Tektronix 4200A-SCS User manual
Model 4200A-SCS
Clarius
User’s Manual
4200A-914-01 Rev. D March 2023
tek.com/keithley
*P4200A-914-01D*
4200A-914-01D
Clarius
Model 4200A-SCS
User's Manual
© 2023, Keithley Instruments
Cleveland, Ohio, U.S.A.
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,
without the prior written approval of Keithley Instruments is strictly prohibited.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley
Instruments, LLC. Other brand names are trademarks or registered trademarks of their
respective holders.
Actuate
®
Copyright © 1993-2003 Actuate Corporation.
All Rights Reserved.
Microsoft, Visual C++, Excel, and Windows are either registered trademarks or trademarks of
Microsoft Corporation in the United States and/or other countries.
Document number: 4200A-914-01 Rev. D March 2023
Safety precaut ions
The following safety precautio ns should be observed before using this product and any associated instrumentation. Although
some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous
conditions may be present.
This product is intended for use by personnel who recogn ize sho ck haz ards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the
product. Refer to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the
equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the
instrument. They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line
voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures
explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained
service personnel may perform installation and service procedures.
Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low
transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient
overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient
overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to
mains. These instruments will be marked as category II or higher.
Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test
fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than
30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any
unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If
the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited
sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective
devices to limit fault current and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the
connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input
power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting
cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth)
ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the
voltage being measured.
For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or
accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be
impaired.
Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the
specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)
connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use
of a lid interlock.
screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.
If a
The
symbol on an instrument means caution, risk of hazard. The user must refer to the operating instructions located in the
user documentation in all cases where the symbol is mark ed on the instr u ment .
The
symbol on an instrument means warning, risk of electric shock. Use standard safety precautions to avoid personal
contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be
properly disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains hazards that might result in personal injury or death. Always read
the associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains h azard s that coul d dama ge the instrument. Such damage may
invalidate the warranty.
The CAUTION heading with the
sy mbol in the user documentation explains hazards that could result in moderate or minor
injury or damage the instrument. Always read the associated information very carefully before performing the indicated
procedure. Damage to the instrument may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits — including the power
transformer, test leads, and input jacks — must be purchased from Keithley. Standard fuses with applicable national safety
approvals may be used if the rating and type are the same. The detachable mains power cord provided with the instrument may
only be replaced with a similarly rated power cord. Other components that are not safety-related may be purc ha sed from o ther
suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through
Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement
component, call a Keithley office for information.
Unless otherwise noted in product-specific literature, Keithley instruments are designed to operate indoors only, in the following
environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.
To clean an instrument, use a cloth dampened with deionized water or mild, water-based cleaner. Clean the exterior of the
instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that
consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never
require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board
should be returned to the factory for proper cleaning/servicing.
Safety precaution revision as of June 2018.
Table of contents
Introduction .............................................................................................................. 1-1
Get started with Clarius ........................................................................................................ 1-1
Clarius interface ................................................................................................................... 1-2
Touchscreen basics .................................................................................................................. 1-3
Choose the project phase ......................................................................................................... 1-3
Run tests and set up your workspace ....................................................................................... 1-4
Organize items in the project tree ............................................................................................. 1-5
Select items from the libraries ................................................................................................... 1-6
Configure the project ................................................................................................................. 1-7
Analyze data ............................................................................................................................. 1-8
Messages .................................................................................................................................. 1-9
Help pane .................................................................................................................................. 1-9
Additional Clarius+ applications ........................................................................................... 1-9
Embedded computer policy ............................................................................................... 1-10
Projects and tests .................................................................................................... 2-1
Introduction .......................................................................................................................... 2-1
Set up a simple project......................................................................................................... 2-1
Select project components ........................................................................................................ 2-1
Add a device and test to the project .......................................................................................... 2-2
Rearrange items in the project tree ........................................................................................... 2-3
Delete objects in the project tree ............................................................................................... 2-4
Configure a simple test ........................................................................................................ 2-4
Set the key parameters ............................................................................................................. 2-6
Run a simple test ................................................................................................................. 2-7
Working with the Projects dialog .......................................................................................... 2-8
Open a project ........................................................................................................................... 2-8
Edit project information ............................................................................................................. 2-9
Create a new project from the Projects dialog......................................................................... 2-10
Export a project ....................................................................................................................... 2-10
Import a project ....................................................................................................................... 2-10
Copy or cut a project ............................................................................................................... 2-12
Show Directories ..................................................................................................................... 2-12
Delete a project ....................................................................................................................... 2-13
View Projects .......................................................................................................................... 2-13
Migrate projects from 4200-SCS systems ............................................................................... 2-14
Manage projects for multiple users ......................................................................................... 2-14
Set up a complex project.................................................................................................... 2-15
Customize tests ....................................................................................................................... 2-15
Link tests or actions ................................................................................................................ 2-18
Add actions ............................................................................................................................. 2-19
Example: Creating a project ............................................................................................... 2-20
Equipment required ................................................................................................................. 2-20
Device connections ................................................................................................................. 2-21
Set up the measurements in Clarius ....................................................................................... 2-22
Configure a complex test ................................................................................................... 2-29
Test and terminal settings ....................................................................................................... 2-29
