
‘Cannot create program”
‘Expression Error”
“Hardware missing”
“Data corrupt
“Illegal parameter value”
“Too much data”
“Parameter data out of range”
“Settings conflict”
“Parameter Error”
“Arm
deadlock”
“Trigger deadlock”
“Init ignored”
“Arm ignored”
“Trigger ignored”
“Trigger error”
“Settings lost due
“Invalid while
“Execution error”
“Expression data not allowed”
“Invalid expression”
“Expression error”
“Block data not allowed”
“Invalid block data”
“Block data error”
“String data not allowed”
“String too long”
“Invalid string data”
“String data error”
“Character data not allowed”
“Character data too long”
“Invalid character data”
“Character data error”
or
in
stale”
to
rtl”
local”
Event
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
Number
-128
-124
-123
-121
-120
-114
-113
-112
-111
-110
-109
-108
-105
-104
-103
-102
-101
-100
000
+lo1
+121
+122
+123
+124
+125
+126
+161
+171
+172
+173
+174
+301
+302
+303
+304
+305
+306
+307
+308
+309
+310
Description
”Numeric data not allowed”
”Too many digits
“Exponent too large”
“Invalid character
“Numeric data error”
“Header suffix out of range”
“Undefined header”
“Program mnemonic too long”
“Command Header Separator Error”
“Command Header Error”
“Missing Parameter”
“Parameter not allowed”
“GET not allowed.”
“Data Type Error”
“Invalid Separator”
“Syntax Error”
“Invalid Character”
“Command Error”
“No Error”
“Operation Complete”
“Device calibrating”
“Device settling”
“Device ranging”
“Device sweeping”
“Device measuring”
“Device calculating”
“Program running”
“Waiting
“Waiting
“Waiting
“Re-entering the idle layer”
“Reading overflow”
“Low limit 1 event”
“High limit
“Low limit 2 event”
“High limit 2 event”
“Reading Available”
“Voltmeter Complete”
“Buffer Available”
“Buffer half full”
“Buffer full”
in
in
in
in
number”
in
number”
trigger Layer”
arm layer
arm layer 2”
1
event”
1”
Event
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
SE
2-5
Front Panel Oaerarion
Table
2-5
(cont.)
Status and error messages
Table
2-5
(cont.)
Starus and error messages
Number
t311
t312
t313
t3 15
t320
t321
+322
+350
to
427
+5 10
+511
+512
+513
+5
14
+515
+516
+517
+518
+519
+520
+521
+522
+610
+611
+612
+617
Description
“Buffer Overflow”
“Buffer Pretriggered”
“Reading out
of
Limit”
“V-Source compliance detected”
&
“Buffer
Format element mismatch”
“Buffer Sizing error; set to MAX’
“Buffer Sizing error; set to
MIN”
Calibration commands (see Model
65
17 Calibration Manual)
“Reading buffer data lost”
“GPIB address lost”
“Power-on state lost”
“Calibration data lost”
“Calibration dates lost”
“Calibration tolerances lost”
“Calibration tables lost”
“Voltage Offset lost”
“Current Offset lost”
“Installed option id lost”
“Option card not supported”
“Cal Card Data Error”
“GPIB communication language lost”
“Questionable Calibration”
“Questionable Temperature”
“Questionable Humidity”
“Questionable Test Sequence”
Event
SE
SE
SE
SE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
SE
SE
SE
SE
Number
+700
t800
+801
t802
403
+804
+805
+806
+807
+808
+850
+85
+860
+900
+950
+95 1
+952
+953
+954
+955
+956
+957
+958
SE = Status event
EE
=
Description
“Low Battery detected”
“RS-232 Framing Error detected”
“RS-232 Parity Error detected”
“RS-232 Overrun detected”
“RS-232 Break detected”
“RS-232 Noise detected”
“Invalid system communication”
“RS-232 Settings Lost”
“RS-232
“ASCII only with RS-232”
“Invalid Test Sequence Setting”
“Test Sequence Running”
1
“Interlock Violation Error”
“Internal System Error”
“DDC Reading overflow”
“DDC Reading Available”
“DDC Buffer full”
“DDC Mode IDDC Error”
“DDC Mode IDDCO Error”
“DDC Trigger Overrun Error”
“DDC No Remote Error”
“DDC Number Error”
“DDC Ready”
Error
event
OFLO:
Characters Lost”
Event
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
EE
SE
EE
EE
SE
SE
SE
EE
EE
EE
EE
EE
SE
2-6
Fimt Poncl Oix~i.otion
2.3.4
Each measurement function has its own set of “multiple displays’’ shown in the bottom line
The PREVious and NEXT DISPLAY keys scroll through the
selections for the present function.
The multiple displays can show a reading in a different form,
or
ple:
To scroll through the multiple displays available for each
measurement functions, repeatedly press and release the
NEXT DISPLAY key. The same action with the PREVious
DISPLAY key does a reverse scroll through the displays. To
return to the default reading display, just press and hold ei-
ther key.
