Tektronix 4200-SCS User manual

www.keithley.com

ECA 44845

Model 4200-SCS Semiconductor Characterization System

Applications Manual

4200-904-01 Rev. E / June 2008

A GREATER MEASURE OF CONFIDENCE

Model 4200-SCS

License Agreement

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Should you have any questions concerning this Agreement, or if you de at 1-800-552-1115, or write at Keithley Instruments, 28775 Aurora Rd., Solon, Ohio, USA 44139.

sire to contact Keithley Instruments for any reason, please call Keithley

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Keithley warrants to you that the Keithley manufactured portion of the hardware (the “Keithley Hardware”) purchased by you will substantially perform in accordance with the specifications set forth in this manual for a period of one (1) year after your receipt of the Keithley Hardware (the “Warranty Period”); provided the Keithley Hardware is used on the products for which it is intended and in accordance with the documentation. This limited warranty shall be null and void upon (1) any modifications of the Keithley Hardware, unless approved in writing by Keithley, (2) any operation of the 4200-Semiconductor Characterization System (the “4200-SCS”) with third party software, unless the software is explicitly approved and supported by Keithley, and (3) any operation of the 4200-SCS on an operating system not explicitly approved and supported by Keithley.

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Should you have any questions concerning this Agreem 1-800-552-1115, or write at Keithley Instruments, 28775 Aurora Rd., Solon, Ohio, USA 44139.

warranted during the Warranty Period, as determined in Keithley’s sole discretion (a “Noncon-

BILITY AND FITNESS FOR A PARTICULAR PURPOSE.

TION UNDER THIS LIMITED HARDWARE WARRANTY IS THE REPAIR OR

, KEITHLEY SHALL NOT BE LIABLE OR ASSUME LIABILITY FOR: (1) ECONOMICAL,

ent, or if you desire to contact Keithley Instruments for any reason, please call

A G R E A T E R M E A S U R E O F C O N F I D E N C E

Keithley Instruments, Inc.

Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139

440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY (534-8453) • www.keithley.com

03/07

4200-SCS

Semiconductor Characterization System

Applications Manual

Any unauthorized reproduction, photocopy, or use the information herein, in whole

or in part, without the prior written approval of Keithley Instruments, Inc. is strictly

prohibited.

, TSP-LinkTM, and TSP-NetTM are trademarks of Keithley Instruments, Inc.

TSP

All Keithley Instruments product names are trademarks or registered trademarks

of Keithley Instruments, Inc. Other brand names are trademarks or registered

trademarks of their respective holders.

Document Number: 4200-904-01 Rev. E / June 2008

The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may be present.

Safety Precautions

This product is intended for use by qualified personnel who recog to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer to the user documentation for complete product specifications.

If the product is used in a manner not

The types of product users are:

Responsible body is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.

Operators use They must be protected from electric shock and contact with hazardous live circuits.

Maintenance personnel pe replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are traine personnel may perform installation and service procedures.

Keithley Instruments products are designed for use with electrical sig Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient over-voltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise marked or described in the user documentation.

the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is

the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument.

rform routine procedures on the product to keep it operating properly, for example, setting the line voltage or

d to work on live circuits, perform safe installations, and repair products. Only properly trained service

specified, the protection provided by the product warranty may be impaired.

nize shock hazards and are familiar with the safety precautions required

nals that are rated Measurement Category I and Measurement

Exercise extreme caution when a shock hazard is prese American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak, or 60VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from ele prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000V, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuit connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, ensure that the line cord is con cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

nt. Lethal voltage may be present on cable connector jacks or test fixtures. The

ctric shock at all times. The responsible body must ensure that operators are

s. They are intended to be used with impedance-limited sources. NEVER

nected to a properly-grounded power receptacle. Inspect the connecting

03/07

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power

disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instrument ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the co make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in equipment may be impaired.

Do not exceed the maximum signal levels of the and as shown on the instrument or test fixture panels, or switching card.

When fuses are used in a product, replace with the same type an

Chassis connections must only be used as shield connections for me

If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires th interlock.

If a screw is present, connect it to safety earth ground

The symbol on an instrument indicates that the user should refer to the operating instructions located in the user documentaion.

The symbol on an instrument shows that it can source or measure 10 common mode voltages. Use standard safety precautions to avoid personal contact with these voltages.

accordance with its specifications and operating instructions, or the safety of the

instruments and accessories, as defined in the specifications and operating information,

mmon side of the circuit under test or power line (earth) ground. Always

d rating for continued protection against fire hazard.

asuring circuits, NOT as safety earth ground connections.

using the wire recommended in the user documentation.

00V or more, including the combined effect of normal and

s while power is applied to the circuit under test.

e use of a lid

The symbol on an instrument shows that

The symbol indicates a connection terminal to the equipment frame.

ARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read the

The W associated information very carefully before performing the indicated procedure.

The CAUTION h warranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and all test cables.

To maintain protection from electric shock and fire, replacement compon and input jacks - must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be used if the rating and type are the same. Other components that are not safety-related may be purchased from other suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments office for information.

To clean an instrument, use a damp cloth or mild, water-based clea directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

eading in the user documentation explains hazards that could damage the instrument. Such damage may invalidate the

the surface may be hot. Avoid personal contact to prevent burns.

ents in mains circuits - including the power transformer, test leads,

ner. Clean the exterior of the instrument only. Do not apply cleaner

1 Graphical Data Analysis and Basic Test Sequencing

SubVt slope .......................................................................................................................... 1-2

Open “default” project .................................................................................................... 1-2

Open “subvt” test and display graph .............................................................................. 1-2

Line-fit analysis .............................................................................................................. 1-3

Modify the line-fit ............................................................................................................ 1-4

Graphical analysis ...............................................................................................................

Open “default” project and “vds-id” test ......................................................................... 1-5

Display and analyze the “vds-id” graph ......................................................................... 1-6

Sequencing tests on a single device ..

Open “default” project ................................................................................................... 1-9

Open “4terminal-n-fet” tests ........................................................................................... 1-9

Modify tests .................................................................................................................. 1-10

Change the execution sequence . Run “4terminal-n-fet” test sequence ...

Save and export test data ............................................................................................ 1-12

2 Advanced Applications

Controlling a switch matrix ................................................................................................... 2-2

KCON setup ................................................................................................................... 2-4

Open KITE and the “ivswitch” project ............................................................................ 2-6

Running test sequences ................................................................................................ 2-7

“connect” test description .......

Sequencing tests on multiple devices

Open “ivswitch” project ................................................................................................ 2-10

Execute the test sequence (Subsite Plan) ................................................................... 2-12

Customizing a user test module (UTM) ...........

Open KULT .................................................................................................................. 2-13

Open the “ki42xxulib” user library ................

Open the “Rdson42XX” user module ........................................................................... 2-15

Copy “Rdson42XX” to “RdsonAvg” .

Open and modify the “RdsonAvg” user module ........................................................... 2-17

Save, compile, and build

Add a new UTM to the “ivswitch” project .........

Test description ............................................................................................................ 2-21

the modified library .............................................................. 2-19

.................................................................................. 1-9

................................................................................ 1-10

......................................................................... 1-11

........................................................................................ 2-9

................................................................................ 2-10

................................................................... 2-12

................................................................ 2-14

............................................................................. 2-16

............................................................ 2-20

. 1-5

3 Controlling External Equipment

Controlling external equipment overview ............................................................................. 3-2

Controlling a CV Analyzer .................................................................................................... 3-5

Connections ................................................................................................................... 3-5

4200-904-01 Rev. E / June 2008 i

KCON setup .................................................................................................................. 3-6

Create a new project ..................................................................................................... 3-7

Add a Subsite Plan ........................................................................................................ 3-8

Add a Device Plan ......................................................................................................... 3-8

Add a UTM .................................................................................................................... 3-9

Modifying the “cvsweep” UTM ..................................................................................... 3-11

Executing the test ........................................................................................................ 3-11

Controlling a pulse generator .............................

Test system connections ............................................................................................. 3-12

KCON setup ................................................................................................................ 3-13

Open the “ivpgswitch” project ...................................................................................... 3-15

Description of tests ...................................................................................................... 3-16

Running the test sequence .......................................................................................... 3-19

Compare the test result

Controlling a probe station ................................................................................................. 3-21

Prober control overview ............................................................................................... 3-22

Test system connections ............................................................................................. 3-23

KCON setup ................................................................................................................ 3-23

Probe station configuration .......................................................................................... 3-26

Open the “probesubsites” project

Open the project plan window ..................................................................................... 3-27

Test descriptions .......................................................................................................... 3-27

Running the test sequence .......................................................................................... 3-31

Test data ...................................................................................................................... 3-32

Running individual plans or test

s .............................................................................................. 3-19

................................................................................ 3-26

s ................................................................................. 3-32

................................................................ 3-12

4 Pulse Applications

Charge Pumping .................................................................................................................. 4-2

CP Procedure ................................................................................................................ 4-2

Charge pumping UTM descriptions ....

amplsweep .................................................................................................................... 4-6

basesweep .................................................................................................................... 4-8

FallTimeLinearSweep .................................................................................................... 4-9

FreqFactorSweep ........................................................................................................ 4-10

FreqLinearSweep ........................................................................................................ 4-12

RiseTimeLinearSweep ................................................................................................. 4-13

Pulse IV ........................................................................................................................

