
Series PFMB
2-Colour Display Digital Flow Switch
Flow adjustment valve is integrated.
200 L type
Reduces piping installation
work and space requirements.
Special design provides
smooth adjustment to match
needle rotations.
Flow adjustment valve
200 L type
500 L/1000 L type
Response time
Can be selected from
50 msec.(0.05 sec.)/ 0.1sec./
0.5 sec./1.0 sec./2.0 sec.
Response time can be set depending on application.
Piping variations
Straight
One-touch fitting ø8
S
IN
One-touch fitting ø8
S
1
IN
Functions
Output operation
Display colour
Reference condition
Response time
Display mode
External input function
Female thread Rc, NPT, G 1/4
Bottom
Female thread Rc, NPT, G 1/4
(Refer to page 15 and 16 for details.)
Accumulated value hold
Analogue output hold
Forced output function
Analogue output free range function
Power-saving mode
Peak/Bottom value display
Grease-free
200 L type
S
IN
S
1
IN
Keylock function
Error display function
Orientation correction function
Reversed display mode
Reset to the default settings.
Setting of security code
Reversed display mode
When the switch is used upside down, the orientation of the display
can be rotated to make it easier to read.
No display rotating function Display is upside down.
OUT IN OUT IN
With display rotating function
OUT IN OUT IN
Bypass structure
Sensor unit
Bypass structure with protruding part at the main piping,
reduces the contact of moist
air with the sensor, reducing
degradation of the sensor and
maintaining accuracy.
Moist air
Protruding
part
Features 1

2-Colour Display Digital Flow Switch
Digital flow switch to save energy!Digital flow switch to save energy!
Flow control is necessary for promoting energy saving
in any application.
Saving energy starts from numerical control of the flow
consumption of equipment and lines and clarification
of the purpose and effect.
Main line flow control
M/C
M/C
M/C
Flow control for each branch line
Digital display allows visualization of flow rate.
2-Colour display Improved visibility
Control of purge air flow of ionizer
Flow control of the air for spray painting
Note) The product is not designed to be explosion proof.
Remote control is possible with accumulated pulse.
Applications
Flow control of N2 gas to prevent lead frame oxidation
N2 blow prevents distortion of camera image due to air turbulence.
Refer to the Best Pneumatics No. 3, page 1467
for details of multi-counter CEU5.
Accumulated indication shows the operating flow rate
or residual amount (of N2 etc.) in a gas cylinder.
Detection
camera
Mounting
200 L type
Through-hole
mounting
Example of Recommended
DIN rail
Compressed air line
Pneumatic Circuit
Air quality in the product specification
can be satisfied by using this pneumatic
circuit.
Dryer
IDF
IDU
Bracket
Panel mount
12
L
Air filter Regulator Micro mist separator Flow switch
AF AR
IR
AMD
AFD
500 L/1000 L type
Bracket
PFMB
Features 2

2-Colour Display Digital Flow Switch
Flow Switch Variations/Basic Performance Table
Series
Enclosure
Fluid
Setting
0 to 0.5 L/min
0 to 1 L/min
range
0 to 3 L/min
Rated flow
PFMV
IP40
Dry air, N
Digital
−0.5 to 0.5 L/min
−1 to 1 L/min
−3 to 3 L/min
PFM PF2A
IP40 IP40
2
Dry air, N2, Ar, CO2
Digital DigitalDigital
0.2 to 10 L/min
0.5 to 25 L/min
1 to 50 L/min
2 to 100 L/min
2 to 200 L/min
NewNew
PFMB
5 to 500 L/min
10 to 1000 L/min
Dry air, N2Dry air, N2
1 to 10 L/min
5 to 50 L/min
10 to 100 L/min
20 to 200 L/min
IP65
50 to 500 L/min
150 to 3000 L/min
300 to 6000 L/min
600 to 12000 L/min
voltage
Power supply
(15 to 35°C)
Temperature
(0 to 50°C)
characteristics
(25°C reference)
±1%F.S.
(Fluid: Dry air)
Analogue output:
Repeatability
Hysteresis
Output
±5%F.S.
Hysteresis mode: Variable
Window comparator mode:
Analogue voltage output
Analogue current output
24 VDC±10%
±2%F.S.
±5%F.S.
Variable
NPN/PNP
Open collector
Monitor unit
±0.5%F.S.
(0 to 50°C)
Monitor unit
±0.1%F.S.
Analogue output:
±0.5%F.S.
24 VDC±10%
±2%F.S.(15 to 35°C)
±5%F.S.(0 to 50°C)
±1%F.S.
