Tektronix 6430 Reference manual

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Model 6430 Sub-Femtoamp

tek.com/keithley

Remote SourceMeter

Reference Manual

6430-901-01 Rev. G / January 2021

Instrument

*P6430-901-01G*

6430-901-01G

Model 6430 Sub-Femtoamp Remote SourceMeter

Instruction Manual

2021 Keithley Instruments

Cleveland, Ohio, U.S.A.

January 2021

Document Number: 6430-901-01 Rev. G

Safety Precautions

The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may be present.

This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer to the user documentation for complete product specifications.

If the product is used in a manner not specified, the protection provided by the product warranty may be impaired. The types of product users are: Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring

that the equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.

Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument. They must be protected from electric shock and contact with hazardous live circuits.

Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service personnel may perform installation and service procedures.

Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category I and Measurement Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC

60664. Most measurement, control, and data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient over-voltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise marked or described in the user documentation.

Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak, or 60VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000 volts, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedancelimited sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, make sure the line cord is connected to a properly grounded power recep tacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.

11/07

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the

circuit under test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with specifications and operating instructions, or the safety of the equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating information, and as shown on the instrument or test fixture panels, or switching card.

When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard. Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground

connections. If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation

requires the use of a lid interlock. If a screw is present, connect it to safety earth ground using the wire recommended in the user documentation. The symbol on an instrument indicates that the user shoul d refer to the operating instructions located in the

documentation. The symbol on an instrument shows that it can source or measure 1000 volts or more, including the combined

effect of normal and common mode voltages. Use standard safety precautions to avoid personal contact with these voltages.

The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns. The symbol indicates a connection terminal to the equipment frame.

If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly disposed of according to federal, state, and local laws.

The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.

The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans. Before performing any maintenance, disconnect the line cord and all test cables. To maintain protecti on from electri c shock and fire, re placement components in mains circuits - including the power

transformer, test leads, and input jacks - must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be used if the rating and type are the same. Other components that are not safety-related may be purchased from other suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments office for information.

T o clean an instrument, use a damp cloth or mild, water-based cleaner . Clean the exterior of the instrument only . Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

1 Getting Started

General information ................................................................... 1-2

Warranty information .......................................................... 1-2

Contact information ............................................................ 1-2

Manual addenda .................................................................. 1-2

Safety symbols and terms ................................................... 1-2

Inspection ............................................................................ 1-3

Options and accessories ...................................................... 1-3

Product overview ........................................................................ 1-6

Mainframe and Remote PreAmp familiarization ....................... 1-7

Mainframe front panel summary ........................................ 1-7

Mainframe rear panel summary .......................................... 1-9

Remote PreAmp summary ................................................ 1-10

Power-up .................................................................................. 1-12

Line power connection ...................................................... 1-12

Power-up sequence ........................................................... 1-13

System identification ........................................................ 1-13

Line frequency setting ....................................................... 1-13

Fuse replacement .............................................................. 1-14

Display ..................................................................................... 1-15

Display format .................................................................. 1-15

EDIT key ........................................................................... 1-15

TOGGLE key .................................................................... 1-15

Status and error messages ................................................. 1-16

Remote display programming ........................................... 1-16

Front panel tests ................................................................ 1-16

Disabling front panel display ............................................ 1-16

Default settings ........................................................................ 1-17

Saving and restoring user setups ....................................... 1-17

Power-on configuration ..................................................... 1-18

Factory default settings ..................................................... 1-18

Remote setups ................................................................... 1-20

Menus ....................................................................................... 1-21

Main menu ........................................................................ 1-21

Rules to navigate menus ................................................... 1-24

Editing source and compliance values .............................. 1-25

Toggling the source and measure display fields ............... 1-25

Configuration menus ......................................................... 1-26

2 Connections

Connection overview .................................................................. 2-2

Connecting Remote PreAmp to the mainframe .................. 2-2

Source-measure terminals ................................................... 2-3

Test fixture interlock ........................................................... 2-5

Connections to DUT ................................................................... 2-6

Sensing methods .................................................................. 2-6

Guarding methods ...................................................................... 2-9

Cable guard ......................................................................... 2-9

Ohms guard ....................................................................... 2-10

Guard selection .................................................................. 2-13

3 Basic Source-Measure Operation

CAUTION .................................................................................. 3-2

Operation overview .................................................................... 3-3

Source-measure capabilities ................................................ 3-3

Compliance limit ................................................................. 3-4

Setting the compliance limit ................................................ 3-5

Basic circuit configuration .................................................. 3-6

Operation considerations ............................................................ 3-6

Warm-up .............................................................................. 3-6

Auto zero ............................................................................. 3-6

NPLC caching ..................................................................... 3-7

V-source protection ............................................................. 3-8

Source delay ........................................................................ 3-9

Basic source-measure procedure .............................................. 3-10

Output control ................................................................... 3-10

Current measurements and capacitive loads ..................... 3-11

Front panel source-measure procedure ............................. 3-12

Remote command source-measure procedure ................... 3-15

Measure only ............................................................................ 3-17

Front panel measure only .................................................. 3-17

Remote command measure only ....................................... 3-18

Sink operation ........................................................................... 3-19

Overview ........................................................................... 3-19

Sink programming example .............................................. 3-19

4 Ohms Measurements

Ohms configuration menu .......................................................... 4-2

Ohms measurement methods ..................................................... 4-3

Selecting ohms measurement method ................................. 4-4

Auto ohms measurements ................................................... 4-4

Manual ohms measurements ............................................... 4-5

Ohms sensing ............................................................................. 4-6

Offset-compensated ohms .......................................................... 4-7

Measuring high resistance devices ...................................... 4-7

Enabling/disabling offset-compensated ohms .................... 4-8

Offset-compensated ohms procedure .................................. 4-8

Ohms source readback ............................................................... 4-9

6-wire ohms measurements ........................................................ 4-9

Remote ohms programming ..................................................... 4-10

Remote ohms commands .................................................. 4-10

Ohms programming example ............................................ 4-10

5 Source-Measure Concepts

Compliance limit ........................................................................ 5-2

Types of compliance ........................................................... 5-2

Maximum compliance values ............................................. 5-3

Compliance examples ......................................................... 5-3

Compliance principles ........................................................ 5-4

Determining compliance limit ............................................ 5-4

Overheating protection ............................................................... 5-5

Source-delay-measure cycle ....................................................... 5-6

Sweep waveforms ............................................................... 5-8

Operating boundaries ................................................................. 5-9

Source or sink ..................................................................... 5-9

I -Source operating boundaries ......................................... 5-10

V-Source operating boundaries ......................................... 5-14

Source I measure I and source V measure V .................... 5-18

Basic circuit configurations ...................................................... 5-18

Source I ............................................................................. 5-18

Source V ........................................................................... 5-20

Measure only (V or I) ....................................................... 5-21

Guard ........................................................................................ 5-22

Cable guard ....................................................................... 5-22

Ohms guard ....................................................................... 5-24

Guard sense ....................................................................... 5-24

Data flow .................................................................................. 5-26

Buffer considerations ........................................................ 5-28

6 Range, Digits, Speed, and Filters

Range and digits ......................................................................... 6-2

Range ................................................................................... 6-2

Digits ................................................................................... 6-5

Remote range and digits programming ............................... 6-6

Speed .......................................................................................... 6-7

Setting speed ....................................................................... 6-7

Remote speed programming ................................................ 6-8

Filters .......................................................................................... 6-9

Filter stages ......................................................................... 6-9

Auto filter .......................................................................... 6-13

Filter configuration ............................................................ 6-15

Filter control ...................................................................... 6-16

Remote filter programming ............................................... 6-16

7 Relative and Math

Relative ....................................................................................... 7-2

Front panel rel ..................................................................... 7-2

Remote rel programming .................................................... 7-3

Math operations .......................................................................... 7-4

Math functions ..................................................................... 7-4

Front panel math operations ................................................ 7-7

Remote math operations ...................................................... 7-8

User-defined math functions ............................................. 7-10

8 Data Store

Data store overview .................................................................... 8-2

Front panel data store ................................................................. 8-2

Storing readings ................................................................... 8-2

Recalling readings ............................................................... 8-2

Buffer statistics .................................................................... 8-3

Timestamp format ............................................................... 8-4

Timestamp accuracy ............................................................ 8-4

Buffer considerations .......................................................... 8-5

Remote command data store ...................................................... 8-6

Data store commands .......................................................... 8-6

Data store programming example ....................................... 8-7

9 Sweep Operation

Sweep types ................................................................................ 9-2

Linear staircase sweep ........................................................ 9-2

Logarithmic staircase sweep ............................................... 9-3

Custom sweep ..................................................................... 9-4

Source memory sweep ........................................................ 9-5

Configuring and running a sweep ............................................ 9-11

Front panel sweep operation ............................................. 9-11

Performing sweeps ............................................................ 9-13

Remote sweep operation ................................................... 9-18

10 Triggering

Trigger model (front panel operation) ...................................... 10-2

Idle .................................................................................... 10-2

Event detection .................................................................. 10-4

Trigger delay ..................................................................... 10-5

Source, delay, and measure actions ................................... 10-5

Counters ............................................................................ 10-6

Output triggers .................................................................. 10-6

Bench defaults ................................................................... 10-7

Operation summary ........................................................... 10-7

Trigger link ............................................................................... 10-8

Input trigger requirements ................................................ 10-8

Output trigger specifications ............................................. 10-9

External triggering example .............................................. 10-9

Configuring triggering ........................................................... 10-13

CONFIGURE TRIGGER menu ..................................... 10-13

Remote triggering .................................................................. 10-16

Trigger model (remote operation) ................................... 10-16

Idle and initiate ............................................................... 10-16

Event detection ................................................................ 10-18

Arm layer ........................................................................ 10-18

Trigger layer .................................................................... 10-19

Trigger delay ................................................................... 10-20

Source, delay, and measure actions ................................. 10-20

Counters .......................................................................... 10-21

Output triggers ............................................................... 10-21

GPIB defaults .................................................................. 10-22

Operation summary ......................................................... 10-22

Remote trigger commands .............................................. 10-23

Remote trigger example .................................................. 10-24

11 Limit Testing

Types of limits .......................................................................... 11-2

Pass/fail information .......................................................... 11-2

Data flow ........................................................................... 11-3

Limit 1 test (compliance) .................................................. 11-3

Limit 2, limit 3, and limit 5-12 tests .................................. 11-3

Limit test modes ................................................................ 11-4

Binning .............................................................................. 11-4

Operation overview .................................................................. 11-4

Grading mode .................................................................... 11-4

Sorting mode ..................................................................... 11-8

Binning systems ...................................................................... 11-10

Handler interface ............................................................. 11-10

Handler types ................................................................... 11-11

Basic binning systems ..................................................... 11-12

Single-element device binning ........................................ 11-12

Multiple-element device binning ..................................... 11-13

Digital output clear pattern ..................................................... 11-14

Auto-clear timing ............................................................ 11-14

Configuring and performing limit tests .................................. 11-15

Configuring limit tests ..................................................... 11-15

Performing limit tests ...................................................... 11-17

Remote limit testing ............................................................... 11-19

Limit commands .............................................................. 11-19

Limit test programming example .................................... 11-20

12 Digital I/O Port, Interlock, and Output Configuration

Digital I/O port ......................................................................... 12-2

Port configuration .............................................................. 12-2

Digital output configuration .............................................. 12-3

Controlling digital output lines ......................................... 12-4

Safety interlock ......................................................................... 12-6

Front panel output configuration .............................................. 12-7

Configure OUTPUT menu ................................................ 12-7

Output-off states ................................................................ 12-8

Output off states and inductive loads ................................ 12-9

Remote output configuration .................................................... 12-9

Output configuration commands ....................................... 12-9

Output configuration programming example .................. 12-10

13 Remote Operations

Differences: remote vs. local operation ................................... 13-2

Operation enhancements (remote operation) .................... 13-2

Local-to-remote transition ................................................ 13-2

Remote-to-local transition ................................................ 13-3

Selecting an interface ............................................................... 13-3

GPIB operation ........................................................................ 13-4

GPIB standards ................................................................. 13-4

GPIB connections ............................................................. 13-4

Primary address ................................................................. 13-6

General bus commands ............................................................ 13-6

REN (remote enable) ........................................................ 13-7

IFC (interface clear) .......................................................... 13-7

LLO (local lockout) .......................................................... 13-7

GTL (go to local) .............................................................. 13-7

DCL (device clear) ............................................................ 13-8

SDC (selective device clear) ............................................. 13-8

GET (group execute trigger) ............................................. 13-8

SPE, SPD (serial polling) .................................................. 13-8

Front panel GPIB operation ..................................................... 13-9

Error and status messages ................................................. 13-9

GPIB status indicators ...................................................... 13-9

LOCAL key .................................................................... 13-10

Programming syntax .............................................................. 13-10

Command words ............................................................. 13-10

Query commands ............................................................ 13-12

Case sensitivity ............................................................... 13-12

Long-form and short-form versions ................................ 13-12

Short-form rules .............................................................. 13-13

Program messages ........................................................... 13-13

Response messages ......................................................... 13-15

Message exchange protocol ............................................ 13-16

RS-232 interface operation .................................................... 13-16

Sending and receiving data ............................................. 13-16

Baud rate ......................................................................... 13-17

Data bits and parity ......................................................... 13-17

Terminator ....................................................................... 13-17

Flow control (signal handshaking) .................................. 13-18

RS-232 connections ........................................................ 13-18

Error messages ................................................................ 13-19

Programming example .................................................... 13-20

14 Status Structure

Overview .................................................................................. 14-2

Status byte and SRQ .......................................................... 14-2

Status register sets ............................................................. 14-2

Queues ............................................................................... 14-2

Clearing registers and queues ................................................... 14-4

Programming and reading registers .......................................... 14-5

Programming enable registers ........................................... 14-5

Reading registers .............................................................. 14-6

Status byte and service request (SRQ) ..................................... 14-7

Status Byte Register .......................................................... 14-8

Service Request Enable Register ....................................... 14-9

Serial polling and SRQ ...................................................... 14-9

Status byte and service request commands ..................... 14-10

Status register sets .................................................................. 14-11

Condition registers .......................................................... 14-16

Event registers ................................................................. 14-17

Event enable registers ...................................................... 14-17

Queues .................................................................................... 14-19

Output queue ................................................................... 14-19

Error queue ...................................................................... 14-19

15 Common Commands

Command summary .................................................................. 15-2

Command reference .................................................................. 15-3

*IDN? — identification query ........................................... 15-3

*OPC — operation complete ............................................ 15-3

*OPC? — operation complete query ................................ 15-3

*SAV <NRf> — save ........................................................ 15-4

*RCL <NRf> — recall ...................................................... 15-4

*RST — reset .................................................................... 15-5

*TRG — trigger ................................................................ 15-5

*TST? — self-test query ................................................... 15-6

*WAI — wait-to-continue ................................................. 15-6

16 SCPI Signal-Oriented Measurement Commands

Command summary ................................................................. 16-2

Configuring measurement function .......................................... 16-2

:CONFigure:<function> .................................................... 16-2

Acquiring readings ................................................................... 16-3

:FETCh? ............................................................................ 16-3

[:SENSe[1]]:DATA[:LATest]? .......................................... 16-4

:READ? ............................................................................. 16-4

:MEASure[:<function>]? .................................................. 16-5

17 SCPI Command Reference

Reference tables ....................................................................... 17-2

Calculate subsystems ............................................................. 17-22

CALCulate[1] ......................................................................... 17-22

Select (create) math expression name ............................. 17-22

Assign unit suffix ............................................................ 17-27

Define math expression ................................................... 17-27

Enable and read math expression result .......................... 17-30

CALCulate2 ........................................................................... 17-31

Select input path .............................................................. 17-31

Null feed reading ............................................................ 17-31

Read CALC2 ................................................................... 17-32

Configure and control limit tests ..................................... 17-33

Composite testing ........................................................... 17-37

Clear test results ............................................................. 17-39

CALCulate3 ........................................................................... 17-40

Select statistic ................................................................. 17-40

Acquire statistic .............................................................. 17-40

:DISPlay subsystem ............................................................... 17-41

Control display ................................................................ 17-41

Read display .................................................................... 17-43

Define :TEXT messages ................................................. 17-43

FORMat subsystem ................................................................ 17-44

Data format ..................................................................... 17-44

Data elements .................................................................. 17-46

CALC data elements ....................................................... 17-50

Byte order ....................................................................... 17-51

Status register format ...................................................... 17-51

OUTPut subsystem ................................................................ 17-52

Turn source on or off ....................................................... 17-52

Interlock control .............................................................. 17-52

Output-off states .............................................................. 17-53

SENSe1 subsystem ................................................................. 17-54

Select measurement functions ......................................... 17-54

Select measurement range ............................................... 17-57

Select auto range ............................................................. 17-58

Set compliance limit ........................................................ 17-59

Set measurement speed ................................................... 17-60

Configure and control filters ........................................... 17-60

SOURce subsystem ................................................................ 17-64

SOURce[1] ...................................................................... 17-64

Control source output-off ................................................ 17-64

Select function mode ....................................................... 17-65

Select sourcing mode ...................................................... 17-65

Select range ..................................................................... 17-66

Set amplitude for fixed source ......................................... 17-67

Set voltage limit ............................................................... 17-69

Set delay .......................................................................... 17-70

Configure voltage and current sweeps ............................ 17-71

Configure list ................................................................... 17-76

Configure memory sweep ............................................... 17-77

Set scaling factor ............................................................. 17-79

Sweep and list program examples ................................... 17-80

Soak time ......................................................................... 17-82

SOURce2 ......................................................................... 17-82

Setting digital output ....................................................... 17-82

Clearing digital output ..................................................... 17-84

STATus subsystem .................................................................. 17-86

Read event registers ......................................................... 17-86

Program event enable registers ........................................ 17-86

Read condition registers .................................................. 17-87

Select default conditions ................................................. 17-87

Error queue ...................................................................... 17-87

:SYSTem subsystem ............................................................... 17-89

Default conditions ........................................................... 17-89

Select guard mode ........................................................... 17-90

Initialize memory ............................................................ 17-90

Control beeper ................................................................. 17-91

Control auto zero ............................................................. 17-92

Control NPLC caching .................................................... 17-92

Select power line frequency setting ................................. 17-93

Error queue ...................................................................... 17-94

Simulate key presses ....................................................... 17-95

Read version of SCPI standard ........................................ 17-96

RS-232 interface .............................................................. 17-97

Query timestamp ............................................................. 17-97

Reset timestamp .............................................................. 17-98

Auto reset timestamp ...................................................... 17-98

Auto range change mode ................................................ 17-98

:TRACe subsystem ................................................................. 17-99

Read and clear buffer ...................................................... 17-99

Configure and control buffer ........................................... 17-99

Select timestamp format ............................................... 17-101

TRIGger subsystem .............................................................. 17-102

Clear input triggers ....................................................... 17-102

Initiate source/measure cycle ........................................ 17-102

Abort source/measure cycle .......................................... 17-103

Program trigger model .................................................. 17-103

18 Performance Verification

Introduction .............................................................................. 18-2

Verification test requirements .................................................. 18-2

Environmental conditions ................................................. 18-2

Warm-up period ................................................................ 18-3

Line power ........................................................................ 18-3

Recommended test equipment ................................................. 18-3

Test resistor construction ................................................. 18-5

Verification limits ..................................................................... 18-5

Example limits calculation ................................................ 18-5

Resistance limits calculation ............................................. 18-6

Limits calculation with test equipment uncertainty .......... 18-6

Performing the verification test procedures ............................. 18-6

Restoring factory defaults ................................................. 18-6

Test summary .................................................................... 18-7

Test considerations ............................................................ 18-7

Setting the source range and output value ........................ 18-8

Setting the measurement range ......................................... 18-8

Compliance considerations ...................................................... 18-8

Compliance limits ............................................................. 18-8

Types of compliance ......................................................... 18-8

Maximum compliance values ........................................... 18-9

Determining compliance limit ........................................ 18-10

Taking the unit out of compliance .................................. 18-10

Mainframe verification ........................................................... 18-10

Mainframe output voltage accuracy ................................ 18-10

Mainframe voltage measurement accuracy ..................... 18-12

Mainframe output current accuracy ................................ 18-12

Mainframe current measurement accuracy ..................... 18-14

Mainframe resistance measurement accuracy ................ 18-15

Remote PreAmp verification .................................................. 18-17

Connecting Remote PreAmp to the mainframe .............. 18-17

Remote PreAmp output voltage accurac

Remote PreAmp voltage measurement accurac

Remote PreAmp output current accurac

Remote PreAmp current measurement accura

Remote PreAmp resistance meas

20Ω-200MΩ range accuracy ........................................... 18-26

2GΩ-200GΩ range accuracy ........................................... 18-28

2TΩ and 20TΩ range accuracy ....................................... 18-30

19 Calibration

Introduction .............................................................................. 19-2

Environmental conditions ......................................................... 19-2

Temperature and relative humidity .................................... 19-2

Warm-up period ................................................................. 19-2

Line power ......................................................................... 19-2

Calibration considerations ..............