Introduction (PIV-A and PIV-Q) .................................................................................... 4-15

Pulse IV for CMOS: Model 4200-PIV-A ....................................................................... 4-16

PIV-A test connections ................................................................................................ 4-17

Using the PulseIV-Complete project for the first time Pulse IV UTM descriptions .

cal_pulseiv ................................................................................................................... 4-36

vdsid_pulseiv ............................................................................................................... 4-37

Vdid_Pulse_DC_Family_pulseiv .................................................................................. 4-39

...............................................................................................................................

Vgid_DC_Pulse_pulseiv .............................................................................................. 4-43

...............................................................................................................................

vgsid_pulseiv ............................................................................................................... 4-47

scopeshot_cal_pulseiv ................................................................................................ 4-49

...............................................................................................................................

scopeshot_pulseiv ....................................................................................................... 4-51

vdsid_pulseiv_demo .................................................................................................... 4-53

vgsid_pulseiv_demo .................................................................................................... 4-53

scopeshot_pulseiv_demo ............................................................................................ 4-53

........................................................................... 4-6

...... 4-15

.................................................. 4-24

......................................................................................... 4-36

...... 4-42

...... 4-46

...... 4-51

ii 4200-904-01 Rev. E / June 2008

Slow single pulse charge trapping high K gate stack ......................................................... 4-54

Charge trapping procedure .......

Charge Trapping UTM descriptions .................

chargetrapping_single_pulse_slow ..................

................................................................................... 4-55

............................................................ 4-58

AC stress for WLR ............................................................................................................. 4-61

Q-Point Pulse IV – Model 4200-PIV-Q ...............

................................................................ 4-64

What is the PIV-Q Package? ....................................................................................... 4-64

Target applications and test projects ........................................................................... 4-64

PIV-Q Test Procedure .................................................................................................. 4-65

Interconnect Assembly Procedure ............................................................................... 4-66

...............................................................................................................................

Using the Model 4200

Running AutocalScope ....................................

Project QPulseIV-Complete for the first time ........................... 4-70

............................................................ 4-71

...... 4-69

Running CableCompensation ...................................................................................... 4-71

PIV-Q user libraries ...................................................................................................... 4-77

Pulse adapters, cables, hardware and PCU ......

.............................................................. 4-118

Flash Memory Testing ...................................................................................................... 4-119

Introduction ................................................................................................................ 4-119

Theory of operation .................................................................................................... 4-119

FLASH Connections .................................................................................................. 4-132

Flash Projects ............................................................................................................ 4-140

4200-904-01 Rev. E / June 2008 iii

iv 4200-904-01 Rev. E / June 2008

List of Figures

1 Graphical Data Analysis and Basic Test Sequencing

Figure 1-1 Graph for the “subvt” test .................................................................................................. 1-2

Figure 1-2 Open Formulator window .................................................................................................. 1-3

Figure 1-3 Formulator for “subvt” test ................................................................................................. 1-3

Figure 1-4 Start and stop points for the line-fit.................................................................................... 1-4

Figure 1-5 Changing the STOPI value................................................................................................ 1-4

Figure 1-6 Modified line fit ..............................................................................................................

Figure 1-7 “vds-id” graph ................................................................................................................

Figure 1-8 Tools menu access to Graph Settings.................

Figure 1-9 Graph Settings .................................................................................................................

Figure 1-10 Cursors window................................................................................................................

Figure 1-11 Initial Cursor position.....................................................................................................

Figure 1-12 Graph with Cursors ...........................................................................................................

Figure 1-13 Project Navigator — “4terminal-n-fet” tests .. Figure 1-14 “4terminal-n-fet” tests opened in W

Figure 1-15 Device Plan window for “4terminal-n-fet” ........

Figure 1-16 New order for test sequence table .................................................................................. 1-11

Figure 1-17 Project Navigator — new execution sequence

Figure 1-18 “4terminal-n-fet” selected to run................

Figure 1-19 Saving test data.............................................................................................................

orkspace..................................................................... 1-9

.............................................................. 1-6

..................................................................... 1-9

................................................................ 1-10

................................................................ 1-11

...................................................................... 1-11

.... 1-5

.... 1-6

. 1-7 . 1-7

.... 1-8

1-8

.. 1-12

2 Advanced Applications

Figure 2-1 Devices connected to 707A switching matrix .................................................................... 2-3

Figure 2-2 Add a switch matrix to the system configurat

Figure 2-3 Add a test fixture to the system configuration ................................................................... 2-4

Figure 2-4 Add a switch card to the system configuration

Figure 2-5 Define the system connections ......................................................................................... 2-5

Figure 2-6 Save the system configuration .......................................................................................... 2-6

Figure 2-7 Project Navigator - “ivswitch” project

Figure 2-8 Signal paths for “4terminal-n-fet” tests .............................................................................. 2-7

Figure 2-9 Signal paths for “3terminal-npn-bjt” t Figure 2-10 Signal paths for “2-wireresistor” test

Figure 2-11 Signal paths for “diode” tests............................................................................................. 2-8

Figure 2-12 Signal paths for “capacitor” test......................................................................................... 2-8

Figure 2-13 “connect” test.................................................................................................................

