Tektronix 4200A-SCS User manual

Model 4200A-SCS
Prober and

External Instrument Control

4200A-913-01 Rev. B June 2022

tek.com/keithley

*P4200A-913-01B*

4200A-913-01B

Parameter Analyzer

Model 4200A-SCS

Prober and External Instrument Cont rol

© 2022, Keithley Instruments

Cleveland, Ohio, U.S.A.

All rights reserved.

Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,

without the prior written approval of Keithley Instruments is strictly prohibited.

All Keithley Instruments product names are trademarks or registered trademarks of Keithley

Instruments, LLC. Other brand names are trademarks or registered trademarks of their r espective

holders.

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Document number: 4200A-913-01 Rev. B June 2022

Safety precaut ions

The following safety precautio ns should be observed before using this product and any associated ins tr um enta tion . Altho ugh
some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous
conditions may be present.

This product is intended for use by personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the
product. Refer to the user documentation for complete product specification s.

If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the

equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the

instrument. They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line

voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures
explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained
service personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low
transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient
overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient
overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to
mains. These instruments will be marked as category II or higher.

Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test

fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than
30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any
unknown circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If
the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited
sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective
devices to limit fault current and voltage to the card.

Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the
connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input
power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting
cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth)
ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the
voltage being measured.

For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or
accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be
impaired.

Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the
specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.

When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)

connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use

of a lid interlock.

If a screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.

The symbol on an instrument means caution, risk of hazard. The user must refer to the operating instructions located in the
user documentation in all cases where the symbol is mark ed on the instr u ment .

The symbol on an instrument means warning, risk of electric shock. Use standard safety precautions to avoid personal
contact with these voltages.

The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.

The symbol indicates a connection terminal to the equipment frame.

If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be
properly disposed of according to federal, state, and local laws.

The WARNING heading in the user documentation explains hazar ds that mi ght result in personal injury or death. Always read
the associated information very carefully before performing the indicated procedure.

The CAUTION heading in the user documentation explains h azard s that coul d dama ge the instrument. Such damage may
invalidate the warranty.

The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor
injury or damage the instrument. Always read the associated information very carefully before performing the indicated
procedure. Damage to the instrument may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, repl ace m ent comp one nts in mai ns cir cu its — inc lud ing the power

transformer, test leads, and input jacks — must be purchased from Keithley. Standard fuses with applicable national safety
approvals may be used if the rating and type are the same. The detachable mains power cord provided with the instrument may
only be replaced with a similarly rated power cord. Other components that are not safety-related may be purchased from other
suppliers as long as they are equivalent to the original component (not e that se lect ed part s shou ld be purch ase d only thro ugh
Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement
component, call a Keithley office for information.

Unless otherwise noted in product-specific literature, Keithley instruments are designed to operate indoors only, in the following
environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.

To clean an instrument, use a cloth dampened with deionized water or mild, water-based cleaner. Clean the exterior of the
instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that
consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never
require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board
should be returned to the factory for proper cleaning/servicing.

Safety precaution revision as of June 2018.

Table of contents

Introduction ............................................................................................................... 1-1

Introduction .......................................................................................................................... 1-1

Using switch matrices .............................................................................................. 2-1

Typical test systems using a switch matrix .......................................................................... 2-1

Matrix card types ....................................................................................................................... 2-2

Switch matrix mainframes ......................................................................................................... 2-6

Switch matrix connections.................................................................................................... 2-6

Typical SMU matrix card connections ....................................................................................... 2-6

Typical preamplifier matrix card connections ............................................................................ 2-8

Typical CVU matrix card connections ....................................................................................... 2-9

Typical CVU test connections to a DUT .................................................................................. 2-11

Connection scheme settings .............................................................................................. 2-12

Row-column or instrument card settings ................................................................................. 2-12

Switch matrix control .......................................................................................................... 2-16

Signal paths to a DUT ........................................................................................................ 2-16

4200A-SCS signal paths ......................................................................................................... 2-17

C-V Analyzer signal paths ....................................................................................................... 2-20

Keysight Model 8110A pulse generator signa l pat h ................................................................ 2-23

Use KCon to add a switch matrix to the system ................................................................ 2-24

