Tektronix 4200A-SCS User manual

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Model 4200A-SCS Prober and

External Instrument Control

4200A-913-01 Rev. B June 2022

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*P4200A-913-01B*

4200A-913-01B

Parameter Analyzer

Model 4200A-SCS

Prober and External Instrument Cont rol

Cleveland, Ohio, U.S.A.

Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,

without the prior written approval of Keithley Instruments is strictly prohibited.

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Document number: 4200A-913-01 Rev. B June 2022

Safety precaut ions

The following safety precautio ns should be observed before using this product and any associated ins tr um enta tion . Altho ugh some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous conditions may be present.

This product is intended for use by personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer to the user documentation for complete product specification s.

If the product is used in a manner not specified, the protection provided by the product warranty may be impaired. The types of product users are: Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the

equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained. Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the

instrument. They must be protected from electric shock and contact with hazardous live circuits. Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line

voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to mains. These instruments will be marked as category II or higher.

Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains. Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test

fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.

When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard. Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)

connections. If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use

of a lid interlock.

If a screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.

The symbol on an instrument means caution, risk of hazard. The user must refer to the operating instructions located in the user documentation in all cases where the symbol is mark ed on the instr u ment .

The symbol on an instrument means warning, risk of electric shock. Use standard safety precautions to avoid personal contact with these voltages.

The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.

The symbol indicates a connection terminal to the equipment frame.

If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly disposed of according to federal, state, and local laws.

The WARNING heading in the user documentation explains hazar ds that mi ght result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.

The CAUTION heading in the user documentation explains h azard s that coul d dama ge the instrument. Such damage may invalidate the warranty.

The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor injury or damage the instrument. Always read the associated information very carefully before performing the indicated procedure. Damage to the instrument may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans. Before performing any maintenance, disconnect the line cord and all test cables. To maintain protection from electric shock and fire, repl ace m ent comp one nts in mai ns cir cu its — inc lud ing the power

transformer, test leads, and input jacks — must be purchased from Keithley. Standard fuses with applicable national safety approvals may be used if the rating and type are the same. The detachable mains power cord provided with the instrument may only be replaced with a similarly rated power cord. Other components that are not safety-related may be purchased from other suppliers as long as they are equivalent to the original component (not e that se lect ed part s shou ld be purch ase d only thro ugh Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley office for information.

Unless otherwise noted in product-specific literature, Keithley instruments are designed to operate indoors only, in the following environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.

To clean an instrument, use a cloth dampened with deionized water or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

Safety precaution revision as of June 2018.

Introduction ............................................................................................................... 1-1

Introduction .......................................................................................................................... 1-1

Using switch matrices .............................................................................................. 2-1

Typical test systems using a switch matrix .......................................................................... 2-1

Matrix card types ....................................................................................................................... 2-2

Switch matrix mainframes ......................................................................................................... 2-6

Switch matrix connections.................................................................................................... 2-6

Typical SMU matrix card connections ....................................................................................... 2-6

Typical preamplifier matrix card connections ............................................................................ 2-8

Typical CVU matrix card connections ....................................................................................... 2-9

Typical CVU test connections to a DUT .................................................................................. 2-11

Connection scheme settings .............................................................................................. 2-12

Row-column or instrument card settings ................................................................................. 2-12

Switch matrix control .......................................................................................................... 2-16

Signal paths to a DUT ........................................................................................................ 2-16

4200A-SCS signal paths ......................................................................................................... 2-17

C-V Analyzer signal paths ....................................................................................................... 2-20

Keysight Model 8110A pulse generator signa l pat h ................................................................ 2-23

Use KCon to add a switch matrix to the system ................................................................ 2-24

Step 1. Exit Clarius and open KCon ........................................................................................ 2-24

Step 2. Add a test fixture or probe station ............................................................................... 2-25

Step 3. Add switching system mainframe ............................................................................... 2-27

Step 4. Set GPIB address ....................................................................................................... 2-28

Step 5. Configure the instrument connection scheme ............................................................. 2-29

Step 6. Assign switch cards to mainframe slots ...................................................................... 2-29

Step 7. Set matrix card properties ........................................................................................... 2-30

Step 8. Save configuration ...................................................................................................... 2-31

Step 9. Close KCon and open Clarius ..................................................................................... 2-31

Switch matrix control example ........................................................................................... 2-31

Set up and run a switch matrix in Clarius ................................................................................ 2-32

Matrixulib user library ......................................................................................................... 2-33

ConnectPins user module ....................................................................................................... 2-33

Configure and use a Series 700 Switching System ................................................ 3-1

Introduction .......................................................................................................................... 3-1

Equipment required .............................................................................................................. 3-2

Device connections .............................................................................................................. 3-2

Connect the 7072 to the DUT.................................................................................................... 3-3

Connect the 4200A-SCS to the 7072 ........................................................................................ 3-4

Update the switch configuration in KCon ............................................................................. 3-5

Set up the measurements in Clarius .................................................................................... 3-9

Create a new project ............................................................................................................... 3-10

Add a device ........................................................................................................................... 3-10

Add the connectpins action ..................................................................................................... 3-11

Configure the connectpins action ............................................................................................ 3-11

Table of contents Model 4200A-SCS Prober and External Instrument Control

Search for and add existing tests from the Test Library .......................................................... 3-13

Run the project and view the tests .......................................................................................... 3-14

Using a Model 590 C-V Analyzer .............................................................................. 4-1

Introduction .......................................................................................................................... 4-1

C-V measurement basics ..................................................................................................... 4-1

Capacitance measureme nt tes ts ......................................................................................... 4-2

Connections ......................................................................................................................... 4-2

Signal connections .................................................................................................................... 4-3

Triaxial connectors .................................................................................................................... 4-3

GPIB connections ..................................................................................................................... 4-4

Cable compensation ............................................................................................................ 4-4

Cable compensation user modules ........................................................................................... 4-5

Using KCon to add a 590 C-V Analyzer to system .............................................................. 4-5

Model 590 test examples ..................................................................................................... 4-5

Cable compensation example ................................................................................................... 4-6

C-V sweep example ................................................................................................................ 4-10

KI590ulib user library ......................................................................................................... 4-12

CableCompensate590 user module ........................................................................................ 4-12

Cmeas590 user module .......................................................................................................... 4-15

CtSweep590 user module ....................................................................................................... 4-18

CvPulseSweep590 user module ............................................................................................. 4-22

CvSweep590 user module ...................................................................................................... 4-26

DisplayCableCompCaps590 user module .............................................................................. 4-30

LoadCableCorrectionConstants .............................................................................................. 4-32

SaveCableCompCaps590 user module .................................................................................. 4-33

Using a Keysight 4284/4980A LCR Meter ................................................................ 5-1

Introduction .......................................................................................................................... 5-1

C-V measurement basics .......................................................................................................... 5-1

Capacitance measurement tes ts ............................................................................................... 5-2

Signal connections .................................................................................................................... 5-3

GPIB connections ..................................................................................................................... 5-5

Using KCon to add a Keysight LCR Meter to the system .................................................... 5-6

Model 4284A or 4980A C-V sweep test example ................................................................ 5-6

HP4284ulib user library ........................................................................................................ 5-8

CvSweep4284 User Module...................................................................................................... 5-9

Cmeas4284 User Module........................................................................................................ 5-11

Using a Model 82 C-V System .................................................................................. 6-1

Introduction .......................................................................................................................... 6-1

Capacitance measureme nt tes ts ......................................................................................... 6-2

C-t measur ements ..................................................................................................................... 6-2

Simultaneous C-V measurements ............................................................................................. 6-3

Cable compensation ............................................................................................................ 6-5

Cable compensation user modules ........................................................................................... 6-6

Connections ......................................................................................................................... 6-6

Model 4200A-SCS Prober and External Instrument Control Table of contents

Front-panel connections ............................................................................................................ 6-6

Rear-panel connections ............................................................................................................ 6-7

Make power and GPIB connections .......................................................................................... 6-8

Using KCon to add Model 82 C-V System ........................................................................... 6-9

Model 82 projects ................................................................................................................. 6-9

Cable compensation tests ....................................................................................................... 6-10

Capacitance tests .................................................................................................................... 6-13

Formulas for capacitance tests ............................................................................................... 6-21

Choosing the right parameters ........................................................................................... 6-25

Optimal C-V measurement par amet ers ................................................................................... 6-25

Determining the optimal delay time ......................................................................................... 6-27

Correcting residual errors ........................................................................................................ 6-29

ki82ulib user library ............................................................................................................ 6-30

Abortmodule82 ........................................................................................................................ 6-31

CableCompensate82 user module .......................................................................................... 6-31

CtSweep82 user module ......................................................................................................... 6-34

DisplayCableCompCaps82 user module ................................................................................ 6-37

QTsweep82 user module ........................................................................................................ 6-39

SaveCableCompCaps82 user modu le .................................................................................... 6-42

SIMCVsweep82 user module .................................................................................................. 6-45

Simultaneous C-V analysis ................................................................................................ 6-48

Analysis methods .................................................................................................................... 6-48

Basic device parameters ......................................................................................................... 6-49

Doping profile .......................................................................................................................... 6-55

Interface trap density ............................................................................................................... 6-57

Mobile ion charge concentration ............................................................................................. 6-58

Generation velocity and generation lifetime (Zerbst plot) ........................................................ 6-61

Constants, symbols, and equations used for analysis ............................................................. 6-63

Summary of analysis equations .............................................................................................. 6-65

References .............................................................................................................................. 6-67

Bibliography of C-V Measurements ......................................................................................... 6-67

Articles and Papers ................................................................................................................. 6-68

Using a Keysight 8110A/8111A Pulse Generator .................................................... 7-1

Introduction .......................................................................................................................... 7-1

Pulse generator tests ........................................................................................................... 7-2

Signal connections ............................................................................................................... 7-2

Triaxial connections .................................................................................................................. 7-2

Probe station and test fixture connectio ns ................................................................................ 7-3

Switch matrix connections ......................................................................................................... 7-3

GPIB connections ................................................................................................................ 7-5

Using KCon to add a Keysight pulse generator to the system ............................................ 7-5

HP8110ulib user library ........................................................................................................ 7-5

PguInit8110 user module .......................................................................................................... 7-6

PguSetup8110 user module ...................................................................................................... 7-7

PguTrigger8110 user module .................................................................................................... 7-9

Set up a probe station .............................................................................................. 8-1

Prober control overview ....................................................................................................... 8-1

Supported probers .................................................................................................................... 8-4

PRBGEN user modules ............................................................................................................ 8-4

Table of contents Model 4200A-SCS Prober and External Instrument Control

Example test execution sequence: prob esi tes proj ect .............................................................. 8-6

Example test execution sequence: probesubsites project ......................................................... 8-6

Understanding site coordinate information .......................................................................... 8-7

Reference site (die) ................................................................................................................... 8-7

Probe sites (die) ........................................................................................................................ 8-8

Chuck movement ...................................................................................................................... 8-8

PRBGEN user library ......................................................................................................... 8-11

PrInit ........................................................................................................................................ 8-11

PrChuck .................................................................................................................................. 8-12

PrSSMovNxt ............................................................................................................................ 8-13

PrMovNxt ................................................................................................................................ 8-14

Tutorial: Control a probe station ......................................................................................... 8-16

Test system connections ......................................................................................................... 8-17

KCon setup ............................................................................................................................. 8-17

Test flow .................................................................................................................................. 8-18

Using a Cascade Microtech PA200 Prober ............................................................. 9-1

Cascade Microtech PA200 prober soft war e ........................................................................ 9-1

Software versions ...................................................................................................................... 9-1

Probe station configuration .................................................................................................. 9-3

Set up communications ........................................................................................................ 9-3

Make connections between the 4200A-SCS and the prober ..................................................... 9-3

GPIB control connector terminals .............................................................................................. 9-5

Set up communications on the 4200A-SCS .............................................................................. 9-6

Set up communications on the prober ....................................................................................... 9-8

Set up wafer geometry ....................................................................................................... 9-11

Create a site definition and define a probe list ................................................................... 9-13

Load, align, and contact the wafer ..................................................................................... 9-14

Aligning the wafer .................................................................................................................... 9-16

Start the Alignment Wizard...................................................................................................... 9-16

Verify wafer alignment ............................................................................................................. 9-17

Set the chuck heights .............................................................................................................. 9-18

Clarius probesubsites project example .............................................................................. 9-19

Set the wafer map ................................................................................................................... 9-21

Use KCon to add a prober....................................................................................................... 9-22

Running projects ..................................................................................................................... 9-23

Clarius ..................................................................................................................................... 9-23

Commands and error symbols ........................................................................................... 9-25

Using a Micromanipulator 8860 Prober ................................................................. 10-1

Micromanipulator 8860 prober software ............................................................................ 10-1

Software versions .................................................................................................................... 10-1

Probe station configuration ................................................................................................ 10-2

Set up communications ........................................................................................................... 10-2

Set up wafer geometry ............................................................................................................ 10-6

Create a site definition and define a probe list ........................................................................ 10-8

Load, align, and contact the wafer .......................................................................................... 10-9

Probesites Clarius project example ................................................................................. 10-18

Set spline pattern (optional) .................................................................................................. 10-19

Use KCon to add a prober..................................................................................................... 10-21

Model 4200A-SCS Prober and External Instrument Control Table of contents

Clarius ................................................................................................................................... 10-22

Probesubsites Clarius project example ............................................................................ 10-23

Use KCon to add a prober..................................................................................................... 10-26

Clarius ................................................................................................................................... 10-27

Commands and error symbols ......................................................................................... 10-29

Using a manual or fake prober............................................................................... 11-1

Using a manual or fake prober software ............................................................................ 11-1

Manual prober overview ..................................................................................................... 11-1

Fake prober overview ......................................................................................................... 11-2

Modifying the prober configuration file ............................................................................... 11-2

Probesites Clarius project example ................................................................................... 11-5

Use KCon to add a prober....................................................................................................... 11-5

Clarius ..................................................................................................................................... 11-6

