Tektronix 4200-SCS Quick Start Guide

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4200-SCS Semiconductor Characterization System

Quick Start Guide

4200-903-01 Rev. C / May 2006

www.keithley.com

A GREATER MEASURE OF CONFIDENCE

Model 4200-SCS

License Agreement

NOTICE TO USERS: CAREFULLY READ THE FOLLOWING LICENSE AGREEMENT (THE “AGREEMENT”). USE OF THE SOFTWARE (THE "SOFTWARE") PROVIDED WITH THE 4200-SEMICONDUCTOR CHARACTERIZATION SYSTEM (THE “4200-SCS”) CONSTITUTES YOUR ACCEPTANCE OF THESE TERMS. IF YOU DO NOT AGREE WITH THE TERMS OF THIS AGREEMENT, PROMPTLY RETURN THE SOFTWARE AND THE ACCOMPANYING ITEMS, INCLUDING ANY WRITTEN MATERIALS AND PACKAGING, TO THE LOCATION WHERE YOU OBTAINED THEM FOR A FULL REFUND.

Grant of License

Keithley Instruments ("Keithley") grants to you, subject to the terms and conditions of this Agreement, a non-exclusive, non-transferable license to use the portion of the Software developed and owned by Keithley (the “Keithley Software”) on the 4200-SCS and to use the manuals and other related materials pertaining to the Software which are necessary or desirable for the implementation, training or use of the Software (the “Documentation”) for your own internal business use and not for the benefit of any other person or entity. You may copy the Keithley Software into any machine-readable or printed form only for backup purposes or as necessary to use the Keithley Software or the 4200-SCS in accordance with this Agreement. The Keithley Software and Documentation and any copies or modifications thereof are referred to herein as the “Licensed Product.”

Ownership

Keithley and certain third party suppliers (the “Owners”) own all right, title and interest in and to the Licensed Product. You acknowledge that all right, title and interest in and to the Licensed Product will remain the exclusive property of the Owners, and you will not acquire any rights in or to the Licensed Product except as expressly set forth in this Agreement. The Licensed Product contains material that is protected by U.S. copyright laws, trade secret laws and international treaty provisions.

Limitations on Use

You may not make the Software available over the Internet or any similar networking technology. You may not remove any copyright, trademark or other proprietary notices from the Licensed Product or any media relating thereto. You agree that you will not attempt to reverse compile, reverse engineer, modify, translate, adapt or disassemble the Software, nor attempt to create the source code from the object code for the Software, in whole or in part.

Sublicense

You may sublicense the Keithley Software, subject to the sublicensee’s acceptance of the terms and conditions of this Agreement. You may not rent, lease or otherwise transfer the Licensed Product.

Termination

This Agreement is effective until terminated. Either party shall have the right to terminate this Agreement if the other fails to perform or observe any provision, term, covenant, warranty or condition of this Agreement (a “Default”) provided fifteen (15) days notice of termination (the “Notice”) is provided to the defaulting party and the defaulting party fails to cure the claimed Default within ten (10) days from the date of receipt of the Notice. Within three (3) days from the date of any termination of this Agreement, each and every embodiment of the Software in any form whatsoever, and all documentation, files and other materials in any form relating thereto, shall be destroyed, and all traces of the Software shall be permanently purged from the 4200-SCS.

Export Restrictions

You may not export or re-export the Software or any copy or adaptation in violation of any applicable laws or regulations.

U.S. Government Restricted Rights

Use, duplication and disclosure by the U.S. Government is subject to the restrictions as set forth in FAR §52.227-14 Alternates I, II and III (JUN 1987), FAR §52.227-19 (JUN 1987), and/or FAR §12.211/12.212 (Commercial Technical Data/Computer Software), and DFARS

§252.227-7015 (NOV 1995) (Technical Data) and/or DFARS §227.7202 (Computer Software), as applicable.

Limited Warranty

Keithley does not warrant that operation of the Software will be uninterrupted or error-free or that the Software will be adequate for the customer's intended application or use. Keithley warrants to you that the Keithley Software will substantially perform in accordance with the specifications set forth in this manual for a period of ninety (90) days after your receipt of the Keithley Software (the “Warranty Period”); provided the Keithley Software is used on the products for which it is intended and in accordance with the Documentation. If the Keithley Software is not performing as warranted during the Warranty Period, as determined by Keithley in its sole discretion (a “Nonconformity”), your exclusive remedy under this limited warranty is either a correction of the Keithley Software or an explanation by Keithley of how to use the Keithley Software despite the Nonconformity, at Keithley’s option. The foregoing limited warranty shall be null and void upon any mod ification of the Software, unless approved in writing by Keithley. The portions of the Software not developed and owned by Keithley shall not be covered by this limited warranty, and Keithley shall have no duty or obligation to enforce any third party supplier’s warranties on your behalf. The failure to notify Keithley of a Nonconformity during the Warranty Period shall relieve Keithley of its obligations and liabilities under this limited warranty.

EXCEPT FOR THE FOREGOING, THE SOFTWARE IS PROVIDED “AS IS” WITHOUT ANY WARRANTY OF ANY KIND, INCLUDING BUT NOT LIMITED TO, THE WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE.

THE SOFTWARE IS NOT FAULT TOLERANT AND IS NOT DESIGNED OR INTENDED FOR USE IN HAZARDOUS ENVIRONMENTS REQUIRING FAIL-SAFE PERFORMANCE INCLUDING WITHOUT LIMITATION, IN THE OPERATION OF NUCLEAR

FACILITIES, AIRCRAFT NAVIGATION OR COMMUNICATION SYSTEMS, AIR TRAFFIC CONTROL, WEAPONS SYSTEMS, DIRECT LIFE-SUPPORT MACHINES, OR ANY OTHER APPLICATION IN WHICH THE FAILURE OF THE SOFTWARE COULD LEAD TO DEATH, PERSONAL INJURY OR SEVERE PHYSICAL OR PROPERTY DAMAGE (COLLECTIVELY "HAZARDOUS ACTIVITIES"). KEITHLEY EXPRESSLY DISCLAIMS ANY EXPRESS OR IMPLIED WARRANTY OF FITNESS FOR HAZARDOUS ACTIVITIES.

Limitation of Liability

KEITHLEY’S SOLE LIABILITY OR OBLIGATION UNDER THIS AGREEMENT IS SET FORTH ABOVE IN THE LIMITED WARRANTY SECTION OF THIS AGREEMENT. IN NO EVENT SHALL KEITHLEY BE LIABLE FOR ANY DAMAGES. WITHOUT LIMITING THE FOREGOING, KEITHLEY SHALL NOT BE LIABLE OR ASSUME LIABILITY FOR: (1) ECONOMICAL, INCIDENTAL, CONSEQUENTIAL, INDIRECT, SPECIAL, PUNITIVE OR EXEMPLARY DAMAGES, WHETHER CLAIMED UNDER CONTRACT, TORT OR ANY OTHER LEGAL THEORY, (2) LOSS OF OR DAMAGE TO YOUR DATA OR PROGRAMMING, (3) PENALTIES OR PENALTY CLAUSES OF ANY DESCRIPTION, OR (4) INDEMNIFICATION OF YOU OR OTHERS FOR COSTS, DAMAGES, OR EXPENSES RELATED TO THE GOODS OR SERVICES PROVIDED UNDER THIS LIMITED WARRANTY.

Miscellaneous

In the event of invalidity of any provision of this Agreement, the parties agree that such invalidity shall not affect the validity of the remaining portions of this Agreement. This Agreement shall be governed by and construed in accordance with the laws of the state of Ohio, without regard to conflicts of laws provisions thereof. This is the entire agreement between you and Keithley and supersedes any prior agreement or understanding, whether written or oral, relating to the subject matter of this license. Any waiver by either party of any provision of this Agreement shall not constitute or be deemed a subsequent waiver of that or any other provision.

Should you have any questions concerning this Agreement, or if you desire to contact Keithley Instruments for any reason, please call Keithley at 1-800-552-1115, or write at Keithley Instruments, 28775 Aurora Rd., Solon, Ohio, USA 44139.

Limited Hardware Warranty

Keithley warrants to you that the Keithley manufactured portion of the hardware (the “Keithley Hardware”) purchased by you will substantially perform in accordance with the specifications set forth in this manual for a period of one (1) year after your receipt of the Keithley Hardware (the “Warranty Period”); provided the Keithley Hardware is used on the products for which it is intended and in accordance with the documentation. This limited warranty shall be null and void upon (1) any modifications of the Keithley Hardware, unless approved in writing by Keithley, (2) any operation of the 4200-Semiconductor Characterization System (the “4200-SCS”) with third party software, unless the software is explicitly approved and supported by Keithley, and (3) any operation of the 4200-SCS on an operating system not explicitly approved and supported by Keithley.

If the Keithley Hardware is not performing as warranted during the Warranty Period, as determined in Keithley’s sole discretion (a “Nonconformity”), your exclusive remedy under this limited warranty is the repair or replacement of the Keithley Hardware, at Keithley’s option. The portions of the hardware not developed and owned by Keithley shall not be covered by this limited hardware warranty, and Keithley shall have no duty or obligation to enforce a third party supplier’s warranties on your behalf. The failure to notify Keithley of a Nonconformity during the Warranty Period shall relieve Keithley of its obligations and liabilities under this limited hardware warranty.

EXCEPT FOR THE FOREGOING, THE HARDWARE IS PROVIDED “AS IS” WITHOUT ANY WARRANTY OF ANY KIND, INCLUDING BUT NOT LIMITED TO, THE WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE.

KEITHLEY’S SOLE LIABILITY OR OBLIGATION UNDER THIS LIMITED HARDWARE WARRANTY IS THE REPAIR OR REPLACEMENT OF THE KEITHLEY HARDWARE. IN NO EVENT SHALL KEITHLEY BE LIABLE FOR ANY DAMAGES. WITHOUT LIMITING THE FOREGOING, KEITHLEY SHALL NOT BE LIABLE OR ASSUME LIABILITY FOR: (1) ECONOMICAL, INCIDENTAL, CONSEQUENTIAL, INDIRECT, SPECIAL, PUNITIVE OR EXEMPLARY DAMAGES, WHETHER CLAIMED UNDER CONTRACT, TORT OR ANY OTHER LEGAL THEORY, (2) LOSS OF OR DAMAGE TO YOUR DATA OR PROGRAMMING, (3) PENALTIES OR PENALTY CLAUSES OF ANY DESCRIPTION, OR (4) INDEMNIFICATION OF YOU OR OTHERS FOR COSTS, DAMAGES OR EXPENSES RELATED TO THE GOODS OR SERVICES PROVIDED UNDER THIS LIMITED HARDWARE WARRANTY.

Should you have any questions concerning this Agreement, or if you desire to contact Keithley Instruments for any reason, please call 1-800-552-1115, or write at Keithley Instruments, 28775 Aurora Rd., Solon, Ohio, USA 44139.

A G R E A T E R M E A S U R E O F C O N F I D E N C E

Keithley Instruments, Inc.

Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139

440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY (534-8453) • www.keithley.com

12/04

4200-SCS

Semiconductor Characterization System

Quick Start Guide

Cleveland, Ohio, U.S.A.

Third Printing, May 2006

Document Number: 4200-903-01 Rev. C

Manual Print History

The print history shown below lists the printing dates of all Revisions and Addenda created for this manual. The Revision Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between Revisions, contain important change information that the user should incorporate immediately into the manual. Addenda are numbered sequentially. When a new Revision is created, all Addenda associated with the previous Revision of the manual are incorporated into the new Revision of the manual. Each new Revision includes a revised copy of this print history page.

Revision A (Document Number 4200-903-01) ...............................................................................November 2003

Revision B (Document Number 4200-903-01) ...............................................................................November 2005

Revision C (Document Number 4200-903-01) ........................................................................................ May 2006

All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc. Other brand and product names are trademarks or registered trademarks of their respective holders.

Safety Precautions

The following safety precautions should be observed before using this product and any associated instrumentation. Although some in struments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may be present.

This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer to the manual for complete product specifications.

If the product is used in a manner not specified, the protection provided by the product may be impaired.

The types of product users are:

Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is operated within its specifications and operating limits, and for en suring that operators are adequately trained.

Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instru ment. They must be protected from electric shock and contact with hazardous live circuits.

Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or replacing consumable materials. Maintenance procedures are described in the manual. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are trained to work on live circuits, and perform safe installations and repairs of products. Only properly trained ser vice personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that are rated Measurement Category I and Measurement Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and data I/O sig nals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless other wise marked or described in the Manual.

Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS,

42.4V peak, or 60VDC are present. A good safety practice is to ex

pect that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from electric shock at

all times. The responsible body must ensure that operators are pre vented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human con tact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000 volts, no conductive part of

the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance limited sources. NEVER connect switching cards directly to AC mains. When con necting sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks

before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power dis

connect device must be provided, in close proximity to the equip-

ment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jump ers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always

make measurements with dry hands while standing on a dry, insulated

surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its specifications and operating instructions or the safety of the equip ment may be impaired.

Do not exceed the maximum signal levels of the instruments and

accessories, as defined in the specifications and operating information, and as shown on the instrument or test fixture panels, or switching card.

When fuses are used in a product, replace with same type and rating

for continued protection against fire hazard.

Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.

If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid interlock.

5/03

If a screw is present, connect it to safety earth ground using the wire recommended in the user documentation.

The ! symbol on an instrument indicates that the user should refer to the operating instructions located in the manual.

The symbol on an instrument shows that it can source or measure 1000 volts or more, including the combined effect of normal and common mode voltages. Use standard safety precautions to avoid personal contact with these voltages.

The symbol indicates a connection terminal to the equipment frame.

The WA R N I N G heading in a manual explains dangers that might result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.

The CAUTION heading in a manual explains hazards that could damage the instrument. Such damage may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and all test cables.

To maintain protection from electric shock and fire, replacement components in mains circuits, including the power transformer, test leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component. (Note that se lected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product.) If you are unsure about the applicability of a replacement component, call a Keithley Instruments office for information.

To clean an instrument, use a damp cloth or mild, water based cleaner. Clean the exterior of the instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., data acquisition board for installation into a computer) should never require cleaning if handled according to in structions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

1 Understanding and Preparing the System

Unpacking and inspecting the system .................................................................................. 1-2

Inspection for damage ................................................................................................... 1-2

Shipment contents ......................................................................................................... 1-2

Repacking for shipment ................................................................................................. 1-2

Becoming familiar with the system ....................................................................................... 1-3

Software features ........................................................................................................... 1-4

Hardware features and capabilities ............................................................................... 1-5

Pulse I-V Package – Integrated solution ...................................................................... 1-11

KPulse and KScope ..................................................................................................... 1-12

Locating the system in the proper environment ................................................................. 1-12

Connecting system components ........................................................................................ 1-13

Connecting devices to be tested (DUTs) ............................................................................ 1-14

Basic device connections for SMUs ............................................................................ 1-14

Basic device connections for the pulse generator and scope ...................................... 1-15

Device connection details ............................................................................................ 1-16

Powering the 4200-SCS ..................................................................................................... 1-18

Configuring the system ...................................................................................................... 1-19

2 Designing and Executing Tests

Understanding the 4200-SCS test hierarchy and terminology ............................................. 2-2

Becoming familiar with the KITE interface ........................................................................... 2-2

Understanding the Project Navigator ............................................................................. 2-4

Understanding Interactive Test Modules (ITMs) and User Test Modules (UTMs) ......... 2-5

Building a Project ................................................................................................................. 2-6

Define the new Project .................................................................................................. 2-6

Insert the Subsite Plans ................................................................................................. 2-7

Insert the Device Plans .................................................................................................. 2-7

Insert the ITMs ............................................................................................................... 2-8

Insert the UTMs ............................................................................................................. 2-9

Save the Project .......................................................................................................... 2-10

Defining and configuring the Project ITMs ......................................................................... 2-11

Understand the ITM Definition tab ............................................................................... 2-11

Understand the ITM forcing functions .......................................................................... 2-12

Use the Definition tab to configure ITM parameters .................................................... 2-15

Set up Formulator calculations, if desired .................................................................... 2-18

Save the ITM configuration .......................................................................................... 2-19

Defining and configuring the Project UTMs ........................................................................ 2-19

Understand the UTM Definition tab ............................................................................. 2-20

Define UTMs using the UTM Definition tab ................................................................. 2-21

Create custom user modules and user libraries, if necessary ..................................... 2-22

4200-903-01 Rev. C / May 2006 i

Executing the Project tests ................................................................................................. 2-28

Executing a single test at a single site ......................................................................... 2-28

Executing a single test sequence at a single site ........................................................ 2-29

Executing appended tests and test sequences at a single site ..................................................... 2-30

Executing an entire Project at a single site .................................................................. 2-30

Executing an entire Project at multiple sites ................................................................ 2-31

Repeating a test .......................................................................................................... 2-33

Subsite cycling overview ............................................................................................. 2-33

3 Viewing Test Results

Understanding the data files ................................................................................................ 3-2

Data file naming ............................................................................................................. 3-2

Data file location ............................................................................................................ 3-2

Viewing test results numerically via the Sheet tab Data worksheet ..................................... 3-3

Viewing test results graphically via the Graph tab ................................................................ 3-4

Opening a Graph tab ..................................................................................................... 3-4

Reviewing the Graph Setting menu ............................................................................... 3-5

Defining a basic graph ................................................................................................... 3-7

4 Protecting user files and system software

Protecting software integrity ................................................................................................. 4-2

Protecting user file integrity .................................................................................................. 4-2

Choosing the files to be backed up ............................................................................... 4-3

Choosing the method of backup .................................................................................... 4-4

ii 4200-903-01 Rev. C / May 2006

List of Illustrations

1 Understanding and Preparing the System

Figure 1-1 4200-SCS summary .......................................................................................................... 1-3

Figure 1-2 Front panel ........................................................................................................................ 1-5

Figure 1-3 Source-measure hardware overview................................................................................. 1-6

Figure 1-4 Signal types and absolute limits at source-measure hardware connectors ...................... 1-7

Figure 1-5 Source-measure operating boundaries ............................................................................. 1-8

Figure 1-6 Triax cables for the 4200-SCS .......................................................................................... 1-8

Figure 1-7 Pulse-measure hardware overview ................................................................................. 1-10

Figure 1-8 Block diagram of Pulse-IV test system............................................................................ 1-12

Figure 1-9 Back panel view, system connectors, and system connections...................................... 1-13

Figure 1-10 Back panel and basic device connections to SMUs and PreAmps ................................. 1-14

Figure 1-11 Basic device connections to the pulse generator and scope .......................................... 1-15

Figure 1-12 Line power receptacle ..................................................................................................... 1-18

Figure 1-13 KCON overview............................................................................................................... 1-20

2 Designing and Executing Tests

Figure 2-1 KITE interface overview ...................................................................................................... 2-3

Figure 2-2 Project Navigator............................................................................................................... 2-4

Figure 2-3 ITMs and UTMs in the Project Navigator .......................................................................... 2-5

Figure 2-4 Define New Project window............................................................................................... 2-6

Figure 2-5 Define New Project window configured for the u_build Project Plan................................. 2-6

Figure 2-6 Selecting a new device plan from the 4200-SCS device library........................................ 2-7

Figure 2-7 Device Plan Window ......................................................................................................... 2-8

Figure 2-8 Selecting an ITM from the 4200-SCS device library ......................................................... 2-8

Figure 2-9 Adding an ITM to the Test Sequence Table....................................................................... 2-9

Figure 2-10 ITM Definition tab — and neighboring tabs ..................................................................... 2-11

Figure 2-11 Pulse Mode examples..................................................................................................... 2-15

