Tektronix 4200-SCS Quick Start Guide
4200-SCS Semiconductor
Characterization System
Quick Start Guide
4200-903-01 Rev. C / May 2006
www.keithley.com
A GREATER MEASURE OF CONFIDENCE
Model 4200-SCS
License Agreement
NOTICE TO USERS: CAREFULLY READ THE FOLLOWING LICENSE AGREEMENT (THE “AGREEMENT”). USE OF THE
SOFTWARE (THE "SOFTWARE") PROVIDED WITH THE 4200-SEMICONDUCTOR CHARACTERIZATION SYSTEM (THE
“4200-SCS”) CONSTITUTES YOUR ACCEPTANCE OF THESE TERMS. IF YOU DO NOT AGREE WITH THE TERMS OF THIS
AGREEMENT, PROMPTLY RETURN THE SOFTWARE AND THE ACCOMPANYING ITEMS, INCLUDING ANY WRITTEN
MATERIALS AND PACKAGING, TO THE LOCATION WHERE YOU OBTAINED THEM FOR A FULL REFUND.
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Keithley Instruments ("Keithley") grants to you, subject to the terms and conditions of this Agreement, a non-exclusive, non-transferable
license to use the portion of the Software developed and owned by Keithley (the “Keithley Software”) on the 4200-SCS and to use the
manuals and other related materials pertaining to the Software which are necessary or desirable for the implementation, training or use of the
Software (the “Documentation”) for your own internal business use and not for the benefit of any other person or entity. You may copy the
Keithley Software into any machine-readable or printed form only for backup purposes or as necessary to use the Keithley Software or the
4200-SCS in accordance with this Agreement. The Keithley Software and Documentation and any copies or modifications thereof are
referred to herein as the “Licensed Product.”
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Keithley and certain third party suppliers (the “Owners”) own all right, title and interest in and to the Licensed Product. You acknowledge
that all right, title and interest in and to the Licensed Product will remain the exclusive property of the Owners, and you will not acquire any
rights in or to the Licensed Product except as expressly set forth in this Agreement. The Licensed Product contains material that is protected
by U.S. copyright laws, trade secret laws and international treaty provisions.
Limitations on Use
You may not make the Software available over the Internet or any similar networking technology. You may not remove any copyright,
trademark or other proprietary notices from the Licensed Product or any media relating thereto. You agree that you will not attempt to
reverse compile, reverse engineer, modify, translate, adapt or disassemble the Software, nor attempt to create the source code from the object
code for the Software, in whole or in part.
Sublicense
You may sublicense the Keithley Software, subject to the sublicensee’s acceptance of the terms and conditions of this Agreement. You may
not rent, lease or otherwise transfer the Licensed Product.
Termination
This Agreement is effective until terminated. Either party shall have the right to terminate this Agreement if the other fails to perform or
observe any provision, term, covenant, warranty or condition of this Agreement (a “Default”) provided fifteen (15) days notice of termination (the “Notice”) is provided to the defaulting party and the defaulting party fails to cure the claimed Default within ten (10) days from the
date of receipt of the Notice. Within three (3) days from the date of any termination of this Agreement, each and every embodiment of the
Software in any form whatsoever, and all documentation, files and other materials in any form relating thereto, shall be destroyed, and all
traces of the Software shall be permanently purged from the 4200-SCS.
Export Restrictions
You may not export or re-export the Software or any copy or adaptation in violation of any applicable laws or regulations.
U.S. Government Restricted Rights
Use, duplication and disclosure by the U.S. Government is subject to the restrictions as set forth in FAR §52.227-14 Alternates I, II and III
(JUN 1987), FAR §52.227-19 (JUN 1987), and/or FAR §12.211/12.212 (Commercial Technical Data/Computer Software), and DFARS
§252.227-7015 (NOV 1995) (Technical Data) and/or DFARS §227.7202 (Computer Software), as applicable.
Limited Warranty
Keithley does not warrant that operation of the Software will be uninterrupted or error-free or that the Software will be adequate for the customer's intended application or use. Keithley warrants to you that the Keithley Software will substantially perform in accordance with the
specifications set forth in this manual for a period of ninety (90) days after your receipt of the Keithley Software (the “Warranty Period”);
provided the Keithley Software is used on the products for which it is intended and in accordance with the Documentation. If the Keithley
Software is not performing as warranted during the Warranty Period, as determined by Keithley in its sole discretion (a “Nonconformity”),
your exclusive remedy under this limited warranty is either a correction of the Keithley Software or an explanation by Keithley of how to use
the Keithley Software despite the Nonconformity, at Keithley’s option. The foregoing limited warranty shall be null and void upon any mod
ification of the Software, unless approved in writing by Keithley. The portions of the Software not developed and owned by Keithley shall
not be covered by this limited warranty, and Keithley shall have no duty or obligation to enforce any third party supplier’s warranties on
your behalf. The failure to notify Keithley of a Nonconformity during the Warranty Period shall relieve Keithley of its obligations and liabilities under this limited warranty.
EXCEPT FOR THE FOREGOING, THE SOFTWARE IS PROVIDED “AS IS” WITHOUT ANY WARRANTY OF ANY KIND,
INCLUDING BUT NOT LIMITED TO, THE WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE.
THE SOFTWARE IS NOT FAULT TOLERANT AND IS NOT DESIGNED OR INTENDED FOR USE IN HAZARDOUS ENVIRONMENTS REQUIRING FAIL-SAFE PERFORMANCE INCLUDING WITHOUT LIMITATION, IN THE OPERATION OF NUCLEAR
-
FACILITIES, AIRCRAFT NAVIGATION OR COMMUNICATION SYSTEMS, AIR TRAFFIC CONTROL, WEAPONS SYSTEMS,
DIRECT LIFE-SUPPORT MACHINES, OR ANY OTHER APPLICATION IN WHICH THE FAILURE OF THE SOFTWARE COULD
LEAD TO DEATH, PERSONAL INJURY OR SEVERE PHYSICAL OR PROPERTY DAMAGE (COLLECTIVELY "HAZARDOUS
ACTIVITIES"). KEITHLEY EXPRESSLY DISCLAIMS ANY EXPRESS OR IMPLIED WARRANTY OF FITNESS FOR HAZARDOUS
ACTIVITIES.
Limitation of Liability
KEITHLEY’S SOLE LIABILITY OR OBLIGATION UNDER THIS AGREEMENT IS SET FORTH ABOVE IN THE LIMITED WARRANTY SECTION OF THIS AGREEMENT. IN NO EVENT SHALL KEITHLEY BE LIABLE FOR ANY DAMAGES. WITHOUT
LIMITING THE FOREGOING, KEITHLEY SHALL NOT BE LIABLE OR ASSUME LIABILITY FOR: (1) ECONOMICAL, INCIDENTAL, CONSEQUENTIAL, INDIRECT, SPECIAL, PUNITIVE OR EXEMPLARY DAMAGES, WHETHER CLAIMED UNDER CONTRACT, TORT OR ANY OTHER LEGAL THEORY, (2) LOSS OF OR DAMAGE TO YOUR DATA OR PROGRAMMING, (3)
PENALTIES OR PENALTY CLAUSES OF ANY DESCRIPTION, OR (4) INDEMNIFICATION OF YOU OR OTHERS FOR COSTS,
DAMAGES, OR EXPENSES RELATED TO THE GOODS OR SERVICES PROVIDED UNDER THIS LIMITED WARRANTY.
Miscellaneous
In the event of invalidity of any provision of this Agreement, the parties agree that such invalidity shall not affect the validity of the remaining portions of this Agreement. This Agreement shall be governed by and construed in accordance with the laws of the state of Ohio, without regard to conflicts of laws provisions thereof. This is the entire agreement between you and Keithley and supersedes any prior agreement
or understanding, whether written or oral, relating to the subject matter of this license. Any waiver by either party of any provision of this
Agreement shall not constitute or be deemed a subsequent waiver of that or any other provision.
