Tektronix 5958 Instruction Manual

Contains Operating Informat~ion

W ARRANTY

Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year from
date of shipment.

Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable batter­ies, diskettes, and documentation.

During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.

To exercise this warranty, write or call your local Keithle y representative, or contact Keithle y headquarters in Cleveland, Ohio. Y ou
will be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service facility.
Repairs will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for the balance
of the original warranty period, or at least 90 days.

LIMIT A TION OF W ARRANTY

This warranty does not apply to defects resulting from product modification without Keithley’s express written consent, or misuse
of any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from battery leak­age, or problems arising from normal wear or failure to follow instructions.

THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY IMPLIED
WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PROVIDED HEREIN
ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.

NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT,
INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRU­MENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE OF THE POS­SIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS
OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY PERSON, OR DAM­AGE TO PR OPERTY.

Keithley Instruments, Inc. • 28775 Aurora Road • Cleveland, OH 44139 • 440-248-0400 • Fax: [phone] • http://www.keithle y.com

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1/99

Instruction Manual

Model 5958

C-V Software UtiliJies

01991, Keithley Instruments, Inc.

All Rights Reserved

Instruments Division

Cleveland, Ohio, U. S. A.

Document Number: 5958-901-01 Rev. A

All Keithley product names are trademarks or registered trademarki of Keithley Instruments. Inc.
Other brand and product names are trademarks or registered trademarks of their respective holders

MODEL 5958 C-V UTILITIES SOFTWARE

OVERVIEW
1NSTn”MENTS CONTROI.LED:

Required: Mode, 590 c-v Analyzer.
Optional: Model 7.30-l Voltage Source, Temptronic Hot Chuck (user

supplied, for BTS only), GLIB switch or prober. Switch Control Files are
provided for Keithley switching systems.

TESTS: Cunhols in~tmment~ to connect devices, acquire data, and stres

the device under test.

Bi.8 Temperahue stress WTS, cycle: Cycles the hot chuck specified by

the hot chuck COntml file.
programmable.

BTS Test Sequence: Tests up to 99 devices using specified C-V Peram-

eter, stress Cycle, Switch Controi, and Data Destination files.

Sequence Type: Sequen*ial, Parallel, or No Stress.
shxss Type: c the” -, - the” t, + only or - only.

Zerbst Test sequence: Tee, up to 99 devices using specified C-V

Farameter, c-t Parameter, SwitchControl, and Data Destination files.

sequence Type: Multiple C-V, One C-V, or No C-V.

DATADISPLAY:Graphicorlistdisp,ayofda~=aarrays.Tabular dispiay of

calculated parameters.

FILES:

C-V Parameter File LCVP): Contains all setup parameters for C-V

Measurements.

C-t Parameter File KTPF): Contains ail setup parameters for C-t Mea-

surements.

stress Cycle mra”le*er File LSCP): Contains a,, setup parameters for

Bias Temperature Stress cycles.

BTS Test Sequence File LBTS): Contains all setup parameters for BTS

Test Sequences.

Zerbst Test sequence File ,.ZTS): Contains all setup parameters for

Zerbst Test sequences.

Data Destination Files MJAT, .CTD): Each contains C-V or C-t curve

data, user-input device parameters, and derived results. Model 5958
C-V data files (.DATl are compatible with Model 5957v2.0.

Configuration File KFG): Specifies default paths and system configu-

ram* parameters.

Switch Coniml File LSWC): User-defined ASCII file containing the

necessary commands to make device connections with a GPIB device.
Commands include INIT. PARALLEL. DEVICE n, and FINAL.

Hot Chuck Contxool File LHCCb User-defined ASCII file containing the

necessary commands to controi a GPIB hot chuck.
include SENDWINDOW, SENDSETFOINT, SENDSRQMASK,
GETTEMF, NUMCHUCKS, CHUCKADDR. TERMINATOR,
SPATIEMF. and SFNOTBUSY.

CableCalibrationFi,e,.CAL): Contains referencecapacitorvaiuesand

culibratiionconstantsto bessntto theModel tocalibrateparticular
range and frequency combinations.

Material Constants File MATERIALCON): Specifies material con-

stants to be used in anaiysis such as insuiator and semiconductor
permittivity, bandgap energy, intrinsic carrier concentration, metal
work function, and electron affinity.

CAPACITANCE MEASUREMENT CAPABILITY:

Test Signal Frequency: 100kHz or IMHz.
100kH2MeasurementRanges: ZpF/2uS,20pF/20uS,?00pF/?BBuS,and

Z”F,2”lS.

SLXSS temperalure t&e and voltage are

Commands

Bias Voltage Wavefom: Stair and pulsed star waveforms.
Measurement Rates ,readings/sec): 1,10,18, and 75. 1000 rcading,scc.

available also for C-t measurement.
Seiectable measurement filter and series or parallel device model.
C-t Sample Time: lmsec to 65 set per sample, up to 450 samples (up to

1350 samples at the 1000,sec measurement rate).

ANALYSIS

MIS Analysis Constants: Oxide capacitance and thickness, gate area.

seriesresistance, equilibriumminimumcapacitance, averagedoping,

bulk doping, device type. Debye length, flatband capacitance and

voltage, work function difference. threshoid voltage, effective oxide

charge and charge concentration. best depth, and capaatance gain

and offset.
Doping Profile: Depiction approximation doping versus depletmn

depthanddepth”ersusgate”oltagc,ZieglermethodMajorityC~rrier

Corrected WCC, doping profile.
Bias Temperature Stress: Mobile ionic charge, total fined oxide charge

K&d, oxide capacitance and thickness, gate area. series resistance.

equilibrium minimum capacitance, average doping, bulk doping,

device type. “atband capacitanceand voltage, threshold voltage, and

capacitance gain and offset.
C-“Zerbst: Zerbst plot of C-t data to determine carrier generation

lifetime, surface generation velocity.

SYSTEM REQUIREMENTS
RECOMMENDED COMP”TER CONFIGURATION: IBM compatible

80386with80287ar80387mathcapracessorilnddiskcache,blOkBRAM,
hard disk drive. 1.2MB S&inch or 720kB SM-inch floppy drive, EGA or
VGA monitor, Microsoft or Logitech mouse.

MINIMUM COMPUTER CONFIGURATION: IBM AT, I’S,*, or I”O%

compatible, 640kB RAM, hard disk drive. 1.2M8 SlYa-inch or 720kB
3% inch floppy drive.

OPERATING SYSTEM: MS-DOS or PC-DOS 3.2 hninimum~.
GRAPHlCS ADAPTER: CGA, EGA, “GH CEGh “mdd, or Nercuies

Graphics Adapter.

MEMORY and DISK STORAGE REQUIREMENTS: 4.5MB of hard disk

space (prior to instailationl and 400kB free conventional RAM.

IEEE-488 (GPIB) INTERFACE CARDS SUPPORTED:

Using IOtech Driver 488 software V2.64 o* earlier:

CapitalEquipmentPC~88,4x488: IBMGPIBAdapter; IOtechCP488,

GP488A. GP48BB+, MP.488. MP488CT; Keithley FC488-CEC, G&88-

CEC-OM, 41188.CEC-IM; Mehabyre KM488-DD, KM488-ROM;

National I”shume”ts PC-II, PC-m., PC-III.

Using IO&h Driver 488 software X2.61:

I&!ch 6P488B+, lMP488, Mr48BCT.

lotech Personal 488/2 is require* for Psi2 operation.

COMPATIBLEPRINTERS: CmnonBJ80; CItohProwriter: C. Itoh24LQ;

Epson Fx, RX, MX. LQISOO; HP Think k-t. Laser let+; IBM Graphic or
Professional: NEC 8023,8025: NEC Pinwriter F Series: Okidata 92.93,

192~; Smith Corona D100; Tektronix 469516: Toshiba 24 pin.