Figure 2-12 Typical Forcing Functions/Measure Options window for an existing library ITM ............ 2-16

Figure 2-13 Pulse Mode configuration (voltage sweep) ..................................................................... 2-18

Figure 2-14 UTM-creation overview ................................................................................................... 2-19

Figure 2-15 UTM Definition tab........................................................................................................... 2-20

Figure 2-16 Blank UTM Definition tab................................................................................................. 2-21

Figure 2-17 Example of configured UTM tab...................................................................................... 2-21

Figure 2-18 KULT interface overview ................................................................................................. 2-23

Figure 2-19 Site Navigator for Example Project ................................................................................. 2-28

Figure 2-20 Site Navigator for example Project.................................................................................. 2-29

Figure 2-21 Setting the site number in the Project window................................................................. 2-30

Figure 2-22 Multi-site test sequence................................................................................................... 2-31

Figure 2-23 Setting the site numbers in the Project window............................................................... 2-32

Figure 2-24 Repeating a test .............................................................................................................. 2-33

Figure 2-25 Cycle mode configuration................................................................................................ 2-34

4200-903-01 Rev. C / May 2006 iii

Figure 2-26 Start subsite cycling......................................................................................................... 2-34

Figure 2-27 Stress/Measure Mode – log cycle times setup................................................................ 2-35

Figure 2-28 Device Stress Properties – Setup steps for first device in Subsite Plan.......................... 2-36

Figure 2-29 Exporting ITM Output Values to the Subsite Data sheet ................................................. 2-37

Figure 2-30 Example Subsite Data sheet for the Stress/Measure Mode............................................ 2-37

Figure 2-31 Example Subsite Graph for the Stress/Measure Mode ................................................... 2-38

3 Viewing Test Results

Figure 3-1 Workspace-window tab name and data file name format.................................................. 3-2

Figure 3-2 Sheet tab Data worksheet................................................................................................. 3-3

Figure 3-3 Graph tab example............................................................................................................ 3-4

Figure 3-4 Example of an unconfigured graph tab ............................................................................. 3-5

Figure 3-5 Graph settings menu ......................................................................................................... 3-5

Figure 3-6 Unconfigured Graph Definition window for a “vds-id” ITM................................................. 3-7

Figure 3-7 Configured Graph Definition window for the “vds-id” ITM ................................................. 3-8

Figure 3-8 “vds-id” graph after configuring its Graph Definition window............................................. 3-8

iv 4200-903-01 Rev. C / May 2006

List of Tables

1 Understanding and Preparing the System

Ta bl e 1-1 Basic 4200-PG2 pulse characteristics............................................................................. 1-10

Ta bl e 1-2 Basic 4200-SCP2 characteristics .................................................................................... 1-11

Ta bl e 1-3 Additional SMU connection diagrams in Section 4 of the Reference Manual ................. 1-16

Ta bl e 1-4 Additional pulse-measure connection diagrams in Section 4 of the Reference Manual . 1-17

2 Designing and Executing Tests

Ta bl e 2-1 Primary differences between an ITM and a UTM .............................................................. 2-5

Ta bl e 2-2 Forcing function summary ............................................................................................... 2-12

4 Protecting user files and system software

Ta bl e 4-1 Common backup storage options for the 4200-SCS......................................................... 4-4

4200-903-01 Rev. C / May 2006 v

vi 4200-903-01 Rev. C / May 2006

Understanding and

Preparing the System

Section Topics List

Unpacking and inspecting the system, page 1-2

Inspection for damage, page 1-2

Shipment contents, page 1-2

Repacking for shipment, page 1-2

Becoming familiar with the system, page 1-3

Software features, page 1-4

Hardware features and capabilities, page 1-5

Pulse I-V Package – Integrated solution, page 1-11

KPulse and KScope, page 1-12

Locating the system in the proper environment, page 1-12

Connecting system components, page 1-13

Connecting devices to be tested (DUTs), page 1-14

Basic device connections for SMUs, page 1-14

Basic device connections for the pulse generator and scope, page 1-15

Device connection details, page 1-16

Powering the 4200-SCS, page 1-18

Configuring the system, page 1-19

1-2 Understanding and Preparing the System 4200-SCS Quick Start Guide

Unpacking and inspecting the system

Inspection for damage

After unpacking the mainframe, carefully inspect the unit for any shipping damage. Report any damage to the shipping agent immediately as such damage is not covered by the warranty.

Shipment contents

The following items are included with every Model 4200-SCS order:

• Model 4200-SCS Semiconductor Characterization System with ordered SMUs factory installed

• Line cord

• Model 4200-SCS Quick Start Manual hardcopy

• Miniature triaxial cables, two per Model 4200-SMU or 4210-SMU, 2m (6 ft)

• Interlock cable

• Keyboard with integrated pointing device

• System software and manuals on CD-ROM

• Microsoft Windows XP Professional

• Microsoft C++

• Microsoft Visual Studio .NET

• Full Armor GPAnywhwere

• GASP eAgent

• Acronis True Image

• Product Information CD-ROM that contains PDFs of the Quick Reference Guide, Applications Manual, and Reference Manual.

The following items are options than can be ordered for the Model 4200-SCS:

• Model 4200-PA PreAmp modules (installed at factory) – Includes triaxial cables, two per Model 4200-PA, 2m (6 ft).

• Model 4200-PG2 pulse generator card (installed at factory) – Includes an 8 inch-pound torque wrench, SMA cables and adapters.

• Model 4200-SCP2 digital storage oscilloscope module (installed at factory) – Includes BNC cables, a short SMA cable, connectors and adapters.

• Model 4200-RBT remote Bias Tees (2) – Includes two SMA cables and two magnetic mounting bases.

• Model 4200-PIV, which includes a 4200-PG2, 4200-SCP2, two 4200-RBTs, one 3-Port Power Divider and two SMA Tees.

• Model 4200-SCP2-ACC Accessory Kit for the 4200-SCP2 scope which includes 500MHz scope probes.

Repacking for shipment

Should it become necessary to return the Model 4200-SCS for repair, carefully pack the entire unit in its original packing carton or the equivalent, and perform the following:

• Contact Keithley to get a Return Material Authorization (RMA). You can contact Keithley through your local Keithley representative, or by calling the Keithley factory at 1-888-5348453 (1-888-KEITHLEY), or through the Keithley Web page at www.keithley.com.

• On the shipping label, write ATTENTION REPAIR DEPARTMENT, and the RMA number.

Warranty and contact information is located at the front of this manual.

1. Not included when SMU is ordered with a 4200-PA (see listed options)

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Understanding and Preparing the System 1-3

Becoming familiar with the system

WARNING The safe procedure to power-up the Model 4200-SCS is provided in “Powering

the 4200-SCS” on page 1-18. Do not turn on the Model 4200-SCS until you

have reviewed that information.

The Model 4200 Semiconductor Characterization System (SCS) can automatically characterize IV and CV of semiconductor devices and test structures, using up to eight Source-Measure Units (SMUs). A variety of supported external components enhance the capabilities. See

Figure 1-1

4200-SCS summary

Model 4200-SCS

Figure 1-1.

Keyboard

& Pointing

Device

User

Optional

External Monitor

Interactive Test Module (ITM) Library

KITE

(Keithley

Interactive Test

Environment)

Software

Flat Panel

Monitor

Video

Interface

Parallel

Interface

Printer

User Test

Module

(UTM) Library

KULT

(Keithley User

Library Tool)

Software

Computer

USB

Interface

Pointing Device

Thumb Driver

Printer

KTE-Interactive

KCON

(Keithley

CONfiguration

Management

Software)

LAN

Interface

Network

Software

KXCI

(Keithley

External Control

Interface

Software)

SMUs

Interface

PreAmps

PG2

SCP2

Serial

GPIB

Interface

Other External Control

Pulses

KPulse

(Keithley Pulse

Virtual Front

Panel)

RBTs

C-V

Meter

Generator

(Keithley Scope

Virtual Front

I/V

C/V

Pulse

KScope

Panel)

VISA

I/V

Pulses

Switch Matrix

Prober

Pulses

Return to Section Topics List 4200-903-01 Rev. C / May 2006

1-4 Understanding and Preparing the System 4200-SCS Quick Start Guide

Software features

CAUTION When you start one of the KTE Interactive software tools for the first time, you

must respond affirmatively to an on-screen license agreement before proceeding further. If you do not respond with a “Yes” answer, your system will be nonfunctional until you reinstall the software.

The following four software tools are used to operate and maintain the 4200-SCS.

• KITE — Keithley Interactive Test Environment (KITE) is the main Model 4200-SCS device characterization application. You first use KITE to organize tests into individual projects. You subsequently use KITE to manage and execute these projects. You can interactively characterize individual devices or automatically test entire semiconductor wafers.

• KULT — The Keithley User Library Tool (KULT) allows you to create algorithms (user modules) in the C programming language and to then integrate these modules into KITE. The modules can control internal 4200-SCS instrumentation and external instrumentation You also use KULT to create and manage libraries of user modules.

• KCON — The Keithley CONfiguration (KCON) utility allows you to configure external GPIB (IEEE-488) instruments, switch matrices, and analytical probers connected to the 4200-SCS. KCON also provides basic diagnostic and troubleshooting functions.

• KXCI — The Keithley External Control Interface (KXCI) allows you to use an external computer to remotely control 4200-SCS SMUs over the GPIB (IEEE-488) bus, using an HP 4145B-style command set. You can do this in either in the 4145 emulation mode or in the 4200 extended mode, which provides access to all 4200-SCS SMU commands and ranges.

NOTE Discussion of KXCI is beyond the scope of this Quick Start manual. For the details

needed to use KXCI, refer to Section 9 of the 4200-SCS Reference Manual, “Keithley External Control Interface (KXCI).”

• KPulse — KPulse is the Keithley virtual front panel application for the 4200-PG2 dual channel pulse card. This is a stand-alone application that allows direct access to the 4200-PG2. KPulse is started by double-clicking the KPulse icon on the desktop.

• KScope — KScope is the Keithley virtual front panel application for the 4200-SCP2 dual channel digital storage oscilloscope. This is a stand-alone application that allows direct access to the 4200-SCP2. KScope is started by double-clicking the KScope icon on the desktop.

NOTE Details on using KPulse and KScope are provided in Section 11 of the Model 4200

Reference Manual.

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Understanding and Preparing the System 1-5

Hardware features and capabilities

Instrument panels

Figure 1-2 shows the 4200-SCS front-panel features.

Figure 1-2

Front panel

Model 4200-SCS

SEMICONDUCTOR CHARACTERIZATION SYSTEM

4200

INTERLOCK

HARD DISK

POWER

8 7

MEASURING

1. Display — Displays graphical user interface, data, graphs, and system operation information. (Note: 4200-SCS/C has no display and requires an external monitor.)

2. CD-ROM drive

3. Floppy disk drive.

4. Display brightness — Allows you to set the FPD display to the desired brightness.

– For newer 4200-SCS models, turning the brightness knob all the way down will

completely turn off the FPD bulb.

– Newer 4200-SCS models are shipped with a high-resolution FPD (1024x768).

5. POWER switch

6. HARD DISK indicator — Turns on when the hard disk is being accessed.

7. INTERLOCK indicator — Turns on when the test fixture interlock is closed.

8. MEASURING indicator — Turns on when measurements are in progress. It also turns on when the 4200-PG2 is pulsing.

9. Two v1.1 USB Ports — Interfaces to peripherals (e.g., pointing devices, printers, scanners, thumb drives, external hard drives, and CD-ROMs).

Figure 1-3, Figure 1-9, and Figure 1-10, in following subsections, show the back-panel features.

Return to Section Topics List 4200-903-01 Rev. C / May 2006

1-6 Understanding and Preparing the System 4200-SCS Quick Start Guide

Source-measure hardware

Source-measure hardware overview

Refer to Figure 1-3. The 4200-SCS mainframe accepts up to eight SMUs, each of which may be used with or without PreAmps. Four of the SMUs may be high-powered, 4210-SMU models.

Figure 1-3

Source-measure hardware overview

Ground Unit

Sense-signal

ground-return

connector

Force-signal

ground-return

connector

4200-SCS

circuit-common

connector

Chassis-ground

connector

Model

4200-SCS

KEITHLEY

GNDU

S E N S E

F O R C E

C O M M O N

INSTRUMEN

NLY

GNDU

CONNECTIONS T

SENSE LO GUARD

SMU O

SENSE LO

E N S E

SMU AND GNDU

F O R C E

C O M M O N

OUT

SLOT

COMMON

SLOT

SENSE

COMMON

SLOT

GUARD

FORCE

SLOT

SENSE LO

SLOT

SENSE LO

SENSE

SLOT

INSTRUMENTS

SENSE LO

SENSE

SLOT

FORCE

SENSE LO

SENSE

FORCE

SENSE

FORCE

4200-PA-1 REMOT

CONTR

FORCE

PA CNTRL

SENSE

FORCE

Sense

Force

Connector

SENSE

FORCE

PreAmp

Control

Connector

Mounting

Foot

CONT

ROL

4200-PA-1 REMOTE P

SENSE LO

PA CNTRL

Source-Measure

4210 SMU

SENSE

FORCE

Unit (SMU)

SENSE LO

(triaxial connector)

SENSE HI

(triaxial connector)

FORCE

(triaxial connector)

PreAmp

Control

Connector

Item

shown

above

Source

Measure

Unit

(SMU)

Performs one of the following:

• Source voltage and measure

• Source current and measure

Description Model

current and/or voltage

voltage and/or current Can be configured to sweep or step source voltages or currents

OR to output a constant bias voltage or bias current.

PreAmp Adds lower current ranges to a

Model 4200-SMU or Model 4210-SMU.

4200-SMU (2.2W out)

105nA / 5pA

1.05μA / 50pA

10.5μA / 500pA 105μA / 5nA

1.05mA / 50nA

10.5mA / 500nA 105mA / 5μA

4210-SMU (22W out)

As above, plus

1.05A / 50μA

4200-PA The additional

ranges below:

1.05pA / 50aA

Current ranges

(full scale/set resolution)

Source Measure Source Measure

10.5pA / 500aA

100.5pA / 5fA

1.05nA / 50fA

10.5nA / 500fA

Ground

Unit

Provides need-specific return paths to circuit COMMON.

Part of mainframe

Not applicable Not applicable Not

4200-903-01 Rev. C / May 2006 Return to Section Topics List

105nA / 1pA

1.05μA / 10pA

10.5μA / 100pA 105μA / 1nA

1.05mA / 10nA

10.5mA / 100nA 105mA / 1μA

As above, plus

1.05A / 10μA

The additional ranges below:

1.05pA / 10aA

10.5pA / 100aA

100.5pA / 1fA

1.05nA / 10fA

10.5nA / 100fA

Voltage ranges

(full scale/set resolution)

210mV / 5μV

2.1V / 50μV 21V / 500μV 210V / 5mV

210mV / 5μV

2.1V / 50μV 21V / 500μV 210V / 5mV

Not

applicable

4200-SCS Quick Start Guide Understanding and Preparing the System 1-7

Source-measure connectors

Figure 1-3 above showed the connectors on SMUs, PreAmps, and the GNDU. Figure 1-4 below

shows the signal types and absolute limits for each of these connectors.

Figure 1-4

Signal types and absolute limits at source-measure hardware connectors

KEITHLEY

4210 SMU

SENSE LO

SENSE

FORCE

SENSE

FORCE

SMU(4200-SMU or 4210-SMU) Triaxial Connector Signals and Limits

SENSE current from Kelvin connection

250V

40V

PEAK

40V

PEAK

250V

PEAK

GUARD

250V

PEAK

CAT I

COMMON

SENSE current to Kelvin connection

FORCE current

0.1A max for 4200-SMU

1.0A max for 4210-SMU

FORCESENSE

PreAmp CONTROL connector

PreAmp (4200-PA)Triaxial Connector Signals and Limits

250V

PEAK

SENSE current to Kelvin connection

FORCE current

0.1A max w/4200-SMU

1.0A max w/4210-SMU

FORCESENSE

40V

PEAK

40V

PEAK

250V

PEAK

GUARD

250V

PEAK

CAT I

COMMON

42V

PEAK

42V

PEAK

32V DC max

GNDU

S E N S E

F O R C E

C O M M O N

GUARD

Ground Unit (GNDU) Connector Signals and Limits

SENSE current return from one or more Kelvin connections

FORCE current return from one or more SMUs

2.6A max

5A max

10Ω max cable/path

SENSE

COMMON

FORCE

1Ω max cable/path

Unshielded current return

Chassis (earth) ground

Return to Section Topics List 4200-903-01 Rev. C / May 2006

1-8 Understanding and Preparing the System 4200-SCS Quick Start Guide

Source-measure operating boundaries

Figure 1-5 covers the normal source/sink operating boundaries for the two models of SMU, alone

and with PreAmps.

Figure 1-5

Source-measure operating boundaries

-V

Operating boundaries for 4200-SMU alone and 4200-SMU + 4200-PA PreAmp

100mA

10mA

(IV)

Sink

-200V

Source

-20V

(III)

-10mA

- 100mA

-I

For more information about SMU and PreAmp operating boundaries, see the additional boundary diagrams and discussions in Section 3 of the 4200-SCS Reference Manual.

20V

(I)

Source

(II)

Sink

200V

-V

Operating boundaries for 4210-SMU alone and 4210-SMU + 4200-PA PreAmp

100mA

(IV)

Sink

-200V

Source

-20V

(III)

-100mA

-1A

-I

20V

(I)

Source

200V

(II)

Sink

Source-measure connection cables

You make connections to DUT (device under test) contact devices, such as test fixtures and probers, using supplied Triax cables.

Figure 1-6 and the following paragraphs describe the two

types.

Figure 1-6

Triax cables for the 4200-SCS

4200-TRX-X 4200-MTRX-X

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Understanding and Preparing the System 1-9

• With PreAmps installed, use the low noise 4200-TRX-X series triax cables, which are terminated with 3-slot triax connectors on both ends. One end of the connects to the PreAmp and the other end connects to the DUT test fixture or probe station.

• Without PreAmps installed, use the 4200-MTRX-X series cables, which have a miniature triax connector on one end and a standard 3-slot triax connector on the other end. The end with the miniature connector connects directly to the SMU, and the other end connects to the test fixture or probe station.

CAUTION With PreAmps installed, NEVER make connections directly to any of the

miniature triax connectors on the SMU modules. Otherwise, SMU and/or DUT damage and data corruption may occur.

Pulse-measure hardware

Figure 1-7 shows Keithley pulse-measure hardware, which includes the following:

• 4200-PG2 dual channel, pulse generator card

• 4200-SCP2 dual channel, digital storage oscilloscope card

• 4200-RBT remote Bias Tee adapter

Pulse generator and scope

As shown in Figure 1-7, the 4200-PG2 pulse generator has two output channels and the 4200-SCP2 has two input channels. The basic characteristics of the pulse generator and scope are summarized in

Table 1-1 and Tab le 1-2.

When these two instrument components are used together in the same test system, TRIGGER OUT of the 4200-PG2 is typically connected to EXT TRIG of the 4200-SCP2. This trigger connection synchronizes scope measurements to the output of the pulse generator.

Remote Bias Tee

The 4200-RBT remote Bias Tee (shown in Figure 1-7) is used in an integrated test system that uses a SMU to provide DC bias, and a 4200-PG2 to provide pulse output. The output of the 4200-RBT provides pulse output (AC) that rides on the DC bias of the SMU. See

“Pulse I-V

Package – Integrated solution” on page 1-11 for testing that uses the 4200-RBT.