Probesubsites Clarius project example .............................................................................. 11-7

Use KCon to add a prober....................................................................................................... 11-8

Clarius ..................................................................................................................................... 11-9

Using a Cascade Summit-12000 Prober ................................................................ 12-1

Cascade Summit 12000 prober software........................................................................... 12-1

Software version ..................................................................................................................... 12-1

Probe station configuration ................................................................................................ 12-2

Set up communications ........................................................................................................... 12-2

Set up wafer geometry ............................................................................................................ 12-8

Create a site definition and define a probe list ...................................................................... 12-11

Load, align, and contact the wafer ........................................................................................ 12-13

Probesites Clarius Project example ................................................................................. 12-17

Nucleus UI or Velox software ................................................................................................ 12-17

Use KCon to add a prober..................................................................................................... 12-17

Clarius ................................................................................................................................... 12-19

Probesubsites Clarius Project example ........................................................................... 12-20

Velox prober control software................................................................................................ 12-20

Nucleus UI prober control software ....................................................................................... 12-20

Use KCon to add a prober..................................................................................................... 12-22

Clarius ................................................................................................................................... 12-24

Commands and error symbols ......................................................................................... 12-25

Using a Signatone CM500 Prober .......................................................................... 13-1

Signatone CM500 prober software .................................................................................... 13-1

Software versions .................................................................................................................... 13-1

Probe station configuration ................................................................................................ 13-1

Set up communications ........................................................................................................... 13-2

Modify the prober configuration file ......................................................................................... 13-3

Set up wafer geometry ............................................................................................................ 13-4

Load, align, and contact the wafer .......................................................................................... 13-6

Set up programmed sites without a subsite ............................................................................. 13-9

Set up programmed sites with a subsite ............................................................................... 13-10

Table of contents Model 4200A-SCS Prober and External Instrument Control

Clarius project example for probe sites ............................................................................ 13-11

CM500 .................................................................................................................................. 13-11

Use KCon to add a prober..................................................................................................... 13-12

Clarius project example.................................................................................................... 13-13

Probesites Clarius project example ................................................................................. 13-17

Probesubsites Clarius project example ............................................................................ 13-18

Commands and error symbols ......................................................................................... 13-19

Using an MPI Probe Station ................................................................................... 14-1

MPI prober software ........................................................................................................... 14-1

Software version ..................................................................................................................... 14-1

Probe station configuration ................................................................................................ 14-1

Set up communications ........................................................................................................... 14-2

Load, align, and contact the wafer .......................................................................................... 14-3

Set up wafer geometry ............................................................................................................ 14-3

Create a site definition and define a probe list ........................................................................ 14-4

Clarius probesites and probes ubs ites pr ojec t example ..................................................... 14-4

MPI Sentio setup ..................................................................................................................... 14-4

Use KCon to add a prober....................................................................................................... 14-4

Clarius ..................................................................................................................................... 14-6

Commands and error symbols ........................................................................................... 14-8

Introduction ...............................................................................1-1

In this section:

Introduction

This document contains information about using switch matrices, probers, and other external equipment with the 4200A-SCS.

Section 1

Introduction

Matrixulib user library ..............................................................2-33

Using switch matrices

In this section:

Typical test systems using a switch matrix................................2-1

Switch matrix connections.........................................................2-6

Connection scheme settings ...................................................2-12

Switch matrix control ...............................................................2-16

Signal paths to a DUT .............................................................2-16

Use KCon to add a switch matrix to the system ......................2-24

Switch matrix control example ................................................2-31

Typical test syste ms using a switch matrix

Section 2

A switch matrix enhances the connectivity of the 4200A-SCS by allowing any SMU or preamplifier signal to be connected to any DUT pin. The following paragraphs summarize recommended switching mainframes and matrix cards, and also show typical connecting schemes with SMUs and preamplifiers.

A switch matrix provides automatic switching for test instrumentation and devices under test (DUTs). Typical switch matrix systems are shown in the following figure.

The 4200A-SCS supports the Keithley Instruments Series 700 Switching System as external instruments. This series includes the 707, 707A, and 707B, which have six slots for matrix cards. This provides up to 72 pins of switching. This series also includes the 708, 708A, and 708B, which support a single matrix card for 12 pins of matrix switching.

When using a switch matrix, one probe station or one test fixture must be present in the system configuration because the probe station or test fixture establishes the number of test-system pins. The matrix is cabled to the test system pins, and instrument terminals are routed through the matrix to the pins using the user modules in the Matrixulib user library.

The following figure shows switch matrix cards connected to a probe station in order to test a wafer. However, a probe station could be replaced by a test fixture to test discrete devices.

Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Figure 1: Typical systems using a switch matrix

Matrix card types

The recommended Keithley Instruments matrix cards are:

• Model 7072 8 x 12 Semiconductor Matrix Card, <1 pA offset current

• Model 7174A 8 x 12 Low Current Matrix Card, <100 fA offset current

Note that a key characteristic of these cards is low offset current to minimize the negative effects of offset currents on low-current measurements.

7072 Semiconductor Matrix Card

The 7072 provides two two-pole low-current paths that have <1 pA offset current (rows A and B), two one-pole CV paths for characterization from DC to 1 MHz (rows G and H), and four two-pole paths for general purpose switching (rows C, D, E, and F). The card is equipped with 3-lug triaxial connectors for signal connections. The maximum signal level is 200 V, 1 A. The maximum leakage is 0.01 pA/V and the 3 dB bandwidth is 5 MHz (CV channels).

The following figure shows a test system using 7072 matrix cards. The connection requirements for this card are the same as the connection requirements for the 7174A. Notice that the C-V meter is connected to rows G and H. These two rows are optimized for C-V measurements.

If using preamplifiers with the 4200A-SCS, they should be connected to the first two rows of the 7072 matrix card.

2-2 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

The following figure and the C-V Analyzer signal pat h s (on page 2-20) figures show how signals are routed through 7072 matrix switches to a DUT.

Figure 2: Test system using 7072 matrix cards

7174A Low Current Matrix Card

The 7174A provides high quality, high performance switching of I-V and C-V signals. This matrix card uses 3-pole switching (HI, LO, Guard) with 10 fA typical offset current. The card is equipped with 3lug triaxial connectors for signal connections.

The following figures show test systems using 7174A matrix cards. The supplied triaxial cables connect the 4200A-SCS directly to matrix rows. The other instruments in the system are fitted with BNC connectors that require the use of BNC-to-triaxial adapters.

4200A-913-01 Rev. B / June 2022 2-3

Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

7174A connections for local sensing

The following figure shows a system that uses local sensing. Coaxial tees adapt the Keysight 4284A C-V meter for two-term in al operat io n.

Figure 3: Test system using 7174A matrix cards

7174A connections for remote sensing

The following figure shows how to connect instrumentation for remote sense operation. Since there are not enough matrix rows, the instruments are connected to the matrix columns. In this configuration, two switch relays are closed to complete a path from an instrument to a device under test (DUT). With five DUT matrix cards installed in a Series 700 Switching System mainframe, up to 30 DUT pin-pairs can be used.

2-4 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

In the following figure, the C-V Analyzer signal paths (on page 2-20) for the Keysight Model 4980A and Keysight Model 8110A pulse generator signal path (on page 2-23) show how signals are routed through 7174A matrix switches to a DUT.

In this example, the instrumentation is connected to matrix columns, so the switch matrix is rotated 90° for i

llustration purposes.

Figure 4: Remote sense test system using 7174A matrix cards

4200A-913-01 Rev. B / June 2022 2-5

Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Switch matrix mainframes

The 4200A-SCS provides a user library that contains preconfigured data acquisition and control user modules for the Series 700 Switch System.

You can use the 4200A-SCS with switch matrices from other vendors. However, you will need to

develop software to control these matrices from Clarius Extension Programming (4200A-KULT-907-01) for inf ormation about developing user modules and libraries.

Card installation

Refer to the instructions for your matrix card for card installation instructions.

GPIB connections

The 4200A-SCS controls the switch matrix using the GPIB interface. Connect the GPIB port of the switch matrix to the 4200A-SCS using a shielded GPIB cable.

. See Model 4200A-SCS KULT and KULT

Switch matrix connections

A switch matrix enhances the connectivity of the 4200A-SCS by allowing any SMU or preamplifier signal to be connected to any DUT pin. Typically, devices are connected to columns and instruments are connected to rows. The following topics summarize recommended switching mainframes and matrix cards. They also show typical connection schemes with SMUs and preamplifiers.

Typical SMU matrix card connections

The following figure shows typical SMU matrix card connections using local sensing. The four SMU FORCE terminals are connected to the matrix card rows, while the DUT HI terminals are connected to the matrix card columns. All 12 DUT LO terminals are connected together, and the DUT LO signal is connected to the ground unit FORCE terminal. Any SMU FORCE terminal can be connected to any DUT HI terminal simply by closing the appropriate matrix crosspoint.

2-6 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Figure 5: Typical SMU matrix card connections

4200A-913-01 Rev. B / June 2022 2-7

Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Typical preamplifier matrix card connections

The following figure shows typical preamplifier matrix card connections using local sensing. This configuration is similar to the SMU configuration shown in the previous figure, except that preamplifiers are added for low-current source-measure capabilities. The preamplifier FORCE terminals are connected to the matrix card rows, while the DUT HI terminals are connected to the matrix card columns. All 12 DUT LO terminals are connected together, and the common DUT LO signal is connected to the ground unit FORCE terminal. Any preamplifier FORCE terminal can be connected to any DUT HI terminal by closing the appropriate matrix crosspoint.

Figure 6: Preamplifier matrix card connections

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Typical CVU matrix card connections

In your project, you can automate the use of a CVU and other instrumentation using a switching matrix and actions to control the switching. When the project is run, the switching matrix automatically makes the required instrument connections for each test in the project.

The next figures show typical connections for a switch system using a Series 700 Switching System with the 7174A Matrix Card installed.

You can also use the 7072 Matrix Card for C-V t G and H and local (2-wire) s ensing.

The SMA cables and adapters shown in the following figures are supplied with the CVU or the 4200CVU-PROBER-KIT. The triaxial and BNC cables are not supplied. The prober kit includes two types of BNC-to-triaxial adapters that connect directly to the rows of the matrix. The 7078-TRX-BNC has the guard connected to the inner shield of the adapter. The 7078-TRX-GN D has the guard dis connected.

This figure shows connections for local (2-wire) sensing with the CVU connected to rows E and F of the matrix. This is the connection scheme for the cap-iv-cv-matrix project. For details, see “capiv-cv-matrix” in the Model 4200A-SCS Capacitance-Voltage Unit (CVU) User's Manual.

Figure 7: Test connections for a switch matrix - local (2-wire) sensin g

esting. If you are using the 7072, you must use rows

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

The following figure shows connections for remote (4-wire) sensing.

Figure 8: Test connections for a switch matrix - remote (4-wire) sensing

The 7078-TRX-BNC adapters must be used in order to extend SMA shielding through the matrix card.

The shields of the SMA cables must be connected together and extended as far as possible to the DUT, as shown in Typical CVU test connections to a DUT (on page 2-11).

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Typical CVU test connections to a DUT

The shields of the SMA cables must be connected together and extended as far as possible to the device under test (DUT), as shown in the following figure.

Use the supplied torque wrench to tighten the SMA connections to 8 in. lb.

Figure 9: Measurement circuit (simplified)

You can swap the HCUR and HPOT and LCUR and LPOT terminal functionality in Clarius.

The shields of the red SMA cables must be connected together near the DUT.

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

The following figure shows typical connections to a DUT installed in a test fixture that has BNC bulkhead connectors. Use a conductive test fixture with the bulkhead connectors mounted directly to the test fixture. Do not use insulators between the connectors and test fixture. The cables and adapters shown are the ones supplied with the 4210-CVU or 4215-CVU.

Figure 10: Typical CVU connections to a DUT in a test fixture

Connection scheme settings

The following connection scheme settings are set from the Keithley Configuration Utility (KCon) when the switch matrix is added to the system configuration. See Using KCon to add a switch matrix to the

system (on page 2-24).

Row-column or instrument card settings

You select the scheme for interconnections between the instruments, the switch-matrix rows and columns, and the test system (prober or test fixture). You can select:

• Row-Column: Connect instruments to rows and prober or test fixture to columns.

• Instrument Card: Both instruments and prober or test fixture are connect ed to col umns . Matr ix

rows are not used.

The row-column setting is the simplest connection scheme. In this scheme, instruments are connected to the switch-matrix rows. The prober/test fixture pins or the device under test (DUT) are connected to the switch-matrix columns (see Switch matrix control (on page 2-16) and

signal paths (on page 2-17)).

4200A-SCS

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

When you set up a matrix, you also select the sense. You can select:

• Local sense: 2-wire connections. Connections are only to instrument FORCE terminals.

• Remote sense: 4-wire connections. Connections are to both instrument FORCE and SENSE

terminals.

For more information regarding local and remote sense, refer to “Remote sensing” in the Model 4200A-SCS Source -Measure Unit (SMU) User's Manual.

Row-column scheme

signal paths (on page 2-17)).

Instrument signals can route to prober/test-fixture pins through only one matrix card, as shown in the following figure. However, the row-column scheme limits the number of external instruments. If the instrumentation requirements exceed eight paths (rows), you must use the instrument card configuration.

Figure 11: Row-Column, Local Sense Connection Scheme example

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Instrument card scheme for l ocal sense

Use local sense when the measurement-pathway resistance is small and the associated voltage errors are negligible. The measurement pathway is comprised of the following conductors, connected in series:

• The cables used to connect the instruments to the matrix

• The internal matrix-card signal path

• The cables used to connect the matrix to the prober or test fixture

Current flowing through the measurement pathway creates a voltage drop (an error voltage) that is directly proportional to the pathway resistance. This error voltage is present in all local sense voltage measurements.

