Tektronix 370B Data Sheet

Features
High-resolution DC Parametric Measurements With the 370B (Resolution Down to 1 pA or 2 µV)
High Voltage and Current Sourcing With the 371B (Up to 3,000 V or 400 A)
Kelvin Sense Measurements Sweep Measurement Mode Waveform Comparison
and Averaging Fully Programmable
1.44 MB Floppy Drive Stores Setup and Bitmap of Curves
Direct Hardcopy with Third-party Printer
Applications
Parametric Characterization of Semiconductors
Failure Analysis Data Sheet Generation Manufacturing Test Process Monitoring
and Quality Control Incoming Inspection Component Matching
Curve Tracers
370B •371B
370B and 371B Programmable Curve Tracers
Tektronix curve tracers offer power and versatility to test the DC characteristics of semiconductor devices.The 370B and 371B curve tracers combine a simple-to-use front panel, digital acquisition and display,and programmability to serve a variety of application needs.
In the R&D lab,Tektronix curve tracers are used for characterization of new designs, extraction of SPICE parameters, failure analysis and data sheet generation. In manufacturing test,Tektronix curve tracers are used to verify device quality and process monitoring.They are also used for incoming inspection to verify device performance, perform failure analysis and match components.
Curve Tracers
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The World Standard for High-resolution Curve Tracers
The 370B, the world standard for high-resolution curve tracers, provides up to 20 A/2,000 V sourcing capability combined with 1 pA and 50 µV measurement resolution. The 370B performs DC parametric characterization of integrated circuits, transistors, thyristors, diodes, SCRs, MOSFETs, electro-optic compo­nents, solar cells, solid-state relays and other semiconductor devices. It has pushbutton source and measurement configuration so it’s easy to change from one test to the next.
The Industry Leader in High-power Curve Tracers
The 371B, the industr y leader in high-power curve tracers, performs DC parametric charac­terization on a wide variety of power semicon­ductors including thyristors, SCRs, IGBTs and power MOSFETs. The high-voltage collector mode permits testing the Off-Characteristics of a device up to 3,000 volts. The pulsed high-current collector mode provides output current pulses greater than 400 amps peak to test On-Characteristics and permits high­power testing up to 3,000 watts. In the sweep measurement mode, the 371B automatically constructs a family of curves while stimulating the device with low-duty-cycle pulses. With this capability,power curves can be displayed without excessive heating of the device.
Interactive Programmable Control
Interactive control of all 370B and 371B measurements is accomplished from the full­featured front panel or over the GPIB. Ever y operating parameter can be controlled using the GPIB controller. 370B and 371B Series LabView drivers are available at the Tektronix.com web site. These drivers have many of the building blocks to create a custom measurement solution.
Store and Recall Setups and Digitized Curves
Up to 80 digitized characteristic curves can be stored on a diskette or in internal non-volatile memory and recalled at the touch of a button. A live curve can then be compared with a pre­viously stored curve to assess temperature drift or other changes in operating parameters.To help identify the data, up to 24 characters of text may be used to label or annotate the curve data.
Operating parameters can be adjusted, stored and recalled using several storage methods including the 370B and 371B system memory, the built-in 1.44 MB floppy drive, or sent externally via the GPIB controller.
Automated Cursor
The 370B and 371B provide three cursor measurement modes.The dot cursor provides direct screen readout of voltage, current, gm or DC beta at any point. The window cursor can be positioned between two curves to measure small signal beta or gm and can also be used for visual go/no-go tests.The function line cursor provides screen readout of a slope or intercept value.
Test Fixturing
A test fixture is a standard accessory that provides safe device enclosure to ensure oper ator protection during measurements. The test fixture accommodates standard adapters with Kelvin sensing.
Sweep Measurement Mode
In the sweep measurement mode, the cur ve tracer automatically constructs a family of curves. The 371B achieves this with low duty­cycle pulses.With this capability,power curves can be displayed without excessive heating of the device.