As shown in Figure 1-7, a 4200-PG2 channel and a SMU are connected to the AC (pulse) and DC bias inputs of the 4200-RBT. The AC + DC output is then connected to the DUT. The 4200-SCP2 scope can also be used in the test system to measure the pulse(s) at the input and/or at the output of the 4200-RBT.

Figure 1-7 also shows a simplified schematic of the 4200-RBT. The capacitor functions as a low-

impedance device for high speed pulses, and as a high-impedance device for DC. This allows the high-speed pulses from the 4200-PG2 to pass through to the output, while blocking DC from the SMU.

The inductors function as low-impedance devices for DC, and as high-impedance devices for high speed pulses. This allows the DC bias from the SMU to pass through to the output, while blocking the high speed pulses from the pulse generator.

Return to Section Topics List 4200-903-01 Rev. C / May 2006

1-10 Understanding and Preparing the System 4200-SCS Quick Start Guide

Figure 1-7

Pulse-measure hardware overview

Channel 1 pulse output (SMA female

connector)

TTL level, 50% duty cycle, frequency is the

same as the

frequency of

the output

(SMA female

connector)

Channel 2 pulse output (SMA female

connector)

4200-PG2

Pulse Generator

KEITHLEY

4200

PG2

CHANNEL 1

TRIGGER

OUT

CHANNEL 2

SLOT8SLOT7SLOT6SLOT5SLOT4SLOT3SLOT2SLOT

KEITHLEY

Channel 1

Trigger

Out

Channel 2

4200-RBT

Remote Bias-T

Sense

Bias Input

Force

3-Lug Triax Connectors

(female)

Model 4200-SCS

Instrument Slots

INSTRUMENTS

KEITHLEY

Channel 1

Ext Trg

Ext Clk

Channel 2

20kW

KEITHLEY

4210

SMU

SENSE LO

SENSE

FORCE

PA CNTRL

AC (Pulse)

Input

KEITHLEY

4200

SMU

SENSE LO

SENSE

FORCE

PA CNTRL

SMA Connectors

(female)

AC + DC

Output

4200-SCP2

Digital Storage

Oscilloscope

KEITHLEY

4200 SCP2

CHANNEL 1

EXT

TRIG

EXT CLK

CHANNEL 2

Channel 1

signal input

(BNC female

connector)

External trigger

input

(SMB female

connector)

External clock

input

(SMB female

connector)

Channel 2

signal input

(BNC female

connector)

Table 1-1

Basic 4200-PG2 pulse characteristics

High Speed range

Pulse Characteristic

Amplitude

(low voltage: 5V)

100mV to 10V 500mV to 40V

(peak-to-peak)

DC Level -5V to +5V -20V to +20V

Average Power Rating 0.5W DC 8W DC

Frequency 1Hz to 50MHz 1Hz to 2MHz

Period 20ns to 1s 500ns to 1s

Pulse Width 10ns to (Period - 10ns) 250ns to (Period - 10ns)

Transition Time

10ns to 1s 150ns to 1s

(rise/fall time)

Slew Rate Limit 0.5V/ns 0.25V/ns

Trigger Modes Continuous, Burst or Single Pulse

(Burst pulse count: 2 to 232-1)

Output Impedance 50Ω (nominal)

High Voltage range

(medium speed: 20V)

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Understanding and Preparing the System 1-11

Table 1-2

Basic 4200-SCP2 characteristics

Scope

Characteristic Specification

Dual Channel Simultaneous sampling of both channels Bandwidth 50Ω: DC to 1GHz

1MΩ: DC to 500MHz

Maximum Input 50Ω: ±5VDC

1MΩ: ±150VDC (de-rated 20 dB/decade above 1MHz)

Coupling DC or AC AC Coupling 50Ω: 200kHz high pass

1MΩ: 10Hz high pass

Probe Attenuation 0.9 to 1000:1

Analog Filters 20MHz or Bypass

Total Memory Up to 1M samples/channel

Up to 2M samples/channel (one channel interleaved)

Sample (S) Rate 2.5kS/s to 1.25GS/s

2.5kS/s to 2.5GS/s (one channel interleaved)

Acquisition Time Range

Note: All specifications are subject to change (www.ztec-inc.com).

50ns to 6710s (32M Sample Memory) 50ns to 419s (2M Sample Memory)

Pulse I-V Package – Integrated solution

The Pulse I-V Package includes the 4200-PG2 pulse generator, 4200-SCP2 scope, 4200-RBT remote Bias Tees and accessories such as cables, connectors and adapters. It combines the dualchannel pulse generator, high speed pulse measurement, specialized interconnect, and patented software to provide a turnkey pulse I-V solution. The software controls sourcing from the pulse generator and data acquisition to automate a variety of pulse I-V tests. diagram of the test system to run the pulse I-V tests. Notice that a power divider (supplied with 4200-PIV) is used to connect the pulse generator and scope to the gate of the FET. The power divider provides 50

The pulse-IV Project Plan handles instrument setup and control for each test, as well as data storage and presentation. The innovative software provides both cable compensation and a solution to the load-line effect, producing DC-like I-V transistor curves, such as VDS-ID family of curves and VGS-ID for voltage threshold extraction.

This solution provides pulse I-V testing for devices with self-heating issues, such as high power transistors and advanced CMOS on SOI technology. The Pulse I-V Package also includes a high k test suite and sample projects to address charge trapping problems for high k gate structures. The specialized interconnect solves most of the problems encountered in high speed pulse testing, such as:

• Combining pulse and DC sources to a single DUT pin to permit both DC and pulse characterization without any re-cabling or switching.

• Impedance matching for pulse integrity to minimize reflection.

• Straight-forward cabling and connection to the DUT for easy setup.

Ω impedance matching.

Figure 1-8 shows the block

NOTE Details on using the pulse-IV Project Plan are provided in Section 11 of the Reference

Manual. The Applications Manual provides specific applications that pertain to PIV

I-V) testing.

(pulse

Return to Section Topics List 4200-903-01 Rev. C / May 2006

1-12 Understanding and Preparing the System 4200-SCS Quick Start Guide

Figure 1-8

Block diagram of Pulse-IV test system

DC Bias and Measure

4200-SMU (1)

4200-SMU (2)

Scope

4200-SCP2

Channel 1

Channel 2

Input

4200-RBT

(2)

Trigger

Pulse Generator

4200-PG2

Channel 1 Output

Channel 2

(Not Used)

3-port Power

Divider

Input

4200-RBT

(1)

AC+DC

Output

KPulse and KScope

KPulse and KScope are stand-alone graphical user interfaces (GUIs) to control the pulse generator and scope. These GUI front panels can be used for general-purpose pulse-measure solutions. These GUIs are started by double-clicking the KPulse and KScope icons on the desktop. See Section 11 of the Reference Manual for details on using these GUIs.

Locating the system in the proper environment

Locate the Model 4200-SCS such that it will operate within the following ambient temperature and humidity limits:

• Temperature: +15° to +40°C

• Relative humidity: 5% to 80%, non-condensing

AC+DC

Output

NOTE SMU and PreAmp accuracy specifications are based on operation at 23° ±5°C and

between 5% and 60% relative humidity. See the product specifications for derating factors outside these ranges.

CAUTION To avoid over-heating, operate the unit only in an area with proper ventilation.

Allow at least eight inches of clearance at the back of the mainframe to assure sufficient airflow, and adhere to the following:

• Operate the unit in a clean, dust-free environment.

• Keep the fan vents and cooling vents from becoming blocked.

• Do not position any devices adjacent to the unit that force air (heated or

unheated) into cooling vents. This additional airflow could compromise accuracy performance.

• When rack-mounting the unit, ensure adequate airflow around the sides,

bottom, and back.

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Understanding and Preparing the System 1-13

• Do not rack-mount high power dissipation equipment adjacent to the Model

4200-SCS.

To ensure proper cooling in rack environments with only convection cooling, place the hottest equipment (i.e., power supply) at the top of the rack. Place precision equipment, such as the Model 4200-SCS, as low as possible in the rack, where temperatures are the coolest. Adding spacer panels below the unit helps to ensure adequate airflow.

Connecting system components

WARNING Asserting the interlock will allow the SMU and PreAmp terminals to become

hazardous. SMU and PreAmp terminals should be considered hazardous even if the outputs are programmed to be low voltage. Precautions must be taken to prevent a shock hazard by surrounding the test device and any unprotected leads (wiring) with double insulation for 250 volts, Category I.

Figure 1-9 shows how typical system components are installed.

Figure 1-9

Back panel view, system connectors, and system connections

Safety-Interlock Connector

Probe

Station

Parallel

Printer

LAN Junction

Box or Hub

CAT 5 UTP Cable

Y-Cable (supplied)

External Monitor

(optional)

Shielded

Serial

Cable

Shielded

Parallel

Cable

Interlock Cable

RS-232

Connector

Keyboard

Parallel

Connector

GNDU

COM 1

INSTRUMENT

CONNECTIONS

S E

SMU ONLY

LPT 1

O R C E

SMU AND GNDU

C O M M

GUARD

O N

INSTALLATION CATEGORY I

KEITHLEY

4200 TM

INTLK

OUT

USB

Port*

Mouse/Keyboard

Connector

GPIB

Instrument

Safety-Interlock

Connector

LAN

Connector

SENSE LO GUARD

SENSE LO

COMMON

SENSE

COMMON

FORCE

SLOT8SLOT7SLOT6SLOT5SLOT4SLOT3SLOT2SLOT

KEITHLEY

4200

SCP2

PG2

Channel 1

Ext Trg

Ext

Trigger

Clk

Out

Channel 2

7007

GPIB Connector

GPIB

Cable

GPIB

Instrument

4200-SCS

INSTRUMENTS

KEITHLEY

4210 SMU

SENSE LO

SENSE

FORCE

PA CNTRL

Model

KEITHLEY

4200

4210

SMU

SENSE LO

SENSE

FORCE

PA CNTRL

KEITHLEY

4200 SMU

SENSE LO

SENSE

FORCE

PA CNTRL

Trigger Link Connectors

* v1.1 USB connector  Connect a USB device, such as a USB printer.

Return to Section Topics List 4200-903-01 Rev. C / May 2006

7007 GPIB Cable

1-14 Understanding and Preparing the System 4200-SCS Quick Start Guide

Connecting devices to be tested (DUTs)

Basic device connections for SMUs

Figure 1-10 shows the basic device connections, independent of the device mounting and

manipulation hardware (for example, a test fixture or prober)

Figure 1-10

Back panel and basic device connections to SMUs and PreAmps

Basic Connections to SMUs Basic Connections to PreAmps

FORCE

Connectors

on SMUs

Two -

SLOT

SENSE LO

SLOT

SENSE LO

SENSE

SLOT

INSTRUMEN

GNDU

CONNECTIONS

SENSE LO GUARD

SMU ONLY

SENSE LO

COMMON

E N S E

SMU AND GNDU

SENSE

COMMON

O R C

GUARD

FORCE

C O M M O N

T U O

INSTRUMENTS

SENSE LO

SENSE

SLOT

FORCE

SENSE LO

SENSE

SLOT

FORCE

SENSE

SLOT

FORCE

SLOT

FORCE

PA CNTRL

Terminal

Device

INSTRUMENT

GNDU

CONNECTIONS

SENSE LO GUARD

SMU ONLY

SENSE LO

S E N S E

O R C E

O M M

OUT

SLOT

COMMON

SLOT

SMU AND GNDU

SENSE

COMMON

SLOT

GUARD

FORCE

SLOT

SLOT 2

PreAmps

SENSE LO

SLOT

SENSE LO

SENSE

SLOT

INSTRUMENTS

SENSE LO

SENSE

SLOT

FORCE

SENSE LO

SENSE

FORCE

SENSE

FORCE

4200-PA-1 REMO

PA-1 REMOT

PA-1 REMO

FORCE

CONTROL

PA CN

Two -

Terminal

Device

FORCE

Connectors

on SMUs

SLOT

SENSE LO

SLOT

SENSE LO

SENSE

SLOT

INSTRUMEN

GNDU

CONNECTIONS

SENSE LO GUARD

SMU ONLY

SENSE LO

COMMON

E N S E

SMU AND GNDU

SENSE

COMMON

O R C

GUARD

FORCE

C O M M O N

T U O

INSTRUMENTS

SENSE LO

SENSE

SLOT

FORCE

SENSE LO

SENSE

SLOT

FORCE

SENSE

SLOT

FORCE

PA CNTRL

FORCE Connector on GNDU

FORCE

Connectors

on SMUs

SLOT

SENSE LO

SLOT

SENSE LO

SENSE

SLOT

INSTRUMEN

GNDU

CONNECTIONS T

SENSE LO GUARD

SMU ONLY

SENSE LO

COMMON

E N S E

SMU AND GNDU

SENSE

COMMON

O R C

GUARD

FORCE

C O M M O N

U O

INSTRUMENTS

SENSE LO

SENSE

SLOT

FORCE

SENSE LO

SENSE

SLOT

FORCE

SENSE

SLOT

FORCE

SLOT

FORCE

PA CNTRL

Three-

Terminal

Device

Four

Terminal

Device

FORCE

Connectors

SLOT

PreAmps

SENSE LO

SLOT

SENSE LO

SENSE

SLOT

INSTRUMENT

GNDU

CONNECTIONS

SENSE LO

GUARD

SMU ONLY

SENSE LO

COMMON

E N S E

SMU AND GNDU

SENSE

COMMON

O R C

GUARD

FORCE

C O M M O N

OUT

INSTRUMENTS

SENSE LO

SENSE

SLOT

FORCE

SENSE LO

SENSE

SLOT

FORCE

SENSE

SLOT

FORCE

4200-PA-1 REMO

PA-1 REMOT

PA-1 REMO

SLOT

FORCE

CONTR

PA CN

FORCE

Connectors

FORCE Connector on GNDU

PreAmps

SLOT

SENSE LO

SLOT

SENSE LO

SENSE

SLOT

INSTRUMENT

GNDU

CONNECTIONS

SENSE LO

GUARD

SMU ONLY

SENSE LO

COMMON

NDU N S E

SMU AND G

SENSE

COMMON

O R C

GUARD

FORCE

C O M M O N

OUT

INSTRUMENTS

SENSE LO

SENSE

SLOT

FORCE

SENSE LO

SENSE

SLOT

FORCE

SENSE

SLOT

FORCE

4200-PA-1 REMO

PA-1 REMOT

PA-1 REMO

SLOT

FORCE

CONTR

PA CN

FORCE

Connectors

Three-

Terminal

Device

Four

Terminal

Device

FORCE Connector on GNDU

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Understanding and Preparing the System 1-15

Basic device connections for the pulse generator and scope

Figure 1-11 shows the basic device connections, independent of the device mounting and

manipulation hardware (for example, a prober), to channel 1 of the pulse generator and scope. The cables, connector adapter and torque wrench are supplied items. The adapter allows a short SMA cable to be used for the trigger connection between the pulse generator and the scope.

The pulse generator and scope also come equipped with an assortment of other connectors and adapters for various connection schemes. See “Pulse-measure connections” in Section 4 of the Reference Manual for more connection diagrams. connection drawings provided in Section 4 of the Reference Manual.

NOTE The 4200-RBT remote Bias Tee is typically used in an integrated test system and is

beyond the scope of this manual. See “Pulse-measure connections” in Section 4 of the Reference Manual for details on connections using the 4200-RBT.

Figure 1-11

Basic device connections to the pulse generator and scope

Table 1-4 summarizes the pulse-measure

Model 4200-PG2 (Pulse Generator)

Model 4200-SCP2 (Digital Storage Oscilloscope)

Model 4200-SCS

Instrument Slots

SLOT8SLOT7SLOT6SLOT5SLOT4SLOT3SLOT2SLOT

KEITHLEY

Channel 1

Ext Trg

Ext

Trigger

Clk

Out

Channel 2

SMB Male to SMA Female Adapter

INSTRUMENTS

KEITHLEY

4210 SMU

SENSE LO

SENSE

FORCE

PA CNTRL

KEITHLEY

4210 SMU

SENSE LO

SENSE

FORCE

PA CNTRL

KEITHLEY

4200

SENSE LO

SENSE

FORCE

PA CNTRL

SMU

KEITHLEY

4200 SMU

SENSE LO

SENSE

FORCE

PA CNTRL

= SMA-to-SMA Cable

(male-to-male)

= BNC-to-BNC Cable

(male-to-male)

NOTE Use torque wrench to tighten SMA

connections to

8 inch-lbs.

Pulse Output

(Channel 1)

DUT

Common

Scope Input

Channel 1

Return to Section Topics List 4200-903-01 Rev. C / May 2006

1-16 Understanding and Preparing the System 4200-SCS Quick Start Guide

Device connection details

Section 4 of the 4200-SCS Reference Manual shows additional SMU, PreAmp and pulse-measure connections that meet specific test needs. and identifies its location.

NOTE Table 1-3 and Tab le 1-4 lists the diagrams in the order in which they appear in the

Reference Manual.

Tab l e 1-3

Additional SMU connection diagrams in Section 4 of the Reference Manual

Tab le 1-3 and Ta bl e 1-4 briefly describes each diagram

Connected

Figure title

“Device shielding” SMU Shows how to connect to a DUT that is only shielded. “Shielding and

“Device guarding” SMU Shows how to connect to a DUT that is both shielded and

“SMU local sense connections”

“PreAmp local sense connections”

“Ground unit and SMU local sense connections”

“Ground unit and SMU remote sense connections”

“Ground unit and PreAmp local sense connections”

“Ground unit and PreAmp remote sense connections”

“Typical SMU common connections”

instruments Description

guarded.

SMU Shows how to connect to a DUT when the SENSE and FORCE

terminals are connected together internally in a SMU.

PreAmp Shows how to connect to a DUT when the SENSE-to-FORCE

terminals are connected together internally in a PreAmp.

Multiple SMUs and GNDU

Multiple PreAmps and GNDU

Multiple SMUs

Shows how to connect multiple SMUs to a DUT(s), using a common, GNDU ground-return path, when the SENSE and FORCE terminals are connected together internally.

Shows how to connect multiple SMUs to a DUT(s), using a common, GNDU ground-return path, when the SENSE and FORCE terminals are connected remotely to the DUT(s) [Kelvin connections].

Shows how to connect multiple PreAmps to a DUT(s), using a common, GNDU ground-return path, when the SENSE and FORCE terminals are connected together internally.

Shows how to connect multiple PreAmps to a DUT(s), using a common, GNDU ground-return path, when the SENSE and FORCE terminals are connected remotely to the DUT(s) [Kelvin connections].

Shows how to make COMMON connections when all of the DUT terminals connect to SMU FORCE terminals — for example, when a SMU is programmed to force 0.0V on a FET source terminal. In such a case, one SMU connects a selected FORCE terminal internally to COMMON.

Location

(subsection title)

guarding

“Shielding and guarding

“SMU connections”

“PreAmp local sense connections”

“Ground unit and SMU local sense connections”

“Ground unit and SMU remote sense connections”

“Ground unit and PreAmp local sense connections”

“Ground unit and PreAmp remote sense connections”

“SMU circuit COMMON connections”

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Understanding and Preparing the System 1-17

Tab l e 1-4

Additional pulse-measure connection diagrams in Section 4 of the Reference Manual

Connected

Figure title

“Pulse generator connections”

“Scope connections” 4200-SCP2 Shows how to connect both channels of the scope to

“Pulse generator and scope connections”

“Pulse generator, SMU and remote Bias Tee connections”

“Pulse generator, SMU (w/PreAmp) and remote Bias Tee connections”

“Pulse generator, scope, SMU and remote Bias Tee connections”

“Pulse generator, scope, SMU (w/PreAmp) and remote Bias Tee connections”

“Pulse IV – connections” 4200-PG2,

instruments Description

4200-PG2 Shows how to connect both channels of the pulse

generator to DUTs.

