Tektronix 4200A-SCS User manual
Model 4200A-SCS
Pulse Card (PGU and PMU)
User's Manual
4200A-PMU-900-01 Rev. B March 2023
tek.com/keithley
*P4200A-PMU-900-01B*
4200A-PMU-900-01B
Pulse Card (PGU and P MU)
Model 4200A-SCS
User's Manual
© 2023, Keithley Instruments
Cleveland, Ohio, U.S.A.
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,
without the prior written approval of Keithley Instruments is strictly prohibited.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley
Instruments, LLC. Other brand names are trademarks or registered trademarks of their
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Document number: 4200A-PMU-900-01 Rev. B March 2023
Safety precaut ions
The following safety precautio ns should be observed before using this product and any associated instrumentation. Although
some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous
conditions may be present.
This product is intended for use by personnel who recogn ize sho ck haz ards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the
product. Refer to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the
equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the
instrument. They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line
voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures
explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained
service personnel may perform installation and service procedures.
Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low
transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient
overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient
overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to
mains. These instruments will be marked as category II or higher.
Unless explicitly allowed in the specification s, opera t ing man ual, and ins trum ent labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test
fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than
30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any
unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If
the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited
sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective
devices to limit fault current and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the
connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input
power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting
cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth)
ground. Always make measurements with dry hands while standing on a dry, insulat ed surf ace cap able of withs tand ing the
voltage being measured.
For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or
accessories are used in a manner not specifie d in the operati ng instr u cti ons , the prot ect ion provi ded by the equi pm ent ma y be
impaired.
Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the
specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield conn ect io ns for measuring circuits, NOT as protective earth (safety ground)
connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use
of a lid interlock.
If a
screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.
The symbol on an instrument means caution, risk of hazard. The user must refer to the operating instructions located in the
user documentation in all cases where the symbol is marked on the instrument.
The symbol on an instrument means warning, risk of electric shock. Use standard safety precautions to avoid personal
contact with these voltages.
The
symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this
symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be
properly disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains hazards that might result in personal injury or death. Always read
the associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains h azard s that coul d dama ge the instrument. Such damage may
invalidate the warranty.
The CAUTION heading with the
symbol in the user documentation explains hazards that could result in moderate or minor
injury or damage the instrument. Always read the associated information very carefully before performing the indicated
procedure. Damage to the instrument may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits — including the power
transformer, test leads, and input jacks — must be purchased from Keithley. Standard fuses with applicable national safety
approvals may be used if the rating and type are the same. The detachable mains power cord provided with the instrument may
only be replaced with a similarly rated power cord. Other components that are not safety-related may be purcha sed fr om o ther
suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through
Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement
component, call a Keithley office for information.
Unless otherwise noted in product-specific literature, Keithley instruments are designed to operate indoors only, in the following
environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.
To clean an instrument, use a cloth dampened with deionized water or mild, water-based cleaner. Clean the exterior of the
instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that
consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never
require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board
should be returned to the factory for proper cleaning/servicing.
Safety precaution revision as of June 2018.