Step 1. Exit Clarius and open KCon ........................................................................................ 2-24

Step 2. Add a test fixture or probe station ............................................................................... 2-25

Step 3. Add switching system mainframe ............................................................................... 2-27

Step 4. Set GPIB address ....................................................................................................... 2-28

Step 5. Configure the instrument connection scheme ............................................................. 2-29

Step 6. Assign switch cards to mainframe slots ...................................................................... 2-29

Step 7. Set matrix card properties ........................................................................................... 2-30

Step 8. Save configuration ...................................................................................................... 2-31

Step 9. Close KCon and open Clarius ..................................................................................... 2-31

Switch matrix control example ........................................................................................... 2-31

Set up and run a switch matrix in Clarius ................................................................................ 2-32

Matrixulib user library ......................................................................................................... 2-33

ConnectPins user module ....................................................................................................... 2-33

Configure and use a Series 700 Switching System ................................................ 3-1

Introduction .......................................................................................................................... 3-1

Equipment required .............................................................................................................. 3-2

Device connections .............................................................................................................. 3-2

Connect the 7072 to the DUT.................................................................................................... 3-3

Connect the 4200A-SCS to the 7072 ........................................................................................ 3-4

Update the switch configuration in KCon ............................................................................. 3-5

Set up the measurements in Clarius .................................................................................... 3-9

Create a new project ............................................................................................................... 3-10

Add a device ........................................................................................................................... 3-10

Add the connectpins action ..................................................................................................... 3-11

Configure the connectpins action ............................................................................................ 3-11

Table of contents Model 4200A-SCS Prober and External Instrument Control

Search for and add existing tests from the Test Library .......................................................... 3-13

Run the project and view the tests .......................................................................................... 3-14

Using a Model 590 C-V Analyzer .............................................................................. 4-1

Introduction .......................................................................................................................... 4-1

C-V measurement basics ..................................................................................................... 4-1

Capacitance measureme nt tes ts ......................................................................................... 4-2

Connections ......................................................................................................................... 4-2

Signal connections .................................................................................................................... 4-3

Triaxial connectors .................................................................................................................... 4-3

GPIB connections ..................................................................................................................... 4-4

Cable compensation ............................................................................................................ 4-4

Cable compensation user modules ........................................................................................... 4-5

Using KCon to add a 590 C-V Analyzer to system .............................................................. 4-5

Model 590 test examples ..................................................................................................... 4-5

Cable compensation example ................................................................................................... 4-6

C-V sweep example ................................................................................................................ 4-10

KI590ulib user library ......................................................................................................... 4-12

CableCompensate590 user module ........................................................................................ 4-12

Cmeas590 user module .......................................................................................................... 4-15

CtSweep590 user module ....................................................................................................... 4-18

CvPulseSweep590 user module ............................................................................................. 4-22

CvSweep590 user module ...................................................................................................... 4-26

DisplayCableCompCaps590 user module .............................................................................. 4-30

LoadCableCorrectionConstants .............................................................................................. 4-32

SaveCableCompCaps590 user module .................................................................................. 4-33

Using a Keysight 4284/4980A LCR Meter ................................................................ 5-1

Introduction .......................................................................................................................... 5-1

C-V measurement basics .......................................................................................................... 5-1

Capacitance measurement tes ts ............................................................................................... 5-2

Signal connections .................................................................................................................... 5-3

GPIB connections ..................................................................................................................... 5-5

Using KCon to add a Keysight LCR Meter to the system .................................................... 5-6

Model 4284A or 4980A C-V sweep test example ................................................................ 5-6

HP4284ulib user library ........................................................................................................ 5-8

CvSweep4284 User Module...................................................................................................... 5-9

Cmeas4284 User Module........................................................................................................ 5-11

Using a Model 82 C-V System .................................................................................. 6-1

Introduction .......................................................................................................................... 6-1

Capacitance measureme nt tes ts ......................................................................................... 6-2

C-t measur ements ..................................................................................................................... 6-2

Simultaneous C-V measurements ............................................................................................. 6-3

Cable compensation ............................................................................................................ 6-5

Cable compensation user modules ........................................................................................... 6-6

Connections ......................................................................................................................... 6-6

