Tektronix 4200A-SCS User manual

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Model 4200A-SCS

Clarius

User’s Manual

4200A-914-01 Rev. D March 2023

tek.com/keithley

*P4200A-914-01D*

4200A-914-01D

Clarius

Model 4200A-SCS

User's Manual

Cleveland, Ohio, U.S.A.

Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,

without the prior written approval of Keithley Instruments is strictly prohibited.

All Keithley Instruments product names are trademarks or registered trademarks of Keithley

Instruments, LLC. Other brand names are trademarks or registered trademarks of their

respective holders.

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Document number: 4200A-914-01 Rev. D March 2023

Safety precaut ions

The following safety precautio ns should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous conditions may be present.

This product is intended for use by personnel who recogn ize sho ck haz ards and are familiar with the safety precautions required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer to the user documentation for complete product specifications.

If the product is used in a manner not specified, the protection provided by the product warranty may be impaired. The types of product users are: Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the

equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained. Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the

instrument. They must be protected from electric shock and contact with hazardous live circuits. Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line

voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to mains. These instruments will be marked as category II or higher.

Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains. Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test

fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test. ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.

When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard. Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)

connections. If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use

of a lid interlock.

screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.

If a

The

symbol on an instrument means caution, risk of hazard. The user must refer to the operating instructions located in the

user documentation in all cases where the symbol is mark ed on the instr u ment .

The

symbol on an instrument means warning, risk of electric shock. Use standard safety precautions to avoid personal

contact with these voltages.

The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.

The symbol indicates a connection terminal to the equipment frame.

If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly disposed of according to federal, state, and local laws.

The WARNING heading in the user documentation explains hazards that might result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.

The CAUTION heading in the user documentation explains h azard s that coul d dama ge the instrument. Such damage may invalidate the warranty.

The CAUTION heading with the

sy mbol in the user documentation explains hazards that could result in moderate or minor injury or damage the instrument. Always read the associated information very carefully before performing the indicated procedure. Damage to the instrument may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans. Before performing any maintenance, disconnect the line cord and all test cables. To maintain protection from electric shock and fire, replacement components in mains circuits — including the power

transformer, test leads, and input jacks — must be purchased from Keithley. Standard fuses with applicable national safety approvals may be used if the rating and type are the same. The detachable mains power cord provided with the instrument may only be replaced with a similarly rated power cord. Other components that are not safety-related may be purc ha sed from o ther suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley office for information.

Unless otherwise noted in product-specific literature, Keithley instruments are designed to operate indoors only, in the following environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.

To clean an instrument, use a cloth dampened with deionized water or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

Safety precaution revision as of June 2018.

Introduction .............................................................................................................. 1-1

Get started with Clarius ........................................................................................................ 1-1

Clarius interface ................................................................................................................... 1-2

Touchscreen basics .................................................................................................................. 1-3

Choose the project phase ......................................................................................................... 1-3

Run tests and set up your workspace ....................................................................................... 1-4

Organize items in the project tree ............................................................................................. 1-5

Select items from the libraries ................................................................................................... 1-6

Configure the project ................................................................................................................. 1-7

Analyze data ............................................................................................................................. 1-8

Messages .................................................................................................................................. 1-9

Help pane .................................................................................................................................. 1-9

Additional Clarius+ applications ........................................................................................... 1-9

Embedded computer policy ............................................................................................... 1-10

Projects and tests .................................................................................................... 2-1

Introduction .......................................................................................................................... 2-1

Set up a simple project......................................................................................................... 2-1

Select project components ........................................................................................................ 2-1

Add a device and test to the project .......................................................................................... 2-2

Rearrange items in the project tree ........................................................................................... 2-3

Delete objects in the project tree ............................................................................................... 2-4

Configure a simple test ........................................................................................................ 2-4

Set the key parameters ............................................................................................................. 2-6

Run a simple test ................................................................................................................. 2-7

Working with the Projects dialog .......................................................................................... 2-8

Open a project ........................................................................................................................... 2-8

Edit project information ............................................................................................................. 2-9

Create a new project from the Projects dialog......................................................................... 2-10

Export a project ....................................................................................................................... 2-10

Import a project ....................................................................................................................... 2-10

Copy or cut a project ............................................................................................................... 2-12

Show Directories ..................................................................................................................... 2-12

Delete a project ....................................................................................................................... 2-13

View Projects .......................................................................................................................... 2-13

Migrate projects from 4200-SCS systems ............................................................................... 2-14

Manage projects for multiple users ......................................................................................... 2-14

Set up a complex project.................................................................................................... 2-15

Customize tests ....................................................................................................................... 2-15

Link tests or actions ................................................................................................................ 2-18

Add actions ............................................................................................................................. 2-19

Example: Creating a project ............................................................................................... 2-20

Equipment required ................................................................................................................. 2-20

Device connections ................................................................................................................. 2-21

Set up the measurements in Clarius ....................................................................................... 2-22

Configure a complex test ................................................................................................... 2-29

Test and terminal settings ....................................................................................................... 2-29

Step or sweep multiple device terminals in the same test ....................................................... 2-30

Table of contents

Manual

Model 4200A-SCS Clarius User's

Configure actions .................................................................................................................... 2-32

Run a complex test ............................................................................................................ 2-32

Run devices and tests ............................................................................................................. 2-32

Monitor a test ..................................................................................................................... 2-36

Enable the Monitor option ....................................................................................................... 2-36

Running a test using Monitor................................................................................................... 2-37

Demo Project overview ...................................................................................................... 2-38

4-terminal n-MOSFET tests..................................................................................................... 2-39

3-terminal NPN BJT tests ........................................................................................................ 2-39

Resistor tests .......................................................................................................................... 2-40

Diode tests .............................................................................................................................. 2-40

Capacitor tests ........................................................................................................................ 2-40

Analyze data ............................................................................................................. 3-1

Introduction .......................................................................................................................... 3-1

Spreadsheet ......................................................................................................................... 3-2

Options on the Run worksheet .................................................................................................. 3-2

Run Settings .............................................................................................................................. 3-3

Run sheet .................................................................................................................................. 3-4

Formulas List of the Run worksheet .......................................................................................... 3-6

Terminal Settings pane (Analyze) ............................................................................................. 3-6

Module Settings pane (Analyze) ............................................................................................... 3-6

Measurement status .................................................................................................................. 3-7

Run History ........................................................................................................................ 3-10

Change the name of a test run ................................................................................................ 3-11

Delete test runs from Ru n History ........................................................................................... 3-12

Working with the Run History pane ......................................................................................... 3-13

Searching for a test run ........................................................................................................... 3-13

Add notes to a test run ............................................................................................................ 3-13

Copy the settings of a test run to the Configure screen .......................................................... 3-13

Setting the Run History size .................................................................................................... 3-14

Analyze test data for projects ............................................................................................. 3-14

Select data for the project-level Analyze pane ........................................................................ 3-15

Remove data from the project-level Analyze pane .................................................................. 3-16

Graph the data for test runs ............................................................................................... 3-16

Open a graph .......................................................................................................................... 3-16

Options on the graph ............................................................................................................... 3-17

View detail on a data point ...................................................................................................... 3-18

Customize the graph ............................................................................................................... 3-18

Save results and graphs .................................................................................................... 3-31

Customizing Clarius ................................................................................................ 4-1

Customize Clarius ................................................................................................................ 4-1

Add objects to the library...................................................................................................... 4-1

Add a test to the library ............................................................................................................. 4-2

Add a device to the Device Library ............................................................................................ 4-2

Add an action to the library........................................................................................................ 4-3

Add a project to the library ........................................................................................................ 4-3

Edit a library object you added .................................................................................................. 4-3

Edit an object in the library ........................................................................................................ 4-4

Project tree display options .................................................................................................. 4-6

Model 4200A

of contents

-SCS Clarius User's Manual Table

Messages display option ...................................................................................................... 4-6

My Settings .......................................................................................................................... 4-6

Specify environment settings .................................................................................................... 4-6

Specify run settings ................................................................................................................... 4-8

Set graph defaults ................................................................................................................... 4-10

Custom GPIB Abort Options ................................................................................................... 4-10

Logging ................................................................................................................................... 4-11

Tools................................................................................................................................... 4-11

Instrum ent Tools ..................................................................................................................... 4-12

Data Export tool ...................................................................................................................... 4-29

Defining the UTM user interface ............................................................................. 5-1

Define the user interface for a user test module (UTM) ....................................................... 5-1

Allow access to the UTM UI editor ....................................................................................... 5-2

Open the UTM UI Editor....................................................................................................... 5-3

Organize parameters into groups ........................................................................................ 5-4

Add a group............................................................................................................................... 5-5

Modify a group .......................................................................................................................... 5-7

Remove a group ........................................................................................................................ 5-7

Define an image for the user interface ................................................................................. 5-7

Edit the attributes for a test parameter ................................................................................. 5-8

Control types ........................................................................................................................... 5-10

Add parameters to a UTM for stepping configuration .............................................................. 5-28

Add verify rules for a UTM....................................................................................................... 5-29

Example of using the editor ............................................................................................... 5-30

UTM UI definition file information ....................................................................................... 5-32

Reset defaults .................................................................................................................... 5-32

Copy or move UTM UI definitions ...................................................................................... 5-32

Formulator ................................................................................................................ 6-1

Introduction .......................................................................................................................... 6-1

Open the Formulator ............................................................................................................ 6-2

Configure Formulator calculations ....................................................................................... 6-3

Formulator dialog ................................................................................................................. 6-3

Formula area ............................................................................................................................. 6-3

Data Series ............................................................................................................................... 6-3

Number pad .............................................................................................................................. 6-4

Functions................................................................................................................................... 6-4

Constants .................................................................................................................................. 6-4

Apply Set to ............................................................................................................................... 6-5

Using the Formulator options ............................................................................................... 6-5

Real-time functions, operators, and formulas ...................................................................... 6-6

Post-test-only functions and formulas .................................................................................. 6-6

Editing Formulator formulas and constants ......................................................................... 6-7

Table of contents

User's Manual

Model 4200A-SCS Clarius

Deleting Formulator formulas and constants ....................................................................... 6-8

Identify data analysis requirements ..................................................................................... 6-8

Determining the type of calculation: an example ....................................................................... 6-8

Determining range data for a calculation: an example .............................................................. 6-8

Creating an analysis formula ................................................................................................... 6-10

Adding an analysis formula to the test .................................................................................... 6-10

Executing an analysis formula ................................................................................................. 6-11

Viewing analysis results in the Analyze she et ......................................................................... 6-11

Viewing analysis results in the Analyze graph ......................................................................... 6-11

Formulator function reference ............................................................................................ 6-12

ABS Formulator function ......................................................................................................... 6-12

DELTA Formulator function ..................................................................................................... 6-13

EXP Formulator function ......................................................................................................... 6-13

LOG Formulator function ......................................................................................................... 6-14

LN Formulator function ............................................................................................................ 6-14

SQRT Formulator function ...................................................................................................... 6-15

Statistics ............................................................................................................................. 6-15

AVG Formulator function ......................................................................................................... 6-15

MAVG Formulator function ...................................................................................................... 6-16

MAX Formulator function ........................................................................................................ 6-16

MEDIAN Formulator function .................................................................................................. 6-17

MIN Formulator function .......................................................................................................... 6-17

STDEV Formulator function .................................................................................................... 6-17

Trigonometry ...................................................................................................................... 6-18

ACOS Formulator function ...................................................................................................... 6-18

ASIN Formulator function ........................................................................................................ 6-18

ATAN Formulator fu nction ....................................................................................................... 6-19

COS Formulator function ........................................................................................................ 6-19

DEG Formulator function ........................................................................................................ 6-20

RAD Formulator function ......................................................................................................... 6-20

SIN Formulator function .......................................................................................................... 6-21

TAN Formulator function ......................................................................................................... 6-21

Array ................................................................................................................................... 6-22

AT Formulator function ............................................................................................................ 6-22

DIFF Formulator function ........................................................................................................ 6-22

FINDD Formulator function ..................................................................................................... 6-23

FINDLIN Formulator function .................................................................................................. 6-23

FINDU Formulator function ..................................................................................................... 6-24

FIRSTPOS Formulator function .............................................................................................. 6-24

INTEG Formulator function ..................................................................................................... 6-25

INDEX Formulator function ..................................................................................................... 6-26

LASTPOS Formulator function ................................................................................................ 6-27

MAXPOS Formulator function ................................................................................................. 6-27

MINPOS Formulator function .................................................................................................. 6-27

SUBARRAY Formulator function ............................................................................................. 6-28

SUMMV Formulator function ................................................................................................... 6-28

Line fits ............................................................................................................................... 6-29

EXPFIT Formulator function .................................................................................................... 6-29

EXPFITA Formulator function ................................................................................................. 6-30

EXPFITB Formulator function ................................................................................................. 6-30

LINFIT Formulator function ..................................................................................................... 6-31

LINFITSLP Formulator function ............................................................................................... 6-32

LINFITXINT Formulator function ............................................................................................. 6-32

LINFITYINT Formulator function ............................................................................................. 6-33

LOGFIT Formulator function ................................................................................................... 6-34

LOGFITA Formulator function ................................................................................................. 6-35

Model 4200A

of contents

-SCS Clarius User's Manual Table

LOGFITB Formulator function ................................................................................................. 6-35

POLY2FIT Formulator function ............................................................................................... 6-36

POLY2COEFF Formulator function ......................................................................................... 6-37

POLYNFIT Formulator function ............................................................................................... 6-37

REGFIT Formulator function ................................................................................................... 6-38

REGFITSLP Formulator function ............................................................................................ 6-39

REGFITXINT Formulator function ........................................................................................... 6-39

REGFITYINT Formulator function ........................................................................................... 6-40

TANFIT Formulator function .................................................................................................... 6-41

TANFITSLP Formulator functi on ............................................................................................. 6-41

TANFITXINT Formulator functi on ............................................................................................ 6-42

TANFITYINT Formulator function ............................................................................................ 6-43

FFT ..................................................................................................................................... 6-43

FFT_R Formulator function ..................................................................................................... 6-44

FFT_I Formulator function ....................................................................................................... 6-45

FFT_FREQ Formulator function .............................................................................................. 6-45

FFT_FREQ_P Formulator functio n ......................................................................................... 6-46

