Model 4200A-SCS-PKA
High Resolution I-V Parameter Analyzer
Quick Start Guide
Safety precautions
The following safety precautions should be observed before using this product and any
associated instrumentation. Although some instruments and accessories would normally be
used with nonhazardous voltages, there are situations where hazardous conditions may be
present.
This product is intended for use by personnel who recognize shock hazards and are familiar
with the safety precautions required to avoid possible injury. Read and follow all ins
operation, and maintenance information carefully before using the product. Refer to the user
documentation for complete product specifi cations.
If the product is used in a manner not specifi ed, the protection provided by the product
warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of
equipment, for ensuring that the equipment is operated within
limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety
procedures and proper use of the instrument. They must be protected from electric shock and
contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating
properly, for example, setting the line vol
procedures are described in the user documentation. The procedures explicitly state if the
operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and
repair products. Only properly trained service personnel may perform installation and
service procedures.
Keithley products ar
and data I/O connections, with low transient overvoltages, and must not be directly connected
to mains voltage or to voltage sources with high transient overvoltages. Measurement
Category II (as referenced in IEC 60664) connections require protection for high transient
e designed for use with electrical signals that are measurement, control,
tage or replacing consumable materials. Maintenance
its specifi cations and operating
tallation,
overvoltages often associated with local AC mains connections. Certain Keithley measuring
instruments may be connected to
or higher.
Unless explicitly allowed in the specifi cations, operating manual, and instrument labels, do
not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on
cable connector jacks or test fi xtures. The American National Standards Institute (ANSI)
states that a shock hazard exists when voltage levels greater than 30 V RMS, 42.4 V peak,
or 60 VDC are present. A good s
in any unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible
body must ensure that operators are prevented access and/or insulated from every
connection point. In some cases, connections must be exposed to potential human contact.
Product operators in these circumstances must be trained to protect themselves from the risk
of electric shoc
the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be
used with impedance-limited sources. NEVER connect switching cards directly to AC mains.
When connecting sources to switching cards, install protective devices to limit fault current and
voltage to the card.
Before operating an instrument, ensure that the line co
power receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear,
cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack
mounting, a separate main input power disconnect device must be provided in close proximity
to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, tes
power is applied to the circuit under test. ALWAYS remove power from the entire test system
and discharge any capacitors before: connecting or disconnecting cables or jumpers,
installing or removing switching cards, or making internal changes, such as installing or
removing jumpers.
k. If the circuit is capable of operating at or above 1000 V, no conductive part of
mains. These instruments will be marked as category II
afety practice is to expect that hazardous voltage is present
rd is connected to a properly-grounded
t cables, or a
ny other instruments while
Safety
Do not touch any object that could provide a current path to the common side of the circuit under
test or power line (earth) ground. Always make measurements with dry hands while standing on
a dry, insulated surface capable of withstanding the voltage being measured.
For safety, instruments and accessories must be used in accordance with the operating
instructions. If the instruments or accessories are used in a manner not specifi ed in t
operating instructions, the protection provided by the equipment may be impaired.
Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal
levels are defi ned in the specifi cations and operating information and shown on the instrument
panels, test fi xture panels, and switching cards.
When fuses are used in a product, replace with the same type and rating for continued
protection against fi re hazard.
Chassis c
onnections must only be used as shield connections for measuring circuits, NOT as
protective earth (safety ground) connections.
If you are using a test fi xture, keep the lid closed while power is applied to the device under test.
Safe operation requires the use of a lid interlock.
If a screw is present, connect it to protective earth (safety ground) using the wire
recommended in the user documentation.
The symbol on an instrument means caution, risk of hazard. The user must refer to the
operating instructions located in the user documentation in all cases where the symbol is
marked on the instrument.
The symbol on an instrument means warning, risk of electric
precautions to avoid personal contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to
prevent burns.
The symbol indicates a connection terminal to the equipment frame.
f this symbol is on a product, it indicates that mercury is present in the display lamp. Please
I
note that the lamp must be properly disposed of according to federal, state, and local laws.
shock. Use standard safety
he
The WARNING heading in the user documentation explains hazards that might result
in personal injury or death. Always read the associated information very carefully before
performing the indicated procedure.
The CAUTION heading in the user documentation expla
instrument. Such damage may invalidate the warranty.
The CAUTION heading with the symbol in the user documentation explains hazards that
could result in moderate or minor injury or damage the instrument. Always read the associated
information very carefully before performing the indicated procedure. Damage to the instrument
may invalidate the warranty.
