Keithley Instruments, Inc.
28775 Aurora Road
Cleveland, Ohio 44139
1-888-KEITHLEY
www.keithley.com
Model 4210-MMPC-S
Multi-Measurement Prober Cable Kit
Quick Start Guide
Overview
The Keithley Instruments Model 4210-MMPC-S multi-measurement cable kit (see Figure 1) is a collection of
standard and custom connectors and accessories used to take I-V and C-V measurements using a sin gle prober
cable setup. It is also used with the Keithley Model 4200-PIV-A package to perform pulse I-V measurements. This
kit has been assembled for use with the Suss Micro Tec PA200/300 prober series.
NOTE For C-V testing, this Quick Start Guide applies to both the Model 4200-CVU card and
the new 1 kHz Model 4210-CVU card. For pulse I-V testing, this guide also applies to
the Models 4200-PG2 and 4205-PG2 pulse generators.
Prober cable kit contents
Figure 1 shows the cables, adapters, and supplies that are included in the Model 4210-MMPC-S
multi-measurement cable kit.
Figure 1: Model 4210-MMPC-S multi-measurement prober cable kit
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Model 4210 MMPC-S Quick Start Guide
Quick Start Guide topics
The guide contains information about the installation and use of this cable kit:
• Connecting Model 4200 instrumentation to the prober bulkhead: Explains how to make connections from
the Model 4200 to the prober bulkhead.
• Installing the prober cable kits: Explains how to make connections from the prober bulkh ead to the prober
pins.
• Usage scenarios: Provides the specific prober cable setups for I-V testing (2-wire and 4-wire) and C-V
testing (2-wire and 4-wire). It also provides the setup for performing pulse I-V measurements using the
Keithley Model 4200-PIV-A.
Related documents
The following documents (in PDF format) are located on the Model 4200 Complete Reference CD:
• PA-993: This is a one-page packing list for the Model 4210-MMPC-S Multi-Measurement Prober Cable Kit
for the Suss Micro Tec PA200/300 series prober. A photo shows all the components of the cable kit.
• PA-994: This is a one-page packing list for the Model 4210-MMPC-C Multi-Measurement Prober Cable Kit
for the Cascade MicroTech 12000 series prober. A photo shows all the components of the cable kit.
• White Paper – Labs’ Demands for Greater Measurement Flexibility Require Cabling Systems Capable of
Accommodating Multiple Measurement Types: This white paper explains the different cabling requireme nts
for I-V, C-V, and pulse I-V testing. It also describes an easy-to-use single multi-measurement cabling
system (Model 4210-MMPC-S for the Suss Micro Tec PA200/300 prober).
Connecting Model 4200 instrumentation to the prober bulkhead
WARNING To prevent injury or death due to electric shock, remove all power from the
Model 4200-SCS and shut down the Suss prober before installing the prober
cable kit.
The Model 4200 connects to the female triax connectors on the prober bulkh ead. Figure 2 shows the triax
connectors on one of the two connection panels of the prober.
Figure 2: Prober bulkhead female triax connectors
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Model 4210 MMPC-S Quick Start Guide
I-V testing
For I-V testing, connect the triax cables of your Model 4200 source-measure units (SMUs) to the standard female
triax connectors on the bulkhead of the prober. Figure 3 shows two Model 4200 SMU prober connection s.
NOTE Figure 3 shows SMUs that do not use preamps. These SMUs use the supplied triax
cables that are terminated with a miniature triax connector on one end and a standard
triax connector on the other end. If your SMUs are equipped with preamps, use the
supplied cables that are terminated with standard triax connectors on both ends.
Figure 3 shows both cables.
Figure 3: Model 4200 SMU connections to the prober
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Model 4210 MMPC-S Quick Start Guide
C-V testing
Two prober cable kits include the cable adapters needed to connect the SubMin iature version A (SMA) cables of
the Model 4210-CVU to the female triax connectors on the bulkhead of the prober. Figure 4 shows how to make the
connections. A torque wrench is supplied with the Model 4210-CVU.
Figure 4: Model 4210-CVU prober connections
Pulse I-V testing using the Keithley Model 4200-PIV-A
Perform 4-pin pulse I-V measurements using four prober cable kits with the Keithley Instruments Model 4200-PIV-A
package, which includes a scope card, pulse generator card, software, and other components.
Use the supplied cables and connectors to connect the Model 4200 to the bulkhead of the pro ber (see Figures 5
and 6).
Figure 5 shows the Model 4200 connections to the prober and the trigger connection betwee n the scope card
(Model 4200-SCP2) and pulse generator card (Model 4205-PG2). Figure 6 identifies the cables and adapters used
to make the connections.
NOTE Figure 5 shows source-measure units (SMUs) that are not equipped with preamps.
These SMUs use the supplied triax cables that are terminated with a miniature triax
connector on one end and a standard triax connector on the other end. If your SMUs
are equipped with preamps, use the supplied cables that are terminated with standard
triax connectors on both ends. Figure 6D shows both cables.