IFFT_R Formulator function .................................................................................................... 6-47

IFFT_I Formulator function ...................................................................................................... 6-48

SMOOTH Formulator function ................................................................................................. 6-49

Misc .................................................................................................................................... 6-50

COND Formulator function ...................................................................................................... 6-50

Site and subsite operation ...................................................................................... 7-1

Introduction .......................................................................................................................... 7-1

Sites ..................................................................................................................................... 7-1

Subsites ............................................................................................................................... 7-2

Configure sites ..................................................................................................................... 7-2

Configure subsite cycling ..................................................................................................... 7-4

Connect devices for stress/measure cycling ............................................................................. 7-5

Connections for matrix card ...................................................................................................... 7-6

Connections for pulse card to device under test ....................................................................... 7-7

Connections for system hardware ............................................................................................. 7-8

Set up the Subsite Operation .................................................................................................... 7-9

Run an individual subsite ................................................................................................... 7-31

Run a single site ................................................................................................................. 7-32

Cycle a subsite ................................................................................................................... 7-33

Multi-site execution ............................................................................................................ 7-33

Delete All Run History in a project ..................................................................................... 7-34

Delete or dissolve a site and subsite ................................................................................. 7-34

Analyze data for subsites ................................................................................................... 7-35

Define output values for Analyze ............................................................................................. 7-36

Subsite Analyze sheet ............................................................................................................. 7-36

Subsite Run Settings ............................................................................................................... 7-39

Subsite Analyze graph ............................................................................................................ 7-39

Save subsite Analyze sheets and graphs ............................................................................... 7-45

User library descriptions ......................................................................................... 8-1

Introduction .......................................................................................................................... 8-2

Table of contents

User's Manual

Model 4200A-SCS Clarius

AVMControl user library ....................................................................................................... 8-2

AFG31000 user library ......................................................................................................... 8-2

BeepLib user library ............................................................................................................. 8-3

chargepumping user library ................................................................................................. 8-3

cvivulib user library ............................................................................................................... 8-4

cvucompulib user library ...................................................................................................... 8-4

cvuulib user library ............................................................................................................... 8-4

DLCP user library ................................................................................................................. 8-5

dmm-6500-7510-temp-ulib user library ................................................................................ 8-5

flashulib user library ............................................................................................................. 8-5

GateCharge user library ....................................................................................................... 8-6

generic_gpib_ulib user library .............................................................................................. 8-6

generic_visa_ulib user library .............................................................................................. 8-7

hivcvulib user library ............................................................................................................. 8-7

Hotchuck_Temptronics3010B user library ........................................................................... 8-8

Hotchuck_Triotek user library .............................................................................................. 8-8

HP4284ulib user library ........................................................................................................ 8-8

HP4294ulib user library ........................................................................................................ 8-9

HP8110ulib user library ........................................................................................................ 8-9

ki340xulib user library ........................................................................................................ 8-10

KI42xxulib user library ........................................................................................................ 8-10

KI590ulib user library ......................................................................................................... 8-10

KI595ulib user library ......................................................................................................... 8-11

ki622x_2182ulib user library .............................................................................................. 8-11

ki82ulib user library ............................................................................................................ 8-12

LS336ulib user library ........................................................................................................ 8-12

Matrixulib user library ......................................................................................................... 8-13

MultiSegmentSweep_ulib user library ................................................................................ 8-13

nvm user library .................................................................................................................. 8-13

OVPControl user library ..................................................................................................... 8-15

parlib user library ................................................................................................................ 8-15

pmuCompulib ..................................................................................................................... 8-15

pmuulib user library ............................................................................................................ 8-16

PMU_examples_ulib user library ....................................................................................... 8-16

PMU_freq_time_ulib user library ........................................................................................ 8-17

PMU_PCRAM_ulib ............................................................................................................. 8-18

Model 4200A

of contents

-SCS Clarius User's Manual Table

PRBGEN user library ......................................................................................................... 8-18

QSCVulib user library ......................................................................................................... 8-19

RPM_ILimit_Control user library ........................................................................................ 8-19

utilities_ulib ......................................................................................................................... 8-19

van der Pauw user library .................................................................................................. 8-20

VLowFreqCV user library ................................................................................................... 8-20

Winulib user library ............................................................................................................. 8-21

wlrlib user library ................................................................................................................ 8-22

Wafer-level reliability testing ................................................................................... 9-1

JEDEC standards ................................................................................................................. 9-1

Introduction .......................................................................................................................... 9-2

HCI and WLR projects ......................................................................................................... 9-2

Hot Carrier Injection projects ..................................................................................................... 9-3

Negative Bias Temperature Instability project ........................................................................... 9-4

Electromigration project ............................................................................................................ 9-5

Charge-to-Breakdown Test of Diele ct rics project ...................................................................... 9-6

HCI degradation: Background information ........................................................................... 9-6

Configuration sequence for subsite cycling ......................................................................... 9-7

V-ramp and J-ramp tests...................................................................................................... 9-8

V-ramp test: qbd_rmpv User Module ........................................................................................ 9-8

J-ramp test: qbd_rmpj User Module ........................................................................................ 9-13

Embedded computer policy .................................................... 1-10

In this section:

Get started with Clarius ............................................................ 1-1

Clarius interface ....................................................................... 1-2

Additional Clarius+ applications ............................................... 1-9

Get started with Clarius

Clarius is the primary application of Clarius+ and is the primary user interface for the 4200A-SCS. Clarius is a versatile tool that helps you characterize individual parametric test devices or automate testing of an entire semiconductor wafer. It allows you to create, execute, and evaluate tests and complex test sequences without programming.

Section 1

Introduction

The Clarius Software user interface provides touch-and-swipe or point-and-click control for advanced test definition, parameter analysis, graphing, and automation capabilities for modern semiconductor, materials, and process characterization.

Key features:

• Ready-to-use, modifiable application tests, projects, and devices that reduce test

development time

• Built-in measurement videos from world-wide Application Engineers in four languages

• Pin-to-pad contact check ensures reliable measurements

• Multiple measurement functions

• Data display, analysis, and arithmet ic funct ions

Section

User's Manual

1: Introduction Model 4200A-SCS Clarius

Clarius interface

The Clarius interface allows you to:

• Build and edit project and execution sequences.

• Configure tests.

• Execute tests and actions, such as switching matrix connections and prober movements,

including:

 A single test for one device (such as a transistor, diode, resistor, capacitor).  A test sequence for one device.  Test sequences for multiple devices. For example, test all the devices contacted by a prober

at a location on a semiconductor wafer.

 The test sequences of an entire project, which may include multiple prober touchdowns for a

single semiconductor die.

• View test and analysis results.

• Analyze test results using built-in parameter extr ac tion tools.

Figure 1: Clarius interface

1-2 4200A-914-01 Rev. D March 2023

Model 4200A

Introduction

-SCS Clarius User's Manual Section 1:

Touchscreen basics

You can operate the 4200A-SCS using the touchs cr ee n. Yo u c an us e your fin gers, clean room gloves, or any stylus manufactured for capacitive touchscreens.

To select and move on the screen:

• To scroll, swipe up or down on the screen.

• To select an item, touch it on the screen.

• To double-click an item, touch it twice.

• To right-click an item, touch and hold, then release to see the options.

To enter information, you can use the on-screen keyboard. Swipe from the left side of the display to open the keyboard.

The touchscreen uses standard Microsoft actions, refer to the Microsoft help information, available from the on-screen keyboard window menu option Tool > Help Topics.

Windows® touch actions. For additional information on the

You can also adjust the touch settings using the Pen and Touch options in the Windows Control Panel.

Choose the project phase

The options on the left side of the top pane of Clarius determine which phase of the project you are working on and allow you to select options to support your tests.

Select displays the libraries, which you can use to add existing projects, tests, devices, actions, and wafer plans to your project. You can also create your own tests, actions, and projects.

Configure displays the parameters for the item you selected in the project tree. For example, if you selected a test, the parameters for each terminal of the test and the entire test are available.

Analyze displays the results of the test in a spreadsheet and graph. You can also access analysis tools to explore and export your data.

Figure 2: Select, Configure, and Analyze

4200A-914-01 Rev. D March 2023 1-3

Section

User's Manual

1: Introduction Model 4200A-SCS Clarius

Run tests and set up your workspace

Figure 3: Clarius run test and workspace options

The options on the right side of the top pane of Clarius include options that allow you to run tests, configure instruments, manage projects, set up your workspace, and learn about the 4200A-SCS.

Run runs the highlighted item. You can run an individual test by highlighting only that test. You can run all the tests for a dev ice, s ubs ite , s ite, or pr oj ect by highlighting the dev ice, subs ite , s ite, or pr oj ect . Only items that are checked and below the selected item in the hierarchy are run.

Stop stops all running items. Save saves the project configuration. Tools provides module-specific tools and data export options. For source-measure units (SMUs), you

can run autocalibration. For capacitance-voltage units (CVUs), you can set up connection compensation, do real-time measurements, and perform a confidence check. For pulse measure units (PMUs) and pulse generator units (PGUs), you can set up connection compensation. The Data Export options allow you to export Run History data files to Microsoft Excel.

Use Projects to manage your projects. It includes options to create, import, export, copy, cut, paste, edit, and delete projects. Projects are automatically stored in Projects when you create them in the project tree.

Use My Settings to customize Clarius to better meet your needs. You can change environment settings, run settings, GPIB abort settings, and error and warning logging. It also includes the About Clarius option, which lists the Clarius version and copyright information.

Use the Learning Center to access complete 4200A-SCS documentation, incl ud ing on lin e help , videos, instructions, application notes, white papers, and other materials to help you use your 4200A-SCS.

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Organize items in the project tree

The project tree on the left side of the Clarius window displays the items in your project, including devices, tests, actions, and sites. The project tree for the default project is shown in the figure below.

The settings for the item you select in the project tree are displayed when you select Configure from the top bar. The test data for the item is displayed when you select Analyze.

When you run a test, the item that is highlighted runs. If the item is a project, site, subsite, or device, all checked items in the hierarchy below the highlighted item run.

Figure 4: Project tree for the default project

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Select items from the libraries

When you choose Select, the center pane displays libraries of tests, devices, actions, wafer plans, or projects that you can add to the project tree. These libraries are templates that you can copy from to create your own tests, devices, actions, wafer plans, and projects. When you copy an item from the library to the project tree, the item in the project tree is a copy. The item in the library is not affected by any changes you make to the copy.

The Test Library contains predefined tests. The predefined tests contain detailed definitions that tell Clarius how to characterize a device, including associated data analyses and parameter ex trac tions . Clarius comes with a library of tests for commonly used devices, including transistors, diodes, resistors, and capacitors. You can also create your own tests. The following figure shows the Test Library.

Figure 5: Test library

The Device Library contains the devices that need to be characterized, such as transistors, diodes, resistors, or capacitors. Each test must be in the project tree under a device. The devices available in the library include the standard set of devices that come installed on the 4200A-SCS and any custom-name devices that you have submitted; refer to Submitting devices to a library (on page 4-2

The Action Library contains items that support the tests and help control the project. Actions can generate dialog boxes to prompt test operator action, control prober movements, and manage switching. You can also create your own actions from user libraries.

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The Wafer Plan Library contains sites and subsites. A site is used if you are testing a repeating pattern of dies and test structures on a wafer. Every wafer location that a prober can move to and contact at any one time is a subsite. There are typically multiple subsites for each site. Subsites typically correspond to a single test structure or other combination of devices that are tested as a group.

The Project Library contains predefined projects. Projects include the devices, tests, actions, sites, and subsites organized for testing a single device, group of devices, or wafer. You can also create your own empty project.

For most of the libraries, the right pane displays filters that you can use to reduce the list of library items to the items you need. You can also use the Search option at the top of the library to type a search term to reduce the number of items.

You can sort the libraries by name or title. The Image and Description options at the top of the library allow you to turn the images and

descriptions that are shown in the library on or off. Turning them off allows more items to be visible on the screen.

Import allows you to import items into the 4200A-SCS.

Configure the project

Select Configure for an item in the project tree to display the settings for that item. Depending on the item, settings are available in the center and right panes. Help for the selected item is also available in the Help pane.

Figure 6: Configure pane for the pulse-vds-id test

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Analyze data

When you run tests, you can display and analyze test results and test definitions in the Analyze pane. The Analyze pane displays data in a spreadsheet and as a graph.

The View options change the view from both spreadsheet and graph to only the spreadsheet or only the graph. You can use Save Data to save the graph to an image file or save the data into a spreadsheet file.

If the Formulator was used to calculate data for this test, the Run Formulas List displays the calculations. You can select Formulator to open the Formulator and edit the formulas or create new ones.

The Graph Definition Menu and other options on the graph allow you to change the display of the data.

The Run History pane on the right displays the time and name of each test run. When you select a run from Run History, the sheet and graph in the center pane change to show the data from that test run.

The Terminal Settings pane, also on the right, displays the settings for the presently selected test run.

Figure 7: Analyze showing the vds-id test

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Help pane

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Messages regarding the test and execution are displayed at the bottom of the Clarius window. To expand the Messages area to view more detail, select the up arrow to the left of the Messages heading.

You can right-click a message to copy it or to select and copy all messages to the clipboard. You can also right-click and select Clear All to remove the existing messages.

The Help pane displays information that is related to the library item or project tree item that is selected.

If you have the Select pane open, the help describes the item that is selected in the Library. If you have the Configure or Analyze pane open, the help describes the item that is selected in the

project tree.

Additional Clarius+ applications

Two of the Clarius+ applications support Clarius:

• The Keithley User Library Tool (KULT) allows you to create libraries of test modules using the C

programming language. These test modules are executed by Clarius.

• The Keithley Configuration Utility (KCon) manages the configuration and interconnections

between the test system components that are controlled by Clarius.

To control the 4200A-SCS remotely using an external GPIB controller, you can use another Clarius software tool, the Keithley External Control Interface (KXCI). You cannot run KXCI and Clarius simultaneously.

To configure and control the optional pulse cards, you can use the Keithley Pulse tool (KPulse). A pulse card is a dual-channel pulse card that is integrated inside the 4200A-SCS mainframe. Although KPulse can be launched at the same time as Clarius, KPulse and Clarius cannot communicate with hardware simultaneously.