When local sense is selected, only the connection paths specified by the connected action are completed. For example, in the figure in Switch matrix control (on page 2-16 connection paths would be:

• SMU2, 6 (connect SMU2 to Pin 6)

• GNDU, 3 (connect GNDU to Pin 3)

), the specified

For the instrument card scheme, both the instrumentation and the prober/text-fixture pins or DUT are connected to switch-matrix columns. No external conn ec tions ar e made to matr ix r ows . In this configuration, two switch relays are closed to complete a path from an instrument to a DUT. Instrument signals route to the prober/test-fixture pins through two or more matrix cards, as shown in the following figure. This connection scheme can support large systems with numerous instruments by removing the eight-row instrument connection limitation.

Figure 12: Instrument Card, Local Sense Connection Scheme example

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Row A paired with row B

Column 1 paired with Column 2

Row C paired with row D

Column 3 paired with Column 4

Row E paired with row F

Column 5 paired with Column 6

Row G paired with row H

Column 7 paired with Column 8

Column 9 paired with Column 10

Column 11 paired with Column 12

Instrument card scheme for remote sense

Use remote sense to eliminate the effects of measurement pathway resistance. The following figure illustrates the use of remote sense in an instrument card configuration. Note that remote sense requires twice as many measurement pathways. The FORCE pathways (in red) are the currentcarrying pathways, and the SENSE pathways (in blue) are the meas urem ent path way s .

Figure 13: Instrument Card, Rem o te Sense Connection Scheme example

When remote sense is selected, rows and columns are paired together as shown in the following table.

When you specify a connection path in the connect action, the paired connection path is also completed. For example, in the figure in 4200A-SCS signal paths ( on pag e 2-17), the specified connection paths would be:

• SMU1, 4 (connect SMU1 to Pin 4)

• GNDU, 3 (connect GNDU to Pin 3)

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Switch matrix control

To control switching, you can use the connect action in the ivcvswitch project. You can also use the ConnectPins user module in the Matrixulib user library.

The connect action uses the ConnectPins user module to control a switch matrix. You specify t i

nstrument terminal and pin pairs. For example, for the row-column connection scheme shown in the

following figure, you set the parameters:

• TermIDStr2 to SMU2 and Pin2 to 6, which connects SMU2 to pin 6.

• TermIDStr8 to GNDU and Pin8 to 3, which connects GNDU (ground unit) to pin 3.

A matrix control example using the ConnectPins user module is provided in Switch matrix control

example (on page 2-31). Detailed information for ConnectPins is provided in Matrixulib user library

(on page 2-33).

Figure 14: Row-column connection scheme

Signal paths to a DUT

The following figures show signal path examples from the various test instruments through the matrix switches to a DUT.

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

4200A-SCS signal paths

The following figure shows remote sensing (4-wire) signal paths through a matrix card using two-pole switching. Two-pole switching is provided by the 7174A and 7072 (rows A through F).

Figure 15: 4200A-SCS signal paths through a two-pole matrix card using remote sensing

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Row A (force) paired with row B (sense)

Column 1 (force) paired with column 2 (sense)

Row E (force) paired with row F (sense)

Column 3 (force) paired with column 4 (sense)

Sense setting

To make the connections shown in 4200A-SCS signal paths (on page 2-17), you must select remote sensing.

When remote sensing is selected, the rows and columns are paired together as follows:

When the FORCE matrix switches are closed by the ConnectPins user module, the SENSE matrix switches are also closed.

For local sensing (2-wire), the connections from the SENSE terminals of the 4200A-SC S ar e not used.

For more information regarding local and remote sense, refer to “Remote sensing” in the Mode 4200A-SCS Source -Measure Unit (SMU) User's Manual.

Connection setting

The row-column setting must be used when connecting instrumentation to matrix rows, as shown in

4200A-SCS signal paths (on page 2-17).

The maximum number of rows available to the test system is eight. If instrumentation needs more than eight pathways, they must be connected to matrix columns, and the instrument card setting must be used.

The following figure shows a test system with both the instruments and the DUT connected to matrix columns.

See Connection scheme settings (on page 2-12 settings. The connection scheme settings shown in this figure are Instrument Card and Remote Sense.

) for details on the row-col

umn and instrument card

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Figure 16: Instrument card connection scheme

The 4200A-SCS automatically selects the first available rows to make connections to the DUT. In this example, rows A through D are the first available rows.

The following shows 4200A-SCS signal paths through a 3-pole 7071 matrix card using remote sensing. Note that for this configuration, each FORCE and SENSE connector does not use a separate path (row). Unlike the configuration shown in 4200A-SCS signal paths (on page 2-17), each FORCE/SENSE connector pair is routed through a single 3-pole matrix switch. Since row pairing is not required, the local sense setting must be used.

For two-wire local sense connections, do not use the SENSE connectors of the 4200A-SCS

To avoid high voltage exposure that could result in personal injury or death, whenever the inte

rlock of the 4200A-SCS is asserted, the FORCE and GUARD term inals of the SMUs and preamplifier should be considered to be at high voltage, even if they are programmed to a nonhazardous voltage current.

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Figure 17: 4200A-SCS signal paths through a 3-pole matrix card using remote sensing

C-V Analyzer signal paths

The following figures show local sense C-V Analyzer signal paths through rows B and H of a 7072 matrix card. A C-V analyzer can be used with any of the three matrix card types; however, rows G and H of the 7072 are optimized for C-V measurements.

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Figure 18: 590 signal paths through 7072 matrix card using local sensing

Figure 19: Keysight Model 4980A signal paths through 7072 matrix card using local sensing

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

The following figure shows the remote sense signal paths for the Keysight Model 4980A LCR meter through a 2-pole matrix card. Since row pairing is required, the remote sense setting must be used.

Figure 20: Keysight Model 4980A signal paths through a two-pole matrix card using remote

sensing

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Keysight Model 8110A pulse generator signal path

The following figure shows the HI signal path through the 7174A matrix card. However, the pulse generator can also be used with other matrix card types.

Note that the pulse generator LO is not routed through the matrix card. A separate external return path is required. The chassis of the pulse generator is output LO. As shown in the following figure, use a banana plug cable that is terminated with a spade lug on one end. Connect the banana plug end of the cable to the Common banana jack of the GNDU, and attach the spade lug end to a chassis screw on the pulse generator.

Figure 21: Keysight Model 8110A signal path through a 7174A matrix card

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Use KCon to add a sw itch matrix to the system

You use Keithley Configuration Utility (KCon) to manage the configuration of all instr umen tat ion controlled by the 4200A-SCS software. To use the 4200A-SCS to control a switch matrix, you must add the switch matrix to the system configuration using KCon.

If you are testing discrete device under test (DUTs), you must use the switch matrix with a test fixture. If you are testing a wafer, you must use the switch matrix with a probe station. The test fixture or probe station is also added to the system configuration using KCon.

You specify physical instrument-to-card and card-to-prober or fixture connections in KCon. These and other KCon switch matrix settings result in simplified matrix connections. Initially, you

need to:

• Add the test fixture or probe station.

• Configure the Instrument Connection Scheme and Switch Cards areas.

• Specify the physical instrument-to-card and card-to-prober/fixture connections.

• Physically make the specified instrument-to-card and card-to-prober/fixture connections.

After the initial setup, you can specify instrument-to-prober/fixture connections by specifying the corresponding terminal and prober/fixture pins in a Clarius user test module (UTM). You do not need to specify matrix cross points. The 4200A-SCS automatically routes the signals through the matrix.

For additional detail on KCon, refer to the Model 4200A-SCS Setup and Maintenance User's Manual.

If you are using a 707B or 708B Switching System, you must use the control panel on the front of y

our switching system to enable DDC and change the command set to 70XB by following these

steps:

1. Select Menu.

2. Select DDC.

3. Select Enable.

4. Select 70XB-VERSION.

This allows the switching system to be controlled by the 4200A-SCS.

Step 1. Exit Clarius and open KCon

To exit Clarius and open KCon:

1. Exit Clarius.

2. On the Windows desktop, select the KCon icon.

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Step 2. Add a test fixture or probe station

You must use a test fixture or a probe station with the switch matrix. However, both cannot be in the system configuration together. If you need to remove a component, refer to “Remove an external instrument” in Model 4200A-SCS Paramet er Analy zer Setu p and Mai nte nanc e .

Add a test fixture

To add a test fixture to the system configuration:

1. Select Add External Instrument

2. S

elect Test Fixture.

3. Select OK.

4. In the System Configuration list, select the test fixture (prefix is TF).

Figure 22: Add test fixture

5. From the Model list, select the appropriate test fixture.

6. Enter the number of pins. You can enter 2 to 72 pins.

The number of pins defined in the test fixture properties determines the pins that are available to

ign to a switch matrix card column. Make sure the number of pins assigned is appropriate for

ass your system.

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Add a probe station

Supported probe stations include:

• Fake Prober

• Manual Prober

• Micromanipulator 8860 Prober

• Cascade Microtech PA200 Prober

• Cascade Summit-12000 Pr ober

• Signatone CM500 (WL250) Prober

• MPI TS2000, TS2000-D P, TS2 0 00-HP, TS2000-SE, TS3000, and TS3000-SE Pr obe rs

Contact Keithley for the most up-to-date list of supported probers. If you are using an unsupported prober, you must create a user library and module to control it.

To add a probe station to the system configura tion:

1. Select Add External Instrument

2. S

elect Probe Station.

3. Select OK.

4. In the System Configuration list, select the probe station. The Properties are displayed.

Figure 23: Probe station properties

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5. From the Model list, select the prober.

6. Enter the Number of Pins / Positioners.

7. Select the options that are appropriate for your prober.

The number of pins defined in the probe station properties determines the pins that are available to assign to a switch matrix card column. Make sure the number of pins assigned is appropriate for your system.

Step 3. Add switching system mainframe

The default GPIB address for the Series 700B Switching systems is 16.

To add a switching system mainframe:

1. Select Add External Instrument

2. S

elect the Keithley 707/707A/707B Switching Matrix or Keithley 708/708A/708B Switching

Matrix.

3. Select OK.

4. In the System Configuration list, select the switching matrix. The properties are displayed. T

ollowing figure shows the properties for the 707/707A/707B. If the 708/708A/708B mainframe is

selected, there is only one switch card slot.

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Figure 24: KCon MTRX1 Properties

Step 4. Set GPIB address

The GPIB address setting in the properties must match the actual GPIB address of the mainframe. The address for the switch system mainframe is briefly displayed during its power-on sequence.

To set the GPIB address:

1. Select the GPIB Address from the list. Addresses that are in use are displayed with asterisks (*)

next to them. The range of addresses is 0 to 30 (GPIB address 31 is reserved as the 4200A-SCS

ontroller address). If the selected GPIB address conflicts with the GPIB address of another

system component, a red exclamation-point symbol (!) is displayed next to the selected address.

2. Select Save to save the change.

You can programmatically read the GPIB address and other instrument properties from the system conf

iguration using the LPT library getinstattr function. Proper use of getinstattr allows y

o develop user libraries that are independent of the configuration. For more information, refer to

t Model 4200A-SCS KULT and KULT Extension Pr ogra mmi ng (4200A-KULT-907-01).

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Step 5. Configure the instrument connection scheme

To configure the instrument connection scheme:

1. Select the Connection Scheme from the list:

 If you are connecting the instrumentation to matrix rows and the device under test (DUT) t

matrix columns, select Row-Column.

 If all connections (instrumentation and DUT) are made to matrix columns only, select

Instrument Card.

2. Select Local Sense or Remote Sense:

 For 2-wire connections to the DUT, select Local Sense.

 For 4-wire connections to the DUT, select Remot e Se nse.

Step 6. Assign switch cards to mainframe slots

To assign switch cards to mainframe slots:

1. For each slot that contains a matrix card, select the model number of the matrix card.

2. For each slot that is empty, select Empty.

You cannot mix matrix card models. For example, if you set slot 1 to Keithley 7174 Low Current Matrix Card, all other slots can only be set to the 7174 or Empty. To select a different model, you must set all slots to Empty and then make the new selection.

Figure 25: Assign switch cards to slots

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Step 7. Set matrix card properties

The matrix card properties set the connections:

• Between the measurement instrumentation and the matrix card

• Between the matrix card and the test system (prober or test fixture)

The number of pins defined in the properties for a probe station or test fixture determines the pins that are available to assign to a switch matrix card column. Make sure the number of pins assigned is appropriate for your system. Refer to Add a test fixture (on pag e 2-25) or Add a probe station (on page 2-26) for additional information.

To set matrix card properties:

1. In the System Configuration list, expand the switching matrix.

2. Select the card. The properties are displayed. Each row and column has a list to set the card

properties. If the row-column connection scheme is selected, instruments are assigned to t

ows and the test fixture pins or probe pins are assigned to the columns. If the instrument car

onnection scheme is selected, both instrumentation and test fixture/probe pins are assigned t olumns.

The following figure shows the 7071 Matrix Card Properties settings that are required to support

the physical connections that are shown in Row-column or instrument card settings (on page

12).

3. Select from the lists to connect the rows and columns to instrument terminals and prober or test

fixture pins. Note that card properties must match the actual physical connections to th

mat

rix card.

In the following figure, the lists labeled A to H correspond to the eight rows of the Keithley

Instruments matrix cards that are compatible with the Series 700 Switching System. The lists

labeled 1 to 12 correspond to the 12 columns of these matrix cards.

4. Select Validate.

Prober or test-fixture pins are always connected to matrix-card columns.

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

Figure 26: Keithley 7071 Matrix Card Properties

Step 8. Save configuration

To save the KCon configuration:

1. Select Save.

Step 9. Close KCon and open Clarius

To close KCon and open Clarius:

1. To close KCon, select the close button in the upper right.

2. On the Windows desktop, select the Clarius icon.

Switch matrix control example

This example demonstrates how the connectpins action controls a switch matrix. You modify the connectpins action to connect SMU2 to a DUT, as shown in the Switch matrix control (on page 2-

16) figure. It assumes that the switch matrix is set for row-column connections with local sense selected. It also assumes that the matrix card properties are set as shown in Switch matrix control.

The connectpins action is based on the ConnectPins user module. Detail on ConnectPins is provided in Matrixulib user library (on page 2-33).