CDMPATIBLE PLOTTERS: Epson HI-80: Hewlett-Pa&r& 747O.:G’5,

7440; Houston DMP-XX; Roland DXY-800; Watanabe Digi-Plot.

COMPATIBLE MOUSE: Mi~nxoft or Logitcch mouse with MOUSESYS

installed.

MATERIALS PROVIDED:

Inshlxtion ma”“al.
Diskettes containing instailation, programs, source code. and sample

data.

‘Note: ~Microsoft BASIC 7.1 required to modify source code.
Specifications subject to change without notice.

Table of Contents

SECTION 1

1.1

1.2

1.3

1.4

1.5

1.6

1.7

1.7.1

1.7.2

1.7.3

1.7.4

1.7.5

1.8

1.9

1.9.1.

1.9.2

1.9.3

1.9.4

1.9.5 Hot Chuck and Probe Station ..................

1.9.6

- General Information

INTRODUCTION

FEATURES ..................................

WARRANTY INFORMATION
MANLJAL ADDENDA

SAFETY SYMBOLS AND TERMS .................

SPECIFICATIONS ............................

COMPUTER REQUIREMENTS

Computer Hardware Requirements ..............

Supported Graphics Cards ....................

Supported IEEE-488 Interfaces .................

Recommended Printers and Plotters .............

Software Requirements

REQUIRED EQUIPMENT .......................

OPTIONAL ACCESSORIES

Voltage Source

Connecting Cables

Calibration Sources

Rack Mount Kits

Switching Equipment

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1-l
l-1
l-1
l-1
l-1

1.?
I-2
1-2
1-3
1-3
I-3
l-4
l-4
l-5
l-5
1-5
1-5
l-5
1-5

I-6

SECTION 2

2.1

2.2

2.2.1

2.2.2

2.2.3

2.3

2.3.1

2.3.2

2.3.3

2.3.4

2.3.5

2.3.6

2.4

2.4.1

2.4.2

2.4.3

2.4.4 LightConnections

2.5

2.5.1

- Getting Started

INTRODUCTION ...........................................

IEEE-488 BUS CONSIDERATIONS

Interface Card Installation
BusConnections..

Default Primary Address Settings .............................

SOWARE INSTALLATION .................................

SoftwareBackup

Installation Procedure ......................................

IEEE-488 Driver Software Installation

CONFIGSYSModification ..................................

Plotter and Printer Considerations .............................

Memory and Hard Disk Considerations ........................

TEST CONNECTIONS .......................................

C-V Analyzer Connections ..................................

Optional Voltage Source Connections ..........................

Typical Switching Card Connections

CABLECORRECTION

When to Perform Cable Correction

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2-l
2-I
2-1
2-2
2-2
2-3
2-3
2-3
2-5
2-5
2-5
2-6
2-6
2-6
2-7

2-7
z-10
2-12
2-12

2.5.2

2.5.3

2.5.4

2.5.5

2.5.6

2.6

2.6.1

2.6.2

2.6.3

2.6.4

2.6.5

2.6.6

2.6.7

2.6.8

2.6.9

2.7

2.7.1

2.7.2

2.7.3

2.7.4

Recommended Correction Sources
Calibration Source Connections
Correction Procedure
Optimizing Correction Accuracy to Probe Tips
Cable Correcting Switching Pathways

RUNNING THE SOFTWARE

Starting the Program

Default Paths
Run Tie Considerations
Selecting Menu Items
Main Menu Description

FileTypes ......................................

Running with Floppy-Based Test/Data Files

Printing Screens
Default Material Constants

TEST SETUP, MEASUREMENT AND ANALYSIS OVERVIEW

C-V Measurement Overview

C-t Measurement Overview

BTS Measurement Overview
Zerbst Measurement Overview

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2-12
2-12
2-13
2-13
Z-13
2-14
2-14
z-14

2-14
2-14
2-15
2-15
2-16

2-16
2-16
Z-16
2-16
2-17
2-18
2-19

SECTION 3

3.1

3.2

3.2.1

3.2.2

3.2.3

3.2.4

3.2.5

3.2.6

3.2.7

3.3

3.3.1

3.3.2

3.3.3

3.3.4

3.3.5

3.3.6

3.3.7

3.4

3.4.1

3.4.2

3.4.3

3.4.4

3.4.5

3.5

3.5.1

INTRODUCTION ........................

C-V MEASUREMENT PARAMETERS

C-V Measurement Parameter Menu

C-V Measurement Parameters .............

Waveform Parameters ...................

Bias Voltage Parameters .................

Miscellaneous Parameters ................

C-V Parameter Programming Procedure
Saving/Loading C-V Measurement Parameters

C-t MEASUREMENT PARAMETERS

C-t Measurement Parameter Menu

C-t Measurement Parameters .............

Waveform Time Parameters ..............

Bias Voltage Parameters .................

Cabie Correction Filename ...............

C-t Parameter Programming Procedure

Saving/Loading C-t Measurement Parameters

STRESS CYCLE PARAMETERS .............

Stress Cycle Parameter Menu .............

stress Cycle Parameters .................

Programming Stress Cycle Parameters

Saving/Loading Stress Cycle Parameters

Stress Cycle Description .................

BTS TEST SEQUENCE ....................

BTS Test Sequence Menu ................

- Test Setup

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3-1
3-1
3-I
3-2
3-3
3-4

3-I
3-4
3-5
3-5
3-5
3-6
3-6
3-6
3-6
3-8

3-8
3-8
3-8
3-8
3-9
3-9
3-10
3-11
3-11

3.5.2

3.53

3.5.4

3.5.5

3.6

3.6.1

3.6.2

3.6.3

3.6.4

3.6.5

BTS Test Sequence Setup Parameters

Setting Up a BTS Test Sequence

Saving/Loading BTS Test Sequence Setups
BTS Test Sequence Description

ZERBST TEST SEQUENCE

Zerbst Test Sequence Setup Menu
Zerbst Test Sequence Setup Parameters
Setting Up a Zerbst Test Sequence
Saving/Loading Zerbst Test Sequence Sehlps
Zerbst Test Sequence Types

SECTION 4 - Measurement

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3-11
3-12
3-12
3-12
3-19
3-19
3-19

3-20
3-20
3-21

4.1

4.2

4.2.1

4.2.2

4.2.3

4.2.4 DeterminingCMIN

4.3 C-t MEASUREMENTS

4.3.1 C-t Measurement Connections

4.3.2 Choosing Optimum C-t Measurement Parameters

4.3.3 C-t Measurement Procedure

4.4

4.4.1 Hot Chuck Connections

4.4.2 Selecting Optimum Voltage, Temperature, and Time Parameters

4.4.3 Performing a BTS Stress Cycle

4.5 BTS TEST SEQUENCE MEASUREMENTS

4.5.1 BTS Test Sequence Connections

4.5.2 Cable Correcting Switching Pathways

4.5.3

4.5.4 Parallel BTS Test Measurement Overload

4.5.5

4.6 ZERBST TEST SEQUENCE MEASUREMENTS

4.6.1 Zerbst Test Sequence Connections

4.6.2

4.6.3 Running a Zerbst Test Sequence

4.7

4.7.1

4.7.2 Avoiding Capacitance Errors

4.7.3 Correcting Residual Errors

4.7.4 Interpreting c-v Curves

4.7.5 Dynamic Range Considerations

4.7.6

4.7.7 Device Considerations

4.7.8 Test Equipment Considerations

INTRODUCTION

C-V MEASUREMENTS

C-V Measurement Connections
Selecting Optimum C-V Measurement Parameters
C-V Measurement Procedure

BTSSTRESSCYCLE..