Calibration cycle ............................................................... 19-3

Recommended calibration equipment ...................................... 19-4

Unlocking calibration ............................................................... 19-5

Mainframe calibration .............................................................. 19-6

Mainframe calibration menu ............................................. 19-6

Mainframe calibration procedure ...................................... 19-6

Remote PreAmp calibration ................................................... 19-14

Connecting Remote PreAmp to the mainframe .............. 19-14

Remote PreAmp calibration menu .................................. 19-14

Remote PreAmp calibration procedure ........................... 19-15

Changing the password ........................................................... 19-21

Resetting the calibration password .................................. 19-21

Viewing calibration dates and calibration count ..................... 19-22

y ....................... 18-18

y ............ 18-19

y ....................... 18-20

cy ............ 18-24

urement accuracy ........ 18-26

.......................................... 19-3

20 Routine Maintenance

Introduction .............................................................................. 20-2

Line fuse replacement ...............................................................

Front panel tests ........................................................................ 20-3

KEYS test .......................................................................... 20-3

DISPLAY PATTERNS test ............................................... 20-4

CHAR SET test ................................................................. 20-4

20-2

A Specifications

Accuracy calculations ............................................................... A-7

Measure accuracy ............................................................... A-7

Source accuracy ................................................................. A-7

Source-Delay-Measure (SDM) cycle timing ............................ A-8

Definitions .......................................................................... A-8

Timing diagrams ................................................................ A-9

B Status and Error Messages

Introduction ............................................................................... B-2

Status and error messages ......................................................... B-2

Eliminating common SCPI errors ............................................. B-8

C Data Flow

Introduction ............................................................................... C-2

FETCh? .............................................................................. C-3

CALCulate[1]:DATA? ....................................................... C-3

CALCulate2:DATA? .......................................................... C-3

TRACe:DATA? .................................................................. C-4

CALCulate3:DATA? .......................................................... C-4

D IEEE-488 Bus Overview

Introduction ............................................................................... D-2

Bus description .......................................................................... D-2

Bus lines .................................................................................... D-4

Data lines ........................................................................... D-4

Bus management lines ....................................................... D-5

Handshake lines ................................................................. D-5

Bus commands .......................................................................... D-6

Uniline commands ............................................................. D-7

Universal multiline commands .......................................... D-8

Addressed multiline commands ......................................... D-8

Address commands ............................................................ D-9

Unaddress commands ........................................................ D-9

Common commands .......................................................... D-9

SCPI commands ................................................................. D-9

Command codes ............................................................... D-10

Typical command sequences ............................................ D-12

IEEE command groups .................................................... D-13

Interface function codes .......................................................... D-14

E IEEE-488 and SCPI Conformance Information

Introduction ............................................................................... E-2

F Measurement Considerations

Floating measurement safety concerns ...................................... F-2

Low current measurements ........................................................ F-3

Leakage currents and guarding .......................................... F-3

Noise and source impedance .............................................. F-5

Generated currents .............................................................. F-6

Voltage burden .................................................................... F-9

Overload protection .......................................................... F-10

High impedance voltage measurements .................................. F-10

Loading effects ................................................................. F-10

Cable leakage resistance ................................................... F-11

Input capacitance (settling time) ...................................... F-11

High resistance measurements ................................................ F-13

Ohms measurement methods ........................................... F-13

Characteristics of high-valued resistors ........................... F-13

General measurement considerations ...................................... F-14

Ground loops .................................................................... F-14

Light ................................................................................. F-15

Electrostatic interference .................................................. F-15

Magnetic fields ................................................................. F-15

Electromagnetic Interference (EMI) ................................ F-16

G GPIB 488.1 Protocol

Introduction ............................................................................... G-2

Selecting the 488.1 protocol ...................................................... G-2

Protocol differences ................................................................... G-3

Message exchange protocol (MEP) .................................... G-3

Using SCPI-based programs .............................................. G-3

NRFD hold-off ................................................................... G-4

NDAC hold-off ................................................................... G-4

Trigger-on-talk ................................................................... G-5

Message available ............................................................... G-5

General operation notes ...................................................... G-5

GPIB reading speed comparisons .............................................. G-6

Sweep operation ................................................................. G-6

Single-shot operation .......................................................... G-7

List of Illustrations

1 Getting Started

Figure 1-1 Front panel ............................................................................. 1-7

Figure 1-2 Model 6430 rear panel ........................................................... 1-9

Figure 1-3 Remote preamp .................................................................... 1-10

Figure 1-4 Triax connectors .................................................................. 1-11

Figure 1-5 Main menu tree .................................................................... 1-23

2 Connections

Figure 2-1 Basic input/output configurations .......................................... 2-4

Figure 2-2 Two-wire sense connections .................................................. 2-6

Figure 2-3 Four-wire sense connections .................................................. 2-7

Figure 2-4 High-impedance guarding ..................................................... 2-9

Figure 2-5 Guarded ohms connections (basic) ...................................... 2-10

Figure 2-6 Guarded ohms connections (guard sense) ........................... 2-11

Figure 2-7 Guarded ohms connections (6-wire ohms) .......................... 2-12

3 Basic Source-Measure Operation

Figure 3-1 Fundamental source-measure configuration .......................... 3-6

4 Ohms Measurements

Figure 4-1 Ohms configuration ............................................................... 4-2

Figure 4-2 menu tree ............................................................................... 4-2

5 Source-Measure Concepts

Figure 5-1 Source-delay-measure (SDM) cycle ...................................... 5-6

Figure 5-2 Simplified trigger model ........................................................ 5-7

Figure 5-3 Three basic sweep waveform types ....................................... 5-8

Figure 5-4 Operating boundaries ........................................................... 5-10

Figure 5-5 I-Source boundaries ............................................................. 5-11

Figure 5-6 I-Source operating boundaries ............................................. 5-13

Figure 5-7 V-Source boundaries ............................................................ 5-15

Figure 5-8 V-Source operating examples .............................................. 5-17

Figure 5-9 Source I ................................................................................ 5-19

Figure 5-10 Source V .............................................................................. 5-20

Figure 5-11 Measure-only (V or I) .......................................................... 5-21

Figure 5-12 High-impedance measurements ........................................... 5-23

Figure 5-13 In-circuit ohms measurements ............................................. 5-24

Figure 5-14 In-circuit ohms measurements using guard sense ............... 5-25

Figure 5-15 Data flow front panel ........................................................... 5-27

6 Range, Digits, Speed, and Filters

Figure 6-1 Speed configuration menu tree ............................................... 6-8

Figure 6-2 3-stage filtering ...................................................................... 6-9

Figure 6-3 Repeat filter (count 10) ........................................................ 6-10

Figure 6-4 Median filter (rank 5) ...........................................................

Figure 6-5 Moving filter (count 10) ....................................................... 6-12

Figure 6-6 Configure filtering menu tree ........

....................................... 6-15

6-11

7 Relative and Math

Figure 7-1 Math configuration menu tree ................................................ 7-7

Figure 7-2 Connections for voltage coefficient tests ............................... 7-9

9 Sweep Operation

Figure 9-1 Linear staircase sweep ............................................................ 9-2

Figure 9-2 Logarithmic staircase sweep (e

from 1 to 10 volts) ............................................................ 9-3

Figure 9-3 Custom pulse sweep ............................................................... 9-4

Figure 9-4 Custom sweep with different pulse widths

Figure 9-5 Six-point test branching example ........................................... 9-8

Figure 9-6 Typical diode I-V curve and test points

Figure 9-7 Sweep configuration menu tree ............................................ 9-12

Figure 9-8 Connections for diode I-V tests .....

Figure 9-9 Diode I-V curve .................................................................... 9-19

xample 5-point sweep

............................ 9-5

(not to scale) ............ 9-9

....................................... 9-19

10 Triggering

Figure 10-1 Trigger model (front panel operation) .................................. 10-3

Figure 10-2 Rear panel pinout ................................................................. 10-8

Figure 10-3 Trigger link input pulse specifications ................................. 10-8

Figure 10-4 Trigger link output pulse specifications .

Figure 10-5 DUT test system ................................................................... 10-9

Figure 10-6 Trigger link connections ..................................................... 10-10

Figure 10-7 Operation model for triggering e

Figure 10-8 Configure trigger menu tree ............................................... 10-15

Figure 10-9 Trigger model (remote operation) ...................................... 10-17

Figure 10-10 Measure action ................................................................... 10-20

xample ............................ 10-12

.............................. 10-9

11 Limit Testing

Figure 11-1 Limits tests ........................................................................... 11-2

Figure 11-2 Grading mode limit testing ................................................... 11-5

Figure 11-3 Immediate binning ............................................................... 11-6

Figure 11-4 End binning .......................................................................... 11-6

Figure 11-5 Sorting mode limit testing .................................................... 11-9

Figure 11-6 Handler interface connections ............................................

11-10

Figure 11-7 Binning system - single element devices ........................... 11-12

Figure 11-8 Binning system - multiple element devices ....................... 11-13

Figure 11-9 Digital output auto-clear timing example .......................... 11-15

Figure 11-10 Limits configuration menu tree .......................................... 11-17

Figure 11-11 Diode pass/fail limits ......................................................... 11-20

12 Digital I/O Port, Interlock, and Output Configuration

Figure 12-1 Interlock and digital I/O port ............................................... 12-2

Figure 12-2 Sink operation ...................................................................... 12-3

Figure 12-3 Source operation .................................................................. 12-4

Figure 12-4 Using test fixture interlock .................................................. 12-6

Figure 12-5 Output configuration menu tree ........................................... 12-7

13 Remote Operations

Figure 13-1 IEEE-488 connector ............................................................. 13-4

Figure 13-2 IEEE-488 connections ......................................................... 13-5

Figure 13-3 IEEE-488 connector location ............................................... 13-5

Figure 13-4 RS-232 interface connector ............................................... 13-18

14 Status Structure

Figure 14-1 SourceMeter status register structure ................................... 14-3

Figure 14-2 16-bit status register ............................................................. 14-5

Figure 14-3 Status byte and service request (SRQ) ................................. 14-7

Figure 14-4 Standard event status .......................................................... 14-11

Figure 14-5 Operation event status ........................................................ 14-13

Figure 14-6 Measurement event status .................................................. 14-15

Figure 14-7 Questionable event status ................................................... 14-16

17 SCPI Command Reference

Figure 17-1 ASCII data format .............................................................. 17-45

Figure 17-2 IEEE-754 single precision data format (32 data bits) ........ 17-45

Figure 17-3 Key-press codes ................................................................. 17-96

18 Performance Verification

Figure 18-1 Test resistor construction ...................................................... 18-5

Figure 18-2 Connections for mainframe voltage verification tests ........ 18-11

Figure 18-3 Connections for mainframe current v Figure 18-4 Connections for mainframe resistance accuracy

verification .................................................................... 18-15

Figure 18-5 Connections for Remote PreAmp voltage

verification tests ............................................................ 18-18

Figure 18-6 Connections for 1µA-100mA range current

verification tests............................................................. 18-21

Figure 18-7 Connections for 1pA-100nA range current

verification tests............................................................. 18-22

Figure 18-8

Figure 18-9

Figure 18-10

Connections for Remote PreAmp 20Ω-200MΩ

range verification .......................................................... 18-27

Connections for Remote PreAmp 2GΩ-200GΩ

range verification .......................................................... 18-29

Connections for Remote PreAmp 2TΩ and 20TΩ

range verification .......................................................... 18-30

erification tests ........ 18-13

19 Calibration

Figure 19-1 Mainframe voltage calibration test connections ................... 19-7

Figure 19-2 Mainframe current calibration connections ...

Figure 19-3 Voltage burden calibration connections ............................. 19-16

Figure 19-4 1µA and 10µA range gain calibration connections ............ 19-17

Figure 19-5 1pA to 100nA range gain calibration connections ............. 19-19

.................... 19-10

20 Routine Maintenance

Figure 20-1 Rear panel ............................................................................. 20-2

A Specifications

Figure A-1 Case I timing diagram ........................................................... A-9

Figure A-2 Case II timing diagram ........................................................ A-10

Figure A-3 Case III timing diagram ...................................................... A-10

Figure A-4 Case IV timing diagram ...................................................... A-11

Figure A-5 Case V timing diagram ........................................................ A-12

Figure A-6 Case VI timing diagram ...................................................... A-12

C Data Flow

Figure C-1 Data flow block diagram ....................................................... C-2

D IEEE-488 Bus Overview

Figure D-1 IEEE-488 bus configuration ................................................. D-3

Figure D-2 IEEE-488 handshake sequence ............................................. D-6

Figure D-3 Command codes .................................................................. D-11

F Measurement Considerations

Figure F-1 Floating measurements .......................................................... F-2

Figure F-2 Guarding an ionization chamber ............................................ F-4

Figure F-3 Voltage burden ....................................................................... F-9

Figure F-4 Overload protection for ammeter input ............................... F-10

Figure F-5 Meter loading ....................................................................... F-11

Figure F-6 Effects of input capacitance ................................................. F-12

Figure F-7 Settling time ......................................................................... F-12

Figure F-8 Power line ground loops ...................................................... F-14

Figure F-9 Eliminating ground loops .................................................... F-14

G GPIB 488.1 Protocol

Figure G-1 IEEE-488 handshake sequence ............................................. G-4

List of Tables

1 Getting Started

Table 1-1 Line frequency remote commands ....................................... 1-14

Table 1-2 Basic display commands ...................................................... 1-16

Table 1-3 Factory default settings ........................................................ 1-19

Table 1-4 Main menu ........................................................................... 1-21

Table 1-5 Measurement configuration menus ...................................... 1-27

Table 1-6 Source and range configuration menus ................................ 1-28

Table 1-7 Rel, filter, and limit configuration menus

Table 1-8 Trigger configuration menu ................................................. 1-30

Table 1-9 Sweep, digits, speed, and data store configuration menus ... 1-31

Table 1-10 Output and display configuration menus ............................. 1-32

2 Connections

Table 2-1 Terminal equivalency between mainframe and

3 Basic Source-Measure Operation

Table 3-1 Compliance limits .................................................................. 3-4

Table 3-2 Compliance commands .......................................................... 3-5

Table 3-3 Typical NPLC cache test times .............................................. 3-8

Table 3-4 Auto source delay .................................................................. 3-9

Table 3-5 Maximum capacitive loads .................................................. 3-11

Table 3-6 Basic source-measure commands ........................................ 3-15

Table 3-7 Basic source-measure command sequence .......................... 3-16

Table 3-8 Measure only programming example .................................. 3-18

Table 3-9 Sink programming example ................................................. 3-19

Remote PreAmp ........................

........................... 1-29

....................................