Table of contents
Introduction .............................................................................................................. 1-1
Models 4220-PGU and 4225-PMU ...................................................................................... 1-1
Connections ............................................................................................................. 2-1
Introduction .......................................................................................................................... 2-1
Connection guidelines .......................................................................................................... 2-1
PMU common connections ....................................................................................................... 2-2
Shield connections .................................................................................................................... 2-2
Cable length .............................................................................................................................. 2-3
High frequency connections ...................................................................................................... 2-3
Prober chuck connections ......................................................................................................... 2-4
PGU and PMU connectors ................................................................................................... 2-4
Model 4225-RPM ................................................................................................................. 2-5
RPM input, output, and top panels ............................................................................................ 2-5
Connecting the RPM to the PMU .............................................................................................. 2-6
Mounting the RPM .................................................................................................................... 2-8
RPM diagrams for local and remote sensing............................................................................. 2-8
Using the RPM as a switch ....................................................................................................... 2-9
Two-terminal device connections ....................................................................................... 2-10
Three-terminal device connections .................................................................................... 2-12
Four-terminal device connections ...................................................................................... 2-13
Pulse source-measure connections ................................................................................... 2-15
Pulse generator connections ................................................................................................... 2-15
Using an adapter cable to connect pulse card to DUT ...................................................... 2-16
Connections to prober or test fixture bulkhead connectors ............................................... 2-16
RPM connections to DUT................................................................................................... 2-17
Two-terminal test connections ................................................................................................. 2-17
Remote sensing using RPM connections to a prober ............................................................. 2-18
PMU connection compensation ......................................................................................... 2-20
Short compensation ................................................................................................................ 2-20
Offset current compensation ................................................................................................... 2-21
Perform connection compensa tion .......................................................................................... 2-21
Enabling connection compensation ......................................................................................... 2-22
Load-line effect compensation (LLEC) for the PMU .......................................................... 2-24
Methods to compensate for load-line effect............................................................................. 2-25
How LLEC adjusts pulse output to the target levels ................................................................ 2-25
Coping with the load-line effect ............................................................................................... 2-27
LLEC maintains even voltage spacing .................................................................................... 2-27
Test considerations ................................................................................................................. 2-28
LPT functions used to configure LLEC .................................................................................... 2-29
Enable LLEC ........................................................................................................................... 2-29
Disable LLEC and set the output impedance .......................................................................... 2-30
Setting up PMUs and PGUs in Clarius .................................................................... 3-1
Introduction .......................................................................................................................... 3-1
Table of contents
User's Manual
Model 4200A-SCS Pulse Card (PGU and PMU)
Configure the PGU, PMU, and RPM using tests ................................................................. 3-1
Create a PMU project ........................................................................................................... 3-2
Configure the tests ............................................................................................................... 3-3
PMU operation modes ......................................................................................................... 3-5
PMU - all terminal parameters ............................................................................................. 3-6
Start (PMU Amplitude Sweep) .................................................................................................. 3-6
Stop (PMU Amplitude Sweep) ................................................................................................... 3-6
Step (Pulse Amplitude Sweep) .................................................................................................. 3-7
Points ........................................................................................................................................ 3-7
Base .......................................................................................................................................... 3-7
Amplitude .................................................................................................................................. 3-7
Dual Sweep (pulse) ................................................................................................................... 3-8
Force Range (PMU) .................................................................................................................. 3-8
Disable outputs at completion ................................................................................................... 3-8
Current Spot Mean High ........................................................................................................... 3-9
Current Spot Mean Low ............................................................................................................ 3-9
Measure Current Range (PMU) ................................................................................................ 3-9
Low Range .............................................................................................................................. 3-10
Current Sample Waveform ...................................................................................................... 3-10
Voltage Spot Mean High ......................................................................................................... 3-11
Voltage Spot Mean Low .......................................................................................................... 3-11
Voltage Sample Waveform...................................................................................................... 3-11
Report Timestamps ................................................................................................................. 3-11
Report Status (PMU) ............................................................................................................... 3-12
PMU measurement status ....................................................................................................... 3-12
Compensation Short Connection ............................................................................................ 3-15
Load Line Effect Compensation .............................................................................................. 3-15
DUT Resistance (R DUT) ........................................................................................................ 3-15
Max Voltage Estimator ............................................................................................................ 3-15
Threshold Current ................................................................................................................... 3-15
Threshold Voltage ................................................................................................................... 3-16
Threshold Power ..................................................................................................................... 3-16
PMU Test Settings ............................................................................................................. 3-16
Pulse Settings ......................................................................................................................... 3-16
Timing Parameters .................................................................................................................. 3-20
PMU Advanced Test Settings ................................................................................................. 3-22
PMU capacitive charging/discharging effects .................................................................... 3-35
PMU and RPM measure ranges are not source ranges .................................................... 3-37
4220-PGU and 4225-PMU output limitations ..................................................................... 3-38
Configure the PGU, PMU, and RPM using tests ............................................................... 3-38
Step or sweep multiple device terminals in the same test ................................................. 3-39
Basic troubleshooting procedure ....................................................................................... 3-41