Should you have any questions concerning this Agreement, or if you desire to contact Keithley Instruments for any reason, please call Keithley
at 1-800-552-1115, or write at Keithley Instruments, 28775 Aurora Rd., Solon, Ohio, USA 44139.
Limited Hardware Warranty
Keithley warrants to you that the Keithley manufactured portion of the hardware (the “Keithley Hardware”) purchased by you will substantially perform in accordance with the specifications set forth in this manual for a period of one (1) year after your receipt of the Keithley
Hardware (the “Warranty Period”); provided the Keithley Hardware is used on the products for which it is intended and in accordance with
the documentation. This limited warranty shall be null and void upon (1) any modifications of the Keithley Hardware, unless approved in
writing by Keithley, (2) any operation of the 4200-Semiconductor Characterization System (the “4200-SCS”) with third party software,
unless the software is explicitly approved and supported by Keithley, and (3) any operation of the 4200-SCS on an operating system not
explicitly approved and supported by Keithley.
If the Keithley Hardware is not performing as warranted during the Warranty Period, as determined in Keithley’s sole discretion (a “Nonconformity”), your exclusive remedy under this limited warranty is the repair or replacement of the Keithley Hardware, at Keithley’s option.
The portions of the hardware not developed and owned by Keithley shall not be covered by this limited hardware warranty, and Keithley
shall have no duty or obligation to enforce a third party supplier’s warranties on your behalf. The failure to notify Keithley of a Nonconformity during the Warranty Period shall relieve Keithley of its obligations and liabilities under this limited hardware warranty.
EXCEPT FOR THE FOREGOING, THE HARDWARE IS PROVIDED “AS IS” WITHOUT ANY WARRANTY OF ANY KIND,
INCLUDING BUT NOT LIMITED TO, THE WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE.
KEITHLEY’S SOLE LIABILITY OR OBLIGATION UNDER THIS LIMITED HARDWARE WARRANTY IS THE REPAIR OR
REPLACEMENT OF THE KEITHLEY HARDWARE. IN NO EVENT SHALL KEITHLEY BE LIABLE FOR ANY DAMAGES.
WITHOUT LIMITING THE FOREGOING, KEITHLEY SHALL NOT BE LIABLE OR ASSUME LIABILITY FOR: (1) ECONOMICAL, INCIDENTAL, CONSEQUENTIAL, INDIRECT, SPECIAL, PUNITIVE OR EXEMPLARY DAMAGES, WHETHER CLAIMED
UNDER CONTRACT, TORT OR ANY OTHER LEGAL THEORY, (2) LOSS OF OR DAMAGE TO YOUR DATA OR PROGRAMMING, (3) PENALTIES OR PENALTY CLAUSES OF ANY DESCRIPTION, OR (4) INDEMNIFICATION OF YOU OR OTHERS FOR
COSTS, DAMAGES OR EXPENSES RELATED TO THE GOODS OR SERVICES PROVIDED UNDER THIS LIMITED HARDWARE
WARRANTY.
Should you have any questions concerning this Agreement, or if you desire to contact Keithley Instruments for any reason, please call
1-800-552-1115, or write at Keithley Instruments, 28775 Aurora Rd., Solon, Ohio, USA 44139.
A G R E A T E R M E A S U R E O F C O N F I D E N C E
Keithley Instruments, Inc.
Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139
440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY (534-8453) • www.keithley.com
12/04
4200-SCS
Semiconductor Characterization System
Quick Start Guide
©2000, Keithley Instruments, Inc.
All rights reserved.
Cleveland, Ohio, U.S.A.
Third Printing, May 2006
Document Number: 4200-903-01 Rev. C
Manual Print History
The print history shown below lists the printing dates of all Revisions and Addenda created for this manual. The Revision Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released
between Revisions, contain important change information that the user should incorporate immediately into the manual.
Addenda are numbered sequentially. When a new Revision is created, all Addenda associated with the previous Revision
of the manual are incorporated into the new Revision of the manual. Each new Revision includes a revised copy of this
print history page.
Revision A (Document Number 4200-903-01) ...............................................................................November 2003
Revision B (Document Number 4200-903-01) ...............................................................................November 2005
Revision C (Document Number 4200-903-01) ........................................................................................ May 2006
All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc.
Other brand and product names are trademarks or registered trademarks of their respective holders.
Safety Precautions
The following safety precautions should be observed before using
this product and any associated instrumentation. Although some in
struments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions
may be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read and follow all installation,
operation, and maintenance information carefully before using the
product. Refer to the manual for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use
and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for en
suring that operators are adequately trained.
Operators use the product for its intended function. They must be
trained in electrical safety procedures and proper use of the instru
ment. They must be protected from electric shock and contact with
hazardous live circuits.
Maintenance personnel perform routine procedures on the product
to keep it operating properly, for example, setting the line voltage
or replacing consumable materials. Maintenance procedures are described in the manual. The procedures explicitly state if the operator
may perform them. Otherwise, they should be performed only by
service personnel.
Service personnel are trained to work on live circuits, and perform
safe installations and repairs of products. Only properly trained ser
vice personnel may perform installation and service procedures.
Keithley products are designed for use with electrical signals that
are rated Measurement Category I and Measurement Category II, as
described in the International Electrotechnical Commission (IEC)
Standard IEC 60664. Most measurement, control, and data I/O sig
nals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages. Measurement Category II connections require protection
for high transient over-voltages often associated with local AC
mains connections. Assume all measurement, control, and data I/O
connections are for connection to Category I sources unless other
wise marked or described in the Manual.
Exercise extreme caution when a shock hazard is present. Lethal
voltage may be present on cable connector jacks or test fixtures.
The American National Standards Institute (ANSI) states that a
shock hazard exists when voltage levels greater than 30V RMS,
42.4V peak, or 60VDC are present. A good safety practice is to ex
pect that hazardous voltage is present in any unknown circuit before
measuring.
Operators of this product must be protected from electric shock at
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all times. The responsible body must ensure that operators are pre
vented access and/or insulated from every connection point. In
some cases, connections must be exposed to potential human con
tact. Product operators in these circumstances must be trained to
protect themselves from the risk of electric shock. If the circuit is
capable of operating at or above 1000 volts, no conductive part of
the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits.
They are intended to be used with impedance limited sources.
NEVER connect switching cards directly to AC mains. When con
necting sources to switching cards, install protective devices to limit fault current and voltage to the card.
Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks
before each use.
When installing equipment where access to the main power cord is
restricted, such as rack mounting, a separate main input power dis
connect device must be provided, in close proximity to the equip-
ment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any
other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge
any capacitors before: connecting or disconnecting cables or jump
ers, installing or removing switching cards, or making internal
changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated
surface capable of withstanding the voltage being measured.
The instrument and accessories must be used in accordance with its
specifications and operating instructions or the safety of the equip
ment may be impaired.
Do not exceed the maximum signal levels of the instruments and
accessories, as defined in the specifications and operating information, and as shown on the instrument or test fixture panels, or
switching card.
When fuses are used in a product, replace with same type and rating
for continued protection against fire hazard.
Chassis connections must only be used as shield connections for
measuring circuits, NOT as safety earth ground connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a
lid interlock.
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5/03
If a screw is present, connect it to safety earth ground using the
wire recommended in the user documentation.
The ! symbol on an instrument indicates that the user should refer to the operating instructions located in the manual.