2-3

4 Ohms Measurements

Table 4-1 Auto ohms default test currents ............................................. 4-3

Table 4-2 Remote commands for basic ohms measurements .............. 4-10

Table 4-3 Commands for ohms programming ex

ample ....................... 4-10

5 Source-Measure Concepts

Table 5-1 Maximum compliance values ................................................ 5-3

Table 5-2 Compliance examples ............................................................ 5-5

Table 5-3 Buffer considerations ........................................................... 5-28

6 Range, Digits, Speed, and Filters

Table 6-1 Model 6430 ranges ................................................................. 6-2

Table 6-2 Range and digits commands ................................................... 6-6

Table 6-3 Range and digits programming example ................................ 6-7

Table 6-4 Speed commands .................................................................... 6-8

Table 6-5 Auto filter settings where NPLC = 0.01 to 0.10 .................. 6-13

Table 6-6 Auto filter settings where NPLC = 0.11 to 1.00 .................. 6-14

Table 6-7 Auto filter settings where NPLC = 1.01 to 10 ..................... 6-14

Table 6-8 Filter commands ................................................................... 6-16

Table 6-9 Filter programming example ................................................ 6-17

7 Relative and Math

Table 7-1 Rel commands ........................................................................ 7-3

Table 7-2 Rel programming example ..................................................... 7-3

Table 7-3 Math commands ..................................................................... 7-8

Table 7-4 Voltage coefficient programming example ............................ 7-9

Table 7-5 Commands for user-defined math functions ........................ 7-10

Table 7-6 User-defined math function programming example ............ 7-11

8 Data Store

Table 8-1 Data store commands ............................................................. 8-6

Table 8-2 Data store example ................................................................. 8-7

9 Sweep Operation

Table 9-1 Logarithmic sweep points ...................................................... 9-4

Table 9-2 Source memory saved configurations .................................... 9-7

Table 9-3 Linear and log staircase sweep commands .......................... 9-18

Table 9-4 Staircase sweep programming example (diode test) ............ 9-20

Table 9-5 Custom sweep commands .................................................... 9-20

Table 9-6 Custom sweep programming example ................................. 9-21

Table 9-7 Source memory sweep commands ....................................... 9-21

Table 9-8 Source memory sweep programming example .................... 9-22

10 Triggering

Table 10-1 Remote trigger command ................................................... 10-23

Table 10-2 Remote triggering example ................................................ 10-24

11 Limit Testing

Table 11-1 Limit commands ................................................................. 11-19

Table 11-2 Limits test programming example ..................................... 11-21

Table 11-3 Limits test results summary ............................................... 11-21

12 Digital I/O Port, Interlock, and Output Configuration

Table 12-1 Digital output line settings ................................................... 12-5

Table 12-2 Output configuration commands ......................................... 12-9

Table 12-3 Output configuration programming e

xample .................... 12-10

13 Remote Operations

Table 13-1 General bus commands ........................................................ 13-6

Table 13-2 PC serial port pinout .......................................................... 13-19

Table 13-3 RS-232 connector pinout ................................................... 13-19

14 Status Structure

Table 14-1 Common and SCPI commands to reset registers

and clear queues ............................................................. 14-4

Table 14-2 Data format commands for reading status re Table 14-3 Status Byte and Service Request Enabl

commands .................................................................... 14-10

Table 14-4 Status byte programming example .................................... 14-10

Table 14-5 Event register commands ................................................... 14-17

Table 14-6 Condition register commands ............................................ 14-17

Table 14-7 Program and read register programming e

Table 14-8 Event enable registers commands ...................................... 14-18

Table 14-9 Error queue commands ...................................................... 14-20

gisters ............. 14-7

e Register

xample ............. 14-18

15 Common Commands

Table 15-1 IEEE-488.2 common commands and queries ...................... 15-2

Table 15-2 *OPC programming example .............................................. 15-4

Table 15-3 *SAV, *RCL programming example ................................... 15-5

Table 15-4 *TRG programming example .............................................. 15-6

16 SCPI Signal-Oriented Measurement Commands

Table 16-1 Signal-oriented measurement command summary .............. 16-2

17 SCPI Command Reference

Table 17-1 CALCulate command summary .......................................... 17-3

Table 17-2 DISPlay command summary ............................................... 17-8

Table 17-3 FORMat command summary .............................................. 17-9

Table 17-4 OUTPut command summary ............................................... 17-9

Table 17-5 SENSe command summary ............................................... 17-10

Table 17-6 SOURce command summary ............................................ 17-13

Table 17-7 STATus command summary .............................................. 17-17

Table 17-8 SYSTem command summary ............................................ 17-18

Table 17-9 TRACe command summary .............................................. 17-19

Table 17-10 TRIGger command summary ............................................ 17-20

18 Performance Verification

Table 18-1 Recommended verification equipment ................................. 18-4

Table 18-2 Maximum compliance values ............................................... 18-9

Table 18-3 Mainframe output voltage accuracy limits Table 18-4 Mainframe voltage measurement accurac Table 18-5 Mainframe output current accuracy limits Table 18-6 Mainframe current measurement accura Table 18-7 Mainframe resistance measurement accurac Table 18-8 Remote PreAmp output voltage accurac

Table 18-9 Remote PreAmp voltage measurement accuracy limits ..... 18-20

Table 18-10 Remote PreAmp 1µA-100mA range output

current accuracy limits ................................................. 18-21

Table 18-11 Remote PreAmp 1pA-100nA range output current

accuracy limits .............................................................. 18-23

Table 18-12 Remote PreAmp 1µA-100mA range measurement

accuracy limits .............................................................. 18-24

Table 18-13 Remote PreAmp 1pA-100nA range measurement

accuracy limits .............................................................. 18-25

Table 18-14

Table 18-15

Table 18-16

Remote PreAmp 20Ω-200MΩ range measurement

accuracy limits .............................................................. 18-28

Remote PreAmp 2GΩ-200GΩ range measurement

accuracy limits .............................................................. 18-30

Remote PreAmp 2TΩ and 20TΩ range measurement

accuracy limits .............................................................. 18-31

......................... 18-11

y limits .............. 18-12

......................... 18-13

cy limits .............. 18-14

y limits .......... 18-16

y limits ................ 18-19

19 Calibration

Table 19-1 Recommended calibration equipment .................................. 19-4

Table 19-2 Calibration unlocked states .................................................. 19-5

Table 19-3 Mainframe voltage calibration summary ............................. 19-9

Table 19-4 Mainframe current calibration summary .. Table 19-5 Standard resistance val

gain calibration ............................................................. 19-20

ues for 1pA-100nA

.......................... 19-12

20 Routine Maintenance

Table 20-1 Power line fuse ..................................................................... 20-3

B Status and Error Messages

Table B -1 Status and error messages ..................................................... B-3

D IEEE-488 Bus Overview

Table D -1 IEEE-488 bus command summary ....................................... D-7

Table D -2 Hexadecimal and decimal command codes ........................ D-10

Table D -3 Typical addressed multiline command s

Table D -4 Typical addressed common command sequence ................ D-12

Table D -5 IEEE command groups ....................................................... D-13

Table D -6 SourceMeter interface function codes ................................

equence ................ D-12

D-14

E IEEE-488 and SCPI Conformance Information

Table E -1 IEEE-488 documentation requirements ................................. E-3

Table E -2 Coupled commands ............................................................... E-4

F Measurement Considerations

Table F -1 Minimum recommended source resistance values ................ F-5

G GPIB 488.1 Protocol

Table G -1 SCPI/488.1 reading speed comparisons for measure-only

sweep operation (rdgs/sec) .............................................. G-6

Table G -2 SCPI/488.1 reading speed comparis

sweep operation (rdgs/sec) .............................................. G-6

Table G -3 SCPI/488.1 reading speed com

sweep operation (rdgs/sec) .............................................. G-7

Table G -4 SCPI/488.1 reading speed comparis

Table G -5 single-shot operation (rdgs/sec) ............................................ G-7

Table G -6 SCPI/488.1 reading speed comparisons for

source-measure-limit test sweep operation (rdgs/sec) .... G-7

Table G -7 SCPI/488.1 reading speed comparisons for

source-measure-limit test single-shot

operation (rdgs/sec) ......................................................... G-8

Table G -8 SCPI/488.1 reading speed comparis

single-shot operation (rdgs/sec) ...................................... G-8

ons for source-measure

parisons for source-memory

ons for measure-only

ons for source-measure

Getting Started

• General Information — Covers general information that includes warranty informa-

tion, contact information, safety symbols and terms, inspection, and available options and accessories.

• Product Overview — Summarizes the features of the Model 6430 Sub-Femtoamp

Remote SourceMeter.

• Mainframe and Remote PreAmp Familiarization — Summarizes the controls and

connectors on the mainframe and Remote PreAmp.

• Power-up — Covers line power connection, line voltage settings, fuse replacement,

and the power-up sequence.

• Display — Provides information about the Model 6430 display.

• Default Settings — Covers factory default setups and saving and recalling user setups.

• Menus — Covers the main and configuration menus as well as rules to navigate menus.

1-2 Getting Started

General information

Warranty information

Warranty information is located at the front of this manual. Should your Model 6430 require warranty service, contact the Keithley representative or authorized repair facility in your area for further information. When returning the instrument for repair, be sure to fill out and include the service form at the back of this manual to provide the repair facility with the necessary information.

Contact information

Worldwide phone numbers are listed at the front of this manual. If you have any questions, please contact your local Keithley representative or call one of our Application Engineers at 1-800-348-3735 (U.S. and Canada only).

Manual addenda

Any improvements or changes concerning the instrument or manual will be explained in an addendum included with the manual. Be sure to note these changes and incorporate them into the manual.

Safety symbols and terms

The following symbols and terms may be found on the instrument or used in this manual.

The symbol on an instrument indicates that the user should refer to the operating instructions located in the manual.

The symbol on the instrument shows that high voltage may be present on the terminal(s). Use standard safety precautions to avoid personal contact with these voltages.

The WARNING heading used in this manual explains dangers that might result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.

The CAUTION heading used in this manual explains hazards that could damage the instrument. Such damage may invalidate the warranty.

Inspection

The SourceMeter was carefully inspected electrically and mechanically before shipment. After unpacking all items from the shipping carton, check for any obvious signs of physical damage that may have occurred during transit. (There may be a protective film over the display lens, which can be removed.) Report any damage to the shipping agent immediately. Save the original packing carton for possible future shipment. The following items are included with every Model 6430 Sub-Femtoamp Remote SourceMeter order:

Getting Started 1-3

• SourceMeter mainframe with line cord.

• SourceMeter Remote PreAmp with cable to mainframe.

• 8-inch triax-to-alligator clip cable (part number: 6430-322-1A).

• 5-inch input/output low-to-chassis ground cable (part number: CA-186-1A).

• Safety high voltage dual test leads (Model 8607).

• Accessories as ordered.

• Certificate of calibration.

• Instruction Manual.

• Support Software Disk including TestPoint instrument library for GPIB and LabV indows driver.

for W

• Manual addenda, containing any improvements or changes to the instrument or manual.

IEW

If an additional manual is required, order the appropriate manual package (for example,

6430-901-00). Th

e manual packages include a manual and any pertinent addenda.

Options and accessories

The following options and accessories are available from Keithley for use with the

Model 6430.

Triax cables and adapters (for Remote PreAmp)

Model 6430-322-1A — This low-noise 8-inch cable is terminated with a 3-slot male triax

connector on one end, and three booted alligator clips on the other end.

Model 7078-TRX-1

3-slot male triax connectors.

Model 237-TRX-BAR Barrel Adapter

nect two triax cables together. Both ends of the ad connectors.

CS-1053 Barrel Adapter — This barrel adapter is

triax connectors.

Model 237-BNC-TRX Adapter — This is a male

disconnected). It is used to terminate a triax cable with a BNC plug.

— This low-noise 12-inch triax cable is terminated at both ends with

— This is a barrel adapter that allows you to con-

apter are terminated with 3-lug female triax

terminated at both ends with 3-slot male

BNC to 3-lug female triax adapter (guard

1-4 Getting Started

Model 237-TRX-T Adapter — This is a 3-slot male to dual 3-lug female triax tee adapter

for use with triax cables.

Model 7078-TRX-BNC Adapter — This is a 3-slot male

adapter lets you connect a BNC cable to the triax input of the Model 6430.

Model 237-TRX-TBC Connector

cap for assembly of custom panels and interface connections.

— This is a 3-lug female triax bulkhead connector with

triax to female BNC adapter. This

General purpose probes

Model 8605 high performance modular test leads — Consists of two high voltage

(1600V) test probes and leads. The test leads are terminated with a banana plug that has a retractable sheath on each end.

Model 8606 high performance probe tip kit —

clips, and two spring hook test probes. (The spade lugs and alligator clips are rated at 30V RMS, 42.4V peak; the test probes are rated at 1000V.) These components are for use with high performance test leads terminated with banana plugs, such as the Model 8605.

Model 8607 High Performance Banana Cables —

banana cables. The cables are terminated with banana plugs that have retractable sheaths.

The following test leads and probes are rated at 30V RMS, 42.4V peak:

Models 5805 and 5805-12 Kelvin probes — Consists

probes with banana plug termination. Designed for instruments that measure four-terminal resistance. The Model 5805 is 0.9m long; the Model 5805-12 is 3.6m long.

Model 5806 Kelvin clip lead set

plug termination. Designed for instruments that measure four-terminal resistance. A set of replacement rubber bands is available (Keithley P/N GA-22).

— Includes two Kelvin clip test leads (0.9m) with banana

Consists of two spade lugs, two alligator

Consists of two high voltage (1000V)

of two spring-loaded Kelvin test

Model 8604 SMD probe set — Consists

surface mount device “grabber clip” on one end and a banana plug with a retractable sheath on the other end.

of two test leads (0.9m), each terminated with a

Low thermal probes

Model 8610 low thermal shorting plug — Consists of four banana plugs mounted to a

1-inch square circuit board, interconnected to provide a short circuit among all plugs.

Model 8611 low thermal patch leads

a plug that has a retractable sheath at each end. These leads minimize the thermally-

banan induced offsets that can be created by test leads.

Model 8612 low thermal spade leads

with a spade lug on one end and a banana plug that has a retractable sheath on the other end. These leads minimize the thermally-induced offsets that can be created by test leads.

— Consists of two test leads (0.9m), each with a

— Consists of two test leads (0.9m), each terminated

Getting Started 1-5

Cables and adapters

CA-176-1D Preamp Cable — Connects the REMOTE Preamp to the Model 6430

mainframe.

Models 7007-1 and 7007-2 shielded GPIB cables —

bus using shielded cables and connectors to reduce Electromagnetic Interference (EMI). The Model 7007-1 is 1m long; the Model 7007-2 is 2m long.

Models 8501-1 and 8501-2 trigger link cables —

ments with Trigger Link connectors (e.g., Model 7001 Switch System). The Model 8501-1 is 1m

long; the Model 8501-2 is 2m long.

Model 8502 trigger link adapter —

the SourceMeter to instruments that use the standard BNC trigger connectors.

Model 8503 DIN to BNC trigger cable — Le

meter Complete) and two (External Trigger) of the SourceMeter trigger connectors. The Model 8503 is 1m long.

Lets you connect any of the six Trigger Link lines of

Connect the SourceMeter to the GPIB

Connect the SourceMeter to other instru-

ts you connect Trigger Link lines one (Volt-

to instruments that use BNC

Rack mount kits

Model 4288-1 single fixed rack mount kit — Mounts a single SourceMeter in a standard

19-inch rack.

Model 4288-2 side-by-side rack mount kit — Mou

487, 2000, 2001, 2002, 2010, 2015, 2400, 2410, 2420, 2430, 6430, 6517, 7001) side-by-

486, side in a standard 19-inch rack.

Model 4288-3 side-by-side rack mount kit — Mou

side-by-side in a standard 19-inch rack.

Model 4288-4 side-by-side rack mount kit — Mou

instrument (Models 195A, 196, 220, 224, 230, 263, 595, 614, 617, 705, 740, 775, etc.) side-byside in a standard 19-inch rack.

nts two instruments (Models 182, 428,

nts a SourceMeter and a Model 199

nts a SourceMeter and a 5.25-inch

Model 4288-5 dual fixed rack mounting kit —

high instrument (Model 182, 428, 486, 487, 2000, 2010, 2400, 2410, 2420, 2430, or 7001) side-by-side in a standard 19-inch rack.

Mounts a SourceMeter and another 3 -inch

Calibration standards

Model 5156 Electrometer Calibration Standard Set — This calibration fixture contains

standardized resistors and capacitors needed to calibrate the Model 6430.

Carrying case

Model 1050 padded carrying case — A carrying case for a SourceMeter. Includes handles

and a shoulder strap.

1-6 Getting Started

Product overview

The SourceMeter combines a precise, low-noise, highly stable DC power supply with a lownoise, highly repeatable, high-impedance multimeter and a remote preamplifier for ultra low current measurements. It has 0.012% basic accuracy with 5 -digit resolution. At 5 digits, the SourceMeter delivers 520 readings/second over the IEEE-488 bus. At 4 digits, it can read up to 2000 readings/second into its internal buffer. The unit has broad source and measurement ranges:

• Source voltage from 5µV to 210V; measure voltage from 1µV to 211V.

• Source current from 0.5fA to 105mA; measure current from 10aA to 105.5mA.

• Measure resistance from 100µΩ (<100µΩ in manual ohms) to 21.1TΩ.

• Maximum source power is 2.2W

klqb The Model 6430 is Y2K compliant.

Some additional capabilities of th

• Perform measurements at the DUT using the small

• Concurrent measurements of all three functions over the remote interface.

• Source-measure sweep capabilities (linear and log eep list of up to 1000 points, memory sweep of up to 100 instrument setups).

• 6-wire ohms measurement with programmable I-source or V-source with V or I clamp.

• 2.2W, 4-quadrant source and sink operation.

• Up to 11 stages of limit testing with a b

• Digital I/O for stand-alone binning operations or interface to component handler.

• Programming language and remote interfaces — The SourceMeter uses the SCPI pro-

gramming language and two remote interfa

• Trigger-Link interface to Keithley Series 7000 switching hardware.

• Math expressions — 5 built-in, up to 5 user-defined (bus only).

• Reading and setup storage — Up to 2500 readings and seven setups (five user defaul

actory default, *RST default) can be stored and recalled.

• Closed-cover calibration — The instrument can be calibrated

or remote interface.

panel

e SourceMeter include:

Remote PreAmp.

arithmic staircase sweeps, source

uilt-in comparator for pass/fail testing.

ce ports (IEEE-488/GPIB and RS-232C).

either from the front

ts,

Getting Started 1-7

6430 SUB-FEMTOAMP REMOTE SourceMeter

OUTPUT

EDIT

TOGGLE

POWER

RANGE

DISPLAY

ON/OFF

AUTO

RANGE

EXIT ENTER

CONFIG MENU

SWEEP

TRIG

REL

LOCAL

FILTER

LIMIT

DIGITS SPEED

MEAS

FCTN

SOURCE

230

+/-

STORE

RECALL

EDIT

cбЦмкЙ=NJN

Front panel

Mainframe and Remote PreAmp familiarization

The following information should be reviewed before operating the instrument and is orga-

nized as follows:

• Mainframe front panel summary — Provides an overview of front panel controls the display

• Mainframe rear panel summary — Provides an overview of rear panel connectors.

• Remote PreAmp summary — Covers the Remote PreAmp connectors.

Mainframe front panel summary

The front panel of the Model 6430 is shown in Figure 1-1.

and

Measurement (MEAS) function keys:

V Measure volts. I Measure amps.

Measure ohms.

FCTN Perform math functions.

SOURCE function keys:

V Source voltage (V-Source). I Source current (I-Source).

▲ Increase source or compliance value. ▼ Decrease source or compliance value.

1-8 Getting Started

▲

Operation keys:

EDIT Select source or compliance reading for editing. TOGGLE Toggle display positions of source and measure readings, or display V and I

LOCAL Cancel remote operation. REL Enable/disable relative reading on present function. FILTER Display digital filter status for present function and toggle filter on/off. LIMIT Perform configured limit tests. TRIG Trigger a measurement from the front panel. SWEEP Start configured sweep.