Step or sweep multiple device terminals in the same test ....................................................... 2-30
Table of contents
Manual
Model 4200A-SCS Clarius User's
Configure actions .................................................................................................................... 2-32
Run a complex test ............................................................................................................ 2-32
Run devices and tests ............................................................................................................. 2-32
Monitor a test ..................................................................................................................... 2-36
Enable the Monitor option ....................................................................................................... 2-36
Running a test using Monitor................................................................................................... 2-37
Demo Project overview ...................................................................................................... 2-38
4-terminal n-MOSFET tests..................................................................................................... 2-39
3-terminal NPN BJT tests ........................................................................................................ 2-39
Resistor tests .......................................................................................................................... 2-40
Diode tests .............................................................................................................................. 2-40
Capacitor tests ........................................................................................................................ 2-40
Analyze data ............................................................................................................. 3-1
Introduction .......................................................................................................................... 3-1
Spreadsheet ......................................................................................................................... 3-2
Options on the Run worksheet .................................................................................................. 3-2
Run Settings .............................................................................................................................. 3-3
Run sheet .................................................................................................................................. 3-4
Formulas List of the Run worksheet .......................................................................................... 3-6
Terminal Settings pane (Analyze) ............................................................................................. 3-6
Module Settings pane (Analyze) ............................................................................................... 3-6
Measurement status .................................................................................................................. 3-7
Run History ........................................................................................................................ 3-10
Change the name of a test run ................................................................................................ 3-11
Delete test runs from Ru n History ........................................................................................... 3-12
Working with the Run History pane ......................................................................................... 3-13
Searching for a test run ........................................................................................................... 3-13
Add notes to a test run ............................................................................................................ 3-13
Copy the settings of a test run to the Configure screen .......................................................... 3-13
Setting the Run History size .................................................................................................... 3-14
Analyze test data for projects ............................................................................................. 3-14
Select data for the project-level Analyze pane ........................................................................ 3-15
Remove data from the project-level Analyze pane .................................................................. 3-16
Graph the data for test runs ............................................................................................... 3-16
Open a graph .......................................................................................................................... 3-16
Options on the graph ............................................................................................................... 3-17
View detail on a data point ...................................................................................................... 3-18
Customize the graph ............................................................................................................... 3-18
Save results and graphs .................................................................................................... 3-31
Customizing Clarius ................................................................................................ 4-1
Customize Clarius ................................................................................................................ 4-1
Add objects to the library...................................................................................................... 4-1
Add a test to the library ............................................................................................................. 4-2
Add a device to the Device Library ............................................................................................ 4-2
Add an action to the library........................................................................................................ 4-3
Add a project to the library ........................................................................................................ 4-3
Edit a library object you added .................................................................................................. 4-3
Edit an object in the library ........................................................................................................ 4-4
Project tree display options .................................................................................................. 4-6
Model 4200A
of contents
-SCS Clarius User's Manual Table
Messages display option ...................................................................................................... 4-6
My Settings .......................................................................................................................... 4-6
Specify environment settings .................................................................................................... 4-6
Specify run settings ................................................................................................................... 4-8
Set graph defaults ................................................................................................................... 4-10
Custom GPIB Abort Options ................................................................................................... 4-10
Logging ................................................................................................................................... 4-11
Tools................................................................................................................................... 4-11
Instrum ent Tools ..................................................................................................................... 4-12
Data Export tool ...................................................................................................................... 4-29
Defining the UTM user interface ............................................................................. 5-1
Define the user interface for a user test module (UTM) ....................................................... 5-1
Allow access to the UTM UI editor ....................................................................................... 5-2
Open the UTM UI Editor....................................................................................................... 5-3
Organize parameters into groups ........................................................................................ 5-4
Add a group............................................................................................................................... 5-5
Modify a group .......................................................................................................................... 5-7
Remove a group ........................................................................................................................ 5-7
Define an image for the user interface ................................................................................. 5-7
Edit the attributes for a test parameter ................................................................................. 5-8
Control types ........................................................................................................................... 5-10
Add parameters to a UTM for stepping configuration .............................................................. 5-28
Add verify rules for a UTM....................................................................................................... 5-29
Example of using the editor ............................................................................................... 5-30
UTM UI definition file information ....................................................................................... 5-32
Reset defaults .................................................................................................................... 5-32
Copy or move UTM UI definitions ...................................................................................... 5-32
Formulator ................................................................................................................ 6-1
Introduction .......................................................................................................................... 6-1
Open the Formulator ............................................................................................................ 6-2
Configure Formulator calculations ....................................................................................... 6-3
Formulator dialog ................................................................................................................. 6-3
Formula area ............................................................................................................................. 6-3
Data Series ............................................................................................................................... 6-3