Model 4200A-SCS Prober and External Instrument Control Table of contents

Front-panel connections ............................................................................................................ 6-6

Rear-panel connections ............................................................................................................ 6-7

Make power and GPIB connections .......................................................................................... 6-8

Using KCon to add Model 82 C-V System ........................................................................... 6-9

Model 82 projects ................................................................................................................. 6-9

Cable compensation tests ....................................................................................................... 6-10

Capacitance tests .................................................................................................................... 6-13

Formulas for capacitance tests ............................................................................................... 6-21

Choosing the right parameters ........................................................................................... 6-25

Optimal C-V measurement par amet ers ................................................................................... 6-25

Determining the optimal delay time ......................................................................................... 6-27

Correcting residual errors ........................................................................................................ 6-29

ki82ulib user library ............................................................................................................ 6-30

Abortmodule82 ........................................................................................................................ 6-31

CableCompensate82 user module .......................................................................................... 6-31

CtSweep82 user module ......................................................................................................... 6-34

DisplayCableCompCaps82 user module ................................................................................ 6-37

QTsweep82 user module ........................................................................................................ 6-39

SaveCableCompCaps82 user modu le .................................................................................... 6-42

SIMCVsweep82 user module .................................................................................................. 6-45

Simultaneous C-V analysis ................................................................................................ 6-48

Analysis methods .................................................................................................................... 6-48

Basic device parameters ......................................................................................................... 6-49

Doping profile .......................................................................................................................... 6-55

Interface trap density ............................................................................................................... 6-57

Mobile ion charge concentration ............................................................................................. 6-58

Generation velocity and generation lifetime (Zerbst plot) ........................................................ 6-61

Constants, symbols, and equations used for analysis ............................................................. 6-63

Summary of analysis equations .............................................................................................. 6-65

References .............................................................................................................................. 6-67

Bibliography of C-V Measurements ......................................................................................... 6-67

Articles and Papers ................................................................................................................. 6-68

Using a Keysight 8110A/8111A Pulse Generator .................................................... 7-1

Introduction .......................................................................................................................... 7-1

Pulse generator tests ........................................................................................................... 7-2

Signal connections ............................................................................................................... 7-2

Triaxial connections .................................................................................................................. 7-2

Probe station and test fixture connectio ns ................................................................................ 7-3

Switch matrix connections ......................................................................................................... 7-3

GPIB connections ................................................................................................................ 7-5

Using KCon to add a Keysight pulse generator to the system ............................................ 7-5

HP8110ulib user library ........................................................................................................ 7-5

PguInit8110 user module .......................................................................................................... 7-6

PguSetup8110 user module ...................................................................................................... 7-7

PguTrigger8110 user module .................................................................................................... 7-9

Set up a probe station .............................................................................................. 8-1

Prober control overview ....................................................................................................... 8-1

Supported probers .................................................................................................................... 8-4

PRBGEN user modules ............................................................................................................ 8-4

Table of contents Model 4200A-SCS Prober and External Instrument Control

Example test execution sequence: prob esi tes proj ect .............................................................. 8-6

Example test execution sequence: probesubsites project ......................................................... 8-6

Understanding site coordinate information .......................................................................... 8-7

Reference site (die) ................................................................................................................... 8-7

Probe sites (die) ........................................................................................................................ 8-8

Chuck movement ...................................................................................................................... 8-8

PRBGEN user library ......................................................................................................... 8-11

PrInit ........................................................................................................................................ 8-11

PrChuck .................................................................................................................................. 8-12

PrSSMovNxt ............................................................................................................................ 8-13

PrMovNxt ................................................................................................................................ 8-14

Tutorial: Control a probe station ......................................................................................... 8-16

Test system connections ......................................................................................................... 8-17

KCon setup ............................................................................................................................. 8-17

Test flow .................................................................................................................................. 8-18

Using a Cascade Microtech PA200 Prober ............................................................. 9-1

Cascade Microtech PA200 prober soft war e ........................................................................ 9-1

Software versions ...................................................................................................................... 9-1

Probe station configuration .................................................................................................. 9-3

Set up communications ........................................................................................................ 9-3

Make connections between the 4200A-SCS and the prober ..................................................... 9-3

GPIB control connector terminals .............................................................................................. 9-5