Direct Hardcopy Printouts
Curve output data can be sent directly from the 370B and 371B to a Citizen iDP-3240 thermal printer. Printing can continue while the 370B and 371B perform the next tasks.
Curve Tracers
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Curve Tracers
370B •371B
370B.
371B.
Characteristics
Step Generator
Accuracy –
Incremental: 1.5%. Absolute: Less than 1.5% of total output + 3% x STEP
AMPLITUDE setting + 1 mV or 1 nA. Offset Control Range:Variable from –10 to +10 times
STEP AMPLITUDE. Resolution: STEP AMPLITUDE setting x 1%.
Current Mode –
Amplitude Range: 50 nA to 200 mA in a 1-2-5 sequence of 21 steps.
Maximum Current: 20x STEP AMPLITUDE setting, 10x STEP AMPLITUDE setting when control is set to 200 mA.
Maximum Voltage:At least 10 V. Maximum Opposing Offset Current: 10x STEP
AMPLITUDE. Maximum Opposing Volts:Less than 15 V. Ripple Plus Noise: Less than 0.5% x STEP AMPLITUDE
+ 10 nA.
Voltage Mode –
Amplitude Switch Range: 50 mV to 2 V,in a 1-2-5 sequence of 6 steps.
Maximum Voltage:20x STEP AMPLITUDE. Maximum Current:At least 500 mA at 10 V or less, at
least 200 mA at 15 V,at least 10 mA at 40V. Short Circuit Current Limiting: 500 mA, +50%, –20%. Maximum Opposing Offset Current: 10x STEP
AMPLITUDE. Maximum Opposing Current: Less than 20 mA. Ripple Plus Noise: Less than 0.5% x STEP AMPLITUDE
+ 10 mV.
Step Rates – 2x line frequency (1 x line frequency in AC collector supply mode). Steps occur at 0 collector voltage.
Pulsed Steps – 80 µs or 300 µs wide, ±10%. Steps and Offset Polarity – Corresponds to Collector
Supply Polarity when STEP GENERATOR POLARITY INVERT is disabled.Opposite to Collector Supply Polarity when STEP GENERATOR POLARITY INVERT is selected or CONFIGURATION switch is set to BASE COMMON. BASE COMMON configuration disables STEP GENERATOR POLARITY INVERT.
Number of Steps – Ranges from 0 to 10.
AUX Supply
Range – From –40 to +40 volts,with 20 mV step resolution.
Accuracy (typical):Within 50 mV + 1.5% of total output.
Output Current: At least 100 nA at ± 20 V. At least 10 mA at ± 40 V.
Ripple Plus Noise: Less than 50 mV
p-p
.
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Curve Tracers
370B •371B
370B Curve Tracer Characteristics
Collector Supply
Polarity Modes AC, ± DC, ± Leakage, ± Rectified Sine Pulse Voltage (Range) 16 V 80 V 400 V 2,000 V Available Current
Peak Current 10 A 2 A 0.4 A 0.05 A Peak Current (PULSE mode) 20 A 4 A 0.8 A 0.1A
Available Resistance
Minimum Series Resistance 0.26 Ωs 6.4 Ωs 160 Ωs20kΩs Maximum Series Resistance 800 Ωs20kΩs 500 kΩs 12.5 MΩs
Available Peak Power
16, 80 and 400 V Range 0.08, 0.4, 2, 10, 50, 220 W 2,000 V Range 0.08, 0.4, 2, 10, 50 W Variable Collector Supply Settings As 0 to 100% in 0.1% increments
a % of Maximum Peak Voltage Looping Compensation (typical) Range at least 100 pF
Curve Tracers
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Curve Tracers
370B •371B
Non-store Vertical Deflection System
Collector/Base Current
Range 1 µA/div to 2 A/div in a 1-2-5 sequence.