Number pad .............................................................................................................................. 6-4
Functions................................................................................................................................... 6-4
Constants .................................................................................................................................. 6-4
Apply Set to ............................................................................................................................... 6-5
Using the Formulator options ............................................................................................... 6-5
Real-time functions, operators, and formulas ...................................................................... 6-6
Post-test-only functions and formulas .................................................................................. 6-6
Editing Formulator formulas and constants ......................................................................... 6-7
Table of contents
User's Manual
Model 4200A-SCS Clarius
Deleting Formulator formulas and constants ....................................................................... 6-8
Identify data analysis requirements ..................................................................................... 6-8
Determining the type of calculation: an example ....................................................................... 6-8
Determining range data for a calculation: an example .............................................................. 6-8
Creating an analysis formula ................................................................................................... 6-10
Adding an analysis formula to the test .................................................................................... 6-10
Executing an analysis formula ................................................................................................. 6-11
Viewing analysis results in the Analyze she et ......................................................................... 6-11
Viewing analysis results in the Analyze graph ......................................................................... 6-11
Formulator function reference ............................................................................................ 6-12
ABS Formulator function ......................................................................................................... 6-12
DELTA Formulator function ..................................................................................................... 6-13
EXP Formulator function ......................................................................................................... 6-13
LOG Formulator function ......................................................................................................... 6-14
LN Formulator function ............................................................................................................ 6-14
SQRT Formulator function ...................................................................................................... 6-15
Statistics ............................................................................................................................. 6-15
AVG Formulator function ......................................................................................................... 6-15
MAVG Formulator function ...................................................................................................... 6-16
MAX Formulator function ........................................................................................................ 6-16
MEDIAN Formulator function .................................................................................................. 6-17
MIN Formulator function .......................................................................................................... 6-17
STDEV Formulator function .................................................................................................... 6-17
Trigonometry ...................................................................................................................... 6-18
ACOS Formulator function ...................................................................................................... 6-18
ASIN Formulator function ........................................................................................................ 6-18
ATAN Formulator fu nction ....................................................................................................... 6-19
COS Formulator function ........................................................................................................ 6-19
DEG Formulator function ........................................................................................................ 6-20
RAD Formulator function ......................................................................................................... 6-20
SIN Formulator function .......................................................................................................... 6-21
TAN Formulator function ......................................................................................................... 6-21
Array ................................................................................................................................... 6-22
AT Formulator function ............................................................................................................ 6-22
DIFF Formulator function ........................................................................................................ 6-22
FINDD Formulator function ..................................................................................................... 6-23
FINDLIN Formulator function .................................................................................................. 6-23
FINDU Formulator function ..................................................................................................... 6-24
FIRSTPOS Formulator function .............................................................................................. 6-24
INTEG Formulator function ..................................................................................................... 6-25
INDEX Formulator function ..................................................................................................... 6-26
LASTPOS Formulator function ................................................................................................ 6-27
MAXPOS Formulator function ................................................................................................. 6-27
MINPOS Formulator function .................................................................................................. 6-27
SUBARRAY Formulator function ............................................................................................. 6-28
SUMMV Formulator function ................................................................................................... 6-28
Line fits ............................................................................................................................... 6-29
EXPFIT Formulator function .................................................................................................... 6-29
EXPFITA Formulator function ................................................................................................. 6-30
EXPFITB Formulator function ................................................................................................. 6-30
LINFIT Formulator function ..................................................................................................... 6-31
LINFITSLP Formulator function ............................................................................................... 6-32
LINFITXINT Formulator function ............................................................................................. 6-32
LINFITYINT Formulator function ............................................................................................. 6-33
LOGFIT Formulator function ................................................................................................... 6-34
LOGFITA Formulator function ................................................................................................. 6-35
Model 4200A
of contents
-SCS Clarius User's Manual Table
LOGFITB Formulator function ................................................................................................. 6-35
POLY2FIT Formulator function ............................................................................................... 6-36
POLY2COEFF Formulator function ......................................................................................... 6-37
POLYNFIT Formulator function ............................................................................................... 6-37
REGFIT Formulator function ................................................................................................... 6-38
REGFITSLP Formulator function ............................................................................................ 6-39
REGFITXINT Formulator function ........................................................................................... 6-39
REGFITYINT Formulator function ........................................................................................... 6-40
TANFIT Formulator function .................................................................................................... 6-41
TANFITSLP Formulator functi on ............................................................................................. 6-41
TANFITXINT Formulator functi on ............................................................................................ 6-42
TANFITYINT Formulator function ............................................................................................ 6-43
FFT ..................................................................................................................................... 6-43
FFT_R Formulator function ..................................................................................................... 6-44
FFT_I Formulator function ....................................................................................................... 6-45
FFT_FREQ Formulator function .............................................................................................. 6-45
FFT_FREQ_P Formulator functio n ......................................................................................... 6-46
IFFT_R Formulator function .................................................................................................... 6-47
IFFT_I Formulator function ...................................................................................................... 6-48
SMOOTH Formulator function ................................................................................................. 6-49
Misc .................................................................................................................................... 6-50
COND Formulator function ...................................................................................................... 6-50