Set up communications on the 4200A-SCS .............................................................................. 9-6

Set up communications on the prober ....................................................................................... 9-8

Set up wafer geometry ....................................................................................................... 9-11

Create a site definition and define a probe list ................................................................... 9-13

Load, align, and contact the wafer ..................................................................................... 9-14

Aligning the wafer .................................................................................................................... 9-16

Start the Alignment Wizard...................................................................................................... 9-16

Verify wafer alignment ............................................................................................................. 9-17

Set the chuck heights .............................................................................................................. 9-18

Clarius probesubsites project example .............................................................................. 9-19

Set the wafer map ................................................................................................................... 9-21

Use KCon to add a prober....................................................................................................... 9-22

Running projects ..................................................................................................................... 9-23

Clarius ..................................................................................................................................... 9-23

Commands and error symbols ........................................................................................... 9-25

Using a Micromanipulator 8860 Prober ................................................................. 10-1

Micromanipulator 8860 prober software ............................................................................ 10-1

Software versions .................................................................................................................... 10-1

Probe station configuration ................................................................................................ 10-2

Set up communications ........................................................................................................... 10-2

Set up wafer geometry ............................................................................................................ 10-6

Create a site definition and define a probe list ........................................................................ 10-8

Load, align, and contact the wafer .......................................................................................... 10-9

Probesites Clarius project example ................................................................................. 10-18

Set spline pattern (optional) .................................................................................................. 10-19

Use KCon to add a prober..................................................................................................... 10-21

Model 4200A-SCS Prober and External Instrument Control Table of contents

Clarius ................................................................................................................................... 10-22

Probesubsites Clarius project example ............................................................................ 10-23

Use KCon to add a prober..................................................................................................... 10-26

Clarius ................................................................................................................................... 10-27

Commands and error symbols ......................................................................................... 10-29

Using a manual or fake prober............................................................................... 11-1

Using a manual or fake prober software ............................................................................ 11-1

Manual prober overview ..................................................................................................... 11-1

Fake prober overview ......................................................................................................... 11-2

Modifying the prober configuration file ............................................................................... 11-2

Probesites Clarius project example ................................................................................... 11-5

Use KCon to add a prober....................................................................................................... 11-5

Clarius ..................................................................................................................................... 11-6

Probesubsites Clarius project example .............................................................................. 11-7

Use KCon to add a prober....................................................................................................... 11-8

Clarius ..................................................................................................................................... 11-9

Using a Cascade Summit-12000 Prober ................................................................ 12-1

Cascade Summit 12000 prober software........................................................................... 12-1

Software version ..................................................................................................................... 12-1

Probe station configuration ................................................................................................ 12-2

Set up communications ........................................................................................................... 12-2

Set up wafer geometry ............................................................................................................ 12-8

Create a site definition and define a probe list ...................................................................... 12-11

Load, align, and contact the wafer ........................................................................................ 12-13

Probesites Clarius Project example ................................................................................. 12-17

Nucleus UI or Velox software ................................................................................................ 12-17

Use KCon to add a prober..................................................................................................... 12-17

Clarius ................................................................................................................................... 12-19

Probesubsites Clarius Project example ........................................................................... 12-20

Velox prober control software................................................................................................ 12-20

Nucleus UI prober control software ....................................................................................... 12-20

Use KCon to add a prober..................................................................................................... 12-22

Clarius ................................................................................................................................... 12-24

Commands and error symbols ......................................................................................... 12-25

Using a Signatone CM500 Prober .......................................................................... 13-1

Signatone CM500 prober software .................................................................................... 13-1

Software versions .................................................................................................................... 13-1

Probe station configuration ................................................................................................ 13-1

Set up communications ........................................................................................................... 13-2

Modify the prober configuration file ......................................................................................... 13-3

Set up wafer geometry ............................................................................................................ 13-4

Load, align, and contact the wafer .......................................................................................... 13-6

Set up programmed sites without a subsite ............................................................................. 13-9

Set up programmed sites with a subsite ............................................................................... 13-10

Table of contents Model 4200A-SCS Prober and External Instrument Control

Clarius project example for probe sites ............................................................................ 13-11

CM500 .................................................................................................................................. 13-11

Use KCon to add a prober..................................................................................................... 13-12