For information about these applications, refer to:

• Model 4200A-SCS KULT and KULT Ext ensi on Progr a mm ing (4200A-KULT-907-01)

• “Keithley Configuration Utility (KCon)” in Model 4200A-SCS Setup and Maintenance

• Model 4200A-SCS KXCI Remote Control Programming

• “KPulse (for Keithley Pulse Cards)” in the Model 4200A-SCS Pulse Card (PGU and PMU)

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Embedded computer policy

If you install software that is not part of the standard application software for the 4200A-SCS, the nonstandard software may be removed if the instrument is sent in for service. Back up the applications and any data related to them b efore sending the instrument in for service.

Do not reinstall or upgrade the Microsoft® Windows® operating system (OS) on any 4200A-SCS unless the installation is performed as part of authorized service by Keithley Instruments. Violation of this precaution will void the 4200A-SCS warranty and may render the 4200A-SCS unusable. Any attempt to reinstall or upgrade the operating system (o ther than a Windows service pack update) will require a return-to-factory repair and will be treated as an out-of-warranty service, including time and material charges.

Although you must not attempt to reinstall or upgrade the operating system, you can restore the hard drive image (complete with the operating system) using the Acronis True Image OEM software tool, described in “System-level backup and restore software” in Model 4200A-SCS Setup and Maintenance.

You can install Windows quality updates. The version of Windows installed on 4200A-SCS systems only supports installation of quality updates. Feature updates are not supported.

As shipped, the 4200A-SCS automatically runs Windows quality updates when the 4200A-SCS is restarted. They are prevented from occurring during operation.

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Section 2

Projects and tests

In this section:

Introduction .............................................................................. 2-1

Set up a simple project ............................................................. 2-1

Configure a simple test ............................................................ 2-4

Run a simple test ..................................................................... 2-7

Working with the Projects dialog .............................................. 2-8

Set up a complex project ........................................................ 2-15

Example: Creating a project ................................................... 2-20

Configure a complex test ....................................................... 2-29

Run a complex test ................................................................ 2-32

Monitor a test ......................................................................... 2-36

Introduction

This chapter describes how to set up projects and tests in Clarius.

Set up a simple project

To start testing, you can start with a new project or use an existing project. A project consists of items such as devices and tests.

The order of operations of a test is determined by the order and selection of items in the project tree. The following topics describe how to set up and run a simple project using an existing project from the

Project Library.

Select project components

Use the Select pane to add items to the project tree. When Select is active, the center pane contains libraries for tests, devices, actions, wafer plans, and projects. You can use filters and search options to help you find the items you need for your test.

To clear filters, select Clear Filters at the bottom of the Filters pane. To clear the search, select Clear next to the Search button.

The following example shows you how to select tests for bipolar junction transistors (BJTs).

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To set up a test of BJTs:

1. Select Save to save your existing project.

2. Choose Select.

3. Select the Projects tab.

4. In the Filters pane, select Transistor.

5. In the Search box, type BJT and select Search. The Project Library displays projects that are intended for BJT transistor testing.

6. Select Create for the project you want to open. The project replaces the previous project in the project tree.

Figure 8: Filter and search for the bjt project

Add a device and test to the project

You can add additional items to a project. When you add a project from the library to the project tree, it is copied from the project in the library. Any changes you make do not affect the original project. The new project in the project tree is automatically stored in Projects.

This example shows you how to add a predefined test to the project. Predefined tests are configured with commonly used parameter settings and a set of typical data. Once they are in a project, you can change the parameters as needed. They can be an efficient way for you to add a test to your project.

You can use the basic procedure described here to find any items in the library.

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To add a four-terminal MOSFET device and test to the project:

1. In the center pane, select Tests.

2. In the Filters pane, select Transistor and 4 Terminals.

3. In the search box, type MOSFET and select Search.

4. Scroll to the MOSFET Drain Family of Curves (vds-id) test.

5. Select Add. The selected test and the device are added to the project tree under the previous item that was highlighted.

6. To move the device and test, drag the device to a new location.

7. Select Save.

Figure 9: Add a MOSFET test and device to the project

If the device for a test is not in the project tree, Clarius adds the appropriate device when you add a test to the project tree. You can also add the device and test separately.

Rearrange items in the project tree

To rearrange items in the project tree, drag the items to the new location. If the item cannot be placed in the selected location, a red X is displayed. In the example below, a resistor test cannot be placed under a BJT device.

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Figure 10: Object not allowed at this location in the project tree

For actions, if they are at the bottom of the project tree, you can promote or demote them to move them in the tree structure. For example, if the action is under a device, you might want to move it to be at the project level. To promote or demote an action, right-click the action and select Promote

Action or Demote Action.

Delete objects in the project tree

If you delete an object, other items may also be deleted. For example, if you delete a subsite , all device and tests in the subsite are also deleted. If you delete a device, all tests in the device are deleted.

To delete an object:

1. In the project tree, select the item you want to delete.

2. Select the object.

3. Select Delete at the top of the project tree. A confirmation message is displayed.

4. Select OK.

Configure a simpl e test

Use the Configure pane to set up your test. For interactive test modules (ITMs), the Configure pane displays a schematic of the test device. The schematic is connected to an object that shows the operation mode and the type of instrument that is connected to the terminal.

The following topics discuss the Test Settings pane for interactive test modules (ITMs). For tests that are based on user modules (UTMs), you use the options in the Test Settings pane to select the User Library and User Module for the test. Refer to Create a custom test (on page 2-17

) for information on

settings available for UTMs.

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The connections selected in the Clarius software must accurately reflect the physical hardware connections when the test i s executed. Incorrect terminal configurations can result in anomalous test results and device damage .

The key parameters for each terminal are displayed near the terminal. The key parameters include:

• The type of terminal, such as gate, drain, source, or collector.

• The instrument that is attached to the terminal. You assign the instrument, ground unit, or open

circuit that is physically connected to the terminal during the test.

• The operation mode and basic settings for that mode. For example, the start and stop values are

displayed if a sweep operation mode is selected.

Figure 11: Configure pane

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Set the key parameters

The Key Parameters are the most commonly used parameters. The parameters that are available depend on the instrument that is selected. For descriptions of

parameters, refer to:

• “SMU - all parameters” in Model 4200A-SCS Source-Measure Unit (SMU) User's Manual

• “CVU - all parameters” in Model 4200A-SCS Capacitance-Voltage Unit (CVU) User's Manual

• “PMU - all parameters” in Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual

To set the Key Parameters:

1. Select the field that you want to change.

2. If there is a:

 Down arrow to the right of the field: Select a value from the list.  Field: Type the value. Error messages are displayed if you type an out-of-range value.  Checkbox: Select or clear the checkbox to enable or disable an option.

3. Select Save.

Figure 12: Clarius selection options

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Run a simple test

When you select Run, selected tests and actions at a lower level than the highlighted item in the project tree are executed from top to bottom in the project tree. If you want to run an entire project, make sure the project name is highlighted. Running a project saves the configuration settings and the existing run history of the project.

In the following example, when you select Run, the following occurs:

• The vce-ic test runs.

• The gummel test runs.

• The vcsat test is skipped.

• The vds-id test runs.

Figure 13: Run a test at the project level

In the following example, only the gummel test runs. Even though the other tests are selected, they are not below the gummel t es t in the hierar chy .

Figure 14: Run specific tests

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To run a test in Clarius:

1. In the project tree, select that tests and actions that you want to run or execute.

2. Highlight the item where you want the test to start. For example, if you want to run the entire project, select the project.

3. Select Run.

4. Select Analyze to view the res ults.

To abort a test, select Stop. All test and action execution stops immediat ely .

Working with the Projects dialog

The Projects option in the Clarius ribbon allows you to work with the projects you have created. Projects from all user accounts and any projects added to the project directory, which is defined in My Settings, are available.

You can use the Projects dialog to create new projects, import and export projects, and to copy, cut, paste, edit, delete, search for, and open projects.

To change the project directory, see My Projects Directory (on page 4-8).

Open a project

Your projects are automatically added to the Projects dialog when they are added to the project tree. This procedure describes how to retrieve a project.

To open a project:

1. Choose Projects from the ribbon.

2. Type the project name in the Search box.

3. Select Search.

4. Select the project.

5. Select Open Project. If the project in the project tree has unsaved changes, you are prompted to save the changes.

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Displays the changes you make as they will appear in the library.

Type the new name. This is the name that is used in the library and the project tree.

Type the title. This is used in the library.

Project Information Editor.

Cannot be changed. This is the help file that is displayed in the right pane when the library.

The image that is displayed in the library. Select the image to choose a different image.

To leave the image area blank, select Clear.

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Edit project information

You can edit information that is displayed in the Project Library for a specific project. You can also edit the filters and keywords that are used.

To edit project information:

1. In Clarius, select Projects from the ribbon.

2. Select the project to be edited.

3. Select Edit. The Project Infor mat ion Ed itor ope ns .

4. In the Basic tab, complete the information as needed. Refer to the following table for the options.

5. Select the Filters tab. These options set the filters that will cause this item to appear in the library when you select the right-pane filters.

6. Select the filters that help a user find this item in the library.

7. Select the Keywords tab. These options determine what you can type in the library Search field to locate this item. You can use the Sort By options at the bottom of the lists to change the order of the entries in the Information Editor. It does not affect the order in the library.

8. Drag a keyword from the left to the right to add a keyword.

9. To remove a keyword, select the keyword and select Delete. This does not remove the keyword from the Global Keywords list.

10. To add a keyword, select New and type the keyword.

11. Select OK to save the changes.

Options in the Information Editor Preview Name Title Description Author

Help

Library Image

Type a brief description of the item. This is displayed in the library. Type information that identifies who created this item. This is available only through the

Configure or Analyze is selected. It is also displayed when the item is selected in

Images should be 400x400 pixels in png format. Larger images display, but anything larger than 400x400 is cut off in the library display. To re-use an image from an o lder project, you may need to save the existing bmp image to png format. You can use a tool such as Microsoft® Paint to convert the image.

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Create a new project from the Projects dialog

You can create a new project from the Projects dialog. This is the same as creating a new empty project using the Project Library "New Project" option.

To create a new project:

1. Open Projects from the ribbon.

2. Select New. A confirmation message is displayed.

3. Select Yes. The new project opens in Clarius and the existing project is closed. The Projects dialog closes.

4. In the project tree, select Rename to assign a new name to the project.

5. Press Enter to accept the new name.

Export a project

You can export a project. An exported project can be imported into another 4200A-SCS. The export includes all Run History data for each test in the project. The exported file has the extension .kzp.

To export a project:

1. In Clarius, select Projects from the ribbon.

2. Select the project to be exported.

3. Select Export. The Export Project dialog opens.

4. Select the location for the exported file. You can right-click to create a new folder, rename an existing folder, or delete a folder.

5. If you are exporting data for import into a version of Clarius that is prior to version 1.12, select Export run data in prior to Clarius 1.12 format.

6. Select Export.

Import a project

You can import a project from another 4200A-SCS. You can import either an exported project or a project directory. Exported projects have the extension kzp. Refer to Export a project (on page 2-10

) for instructions.

If you are importing a project directory, you import the kpr file from that directory. The import includes all files from the project directory, assuming that the project directory is valid.

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Displays the changes you make as they will appear in the library.

Type the new name. This is the name that is used in the library and the project tree.

Type the title. This is used in the library.

Type a brief description of the item. This is displayed in the library.

Type information that identifies who created this item. This is available only through the

Only editable when adding an object from the project tree to the library. This is the help displayed when the item is selected in the library.

The image that is displayed in the library. Select the image to choose a different image.

To leave the image area blank, select Clear.

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Make sure that the files that you are importing are not set to read-only or run-only.

If you are importing a project from a 4200-SCS, see Migrate projects from 4200-SCS systems (on page 2-14).

To import a project:

1. In Clarius, select Projects.

2. Select Import. The Import Project dialog opens.

3. Select the exported project (kzp) or project directory (kpr).

4. Select Import. The Project Information Edit or opens .

5. In the Basic tab, complete the information as needed. Refer to the following table for the options.

6. Select the Filters tab. These options set the filters that will cause this item to appear in the library when you select the right-pane filters.

7. Select the filters that help a user find this item in the library.

8. Select the Keywords tab. These options determine what you can type in the library Search field to locate this item. You can use the Sort By options at the bottom of the lists to change the order of the entries in the Information Editor. It does not affect the order in the library.

9. Drag a keyword from the left to the right to add a keyword.

10. To remove a keyword, select the keyword and select Delete. This does not remove the keyword from the Global Keywords list.

11. To add a keyword, select New and type the keyword.

12. Select Add Project to add the new object to the library.

13. To open the new project, select the project and select Open Project.

Options in the Information Editor Preview Name Title Description Author

Help

Project Information Editor.

file that is displayed in the right pane when Configure or Analyze is selected. It is also

Library Image

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Copy or cut a project

You can copy or cut a project. The new project does not maintain any links to the old project. Changes to the new project do not affect the old project and changes to the old project do not affect the new project.

To copy a project:

1. Select Projects from the ribbon.

2. Select the project to be copied.

3. Select Copy or Cut.

4. Select Paste.

5. If you are copying a file, to:

 Copy the project and load it as the active project: Select Copy and Load.  Copy the project only in Projects: Select Copy Only.

Show Directories

To display projects in a Microsoft File Explorer view, you can select Show Directories in the Projects dialog box.

Figure 15: Show Directories pane

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When Show Directories is selected, you can right-click in the directory to add new folders, rename folders, or delete folders.

Figure 16: Show Directories open

Delete a project

Before deleting a project, ensure that you and others will not need it in the future.

When you delete a project, all files associated with the project in the project directory that is set in My Settings are also deleted. If the deleted project is open in the project tree, the project tree is cleared.

To delete a project:

1. Select Projects.

2. Select the project.

3. Select Delete. A confirmation message is displayed.

4. Select Yes.

View Projects

You can change the view of the Projects window. To:

• Change the sort order: Select an option from the Sort By list.

• Search for a specific project: Type a keyword from the name or title of the project (descriptions

are not searched) and select Search to display only the projects that match the keyword.

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Migrate projects from 4200-SCS systems

You can use information from older 4200-SCS systems in the 4200A-SCS. When you bring in information from the 4200-SCS, be aware:

• Copy all the files in the project directory for the project. Make sure the files in the project are kept

together when you copy the files. By default, projects are stored in the C:\s4200\kiuser\Projects directory.