The symbol on an instrument shows that it can source or measure 1000 volts or more, including the combined effect of normal
and common mode voltages. Use standard safety precautions to
avoid personal contact with these voltages.
The symbol indicates a connection terminal to the equipment
frame.
The WA R N I N G heading in a manual explains dangers that might
result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.
The CAUTION heading in a manual explains hazards that could
damage the instrument. Such damage may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and
all test cables.
To maintain protection from electric shock and fire, replacement
components in mains circuits, including the power transformer, test
leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses, with applicable national safety approvals,
may be used if the rating and type are the same. Other components
that are not safety related may be purchased from other suppliers as
long as they are equivalent to the original component. (Note that se
lected parts should be purchased only through Keithley Instruments
to maintain accuracy and functionality of the product.) If you are
unsure about the applicability of a replacement component, call a
Keithley Instruments office for information.
To clean an instrument, use a damp cloth or mild, water based
cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill
on the instrument. Products that consist of a circuit board with no
case or chassis (e.g., data acquisition board for installation into a
computer) should never require cleaning if handled according to in
structions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper
cleaning/servicing.
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Table of Contents
1 Understanding and Preparing the System
Unpacking and inspecting the system .................................................................................. 1-2
Inspection for damage ................................................................................................... 1-2
Shipment contents ......................................................................................................... 1-2
Repacking for shipment ................................................................................................. 1-2
Becoming familiar with the system ....................................................................................... 1-3
Software features ........................................................................................................... 1-4
Hardware features and capabilities ............................................................................... 1-5
Pulse I-V Package – Integrated solution ...................................................................... 1-11
KPulse and KScope ..................................................................................................... 1-12
Locating the system in the proper environment ................................................................. 1-12
Connecting system components ........................................................................................ 1-13
Connecting devices to be tested (DUTs) ............................................................................ 1-14
Basic device connections for SMUs ............................................................................ 1-14
Basic device connections for the pulse generator and scope ...................................... 1-15
Device connection details ............................................................................................ 1-16
Powering the 4200-SCS ..................................................................................................... 1-18
Configuring the system ...................................................................................................... 1-19
2 Designing and Executing Tests
Understanding the 4200-SCS test hierarchy and terminology ............................................. 2-2
Becoming familiar with the KITE interface ........................................................................... 2-2
Understanding the Project Navigator ............................................................................. 2-4
Understanding Interactive Test Modules (ITMs) and User Test Modules (UTMs) ......... 2-5
Building a Project ................................................................................................................. 2-6
Define the new Project .................................................................................................. 2-6
Insert the Subsite Plans ................................................................................................. 2-7
Insert the Device Plans .................................................................................................. 2-7
Insert the ITMs ............................................................................................................... 2-8
Insert the UTMs ............................................................................................................. 2-9
Save the Project .......................................................................................................... 2-10
Defining and configuring the Project ITMs ......................................................................... 2-11
Understand the ITM Definition tab ............................................................................... 2-11
Understand the ITM forcing functions .......................................................................... 2-12
Use the Definition tab to configure ITM parameters .................................................... 2-15
Set up Formulator calculations, if desired .................................................................... 2-18
Save the ITM configuration .......................................................................................... 2-19
Defining and configuring the Project UTMs ........................................................................ 2-19
Understand the UTM Definition tab ............................................................................. 2-20
Define UTMs using the UTM Definition tab ................................................................. 2-21
Create custom user modules and user libraries, if necessary ..................................... 2-22
4200-903-01 Rev. C / May 2006 i
Executing the Project tests ................................................................................................. 2-28
Executing a single test at a single site ......................................................................... 2-28
Executing a single test sequence at a single site ........................................................ 2-29
Executing appended tests and test sequences at a single site ..................................................... 2-30
Executing an entire Project at a single site .................................................................. 2-30
Executing an entire Project at multiple sites ................................................................ 2-31
Repeating a test .......................................................................................................... 2-33
Subsite cycling overview ............................................................................................. 2-33
3 Viewing Test Results
Understanding the data files ................................................................................................ 3-2
Data file naming ............................................................................................................. 3-2
Data file location ............................................................................................................ 3-2
Viewing test results numerically via the Sheet tab Data worksheet ..................................... 3-3
Viewing test results graphically via the Graph tab ................................................................ 3-4
Opening a Graph tab ..................................................................................................... 3-4
Reviewing the Graph Setting menu ............................................................................... 3-5
Defining a basic graph ................................................................................................... 3-7
4 Protecting user files and system software
Protecting software integrity ................................................................................................. 4-2
Protecting user file integrity .................................................................................................. 4-2
Choosing the files to be backed up ............................................................................... 4-3
Choosing the method of backup .................................................................................... 4-4
ii 4200-903-01 Rev. C / May 2006
List of Illustrations
1 Understanding and Preparing the System
Figure 1-1 4200-SCS summary .......................................................................................................... 1-3
Figure 1-2 Front panel ........................................................................................................................ 1-5
Figure 1-3 Source-measure hardware overview................................................................................. 1-6
Figure 1-4 Signal types and absolute limits at source-measure hardware connectors ...................... 1-7
Figure 1-5 Source-measure operating boundaries ............................................................................. 1-8
Figure 1-6 Triax cables for the 4200-SCS .......................................................................................... 1-8
Figure 1-7 Pulse-measure hardware overview ................................................................................. 1-10
Figure 1-8 Block diagram of Pulse-IV test system............................................................................ 1-12
Figure 1-9 Back panel view, system connectors, and system connections...................................... 1-13
Figure 1-10 Back panel and basic device connections to SMUs and PreAmps ................................. 1-14
Figure 1-11 Basic device connections to the pulse generator and scope .......................................... 1-15
Figure 1-12 Line power receptacle ..................................................................................................... 1-18
Figure 1-13 KCON overview............................................................................................................... 1-20
2 Designing and Executing Tests
Figure 2-1 KITE interface overview ...................................................................................................... 2-3
Figure 2-2 Project Navigator............................................................................................................... 2-4