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Set up and run a switch matrix in Clarius

To set up and run the connectpins action:

1. Choose Select.

2. Select Actions.

3. Search for connectpins.

4. Select the connectpins action.

5. Select Add.

6. In the project tree, select the connectpins action.

7. Select Configure. The parameter settings are displayed, as shown in the following figure.

Figure 27: connectpins settings

8. Set Pin2 to 6. This connects SMU2 to point 6.

9. Select OpenAll to open all matrix card switches.

10. Set Pin5 to 3. This connects GNDU to pin 5.

11. Leave all other pin settings at 0 to indicate that no connection will be made.

12. Select Run. The 4200A-SCS connects to the DUT.

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

ConnectPins

Allows you to control your switch matrix.

status

Returned values; see Details

OpenAll

Controls if the switch matrix is cleared before making any new connections:

 Leave previous connections intact: 0

TermIdStr1

Terminal identification string; refers to an instrument as defined by TermIdStr8 in

Pin1

The DUT pin number (configuration dependent) to which the instrument will be

Matrixulib u ser library

The Matrixulib connects instrument terminals to output pins using a Keithley Instruments Series 700 Switching System. It is for use with switching systems that are configured as a general purpose, low current, or ultra-low current matrix.

Matrixulib user module User module Description

ConnectPins user module

The ConnectPins module allows you to control your switch matrix.

Usage

status = ConnectPins(int OpenAll, char *TermIdStr1, int Pin1, char *TermIdStr2, int

Pin2, char *TermIdStr3, int Pin3, char *TermIdStr4, int Pin4, char *TermIdStr5,

int Pin5, char *TermIdStr6, int Pin6, char *TermIdStr7, int Pin7, char

*TermIdStr8, int Pin8);

TermIdStr2 TermIdStr3 TermIdStr4 TermIdStr5 TermIdStr6 TermIdStr7 TermIdStr8

Pin2 Pin3 Pin4 Pin5 Pin6 Pin7 Pin8

 Clear all previous connections: 1

KCon; valid inputs (configuration dependent) are: SMUn, CMTRn, CMTRnL, PGUn, GPIn, GPInL, GNDU (where n is a number from 1 through 8)

attached; if a number less than 1 is specified, no connection is made; valid inputs:

−1 to 72

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Section 2: Using switch matrices Model 4200A-SCS Prober and External Instrument Control

Details

This user module allows you to control a switch matrix. The default input parameters are shown in the following figure. Typically, OpenAll (line 1) is set to 1 to initially open all connections. If set to 0, the present connections are not affected.

The rest of the input parameters are structured as terminal/pin pairs. Each terminal/pin pair specifies the signal path through the matrix. For example, if the specified pin parameter for SMU1 is 4, then SMU4 will connect to pin 4 of the test fixture or prober when the UTM is run. The pin parameter value 0 (or −1) indicates that no connection will be made.

Terminal ID: Terminal identification for the most common components used in the system configuration are as follows:

• SMU1 to SMU4: These are the signal HI terminals for the four SMUs.

• GNDU: This is common terminal for the Ground Unit of the 4200A-SCS.

• CMTR1: This is used for a C-V Analyzer. For the 590, it is the OUTPUT terminal. For the

eysight Model 4980A, it is the HCUR terminal.

• CMTR1L: This is also used for a C-V Analyzer. For the 590, it is the INPUT terminal. For the

eysight Model 4980A, it is the LCUR terminal.

• PGU1: This is output HI for the Keysight Model 8110A Pulse Generator.

A test example demonstrates how this user module controls the switch matrix (see Switc h matrix

control example (on page 2-31)).

Figure 28: connectpins settings

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Model 4200A-SCS Prober and External Instrument Control Section 2: Using switch matrices

To connect SMU1 to pin 7, SMU2 to pin 8, SMU3 to pin 12, SMU4 to pin 1, ground pin 15, connect the

ConnectPins(1, SMU1, 7, SMU2, 8, SMU3, 12, SMU4, 1, GNDU, 15 PGU1, 13, CMTR1,

9, CMTR1L, 10)

You can connect the instrument terminals to one or more DUT pins. If the DUT pin number is less than 1, then that connection is ignored (not performed), otherwise the specified instrument is connected to the desired DUT pin. If you wish to connect an instrument to more than one DUT pin, you may specify that instrument terminal again in the parameter list.

If the OpenAll parameter is less than one, then the matrix is not cleared before making connections; if OpenAll is 1, then all previous matrix connections are cleared before making the new connections.

Returned values are placed in the Analyze sheet and can be:

• 0 OK.

• -10000 (INVAL_INST_ID): The specified instrument ID does not exist. This generally means

that there is no instrument with the specif ied ID in your configuration.

• -10001 (INVAL_PIN_SPEC): An invalid DUT pin number was specified.

• -10003 (NO_SWITCH_MATRIX): No switch matrix was found.

• -10004 (NO_MATRIX_CARDS): No matrix cards were found.

Example

Also see

pulse generator to pin 13, connect the CMTR to pins 9 and 10, and clear the previous connections:

None

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Set up the measurements in Clarius .........................................3-9

Configure and use a Series 700 Switchi ng System

In this section:

Introduction ...............................................................................3-1

Equipment required ...................................................................3-2

Device connections ...................................................................3-2

Update the switch configuration in KCon ..................................3-5

Introduction

This section describes how to configure a Keithley Instruments Series 700 Switching System (707, 707A, 707B, 708, 708A, or 708B) in the Keithley Configuration Utility (KCon). You can then use the system to connect any instrument terminal to any test system pin without changing connections. You can also create a new project for an n-channel MOSFET transistor and use the project to make both I-V and C-V measurements using the switching system.

Section 3

Switching systems are controlled by the 4200A-SCS using the GPIB bus. Use a shielded GPIB cable to connect your switching system to the 4200A-SCS. Once the switching system and test fixture have been defined in KCon, you use Clarius to set up the connections and automatically connect the instruments to the test system pins using the switching system.

In Clarius, the connectpins action from the Action Library is used to control switching systems. This action controls the opening and closing of crosspoints in a switching system so that you can connect any row of the matrix card to any (or multiple) columns of the matrix card. The connectpins action is added to the project and runs twice in this example. Each run establishes new connection settings.

Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control

Equipment required

• One 4200A-SCS with the following instruments:

 Three 4200-SMUs, 420 1-SMUs, 4210-SMUs, or 4211-SMUs

 One 4210-CVU or 4215-CVU

• Eight 4200-MTRX-X triaxial cables or 4200-TRX-X cables if using preamplifiers

• Four CA-447A SMA cables (supplied with the CVU)

• Four CS-1247 SMA female to BNC male adapters (supplied with the CVU)

• Two CS-701A BNC Tee adapters (female, male, female)

• Two 7078-TRX-BNC BNC female to triaxial male adapters

• One Series 700 Switching System with a 7072 8x12 Matrix Card

• One shielded four-terminal test fixture with triaxial inputs

• One n-channel MOSFET transistor

Device connections

The next topics detail the connections from the 7072 to the n-channel MOSFET and the connections from the SMUs or CVU, and GNDU to the 7072 Matrix Card in the Series 700 Switching System.

Hazardous voltages may be present on all output and guard shock that could cause injury or death, never connect or disconnect from the instrument while the output is on. To prevent electric shock, test connections must be configured such that the user cannot come in contact with test leads, conductors, or any device under test (DUT) that is in contact with the conductors. It is good practice to disconnect DUTs from the instrument before powering up the instrument. Safe installation requires proper shields, barriers, and g rounding to prevent contact with test lead and con du ctors.

terminals. To prevent electrical

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Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System

Connect the 7072 to the DUT

The hardware connections from the 7072 Matrix Card to the 4-term in al MOSF ET DUT are shown in the following figure. Use four triaxial cables to connect to the input terminals of your test fixture. For systems without a preamplifier, use 4200-MTRX-X triaxial cables. For system with preamplifiers, use 4200-TRX-X triaxial cables.

Figure 29: Connections from the 7072 Matrix Card to the MOSFET DUT

4200A-913-01 Rev. B / June 2022 3-3

Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control

Connect the 4200A-SCS to the 7072

This section describes connections to the 7072.

To connect the 4200A-SCS and SMUs to the 7072:

Using four 4200-MTRX-X or 4200-TRX-X triaxial cables, make the following connections:

• 4200A-SCS GNDU FORCE to 7072 input terminal E

• 42x0 SMU channel 1 Force to 7072 input terminal A

• 42x0 SMU channel 2 Force to 7072 input terminal B

• 42x0 SMU channel 3 Force to 7072 input terminal C

To connect the 4210-CVU or 4215-CVU to the 7072:

1. Using the parts in the following figure, assemble a tee adapter to connect the CVU to the 7072.

Figure 30: 4210-CVU to 7072 adapter tee assembly

2. Using four CA-447A SMA cables, make the following connections:

 CVU HCUR to adapter tee assembly 1

 CVU HPOT to adapter tee assembly 1

 CVU LPOT to adapter tee ass embly 2

 CVU LCUR to adapter tee assembly 2

3. Connect adapter tee assembly 1 to input terminal G of the 7072.

4. Connect adapter tee assembly 2 to input terminal H of the 7072. The connections are shown in the following figure.

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Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System

Figure 31: 4200A-SCS to 7072 Matrix Card connections

Update the switch configuration in KCon

After completing the switch and device connections, use KCon to manage the configuration of all instrumentation controlled by the 4200A-SCS software. You use KCon to:

• Add the switching system to the 4200A-SCS configuration

• Add the test fixture to the system configuration

• Configure the test fixture

• Add a matrix card to the switching system

• Configure the matrix card connections

4200A-913-01 Rev. B / June 2022 3-5

Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control

If you are using a 707B or 708B Switching System, you must use the control panel on the front of your switching system to enable DDC and change the command set to 70XB by following these steps:

1. Select Menu.

2. Select DDC.

3. Select Enable.

4. Select 70XB-VERSION.

This allows the switching system to be controlled by the 4200A-SCS.

To add a switching system to the 4200A-SCS configur ation:

1. From the desktop, open the KCon application.

2. In the bottom left of the KCon window, select Add External Instrument.

3. Select your switching system. The Series 700 Switching Systems are highlighted in the followin

igure.

Figure 32: Add External Instrument b ox, Series 700 Switching Systems highlighted

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Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System

4. Select OK.

5. Select Add External Instrument again.

6. Select Test Fixture.

Figure 33: Add External Instrument d ialog box, Test Fixture highlighted

7. Select OK.

8. From the System Configuration list, select the test fixture you just added (TF1).

9. Set the number of pins equal to the number of output pins in your switching system (12 for this

example, using one 7072 matrix card).

10. From the System Configuration list, select the switching system you just added (MTRX1).

11. In the Properties pane, add the 7072 Matrix Card to the correct slot of the switching system.

12. Confirm that the GPIB Channel of your device (0 to 30) matches the channel shown in th

roperties.

13. Open MTRX1 in the System Configuration list.

14. Select CARD1. The Properties for the 7072 Matrix Card are displayed, as shown in the following

figure.

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Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control

15. Complete the Card Rows Assignments according to how you connected the instruments to the

. For this example, the assignments are:

7072

 Row A - SMU1 Force

 Row B - SMU2 Force

 Row C - SMU3 Force

 Row E - GNDU Force

 Row G - CVU1 CVH_CUR

 Row H - CVU1 CVL_CUR

16. Under Card Columns Assignment, designate at least the first four columns with pin assignments

that match their column number. For example, Pin 1 Force to column 1.

Figure 34: Completed Properties pane for the 7072 Matrix Card

17. From the KCon toolbar, select Validate to ensure that the switching system is connected

operly.

18. Select Save to save the system configuration.

19. Select Summary, then scroll down to the Connections section. You need the names from t

erminal ID column when setting the switching system connections in Clarius. You can select

Save Configuration As or Print Configuration to record the terminal IDs. The default values for

the most common instruments are shown in the following figure.

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Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System

Figure 35: Summary: Default Terminal ID connections

20. Close the window when you are finished.

21. Close the KCon application.

Set up the measurements in Clarius

After closing KCon, open the Clarius application from the desktop. In this section, you use the Clarius application to configure and run two tests on an n-channel MOSFET transistor: A plot of drain current versus drain voltage using the SMUs and a C-V sweep. By using the Series 700 Switching System, you do not need to rearrange cables between the tests.

For this example, you use the Clarius application to:

• Create a new project

• Add a device

• Add an action

• Configure the action

• Search for and add two tests

• Run the project and view the tests

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Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control

Create a new project

To create a new project:

1. Choose Select.

2. In the Library, select Projects.

3. Select New Project.

4. Select Create.

Figure 36: Create new project

5. Select Yes when prompted to replace the existing project.

Add a device

To add a device:

1. Select Devices.

2. Enter MOSFET in the search box.

3. Select Search.

4. Scroll to the MOSFET, n-type, 4 terminal (4terminal-n-fet) device.

5. Select Add to add it to the project tree.

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Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System

Add the connectpins action

To add the connectpins action:

1. Select Actions.

2. Type connect in the search box.

3. Select Search.

4. Scroll to the connectpins action, then Add it to the project tree twice.

Figure 37: connectpins added twice

Configure the connectpins action

To configure the connectpins action:

1. Select the first connectpins action you added to the project tree.

2. Select Configure.

Figure 38: Configure highlighte d

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Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control

3. Make the following connections using the pairs of TermIdStr# and Pin# fields in the action:

 SMU1 – Pin 3

 SMU2 – Pin 2

 SMU3 – Pin 1

 GNDU – Pin 4

When you are finished, the Key Parameters view of the action should look like the next graphic.

The order of the instruments does not matter if each instrument is paired with the correct

pin number.

In this example, assigning TermIdStr1 to SMU1 and Pin 1 to 3 connects SMU1 to Pin 3 on

the matrix.

Figure 39: connectpins device connections

If the OpenAll checkbox is selected, the connectpins action opens all crosspoints before closing the specified pairs. This is the default and is usually the preferred behavior. However, since connectpins only has eight field pairs, the action can only close eight crosspoints during each run. To close more crosspoints, use multiple connectpins actions.