Figure 2-14 “connect” parameters for “4terminal-n-fet” device

Figure 2-15 Project Navigator - “ivswitch” project............................................................................... 2-10

Figure 2-16 Subsite Plan window ....................................................................................................... 2-11

Figure 2-17 “diode” moved to top of sequence table .......

Figure 2-18 “diode” moved to top of Project

Figure 2-19 Execution indicator box ................................................................................................... 2-12

4200-904-01 Rev. E / June 2008

ion ............................................................... 2-4

.................................................................. 2-5

................................................................................. 2-6

ests .......................................................................... 2-7

s................................................................................ 2-8

.... 2-9

........................................................... 2-10

................................................................... 2-11

Navigator....................................................................... 2-12

Figure 2-20 KULT main window.......................................................................................................... 2-13

Figure 2-21 Open “ki42xxulib” library ................................................................................................. 2-14

Figure 2-22 Open “Rdson42XX” module ............................................................................................ 2-15

Figure 2-23 Copy “Rdson42xx” module as “RdsonA

Figure 2-24 KULT module window...................................................................................................... 2-17

Figure 2-25 Program modifications .................................................................................................... 2-18

Figure 2-26 Module name for Description .......................................................................................... 2-19

Figure 2-27 Save, compile, and build library

Figure 2-28 Project Navigator for “ivswitch” project.........

Figure 2-29 Add new UTM ................................................................................................................. 2-20

Figure 2-30 “rdson10” added to Project Navigator ............................................................................. 2-21

Figure 2-31 “rdson10” UTM ................................................................................................................

...................................................................................... 2-19

vg” ..................................................................... 2-16

................................................................... 2-20

2-21

3 Controlling External Equipment

Figure 3-1 System configuration with external instruments................................................................ 3-3

Figure 3-2 Relationships between KULT and KITE and betwe

3-4

Figure 3-3 Typical CV curve ..............................................................................................................

Figure 3-4 Keithley Model 590 CV Analyzer DUT connections .......................................................... 3-5

Figure 3-5 Adding a Keithley 590 CV Analyzer to the sys

Figure 3-6 Setting the Model 590 GPIB address................................................................................ 3-6

Figure 3-7 Saving the system configuration ....................................................................................... 3-6

Figure 3-8 New Project menu selection.............................................................................................. 3-7

Figure 3-9 Define new project ............................................................................................................

Figure 3-10 Add a new Subsite Plan to a KITE project ........................................................................ 3-8

Figure 3-11 Add a new Subsite Plan.................................................................................................... 3-8

Figure 3-12 Add a new Device Plan to a KITE project ......................................................................... 3-8

Figure 3-13 Add a Device Plan............................................................................................................

Figure 3-14 Default test library folders ............................................................................................... 3-10

Figure 3-15 Add the “cvsweep” UTM..................................

Figure 3-16 “cvsweep” UTM ............................................................................................................... 3-11

Figure 3-17 Test system for “ivpgswitch” project ................................................................................ 3-12

Figure 3-18 Adding a pulse generator ................................................................................................ 3-13

Figure 3-19 Pulse generator configuration ......................................................................................... 3-13

Figure 3-20 Adding a switch matrix .................................................................................................... 3-13

Figure 3-21 Configuring the switch matrix .......................................................................................... 3-14

3-22 Adding a probe station .................................................................................................... 3-14

Figure

Figure 3-23 Connecting the switch matrix .......................................................................................... 3-15

Figure 3-24 Saving the system configuration ..................

Figure 3-25 Project Navigator - “ivpgswitch” project........................................................................... 3-15

Figure 3-26 First “connect” test - connects the device to the SMUs ................................................... 3-16

Figure 3-27 Signal paths for the pre and post stress tests ................................................................. 3-16

Figure 3-28 Second “connect” test - connects the device to the PGU................................................ 3-17

Figure 3-29 Signal paths to apply the pulse stress............................................................................. 3-17

Figure 3-30 PGU initialization ...........................................................................................................

Figure 3-31 “pgu1-setup” - configure the PGU channel ..................................................................... 3-18

Figure 3-32 PGU stress pulse specifications...................................................................................... 3-18

Figure 3-33 “pgu-trigger” test - trigger the burst of stress pulses ....................................................... 3-18

Figure 3-34 Buttons to close or reduce s

Figure 3-35 “id-vg” graphs ................................................................................................................