X10 MAG extends maximum sensitivity to 100 nA/div (1 nA resolution)
Accuracy (typical) Within 2% of WINDOW cursor readout + 0.1 x VERT/DIV setting
Emitter Current
Range 1 nA/div to 2 mA/div in a 1-2-5 sequence X10 MAG extends maximum sensitivity to 100 pA/div Accuracy (typical) Within 2% of WINDOW cursor readout + 0.1 x VERT/DIV settings + 1 nA Maximum Displayed Noise or Ripple Depending on setting of MAX PEAK VOLTS
Max.Volts Range 16 V 80 V 400 V 2000 V Noise or Ripple 1 nA
p-p
1nA
p-p
2nA
p-p
5nA
p-p
Step Generator Display
Range 1 step/division
1 step/10 divisions with X10 MAG
10 steps/division with STEP MULTI .1x
Accuracy Within 0.3 division
Display Offset (typical)
Range ± 10 divisions with 0.1 div resolution Accuracy Within 1.5% of offset + 0.1 x VERT/DIV setting
Display X10 MAG (typical)
Accuracy Within 1.5% of window cursor readout + 0.3 x VERT/DIV setting
Display Invert (typical)
Accuracy Within 0.1 x VERT/DIV setting
Digital Storage Vertical Acquisition
A/D Converter –
Resolution: 10-Bits for 10.24 divisions, 100 counts per division.
Max. Data Points:1024. Max. Sampling Rate: Line frequency x 1024. Min. Sampling Rate: Line frequency x 2.
Collector/Base Current –
Range: 1 µA/div to 2 A/div in a 1-2-5 sequence. X10 MAG extends maximum sensitivity to 100 nA/div (1 nA resolution).
Accuracy:Within 1.5% of DOT cursor readout +0.05 x VERT/DIV setting.
Emitter Current –
Range: 1 nA/div to 2 mA/div in a 1-2-5 sequence. X10 MAG extends max sensitivity to 100 pA/div (1 pA resolution).
Accuracy:Within 1.5% of DOT cursor readout +0.05 x VERT/DIV setting + 1nA.
Step Generator Display –
Range: 1 step/division, 1 step/10 divisions with X10 MAG, 10 steps/division with STEP MULTI .1x.
Accuracy:Within 0.3 division.
Display Offset (typical) –
Range: ±10 divisions with 0.1 div resolution. Accuracy:Within 1.5% of offset + 0.06 x
VERT/DIV setting.
Display X10 MAG (typical) –
Accuracy:Within 1.5% of window cursor readout + 0.3 x VERT/DIV setting.
Display Invert (typical) –
Accuracy:Within 0.04 x VERT/DIV setting.
Non-store Horizontal Deflection System
Collector Volts –
Range: 50 nV/div to 500 V/div in a 1-2-5 sequence. X10 MAG extends maximum sensitivity to 5 mV/div (50 µV resolution).
Accuracy (typical):Within 2% of WINDOW cursor readout + 0.1 x HORIZ/DIV setting.
Base/Emitter Volts –
Range: 50 mV to 5 V/div in a 1-2-5 sequence. X10 MAG extends maximum sensitivity to 5 mV/div (50 µV resolution).
Accuracy (typical):Within 2% of WINDOW cursor readout + 0.1 x HORIZ/DIV setting.
Step Generator Display –
Range: 1 step/division, 1 step/division with X10 MAG, 10 steps/division with STEP MULTI .1x.
Accuracy:Within 0.3 division.
Display Offset –
Range: ±10 divisions in 0.1 division steps. Accuracy:Within 1.5% of offset +0.1 x HORIZ/DIV
setting.
Display X10 MAG –
Accuracy:Within 1.5% of window cursor readout + 0.3 x HORIZ/DIV setting.
Display Invert –
Accuracy:Within 0.1 x HORIZ/DIV setting.
Digital Storage Horizontal Acquisition
A/D Converter –
Resolution: 10 bits for 10.24 divisions, 100 counts per division.
Max. Data Points:1024. Max. Sampling Rate: Line frequency x 1024. Min. Sampling Rate; Line frequency x 2.
Collector Volts –
Range: 50 mV/div to 500 V/div in a 1-2-5 sequence. X10 MAG extends maximum sensitivity to 5 mV/div (50 µV resolution).