Figure 2-3 ITMs and UTMs in the Project Navigator .......................................................................... 2-5
Figure 2-4 Define New Project window............................................................................................... 2-6
Figure 2-5 Define New Project window configured for the u_build Project Plan................................. 2-6
Figure 2-6 Selecting a new device plan from the 4200-SCS device library........................................ 2-7
Figure 2-7 Device Plan Window ......................................................................................................... 2-8
Figure 2-8 Selecting an ITM from the 4200-SCS device library ......................................................... 2-8
Figure 2-9 Adding an ITM to the Test Sequence Table....................................................................... 2-9
Figure 2-10 ITM Definition tab — and neighboring tabs ..................................................................... 2-11
Figure 2-11 Pulse Mode examples..................................................................................................... 2-15
Figure 2-12 Typical Forcing Functions/Measure Options window for an existing library ITM ............ 2-16
Figure 2-13 Pulse Mode configuration (voltage sweep) ..................................................................... 2-18
Figure 2-14 UTM-creation overview ................................................................................................... 2-19
Figure 2-15 UTM Definition tab........................................................................................................... 2-20
Figure 2-16 Blank UTM Definition tab................................................................................................. 2-21
Figure 2-17 Example of configured UTM tab...................................................................................... 2-21
Figure 2-18 KULT interface overview ................................................................................................. 2-23
Figure 2-19 Site Navigator for Example Project ................................................................................. 2-28
Figure 2-20 Site Navigator for example Project.................................................................................. 2-29
Figure 2-21 Setting the site number in the Project window................................................................. 2-30
Figure 2-22 Multi-site test sequence................................................................................................... 2-31
Figure 2-23 Setting the site numbers in the Project window............................................................... 2-32
Figure 2-24 Repeating a test .............................................................................................................. 2-33
Figure 2-25 Cycle mode configuration................................................................................................ 2-34
4200-903-01 Rev. C / May 2006 iii
Figure 2-26 Start subsite cycling......................................................................................................... 2-34
Figure 2-27 Stress/Measure Mode – log cycle times setup................................................................ 2-35
Figure 2-28 Device Stress Properties – Setup steps for first device in Subsite Plan.......................... 2-36
Figure 2-29 Exporting ITM Output Values to the Subsite Data sheet ................................................. 2-37
Figure 2-30 Example Subsite Data sheet for the Stress/Measure Mode............................................ 2-37
Figure 2-31 Example Subsite Graph for the Stress/Measure Mode ................................................... 2-38
3 Viewing Test Results
Figure 3-1 Workspace-window tab name and data file name format.................................................. 3-2
Figure 3-2 Sheet tab Data worksheet................................................................................................. 3-3
Figure 3-3 Graph tab example............................................................................................................ 3-4
Figure 3-4 Example of an unconfigured graph tab ............................................................................. 3-5
Figure 3-5 Graph settings menu ......................................................................................................... 3-5
Figure 3-6 Unconfigured Graph Definition window for a “vds-id” ITM................................................. 3-7
Figure 3-7 Configured Graph Definition window for the “vds-id” ITM ................................................. 3-8
Figure 3-8 “vds-id” graph after configuring its Graph Definition window............................................. 3-8
iv 4200-903-01 Rev. C / May 2006
List of Tables
1 Understanding and Preparing the System
Ta bl e 1-1 Basic 4200-PG2 pulse characteristics............................................................................. 1-10
Ta bl e 1-2 Basic 4200-SCP2 characteristics .................................................................................... 1-11
Ta bl e 1-3 Additional SMU connection diagrams in Section 4 of the Reference Manual ................. 1-16
Ta bl e 1-4 Additional pulse-measure connection diagrams in Section 4 of the Reference Manual . 1-17
2 Designing and Executing Tests
Ta bl e 2-1 Primary differences between an ITM and a UTM .............................................................. 2-5
Ta bl e 2-2 Forcing function summary ............................................................................................... 2-12
4 Protecting user files and system software
Ta bl e 4-1 Common backup storage options for the 4200-SCS......................................................... 4-4
4200-903-01 Rev. C / May 2006 v
vi 4200-903-01 Rev. C / May 2006
Understanding and
Preparing the System
Section Topics List
Unpacking and inspecting the system, page 1-2
Inspection for damage, page 1-2
Shipment contents, page 1-2
Repacking for shipment, page 1-2
Becoming familiar with the system, page 1-3
Software features, page 1-4
Hardware features and capabilities, page 1-5
Pulse I-V Package – Integrated solution, page 1-11
KPulse and KScope, page 1-12
Locating the system in the proper environment, page 1-12
Connecting system components, page 1-13
Connecting devices to be tested (DUTs), page 1-14
Basic device connections for SMUs, page 1-14
Basic device connections for the pulse generator and scope, page 1-15
Device connection details, page 1-16
Powering the 4200-SCS, page 1-18
Configuring the system, page 1-19
1
1-2 Understanding and Preparing the System 4200-SCS Quick Start Guide
Unpacking and inspecting the system
Inspection for damage
After unpacking the mainframe, carefully inspect the unit for any shipping damage. Report any
damage to the shipping agent immediately as such damage is not covered by the warranty.
Shipment contents
The following items are included with every Model 4200-SCS order:
• Model 4200-SCS Semiconductor Characterization System with ordered SMUs factory
installed
• Line cord
• Model 4200-SCS Quick Start Manual hardcopy
• Miniature triaxial cables, two per Model 4200-SMU or 4210-SMU, 2m (6 ft)
• Interlock cable
• Keyboard with integrated pointing device
• System software and manuals on CD-ROM
• Microsoft Windows XP Professional
• Microsoft C++
• Microsoft Visual Studio .NET
• Full Armor GPAnywhwere
• GASP eAgent
• Acronis True Image
• Product Information CD-ROM that contains PDFs of the Quick Reference Guide,
Applications Manual, and Reference Manual.
1
The following items are options than can be ordered for the Model 4200-SCS:
• Model 4200-PA PreAmp modules (installed at factory) – Includes triaxial cables, two per
Model 4200-PA, 2m (6 ft).
• Model 4200-PG2 pulse generator card (installed at factory) – Includes an 8 inch-pound
torque wrench, SMA cables and adapters.
• Model 4200-SCP2 digital storage oscilloscope module (installed at factory) – Includes BNC
cables, a short SMA cable, connectors and adapters.
• Model 4200-RBT remote Bias Tees (2) – Includes two SMA cables and two magnetic
mounting bases.
• Model 4200-PIV, which includes a 4200-PG2, 4200-SCP2, two 4200-RBTs, one 3-Port
Power Divider and two SMA Tees.
• Model 4200-SCP2-ACC Accessory Kit for the 4200-SCP2 scope which includes 500MHz
scope probes.
Repacking for shipment
Should it become necessary to return the Model 4200-SCS for repair, carefully pack the entire unit
in its original packing carton or the equivalent, and perform the following:
• Contact Keithley to get a Return Material Authorization (RMA). You can contact Keithley
through your local Keithley representative, or by calling the Keithley factory at 1-888-5348453 (1-888-KEITHLEY), or through the Keithley Web page at www.keithley.com.
• On the shipping label, write ATTENTION REPAIR DEPARTMENT, and the RMA number.
Warranty and contact information is located at the front of this manual.
1. Not included when SMU is ordered with a 4200-PA (see listed options)
4200-903-01 Rev. C / May 2006 Return to Section Topics List
4200-SCS Quick Start Guide Understanding and Preparing the System 1-3
Becoming familiar with the system
WARNING The safe procedure to power-up the Model 4200-SCS is provided in “Powering
the 4200-SCS” on page 1-18. Do not turn on the Model 4200-SCS until you
have reviewed that information.
The Model 4200 Semiconductor Characterization System (SCS) can automatically characterize IV
and CV of semiconductor devices and test structures, using up to eight Source-Measure Units
(SMUs). A variety of supported external components enhance the capabilities. See
Figure 1-1
4200-SCS summary
Model 4200-SCS
Figure 1-1.
Keyboard
& Pointing
Device
User
Optional
External
Monitor
Interactive
Test Module
(ITM) Library
KITE
(Keithley
Interactive Test
Environment)
Software
Flat Panel
Monitor
Video
Interface
Parallel
Interface
Printer
User Test
Module
(UTM) Library
KULT
(Keithley User
Library Tool)
Software
Computer
USB
Interface
Pointing Device
Thumb Driver
Printer
KTE-Interactive
KCON
(Keithley
CONfiguration
Management
Software)
LAN
Interface
Network
Software
KXCI
(Keithley
External Control
Interface
Software)
SMUs
Interface
PreAmps
PG2
SCP2
Serial
GPIB
Interface
Other External Control
Pulses
KPulse
(Keithley Pulse
Virtual Front
Panel)
RBTs
C-V
Meter
Generator
(Keithley Scope
Virtual Front
I/V
C/V
Pulse
KScope
Panel)
VISA
I/V
Pulses
Switch
Matrix
Prober
Pulses
Return to Section Topics List 4200-903-01 Rev. C / May 2006
1-4 Understanding and Preparing the System 4200-SCS Quick Start Guide
Software features
CAUTION When you start one of the KTE Interactive software tools for the first time, you
must respond affirmatively to an on-screen license agreement before
proceeding further. If you do not respond with a “Yes” answer, your system
will be nonfunctional until you reinstall the software.
The following four software tools are used to operate and maintain the 4200-SCS.