Figure 3-36 Graph scale settings ....................................................................................................... 3-20

Figure 3-37 Sample wafer organization.....

Figure 3-38 System configuration for the “probesubsites” project ...................................................... 3-23

Figure 3-39 Adding a switch matrix .................................................................................................... 3-24

Figure 3-40 Configuring the switch matrix .......................................................................................... 3-24

ize of test documents.......................................................... 3-19

......................................................................................... 3-21

en user libraries, user modules, and UTMs

. 3-5

tem configuration ..................................... 3-6

3-7

. 3-9

................................................................ 3-10

................................................................... 3-15

.. 3-17

.. 3-20

vi 4200-904-01 Rev. E / June 2008

Figure 3-41 Adding a probe station .................................................................................................... 3-24

Figure 3-42 Connecting the switch matrix .......................................................................................... 3-25

Figure 3-43 Saving the system configuration ..................

Figure 3-44 Project Navigator - probesubsit

Figure 3-45 Modified project plan settings.......................................................................................... 3-27

Figure 3-46 prober-init ..................................................................................................................

Figure 3-47 Connect SMUs to N-channel MOSFET........................................................................... 3-29

Figure 3-48 Connect SMUs to NPN transistor.................................................................................... 3-29

Figure 3-49 prober-separate..............................................................................................................

Figure 3-50 prober-prompt test and dialog window ............................................................................ 3-30

Figure 3-51 Test sequence ................................................................................................................

Figure 3-52 Site Navigator................................................................................................................

Figure 3-53 KITE title bar..............................................................................................................

es project ....................................................................... 3-26

................................................................... 3-25

...... 3-28

. 3-30

. 3-31

.. 3-32

...... 3-32

4 Pulse Applications

Figure 4-1 Charge Pumping—hardware setup block diagram............................................................ 4-3

Figure 4-2 Charge pumping — hardware connection ........................................................................ 4-4

Figure 4-3 Two types of sweeps for charge pumping......................................................................... 4-4

Figure 4-4 Example data plots for N

Figure 4-5 Pulse IV—hardware setup block diagram ....................................................................... 4-17

Figure 4-6 Pulse IV—hardware connections .................................................................................... 4-18

Figure 4-7 Side view of scope card connections .............................................................................. 4-18

Figure 4-8 Model 8101-PIV test fixture ............................................................................................. 4-19

Figure 4-9 Model 8101-PIV schematic ............................................................................................. 4-19

Figure 4-10 PRB-C adapter cable – pulse SMA to SSMC Y ............................................................. 4-20

Figure 4-11 Schematic diagram of the PRB-C adapter cable ............................................................ 4-21

Figure 4-12 Pulse IV connections using PRB-C adapter cables ........................................................ 4-22

Figure 4-13 Pulse IV connections using RF G-S-G probes ................................................................ 4-23

Figure 4-14 Pulse IV connections using the 8101-PIV test fixture...................................................... 4-23

Figure 4-15 DUT inserted in pulse

Figure 4-16 Project plan for Pulse-IV Complete .............

Figure 4-17 PulseIVCal dialog boxes ................................................................................................ 4-26

Figure 4-18 8101-PIV shorted/through socket ...

Figure 4-19 Default definition and typical graph for Vds-id ....

Figure 4-20 Default Definition tab and G

Figure 4-21 Default definition and typical graph for vds-id-pulse-vs-dc.............................................. 4-28

Figure 4-22 Default definition and typical graph for vgs-id Figure 4-23 Default definition and typical graph for vgs-id-puls Figure 4-24 Default GUI definition and typical graph f

Figure 4-25 Typical graphical result for scope-shot .....

Figure 4-26 Highlighting all entries in vds-id data sheet ..................................................................... 4-34

Figure 4-27 Data from vds-id pasted int

Figure 4-28 Graph Definition dialog box and resulting graph that shows the three added curves..... 4-35

Figure 4-29 Trapping and de-trapping in a single gate volt

Figure 4-30 Slow single pulse—hardware setup block diagram ..................................................... 4-55

Figure 4-31 Slow single pulse—hardware connection ...................................................................... 4-56

Figure 4-32 Example slow single pulse waveform graph .................................................................. 4-56

Figure 4-33 Single slow pulse example data plot ............................................................................... 4-57

Figure 4-34 AC Pulse stress-measure—hardware setup block diagram ............................................ 4-61

Figure 4-35 AC Pulse stress-measure—hardware matrix card simplified

Figure 4-36 AC Pulse stress-measure—hardware connections ....................................................... 4-63

Figure 4-37 PIV-Q Block Diagram ...................................................................................................... 4-65

Figure 4-38 PIV-Q connections diagram............................................................................................. 4-66