Instrumentation and accessories shall not be connected to huma
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fi re, replacement components in mains circuits
— including the power transformer, test leads, and input jacks — must be purchased from
Keithley. Standard fuses with applicable national safety approvals may be used if the rating and
type are the same. The detachable mains power cord provided with the instrument may only be
replaced wi
be purchased from other suppliers as long as they are equivalent to the original component
(note that selected parts should be purchased only through Keithley to maintain accuracy
and functionality of the product). If you are unsure about the applicability of a replacement
component, call a Keithley offi ce for information.
Unless otherwise noted in product-specifi c literat
operate indoors only, in the following environment: Altitude at or below 2,000 m (6,562 ft);
temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.
To clean an instrument, use a cloth dampened with deionized wat
cleaner. Clean the exterior of the instrument only. Do not apply cleaner directly to the instrument
or allow liquids to enter or spill on the instr
no case or chassis (e.g., a data acquisition board for installation into a computer) should never
require cleaning if handled according to instructions. If the board becomes contaminated and
operation is aff ected, the board should be returned to the factory for proper cleaning/servicing.
Safety precaution revision as of June 2017.
th a similarly rated power cord. Other components that are not safety-related may
ument. Products that consist of a circuit board with
ins hazards that could damage the
ns.
ure, Keithley instruments are designed to
er or mild, water-based
Power and environmental ratings
CAUTION
For indoor use only.
Power supply
Maximum VA
Operating altitude
Operating
temperature
Storage temperature
100 V ac to 240 V ac, 50 Hz to 60 Hz
1000 VA
Maximum 2000 m (6562 ft) above sea level
+10 °C to +40 °C,
5% to 80% relative humidity, non-condensing
−15 °C to 60 °C,
5% to 90% relative humidity, non-condensing
Carefully consider and congure the appropriate
output‑o state, source levels, and compliance levels
before connecting the instrument to a device that can
deliver energy. Failure to consider the output‑o state,
source levels, and compliance levels may result in
damage to the instrument or to the device under test.
Introduction
Introduction
The 4200A-SCS and embedded Clarius software provides
clear, uncompromised measurement and analysis. The
Clarius software is furnished with embedded measurement
expertise and ready-to-use applications that enable you
to perform your research with speed and condence. The
4200A-SCS-PKA High-Resolution I-V package includes
everything you need to perform I-V measurements. The
Clarius user interface provides touch-and-swipe or
point-and-click control for advanced test denition, parameter
analysis, graphing, and automation capabilities for modern
semiconductor, materials, and process characterization.
For additional support information, see tek.com/keithley.
The 4200A-SCS documentation includes:
• Quick Start Guide: This document. It provides unpacking
instructions, describes basic connections, reviews
basic operation information, and provides a quick test
procedure to ensure the instrument is operational.
• Clarius Manual: Provides comprehensive information
about projects, tests, data analysis, data calculation, user
libraries, and customizing Clarius.
• Hardware manuals for setup and maintenance,
source-measure units (SMUs), capacitance-voltage units
(CVUs), pulse-measure units (PMUs) and
pulse-generator units (PGUs), and prober and external
instrument control.
• Programming guides for the library LPT, Keithley
User Library Tool (KULT), and Keithley External Control
Interface (KXCI).
For complete documentation for the 4200A-SCS, see the
4200A-SCS Learning Center
contains instructional videos, PDFs, and HTML content. To
access the Learning Center, click Help in the Clarius menu,
press F1 while using Clarius, or select the desktop icon.
. The Learning Center
Unpack and inspect the instrument
CAUTION
CAUTION
To unpack and inspect the instrument:
1. Inspect the box for damage.
2. Open the top of the box.
3. Remove the documentation, optional accessories and
packaging insert.
4. Carefully lift the instrument out of the box.
5. Inspect the instrument for any obvious signs of
physical damage. Report any damage to the shipping
agent immediately.
The 4200A-SCS weighs approximately 27 kg (60 lb) and
requires a two-person lift.
Do not lift the 4200A-SCS using the front bezel.
In the 4200A-SCS-PKA bundle, you receive the 4200A-SCS
Parameter Analyzer with:
• Keyboard
• Mouse
• Power line cord
• Safety interlock cable
• 4201-SMU medium-power source-measure unit (two)
Unpack
Also, you should have received the following items:
1 8101-PIV component test xture with sample devices
2 4200-RPC-2 remote preamplier cable
3 4200-MTRX ultra-low noise SMU triaxial cables (two)
4 Safety interlock cable
5 4200-PA remote preamplier
6 4200-TRX-2 ultra-low noise triaxial cables (two)
7 CAP-31 protective caps with triaxial connectors (two)
4200A-SCS-PKA Quick Start Guide (not shown;
this document)
Refer to the packing list for additional items that might have
shipped with your instrument.