DIGITS Change number of digits of display resolution. SPEED Change measurement speed by selecting accuracy or specifying NPLC. STORE Set buffer size and enable reading storage. RECALL Display stored readings and timestamp. CONFIG Press CONFIG and then appropriate key to configure function or operation. MENU Access and configure Main Menu selections. When entering numeric data, use to

EXIT Cancels selection. Use to back out of menu structures. ENTER Accepts selection.

RANGE keys:

▲ Moves to next higher range, increments digit, moves to next selection. ▼ Moves to next lower range, decrements digit, moves to previous selection.

AUTO Enables or disables measurement auto range.

measurements.

and Move through parameter values or selections within functions and operations.

clear reading to minimum absolute value.

Annunciators:

EDIT Instrument in edit mode. ERR Questionable reading, invalid cal step. REM Instrument in GPIB remote mode. TALK Instrument addressed to talk over GPIB. LSTN Instrument addressed to listen over GPIB. SRQ Service request over GPIB. REAR On = Remote Preamp not connected. Off = Remote Preamp connected. REL Relative measure reading displayed. FILT Digital filter enabled. MATH Math function enabled. 4W Remote sensing enabled. AUTO Autoranging enabled. ARM Source-measure operations being performed. TRIG External trigger source selected. * Reading being stored.

Source control:

ON/OFF Turns the source on or off.

Handle:

Pull out and rotate to desired position.

Mainframe rear panel summary

WARNING:

NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

WARNING:

NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

CAUTION:

FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

CAUTION:

FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

MADE IN

U.S.A.

INPUT/

OUTPUT

42V

PEAK

250V

PEAK

TRIGGER

LINK

4-WIRE

SENSE

LINE RATING

100-240VAC

50, 60, HZ

100VA MAX

RS232

IEEE-488

(ENTER IEEE ADDRESS

WITH FRONT PANEL MENU)

250V

PEAK

5V PK

V, Ω,

GUARD

GUARD SENSE

LINE FUSE

SLOWBLOW

2.5A, 250V

INTERLOCK-

DIGITAL I/O

REMOTE

PreAmp

INTERLOCK-

DIGITAL I/O

cбЦмкЙ=NJO

Model 6430 rear panel

The rear panel of the Model 6430 is shown in Figure 1-2.

Getting Started 1-9

Source-measure connectors:

`^rqflk When using the

Remote PreAmp, DO NOT use the INPUT/OUTPUT HI and 4-WIRE SENSE HI banana jacks. Using these source-measure banana jacks will result in errors and/or noise, and possible damage to the Remote PreAmp. Use the input/output HI and sense HI terminals on the Remote PreAmp.

INPUT/OUTPUT HI and LO Use to source-measure volts, amps, and ohms. 4-WIRE SENSE HI and LO Use for 4-wire remote sensing. V, Ω GUAR GUARD SENSE Use to correct for IR drops in Guard Output lead.

t^okfkd INPUT/OUTPUT LO is not internally connected to the chassis and can

The maximum allowable voltage differentials between the various terminals are provided on

the

rear panel of the mainframe (see Figure 1-2):

ever, to achieve rated accuracy, do not exceed 1V peak on the 100µA through 100mA ranges. F

or the lower current ranges (1pA through 10µA), do not exceed the maximum allowable resis-

tance. The maximum resistance for each of these current ranges are provided in Section 2 (see

Con

nections to DUT, 4-wire sensing specification clarifications).

D Driven guard for guarded measurements.

Earth (chassis) ground screw.

float up to 42V peak above chassis ground.

w voltage differentials — The maximum low voltage differentials are 5V peak. How-

1-10 Getting Started

SENSE

KEITHLEY

250V

Peak

40V

Peak

40V

Peak

GUARD

250V

Peak

250V

Peak

IN/OUT

42V

Peak

REMOTE Preamp

MAINFRAME

IN/OUT

HIGH

cбЦмкЙ=NJP

Remote preamp

High voltage differentials — Exceeding the high voltage differentials (42V peak and 250V

peak) could damage the instrument and create a shock hazard.

Remote PreAmp connector:

REMOTE PREAMP Connect the Remote PreAmp to the mainframe using the supplied

Interlock and digital input/output port:

INTERLOCK — DIGITAL I/O Male DB-9 connector for digital output lines, interlock, and

Power module:

Contains the AC line receptacle and the power line fuse.

Trigger link connector:

TRIGGER LINK 8-pin micro-DIN connector for sending and receiving trigger pulses.

RS-232 connector:

RS-232 Connector for RS-232 remote operation. Use a straight through (not

preamp cable (CA-176-1D).

component handler signals.

Use a trigger link cable or adapter, such as Models 8501-1, 8501-2, 8502, 8504.

null modem) DB-9 cable such as Keithley Model 7009-5.

GPIB connector:

IEEE-488 INTERFACE Connector for GPIB remote operation. Use a shielded cable

Remote PreAmp summary

The Remote PreAmp is shown in Figure 1-3 and terminal identification for the IN/OUT

HIGH and SENSE triax connectors is provided in Figure 1-4.

(Model 7007-1 or 7007-2).

Getting Started 1-11

(Input/Output High)

GUARD

(Cable Guard)

(Input/Output Low)

(4-Wire Sense High)

GUARD

(Cable Guard)

(Input/Output Low)

SENSE Triax Connector

IN/OUT HIGH Triax Connector

cбЦмкЙ=NJQ

Tri ax connectors

Preamp connector:

MAINFRAME Connect the Remote PreAmp to the mainframe using the supplied preamp cable.

Triax connectors:

`^rqflk When using the Remote PreAmp, DO NOT use the INPUT/OUTPUT HI

and 4-WIRE SENSE HI banana jacks on the mainframe. Using these source-measure banana jacks will result in errors and/or noise, and possi ble damage to the Remote PreAmp.

IN/OUT HIGH HI Center conductor – Input/Output HI

Guard Inner shell – Driven cable guard for guarded measurements LO Outer shell – Input/Output LO

SENSE HI Center conductor – 4-wire Sense HI

Guard Inner shell – Driven cable guard for guarded measurements LO Outer shell – Input/Output LO

klqb Cable guard is always available on the Guard terminals of IN/OUT HIGH and

SENSE regardless of the guard mode setting. Ohms guard can only be accessed at

GUARD banana jack on the mainframe.

the V,

The diagram on the Remote PreAmp (Figure 1-3) shows the maximum allowable voltage differentials between the various terminals. Exceeding the voltage differentials could damage the SourceMeter and create a shock hazard.

`^rqflk Instrument damage caused by excessive voltage differentials is not covered

by the warranty.

1-12 Getting Started

Power-up

t^okfkd To prevent electric shock, power must be off when connecting the Remote

PreAmp to the mainframe. If you wish to connect the Remote PreAmp at this time, proceed to Section 2, `зееЙЕнбеЦ=oЙгзнЙ=mкЙ^гй=нз=нЬЙ= ã~áåÑê~ãÉ. Important safety precautions are included with the connection procedure.

t^okfkd During

SourceMeter. These voltage spikes could be at hazardous levels (>42.4V peak) and could damage sensitive DUTs. Never touch external circuitry or the test leads when powering up the SourceMeter. It is good practice to always disconnect DUTs from the SourceMeter before powering up the unit.

t^okfkd T

o prevent electric shock, test connections must be configured such that the user cannot come in contact with conductors or any DUT that is in contact with the conductors. Safe installation requires proper shields, barriers, and grounding to prevent contact with conductors. tion and safety are the responsibility of th

Line power connection

The SourceMeter operates from a line voltage in the range of 85 to 250V at a frequency of 50 or 60Hz. The SourceMeter will also operate at 400Hz; accuracy specifications are not guaranteed however. Line voltage and line frequency are automatically sensed. Therefore, there are no switch

`^rqflk Operating

es to set. Check to be sure the operating voltage in your area is compatible.

possibly voiding the warranty.

Perform the following steps to connect the SourceMeter to line power and turn it on:

1. Before plugging in the power cord, make sure the front panel power switch is in the of (0) position.

2. Connect the female end of the supplied power cord to the AC receptacle on the rear pane

the power-up, voltage spikes may appear on the terminals of the

Operator protec-

e person installing the product.

the instrument on an incorrect line voltage may cause damage,

t^okfkd The

3. Turn on the instrument by pressing the front panel power switch

power cord supplied with the SourceMeter contains a separate ground for use with grounded outlets. When proper connections are made, instrument chassis is connected to power line ground through the ground wire in th

e power cord. Failure to use a grounded outlet may result in personal

injury or death due to electric shock.

to the on (1) position.

Power-up sequence

On power-up, the SourceMeter performs self-tests on its EPROM and RAM and momentarily lights all segments and annunciators. If a failure is detected, the instrument momentarily displays an error message, and the ERR annunciator turns on. Error messages are listed in Appendix B.

klqb If a problem develops while the instrument is under warranty, return it to Keithley

Instruments, Inc., for repair.

If the instrument passes the self-tests, the firmware revision levels are displayed. For example:

REV A01 A02

where: A01 is the main board ROM revision.

A02 is the display board ROM revision.

Also displayed is the line frequency (50, 60, or 400Hz). (If the wrong frequency is displayed, it can be manually set as covered below). The communication interface status is briefly displayed. If the IEEE-488 bus is the presently selected interface, the identification message will include the primary address. For example, if the primary address is 24 (factory default), the “IEEE Addr=24” message is displayed. If the RS-232 interface is selected, the “RS-232” mes sage is displayed.

Getting Started 1-13

After the power-up sequence, the instrument goes to its normal display state with the output off (red OUTPUT indicator light off). With the output off, the “OFF” message is displayed, and dashes replace the reading. The “OFF” message indicates that the NORMAL output-off state is selected. See Section 12, Output configuration for details.

System identification

To obtain the serial number and revision information, use the MENU/GENERAL/SERIAL # selection or the *IDN? query via remote.

Line frequency setting

At the factory, the SourceMeter is configured to sense the power line frequency and automatically select the frequency setting. If, however, the line power source is noisy, the SourceMeter may select the wrong setting on power-up. If this situation occurs, noisy measurement readings will result, and accuracy may be affected. You can manually set the line frequency from the front panel or via remote as covered below.

Front panel line frequency

Set the line frequency from the front panel as follows:

1. Press the MENU key to display MAIN MENU.

1-14 Getting Started

2. Using the right arrow key, select AD-CTRL then press ENTER to display A/D

3. Select LINE-FREQ, then press ENTER to display LINE FREQUENCY.

4. Place the cursor on 50Hz, 60Hz, or AUTO, and press ENTER. (Use 50Hz for 400Hz

5. Press EXIT to return to normal display.

Remote command line frequency

Table 1-1 summarizes remote commands used to control line frequency. See Section 17 for

additional information on using these commands.

Programming examples

50 or 400Hz operation:

:SYST:LFR 50

Auto frequency operation:

:SYST:LFR:AUTO ON

q~ÄäÉ=NJN

Line frequency remote commands

NTROLS.

operation.)

Commands Description

:SYSTem:LFRequency <freq> :SYSTem:LFRequency:AUTO <state>

Fuse replacement

A rear panel fuse protects the power line input of the SourceMeter. If the line fuse needs to

be replaced, perform the following steps:

1. The fuse is located in a drawer above the A of the fuse the fuse dra

2. Slide the fuse drawer out to gain access to the fuse. Note that the fuse drawer doe pull all

`^rqflk For

3. Snap the fuse out of the drawer and replace it with the same type (250V, 2.5A 5 × 20mm). The Keithley part number is FU-72.

4. Push the fuse drawer back into the power module.

Select line frequency (freq = 50 or 60). Enable/disable auto frequency (state = ON or OFF).

C receptacle. See Figure 1-2. At the bottom

drawer is a small tab. At this location, use a small bladed screwdriver to pr

wer open.

s not

the way out of the power module.

continued protection against fire or instrument damage, replace the fuse only with the type and rating listed. If the instrument repeatedly blows fuses, locate and correct the cause of the problem before replacing the fuse.

Display

Display format

Getting Started 1-15

The SourceMeter display is used primarily to program source and compliance values and display measured readings. Annunciators, which are located along the top of the reading/ message display, indicate various states of operation, as covered previously in Front panel summary.

On power-up, the top (primary) display is used for measurements when the output is on (with the output off, “OFF” or “ZER” is displayed). The bottom-left display is used for the pro grammed source value (Vsrc or Isrc), and the bottom-right display is used for the programmed compliance (Cmpl) limit.

Reading information can be displayed using either engineering units or scientific notation in either fixed- or floating-point format. Use the GENERAL/NUMBERS selection of the main MENU to select the display format, as discussed under Menus later in this section.

Engineering units example: 1.23456µA

Scientific notation example: 1.23456e -6

EDIT key

The SourceMeter must be in the edit mode to set source and compliance values. The edit mode is selected by pressing the EDIT key (EDIT annunciator on). The editing cursor (flashing digit) appears for the source or compliance reading. If a value is not edited within six seconds, the edit mode is cancelled. While in the edit mode, the EDIT key toggles between the source value and compliance value. See Section 3 for details on setting source and compliance values.

TOGGLE key

The TOGGLE key manipulates readings on the top display and on the bottom-left display. It has no effect on the compliance reading (Cmpl), which is located on the bottom right. Each press of the TOGGLE key sequences through the display options.

With the voltage (V) or current (I) measurement function selected, the TOGGLE key lets you display both the current and voltage measurements at the same time. It also allows you to toggle display positions of the source and measure readings.

With the ohms (Ω) measurement function selected, the ohms measurement is always dis- played on the top display. The TOGGLE key lets you display either the programmed source value, the current measurement, or the voltage measurement on the bottom-left display.

The TOGGLE key is also used to display statistical data on readings stored in the data store. This function is performed from the data store RECALL mode.

klqb If FCTN, REL, or Limits is enabled, the TOGGLE key is disabled.

1-16 Getting Started

Status and error messages

Status and error messages are displayed momentarily. During SourceMeter operation and programming, you will encounter a number of front panel messages. Typical messages are either status or error in nature and are listed in Appendix B.

Remote display programming

The display can also be controlled by various SCPI :DISPlay subsystem commands. Table 1-2 summarizes basic commands. See :D mation on using these commands and also Disabling

q~ÄäÉ=NJO

Basic display commands

Command Description

:DISPlay:ENABle <state> Enable/disable display (state = ON or OFF). :DISPlay:CNDisplay Return to source-measure display. :DISPlay:DIGits <n> Set display resolution (n = 4 to 7).

ISPlay subsystem in Section 17 for more infor-

front panel display later in this section.

Front panel tests

Use the TEST/DISPLAY TESTS selection of the main MENU to test various aspects of the front panel. Test selections include:

• KEYS — Front panel keys are tested. Pressing a key displays a message that identif ey. Pressing EXIT twice cancels this test.

that k

• DISPLAY PATTERNS — Use this selection to turn on all display pixels and annuncia-

tors. Subsequent key presses cycle through tests that turn off annunciators an

els of each digit, turn on the rows of the top-left display digit, and turn on all annun-

pix ciators and pixels of each digit in a sequential manner. Press EXIT to cancel this test.

• CHAR SET — This test displays special characters. Press

See Menus later

in this section for more menu information.

Disabling front panel display

Front panel display circuitry can be disabled to allow the instrument to operate at a higher

speed. While disabled, the display is frozen with the following message:

FRONT PANEL DISABLED Press LOCAL to resume.

As reported by the message, all front panel controls (except LOCAL, TRIG, and OUTPUT

ON/OFF) are

disabled.

ies

d corner

EXIT to cancel the test.

Getting Started 1-17

▲

Front panel control

Front panel display circuitry is controlled from the DISABLE DISPLAY configuration menu, which is accessed by pressing CONFIG and then EDIT (or TOGGLE). To select an option (NOW, NEVER, SWEEP, or STORE), use the desired option, then press ENTER.

The options for DISABLE DISPLAY are explained as follows:

NOW — Select this option to disable the display now.

NEVER — Select this option if you do not want the display to disable.

SWEEP — Select this option if you want the display to disable while performing a sweep.

The display will disable as soon as sweep is started. The display will automatically re-enable

after the sweep is completed.

STORE — Select this option if you want the display to disable when storing source-measure

readings in the buffer. The display will disable as soon as the buffer is enabled. The display

will automatically re-enable after the storage process is completed. Note that with this

option, the display will disable while performing a sweep. Sweep readings are automatically

stored in the buffer.

and keys to place the cursor on the

Remote command programming

Use the following SCPI commands to enable or disable the front panel display circuitry:

:DISPlay:ENABLe OFF Disable the display

:DISPlay:ENABLe ON Enable the display

Default settings

By using appropriate menu selections, you can save and recall various instrument setups, define the power-on configuration, or restore factory defaults as outlined below.

Saving and restoring user setups

You can save and restore up to five of your own user setups using the following procedures.

Saving setups

1. Select the various instrument operating modes you wish to save.

2. Press the MENU key, select SAVESETUP, then press ENTER.

3. From the SAVESETUP menu, select GLOBAL, then press ENTER.

4. From the GLOBAL SETUP MENU, select SAVE, then press ENTER.

5. Select the setup position (0-4) to save, then press ENTER to complete the process.

1-18 Getting Started

Restoring setups

1. Press the MENU key, select SAVESETUP, then press ENTER.

2. From the SAVESETUP menu, select GLOBAL, then press ENTER.

3. From the GLOBAL SETUP MENU, select

4. Select the setup position (0-4) to restore, then pr

Power-on configuration

You can also define which of the stored setups (factory default or user) the instrument

assumes as the power-on configuration as follows:

RESTORE, then press ENTER.

ess ENTER to complete the process.

1. Press the MENU key, select SA

2. From the SAVESETUP menu, select GLOBAL, then press ENTER.

3. From the GLOBAL SETUP MENU, select

4. From the SET POWER-ON DEFAULT menu, choose the power-on configura BENCH

5. If you chose to use a user setup as the power-on configuration, select th number

or GPIB (see below), or USER-SETUP-NUMBER.

, then press ENTER.

Factory default settings

As summarized in Table 1-3, there are two sets of factory defaults, BENCH (front panel)

and GPIB (remote). You can restore either of these default conditions as follows:

1. Press the MENU key, select SA

2. From the SAVESETUP menu, select GLOBAL, then press ENTER.

3. From the GLOBAL SETUP MENU, select

4. Select BENCH or GPIB defaults as desired, then press ENTER to process.

VESETUP, then press ENTER.

POWERON, then press ENTER.

tion:

e user setup

VESETUP, then press ENTER.