Figure 4-39 Photo showing PIV-Q connections.................................................................................. 4-69

Figure 4-40 PIV-Q connections using RF G-S-G probes.................................................................... 4-69

it..........................................................................................................................

socket of 8101-PIV test fixture..................................................... 4-24

................................................................... 4-25

................................................................................ 4-26

............................................................ 4-27

UI For vds-id-pulse.............................................................. 4-28

................................................................. 4-29

e........................................................ 4-30

or vgs-id-pulse-vs-dc ...................................... 4-30

...................................................................... 4-31

o vds-id-pulse calc sheet...................................................... 4-34

age pulse................................................. 4-54

schematic ......................... 4-62

4-5

4200-904-01 Rev. E / June 2008 vii

Figure 4-41 PIV-Q connections using the 8101-PIV test fixture ......................................................... 4-70

Figure 4-42 Proper orientation for the plastic package T

O-92 n-channel enhancement mode FET .. 4-70

Figure 4-43 QPulse-IV-Complete project............................................................................................ 4-72

Figure 4-44 Definition and Graph tabs for Vd-Id-Pulse (Vgs = 5V) .................................................... 4-73

Figure 4-45 Default definition and typical graph for Vd-Id-Family

...................................................... 4-73

Figure 4-46 Vg-Id-Pulse Graph tab..................................................................................................... 4-74

Figure 4-47 Default GUI definition for Vg-I

d-Pulse-vs-DC .................................................................. 4-75

Figure 4-48 Typical graph for Vg-Id-Pulse-vs-DC............................................................................... 4-75

Figure 4-49 Typical graphical result for ScopeShot -FET................................................................... 4-76

Figure 4-50 Pulse adapters, cables and hardware........................................................................... 4-118

Figure 4-51 Cross section of a floating gate transistor in both the erased and programmed states 4-119 Figure 4-52 Graph of shifted voltage threshold, VT, due to stored charge on

floating gate on a 1 bit (2 level) cell. 4-

Figure 4-53 Fowler-Nordheim tunneling Program and Erase.

.......................................................... 4-121

120

Figure 4-54 Hot Electron Injection (HEI) Program and Erase. ......................................................... 4-121

Figure 4-55 Block diagram of an example flash t Figure 4-56 Block diagram of a flash test setup without using a

est setup using a switch matrix ............................ 4-122

switch matrix (direct connect)....... 4-122

Figure 4-57 Program pulse waveforms for a floating gate DUT, with separate

pulse waveforms for the DUT gate, drain, source, and bulk 4-

123

Figure 4-58 Example erase pulse waveforms for a floating gate DUT, with separate

pulse waveforms for the DUT gate, drain, source, and bulk 4-

123

Figure 4-59 Program + Erase pulse waveforms for a floating gate DUT, with separate

pulse waveforms for the DUT gate, drain, source, and bulk. 4-

Figure 4-60 Basic schematic of flash testing without a sw

itch matrix ............................................... 4-124

Figure 4-61 Example results of VT shift in an Endurance test Figure 4-62 Disturb testing – configuration to

test a single device ................................................... 4-126

on a NOR flash cell.......................... 4-125

124

Figure 4-63 Kpulse showing the Segment Arb settings for the 4205-PG2 card in the

lowest numbered-slot (PG2-1) ........................

.............................................................. 4-128

Figure 4-64 Kpulse showing the Segment Arb settings for the 4205-PG2 card in the

second lowest-numbered slot (PG2-2) 4-

Figure 4-65 Flash-NAND Project Definition Tab, including

arrows for the 6 input arrays ................. 4-131

Figure 4-66 Flash-NAND PulseVoltages Array Entry and PrePulseDelay Figure 4-67 Flash connections – program/erase an

connection to a single, stand-alone 4 terminal Figure 4-68 Flash direct DUT connections – Disturb testing Figure 4-69 Flash Switch connections – Characterization, endurance

d endurance testing using direct

device................................................... 4-133

............................................................ 4-134

or disturb testing................. 4-135

s Entry ............................ 4-132

128

Figure 4-70 Supplied items for 4200-Flash package ........................................................................ 4-135

Figure 4-71 KCON Row-Column Card Properties for Flash testing with 4 SMUs and 4 VPU pulse

channels 4-

Figure 4-72 Project listing _Memory folder.......................................................................................