(Fluid: Dry air)
Analogue output:
±3%F.S.
Hysteresis mode: Variable
Window comparator mode:
Variable
NPN/PNP
Open collector
Accumulated pulse output
Analogue voltage output
Analogue current output
±2%F.S.(15 to 35°C)
±5%F.S.(0 to 50°C)
±1%F.S.
(Fluid: Dry air)
Hysteresis mode: Variable
Window comparator mode:
Variable
NPN/PNP
Open collector
Accumulated pulse output
Analogue voltage output
Analogue current output
12 to 24 VDC±10%12 to 24 VDC±10%
±3%F.S.(15 to 35°C)
±5%F.S.(0 to 50°C)
±2%F.S.
(PF2A7H: 0 to 50°C)
±1%F.S.
(PF2A70,
PF2A7H)
±2%F.S.
(PF2A71)
Hysteresis mode: Variable
Window comparator mode:
Fixed (3 digits)
NPN/PNP
Open collector
Accumulated pulse output
Display
2-Colour LCD display
2-Colour LED display
2-Colour LED
display
2-Colour LCD
display
LED display
Features 4

2-Colour Display
®
(200 L type only)
Digital Flow Switch
Series PFMB7
PFMB 7 201 C8 A
Type
Integrated display
7
Rated flow range (Flow rate range)
2 to 200 L/min
201
Flow adjustment valve
None
—
S
Yes
Port size
ø8 (5/16") One-touch fitting
C8
∗
02
∗
N02
∗
F02
Note 4) ISO1179-1 compliant
∗Made to Order
—
S
Rc1/4
NPT1/4
Note 4)
G1/4
Piping entry direction
BottomStraight
∗
L
S
How to Order
M
Unit specifications
M
—
Note 2) Fixed unit: Instantaneous flow: L/min
Note 3) Since the unit for Japan is fixed to SI due to new measurement
—
No
bracket
Note 1)
Calibration certificate
ibration certificat
—
∗
With calibration certificate
A
Note 1) Certificate in both English and Japanese
∗Made to Order
SI unit only
Unit selection function
Accumulated flow: L
law, this option is for overseas.
Unit can be changed. Instantaneous flow: L/min⇔cfm
Accumulated flow: L⇔ft
None
Note 2)
Note 3)
R
With bracket (For without flow adjustment valve)
With bracket (For with straight type flow adjustment valve)
ote
e
3
S
ZS-33-M ZS-33-MS
With 2 selftapping
screws
RoHS
Option 2
With 3 selftapping
screws
IN
∗Made to Order
A
B
C
D
∗
E
∗
F
∗
G
∗
H
Note) Accumulated flow, peak flow and
minimum flow can be reset by
external signal input.
∗Made to Order
—
With lead wire with connector (2 m)
S
ZS-33-D
IN
N
No lead wire
Note) If an accessory is required, order
1
IN
Output specifications
OUT1 OUT2
NPN
PNP
NPN
NPN
PNP
PNP
NPN
PNP
NPN
PNP
Analogue 1 to 5 V
Analogue 4 to 20 mA
Analogue 1 to 5 V
Analogue 4 to 20 mA
External input
External input
Note)
Note)
Option 1
W
With lead wire with connector (2 m)
Connector cover (Silicone rubber)
+
ZS-33-F
ZS-33-D
S
IN
separately using “ZS” part numbers.
T
With panel mount adapter (For without flow adjustment valve)
ZS-33-J
Panel mount
adapter B
Mounting bracket
Note) Each option is not assembled with the product, but shipped together.
If an accessory is required, order separately using “ZS” part numbers.
Panel mount
adapter A
Panel
With panel mount adapter (For with flow adjustment valve)
ZS-33-JS
Panel mount
adapter B
Mounting bracket
V
Panel mount
adapter A
Panel
DIN Rail Mounting Bracket (Order Separately)
ZS 33 R
Stations
1 station
1
2 stations
2
3 stations
3
4 stations
4
5 stations
5
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1

2-Colour Display Digital Flow Switch
How to Order
Series PFMB7
PFMB 7
501 04 A M
Type
Integrated display
7
Rated flow range (Flow rate range)
5 to 500 L/min
501
10 to 1000 L/min
102
Note) ISO228
04
A
B
C
D
∗
E
∗
F
∗
G
∗
H
Note 4) Accumulated flow, peak flow
∗Made to Order
—
With lead wire with connector (2 m)
Thread type
—
Rc
N
NPT
Note)
F
G
compliant
Port size
Rated flow range
Port size
1/2
501
앬
102
앬
Output specifications
OUT1 OUT2
NPN
PNP
NPN
NPN
PNP
PNP
NPN
PNP
and minimum flow can be reset
by external signal input.