Multiple displays that are specific to a particular function
operation are discussed later in this section, such as the calculations display in math (see Table 2-6 for paragraph references). Some of the displays that are common to all
measurement functions are discussed here.
Multiple
give additional information about the reading, for exam-
Top line shows a reading; bottom line shows a zero-center bar graph with adjustable limits.
displays
of
the front panel display.
or
Bar graph
The “normal” bar graph, with a zero at the left end, is a
graphical representation of a reading as a portion of a range.
(See Figure 2-2.) The vertical lines displayed along the bar
designate
full segment of the bar represents approximately 4% of the
range limit.
The right endpoint of the bar graph is plus full scale of the
present range for positive readings, and minus
negative readings. When the
the reading exceeds the present range.
Figure
Bar graph (:ern-at-left) mirltiple disploy
0%,
2-2
25%,
50%,
75%, and
100%
100%
of full scale. Each
full
scale for
line changes to an arrow.
Timemaymate
This display provides the time, day of week, and the date.
The time, date and format (12-hour or 24-hour) are set from
the CLOCK option of the GENERAL MENU (which is selected from the MAIN MENU). See paragraph 2.19.7
(CLOCK) for details.
Table
2-6
Multiple (Next) displays
by
function
Paragraph
Function
All
R
Next display
Time, day and date
Bar graph
Zero-centered bar graph
Maximum and minimum values
Relative and actual values
Calculated and actual values
Limits bar graph
Relative humidity and external
temperature stamp
Source (V) and measure
(I)
values
reference
2.3.4
2.3.4
2.3.4
2.3.4
2.13.3
2.18.7
2.19.5
2.3.4
2.7.4
Zero-centered bar graph
The zero-centered bar graph is a graphical representation of
a reading with plus and minus limits. (See Figure 2-3.) The
limits are expressed in a user-selectable percentage of range.
The vertical lines displayed along the bar designate the plus
and minus limits, zero. and halfway to either limit. There are
ten full segments between zero and each end.
segment represents
changes to an arrow, the reading exceeds the programmed
range.
Figure
2-3
Zei-o-centerwl bar
10%
of the limit. When a line at the limit
gi~iph
niirltiplc
tlispltry
so
each
full
7-7
Front Panel Operation
The plus and minus percentage of range that is programmed
(0.01
-
99.99%) applies to all functions. Because of rounding, values greater than 99.5% are shown as
wise, values greater than 1% (such as 1.67%) are shown
rounded to the nearest integer percent.
Perform the following to view or change the plus and minus
percentage of range:
1.
From a measurement function, press CONFIG and then
NEXT
or PREV DISPLAY. The following is displayed:
ZERO-BARGRAPH+/-50.00%
2. Change the percentage by using the cursor keys and the
RANGE
99.99%). Press ENTER when done.
Maximum
The maximum and minimum multiple display shows the
maximum and minimum readings since the display was entered. (See Figure 2-4.) The maximum and minimum values
are reset by the following:
Pressing the present function key.
Leaving the display by changing function or entering a
menu.
The resolution, units, and prefix
same as shown for top line reading.
Figure
A
and V keys to enter a numeric value
and minimum
2-4
on
the bottom line are the
100%
and, like-
(0.01
Maximum and minimum multiple display
Relative humidity
This display provides the relative humidity and the external
temperature readings. Note that the appropriate sensors have
to be connected to instrument, and they have to be enabled in
order to get valid readings. (See paragraph
and
external temperature
2.22
for details.)
Change from cal temp
The Model 6517 has an internal temperature sensor. When
the instrument is calibrated, the internal temperature is measured and stored in memory. This display indicates the difference between the present internal temperature and the
internal temperature when the instrument was last calibrated.
Note that the temperature units ("C,
the DISPLAY (TEMP-UNITS) item
MENU
2.3.5
There are basically two types of menu structures; the Main
-
Menu and the Configure menus. The Main Menu accesses
items for which there are no dedicated keys, and Configure
menus are used to configure measurement functions and other instrument operations.
Use the following rules to navigate through the menu structure:
(see paragraph 2.19.7).
Navigating menus
1.
The top level of the Main Menu is accessed by pressing
the
MENU
pressing CONFIG and then the desired function (V,
etc.) or operation (TRIG, STORE, etc.).
2.
A menu item is selected by placing the cursor
pressing ENTER. Cursor position is denoted by the
blinking menu item or parameter. The cursor keys
and
A displayed arrow
3.
dicates that there are one or more additional items (mes-
sages) to select from. Use the appropriate cursor key to
display them.
4.
A numeric parameter is keyed
on the digit to be changed and using the RANGE
V
key to increment or decrement the digit.
A change is only executed when ENTER is pressed. En-
5.
tering an invalid parameter generates an error and the
entry is ignored.
The EXIT key is used to back out of the menu structure.