Clarius project example.................................................................................................... 13-13

Probesites Clarius project example ................................................................................. 13-17

Probesubsites Clarius project example ............................................................................ 13-18

Commands and error symbols ......................................................................................... 13-19

Using an MPI Probe Station ................................................................................... 14-1

MPI prober software ........................................................................................................... 14-1

Software version ..................................................................................................................... 14-1

Probe station configuration ................................................................................................ 14-1

Set up communications ........................................................................................................... 14-2

Load, align, and contact the wafer .......................................................................................... 14-3

Set up wafer geometry ............................................................................................................ 14-3

Create a site definition and define a probe list ........................................................................ 14-4

Clarius probesites and probes ubs ites pr ojec t example ..................................................... 14-4

MPI Sentio setup ..................................................................................................................... 14-4

Use KCon to add a prober....................................................................................................... 14-4

Clarius ..................................................................................................................................... 14-6

Commands and error symbols ........................................................................................... 14-8

Introduction ...............................................................................1-1

In this section:

Introduction

This document contains information about using switch matrices, probers, and other external
equipment with the 4200A-SCS.

Section 1

Introduction

Matrixulib user library ..............................................................2-33

Using switch matrices

In this section:

Typical test systems using a switch matrix................................2-1

Switch matrix connections.........................................................2-6

Connection scheme settings ...................................................2-12

Switch matrix control ...............................................................2-16

Signal paths to a DUT .............................................................2-16

Use KCon to add a switch matrix to the system ......................2-24

Switch matrix control example ................................................2-31

Typical test syste ms using a switch matrix

Section 2

A switch matrix enhances the connectivity of the 4200A-SCS by allowing any SMU or preamplifier
signal to be connected to any DUT pin. The following paragraphs summarize recommended switching
mainframes and matrix cards, and also show typical connecting schemes with SMUs and
preamplifiers.

A switch matrix provides automatic switching for test instrumentation and devices under test (DUTs).
Typical switch matrix systems are shown in the following figure.

The 4200A-SCS supports the Keithley Instruments Series 700 Switching System as external
instruments. This series includes the 707, 707A, and 707B, which have six slots for matrix cards. This
provides up to 72 pins of switching. This series also includes the 708, 708A, and 708B, which support
a single matrix card for 12 pins of matrix switching.

When using a switch matrix, one probe station or one test fixture must be present in the system
configuration because the probe station or test fixture establishes the number of test-system pins.
The matrix is cabled to the test system pins, and instrument terminals are routed through the matrix to
the pins using the user modules in the Matrixulib user library.

The following figure shows switch matrix cards connected to a probe station in order to test a wafer.
However, a probe station could be replaced by a test fixture to test discrete devices.

Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Figure 1: Typical systems using a switch matrix

Matrix card types

The recommended Keithley Instruments matrix cards are:

• Model 7072 8 x 12 Semiconductor Matrix Card, <1 pA offset current

• Model 7174A 8 x 12 Low Current Matrix Card, <100 fA offset current

Note that a key characteristic of these cards is low offset current to minimize the negative effects of
offset currents on low-current measurements.

7072 Semiconductor Matrix Card

The 7072 provides two two-pole low-current paths that have <1 pA offset current (rows A and B), two
one-pole CV paths for characterization from DC to 1 MHz (rows G and H), and four two-pole paths for
general purpose switching (rows C, D, E, and F). The card is equipped with 3-lug triaxial connectors
for signal connections. The maximum signal level is 200 V, 1 A. The maximum leakage is 0.01 pA/V
and the 3 dB bandwidth is 5 MHz (CV channels).

The following figure shows a test system using 7072 matrix cards. The connection requirements for
this card are the same as the connection requirements for the 7174A. Notice that the C-V meter is
connected to rows G and H. These two rows are optimized for C-V measurements.

If using preamplifiers with the 4200A-SCS, they should be connected to the first two rows of the 7072
matrix card.

2-2 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

The following figure and the C-V Analyzer signal pat h s (on page 2-20) figures show how signals are
routed through 7072 matrix switches to a DUT.