DUTs.

4200-PG2 and 4200-SCP2

4200-PG2, SMU and 4200-RBT

4200-PG2, SMU (PreAmp) and 4200-RBT

4200-PG2, 4200-SCP2, SMU and 4200RBT

4200-PG2, 4200-SCP2, SMU (PreAmp) and 4200-RBT

4200-SCP2, two SMUs, and two 4200-RBTs

Shows another method to connect the pulse generator and the scope to a DUT. An adapter allows an SMA cable to be used for connections between the pulse generator and the DUT.

Shows an integrated connection diagram using the pulse generator, a SMU and the remote Bias Tee.

Shows an integrated connection diagram using the pulse generator, a SMU with PreAmp and the remote Bias Tee.

Shows an integrated connection diagram using the pulse generator, scope, a SMU and the remote Bias Tee.

Shows an integrated connection diagram using the pulse generator, scope, a SMU with PreAmp and the remote Bias Tee.

Shows an integrated connection diagram using two channels of the pulse generator, two channels of the scope, two SMUs and two remote Bias Tees. This connection diagram can accommodate all tests for the pulse-IV Project Plan without having to make any connection changes. A switch card is not required.

Location

(subsection title)

“Pulse generator connections”

“Scope connections”

“Pulse generator and scope connections”

“Pulse generator, SMU and remote Bias Tee connections”

“Pulse generator, scope, SMU and remote Bias Tee connections”

“Connections for PIV (pulse-IV) Projects”

Return to Section Topics List 4200-903-01 Rev. C / May 2006

1-18 Understanding and Preparing the System 4200-SCS Quick Start Guide

Powering the 4200-SCS

The Model 4200-SCS operates from a line voltage in the range of 100 to 240VAC, at a frequency of 50 or 60Hz. Line voltage is automatically sensed, but line frequency is not (see step 6 below).

Connect and power your unit as follows:

1. Check to be sure the operating voltage in your area is compatible.

CAUTION Operating the instrument on an incorrect line voltage may cause damage,

possibly voiding the warranty.

NOTE To avoid possible problems caused by electrical transients or line voltage fluctuations, the

Model 4200-SCS should be operated from a dedicated power source.

2. Before plugging in the power cord, make sure the front panel power switch is OFF.

3. Connect the female end of the supplied power cord to the AC receptacle on the rear panel (Figure 1-12).

WARNING Use only the supplied, grounded line cord, or the equivalent, to assure proper

safety grounding.

Figure 1-12

Line power receptacle

Power

Receptacle

Line Fuses

4. Connect the other end of the supplied line cord to a grounded AC line power receptacle.

WARNING The power cord supplied with the unit contains a separate ground for use with

grounded outlets. When proper connections are made, instrument chassis is connected to power line ground through the ground wire in the power cord. Failure to use a grounded outlet may result in personal injury or death due to electric shock.

5. Turn the power ON using the front-panel power switch. The Model 4200-SCS performs a series of self-tests. If it detects a failure, the unit displays an error message.

NOTE If a problem develops, return the Model 4200-SCS to Keithley Instruments, Inc. for repair.

Refer to Model 4200-SCS to the factory.

6. If the unit passes the self-tests, it automatically boots the system software and displays the start-up screen.

7. Although the unit does not sense power line power line frequency at power-up, Keithley ships your 4200-SCS with line frequency settings that match the line frequency that was specified on the order — either for 50Hz or 60Hz. However, if necessary, you can change the line frequency setting using the KCON utility. (Refer to “Keithley CONfiguration Utility (KCON),” in Section 7 of the 4200-SCS Reference manual.)

“Repacking for shipment” on page 1-2 for more information on returning the

NOTE Operating the Model 4200-SCS with the wrong line frequency setting may result in noisy

readings because the line frequency setting affects SMU line frequency noise rejection.

8. Warm up the unit. The Model 4200-SCS can be used immediately after being turned ON. However, to achieve rated measurement accuracy, warm up for at least 30 minutes.

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Understanding and Preparing the System 1-19

Configuring the system

You do not need to perform system configuration operations if you use only internal instruments — factory-installed SMUs, PreAmps, and the Ground Unit (GNDU). The 4200-SCS automatically detects internal instruments and configures the system appropriately for local operation.

However, after adding supported external instruments — switch matrices, external GPIB instruments, probe stations, etc. — you must properly configure the system so that KITE and KXCI can utilize these resources. Also, if you need remote operation of the 4200-SCS, through KXCI, you must further configure the system.

Perform these configurations using the Keithley CONfiguration utility (KCON). Figure 1-13 overviews KCON features. For details on using the tool, refer to Section 7 of the 4200-SCS Reference Manual, “Keithley CONfiguration utility (KCON)”

NOTE To start the tool, double-click the

KCON icon on the Windows desktop:

If KCON is running, you cannot start KITE or KXCI. If KITE or KXCI is already running, you can start KCON but cannot save any system configuration changes that you may make.

If you select KI System Configuration in the KCON Configuration Navigator, the Workspace displays a summary of the entire system configuration.

If you select KI 4200 SCS in the Configuration Navigator, the Workspace displays abbreviated system properties and SMU slot assignments and allows you to do the following:

• Specify the correct powerline frequency (60Hz or 50 Hz) for your installation.

• Configure the system for remote control via KXCI (Keithley External Control Interface).

• Specify a particular user library to be the active user library. Otherwise, the active user

library defaults to C:\S4200\kiuser\usrlib.

Return to Section Topics List 4200-903-01 Rev. C / May 2006

1-20 Understanding and Preparing the System 4200-SCS Quick Start Guide

Figure 1-13

KCON overview

Saves the revised system configuration, making it the working configuration for KITE, KULT, or KXCI. If you do not save the changes, the configuration reverts to the last-saved configuration.

Saves the system configuration as an HTML file that can be viewed in a web browser. If you first select KI System Configuration in the Configuration Navigator, this menu item generates a web page that displays general 4200-SCS system information.

Prints the general system configuration information — the information that displays in the KCON Workspace when KI System Configuration is selected in the Configuration Navigator.

Closes the KCON program. If you revised but did not save the configuration, KCON reminds you.

Adds a supported external instrument that is selected by category in the first submenu and, where applicable, by model number in the second submenu. External instruments are controlled by KITE User Test Modules (UTMs). UTMs are in turn connected to KULT user modules — libraries of which are included with the 4200-SCS.

Removes, from the system configuration, the external instrument that is selected in the Configuration Navigator. (Selecting an external instrument enables this item — “Delete External Instrument”.

Automatically tests the system configuration for conflicts or instrument communication problems. Applies to all instruments except probe stations, test fixtures, and general purpose test instruments.

Modifies the default, automatically assigned Formulator constants for newly created KITE test modules. The Formulator is a programmable in-test and post-test calculation tool for test data.

Internal instruments:

Factoryinstalled SMUs, PreAmps, 4200-PG2, 4200-SCP2 and ground unit.

External Instruments:

User-installed switch matrix, capacitance meters, pulse generators, probe station, test fixture, and generalpurpose test instruments.

Automatically starts the web browser and loads the preinstalled Complete Reference documents, including the 4200-SCS User and Reference Manuals, product data sheets, and application notes.

Prompts you for contact information, analyzes your 4200-SCS, and stores the results on a diskette. The diskette, when sent to Keithley, helps Technical Support to resolve problems on your system.

Displays a window that contains version and copyright information.

Configuration Navigator: Displays all instruments and equipment that are included in the 4200-SCS system configuration.

Selected instrument for which this configuration information is displayed

Workspace: Displays configuration properties for the instrument that is selected in the Configuration Navigator, and — for external instruments — allows changing of configurable properties, such as the GPIB address shown above.

4200-903-01 Rev. C / May 2006 Return to Section Topics List

Designing and Executing Tests

Section Topics List

Understanding the 4200-SCS test hierarchy and terminology,

page 2-2

Becoming familiar with the KITE interface, page 2-2 Understand the UTM Definition tab, page 2-20

Understanding the Project Navigator, page 2-4 Define UTMs using the UTM Definition tab, page 2-21

Understanding Interactive Test Modules (ITMs) and User

Test Modules (UTMs), page 2-5

Building a Project, page 2-6 Executing the Project tests, page 2-28

Define the new Project, page 2-6 Executing a single test at a single site, page 2-28

Insert the Subsite Plans, page 2-7 Executing a single test sequence at a single site, page 2-29

Insert the Device Plans, page 2-7 Executing appended tests and test sequences at a single

Insert the ITMs, page 2-8 Executing an entire Project at a single site, page 2-30

Insert the UTMs, page 2-9 Executing an entire Project at multiple sites, page 2-31

Save the Project, page 2-10 Repeating a test, page 2-33

Defining and configuring the Project ITMs, page 2-11 Subsite cycling overview, page 2-33

Understand the ITM Definition tab, page 2-11

Understand the ITM forcing functions, page 2-12

Use the Definition tab to configure ITM parameters,

page 2-15

Set up Formulator calculations, if desired, page 2-18

Save the ITM configuration, page 2-19

Defining and configuring the Project UTMs, page 2-19

Create custom user modules and user libraries, if

necessary, page 2-22

site, page 2-30

WARNING When you start one of the KTE Interactive software tools for the first time, you

will be required to respond affirmatively to an on-screen license agreement before proceeding further. If you do not respond with a “Yes” answer, your system will be nonfunctional until you reinstall the software.

2-2 Designing and Executing Tests 4200-SCS Quick Start Guide

Understanding the 4200-SCS test hierarchy and terminology

KITE organizes tests in the hierarchy below, consistent with semiconductor-wafer organization (though KITE uses the same scheme for discrete semiconductors). Relevant definitions follow.

•Project

•Sites

• Subsites

• Devices

• Tests: Interactive Test Modules (ITMs) and User Test Module (UTMs)

Project

The start-to-finish actions and test locations involved in evaluating a semiconductor wafer or other collection of circuits. You create and execute projects via the KITE graphical user interface

Site

Each die on a semiconductor, combined with its accompanying test structures — the subsites.

Subsite

Every wafer location that a prober can move to and contact at any one time. This typically corresponds to a single test structure—or other combination of devices that are tested as a group.

Device

An individual component on which tests are performed— transistor, diode, capacitor, etc.

Test

The detailed definition of how KITE performs a specific type of parametric characterization on a device, including associated data analyses and parameter extractions. The definition includes the

following for each terminal of the device:

• The desired voltage or current forcing functions (stimuli).

• The desired voltage and/or current measurements.

There are two classes of tests: Interactive Test Modules (ITMs) and User Test Module (UTMs). You use the same KITE data-analysis functions both for ITM data and for UTM data.

Interactive Test Module (ITM)

A test that allows the user to define a test interactively via a graphical user interface.

User Test Module (UTM)

A test that you define primarily by programming a C-language user module — using KULT — but in which you typically configure key test parameters using a graphical user interface.

Becoming familiar with the KITE interface

KITE’s graphical user interface (GUI) allows you to do the following:

• Interactively build and edit projects, using the Project Navigator.

• Configure off-the-shelf ITMs or create new, customized ITMs from off-the-shelf templates.

• Create UTMs from supplied or user-programmed C-code modules.

• Automatically execute tests and associated operations (switch matrix connections, prober movements, etc.), including:

– A single test for one selected device (transistor, diode, resistor, capacitor, etc.). – A sequence of tests for one selected device. – A sequence of tests for multiple devices—for example, all of the devices at a subsite – The test sequences of an entire Project — which may include prober touchdowns at

every subsite of just one site or at every subsite of multiple sites

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Designing and Executing Tests 2-3

• View test results, numerically and graphically.

• Analyze test results using built-in parameter extraction tools.

• View the analysis results numerically and graphically.

Figure 2-1 summarizes key parts of the KITE main window. Subsequent subsections highlight the

Project Navigator and Site Navigator parts of this window, as well as key GUIs that can be accessed from this window.

Figure 2-1

KITE interface overview

Project Navigator:

Where a Project is assembled, edited, displayed, and executed. (A Project defines a series of tests, of various devices, at one or more locations.) Double-clicks here lead to definition, configuration, and tool screens. A selection here defines the starting location when only part of the Project is to be executed.

Site Navigator:

Displays the current site— typically a die on a semiconductor wafer—that is being evaluated by the Project. Allows selection of the single site to be evaluated when only part of the Project is to be executed.

Menu area

KITE Workspace:

Displays the variety of screens, windows, tabs, message boxes, etc. that are used: 1) to configure all Project components;

2) observe evaluation results; and 3) analyze evaluation results.

Toolbar Area:

Displays a variety of icons that can be used to: 1) start and stop all or part of a Project; 2) verify Project execution; 3) insert Project components; 4) save and print Project files; and 5) view KITE help.

Status bar: Displays descriptions of menu and toolbar items.

Return to Section Topics List 4200-903-01 Rev. C / May 2006

Message area: Displays KITE execution and error messages.

2-4 Designing and Executing Tests 4200-SCS Quick Start Guide

Understanding the Project Navigator

The Project Navigator is the primary interface for building, editing, and viewing a Project and for specifying and accessing each Project component. Note the following:

• You can add a component at any point in the project, using menu items or toolbar buttons.

• Single-clicking on a Project Navigator component selects it as one of the following:

– A location at which you can add a new component or delete an existing component. – A part of the Project — subsite, device, or individual test — to be executed alone.

• Double-clicking on a Project Navigator component opens configuration screens for the component and — as appropriate — test results, analysis tools, and status information.

Figure 2-2 describes the components in a typical Project Navigator pane.

Figure 2-2

Project Navigator

Project:

Defines and sequences all subsites tested, all devices

tested, and all tests/operations to be performed at each

site—which typically corresponds to one die on a wafer.

Project Navigator Checkboxes:

Project Navigator Checkboxes are used to enable or disable the Project Plan, a Subsite Plan, a Device Plan or individual tests (ITMs and UTMs). Clicking a checkbox either inserts a check mark in the box (enable) or removes a check mark (disable).

Subsite Plan:

Defines and sequences all devices tested and all tests performed at a given prober touchdown location. There are typically multiple subsites per site.

Device Plan:

Defines and sequences all tests for a specific device— a transistor, diode, resistor, etc.—at a given subsite.

Interactive Test Module (ITM):

Completely defines a parametric test without programming, using a series of easily configured graphical user interfaces

(

GUIs). Provides for display of both raw data and analyzed

data, numerically and graphically, in real time.

User Test Module (UTM):

Defines an operation—a special test, a setting of switchmatrix connections, a prober advance, an external instrument operation, etc.—via a C-programmed user module that is connected to the UTM and is configured with user-supplied parameter values. (Several UTMs may be associated with the with the same user module.) Configuration is done via a simple graphical user interface. The user module that is connected to the UTM may be available in a Keithleysupplied library or may be created by the user with KULT. Provides display of both raw and analyzed test data, where applicable, numerically and graphically.

Initialization Steps (at top) and Termination Steps:

Define operations (UTMs only) that initialize test equipment at the beginning of a test session and process results or reset instrumentation at the end of an execution sequence. The initialization and termination steps are executed only once during a test session, even if the Project is executed several times (e.g., to evaluate multiple sites on a wafer).

Unique ID (UID) number:

A number assigned to each instance of a same-named project component. If there is only one instance of a Project component of a component has a UID of 1. However, if multiple components, e.g., ITMs or UTMs, of a given name are inserted into a project, they are assigned multiple UIDs. As long as a component remains in the Project, its UID never changes—even if a lower-numbered same-named component is deleted from the Project. (Note: if UID = 0 for a component, that component can occur only once in the Project.)

en name (as in the Project at left), each

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Designing and Executing Tests 2-5

Understanding Interactive Test Modules (ITMs) and User Test Modules (UTMs)

KITE tests and operations execute through ITMs and UTMs. Figure 2-3 relates “vds-id” ITM and “rdson” UTM windows to their locations in the example KITE Project.

Figure 2-3

ITMs and UTMs in the Project Navigator

ITM

UTM

Ta bl e 2-1 summarizes the primary differences between ITMs and UTMs

Tab l e 2-1

Primary differences between an ITM and a UTM

ITM UTM

Is always configured via a series of systematic, interactive graphical user interfaces (GUIs), without programming.

Is flexible. Keithley provides default ITM configurations for most standard devices and tests; you may be able to perform many of your evaluations with minimal or no changes to the default parameters. However, you can create a new ITM, or customize any existing ITM, to perform a wide variety of static and dynamic evaluations. You can even create an ITM for a generic “n-terminal” device.

Performs exclusively tasks on internal 4200-SCS instrumentation.

Is used exclusively for parametric testing. May be used to perform almost any test-related task.

Generated data updates the Data worksheet the test executes.

in real time, as

Created and configured by connecting a UTM name to a user module and entering or modifying the input parameter values.

Is task-specific. However, you can modify the source code for a user module that is connected to a UTM and recompile it to create a new user module. Keithley provides the source code for most of the user modules that are shipped with the 4200-SCS. User modules are modified using KULT.

Performs tasks on internal 4200-SCS instrumentation or on any instrument that is connected to the 4200-SCS IEEE-488 bus or the 4200-SCS RS-232 port.

Generated data updates the Data worksheet1 after test execution is complete.

1. Refer to “Viewing test results numerically via the Sheet tab Data worksheet” on page 3-3.

Return to Section Topics List 4200-903-01 Rev. C / May 2006

2-6 Designing and Executing Tests 4200-SCS Quick Start Guide

Building a Project

This subsection shows how to build a Project from standard 4200-SCS library ITMs and library and user-defined UTMs

Define the new Project

1. In the File menu, click New Project. The Define New Project window opens, with the default settings as shown in Figure 2-4.

Figure 2-4

Define New Project window

2. Configure the Define New Project window as follows:

• Project Name — Enter the Project name.

• Location — If you don’t want the default folder, enter the storage folder for the Project.

• Number of Sites — Specify the number of sites to be evaluated by the Project

• Restore Default Location — Clicking restores default folder as the Project location.

• Project Plan Initialization Steps — Click On if you plan to insert one or more

initialization UTMs at the start of the Project.

• Project Plan Termination Steps — Click On if you plan to insert one or more termination

UTMs at the end of the Project Plan.

Figure 2-5 shows configuration of the new u_build Project Plan

Figure 2-5

Define New Project window configured for the u_build Project Plan

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Designing and Executing Tests 2-7

1. Click OK. The Project Navigator appears, reflecting the chosen configuration.

2. Click the Save All toolbar button ( ).

3. To close the Project Plan at any time, select Close Project in the File menu. If you did not save the Project Plan just before, the dialog box shown at right below appears; click Yes.

Insert the Subsite Plans

1. In the Project Navigator, select the component (node) below which to insert the first Subsite Plan. At right,

Initialization Steps is selected for the u_build

Project.

2. Add a Subsite Plan to the Project Plan as follows:

a. On the Project Plan toolbar, click the Add

Subsite Plan button ( ).The Add New Subsite Plan to Project dialog box appears. See at right.

b. Enter the name for the new Subsite Plan in the

dialog box

c. Click OK. The Subsite Plan is inserted below the

selected component., as shown at right.

3. Insert additional Subsite Plans, as needed, by repeating steps 1 and 2.

Insert the Device Plans

To insert a Device Plan from the default 4200-SCS device library, do the following:

1. In the Project Navigator, select the Subsite Plan below which to insert the Device Plan. See the example at right.

2. Add the Device Plan to the Project Plan as follows:

a. In the Project Plan toolbar, click the Add New Device Plan button ( ). The Add New

Device Plan to Project window appears. See the left screen capture in Figure 2-6,.