Items shipped may vary from items pictured here.
Connect the instrument
Important test system safety information
This system contains instruments that can produce
hazardous voltages. It is the responsibility of the test system
installer, maintenance personnel, and service personnel to
make sure the system is safe during use and is operating
properly. You must also realize that in many test systems a
single fault, such as a software error, may output hazardous
signal levels even when the system indicates that there is no
hazard present.
It is important that you consider the following factors in your
system design and use:
• The international safety standard IEC 61010-1 denes
voltages as hazardous if they exceed 30 V
42.4 VPEAK or 60 V dc for equipment rated for dry
locations. Keithley Instruments products are only rated for
dry locations.
• Read and comply with the specications of all instruments
in the system. The overall allowed signal levels may be
constrained by the lowest rated instrument in the system.
For example, if you are using a 500 V power supply with
a 300 V dc rated switch, the maximum allowed voltage in
the system is 300 V dc.
• Cover the device under test (DUT) to protect the operator
from ying debris in the event of a system or DUT failure.
RMS and
• Make sure any test xture connected to the system
protects the operator from contact with hazardous
voltages, hot surfaces, and sharp objects. Use
shields, barriers, insulation, and safety interlocks to
accomplish this.
• Double-insulate all electrical connections that an operator
can touch. Double insulation ensures the operator is
still protected even if one insulation layer fails. Refer to
IEC 61010-1 for specic requirements.
• Make sure all connections are behind a locked cabinet
door or other barrier. This protects the system operator
from accidentally removing a connection by hand and
exposing hazardous voltages. Use high-reliability fail-safe
interlock switches to disconnect power sources when a
test xture cover is opened.
• Where possible, use automatic handlers so that operators
are not required to access the DUT or other potentially
hazardous areas.
• Provide training to all users of the system so that they
understand all potential hazards and know how to protect
themselves from injury.
• In many systems, during power up, the outputs may be in
an unknown state until they are properly initialized. Make
sure the design can tolerate this situation without causing
operator injury or hardware damage.
Connect
NOTE
To keep users safe, always read and follow all safety warnings
provided with each of the instruments in your system.
Install the instrument
The 4200A-SCS can be used on a bench or in a rack. See
the instructions that came with your rack-mount kit if you are
installing the 4200A-SCS in a rack.
Wiring the interlock
If you need voltages greater than ±40 V for testing, you
must add an interlock switch to the xture. This ensures
that hazardous voltages are not present when the exterior
enclosure of the xture is open. It also enables the
4200A-SCS to output higher voltages when the exterior
enclosure of the xture is closed.
When the safety interlock signal is asserted (the switch is
closed and the signal is connected to +12 V), all the voltage
ranges of the SMUs are functional. When the safety interlock
signal is not asserted (the switch is open), the 200 V range
on the SMUs is disabled, limiting the nominal output to
±40 V.
If you need voltages greater than ±40 V, you must also
connect the exterior of the test xture enclosure to protective
earth (safety ground). Take care to ensure that the wiring
(FORCE, GUARD, and SENSE) in the xture does not
electrically contact the exterior of the enclosure.
WARNING
The 4200A-SCS is provided with an interlock circuit
that must be positively activated for the high-voltage
output to be enabled. The interlock facilitates safe
operation of the equipment in a test system. Bypassing
the interlock could expose the operator to hazardous
voltage that could result in personal injury or death.
Asserting the interlock allows the SMU and preamplier
terminals to become hazardous, exposing the user to
possible electrical shock that could result in personal
injury or death. SMU and preamplier terminals should
be considered hazardous even if the outputs are
programmed to be low voltage. Precautions must be
taken to prevent a shock hazard by surrounding the test
device and any unprotected leads (wiring) with double
insulation for 250 V, Category 0.
There are low-voltage and high-voltage test xtures for the
4200A-SCS. Low-voltage xtures, such as the 8101-PIV, are
intended for applications that are less than ±40 V. For these
applications, an interlock is not needed.
High-voltage test xtures can be used with applications that
are greater than ±40 V. The test xture has a safety interlock
switch connected to its lid. When the lid is closed, the
interlock circuit is closed (asserted), and SMU ±200 V ranges
are enabled.
Conversely, the interlock circuit is open (de-asserted) when
the lid is open, and the SMU ±200 V ranges are disabled.
High-voltage test xtures require extra precaution to ensure
there are no shock hazards.
For correct operation with the 4200A-SCS, the test xture
should have a normally open switch that is used for the
interlock. An open interlock condition occurs when the switch
is open.