Selecting Optimum BTS Test Sequence Parameters

BTS Test Sequence Procedure

Selecting Optimum Zerbst Sequence Parameters

MEASUREMENT CONSIDERATIONS

Potential Error Sources

Series and Parallel Model Eq.livalent Circuits

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4-1
4-l
4-l
4-2
4-3
4-6
4-10
4-10
4-10
4-11
4-14
4-14
4-14
4-14

4.17
4-17
4-21
4-22
4-22

4-22
4-23
4-23
4-25

4-25

4-26
4-26

4-29
4-29
4-30

4-32

4-32

4-33

4-34

SECTION 5 - Analysis

5.1

5.2

5.2.1

5.2.2

5.3

5.3.1

5.3.2

5.3.3

5.3.4

5.4

5.4.1

5.4.2

5.4.3

5.4.4

5.5

5.5.1

5.5.2

5.5.3

5.5.4

5.5.5

5.5.6

5.6

5.6.1

5.6.2

5.6.3

5.6.4

5.6.5

5.6.6

5.6.7

5.6.8

5.6.9

5.6.10

5.6.11

56.12

5.6.13

5.6.14

5.6.15

5.6.16

5.6.17

5.7

5.7.1

5.7.2

57.3

57.4

5.7.5

5.7.6

INTRODUCTION
DEFAULT CONSTANTS AND SYMBOLS USED FOR ANALYSIS

DefaultConstants..
Calculated Data Symbols

OBTAINING BASIC ANALYSIS INFORMATION FORM HIGH-FREQUENCY C-V CURVES

Basic High-frequency C-V Curves
Determining Device Type
Oxide Capacitance and Minimum Capacitance

Flatband Voltage and Threshold Voltage

LOADING AND SAVING DATA

Filename Formats for Data Files

LoadingData
SavingData
Importing Data into Other Programs

GRAPHICALANALYSIS..

GraphicsControlMenu
Controlling Hard Copy Size and Resolution
cursoroperation
Threshold Voltage and Flatband Voltage Display
OverlayingCLuves
Selecting the Graphics Range

C-VANALYSIS

C-VAnalysisMenu

Loading and Saving C-V Data Files

Displaying Analysis Constants
Oxide Capacitance, Thickness, and Area Calculations
Series Resistance Calculations

Flatband Capacitance and Flatband Voltage
ThresholdVoltage
Metal Semiconductor Work Function Difference

EffectiveOxideCharge.
Effective Oxide Charge Concentration
Average Doping Concentration

B&Depth
Gain and Offset

Displaying C-V Data Arrays

Printing Analysis Constants and C-V Data Arrays
Graphing C-V Data
Ziegler (MC0 Doping Profile

C-t ANALYSIS

C-t Analysis Menu
Zerbst Analysis Data
Loading and Saving C-t and Zerbst Data

Displaying Analysis Constants

Displaying C-t Data Arrays

Printing Analysis Constants and C-t Data Arrays

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5-l
5-1
5-l

5-l
j-3
j-3
5-3
54
54
5-4
54
j-5
5-6
5-7
5-8
5-8
5-9
5-9
5-10
5-10
5-10
j-10
j-10
S-11
j-11
j-17
j-17
S-17
5-18
5-18
5-19
5-19
5-19

5.20
5-20
5-20
5-20
5-22

5-24
5-26
5-26

5.27

5-27

5-27
5-27
5-27

5.7.7

5.8

58.1

5.8.2

5.8.3

5.8.4

5.8.5

5.8.6

5.8.7

5.8.8

5.9

5.9.1

5.92

Graphing C-t Data

BTSANALYSIS ...........................

BTS Analysis Menu

Loading and Saving BTS Data
Displaying BTS Analysis Constants
Displaying BTS Data Arrays
Printing Analysis Constants and BTS Data Arrays
Flatband Voltage and Threshold Voltage
Mobile Ion Calculations
Graphing BTS Data

REFERENCES AND BIBLIOGRAPHY

References ......................

Bibliography .....................

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SECTION 6 - Bus Control File Setup

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5-28
j-31
j-31
5-32
5-32
j-32
j-34

j-34

j-34

5-37
5-39
5-39
j-39

6.1

6.2

6.2.1

6.2.2

6.2.3

6.2.4

6.3

6.3.1

6.3.2

6.3.3

6.3.4

6.4

6.4.1

6.4.2

6.4.3

INTRODUCTION ............................

SWITCH CONTROL

Switch Control File Description ................

Switch Control File Commands ................

Switch Control Examples ....................

Setting Up a Switch Control File

PROBE SEQUENCER CONTROL ................

Using Switch Control File Commands ...........

Programming constraints

Hypothetical Probe Sequencer Commands .......

Example Hypothetical Probe Sequencer Control File

HOT CHUCK CONTROL

Hot Chuck Control File Description .............

Hot Chuck Control File Commands .............

Setting Up a Hot Chuck Control File ............

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APPENDICES

A Material Constants File Modification
B Summary of Analysis Equations
C
D
E
F Graphic 4.0 Functions Used by Model 5956
G
H
I Error Messages

J

C-V Analysis Constants
Disk File Formats
Cable Calibration Utility

Software Modification
Using the Model 5958 with Other Programs

Default Switch Control Files

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6-1

6-1

6-l
6-l

6-7

6-7

6-11

6-11

6-11

6-11

6-12

6-12
6-12

6-12

6-23

A-l
B-l
C-l
D-l
E-l
F-l
G-l

H-l
I-1

J-1

List of Illustrations

SECTION 2 - Getting Started

Figure 2-I
Figure 2-2
Figure 2-3

Figure 2-4
Figure 2-5
Figure 2-6 Model 230-I Voltage Source Digital I/O Port Terminal Arrangement
Figure 2-7
Figure 2-8
Figure 2-9

IEEE-488 Bus Connections
Typical C-V Analyzer Connections
Optional Voltage Source Connections
RF Switch Card Example
Typical Matrix Card Connections

Direct LED Control

Relay Light Control

CalibrationSourceConnections

.....................................

...............................

.........................

.......................

................................

..........................

....................................

...........................

SECTION 3 - Test Setup

Figure 3-I
Figure 3-2
Figure 3-3
Figure 3-4
Figure 3-5
Figure 3-6
Figure 3-7
Figure 3-8
Figure 3-9 BTS Sequential Test Flowchart (+ Then Stress Cycle)
Figure 3-10
Figure 3-11
Figure 3-12

Figure 3-13 BTS Parallel Test Sequence Flowchart (+Then -Stress Cycle)
Figure 3-14 BTS Parallel Test Sequence Flowchart (-Then +Stress Cycle)
Figure 3-15 BTS Parallel Test Sequence Flowchart (+Only Stress Cycle)
Figure 3-16

Figure 3-17 BTS No Stress Sequence Flowchart
Figure 3-18 Zerbst Test Sequence Menu
Figure 3-19
Figure 3-20

Figure 3-21 No C-V Test Sequence Flowchart

C-V Measurement Parameters Menu
Stairwaveform
Pulse stair Waveform
C-t Measurement Parameters Menu
C-twaveform
BTS Cycle Parameters Menu
Stress Cycle Flowchart
BTS Test Sequence Setup Menu

BTS Sequential Test Flowchart (-Then +Stress Cycle)
BTS Sequential Test Flowchart (+ Only Stress Cycle)
BTS Sequential Test Flowchart (-Only Stress Cycle)

BTS Parallel Test Sequence Flowchart C-only Stress Cycle)

Multiple C-V Sequence Flowchart
One C-V Test Sequence Flowchart

.........................................

.....................................

...........................................

................................

....................................

.................................

..........................

..........................

..............................

.............

.............

..............

..............

........

........

.........

.........

...........................

............................

............................

............................