4. Select Save.

5. Select the second connectpins action you added to the project tree.

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Model 4200A-SCS Prober and External Instrument Control Section 3: Configure and use a Series 700 Switching System

6. Make the following connections using the pairs of TermIdStr# and Pin# text fields in the action:

 CVH1 – Pin 1

 CVL1 – Pin 2

 CVL1 – Pin 3

 CVL1 – Pin 4

When you are finished, the Key Parameters for the action look like the following figure.

Figure 40: Second connectpins co nn ections

7. Select Save.

Search for and add existing tests from the Test Library

To search for and add existing tests from the Test Library:

1. Choose Select.

2. Select Tests.

3. Type vds into the search box.

4. Select Search.

5. Scroll to the vds-id test.

6. Select Add to add it to the project tree.

7. Drag the vds-id test to between the two connectpins actions.

8. Clear the search box.

9. Type cv into the search box.

10. Select Search.

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Section 3: Configure and use a Series 700 Switching System Model 4200A-SCS Prober and External Instrument Control

11. Scroll to the cv-nmosfet test. Select Add to add it to the project tree.

12. Drag the cv-nmosfet test after the second connectpins action. Your project tree looks like the following fig ur e.

Figure 41: Project tree showing tests and actions in the proper order

Run the project and view the tests

To run the project and view the tests:

1. In the project tree, select New Project.

2. Make sure the items in the project tree are checked.

3. Select Run to start the test. The actions and tests run sequentially. The connectpins actions

set the crosspoints before the tests are executed. You can select Analyze when you run the project to view test results in real time.

Figure 42: Analyze highlighted

To view the results of a test either as it runs or after it has completed, select the test in the project tree.

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KI590ulib user library ..............................................................4-12

In this section:

Introduction ...............................................................................4-1

C-V measurement basics ..........................................................4-1

Capacitance measurement tes ts ...............................................4-2

Connections ..............................................................................4-2

Cable compensation .................................................................4-4

Using KCon to add a 590 C-V Analy zer to sys tem ....................4-5

Model 590 test examples ..........................................................4-5

Introduction

Section 4

Using a Model 590 C-V An alyzer

This section describes how to set up and use a Model 590 C-V Analyzer with the 4200A-SCS. For details on 590 operation, refer to the Model 590 C-V Analyzer Instruction Manual (document

number 590-901-01), available at tek.com/keithley

C-V measurement basics

The Keithley Instruments Model 590 C-V Analyzer measures capacitance versus voltage (C-V) and capacitance versus time (C-t) of semiconductor devices. Typically, C-V measurements are made on capacitor-like devices, such as a metal-oxide-silicon capacitor (MOS capacitor).

The measurements of MOS capacitors study:

• The integrity of the gate oxide and semiconductor doping profile

• The lifetime of semiconductor material

• The interface quality between the gate oxide and silicon

• Other dielectric materials used in an integrated circuit

The voltage sweeping capability of the 590 makes it easy to make a series of capacitance measurements that span the three regions of a C-V curve: the accumulation region, depletion region, and inversion region.

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

The following figure shows the three regions of a typical C-V curve for a MOS capacitor.

Figure 43: Typical C-V curve for a MOS capacitor

Capacitance measurement tests

The 4200A-SCS provides the following tests to perform C-V tests using the 590:

• 590 C-V Sweep (590-cvsweep): Makes a capacitance measurement at each step of a user-

configured linear voltage sweep.

• 590 C-V Pulse Sweep (590-cvpulsesweep): Makes a capacitance measurement at each step of

a user-configured pulsed voltage sweep.

• 590 C-t Sweep (590-ctsweep): Makes a specified number of capacitance measurements at a

pecified time interval. Voltage is held constant for these capacitance measurements.

• 590 Capacitance Measurements (590-cmeas): Makes capacitance and conductance

urements at a fixed bias voltage.

meas

There are also user modules available for the 590. Refer to KI590ulib user library (on page 4-12).

Connections

This section describes basic BNC, triaxial, and GPIB connections. For additional information about 590 connections, see the Model 590 C-V Analyzer Instruction Manual (document number 590-901-01), available at tek.com/keithley.

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Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

Signal connections

Basic signal connections for the 590 are shown in the following figure. The center conductors of the BNC connectors are connected to the device under test (DUT). The

outer shield of one of the coaxial cables is typically connected to a Faraday shield. The Model 590 output is typically connected to the wafer backside (or well). The input is typically connected to the gate of a MOS capacitor.

Figure 44: Basic 590 connections to the DUT

Triaxial connectors

Adapters are required to connect the 590 to equipment (for example, a probe station, test fixture, or matrix card) that uses triaxial connectors. The 7078-TRX-BNC is a 3-lug triaxial to BNC adapter. As shown in the following figure, connect the adapters to the 3-slot triaxial connectors and then use a 7051 BNC cable to make the connections to the 590.

See Using Switch Matrices (on page 2-1 Analyzer.

Figure 45: Connecting the 590 to equi pment with triaxial connectors

) for details on using a switch matrix with the 590 C-V

4200A-913-01 Rev. B / June 2022 4-3

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

2 pF

0.5 pF

1.5 pF

20 pF

4.7 pF

18 pF

200 pF

47 pF

180 pF

2 nF

470 pF

1.8 nF

The following figure shows the equivalent circuit for the adapter.

Figure 46: 7078-TRX-BNC equivalent circuit

GPIB connections

The 4200A-SCS controls the 590 through the General Purpose Interface Bus (GPIB). Use a shielded GPIB cable to connect the GPIB of the 590 to the GPIB of the 4200A-SCS.

Cable compensat ion

Signal pathways through the test cables, switch matrix, test fixture, and prober contribute unwanted capacitances that may adversely affect the measurement.

To correct for these unwanted capacitances, you should do cable compensation before measuring the capacitance of DUT. In general, you do cable compensation by connecting precisely known capacitance sources in place of the DUT and then measuring them. The 590 then uses these measured values to make corrections when measuring the DUT.

During cable compensation:

1. The 590 calculates the compensation parameters based on the comparison between the giv

measured values.

and

2. The 590 makes a probe-up offset measurement and suppresses any remaining offset

capacitance. This step is done every time a new measurement is made. Typically, cable compensation is done for all measurement ranges (2 pF, 20 pF, 200 pF, and 2 nF) of

the 590. Once cable compensation is done, it does not have to be done again unless the connections to the DUT are changed or power is cycled.

For each measurement range of the 590, you must use a low-capacitance source and a highcapacitance source. The following table lists the Keithley Instruments Model 5909 capacitance sources that can be used for each 590 range.

5909 capacitance sources 590 range Low capacitance source High capacitance source

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Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

Cable compensation user modules

The 4200A-SCS KI590ulib user library includes the following user modules for cable compensation:

• SaveCableCompCaps590: Enter and save capacitance source values: The user enters the

tual capacitance values of the capacitance sources. When the test is executed, t

capacitance values are stored in a file at a user-specified directory path.

• DisplayCableCompCaps590: Places capacitance values into the Analyze spreadsheet:

When this test is executed, the capacitance values saved by SaveCableCompCaps82 ar

aced into the Analyze spreadsheet.

• CableCompensate590: Performs cable compensation: The user specifies the ranges and test

frequencies for cable compensation. When this test is executed, on-screen prompts guide you

through the cable compensation process.

• LoadCableCorrectionConstants: This function reads the cable compensation parameters for

the range and frequency specified from the cable compensation file and sends these parameters

to the 590.

Details on all user modules for the 590 are provided in KI590ulib user library (on page 4-12).

Using KCon to add a 590 C-V Analyzer to system

To use the 4200A-SCS to control an external instrument, that instrument must be added to the system configuration. The 590 C-V Analyzer is added to the test system using the Keithley Configuration Utility (KCon).

Refer to “Use KCon to add equipment to the 4200A-SCS” in Model 4200A-SCS Parameter Analy zer Setup and Maintenance for instruction.

Model 590 test examp les

The test examples for the Model 590 C-V Analyzer are controlled by user test modules (UTMs) in the ivcvswitch project. The following figure shows the tree for the project.

A switch matrix is not used for these examples.

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Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

Cable compensation example

This example assumes that the 590 is connected directly to the DUT. The DUT could be a device installed in a test fixture or a MOS capacitor on a wafer.

The user modules for cable compensation must share the same file for capacitance source values.

efore, the same file directory path must be used in all three user modules. For this example, use

Ther the default file directory path (see line 1 of the parameter list in the following figures).

Enter an d save capa citance source values (save-cap-file)

To enter and save the capacitance source values:

1. Select Configure.

2. In the project tree, select save-cap-file. The default parameters for the user module ar

splayed, as shown in the following figure.

Figure 47: save-cap-file action and SaveCableCompCaps590 user module

3. Enter the capacitance source calibration value for each range and frequency. If you are using the

5909

, each capacitor has a label indicating the calibration value at 100 kHz and at 1 MHz.

For example, assume the low capacitance source for the 2 pF range is 0.47773 pF (100 kHz) and

0.47786 pF (1 MHz). Enter these values using scientific notation:

 Lo2p100k: Enter 0.47773e-12

 Lo2p1M: Enter 0.47786e-12

4. In the project tree, select the action.

5. Click Run to execute the action.

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Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

Place capacitance source values in a spreadsheet (display-cap-file)

To place the source values in the Analyze sheet:

1. Select display-cap-file. The default parameters are displayed, as shown in the following figure.

Figure 48: DisplayCableCompCaps590 default parameters

2. Ensure that the CabCompFile field has the same file directory path that is used in save-cap-

file (Enter and save capacitance source values (save-cap-file) (on pag e 4-6)).

3. Set the array size in the RangeSize, Values100kSize, and Values1MSize fields.

4. Click Run. The calibration source values are placed into the Analyze sheet for this action.

5. Select Analyze to view the spreadsheet for display-cap-file. An example spreadsheet is

shown in the following figure.

Figure 49: Display-cap-file spreadsheet showing capacitor source values

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Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

Perform cable compensation (CableCompensat e )

To do cable compensation:

1. Select Configure.

2. In the project tree, select cable-compensate to open the action. The following figure shows th

default parameters for the action.

Figure 50: CableCompensate590 default parameters

3. Ensure that CabCompFile has the same file directory path that is used in save-cap-file

(Enter and save capacitance source values (SaveCableCompCaps590) (on page 4-6)).

4. Enable or disable cable compensation. The FreqN and RangeN parameters either disable (0) or

enable (1) cable compensation for the frequencies and ranges. The figure above shows cable

compensation enabled for all ranges and test frequencies.

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Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

5. Click Run to execute the action. A series of dialog boxes guides you through the cable

ompensation process. The basic dialog boxes are shown in the following figure:

 Raise the probes: This dialog box indicates that an offset (open circuit) measurement is

required. Open the circuit as close to the DUT as possible.

 Connect the capacitor: The value in the dialog box corresponds to a calibration value entere

by the user in Enter and save capacitance source values (on page 4-6

). Connect t

capacitance source as close to the DUT as possible.

 Compare readings: This dialog box compares the measured value to the calibration (nominal)

alue entered by the user. The two readings should be fairly close. If they are not, y

v pr

obably connected the wrong capacitance source or had an open circuit condition. In that

case, click Cancel to abort the cable compensation process.

Clicking Cancel in a cable compensation dialog box aborts the cable compensation process. You can start over by clicking Run.

Figure 51: Cable compensation dialog boxes

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Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

C-V sweep example

This example demonstrates how to control a Keithley Instruments 590 C-V Analyzer to acquire capacitance verses voltage (CV) data from a MOS capacitor. In this example, the C-V Analyzer applies a linear staircase voltage sweep to a capacitor. A capacitance measurement is made on every voltage step of the sweep.

This example assumes that the 590 is connected directly to the DUT. The DUT could be a device installed in a test fixture or a MOS capacitor on a wafer.

To do a C-V sweep:

1. Choose Select.

2. Select Tests.

3. Search for 590.

4. Select Add for the 590 C-V Sweep (590-cvsweep) test.

5. In the project tree, select 590-cvsweep.

6. Select Configure. The parameters are displayed.

Figure 52: CvSweep590 user module (590-cvsweep UTM)

7. Change the test parameters as needed.

8. Execute the test by clicking Run.

This test uses the CvSweep590 user module. For details on this test description, see CvSweep590

user module (on page 4-26).

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Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

If you use the default parameters, this test causes the 590 to do a −4 V to +6 V staircase sweep using 50 mV steps. The following figure shows the default sweep.

Figure 53: C-V linear staircase sweep

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Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

CableCompensate590

ivcvswitch

Cmeas590

590-cmeas

Makes a single capacitance measurement.

CtSweep590

590-ctsweep

Makes a capacitance versus time measurement.

CvPulseSweep590

590-cvpulsesweep

Makes capacitance versus voltage measurements using a pulse sweep.

CvSweep590

590-cvsweep

Makes capacitance versus voltage measurements using a staircase sweep.

DisplayCableCompCaps590

ivcvswitch

Places capacitance source values in a

LoadCableCorrectionConstants

n/a

Reads the cable compensation

and sends these parameters to the 590.

SaveCableCompCaps590

in the

ivcvswitch

status

Returned values; see Details

CabCompFile

The complete name and path for the cable compensat ion file ; see Details

InstIdStr

The CMTR instrument ID; CMTR1, CMTR2, CMTR3, or CMTR4, depending on your system configuration

InputPin

The DUT pin to which the 590 input terminal is attached (−1 to 72); if a value of less than 1 is specified, no switch matrix connection is made; see Details

OutPin

The DUT pin to which the 590 output terminal is attached (−1 to 72); if a value of less than 1 is specified, no switch matrix connection is ma de; see Details

KI590ulib user l ibrary

The user modules in the KI590ulib user library are used to control the 590 C-V Analyzer. These user modules are summarized in the following table. Also listed in the table are names of the user test modules (UTMs) and actions in Clarius that use the user modules.