NPN
PNP
Analogue 1 to 5 V
Analogue 4 to 20 mA
Analogue 1 to 5 V
Analogue 4 to 20 mA
External input
External input
Note 4)
Note 4)
W
With lead wire with connector (2 m)
Connector cover (Silicone rubber)
+
Option 1
Calibration certificate
—
∗
A
Note 1) Certificate in both English and Japanese
∗Made to Order
None
With calibration certificate
Note 1)
Option 2
—
With bracket
No
bracket
Note) Each option is not assembled with
the product, but shipped together.
If an accessory is required, order
separately using “ZS” part numbers.
R
With 4 selftapping
screws
Unit specifications
M
—
Note 2) Fixed unit: Instantaneous flow: L/min
Note 3) Since the unit for Japan is fixed to SI due to new
measurement law, this option is for overseas.
Unit can be changed. Instantaneous flow: L/min⇔cfm
Accumulated flow: L⇔ft
SI unit only
Unit selection function
Accumulated flow: L
Note 2)
Note 3)
3
ZS-33-D
Option 2/Part No.
Option
Bracket
Part no.
ZS-42-C
N
No lead wire
Qty.
1
PFMB 7501/7102 with self-tapping screw (3 x 6), 4 pcs.
ZS-33-F
ZS-33-D
Note) If an accessory is required, order
separately using “ZS” part
numbers.
Note
2

Series PFMB7
Specifications
Refer to “Handling Precautions for SMC Products” for Flow Switch Precautions
and the Operation Manual in our website for Specific Product Precautions.
Fluid
Model
Applicable fluid
Note 1)
Fluid temperature range
PFMB7201 PFMB7501 PFMB7102
Air, N
2 (Air quality grade is JIS B 8392-1 1.1.2 to 1.6.2, ISO8573-1 1.1.2 to 1.6.2.)
Detection method
Flow
Pressure
Electrical
Rated flow range
Set flow rate
range
Minimum setting unit
Accumulated volume per pulse (Pulse width = 50 msec.)
Accumulated value hold function
Instantaneous flow
Accumulated flow
Instantaneous flow
Accumulated flow
Note 2)
Rated pressure range
Proof pressure
Pressure loss
Pressure characteristics
Power supply voltage
Note 3)
±5%F.S. (0 to 0.75 MPa, 0.35 MPa reference)
Current consumption
2 to 200 L/min
2 to 210 L/min
0
to
999,999,999 L
1 L
0 to 0.75 MPa
1.0 MPa
Protection
Display accuracy
Note 11)
Accuracy
Analogue output accuracy
Repeatability
Temperature characteristics
±1%F.S. (±2%F.S. when response time is set to 0.05 seconds.)
Output type
Switch
output
Output mode
Switch operation
Maximum load current
Maximum applied voltage (NPN only)
Internal voltage drop (Residual voltage)
Response time
Hysteresis
Note 4)
Note 5)
Select from Hysteresis, Window comparator, Accumulated output or Accumulated pulse output modes.
NPN output type: 1 V or less (at load current 80 mA) PNP output type: 2 V or less (at load current 80 mA)
Select from 0.05 sec., 0.1 sec., 0.5 sec., 1 sec., or 2 sec.
Protection
Output type
Analogue
Note 6)
output
External
Note 8)
input
Impedance
Response time
External input
Input mode
Reference condition
Voltage output
Current output
Note 7)
Note 9)
Max. load impedance at power supply voltage 24 V: 600 Ω, at power supply voltage 12 V: 300 Ω
Input voltage: 0.4 V or less (reed or solid state) for 30 msec. or longer
Select from Accumulated flow external reset or Peak/Bottom reset.
Display mode
Note 10)
Unit
Display
Displayable
range
Minimum display
unit
Display
Indicator LED
Enclosure
Withstand voltage
Environmental
Insulation resistance
Operating temperature range
Operating humidity range
Standard
Piping
Main materials of parts in contact
with fluid
Piping specifications
Piping entry direction
Note 12)
Body
Weight
Flow adjustment valve
Lead wire
Bracket
Panel mount adapter
DIN rail mounting bracket
Instantaneous flow
Accumulated flow
Instantaneous flow
(Displays [0] when the value is within the −1 to 1 L/min range.)