Accuracy:Within 1.5% of DOT cursor readout +
0.05 x HORZ/DIV setting.
Acquisition Modes
Normal, Envelope, and Average. Envelope is Vertical or Horizontal.Average is moving average with weight of 1/16.
Safety
Standards Met – UL3111-1, CAN/CSA C22.2 NO.
1010.1, EN 61010-1 with second amendment.
Curve Tracers
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Curve Tracers
370B •371B
Step Generator
Offset Control Range – Variable 0 to 10 times STEP/OFFSET AMPLITUDE setting.However, 0 to 5 times when STEP/OFFSET AMPLITUDE is 5V or 2A.
Number of Steps – 0 to 10. However, 0 to 5 when STEP/OFFSET.
Step Polarity – Positive, Negative. Step Rate –
Pulse:
3 kW: 1/4 (0.25x) the line frequency,300W: 1/2 (.5X) the line frequency.
Stairstep:
300 W,3 W,300 mW,30 mW: 2x the line frequency.
Current Mode
Amplitude Range –
Normal Step: 1 µA to 2 mA in 1-2-5 sequence. COLLECTOR SUPPLY HIGH VOLTAGE MODE (30 W/3 W and 300 mW/30 mW).
Pulsed Step: 1 mA to 2 A in 1-2-5 sequence. COLLECTOR SUPPLY HIGH CURRENT MODE (3 kW/300 W).
Maximum Current – 20 x step amplitude, except 10 times STEP/OFFSET AMPLITUDE when control is set to 2 A per step.
Maximum Voltage – 12 V ±30%. Accuracy:At least 5V.
Ripple Plus Noise – Within 1% of STEP AMPLITUDE + 10 nA.
Voltage Mode
Step Amplitude Range – 200 mV to 5V in 1-2-5 sequence.
Short Circuit Current Limiting – 100 mA +50%, –20%.
Maximum Voltage – 10 x STEP AMPLITUDE, with 5 V setting. 20 x STEP AMPLITUDE,except 5V setting.
Ripple Plus Noise – Within 1% of STEP AMPLITUDE + 10 mV.
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Curve Tracers
370B •371B
371B Curve Tracer Characteristics
Collector Supply
Modes (positive and negative High current: 250 µs pulses with maximum peak of 30 V polarities for both modes) High voltage:Full rectified sine wave with maximum peak of 3,000 V
Polarity Modes NPN + PNP –
High Voltage Mode High Current (pulsed) Mode
Peak Power Watts (range) 30 mW 300 mW 3 W 30 W 300 W 3 kW
Collector Peak Current 0.4 mA 4 mA 4 mA 40 mA 40 A 400 A
±20% ±20% ±20% ±20%
Maximum PeakVoltage 300 V 300 V 3 kV 3 kV 30 V 30 V
+15% +15% +10% +10% +10% +10%
–0% –0% –0% –0% –5% –5% Variable Collector Supply Range Continuously variable from 0% to 100% in 0.1% increments Looping Compensation (high Stray capacitance between collector terminal and ground is compensated for up to a maximum of 100 pF
voltage mode) Pulsed Collector Supply 3 kW: 1/4 (0.25 x) line frequency
Repetition Rate 300 W:1/2 (0.5 x) line frequency Pulse Width (half amplitude) 250 µs ±10% (More than 30% of collector supply) Circuit Breakers Both the high-voltage and the high-current supplies have breakers which operate independently.
The high-current output breaker opens automatically in an over-current condition.
Both breakers can be operated manually
Vertical Deflection System
Collector Current (lc) Range –
3 kW Peak Power: 1 A/DIV to 50 A/DIV. 300 W Peak Power: 500 mA/DIV to 5 A/DIV. 30 W Peak Power: 100 µA/DIV to 5 mA/DIV. 3 W Peak Power: 10 µA/DIV to 500 µA/DIV.
0.3 W Peak Power: 10 µA/DIV to 500 µA/DIV.
0.03 W Peak Power: 1 µA/DIV to 50 µA/DIV.
Collector Current (lc) Accuracy– Within 0.1 DIV to the Vertical graticule lines.