KI590ulib user modules User module UTM or action name Description

cable-compensate

the

display-cap-file

the

project

Performs cable compens atio n usin g known capacitance source values.

spreadsheet.

parameters for the range and frequency specified from the cable compensation file

save-cap-file

project

Saves entered capacitance source values to a file.

CableCompensate590 user module

The CableCompensate590 routine performs the 590 cable compensation procedure using the capacitor values that are stored in the specified cable compensation file. The resultant compensation values generated by the compensation process are stored in the same file.

Usage

status = CableCompensate590(char *CabCompFile, char *InstIdStr, int InputPin, int

OutPin, int Freq100k, int Freq1M, int Range2p, int Range20p, int Range200p, int

range2n);

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Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

Freq100k

Determines if compensation is done for the 100 kHz frequency:

 Compensate: 1

Freq1M

Determines if compensation is done for the 1 MHz frequ en cy :

Range2p

Determines if compensation is done for the 2 pF range:

Range20p

Determines if compensation is done for the 20 pF range:

 Compensate: 1

Range200p

Determines if compensation is done for the 200 pF range:

range2n

 Compensate: 1

 Do not compensate: 0

 Do not compensate: 0  Compensate:

 Do not compensate: 0

 Do not compensate: 0  Compensate:

Determines if compensation is done for the 2 nF range:

 Do not compensate: 0

Details

This user module performs cable compensation for the selected ranges and test frequencies of the

590.The following figure shows the default input parameters for a UTM that uses t

CableCompensate590

If the default parameters are used, cable compensation is done for the 2 pF, 20 pF, 200 pF, and 2 nF ranges and for the 100 kHz and 1 MHz test frequencies. The line 1 input parameter indicates the directory path where the user-input capacitor source values are saved. These values are entered and saved using the SaveCableCompCaps590 user module.

user module.

Figure 54: CableCompensate590 default parameters

Test example 1 demonstrates how to do cable compensation (see Model 590 test examples page 4-5)).

4200A-913-01 Rev. B / June 2022 4-13

(on

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

If the file defined for CabCompFile does not exist, or there is no path specified (null string), the default compensation para meters are used. Wh en entering the path, use two backslash (\\ c

haracters to separate each directory. For example, if your cable file is in

C:\calfiles\590cal.dat, you enter the following:

C:\\calfiles\\590cal.dat

If a switch matrix to route signals is being controlled by a connection action (for example, connect), t

here is no need to connect InputPin and OutPin. Set these parameters to 0.

Returned values are placed in the Analyze sheet.

)

• 0: OK.

• -10000 (INVAL_INST_ID): The specified instrument ID does not exist

• -10021 (COMP_FILE_NOT_EXIST): The specified compensation file does not exist

• -10022 (KI590_NOT_IN_KCON): There is no CMTR defined in your system configuration.

Procedure

Also see

For each range and test frequency specified by the input parameters:

1. You are prompted to open the circuit so that an offset capacitance measurement can be made.

2. When the offset capacitance measurement is completed, you are prompted to connect the low

value capacitor for the selected range. The system does the low value capacitor compensation.

3. You are prompted to connect the high value capacitor for the selected range. The system does

the high value capacitor compensation.

4. You are prompted to reconnect the low capacitor.

5. The nominal and measured values are displayed in a dialog box. You can:

 Select Cancel to abort the procedure if the results are not correct. No changes to the cabl

ompensation file occur.

 Select Save to save the cable compensation values.

None

4-14 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

status

Returned values; see Details

CabCompFile

The complete name and path for the cable compensat ion file ; see Details

InstIdStr

The CMTR instrument ID; CMTR1, CMTR2, CMTR3, or CMTR4, depending on your system configuration

InputPin

than 1 is specified, no switch matrix connection is made; see Details

OutPin

OffsetCorrect

Determines if an offset correction meas urem ent sho uld be m ade:

Frequency

The measurement frequency to use:

DefaultBias

StartTime

The amount of time to delay after applying the DefaultBias voltage step (0.001 s to 65 s)

Range

The measurement range to use: 1 to 4; see Details

Model

Measurement model:

Filter

Enables or disables the analog filter:

measurement time): 1

ReadingRate

The reading rate used to acquire the measurements (0 to 4); see Details

Output: The measured capacitance

Output: The bias voltage used

G_or_R

Output:

Cmeas590 user module

The Cmeas590 routine measures capacitance and conductance using the Keithley Instruments 590 C-V Analyzer. You can make an offset correction measurement and use cable compensation.

Usage

status = Cmeas590(char *CabCompFile, char *InstIdStr, int InputPin, int OutPin, int

OffsetCorrect, int Frequency, double DefaultBias, double StartTime, double

Range, int Model, int Filter, int ReadingRate, double *C, double *V, double

*G_or_R);

The DUT pin to which the 590 input terminal is attached (−1 to 72); if a value of less

The DUT pin to which the 590 output terminal is attached (−1 to 72); if a value of less than 1 is specified, no switch matrix connect ion is ma de; see Details

 Do not make offset measurement: 0  Make offset measurement:

 100 kHz: 0  1 MHz:

The DC bias to use for the measurement: −20 to +20 V

 Series model: 0  Parallel model:

 Disable: 0  Enable (can minimize the amount noise in the readings, but increases

 Parallel measurement model: G_or_R is the measured conductance  Series measurement model: G_or_R is the measured resistance

4200A-913-01 Rev. B / June 2022 4-15

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

Details

This user module makes a single, fixed-bias capacitance and conductance measurement. The default parameters for the 590-cmeas UTM, which uses the Cmeas590 user module, are shown in the following figure.

Figure 55: Cmeas590 (cmeas UTM parameters)

In general, the 590 is set to source 5 V for 2 seconds, then make a measurement, as shown in the following figure.

Figure 56: Cmeas590 measurement

If the file defined for CabCompFile does not exist, or there is no path specified (null string), the default compensation para meters are used. Wh en entering the path, use two backslash (\\ c

haracters to separate each directory. For example, if your cable file is in

)

C:\calfiles\590cal.dat, you enter the following:

C:\\calfiles\\590cal.dat

If a switch matrix to route signals is being controlled by a connection action (for example, connect), t

here is no need to connect InputPin and OutPin. Set these parameters to 0.

4-16 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

2 pF / 2 μs

20 pF / 200 μs

20 pF / 20 μs

20 pF / 200 μs

200 pF / 200 μs

200 pF / 2 ms

2 nF / 2 ms

2 nF / 20 ms

1000

3.5 1 75

C,G,V

3.5 2 18

C,G,V

4.5

C,G,V

4.5 4 1

C,G,V

4.5

For Range, the measurement range values are shown in the following table.

Range 100 kHz 1 MHz

The reading rates and resolutions for the ReadingRate parameter are described in the following table.

Reading rate Nominal reading rate

(per second)

Display readings Resolution

(digits)

Returned values are placed in the Analyze sheet:

• 0: OK.

• -10000 (INVAL_INST_ID): The specified instrument ID does not exist.

• -10020 (COMP_FILE_ACCESS_ERR): There was an error accessing the specified cable

compensation file.

• -10021 (COMP_FILE_NOT_EXIST): The specified compensation file does not exist.

• -10022 (KI590_NOT_IN_KCON): There is no CMTR defined in your system configuration.

• -10023 (KI590_MEAS_ERROR): A measurement error occurred.

• -10090 (GPIB_ERROR_OCCURRED): A GPIB communications error occurred.

Procedure

Also see

4200A-913-01 Rev. B / June 2022 4-17

• -10091 (GPIB_TIMEOUT): A timeout occurred during communications.

• -10102 (ERROR_PARSING): There was an error parsing the response from the 590.

• -10104 (USER_CANCEL): The user canceled the correction procedure.

1. You are prompted to open the circuit so that an offset capacitance measurement can be made, if

needed.

2. If a cable compensation file is specified, the compensation information in that file for the selecte

ange and frequency is loaded. If not, instrument default compensation is used.

3. The capacitance and conductance are measured.

None

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

status

Details

CabCompFile

The complete name and path for the cable compensat ion file ; see Details

InstIdStr

The CMTR instrument ID; CMTR1, CMTR2, CMTR3, or CMTR4, depending on your system configuration

InputPin

The DUT pin to which the 590 input terminal is attached (−1 to 72); if a value of less than 1 is specified, no switch matrix connection is made; see Details

OutPin less than 1 is specified, no switch matrix connection is ma de; see Details

OffsetCorrect

Determines if an offset correction meas urem ent sho uld be m ade:



Frequency

The measurement frequency to use:

DefaultBias

The DC bias to use for the measurement: −20 V to +20 V

Bias

The DC bias that is applied during a sweep: −20 V to +20 V

StartTime triggered until the first step time: 0.001 s to 65 s

StepTime

The time period after a transition to a new bias step and before the instrument Range

The measurement range to use in F: 2E-12, 20E-12, 200E-12, or 2E-9; see Details

Model

Measurement model:

Filter

Enable or disable the analog filter, which can minimize the amount of noise that

 Enable the filter: 1

Count

The number of readings per sweep: 1 to 1350

ReadingRate

Selects the reading rate used to acquire the measurements: 0 to 4; see Details

Output: The measured array of capacitance values

Csize

Set to a value that at minimum is equal to the

; if in doubt, set to 1350

CtSweep590 user module

The CtSweep590 routine performs a capacitance versus time (Ct) sweep using the Keithley Instruments 590 C-V Analyzer. You can make an offset correction measurement and use cable compensation.

Usage

status = CtSweep590(char *CabCompFile, char *InstIdStr, int InputPin, int OutPin,

int OffsetCorrect, int Frequency, double DefaultBias, double Bias, double

StartTime, double StepTime, double Range, int Model, int Filter, int Count, int

ReadingRate, double *C, int Csize, double *G_or_R, int G_or_Rsize, double *T,

int Tsize);

Returned values; see

The DUT pin to which the 590 output terminal is attached (−1 to 72); if a value of

 Do not make offset measurement: 0

Make offset measurement:

 100 kHz: 0  1 MHz:

The time that occurs on the first bias step, from the point the instrument is first

begins a measurement: 0.001 s to 65 s

 Series model: 0  Parallel model:

appears in the readings; however, it increases the measurement time:

 Disable the filter: 0

4-18 4200A-913-01 Rev. B / June 2022

Count

Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

G_or_R

Output:

resistance

G_or_Rsize

Tsize

Set to a value that at minimum is equal to the Count; if in doubt, set to 1350

 When the parallel measureme nt model (1) is selected, G_or_R is the

measured conductance

 When the series measurement model (0) is selected, this is the measured

Set to a value that at minimum is equal to the Count; if in doubt, set to 1350 The array of time stamps for each measurement step

Details

This user module performs a capacitance versus time (Ct) sweep. The following figure shows the default parameters for the ctsweep-590 UTM, which uses the CtSweep590 user module.

Figure 57: Starting KULT

4200A-913-01 Rev. B / June 2022 4-19

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

Time interval

= Sample_Time + Reading_rate

= 0.100 + 0.056

= 0.156 s

2 pF / 2 μs

20 pF / 200 μs

20 pF / 20 μs

20 pF / 200 μs

200 pF / 200 μs

200 pF / 2 ms

2 nF / 2 ms

2 nF / 20 ms

In this example, the 590 is set to source −5 V and performs 100 capacitance measurements using a 5 ms time interval, as shown in the following figure.

Figure 58: C-t measurements

The time interval between reading samples is the sum of the set Sample_Time and the Reading_rate time. The Reading_rate time for Reading_rate is 1/18 s (0.0555 s). Therefore:

If the file defined for CabCompFile does not exist, or there is no path specified (null string), the default compensation para meters are used. Wh en entering the path, use two backslash (\\ c

haracters to separate each directory. For example, if your cable file is in

)

C:\calfiles\590cal.dat, you enter the following:

C:\\calfiles\\590cal.dat

If a switch matrix to route signals is being controlled by a connection action (for example, connect), t

here is no need to connect InputPin and OutPin. Set these parameters to 0.

For Range, the measurement range values are shown in the following table.

Range 100 kHz 1 MHz

4-20 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

1000

3.5 1 75

C,G,V

3.5

C,G,V

4.5 3 10

C,G,V

4.5 4 1

C,G,V

4.5

The reading rates and resolutions for the ReadingRate parameter are described in the following table.

Reading rate Nominal reading rate

(per second)

Returned values are placed in the Analyze sheet.

Display readings Resolution

(digits)

• 0: OK.

• -10000 (INVAL_INST_ID): The specified instrument ID does not exist.

• -10020 (COMP_FILE_ACCESS_ERR): There was an error accessing the specified cable

compensation file.

• -10021 (COMP_FILE_NOT_EXIST): The specified compensation file does not exist.

• -10022 (KI590_NOT_IN_KCON): There is no CMTR defined in your system configuration.

• -10023 (KI590_MEAS_ERROR): A measurement error occurred.

• -10090 (GPIB_ERROR_OCCURRED): A GPIB communications error occurred.

• -10091 (GPIB_TIMEOUT): A timeout occurred during communications.

Procedure

Also see

• -10101 (ARRAY_SIZE_TOO_SMALL): The specified value for Csize, G_or_Rsize, Vsize, or

Tsize was too small for the number of steps in the sweep.

• -10102 (ERROR_PARSING): There was an error parsing the response from the 590.

• -10104 (USER_CANCEL): The user canceled the correction procedure.

1. You are prompted to open the circuit so that an offset capacitance measurement can be made.

2. If a cable compensation file is specified, the compensation information in that file for the selected

ange and frequency is loaded. If not, instrument default compensation is used.

