Model 4210-CVU
Keithley Instruments
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28775 Aurora Road
Cleveland, Ohio 44139
1-800-935-5595
http://www.tek.com/keithley
Capacitance Voltage Unit (CVU) Quick Start Guide
Overview
You can quickly begin using your Keithley Instruments Model 4210-CVU Capacitance Voltage Unit by following
the steps in this Quick Start Guide (QSG). For det ailed information about the 4210-CVU, refer to the Complete
Reference CD-ROM that came with your Model 4200-SCS S em i conductor Characterization System.
Follow the steps outlined below and detailed in the following pages to begin using your 4210-CVU:
• Step 1: Unpack your 4200-SCS.
• Step 2: Make basic system conn ect ions (power cord, keyboard, and optional printer).
• Step 3: Connect a test fixture to the 42 00-S CS (4210-CVU card preinstalled).
• Step 4: Power up and log on.
• Step 5: Start the KITE software and select the cv-cap test in the default project.
• Step 6: Define your test.
• Step 7: Run the cv-cap test.
• Step 8: View the data sheet.
• Step 9: View the graph.
• Step 10: Print and export data.
The example in this QSG uses the default project and runs t he cv-cap test. To select a different project or test,
you must modify the procedures as appropriate. Figure 1 shows the Keithley Interactive Test Environme nt
(KITE) window after the default project and cv cap t est are selected.
Figure 1: KITE interface with the cv-cap test selected in the default project
PA-952 Rev. B / December 2016 *PPA-952B* 1
Model 4210-CVU Quick Start Guide
Step 1: Unpack your 4200-SCS
The box contains:
• 4200-SCS Semiconductor Cha racterization System, with the 4210-CVU card integrated into the mainframe.
How to lift the 4200-SCS:
• Lift from the bottom, not from the front bezel.
• Set it on a bench or install it in a rack using the optional slide rack-mounting kit.
• Keyboard with built-in pointing device
• Two triax cables for each source-measure unit (SMU)
• Four red SMA to SMA cables for the 4210-CVU
• Connectors: Four SMA to BNC adapters; 2 BNC tees
• Y-Cable: Use to connect the keyboard t o the mainframe
• Power cord
• Model 4200-SCS KTE Interactive CD-ROM
• Model 4200-SCS Complete Refer ence CD-ROM
Step 2: Make basic system connections (power cord, keyboard, and optional printer)
Basic system connections to the 4200-SCS (shown in Figure 2) include the keyboard (which has a built-in
pointing device), the supplied power cord, and an optional printer. If you are using a USB printer, connect it
to the USB port.
Plug the female end of the supplied power cord into the 4200-SCS. Do not connect the male
end to line power at this time. Steps 2 and 3 in this Quick Start Guide must be performed with
the line power disconnected.
Figure 2: System connections
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Model 4210-CVU Quick Start Guide
Step 3: Connect a test fixture to the 4200-SCS (4210-CVU card preinstalled)
Figure 3 shows how to connect a BNC test fixture to the 4200-SCS. The red SMA cables and BNC
adapters are supplied with the 4210-CVU card.
Figure 3: DUT test fixture connections to the 4210-CVU
Step 4: Power up and log on
1. Make sure the POWER switch is in the OFF (out) position. The POWER switch is on the front panel in the
lower right corner.
2. Plug the male end of the line cord into a properly grounded AC line power receptacle.
3. Turn on the 4200-SCS by pushing in the POWER switch to the ON (in) position.
4. At the KIUSER prompt, press ENTER. There is no password for this account.
When first starting a KTE Interactive software tool, you must answer "Yes" to an on-screen license
agreement. Answering "No" makes your system nonfunctional until you reinstall the software.
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Model 4210-CVU Quick Start Guide
Double-click to start KITE
Step 5: Start the KITE software and select the cv-cap test in the defaul t project
1. Start the KITE software by double-clicking the KITE icon on the Microsoft® Windows® desktop (see
Figure 4).
Figure 4: The KITE icon
When KITE starts, the default project will open automatically. If a different project opens, perfor m t he t hree
steps in Figure 5 to open the default project. The P roject Navigator for the default project is shown in
Figure 1.
If the Project Navigator is not displayed when KITE i s start ed, click the View menu and select the
Project Navigator item. The View menu is located on the upper left side of the menu bar in the KITE
window.
Figure 5: Open default project
1 From the File menu,
click Open Project
When browsing, use the following directory pat h to locate the default.kpr project file:
C:\S4200\kiuser\Projects\default\default.kpr
2 Use the browser to select
the default project
3 Click Open to open
the default project
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Model 4210-CVU Quick Start Guide
checkbox to insert a
2. Select the cv-cap test, as shown in Figure 6.
Figure 6: Default project in Project Navigator: Selecting th e cv-cap test
Double-click cv-cap to select the
test
The checkbox for the cv-cap test
must be checked in order to run
the test. If unchecked, click the
Step 6: Define your test
The test is defined from the test Definition tab shown in Figure 7. As shown in the tab, the device in this
example is connected to the CVH1 and the CVL1 terminals of t he 4210-CVU. In this test, the DC bias is swept
from –5 V to 5 V in 0.2 V steps, with a 1 MHz capacitance measurement made at each step.