Site and subsite operation ...................................................................................... 7-1
Introduction .......................................................................................................................... 7-1
Sites ..................................................................................................................................... 7-1
Subsites ............................................................................................................................... 7-2
Configure sites ..................................................................................................................... 7-2
Configure subsite cycling ..................................................................................................... 7-4
Connect devices for stress/measure cycling ............................................................................. 7-5
Connections for matrix card ...................................................................................................... 7-6
Connections for pulse card to device under test ....................................................................... 7-7
Connections for system hardware ............................................................................................. 7-8
Set up the Subsite Operation .................................................................................................... 7-9
Run an individual subsite ................................................................................................... 7-31
Run a single site ................................................................................................................. 7-32
Cycle a subsite ................................................................................................................... 7-33
Multi-site execution ............................................................................................................ 7-33
Delete All Run History in a project ..................................................................................... 7-34
Delete or dissolve a site and subsite ................................................................................. 7-34
Analyze data for subsites ................................................................................................... 7-35
Define output values for Analyze ............................................................................................. 7-36
Subsite Analyze sheet ............................................................................................................. 7-36
Subsite Run Settings ............................................................................................................... 7-39
Subsite Analyze graph ............................................................................................................ 7-39
Save subsite Analyze sheets and graphs ............................................................................... 7-45
User library descriptions ......................................................................................... 8-1
Introduction .......................................................................................................................... 8-2
Table of contents
User's Manual
Model 4200A-SCS Clarius
AVMControl user library ....................................................................................................... 8-2
AFG31000 user library ......................................................................................................... 8-2
BeepLib user library ............................................................................................................. 8-3
chargepumping user library ................................................................................................. 8-3
cvivulib user library ............................................................................................................... 8-4
cvucompulib user library ...................................................................................................... 8-4
cvuulib user library ............................................................................................................... 8-4
DLCP user library ................................................................................................................. 8-5
dmm-6500-7510-temp-ulib user library ................................................................................ 8-5
flashulib user library ............................................................................................................. 8-5
GateCharge user library ....................................................................................................... 8-6
generic_gpib_ulib user library .............................................................................................. 8-6
generic_visa_ulib user library .............................................................................................. 8-7
hivcvulib user library ............................................................................................................. 8-7
Hotchuck_Temptronics3010B user library ........................................................................... 8-8
Hotchuck_Triotek user library .............................................................................................. 8-8
HP4284ulib user library ........................................................................................................ 8-8
HP4294ulib user library ........................................................................................................ 8-9
HP8110ulib user library ........................................................................................................ 8-9
ki340xulib user library ........................................................................................................ 8-10
KI42xxulib user library ........................................................................................................ 8-10
KI590ulib user library ......................................................................................................... 8-10
KI595ulib user library ......................................................................................................... 8-11
ki622x_2182ulib user library .............................................................................................. 8-11
ki82ulib user library ............................................................................................................ 8-12
LS336ulib user library ........................................................................................................ 8-12
Matrixulib user library ......................................................................................................... 8-13
MultiSegmentSweep_ulib user library ................................................................................ 8-13
nvm user library .................................................................................................................. 8-13
OVPControl user library ..................................................................................................... 8-15
parlib user library ................................................................................................................ 8-15
pmuCompulib ..................................................................................................................... 8-15
pmuulib user library ............................................................................................................ 8-16
PMU_examples_ulib user library ....................................................................................... 8-16
PMU_freq_time_ulib user library ........................................................................................ 8-17
PMU_PCRAM_ulib ............................................................................................................. 8-18
Model 4200A
of contents
-SCS Clarius User's Manual Table
PRBGEN user library ......................................................................................................... 8-18
QSCVulib user library ......................................................................................................... 8-19
RPM_ILimit_Control user library ........................................................................................ 8-19
utilities_ulib ......................................................................................................................... 8-19
van der Pauw user library .................................................................................................. 8-20
VLowFreqCV user library ................................................................................................... 8-20
Winulib user library ............................................................................................................. 8-21
wlrlib user library ................................................................................................................ 8-22
Wafer-level reliability testing ................................................................................... 9-1
JEDEC standards ................................................................................................................. 9-1
Introduction .......................................................................................................................... 9-2
HCI and WLR projects ......................................................................................................... 9-2
Hot Carrier Injection projects ..................................................................................................... 9-3
Negative Bias Temperature Instability project ........................................................................... 9-4
Electromigration project ............................................................................................................ 9-5
Charge-to-Breakdown Test of Diele ct rics project ...................................................................... 9-6
HCI degradation: Background information ........................................................................... 9-6
Configuration sequence for subsite cycling ......................................................................... 9-7
V-ramp and J-ramp tests...................................................................................................... 9-8
V-ramp test: qbd_rmpv User Module ........................................................................................ 9-8
J-ramp test: qbd_rmpj User Module ........................................................................................ 9-13
Embedded computer policy .................................................... 1-10
In this section:
Get started with Clarius ............................................................ 1-1
Clarius interface ....................................................................... 1-2
Additional Clarius+ applications ............................................... 1-9
Get started with Clarius
Clarius is the primary application of Clarius+ and is the primary user interface for the 4200A-SCS.