Figure 2: Test system using 7072 matrix cards

7174A Low Current Matrix Card

The 7174A provides high quality, high performance switching of I-V and C-V signals. This matrix card
uses 3-pole switching (HI, LO, Guard) with 10 fA typical offset current. The card is equipped with 3­lug triaxial connectors for signal connections.

The following figures show test systems using 7174A matrix cards. The supplied triaxial cables
connect the 4200A-SCS directly to matrix rows. The other instruments in the system are fitted with
BNC connectors that require the use of BNC-to-triaxial adapters.

4200A-913-01 Rev. B / June 2022 2-3

Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

7174A connections for local sensing

The following figure shows a system that uses local sensing. Coaxial tees adapt the Keysight 4284A
C-V meter for two-term in al operat io n.

Figure 3: Test system using 7174A matrix cards

7174A connections for remote sensing

The following figure shows how to connect instrumentation for remote sense operation. Since there
are not enough matrix rows, the instruments are connected to the matrix columns. In this
configuration, two switch relays are closed to complete a path from an instrument to a device under
test (DUT). With five DUT matrix cards installed in a Series 700 Switching System mainframe, up to
30 DUT pin-pairs can be used.

2-4 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

In the following figure, the C-V Analyzer signal paths (on page 2-20) for the Keysight Model 4980A
and Keysight Model 8110A pulse generator signal path (on page 2-23) show how signals are routed
through 7174A matrix switches to a DUT.

In this example, the instrumentation is connected to matrix columns, so the switch matrix is rotated
90° for i

llustration purposes.

Figure 4: Remote sense test system using 7174A matrix cards

4200A-913-01 Rev. B / June 2022 2-5

Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Switch matrix mainframes

The 4200A-SCS provides a user library that contains preconfigured data acquisition and control user
modules for the Series 700 Switch System.

You can use the 4200A-SCS with switch matrices from other vendors. However, you will need to

+

develop software to control these matrices from Clarius
Extension Programming (4200A-KULT-907-01) for inf ormation about developing user modules
and libraries.

Card installation

Refer to the instructions for your matrix card for card installation instructions.

GPIB connections

The 4200A-SCS controls the switch matrix using the GPIB interface. Connect the GPIB port of the
switch matrix to the 4200A-SCS using a shielded GPIB cable.

. See Model 4200A-SCS KULT and KULT

Switch matrix connections

A switch matrix enhances the connectivity of the 4200A-SCS by allowing any SMU or preamplifier
signal to be connected to any DUT pin. Typically, devices are connected to columns and instruments
are connected to rows. The following topics summarize recommended switching mainframes and
matrix cards. They also show typical connection schemes with SMUs and preamplifiers.

Typical SMU matrix card connections

The following figure shows typical SMU matrix card connections using local sensing. The four SMU
FORCE terminals are connected to the matrix card rows, while the DUT HI terminals are connected to
the matrix card columns. All 12 DUT LO terminals are connected together, and the DUT LO signal is
connected to the ground unit FORCE terminal. Any SMU FORCE terminal can be connected to any
DUT HI terminal simply by closing the appropriate matrix crosspoint.

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Figure 5: Typical SMU matrix card connections

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Typical preamplifier matrix card connections

The following figure shows typical preamplifier matrix card connections using local sensing. This
configuration is similar to the SMU configuration shown in the previous figure, except that
preamplifiers are added for low-current source-measure capabilities. The preamplifier FORCE
terminals are connected to the matrix card rows, while the DUT HI terminals are connected to the
matrix card columns. All 12 DUT LO terminals are connected together, and the common DUT LO
signal is connected to the ground unit FORCE terminal. Any preamplifier FORCE terminal can be
connected to any DUT HI terminal by closing the appropriate matrix crosspoint.

Figure 6: Preamplifier matrix card connections

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Typical CVU matrix card connections

In your project, you can automate the use of a CVU and other instrumentation using a switching
matrix and actions to control the switching. When the project is run, the switching matrix automatically
makes the required instrument connections for each test in the project.

The next figures show typical connections for a switch system using a Series 700 Switching System
with the 7174A Matrix Card installed.

You can also use the 7072 Matrix Card for C-V t
G and H and local (2-wire) s ensing.