• If you used Segment Arb waveform files from KPulse in your projects, you need to manually copy

and paste the waveform files from the 4200 to the 4200A-SCS. Segment Arb waveform files have the extension .ksf and are normally stored in the folder C:\s4200\kiuser\KPulse\SarbFiles.

• If your project contains user modules or user libraries that were created in KULT, those user

modules are not included when you copy the project directory. See Model 4200A-SCS Parameter Analyzer KULT and KULT Extension Programming, “Copy user libraries and files” for instructions on how to import the user libraries and user modules.

• Make sure the files to be imported are not set to read-only or run-only.

• Initialization steps and termination steps will be converted to actions.

• Data that was appended in the 4200-SCS is stored as separate test runs in the Run History tab in

the 4200A-SCS.

You cannot migrate from a 4200A-SCS to a 4200-SCS.

To migrate a project from a 4200-SCS system:

1. On the 4200-SCS system, copy the directory for the project you want to transfer.

2. On the 4200A-SCS, paste the project directory in C:\s4200\kiuser\Projects.

3. Open Clarius.

4. Select the Projects tab.

5. Verify that the project is available. If you sort by Last Accessed, the imported projects are displayed at the bottom of the project list.

Manage projects for multiple users

You cannot use multiple directories for the 4200A-SCS. If you have multiple users that are using one 4200A-SCS, you can use options in the Project dialog

and Library Information Editor to assign unique keywords to each project. These keywords can be used in the library and project search fields to locate your projects. For information on adding keywords through the Projects dialog, refer to Edit project information (on page 2-9 on adding keywords to projects that are added to the library, refer to Edit a library object you added (on page 4-3).

). For information

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When adding projects, you can also assign project names that help you identify the project. You can also use the import, export, and delete features in the Projects dialog to manage

multiple users.

To use import, export, and delete to manage pr o jects, each user will:

1. Create and use a project.

2. When work is complete, in Projects, export the project. Refer to Export a project (on page 2-10

3. Delete the project from Projects. Refer to Delete a project (on page 2-13).

4. If you need to use the project again, import the project into the 4200A-SCS. Refer to Import a

project (on page 2-10).

Set up a complex project

Set up a simple project (on page 2-1) describes how to set up a project with devices and tests for

those devices. However, if your system includes wafers, external equipment, or custom tests, you need to add additional items to your project tree to accommodate them.

You can include the following operations and objects in the project:

• Custom tests or actions.

• Switch matrices to cycle electrical connections from the 4200A-SCS between the devices of a

subsite. Refer to “Using Switching Matrices” in Model 4200A-SCS Prober and External Instrument Control for detail.

This section describes how to add custom tests and actions to Clarius and to the project tree.

For information on adding, duplicating, and importing projects, refer to Working with the Projects

dialog (on page 2-8).

Customize tests

There are two types of tests in Clarius:

• Interactive Test Modules (ITM): Predefined tests that you can select and configure through the

Clarius interface. They are used exclusively for parametric testing. You can create blank ITMs in Clarius that you can customize.

• User Test Module (UTM): A test that is based on a user module. Once the user module is

incorporated into a tes t or a c tion in C lari us , you c a n s el ect and c onfigure it in the Clarius int er fac e . In addition to controlling tests, UTMs can control internal instrumentation or external instrumentation that is connected through the GPIB bus or RS-232 port. They can also be used for other tasks in the project, such as displaying prompts for test operators.

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User modules are created in Keithley User Library Tool (KULT). Clarius+ comes with many predefined user modules, organized into user libraries. Refer to User library descriptions (on page 8-1 descriptions of the pre-built user libraries and modules. You can also use KULT to create your own user modules or modify the source code for a module supplied by Keithley Instruments. Refer to Model 4200A-SCS KULT and KULT Ex tensi on Pr ogra mm ing (4200A-KULT-907-01) for detail.

Both ITMs and UTMs share common data analysis functions, such as the Analyze spreadsheet and graph.

You can customize tests in the following ways:

• Start with a predefined test and modify it.

• Start with a blank ITM test and modify it.

• Start with a blank UTM test, define the user module, and modify it.

After modifying a test, you can save it to the test library as a predefined test that can be used in other projects.

Modify a predefined test

) for

You can modify an existing test that you added using the steps in Add a device and test to the project (on page 2-2).

Settings that you make to a test that is in the project tree are stored with the project. If you need to return to the settings of the test that is in the library, you can add the test from the library again.

Create a custom ITM

You can create a custom interactive test module (ITM) in Clarius. You do not need to create any external files (such as user modules) to create a custom ITM.

When you create a blank ITM, the number of terminals in the new test are determined by the type of device the test is placed under.

To create an ITM custom test:

1. Choose Select.

2. Highlight a device in the project tree or add a device.

3. If you need to add a device, open the Devices tab and select a device.

4. Select the Tests tab.

5. In the Test Library, select Custom Test.

6. Select Add a blank test that can be configured into a DC, Pulse, or CV test (ITM).

7. Drag Custom Test to the project tree. The test has a red triangle next to it to indicate that it is not configured.

8. Select Rename.

9. Type a name for the test and press Enter.

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10. Select Configure to set up the test.

11. Select the instrument.

12. Configure the options as needed.

13. For each device terminal, ensure that the physical device connections match the device connections defined in Clarius. If necessary, shut down the instrumentation and correct the physical connections.

Physical device-terminal connections must accurately match virtual connections to avoid inaccurate test results and potential device damage.

The options that are available depend on the instrument that is selected. For descriptions of parameters, refer to:

• “SMU Test Settings” in the Model 4200A-SCS Source-Measure Unit (SMU) User's Manual

• “CVU Test Settings” in the Model 4200A-SCS Capacitance-Voltage Unit (CVU) User's Manual

• “PMU Test Settings” in the Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual

Create a custom UTM

User test modules (UTMs) are created from user modules. Many user modules are provided with the 4200A-SCS in the user libraries. You can also create your own user modules. For information on creating your own user modules, refer to Model 4200A-SCS KULT and KULT Extension Programming (4200A-KULT-907-01).

You can use one user module for multiple UTMs. Each instance of the user module is treated separately.

Data generated by a UTM is displayed in the Analyze sheet and graph.

When you are building a project, it may be convenient to add all new UTMs first without immediately connecting them to user modules. This allows you to focus on project structure without being distracted with configuration details. To add a UTM without connecting it to a user modules, stop the following procedure after renaming the test.

To create a UTM:

1. Choose Select.

2. Select the Tests tab.

3. For the Custom Test, select Choose a test from the pre-programmed library (UTM).

4. Drag Custom Test to the project tree. The test has a red triangle next to it to indicate that it is not configured.

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5. Select Rename.

6. Type a name for the test.

7. Select Configure.

8. In the right pane, from the User Libraries list, select the user library that contains the user module that contains the test.

9. From the User Modules list, select the user module.

10. Enter the parameters in the Configure pane. Refer to the Help pane for descriptions of the options in the UTM.

11. You can use the Formulator to do calculations on the test results. See Formulator (on page 6-1 for additional information.

12. If you are working with a subsite, select Output Values to specify output values to export into the subsite datasheet.

13. You can edit the user interface (UI) of the UTM. Refer to

module (on page 5-1) for instruction.

Link tests or actions

You can use the Linked Copy option to insert multiple instances of test or action in the project tree. When ITMs are linked, Clarius automatically keeps the configurations of the linked ITMs identical. This allows you to have multiple tests that perform identically. When UTMs or actions are linked, the user libraries, user modules, Formulator formulas and constants are identical. Note that parameter settings are not identical for linked UTMs or actions.

When tests are linked, the tests in the project tree display a chain-link icon, as shown in the following figure.

)

Define the user interface for a user test

Figure 17: Linked ITMs in the project tree

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When using linked copies:

• For ITMs, the settings in the Configure pane (including Formulator formulas and Output Values)

are kept in synchronization. When you change a setting in once instance of a linked test, all the linked tests are changed.

• For UTMs and actions, the user libraries, user modules, Formulator formulas and constants, and

Output Values are identical between the tests. Parameter settings can be different.

• The data for each linked test remains independent. The Analyze sheet, graph, and graph settings

for each linked test are different.

If you migrated projects from a 4200, project components that were linked with Unique IDs (UIDs) are converted to linked tests or actions in Clarius.

To insert linked tests:

1. Add a test to the project tree (refer to Add a device and test to the project (on page 2-2) or

a custom test (on page 2-17)).

2. Right-click the test and select Linked Copy.

3. Select an item in the project tree that you want the test to follow. The item is highlighted in green if this is a valid place to copy the test. It is red if you cannot copy the test to this location.

4. Select Paste. The linked test is added to the project tree.

You can create multiple linked copies of tests by using Linked Copy at the device or subsite level. In this case, all ITMs associated with the device are copied with the new device and become linked copies of the tests in the original device. UTMs are copied as independent tests or actions. Note that the devices and subsites do not become linked copies, only the ITMs.

Add actions

Actions allow you to move probers, add user notifications such as beepers and dialog boxes, and change switching options. You can add existing actions or create actions based on user modules. When you create an action, you select a user module from a user library to create the action. Clarius supplies user libraries, or you can create your own using KULT.

Create

If you are moving from 4200 KITE to 4200A Clarius, actions replace initialization and termination steps. Actions are more versatile than initialization and termination steps. You can place them in the project wherever they are needed instead of being limited to the top and bottom of the project.

To add an action to the project tree, drag it into the tree where the action needs to occur during the test. For example, if you need to sound a beep after a specific test, drag the Beeper action to the project tree under that test.

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To create an action:

1. Choose Select.

2. Select the Actions tab.

3. Drag Custom Action to the project tree. The action has a red triangle next to it to indicate that it is not configured.

4. Select Rename.

5. Enter a name for the action.

6. Select Configure.

7. In the Test Settings pane, select the user library.

8. Select the user module.

9. Set other settings as needed. Refer to the Help pane for information.

Example: Creati ng a project

This section provides an example of how to create a new blank project and configure a new blank test. You will create a test to be performed on a MOSFET, but the procedure is general and can be applied to different devices and applications.

The default settings used for the devices, tests, and projects in Clarius are generally sufficient to produce usable data when executing a test. However, you may have additional settings you want to apply when you configure your measurements.

Equipment required

• One 4200A-SCS, with the f ollowi ng ins trum ents :

 Two medium power (4200-SMU or 4201-SMU) or high power (4210-SMU or 4211-SMU)

SMUs

 Two 4200-PAs

• Three 4200-TRX-2 or 4200-MTRX-2 triaxial cables (supplied with SMU)

• One shielded, three-terminal test fixture with triaxial inputs (such as the 8101-PIV)

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4200-TRX-X or 4200-MTRX-X triaxial-to-triaxial cables.

MOSFET enclosed in conductive shield connected to FORCE LO.

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Device connections

Using the supplied cables, connect the output terminals of the instruments directly to the MOSFET terminals in the shielded test fixture. The triaxial terminals on the shielded test fixture allow you to connect to the device and maintain a completely shielded and guarded test setup.

Hazardous voltages may be present on all output and guard terminals. To prevent electrical shock that could cause injury or death, never connect or disconnect from the 4200A-SCS while the output is on. Turn off the equipment from the front panel or disconnect the main power cord from the rear of the 4200A-SCS before handling cables. Putting the equipment into an output-off state does not guar antee that the outputs are powered off if a hardware or software fault occurs. To prevent electric shock, test connections must be configured such that the user cannot come in contact with test leads, conductors, or any device under test (DUT) that is in contact with the conductors. It is good practice to disconnect DUTs from the instrument before powering up the instrument. Safe install ation requires proper shields, barriers, and grounding to prevent contact with test leads and conductors.

Connection schematic

The hardware connections from the output of the instruments in the 4200A-SCS chassis to the test fixture that contains the MOSFET are shown in the following figure. All the connections are 2-wire and only the Force terminal of each SMU is used. The SMUs and GNDU are each connected to a different terminal of the 3-terminal MOSFET.

Figure 18: Connections from the 4200A-SCS to a MOSFET

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Connect the 4200A-SCS to the DUT

The hardware connections from the output of the instruments in the 4200A-SCS chassis to the test fixture that contains the MOSFET are shown in the following figure.

Figure 19: Rear-panel connections from the 4200A-SCS to a MOSFET

Set up the measurements in Clarius

This section describes how to set up the 4200A-SCS to generate a Vds-Id family of curves for a 3-terminal n-type MOSFET. This general procedure can also be used to create tests for other devices and other applications.

For this example, you will use the Clarius application to:

• Select and rename a new project

• Add a device

• Select a custom test

• Configure the test

• Execute the test

• View and analyze the test results

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Select and rename a new project

To select and rename a new project:

1. Choose Select.

2. In the Library, select Projects.

3. Select New Project.

4. Select Create.

Figure 20: Create new project

5. Select Yes when prompted to replace the existing project.

6. Assign a title to the project by selecting Rename above the project tree.

7. Enter a project name into the text box, then select Enter. MOSFET_TEST has been chosen for this example.

Figure 21: Toolbar with Rename function

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Add a device

Tests must be placed in the project under a device.

To add a device:

1. Select Devices.

2. From the Filters pane, select the 3 under the Terminals heading and Transistor under the Device Type option.

Figure 22: Searching for a device u sing Filters

3. Select the MOSFET, n-type, 3 terminal (3terminal-n-fet) device.

4. Select Add to copy it to the project tree.

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Select a custom test

To select a custom test:

1. Select Tests.

2. Select Custom Test, then select Add to create a new 3-terminal, n-type MOSFET test in the project tree.

Figure 23: Custom Test option

3. Select Rename from the toolbar. Enter a test name in the text box, then select Enter. vds-id was chosen for this example.

Figure 24: MOSFET_TEST projec t tree with one device and one test

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Configu re the test

To configure the test:

1. Select Configure.

2. In the project tree, select vds-id. Because this test is custom, you must assign functions to all terminals connected to the MOSFET before you can run the test.

Figure 25: Configure highlighte d

Figure 26: All MOSFET terminals unassigned in a custom test

3. Set the Gate terminal connection to SMU2.

4. Set the Operation Mode to Voltage Step.

5. Change the Start, Stop, Step, and Compliance settings to match the following figure or to the gate settings appropriate for your device.