3. A C-t sweep is performed.

None

4200A-913-01 Rev. B / June 2022 4-21

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

status

Returned values; see Details

CabCompFile

The complete name and path for the cable compensat ion file ; see Details

InstIdStr

The CMTR instrument ID; CMTR1, CMTR2, CMTR3, or CMTR4, depending on your system configuration

InputPin

The DUT pin to which the 590 input terminal is attached (−1 to 72); if a value of less than 1 is specified, no switch matrix connection is made; see Details

OutPin

The DUT pin to which the 590 output terminal is attached (−1 to 72); if a value of less than 1 is specified, no switch matrix connection is made; see Details

OffsetCorrect

Determines if an offset correction meas urem ent sho uld be m ade:

 Make offset measurement: 1

FirstBias

The starting bias for the sweep: −20 V to +20 V; see Details

LastBias

The last voltage used in the sweep: −20 V to +20 V; see Details

StepV

The voltage step size: −20 V to +20 V; see Details

Frequency

The measurement frequency to use:

 1 MHz: 1

DefaultBias

The DC bias applied before and after a sweep: −20 V to +20 V

StartTime until the first step time: 0.001 s to 65 s

StopTime

The time between pulses with the 590 at the default bias: 0.001 s to 65 s

StepTime measurement: 0.001 s to 65 s

Range

The measurement range to use in F: 2E-12, 20E-12, 200E-12, or 2E-9; see Details

Model

Measurement model:

 Parallel model: 1

Filter

Enable or disable the analog filter, which can minimize the amount of noise that

 Enable the filter: 1

ReadingRate

Selects the reading rate used to acquire the measurements: 0 to 4; see Details

Output: The measured array of capacitance values

CvPulseSweep590 user module

The CvPulseSweep590 routine performs a capacitance versus voltage (C-V) sweep using the pulse waveform capability of the Keithley Instruments 590 C-V Analyzer. You can make an offset correction measurement and use cable compensation.

Usage

status = CvPulseSweep590(char *CabCompFile, char *InstIdStr, int InputPin, int

OutPin, int OffsetCorrect, double FirstBias, double LastBias, double StepV, int

Frequency, double DefaultBias, double StartTime, double StopTime, double

StepTime, double Range, int Model, int Filter, int ReadingRate, double *C, int

Csize, double *V, int Vsize, double *G_or_R, int G_or_Rsize, double *T, int

Tsize);

 Do not make offset measurement: 0

 100 kHz: 0

The time that occurs on the first bias step, from the point the instrument is first triggered

The time after a transition to a new bias step and before the instrument begins a

 Series model: 0

appears in the readings; however, it increases the measurement time:

 Disable the filter: 0

4-22 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

Csize

Set to a value that is equal to or greater than the

or number of voltage

this parameter is fixed at 1350

The array of bias voltages used

Vsize

Set to a value that is equal to or greater than the

or number of voltage

this parameter is fixed at 1350

G_or_R

Output:

resistance

G_or_Rsize

Set to a value that is equal to or greater than the

or number of voltage

UTM, this parameter is fixed at 1350

The array of time stamps for each measurement step

Tsize

Set to a value that is equal to or greater than the

or number of voltage

UTM, this parameter is fixed at 1350

G_or_Rsize

steps in the sweep, or is equal to ((LastBias − FirstBias) /StepV) + 1; when this function is called from a Clarius,

G_or_Rsize

steps in the sweep, or is equal to ((LastBias − FirstBias) /StepV) + 1; when this function is called from a Clarius,

 When the parallel measurement model (1) is selected, G_or_R is the measured

conductance

 When the series measurement model (0) is selected, this is the measured

G_or_Rsize

steps in the sweep, or is equal to ((LastBias − FirstBias) /StepV) + 1; when this function i s called from a Clarius

G_or_Rsize

steps in the sweep, or is equal to ((LastBias − FirstBias) /StepV) + 1; when this function is called from a Clarius

Details

This user module performs a capacitance versus voltage pulse sweep. The following figure shows the default parameters for the 590-cvpulsesweep UTM, which uses the CvPulseSweep590 user module.

Figure 59: CvPulseSweep590 (cvpulsesweep UTM parameters)

4200A-913-01 Rev. B / June 2022 4-23

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

In this example, the 590 outputs a series of pulses in 50 mV steps from −4 V to +6 V. As shown in the following figure, a measurement is made on each p uls e step.

Figure 60: C-V pulse sweep measurements

If the file defined for CabCompFile does not exist, or there is no path specified (null string), the default compensation para meters are used. Wh en entering the path, use two backslash (\\ c

haracters to separate each directory. For example, if your cable file is in

)

C:\calfiles\590cal.dat, you enter the following:

C:\\calfiles\\590cal.dat

If a switch matrix to route signals is being controlled by a connection action (for example, connect), t

here is no need to connect InputPin and OutPin. Set these parameters to 0.

The value of ((LastBias − FirstBias) / StepV) +1 must be less than or equal to the Csize, Vsize, G_or_Rsize, and Tsize parameters.

4-24 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

2 pF / 2 μs

20 pF / 200 μs

20 pF / 20 μs

20 pF / 200 μs

200 pF / 200 μs

200 pF / 2 ms

2 nF / 2 ms

2 nF / 20 ms

1000

3.5 1 75

C,G,V

3.5 2 18

C,G,V

4.5

C,G,V

4.5 4 1

C,G,V

4.5

For Range, the measurement range values are shown in the following table.

Range 100 kHz 1 MHz

The reading rates and resolutions for the ReadingRate parameter are described in the following table.

Reading rate Nominal reading rate

(per second)

Display readings Resolution

(digits)

Returned values are placed in the Analyze sheet.

• 0: OK.

• -10000 (INVAL_INST_ID): The specified instrument ID does not exist.

• -10020 (COMP_FILE_ACCESS_ERR): There was an error accessing the specified cable

compensation file.

• -10021 (COMP_FILE_NOT_EXIST): The specified compensation file does not exist.

• -10022 (KI590_NOT_IN_KCON): There is no CMTR defined in your system configuration.

• -10023 (KI590_MEAS_ERROR): A measurement error occurred.

• -10090 (GPIB_ERROR_OCCURRED): A GPIB communications error occurred.

• -10091 (GPIB_TIMEOUT): A timeout occurred during communications.

Procedure

Also see

4200A-913-01 Rev. B / June 2022 4-25

• -10101 (ARRAY_SIZE_TOO_SMALL): The specified value for Csize, G_or_Rsize, Vsize, or

Tsize was too small for the number of steps in the sweep.

• -10102 (ERROR_PARSING): There was an error parsing the response from the 590.

• -10104 (USER_CANCEL): The user canceled the correction procedure.

1. You are prompted to open the circuit to make an offset capacitance measurement if needed.

2. If a cable compensation file is specified, the compensation information in that file for the selecte

ange and frequency is loaded. If not, instrument default compensation is used.

3. A C-V pulse sweep is done.

None

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

status

Details

CabCompFile

The complete name and path for the cable compensat ion file ; see Details

InstIdStr

The CMTR instrument ID; CMTR1, CMTR2, CMTR3, or CMTR4, depending on your system configuration

InputPin

The DUT pin to which the 590 input terminal is attached (−1 to 72); if a value of less than 1 is specified, no switch matrix connection is made; see Details

OutPin less than 1 is specified, no switch matrix connection is ma de; see Details

OffsetCorrect

Determines if an offset correction meas urem ent sho uld be m ade:



Waveform

Selects either the single staircase or dual staircase waveform:

FirstBias

LastBias

StepV

Frequency

The measurement frequency to use:

DefaultBias

The DC bias that is applied before and after a sweep: −20 V to +20 V

StartTime

The time that occurs on the first bias step, from the point the instrument is first triggered until the first step time: 0.001 s to 65 s

StepTime

The time period after a transition to a new bias step and before the instrument Range

The measurement range to use in F: 2E-12, 20E-12, 200E-12, or 2E-9; see Details

Model

Measurement model:

CvSweep590 user module

The CvSweep590 routine does a capacitance versus voltage (C-V) sweep using the Keithley Instruments 590 C-V Analyzer. You can make an offset correction measurement and use cable compensation.

Usage

status = CvSweep590(char *CabCompFile, char *InstIdStr, int InputPin, int OutPin,

int OffsetCorrect, int Waveform, double FirstBias, double LastBias, double

StepV, int Frequency, double DefaultBias, double StartTime, double StepTime,

double Range, int Model, int Filter, int ReadingRate, double *C, int Csize,

double *V, int Vsize, double *G_or_R, int G_or_Rsize, double *T, int Tsize);

Returned values; see

The DUT pin to which the 590 output terminal is attached (−1 to 72); if a value of

 Do not make offset measurement: 0

Make offset measurement:

 Single: 1  Dual:

The starting voltage for the sweep: −20 V to +20 V The last voltage used in the sweep: −20 V to +20 V The voltage step size: −20 V to +20 V; the value of

((LastBias − FirstBias) / StepV) + 1 must be less than or equal to the Csize, Vsize, G_or_Rsize, and Tsize parameters

 100 kHz: 0  1 MHz:

begins a measurement: 0.001 s to 65 s

 Series model: 0  Parallel model:

4-26 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

Filter

Enable or disable the analog filter, which can minimize the amount of noise that

ReadingRate

Selects the reading rate used to acquire the measurements: 0 to 4; see Details

Output: The measured array of capacitance values

Csize

Set to a value equal to or greater than the number of voltage steps in the sweep or V

Output: The array of bias voltages used

Vsize

Set to a value equal to or greater than the number of voltage steps in the sweep or

G_or_R

Output:

G_or_Rsize

When this function is called from a Clarius UTM, this parameter is fixed at 1350

The array of time stamps for each measurement step

Tsize

When this function is called from a Clarius UTM, this parameter is fixed at 1350

appears in the readings; however, it increases the measurement time:

 Disable the filter: 0  Enable the filter:

equal to ((LastBias − FirstBias) / StepV) + 1

 When the parallel measurement model (0) is selected, G_or_R is the

measured conductance

 When the series measurement model (1) is selected, this is the measured

resistance

Details

This user module performs a capacitance versus voltage staircase sweep. The following figure shows the default parameters for the 590-cvsweep UTM, which uses the CvSweep590 user module.

Figure 61: CvSweep590 user module (590-cvsweep UTM)

4200A-913-01 Rev. B / June 2022 4-27

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

2 pF / 2 μs

20 pF / 200 μs

20 pF / 20 μs

20 pF / 200 μs

200 pF / 200 μs

200 pF / 2 ms

2 nF / 2 ms

2 nF / 20 ms

In general, the 590 outputs a linear staircase voltage sweep from −4 V to +6 V in 50 mV steps. As shown in the following figure, a capacitance measurement is made on each step of the sweep. A test example demonstrates how to perform a C-V sweep (see Model 590 test examples (on page 4-5

)).

Figure 62: C-V linear staircase sweep

If the file defined for CabCompFile does not exist, or there is no path specified (null string), the default compensation para meters are used. Wh en entering the path, use two backslash (\\ c

haracters to separate each directory. For example, if your cable file is in

)

C:\calfiles\590cal.dat, you enter the following:

C:\\calfiles\\590cal.dat

If a switch matrix to route signals is being controlled by a connection action (for example, connect), t

here is no need to connect InputPin and OutPin. Set these parameters to 0.

For Range, the measurement range values are shown in the following table.

Range 100 kHz 1 MHz

4-28 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

1000

3.5 1 75

C,G,V

3.5

C,G,V

4.5 3 10

C,G,V

4.5 4 1

C,G,V

4.5

The reading rates and resolutions for the ReadingRate parameter are described in the following table.

Reading rate Nominal reading rate

(per second)

Returned values are placed in the Analyze sheet:

Display readings Resolution

(digits)

• 0: OK.

• -10000 (INVAL_INST_ID): The specified instrument ID does not exist.

• -10020 (COMP_FILE_ACCESS_ERR): There was an error accessing the specified cable

compensation file.

• -10021 (COMP_FILE_NOT_EXIST): The specified compensation file does not exist.

• -10022 (KI590_NOT_IN_KCON): There is no CMTR defined in your system configuration.

• -10023 (KI590_MEAS_ERROR): A measurement error occurred.

• -10090 (GPIB_ERROR_OCCURRED): A GPIB communications error occurred.

Procedure

Also see

• -10091 (GPIB_TIMEOUT): A timeout occurred during communications.

• -10101 (ARRAY_SIZE_TOO_SMALL): The specified value for Csize, G_or_Rsize, Vsize, or

Tsize was too small for the number of steps in the sweep.

• -10102 (ERROR_PARSING): There was an error parsing the response from the 590.

• -10104 (USER_CANCEL): The user canceled the correction procedure.

1. You are prompted to open the circuit so that an offset capacitance measurement can be made if

needed.

2. If a cable compensation file is specified, the compensation information in that file for the selecte

ange and frequency is loaded. If not, instrument default compensation is used.

3. A C-V sweep is performed.

None

4200A-913-01 Rev. B / June 2022 4-29

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

status

Returned values are placed in the Analyze sheet; see Details

CabCompFile

The complete name and path for the cable compensat ion file ; see Details

Range

Output: An 8-element array that receives the nom ina l ran ge values

RangeSize

The size of the Range array; set to 8

Values100k

Output: An 8-element fixed array that receives the nominal capacitor values used for the cable compensation at the 100 kHz frequency

Values100kSize

The size of the Values100k array; set to 8

Values1M

Output: An 8-element fixed array that receives the nominal capacitor values used for the cable compensation at the 1 MHz frequency

Values1MSize

The size of the Values1M array; set to 8

DisplayCableCompCaps590 user module

DisplayCableCompCaps590 reads the nominal cable compensation values that are stored in the compensation file, and returns them to the calling function or, in the case of Clarius, to the Analyze sheet.

Usage

status = DisplayCableCompCaps590(char *CabCompFile, double *Range, int RangeSize,

double *Values100k, int Values100kSize, double *Values1M, int Values1MSize);

Details

This user module is used for 590 cable compensation. When this test is run, the nominal capacitance source values saved by the SaveCableCompCaps590 user module are placed into a spreadsheet.

The default parameters for this user module are shown in the following figure. Line 1 specifies the file directory path where the capacitance values are saved. This file directory path must be the same as the one used by the SameCableCompCaps590 user module.

Figure 63: DisplayCableCompCaps590 default parameters

To prevent unpredictable results, the array size values for the RangeSize, Values100kSize, and Values1MSize must be set to 8, as shown in the figure above.