Clarius is a versatile tool that helps you characterize individual parametric test devices or automate
testing of an entire semiconductor wafer. It allows you to create, execute, and evaluate tests and
complex test sequences without programming.
Section 1
Introduction
The Clarius Software user interface provides touch-and-swipe or point-and-click control for advanced
test definition, parameter analysis, graphing, and automation capabilities for modern semiconductor,
materials, and process characterization.
Key features:
• Ready-to-use, modifiable application tests, projects, and devices that reduce test
development time
• Built-in measurement videos from world-wide Application Engineers in four languages
• Pin-to-pad contact check ensures reliable measurements
• Multiple measurement functions
• Data display, analysis, and arithmet ic funct ions
Section
User's Manual
1: Introduction Model 4200A-SCS Clarius
Clarius interface
The Clarius interface allows you to:
• Build and edit project and execution sequences.
• Configure tests.
• Execute tests and actions, such as switching matrix connections and prober movements,
including:
A single test for one device (such as a transistor, diode, resistor, capacitor).
A test sequence for one device.
Test sequences for multiple devices. For example, test all the devices contacted by a prober
at a location on a semiconductor wafer.
The test sequences of an entire project, which may include multiple prober touchdowns for a
single semiconductor die.
• View test and analysis results.
• Analyze test results using built-in parameter extr ac tion tools.
Figure 1: Clarius interface
1-2 4200A-914-01 Rev. D March 2023
Model 4200A
Introduction
-SCS Clarius User's Manual Section 1:
Touchscreen basics
You can operate the 4200A-SCS using the touchs cr ee n. Yo u c an us e your fin gers, clean room gloves,
or any stylus manufactured for capacitive touchscreens.
To select and move on the screen:
• To scroll, swipe up or down on the screen.
• To select an item, touch it on the screen.
• To double-click an item, touch it twice.
• To right-click an item, touch and hold, then release to see the options.
To enter information, you can use the on-screen keyboard. Swipe from the left side of the display to
open the keyboard.
The touchscreen uses standard Microsoft
actions, refer to the Microsoft help information, available from the on-screen keyboard window menu
option Tool > Help Topics.
®
Windows® touch actions. For additional information on the
You can also adjust the touch settings using the Pen and Touch options in the Windows
Control Panel.
Choose the project phase
The options on the left side of the top pane of Clarius determine which phase of the project you are
working on and allow you to select options to support your tests.
Select displays the libraries, which you can use to add existing projects, tests, devices, actions, and
wafer plans to your project. You can also create your own tests, actions, and projects.
Configure displays the parameters for the item you selected in the project tree. For example, if you
selected a test, the parameters for each terminal of the test and the entire test are available.
Analyze displays the results of the test in a spreadsheet and graph. You can also access analysis
tools to explore and export your data.
Figure 2: Select, Configure, and Analyze
4200A-914-01 Rev. D March 2023 1-3
Section
User's Manual
1: Introduction Model 4200A-SCS Clarius
Run tests and set up your workspace
Figure 3: Clarius run test and workspace options
The options on the right side of the top pane of Clarius include options that allow you to run tests,
configure instruments, manage projects, set up your workspace, and learn about the 4200A-SCS.
Run runs the highlighted item. You can run an individual test by highlighting only that test. You can
run all the tests for a dev ice, s ubs ite , s ite, or pr oj ect by highlighting the dev ice, subs ite , s ite, or pr oj ect .
Only items that are checked and below the selected item in the hierarchy are run.
Stop stops all running items.
Save saves the project configuration.
Tools provides module-specific tools and data export options. For source-measure units (SMUs), you
can run autocalibration. For capacitance-voltage units (CVUs), you can set up connection
compensation, do real-time measurements, and perform a confidence check. For pulse measure units
(PMUs) and pulse generator units (PGUs), you can set up connection compensation. The Data
Export options allow you to export Run History data files to Microsoft Excel.
Use Projects to manage your projects. It includes options to create, import, export, copy, cut, paste,
edit, and delete projects. Projects are automatically stored in Projects when you create them in the
project tree.
Use My Settings to customize Clarius to better meet your needs. You can change environment
settings, run settings, GPIB abort settings, and error and warning logging. It also includes the About
Clarius option, which lists the Clarius version and copyright information.
Use the Learning Center to access complete 4200A-SCS documentation, incl ud ing on lin e help ,
videos, instructions, application notes, white papers, and other materials to help you use
your 4200A-SCS.
1-4 4200A-914-01 Rev. D March 2023
Model 4200A
Introduction
-SCS Clarius User's Manual Section 1:
Organize items in the project tree
The project tree on the left side of the Clarius window displays the items in your project, including
devices, tests, actions, and sites. The project tree for the default project is shown in the figure below.