• KITE — Keithley Interactive Test Environment (KITE) is the main Model 4200-SCS device
characterization application. You first use KITE to organize tests into individual projects. You
subsequently use KITE to manage and execute these projects. You can interactively
characterize individual devices or automatically test entire semiconductor wafers.
• KULT — The Keithley User Library Tool (KULT) allows you to create algorithms (user
modules) in the C programming language and to then integrate these modules into KITE.
The modules can control internal 4200-SCS instrumentation and external instrumentation
You also use KULT to create and manage libraries of user modules.
• KCON — The Keithley CONfiguration (KCON) utility allows you to configure external GPIB
(IEEE-488) instruments, switch matrices, and analytical probers connected to the
4200-SCS. KCON also provides basic diagnostic and troubleshooting functions.
• KXCI — The Keithley External Control Interface (KXCI) allows you to use an external
computer to remotely control 4200-SCS SMUs over the GPIB (IEEE-488) bus, using an HP
4145B-style command set. You can do this in either in the 4145 emulation mode or in the
4200 extended mode, which provides access to all 4200-SCS SMU commands and ranges.
NOTE Discussion of KXCI is beyond the scope of this Quick Start manual. For the details
needed to use KXCI, refer to Section 9 of the 4200-SCS Reference Manual, “Keithley
External Control Interface (KXCI).”
• KPulse — KPulse is the Keithley virtual front panel application for the 4200-PG2 dual
channel pulse card. This is a stand-alone application that allows direct access to the
4200-PG2. KPulse is started by double-clicking the KPulse icon on the desktop.
• KScope — KScope is the Keithley virtual front panel application for the 4200-SCP2 dual
channel digital storage oscilloscope. This is a stand-alone application that allows direct
access to the 4200-SCP2. KScope is started by double-clicking the KScope icon on the
desktop.
NOTE Details on using KPulse and KScope are provided in Section 11 of the Model 4200
Reference Manual.
4200-903-01 Rev. C / May 2006 Return to Section Topics List
4200-SCS Quick Start Guide Understanding and Preparing the System 1-5
Hardware features and capabilities
Instrument panels
Figure 1-2 shows the 4200-SCS front-panel features.
Figure 1-2
Front panel
1
Model 4200-SCS
3
9
SEMICONDUCTOR CHARACTERIZATION SYSTEM
4
2
4200
INTERLOCK
HARD DISK
POWER
5
0I
8
7
6
MEASURING
1. Display — Displays graphical user interface, data, graphs, and system operation
information. (Note: 4200-SCS/C has no display and requires an external monitor.)
2. CD-ROM drive
3. Floppy disk drive.
4. Display brightness — Allows you to set the FPD display to the desired brightness.
– For newer 4200-SCS models, turning the brightness knob all the way down will
completely turn off the FPD bulb.
– Newer 4200-SCS models are shipped with a high-resolution FPD (1024x768).
5. POWER switch
6. HARD DISK indicator — Turns on when the hard disk is being accessed.
7. INTERLOCK indicator — Turns on when the test fixture interlock is closed.
8. MEASURING indicator — Turns on when measurements are in progress. It also turns on
when the 4200-PG2 is pulsing.
9. Two v1.1 USB Ports — Interfaces to peripherals (e.g., pointing devices, printers, scanners,
thumb drives, external hard drives, and CD-ROMs).
Figure 1-3, Figure 1-9, and Figure 1-10, in following subsections, show the back-panel features.
Return to Section Topics List 4200-903-01 Rev. C / May 2006
1-6 Understanding and Preparing the System 4200-SCS Quick Start Guide
Source-measure hardware
Source-measure hardware overview
Refer to Figure 1-3. The 4200-SCS mainframe accepts up to eight SMUs, each of which may be
used with or without PreAmps. Four of the SMUs may be high-powered, 4210-SMU models.
Figure 1-3
Source-measure hardware overview
Ground Unit
Sense-signal
ground-return
connector
Force-signal
ground-return
connector
4200-SCS
circuit-common
connector
Chassis-ground
connector
Model
4200-SCS
KEITHLEY
GNDU
S
E
N
S
E
F
O
R
C
E
C
O
M
M
O
N
INSTRUMEN
NLY
GNDU
CONNECTIONS
T
SENSE LO
GUARD
SMU O
SENSE LO
S
E
N
S
E
SMU AND GNDU
F
O
R
C
E
C
O
M
M
O
N
IN
OUT
SLOT
6
COMMON
SLOT
7
SENSE
COMMON
SLOT
8
GUARD
FORCE
SLOT
1
SLOT
2
SENSE LO
SLOT
3
SENSE LO
SENSE
SLOT
4
INSTRUMENTS
SENSE LO
SENSE
SLOT
5
FORCE
SENSE LO
SENSE
FORCE
SENSE
FORCE
4200-PA-1 REMOT
CONTR
P
RE
A
MP
OL
FORCE
PA CNTRL
PA CNTRL
PA CNTRL
SENSE
FORCE
Sense
Force
Connector
RE
A
MP
SENSE
FORCE
PreAmp
PreAmp
Control
Connector
Mounting
Foot
CONT
P
RE
A
ROL
MP
4200-PA-1 REMOTE P
SENSE LO
PA CNTRL
Source-Measure
4210
SMU
SENSE
FORCE
Unit (SMU)
SENSE LO
(triaxial connector)
SENSE HI
(triaxial connector)
FORCE
(triaxial connector)
PreAmp
Control
Connector
Connector
Item
shown
above
Source
Measure
Unit
(SMU)
Performs one of the following:
• Source voltage and measure
• Source current and measure
Description Model
current and/or voltage
voltage and/or current
Can be configured to sweep or
step source voltages or currents
OR to output a constant bias
voltage or bias current.
PreAmp Adds lower current ranges to a
Model 4200-SMU or Model
4210-SMU.
4200-SMU
(2.2W out)
105nA / 5pA
1.05μA / 50pA
10.5μA / 500pA
105μA / 5nA
1.05mA / 50nA
10.5mA / 500nA
105mA / 5μA
4210-SMU
(22W out)
As above, plus
1.05A / 50μA
4200-PA The additional
ranges below:
1.05pA / 50aA
Current ranges
(full scale/set resolution)
Source Measure Source Measure
10.5pA / 500aA
100.5pA / 5fA
1.05nA / 50fA
10.5nA / 500fA
Ground
Unit
Provides need-specific return
paths to circuit COMMON.
Part of
mainframe
Not applicable Not applicable Not
4200-903-01 Rev. C / May 2006 Return to Section Topics List
105nA / 1pA
1.05μA / 10pA
10.5μA / 100pA
105μA / 1nA
1.05mA / 10nA
10.5mA / 100nA
105mA / 1μA
As above, plus
1.05A / 10μA
The additional
ranges below:
1.05pA / 10aA
10.5pA / 100aA
100.5pA / 1fA
1.05nA / 10fA
10.5nA / 100fA
Voltage ranges
(full scale/set resolution)
210mV / 5μV
2.1V / 50μV
21V / 500μV
210V / 5mV
210mV / 5μV
2.1V / 50μV
21V / 500μV
210V / 5mV
Not
applicable
applicable
4200-SCS Quick Start Guide Understanding and Preparing the System 1-7
Source-measure connectors
Figure 1-3 above showed the connectors on SMUs, PreAmps, and the GNDU. Figure 1-4 below
shows the signal types and absolute limits for each of these connectors.
Figure 1-4
Signal types and absolute limits at source-measure hardware connectors
KEITHLEY
4210
SMU
SENSE LO
SENSE
FORCE
SENSE
FORCE
SMU(4200-SMU or 4210-SMU) Triaxial Connector Signals and Limits
SENSE current from
Kelvin connection
250V
40V
PEAK
40V
PEAK
PEAK
250V
PEAK
GUARD
250V
PEAK
!