NOTE Four prober cable kits are required for 4-pin, PIV-A pulse I-V testing.
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Model 4210 MMPC-S Quick Start Guide
Figure 5: Model 4200-PIV-A instrumentation connections
Figure 6: Cables and adapters used for instrumentation connections
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Model 4210 MMPC-S Quick Start Guide
Installing the prober cable kits; basic cable setup
Figure 7 shows the basic cable setup for the 2-pin I-V and C-V testing scenarios described in this guide. The 4-pin
I-V and 4-pin C-V testing scenarios require minor setup changes; pulse I-V setup, which is more compl ex, is
described later in this quick start guide.
Figure 7: Basic 2-pin prober cable setup
Installation guidelines
Figure 8 shows the prober cable assemblies of two Model 4200-MMPC-S kits installed in a Suss Micro Tec
PA300 prober.
Figure 8: Two prober cable assemblies installed in Suss prober
• Each prober cable assembly is secured to a manipulator by a single mounting screw. Figure 8 shows the
location of the mounting screws. Firmly tighten the cable assemblies to the manipulators.
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Model 4210 MMPC-S Quick Start Guide
• As shown in Figure 8, route the blue cables along the sides of the manipulators. Use the cable clamps to
firmly secure the cables to the manipulators. Make sure the clamps are tight enough to keep the cables from
moving.
• Connect a black jumper from one cable assembly to the other. This jumper (shown in Figure 8) connects the
commons of the two cable assemblies together. The jumper plugs into the ends of the assembly blocks. It is
good practice to install the second jumper. It not only improves the connection, but it is a good place to store
the extra jumper. Figure 9 shows another view of the jumper.
Figure 9: Front view of the installed prober cable assemblies
• Connect the cable wires of the cable assemblies to the APT probe tips, as shown in Figure 9.
• Figure 9 shows an example of good routing for the jumper and cable wires. When routing the wires,
consider the possible movements of the manipulators.
• Connect the triax to triax cables to the triax connectors on the prober bulkhead (see Figure 7). Connect the
other ends of the triax cables to the prober cable assemblies using the supplied triax female to triax female
adapters.
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Model 4210 MMPC-S Quick Start Guide
Usage scenarios
I-V testing: 2-pin I-V setup
NOTE The setup for 2-pin I-V testing requires two prober cable kits.
With two Model 4200-SMUs connected to the prober bulkhead, use the fundamental setup shown in Figure 10 to
perform 2-pin I-V testing. Figure 3 shows the SMU connections to the outside of the bulkhead.
Figure 10: Test setup for 2-pin I-V testing
I-V testing: 4-pin I-V setup
With four Model 4200-SMUs connected to the prober bulkhead, use the setup shown in Figure 11 to perform 4-pin
I-V testing. Figure 3 shows two SMUs connected to one of the bulkhead connection panels. Connect two additional
SMUs to the other bulkhead connection panel.
NOTE The setup for 4-pin I-V testing requires four prober cable kits.
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Model 4210 MMPC-S Quick Start Guide
Figure 11: Test setup for 4-pin I-V testing
C-V testing: 2-pin C-V setup
NOTE The setup for 2-pin C-V testing requires two prober cable kits.
With a Model 4210-CVU connected to the prober bulkhead, use the fundamental setup shown in Figure 12 to
perform 2-pin C-V testing. Figure 4 shows the CVU connections to the outside of the bulkhead.
Figure 12: Test setup for 2-pin C-V testing
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Model 4210 MMPC-S Quick Start Guide
C-V testing: 4-pin C-V setup
NOTE The setup for 4-pin C-V testing requires four prober cable kits.
A typical test for a field effect transistor (FET) is to connect the drain, bulk, and source together and perform the
measurement across the gate. With a Model 4200-CVU connected to the prober bulkhead, use the setup shown in
Figure 13 to perform 4-pin C-V testing.
Figure 13: Test setup for 4-pin C-V testing
Four-pin pulse I-V test setup using the Keithley Model 4200-PIV-A
NOTE The setup for 4-pin pulse I-V testing requires four prober cable kits.
The Model 4200-PIV-A is a factory-installed package that includes a scope card, pulse gene rator card, software
and other components to perform 4-pin pulse I-V measurements.
The test setup for using the Model 4200-PIV-A is shown in Figures 14, 15, and 16. Figure 14 shows the
connections from the prober bulkhead to the gate and source of the 4-terminal device. Figure 15 shows the
connections from the bulkhead to the drain and bulk. Figure 16 shows the jumper connections. The four jumpers
connect the commons of the cable assemblies together. Figure 5 shows how the Model 4200 connects to the
outside of the bulkhead.
NOTE Details on using the Model 4200-PIV-A package are provided in the Model 4200-SCS
User’s Manual (see How to use the Model 4200-SCS to perform a pulse I-V test on
my device in Section 3). Figure 3-25 shows the block diagram of the test setup.
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Model 4210 MMPC-S Quick Start Guide
Figure 14: Connections to the gate and source of the DUT
Figure 15: Connections to the drain and bulk
Figure 16: Jumper connections
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