The settings for the item you select in the project tree are displayed when you select Configure from
the top bar. The test data for the item is displayed when you select Analyze.
When you run a test, the item that is highlighted runs. If the item is a project, site, subsite, or device,
all checked items in the hierarchy below the highlighted item run.
Figure 4: Project tree for the default project
4200A-914-01 Rev. D March 2023 1-5
Section
User's Manual
1: Introduction Model 4200A-SCS Clarius
Select items from the libraries
When you choose Select, the center pane displays libraries of tests, devices, actions, wafer plans, or
projects that you can add to the project tree. These libraries are templates that you can copy from to
create your own tests, devices, actions, wafer plans, and projects. When you copy an item from the
library to the project tree, the item in the project tree is a copy. The item in the library is not affected
by any changes you make to the copy.
The Test Library contains predefined tests. The predefined tests contain detailed definitions that tell
Clarius how to characterize a device, including associated data analyses and parameter ex trac tions .
Clarius comes with a library of tests for commonly used devices, including transistors, diodes,
resistors, and capacitors. You can also create your own tests. The following figure shows the
Test Library.
Figure 5: Test library
The Device Library contains the devices that need to be characterized, such as transistors, diodes,
resistors, or capacitors. Each test must be in the project tree under a device. The devices available in
the library include the standard set of devices that come installed on the 4200A-SCS and any
custom-name devices that you have submitted; refer to Submitting devices to a library (on page 4-2
).
The Action Library contains items that support the tests and help control the project. Actions can
generate dialog boxes to prompt test operator action, control prober movements, and manage
switching. You can also create your own actions from user libraries.
1-6 4200A-914-01 Rev. D March 2023
Model 4200A
Introduction
-SCS Clarius User's Manual Section 1:
The Wafer Plan Library contains sites and subsites. A site is used if you are testing a repeating
pattern of dies and test structures on a wafer. Every wafer location that a prober can move to and
contact at any one time is a subsite. There are typically multiple subsites for each site. Subsites
typically correspond to a single test structure or other combination of devices that are tested as
a group.
The Project Library contains predefined projects. Projects include the devices, tests, actions, sites,
and subsites organized for testing a single device, group of devices, or wafer. You can also create
your own empty project.
For most of the libraries, the right pane displays filters that you can use to reduce the list of library
items to the items you need. You can also use the Search option at the top of the library to type a
search term to reduce the number of items.
You can sort the libraries by name or title.
The Image and Description options at the top of the library allow you to turn the images and
descriptions that are shown in the library on or off. Turning them off allows more items to be visible on
the screen.
Import allows you to import items into the 4200A-SCS.
Configure the project
Select Configure for an item in the project tree to display the settings for that item. Depending on the
item, settings are available in the center and right panes. Help for the selected item is also available
in the Help pane.
Figure 6: Configure pane for the pulse-vds-id test
4200A-914-01 Rev. D March 2023 1-7
Section
User's Manual
1: Introduction Model 4200A-SCS Clarius
Analyze data
When you run tests, you can display and analyze test results and test definitions in the Analyze pane.
The Analyze pane displays data in a spreadsheet and as a graph.
The View options change the view from both spreadsheet and graph to only the spreadsheet or only
the graph. You can use Save Data to save the graph to an image file or save the data into a
spreadsheet file.
If the Formulator was used to calculate data for this test, the Run Formulas List displays the
calculations. You can select Formulator to open the Formulator and edit the formulas or create
new ones.
The Graph Definition Menu and other options on the graph allow you to change the display of
the data.
The Run History pane on the right displays the time and name of each test run. When you select a
run from Run History, the sheet and graph in the center pane change to show the data from that
test run.
The Terminal Settings pane, also on the right, displays the settings for the presently selected
test run.
Figure 7: Analyze showing the vds-id test
1-8 4200A-914-01 Rev. D March 2023
Model 4200A
Introduction
Messages
Help pane
-SCS Clarius User's Manual Section 1:
Messages regarding the test and execution are displayed at the bottom of the Clarius window. To
expand the Messages area to view more detail, select the up arrow to the left of the Messages
heading.
You can right-click a message to copy it or to select and copy all messages to the clipboard.
You can also right-click and select Clear All to remove the existing messages.
The Help pane displays information that is related to the library item or project tree item that
is selected.
If you have the Select pane open, the help describes the item that is selected in the Library.
If you have the Configure or Analyze pane open, the help describes the item that is selected in the
project tree.
Additional Clarius+ applications
Two of the Clarius+ applications support Clarius:
• The Keithley User Library Tool (KULT) allows you to create libraries of test modules using the C
programming language. These test modules are executed by Clarius.
• The Keithley Configuration Utility (KCon) manages the configuration and interconnections
between the test system components that are controlled by Clarius.
To control the 4200A-SCS remotely using an external GPIB controller, you can use another Clarius
software tool, the Keithley External Control Interface (KXCI). You cannot run KXCI and
Clarius simultaneously.