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Figure 27: SMU2 steps from 2 V to 5 V, connected to MOSFET Gate terminal

6. Set the Drain terminal connection to SMU1.

7. Set the Operation Mode to Voltage Linear Sweep.

8. Change the Start, Stop, Step, and Compliance settings to match the following figure.

Figure 28: SMU1 sweeps from 0 V to 5 V, co nn ected to MOSFET Drain terminal

9. Set the Operation Mode of the Source terminal to GNDU.

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Execute the test

Select Run to execute the test.

View and analyze the test results

While the test is running, you can view the data in the spreadsheet of the Analyze pane. Because you created a new test, the data must be assigned to the axes of the graph before you can view graphical results.

To view and analyze the test results:

1. Select Analyze. The Analyze screen displays data as it is gathered in the spreadsheet and a blank graph with unassigned axes.

Figure 29: Run

Figure 30: Analyze highlighted

2. Select the Graph Definition Menu.

Figure 31: Graph Definition Menu

3. Select Data Series.

4. Select +. The series are assigned as shown in the following figure.

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Figure 32: Data series selected

5. Select ◄ to close the dialog. The graph displays the vds-id family of curves.

For more information on setting up a graph, refer to Analyze test data for projects (on page 3-14).

Configure a com plex test

For more complex tests, you can:

• Set advanced test and terminal parame ters .

• Set up multiple steps or sweeps to track simultaneously using masters and subordinates.

• Configure actions.

Test and terminal settings

You can access test and terminal settings from the center and right panes of Clarius when Configure is selected.

The most common terminal settings are available in the center pane when Key Parameters is selected. Additional common test settings are available in the right Terminal Settings pane.

Less commonly used terminal settings are available in a dialog that you open with the Advanced button on the Terminal Settings pane.

To view all terminal settings, select All Parameters from the center pane. In this view, all terminal settings are displayed for every terminal.

Test settings are also displayed in the right pane. Test settings affect all terminals in the selected test. The most common settings are available in the right pane. Additional settings are available when you select the Advanced button.

The options that are available depend on the instrument that is selected. For descriptions of parameters, refer to:

• “SMU Test Settings” in the Model 4200A-SCS Source-Measure Unit (SMU) User's Manual

• “CVU Test Settings” in the Model 4200A-SCS Capacitance-Voltage Unit (CVU) User's Manual

• “PMU Test Settings” in the Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual

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Step or sweep multiple device terminals in the same test

Multiple steps or sweeps in an interactive test module (ITM) must track with regard to step number and duration. For example, you might want to apply multiple steps to multiple device terminals, such as when stepping the biases on two transistor terminals and sweeping voltage or current on the third terminal. In this setup, Clarius automatically sets the step operations to occur simultaneously, with one terminal set up as the master. All other step functions are automatically designated as subordinates. The following figure illustrates this concept.

Figure 33: Master step versus subordinate step

In the following figure, the step width and the number of steps of the subordinate track the step width and number of steps of the master sweep.

Figure 34: Master and subordinate sweeps

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In the following figure, the step width and number of steps of the subordinate list sweep tracks the step width and the number of steps of the master list sweep.

Figure 35: Master list sweeps versus subordinate list sweeps

If you do not specify an instrument to be the master, the first instrument that was assigned to the step or sweep operation mode is assigned to be the master. You can change this designation in the Test Settings pane.

When a master is set, Clarius sets the points and step size values for the subordinate terminal to be the same as the settings for the master terminal. You cannot change the subordinate points value for the subordinate terminal. For list sweeps, the number of points in the list items for the subordinate is changed to match the number of points in the master. If points are added to the master, the last point of the subordinate list is repeated. If points are removed from the master, the same number of points are removed from the end of the subordinate list.

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You can have a dual sweep on a subordinate terminal even if the master is not set to dual sweep. In this case, the dual sweep of the subordinate terminal has a total number of steps equal to the number of steps in the master terminal. For example, if the master terminal is set to measure ten points, the subordinate dual sweep will measure five points on the first side of the sweep and five points on the second side of the dual sweep. If the master is set to an odd number of points, the subordinate terminal will repeat the measurement of the last sweep point.

The subordinate SMUs are not automatically set for dual sweep when Dual Sweep is enabled for the master SMU. Dual Sweep must be individually enabled for each SMU.

To specify the master sweep:

1. Select the test.

2. In the right pane, select Test Settings.

3. For Sweep Master, select the instrument that you want to designate as the master.

Configure actions

Settings for actions depend on the type of action that is selected. Actions can generate dialog boxes to prompt test operator action, control prober movements, and manage switching. You can also create your own actions from user libraries.

You can place actions anywhere in the project tree. Information for actions is available in the Help pane. To open the Help pane, select the action in the

project tree and select Configure. Select the Help tab in the right pane.

Run a complex test

This section describes how to run individual tests, devices, subsites, and sites. It also describes how to run the stress modes.

If Clarius detects an above-normal temperature condition at any SMU, it protects system outputs by preventing or aborting a test run and reporting the condition in the message area of the Clarius window. If the condition occurs when a test is attempted, Clarius prohibits execution. If the condition occurs during a test, Clarius aborts the test.

Run devices and tests

You can execute an entire project or individual parts of the project. While a test is running, you can view test data in the Analyze pane. The Message area at the bottom of the center pane of Clarius displays the start time, stop time, and

total execution time of the components that were run.

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Executing an entire project runs its components, including sites, subsites, devices, tests, and actions, in the order in which they appear in the project tree.

Clarius only runs items that are selected in the project tree and are at a lower level than the highlighted item.

When you run a project, each new run creates a new test run in the Run History tab, with its own Analyze worksheet. For more about worksheets, refer to Analyze data (on page 3-1

To abort a test, select Stop. All test and action execution stops immediately.The following example uses the Demo Project to demonstrate how to run a project.

To run all objects in a project:

1. Open the Demo Project. Refer to Open a project (on page 2-8

2. Make sure the check boxes are selected for all items in the project tree.

3. Highlight the project name, as shown in the figure below.

Figure 36: Run a project

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4. Select Run. The Run icon changes as shown below. The active test is listed to the left of Run. The Stop icon changes to red.

When the test completes, a beep sounds and the run arrows around the Run icon are no longer displayed.

Run individual devices

You can run the tests for a single device in the project tree. When you run the tests for a single device, the tests are run in the order in which they appear in the

project tree. Only the tests that have checkboxes selected are run. In the following example, all the tests for the diode device are run except for vrd.

Figure 37: Run icon while a test is running

To abort a test, select Stop. All test and action execution stops immediately.

The following example uses the Demo Project to demonstrate how to run tests for a device.

To run tests for a device:

1. Open the Demo Project. Refer to Open a project (on page 2-8

2. Make sure the check boxes are selected for all items under the diode device except for vrd, as shown in the figure below.

3. Highlight the device name, diode, as shown in the figure below.

Figure 38: Run tests for a single d evice

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4. Select Run. The Run icon changes as shown below. The active test is listed to the left of Run. The Stop icon changes to red.

When the test completes, a beep sounds and the run arrows around the Run icon are no longer displayed.

Run an individual test

To abort a test, select Stop. All test and action execution stops immed iat ely.

To run an individual test in the project tree:

Figure 39: Run icon while a test is running

1. In the project tree, make sure the checkbox for the test is selected.

2. Highlight the test.

3. Select Run. The Run icon changes as shown below. The active test is listed to the left of Run. The Stop icon changes to red.

Figure 40: Run icon while a test is running

When the test completes, a beep sounds and the run arrows around the Run icon are no longer displayed.

In the following example, only the gummel test runs. Even though the other tests are selected, they are at the same level as the gummel test in the hierarchy.

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Figure 41: Run specific tests

You can also use Monitor to run an individual test. For more information, see Monitor a test (on page 2-36).

Monitor a test

You can use the Monitor option to set a test to run continuously until stopped. This option is available for ITMs and UTMs when an individual test is selected and when the Monitor option is enabled.

Enable the Monitor option

The Monitor option is enabled in My Settings.

To enable the Monitor option:

1. Select My Settings.

2. Select Run Settings.

3. Select Enable Monitor button.

4. Select OK. Monitor is now available to the left of Run, as shown in the following figure.

Figure 42: Monitor option

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Running a test using Monitor

When a test is run using Monitor, the test loops until you stop it. Only one test run is stored in Run History. The stored run contains the data that was acquired during the last complete test run. The time that is shown for the run is the time of the last completed test run, not the entire time that Monitor was running. Runs that were generated with Monitor include "Monitor" in the description in the Run History tab, as shown in the following figure.

Figure 43: Run History when test is run using Monitor

To use Monitor to run a test:

1. In the project tree, make sure the checkbox for the test is selected.

2. Highlight the test.

3. Select Monitor. The Monitor icon changes as shown below. The active test is listed to the left of Monitor, followed by the number of the loop that is running. The Stop icon changes to red.

Figure 44: Monitor when a test is running

4. To stop the test, select Stop.

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Demo Project overview

The Demo Project includes common dc I-V, C-V , and pulse I -V tests for MOSFETs, BJTs, resistors, diodes, and capacitors. These tests serve as examples and are intended to be copied and modified to work for your own devices. All test parameters in the Demo Project were written for standard discrete parts but can be modified for use with other discrete devices or devices on a semiconductor wafer. These tests demonstrate how to configure tests in the Configure pane, how to use Formulator functions for common mathematical calculations and return them to the data sheet, and how to plot the data in a variety of ways.

The Demo project opens when you first start the Clarius application. The top portion of the project tree for the Demo project is shown in the following graphic.

Figure 45: Demo project (default) in the project tree

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vds-id

This test generates the standard family of drai n current versus drain voltage curves on a

gate, drain, source, and bulk terminals of the FET.

vtlin

Uses a linear curve fit to find the threshold voltage (Vt) of a MOSFET from the generated the gate, drain, source, and bulk terminals of the MOSFET.

subvt

Executes an I-V sweep and calculates the subthreshold voltage (sub-Vt) of a MOSFET to the gate, drain, source, and bulk terminals of the MOSFET.

vgs-id

of a MOSFET.

ig-vg

Measures the gate leakage current of the MOSFET as a function of the sweeping gate voltage. The test determines the gate leakage resistance using a linear line fit.

cv-nmosfet

Measures the capacitance as a function of the gate voltage between the gate terminal

thickness.

pulse-vds-id

Uses CH1 and CH2 of a PMU to generate a pulse I-V drain family of curves. CH1 measures the drain current.

waveform-meas

Uses the waveform capture mode of the PMU to show the time-based response of the CH2 captures the transient response of the drai n current and drain vol tag e.

vce-ic

As the base current is stepped, this test measures the drain current at each point of the terminals of the BJT.

gummel

Generates a Gummel plot as it measures both the base current and collector current of a are connected to the base, collector, and emitter terminals of a BJT.

vcsat

At a constant base current, this test plots the collector current as a function of the

of a BJT.

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The following topics provide brief descriptions of the tests in the Demo project.

4-terminal n-MOSFET tests

By default, the following tests use three source-measure units (SMUs) and one ground unit (GNDU). You can also use four SMUs, one for each device-under-test (DUT) terminal.

Descriptions of the 4-terminal n-MOSFET tests Test Description

FET. For each gate voltage step, the test sweeps the drain voltage and measures the resulting drain current. This test uses either three or four SMUs that are connected to the

drain current versus gate voltage data. This test uses three or four SMUs connected to

and plots drain current versus gate voltage. This test uses three or four SMUs connected

This test extracts the threshold voltage (Vt) and maximum transconductance (Gm) parameters from a sweep of the drain current versus gate voltage. This test uses either three or four SMUs connected to the gate, drain, source and bulk terminals

and the drain, source, and bulk terminals tied together. Several parameters are extracted, including the flatband capacitance, doping density, flatband voltage, and oxide

outputs a pulse step output to the gate. CH2 outp uts a puls e d drain volta ge sweep and

drain current and drain voltage of a MOSFET. CH1 outputs a single pulse to the gate.

3-terminal NPN BJT tests

The tests for this device require three SMUs.

Descriptions of the 3-terminal NPN BJT tests Test Description

drain voltage sweep. Three SMUs are connected to the base, collector, and emitter

BJT. The currents are measured as a function of the base-emitter voltage. Three SMUs

collector voltage. The data is used by the Formulator to calculate the collector saturation voltage (V

). Three SMUs are connected to the base, collector, and emitter terminals

ce(sat)

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res2t

Calculates the average resistance from an I-V sweep of sourcing voltage and can also use one SMU and GNDU.

pulse-resistor

The resistor is connected between one channel of the PMU and the PMU current is measured.

pulse-high-resistance

The resistor is connected between CH 1 and CH 2 of the PMU (RPMs). CH1

Formulator multiples the current of CH2 by −1.

vfd

While a forward-bias voltage sweep is applied to a diode, this test measures the anode of the line.

vrd

Sweeps the reverse bias voltage and measures the resulting current of a diode. This test

recommended that you use a SMU with the preamp option.

cv-diode

Measures the junction capacitance as a function of an applied voltage sweep. The data.

pulse-diode

Applies a pulse voltage sweep to the anode of a diode and measures the resulting anode current. A single channel of the PMU is used to make the measurement.

cap

Charges a capacitor at a constant current and measures the voltage as a function of time.

cv-cap

Measures the capacitance as a function of voltage on a capacitor. The noise is calculated using the standard deviatio n of the data.

pulse-cap

Applies a single voltage pulse to a capacitor and measures the resulting current. A single connected to PMU1 and the other end is connected to PMU GND.

2: Projects and tests Model 4200A-SCS Clarius

Resistor tests

The following tests use two SMUs. It is also possible to use one SMU and the GNDU.

Descriptions of the 2-wire resistor tests Test Description

Diode tests

By default, the following tests use up to two source-measure units (SMUs), a CVU, and a PMU.

measuring current. This test uses two SMUs on either side of the resistor. You

ground. Applies a pulse voltage sweep to the resistor during the test while the

applies a pulse sweep to the resistor during the test while the current is measured by CH2. The current is derived by averaging four pulses. The

Descriptions of the diode tests Test Description

Capacitor tests

By default, the following tests use up to two source-measure units (SMUs), one CVU, and one PMU.