CAT I
COMMON
SENSE current to
Kelvin connection
FORCE current
0.1A max for 4200-SMU
1.0A max for 4210-SMU
FORCESENSE
PreAmp CONTROL connector
PreAmp (4200-PA)Triaxial Connector Signals and Limits
250V
PEAK
SENSE current to
Kelvin connection
FORCE current
0.1A max w/4200-SMU
1.0A max w/4210-SMU
FORCESENSE
40V
PEAK
40V
PEAK
250V
PEAK
GUARD
250V
PEAK
!
CAT I
COMMON
42V
PEAK
42V
PEAK
32V
DC
max
GNDU
S
E
N
S
E
F
O
R
C
E
C
O
M
M
O
N
GUARD
Ground Unit (GNDU) Connector Signals and Limits
SENSE current return from
one or more Kelvin
connections
FORCE current return
from one or more SMUs
2.6A max
5A max
10Ω max
cable/path
SENSE
COMMON
FORCE
1Ω max
cable/path
Unshielded current return
Chassis (earth) ground
Return to Section Topics List 4200-903-01 Rev. C / May 2006
1-8 Understanding and Preparing the System 4200-SCS Quick Start Guide
Source-measure operating boundaries
Figure 1-5 covers the normal source/sink operating boundaries for the two models of SMU, alone
and with PreAmps.
Figure 1-5
Source-measure operating boundaries
-V
Operating boundaries for 4200-SMU alone
and 4200-SMU + 4200-PA PreAmp
+I
100mA
10mA
(IV)
Sink
-200V
Source
-20V
(III)
-10mA
- 100mA
-I
For more information about SMU and PreAmp operating boundaries, see the additional boundary
diagrams and discussions in Section 3 of the 4200-SCS Reference Manual.
20V
(I)
Source
(II)
Sink
200V
+V
-V
Operating boundaries for 4210-SMU alone
and 4210-SMU + 4200-PA PreAmp
+I
1A
100mA
(IV)
Sink
-200V
Source
-20V
(III)
-100mA
-1A
-I
20V
(I)
Source
+V
200V
(II)
Sink
Source-measure connection cables
You make connections to DUT (device under test) contact devices, such as test fixtures and
probers, using supplied Triax cables.
Figure 1-6 and the following paragraphs describe the two
types.
Figure 1-6
Triax cables for the 4200-SCS
4200-TRX-X 4200-MTRX-X
4200-903-01 Rev. C / May 2006 Return to Section Topics List
4200-SCS Quick Start Guide Understanding and Preparing the System 1-9
• With PreAmps installed, use the low noise 4200-TRX-X series triax cables, which are
terminated with 3-slot triax connectors on both ends. One end of the connects to the
PreAmp and the other end connects to the DUT test fixture or probe station.
• Without PreAmps installed, use the 4200-MTRX-X series cables, which have a miniature
triax connector on one end and a standard 3-slot triax connector on the other end. The end
with the miniature connector connects directly to the SMU, and the other end connects to
the test fixture or probe station.
CAUTION With PreAmps installed, NEVER make connections directly to any of the
miniature triax connectors on the SMU modules. Otherwise, SMU and/or DUT
damage and data corruption may occur.
Pulse-measure hardware
Figure 1-7 shows Keithley pulse-measure hardware, which includes the following:
• 4200-PG2 dual channel, pulse generator card
• 4200-SCP2 dual channel, digital storage oscilloscope card
• 4200-RBT remote Bias Tee adapter
Pulse generator and scope
As shown in Figure 1-7, the 4200-PG2 pulse generator has two output channels and the
4200-SCP2 has two input channels. The basic characteristics of the pulse generator and scope
are summarized in
Table 1-1 and Tab le 1-2.
When these two instrument components are used together in the same test system, TRIGGER
OUT of the 4200-PG2 is typically connected to EXT TRIG of the 4200-SCP2. This trigger
connection synchronizes scope measurements to the output of the pulse generator.
Remote Bias Tee
The 4200-RBT remote Bias Tee (shown in Figure 1-7) is used in an integrated test system that
uses a SMU to provide DC bias, and a 4200-PG2 to provide pulse output. The output of the
4200-RBT provides pulse output (AC) that rides on the DC bias of the SMU. See
“Pulse I-V
Package – Integrated solution” on page 1-11 for testing that uses the 4200-RBT.
As shown in Figure 1-7, a 4200-PG2 channel and a SMU are connected to the AC (pulse) and DC
bias inputs of the 4200-RBT. The AC + DC output is then connected to the DUT. The 4200-SCP2
scope can also be used in the test system to measure the pulse(s) at the input and/or at the output
of the 4200-RBT.
Figure 1-7 also shows a simplified schematic of the 4200-RBT. The capacitor functions as a low-
impedance device for high speed pulses, and as a high-impedance device for DC. This allows the
high-speed pulses from the 4200-PG2 to pass through to the output, while blocking DC from the
SMU.
The inductors function as low-impedance devices for DC, and as high-impedance devices for high
speed pulses. This allows the DC bias from the SMU to pass through to the output, while blocking
the high speed pulses from the pulse generator.
Return to Section Topics List 4200-903-01 Rev. C / May 2006
1-10 Understanding and Preparing the System 4200-SCS Quick Start Guide
Figure 1-7
Pulse-measure hardware overview
Channel 1
pulse output
(SMA female
connector)
TTL level,
50% duty cycle,
frequency is the
same as the
frequency of
the output
(SMA female
connector)
Channel 2
pulse output
(SMA female
connector)
4200-PG2
Pulse Generator
KEITHLEY
4200
PG2
CHANNEL 1
TRIGGER
OUT
CHANNEL 2
SLOT8SLOT7SLOT6SLOT5SLOT4SLOT3SLOT2SLOT
KEITHLEY
Channel 1
Trigger
Out
Channel 2
4200-RBT
Remote Bias-T
DC
Sense
Bias Input
DC
Force
3-Lug Triax Connectors
(female)
Model 4200-SCS
Instrument Slots
INSTRUMENTS
KEITHLEY
Channel 1
Ext
Trg
Ext
Clk
Channel 2
20kW
KEITHLEY
KEITHLEY
4210
4210
SMU
SMU
SENSE LO
SENSE LO
SENSE
SENSE
FORCE
FORCE
PA CNTRL
PA CNTRL
AC (Pulse)
Input
1
KEITHLEY
KEITHLEY
4200
4200
SMU
SMU
SENSE LO
SENSE LO
SENSE
SENSE
FORCE
FORCE
PA CNTRL
PA CNTRL
SMA Connectors
(female)
AC + DC
Output
4200-SCP2
Digital Storage
Oscilloscope
KEITHLEY
4200
SCP2
CHANNEL 1
EXT
TRIG
EXT
CLK
CHANNEL 2
Channel 1
signal input
(BNC female
connector)
External trigger
input
(SMB female
connector)
External clock
input
(SMB female
connector)
Channel 2
signal input
(BNC female
connector)
Table 1-1
Basic 4200-PG2 pulse characteristics
High Speed range
Pulse Characteristic
Amplitude
(low voltage: 5V)
100mV to 10V 500mV to 40V
(peak-to-peak)
DC Level -5V to +5V -20V to +20V
Average Power Rating 0.5W DC 8W DC
Frequency 1Hz to 50MHz 1Hz to 2MHz
Period 20ns to 1s 500ns to 1s
Pulse Width 10ns to (Period - 10ns) 250ns to (Period - 10ns)
Transition Time
10ns to 1s 150ns to 1s
(rise/fall time)
Slew Rate Limit 0.5V/ns 0.25V/ns
Trigger Modes Continuous, Burst or Single Pulse
(Burst pulse count: 2 to 232-1)
Output Impedance 50Ω (nominal)
High Voltage range
(medium speed: 20V)
4200-903-01 Rev. C / May 2006 Return to Section Topics List
4200-SCS Quick Start Guide Understanding and Preparing the System 1-11
Table 1-2
Basic 4200-SCP2 characteristics
Scope
Characteristic Specification
Dual Channel Simultaneous sampling of both channels
Bandwidth 50Ω: DC to 1GHz
1MΩ: DC to 500MHz
Maximum Input 50Ω: ±5VDC
1MΩ: ±150VDC (de-rated 20 dB/decade above 1MHz)
Coupling DC or AC
AC Coupling 50Ω: 200kHz high pass
1MΩ: 10Hz high pass
Probe Attenuation 0.9 to 1000:1
Analog Filters 20MHz or Bypass
Total Memory Up to 1M samples/channel
Up to 2M samples/channel (one channel interleaved)
Sample (S) Rate 2.5kS/s to 1.25GS/s
2.5kS/s to 2.5GS/s (one channel interleaved)
Acquisition Time
Range
Note: All specifications are subject to change (www.ztec-inc.com).