1. You can change the setup for the cv-cap test. A settings window is displayed by clicking the appropriate
FORCE MEASURE bar, as shown in Figure 7. Figure 8 shows the Forcing Functions / Measu re Options
window for cv-cap setup.
Figure 7: cv-cap Definition tab: How to display a setup window for the CVU instrument
A. Select Definition tab
B. Click to set up the CVH1 terminal
settings
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Model 4210-CVU Quick Start Guide
Click Run Test
to start test.
Figure 8: Setup for CVU pin CVH1
These parameters
set up the DC bias
sweep
This pull-down menu
selects the format of
the measured data
(e.g., the Measure
Model)
Key AC
settings
2. After making any changes to the test definition, cli ck the Save All button on the toolbar to save the settings
(see Figure 9).
Figure 9: The Save All button
Click Save All to
save settings.
Step 7: Run the cv-cap test
1. In the Project Navigator (see Figure 6), make sure the cv-cap test is highlighted and the checkbox is
checked.
2. On the toolbar, click the green Run Test button to run the t est one time (see Figure 10).
Figure 10: The Run Test button
While the test is running, the Run Test button turns gray and the Abort Test button turns red. In addition, the
MEASURING indicator on the lower right corner of the front panel is on whil e the test is running. When the test is
finished, the Run Test button turns green.
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Model 4210-CVU Quick Start Guide
Settings Sheet
Troubleshooting hints
A selected test will not run if the Run Test button is not green. Here are a few reasons why the Run Test button
will not be green:
• A test is still running.
• The checkbox for the test is not checked (see Figure 6).
• Changes to the test setup were not saved (see Step 6B).
If a selected test still will not run, click the Status tab for the t est . This tab provides status information for
the test.
Step 8: View the data sheet
The data sheet for the cv-cap test is displayed by clicking the Sheet tab for the test. Use the tabs at the bottom
of the Sheet to display the data type. A sample data sheet for the cv-cap test is shown in Figure 11.
Figure 11: Sample data sheet for the cv-cap test
Click to export data
(see Step 10)
Click to display
Data Sheet
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Click to display
Calc Sheet
Click to display
To select more than one sheet for selective print ing, hold down the Ctrl key and then click the tab.
See Step 10 to print Sheet data.
Model 4210-CVU Quick Start Guide
– NOISE in this case
Step 9: View the graph
The graph for the cv-cap test is displayed by clicking the Graph tab for the test. A sample graph for t he cv-cap
test is shown in Figure 12. Notice that the extracted NOISE parameter is included on the screen.
The Graph Settings menu (shown in Figure 13) was used to select the Legend box and change series colors.
Figure 12: Sample graph for the vds-id test
Figure 13: Graph Settings menu
To display the Graph Settings menu: Ri ght-click
your mouse anywhere in the gr aph area.
OR
From the Tools menu, select Graph...Settings.
Use the Data
Variables properties
dialog box to display
extracted parameters
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Model 4210-CVU Quick Start Guide
Auto Y-axis
By default, the Y-axis does not automatically scale.
To automatically achieve optimum resolution for the Y-axis, s elect auto scale as follows:
1. Right-click anywhere on the graph to display t he graph settings menu shown in Figure 13.
2. In the menu, click Auto Properties to display the Axis Properti es window.
3. Click the Y1 Axis tab, and then click Auto Scale to select the box for Auto.
4. Click OK to close the window and enable auto scale for the Y-axis.
Step 10: Print and export data
Printing Sheet data
1. In the KITE workspace, click the Sheet tab to display test data. You can selectively print the Data sheet,
Calc sheet, and the Settings sheet. Figure 11 and the NOTE that follows it show how to select sheets for
printing.
2. From the FILE menu (at the upper left side of the KITE window), select the Print option.
3. In the Print setup window, there are two print options. You can print the Selected Sheets (Data, Calc, or
Sheet) or the Entire Workbook (Data, Calc, and Sheet).
4. In the Print setup window, click OK to print the data.
Printing the graph
1. In the KITE workspace, click the Graph tab to display t he graph.
2. From the FILE menu (at the upper left side of the KITE window), select the Print option.
3. In the Print setup window, click OK to print the graph.
Exporting data into a Microsoft® Excel-compatible worksheet
1. In the KITE workspace, click the Sheet tab to display the test data.
2. In the Sheet tab, click the Save As button, as shown in Figure 11.
3. From the Save As setup window, specify a file name and pat h and click Save. The default directory path
for exporting data is C:\S4200\kiuser\export.
Additional projects for the 4210-CVU
The following additional projects have been creat ed for the 4210-CVU are in the “_CV” folder in the Projects
directory:
CVU_BJT CVU_Capacitor CVU_InterconnectCap
CVU_ivcvswitch CVU_lifetime CVU_MobileIon
CVU_MOScap CVU_MOSFET CVU_nanowire
CVU_PNjunction CVU_PVcell
To open one of the above project plans:
4. Click File at the top of the Keithley Interactive Test Environment (KITE) window.
5. Select Open Project from the list.
6. In the Open KITE Project File window, navigate ba ck (up one level) to the Projects folder.
7. Double-click the _CV folder.
8. Open the CVU project.
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Model 4210-CVU Quick Start Guide
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Safety precautions
The following safety precautions s hould be observed before using this product and any associated instru mentation. Although
some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous
conditions may be present.