RESET, then press ENTER.

complete the

q~ÄäÉ=NJP=

Factory default settings

Setting BENCH default GPIB default

A/D Controls:

Auto-zero On On

Line frequency No effect No effect Beeper On On Data Store No effect No effect Digital output* 15 or 7 15 or 7 Digits 5.5 5.5 FCTN Power (off) Power (off) Filter: On On

Auto filter On On

Moving filter count** 1 1

Advanced filter Off (5% noise tol) Off (5% noise tol) Median filter rank** 0 0 Repeat filter count** 1 1

GPIB address No effect No effect Guard Cable Cable Limit tests:

DigOut:

Size 4-bit 4-bit

Mode: Grading Grading

Binning control Immediate Immediate

Auto clear: Disabled Disabled

Delay 0.00001 sec 0.00001 sec Clear pattern* 15 or 7 15 or 7

H/W limits:

Control Disabled Disabled

Fail mode: In compliance In compliance

Cmpl pattern* 15 or 7 15 or 7

S/W limits:

Lim 2, 3, 5-12:

Control Disabled Disabled Low limit: -1.0 -1.0

Low pattern* 15 or 7 15 or 7

High limit: +1.0 +1.0

High pattern* 15 or 7 15 or 7

Pass (all tests):

Pass pattern* 15 or 7 15 or 7

Source memory location Next Next EOT mode EOT EOT

Numbers No effect No effect Ohms source mode Manual Manual Offset compensated ohms Off Off Output Off Off

Interlock Disabled Disabled Off state Normal Normal Auto-off Disabled Disabled

* 15 if digout size is 4-bit, 7 if digout size is 3-bit.

** Changes with ra

nge when auto filter is enabled.

Getting Started 1-19

1-20 Getting Started

q~ÄäÉ=NJP=EÅçåíKF

Factory default settings

Setting BENCH default GPIB default

Power-on default No effect No effect Ranging (measure):

Auto range Enabled Enabled

Rel Off Off

Va l u e 0.0 0.0 RS-232 No effect No effect Source delay 3ms 3ms

Auto-delay Disabled Disabled Speed Hi accuracy (10 PLC) Hi accuracy (10 PLC) Sweep Linear staircase Linear staircase

Start 0V or 0A 0V or 0A

Stop 0V or 0A 0V or 0A

Step 0V or 0A 0V or 0A

Sweep count 1 1

Sweep Pts 2500 2500

Source ranging Best fixed Best fixed Voltage protection NONE NONE Triggered source:

Control Disabled Disabled

Scale factor +1.0 +1.0 Triggering:

Arm layer:

Trigger layer:

Event Immediate Immediate Count 1 1 Output trigger Line #2, Off Line #2, Off

Event Immediate Immediate Count 1 1 Output triggers Line #2, All off Line #2, All off Delay 0.0 sec 0.0 sec

Remote setups

You can also save and recall setups via remote using the following SCPI commands:

• Save and recall user setups using *SAV and *RCL (Section 15).

• Restore GPIB defaults using *RST (Section 15).

• Restore bench defaults using :SYSTem:PRESet (Section 17).

• Save the power-on configuration using :SYSTem:POSetup (Section 17).

Menus

Main menu

q~ÄäÉ=NJQ==

Main menu

Getting Started 1-21

The following paragraphs discuss the main menu, configuration menus, and rules to navi-

gate menus.

Use the MENU key to access the Main Menu to select, configure, and/or perform various instrument operations. These include default setup conditions, communications (GPIB or RS-232), calibration, front panel tests, digital output states, auto zero and NPLC caching, timestamp, numeric display format, and the beeper.

The Main Menu structure is summarized in Table 1-4. Use the Rules to navigate menus to check and/or change menu options. Figure 1-5 shows the main menu tree.

Menu item

SAVESETUP

GLOBAL

SOURCE MEMORY

COMMUNICATION

GPIB

RS-232

SAVE RESTORE POWERON

BENCH GPIB USER SETUP NUMBER

RESET

SAVE RESTORE

BAUD

BITS PA RI TY

TERMINATOR

FLOW CTRL

Description Parameters

Configure setup conditions. Control instrument settings. Save present SourceMeter setup to memory location. Return the SourceMeter to setup saved in memory. Select the power-on default setup. Powers-on to BENCH defaults. Powers-on to GPIB defaults. Powers-on to user setup. Returns unit to BENCH or GPIB defaults. Control memory sweep source setup configurations. Save present setup configuration to memory location.

Return to configuration saved in memory location. Select and configure remote interface. Select GPIB (IEEE-488 Bus), set primary address, GPIB protocol (see Appendix G).

Select the RS-232 interface, set parameters. Select baud rate.

Select number of data bits. Select parity.

Select terminator.

Select flow control.

0 to 4 0 to 4

See Table 1-3. See Table 1-3. 0 to 4 See Table 1-3.

1 to 100 1 to 100

0 to 30 (Default: 24)

57600, 38400, 19200, 9600, 4800, 2400, 1200, 600, 300 7 or 8 NONE, ODD, EVEN CR, CR+LF, LF, or LF+CR NONE or XON/XOFF

1-22 Getting Started

q~ÄäÉ=NJQ==EÅçåíKF

Main menu

Menu item

CAL

TEST

DISPLAY TESTS

KEYS DISPLAY PATTERNS CHAR SET

A/D CTRL

AUTO ZERO

DISABLE ENABLE ONCE

LINE FREQ

NPLC CACHE

DISABLE ENABLE REFRESH RESET

GENERAL

DIGOUT SERIAL# TIMESTAMP NUMBERS

BEEPER

Description Parameters

Calibrate SourceMeter. (See Section 19.)

Perform tests on SourceMeter. Test front panel keys and display digits. Test front panel keys. Test display pixels and annunciators. Test special display characters. Control auto zero, line frequency, and NPLC caching. Control auto zero. Disable auto zero. Enable auto zero. Force auto zero immediate update. Set the line frequency.

50 or 60Hz, or AU

TO Control NPLC caching. Disable NPLC caching. Enable NPLC caching. Update all NPLC values in cache immediately. Clear NPLC cache of all NPLC values. Select general operations. Set Digital I/O port bit pattern. Display serial number, firmware revision, SCPI version.

0-15 YES or NO

Reset timestamp. Select engineering units or scientific notation display format.

ENGR, SCIENTIFIC

Enable or disable beeper.

NOTES

1. Top level menu choices indicated in bold. Indent

2. When the remote operation interface selection (GPIB or RS-232) is check or change options of the selected interface, you must re-enter the menu structure.

3. Password is required to unlock calibration. (See Section 19.)

4. Press EXIT key to cancel test.

5. Disabling auto zero will reduc

e measurement accuracy.

ation identifies each lower submenu level.

changed, the SourceMeter performs a power-on reset. To

Press MENU key (Use and to select item, then press ENTER)

▲

SAVESETUP

GLOBAL

SAVE RESTORE POWERON

BENCH GPIB USER-SETUP-NUMBER

RESET

SOURCE MEMORY

SAVE RESTORE

COMMUNICATION

GPIB RS-232

BITS PARITY TERMINATOR FLOW-CTRL

CAL*

UNLOCK EXECUTE VIEW-DATES SAVE LOCK CHANGE-PASSWORD

TEST

DISPLAY-TESTS

BAUD

KEYS DISPLAY-PATTERNS CHAR-SET

A/D CTRL

AUTO-ZERO LINE-FREQ

GENERAL

DIGOUT SERIAL# TIMESTAMP NUMBERS BEEPER

NPLC-CACHE

* Without PreAmp connected

cбЦмкЙ=NJR

Main menu tree

Getting Started 1-23

1-24 Getting Started

Rules to navigate menus

Many source-measure functions and operations are configured from the front panel menus.

Use the following rules to navigate through these configuration menus:

klqb Rules to edit

measure procedure.”

• A menu item is selected by placing the cursor on it tion is denoted by the blinking menu item or option. The left and right arrow keys control cursor position.

• A displayed arrow on the bottom line indicates (or messag

• A source or parameter value range is changed by placing the cursor on the range designator (i.e., k, M, G, etc.) that when the ne

ses by a decade.

decrea

• A parameter value is keyed in by placing the cursor on the digit to be cha one of

the following methods:

klqb Y

ou can clear a parameter value by pressing the MENU key.

-Use the SOURCE digit.

- Use the number keys (0 through 9) to key in the value at the selected digit.

- Use the ± key to change source value polarity, regardless of cursor position.

• Boolean selections (such as ON/OFF and HIGH/LOW) are toggled by placing the cursor on the selection and pressing a SOURCE or RANGE up or down arrow key.

• A change is only executed when ENTER is pressed. Entering an invalid parameter generates an error, and the entry is ignored. However, entering an out-of-range value sma

ll or too large) selects the lower or upper limit, respectively.

• The EXIT key is used to back out of the menu structure. Any change that is not entere is cancelled when EXIT is pressed.

source and compliance values are found in Section 3, “Basic source-

and pressing ENTER. Cursor posi-

there are one or more additional items

es) to select from. Use the appropriate cursor key to display them.

and using the SOURCE ▲ or ▼ or RANGE ▲ or ▼ keys. Note

xt higher or lower source range is selected, the reading

or ▼ or RANGE ▲ or ▼ keys to increment or decrement the

▲

increases or

nged and using

(too

Editing source and compliance values

▲▲▲

▲

Use the following keys to edit source and compliance values:

Getting Started 1-25

• EDIT: selects the source or compliance display ar in the field to be edited. If no key is pressed within a few sec

appe

be cancelled automatically.

will

field for editing. A blinking cursor will

onds, the edit mode

•EDIT and : places the display cursor on the display digit to be changed.

• SOURCE

pressing either

• RANGE

or ▼: increments or decrements the source or compliance value. Note that

▲

of these keys will automatically enable the source edit mode.

or ▼: selects the source or compliance range.

▲

• Numeric keys (0-9): allow you to directly enter source or compliance values.

• EXIT: exits the edit mode without waiting for the time-out period.

The basic procedure for editing source and compliance values is outlined below. See Bas

source-measure procedure in Section 3 for more details.

1. Press the EDIT key until the blinking cursor is

in either the source or compliance dis-

play field to be edited.

2. If desired, use the RANGE

and ▼ keys to select the desired source or compliance

▲

range.

3. To simply increment or decrement the display

value, use the EDIT and keys to place the blinking cursor on the digit to be changed, then increment or decrem v

alue with the SOURCE

updated immediately; you need not press ENTER to complete the process.

and ▼ keys. Note that the source or compliance value will

▲

4. To enter the source or compliance value directly, simply key in the desired value w the numeric k

eys while the cursor is blinking. Again, the source or compliance value

will be updated immediately.

ent the

ith

Toggling the source and measure display fields

Normally the measured reading value will appear in the upper, main display line, while the source and compliance values will appear in the left and right fields respectively of the lower display line. You can toggle the source and measure display fields by pressing the TOGGLE key to place the source and measure values in the desired positions.

1-26 Getting Started

Configuration menus

There are a number of configuration menus that can be accessed by pressing the CONFIG key followed by the appropriate function or mode key. For example, you can configure the volt age source by pressing CONFIG then SOURCE V. Configuration menus, which are summarized in Table 1-5 through Table 1-10, are available for the following operating modes:

These various configuration menus are covered in detail in the pertinent sections of this manual.

• Measure functions (Ω, FCTN): Table 1-5.

• SOURCE V, SOURCE I, and RANGE: Table 1-6.

• REL, FILTER, and LIMIT: Table 1-7.

• TRIG: Table 1-8.

• SWEEP, DIGITS, SPEED, and STORE: Table 1-9.

• ON/OFF OUTPUT and Display (EDIT or TOGGLE): Table 1-10.

Getting Started 1-27

q~ÄäÉ=NJR

Measurement configuration menus

Configuration menu item Description CONFIG MEAS Ω Configure ohms measure.

CONFIG OHMS

SOURCE Select manual or auto source for ohms.

MANUAL AUTO

GUARD Select ohms or cable guard.

OHMS CABLE

SRC RDBK Enable/disable source readback.

DISABLE ENABLE

OFFSET COMPENSATION Enable/disable offset compensation.

DISABLE ENABLE

CONFIG FCTN Configure functions. CONFIGURE FUNCTION

POWER Enable power function. OFF COMP OHMS Enable offset-compensated ohms, program parameters. VO LT-C OE FF Enable voltage coefficient, program parameters. VA R AL P HA Enable varistor alpha, program parameters. %DEV Enable percent deviation, program parameters.

1-28 Getting Started

q~ÄäÉ=NJS

Source and range configuration menus

Configuration menu item Description

CONFIG SOURCE V Configure V source.

CONFIGURE V SOURCE

PROTECTION Select voltage protection.

DELAY Program delay between source and measure.

AUTO DELAY Enable/disable auto delay.

GUARD Select ohms or cable guarding.

TRIG Control triggered source.

CONFIG SOURCE I Configure I source CONFIGURE I SOURCE

GUARD Select ohms or cable guarding.

DELAY Program delay between source and measure.

AUTO DELAY Enable/disable auto delay.

TRIG Control triggered source.

DISABLE ENABLE

OHMS CABLE

CONTROL Enable/disable triggered source.

DISABLE ENABLE

SCALE FACTOR Program scale factor.

OHMS CABLE

DISABLE ENABLE

CONTROL Enable/disable triggered source.

DISABLE ENABLE

SCALE FACTOR Program scale factor.

CONFIG ▲ RANGE Program upper range limit.

CONFIG ▼ RANGE Program lower range limit.

CONFIG AUTO RANGE

AUTO RANGE TYPE Select auto range type.

SINGLE SRC MTR Select single SourceMeter operation.

MULTIPLE Select multiple SourceMeter, program soak time.

Getting Started 1-29

q~ÄäÉ=NJT

Rel, filter, and limit configuration menus

Configuration menu item Description

CONFIG REL Program REL value.

CONFIG FILTER Configure filter. AUTO FILTER Enable/disable auto filter.

DISABLE ENABLE

CONFIG LIMIT Configure limit tests. CONFIGURE LIMITS MENU

DIGOUT Program Digital I/O bit patterns for pass/fail.

SIZE Select I/O number of bits.

3-BIT 3-bit size 4-BIT 4-bit size 16-BIT 16-bit size (2499-DIGIO option only).

MODE Select Digital I/O mode.

GRADING Pass if within HI/LO limits.

IMMEDIATE Stop test after first failure. END Stop test at end of sweep.

SORTING Fail if outside limits, program fail pattern.

AUTO CLE AR Enable/disable auto clear.

DISABLE Disable auto clear. ENABLE Enable auto clear, program pass/fail pattern.

H/W LIMITS Control and set fail mode for Limit 1 (compliance) test.

CONTROL Control Limit 1 test.

DISABLE Disable Limit 1 test. ENABLE Enable Limit 1 test.

FAIL MODE Select Limit 1 fail mode.

IN Fail when in compliance, program bit pattern. OUT Fail when out of compliance, program bit pattern.

S/W LIMITS Control LIM2, 3, 5-12 tests limits and bit patterns.

CONTROL Enable/disable limit tests.

DISABLE Disable test.

ENABLE Enable test. LOLIM Set low limit. HILIM Set high limit. PA SS Set pass Digital I/O bit pattern.

PA SS Set limit test pass conditions.

DIGIO PATTERN Set pass conditions Digital I/O bit pattern. SRC MEM LOC Set pass conditions next source memory location.

NEXT Use next location.

LOCATION# Specify location number.

EOT MODE Set Digital I/O line 4 to act as EOT or BUSY signal.

BUSY Set line 4 HI while unit is busy (3-bit mode). /BUSY Set line 4 LO while unit is busy (3-bit mode). EOT Output line 4 HI pulse at end of test (3-bit mode). /EOT Output line 4 LO pulse at end of test (3-bit mode).

1-30 Getting Started

q~ÄäÉ=NJU

Trigger configuration menu

Configuration menu item Description

CONFIG TRIG Configure triggering.

CONFIGURE TRIGGER

ARM LAYER Configure trigger model arm layer.

TRIG LAYER Configure trigger layer of trigger model.

HALT Return unit to idle state.

ARM IN Select arm layer detection event.

IMMEDIATE Immediate event detection. GPIB GPIB GET or *TRG. TIMER After timer interval elapses, enter interval. MANUAL Front panel TRIG key. TLINK Enter TLINK line and state.

ONCE Bypass event detection once. NEVER Never bypass event detection.

↓STEST When Digital I/O SOT line is pulsed low.

ONCE Bypass event detection once. NEVER Never bypass event detection.

↑ STEST When Digital I/O SOT is pulsed high.

ONCE Bypass event detection once. NEVER Never bypass event detection.

↑↓STEST When Digital I/O SOT line is pulsed high or low.

ONCE Bypass event detection once. NEVER Never bypass event detection.

ARM OUT Configure arm layer output trigger.

LINE Select trigger link output line (1-4). EVENTS Enable/disable events.

TRIG LAYER EXIT Enable (ON) or disable (OFF) on exiting trigger layer. TL ENTER Enable (ON) or disable (OFF) on entering trigger layer.

COUNT Specify arm count.

FINITE Programmable count. INFINITE Never ending count.

TRIGGER IN Select trigger layer detection event.

IMMEDIATE Trigger event occurs immediately. TRIGGER LINK Select trigger link line as event (1-4).

TRIGGER OUT Configure trigger layer output trigger.

LINE Select trigger link line (1-4). EVENTS Enable (ON) or disable (OFF) for SOURCE, DELAY,

and MEAS. DELAY Program trigger delay time. COUNT Program trigger count.

Getting Started 1-31

q~ÄäÉ=NJV

Sweep, digits, speed, and data store configuration menus

Configuration menu item Description

CONFIG SWEEP Configure sweeps.

CONFIGURE SWEEPS

TYPE Select sweep type.

STAIR Staircase sweep, program START, STOP, STEP. LOG Log sweep, program START, STOP, # POINTS. CUSTOM Custom sweep, program parameters.

# POINTS Program number of sweep points. ADJUST POINTS Set individual point values. INIT Set first point value.

SRC MEMORY Source memory sweep, set parameters.

START Set first point value. # POINTS Set number of points.

SWEEP COUNT Set sweep count.

FINITE Program sweep count value. INFINITE Never-ending sweep.

SOURCE RANGING Set sweep ranging mode.

BEST FIXED Best fixed range based on maximum value. AUTO RANGE Auto range during sweep. FIXED Set fixed source range.

CONFIG DIGITS Set display number of digits. DISPLAY DIGITS Select 3.5, 4.5, 5.5, or 6.5.

CONFIG SPEED Set measurement speed. SPEED ACCURACY MENU

FAST Fast speed. MED Medium speed. NORMAL Normal. HI ACCURACY Maximum accuracy. OTHER Program NPLCs (number power line cycles).