Figure 2-6

Selecting a new device plan from the 4200-SCS device library

Return to Section Topics List 4200-903-01 Rev. C / May 2006

2-8 Designing and Executing Tests 4200-SCS Quick Start Guide

b. In the Add New Device Plan to Project window, select a new Device Plan from the

default device library. See right screen capture in Figure 2-6 above.

c. Click OK. The Device Plan is inserted below

the selected component. See the example at right.

Insert the ITMs

NOTE You can insert an ITM for a given Device Plan only if the insertion is appropriate, as

follows:

• The number of device terminals required by the ITM is not greater than the number of

terminals one the target device. (For example, you cannot use a BJT ITM to test a diode.)

• Each terminal name required by the ITM is present on the target device.

To insert an ITM from the default 4200-SCS library, do the following:

1. In the Project Navigator, select the Device Plan component below which to insert the first ITM. See example at right.

2. Double-click the selected Device Plan name. The Device Plan window appears, displaying device-category folders that contain deviceappropriate ITMs. See Figure 2-7.

Figure 2-7

Device Plan Window

3. Click the folder corresponding to the device type for which you are adding the ITM. A list of ITMs (and, typically, UTMs) appears. See the example at the left of Figure 2-8.

Figure 2-8

Selecting an ITM from the 4200-SCS device library

Select the appropriate Device folder Select the desired ITM

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Designing and Executing Tests 2-9

4. Select the desired ITM. See the example at the right of Figure 2-8.

5. Many ITMs contain sample data. If you wish to include this data when you insert the ITM, check the Include Data checkbox (located at the lower right corner of the Device Plan window). See at right.

6. In the Device Plan window, below the list of ITMs, click the Copy button. The ITM is added to the Test Sequence Table of the Device Plan window. See Figure 2-9.

Figure 2-9

Adding an ITM to the Test Sequence Table

“

y”

7. If, under Test Sequence Table, an ITM is not at the preferred position in the sequence, do the following:

a. Select the ITM to be moved. b. Use the Move Up button or the Move Down button to reposition the ITM.

8. In the Device Plan window, below the list of ITMs, click the Apply button. The ITM is added to the Project Navigator. See the example at right.

Insert the UTMs

Inserting a library UTM

If a needed UTM is available in the C:\S4200\kiuser\Tests library, or in a personal library, you can insert it as you would an ITM (per “Insert the ITMs”), except as follows:

• You can insert a UTM (and only a UTM) below Initialization Steps and Termination Steps in the Project Navigator. You cannot insert an ITM in these locations.

• If you insert multiple instances of a UTM under the same name, the parameter values are unique for each instance.

Inserting a new, name-only UTM

If a needed UTM is not available in the C:\S4200\kiuser\Tests library, or in a personal library, you must create one. Initially insert a new, name-only UTM into the Project as follows:

1. In the Project Navigator, select the component below which you’ll insert the UTM, as shown at right. You can insert UTMs at the following places:

• Below Device Plans, initialization steps, and termination

steps.

• Above and below ITMs and other UTMs. (for simplicity, the

instructions in this subsection reflect adding the UTM below an ITM or UTM.)

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2-10 Designing and Executing Tests 4200-SCS Quick Start Guide

2. Click the Add New UTM toolbar button. Add New User Test Module (UTM) to Project dialog box appears. (As at right, except without UTM name.).

3. In the Add New User Test Module (UTM) to Project dialog box, enter the desired name for the UTM. See at right

4. Click OK. The new name-only UTM is inserted into the Project Plan. See at right.

5. Before using the UTM, define and configure it, as will be described in “Defining and configuring the Project

UTMs” on page 2-19.

If you want to save the UTM in a test library, do so as described in “Submitting devices, ITMs, and UTMs to libraries” in Section 6 of the 4200-SCS Reference Manual.

Save the Project

When you finish entering the Project, save it by clicking the Save All toolbar button ( ).

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4200-SCS Quick Start Guide Designing and Executing Tests 2-11

Defining and configuring the Project ITMs

Understand the ITM Definition tab

To define an ITM, use the ITM Definition tab. Display it by double-clicking on the ITM name in the Project Navigator. vds-id ITM, which is part of the example project (shown in Figure 2-2 and Figure 2-3).

Figure 2-10

ITM Definition tab — and neighboring tabs

Figure 2-10 shows and describes the ITM Definition tab, in this case for the

Graph tab: Graphical test and analysis results.

Sheet tab: Numerical test and analysis results and test settings.

Formulator: Mathematical test results analysis tool.

Output Values button: Click to export Output Values for this test into the Subsite Data sheet.

FORCE MEASURE button: Click to configure the ITM.

Instrument object:

Displays a summary of the settings for the instrument that is connected to a particular device terminal.

Status tab: Test definition and configuration status.

Exit Conditions button: Click to set the test exit condition when

compliance occurs.

Timing button and Speed combo box: Custom and preconfigured

test-timing/noise-rejection selections.

Mode combo box: Allows sampling vs. time mode instead of sweeping mode.

Workspace window tab:

You can quickly access a Projectcomponent window that is active in the KITE workspace — several can be active simultaneously — by selecting its Workspace tab (Must be enabled. See “Specifying environmental preferences” in Reference Section 6.)

Instrument-selection combo box: Assigns a 4200-SCS instrument to this device terminal.

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Schematic of the device being tested by this ITM.

2-12 Designing and Executing Tests 4200-SCS Quick Start Guide

An ITM Definition tab defines the ITM as follows:

• Schematically displays the type of device to be tested by the ITM (FET, BJT, capacitor, etc.).

• Next to each terminal of the device, displays an instrument object, which acts as follows: – Identifies the terminal (e.g. as gate, drain, source, collector, anode, etc.) – Identifies and allows assignment/reassignment of the terminal to match the SMU, GNDU,

or open circuit that is physically connected to the terminal during the test. – Displays the present forcing-function and measurement options for the terminal. – Identifies and allows assignment and configuration/reconfiguration of SMU forcing

function and measuring options. A single-click of the FORCE MEASURE button of the

displays the Forcing Functions/Measure Options window for the terminal.

• Provides access to the Formulator, which allows in-test and post-test data computations.

• Allows setting of preconfigured Speed and/or custom Timing parameters for the ITM.

• Displays the present test Mode — Sweeping or Sampling.

Understand the ITM forcing functions

Ta bl e 2-1 summarizes the available ITM forcing functions, which tell the 4200-SCS how to apply

static or dynamic voltage or current conditions to device terminals.

Tab l e 2-2

Forcing function summary

General type

Stat ic Open Maintains a zero-current state at the terminal, subject to the maximum voltage compliance of the

Sweep Current

Name Description and graphical illustrations

connected SMU.

Common Maintains a zero-voltage state at the terminal, subject to the maximum current compliance of the

connected SMU.

Current Bias

Voltage Bias

Maintains a selected constant-current state at the terminal, subject to the user-specified voltage compliance for the connected SMU.

Maintains a selected constant-voltage state at the terminal, subject to a user-specified current compliance of the connected SMU.

Increments a series of current values or voltage values at a rate that is determined by the Timing and

Sweep

Vol tag e Sweep

Speed settings in the ITM Definition tab. Generates parametric curve data that is recorded in the Sheet tab Data worksheet for the ITM and can be plotted in the ITM Graph tab.

Gate Voltage (V)

Linear sweep Log sweep

0.1V Steps, 41 Data Points

1000

Current (µA)

Tim e

4200-903-01 Rev. C / May 2006 Return to Section Topics List

100

Tim e

4200-SCS Quick Start Guide Designing and Executing Tests 2-13

Table 2-2 (cont.)

Forcing function summary

General type Name Description and graphical illustrations

List sweep

Current List Sweep

Vol tag e List Sweep

Steps through a list of user-specified current values or voltage values, at a rate that is determined by the Timing and Speed settings in the ITM Definition tab. Generates parametric data that is recorded in the

ITM Sheet tab Data worksheet and can be plotted in the ITM Graph tab, if appropriate.

Arbitrary function

Current or Voltage

Time

Step Current

Step

Voltage Step

Increments a current or voltage to two or more levels, each of which is held constant during the progress of a Current Sweep, a Voltage Sweep, a Current List Sweep, or a Voltage List Sweep at another terminal. For each Current Step or Voltage Step level, parametric curve data is recorded in the ITM Sheet tab Data worksheet. The combined data can be plotted in the ITM Graph tab, resulting in a series

(family) of curves.

Stepping the Gate Voltage of a FET

Gate Voltage (V)

Step 3

Step 2

Step 1

Step 4

Time

At Each Gate Voltage Step, Sweeping the Drain Voltage of the FET

Drain Voltage (V)

0.1V Steps, 51 Data Points

Time

0.1V Steps, 51 Data Points

For forcing-function details, refer to “Understanding and configuring the <ForcingFunctionName> function parameters area” in Section 6 of the 4200 Reference Manual.

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2-14 Designing and Executing Tests 4200-SCS Quick Start Guide

Dual Sweep

A SMU that is configured to perform a linear or log sweep, can also be set to perform a dual sweep. With Dual Sweep enabled (√), the SMU will essentially perform two sweeps. The first sweep steps from the Start level to the Stop level. The SMU then continues with the second sweep which steps from the Stop level back to the Start level. With Dual Sweep disabled, the SMU performs a single sweep stepping from Start to Stop.

A dual sweep for a slave SMU is typically used in concert with a Master SMU that is also set to perform a dual sweep. The master SMU does not have to be set for dual sweep in order to use Dual Sweep for a slave SMU. In this case, setting the master SMU’s sweep points to an even number will ensure that the slave’s dual sweep is symmetric. Setting the master SMU count to an odd number, will cause the slave SMU to repeat the last sweep point.

The slaves SMUs WILL NOT automatically set for dual sweep when Dual Sweep is enabled for the master SMU. Dual Sweep must be individually enabled for each SMU.

Pulse Mode

For sweep (linear, log and list) and bias forcing functions, the SMU can be set to provide pulse output. With Pulse Mode enabled, the following pulse parameters can be set: On Time, Off Time and Base Voltage or Base Current. On Time + Off Time + cumulative measure time (if set to measure) is the period for the pulse, while On Time is the pulse width.The base is the voltage or current level that pulse output goes to during the Off Time.

Pulse Mode can be selected ONLY when source and measure ranges are fixed. In other words, Pulse Mode is disabled if the source or measure range is set to AUTO.

Pulse “on” and “off” times can be set from 5ms to 10s. The base voltage (or current) that can be set is dependent the present source range (see Src Range field in

Example pulse output for the Pulse Mode is shown in Figure 2-11. For a bias forcing function, pulse output goes to the specified bias level during the pulse “on” time. If set to measure, the measurement will occur after the “on” time period expires and before the pulse transitions to the “off” time level. During pulse “off” time, the pulse output goes to the specified Base Voltage (or Base Current). After the “off” time expires, the output returns to 0V or 0A.

For a sweep forcing function, pulse output goes to the sweep step levels during the pulse “on” times. During the “off” times, pulse output goes to the specified Base Voltage (or Base Current) level. If set to measure, the measurement will occur after each “on” time period expires and before the pulse transitions to the “off” time level.

The voltage sweep in Figure 2-11 is a single sweep. If Dual Sweep is enabled, the test will continue by going back to the Stop level and then step down to the Start level. For details, see

“Dual Sweep” on page 2-14.

Figure 2-12).

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4200-SCS Quick Start Guide Designing and Executing Tests 2-15

Figure 2-11

Pulse Mode examples

Pulse Mode  Voltage Bias (no measure):

On Time

Level 2V

Base Voltage 1V

Off Time

Pulse Mode  Voltage Bias (with measure):

On Time

Level 2V

Base Voltage 1V

Pulse Mode  3-step Linear Voltage Sweep (no measure):

Stop 4V

Start 2V

Base Voltage 1V

On Time

Off Time Off Time

Cumulative Measurement Time

Off Time

On Time

Use the Definition tab to configure ITM parameters

NOTE This section describes parameter configuration of a library ITM, in which connections and

test modes are preconfigured. For discussions of general ITM configuration, including creation of new ITMs or customization of existing ITMs, refer to “Configuring the Project Plan ITMs” in Section 6 of the 4200 Reference Manual.

Time

On Time

Off Time

Dual Sweep disabled

Time

After inserting library ITMs into your Project, configure the setup for each ITM as described in the subsections that follow — in the order in which they appear.

Match the physical and virtual connections

Do the following:

1. In the Project Navigator double-click on the ITM that you wish to configure. The Definition tab of the ITM window opens by default (see example in Figure 2-10 above).

2. In the Definition-tab, review the virtual connections for each device terminal, as listed in the instrument object for that terminal (see to Figure 2-10).

3. Ensure that the physical device connections match the virtual (Definition tab) device connections. If necessary, shut down the instrumentation and correct the physical connections.

CAUTION Physical device-terminal connections must accurately match virtual

connections to avoid bad test results and potential device damage.

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2-16 Designing and Executing Tests 4200-SCS Quick Start Guide

Configure the forcing functions for each device terminal

With the Definition tab for the ITM open, do the following for each device terminal:

1. On the instrument object for the terminal (Figure 2-10), click the FORCE MEASURE button. The corresponding Forcing Function/Measure Options window appears. The Forcing Functions/Measure Options window in Figure 2-12 illustrates typical window features.

Figure 2-12

Typical Forcing Functions/Measure Options window for an existing library ITM

For a Linear sweep or step Start is the voltage/current at

the start of the sweep, Stop is the voltage/current at the end of the sweep, and Step is the voltage/current change between steps

. Data Points — calculated automatically from the Start, Stop, and Step values — is disabled.

For a Log sweep, you specify the Data Points value. The Step value — calculated automatically — is disabled

Select the SMU range to be used when forcing the specified voltage or current. Select dynamically optimized range (Auto), single best range for entire sweep (Best Fixed), or manually specified numerical range.

Check to enable current measurement options, recording of current in the Sheet tab Data worksheet, and availability of current data for plotting in the Graph tab.

f desired enter a preferred data label for the current (in lieu of the default label).

In a List Sweep configuration window, you enter a list of discrete voltages or currents, instead of Start, Stop, and Step values. In

a Current Bias or Voltage Bias configuration window, you enter a fixed Level value, instead of Start, Stop, and Step values.

Do not change these parameters, unless you want to customize the ITM — which is beyond the scope of this Quick Start manual.

If sweeping/stepping voltages If sweeping/stepping currents, replaced with Programmed and Measured buttons, as in right panel.

If sweeping/stepping voltages. If sweeping/stepping currents, buttons replaced with Range settings similar to those in left panel.

Dual Sweep – With Dual Sweep enabled, the SMU will sweep from Start to Stop, and then sweep from Stop back to Start. When

disabled, the SMU will simply sweep from Start to Stop. For details, see “Dual Sweep” on page 2-14.

Pulse Mode – Select Pulse Mode to provide pulse output for sweep (linear, log and list) and bias forcing functions. For details, see

Select dynamically optimized range (Auto), dynamically optimized range above a specified lower limit (Limited Auto), the one best range for entire sweep (Best Fixed), or manually specified numerical

range.

If you select

Limited Auto,

specify the limit here.

Check to enable voltage measurement options, recording of voltage in the Sheet tab Data work-

sheet, and availability of voltage data for plotting in the Graph tab.

Programmed

specifies logging

specifies logging of as-configured

of as-configured data values (e.g.

data values (e.g. calculated from

calculated from

Start, Stop, Step).

Start, Stop, Step). Measured speci-

Measured speci-

fies logging of as-

measured data

values.

“Pulse Mode” on page 2-14.

Describes the instrument selected for this device terminal and the mode of the test being performed. (Sweeping mode or Sam- pling mode — in which data is recorded vs. time for an applied signal).

Select whether a sweep or step forcing function acts as a master (independent) or slave (tracks the mas-

ter)

Select the present forcing function2.

Select Dual Sweep5. Select whether a sweep is

linear or logarithmic2.

Select and configure Pulse

Mode6.

Select the SMU current compliance for a voltage sweep or the voltage compliance for a current sweep

If desired enter a preferred data label for the voltage (in lieu of the default label).

Check to cause KITE to log 32-bit measurement-status codes, in the Data worksheet, when the ITM executes.

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4200-SCS Quick Start Guide Designing and Executing Tests 2-17

2. Referring to the setting explanations in Figure 2-12 above, configure the following types of parameters for the device terminal’s forcing function, as appropriate:

• Linear or Log for a Sweep-type forcing function.

• Dual Sweep – Sweep from Start to Stop, and then sweep from Stop to Start.

• The current or voltage value(s) to be forced:

• Level for a static forcing function

•Start, Stop, and Step for a Step or Linear Sweep forcing function

•Start, Stop, and Data Points for a Log Sweep forcing function

•Data Points value and list of Amperes or Volts values for a List Sweep

• The default or desired Src Range and Compliance

• The default or desired Measuring Options

3. Click on OK. The configuration for this device terminal takes effect and the Forcing Functions/Measure Options window closes.

4. If using Pulse Mode, see “Pulse Mode configuration” on page 2-17.

5. Repeat steps 1 through 3 for the remaining device terminals.

Pulse Mode configuration

With a valid forcing function selected, a SMU can be configured to provide pulse output. See

“Pulse Mode” on page 2-14 for details on Pulse Mode.

Figure 2-13 explains how to use the Pulse Mode. The settings in the Forcing Functions /

Measure Options window shown in Figure 2-13 configures a voltage sweep. The Pulse Mode controls for the other valid forcing functions are similar.

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2-18 Designing and Executing Tests 4200-SCS Quick Start Guide

Figure 2-13

Pulse Mode configuration

(voltage sweep)

Valid forcing functions for Pulse Mode:

Voltage/Current Bias Voltage/Current Sweep (Linear/Log and Dual Sweep) Voltage/Current List Sweep

Pulse Mode can be selected ONLY when source and measure ranges are fixed. In other words, Pulse Mode is disabled if the source or measure range is set to AUTO. Perform the following steps to select and configure Pulse Mode:

1. Select (Ö) Pulse Mode, and set the On Time, Off Time and Base Voltage (or

Base Current for a current sweep).

2. Click OK.

Dual Sweep  A SMU can perform a dual current sweep or a dual voltage sweep. With Dual Sweep selected (

sweep from Stop back to Start. When disabled, the SMU will simply sweep from Start to Stop.

Ö), the SMU will sweep from Start to Stop, and then

Set up Formulator calculations, if desired

The Formulator, accessible from an ITM Definition tab, allows you to perform simple in-test calculations and complex post-test data calculations on ITM data.

The following operators and functions may be used for the in-test, real-time calculations:

• Operators: +, -, *, /, ^

• Functions: ABS, DELTA, DIFF, EXP, INTEG, LN, LOG, SQRT

A variety of additional functions may be used for post-test calculations.

For details on using the Formulator, refer to “Configuring Formulator calculations.” in Section 6 of the 4200-SCS Reference Manual.

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4200-SCS Quick Start Guide Designing and Executing Tests 2-19

Save the ITM configuration

Click the Save button ( ) in the KITE toolbar.

Defining and configuring the Project UTMs

Figure 2-14 below overviews the complete UTM-definition process. However, you need not

perform the steps at the left side of Figure 2-14 unless you need a custom user library. The 4200-SCS provides several user libraries containing a variety of user modules.

Figure 2-14

UTM-creation overview

User libraries, either created and supplied by Keithley (as provided with the 4200-SCS) or customcreated, as shown here.