To configure and control the optional pulse cards, you can use the Keithley Pulse tool (KPulse). A
pulse card is a dual-channel pulse card that is integrated inside the 4200A-SCS mainframe. Although
KPulse can be launched at the same time as Clarius, KPulse and Clarius cannot communicate with
hardware simultaneously.
For information about these applications, refer to:
• Model 4200A-SCS KULT and KULT Ext ensi on Progr a mm ing (4200A-KULT-907-01)
• “Keithley Configuration Utility (KCon)” in Model 4200A-SCS Setup and Maintenance
• Model 4200A-SCS KXCI Remote Control Programming
+
• “KPulse (for Keithley Pulse Cards)” in the Model 4200A-SCS Pulse Card (PGU and PMU)
User's Manual
4200A-914-01 Rev. D March 2023 1-9
Section
User's Manual
1: Introduction Model 4200A-SCS Clarius
Embedded computer policy
If you install software that is not part of the standard application software for the 4200A-SCS,
the nonstandard software may be removed if the instrument is sent in for service. Back up
the applications and any data related to them b efore sending the instrument in for service.
Do not reinstall or upgrade the Microsoft® Windows® operating system (OS) on any
4200A-SCS unless the installation is performed as part of authorized service by Keithley
Instruments. Violation of this precaution will void the 4200A-SCS warranty and may render
the 4200A-SCS unusable. Any attempt to reinstall or upgrade the operating system (o ther
than a Windows service pack update) will require a return-to-factory repair and will be treated
as an out-of-warranty service, including time and material charges.
Although you must not attempt to reinstall or upgrade the operating system, you can restore
the hard drive image (complete with the operating system) using the Acronis True Image OEM
software tool, described in “System-level backup and restore software” in Model 4200A-SCS
Setup and Maintenance.
You can install Windows quality updates. The version of Windows installed on 4200A-SCS systems
only supports installation of quality updates. Feature updates are not supported.
As shipped, the 4200A-SCS automatically runs Windows quality updates when the 4200A-SCS is
restarted. They are prevented from occurring during operation.
1-10 4200A-914-01 Rev. D March 2023
Demo Project overview .......................................................... 2-38
Section 2
Projects and tests
In this section:
Introduction .............................................................................. 2-1
Set up a simple project ............................................................. 2-1
Configure a simple test ............................................................ 2-4
Run a simple test ..................................................................... 2-7
Working with the Projects dialog .............................................. 2-8
Set up a complex project ........................................................ 2-15
Example: Creating a project ................................................... 2-20
Configure a complex test ....................................................... 2-29
Run a complex test ................................................................ 2-32
Monitor a test ......................................................................... 2-36
Introduction
This chapter describes how to set up projects and tests in Clarius.
Set up a simple project
To start testing, you can start with a new project or use an existing project. A project consists of items
such as devices and tests.
The order of operations of a test is determined by the order and selection of items in the project tree.
The following topics describe how to set up and run a simple project using an existing project from the
Project Library.
Select project components
Use the Select pane to add items to the project tree. When Select is active, the center pane contains
libraries for tests, devices, actions, wafer plans, and projects. You can use filters and search options
to help you find the items you need for your test.
To clear filters, select Clear Filters at the bottom of the Filters pane. To clear the search, select Clear
next to the Search button.
The following example shows you how to select tests for bipolar junction transistors (BJTs).
Section
User's Manual
2: Projects and tests Model 4200A-SCS Clarius
To set up a test of BJTs:
1. Select Save to save your existing project.
2. Choose Select.
3. Select the Projects tab.
4. In the Filters pane, select Transistor.
5. In the Search box, type BJT and select Search. The Project Library displays projects that are
intended for BJT transistor testing.
6. Select Create for the project you want to open. The project replaces the previous project in the
project tree.
Figure 8: Filter and search for the bjt project
Add a device and test to the project
You can add additional items to a project. When you add a project from the library to the project tree,
it is copied from the project in the library. Any changes you make do not affect the original project.
The new project in the project tree is automatically stored in Projects.
This example shows you how to add a predefined test to the project. Predefined tests are configured
with commonly used parameter settings and a set of typical data. Once they are in a project, you can
change the parameters as needed. They can be an efficient way for you to add a test to your project.
You can use the basic procedure described here to find any items in the library.
2-2 4200A-914-01 Rev. D March 2023
Model 4200A
Projects and tests
-SCS Clarius User's Manual Section 2:
To add a four-terminal MOSFET device and test to the project:
1. In the center pane, select Tests.
2. In the Filters pane, select Transistor and 4 Terminals.
3. In the search box, type MOSFET and select Search.
4. Scroll to the MOSFET Drain Family of Curves (vds-id) test.
5. Select Add. The selected test and the device are added to the project tree under the previous
item that was highlighted.
6. To move the device and test, drag the device to a new location.
7. Select Save.
Figure 9: Add a MOSFET test and device to the project
If the device for a test is not in the project tree, Clarius adds the appropriate device when you add a
test to the project tree. You can also add the device and test separately.