Descriptions of the capacitor tests Test Description

current and plots the data on a semi-log scale. A linear line fit is used to derive the slope

uses two SMUs on either side of the diode. You can also use one SMU and GNDU if they are set properly in the Configure pane. For very low current measurements, it is

depletion depth (W) and the doping density (N) are calculated as a function of the C-V

channel of the PMU is used to make the measurement. One end of the capacitor is

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Save results and graphs ........................................................ 3-31

In this section:

Introduction .............................................................................. 3-1

Spreadsheet ............................................................................. 3-2

Run History ............................................................................ 3-10

Analyze test data for projects ................................................. 3-14

Graph the data for test runs ................................................... 3-16

Introduction

When you run tests, Clarius records the data in the Analyze pane. You can display the data in a test as a spreadsheet and as a graph. You can also select data to display and graph at the project level.

Section 3

Analyze data

Select Analyze to view the spreadsheet and graph, shown in the following figure. You can change the display to show only the spreadsheet or only the graph using the View buttons in the upper right of the pane.

You can use the Formulator to have Clarius extract additional parameter information from the data, using formulas that you create. The Formulator calculation results are placed in the Run sheet, in addition to the raw data. Refer to The Formulator (on page 6-1

) for more information.

Figure 46: Analyze

For information on analyzing data for a subsite, refer to Analyze data for subsites (on page 7-35).

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View selections for the Analyze pane. You can display the worksheet and the graph, the worksheet only, or the graph only.

Save Data allows you to save the worksheet and graph data for the selected project, test, or action. Refer to Save results and graphs (on page 3-31) for more information.

Opens the Formulator, which allows you to make data calculations on test data and on the results of other Formulator calculations. Refer to Formulator (on page 6-1) for detail.

Run Settings displays the test and terminal settings used to produce the results. This is a summary of page 3-3) for more information.

Tab for the test run data. If there are multiple test runs selected, you can select the tab to display the data for that test run.

If there are more than three tabs, you can use these arrows to move between the worksheet tabs.

3: Analyze data Model 4200A-SCS Clarius

Spreadsheet

The Analyze spreadsheets contain the data generated by the test runs that are selected in the Run History tab. Each run has a spreadsheet that is labeled with the name of the run. The run sheets also record data generated by the Formulator. The run sheets are read-only.

The Analyze spreadsheet is compatible with Microsoft

If you have tests that were created in earlier versions of Clarius, you may also have a Calc sheet. Calc sheets were used for custom, test-specific data analysis. Calc sheets created for earlier versions are maintained in the present version of Clarius as read-only sheets.

Options on the Run worksheet

The following table provides brief descriptions of the options on the Run worksheet.

Figure 47: Options on the Run worksheet

Excel®.

the Test Settings and Terminal Settings that were set in Configure. Refer to Run Settings (on

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Run Settings

The Run Settings button displays the test configuration information from the Configure pane for the test runs. If multiple test runs are selected in the Run History pane, each run is available in a separate tab in the Test Settings dialog.

The information in the Test Settings dialog is read-only. You can select data and right-click to copy it. An example is shown in the following figure.

Figure 48: Run Settings example

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Run sheet

There is an Analyze Run sheet for every run of every test. Each column contains the results for one test parameter or for a Formulator calculation.

Each column heading identifies the data in that column. Headings are assigned by the data source:

• For ITMs, Clarius assigns headings

• For UTMS, the headings are assigned by the user modules

• For Formulator calculations, the names of the formulas in the Formulator are used as

the headings

If a project contains multiple instances of a test under the same name, each instance generates its own data. Tests are numbered in the order in which they are added to the project. Ensure that you select the correct instance of the test in the project tree.

The figure below shows a Run sheet that contains data generated by the vds-id test.

Figure 49: Analyze Run sheet

If you have more than 32,000 data rows, the data is separated into multiple pages and the Grid Rows list is displayed, as shown in the following figure. You can select from the list or use the arrows to move between the pages.

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Figure 50: Analyze Sheet with more than 32,000 rows of data

The maximum number of columns in a sheet is 256. An error is generated if a test results in more than 256 columns.

The maximum number of rows in a sheet depends on the type of test:

• ITM maximum is 4096.

• UTM maximum is 65,535 for UTMs that use PostDataDouble if data is sent point by point.

For a test or action, you can hide columns in the graph. Right-click the column and select Hide. To display the columns, right-click and select Unhide to choose from a list of columns, or select Unhide All to display all columns.

If cell contains #REF, there is a problem with the data in the formulas, such a divide by zero error or the log of a negative number. If NaN is displayed, there is a problem with the data that was acquired during the test.

All data in the worksheets of the Analyze spreadsheet can be saved to an external file. Refer to

results and graphs (on page 3-31). To export all data from a project, test, or device, use the Data

Export tool. Refer to Data Export tool (on page 4-29).

To access the Analyze Run sheet for a project, test, or action:

1. In the project tree, select the project, test, or action.

2. Select Analyze. The sheet and graph are displayed.

3. If data is from a CVU, right-click a cell to select the CVU Data Type.

Save

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Formulas List of the Run worksheet

If a column in the Run worksheet contains the results of Formulator calculations, you can display the formula that was used to get the results.

The #REF notation in a cell indicates that the Formulator could not calculate a valid value. This can occur if a formula needs multiple rows as arguments, if a calculated value is out of range, or if a divide by zero is attempted. For example, if the MAVG function is using five points to calculate a moving average of a column that contains five values, the first two and last two cells contain #REF.

For more information on working with the Formulator, refer to Formulator (on page 6-1

To display a formula:

1. Select the Formulas List. A list of formulas is available.

2. Select the formula you want to display.

3. If you need to make changes to the formula, select Formulator to open the formula in the Formulator.

Figure 51: Displaying a Formulator equation using the Formulas list

Terminal Settings pane (Analyze)

When Analyze is selected, the Terminal Settings pane displays the settings for each terminal used in the presently selected test.

The options that are available depend on the instrument that is selected. For descriptions of parameters, refer to:

• “SMU Test Settings” in the Model 4200A-SCS Source-Measure Unit (SMU) User's Manual

• “CVU Test Settings” in the Model 4200A-SCS Capacitance-Voltage Unit (CVU) User's Manual

• “PMU Test Settings” in the Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual

Module Settings pane (Analyze)

When Analyze is selected for a test that is based on a user module, the Module Settings pane is available. The options in this pane are the same as the options in Configure for the module. Changes made in the Module Settings pane are also changed in Configure.

Descriptions of the options are available in the Help pane.

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Measurement status

Many tests provide status information for the measurements in the spreadsheet of the Analyze pane. For example, for the 42 10-CVU or 4215-CVU , t he dat a c ol umn for the status codes is l abe led CVU1S. CVU status code indicates the current measure range for each impedance measurement and flags any errors. You can hover on a cell to see information about the measurement.

Figure 52: Measurement status column

When a measurement error occurs, the data values in the flagged data row are color-coded to identify the fault type as follows:

• Red: Measurement timeout.

• Magenta: Measurement overflow.

• Orange: Auto Balance Bridge (ABB) not lock ed.

An example of the color codes is shown in the following figure. In the status column (CVU1S), you can hover over the cell to see information about the measurement.

Figure 53: Spreadsheet indicating a measurement error

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CVU measurement status codes (CVU1S)

Code

Description

000000yy

No faults

8xxxxxyy

Measurement timeout occurred

01xxxxyy

02xxxxyy

CVH1 voltage measurement overflow

03xxxxyy

CVH1 current and voltage measurement overflow

08xxxxyy

CVH1 ABB not locked

09xxxxyy

CVH1 ABB not locked, current measurement overflow

0Axxxxyy

CVH1 ABB not locked, voltage measurement overflow

0Bxxxxyy

CVH1 ABB not locked, current and voltage measurement overflow

xx01xxyy

CVL1 current measurement overflow

xx02xxyy

CVL1 voltage measurement overflow

xx03xxyy

CVL1 current and voltage measurement overflow

xx08xxyy

CVL1 ABB not locked

xx09xxyy

CVL1 ABB not locked, current measurement overflow

xx0Axxyy

CVL1 ABB not locked, voltage measurement overflow

xx0Bxxyy

CVL1 ABB not locked, current and voltage measure me nt overflow

yy value

Lowest range (1 μA) used for the impedance measurement

Middle range (30 μA) used for the impedance measurement

Highest range (1 mA) used for the impedance measureme nt

3: Analyze data Model 4200A-SCS Clarius

Status codes

The 16 basic codes used for CVU measurement status are listed in following table. Each code is represented as a 32-bit hexadecimal value (0x).

CVH1 current measurement overflow

The yy value indicates the range used, as shown in th e follow ing ta ble.

Enabl e status code s for SMUs

Status codes are automatically available for CVUs, PGUs, and PMUs. For SMUs, you must choose to display the status codes. When this option is selected, Clarius records measurement status information when the test executes. A column of the Analyze spreadsheet displays this information. Hover over a cell to review the information. An example of the status information is displayed in the following figure.

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Figure 54: SMU Report Status column in the Analyze sheet

To display status codes for a SMU:

1. In the project tree, select the test.

2. Select Configure.

3. Select Terminal Settings in the right pane.

4. Select Advanced.

5. Select Report Status.

Measurement status notes

Whenever a fault occurs, run the Confidence Check utility before performing any other troubleshooting actions (see CVU Confidence Check (on page 4-24

Measurement timeout: Indicates that the measurement was not received after a set time (total aperture). This timeout error may indicate that there is an issue with the CVU card. Try resetting the hardware and running the project test again. If this error reoccurs, contact Keithley Instruments.

To reset the hardware:

1. Select Start.

2. Type resethw.

3. Select the instruments that need to be reset.

4. Select Reset.

Current measurement overflow:

) for details).

• Try a higher current measure range (or Auto).

• Try a lower ac drive voltage.

Voltage measurement overflow: Try a lower dc bias voltage.

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ABB unbalance errors

The CVU uses the autobalancing bridge (ABB) technique to achieve accurate impedance measurements. ABB creates a virtual ground at the DUT to minimize measurement error. Every CVU measurement is made with ABB active. The ABB always attempts to lock the low side of the DUT to virtual ground.

If the ABB fails to lock, the measurement is made, but may be out of specification. If this occurs, the returned data is flagged and shown in yellow on a blue background on the Analyze sheet.

The most common reasons that ABB fails to lock are:

• The cable lengths on the CVU terminals are not the same

• HPOT or LPOT terminals were disconnected

• Excessive noise on the LPOT terminal

• High frequency sources

• Physical cable lengths do not match the cable length set in Clarius

• Improperly torqued SMA cables

• Sub-optimal I

• Too much parasitic load on the low side of the DUT

You can use CVU Confidence Check to help troubleshoot ABB errors. Refer to

and short check (on page 4-24) for instructions on performing a confidence check.

Run History

When a test is selected in the project tree and Analyze is selected, the right pane includes a Run History tab. If the test is one of the pre-built tests, Run History contains reference data and the Analyze pane displays a sample graph. If you created a new test, there is no information in the Run History pane or graph until the test is run.

If you ran the test, the latest test run is displayed at the top of the Run History pane. The data and graph from this test run are displayed in the Analyze pane.

You can have up to 10,000 runs for each test and you can select up to 128 test runs from the Run History to be displayed in the Analyze pane. The data for each selected test run is shown in a separate tab in the Analyze sheet. All the selected test runs are graphed on the Analyze graph. By default, the latest test run data and graph are displayed in the Analyze sheet and graph. Select a different test run to view that information in the Analyze sheet and graph.

RANGE

setting

Run an open check

When you run stress subsite operations, only data from the latest loop is saved to the Run History data file in a test. The oldest run is removed first. This optimizes disk space usage.

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Each Run History entry includes:

• A timestamp that shows the date and time when the test was run.

• The execution time.

• Rating stars that you can use to flag specific tests.

• Notes.

• The indicator "Monitor" if the data was generated using the Monitor option.

Figure 55: Run History pane

If you imported data from a 4200 project, each set of appended data is shown as a separate test run in the Run History.

Change the name of a test run

You can change the name of the test run. If you change the name, the new name is displayed in the following locations:

• The data tab name in the Analyze sheet.

• In the Formulator in the Formula Set list.

• In the test library if you add the test to the test library.

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The names for test runs:

• Must be less than 19 characters.

• Must be unique; multiple test runs cannot have the same name. The name comparison is not

case-sensitive. For example, Best and best are considered to be the same name.

• Must not use Clarius reserved names, including Data, Calc, Settings, and Run1 to Run9999.

To change the name of a test run:

1. In the Run History pane, select More.

2. In the Run number text box, type the new name.

3. Select Enter. The name you entered is displayed, followed by the run number.

To revert to the default name, clear the information in the Run number text box and select Enter.

Delete test runs from Run History

You can delete test runs from the Run History, including reference data. This deletes the data from Clarius.

If you are deleting multiple test runs, only the highlighted test runs are deleted. The status of the checkbox does not affect what is deleted.

To delete a test run from the Run History:

1. Right-click the Run History and select Delete.

2. Select Yes.

To delete multiple test runs:

1. Highlight the test runs to be deleted. You can use Ctrl+click and Shift+click to highlight them.

2. Right-click and select Delete Selected.

To delete all test runs, including reference data:

Right-click in the Run History pane and select Delete All.

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Working with the Run History pane

You can change the sort order of the test runs in the Run History tab using the options at the bottom of the Run History tab. Select Date, Name, Checked, or Stars to sort the test runs in ascending or descending order using that option.

If you have more than one pane of test runs, use the arrow buttons to move between the panes. To highlight a group of test runs, right-click and select Begin Select Range. To select a range,

highlight another test run and right-click and select End Select Range. To clear the selections, right-click and select Clear Selected.

Searching for a test run

You can search for a test run by date.

To search for a test run by date:

1. At the bottom of the Run History pane, enter the date.

2. Select Date Search.

Add notes to a test run

To add notes to a test run:

1. Select More.

2. Enter the note into the text box below Less.

3. Select Enter when the notes are complete.

Copy the settings of a test run to the Configure screen

You can copy the test and terminal settings that were used to generate a test run to the Configure pane. All settings in the Configure pane are replaced by the settings from the selected test run. This allows you to quickly restore the settings that were used to generate a test run.