CONFIG STORE Configure data store timestamp. STORE TIMESTAMP

ABSOLUTE Absolute timestamp. D ELTA Delta timestamp.

1-32 Getting Started

q~ÄäÉ=NJNM

Output and display configuration menus

Configuration menu item Description

CONFIG ON/OFF OUTPUT Configure output.

CONFIGURE OUTPUT

OFF STATE Set up output off state.

AUTO OFF Enable disable auto off mode.

INTERLOCK Enable/disable interlock.

CONFIG EDIT or TOGGLE Enable/disable display. DISABLE DISPLAY

NOW Disable display immediately. NEVER Never disable display. SWEEP Turn display off during sweep. STORE Turn display off during buffer store.

NORMAL Normal off state. ZERO Zero off state. GUARD Guard mode off state.

DISABLE Keep output on. ENABLE Turn output off after each measurement.

DISABLE Disable interlock. ENABLE Enable interlock.

Connections

• Connection Overview — Explains how to connect the Remote PreAmp to the main-

frame, provides basic information on the input/output co

ixture interlock.

test f

nnectors, and discusses using a

• Connections to

including 4-wire remote sensing, 2-wire local sensing, cable and ohms guard, as we guard sele

• Guard

ing Methods — Discusses different guarding methods including cable guard,

ohms gua

DUT — Covers various methods for making connections to the DUT,

ction.

rd, and guard selection.

ll as

2-2 Connections

Connection overview

t^okfkd To prevent electric shock, test connections must be configured such that

the user cannot come in contact with conductors or any DUT that is in contact with the conductors. Safe installation requires proper shields, barriers, and grounding to prevent contact with conductors. tion and safety are the responsibility of th

Operator protec-

e person installing the product.

t^okfkd During power

t^okfkd Up to 21

electrical shock that could cause injury or death, NEVER make or break connections to the SourceMeter while it is on or is connected to an external source.

-up, voltage spikes may appear on the terminals of the

0V may be present on the output and guard terminals. To prevent

Connecting Remote PreAmp to the mainframe

t^okfkd Potentially hazardous source voltage is routed from the mainframe to the

Remote PreAmp via the preamp cable. Adhere to the following safety precautions to prevent electric shock:

SourceMeter must be turned off before connecting (or disconnect-

√ The

ing) the Remote PreAmp to the mainframe.

√ When

√ AL

not using the Remote PreAmp, disconnect the preamp cable at

rear panel of the mainframe. DO NOT leave the preamp cable con-

the nected to the mainframe if the other end is not

eAmp.

WAYS re-install the plastic safety cover onto the mainframe preamp

connec

tor whenever the Remote PreAmp is not being used.

connected to the Remote

Use the supplied preamp cable to connect the Remote PreAmp to the mainframe as follows:

1. From the front panel of the SourceMeter, turn the POWER off.

2. Connect the preamp cable to the Remote PreAmp. The preamp conne Remote P

reAmp is labeled “MAINFRAME.”

ctor on the

3. At the rear panel of the mainframe, remove the plastic safety cover from the preamp ctor. This connector is labeled “REMOTE PreAmp.” The plastic cover is

conne

connector with two screws. Hold on to the plastic cover and the retaining scre

to the

ver the Remote PreAmp is not being used, the plastic safety cover must be re-

Whene installed on the mainframe preamp connector.

4. Connect the other end of the preamp cable to the mainframe.

Source-measure terminals

The SourceMeter can be used with or without the Remote PreAmp. However, when not using the Remote PreAmp, the lower current ranges and higher resistance ranges are not available. The small Remote PreAmp can be positioned ne cables. Short triax cables help minimize cable capacitance which could adversely affect the response time of low current measurements.

Connections 2-3

secured

ws.

ar the DUT allowing the use of short triax

When not using the Remote PreAmp, all connections to the S rear panel of the mainframe using cables terminated with banana plugs. These terminals are summarized in Section 1 (Figure 1-2). When using the Remote PreAmp, not all source-measure terminals are available at the preamp and must be accessed at the mainframe. Table 2-1 lists each

q~ÄäÉ=OJN

Terminal equivalency between mainframe and Remote PreAmp

Mainframe terminal Equivalent Remote PreAmp terminal

INPUT/OUTPUT HI INPUT/OUTPUT LO 4-WIRE SENSE HI 4-WIRE SENSE LO V, Ω GUARD GUARD SENSE Chassis ground (screw)

N/A = Not available at Remote PreAmp.

klqb Whene

mainframe terminal and the equivalent Remote PreAmp terminal.

IN/OUT HI IN/OUT LO SENSE HI N/A GUARD (cable guard only) N/A N/A

ver the Remote PreAmp is connected to the mainframe, adhere to the follow-

ing rules to achieve best performance:

√ Do not

√ Access input/output low at

√ Do not

use INPUT/OUTPUT HI and 4-WIRE SENSE HI on the mainframe.

Access these terminals at the Remote PreAmp.

the Remote PreAmp or at the mainframe, but not both.

est circuit common should be tied to one point to avoid ground loops whic

enerate error currents.

could g

use guard from the mainframe and the Remote PreAmp at the same time.

Use one or the other.

ourceMeter are made at the

2-4 Connections

cбЦмкЙ=OJN

Basic input/output configurations

Center Conductor

Inner Shield

Outer Shield

HI (In/Out or Sense)

GUARD (Cable)

LO (In/Out)

A) Remote PreAmp T

riax Connector Configuration

6430 Mainframe

INPUT/OUTPUT

Zener

Clamp

42V Peak DC Max

10.5mA Max

Chassis

Ground

C) Mainframe Input/Output Configuration

Chassis Ground Screw

(on Rear Panel)

Triax to Alligator Clip

HI (center conductor)

Red boot

Guard (inner shield)

LO (outer shell)

Black boot

Green boot

B) T

erminal identification for 6430-322-1A cable

Remote PreAmp triax connectors

conductor of the connector (and triax cable) is HI (input/output or sense), and the inner shield is cable guard. The outer shield (shell) of each triax connector is input/output LO.

The electrical configuration of each triax connector is shown in Figure 2-1A. The center

klqb The 6430-322-1A tri

triax connector on one end and booted alligator clips on the other end. (See Figure 2-1B.) When connected to the Remote PreAmp, the alligator clip with the red b HI, the one with the blac

The outer shells of the triax connectors are connected to Input/Output LO. Therefore, for

oating source-measure operations, a voltage potential will be present on the shells of the triax

fl connectors. Even with the output of the SourceMeter off, voltage could be applied from the external test circuit. As a general rule, do not touch the triax cables while any power is present.

t^okfkd T

ax cable (which is a supplied accessory) is terminated with a

oot is

k boot is GUARD and the one with the green boot is LO.

o prevent injury from electric shock, DO NOT touch the triax cables of the Remote PreAmp while the SourceMeter is turned on or any external source is turned on.

Input/output LO and chassis ground

Input/Output LO is not directly connected to chassis ground. For test circuits that require Input/Output LO connected to chassis ground, you can use the supplied chassis ground plug. Connect the lug end of the cable to the chassis ground screw on the rear panel of the main frame, and plug the other end into the INPUT/OUTPUT LO banana jack.

With no Input/Output LO-to-chassis ground connection, floating source-measure operations (up to 42V peak) can be performed. Inside the mainframe, a zener clamp (Figure 2-1C) is used to isolate Input/Output LO from the chassis.

t^okfkd Exceeding 42V between Input/Output LO and chassis ground creates a

shock hazard and could cause damage to the SourceMeter that is not cov ered by the warranty.

`^rqflk Do not connect any external sources between Input/Output LO and chassis

ground. Current exceeding 10.5mA will damage the zener clamp (Figure

Test fixture interlock

A test fixture interlock switch can be used with the SourceMeter to help protect the DUT. The SourceMeter output will turn off when the lid of the test fixture is opened. However, you must ALWAYS assume that power is present until you verify that the SourceMeter output is off.

Connections 2-5

2-1C). Such damage is not covered by the warranty.

t^okfkd To prevent electric shock, test connections must be configured such that

the user cannot come in contact with conductors or any DUT that is in contact with the conductors. Safe installation requires proper shields, bar riers, and grounding to prevent contact with conductors. Operator protection and safety are the responsibility of the person installing the product.

See Section 12 for complete details on using the interlock and output configuration information.

2-6 Connections

Noise Shield

Triax Cable

Test Fixture

Connect to earth safety ground using #18 AWG wire or larger

DUT

WARNING

Guard is at the same voltage level as input/output high. Therefore, if a hazardous voltage (≥42V peak) is present on input/output high, it is also present on the guard terminals of the Remote PreAmp and mainframe.

KEITHLEY

6430

REMOTE

PreAmp

SENSE

MAINFRAME

Connect to REMOTE

PreAmp connector on rear

panel of mainframe

IN/OUT

HIGH

Preamp Cable*

*Keithley part number: CA-176-1D.

cбЦмкЙ=OJO

Two-wire sense connections

Connections to DUT

klqb Connection drawings in this manual are shown using the Remote PreAmp. If not

using the Remote PreAmp, make connections to the equivalent banana jack termi nals on the rear panel of the mainframe.

t^okfkd To prevent injury from electric shock, DO NOT touch the triax cables of

the Remote PreAmp while the SourceMeter is turned on or is connected to an external source that is turned on.

`^rqflk When using the Remote PreAmp, DO NOT use the INPUT/OUTPUT HI

and 4-WIRE SENSE HI banana jacks on the mainframe. Using these ter minals while the Remote PreAmp is plugged in will result in errors and/or noise, and possible damage to the Remote Amplifier.

Sensing methods

Basic source-measure operations are performed using either 2-wire sense connections (Figure 2-2) or 4-wire sense connections (Figure 2-3). See Section 4, Ohms sensing for additional information.

Connections 2-7

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

MADE IN

U.S.A.

INPUT/

OUTPUT

42V

PEAK

250V PEAK

TRIGGER

LINK

4-WIRE SENSE

LINE RATING

100-240VAC

50, 60, HZ

100VA MAX

RS232

IEEE-488

(ENTER IEEE ADDRESS

WITH FRONT PANEL MENU)

250V PEAK

PEAK

V, Ω,

GUARD

GUARD SENSE

LINE FUSE

SLOWBLOW

2.5A, 250V

INTERLOCK-

DIGITAL I/O

REMOTE

PreAmp

Noise Shield

Triax

Cable

Test

Fixture

Connect to earth safety ground using #18 AWG wire or larger

DUT

WARNING

KEITHLEY

6430

REMOTE

PreAmp

SENSE

MAINFRAME

Triax

Cable

Sense

Sense HI

Banana Plug Cable

6430 Mainframe

(rear panel connectors)

IN/OUT

HIGH

Preamp Cable*

*Keithley part number: CA-176-1D.

cбЦмкЙ=OJP

Four-wire sense connections

t^okfkd There is no direct internal connection between earth ground and the

INPUT/OUTPUT LO terminal of the SourceMeter. Therefore, hazardous voltages (>30V rms) can appear on the LO terminal. Typically, this can occur when the SourceMeter is operating in any mode where the output changes rapidly, such as quick, pulsed waveforms that can be generated using the ZERO, AUTO-OFF output state, or fast pulse sweep operations.

To eliminate the shock hazard, connect the INPUT/OUTPUT LO terminal to earth ground. You can connect the LO terminal to the chassis ground screw terminal on the rear panel using the supplied chassis ground plug, or connect it to a known safety earth ground.

t^okfkd For floating source-measure operations, voltage will be present on the

outer shell (IN/OUT LO) of the triax cable(s). If IN/OUT LO is connected to a noise shield as shown in Figures 2-2 and 2-3, the floating voltage will also be present on the shield. To prevent contact with the floating voltage, enclose the test circuit in a metal test fixture that is connected to safety earth ground (as shown in Figures 2-2 and 2-3), and do not touch the triax cable(s).

2-8 Connections

2-wire sensing

drops in the test leads could be significant. The ratio between the test lead resistance and DUT resistance determines the error that is introduced. If the error introduced by the IR drop of the test leads is not acceptable, use 4-wire sensing.

When using 2-wire sensing to source and/or measure voltage, the error associated with IR

For example, assume test lead resistance (RL) is 1Ω and the DUT resistance (R 10kΩ. The error is calculated as follows:

Error = RL / R

1Ω / 10kΩ

= 0.0001

= 0.01%

Notice that as the resistance of the DUT increases, the error decreases. For DUT above 1GΩ, guarding should also be used. See Cable guard.

Since current in a series circuit is the same at all points in the loop, remote sensing does not improve I-Source or I-Measure accuracy. Thus, if sourcing current and measuring current, you can use local sensing.

klqb For Measure Only (V or I) operation, 2-wire sensing must be used.

DUT

) is

4-wire sensing

Voltage source and measure accuracy are optimized by using 4-wire sense connections. When sourcing voltage, 4-wire sensing ensures that the programmed voltage is delivered to the DUT. When measuring voltage, only the voltage drop across the DUT is measured.

Use 4-wire sensing for the following source-measure conditions:

• The error contributed by test lead resistance for local sensing is n

• Optimum Ohms, V-Source, and/or V

-Measure accuracy are required.

ot acceptable.

4-wire sensing specification clarifications

• There is no hardware configurations needed to enable 4-wire sense. Simply hook up the

sense wires; otherwise, the Model 6430 will sense the voltage locally through resistors.

• Specified accuracies for both source and measure are only achieved using 4-wire

sensing.

• Sense wires must be no more than 10Ω per lead.

• The Model 6430 will perform to rated specification with up to 1V drop per source lead

Guard Shield

Triax Cable

Test Fixture

Connect to earth

safety ground using

#18 AWG wire or

larger

DUT

WARNING

6430

REMOTE

PreAmp

SENSE

MAINFRAME

Connect to REMOTE PreAmp connector on rear

panel of mainframe

Guard

IN/OUT

HIGH

Preamp Cable*

KEITHLEY

*Keithley part number: CA-176-1D.

cбЦмкЙ=OJQ

High-impedance guarding

on the 100µA through 100mA ranges. On the 10µA range and below (when using the Remote PreAmp), the allowable voltage drop in each source lead is limited as follows:

Current range

10µA

1µ

100nA

10nA

1nA

100pA

10pA

1pA

Guarding methods

Cable guard

Use the high-impedance (cable) guard connection scheme shown in Figure 2-4 for the fol-

lowing source-measure condition:

Connections 2-9

Maximum allowable resistance per source lead

10Ω 50Ω

500Ω

5kΩ

50kΩ

1MΩ

50MΩ

1GΩ

• Test circuit impedance is >1GΩ.

Cable guard is always available at the Remote PreAmp. If not using the Remote PreAmp,

use

the V, Ω GUARD banana jack on the mainframe with CABLE guard selected. See Guard

selection to select cable guard.

reduces noise and protects the user from a potentially hazardous voltage on the guard shield (or

A test fixture is typically used when testing hig

plate). See Section 5, Guard for details on using guard.

Note that the test fixtu

h-impedance devices. The test fixture

re chassis is connected to In/Out LO to reduce noise.

2-10 Connections

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

MADE IN

U.S.A.

INPUT/

OUTPUT

42V

PEAK

250V PEAK

TRIGGER

LINK

4-WIRE SENSE

LINE RATING

100-240VAC

50, 60, HZ

100VA MAX

RS232

IEEE-488

(ENTER IEEE ADDRESS

WITH FRONT PANEL MENU)

250V PEAK

PEAK

5V PK

V, Ω,

GUARD

GUARD SENSE

LINE FUSE SLOWBLOW

2.5A, 250V

INTERLOCKDIGITAL I/O

REMOTE

PreAmp

Triax Cable

DUT

WARNING

KEITHLEY

6430

REMOTE

PreAmp

SENSE

MAINFRAME

Banana Plug Cable

6430 Mainframe (rear panel connectors)

Resistor

Network

Ohms Guard

IN/OUT

HIGH

Preamp

Cable*

≥1kΩ

*Keithley part number: CA-176-1D.

cбЦмкЙ=OJR

Guarded ohms connections (basic)

Ohms guard

Use ohms guard for the following source-measure operation:

• In-circuit resistance measurements on the D sent.

are pre

UT where other parasitic leakage devices

Note that ohms guard must be selected for this connection scheme. See Gu

select ohms guard.

klqb Ohms guar

d cannot be accessed from the Remote PreAmp. It is only available at the

rear panel of the mainframe.

Figures 2-5, 2-6, and 2-7 show how to make connections to measure the resistance of a

sing

le resistor (DUT) in a resistor network. See Section 4, 6-wire ohms measurements and

Section 5, Guard for more information on guarded ohms measurements.

ard selection to

Connections 2-11

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

MADE IN

U.S.A.

INPUT/

OUTPUT

42V

PEAK

250V

PEAK

TRIGGER

LINK

4-WIRE SENSE

LINE RATING

100-240VAC

50, 60, HZ

100VA MAX

RS232

IEEE-488

(ENTER IEEE ADDRESS

WITH FRONT PANEL MENU)

250V PEAK

PEAK

5V PK

V, Ω,

GUARD

GUARD SENSE

LINE FUSE

SLOWBLOW

2.5A, 250V

INTERLOCK-

DIGITAL I/O

REMOTE PreAmp

Triax Cable

DUT

WARNING

KEITHLEY

6430

REMOTE

PreAmp

SENSE

MAINFRAME

Banana Plug Cables

6430 Mainframe (rear panel connectors)

Resistor

Network

Ohms Guard

<1kΩ

Guard

Sense

IN/OUT

HIGH

Preamp

Cable*

*Keithley part number: CA-176-1D.

cбЦмкЙ=OJS

Guarded ohms connections (guard sense)

The basic connection scheme for guarded ohms measurements is shown in Figure 2-5. If the

ard resistance path (RG) is <1kΩ, IR drop in the GUARD test lead could be high enough that the guard voltage at the resistor network is significantly less than the output voltage at the DUT. This results in leakage current and will corrupt the measurement. To cancel the effect of IR drop in the GUARD test lead, connect GUARD SENSE to the resistor network as shown in Figure 2-6. Guard sense ensures that the guard voltage at the resistor network is the same as the output voltage at the DUT.

2-12 Connections

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

MADE IN

U.S.A.