Rearrange items in the project tree
To rearrange items in the project tree, drag the items to the new location. If the item cannot be placed
in the selected location, a red X is displayed. In the example below, a resistor test cannot be placed
under a BJT device.
4200A-914-01 Rev. D March 2023 2-3
Section
User's Manual
2: Projects and tests Model 4200A-SCS Clarius
Figure 10: Object not allowed at this location in the project tree
For actions, if they are at the bottom of the project tree, you can promote or demote them to move
them in the tree structure. For example, if the action is under a device, you might want to move it to
be at the project level. To promote or demote an action, right-click the action and select Promote
Action or Demote Action.
Delete objects in the project tree
If you delete an object, other items may also be deleted. For example, if you delete a subsite ,
all device and tests in the subsite are also deleted. If you delete a device, all tests in the
device are deleted.
To delete an object:
1. In the project tree, select the item you want to delete.
2. Select the object.
3. Select Delete at the top of the project tree. A confirmation message is displayed.
4. Select OK.
Configure a simpl e test
Use the Configure pane to set up your test. For interactive test modules (ITMs), the Configure pane
displays a schematic of the test device. The schematic is connected to an object that shows the
operation mode and the type of instrument that is connected to the terminal.
The following topics discuss the Test Settings pane for interactive test modules (ITMs). For tests that
are based on user modules (UTMs), you use the options in the Test Settings pane to select the User
Library and User Module for the test. Refer to Create a custom test (on page 2-17
) for information on
settings available for UTMs.
2-4 4200A-914-01 Rev. D March 2023
Model 4200A
Projects and tests
-SCS Clarius User's Manual Section 2:
The connections selected in the Clarius software must accurately reflect the physical
hardware connections when the test i s executed. Incorrect terminal configurations can result
in anomalous test results and device damage .
The key parameters for each terminal are displayed near the terminal. The key parameters include:
• The type of terminal, such as gate, drain, source, or collector.
• The instrument that is attached to the terminal. You assign the instrument, ground unit, or open
circuit that is physically connected to the terminal during the test.
• The operation mode and basic settings for that mode. For example, the start and stop values are
displayed if a sweep operation mode is selected.
Figure 11: Configure pane
4200A-914-01 Rev. D March 2023 2-5
Section
User's Manual
2: Projects and tests Model 4200A-SCS Clarius
Set the key parameters
The Key Parameters are the most commonly used parameters.
The parameters that are available depend on the instrument that is selected. For descriptions of
parameters, refer to:
• “SMU - all parameters” in Model 4200A-SCS Source-Measure Unit (SMU) User's Manual
• “CVU - all parameters” in Model 4200A-SCS Capacitance-Voltage Unit (CVU) User's Manual
• “PMU - all parameters” in Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual
To set the Key Parameters:
1. Select the field that you want to change.
2. If there is a:
Down arrow to the right of the field: Select a value from the list.
Field: Type the value. Error messages are displayed if you type an out-of-range value.
Checkbox: Select or clear the checkbox to enable or disable an option.
3. Select Save.
Figure 12: Clarius selection options
2-6 4200A-914-01 Rev. D March 2023
Model 4200A
Projects and tests
-SCS Clarius User's Manual Section 2:
Run a simple test
When you select Run, selected tests and actions at a lower level than the highlighted item in the
project tree are executed from top to bottom in the project tree. If you want to run an entire project,
make sure the project name is highlighted. Running a project saves the configuration settings and the
existing run history of the project.
In the following example, when you select Run, the following occurs:
• The vce-ic test runs.
• The gummel test runs.
• The vcsat test is skipped.
• The vds-id test runs.
Figure 13: Run a test at the project level
In the following example, only the gummel test runs. Even though the other tests are selected, they
are not below the gummel t es t in the hierar chy .
Figure 14: Run specific tests
4200A-914-01 Rev. D March 2023 2-7
Section
User's Manual
2: Projects and tests Model 4200A-SCS Clarius
To run a test in Clarius:
1. In the project tree, select that tests and actions that you want to run or execute.
2. Highlight the item where you want the test to start. For example, if you want to run the entire
project, select the project.
3. Select Run.
4. Select Analyze to view the res ults.
To abort a test, select Stop. All test and action execution stops immediat ely .
Working with the Projects dialog
The Projects option in the Clarius ribbon allows you to work with the projects you have created.
Projects from all user accounts and any projects added to the project directory, which is defined in My
Settings, are available.
You can use the Projects dialog to create new projects, import and export projects, and to copy, cut,
paste, edit, delete, search for, and open projects.
To change the project directory, see My Projects Directory (on page 4-8).
Open a project
Your projects are automatically added to the Projects dialog when they are added to the project tree.
This procedure describes how to retrieve a project.
To open a project:
1. Choose Projects from the ribbon.
2. Type the project name in the Search box.
3. Select Search.
4. Select the project.
5. Select Open Project. If the project in the project tree has unsaved changes, you are prompted to
save the changes.
2-8 4200A-914-01 Rev. D March 2023
Loading...