NOTE
For the examples shown in this quick start guide, you do not
need to use an interlock. The 4200A-SCS functions on all
current ranges and up to ±40 V without asserting the
interlock. When the interlock is not asserted, the maximum
voltage on the SMU and preamplier terminals is not
hazardous.
Connect
To connect the interlock cable:
1. Connect one end of the supplied interlock cable to
the rear panel of the 4200A-SCS. The location of the
rear-panel interlock connector is shown in the following
graphic.
2. Connect the other end of the connector to the test xture.
Test connections
If you are testing discrete devices, you need a test xture
that is equipped with 3-lug triaxial connectors. The 8101-PIV
test fixture, which is included with the 4200A-SCS-PKA,
allows the 4200A-SCS to be connected to a discrete device.
For connections to a probe station for wafer testing, see the
4200A-SCS Learning Center .
NOTE
The outer shield of the triaxial cables connects the 8101-PIV
to the 4200A chassis, which connects to common.
Connect a test xture and DUT to the
4200A-SCS
If you are using the supplied test xture, connect the
MOSFET and test xture as shown in this diagram.
Connect
Item Description Qty Notes
1 4200A-SCS Parameter Analyzer 1
2 4200-TRX Ultra-Low Noise Preamplier
Triaxial Cables
3 4200-MTRX 1 Ultra-low noise SMU triaxial cable (mini-triaxial,
4 TG-439 nMOSFET (DUT) 1 Plug into the test socket that is labeled DC ONLY
5 8101-PIV Component Test Fixture 1 With sample devices
6 4200-PA Remote Preamplier 1
7 4201-SMUs 2
2 Triaxial-to-triaxial cable that connects 4200-PA to a test
xture
connects 4201-SMU units to a test xture)
Power on the 4200A-SCS
CAUTION
WARNING
The 4200A-SCS operates from a line voltage of 100 V to
240 V at a frequency of 50 Hz or 60 Hz. Make sure the
operating voltage in your area is compatible.
Operating the instrument on an incorrect line voltage
may cause damage to the instrument, possibly voiding
the warranty.
The power cord supplied with the Model 4200A-SCS
contains a separate protective earth (safety ground) wire
for use with grounded outlets. When proper connections
are made, the instrument chassis is connected to
power-line ground through the ground wire in the
power cord. In addition, a redundant protective earth
connection is provided through a screw on the rear
panel. This terminal should be connected to known
protective earth. In the event of a failure, not using a
properly grounded protective earth and grounded outlet
may result in personal injury or death due to electric
shock.
Do not replace detachable mains supply cords with
inadequately rated cords. Failure to use properly rated
cords may result in personal injury or death due to
electric shock.
Connect
To power on the 4200A-SCS:
NOTE
1. Make sure the power is o. The power switch, on the
front panel in the lower right corner, is not lit when power
is o.
2. Plug the male end of the line cord into a properly
grounded ac line power receptacle.
3. Turn on the 4200A-SCS by pushing the power switch.
The switch is lit when power is on.
The instrument starts up.
When rst starting a Clarius+ application, you must answer
“Yes” to an on-screen license agreement. Answering “No”
makes your system nonfunctional until you reinstall the
software.
Change powerline frequency
NOTE
The default powerline frequency is set to 60 Hz. If the setting
is wrong, the 4200A-SCS cannot properly reject the
powerline measurement noise.
To change powerline frequency:
1. Close Clarius.
2. Run KCon.
3. From the System Configuration list, select 4200A-SCS.
4. Change the Powerline Frequency as needed.
5. Select Save .
Connect
Perform an I-V test on a MOSFET
The rst time Clarius opens, the project tree is displayed and
the default project is loaded. The next graphic shows the
tests in this project.
To work with a test:
1. Select vds-id (located under 4terminal-n-fet).
I-V Test
To congure the test:
1. Select Congure to open the pane shown here. This is
where you dene the test.
2. The vds-id settings should be:
• SMU3: Provide a voltage step function for four
dierent gate voltages (2 V, 3 V, 4 V ,and 5 V).
• SMU2: Perform a 51-point sweep of drain voltage (0 V
to 5 V) at each gate voltage. A current measurement
is made at each voltage sweep point.
3. Change the settings as needed.
4. Select Save .
Run the vds-id test
Clarius can run a single test or a sequence of tests.
To run a single test, check the test and select it in the project
tree. The test should be highlighted. When you select ,
only that test will run. For example, in the following graphic,
when you select , only the vds-id test will run.
In the following example, one test is run.