INPUT/

OUTPUT

42V

PEAK

250V

PEAK

TRIGGER

LINK

4-WIRE SENSE

LINE RATING

100-240VAC

50, 60, HZ

100VA MAX

RS232

IEEE-488

(ENTER IEEE ADDRESS

WITH FRONT PANEL MENU)

250V

PEAK

5V PK

V, Ω,

GUARD

GUARD SENSE

LINE FUSE

SLOWBLOW

2.5A, 250V

INTERLOCK-

DIGITAL I/O

REMOTE PreAmp

Triax

Cable

DUT

WARNING

KEITHLEY

6430

REMOTE

PreAmp

SENSE

MAINFRAME

Banana Plug Cables

6430 Mainframe (rear panel connectors)

Resistor

Network

Ohms Guard

<1kΩ

Guard Sense

Sense HI

Sense LO

<1kΩ

Triax

Cable

IN/OUT

HIGH

Preamp

Cable*

*Keithley part number: CA-176-1D.

cбЦмкЙ=OJT

Guarded ohms connections (6-wire ohms)

sens-ing) by connecting SENSE HI and LO to the DUT (Figure 2-7).

Note that if the DUT is <1kΩ, you should use the 4-wire measurement method (remote

klqb Guard current (IG) must never exceed 50mA. If it does, guard voltage will become

less than the output voltage and corrupt the measurement.

Guard selection

▲

Cable guard is used for high-impedance guarding for cables (i.e., coax and triax) and test fixtures. Ohms guard provides a high-current guard output, which allows in-circuit guarded ohms measurements.

The guard setting (cable or ohms) only applies to mainframe guard (V,Ω GUARD banana jack). Cable guard is always available at the Remote PreAmp, regardless of the guard setting. Ohms guard is only available at the mainframe. On power-up, the mainframe defaults to cable guard.

klqb When the guard selection is changed, the OUTPUT will turn OFF.

Front panel guard selection

Perform the following steps to check or change the guard selection:

1. Press CONFIG and then the SOURCE V, SOURCE I, or Ω. Changing guard in one

configuration menu changes it in all of the others.

2. Using the and ▲ keys, place the cursor (flashing menu item) on GUARD and press

ENTER.

klqb Cursor position indicates the present guard selection (OHMS or CABLE). To retain

the present selection, use the EXIT key to back out of the menu structure and skip the next two steps.

Connections 2-13

3. To change the guard selection, place the cursor on the alternate se ER.

ENT

4. Use the EXIT key to back out of the menu structure.

klqb Do

not connect ohms guard using coaxial cabling, or oscillations may occur.

lection and press

Remote command guard selection

Use the :SYSTem:GUARd command in Section 17 to choose between cable and ohms guard

mode via remote. For example, send the following command to enable ohms guard:

:SYST:GUAR OHMS

Conversely, send this command to enable cable guard:

:SYST:GUAR CABL

2-14 Connections

Basic Source-Measure

Operation

• Operation Overview — Discusses source-measure capabilities, compliance limit, and

fundamenta

l source-measure configuration.

• Operation Considerations —

source delay.

• Basic Source-Measure

SourceMeter for source-mea output v turning the

• Me

• Sink Operation —

alues, and compliance limits; choosing measurement range and function; a

output on and off.

asure Only — Covers how to use the SourceMeter for measurements only.

Describes sink operation.

Covers warm-up, auto zero, V-source protection, and

Procedure — Describes the basic procedure for setting up the

sure operations, including selecting the source

function,

3-2 Basic Source-Measure Operation

CAUTION

Excessive heat could damage the SourceMeter and at the very least, degrade its perfor-

mance. The SourceMeter must be operated in an environment where the ambient temperature

t exceed 50°C.

does no

The SourceMeter uses a heat sink to dissipate heat. expose the black, finned heat sink. To prevent damaging heat build-up and thus, ensure specified performance, adhere to the following precautions:

√ Keep the

heat could become impaired.

√ Keep the

feet SourceMeter when it is sitting could block the botto

√ Do not position any

unheated) compro

√ When

e bottom and sides to ensure proper cooling. Adequate airflow enables air temper-

th atures within approximately one inch of the SourceMeter surfaces specified

√ Rack mounting high

could cause maintained around the

√ A

only i Precision equipment, the SourceMeter

heat sink free of dust, dirt, and contaminates, since its ability to dissipate

bottom cooling vents from becoming blocked. NEVER remove the plastic

and place the SourceMeter directly on a flat surface. NEVER operate

on a conformable surface (such as a ca

m cooling vents.

devices adjacent to the SourceMeter that force air (heated or

into or onto its surfaces or cooling vents. This

mise accuracy performance.

rack mounting the SourceMeter, make sure there is adequate airflow around

limits under all operating conditions.

power dissipation equipment adjacent to the SourceMeter

excessive heating to occur. The specified ambient temperatures

surfaces of the SourceMeter to specified accuracies.

good measure to ensure proper cooling in rack situations with convection cooling

s to place the hottest equipment (i.e., power supply) at the top of the

such as the SourceMeter, should be pla

rack where temperatures are the coolest. Adding spacer panels be

will help ensure adequate airflow.

The left side of the case is cut out to

the

rpet). This

additional airflow could

to remain within

must be

rack.

ced as low as possible in

low the

Operation overview

Source-measure capabilities

From the front panel, the SourceMeter can be configured to perform the following

operations:

Basic Source-Measure Operation 3-3

• Source v

• Source current

• Me

Voltage —

1fA to 105mA. The V-Meter can measure voltage from ±1µV to ±211V. The V-Source and V-Meter each have four ranges; 200mV, 2V, 20V, and 200V.

Current — With the Remote PreAmp, the I-Source can output current from ±0.5fA to

±105mA and limit voltage from 200µV to 210V. The I-Meter can measure current from ±10aA to ±105.5mA. The I-Source and I-Meter each have 12 ranges; 1pA, 10pA, 100pA, 1nA, 10nA, 100nA, 1µA, 10µA, 100µA, 1mA, 10mA, and 100mA.

Without the Remote PreAmp, the 1pA, 10pA, 100pA, 1nA, 10nA, and 100nA ranges are not available. Therefore, without the Remote PreAmp, the I-Source can output current from ±50pA to ±105mA and measure current from ±10pA to ±105.5mA.

Resistance — With the Remote PreAmp, the SourceMeter can make resistance measurements from <100µΩ to >20TΩ. When using the auto ohms measurement method, the following ohms ranges are available, 20Ω, 200Ω, 2kΩ, 20kΩ, 200kΩ, 2MΩ, 20MΩ, 200MΩ, 2GΩ, 20GΩ, 200GΩ, 2TΩ, and 20TΩ. When using the manual ohms measurement method, you can-not select ohms ranges. The ohms reading is the mathematical result of V/I.

Without the Remote PreAmp, the 200MΩ, 2GΩ, 20GΩ, 200GΩ, 2TΩ, and 20TΩ auto ohms ranges and, as previously pointed out, the six lowest current ranges are not available. Therefore, without the Remote PreAmp, the SourceMeter can measure resistance from <100µΩ to >20MΩ.

oltage — Display current and/or voltage measurement

— Display voltage and/or current measurement

asure resistance — Display voltage or current component of measurement

asure only (V or I) — Display voltage or current measurement

The V-Source can output voltage from ±5µV to ±210V and limit current from

Measure only

(V-Meter) or an ammeter (I-Meter). When used as a V-Meter only, the I-Source is set to output 0A. When used as an I-Meter only, the V-Source is set to output 0V.

Range of operation — The maximum power output of the SourceMeter is 2.2W. At maximum source levels, you can output 210V at 10.5mA or 21V at 105mA. The full range of operation is explained in Section 5, Operating boundaries.

(V or I) — The SourceMeter can be used exclusively as a voltmeter

3-4 Basic Source-Measure Operation

klqb Load regulation – The voltage specification for V-source mode load changes is

0.01% +100µV. This means that on the 200mV range, the load current can be changed from zero to full scale with less than 1.02mV of error. Calculation:

error = (0.01% × 0.2V) + 100µV

= 0.02mV + 100µV = 0.12mV

Assuming a 0 to 100mA change in current, the output impedance equates to 1.2mΩ (0.12mV/100mA = 1.2mW). This level can only be achieved using 4-wire sensing.

Compliance limit

When sourcing voltage, the SourceMeter can be set to limit current (from 1fA to 105mA). Conversely, when sourcing current, the SourceMeter can be set to limit voltage (from 200µV to 210V). The SourceMeter output will not exceed the compliance limit.

Table 3-1 summarizes compliance limits according to range. on compliance limits.

q~ÄäÉ=PJN

Compliance limits

Maximum compliance

Measurement range

200mV

002V 020V

200V

001pA* 010pA*

100pA*

001nA* 010nA*

100nA*

001µA 010µA

100µA

001mA 010mA

100mA

value

210mV

002.1V 021V

210V

001.05pA

010.5pA

105pA

001.05nA

010.5nA

105nA

001.05µA

010.5µA

105µA

001.05mA

010.5mA

105mA

See Section 5 for more details

* Only available when using the Remote PreAmp.

Setting the compliance limit

▲

Front panel compliance limit

Set the compliance limit from the front panel as follows:

Basic Source-Measure Operation 3-5

1. Select the desired source and measure function

2. Press the EDIT key until the cursor flashes in

3. Select the desired compliance range using the RANGE

4. To increment or decrement the compliance value, use the EDIT and ke the cursor over the digit to be changed, then press the SOURCE ▲ or ▼ key to increment or decrement the compliance value.

5. To change the compliance value directly, simply enter the value using the numeric ke while the cursor is flashing in

the compliance display field.

s using the MEAS and SOURCE keys.

the compliance (Compl:) display field.

▲ and ▼ keys.

ys to place

Remote compliance limit

Table 3-2 summarizes basic commands to program the compliance limit. See Section 17, Set

compliance limit for more details on these commands. To program the compliance, simply send

the command using the desired parameter. For example, the following command sets the current compliance to 50mA:

:SENS:CURR:PROT 50E-3

Similarly, the following command sets the voltage compliance to 4V:

:SENS:VOLT:PROT 4

q~ÄäÉ=PJO

Compliance commands

Command Description

:SENSe:CURRent:PROTection <n> :SENSe:VOLTage:PROTection <n>

Set current compliance (n = compliance). Set voltage compliance (n = compliance).

3-6 Basic Source-Measure Operation

Mainframe

I-Meter

Source

V-Meter

REMOTE

PreAmp

IN/OUT

HIGH

cбЦмкЙ=PJN

Fundamental source-measure configuration

Basic circuit configuration

The fundamental source-measure configuration for the SourceMeter (with Remote PreAmp) is shown in Figure 3-1, where the Source is either the V-Source or the I-Source. If not using the Remote PreAmp, Input/Output HI and LO is accessed at the rear panel of the mainframe.

klqb When using the Remote PreAmp, nothing should be connected to INPUT/OUTPUT

HI banana jack on the mainframe. If using mainframe INPUT/OUTUT HI, the cable to the Remote PreAmp should be disconnected.

Operation considerations

source delay.

Warm-up

rated accuracies. See Appendix A for specifications.

Auto zero

measurements. With auto zero enabled, all three of these measurements are performed for each reading to achieve rated accuracy. With auto-zero disabled, zero and reference are not mea sured. This increases measurement speed, but zero drift will eventually corrupt accuracy. With auto zero disabled, periodically change measurement speed.

The following paragraphs discuss warm-up period, auto zero, V-source protection, and

The SourceMeter must be turned on and allowed to warm up for at least one hour to achieve

Every A/D conversion (reading) is calculated from a series of zero, reference, and signal

Basic Source-Measure Operation 3-7

Temperature changes across components within the instrument can cause the reference and zero values for the A/D converter to drift due to thermo-electric effects. Auto zero acts to negate the effects of drift in order to maintain measurement accuracy over time. Without auto zero enabled, measurements can drift and become erroneous.

Front panel auto zero

Set the auto zero from the front panel as follows:

1. Press the MENU key.

2. Select A/D CTRL from the main menu, then press ENTER.

3. Select AUTO ZERO, then press ENTER.

4. Select ENABLE or DISABLE as appropriate, then press ENTER.

5. Press EXIT as necessary to return to normal display.

Remote command auto zero

Use the :SYSTem:AZERo command to enable or disable auto zero via remote. For example, send the following command to disable auto zero:

:SYST:AZER ON

Conversely, send this command to disable auto-zero:

:SYST:AZER OFF

NPLC caching

NPLC caching speeds up source memory sweeps by caching A/D reference and zero values. When NPLC caching is enabled (using the NPLC-CACHE/ENABLE menu selection), the A/D reference and zero values will be saved for up to the 10 most recent voltage, current, and resis tance measurement function settings. Whenever the integration rate is changed via the SPEED key, a recalled user setup (using the SAVESETUP/RESTORE menu selection), or during a source memory recall (either with the SOURCE-MEMORY/RESTORE menu or during a source memory sweep), NPLC caching will occur. If the integration rate is already stored in the cache, the stored reference and zero values are recalled and used. Otherwise, a reference and zero value are acquired and stored in the cache. If there are already 10 NPLC values stored, the oldest one will be overwritten by the newest one.

klqb Auto zero should be disabled for maximum source memory sweep speed; otherwise

the cache is of little use. With auto zero enabled, new A/D reference and zero values are taken for every reading and saved into the cache, slowing down sweep operation. However, with auto zero disabled, measurements may drift and become erroneous. To minimize drift when using NPLC caching with auto zero disabled, periodically select AUTO-ZERO/ONCE in the A/D-CTRL menu to force an immediate auto zero update.

3-8 Basic Source-Measure Operation

NPLC cache setup

Follow the steps below to enable and use NPLC caching with a source memory sweep:

1. Press the MENU key, select

2. Select AUTO-ZERO, then press ENTER.

3. Choose DISABLE, then press ENTER to disable auto zero.

4. From the A/D CONTROLS menu, selec

5. Select ENABLE, then press ENTER to enable NPLC caching.

6. Use the EXIT key to back out of the main menu structure.

7. Set up the source memory parameters, and run the source memory sweep. (See Sour

ory sweep in Section 9.)

mem

A/D-CTRL, then press ENTER.

t NPLC-CACHE, then press ENTER.

Typical NPLC cache test times

Typically, NPLC caching will decrease source memory sweep times by a factor of three. Table 3-3 shows typical averaged times for a test consisting of 10 sweeps of four source memory locations with NPLC values for successive me respectively.

q~ÄäÉ=PJP

Typical NPLC cache test times

NPLC cache conditions Time

Auto Zero OFF, Caching OFF 5.89s Auto Zero ON, Caching OFF 5.89s Auto Zero OFF, Caching ON 2.05s Auto Zero ON, Caching ON 5.89s Auto Zero OFF, Caching ON, Cache empty 2.5s

mory locations set to 10, 1, 0.1, and 0.01

V-source protection

Use V-source protection to select the maximum voltage level the SourceMeter can output. Available limit values include 20V, 40V, 60V, 80V, 100V, 120V, 160V, and NONE (allows voltage >160V). These are absolute values with 5% toleranc

t^okfkd Eve

NEVER touch the triax cable(s) or anything connected to the terminals of the SourceMeter when it is on or connected to an external source. Always assume that a hazardous voltage (>30V rms) is present when the power is on.

To prevent damage to DUT (devices under test) or external circuitry, DO NOT progra limit.

e. The power-on default is NONE.

n with the voltage protection limit set to the lowest value (20V),

m the V-Source to levels that exceed the voltage protection

Front panel V-source protection

To program V-source protection from the front panel:

1. Press CONFIG then SOURCE V.

2. Select PROTECTION from the displayed choices, then press ENTER.

3. Select the desired protection value, then press ENTER.

4. Press EXIT to return to normal display.

Remote command V-source protection

Use the :SOURce:VOLTage:PROTection command to program the V-source protection value via remote. See Section 17 for details. For example, the following command sets the pro tection value to 20V:

:SOUR:VOLT:PROT 20

Source delay

The source delay options are used to set the settling time for the source. This source delay is the delay phase of the Source-delay-measure cycle. See Section 5. The auto delay period is cur rent range dependent (Table 3-4).

Basic Source-Measure Operation 3-9

q~ÄäÉ=PJQ

Auto source delay

SourceMeter I-Range Auto Delay

1pA 1sec

10pA 350msec

100pA 50msec

1nA 35msec

10nA 10msec

100nA 6msec

1µA 5msec

10µA 5msec

100µA 3msec

1mA 3msec

10mA 3msec

100mA 3msec

Manual delay can be set from 0000.00000 to 9999.99800 seconds. Manually setting the delay disables auto delay.

3-10 Basic Source-Measure Operation

Front panel source delay

To set the manual source delay from the front panel:

1. Press CONFIG then SOURCE V (or SOURCE I).

2. Select DELAY from the displayed choices, then press ENTER.

3. Enter the desired DELAY value, then press ENTER.

4. Press EXIT to return to normal display.

To set the auto source delay state from the front panel:

1. Press CONFIG then SOURCE V (or SOURCE I).

2. Select AUTO DELAY from the displayed choices, then press ENTER.

3. Select ENABLE or DISABLE as desired, then press ENTER.

4. Press EXIT to return to normal display.

Remote command source delay

Use the :SOURce:DELay or :SOURce:DELay:AUTO commands to program the source delay via remote. See Section 17 for details. For example, the following command sets the source delay to 500ms:

:SOUR:DEL 0.5

Similarly, send the following command to enable auto delay:

:SOUR:DEL:AUTO ON

Basic source-measure procedure

Output control

Use the ON/OFF OUTPUT key to turn the SourceMeter output on or off for basic sourcemeasure situations. With the output on, the red ON/OFF OUTPUT indicator light will be on. The indicator light turns off when the output is turned off.

You can also control the output off state (normal, zero, or guard) and program the instrument for auto output off operation. See Section 12 for complete details on these aspects.

t^okfkd To prevent electric shock, do not make or break connections to the

SourceMeter while it is on.

Current measurements and capacitive loads

When measuring current in a test circuit that has high capacitance, ringing may occur. Ringing is the fluctuation of current readings that is initiated b eventually decays to a settled current reading. The higher the capacitance, the more ringing that will occur.

Table 3-5 lists the maximum capacitive loads that the Model 6430 can accommodate effectively. For the higher current ranges (1nA range a est capacitance in which ringing created by a voltage step will decay in less than cycle. For the lower current ranges (100pA and lower), the listed values represent the largest capacitance that causes ringing that will settle in a reasonable amount of time.

Current measurements can be performed for higher capacitive loads as long as the increased ringing can be the expense of longer settling times. See Source capacitance in Appendix F for more information.

q~ÄäÉ=PJR

Maximum capacitive loads

Current range

100mA 0.2µF

100µA 0.04µF

100nA 100pF

100pA 100pF

tolerated. Ringing can be reduced by adding a resistor in a series with the load at

Maximum Capacitive Load

10mA 0.2µF

1mA 0.2µF

10µA 3300pF

1µA 470pF

10nA 100pF

1nA 100pF

10pA 100pF

1pA 100pF

nd higher), the listed values represent the larg-

Basic Source-Measure Operation 3-11

y a voltage step. This fluctuation

one power line

3-12 Basic Source-Measure Operation

▲

Front panel source-measure procedure

Refer to Section 4 to measure ohms.

klqb The following pr

ocedure assumes that the SourceMeter is already connected to the

DUT as explained in Section 2.