Step 1. Verify prober connections from the PMU or RPM to the DUT ..................................... 3-41
Step 2. Verify the pulse shape ................................................................................................ 3-42
Step 3. Is the pulse level correct for each channel? ................................................................ 3-43
Step 4. Is the pulse I-V cur ve s uspe ct? ................................................................................... 3-43
Pulse card concepts ................................................................................................ 4-1
Models 4220-PGU and 4225-PMU ...................................................................................... 4-1
PMU block diagram ................................................................................................................... 4-2
Pulse modes ............................................................................................................................. 4-3
Model 4200A
of contents
-SCS Pulse Card (PGU and PMU) User's Manual Table
Pulse measurement types (PMU) ............................................................................................. 4-3
Measure modes ........................................................................................................................ 4-4
4200A-SCS power supply limitations ................................................................................... 4-5
Pulse source-measure concepts .......................................................................................... 4-8
Ultra-fast I-V tests ..................................................................................................................... 4-8
Sample rate ............................................................................................................................. 4-10
Segment Arb waveform ........................................................................................................... 4-11
Full arb waveform .................................................................................................................... 4-15
Pulse waveforms for nonvolatile memory testing .................................................................... 4-16
Waveform capture ................................................................................................................... 4-17
DUT resistance determines pulse voltage across DUT ........................................................... 4-17
Triggering ................................................................................................................................ 4-22
Measurement types ............................................................................................................ 4-25
Spot mean measurements ...................................................................................................... 4-26
Spot mean discrete readings................................................................................................... 4-26
Spot mean average readings .................................................................................................. 4-27
Waveform measurements ....................................................................................................... 4-27
Waveform discrete readings.................................................................................................... 4-28
Waveform average readings ................................................................................................... 4-29
Measurement timing ................................................................................................................ 4-30
KPulse (for Keithley Pulse Cards)........................................................................... 5-1
Keithley Pulse Application .................................................................................................... 5-1
Starting KPulse ......................................................................................................................... 5-1
KPulse setup and help .............................................................................................................. 5-2
Triggering ............................................................................................................................. 5-3
Standard pulse waveforms .................................................................................................. 5-4
Segment Arb waveforms ...................................................................................................... 5-6
Exporting Segment Arb waveform files ..................................................................................... 5-8
Custom file arb waveforms (full arb) .................................................................................... 5-9
Custom Arb file operation: Select and configure waveforms ................................................... 5-10
Custom Arb file operation: Copy waveforms into Sequencer .................................................. 5-11
Custom Arb file operation: Load waveform and turn on output ............................................... 5-12
Waveform types ...................................................................................................................... 5-13
Use the RPM to switch the SMU, CVU, and PMU ................................................... 6-1
Introduction .......................................................................................................................... 6-1
Included accessories ............................................................................................................ 6-2
Equipment required .............................................................................................................. 6-3
Update the RPM configuration in KCon ............................................................................... 6-3
Device connections .............................................................................................................. 6-4
Connection schematic ............................................................................................................... 6-4
Connect the 4200A-SCS to the DUT ......................................................................................... 6-5
Set up the measurements in Clarius .................................................................................... 6-6
Create a new project ................................................................................................................. 6-6
Add a device ............................................................................................................................. 6-7
Search for and select existing tests in the Test Library ............................................................. 6-8
Configure the vfd test ................................................................................................................ 6-9
Configure the cv-diode test ..................................................................................................... 6-11
Configure the pulse-diode test ................................................................................................ 6-13
Table of contents
User's Manual
Model 4200A-SCS Pulse Card (PGU and PMU)
Run the test ............................................................................................................................. 6-15
View and analyze the test results ............................................................................................ 6-15
PMU for pulsed I-V measurements on a MOSFET ................................................. 7-1
Introduction .......................................................................................................................... 7-1
Equipment required .............................................................................................................. 7-2
Device connections .............................................................................................................. 7-2
Connection schematic ............................................................................................................... 7-3
Set up the measurements in Clarius .................................................................................... 7-4
Create a new project ................................................................................................................. 7-5
Search for and select an existing test ....................................................................................... 7-5
Configure the test ...................................................................................................................... 7-6
Run the test and analyze the results ......................................................................................... 7-8
Testing flash memory .............................................................................................. 8-1
Testing flash memory ........................................................................................................... 8-1
Flash connection guidelines ................................................................................................. 8-2
Programming and erasing flash memory .................................................................................. 8-3
Endurance testing ................................................................................................................ 8-8
Connections for endurance testing - no switching matrix .......................................................... 8-9
Connections for endurance testing - switching matrix ............................................................. 8-11
Disturb testing .................................................................................................................... 8-12
Connections for disturb testing ................................................................................................ 8-12
Using a switching matrix .................................................................................................... 8-14
Use KPulse to create and export Segment Arb waveforms............................................... 8-14
Enter Segment Arb values into UTM array parameters ..................................................... 8-16
Direct connections to single DUT ....................................................................................... 8-17
Direct connections to array DUT for disturb testing ........................................................... 8-19
Models 4220-PGU and 4225-PMU ........................................... 1-1
In this section:
Models 4220-PGU and 4225-PMU
The 4220-PGU High Voltage Pulse Generator Unit and 4225-PMU Ultra-Fast Pulse Measure Unit are
high-speed pulse-generator cards for the 4200A-SCS. The 4220-PGU provides pulse output only.