To run the vds-id test:
1. In the project tree, select vds-id to highlight it.
2. On the toolbar, select .
When the test is running, Run shows two arrows circling the
icon and Stop turns red:
When the test is complete, Run and Stop return to normal:
I-V Test
To run a sequence of tests, check the tests you want to run,
then check and select the device, subsite, or project item
that contains the tests.
For example, in the following graphic, when you click , all
the checked tests under 4terminal-n-fet run.
View the vds-id test results
To view vds-id test data, you can use the Analyze sheet,
which is similar to a Microsoft Excel spreadsheet, and the
graph.
To view vds-id test results:
1. Select Analyze.
2. Select an icon next to View to choose the type of
information you would like to see:
• Data and graph
• Data only
• Graph only
I-V Test
Export data or graphs
Test results are automatically saved in Clarius. You can also
choose to save the data, graph, or both to an external le.
To save your test data:
1. Select Save Data.
2. On the Save Test Data As dialog box, select one of the
following buttons:
• Save Sheet: Select this to save only the sheet.
• Save Graph1: Select this to save only Graph1
• Save Graph2 (if available): Select this to save only
Graph2.
• Save All: Select this to save the sheet and graphs.
Customize the graph
The graph shown below was customized to include the
Legend box and Title and to use dierent colors for the
graph series. These options are available through the Graph
Settings button.
To customize a graph:
1. Select Graph Settings.
2. To include a Legend and Title, select those options from
the Graph Settings menu.
3. To use dierent colors for the graph series, select
Graph Properties, then select Series. The Data Series
Properties dialog box is displayed.
4. Select the colors for each series of data.
5. Click OK. The series are displayed in the selected colors.
I-V Test
FAQs
How should I clean and use the front-panel display?
If you need to clean the front-panel LCD touchscreen display,
use a soft dry cloth. If necessary, use a microber cloth
dampened with an ammonia-free glass cleaner. Do not spray
cleaning uids onto the display. You can also use a mixture of
70% isopropyl alcohol and 30% water.
Do not use sharp objects, such as a screwdriver, pen, or
pencil, to touch the touchscreen. It is strongly recommended
to only use ngers to operate the instrument. Use of
clean-room gloves is supported for the touchscreen.
My data looks odd or is wrong. What should I do?
Verify the connections from the instrument to the test xture.
Also, check the connections from the DUT to the test xture
socket.
I cannot unplug the mini-triaxial cable (4200A-MTRX)
from the SMU. What should I do?
The mini-triaxial connector is a locking connector. To remove
it, pull the knurled part of the connector back.
A conguration error has been detected and I cannot
launch Clarius. What should I do?
This occurs when the physical conguration does not
match the conguration dened in KCon or when there are
communication problems between instruments and the
4200A-SCS.
The error can also occur if the preamplier or RPM is
removed or reconnected. Note that preampliers are SMU
specic. For example, a preamplier that is congured for
SMU1 cannot be connected to SMU2.
To verify system conguration:
1. Run KCon.
2. Select Validate.
To update the system conguration:
1. Run KCon.
2. Select Update.
FAQs and next steps
Next steps
See the 4200A-SCS Learning Center , which is
preinstalled on your system. Within the Learning Center, you
will nd instructional videos, PDFs, and HTML content. To
access the Learning Center, click Help in the Clarius menu,
press F1 while using Clarius, or select the desktop icon.
The 4200A-SCS Learning Center includes the following:
• Instructional videos: Contains basic and detailed
information about using the system that will help you
with the instrument.
• Clarius Manual: Provides comprehensive information
about projects, tests, data analysis, data calculation,
user libraries, and customizing Clarius.
• Hardware manuals for setup and maintenance,
source-measure units (SMUs), capacitance-voltage
units (CVUs), pulse-measure units (PMUs) and
pulse-generator units (PGUs), and prober and external
instrument control.
• Programming guides for the library LPT, Keithley
User Library Tool (KULT), and Keithley External Control
Interface (KXCI).
• Application notes: Detailed applications that
demonstrate specic applications.
• Datasheets: Technical data regarding the 4200A-SCS
and related accessories.
See tek.com/keithley for support and additional information
about the instrument.
Contact information: 1-800-833-9200
For additional contacts, see https://www.tek.com/contact-us
Find more valuable resources at TEK.COM.
Copyright © 2021, Tektronix. All rights reserved.
Tektronix products are covered by U.S. and
foreign patents, issued and pending. Information
in this publication supersedes that in all previously
published material. Specification and price change
privileges reserved. TEKTRONIX and TEK are
registered trademarks of Tektronix, Inc. All other
trade names referenced are the service marks,
trademarks, or registered trademarks of their
respective companies.
4200A-PKA-903-01 Rev. B August 2021
*P4200A-PKA-903-01B*
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