See Example 1: Cable compensation (on page 4-6) for a demonstration of how cable compensation is done.

4-30 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

2E-12

2 pF low comp value

2E-12

2 pF high comp value

20E-12

20 pF low comp value

20E-12

20 pF high comp value

200E-12

200 pF low comp value

200E-12

200 pF high comp value

2E-9

2 nF low comp value

2E-9

2 nF high comp value

The returned arrays are arranged in the order shown in the following table.

Reading_rate valid inputs Range 100 kHz values 1 MHz values

If the file defined for CabCompFile does not exist, or there is no path specified (null string), the default compensation para meters are used. Wh en entering the path, use two backslash (\\ c

haracters to separate each directory. For example, if your cable file is in

)

C:\calfiles\590cal.dat, you enter the following:

C:\\calfiles\\590cal.dat

Also see

If a switch matrix to route signals is being controlled by a connection action (for example, connect), t

here is no need to connect InputPin and OutPin. Set these parameters to 0.

The return values from status can be:

• 0: OK.

• -10021 (COMP_FILE_NOT_EXIST): The specified compensation file does not exist.

• -10022 (KI590_NOT_IN_KCON): There is no CMTR defined in your system configuration.

SaveCableCompCaps590 user module (on page 4-33)

4200A-913-01 Rev. B / June 2022 4-31

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

status

Returned values are placed in the Analyze sheet; see Details

CabCompFile

The complete name and path for the cable compensat ion file ; see Details

The CMTR instrument ID; this can be CMTR1 through CMTR4, depending on the frequency

The frequency of the correction constant: 0 = 1 MHz; 1 = 100 kHz

range

The range of the correct constant; see Details

2 pF/2 μs

20 pF/200 μs

20 pF/20 μs

20 pF/200 μs

200 pF/200 μs

200 pF/2 ms

LoadCableCorrectionConstants

LoadCableCorrectionConstants reads the cable compensation parameters for the range and frequency specified from the cable compensation file and sends these parameters to the 590.

Usage

status = LoadCableCorrectionConstants(char *CabCompFile, char *instr_id,

*frequency, int range);

Details

instr_id

configuration of your system

If the file specified by CapCompFile does not exist, it is created. The path that you specify must exist. When entering the path information, be sure to use two \ characters to separate each directory level. For example, if your cable compensation file is in file C:\calfiles\590cal.dat, you would enter C:\\calfiles\\590cal.dat.

range values Range 100 kHz values 1 MHz values

2 nF/2 ms 2 nF/20 ms

The return values from status can be:

• 0: OK.

• -10000 (INVAL_INST_ID): An invalid instrument ID was specified. This generally means that

there is no instrument with the specified ID in your configuration.

• -10020 (COMP_FILE_ACCESS_ERR): There was an error accessing the cable

compensation file.

• -10021 (COMP_FILE_NOT_EXIST): The specified compensation file does not exist.

• -10022 (KI590_NOT_IN_KCON): There is no CMTR defined in your system configuration.

Also see

SaveCableCompCaps590 user module (on pag e 4-33)

4-32 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

status

Returned values are placed in the Analyze sheet; see Details

CabCompFile

The complete name and path for the cable compensat ion file ; see Details

Lo2p100k

The nominal value of the low-range capacitor used for cable compensation for the 2 pF range and 100 kHz frequency: 0 F to 0.95E-12 F

Lo2p1M

The nominal value of the low-range capacitor used for cable compensation for the 2 pF range and 1 MHz frequency: 0 F to 0.95E-12 F

Hi2p100k

The nominal value of the high-range capacitor used for cable compensation for the 2 pF range and 100 kHz frequency: 1E-12 F to 2E-12 F

Hi2p1M

The nominal value of the high-range capacitor used for cable compensation for the 2 pF range and 1 MHz frequency: 1E-12 F to 2E-12 F

Lo20p100k

The nominal value of the low-range capacitor used for cable compensation for the 20 pF range and 100 kHz frequency: 0 F to 9.5E-12 F

Lo20p1M

The nominal value of the low-range capacitor used for cable compensation for the 20 pF range and 1 MHz frequency: 0 F to 9.5E-12 F

Hi20p100k

The nominal value of the high-range capacitor used for cable compensation for the 20 pF range and 100 kHz frequency: 10E-12 F to 20E-12 F

Hi20p1M 20 pF range and 1 MHz frequency: 10E-12 F to 20E-12 F

Lo200p100k

The nominal value of the low-range capacitor used for cable compensation for the 200 pF range and 100 kHz frequency: 0 F to 95E-12 F

Lo200p1M

The nominal value of the low-range capacitor used for cable compensation for the 200 pF range and 1 MHz frequenc y: 0 F to 95E-12 F

Hi200p100k

The nominal value of the high-range capacitor used for cable compensation for the 200 pF range and 100 kHz fre quen cy: 100E-12 F to 200E-12 F

Hi200p1M

The nominal value of the high-range capacitor used for cable compensation for the 200 pF range and 1 MHz frequency: 100E-12 F to 200E-12 F

Lo2n100k

The nominal value of the low-range capacitor used for cable compensation for the 2 nF range and 100 kHz frequency: 0 F to 995E-12 F

Lo2n1M

The nominal value of the low-range capacitor used for cable compensation for the 2 nF range and 1 MHz frequency: 0 F to 995E-12 F

Hi2n100k

The nominal value of the high-range capacitor used for cable compensation for the 2 nF range and 100 kHz frequency: 1000E-12 F to 2000E-12 F

Hi2n1M

The nominal value of the high-range capacitor used for cable compensation for the 2 nF range and 1 MHz frequency: 1000E-12 F to 2000E-12 F

SaveCableCompCaps590 user module

This function saves the nominal values of the capacitors used to do the 590 cable compensation procedure to the indicated file. If no cable compensation file exists, this module creates one if the user has the proper system permissions.

Usage

status = SaveCableCompCaps590(char *CabCompFile, double Lo2p100k, double Lo2p1M,

double Hi2p100k, double Hi2p1M, double Lo20p100k, double Lo20p1M, double

Hi20p100k, double Hi20p1M, double Lo200p100k, double Lo200p1M, double

Hi200p100k, double 200p1M, double Lo2n100k, double Lo2n1M, double Hi2n100k,

double Hi2n1M);

The nominal value of the high-range capacitor used for cable compensation for the

4200A-913-01 Rev. B / June 2022 4-33

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control

Details

This user module is used for 590 cable compensation. You enter precise capacitance source values. When this test is run, the capacitance source values are saved to a user-specified file. The user module to perform cable compensation (CableCompensate590) can then access the capacitanc

source values from this file. The default parameter values for this user module are shown in the following figure. These are

suggested low and high values that can be used for cable compensation. You must replace these values with the calibration values of the capacitance sources.

Figure 64: save-cap-file action and SaveCableCompCaps590 user module

Example 1: Cable compensation (on page 4-6) demonstrates how cable compensation is done.

If the file defined for CabCompFile does not exist, or there is no path specified (null string), the default compensation para meters are used. Wh en entering the path, use two backslash (\\ c

haracters to separate each directory. For example, if your cable file is in

)

C:\calfiles\590cal.dat, you enter the following:

C:\\calfiles\\590cal.dat

If a switch matrix to route signals is being controlled by a connection action (for example, connect), t

here is no need to connect InputPin and OutPin. Set these parameters to 0.

4-34 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer

The return values from status can be:

• 0: OK.

• -10000 (INVAL_INST_ID): The specified instrument ID does not exist. This generally means

that there is no instrument with the specified ID in your configuration.

• -10001 (INVAL_PIN_SPEC): An invalid DUT pin number was specified.

• -10003 (NO_SWITCH_MATRIX): No switch matrix was found.

• -10004 (NO_MATRIX_CARDS): No matrix cards were found.

• -10020 (COMP_FILE_ACCESS_ERR): There was an error accessing the specified cable

ompensation file.

• -10021 (COMP_FILE_NOT_EXIST): The specified compensation file does not exist.

• -10022 (KI590_NOT_IN_KCON): There is no CMTR defined in the configuration of

your system.

Also see

CableCompensate590 user module (on page 4-12)

4200A-913-01 Rev. B / June 2022 4-35

HP4284ulib user library .............................................................5-8

In this section:

Introduction ...............................................................................5-1

Using KCon to add a Keysight LCR Meter to the system ..........5-6

Model 4284A or 4980A C-V sweep test example ......................5-6

Introduction

This section contains information on using the 4200A-SCS with the Keysight Models 4284A and 4980A.

For details on Keysight Model 4284A operation, refer to the Keysight Model 4284A Operation Manual. For details on Keysight Model 4980A operation, refer to the Keysight Model 4980A Operation Manual.

Section 5

Using a Keysight 4284/4980A LCR Meter

C-V measurement basics

The Keithley Instruments 4200A-SCS can control a Keysight 4284A or 4980A LCR Meter to meas ure capacitance versus voltage (C-V) of semiconductor devices. Typically, C-V measurements are performed on capacitor-like devices, such as a metal-oxide-silicon capacitor (MOS capacitor).

The measurements of MOS capacitors study:

• The integrity of the gate oxide and semiconductor doping profile

• The lifetime of semiconductor material

• The interface quality between the gate oxide and silicon

• Other dielectric materials used in an integrated circuit

A user-configured voltage sweep allows capacitance measurements that can span the three regions of a C-V curve: The accumulation region, depletion region, and inversion region.

Section 5: Using a Keysight 4284/4980A LCR Meter Model 4200A-SCS Prober and External Instrument Control

The following figure shows the three regions of a typical C-V curve for a MOS capacitor.

Figure 65: Typical C-V curve for a MOS capacitor

Capacitance measurement tests

The 4200A-SCS provides the following user modules to perform C-V tests using the Keysight Models 4284A and 4980A:

• CvSweep4284. C-V sweep test: Performs a capacitance and conductance measurement at each

tep of a user-configured linear voltage sweep.

• Cmeas4284. C measurement: Performs a capacitance and conductance measurement at a fixed

as voltage.

Details on the user modules for the Keysight Models 4284A and 4980A are provided in the

HP4284ulib User Library Reference (on page 5-8

If needed, you can initially do an OPEN and SHORT correction on the 4284A or 4980A to achieve the most accurate C-V measurements. See the Keysight 4284A or 4980A Operation Manual for details.

5-2 4200A-913-01 Rev. B / June 2022

Model 4200A-SCS Prober and External Instrument Control Section 5: Using a Keysight 4284/4980A LCR Meter

Signal connections

Basic 4-wire signal connections for the Model 4284A or 4980A are shown in the following figure. The center conductors of the BNC connectors are connected to the device under test (DUT). The outer shield of one of the coaxial cables is typically connected to a Faraday shield. The Model 4284A or 4980A output is typically connected to the wafer backside (or well). The input is typically connected to the gate of a MOS capacitor.

Figure 66: Basic Model 4284A and 4980A connections to DUT

Triaxial connection s

Adapters are required to connect the Model 4284A or 4980A to equipment (for example, a probe station, test fixture, or matrix card) that uses triaxial connectors.

See Using Switch Matrices (on page 2-1) for details on using a switch matrix with the Model 4284 or 4980A LCR Meter.

4200A-913-01 Rev. B / June 2022 5-3

Section 5: Using a Keysight 4284/4980A LCR Meter Model 4200A-SCS Prober and External Instrument Control

4-wire remote sensing

The following figure shows 4-wire remote sense connections. The 7078-TRX-BNC is a 3-lug tr iaxi alto-BNC adapter. As shown in the figure, connect the adapters to the 3-slot triaxial connectors, and then use a 7051 BNC cable to make the connections to the Model 4284A or 4980A.

Figure 67: 4-wire remote sense conne ctions to equipment using triaxial connectors

The following figure shows the equivalent circuit for the adapter.

Figure 68: 7078-TRX-BNC equivalent circuit

5-4 4200A-913-01 Rev. B / June 2022

Tektronix 4200A-SCS User manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Safety precaut ions

Table of contents

Introduction

Introduction

Using switch matrices

Typical test syste ms using a switch matrix

Matrix card types

7072 Semiconductor Matrix Card

7174A Low Current Matrix Card

7174A connections for local sensing

7174A connections for remote sensing

Switch matrix mainframes

Card installation

GPIB connections

Switch matrix connections

Typical SMU matrix card connections

Typical preamplifier matrix card connections

Typical CVU matrix card connections

Typical CVU test connections to a DUT

Connection scheme settings

Row-column or instrument card settings

Row-column scheme

Instrument card scheme for l ocal sense

Instrument card scheme for remote sense

Switch matrix control

Signal paths to a DUT

4200A-SCS signal paths

Sense setting

Connection setting

C-V Analyzer signal paths

Keysight Model 8110A pulse generator signal path

Use KCon to add a sw itch matrix to the system

Step 1. Exit Clarius and open KCon

Step 2. Add a test fixture or probe station

Add a test fixture

Add a probe station

Step 3. Add switching system mainframe

Step 4. Set GPIB address

Step 5. Configure the instrument connection scheme

Step 6. Assign switch cards to mainframe slots

Step 7. Set matrix card properties

Step 8. Save configuration

Step 9. Close KCon and open Clarius

Switch matrix control example

Set up and run a switch matrix in Clarius

Matrixulib u ser library

ConnectPins user module

Configure and use a Series 700 Switchi ng System

Introduction

Equipment required

Device connections

Connect the 7072 to the DUT

Connect the 4200A-SCS to the 7072

Update the switch configuration in KCon

Set up the measurements in Clarius

Create a new project

Add a device

Add the connectpins action

Configure the connectpins action

Search for and add existing tests from the Test Library

Run the project and view the tests

Introduction

Using a Model 590 C-V An alyzer

C-V measurement basics

Capacitance measurement tests

Connections

Signal connections

Triaxial connectors

GPIB connections

Cable compensat ion

Cable compensation user modules

Using KCon to add a 590 C-V Analyzer to system

Model 590 test examp les

Cable compensation example

Enter an d save capa citance source values (save-cap-file)

Place capacitance source values in a spreadsheet (display-cap-file)