The 4225-PMU provides both pulse output and pulse measurement. The PGU and PMU have similar
pulse output characteristics.
Section 1
Introduction
The 4225-PMU can be paired with one or two 4225-RPM Remote Preamplifier/Switch Modules. The
RPM is a remote amplifier and automatic switch. When the RPM is used as a preamplifier for the
PMU, it provides additional low-current measurement ranges. When the RPM is used as a switch, it
switches between the PMU, SMUs, and CVUs.
LPT functions that pertain to the PGU and PMU are documented in “LPT commands for PGUs and
PMUs” in Model 4200A-SCS LPT Library Programming.
To do quick tests with minimal interaction with other 4200A-SCS test resources, you can use the
Keithley Pulse Application (KPulse). KPulse is a nonprogramming alternative that you can use to
configure and control the installed Keithley pulse cards. Refer to KPulse (on page 5-1
information.
The simplified circuits of the 4220-PGU and 4225-PMU pulse generators are shown in the
following figure.
) for additional
Section
User's Manual
1: Introduction Model 4200A-SCS Pulse Card (PGU and PMU)
Figure 1: Simplified circuits of the PGU and PMU
1-2 4200A-PMU-900-01 Rev. B March 2023
Load-line effect compensation (LLEC) for the PMU ............... 2-24
Section 2
Connections
In this section:
Introduction .............................................................................. 2-1
Connection guidelines .............................................................. 2-1
PGU and PMU connectors ....................................................... 2-4
Model 4225-RPM ..................................................................... 2-5
Two-terminal device connections ........................................... 2-10
Three-terminal device connect ions ........................................ 2-12
Four-terminal device connections .......................................... 2-13
Pulse source-measure connections ....................................... 2-15
Using an adapter cable to connect pulse card to DUT ........... 2-16
Connections to prober or test fixture bulkhead conne ctor s .... 2-16
RPM connections to DUT ....................................................... 2-17
PMU connection compensation .............................................. 2-20
Introduction
Proper connection methods are critical to perform stable and accurate measurements using the PMU,
with or without the RPM. The guidelines in this chapter help prevent pulse voltage overshoot and
oscillations.
You can use the Multi-measurement Prober Cable Kits (4210-MMPC) to connect the 4200A-SCS to
perform pulse I-V measurements. These kits help maximize signal fidelity by eliminating the
measurement errors that often result from cabling errors. The prober cable kits include:
• 4210-MMPC-C Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for Cascade Microtech
12000 prober series
• 4210-MMPC-S Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for SUSS MicroTec
PA200/300 prober series
• 4210-MMPC-L Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for Lucas Signatone
probers
• 4210-MMPC-W Multi-Measurement (I-V, C -V, Pulse) Prober Cable Kit for Wentworth
Laboratories probers
Connection guide lines
The following guidelines describe PMU common connections, shield connections, cable length, high
frequency connections, and prober chuck connections for the PMUs and PGUs.
Section
User's Manual
2: Connections Model 4200A-SCS Pulse Card (PGU and PMU)
PMU common connections
Common LO for the PMU is the outer shells of the two SMA connectors. With an SMA cable
connected (see following figure), common LO is the outside shield of the cable.
Figure 2: PMU common low terminals
Because pulsing requires high frequency signal propagation, reduce cable inductance by minimizing
the loop area of the connection to the device under test (DUT).
Do not use the GNDU as common low for the PMU to avoid creating a large loop area. When using
the GNDU, an inductive loop area is created when the HI and LO leads are separated. Fast rise times
(dt), high current (di), and large inductances (L) can cause voltage overshoots, oscillations, and
ringing in the high-speed measurement circuit. This is based on Lenz’s law: V = L di/dt.