139

4-140

Figure 4-73 Flash-NAND project ...................................................................................................... 4-141

Figure 4-74 Parameters for Program or Eras

e UTMs (using single_pulse_flash module) ............... 4-142

Figure 4-75 Parameters for Fast Program-Erase pulse waveform

(using double_pulse_flash module) 4-

Figure 4-76 Flash-NAND project – Program definition t

ab ............................................................... 4-142

142

Figure 4-77 Flash-NAND project – Erase definition tab.................................................................... 4-143

Figure 4-78 Flash-NAND project – Fast-Program-Erase def Figure 4-79 Flash-NAND project – SetupDC definition t

inition tab ........................................... 4-143

ab .............................................................. 4-144

Figure 4-80 Flash-NAND project – Vt-MaxGm definition tab............................................................ 4-145

Figure 4-81 Flash-Switch project ..................................................................................................... 4-146

Figure 4-82 ConPin-Pulse test Definition tab.................................................................................... 4-146

Figure 4-83 ConPin-Pulse test GUI definition dialog ....

Figure 4-84 FlashEndurance-NAND project plan ...............

Figure 4-85 FlashEndurance-NAND project – Subsite Plan t Figure 4-86 FlashEndurance-NAND project – Device Stres Figure 4-87 FlashEndurance-NAND project – Subsite Graph t

.................................................................... 4-147

.............................................................. 4-153

ab....................................................... 4-154

s Properties ......................................... 4-154

ab .................................................... 4-155

viii 4200-904-01 Rev. E / June 2008

Figure 4-88 FlashEndurance-NAND project – Program Definition tab ............................................. 4-156

Figure 4-89 FlashEndurance-NAND project – SetupDC Definition tab ............................................ 4-157

Figure 4-90 FlashEndurance-NAND project – Vt-MaxGm-Program Definition Figure 4-91 FlashEndurance-NAND project – Vt-MaxGm-Program G

raph tab................................ 4-158

tab........................... 4-158

Figure 4-92 FlashEndurance-NAND project – Erase Definition tab.................................................. 4-159

Figure 4-93 FlashEndurance-Switch project .................................................................................... 4-160

Figure 4-94 FlashDisturb-NAND project – Subsite Setup tab........................................................... 4-164

Figure 4-95 FlashDisturb-NAND project – Device Stress Propert

ies................................................ 4-164

4200-904-01 Rev. E / June 2008 ix

x 4200-904-01 Rev. E / June 2008

List of Tables

1 Graphical Data Analysis and Basic Test Sequencing

Figure 1-1 Graph for the “subvt” test .................................................................................................. 1-2

Figure 1-2 Open Formulator window .................................................................................................. 1-3

Figure 1-3 Formulator for “subvt” test ................................................................................................. 1-3

Figure 1-4 Start and stop points for the line-fit.................................................................................... 1-4

Figure 1-5 Changing the STOPI value................................................................................................ 1-4

...

Figure 1-6 Modified line fit ..............................................................................................................

Figure 1-7 “vds-id” graph ...................................................................................................................

Figure 1-8 Tools menu access to Graph Settings....................

Figure 1-9 Graph Settings ..................................................................................................................

Figure 1-10 Cursors window.................................................................................................................

Figure 1-11 Initial Cursor position........................................................................................................

Figure 1-12 Graph with Cursors ........................................................................................................... 1-8

ure 1-13 Project Navigator — “4terminal-n-fet” tests.....

Fig Figure 1-14 “4terminal-n-fet” tests opened in Wo

Figure 1-15 Device Plan window for “4terminal-n-fet” ............

Figure 1-16 New order for test sequence table .................................................................................. 1-11

Figure 1-17 Project Navigator — new execution sequence....

Figure 1-18 “4terminal-n-fet” selected to run...................

Figure 1-19 Saving test data...............................................................................................................

rkspace..................................................................... 1-9

........................................................... 1-6

.................................................................. 1-9

............................................................ 1-10

............................................................ 1-11

................................................................... 1-11

. 1-5 . 1-6

1-7 1-7

. 1-8

1-12

2 Advanced Applications

Figure 2-1 Devices connected to 707A switching matrix .................................................................... 2-3

Figure 2-2 Add a switch matrix to the system configuration

Figure 2-3 Add a test fixture to the system configuration ................................................................... 2-4

Figure 2-4 Add a switch card to the system configuration ....

Figure 2-5 Define the system connections ......................................................................................... 2-5

Figure 2-6 Save the system configuration .......................................................................................... 2-6

Figure 2-7 Project Navigator - “ivswitch” project

Figure 2-8 Signal paths for “4terminal-n-fet” tests .............................................................................. 2-7

Figure 2-9 Signal paths for “3terminal-npn-bjt” te Figure 2-10 Signal paths for “2-wireresistor” tests

Figure 2-11 Signal paths for “diode” tests............................................................................................. 2-8

Figure 2-12 Signal paths for “capacitor” test......................................................................................... 2-8

Figure 2-13 “connect” test.................................................................................................................

Figure 2-14 “connect” parameters for “4terminal-n-fet” device ..

Figure 2-15 Project Navigator - “ivswitch” project............................................................................... 2-10

Figure 2-16 Subsite Plan window ....................................................................................................... 2-11

Figure 2-17 “diode” moved to top of sequence table ..........