To copy the settings:

1. In the Run History pane, right-click the test run that contains the settings you want to use.

2. Select Load Configuration. The changes are made to the Configure pane.

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Setting the Run History size

You can set the maximum number of test runs that are stored and displayed in the Run History pane. When you run a test, the number of test runs stored in the Run History is limited to the number that is

set. To maintain the number of runs, Clarius deletes the oldest unselected run. If there is existing data that exceeds the limit, only the oldest unselected run is deleted. If you have all runs selected, the most recent run is deleted when a new run is created. The runs continue to be numbered sequentially.

For example, if you have 200 existing runs and change the maximum run history size to 5, the number of runs in the Run History remains at 200. The next test run triggers the deletion of the oldest unselected run. The new run is numbered 201.

If you are running a project with subsite cycling or stressing, all existing runs are automatically unselected at the start of execution. Only data collected during the last run of the project is selected and displayed on the graphs. To save data between project runs, increase the run history size to be more than the number of cycles or stresses in your project.

If the run history size setting is less than the number of cycles or stresses in your project, a run is still generated for each cycle or stress.

To set the number of test runs stored in Run History:

1. In Clarius, select My Set tings.

2. Select Run Settings.

3. In Run History Size, enter the number of runs (1 to 10,000).

4. Select OK.

Analyze test data for projects

You can select test data to display at the project level. This allows you to compare data from different tests in your project in the sheet and graph.

You can also use the Formulator at the project level. The Formulator allows you to make data calculations on test data and on the results of other Formulator calculations. Refer to The Formulator (on page 6-1) for information on creating formulas.

When you look at a graph at the project level, you cannot view multiple test runs from the same test and family curves functionality is not available. Other graph settings are available as described in

Analyze data for test runs (on page 3-1

Save the project to preserve the Formulator and graph settings with the project.

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Select data for the project-level Analyze pane

You can select up to 255 columns of data to display in the project-level Analyze pane.

To select test data to display at the project level:

1. Select Analyze.

2. In the project tree, select the project.

3. In the right pane, select Data Series.

4. From Device, select the device that contains the data.

5. From Test, select the test that contains the data.

6. From Run History, select the test run that contains the data. To display the most recent data, select LatestRun.

7. From Data Series, select All to display all available data or select a specific set of data.

8. Select Add.

The data is displayed in the Analyze pane. The selected data series is also listed in the Series List at the bottom of the right pane.

The data for each selected device, test, and run is grouped in the Sheet. Scroll to the right to view the data.

You can select any of the data for graphing. See Define data to be graphed (on page 3-19

) for detail.

An example of a project with data and a graph set up is shown in the following figure.

Figure 56: Analyze for a project

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Remove data from the project-level Analyze pane

You can remove data from the project-level An aly ze sh eet and gr aph. The orig ina l data remains intact.

To remove data from the project-level Analyze display:

1. In the Series List in the right pane, select the device, test, or run. You can use Ctrl+click to select multiple indiv id u a l items or Shift+click to select a series of items.

2. Select Remove.

To remove all data from the project-level Analyze display:

In the Series List in the right pane, select Remove All.

Graph the data for test runs

The Analyze graph allows you to create graphs of test results. The graph provides you with flexible plot-data selection, formatting, annotation, and numerical coordinate display using precision cursors.

For test runs, the graph displays the data from the Run sheet tabs for the test runs selected from Run History. Each test run updates the graph to display the latest set of data. See Run History 3-10) for detail on selecting the runs that are displayed on the graph.

You can change the format of the graph using the options in the Graph Definition Menu.

If you are viewing data for a subsite, refer to Analyze data for subsites (on pag e 7-35) for information on the graphing options for the subsite.

Open a graph

To open a graph:

1. In the project tree, select a test.

2. Select Analyze. The graph is displayed at the bottom of the center pane. The time and date when the data was generated are displayed in the upper left corner.

3. To enlarge the graph, select the Graph only option:

(on page

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Graph Definition Menu. Accesses options that you can use to customize the graph. You can also access this menu by right-clicking the graph. See Customize the graph (on page 3-18).

Right Y-axis settings. Only displayed if the Right Y Axis Definition is set up. See Define graph axes (on page 3-20).

Line Fit information. Only displayed if Line Fits are selected. See Line fits (on page 3-27).

X-axis settings. See Define graph axes (on page 3-20) to customize the axis.

Text added to the graph from the Graph Definition menu Add Text option. See Add text to the graph (on page 3-24).

The date and time when the data was generated.

-SCS Clarius User's Manual Section 3:

Figure 57: Example of n-MOSFET drai n family of curves graph

Options on the graph

The following table provides brief descriptions of the options on the Analyze graph.

Figure 58: Example of an Analyze graph

3 4 5

Left Y-axis settings. See Define graph axes (on page 3-20

) to customize the axis.

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View detail on a data point

When you select a point on any graph, Clarius displays the following information about the point:

• Run name, such as Run 4.

• Legend name, which includes the column name, such as DrainI(4). If a family of curves is

graphed, it also includes the family curve name, such as GateV=5.0.

• Graph coordinates

This feature allows you to check information about any point on the graph. An example is shown in the following figure.

Figure 59: Data point display

To zoom in on data, on a touch screen, pinch. If you are using a mouse, select a portion of the graph. To return to the full graph view, double tap or double-click.

Customize the graph

You can customize the graph using options in the Graph Definition Menu. You can also access these settings by right-clicking the graph.

Figure 60: Graph Definition Men u

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Define data to be graphed

You can add or change the data series that is graphed and which axis it is displayed on. When you set the style for a test run, the next test run uses the same style. If you compare multiple

test runs, the line pattern changes for each run to make it easier to distinguish the runs in the graph.

If no test runs are selected in Run History, you can define the data to be graphed as described in the following procedure. The settings you make are applied to the next run.

To select the data series for the graph:

1. From the Graph Definition Menu, select Data Series.

Figure 61: Data Series dialog

2. To add a data series to the graph, select +. The next column of data from the sheet is added.

3. For Series, select the data series to be displayed on the y-axis.

4. For Legend Label, enter the text that is displayed in the legend when it is selected.

5. For X Axis Series, select the data series to be displayed on the x-axis.

6. For Assign To, select which the y-axis to display this data series on.

7. For Style, select ►. The options shown in the following figure are displayed.

Figure 62: Data Series Style opti o ns

8. Select the ▼ next to the Color, Data Point, Line Pattern, and Line Thickness to set each of the style options.

9. When changes are complete, select ◄ to close the dialog. The settings are applied immediately.

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To remove a data series from the graph:

1. Select the trash can icon for that series.

2. If you select a new data series, the Legend Label is now reset to the defaults.

Define a family of curves

For tests that generate a family of curves, the family of curves is treated as one data series. Deleting or adding one series deletes or adds them all. You can change the style and legend for an individual data series in a family of curves.

If there are multiple parameters with the same name, an * is displayed after the parameter name in the data series dialog.

An example of the Data Series dialog for a family of curves is shown in the following figure.

Figure 63: Data Series for a family of curves

Define graph axes

You can change the settings for the graph axes using the Axis Definition options in the Graph Definition Menu or by selecting the triangles on the bottom and sides of the graph. An example of the options for the X-axis is shown in the following figure.

Figure 64: Graph X-axis options

Minimum and Maximum set the graph to display only data between these two values. These options

are not available if Autoscale is selected.

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Autoscale automatically scales the axes to best fit the data. When you select Autoscale, the Minimum and Maximum settings are set to the autoscale values.

Invert allows you to flip the orientation of the graph so that the lowest value is at the top of the Y axis or the right side of the X axis.

The Label is the text that identifies the axis. The Units option selects the unit of measure (volts, amps, seconds, farads, Siemens, or Hertz) that is

displayed on the axis. When a unit of measure is selected, you can also set how the value is displayed, such as in A, mA, or µA. When Engineering Notation is selected, the Auto option is available. In this case, the graph automatically adjusts the units of measure for the best presentation of the data.

Engineering Notation displays the scale values and cursor data points in engineering notation. When this option is cleared, the scale values and data points are displayed in either standard form or scientific notation, depending on the value.

Scale allows you to display the data on a linear or logarithmic scale. If Log is selected, Absolute Values is automatically set. If you return to Linear, you may need to clear Absolute Values if you want to graph negative values.

Absolute Values graphs the data as unsigned values when selected. The X-axis also includes the Enable Multiple X Series option. This allows you to select additional X

Axis Series data in the Data Series dialog. Refer to Define data to be graphed (on page 3-19 additional information. When you clear Enable Multiple X Series, the X Axis Series changes to the value of the first series shown in the Data Series dialog.

Display multipl e r uns

You can display multiple run histories in the Analyze graph and select how to differentiate the data for appended run histories. Appended run histories are run histories that are added to a graph that already has a selected run history. Options for differentiating the data from different runs include using combinations of line styles, line colors, and data point markers. You can set the differentiation for each graph in each test independently, as described in the following, or use the default method described in Set the Clarius graph defaults (on page 3-23 change the individual data series without affecting the graphs of the other run histories.

In the example in the following figure, Run3 and Run2 are appended runs. The series from appended runs use the same colors as the first selected run (in this example, Run4), but are differentiated by line styles. In this figure, the Run3 series uses the long dash line style and the Run2 series uses the dotted line style.

). If you set up defaults, you can later

) for

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Figure 65: Example of multiple runs

Change the append style for multiple run histories

If the append style is not changed for the graph in the selected test, it is set to the default described in Set the Clarius graph defaults (on page 3-23

To change the line style when multiple run histories are graphed:

1. From the Graph Definition Menu, select Advanced Settings.

2. Select the line or point option:  Append by Line Style: Use a different line style, such as line, dotted line, or dashed line, for

the data from each run history.

 Append by Line Color: Use a different line color for the data from each run history.  Append by Point Markers: Use different point markers for the data from each run history.

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Return to graph defaults for selected run histories

You can reset the data series for the selected run histories. The default settings for the most recent run are a blue line, no data point marker, solid line pattern, and thin line thickness.

If you select more than one data series in the run, the following series are plotted in different colors. If more than one run history is selected, the appended run histories are returned to the default

append styles for this graph in the test.

To return to the graph defaults for the selecte d run histories:

1. From the Graph Definition Menu, select Advanced Settings.

Set appended run history graphed data to match the most recent run his tory

2. Select Set Data Series to Defaults.

You can set the graphed data of appended run histories to use the settings of the first selected run history as a template. This does not change settings for the first (not appended) run history.

You can use this feature to customize the series of the first run and synchronize all appended runs to its settings.

To set the display of appended run histories to match the most recent selected run history:

1. From the Graph Definition Menu, select Advanced Settings.

2. Select Reset Appended Data Series.

Set the Clarius graph defaul t s

When you select multiple run histories for display on the Analyze graph, the lines for each run are differentiated by the line style, line color, or point markers.

If you do not define the append style for a specific test using the Graph Definition Menu, Clarius uses the style selected for the Default Append Style.

To set the append style defaults:

1. On the top pane of Clarius, select My Settings.

2. Select Graph Defaults.

3. Set the Default Append Style to the default style.

4. Select OK.

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Add text to the graph

You can add up to four text boxes to the graph. You can use Latin character sets in the text. Each text box can contain up to 512 characters in up to 12 lines of text.

To add text:

1. Select the Graph Definition Menu.

2. Select Add Text. The Add Text dialog is displayed, as shown in the following figure.

Figure 66: Graph Add Text dialog

3. In the Text box, enter the text.

4. Select the Font Size.

5. Select the Color.

6. To include the date and time when the data was generated, select Add Date & Time.

7. To add the value from a data series, select the data series from the list, then select Add Series Value.

8. Select OK.

9. Drag the text to the appropriate location on the graph.

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The following figure shows an example with a series (LatestRun:VT) and the date and time (Date&Time) options added.

Figure 67: Add Text dialog with date, time, and series values included

The following figure shows how the Edit Text settings in the previous figure are displayed on the graph.

Figure 68: Example of a text box on the graph

To edit text:

Double-click the text to open the Edit Text dialog.

To remove text:

Right-click the text and select Remove Text. The text is removed from the graph and deleted from the Edit Text dialog.

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Add cursors to the graph

You can add up to two sets of cursors to the graph. When cursors are displayed, the following information is displayed next to the cursor:

• The data series.

• The cursor coordinates.

To add cursors to the graph:

1. From the Graph Definition Menu, select Add Cursor.

2. Select the line for the cursor and drag it as needed to view the data. An example is shown in the following figure.

Figure 69: Graph cursors

To remove cursors from the graph:

1. Right-click the line for the cursor.

2. Select Remove cursor.

Display the graph legend

You can display a legend that describes each series of data. To display the legend, right-click the graph and select Show Legend. You can drag the legend to a

new location on the graph. To change the labels of t he legend, se lec t th e ar row o n the leg end. T his op ens th e Data Series dialog,

which you can use to change the line style, data series, label, and axes. The legend label can be up to 32 characters.

To hide the legend, right-click the legend and select Hide Legend.

To change the size of the text on the legend:

1. From the Graph Definitio n Menu , sel ect Advanced Settings.

2. Select the Legend Font Size (small, medium, or large).

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Display two graphs

You can display two graphs with different data series. You can also hide one of the graphs. The settings for the hidden graph are retained.

To display two graphs:

1. In the Graph Definition Menu, select Dual Graph.

2. Use the options in the Graph Definition Menu for the second graph to set up the graph.

To hide one of the graphs:

1. Select the Graph Definition Menu for the graph you want to hide.

2. Select Hide Graph.

3. To redisplay the graph, select Dual Graph.

Line fits

You can use the graph line fit feature to create lines that have the best fit to a series of data points. Line fits are used to study the nature of the relation between multiple variables.

Add line fits

You can fit lines to test result graphs for one or two line fits between existing cursors. When the line is fitted, the graph displays:

• The fitted line.

• The fit parameters in a text box on the graph.

• The point at which a tangent line is fitted to the plot or the starting and ending points (data range).

• The data-point coordinates.

When you add a line fit, a dashed line is displayed, along with cursors that you can drag to a new location on the line. If you select the Free Linear line fit type, you can drag the cursors to any point on the graph.

A text box is displayed for each line fit. You can move this text box as needed. The text box contains the fit parameters and cursor coordinates.