Shield connections
For multiple PMU channels, you should connect the shields (common LO) from all PMU channels as
close as possible to the DUT. You reduce inductance by minimizing the loop area of the shield
connections. The figure in Using an adapter cable to connect pulse card to DUT (on page 2-16) and
the Local sensing (on pag e 2-17) figures illustrate proper shield connection schemes using the
supplied cabling.
2-2 4200A-PMU-900-01 Rev. B March 2023
Model 4200A
Connections
-SCS Pulse Card (PGU and PMU) User's Manual Section 2:
Cable length
Use the shortest possible cable length to achieve the highest frequency output, the best pulse shape,
and the best results. Here are reasons to avoid using longer cable lengths:
• Longer cable lengths have longer reflection times, which can slow down transmission times.
• Longer cables may have impedance mismatches, which can cause distortions.
• Higher capacitance in longer cables causes higher capacitive charging effects during the pulse
transitions (see PMU capacitive charging/discharging effects (on page 3-35
Only use the white SMA coaxial cables that are supplied with the PMU and RPM. These are 50 Ω
cables that match the internal 50 Ω resistance of the PMU. The PMU is supplied with 6.5 ft (2 m) SMA
cables and the RPM is supplied with 8 in. (20 cm) SMA cables. Always use the 8 in. (20 cm) SMA
cables with the RPM.
High frequency connections
Use these connection guidelines for high-speed testing (pulse width <1 μs).
)).
• Use cables and connectors optimized for high frequency (at least 150 MHz). The SMA coaxial
cables supplied with the PMU and RPM are rated for high frequency.
• Probe manipulators must be rated at least 150 MHz.
• Properly connect the shields of the coaxial cables and minimize the loop area of the shield
connections (see Shield connections (on pag e 2-2
)).
• Minimize cable length (see Cable length (on page 2-3)).
• Use a signal path that matches the impedance of the instrument (50 Ω). The SMA cables
supplied with the PMU and RPM are 50 Ω.
4200A-PMU-900-01 Rev. B March 2023 2-3
Section
User's Manual
2: Connections Model 4200A-SCS Pulse Card (PGU and PMU)
Prober chuck connections
When possible, avoid pulse connections to the prober chuck. If unavoidable, use these guidelines
when connecting to the prober chuck:
• When making connections to the back side of the wafer, PMU functionality will be diminished.
Use caution and verify waveforms.
• Generally, the chuck adds capacitance and noise. This reduces both low-current and hig h-speed
sampling performance.
• If one of the device terminals is the back side of the wafer, then pulse only on that terminal (on
chuck) and measure at another terminal using the second channel. If possible, do not measure
from the PMU channel connected to the chuck.
• For a two-terminal device, refer to Two-terminal device connections (on page 2-10), using figure
"Two-terminal device connections to a PMU using both channels" as a guide.
• For a four-terminal device, use the Four-terminal device connections (on page 2-13) to two PMUs
figure, or the Local sensing (on page 2-17) four-terminal figure as a guide (as applicable). This
cabling approach permits the low-side measurement approach described in PMU capacitive
charging/discharging effects (on page 3-35).
PGU and PMU connectors
The connectors for the PGU and PMU pulse cards are shown in the following figure.
Figure 3: 4220-PGU and 4225-PMU connectors
2-4 4200A-PMU-900-01 Rev. B March 2023
Model 4200A
Connections
-SCS Pulse Card (PGU and PMU) User's Manual Section 2:
Model 4225-RPM
The 4225-RPM is a remote amplifier/switch that is used as a current preamplifier for the 4225-PMU.
The RPM provides additional high-speed, low-current measurement ranges.
The RPM can also be used as a switch for the 4200-SMU, 4201-SMU, 4210-CVU, and 4215-CVU.
See Using the RPM as a switch (on page 2-9
RPM input, output, and top panels
The input, output, and top panels for the RPM are shown in the following figure.
Figure 4: 4225-RPM panels
).
The RPM connector on the input panel connects to one of the RPM connectors (channel 1 or channel
2) on the 4225-PMU. The RPM also has inpu t connectors for a 4200-SMU or 4201-SMU
(source-measure unit) and a 4210-CVU or 4215-CVU (capacitance-voltage unit).