The SMA cables and adapters shown in the following figures are supplied with the CVU or the 4200­CVU-PROBER-KIT. The triaxial and BNC cables are not supplied. The prober kit includes two types
of BNC-to-triaxial adapters that connect directly to the rows of the matrix. The 7078-TRX-BNC has the
guard connected to the inner shield of the adapter. The 7078-TRX-GN D has the guard dis connected.

This figure shows connections for local (2-wire) sensing with the CVU connected to rows E and F of
the matrix. This is the connection scheme for the cap-iv-cv-matrix project. For details, see “cap­iv-cv-matrix” in the Model 4200A-SCS Capacitance-Voltage Unit (CVU) User's Manual.

Figure 7: Test connections for a switch matrix - local (2-wire) sensin g

esting. If you are using the 7072, you must use rows

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

The following figure shows connections for remote (4-wire) sensing.

Figure 8: Test connections for a switch matrix - remote (4-wire) sensing

The 7078-TRX-BNC adapters must be used in order to extend SMA shielding through the matrix
card.

The shields of the SMA cables must be connected together and extended as far as possible to the
DUT, as shown in Typical CVU test connections to a DUT (on page 2-11).

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Typical CVU test connections to a DUT

The shields of the SMA cables must be connected together and extended as far as possible to the
device under test (DUT), as shown in the following figure.

Use the supplied torque wrench to tighten the SMA connections to 8 in. lb.

Figure 9: Measurement circuit (simplified)

You can swap the HCUR and HPOT and LCUR and LPOT terminal functionality in Clarius.

The shields of the red SMA cables must be connected together near the DUT.

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

The following figure shows typical connections to a DUT installed in a test fixture that has BNC
bulkhead connectors. Use a conductive test fixture with the bulkhead connectors mounted directly to
the test fixture. Do not use insulators between the connectors and test fixture. The cables and
adapters shown are the ones supplied with the 4210-CVU or 4215-CVU.

Figure 10: Typical CVU connections to a DUT in a test fixture

Connection scheme settings

The following connection scheme settings are set from the Keithley Configuration Utility (KCon) when
the switch matrix is added to the system configuration. See Using KCon to add a switch matrix to the

system (on page 2-24).

Row-column or instrument card settings

You select the scheme for interconnections between the instruments, the switch-matrix rows and
columns, and the test system (prober or test fixture). You can select:

• Row-Column: Connect instruments to rows and prober or test fixture to columns.

• Instrument Card: Both instruments and prober or test fixture are connect ed to col umns . Matr ix

rows are not used.

The row-column setting is the simplest connection scheme. In this scheme, instruments are
connected to the switch-matrix rows. The prober/test fixture pins or the device under test (DUT) are
connected to the switch-matrix columns (see Switch matrix control (on page 2-16) and

signal paths (on page 2-17)).

4200A-SCS

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When you set up a matrix, you also select the sense. You can select:

• Local sense: 2-wire connections. Connections are only to instrument FORCE terminals.

• Remote sense: 4-wire connections. Connections are to both instrument FORCE and SENSE

terminals.

For more information regarding local and remote sense, refer to “Remote sensing” in the Model
4200A-SCS Source -Measure Unit (SMU) User's Manual.

Row-column scheme

The row-column setting is the simplest connection scheme. In this scheme, instruments are
connected to the switch-matrix rows. The prober/test fixture pins or the device under test (DUT) are
connected to the switch-matrix columns (see Switch matrix control (on page 2-16) and 4200A-SCS

signal paths (on page 2-17)).

Instrument signals can route to prober/test-fixture pins through only one matrix card, as shown in the
following figure. However, the row-column scheme limits the number of external instruments. If the
instrumentation requirements exceed eight paths (rows), you must use the instrument
card configuration.

Figure 11: Row-Column, Local Sense Connection Scheme example

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Instrument card scheme for l ocal sense

Use local sense when the measurement-pathway resistance is small and the associated voltage
errors are negligible. The measurement pathway is comprised of the following conductors, connected
in series:

• The cables used to connect the instruments to the matrix

• The internal matrix-card signal path

• The cables used to connect the matrix to the prober or test fixture

Current flowing through the measurement pathway creates a voltage drop (an error voltage) that is
directly proportional to the pathway resistance. This error voltage is present in all local sense voltage
measurements.