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To add a line fit:

1. Select Analyze.

2. Select the Graph Definition Menu and select Line Fits.

Figure 70: Line Fits dialog

3. Select Enable for the line fits you want to display.

4. Select the Data Series for each line fit. If you are selecting the Free Linear line fit type, you select the Left Y Axis or, if it is defined, the Right Y Axis as the data series.

5. Select the Line Fit Type. You can select:

 Linear: Chord line of the form y = a + bx.  Linear Regression: Regression line of the form y = a + bx.  Exponential: Regression line of the form y = a * e^bx.  Log: Regression line of the form y = a + b * log10(x).  Tangent: Tangent to the plot. The tangent line has the form y = a + bx.  Free Linear: Add a line fit that is not constrained to a specific data series.

6. Select the Font Size.

7. Select the Color of the line and text box.

8. Select Show Label to display a text box with the line fit coordinates.

9. Select OK. The line fits are displayed on the graph.

10. If you selected Show Label, you can drag the text box with the coordinates to a new location.

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Text box that contains the parameters of the linear regression fit line and the cursor coordinates. You can move this box.

Linear regression fit line.

Cursors for the data points that define the linear regression fit line. You can move the cursors along Log fit line.

Cursors for the data points that define the log fit line. You can move the cursors along the line.

Text box that contains the parameters of the log fit line and the cursor coordinates. You can move this box.

Linear

LINFIT

LINFITYINT

LINFITSLP

LINFITXINT

Linear Regression

REGFIT

REGFITYINT

REGFITSLP

REGFITXINT

Exponential

EXPFIT

EXPFITA

EXPFITB

Not applicable

Log

LOGFIT

LOGFITA

LOGFITB

Not applicable

Tangent

TANFIT

TANFITYINT

TANFITSLP

TANFITXINT

-SCS Clarius User's Manual Section 3:

Line fit examples

The following figure illustrates the linear regression and log line fit types.

Figure 71: Linear fit example

2 3

4 5 6

the line.

Formulator line fits

The Formulator also includes options to generate line fits. The Formulator fit results can be used in other calculations. The results of the graph line fits are similar to the results with the corresponding Formulator functions, as shown in the following table.

Correspondence between graph and Formulator line fits Graph line fit Formulator fits that return the corresponding fit line and fit parameters

Fit line Fit parameter "a" Fit parameter "b"

Fit parameter "xint"

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Zoom, pan, and autoscale

If you are using the touch screen:

• To zoom in on the graph, pinch the area of the graph to view.

• To zoom out, move your fingers apart.

• To return to the full graph view, double-tap the graph.

If you are using a mouse:

• To zoom, select the area on the graph with the left mouse button.

• To return to the full graph view, double-click the graph.

To use the mouse to pan along the axis (left to right on x-axis or up-down on the y-axis):

1. Place the mouse over the axis in the graph. The mouse cursor changes to the scrolling icon.

2. Drag the axis to the new location.

An example of the panned axis is shown in the following figure.

Figure 72: Panning along the x-axis

To pan in all directions:

1. From the Graph Definition Menu, select Start Panning.

2. Drag the graph in any direction.

When panning is active, the following icon is displayed to the left of the Graph Definition Menu:

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Select the icon to stop panning. You can also stop panning by selecting another option from the Graph Definition Menu.

Rescale the graph:

From the Graph Definition Menu, select Autoscale All. This option automatically scales all graph axes one time. You can use this to reset the graph after

panning or zooming. When you pan or zoom, Autoscale All is disabled. The minimum and maximum values of each axis

show the values set by zoom.

Save results and graphs

You can save the sheet data and graphs for the entire project or for individual tests or actions. The sheet data can be saved to the .xls, .xlsx, .csv, or .txt format. The .xls and .xlsx

formats are compatible with the Microsoft When you save test data to the .xls or .xlsx format, the saved data includes data for all selected

runs and the settings for the runs. If you select the .csv or .txt format, only the data from the most recent run is saved.

Excel® application.

You can save graphs to .jpeg, .bmp, .gif, or .png format.

To export all data from a project, test, or device, use the Data Export tool. Refer to Data Export tool (on page 4-29) for more informat ion.

To save the information in the Run sheet:

1. Select the project, test, or action.

2. Select Analyze.

3. Select Save Data.

Figure 73: Save Data button

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The Save Test Data As dialog is displayed, as shown in the following figure.

Figure 74: Save Test Data As dialog

4. In the Sheet field, select the file location and name.

5. From the Sheet File Format list, select the file format.

6. Select Save Sheet.

To save the graph:

1. Select the project, test, or action.

2. Select Analyze.

3. Select Save Data. The Save Test Data As dialog is displayed.

4. In the Graph1 and Graph2 fields, select the file locations and graph names.

5. Select the Graph File Format.

6. Select Save Graph 1 or Save Graph 2.

To save graph and Run sheet information:

1. Select the project, test, or action.

2. Select Analyze.

3. Select Save Data. The Save Test Data As dialog is displayed.

4. If you would like to use the same name for all graphs and sheets, enter the name in the Change Common Filename field. The file names are changed. No change is made to the file locations.

5. In the Sheet field, select the file location and name.

6. In the Graph1 and Graph2 fields, select the file locations and graph names.

7. Select the Sheet File Format.

8. Select the Graph File Format.

9. Select Save All.

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Tools ...................................................................................... 4-11

In this section:

Customize Clarius .................................................................... 4-1

Add objects to the library .......................................................... 4-1

Project tree display options ...................................................... 4-6

Messages display option .......................................................... 4-6

My Setti ngs .............................................................................. 4-6

Customize Clarius

To customize Clarius, you can:

Section 4

Customizing Cla r i us

• Add your own tests, actions, and projects to the Clarius library.

• Adjust the options in My Settings to set up your working environment and modify project

execution. You can also set up custom GPIB abort settings and view information about Clarius.

• Hide or display the project tree, right pane, and Messages areas of the Clarius window.

Add objects to the library

You can add tests, devices, actions, and projects to the library. The new version of the object includes the settings you made to the object in the Configure pane. Once an object has been added, you can use it to create new objects in the project tree.

You cannot add sites and subsites to the library. When you copy a project, it includes all test definitions, formulas, graph settings, and selected

test runs.

When you add objects to the library, you have the option to enter keywords. You can use these keywords to label the object with information that you can use to search for the object, such as including your name or a project name as part of the project.

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Add a test to the library

The following steps provide specifics on how to add a test to the library. You can follow the same basic procedure to add devices, actions, and projects. The primary difference is the type of object and which library the object is added to.

When you add a test to the library, the test runs that are selected in the Run History tab of the Analyze pane are included with the new test. However, notes and aliases that were assigned to the test runs are not included.

To add a test to the library:

1. In Clarius, set up the test so that it contains the settings you want the new library object to have.

2. Select Analyze.

3. In the Run History tab, select the test runs that you want to include in the new test.

4. Open Select.

5. Drag the test from the project tree to the library. You see a copy of the test and a checkmark, as shown in the figure below. The test is automatically added to the Tests library, regardless of the tab that is open. When you drop the test, a confirmation dialog is displayed.

Figure 75: Add a test to the Tests Library

6. Select OK. The Library Information Editor is displayed. Refer to Edit a library object you added (on page 4-3) to complete the Library Information Editor.

Add a device to the Device Library

You can copy a device from the project tree to the library to create a new device.

To submit a device to a library:

1. In Clarius, choose Select.

2. In the project tree, drag the device into the library. The test is automatically added to the Devices library, regardless of the tab that is open. A confirmation message is displayed.

3. Select OK. The Library Information Editor dialog is displayed. Refer to

Edit a library object you

added (on page 4-3) to complete the Library Information Editor.

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Add an action to the library

The following example provides specifics on how to add an action to the library.

To add an action to the library:

1. In Clarius, set up the action so that it contains the settings you want the new library object to have.

2. Open the Select pane.

3. Drag the action from the project tree to the library. You see a copy of the action and a checkmark. The action is automatically added to the Actions library, regardless of the tab that is open. When you drop the action, a confirmation dialog is displayed.

4. Select OK. The Library Information Editor is displayed. Refer to Edit a library object you added (on page 4-3).

Add a project to the library

The following example provides specifics on how to add a project to the library.

To add a project to the library:

1. In Clarius, set up the project so that it contains the settings you want the new library object to have.

2. Open the Select pane.

3. Drag the project from the project tree to the library. You see a copy of the project and a check mark. The project is added to the Projects library regardless of the tab that is open. When you drop the project, a confirmation dialog is displayed.

4. Select OK. The Library Information Editor is displayed. Refer to Edit a library object you added (on page 4-3).

Edit a library object you added

You can edit items that you added to a library. Items that can be edited have Edit, Delete, and Export options as shown in the following figure.

Figure 76: Edit, Delete, and Exp ort options for a library item

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To edit an item:

1. Select the item in the library.

2. Select Edit.

3. Refer to Edit an object in the library (on page 4-4

Edit an object in the library

The Library Information Editor allows you to change the information for a new library object. You can change information such as the name, description, graphic, help information, filters, and keywords.

The Library Information Ed i tor is dis pl ayed w he n you drag an object from the proje c t tr ee to the l ibrar y . For objects that you created, you can also access it using Edit in the library.

As you make changes in the Basic tab, the Preview area displays the changes as they will appear in the library.

) for the options.

Figure 77: Library Informatio n Editor

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Displays the changes you make as they will appear in the library.

Type the new name. This is the name that is used in the library and the project tree.

Type the title. This is used in the library.

Project Information Editor.

Only editable when adding an object from the project tree to the library. This is the help displayed when the item is selected in the library.

Only displayed when you add an item from the project tree to the library. Determines if

can only include or hide it.

The image that is displayed in the library. Select the image to select a different image.

To leave the image area blank, select Clear.

Devices only. The image that is displayed in the project tree. Select the image to choose

-SCS Clarius User's Manual Section 4:

To change information for a library obj ect:

1. In the Basic tab, complete the information as needed. Refer to the following table for the options.

2. Select the Filters tab. These options set the filters that will cause this item to appear in the library when you select the right-pane filters.

3. Select the filters that help a user find this item in the library.

4. Select the Keywords tab. These options determine what you can type in the library Search field to locate this item. You can use the Sort By options at the bottom of the lists to change the order of the entries in the Information Editor. It does not affect the order in the library.

5. Drag a keyword from the left to the right to add a keyword.

6. To remove a keyword, select the keyword and select Delete. This does not remove the keyword from the Global Keywords list.

7. To add a keyword, select New and type the keyword.

Options in the Information Editor Preview Name Title Description Author

Help

Include Help

Library Image

Icon Image

Type a brief description of the item. This is displayed in the library. Type information that identifies who created this item. This is available only through the

file that is displayed in the right pane when Configure or Analyze is selected. It is also

the existing help is included with the new item. If you want to include the help that was associated with the original object, select Include Help. Clear Include Help to keep the help from displaying (the Help pane will be blank). You cannot change the help link; you

Images should be 400x400 pixels in png format. Larger images display, but anything larger than 400x400 is cut off in the library display. To re-use an image from an older project, you may need to save the existing bmp image to png format. You can use a tool such as Microsoft® Paint to convert the image.

a different image. Images should be 80x80 pixels in png format. Larger images display, but anything larger than 80x80 is cut off in the project tree. To re-use an image from an older project, you may need to save the existing bmp image to png format. You can use a tool such as Microsoft® Paint to convert the image. To leave the image area blank, select Clear.

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Project tree display options

You can select whether or not Clarius displays the project tree if you need more workspace. To hide the project tree, select < at the top of the tree. Redisplay the project tree by selecting >.

Messages display option

You can hide the Messages area at the bottom of the Clarius window. To hide Messages, select v. To display the messages, select ^.

My Settings

The options in My Settings allow you to set environment settings, run settings, GPIB abort, and logging preferences. You can also view revision and copyright information regarding Clarius.

Specify environment settings

The options in Environment Settings allow you to make system-side settings. You can set:

• GPIB devices to reset on startup.

• PMUs to allow unsettled measurements.

• The user interface for UTMs to be edited.

• Site tracking for stress testing.

• Save as functionality.

• Where your projects are stored.

• Which project loads at startup.

Reset GPIB devices when Clarius starts

Select this option to reset GPIB devices in the system to their default settings when Clarius starts up.

PMU: Allow unsettled measurements

When this option is selected, all 4225-PMU instrument cards ignore the minimum timing versus measure range relationship.

This option is only recommended for advanced users. It causes spot mean results to be unsettled, which may cause a variety of operational issues, such as:

• Inconsistent current measure range-chang ing on the 4 225-PMU or 4225-RPM.

• Lack of proper load-line effect compensation (LLEC) for the PMU.

• Lack of correlation between PMU or PMU and RPM results and SMU results.

For additional information, see “PMU minimum settling times versus current measure range” in the Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual.

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Specifications and Main Features

Frequently Asked Questions

User Manual

Safety precaut ions

Table of contents

Get started with Clarius

Introduction

Clarius interface

Touchscreen basics

Choose the project phase

Run tests and set up your workspace

Organize items in the project tree

Select items from the libraries

Configure the project

Analyze data

Messages

Help pane

Additional Clarius+ applications

Embedded computer policy

Projects and tests

Introduction

Set up a simple project

Select project components

Add a device and test to the project

Rearrange items in the project tree

Delete objects in the project tree

Configure a simpl e test

Set the key parameters

Run a simple test

Working with the Projects dialog

Open a project

Edit project information

Create a new project from the Projects dialog

Export a project

Import a project

Copy or cut a project

Show Directories

Delete a project

View Projects

Migrate projects from 4200-SCS systems

Manage projects for multiple users

Set up a complex project

Customize tests

Modify a predefined test

Create a custom ITM

Create a custom UTM

Link tests or actions

Add actions

Example: Creati ng a project

Equipment required

Device connections

Connection schematic

Set up the measurements in Clarius

Select and rename a new project

Add a device

Select a custom test

Configu re the test

Execute the test

View and analyze the test results

Configure a com plex test

Test and terminal settings

Step or sweep multiple device terminals in the same test

Configure actions

Run a complex test

Run devices and tests

Run projects

Run individual devices

Run an individual test

Monitor a test

Enable the Monitor option

Running a test using Monitor

Demo Project overview

4-terminal n-MOSFET tests

3-terminal NPN BJT tests

Resistor tests

Diode tests

Capacitor tests

Introduction

Analyze data