Collector Current (lc) Cursor Accuracy– Within
1.5% of readout +0.1 DIV of the CURRENT/DIV setting.
Horizontal Deflection System
Collector Supply Volts(Vce) Range –
3 kW,300 W Peak Power: 100 mV/DIV to 5 V/DIV in a 1-2-5 sequence.
30 W,3 W Peak Power: 50 V/DIV to 500 V/DIV in a 1-2-5 sequence.
300 mW,30 mW Peak Power: 5 V/DIV to 50 V/DIV in a 1-2-5 sequence.
Step Generator Volts(Vbe) Range – 100 mV/DIV to 5 V/DIV in a 1-2-5 sequence.
Step Generator Volts (Vbe) Accuracy – Within
0.1 DIV of Horizontal graticules.
Digital Storage Acquisition
A/D Converter –
Resolution: 10 bits for 1024 division, 100 points per one division.
Tolerance:Within ±2 counts. Max. Data Point:1024. Max. Sample Rate: 1024 x line frequency. Min. Sample Rate: 1/8 x line frequency.
Safety
Standards Met – UL3111-1, CAN/CSA C22.2 NO.
1010.1, EN 61010-1 with second amendment.
Ordering Information
370B Standard Accessories
A1001 – Blank adapter for mounting custom sockets. A1002 – In-line transistor adapter. A1005 – Axial diode lead adapter. User Manual – Order 070-A838-00 (English). Protective Cover – Order 337-3344-02. Power Cord – Order 161-0066-00. Fuses –
Order 159-0260-00 (125 V,4 A). Order 159-0259-00 ( 250 V,2 A). Utility Software – Order 063-3341-02.
370B Recommended Accessories
A1003 – TO-3/TO-66 adapter for power transistors. Service Manual – Order 071-A842-00. K4000 – Instrument cart. Rackmount Kit – Order 016-0930-00 (Opt. 1R).
371B Standard Accessories
A1002 – In-line transistor adapter. A1003 – T03/T066 adapter for power transistors. Test Fixture – Order 016-A328-00. User Manual – Order 070-A840-00 (English). Power Cord – Order 161-0066-00. Wire Set – Order 012-1371-00. Fuses –
Order 159-0291-00 (250 V,1 A). Order 159-0238-00 (250 V,4 A). Utility Software – Order 063-3341-02.
371B Recommended Accessories
A1001 – Blank adapter for mounting custom sockets. A1005 – Axial lead adapter. Service Manual – Order 070-A843-00. K4000 – Instrument cart. Rackmount Kit – Order 016-0930-00 (Opt. 1R).
Power Cord Options (370B and 371B)
Opt. A1 – Universal Euro, 220 V, 50 Hz. Opt. A2 – UK 240 V,50 Hz. Opt. A3 – Australian, 240 V,50 Hz. Opt. A5 – Switzerland, 220 V,50 Hz. Opt. AC – China, 240 V. Opt. A9 – No power cord, set to 220/240 V.
Service Options
Opt. D1 – Calibration data report. Opt. C3 – Additional two years of Calibration Service. Opt. D3 – Calibration data report for Option C3. Opt. R3 – Additional two years of repair warranty. Opt. C5 – Additional four years of Calibration Service. Opt. D5 – Calibration data report for Option C5. Opt. R5 – Additional four years of repair warranty.
Curve Tracers
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Curve Tracers
370B •371B
Curve Tracers
370B •371B
Our most up-to-date product information is available at:
www.tektronix.com
Copyright © 2002,Tektronix,Inc.All rights reserved. Tektronix products are covered by U.S. and foreign patents, issued and pending. Information in this publication supersedes that in all previously published material.Specification and price change privileges reserved. TEKTRONIX and TEK are registered trademarks of Tektronix, Inc.All other trade names referenced are the service marks, trademarks or regis­tered trademarks of their respective companies.
09/02 HB/WWW 76W-10757-1B
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Updated 17 June 2002
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