The previous figure shows modes for the RPM LED colors. During normal Clarius operation, only the
red, green, or blue lights are shown. However, other colors or color combinations are possible. For
example, during the 4225-PMU self-test, the RPM LED alternates between purple and green for the
majority of the test, but there is a portion of the test where the LED flashes red and green. During
firmware upgrade of the 4225-PMU, the RPM LED is green, but flashes red and green near the end
of the process. During firmware upgrade of the 4225-RPM, the RPM LED is blue at the start, and
changes to green for the remainder of the process.
The output status of the 4200A-SCS is indicated by the Operate light on the front of the
4200A-SCS chassis.
4200A-PMU-900-01 Rev. B March 2023 2-5
Section
User's Manual
2: Connections Model 4200A-SCS Pulse Card (PGU and PMU)
RPM wiring diagram
The internal wiring diagram of the RPM is shown in the following figure.
Signals from the 4200A-SCS instrument cards are routed through the RPM to the output Force and
Sense connectors. Switching is used to control which card is connected to the output. See
RPM as a switch (on pag e 2-9) for more information on switching.
The LEDs on the top panel (see the previous figure) indicate which card is connected to the output.
By default, the RPM (pulse mode) is connected to the output unless a SMU or CVU is switched in.
Using the
Figure 5: Wiring diagram of the RPM
Connecting the RPM to the PMU
Turn off the system and disconnect the power cord before connecting or disconnecting the
RPM to or from the PMU. Failure to do so may result in RPM or PMU damage, possibly
voiding the warranty.
2-6 4200A-PMU-900-01 Rev. B March 2023
Model 4200A
Connections
-SCS Pulse Card (PGU and PMU) User's Manual Section 2:
The RPM is matched to a PMU card and channel. Make sure to connect the RPM only to that PMU
card and channel. Labels on top of the RPM indicate the specific connection channel and PMU. For
example, "PMU1-2" indicates PMU1, channel 2.
With system power off, use the supplied RPM cable to connect a 4225-RPM to the matching RPM
channel of the 4225-PMU, as shown in the following figure.
Figure 6: 4225-PMU connection to an RPM
With an RPM installed, never make connections directly to any of the SMA connectors (CH1
and CH2) on the PMU. This may result in damage to the PMU or DUT. It may als o produce
corrupt data.
After connecting or removing an RPM, always perform the procedure “Update the RPM
configuration” in Model 4200A-SCS Setup and Maintenance to ensure that KCon accurately
represents the present 4200A-SCS hardware configuration.
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2: Connections Model 4200A-SCS Pulse Card (PGU and PMU)
Mounting the RPM
When mounting the 4225-RPM, make sure that there is a minimum of 5 cm (2 in.) of space
between multiple RPM base assemblies. Spacing multiple 4225-RPM or 4200-PA instruments
closer than 5 cm (2 in.) from the 4200-MAG-BASE can cause the internal relays
to malfunction.
RPM diagrams for local and remote sensing
The following figure shows the diagram for local sensing. The center conductor of the Force triaxial
connector is connected to the high side of the device under test (DUT) while the outer shield is
connected to DUT LO. The Sense connector is not used.
Figure 7: RPM wiring diagram for local sensing
The following figure shows the diagram for remote sensing. Both Sense and Force are connected to
DUT HI.
Figure 8: Diagram for remote sensing
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Connections
-SCS Pulse Card (PGU and PMU) User's Manual Section 2:
Using the RPM as a switch
You can use the RPM to switch a PMU, CVU, or SMU to a DUT terminal. The RPM wiring diagram
(on page 2-6) figure shows the switches. The following figure shows a typical test configuration for
using an RPM as a switch for a PMU, SMU, and CVU. In general, one RPM per device terminal is
recommended. By default, the PMU (with RPM) is connected to the output unless a SMU or CVU is
switched in.
Figure 9: Test configuration for using RPM as a switch
Both the red cables (supplied with the CVU) and the blue cables (supplied with the optional
4210-MMPC cable kits) are 100 Ω. You can do remote sensing (on page 2-18
) using the optional
4210-MMPC cable kits with the RPMs.
Control RPM switching
Before using an RPM, configure the 4200A-SCS by doing the steps in “Update the RPM
configuration” in Model 4200A-SCS Setup and Maintenance. This properly associates the instruments
connected to each RPM.