50ns to 6710s (32M Sample Memory)
50ns to 419s (2M Sample Memory)
Pulse I-V Package – Integrated solution
The Pulse I-V Package includes the 4200-PG2 pulse generator, 4200-SCP2 scope, 4200-RBT
remote Bias Tees and accessories such as cables, connectors and adapters. It combines the dualchannel pulse generator, high speed pulse measurement, specialized interconnect, and patented
software to provide a turnkey pulse I-V solution. The software controls sourcing from the pulse
generator and data acquisition to automate a variety of pulse I-V tests.
diagram of the test system to run the pulse I-V tests. Notice that a power divider (supplied with
4200-PIV) is used to connect the pulse generator and scope to the gate of the FET. The power
divider provides 50
The pulse-IV Project Plan handles instrument setup and control for each test, as well as data
storage and presentation. The innovative software provides both cable compensation and a
solution to the load-line effect, producing DC-like I-V transistor curves, such as VDS-ID family of
curves and VGS-ID for voltage threshold extraction.
This solution provides pulse I-V testing for devices with self-heating issues, such as high power
transistors and advanced CMOS on SOI technology. The Pulse I-V Package also includes a high k
test suite and sample projects to address charge trapping problems for high k gate structures. The
specialized interconnect solves most of the problems encountered in high speed pulse testing,
such as:
• Combining pulse and DC sources to a single DUT pin to permit both DC and pulse
characterization without any re-cabling or switching.
• Impedance matching for pulse integrity to minimize reflection.
• Straight-forward cabling and connection to the DUT for easy setup.
Ω impedance matching.
Figure 1-8 shows the block
NOTE Details on using the pulse-IV Project Plan are provided in Section 11 of the Reference
Manual. The Applications Manual provides specific applications that pertain to PIV
I-V) testing.
(pulse
Return to Section Topics List 4200-903-01 Rev. C / May 2006
1-12 Understanding and Preparing the System 4200-SCS Quick Start Guide
Figure 1-8
Block diagram of Pulse-IV test system
DC Bias and Measure
4200-SMU (1)
4200-SMU (2)
DC
Scope
4200-SCP2
Channel 1
Channel 2
V
d
AC
Input
Input
4200-RBT
(2)
Trigger
Pulse Generator
4200-PG2
Channel 1
Output
Channel 2
(Not Used)
1
3-port
Power
S
Divider
2
AC
Input
DC
Input
4200-RBT
(1)
AC+DC
Output
V
g
KPulse and KScope
KPulse and KScope are stand-alone graphical user interfaces (GUIs) to control the pulse
generator and scope. These GUI front panels can be used for general-purpose pulse-measure
solutions. These GUIs are started by double-clicking the KPulse and KScope icons on the
desktop. See Section 11 of the Reference Manual for details on using these GUIs.
Locating the system in the proper environment
Locate the Model 4200-SCS such that it will operate within the following ambient temperature and
humidity limits:
• Temperature: +15° to +40°C
• Relative humidity: 5% to 80%, non-condensing
V
AC+DC
Output
DD
NOTE SMU and PreAmp accuracy specifications are based on operation at 23° ±5°C and
between 5% and 60% relative humidity. See the product specifications for derating
factors outside these ranges.
CAUTION To avoid over-heating, operate the unit only in an area with proper ventilation.
Allow at least eight inches of clearance at the back of the mainframe to assure
sufficient airflow, and adhere to the following:
• Operate the unit in a clean, dust-free environment.
• Keep the fan vents and cooling vents from becoming blocked.
• Do not position any devices adjacent to the unit that force air (heated or
unheated) into cooling vents. This additional airflow could compromise
accuracy performance.
• When rack-mounting the unit, ensure adequate airflow around the sides,
bottom, and back.
4200-903-01 Rev. C / May 2006 Return to Section Topics List
4200-SCS Quick Start Guide Understanding and Preparing the System 1-13
• Do not rack-mount high power dissipation equipment adjacent to the Model
4200-SCS.
To ensure proper cooling in rack environments with only convection cooling,
place the hottest equipment (i.e., power supply) at the top of the rack. Place
precision equipment, such as the Model 4200-SCS, as low as possible in the
rack, where temperatures are the coolest. Adding spacer panels below the unit
helps to ensure adequate airflow.
Connecting system components
WARNING Asserting the interlock will allow the SMU and PreAmp terminals to become
hazardous. SMU and PreAmp terminals should be considered hazardous even
if the outputs are programmed to be low voltage. Precautions must be taken to
prevent a shock hazard by surrounding the test device and any unprotected
leads (wiring) with double insulation for 250 volts, Category I.
Figure 1-9 shows how typical system components are installed.
Figure 1-9
Back panel view, system connectors, and system connections
Safety-Interlock Connector
Probe
Station
Parallel
Printer
LAN Junction
Box or Hub
CAT 5 UTP Cable
Y-Cable (supplied)
External
Monitor
(optional)
Shielded
Serial
Cable
Shielded
Parallel
Cable
Interlock Cable
RS-232
Connector
Keyboard
Parallel
Connector
GNDU
S
COM 1
E
INSTRUMENT
N
CONNECTIONS
S
E
SMU ONLY
F
LPT 1
O
R
C
E
SMU AND GNDU
C
O
M
M
GUARD
O
N
INSTALLATION
CATEGORY
I
KEITHLEY
4200
TM
INTLK
IN
OUT
USB
Port*
Mouse/Keyboard
Connector
GPIB
Instrument
Safety-Interlock
Connector
LAN
Connector
SENSE LO
GUARD
SENSE LO
COMMON
SENSE
COMMON
FORCE
SLOT8SLOT7SLOT6SLOT5SLOT4SLOT3SLOT2SLOT
KEITHLEY
KEITHLEY
4200
4200
SCP2
PG2
Channel 1
Channel 1
Ext
Trg
Ext
Trigger
Clk
Out
Channel 2
Channel 2
7007
GPIB Connector
GPIB
Cable
GPIB
Instrument
4200-SCS
INSTRUMENTS
KEITHLEY
4210
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
Model
KEITHLEY
KEITHLEY
4200
4210
SMU
SMU
SENSE LO
SENSE LO
SENSE
SENSE
FORCE
FORCE
PA CNTRL
PA CNTRL
1
KEITHLEY
4200
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
Trigger
Link
Connectors
* v1.1 USB connector Connect a USB device, such as
a USB printer.