Create a user module in the Keithley User Library Tool (KULT) by:

1) Opening a new or existing user library

2) Opening a new or existing user module

3) Programming/editing, specifying parameters, and saving the user module

4) Compiling the user module

Add/update user modules into their specified new or existing user libraries, using the KULT Build Library menu command.

matrixulib

user library

ki42xxulib

user library

Create executable UTM by:

1) connecting a UTM name to a user-library user module;

2) configuring the user-module input parameters.

and

User

dule

Winulib

user library

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2-20 Designing and Executing Tests 4200-SCS Quick Start Guide

Understand the UTM Definition tab

After inserting a name-only UTM into a project, the new UTM is defined using the UTM Definition tab—displayed by double-clicking on the UTM name in the Project Navigator. illustrates and explains the UTM Definition tab.

Figure 2-15

UTM Definition tab

Graph tab:

Graphical test and

Sheet tab:

Numerical test and analysis results and test settings.

Formulator:

Mathematical test results analysis tool.

Output Values button: Click to export Output Values for this test into

the Subsite Data sheet.

Parameter identity cells:

Spreadsheet-like cells that list the test-module parameter names and data types, as specified

in the user module.

Workspace window tab:

You can quickly access a Project-component window that is active in the KITE workspace — several can be active simultaneously — by selecting its Workspace tab (Must be enabled. See “Specifying environmental preferences” in Section 6 of the Reference Manual.)

analysis results.

Status tab:

Test definition and configuration status.

Documentation area:

Displays important information about the user module.

User libraries combo box:

Select the user library here that contains the desired module.

Parameter entry cells: Enter test-parameter values in these spreadsheet-like cells.

Cell display edit box:

Displays contents of selected cell. You can enter data here.

Figure 2-15

User modules combo box:

Select the desired user module here for the UTM.

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4200-SCS Quick Start Guide Designing and Executing Tests 2-21

Define UTMs using the UTM Definition tab

Define a UTM as follows:

1. In the Project Navigator, double-click the name of the new UTM to be defined. A blank UTM Definition tab appears. See Figure 2-16

Figure 2-16.

Blank UTM Definition tab

2. In the User Libraries scroll box of the UTM Definition tab, select the user library that contains the user module that you wish to test. In Figure 2-17 below, my-1st-lib is selected.

Figure 2-17

Example of configured UTM tab

Formulator

Output Values

my-1st-lib

TwoTonesTwice

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2-22 Designing and Executing Tests 4200-SCS Quick Start Guide

3. In the User Modules scroll box of the UTM Definition tab, select the user module that you wish to test. The UTM displays the configuration parameters for the selected user module. In Figure 2-17 above, TwoTonesTwice is selected as the user module. In the Documentation area, the module displays information about itself, as recorded when it was created.

4. Accept the default parameter values for now. (You can change them later after you establish that the user module executes correctly.)

5. Save the UTM and the project by clicking the Save All toolbar button ( ).

6. Test the UTM before using it. Refer to “Executing a single test at a single site” on page 2-28

Create custom user modules and user libraries, if necessary

If you need a custom user module for a UTM(s), you can either create a completely new module/ library or customize a copy of one of the Keithley-supplied modules/libraries (Most can be modified.) A user module is a C-language function (subroutine) that 1) typically calls functions from the Keithley-supplied Linear Parametric Test Library (LPTLib) — as well as ANSI-C functions and 2) is developed using the Keithley User Library Tool (KULT). A user library is a dynamic link library (DLL) of user modules that are compiled and linked using KULT.

This subsection provides the information to create basic user modules and user libraries. Refer also to Section 8 of the 4200-SCS Reference Manual, which describes use of KULT in detail.

—

Understanding the KULT interface

Figure 2-18 illustrates the KULT programming and definition interface

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4200-SCS Quick Start Guide Designing and Executing Tests 2-23

Figure 2-18.

KULT interface overview

File menu: Used to open and close libraries and modules; save, copy, and delete modules;

Edit menu: Used to cut, copy and paste; select all; undo and redo.

Options menu: Used to compile the active module; add/ update the user module to the active user library; hide the module to make it unavailable to KITE user.

Library:

Displays the name of the active library

Module box: Displays the name of the active module.

Return Type combo box: Used to select the output data type from one of the following options: char, float, double, int, long, void.

Library Visible or Library Hidden display: Indicates if library is available or unavailable to KITE. Visibility is controlled via the Options menu.

Apply button (one of two, both of which function identically): Used to update active module to reflect additions and changes. Creates new active module when Module name is changed.

Module-parameter display area: Displays—only—the includes, defines and function prototype for the module, to reflect entries in the Parameters entry tab and Includes entry tab areas.

Module code entry area: Displays the C-code of the active module and, via its integral text editor, enables code development and editing. Terminating brace area: Shows terminating brace for the module code; automatically entered when you click either Apply button.

Parameters entry tab area: Used to do the following for each module I/O parameter:

• Enter the parameter name.

• Select the parameter data type from a list of data types, data-pointer types, and array types [outputs must always be pointers (char *, float *, double *, etc., or arrays).

• Select whether the parameter is an input or output (only selectable for pointers and arrays; others always inputs). Optionally enter default, max, and min parameter values.

Add and Delete buttons: Used to add or delete a selected parameter from

Parameters entry tab area.

Apply button (one of two, both of which function

identically): Used to update active module to reflect additions and changes. Creates new active module when Module

name is changed.

Status bar: Displays description of window area at cursor location

Includes entry tab area: Used to enter the module’s include and define

statements.

Descriptions entry tab area: Used to document the active module.

Build tab area: Displays status and error messages for the Compile and Library Build operations. A double-click on an error message highlights the trouble spot in the module code area.

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2-24 Designing and Executing Tests 4200-SCS Quick Start Guide

Using KULT to create a custom user module and library

Start KULT

Start KULT by double-clicking the desktop KULT icon (see at right). A blank KULT window appears, as shown at right.

Name a new user library (or select an existing library)

Name a new user library as follows:

1. In the KULT File menu, click New Library.

2. In the Enter Library dialog box that appears, enter the new user library name. This library name now displays in the upper left corner of the KULT window (see example at right).

Name the new user module and set its return type

1. Name the new module, as follows:

a. In the KULT File menu, click New Module. b. In the Module text box at the top of the KULT window, enter

the new user-module name (see example at right).

c. Click Apply.You now see function prototype for the module

in the user-module parameters display area, as illustrated at right. (NOTE: If you scroll the parameters display area, you also see this: #include“keithley.h”)

2. Below the Module entry, select a Return Type entry. The default entry is void.

Enter C code for the new module (without parameter declarations and header files)

Enter C code into the module-code entry area. For the TwoTonesTwice module, you would enter the following:

NOTE The following code deliberately contains a semicolon error, to illustrate a KULT debug

capability later in this procedure

/* Beeps four times at two alternating user-settable frequencies. */ /* Makes use of Windows Beep (frequency, duration) function. */ /* Frequency of beep is long integer, in units of Hz. */ /* Duration of beep is long integer, in units of milliseconds. */ Beep(Freq1, 500); /* Beep at first frequency for 500ms */ Beep(Freq2, 500); /* Beep at second frequency */

NOTE Normally, when entering code, refer to the list of supported I/O and SMU commands in

“LPT Library Function Reference” in Section 8 of the 4200-SCS Reference Manul.

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4200-SCS Quick Start Guide Designing and Executing Tests 2-25

Declare the parameters for the new module

1. Enter one of the required parameters for the code as follows: a. Click the Parameters tab. b. Click the Add button at the right side of the Parameters tab area. (See

the figure at right.)

c. Under Parameter Name, enter the first parameter name. (See the

example for step d, below right.)

d. Enter the C data type for the parameter that you just

entered, as follows (see the example at right):

• Click the cell adjacent to the parameter, under Data Type. A pop-up menu displays the allowed data

types.

• Select a data type in the popup menu.

NOTE For an output parameter, only the following data types are acceptable: pointers (char*,

Entered parameter

float*, double*, etc.) and arrays (I_ARRAY_T, F_ARRAY_T, or D_ARRAY_T).

2. Under I/O, specify that whether the parameter that you added in step 6 is an input parameter (the default) or an output parameter.

Note that if you did not specify a pointer or array data type under Data Type, you must accept the default entry — Input. However, if you specified a pointer or array data type under Data Type, clicking the corresponding I/O entry cell results in display of a scroll box that contains both Input and Output options. See at right.

3. Under Default, Minimum, and Maximum, optionally enter default, minimum, and maximum values for the parameter — to simplify and limit the choices to the user.

4. Repeat steps 1 through 3 above for any additional input and output parameters that are needed for this user module.

5. Click Apply in the module-parameter display area. The module prototype now includes the declared parameters. See at right.

Enter the header files (#include, etc.) for the new module

Enter the header files as follows:

1. Click on the Includes tab at the bottom of the window. The Includes tab area appears, as shown at right.

2. Enter any additional header files that are needed by the user module. (Note that no additional header files are needed to customize any of the user libraries that come with the 4200-SCS.)

3. After all header files are entered, click Apply

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2-26 Designing and Executing Tests 4200-SCS Quick Start Guide

Document the user module

Do the following:

1. Click the Description tab, which then displays fully. See at right.

2. In the Description tab, enter any text that will be needed to adequately document the module in a UTM. See the example below for the TwoTonesTwice module.

CAUTION Do not use C-code comment designators (/*, */, or //) in the Description tab

area. These will cause errors when the user module is compiled. Also, do not place a period in the first column (the left-most position) of any line in the Description tab area. The UTM description area will not display text that follows a a first-column period.

MODULE: TwoTonesTwice

DESCRIPTION: Execution results in sounding of four beeps at two alternating user-settable frequencies. Each beeps sounds for 500ms.

INPUTS: Freq1 (double) is the frequency, in Hz, of the first and third beep. Freq2 (double) is the frequency, in Hz, of the second and fourth beep.

OUTPUTS: None

RETURN VALUES: None

Save the new user module

Save the module by clicking Save Module in the File menu.

Compile the new user module

1. Compile the module as follows:

2. Click the Build tab at the bottom of the window. The Build tab area opens. After you compile a user module, the Build tab area displays either a confirmation that the module compiled successfully or displays one or more compile-error messages.

3. In the Options menu, click Compile. The C source-code file compiles. Also, the KULT Compile message box

indicates compilation progress and, if problems occur, displays error messages. For example, when you first compile TwoTonesTwice — with its missing semicolon, you see the message shown at right.

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4200-SCS Quick Start Guide Designing and Executing Tests 2-27

4. When the KULT Compile message box closes—or, if there are error messages, when you click OK—the Build tab area displays one of the following:

• If the compilation was successful, the following appears: No Errors/Warnings

Reported, Compilation was Successful.

• If the compilation was unsuccessful, the error message(s), if any, that was displayed in

the KULT Compile message box also displays in the Build tab area.

NOTE KULT reports true compilation errors in red — errors that prevent user module-

compilation. However, KULT reports warnings in blue — for suspect code that does not prevent compilation (for example, declaration of an unused variable).

• For example, after you first compile TwoTonesTwice and then click OK in the KULT

Compile message box, the Build tab area reports the following:.”

Find any code errors in the new user module

Do the following:

1. Click on the compilation-error message in the Build tab area, KULT does the following: a) highlights either the line of code where the error occurred or the next line, depending on how the compiler caught the error and b) highlights the error message. For TwoTonesTwice, the line that is missing the semicolon is highlighted, as shown below.

2. Correct the error. For TwoTonesTwice, the missing semicolon was added at the end of the code [Beep(Freq2,500);].

3. Save the user module. (Click Save Module in the File menu.)

4. Compile the user module again.

•The KULT Compile message box should now display

no error messages and disappear automatically.

•The Build tab area should display the successful-

compilation message. See example at right.

Build the user library that contains the new user module

After successfully compiling the user module, click Options -> Build. The following occurs:

1. The user library builds.

2. A Build Library message box indicates the build progress and, if linker problems occur, displays error messages.

3. When the Build Library message box closes—or, if there are error messages when you click OK—the Build tab area displays one of the following:

• If the compilation was successful, it displays No Errors/ Warnings Reported,

Library Build was Successful.

• If the compilation was unsuccessful, error messages that were displayed in the KULT

Build Library message box window also display in the Build tab area (in red, only).

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2-28 Designing and Executing Tests 4200-SCS Quick Start Guide

Find any build errors in the library

Find build errors using the information in the build-error message.

Check the user module

Check the user module by 1) creating a User Test Module (UTM) in KITE, as described in “Define

UTMs using the UTM Definition tab” on page 2-21 and then 2) executing the UTM, as described in “Executing a single test at a single site” on page 2-28

Executing the Project tests

NOTE If KITE detects an above-normal temperature condition at any SMU, it protects system

outputs by preventing or aborting a run and reporting the condition in the message area of KITE window. If the condition occurs when a run is attempted, KITE prohibits execution. If the condition occurs during a run, KITE aborts the run.

You can abort any test by clicking the red Abort Test/Plan toolbar button.

While a test is running, you can usually view ITM data dynamically, both numerically in a data sheet and—with appropriate configuration—graphically. (Refer to

Results” on page 3-1) New UTM data may be viewed only at the end of a test. The

Message area of the KITE window displays start time, stop time, and total execution time.

“Viewing Test

Executing a single test at a single site

1. Select the ITM or UTM to be run by single-clicking it in the Project Navigator.

2. If your project can test more than one site, specify the site-number label to be used for the collected data, using the spin buttons (small arrows) of the Site Navigator — located at the top of the Project Navigator, Figure 2-19. This number must match the prober site number.

Figure 2-19

Site Navigator for Example Project

Site Navigator

Site number selected for data labeling purposes

For example, before running an ITM or UTM at site 5, set the Site Navigator to “5” and physically move the prober to site 5. (Note that the Site Navigator setting does not direct the prober in any way.) Then, each data file that is generated will be labeled with the correct site number. (Refer to “Understanding the data files” on page 3-2).

3. Click the green Run Test/Plan toolbar button ( ). The selected test runs.

For detailed information, refer to “‘Run’ execution of individual tests and test sequences.” in Section 6 of the 4200-SCS Reference Manual.

Spin bars

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4200-SCS Quick Start Guide Designing and Executing Tests 2-29

Executing a single test sequence at a single site

Running a test sequence causes all of the tests in a Device Plan or a Subsite Plan to execute in the order in which they are listed in the Project Navigator, from top-to-bottom.

• For example, suppose that you run the 3terminal-npn-bjt Device Plan, shown below.

Tests in the 3terminal-npn-bjt Subsite Plan

Then then all tests in 3terminal-npn-bjt execute in the following sequence: vce-ic −> gummel −> vcsat

• Or, for example, suppose that you run the subsite_b Subsite Plan, shown below,

Tests in the subsite_b Subsite Plan

Then all tests in subsite_b execute in the sequence shown below: gummel2 −> vce-ic2 −> vcsat2 −> res4t −> move_prober_to_next_site

To run a test sequence, do the following:

1. Select the Device Plan or Subsite Plan to be run by single-clicking it in the Project Navigator.

Figure 2-20

Site Navigator for example Project

Site Navigator

Site number selected for data labeling purposes

Spin bars

For example, before running a test sequence at site 5, set the Site Navigator to “5” and physically move the prober to site 5. (Note that the Site Navigator setting does not direct the prober in any way.) Then, each data file that is generated will be labeled with the correct site number. (Refer to “Understanding the data files” on page 3-2.)

3. Click the green Run Test/Plan toolbar button ( ). The selected test sequence runs.

For detailed information, refer to “‘Run’ execution of individual tests and test sequences.” in Section 6 of the 4200-SCS Reference Manual.

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2-30 Designing and Executing Tests 4200-SCS Quick Start Guide

Executing appended tests and test sequences at a single site

With Run execution, described above, there is only one Data worksheet for each specific test. This Data worksheet contains the data from the last run of the test. Each new run updates the worksheet — i.e. it overwrites the previous data.

However, KITE also provides Append execution, which generates multiple worksheets for multiple runs of a specific test—in addition to the Data sheet generated by Run execution. Also, in the Graph tab, Append-data curves for a test append to (layer on top of) the Run data curves. You can apply the Append mode to a single test or to an entire Device Plan or Subsite Plan.

To r un i n t h e Append mode, start the test or test sequence by clicking the green-in-yellow Append Data toolbar button ( Thereafter, each time the that you press the Append Data toolbar button ( ), new results append to the existing data, generating a separate data sheet for each run.

For details, refer to “Append execution of tests, test sequences, and Project Plans” and “Appending curves from multiple runs on a single graph.” in Section 6 of the 4200-SCS Reference Manual.

), [instead of the standard green Run Test/Plan toolbar button ( )].

Executing an entire Project at a single site

When you run an entire Project, all tests in the Project execute. For example, if you run the example Project (see prior

To run an entire project, do the following:

1. Double click on the Project name at the top of the Project Navigator “tree.” See at right. The project window opens. (See step 2.)

2. In the project window, set both the Start Execution at Site and Finish Execution at Site values to the number of the site that you want to test. For example, when testing site 3, set both of these values to 3. See Figure 2-21.

Figure 2-21

Setting the site number in the Project window.

Figure 2-2), all nineteen Project components execute in order.

Project name,

example

3. Physically move the prober to the site that you specified in step 2.

4. Click the green Run Test/Plan toolbar button ( ). The Project tests run in the order in which they are listed in the Project Navigator, from top to bottom.

As each individual test runs, the test name appears in the Test/ Plan Indicator box, as illustrated at right.

With an appropriate ITM window open in the KITE workspace, you can view the ITM data being placed in its data sheet or being graphed.

Refer also to “‘Run’ execution of Project Plans” in Section 6 of the 4200-SCS Reference Manual.

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4200-SCS Quick Start Guide Designing and Executing Tests 2-31

Executing an entire Project at multiple sites

For multi-site Project execution, all tests in the entire Project are repeated for a specified series of wafer sites. For example, configured to test sites 1 through 5. After the user positions the prober at site 1, he/she starts execution. Then, KITE first executes the InitializationSteps, followed by the tests in the two Subsite Plans. Then the move prober UTM initiates a pulse that tells the separately programmed prober to move to site 2, where the InitializationSteps, and the two Subsite Plans are executed again. This process repeats for sites 3, 4, and 5. At site 5, after the second Subsite Plan is finished, the TerminationSteps park the prober.

Figure 2-22

Multi-site test sequence

Start ———

Figure 2-22 shows the test sequence for the example Project, when it is

Done ———

NOTE The steps illustrated in Figure 2-22 and the steps that follow assume that the 4200 SCS is

connected to a semiautomatic prober and the Project contains the appropriate move steps.

To run an entire project at multiple sites, do the following:

1. Double click on the Project name at the top of the Project Navigator “tree.” See at right. The project

Project name,

example

window opens. (See step 2.)

2. In the project window, set the Start Execution at Site value to the lowest-numbered site that you want to test and set the Finish Execution at Site value the number of the last site that you want to test. For example, when testing sites 2 through 4, set the Start Execution at Site to 2 and Finish Execution at Site to 4. See Figure 2-23.

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2-32 Designing and Executing Tests 4200-SCS Quick Start Guide

Figure 2-23

Setting the site numbers in the Project window

CAUTION In the Project window, do not change the settings on the Project Initialization

Steps and/or Project Termination Steps checkboxes. They are to be used only when building or modifying a Project. Typically, UTMs under InitializationSteps and TerminationSteps in the Project perform such tasks as external instrument initialization and prober setup and parking. Unchecking Project Initialization Steps and/or Project Termination Steps checkboxes, and then clicking Apply, deletes the UTMs. Checking these checkboxes does not add UTMs.