6.
Any change that is not entered is cancelled when EXIT
is pressed. The EXIT key has additional actions and are
summarized in Table 2-7.
The VOLTAGE SOURCE
7.
just the V-Source value. The V-Source is decremented or
incremented by placing the cursor
and pressing
sign, pressing
CONFIG and then
V-SOURCE menu.
key. A Configuration menu is accessed by
b ) control cursor position.
(4
V
or
A.
V
or A toggles the polarity. Pressing
V
or A displays the CONFIGURE
OF
or
K)
is selected from
on
the GENERAL
and
b
)
on
the bottom line
in
by placing the cursor
V
and A keys are used ad-
on
the desired digit
With the cursor
on
I,
on
it
and
(4
in-
A
or
the polarity
2-8
Table
EXIT
Front Pariel Operation
2-7
key actions
Condition
Temporary message displayed
EXIT
key
action
Cancels display of temporary message.
(e.g., TRIGGERS HALTED)
INFO
message displayed
Reading display hold
Scanning
Data storage
I
2.4
Connections - electrometer, high-resistance meter
and
V-source
The following information provides basic information
Cancels INFO message, returns to menu or normal reading display.
Cancels reading display hold, resumes normal reading display.
Disables scanning. Also stops data storage
Stops data storage. Temporary message STORAGE INTERRUPTED
is displayed.
on
electrometer, high-resistance meter, and V-source connec-
is
tions. Also covered
the use of low-noise cables and shielding. The concepts of guarding and floating circuits are
introduced here.
NOTE
Detailed connection schemes are included
with the measurement procedures (see
paragraphs2.5.1,2.6.1,2.7.1
and2.8.1).
if
enabled.
The INPUT triax connector is also used for the Force Voltage
Measure Current configuration. This configuration utilizes
the V-source to make resistance measurements (see paragraph 2.4.2) and current measurements (see paragraph
2.4.3).
7
Input
High
-
Input
Low
,NPUT
250V PEAK
Volts,
Amps,
Chassis
Ground
Ohms & Coulombs
2.4.1
Electrometer input connector
The rear panel triax INPUT connector is a 3-lug female triax
connector that will mate to a cable terminated with a 3-slot
male triax connector.
Input configurations
-
As shown
in
Figure 2-5, the input
connector can be configured in two ways. With GUARD off
(Figure 2-5A), input low is connected to the inner shell of the
connector. This configuration is used for current, resistance,
coulombs and unguarded voltage measurements.
With GUARD
on
(Figure 2-5B), guard is connected to the
inner shell of the triax connector. Input low is accessed via
the COMMON binding post through an internal
100
resis-
tor. This configuration is used for guarded voltage measure-
ments only. Note that guard can only be enabled
(on)
for the
volts function. For ohms, amps and coulombs, guard is always disabled
(off).
For voltage measurements, guard is enabled or disabled from the Configure Voltage menu structure
as explained in paragraph 2.5.2.
A. Unguarded (GUARD
7
INPUT
__.. - .
250V PEAK
Volts
only
B.
Guarded (GUARD on)
Figure
2-5
lnwt
off)
Hieh
"
Input connector configurations
2-9
Front Panel Operation
Maximum input levels
-
The maximum input levels to the
Model 65 17 are summarized
WARNING
The maximum common-mode input
voltage (the voltage between input low
and chassis ground) is
ceeding this value may create a shock
hazard.
CAUTION
Connecting PREAMP OUTPUT, COMMON, or
2V
ANALOG OUTPUT to
earth while floating the input may damage the instrument.
input
Low
4
in
Figure 2-6.
500V
peak. Ex-
500V
Peak
651
7
Ammeter
*
Figure
2-7
Capacitor test circuit without protection
Adding a resistor and two diodes (1N3595) as shown
ure 2-8 will provide considerable extra protection. The resistor must be large enough to limit the current through the
diodes to lOmA or less. It must also be large enough to with-
stand the supply voltage. The protection circuit should be enclosed in a light-tight conductive shield.
This same protection circuit is useful when measuring the
sulation resistance of films or high-voltage cables. Without
such added protection, a pinhole or other defect could cause
an arc, destroying the electrometer input.
in
Fig-
in-
*
Figure
2-6
Max input Signal - 250VRMS,
(1
0
seconds maximum in mA ranges).
DC
to
6OHz
sine
wave
Maximum input levels
Input protection
-
The Model 65 17 incorporates protec-
tion circuitry against nominal overload conditions. However,
a high voltage (>250V) and resultant current surge could
damage the input circuitry. A typical test circuit to measure
the leakage current of a capacitor is shown in Figure 2-7.
When Switch
S
is closed, an initial surge of charging current
will flow and the high voltage will be seen across the input
of
the Model 6517.
ratactim
Circuit
Capacitor
Under Test
T
Figure
2-8
Capacitor test circuit w’ith protection
651
7
Ammetei
2-10
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