Accumulated flow
Instantaneous flow
Accumulated flow
Display method: LED Display colour: Red/Green Display: 3 digit 7 segment
LED ON when switch output is ON. (OUT1: Green, OUT2: Red)
Rc1/4, NPT1/4, G1/4, ø8 One-touch fitting
FKM, Stainless steel 304, PPS, PBT,
Brass (Electroless nickel plating), HNBR, Si, Au, GE4F
Rc1/4, NPT1/4/Straight: 70 g Bottom: 85 g
G1/4
/Straight: 115 g Bottom: 130 g
ø8 One-touch fitting/Straight: 50 g Bottom: 65 g
L or ft3 can be selected.
−10 to 210 L/min
1 L
1000 VAC for 1 minute between terminals and housing
50 MΩ or more (500 VDC measured via megohmmeter) between terminals and housing
Operation: 0 to 50°C, Storage: −10 to 60°C (No condensation or freezing)
Operation, Storage: 35 to 85%RH (No condensation or freezing)
CE, UL (CSA), RoHS
Straight, Bottom
+45 g
+20 g
+15 g
+65 g
Note 1) Refer to “Example of Recommended Pneumatic Circuit” on Features 2.
Note 2) When using the accumulated value hold function, use the operating
conditions to calculate the product life, and do not exceed it. The
maximum access limit of the memory device is 1 million cycles. If the
product is operated 24 hours per day, the product life will be as follows:
s
5 min interval: life is calculated as 5 min x 1 million = 5 million min = 9.5 years
s
2 min interval: life is calculated as 2 min x 1 million = 2 million min = 3.8 years
If the accumulated flow external reset is repeatedly used, the product
life will be shorter than calculated life.
Note 3) Do not release the OUT side piping port of the product directly to the
atmosphere without connecting piping. If the product is used with the
piping port released to atmosphere, accuracy may vary.
Note 4) The time from when the flow is changed by a step input (when the flow
rate changes from 0 to the maximum flow instantaneously) until the
switch output turns ON (or OFF) when set at 90% of the rated flow rate.
0 to 50°C
Thermal type
5 to 500 L/min
5 to 525 L/min
0
to
999,999,990 L
10 to 1000 L/min
10 to 1050 L/min
1 L/min
10 L
1 L/pulse
10 L/pulse
Interval of 2 or 5 minutes can be selected.
0 to 0.8 MPa
1.2 MPa
Refer to “Pressure Loss” graph.
±5%
F.S.
(0 to 0.8 MPa, 0.6 MPa reference)
12 to 24 VDC ±10%
55 mA or less
Polarity protection
±3%F.S.
±3%F.S.
±5%F.S. (0 to 50°C, 25°C
reference)
NPN open collector PNP open collector
Select from Normal or Reversed output.
80 mA
28 VDC
Variable from 0
Short circuit protection
Voltage output: 1 to 5 V, Current output: 4 to 20 mA
Output impedance: Approx. 1 kΩ
Linked with the response time of the switch output.
Select from Standard condition or Normal condition.
Select from Instantaneous flow or Accumulated flow.
L/min or cfm can be selected.
L or ft3 can be selected.
(Displays [0] when the value is within the −4 to 4 L/min range.)
(Displays [0] when the value is within the −9 to 9 L/min range.)
−25 to 525 L/min
−50 to 1050 L/min
0 to 999,999,999 L
1 L/min
10 L
Display method: LCD Display colour: Red/Green Display: 4 digit 7 segment
LED ON when switch output is ON. (OUT1/OUT2: Orange)
IP40
CE, RoHS
Rc1/2, NPT1/2, G1/2
ADC, PPS, Stainless steel 304, Au
HNBR, Si, GE4F
100 g
—
+35 g
+25 g
—
—
Note 5) If the flow fluctuates around the set value, the width for setting more
than the fluctuating width needs to be set. Otherwise, chattering will
occur.
Note 6) When using a product with an analogue output
Note 7) The time from when the flow is changed as a step input (when the flow
rate changes from 0 to the maximum flow instantaneously) until the
analogue output reaches 90% of the rated flow rate.
Note 8) When using a product with an external input
Note 9) The flow rate given in the specification is the value at standard condition.
To convert the units from standard condition to normal condition, use
the following conversion calculation:
Flow rate at standard condition x 0.927 = Flow rate at normal condition
Note 10) Setting is only possible for models with the unit selection function.
Note 11) Refer to “Straight Piping Length and Accuracy” on page 4 for details.
Note 12) Refer to “Construction/Fluid Contact Parts” on page 5 for details.
3