Step 1: Select source.

Press SOURCE V to select the V-Source or press SOURCE I to select the I-Source. The

presently programmed source value (V

SRC

or I

) and compliance level (Cmpl) are

SRC

displayed.

Step 2: Set source level and compliance limit.

The source level is the voltage or current setting of the selected source (V-Source or

I-Source). A compliance limit is set to protect the DUT from damaging currents or vo

using the V-Source, a current compliance is set. When using the I-Source, a vo

When compliance is set. Complian

ce defines the maximum absolute value the SourceMeter can out-

put.

Note that compliance can also be determined by the measurement range. Depending on

value is lower, compliance occurs at the programmed value (real compliance) or at the

which maximum compliance value for the present fixed measurement range (range compliance). For example, with compliance set to 2V and the 200mV measurement range selected, compliance will occur at 210mV. On the 20V measurement range, compliance will occur at 2V. See Section 5, Compliance limit for details

klqb The S

ourceMeter must be in the edit mode (EDIT annunciator ON) to set source and

on real and range compliance.

compliance values. The edit mode is selected by pressing the EDIT key. The flashing digit for the source or compliance reading indicates that the SourceMeter is in the edit mode. If no editing operation is performed within six seconds, the edit mode times out and is cancelled. To return to the edit mode, press EDIT again. While in the edit mode, the EDIT key toggles between the source value and the compliance value.

The SOURCE

▲ and ▼

and and keys also enable the edit mode. They choose

the last selected field.

When editing the source value, the source is updated immediately, allowing you to

the source value while the output is on.

adjust

The source value cannot be changed while the SourceMeter is performing a sweep. This oc

curs with Output ON and either the SWEEP key is pressed, Offset Compensa-

tion is enabled under Ohms, or OFF-COMP-OHMS,

VOLT-COEFF, or VAR-

ALPHA functions are enabled.

When editing the compliance value, compliance is not updated until ENTER is pr

essed or the edit mode is allowed to time out.

EDIT always goes to the source field first, except while sweeping, in which case it goes into

the compliance field.

ltages.

ltage

Basic Source-Measure Operation 3-13

Source and compliance values cannot be edited in AUTO OHMS mode.

Perform the following steps to edit the source and compliance values:

1. Press EDIT to enter the edit mode. The flashing digit indicates which reading (source or complia EDIT ag

2. Use the RANGE w

nce) is presently selected for editing. If you wish to edit the other field, pr

ain.

▲ and ▼ keys to select a range that will accommodate the value you

ant to set. For best accuracy, use the lowest po

ssible source range.

ess

3. Enter the desired source or compliance value. There are two methods to edit the value: v

alue adjust and numeric entry.

klqb T

o clear the source value to 0V or 0A, press the MENU key while in the edit source

field.

alue adjust — To adjust the value, use the EDIT cursor keys to place the cursor

• V

the appropriate position, and use the SOURCE

at decreme

• Nume

sign

nt the value.

ric entry — When the edit mode is entered, the cursor is located on the most

ificant digit of the value. From this position, you can key in the value using the

▲ and ▼ keys to increment or

number keys (0 through 9). After each number is keyed in, the cursor move position sor on a digit to be changed, and press the appropriate number key. does no MENU

to the right. If desired, you can use the EDIT cursor keys to place the cur-

The cursor

t have to be on the polarity sign of the value to change polarity

. If the

key is pressed, the Source Value will be clear to 0V or 0A.

4. To edit the other field, press EDIT to select it, and repeat steps 1 and 2.

5. When finished editing the source and compliance values, press ENTER or wait six seconds to exit from the edit mode.

klqb When a

compliance limit value is entered, the SourceMeter automatically goes to the

lowest (most sensitive) compliance range that will accommodate that value.

The lowest compliance levels that can be set are 0.00100pA (1fA) and 000.200mV (200µV).

Step 3: Select measurement function and range.

Select the desired measurement function by pressing MEAS V (voltage) or MEAS I

(current).

s one

When measuring the source (i.e., Source V Measure V), you cannot se

lect the range using

the measurement RANGE keys. The selected source range determines the measurement range.

When not measuring the source (i.e., Source V Mea

sure I), measurement range selection can be done manually or automatically. When using manual ranging, use the lowest possible range for best accuracy. In autorange, the SourceMeter automatically goes to the most sensitive range to make the measurement.

3-14 Basic Source-Measure Operation

Measuring voltage — When sourcing current, you can use the RANGE ▲ and ▼ keys to

manually select the voltage measurement range. You can also press AUTO to select autorang ing. When sourcing voltage, the RANGE keys are inoperative.

Measuring current — When sourcing voltage, you can use the RANGE ▲ and ▼ keys to

manually select the current measurement range. You can also press AUTO to select autorang ing. When sourcing current, the RANGE keys are inoperative.

klqb With the 200V V-Source range selected, the highest current measurement range is

10mA. With the 100mA I-Source range selected, the highest voltage measurement range is 20V.

Measurement range is also limited by the compliance setting. For example, if voltage compliance is 1V (2V compliance range), the highest voltage measurement range that can be selected is 2V.

Step 4: Turn output on.

Turn the output on by pressing the ON/OFF OUTPUT key. The OUTPUT indicator will turn

on to indicate the output is on.

Step 5: Observe readings on the display.

The SourceMeter is in compliance if the “Cmpl” label or the units label (i.e. “mA”) for the displayed compliance setting is flashing. If the “Cmpl” label is flashing, real compliance has occurred. The output is clamped at the displayed compliance value. If the units label is flash ing, range compliance has occurred. The output is clamped at the maximum compliance value for the present fixed measurement range. For example, if presently on the 2V measurement range, a flashing units label for the voltage compliance value indicates that the output is clamped at 2.1V.

The SourceMeter can be taken out of compliance by going into the edit mode and decreasing the source value or increasing the compliance value. Note that increasing the compliance limit may compromise protection for the DUT. If in range compliance, selecting a higher measure ment range may take the SourceMeter out of compliance.

klqb See Section 5,“Compliance limit” for details on real and range compliance.

Step 6: Turn output off.

When finished, turn the output off by pressing the ON/OFF OUTPUT key. The OUTPUT indicator light will turn off.

Basic Source-Measure Operation 3-15

Remote command source-measure procedure

Basic source-measurement procedures can also be performed via remote by sending appropriate commands in the right sequence. The following paragraphs summarize the basic commands and give a simple programming example.

Basic source-measure commands

Table 3-6 summarizes basic source-measure commands. See Section 17 for more information on using these commands.

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Basic source-measure commands

Command Description

:SOURce:FUNCtion <function>

:SOURce:CURRent:MODE FIXed :SOURce:VOLTage:MODE FIXed :SOURce:CURRent:RANGe <n> :SOURce:VOLTage:RANGe <n> :SOURce:CURRent:LEVel <n> :SOURce:VOLTage:LEVel <n> :SENSe:FUNCtion <function>

:SENSe:CURRent:PROTection <n> :SENSe:VOLTage:PROTection <n> :SENSe:CURRent:RANGe <n> :SENSe:VOLTage:RANGe <n> :OUTPut <state> :READ?

Select source function (function = VOLTage or CURRent). Select fixed sourcing mode for I-source. Select fixed sourcing mode for V-source. Select I-source range (n = range). Select V-source range (n = range). Set I-source amplitude (n = amplitude in amps). Set V-source amplitude (n = amplitude in volts). Select measure function (function = “VOLTage” or “CURRent”). Set current compliance (n = compliance). Set voltage compliance (n = compliance). Set current measure range (n = range). Set voltage measure range (n = range). Select output state (state = ON or OFF) Trigger and acquire reading.

3-16 Basic Source-Measure Operation

Source-measure programming example

Table 3-7 summarizes the command sequence for a basic source-measure procedure. Note that the steps correspond to those listed previously in Front panel source-measure procedure. These commands set up the SourceMeter as follows:

• Source function: volts

• Source mode: fixed

• Source range: 20V

• Source output level: 10V

• Current compliance: 10mA

• Measure function: current

• Measure range: 10mA

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Basic source-measure command sequence

Step1Action Commands

2,3

Comments

*RST

Select source function, mode.

Set source range, level, compliance.

:SOUR:FUNC VOLT :SOUR:VOLT:MODE FIXED :SOUR:VOLT:RANG 20 :SOUR:VOLT:LEV 10 :SENS:CURR:PROT 10E-3

Set measure function, range.

Turn on output.

Read data.

Turn off output.

Steps correspond to front panel steps listed previously in Front panel source-measure procedure.

Commands must be sent in order given.

Instrument must be addressed to talk after :READ? to acquire data.

:SENS:FUNC “CURR” :SENS:CURR:RANG 10E-3 :OUTP ON

:READ? :OUTP OFF

Restore GPIB defaults. Select voltage source. Fixed voltage source mode. Select 20V source range. Source output = 10V. 10mA compliance. Current measure function. 10mA measure range. Output on before measuring.

Trigger, acquire reading.

Measure only

Front panel measure only

In addition to being used for conventional source-measure operations, the SourceMeter can also be used to measure only voltage or current. Perform the following steps to use the SourceMeter to measure voltage or current:

1. Select source-measure functions.

2. Set source and compliance levels.

Basic Source-Measure Operation 3-17

Measure voltage only (voltmeter) — press MEAS V

Measure current only (ammeter) — press MEAS I

Use the editing procedure provided in step 2 of Basic sour the source and compliance levels as follows:

a. Select the lowest source range and set the source level to zero (0.00000pA

000.000mV).

b. Set compliance to a level that is higher than the expected measurement.

to select the voltage measurement function.

to select the current measurement function.

Press SOURCE I to select the I-Source, and

Press SOURCE V to select the V-Source, and

ce-measure procedure to edit

`^rqflk When using th

higher than the voltage that is being measured. Failure to do this could result in instrument damage due to excessive current that will flow into the SourceMeter.

3. Select range.

Use the RANGE ▲ and ▼ keys to select a fixed measurement range that will accommodate the expected reading. Use the lowest possible range for best accuracy.

When measuring current, AUTO range can be used instead. Th matically go to the most sensitive range. W range. See the following CAUTION.

`^rqflk When using th

range and NEVER select a measurement range that is below the applied signal level. For these conditions, high current will be drawn from the external source. This high current could damage the external source or test circuit.

4. Connect voltage or current to be measured. Con 2-wire c

5. Turn output on. Press the ON/OFF key to turn the output on.

6. Take a reading from the display.

7. When finished, turn output off.

onnections. See Figure 2-2.

e SourceMeter as a voltmeter, V-Compliance must be set

e SourceMeter will auto-

hen measuring voltage, DO NOT use AUTO

e SourceMeter as a voltmeter only, DO NOT use AUTO

nect the DUT to the SourceMeter using

3-18 Basic Source-Measure Operation

Remote command measure only

Table 3-8 summarizes the basic command sequence for measure only. The steps outlined correspond to those in the Front panel measure only sequence above. These commands set up the SourceMeter for measure only voltage measurements up to 20V as follows:

• Measure function: volts

• Source function: current

• Source mode: fixed

• Source range: minimum

• Source value: 0mA

• Measure range: 20V

• Compliance 25V

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Measure only programming example

Step

Action Commands

*RST Restore GPIB defaults.

1 Select measure, source functions. :SOUR:FUNC CURR Current source function.

:SOUR:CURR:MODE FIXED Fixed current source mode. :SENS:FUNC “VOLT” Volts measure function.

2 Set source and compliance. :SOUR:CURR:RANG MIN Lowest source range.

:SOUR:CURR:LEV 0 0μA

:SENS:VOLT:PROT 25 25V compliance. 3 Select volts measure range. :SENS:VOLT:RANG 20 20V range. 5 Turn on output. :OUTP ON Output on before measuring. 6 Read data. :READ? Trigger, acquire reading. 7 Turn off output. :OUTP OFF Output off after measuring.

Steps correspond to front panel steps listed previously in Front panel measure only. DUT should be connected to SourceMeter before

running program.

Commands must be sent in order given.

Instrument must be addressed to talk after :READ? to acquire data.

2,3

Comments

source level.

Sink operation

Overview

When operating as a sink (V and I have opposite polarity), the SourceMeter is dissipating power rather than sourcing it. An external source (i.e., battery) or an energy storage device (i.e., capacitor) can force operation into the sink region.

For example, if a 12V battery is connected to the V-Source (In/Out HI to battery high) that is programmed for +10V, sink operation will occur in the second quadrant (Source +V and measure -I).

`^rqflk When using the I-Source as a sink, ALWAYS set V-Compliance to a level

klqb The sink operating limits are shown in Section 5, “Operating boundaries.”

Sink programming example

Basic Source-Measure Operation 3-19

that is higher than the external voltage level. Failure to do so could dam age the instrument due to excessive current that will flow into the SourceMeter.

Table 3-9 lists a command sequence to program the SourceMeter for sink operation. These commands set up the unit as follows:

• Source function: volts

• Measure function: current

• Source voltage: 0V

• Measure range: auto

• Compliance (discharge current): 100mA

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Sink programming example

Command Description

*RST :SOUR:FUNC VOLT :SOUR:VOLT:MODE FIXED :SENS:FUNC “CURR” :SENS:CURR:RANG:AUTO ON :SENS:CURR:PROT 100E-3 :OUTP ON :READ?

Restore GPIB defaults. V-source function. Fixed source mode. Current measure function. Auto measure range. 100mA compliance (discharge current). Turn on output. Trigger and acquire reading.

3-20 Basic Source-Measure Operation

Ohms Measurements

• Ohms Configuration Menu — Outlines the ohms configuration menu that allows you

to set up various ohms measurement aspects.

• Ohms

• Ohms Sensin

• Offset-compensated ohms — Describes of

• Ohms Sourc

• 6-wire

• Remote Ohms

Measurement Methods — Discusses auto and manual ohms measurement

methods

SourceMeter for 6 netw

program the ming examples.

and how to select them.

g — Covers 2-wire and 4-wire ohms sensing.

fset-compensated ohms, which can be used

overcome the effects of offsets when making low-resistance measurements.

e Readback — Covers enabling and disabling ohms source readback.

Ohms Measurements — Describes the basic procedure for setting up the

-wire ohms measurement, which can be used for measuring

orks and hybrid circuits.

Programming — Summarizes the basic remote commands required to

SourceMeter for ohms measurements and gives several typical program-

resistor

4-2 Ohms Measurements

CONFIG

SOURCE

MANUALAUTO

GUARD

CABLEOHMS

OFFSET

COMPENSATION

DISABLEENABLE

SRC

RDBK

DISABLEENABLE

cбЦмкЙ=QJN

Ohms configuration menu tree

Ohms configuration menu

Press CONFIG then Ω to access the ohms configuration menu. Use the Rules to navigate

menus in Section 1 to select the various items in the menu tree, which is shown in Figure 4-1.

Menu items include:

• SOURCE — Select AUTO or MANUAL source mode.

• GUARD — Choo

• SRC RDBK

• OFFSET COMPENSA

The following paragraphs discuss each of these aspects in detail.

se OHMS or CABLE guard.

— Enable or disable source readback mode.

TION — Enable or disable offset-compensated ohms.

Ohms measurement methods

There are two methods to measure ohms: auto ohms and manual ohms. When using auto ohms, the SourceMeter operates as a conventional constant current source ohmmeter. To use this method, simply select an ohms measurement range (or use autorange), and take the reading from the display. When using auto ohms, the default test current varies with the ohms range, as summarized in Table 4-1.

Ohms Measurements 4-3

klqb Y

With the manual ohms mode you can select either source V or source I to make ohms measurements, and the unit will automatically compute the resistance reading using the V/I measurement method. After configuring the desired source and selecting a voltage or current measuring range, select the Ω measurement method to display the calculated V/I ohms reading.

klqb To achieve optimum accuracy, the SourceMeter measures both V and I and uses

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Auto ohms default test currents

Auto ohms range* Default test current

ou cannot change the test current in the auto ohms mode. If you attempt to change

the source current in auto ohms, the SourceMeter will display an error message.

these values in ohms calculations (with source readback enabled). The measured source value is more accurate than the programmed source value. For remote opera tion, the user specifies the functions to measure. See the resistance measurement

racy specifications in Appendix A for more information.

accu

020Ω

200Ω

002kΩ 020kΩ

200kΩ

002MΩ 020MΩ

200MΩ

002GΩ 020GΩ

200GΩ

002TΩ 020TΩ

100mA

010mA 001mA

100mA

010mA 001mA 001mA

100nA

010nA 001nA

100pA

010pA 001pA

*200MΩ maximum without PreAmp

4-4 Ohms Measurements

Selecting ohms measurement method

On power-up, auto ohms is the default method for the ohms function. Perform the following

steps to check and/or change the ohms measurement method:

1. Press CONFIG and then Ω to display the ohms configuration menu.

2. Using left and right arrow EDIT keys, place the cursor (flashing menu item) on

SOURCE and press ENTER.

klqb Cursor position indicates the presently selected ohms measurement method. To

retain this selection, use the EXIT key to back out of the menu structure and skip the next two steps.

3. To change the measurement method, place the cursor on the alternate selection (AUT MANUAL), and press ENTER.

4. Press EXIT to exit from the menu

Auto ohms measurements

Perform the following steps to perform auto ohms measurements.

klqb The following pr

DUT as explained in Section 2.

t^okfkd T

1. Select ohms measurement function.

Press MEAS Ω to select the ohms measurement function.

2. Select auto ohms measurement method.

• Press CONFIG then Ω.

• Select SOURCE, then press ENTER.

• Select AUTO, then press ENTER.

• Press EXIT to return to normal display.

Note that the SourceMeter will be configured to Source I and Measure V. Also, the I-Source level and V-Compliance limit are based on the measurement range and cannot be edited.

o prevent electric shock, do not make or break connections to the SourceMeter with the output on. If on, press the ON/OFF OUTPUT key to turn the output off.

structure.

ocedure assumes that the SourceMeter is already connected to the

klqb Use the manual ohms mode and the V-source method when high-speed settling is

required.

Tektronix 6430 Reference manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Safety Precautions

Table of Contents

List of Illustrations

List of Tables

Getting Started

General information

Product overview

Mainframe and Remote PreAmp familiarization

Power-up

Display

Default settings

Menus

Connections

Connection overview

Connections to DUT

Guarding methods

Operation overview

Operation considerations

Basic source-measure procedure

Measure only

Sink operation

Ohms Measurements

Ohms configuration menu

Ohms measurement methods