Return to Section Topics List 4200-903-01 Rev. C / May 2006
7007 GPIB Cable
1-14 Understanding and Preparing the System 4200-SCS Quick Start Guide
Connecting devices to be tested (DUTs)
Basic device connections for SMUs
Figure 1-10 shows the basic device connections, independent of the device mounting and
manipulation hardware (for example, a test fixture or prober)
Figure 1-10
Back panel and basic device connections to SMUs and PreAmps
Basic Connections to SMUs Basic Connections to PreAmps
FORCE
Connectors
on SMUs
Two -
SLOT
1
SLOT
2
SENSE LO
SLOT
3
SENSE LO
SENSE
SLOT
4
INSTRUMEN
GNDU
CONNECTIONS
T
SENSE LO
GUARD
SMU ONLY
SENSE LO
S
COMMON
E
N
S
E
SMU AND GNDU
SENSE
F
COMMON
O
R
C
GUARD
E
FORCE
C
O
M
M
O
N
IN
T
U
O
INSTRUMENTS
SENSE LO
SENSE
SLOT
5
FORCE
SENSE LO
SENSE
SLOT
6
FORCE
SENSE
SLOT
7
FORCE
SLOT
8
FORCE
PA CNTRL
PA CNTRL
PA CNTRL
PA CNTRL
Terminal
Device
INSTRUMENT
GNDU
CONNECTIONS
SENSE LO
GUARD
SMU ONLY
SENSE LO
S
E
N
S
E
F
O
R
C
E
C
O
M
M
O
N
IN
OUT
SLOT
6
COMMON
SLOT
7
SMU AND GNDU
SENSE
COMMON
SLOT
8
GUARD
FORCE
SLOT
1
SLOT
2
PreAmps
SENSE LO
SLOT
3
SENSE LO
SENSE
SLOT
4
INSTRUMENTS
SENSE LO
SENSE
SLOT
5
FORCE
SENSE LO
SENSE
FORCE
SENSE
FORCE
4200-PA-1 REMO
PA-1 REMOT
PA-1 REMOT
PA-1 REMO
FORCE
CONTROL
P
RE
A
MP
PA CN
Two -
Terminal
Device
FORCE
Connectors
on SMUs
SLOT
1
SLOT
2
SENSE LO
SLOT
3
SENSE LO
SENSE
SLOT
4
INSTRUMEN
GNDU
CONNECTIONS
T
SENSE LO
GUARD
SMU ONLY
SENSE LO
S
COMMON
E
N
S
E
SMU AND GNDU
SENSE
F
COMMON
O
R
C
GUARD
E
FORCE
C
O
M
M
O
N
IN
T
U
O
INSTRUMENTS
SENSE LO
SENSE
SLOT
5
FORCE
SENSE LO
SENSE
SLOT
6
FORCE
SENSE
SLOT
7
SLOT
FORCE
8
FORCE
PA CNTRL
PA CNTRL
PA CNTRL
PA CNTRL
FORCE Connector on GNDU
FORCE
Connectors
on SMUs
SLOT
1
SLOT
2
SENSE LO
SLOT
3
SENSE LO
SENSE
SLOT
4
INSTRUMEN
GNDU
CONNECTIONS
T
SENSE LO
GUARD
SMU ONLY
SENSE LO
S
COMMON
E
N
S
E
SMU AND GNDU
SENSE
F
COMMON
O
R
C
GUARD
E
FORCE
C
O
M
M
O
N
IN
T
U
O
INSTRUMENTS
SENSE LO
SENSE
SLOT
5
FORCE
SENSE LO
SENSE
SLOT
6
FORCE
SENSE
SLOT
7
FORCE
SLOT
8
FORCE
PA CNTRL
PA CNTRL
PA CNTRL
PA CNTRL
Three-
Terminal
Device
Four
Terminal
Device
FORCE
Connectors
SLOT
1
SLOT
2
PreAmps
SENSE LO
SLOT
3
SENSE LO
SENSE
SLOT
4
INSTRUMENT
GNDU
CONNECTIONS
SENSE LO
GUARD
SMU ONLY
SENSE LO
S
COMMON
E
N
S
E
SMU AND GNDU
SENSE
F
COMMON
O
R
C
GUARD
E
FORCE
C
O
M
M
O
N
IN
OUT
INSTRUMENTS
SENSE LO
SENSE
SLOT
5
FORCE
SENSE LO
SENSE
SLOT
6
FORCE
SENSE
SLOT
7
FORCE
4200-PA-1 REMO
PA-1 REMOT
PA-1 REMOT
PA-1 REMO
SLOT
8
FORCE
CONTR
P
RE
A
MP
OL
PA CN
FORCE
Connectors
FORCE Connector on GNDU
PreAmps
SLOT
1
SLOT
2
SENSE LO
SLOT
3
SENSE LO
SENSE
SLOT
4
INSTRUMENT
GNDU
CONNECTIONS
SENSE LO
GUARD
SMU ONLY
SENSE LO
S
COMMON
E
NDU
N
S
E
SMU AND G
SENSE
F
COMMON
O
R
C
GUARD
E
FORCE
C
O
M
M
O
N
IN
OUT
INSTRUMENTS
SENSE LO
SENSE
SLOT
5
FORCE
SENSE LO
SENSE
SLOT
6
FORCE
SENSE
SLOT
7
FORCE
4200-PA-1 REMO
PA-1 REMOT
PA-1 REMOT
PA-1 REMO
SLOT
8
FORCE
CONTR
P
RE
A
MP
OL
PA CN
FORCE
Connectors
Three-
Terminal
Device
Four
Terminal
Device
FORCE Connector on GNDU
FORCE Connector on GNDU
4200-903-01 Rev. C / May 2006 Return to Section Topics List
4200-SCS Quick Start Guide Understanding and Preparing the System 1-15
Basic device connections for the pulse generator and scope
Figure 1-11 shows the basic device connections, independent of the device mounting and
manipulation hardware (for example, a prober), to channel 1 of the pulse generator and scope.
The cables, connector adapter and torque wrench are supplied items. The adapter allows a short
SMA cable to be used for the trigger connection between the pulse generator and the scope.
The pulse generator and scope also come equipped with an assortment of other connectors and
adapters for various connection schemes. See “Pulse-measure connections” in Section 4 of the
Reference Manual for more connection diagrams.
connection drawings provided in Section 4 of the Reference Manual.
NOTE The 4200-RBT remote Bias Tee is typically used in an integrated test system and is
beyond the scope of this manual. See “Pulse-measure connections” in Section 4 of the
Reference Manual for details on connections using the 4200-RBT.
Figure 1-11
Basic device connections to the pulse generator and scope
Table 1-4 summarizes the pulse-measure
Model 4200-PG2 (Pulse Generator)
Model 4200-SCP2 (Digital Storage Oscilloscope)
Model 4200-SCS
Instrument Slots
SLOT8SLOT7SLOT6SLOT5SLOT4SLOT3SLOT2SLOT
KEITHLEY
KEITHLEY
Channel 1
Channel 1
Ext
Trg
Ext
Trigger
Clk
Out
Channel 2
Channel 2
SMB Male to SMA Female Adapter
INSTRUMENTS
KEITHLEY
4210
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
KEITHLEY
4210
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
KEITHLEY
4200
SENSE LO
SENSE
FORCE
PA CNTRL
SMU
KEITHLEY
4200
SMU
SENSE LO
SENSE
FORCE
PA CNTRL
= SMA-to-SMA Cable
(male-to-male)
= BNC-to-BNC Cable
(male-to-male)
NOTE Use torque wrench to tighten SMA
1
connections to
8 inch-lbs.
Pulse Output
(Channel 1)
DUT
Common
Scope Input
Channel 1
Return to Section Topics List 4200-903-01 Rev. C / May 2006
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