3. Physically move the prober to the first site (the Start Execution at Site site number) that you specified in step 2.

4. Program the prober so that, when the 4200 emits move signals, it moves to sites and subsites in the site sequence that is specified in step 2 and the subsite sequence that is specified in the Project. Therefore, for the example-Project setup illustrated in step 2, you would program the prober to respond to Project move signals in the following sequence, after being manually positioned at Site 2:

----------------------------------------------------------------------------------------------------

subsite_a −> subsite_b −> Site 3 −> subsite_a −> subsite_b −> Site 4 −> subsite_a −> subsite_b − > Parked position

-----------------------------------------------------------------------------------------------------

5. Click the green Run Test/Plan toolbar button ( ). KITE runs the Project tests at the first site (the Start Execution at Site site), in the order in which they are listed in the Project Navigator. Then KITE tests the remaining Project sites, as illustrated in Figure 2-22.

As each individual test runs, the test name and site number appears in the Test/Plan Indicator box, as illustrated at right.

With an appropriate ITM window open in the KITE workspace, you can view the ITM data being placed in its data sheet or being graphed.

Refer also to “‘Run’ execution of Project Plans” in Section 6 of the 4200-SCS Reference Manual.

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4200-SCS Quick Start Guide Designing and Executing Tests 2-33

Repeating a test

An individual test (ITM or UTM) can be run continuously by using the Repeat Test Execution button to start the test. The test does not stop after it is run the first time. Execution continuously loops back to the beginning to keep repeating the test.

Use the Abort Test/Plan button to stop the test. When the button is clicked, the test will stop immediately. The buttons to start repeat test execution and abort the test are shown as shown in

Figure 2-24.

Figure 2-24

Repeating a test

Repeat Test Execution

Click to start continuous run of selected test.

Test data – Additional sets of data are NOT generated for repeated tests. When the test repeats, the spreadsheet data for the last test is cleared. A graph will continuously update to reflect the data in the spreadsheet.

When the repeated test is aborted, it will stop immediately. Data for the spreadsheet and graph will be collected up to the point where the test was aborted.

NOTE For more information on Repeat, see “Repeating a test” in Section 6 of the 4200-SCS

Reference Manual.

Subsite cycling overview

By using Cycle Subsite, the selected (and enabled) Subsite Plan can be repeated a specified number times (up to 128). The following brief overview of Subsite Cycling covers the Cycle Mode and the Stress/Measure Mode, which is used for stress testing.

The Subsite Plan window is used to configure subsite cycling. Collected test data and graphs are also accessed from this window. The Subsite Plan window is opened by double-clicking the Subsite Plan in the Project Navigator.

Abort Test/Plan

Click to stop test.

NOTE Detailed information on Subsite Cycling is provided in “Subsite cycling” in Section 6 of the

4200-SCS Reference Manual.

Subsite Data sheet and Graph – Data for subsite cycling is placed in the Subsite Data sheet, which is displayed by clicking the Subsite Data tab in the Subsite Plan window. Graphs for the collected data are viewed in the Subsite Graph tab.

The measured readings listed in this data sheet are Output Values. An Output Value is an imported measurement from an individual test in the Subsite Plan. An Output Value is added to the Subsite Data sheet by importing it from the ITM or UTM. See

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“Output Values” on page 2-36 for details.

2-34 Designing and Executing Tests 4200-SCS Quick Start Guide

Cycle Mode

In the Cycle Mode, the Subsite Plan is repeated a specified number of times. For each individual test in the Subsite Plan, data will be acquired for each subsite cycle. For example, if the subsite is cycled five times, there will be five sets of data (and graphs) for each test.

Cycle Mode configuration – The Cycle Mode is configured from the Subsite Setup tab of the Subsite Plan window. In the Subsite Plan window, click the Subsite Setup tab. The four steps to configure the Cycle Mode are shown in

Start subsite cycling – With the Subsite Plan selected (and enabled) in the Project Navigator, click the Run Test/Plan Cycle Subsites button (see

Figure 2-25

Cycle mode configuration

1) Click to Enable Cycles

Figure 2-25.

Figure 2-26) to start subsite cycling.

2) Click to select Cycle Mode

3) Key in number of cycles: 0 (no loops) to 128)

4) Click Apply

Figure 2-26

Start subsite cycling

Run Test/Plan and Cycle Subsites

Click to start subsite cycling

Stress/Measure Mode (HCI stress-measure testing)

The Stress/Measure Mode uses HCI (Hot Carrier Injection) stressing of the devices in the Subsite Plan. Configuration for HCI stressing includes setting the stress time for each stress cycle, and the voltage or current stresses for the devices of the Subsite Plan.

When subsite cycling is started, the first pass through the Subsite Plan is a pre-stress cycle. Tests are run normally with no stressing. At the start of the next cycle, the configured stress (voltage or current) will be applied to all devices. After the stress time period expires, the stress is removed and enabled tests will then be run. Each additional stress cycle operates in the same manner. That is, the stress is applied for the specified stress time, then all the enabled tests are run.

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4200-SCS Quick Start Guide Designing and Executing Tests 2-35

Stress times configuration – Stress times are configured from the Subsite Setup tab of the Subsite Plan window. In the Project Navigator, double-click the Subsite Plan to display the Subsite Plan window. In the Subsite Plan window, click the Subsite Setup tab. The eight basic steps to configure stress times are shown in

Figure 2-27. After performing Step 8, refer to Figure 2-28 to

configure the Device Stress Properties.

Device Stress Properties – This window (shown in Figure 2-28) is opened by clicking the Device Stress Properties button in the in the Subsite Setup tab (Step 8 in Figure 2-27). From this

window, stress voltages or currents and limits are set, and matrix connection pin assignments are set for each device in the Subsite Plan.

Start subsite cycling – With the Subsite Plan selected in the Project Navigator, click the Run Test/Plan Cycle Subsites button (see

Figure 2-26) to start subsite cycling.

Figure 2-27

Stress/Measure Mode – log cycle times setup

1) Click to Enable Cycles

2) Click to select Stress/Measure Mode

3) Click to select Log cycle times

4) Enter stress times (in secs) for the first stress cycle and the total stress time for all cycles

8) Click to display the Device Stress Properties window for the first device.

See Figure 2-26 for setup

5) Enter number of stresses per log decade

6) If desired, enter a delay that occurs after each stress period to allow pre-test settling for each device

If desired, enable period testing and set the rate. At each interl, as dictated by the rate, stressing is interrupted to perform the tests.

7) Click Apply

The Stress Times are automatically calculated based on the user-entered Cycle Times data.

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2-36 Designing and Executing Tests 4200-SCS Quick Start Guide

Figure 2-28

Device Stress Properties – Setup steps for

1) Select the wafer site number.

2) Select DC Voltage Stress, AC Current Stress or AC Voltage Stress and then enter the stress values (V or I) and limit values (I or V).

3) Assign connection pin numbers for this device.

4) Degradation targets – Lists the tests and “Output Val-

ues” on page 2-36 for this

device. Targets can be enabled ( √) and the Target Values can be set (in % or Absolute value).

Click to enable or disable all Targets.

See “Degradation targets” on

page 2-37.

5) Use the pull-down menus to control Stress Measurements. Options include:

Do Not Measure First Stress Only Every Stress Cycle

This button appears only when AC Voltage Stress is selected. Click this button to open the window to make common settings for the 4200-PG2 pulse generator. Settings include rise/fall times, frequency, load impedance and the pulse low values for channel 1 and 2.

6) For a multi-device Subsite Plan, click Next Device to display the stress properties window for the next device.

Clicking Prev Device selects the previous device.

7) Repeat steps 2 through 6 for all devices in the Subsite Plan.

first device in Subsite Plan

See “Clear, Copy, Paste and

Paste to All Sites” on page 2-38.

8) Repeat steps 1 through 7 to configure the Device Stress Properties for another site.

9) Click to check SMU and/or VPU resources, and connections for the active (displayed) site. Resource Status will indicate if enough SMUs and/or a VPU are present. Connections status will report any problems with matrix connections.

Click to cancel all change and close window.

10) When finished setting the stress properties for all devices and all sites, click OK.

11) In the Subsite Plan tab, (see Figure 2-27), click Apply to apply and save the settings made in the Device Stress Properties window.

Output Values

For subsite cycling, output values from ITMs and UTMs can be exported into the Subsite Data sheet. Each time a subsite is cycled, the measurements for the output values are placed in the Subsite Data sheet. If for example, the subsite is cycled five times, there will be five measured readings for each Output Value.

Exporting Output Values – In the Project Navigator, double-click the ITM or UTM. Referring to

Figure 2-10 (for an ITM) or Figure 2-15 (for a UTM), click the Output Values button. An ITM

Output Values window is shown in Figure 2-29). The window for UTM Output Values is similar. The two steps to export Output Values are shown in the drawing.

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4200-SCS Quick Start Guide Designing and Executing Tests 2-37

Degradation targets

Post-stress Output Value readings are compared to the first cycle pre-stress readings. The % Change between the pre-stress and post-stress readings are placed in the Subsite Data sheet.

An Output Value can be enabled (√) as a Target and assigned a Target Value (in % or absolute value). When all Targets for a device are reached, then that device will no longer be tested. Subsequent cycles will bypass the device tests that reached all its Targets. The Subsite Plan will stop when all targets are reached or the last subsite cycle is completed.

Figure 2-29

Exporting ITM Output Values to the Subsite Data sheet

1) Select the Output Values that you want to export into the Subsite Data sheet.

2) Click OK.

Subsite Data sheet – Readings for Output Values from ITMs and UTMs are placed in the Subsite Data sheet. In the Project Navigator double-click the Subsite Plan to open it in the workspace. Click the Subsite Data tab to display the data sheet.

Figure 2-30 shows an example of the Subsite

Data sheet for the Stress/Measure Mode. For every subsite cycle (first column), the following data for every Output Value reading are included:

• Specified stress time.

• Measured reading for the Output Value.

• % Change – Reading variance from the first, pre-stress measured reading.

• Target Value – This is the specified Target % Value. If the target is not enabled, the target value will be 0.0.

Figure 2-30

Example Subsite Data sheet for the Stress/Measure Mode

Subsite Graph – The Output Values for each test can be graphed as shown in Figure 2-30.

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2-38 Designing and Executing Tests 4200-SCS Quick Start Guide

Figure 2-31

Example Subsite Graph for the Stress/Measure Mode

1) Select the device.

For a multi-device Subsite Plan, inser t a to overlay all tests for the selected device.

2) Select a test for the device.

Clear, Copy, Paste and Paste to All Sites

Clear – Clicking the Clear button clears all stress properties data for the displayed device. It sets

all voltage and current values to zero, sets device pin number assignments to zero, sets Stress Measurements to “Do Not Measure”, and disables all Targets (clears Target Values).

Copy and Paste – Copy and Paste allow properties settings for one device to be copied and pasted into the properties window for a different device. It can also be used to copy and paste settings into a different site. After the Copy operation, select the desired site/device and click

Paste.

Paste to All Sites – After copying the properties for the desired Device Stress Properties window

(as explained above), click Paste to All Sites to overwrite the device properties for all available sites.

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Viewing Test Results

Section Topics List

Understanding the data files, page 3-2

Data file naming, page 3-2

Data file location, page 3-2

Viewing test results numerically via the Sheet tab Data worksheet, page 3-3

Viewing test results graphically via the Graph tab, page 3-4

Opening a Graph tab, page 3-4

Reviewing the Graph Setting menu, page 3-5

Defining a basic graph, page 3-7

3-2 Viewing Test Results 4200-SCS Quick Start Guide

Understanding the data files

Data file naming

If the Workbook environment mode is enabled (see “Specifying environment preferences” in Section 6 of the 4200-SCS Reference Manual), the Workspace window tab at the bottom of an ITM or UTM window indicates, in the following order: 1) (Unique IDentifier) number; and 3) the site number where the data was collected. Consider, for example, data naming for the test that is circled in

Figure 3-1

Workspace-window tab name and data file name format

the name of the ITM or UTM; 2) its UID

Figure 3-1.

The Workspace window tab at the bottom of Sheet and Graph tabs for this test is labeled vds-id#1@5. The “vds-id” is the ITM name, #1 indicates a level-1 UID (Unique IDentifier) number, and @5 indicates that the data was collected at site 5. See at right.

The data filename for a test is the same as the Workspace window tab name for the test, except for the addition of an .xls file extension (Microsoft Excel-compatible). Therefore, the data filename for the test that is highlighted in

Figure 3-1 contained second and third instances of “vds-id,” their respective UID numbers would

be 2 and 3, and their site 5 data files labels would be vds-id#2@5.xls and vds-id#3@5.xls.

Data file location

By default, test data files are stored on the 4200-SCS hard disk in the following directory:

• C:\S4200\kiuser\Projects\<ProjectName>\tests\data

For example, the following path accesses the “vds-id” test data file for the example project:

• C:\S4200\kiuser\Projects\example\tests\data\vds-id#1@1.xls

For more information on test-data file structure, refer to “Tests subdirectory” in Section 6 of the 4200-SCS Reference Manual.

vds-id#1@5.xls

Figure 3-1 is vds-id#1@5.xls. If the Project in

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4200-SCS Quick Start Guide Viewing Test Results 3-3

Viewing test results numerically via the Sheet tab Data worksheet

The Sheet tab, accessible from an ITM or UTM window, numerically displays data for the ITM or UTM on a Microsoft Excel-compatible Data worksheet. worksheet containing data generated by the “vds-id” ITM.

Figure 3-2

Sheet tab Data worksheet

Parameter names. The repeated parameter names in this case [for example DrainVolt(1), Drain Volt(2), ... etc.] correspond to drain-voltage Sweeps at gate Stepvoltage 1, gate Step-voltage 2, ... etc.

Data, in this case for multiple drain-voltage Sweeps at different gate-voltage Steps. (Refer to

Table 2-2.)

Figure 3-2 below shows a Sheet tab Data

Workspace window tab: You can quickly access a Projectcomponent window that is active in the KITE workspace — several can be active simultaneously — by selecting its Workspace tab (Must be enabled. See “Specifying environmental preferences” in Section 6 of the Reference Manual.)

Note that the Workspace window tab at the bottom of the Sheet tab Data worksheet identifies the ITM that generated the data. Refer to the later subsection, “Understanding data-file naming conventions.” For detailed information about the Sheet tab, refer to “Displaying and analyzing data using the Sheet tab” in Section 6 of the 4200-SCS Reference Manual.

To access the Data worksheet for a test, do the following:

1. If the test ran at multiple sites, set the Site Navigator to the number of the site where the data was generated

2. Double click on the test in the Project Navigator. The corresponding Definition tab opens.

3. Click on the Sheet tab. The Data sheet appears.

While an ITM (only) runs, you can access its Data work sheet and watch the data populate it.

For details on viewing test data, refer to “Displaying and analyzing data using the Sheet tab” in Section 6 of the 4200-SCS Reference Manual.

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3-4 Viewing Test Results 4200-SCS Quick Start Guide

Viewing test results graphically via the Graph tab

The Graph tab, accessible from an ITM or UTM window, graphically displays data from the Sheet tab in a format that you specify. While an ITM is running, you can watch the data populate the graph.

While the Graph tab is displayed, a Graph Setting pop-up menu appears when you right-click on the Graph tab or select Tools parameters. The Graph tab of shows the Graph Setting pop-up menu.

Figure 3-3

Graph tab example

−> Graph Settings. The pop-up menu accesses plot configuration

Figure 3-3 below plots the Sheet tab data of Figure 3-2 above and

Graph Setting menu

Workspace window tab

Opening a Graph tab

Open a Graph tab as follows:

1. Open the ITM or UTM window for the selected test by double-clicking on the test in the Project Navigator.

2. When the ITM or UTM window opens, click on the displayed Graph-tab label. The Graph tab opens.

Figure 3-4 displays an unconfigured graph for the “vds-id” ITM. The time and date at which

the data was generated are displayed in the upper left corner. However, the axes are labeled and scaled generically, because no project data has yet been assigned to the axes.

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4200-SCS Quick Start Guide Viewing Test Results 3-5

Figure 3-4

Example of an unconfigured graph tab

Reviewing the Graph Setting menu

Figure 3-5 below shows a larger view of the Graph Setting pop-up menu, including its Graph

Properties submenu.

Figure 3-5

Graph settings menu

Graph Setting menu items are summarized below (Reference Manual notes refer to Section 6):

• Define Graph — Defines the parameters to be graphed and the axes on which these parameters are to be graphed. (Reference Manual discussion: “Defining the data to be graphed.”)

• Auto Scale — Automatically scales all axes only once, at a chosen point in time. (Reference Manual discussion: “Automatically scaling the axes.”)

• Axis Properties — Opens the Axes Properties window, which is the main access point for graph scaling and scale formatting. (Reference Manual discussion: “Defining the axis properties of the graph,”)

Return to Section Topics List 4200-903-01 Rev. C / May 2006

3-6 Viewing Test Results 4200-SCS Quick Start Guide

• Cursors — Opens the Cursors window, from which you can select and format cursors that display the precise numerical coordinates of specific points on the plot lines. (Reference Manual discussion: “Numerically displaying plot coordinates using cursors.”)

• Line Fits — Allows you to directly fit lines to Graph tab plots. Up to two fits may be performed on a graph, selected from among the following types: Linear (line through two data points), Regression (regression line), Exponential, Logarithmic, and Tangent.

• Zoom In — Allows you to enlarge and examine a small, selected part of the graph. (Reference Manual discussion: “Temporarily enlarging a selected area of the graph by zooming.”)

• Zoom Out — Restores a graph to the original or previously zoomed size. (Reference Manual discussion: “Temporarily enlarging a selected area of the graph by zooming.”)

• Comment — Opens the Comment window, which allows you to add and format a comment. (Reference Manual discussion: “Adding a comment.”)

• Data Variables — Opens the Data Variables window, from which you can configure the display of up to four data variables, along with the corresponding names (data variables being defined as extracted parameters or other values from the second row of a Data or Calc worksheet). The Data Variables menu item also toggles the data-variable display. (Reference Manual discussion: “Numerically displaying extracted parameters and other data variables.”)

• Legend — Toggles the display of an automatically created legend on and off. (Reference Manual discussion: “Adding a legend.”)

• Test Conditions — Displays the primary test conditions used to obtain the data in the graph. (Reference Manual discussion: “Displaying test conditions.”)

• Title — Opens the Title window, which allows you to add and format a title. (Reference Manual discussion: “Adding a title,” page

6-257.”)

• Graph Properties

–Comment — Opens the Comment window, which allows you to add and format a

comment. Same function as Comment in the main menu.

–Data Variables — Opens the Data Variables window, from which you can configure the

display of up to four data variables, along with the corresponding names (data variables being defined as extracted parameters or other values from the second row of a Data or Calc worksheet).

–Graph Area — Opens the Graph Area menu, which allows you to change the graph

foreground and background colors, toggle the time and date display, and make the graph 100% monochrome. (Reference Manual discussion: “Changing area properties of the graph.”)

–Legend — Opens the Legend Properties window, which allows you to reformat the font,

text or background color, or border of the legend. (Reference Manual discussion: “Adding a legend,”)

–Series — Opens the Data Series Properties window, from which you can define color,

line pattern, plot symbol, and line width for each plot. (Reference Manual discussion: “Defining the plot properties of the graph: colors, line patterns, symbols, line widths.”)

–Test Conditions — Displays the primary test conditions used to obtain the data in the

graph. (Reference Manual discussion: “Displaying test conditions.”)

–Title — Opens the Title window, which allows you to add and format a title. Same

function as Title in the main menu.

• Crosshair — Toggles the display of a set of cross hairs that can be positioned anywhere on the graph. (Reference Manual discussion: “Visually reading plot coordinates using cross hairs.”)