2-2
2-7
2-8

2-8
2-9
z-10
2-10
2-11
2-13

3-2
3-3
3‘l
3-5
3-7
3-9
3-10

3-11
3-13
3-14
3-14

3-15

3-16

3-17

3-17
3-18

3-18

3-20

3-22

3-22

3-23

SECTION 4 - Measurement

Figure 4-l
Figure4-2 Basic High-frequency C-V Curve
Figure 4-3
Figure 4-4
Figure 4-5 C-V Sweep Cycle Completed Window

Typical Test Connections for Basic C-V and C-t Measurements

..................................

RunC-VSweepWindow

C-V Sweep in Progress Window

........................................

...................................

..............................

............

4-2

4-3

4-4

4-5

4-s

Figure 4-6
Figure 4-7
Figure 4-8

Figure 4-9 VoltageAppliedWindow
Figure 4-10

Figure 4-l 1

Figure 4-12
Figure 4-13
Figure 4-14
Figure 4-15
Figure 4-16
Figure 4-17
Figure 4-18 Typical Model 7062 RF Switch Card Connections
Figure 4-19
Figure 4-20
Figure 4-21 Typical Switch Card Cable Correction Connections
Figure 4-22
Figure 4-23
Figure 4-24 Run Zerbst Test Sequence Window
Figure 4-25 Zerbst Test Sequence in Progress Window
Figure 4-26
Figure 4-27 High Frequency Curve with Added Noise
Figure 4-28 High Frequency Curve Resulting from Gain Error
Figure 4-29 Zerbst Plot Affected by Shay Capacitance
Figure 4-30 High Frequency Curve Caused by Nonlinearity
Figure 4-31
Figure 4-32
Figure 4-33 Curve Distortion when Hold Time is too Short
Figure 4-34 Series and Parallel Impedances

Auto/Manual Selection Window
Inversion Voltage Window
New Inversion Voltage Window

...................................................

CMINDisplayWindow ......................................................

Auto Cm Measurement Method

RunC-tSweepWindow
C-t Sweep in Progress Window
C-t Sweep Completed Window

BTSCycleWindow ........................................................

BTS Cycle in Progress Window

BTS Cycle Completed Window

Typical Model 70748/7075 Test Connections
Typical’Model7073 Coaxial Matrix Card Connections

Run BTS Test Sequence Window

BTS Test Sequence in Progress Window

High Frequency C-V Curve with Capacitance Offset

Normal High C-V Curve Results When Device is Kept in Equilibrium

Curve Hysteresis Resulting When Sweep is too Rapid

....................................................

.............................................

..................................................

..............................................

.............................................

...............................................

...............................................

...............................................

............................................... 4-16

....................................

.............................................. 4-24

........................................

............................................

......................................

....................................... 4-28

....................................... 4-28

............................................... 4-32

.................................

..............................

................................

...............................

.................................

..................................

..............................

...................................

..................

4-7
4-7
4-8
4-8
4-9
4-9

4-12
4-13
4-13
4-15
4-16

4-18
4-18
4-19
4-22

4-24
4-26
4-27

4-28

4-28

4-28

4-30
4-31
4-31

SECTION 5 - Analysis

Figure 5-l
Figure 5-2
Figure 5-3
Figure 5-4
Figure 5-5
Figure 5-6
Figure 5-7
Figure 5-8
Figure 5-9
Figure 5-10
Figure 5-11
Figure 5-12

Figure 5-13
Figure 5-14
Figure 5-15
Figure 5-16

High-frequency C-V Characteristics of p-lype Material

High-frequency C-V Characteristics of n-type Material

Load File Window ............................

Save File Window .............................

Graphics Control Menu ........................

Select Graphics Range Window
C-V Analysis Constants Window

Enter l&e Window ..........................

Enter Cox Window ............................

Enter Area Window ...........................

Enter tax Window .............................

Enter CMw Window ...........................

Enter Nww Window ...........................

Simplified Model used to Determine Series Resistance

Measurement Array Display Example

Calculated Data Array Display Example

...................

.................

..............

............

53
j-4
5-6
5-7
5-Y
5-10
5-12
s-14
5-14
S-15
5-15
5-16
5-16
j-17
5-21
5-21

Figure 5-17 C vs. Vds Example
Figure 5-18 G vs. Vts Example
Figure 5-19 Depth vs. Gate Voltage Example
Figure 5-20

Figure 5-21 Ziegler (MCC) Doping Profile Example
Figure 5-22
Figure 5-23 Cvs.tExamplePlot

Figure 5-24 Zerbst Example Plot
Figure 5-25 Zerbst Plot with Generation Lifetime and Generation Velocity Displayed

Figure 5-26 BTS Analysis Constants Window

Figure 5-27 BTS Analysis Capacitance Array Display Example

Figure 5-28 BTSCvs.V‘sPlot

Figure 5-29 BTSRvs.VcsPlot

Doping Profile vs. Depth Example

C-t Measurement Array Display Example

...................................................

...................................................

........................................

......................................

...................................

.................................

.................................................

.................................................

.......................................

...........................

...................................................

...................................................

SECTION 6 - Bus Control File Setup

.........

j-22

j-23
5-24
5-25
5-25
5-28
j-29
i-30
5-31
5-33
5-33
5-38
5-38

Figure 6-l
Figure 6-2
Figure 6-3
Figure 6-4

Model 7062 Switching Configuration

Model 7074D/7075 Switching Configuration

Model 7073 Switching Configuration

Default Contents of Tl’0315B.HCC File

.........................................

.........................................

.......................................

...................................

6-8
6-9

6..lO
6-23

List of Tables

SECTION 1

Table 1-l
Table l-2
Table l-3
Table 14

Table l-5
Table l-6
Table l-7
Table l-8

SECTION 2

Table 2-l
Table 2-2
Table 2-3
Table 24
Table 2-5 Cable Correction Sources
Table 2-6

- General Information

Computer Hardware Requirements
Graphics Cards Supported by Model 5958

IEEE-488 Interfaces Supported by Model 5958
Recommended Printers
Recommended Plotters
Software Requirements
Required Equipment
Switch Selection Table for Model 5958 Tests

- Getting Started

Default Directories
Supported Graphics Cards
Supported l’rinters and Plotters

Model 230-l Digital I/O Port Terminal Assignments

F&Types ................................

.........................

SECTION 3 - Test Setup

Table 3-l

ReadingRates.......................................................

...................

...............

....................

............

..........

............

............

............

............

............

................

................

................

................

................

................

l-2

1-3

1-3
1-3
l-3

1-4

I-4

1-7

2-4

24

2-5

Z-10

2-12

2-15

3-2

SECTION 4 - Measurement

Table 4-l Switch Control File for Model 7062 RF Card Example
Table 4-2 Switch Control File for Model 7074D/7075 Card Example
Table 4-3 Switch Control File for Model 7073 Card Example
Table 4-4 Converting Series-parallel Equivalent Circuits

.....................

...............

..................

SECTION 5 - Analysis

Table 5-l
Table 5-2
Table 5-3
Table 5-4 C-V Analysis Constants

Default Material Constants
Calculated Data Symbols
Filename Formats for Data Files

...................................

.................................... 5-2

...............................

.....................................

............

4-20
4-20
4-21

4-33

5-2

5-5
j-12

SECTION 6 - Bus Control File Setup

Table 6-1
Table 6-2
Table 6-3
Table 6-4
Table 6-S

Switch Control File Commands
Hypothetical Probe Sequencer Commands
Example Switch Controi File for Hypothetical Probe Sequencer
Default Hot Chuck Control File Commands
Hot Chuck Control File Command Summary

...............................................

..........................

..................................... 6-12

....................................

.......................