When local sense is selected, only the connection paths specified by the connected action are
completed. For example, in the figure in Switch matrix control (on page 2-16
connection paths would be:

• SMU2, 6 (connect SMU2 to Pin 6)

• GNDU, 3 (connect GNDU to Pin 3)

), the specified

For the instrument card scheme, both the instrumentation and the prober/text-fixture pins or DUT are
connected to switch-matrix columns. No external conn ec tions ar e made to matr ix r ows . In this
configuration, two switch relays are closed to complete a path from an instrument to a DUT.
Instrument signals route to the prober/test-fixture pins through two or more matrix cards, as shown in
the following figure. This connection scheme can support large systems with numerous instruments
by removing the eight-row instrument connection limitation.

Figure 12: Instrument Card, Local Sense Connection Scheme example

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Row A paired with row B

Column 1 paired with Column 2

Row C paired with row D

Column 3 paired with Column 4

Row E paired with row F

Column 5 paired with Column 6

Row G paired with row H

Column 7 paired with Column 8

Column 9 paired with Column 10

Column 11 paired with Column 12

Instrument card scheme for remote sense

Use remote sense to eliminate the effects of measurement pathway resistance. The following figure
illustrates the use of remote sense in an instrument card configuration. Note that remote sense
requires twice as many measurement pathways. The FORCE pathways (in red) are the current­carrying pathways, and the SENSE pathways (in blue) are the meas urem ent path way s .

Figure 13: Instrument Card, Rem o te Sense Connection Scheme example

When remote sense is selected, rows and columns are paired together as shown in the following
table.

When you specify a connection path in the connect action, the paired connection path is also
completed. For example, in the figure in 4200A-SCS signal paths ( on pag e 2-17), the specified
connection paths would be:

• SMU1, 4 (connect SMU1 to Pin 4)

• GNDU, 3 (connect GNDU to Pin 3)

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Switch matrix control

To control switching, you can use the connect action in the ivcvswitch project. You can also use
the ConnectPins user module in the Matrixulib user library.

The connect action uses the ConnectPins user module to control a switch matrix. You specify t
i

nstrument terminal and pin pairs. For example, for the row-column connection scheme shown in the

following figure, you set the parameters:

he

• TermIDStr2 to SMU2 and Pin2 to 6, which connects SMU2 to pin 6.

• TermIDStr8 to GNDU and Pin8 to 3, which connects GNDU (ground unit) to pin 3.

A matrix control example using the ConnectPins user module is provided in Switch matrix control

example (on page 2-31). Detailed information for ConnectPins is provided in Matrixulib user library

(on page 2-33).

Figure 14: Row-column connection scheme

Signal paths to a DUT

The following figures show signal path examples from the various test instruments through the matrix
switches to a DUT.

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4200A-SCS signal paths

The following figure shows remote sensing (4-wire) signal paths through a matrix card using two-pole
switching. Two-pole switching is provided by the 7174A and 7072 (rows A through F).

Figure 15: 4200A-SCS signal paths through a two-pole matrix card using remote sensing

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Row A (force) paired with row B (sense)

Column 1 (force) paired with column 2 (sense)

Row E (force) paired with row F (sense)

Column 3 (force) paired with column 4 (sense)

Sense setting

To make the connections shown in 4200A-SCS signal paths (on page 2-17), you must select remote
sensing.

When remote sensing is selected, the rows and columns are paired together as follows:

When the FORCE matrix switches are closed by the ConnectPins user module, the SENSE matrix
switches are also closed.

For local sensing (2-wire), the connections from the SENSE terminals of the 4200A-SC S ar e
not used.

For more information regarding local and remote sense, refer to “Remote sensing” in the Mode
4200A-SCS Source -Measure Unit (SMU) User's Manual.

Connection setting

The row-column setting must be used when connecting instrumentation to matrix rows, as shown in

4200A-SCS signal paths (on page 2-17).

The maximum number of rows available to the test system is eight. If instrumentation needs more
than eight pathways, they must be connected to matrix columns, and the instrument card setting must
be used.

The following figure shows a test system with both the instruments and the DUT connected to
matrix columns.

See Connection scheme settings (on page 2-12
settings. The connection scheme settings shown in this figure are Instrument Card and
Remote Sense.

) for details on the row-col

umn and instrument card

l

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