There are two methods to control RPM switching:
• ITM operation using automatic switching (after doing the steps in “Update the RPM
configuration”)
• UTM testing from within the user module, use the LPT function rpm_config
You must update the RPM configuration in KCon before u sing the RPM to control switching.
If you do not, corrupt test data may result du e to incorrect switch settings in the RPM.
4200A-PMU-900-01 Rev. B March 2023 2-9
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2: Connections Model 4200A-SCS Pulse Card (PGU and PMU)
Two-terminal device connections
The following figure shows connections to a two-terminal device using a single channel. Connect one
end of the device to the center conductor of Ch 1 and connect the other side to pulse card common
(outside shield of the SMA cable).
Figure 10: Two-terminal device connections to a pulse card using one channel
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Connections
-SCS Pulse Card (PGU and PMU) User's Manual Section 2:
You can also connect a two-terminal device to the two channels of a PMU, as shown in the following
figure. In this case, channel 1 will source/pulse voltage, and channel 2 will measure the resulting
current. Make sure you connect the shields of the SMA cables close to the device under test. This
method avoids problems of capacitive charging (see PMU capacitive charging/discharging effects
(on
page 3-35)).
Figure 11: Two-terminal device connections to a PMU using both channels
4200A-PMU-900-01 Rev. B March 2023 2-11
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2: Connections Model 4200A-SCS Pulse Card (PGU and PMU)
Three-terminal device connections
A three-terminal device can be connected using either two or three PMU channels, depending on if
source and/or measuring must be performed at each device pin. An example of both channels of a
single PMU connected to a three-terminal MO SF ET is show n in the following figure. In this example,
connect the gate terminal to channel 1 of the PMU and connect the drain terminal to channel 2.
Connect the source terminal to the outside shield of channel 2.
Figure 12: Three-terminal dev ice connections to a PMU using both channels
If ultra-fast I-V sourcing and measuring is required at each device terminal, then a second PMU is
required for the source terminal. Up to four PMUs (eight channels) can be installed in one 4200A-SCS
mainframe.
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Connections
-SCS Pulse Card (PGU and PMU) User's Manual Section 2:
Four-terminal device connections
To test a four-terminal device, two PMUs are usually required. The following figure shows the four
PMU channels connected to a four-terminal MOSFET. This configuration enables you to have
complete flexibility to enable pulsing and measuring at any terminal on the device. Notice that the
shields of the SMA cables from all four channels are connected as closely as possible to the device
under test.
Figure 13: Four-terminal devic e conn ection to two PMUs
4200A-PMU-900-01 Rev. B March 2023 2-13
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2: Connections Model 4200A-SCS Pulse Card (PGU and PMU)
The following illustrates the connection to a 4-terminal device using the cabling and adapters that are
included with either RPM or the 4225-PMU.
Figure 14: RPM output connection to 4-terminal device
2-14 4200A-PMU-900-01 Rev. B March 2023
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Connections
-SCS Pulse Card (PGU and PMU) User's Manual Section 2:
Pulse source-measure connections
TRIGGER OUT of a pulse generator card can be connected to TRIGGER IN of other pulse generator
cards to synchronize the start of pulse outputs. For details on using the trigger connectors, refer to
Triggering (on page 4-22
The cables used for SMU connections are supplied with the SMUs and preamplifiers.
To achieve optimum performance, only use the cables, connectors, and adapters that are included
with Keithley Instruments pulse source or measure kits.
For the pulse source-measure configura tions, ensure the 4200A-SCS high voltage is
disabled. This will prevent a safety hazard that could result in possible injury or death
because of SMU voltages greater than 42 V being applied to the device under test or fixture.
).
Pulse generator connections
The following figure shows a system that uses basic 2-channel pulse generator connections to DUTs.
Use a torque wrench to tighten SMA connections to 8 in. lb.
Figure 15: Basic pulse generator connections
4200A-PMU-900-01 Rev. B March 2023 2-15
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White SMA cable (2 m (6.5 ft), included with the PGU and PMU)
SMA to SSMC Adapter Cable (4200-PRB-C, included with the PGU and PMU)
2: Connections Model 4200A-SCS Pulse Card (PGU and PMU)
Using an adapter cable to connect pulse card to DUT
The following figure shows an example of how to make pulse card connections to the device under
test (DUT) using the supplied SMA to SSMC adapter cable.