6-2

........... 6-I 1

6-12

6-13

SECTION 1

General Information

1 .l INTRODUCTION

This section contains overview information for the

Model 5958 C-V Software Utilities and is organized as
follows:

1.2 Features

1.3 Warranty Information

1.4 Manual Addenda

1.5 Safety Symbols and Terms

1.6

Specifications

1.7

Computer Requirements

1.8 Required Equipment

1.9 Optional Accessories

1.2 FEATURES

The Model 5958 C-V Utilities software package is de­signed to perform BTS (bias temperature stress) meas­urements and Zerbst analysis on semiconductors with
the aid of a user-supplied Model 590 C-V Analyzer. A
Temptronic Model Tl’0315B Hot Chuck (not supplied) is
required for BTS measurements.

. C-V and C-t measurements

l

Insulator thickness or gate area from high-frequency
c-v measurements.

l

Semiconductor average doping
. Insulator mobile ion charge density
. Effective surface charge

l

Minority carrier lifetime

l

Surface generation velocity

l

Flatband voltage and capacitance
. Threshold voltage
. Metal semiconductor work function

1.3 WARRANTY INFORMATION

Warranty information is located on the inside front cover
of this instruction manual. Should you require warranty
service, contact your Keithley representative or the fac­tory for further information.

1.4 MANUAL ADDENDA

Any improvements or changes concerning the Model
5958 will be explained on a separate addendum supplied
with the manual. Please be sure to note these changes and
incorporate them into the manual before using the soft­ware.

Model 5958 measurement and analysis capabilities in­clude:

1.5 SAFETY SYMBOLS AND TERMS

The following safety symbols and terms may be found on

one of the instruments or used in this manual:

SECTION 1
General

Information

The A
should consult the operating instructions in the associ­ated manual.

The WARNING heading used in this and other manuals
cautions against possible hazards that could lead to per­sonal injury or death.

A CAUTION heading outlines dangers that could lead to
instrument damage. Such damage may invalidate the

warranty.

symbol on an instrument indicates that you

1.6 SPECIFICATIONS

Detailed specifications for the Model 5958 are located at
the front of this instruction manual. Specifications for
equipment used with the Model 5958
respective instruction manuals.

can

be found in the

Table l-l. Computer Hardware Requirements

1.7 COMPUTER REQUIREMENTS

The following paragraphs discuss minimum computer
requirements, supported graphics and interface cards,
supported plotters and printers, and required system
software.

1.7.1 Computer Hardware Requirements

The Model 5958 software is intended to run on IBM AT,
IS/Z, or compatible computers. Table 1-l summarizes

the minimum required computer configuration.

NOTE
A coprocessor-equipped 386-based computer
is recommended for best performance. Also, a
smart extended memory manager such as
SMARTDRVSYS may speed up program op­eration if you have extended or expanded
memory.

Description Requirements

Computer IBM AT, I’S/2, or 100% compatibie”

Minimum RAM

Disk drives

Monitor/graphics card Color or monochrome (see Table l-2)

Inshument interface

*Compatible X36-based machines such as the Compaq 386 can also be used. NOTE: select IBM graphics mode;
Compaq graphics is not supported.

640KB
Harddrive,oneLZMB5 1/4”,or720KB3-l/2” floppydisk
drive

IEEE-488

(see Table l-3)

.._

I

l-7.

Grneral

SECTION 1

Information

1.7.2

Table 1-2 lists the graphics card supported by the Model

5958.

1 Grmhics Cards

IBM CGA or 100% compatible
IBM EGA or 100% compatible
IBM VGA or 100% compatible (EGA mode)
Hercules monochrome or 100% compatible
Tseng EVA
Tecmar Graphics Master
T&Video AT
T&Video HRCGB
Sigma Color 400
AT&T 6300
Corona PC
Corona PC400
Corona ATI’
H.l’ Vectra

T.I. Professional

Supported Graphics Cards

Table 1-2. Graphics Cards Supported by

Model 5958

1.7.4 Recommended Printers and
Plotters

A user-supplied printer or plotter is required for hard
copy graphs or data printouts. Table 1-4 summarizes rec­ommended printers, and Table l-5 lists plotters. Addi­tional plotter and printer considerations are discussed in
paragraph 2.3.

I

Table 1-4. Recommended Printers

I Printer

NEC 8023, C. Itoh Prowriter

Cannon BJ80

Epson FX, MX, RX
Okidata 92,93
Smith Corona DlOO

IBM Graphics
Tektronix 4695/6
C. Itoh 24LQ, Toshiba 24 pin
Epson LQl500

HP Laser Jet+ (or compatible)
Okidata 192+

HP Think Jet

NEC Pinwriter

1.7.3

Table l-3 lists computer IEEE-488 interfaces supported
by the Model 5958.

Table 1-3. IEEE-488 Interfaces Supported by

K-488,4-488
GPIB
GP488f 2’

* This interface is required for I’S/2 machines, the remainder are
used with AT and compatibles.

Supported IEEE-488 Interfaces

Model 5958

CapitoiEquipment Corp.
IBM
IOtech

Table 1-5. Recommended Plotters

Plotter

Hewlett-Packard 7440,7475,7440
Watanabe Digiplot
Houston DMP-XX
Roland DXY-800
Epson HI-80

NOTE: Plotters mut support HPGL graphics language.

1-3

SECTION 1
Grneral

Information

1.7.5

Table l-6 summarizes the required computer sofhuare.

Additional information on software installation is lo­cated in paragraph 2.3.

Software Requirements

Table 1-6. Software Requirements

Software
MS-DOS or PC-DOS, version 3.2 or higher

IO&h Driver488*
Microsoft BASIC, version 7.1*”

’ Driver488 is suppiied with the Model 5958.
‘* BASK is not supplied and is necessary only if you intend to modify the murce code.

Table 1-7. Required Equipment

1.8 REQUIRED EQUIPMENT

Table l-7 summarizes the minimum equipment required
to use the Model 5958 software. Additional optional
equipment may be added to enhance capabiiities; see
paragraph 1.9 for a summary of recommended optional
equipment.

Comments
Operating system

IEEE-488 interface driver
Compile/link source code

Description I comments

Keithley Model 590 C-V Analyzer

Temptronic Tl’O315B Thermochuck equipped
with SA4430 IEEE-488 interface’

Keithley Model 7007 IEEE-488 cables (2) Connects C-V analyzer and hot chuck to computer IEEE-488

Keithley Model 70515OQ BNC cables
(2 minimum, 3 minimum with Model 230-I
Voltage Source)

Model 5905,5906,5907 or 5909 Calibration
SOUCi?S”

* Program can be user modified for use with other hot chucks. See Section 6 far details on modifying hot chuck driver file.
“Calibration sources are recommended for ,zrforming the cable correction procedure, a requirement foro@imizing high-frequency C-V measure­ment accuracy. Use Model 5905 Sources to calibrate 20pF, ?OOpF, and 2nF ranges. “se Mode, 5906 Sources to calibrate a,, Mode, 590 ranges. “se
Model 5907 Sources to calibrate oniy the 2°F range. Use Mode, 5909 sources to calibrate only 20OpF md 2nF ranges.

Model 590/100k: 1OOkHz test frequency

Model 590/1M: IMHz test frequency
Model 590/100k/lM: IOOkHz and IMHz test frequencies

Required for BTS tests

interface

Connects C-V analyzer to prober, Model 230-l trigger output to
Model 590 trigger input.

Aid in performing cable correction (see paragraph 1.9.3)

l-4

General

SECTION 1

Information

1.9 OPTIONAL ACCESSORIES

The optional accessories described below can be used to

enhance Mode1 5958 capabilities and are available from
Keithley Instruments or third-party sources as noted.