Figure 2-18 “diode” moved to top of Project Navigat

Figure 2-19 Execution indicator box ................................................................................................... 2-12

4200-904-01 Rev. E / June 2008

............................................................... 2-4

.............................................................. 2-5

............................................................................... 2-6

sts .......................................................................... 2-7

................................................................................ 2-8

...

. 2-9

......................................................... 2-10

................................................................ 2-11

or....................................................................... 2-12

Figure 2-20 KULT main window.......................................................................................................... 2-13

Figure 2-21 Open “ki42xxulib” library ................................................................................................. 2-14

Figure 2-22 Open “Rdson42XX” module ............................................................................................ 2-15

vg”

Figure 2-23 Copy “Rdson42xx” module as “RdsonA

Figure 2-24 KULT module window...................................................................................................... 2-17

Figure 2-25 Program modifications .................................................................................................... 2-18

Figure 2-26 Module name for Description .......................................................................................... 2-19

...

Figure 2-27 Save, compile, and build library

Figure 2-28 Project Navigator for “ivswitch” project............

Figure 2-29 Add new UTM ................................................................................................................. 2-20

Figure 2-30 “rdson10” added to Project Navigator ............................................................................. 2-21

Figure 2-31 “rdson10” UTM ................................................................................................................

................................................................................... 2-19

..................................................................... 2-16

................................................................ 2-20

3 Controlling External Equipment

Figure 3-1 System configuration with external instruments................................................................ 3-3

Figure 3-2 Relationships between KULT and KITE and between user

Figure 3-3 Typical CV curve ............................................................................................................... 3-5

Figure 3-4 Keithley Model 590 CV Analyzer DUT connections .......................................................... 3-5

Figure 3-5 Adding a Keithley 590 CV Analyzer to the system configuration ..................................... 3-6

Figure 3-6 Setting the Model 590 GPIB address................................................................................ 3-6

Figure 3-7 Saving the system configuration ....................................................................................... 3-6

Figure 3-8 New Project menu selection.............................................................................................. 3-7

Figure 3-9 Define new project ............................................................................................................ 3-7

Figure 3-10 Add a new Subsite Plan to a KITE project ........................................................................ 3-8

Figure 3-11 Add a new Subsite Plan.................................................................................................... 3-8

Figure 3-12 Add a new Device Plan to a KITE project ......................................................................... 3-8

Figure 3-13 Add a Device Plan............................................................................................................. 3-9

Figure 3-14 Default test library folders ............................................................................................... 3-10

Figure 3-15 Add the “cvsweep” UTM.................................................................................................. 3-10

Figure 3-16 “cvsweep” UTM ............................................................................................................... 3-11

Figure 3-17 Test system for “ivpgswitch” project ................................................................................ 3-12

Figure 3-18 Adding a pulse generator ................................................................................................ 3-13

Figure 3-19 Pulse generator configuration ......................................................................................... 3-13

Figure 3-20 Adding a switch matrix .................................................................................................... 3-13

Figure 3-21 Configuring the switch matrix .......................................................................................... 3-14

3-22

Figure

Figure 3-23 Connecting the switch matrix .......................................................................................... 3-15

Figure 3-24 Saving the system configuration ..................................................................................... 3-15

Figure 3-25 Project Navigator - “ivpgswitch” project........................................................................... 3-15

Figure 3-26 First “connect” test - connects the device to the SMUs ................................................... 3-16

Figure 3-27 Signal paths for the pre and post stress tests ................................................................. 3-16

Figure 3-28 Second “connect” test - connects the device to the PGU................................................ 3-17

Figure 3-29 Signal paths to apply the pulse stress............................................................................. 3-17

Figure 3-30 PGU initialization ............................................................................................................. 3-17

Figure 3-31 “pgu1-setup” - configure the PGU channel ..................................................................... 3-18

Figure 3-32 PGU stress pulse specifications...................................................................................... 3-18

Figure 3-33 “pgu-trigger” test - trigger the burst of stress pulses ....................................................... 3-18

Figure 3-34 Buttons to close or reduce size of test documents.......................................................... 3-19

Figure 3-35 “id-vg” graphs .................................................................................................................. 3-20

Figure 3-36 Graph scale settings ....................................................................................................... 3-20

Figure 3-37 Sample wafer organization.............................................................................................. 3-21

Figure 3-38 System configuration for the “probesubsites” project ...................................................... 3-23

Figure 3-39 Adding a switch matrix .................................................................................................... 3-24

Figure 3-40 Configuring the switch matrix .......................................................................................... 3-24

Adding a probe station .................................................................................................... 3-14

libraries, user modules, UTMs 3-4

vi 4200-904-01 Rev. E / June 2008