Figure 16: Pulse card connections using the SMA to dual SSMC adapter cable
A
B
The needle holders shown in the previous figure are supplied by the user.
Connections to prober or test fixture bulkhead connectors
The 4200-PMU-Prober-Kit (available from Keithley Instruments) is a collection of standard and
custom connectors and accessories used to connect the pulse generator to a common variety of
probe stations. This kit can also be used for pulse card connections to a test fixture.
The following figure shows an example of how a PMU or PGU can be connected to a triaxial
connector of a prober or test fixture.
If connecting to a prober or test fixture that uses BNC connectors, adapter C is not used.
2-16 4200A-PMU-900-01 Rev. B March 2023
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Connections
White SMA cable (2 m (6.5 ft) included with the PGU or PMU)
SMA socket to BNC plug (included with the 4200-PMU-Prober-Kit)
BNC socket to three-lug triaxial plug (included with the 4200-PMU-Prober-Kit)
-SCS Pulse Card (PGU and PMU) User's Manual Section 2:
Figure 17: Pulse card connections to triaxial prober or test fixture
A
B
C
RPM connections to DUT
With an RPM installed, never make connections directly to any of the SMA connectors (CH1
and CH2) on the PMU module. This may result i n dama g e to the PMU or DUT or may produce
corrupt data.
A device under test (DUT) can be tested using local sensing or remote sensing. Local sensing is
performed at the RPM, while remote sensing is performed at the DUT. When using remote sensing,
errors due to voltage drops in the Force path between the RPM and the DUT are eliminated. With
proper cabling, SMU or CVU tests provide remote sensing through the RPM.
Two-terminal test connections
For local sensing, only the Force output terminal of the RPM is connected to the DUT. The Sense
output terminal is not used. The following figure shows local sense connections using the supplied
adapter cable and adapters. For the two-terminal test shown in the followin g figure , the loca l ground is
left unconnected. Test circuit low is connected to the shield of the Force connector through
the cables.
4200A-PMU-900-01 Rev. B March 2023 2-17
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Triaxial plug to BNC socket adapter (supplied with the RPM)
BNC plug to SMA socket adapter (supplied with the RPM)
White SMA cable, 20.32 cm (8 in.) (supplied with the RPM)
SMA to SSMC adapter cable (4200-PRB-C, supplied with the PMU)
2: Connections Model 4200A-SCS Pulse Card (PGU and PMU)
Figure 18: Two-terminal local sense connections using the SMA to SSMC adapter cable
This connection method eliminates the triaxial guard (inner shield).
A
B
C
D
The needle holders shown in the previous two figures are supplied by the user.
When using two RPMs for four-terminal testing, two Y-cable assemblies are required. Make sure to
connect the two local grounds of the two cable assemblies together (see the figure in
connections to a prober (on page 2-18)).
Remote sensing using RPM connections to a prober
Optional prober cable kits are available from Keithley Instruments. These kits provide connections to
a DUT:
• Model 4210-MMPC-S: Use this cable kit with the Suss Micro Tec PA200/300 series prober.
• Model 4210-MMPC-C: Use this cable kit with the Cascade Microtech 12000 series prober
(manipulator type DCM-200 series).
RPM
• Model 4210-MMPC-L: Use this cable kit with a Lucas Signatone Wavelink series prober.
• Model 4210-MMPC-W: Use this cable kit with the Wentworth prober.
2-18 4200A-PMU-900-01 Rev. B March 2023
Model 4200A
Connections
BNC plug-to-SMA socket adapter (supplied with the RPM)
White SMA cable (20.32 cm (8 in.), supplied with the RPM)
SMA-to-SSMC Adapter Cable (4200-PRB-C, supplied with the PMU)
-SCS Pulse Card (PGU and PMU) User's Manual Section 2:
Figure 19: RPM connections to a prober
A
Triaxial plug-to-BNC socket adapter (supplied with the RPM)
B
C
D
For details on using these prober cable kits, refer to PA-1000 for the Suss prober, PA-1001 for the
Cascade prober, PA-1080 for the Lucas Signato ne pro ber , and PA-1085 for the Wentworth prober.
4200A-PMU-900-01 Rev. B March 2023 2-19
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