1.9.1 Voltage Source

Mode1 230-l Programmable Voltage Source: Extends the
normal i2OV DC bias range of a Model 5958 system to
+lOOV and also adds light-control capability using the
digital I/O port. A Model 4851 BNC Shorting Plug and a
BNC cable are also required for this application.

1.92 Connecting Cables

Model 7007 Shielded IEEE-488 Cables: Shielded
IEEE488 cables with a shielded connector on e&h end
(metric). Available as Model 7007-l Urn, 3.3 ft. long), and
Model 7007-2 (Zm, 6.6 ft. long).

Model 7051 BNC to BNC Cables: 5OQ (RG-580 BNC to
BNC coaxial cables, available as Model 7051-2 (0.6m, 2ft.
long), Model 7051-5 (1.5m, 5 ft. long), and Model 7051-10
(3m, 10 ft. long).

1.9.3 Calibration Sources

Model 5905 Calibration Sources: Includes 4.7pF, 18pF,
47pF, 18OpF, 47OpF, and 1.8nF capacitance sources,
180@, 1.8mS, and 18mS conductance sources and two fe­male-to-female BNC barrels. These sources can be used
to cable calibrate the 2OpF. 200pF, and 2nF ranges, and
they can also be used for standard instrument calibration
of the 20pF through 2nF ranges.

female BNC barrels. These sources will cable calibrate
only the 2nF range.

Model 5909 Calibration Sources: Includes 47pF, 180pF,
470pF, and 1.8nF capacitance calibration sources and two
female-to-female BNC barrels. These sources will cable
calibrate the 200pF and 2nF ranges.

1.9.4 Rack Mount Kits

Model 1019A-1 Fixed Rack Mount Kit: Mounts the op­tional Mode1 230-l Voltage Source in a standard 19-inch
rack or equipment cabinet.

Model 1019A-2 Fixed Rack Mount Kit: Mounts the op­tional Model 230-l Voltage Source and a second similar
instrument side-by-side in a standard 19-inch rack or
equipment cabinet.

Model 2288 Fixed Rack Mount Kit: Mounts one Model
590C-VAnalyzerinastandard19inchrackorequipment
cabinet.

Model 8000-14 Equipment Cabinet: A standard 14.inch
high, 19-inch wide equipment cabinet, which can be used
to enclose instruments used with the Model 5958. Rack
mount kits (above) are also required.

1.95 Hot Chuck and Probe Station

Temptronic TPO315B Thermochuck accessories:

. 4,5,6, or 8” hot chuck

l

Extended temperature range option (300°C)

Model 5906 Calibration Sources: Includes 0.5pF, 1.5pF,

4.7pF, ISpF, 47pF. 180pF, 47OpF, 1.8nF, 4.7nF, and 18nF
capacitance sources, 1.8@, 18@,180@, 1.8mS. and 18mS
conductance sxxces and two female-to-female BNC bar­rels. These sources will cabie calibrate all Model 590
ranges (2pF, 20pF, 200pF, and 2nF), and they can also be
used for standard instrument calibration of the 2pF
through 2nF ranges.

Model 5907 Calibration Sources: Includes 470pF and

1.8nF capacitance calibration sources and two femaie-to-

Manual or semi-automatic probe station equipped with:

l

Microscope

. Micropositioners

l

Coax probe tips

l

IEEE-488 interface (for programmable positioning)

Contact the Keithley Instruments, Inc Applications De-.
partment for recommendations on these items.

l-5

SECTION 1

General information

1.9.6 Switching Equipment

Optional switching equipment is used for multiple de­vice testing using BTS and Zerbst test sequences. The fol­lowing paragraphs summarize recommended switching
mainframes and cards. Table 1-8 summarizes recom­mended switching equipment and important specifica­tions.

Switching Mainframes

Model 705/706 Scanners: The Model 705 Scanner pro­vides two-card switching capability with up to 20 chan­nels or 40 crosspoints per mainframe, while the Model
706 can switch 100 channels or 200 matrix crosspoints per
mainframe. Both the Models 705 and 706 have a standard
IEEE-488 interface which allows automated control of
switching functions associated with Model 5958 systems.
Cards which can be used with the Models 705 and 706 in­clude 705X and 715X cards discussed below.

Model 707 Switching Matrix The Model 707 Switching
Matrix can accommodate up to six compatible 707X or
717X cards (see below). The Model 707 has a standard
IEEE-468 interface and can store up to 100 relay setups,
simplifying system configuration. Separate analog back­planes assure that maximum signal integrity is main­tained.

Switching Cards

solution for high-frequency C-V switching of up to five
DUTS.

Model 7152 Low-Current 4 x 5 Matrix Card: The Model
7152MatrixCardis organizedas a4rowby5 columnma­trix and provides l-pole, low-current switching suitable
for general-purpose I-V/C-V applications.

Model 707 Switching Cards

Model 7072 Semiconductor Matrix Card: Organized as

an 8 x 12 matrix, the Model 7072 provides two paths for
high-hequency C-V measurements, two paths for sub­picoamp I-V measurements, and has four general­purpose paths. The Model 7072 is recommended for gen-

eral I-V/C-V applications. NOTE: optional Model
707%TRX-BNC triax-to-BNC adapters (one per path) are
required to connect BNC cables to the Model 7072.

Model 7073 Coaxial Matrix Card: The Model 7073 is or­ganized as an 8 x 12 matrix and provides l-pole, 5OQ
switching on each path. The Model 7073 is recommended
for BTS parallel switching.

Model 7074D/7075 Multiplexer Cards: Each Model
7074D/7075 has eight 1 x 12 multiplexer banks, which
can be combined in several multiplexer configurations
uptolx96.

Model 705/706 Switching Cards

Model 7062 RF Switch Card: The Model 7062 has two in­dependent 1 of 5 switches and provides an inexpensive

l-6

Model 7173-50 Two-Pole High Frequency Matrix Card:
The Model 7173 provides 4 rows by 8 columns of 2-pole,
5OQ switching, and is ideal for high-frequency C-V app!i­cations except where parallel switching is required.

Table l-8. Switch Selection Table for Model 5958 Tests

General

SECTION 1

Information

Zerbst Sequence
BTS Sequential
BTS I’arallel
Bandwidth
Stray Capacitance
Shunt Capacitance
Offset Current

Maximum Voltage
Maximum Current

Connection Scheme

DUTs per Card
M&fraIW

7062

X
X

5ooMHz

no spec
no spec
no spec

24V

5omA

BNC

705:706

7152 7075 7056 7073 7173 7072’

X
X X X
X X

6OMHz 3OMHz

<lpF <3pF

<lOOpF

<lpA <lOOpA

zoov 1lOV 150v

X X

X

1OMHz

<20pF

<lOOpF <50pF

-

X
X
X

3oMHz

0.3pF

220pF

lOpA typ

2oov

X
X

3ooMHz

<O.O4pF

150pF

<200pA

3ov

5-15MHz

0.4-IpF
no spec

A, B, 1pA

G, H 20pA

HV:l.lkV

IA

vi-series/

BNC
2-2.5

705/706

1A

Sub-D/

Dress

Cable

48

707

25OmA

Screw

TfXIXlini

5

705/706

I

1A

BNC

Common

LO

6

707

0.5A
BNC

T&U/

6

707

X
X
X

2oov

1A

3-lug

BNC

6

707

l-7

SECTION 2

Getting Started

2.1 INTRODUCTION

This section includes introductory information on get-

tingyourModel5958softwareupandrtmningasquickly
as possible. For details on test setup, measurement, and
analysis, refer to Sections 3,4, and 5 respectively.

Section 2 contains the following:

2.2 IEEE-488 Bus Considerations: Gives an overview of
IEEE-488 interface installation, bus connections,
and primary address.