This product is intended for use by qualified per s onnel who recognize shock hazards and are familiar with the safety precautions
required to avoid possible inju ry. Read and follow all installation, operation, and maintenance inform ation carefully before using
the product. Refer to the user docume ntation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the pr oduct warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring t hat the
equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its i ntended function. They must be traine d in electrical safety procedures and proper use of the
instrument. They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to k eep it operating properly, for example, setting the line
voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures
explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe i ns tallations, and repair products. Only properly trained
service personnel may perform ins tallation and service procedures.
Keithley Instruments products ar e designed for use with electrical signals that are measurement, contr ol, and data I/O
connections, with low transient ov ervoltages, and must not be directly connected to mains voltage or to voltage sour ces with
high transient overvoltages. Measurement Category II (as refer enc ed in IEC 60664) connections req ui re protection for high
transient overvoltages often associated with local AC mains connections. Certain Keithley Instruments measuring instruments
may be connected to mains. These instruments will be marked as category II or higher.
Unless explicitly allowed in the spec i fications, operating manual, and ins trument labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test
fixtures. The American National S tandards Institute (ANSI) stat es that a shock hazard exists when voltage levels greater than
30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazard ous voltage is present in any
unknown circuit before measuring.
Operators of this product must be protec ted from electric shock at all tim es . The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators i n these circumstances must be trained to protect themselves from the risk of electric shock.
If the circuit is capable of operati ng at or above 1000 V, no conductive p art of the circuit may be exposed.
Do not connect switching cards direc tly to unlimited power circuits. T hey are intended to be used with impedance-limited
sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching c ards, install protective
devices to limit fault current and v ol tage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the
connecting cables, test leads, and j umpers for possible wear, cracks, or breaks before each use.
When installing equipment where ac cess to the main power cord is restricted, such as rack mounting, a separate main input
power disconnect device must be provided in close proximity to the equipment and within easy reach of the operat or .
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the c ircuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting
cables or jumpers, installing or rem oving switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (ear th)
ground. Always make measurements with dry hands while standing on a dry, insul ated surface capable of withstandi ng the
voltage being measured.
For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or
accessories are used in a manner not s pecified in the operating instructi ons, the protection provided by the equipment may be
impaired.
Model 4210-CVU Quick Start Guide
PA-952 Rev. B / December 2016 11
Do not exceed the maximum signal lev els of the instruments and accessori es. Maximum signal levels are def i ned in the
specifications and operating inf or mation and shown on the instrument panels, test fixture panels, and switching cards.
When fuses are used in a product, replac e with the same type and rating for contin ued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as protective ear th (safety ground)
connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operati on requires the use
of a lid interlock.
screw is present, connect it to protective earth (safety ground) using t he wire recommended in the user documentation.
If a
The
user documentation in all cases where the symbol is marked on the instrument.
The
contact with these voltages.
The symbol on an instrument shows that t he s urface may be hot. Avoid personal contact to prevent burns.
The
If this
properly disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains dang er s that might result in personal injury or death. Always read
the associated information ver y car efully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the ins trument. Such damage may
invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test c ables.
To maintain protection from electric shock and fire, replacement components in mains circuits — including the power
transformer, test leads, and input j ac ks — must be purchased from Keithley Instruments. Standard fuses with applicable national
safety approvals may be used if the rating and type are the same. The detacha ble mains power cord provided with the
instrument may only be replaced with a similarly rated power cord. Other components that are not safety-r elated may be
purchased from other suppliers as long as they are equivalent to the origi nal c omponent (note that selected parts should be
purchased only through Keithley Inst ruments to maintain accuracy an d functionality of the product). I f you are unsure about the
applicability of a replacement c om ponent, call a Keithley Instruments office for information.
symbol on an instrument means caution, risk of danger. The user must refer to the operating instructions located in the
symbol on an instrument means caution, risk of electric shock. Use stand ard safety precautions to avoid personal
symbol indicates a connection terminal to the equipment frame.
symbol is on a product, it indicates that mercury is present in the dis play lamp. Please note that the lamp must be
Unless otherwise noted in product-specific literature, Keithle y I nstruments instruments are desig ned to operate indoors only, in
the following environment: Altitude at or below 2,000 m (6,562 ft); tem per ature 0 °C to 50 °C (32 °F to 122 °F); and pollution
degree 1 or 2.
To clean an instrument, use a damp cloth or mild, water-based cleaner. Cle an the exterior of the instrument onl y. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill on t he i nstrument. Products that consist of a circuit board with
no case or chassis (e.g., a data acquisi tion board for installation into a computer) should never require cleani ng if handled
according to instructions. If the board becomes contaminated and oper ation is affected, the board should be returned to the
factory for proper cleaning/servicing.
Safety precaution revision as of M arch 2016.
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