• Save As — Opens the Save As window, which allows you to save a graph in bitmap (.bmp) format for use elsewhere, such as in a report. (Reference Manual discussion: “Saving a graph as a bitmap file.”)

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Viewing Test Results 3-7

• Synchronize Graphs — For use when the presently open graph is only one of several graphs for the same test, each graph representing the data for a different site. In that case, Synchronize Graphs identically configures the graphs for all sites, automatically, using the presently open graph as the master. (Reference Manual discussion: “Identically configuring the graphs resulting from one test executed at multiple sites.”)

• Move — Toggles between a normal cursor and a crossed-arrow cursor. Moving the crossed-arrow cursor moves the graph, allowing you to relocate it on the Graph tab. (Reference Manual discussion: “Changing the position of a graph.”)

• Reset — Causes colors, graph size, and graph position to be restored to the defaults. (Reference Manual discussion: “Resetting certain graph properties to KITE defaults.”)

• Resize — Toggles between a normal cursor and a ruler cursor. Moving the ruler cursor expands or contracts the size of the graph. The new size is saved when the graph is saved. (By contrast, Zoom In affects only the view size, which cannot be saved.) Reference Manual discussion: “Changing the size of a graph.”

For details and example graphs for all Graph Setting menu items, see the specific subsections referenced above. (Refer to “Viewing data using the Graph tab” in Section 6 of the 4200-SCS Reference Manual.) define a graph.

“Defining a basic graph” on page 3-7 describes the minimal setup required to

Defining a basic graph

Do the following

1. In the Graph tab, display the Graph Settings menu by right-clicking on the graph or by

selecting Tools −> Graph Settings.

2. In the Graph Settings menu, select Define Graph. The Graph Definition window opens.

Figure 3-6 shows the unconfigured Graph Definition window for a “vds-id” ITM. This

example shows the usual “vds-id” parameters, plus two additional parameters.

Figure 3-6

Unconfigured Graph Definition window for a “vds-id” ITM

Return to Section Topics List 4200-903-01 Rev. C / May 2006

3-8 Viewing Test Results 4200-SCS Quick Start Guide

3. Using the Graph Definition window, indicate which parameters are to be plotted and assign them to appropriate axes by selecting the appropriate X, Y1, and Y2 cells, where

• X is the X axis.

• Y1 is the Y axis on the left side of the graph.

• Y2 is the Y axis on the right side of the graph.

Figure 3-7 shows the same Graph Definition window as Figure 3-6 after cells are selected

for the “vds-id” ITM parameters.

Figure 3-7

Configured Graph Definition window for the “vds-id” ITM

4. Click OK. The graph now displays basic plots of the selected parameters. In Figure 3-8, the “vds-id” graph now displays scaled axes and a series of four plots, reflecting Figure 3-7 selections. The curves are for four drain-voltage sweeps at different gate voltages.

Figure 3-8

“vds-id” graph after configuring its Graph Definition window

The axis labels are not yet optimally named. KITE inserted the default Data sheet column labels for sweep #1 of the data series. However, axis labels can be renamed. Refer to “Defining the axis properties of the graph” in Section 6 of the 4200-SCS Reference Manual.

4200-903-01 Rev. C / May 2006 Return to Section Topics List

Protecting user files and

Section Topics List

Protecting software integrity, page 4-2

Protecting user file integrity, page 4-2

Choosing the files to be backed up, page 4-3

Choosing the method of backup, page 4-4

system software

4-2 Protecting user files and system software 4200-SCS Quick Start Guide

The Model 4200-SCS is built on a PC architecture, using the Microsoft® Windows® operating system. It includes a motherboard containing the main processor and RAM, a physical hard drive, a compact disk (CD) drive, a floppy disk drive, and other typical PC hardware elements. This architecture provides many advantages, including ease of use, built-in Windows tools and utilities, and extensive local file-storage space. However, PC architecture calls for PC precautions. This section describes recommendations for software and data preservation.The recommendations apply to any 4200-SCS unit that meets the following criteria:

• Was produced before or during Spring, 2003.

• Runs Windows XP Professional.

• Runs KTE Interactive software up to and including version 4.3.2.

Protecting software integrity

The Model 4200-SCS has been designed and thoroughly tested for maximum system stability, reliability, and performance in the factory-standard configuration. To protect the system software, observe the following tips:

• In Section 10 of the 4200-SCS Reference Manual, review the “Approved third party software” which lists software that a qualified system administrator may install on the 4200-SCS without affecting warranty coverage. If you absolutely must use software that is not on this list, exercise caution and common sense. Untested/unapproved software installed on the system hard drive may compromise system stability.

• Protect the system from viruses, which can reach the system via the facility network. (Note that Norton Antivirus is one of the Keithley-approved programs.)

• Certain software tools that come standard with the 4200-SCS, such as FAZAM (Full Armor Zero Administration) and Diskeeper, can help preserve software integrity. Be sure to use these tools — after properly configuring them.

• Do not attempt to format the system hard drive or reinstall the operating system. Though you may be able to successfully uninstall and reinstall some types of software on the 4200-SCS, you cannot successfully reformat the hard drive or reinstall the operating system. Attempting to do so will make the system inoperative and require factory repair.

CAUTION DO NOT reinstall or upgrade the Windows operating system (OS) on any

Model 4200-SCS. This action should only be performed at an authorized Keithley service facility. Violation of this precaution will void the Model 4200SCS warranty and may render the Model 4200-SCS unusable. Any attempt to reinstall or upgrade the Windows operating system will require a return-tofactory repair and will be treated as an out-of-warranty service, including time and material charges.

Protecting user file integrity

There is a small but finite risk that the hard drive will fail sometime during the useful life of the 4200-SCS, regardless of how well it has been cared for. Therefore, Keithley recommends backup — periodically saving the latest copy of the data on an external storage device — as the best way to preserve user application files and measurement data.

4200-903-01 Rev. C / May 2006 Return to Section Topics List

4200-SCS Quick Start Guide Protecting user files and system software 4-3

Choosing the files to be backed up

Keithley recommends backing up the following files and directories, where applicable:

• The default user directory

When a Model 4200-SCS is received from the factory, the C:\S4200\kiuser directory contains all installed test results and user application files — KITE projects, device libraries, test libraries, and KULT libraries. Subsequently, the 4200-SCS stores user-created data and application files in this same directory by default. Therefore, unless a system user or administrator has created new, independent user directories, you need only to back up C:\S4200\kiuser directory to preserve all test results and user application files.

NOTE Avoid selective backups of C:\...\data subfolders, such as

C:\S4200\kiuser\Projects\default\tests\data. Such backups do not

preserve the additional application files that are needed to restore the associated test setups/conditions.

• Independent user directories

If a system user or administrator has created new, independent user directories, back up those directories as well. C:\S4200\Johns_tests and C:\S4200\Janes_tests are examples of such directories.

• Special data files and directories

Finally, back up any additional, specialized data files or directories, such as the following:

– A file into which a User Test Module (UTM) automatically places test results. For

example, a UTM could be programmed to put results into C:\TestData\test001.dat.

– A file that results from manual processing of data using Microsoft Excel.

NOTE It is possible to back up virtually the whole hard drive

files and application program files will occupy a large portion of the storage and may not be properly recoverable unless backed up using special software justifiable only if the user directory structure is too complex for selective backup and when storage space is plentiful.

. However, the 4200-SCS system

. Such backups may be

1. You cannot back up files that are normally in use — for example, certain system files — without special backup software. Before considering use of such software, review the precautions in “Protecting software integrity.”

Return to Section Topics List 4200-903-01 Rev. C / May 2006

4-4 Protecting user files and system software 4200-SCS Quick Start Guide

Choosing the method of backup

A variety of internal and external storage options exist for backing up data (a detailed discussion of which exceeds the scope of this subsection). In all cases, needed storage capacity is the primary selection criterion, followed perhaps by media cost, read/write speed, and specific data accessibility. storage devices can be used for backup. The 4200-SCS has two USB ports on the front panel and one on the rear panel.

Table 4-1

Common backup storage options for the 4200-SCS

Ta bl e 4-1 lists some of the more popular options for the 4200-SCS. In addition, USB

Size of file/folder to be backed up

<1.44MB The internal floppy (diskette) drive in the

<100MB External parallel-port Zip drive, 100MB 100MB Zip disks

<250MB External parallel-port Zip drive, 250MB 100MB or 250MB Zip disks

<700MB Internal CD-RW (compact disk read-write)

Up to several GB External tape drive Tape cartridge

1. Including the size of the file allocation table that must be placed on the media. Therefore, the useful file-storage capacity of a given type of storage medium is a bit less than the rated size.

Appropriate backup storage device Storage medium

3.5” high-density floppy disks

4200-SCS

drive, if available on your 4200-SCS unit

Network server None, locally

(diskettes)

CD-R (one-time writable) or CD-RW (rewritable) compact disks

4200-903-01 Rev. C / May 2006 Return to Section Topics List

Index

Backup, user files 4-2 Boundaries, operating

Source-Measure Units (SMUs) and

PreAmps

Building

A Project 2-6 A user library 2-27

1-8

Cables

For source-measure connections, triaxial

PreAmp 1-8 SMU

1-8

For system component connections 1-13

Caution

Correct line voltage for system 1-18 License agreement, response to 1-4 Triax connectors, avoiding damage 1-9 Ventilation for system 1-12

Configuration

4200-SCS instruments 1-19 Basic graph 3-7 ITMs 2-15 System 1-19

UTMs 2-21 Configuration Navigator 1-20 Connections

Device

Basic device connections 1-14, 1-15 Details

1-16

Power 1-18

System components 1-13 Current

Boundaries, for source-measure hardware 1-7,

1-8

Ranges, for source-measure hardware 1-6 Cycle Mode 2-34

Data

File location 3-2 File naming 3-2 Viewing graphically 3-4

Viewing numerically 3-3 Defining a new project 2-6 Definition of terms, in 4200-SCS context

Device 2-2

ITM (Interactive Test Module) 2-2

Project 2-2

Site 2-2

Subsite 2-2

UTM (User Test Module) 2-2 Degradation targets 2-37 Device

Connections

Basic device connections 1-14, 1-15 Details

Definition, in 4200-SCS context 2-2 Device Plan

Inserting into a Project 2-7 Dual Sweep (SMUs) 2-14

1-16

Environment, installation 1-12 Execution, of tests 2-28

4200-903-01 Rev. C / May 2006 i-1

Features

Hardware 1-5 Software 1-4

Files

Data files

Backup 4-2 Location Naming

Protecting integrity of

Software files 4-2 User application and data files

Forcing function

Configuration of 2-16 Types summary 2-12

Formulator

Where to find details about 2-18

Frequency, line power

Acceptable frequencies 1-18 Where to configure system for 1-18

3-2

Graph tab

Opening the Graph tab 3-4

Settings menu, item descriptions 3-5 Graph, basic, creating 3-4 Ground Unit (GNDU)

Signals and limits at connectors 1-7

Hardware

Connecting devices to be tested 1-14

Connecting power to, 4200-SCS 1-18

Connecting system components 1-13

Features and capabilities 1-5

Required environment 1-12

Inserting into Project

Device Plan 2-7

ITM 2-8

Subsite Plan 2-7

UTM 2-9 Installation

Connections. power 1-18

Environment 1-12

Inspecting the system 1-1

Unpacking the system 1-1 Instrument panel features 1-5

4-2

Instruments, configuration

External instruments 1-19 Internal instruments 1-19

ITM (Interactive Test Module)

Definition (configuration) 2-11 Definition of term 2-2 Execution 2-28 In the Project Navigator 2-5 Inserting into Project 2-8

KCON (Keithley CONfiguration utility)

Brief description 1-4 Configuration Navigator 1-20 Features overview 1-20 Introduction 1-19 Menu item descriptions 1-20

KITE (Keithley Interactive Test Environment)

Brief description 1-4 Building a project

Defining the new project 2-6 Inserting Device Plans Inserting the ITMs Inserting the Subsite Plans Inserting the UTMs Saving the project

Configuring the Project ITMs

Connections, matching physical and

virtual

2-15

Forcing functions

configuring for each device

terminal Formulator, setting up calculations Saving the ITM configuration

Executing project tests

Executing appended tests and test se-

quences at single site

Executing entire Project at multiple

sites

2-31

Executing entire Project at single site Executing single test at single site Executing single test sequence at single

site

2-29

Interface

Overview 2-2 Project Navigator

ITMs (Interactive Test Modules) and UTMs (Us-

er Test Modules) explained 2-5

2-7

2-8

2-9

2-10

2-16

2-30

2-4

2-7

2-18

2-19

2-30

2-28

i-2 4200-903-01 Rev. C / May 2006

Terminology definitions, test components

Device 2-2 ITM

2-2

Project Site Subsite Test UTM

Viewing test results graphically

Defining a basic graph 3-7 Introduction Menu, Graph Setting Opening a Graph tab

Viewing test results numerically

Introduction 3-3 KPulse 1-12 KPulse (Keithley Pulse Virutal Front Panel

Brief description 1-4 KScope 1-12 KScope (Keithley Scope Virutal Front Panel

Brief description 1-4 KULT (Keithley User Library Tool)

Brief description 1-4

Interface overview 2-23

User library creation

Introduction 2-22 Procedure

User module creation

Checking the user module 2-28 Introduction Procedure

KXCI (Keithley External Control Interface)

Brief description 1-4

2-2

3-4

3-5

3-4

2-24

2-22

2-24

Powering the system 1-18 PreAmp

Signal ranges and resolutions 1-6

Signals and limits at connectors 1-7 Preparing the system 1-1 Project

Definition (configuration) of new 2-6

Definition of term, in 4200-SCS context 2-2

Executing tests in 2-28

Inserting components 2-7

Inserting Device Plan 2-7

Inserting ITM 2-8

Inserting Subsite Plan 2-7

Inserting UTM 2-9

Saving 2-10 Project Navigator 2-4

Explanation 2-4

Using to access Project component configura-

tion windows 2-11 Using to build a Project 2-6 Using to choose data to be displayed

Graphically 3-4

Numerically

Protection

Software integrity 4-2 User file integrity 4-2 Yourself, from shock, by proper instrument

grounding

Pulse Generator (4200-PG2)

Connections

To DUTs 1-15

Pulse Mode (SMUs) 2-14 Pulse-measure hardware 1-9, 1-10

3-3

1-18

License agreement, caution about negative re-

sponse to 1-4

Line power

Frequency, acceptable for system 1-18 Voltage range, acceptable 1-18

Line power receptacle, requirements 1-18

Ranges, current and voltage

PreAmps 1-6 Source-Measure units 1-6

Repacking the system 1-2 Repeating a test 2-33

Multi-site test sequence 2-31

Operating boundaries

Source-Measure units (SMUs) and

PreAmps

Output Values 2-36

4200-903-01 Rev. C / May 2006 i-3

1-8

Safety

Protecting software integrity 4-2 Protecting user file integrity 4-2 When powering the system 1-18

Scope (4200-SCP2)

Connections

To DUTs 1-15 Sheet tab Data worksheet 3-3 Signals

Limits

At source-measure hardware

connectors

Ranges and resolutions

PreAmp 1-6

Source-Measure Unit (SMU)

Types

At source-measure hardware

connectors

Site

Definition of term, in 4200-SCS 2-2

Software

Features 1-4 KXCI, brief description 1-4 Protecting integrity of 4-2 KCON

see KCON (Keithley CONfiguration utility)

KITE

see KITE (Keithley Interactive Test Envi-

ronment)

KULT (Keithley User Library Tool)

see KULT (Keithley User Library Tool) Source-measure hardware

Connectors, signal types, and limits 1-7 Overview 1-6

Source-Measure Unit (SMU)

Connections

To DUTs 1-14

Triaxial cables for

Signal ranges and resolutions 1-6

Signals and limits at connectors 1-7 Stress/Measure Mode 2-34 Subsite

Definition of term 2-2 Subsite cycling 2-33

Cycle Mode 2-34

Cycle mode configuration 2-34

Degradation targets 2-37

Output Values 2-36

Start subsite cycling 2-34

Stress/Measure Mode 2-34

1-7

1-8

1-6

System

Configuration 1-19 Hardware features 1-5 Inspection 1-1 Preparation 1-1 Repacking for shipment 1-2 Software features 1-4 Understanding the system 1-1 Unpacking the system 1-1

Test

Data

Understanding 3-2 Viewing graphically

Viewing numerically Definition of term, in context of 4200-SCS 2-2 Execution 2-28 Insertion into project

ITM 2-8

UTM

2-9

Types, explained 2-5

Triax connectors, avoiding damage 1-9

3-4

3-3

User library

Creation of 2-22 Definition of term 2-22 Selection of for UTM 2-21

User module

Creation of 2-22 Definition of term 2-22 Selection of for UTM 2-22

UTM (User Test Module)

Defining

Configuration 2-21

Creating custom user modules for Definition of term 2-2 Execution 2-28 In the Project Navigator 2-5 Inserting into a Project 2-9

2-22

i-4 4200-903-01 Rev. C / May 2006

Ventilation, system 1-12 Viewing data

Graphically 3-4 Numerically 3-3

Voltage

Boundaries, for source-measure hardware 1-7,

1-8

Line power

Acceptable range 1-18 Caution

Ranges, for source-measure hardware 1-6

1-18

Warmup requirements for 4200-SCS 1-18

Warning

Grounding requirement 1-18 Line cord 1-18 Power-up safety 1-3

4200-903-01 Rev. C / May 2006 i-5

i-6 4200-903-01 Rev. C / May 2006

Service Form

Model No. Serial No. Date Name and Telephone No. Company

List all control settings, describe problem and check boxes that apply to problem.

❏ Intermittent ❏ Analog output follows display ❏ Particu lar range or function bad; specify

❏ IEEE failure ❏ Obvious problem on power-up ❏ Batteries and fuses are OK ❏ Front panel operational ❏ All ranges or functions are bad ❏ Checked all cables

Display or output (check one)

❏ Drifts ❏ Unable to zero ❏ Unstable ❏ Will not r ead applied input ❏ Overload

❏ Calibration only ❏ Certificate of calibration required ❏ Data required

(attach any additional she ets as necessary) Show a block diagram of your measurement system including all instruments connected (whether power is turned on or not).

Also, describe signal source.

Where is the measurement being performed? (factory, controlled laboratory, out-of-doors, etc.)

What power line voltage is used? Ambient temperature? °F

Relative humidity? Other?

Any additional information. (If special modifications have been made by the user, please describe.)

Be sure to include your name and phone number on this service form.

12/04

Specifications are subject to change without notice.

All Keithley trademarks and trade names are the property of Keithley Instruments, Inc.

All other trademarks and trade names are the property of their respective companies.

A GREATER MEASURE OF CONFIDENCE

Keithley Instruments, Inc.

Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY (534-8453) • www.keithley.com

Tektronix 4200-SCS Quick Start Guide

Specifications and Main Features

Frequently Asked Questions

User Manual

Manual Print History

Safety Precautions

Table of Contents

List of Illustrations

List of Tables

Unpacking and inspecting the system

Becoming familiar with the system

Locating the system in the proper environment

Connecting system components

Connecting devices to be tested (DUTs)

Powering the 4200-SCS

Configuring the system

Designing and Executing Tests

Understanding the 4200-SCS test hierarchy and terminology

Becoming familiar with the KITE interface

Building a Project

Defining and configuring the Project ITMs

Defining and configuring the Project UTMs

Executing the Project tests

Viewing Test Results

Understanding the data files

Viewing test results numerically via the Sheet tab Data worksheet

Viewing test results graphically via the Graph tab

Protecting software integrity

Protecting user file integrity

Index