2.3 Software Installation: Details software backup and
installing the software on your hard drive.

2.4 Test Connections: Shows BTS and Zerbst test con­nections as well as connections for the optional
Model 230-l Voltage Source and matrix card.

2.5 Cable Correction: Covers the cable correction pro­cedure necessary to optimize measurement XCU­racy.

2.6 Running the Software: Covers running the soft­ware, menus, as well as run time considerations.

2.2 IEEE-488 BUS CONSIDERATIONS

The following paragraphs discuss computer IEEE-488 in­terface card installation, bus connections, and primary
address.

2.2.1

AT Interface Card Installation

Model 5956 can be used with AT and compatible comput­ers and the following IEEE-488 interfaces:

l

IOtech GP488, GP488A, and Power488

l

National Instruments I’CII, I’CIIA, and PC111

l

Keithley Instruments PC-48%CEC and 4-488~CEC

l

Capitol Equipment Corp. PC-488 and 4-488

. IBMGPIB

Before installation, note the following interface board
settings so that you can properly configure the bus driver
software during driver software installation:

l

I/O port address

. DMAstatus

l

Interrupts

l

System controller

Interface Card Installation

2.7 Test and Measurement Overview: Provides an

overall summary of how to perform C-V, C-t, and
BTS tests and analyze the results.

Afternoting thesesettings,install theinterfacecard in the
computer. Refer to the documentation supplied with the
card for detailed installation procedures.

2-l

SECTION 2
Getting Started

PSL? Interface Installation

Model 5958 supports l’s/2 computers with the following
IEEE-488 interface:

l

IOtech GP488/2

The I’S/2 compatible IEEE-488 interface card should be
installed in the computer using the manufacturer’s in­structions. Refer to the interface card documentation for
IEEE-488 bus driver installation instructions and infor­mation on using the IBM I’S/2 computer reference disk­ette.

2.2.2

Bus Connections

For proper operation, the Model 590 C-V Analyzer, hot
chuck, and Model 230-l Voltage Source and switching
mainframe (if used)

must

be connected to the computer
IEEE-488 interface. Shielded IEEE-488 cables, such as the
Model 7007, should be used for bus connections to mini­mize electrical noise, which

could

affect Model 5958

measurements.

Figure 2-l shows typical IEEE-488 bus connections be­tween the computer, the Model 590 C-V Analyzer, and

the optional Model 230-l Voltage Source. Bus connec­tions to the hot chuck and switching matrix interface are

similar.

2.2.3 Default Primary Address Settings

The default primary address of each device associated
with the Model 5958 is as follows:

. Model 590 C-V Analyzer: 15
. Temptronic 0315B Thermochuck: 9
. Optional Model 230-I Voltage Source: 13

You can select other addresses for the Models 590 and

230-I during installation. The thermochuck primary ad-

dress is defined in the hot chuck control file (see Section

6).

If a switching mainframe is used, the primary address
must be that same as specified in the user-defined switch

control file (see Section 6). Also, any other devices con-

nected to the same IEEE-488 bus must not use any of the
primary addresses listed above. Each device on the bus
must have a unique primary address.

Figure 2-1.

2-2

Optional Model 23

Voltage source

Model 590

c-v Analyzer

IEEE488 Bus Connections

TO HO, Chuck

and/or Switching

Matrix IEEE-488

meriacs

/

Model 7007-Z Shielded

Cable (3rn)

Model 7007-Z

Shielded Cable Wnl

connect 10

^~~~

IBM. AT, Psi2 (or

compatible) Cornput

2.3 SOFTWARE INSTALLATION

SECTION 2

Getting Started

Place the installation disk in drive A: or B:, then type:

1.

2.3.1 Software Backup

Before installing the software on your hard disk, it is
strongly recommended that you make backup copies of
each of the disks supplied with the Model 5958. Use the
DOS DISKCOPY command to make copies. For two­floppy disk systems, the general command syntax is:

DISKCOPY A: B: <Enter>

Here, the source disk is assumed to be in drive A, and the
target (copy) disk is in drive B. (Note that DISK COPY can

be used only for the same type of drives; use COPY *.’ for
dissimilar drives.)

Similarly, the command for single-floppy drive systems
is:

DISKCOPY A: A: <Enter>

After copying all supplied disks, put the original disks
away for safekeeping.

2.3.2 Installation Procedure

Follow the appropriate procedure below to install the
Model 5958 software on your hard disk. The following
paragraphs discuss using INSTALL.EXE to install the
software.

NOTE
INSTALL.EXE can also be used to reconfigure
the software after installation. Select the
reconfigure option to change an existing soft­ware configuration. (You can also run
EQUIP.EXE after installation to select graph­ics and printer/plotter configurations.) You
should have at least 5MB of free disk space
prior to installing the Model 5958. (You can
save some disk space by choosing not to in­stall source files during installation if they are
not needed.)

A: <Enter>
or
B: <Enter>

2. Type the following to start the installation process:
INSTALL <Enter>
Follow the prompts on the screen to select the dlrec-

3.
tories for the various files and programs. You can se­lect installation defaults, which are summarized in
Table 2-1, or your own directory names, as desired.
You can also choose not to install source files if de­sired (source files are required only if you intend to
modify the program).

4.

Select whether or not you are using a IModel 82 Si­multaneous C-V System. NOTE: refer to Appendix
H for further considerations when using a combined
Model 82/5958 system.

5.

Next select whether an option Model 230-I Voltage
Source, hot chuck, and switching mainframe are pre­sent in your system.

If you are using a Model 230-1, select whether or not

6.
you will be using a light to speed up equilibrium.

(Refer to paragraph 2.4.4 for light connections.)
Indicate whether your Model 590 C-V Analyzer has

7.

1OOkHz and/or 1MHz options.

8.

Choose the lime printer. Note: this selection affects

only text print-outs. Graphics printer operation is se­lected separately (see below).

9.

Be sure to select the correct Model 590 and Model
230-l primary addresses (only if you are not using a
Model 82 system).
Continue the installation process by selecting appro-

10.
priate graphics cards, printers, and plotters at the ap­propriate prompts. Table 2-2 summarizes graphics
cards, and Table 2-3 lists supported printers and
plotters. Also, refer to paragraph 2.3.5 below for cer­tain plotter and printer considerations.

NOTE
The Model 5958 will run properly on most
VGA, Super VGA, and 8514 monitor com-

wter svstems in the EGA mode. To use the
bode1 $958 with any of these graphics sys­tems, select the EGA graphics mode at the ap­propriate prompt.

2-3

SECTION 2
Getting SLurted

Table 2-1. Default Directories

Sub-directory
C:\KTHLY-CV\MODEL%
C:\KTHLY_CV\MODEL58\CAL

C:\KTHLY_CV\MODEL58\CTRL
C:\KTHLY_CV\MODEL58\DAT
C:\KTHLY_CV\MODEL58\PAR
C:\KTHLY_CV\MODEL58\SEQ
C:\KTHLY_CV\MODEL58\SRC
C:\KTHLY_CV\MODEL58\TMP
C:\IEEE488

Graphics Board Mode

IBM color board
Tsent EVA
Tecmar Graphics Master

Hercules Monochrome
Enhanced Graphics Adapter (EGA)
T&Video AT
TeleVideo HRCGB
Sigma Color 400
AT&T 6300
Corona PC
Corona PC400
Corona ATP

HP. Vectra
T.1 Professional
Genoa SuperEGA HiRes
IBM VGA*

* Sdect EGA mode

Table 2-2.

contents
KI5958CV.EXE, configuration file, CONFIG.GPC, .FNT or other

files needed by KI5958CV.EXE, CABLECAL.EXE
Cable calibration data files, ‘.CAL
Switch control and hot chuck control files, ‘SWC and *.HCC
Data destination files, ‘.DAT and *.CTD
C-V, C-t, and stress cycle parameter files, *.CVP, *.CTl’, and ‘.SCP
BTS and Zerbst test sequence files, *.BTS and “.ZTS
Source code, library, and utilities to rebuild.
Temporary files used for program communication.*
IOtech Driver488 GPIB interface driver software*

Supported Graphics Cards

Resolution

monochrome

monochrome
16 color
monochrome
16 color
monochrome
16 color
16 color
native graphics
native graphics
native graphics IBM emulation 640 x 400
monochrome
monochrome
monochrome
16 color
16 color
monochrome

640 x 200

640 x 480
720 x 700
640 x 400
720 x 348

640 x 350

640 x 400

640 x 400
640 x 400
640 x 400
640 x 325

640 x 400
640 x 400
720 x 300
800 x 600
640 x 480
640 x 480

2-4

SECTION 2

cettim Started

Table 2-3.

Printer/Plotter

C. Itoh Prowriter; NEC 8023,8025
Epson FX, RX; Cannon BJSO
Okidata 92,93
IBM Graphic or Professional; Epson MX
Tektronix 4695 ink jet printer
Toshiba P321 and P351 (unidirectional printing)
Corona Laser Printer (requires extra 128K memory)
Houston DMP-XX plotters
Hewlett-Packard HP-GL plotters
C. Itoh 24LQ
Watanabe Digi-Plot plotter
Epson LQ-1500
Smith Corona DlOO
Epson HI-80 plotter
Hewlett-Packard LaserJet+ (or compatible)
Micro Peripherals 150,180
Okidata 192+ (8-bit graphics)
CALCOMP ColorMaster
Toshiba 1340 (no unidirectional)
HI’ ThinkJet (SW5 up, 6.5 X 8.5 in.)
Roland DXY-800 plotter
Toshiba P351C with color ribbon
NEC Pinwriter l’ series
Quadram QuadLaser (with vector software)
NEC Pinwriter P series (with color ribbon)

Supported Printers and Plotters

NOTE

After modifying CONFIGSYS, reboot the
comDuter (Dress<Ctrl>-<Alt>-<Del>) to place

the changes into effect.

2.3.5

Printer Hard Copy Resolution
Selecting a plotting option on the graphics menu gener-

ates a half-page plot with low resolution. To control the
size and resolution of the plot from the graphics menu,
type in one of the following letters:

Selecting one of these options automatically generates

the corresponding plot.

Plotter support

Model 5958 supports Hewlett-Packard, Watanabe,
Houston, and Epson pen plotters that use the HP-GL
graphics language. For HP plotters not listed in the con­figuration menu, first try one of the listed plotters. For ex­ample, select 7475A for 7470A.

Plotter and Printer Considerations

“m” half page, low resolution
“M” half page, high resolution
“I” full page, low resolution
“L.” full page, high resolution

2.3.3 IEEE-488 Driver Software
Installation

The driver software for the IEEE488 interface card
should be installed per manufacturer’s recommenda-

tions. Refer to the IEEE-488 driver software documenta-

tion for complete details.

2.3.4 CONFIG.SYS Modification

For most computer configurations, you should assign at

least 20 buffers and files in CONFIG.SYS. Use a text edi-

tor to modify or add the following lines:

FILES = 20
BUFFERS = 20

Serial Printer and Plotter Support

Model 5958 will drive printers or plotters connected to
either the serial or paiallel port of your computer. If you
are using the serial port, you must initialize the port by
selecting the proper parameters for your particular serial
connection during installation or reconfiguration. For
Hewlett-Packard serial plotters, select eight data bits and
one stop bit serial parameters.

The graphics routines use polling to send characters to

the serial port. Polling means that a character is sent, and

a check is made to see if the device is busy. If so, the mu-

tine waits until the device is ready to accept another char­acter. However, if the serial port device sends back any
character other than busy, the transmission sequence will
be interrupted. For that reason, be sure to set your printer

or plotter to its least intelligent mode (turn off handshak-

ing and status reports). Also, be sue to use the proper se-

rial cable, as the software requires that all serial signal

lines be present.

2-j

SECTION 2
Gettin&! Stuarted

Laser Printer support

Model 5958 supports a Hewlett-Packard LaserJet+ or
compatible printer with full-page 300dpi resolution.
However, the printer must be equipped with at least

1.5MB of memory to support this resolution. In addition,
some computer configurations may not have enough
memory to support the required large bit map. In those
cases, an “m” (300dpi, l/2 page) or “I” (150dpi, full page)
plot can be performed.

GPIB (IEEE-488 Bus Plotter Support)

A GPIB HP-GL plotter can be used with the Model 5958

by selecting the “output to Driver 488 plotter” option on

the configuration menu. The plotter must be set for the
addressable mode using a primary address of 5.

Note that a GPIB printer cannot be used.

2.3.6 Memory and Hard Disk
Considerations

Your computer should have at least 400KB free base
memory before running the software. Also, you should
have at least 5MB of free hard disk space prior to installa­tmn.

it is recommended that the entire probe station be
mounted in a suitable metal enclosure which is electri­cally connected to C-V Analyzer OUTPUT and INPUT
LO. (Mounting chassis-mount BNC connectors on the en­closure chassis will electrically connect the enclosure to
LO.)

WARNING
Connect the shielded enclosure to safety
earth ground using MSAWG or larger wire

before use.

NOTE
Connections for the hot chuck, which is re­wired for BTS measurements. are not shown
h Figure 2-2. Refer to the instruction manual
for the hot chuck equipment for operating de­tails pertaining to that equipment. Note, how­ever, that some hot chuck.? connect chassis
ground to the chuck. In that case, setup the
Model 590 for floating operation (set rear
panel ANALOG COMMON GROUNDING
switch to the ungrounded position.)

When making C-V analyzer connections, keep the fol­lowing points in mind:

2.4 TEST CONNECTIONS

2.4.1

Figure 2-2 shows typical connections between the Model
590 C-V Analyzer and a probe station. To minimize noise,

2-6

C-V Analyzer Connections

Use only 5OQ coaxial cables of good quality.

Keep cable lengths as short as possible.
Use the minimum number of connectors possible.
Perform cable correction before making measure­ments (paragraph 2.5).
Connect INPUT to gate, OUTPUT to substrate to mini­mize noise.

SECTION 2

Gdtinv Started

Figure 2-2.

2.4.2

Typical C-V Analyzer Connections

Optional Voltage Source 2.4.3
Connections

AnoptionalModel230-1 VoltageSourcemay beuse with

the Model 5958 system to extend the voltage range to

k1OOV. Figure 2-3 shows connections between the op-

tional Model 230-I Voltage Source and the C-V Analyzer.

In addition to the source connecting cable, a BNC short­ingcap (Mode14851) must be connected where indicated,
and the external trigger cable must also be in place.

WARNING
Hazardous voltage may be
nals when the Model 230-l Voltage Source is
connected to the system.

present on

termi-

Typical Switching Card
Connections

Amatrixcardorscannercard andaswitchingmainframe
can be added to a Model 5956 test system to perform
automatic test sequencing. Figure 24 shows typical con­nections between the Model 590 and a Model 7062 RF
switch card, which can be used to switch up to five Dolts.
FigureZ-5 shows typical connections using a Model
7173-50 Two-Pole High Frequency Matrix Card installed
inaModel707SwitchingMainframe.Seeparagraph4.5.1
for more details on switch connections.

NOTE
In order to use a switching mainframe, you
must first configure an appropriate switch

control

control files. Section 6 discusses switching
control in detail. Appendix J covers default
switch control files supplied with the Model

5958.

file or use one of the supplied switch

2-7

SECTION 2
Getting Started

Optional Voltage Source Connections

‘igure 24.

2-8

RF Switch Card Example

Model

590 C-V A