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Doc. no.XL*****-OMI0010-E
High Vacuum L Type Valve
PRODUCT NAME
XLG Series
MODEL/ Series
Thank you for purchasing this SMC product.
Be sure to read this Operation Manual carefully and understand its contents before
operating this product to ensure the safety of the operator and this product.
Please refer to the drawing and other informative documents for the construction and
specifications of this product.
Further, ensure your operating environment satisfies the requirements specified for the
product.
Keep this Operation Manual available whenever necessary.
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XL*****-OMI0010-E
Contents
Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 2
1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4
(Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance)
2. Product Specific Precautions 2 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6
(Maintenance parts)
3. Specifications - - - - - - - - - - - - - - - - - - - - - - - - - - - - 8
4. Construction and Outer dimensions - - - - - - - - - - - - -- - - -- - - - - - - - - - - - 10
5. Period and scope of warranty - - - - - - - - - - - - - - - - - - - - - - - - - - - - 12
6. Parts replacement procedure - - - - - - - - - - - - - - - - - - - - - - - - - - - - 13
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XL*****-OMI0010-E
Safety Instructions
These safety instructions are intended to prevent hazardous situations and/or equipment damage.
These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or
“Danger.”
They are all important notes for safety and must be followed in addition to International Standards
(ISO/IEC)*1), and other safety regulations.
*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems
ISO 4413: Hydraulic fluid power -- General rules relating to systems
IEC 60204-1: Safety of machinery -- Electrical equipment of machines (Part 1: General requirements)
ISO 10218-1992: Manipulating industrial robots -- Safety
Caution
Caution indicates a hazard with a low level of risk which, if not avoided, could result
in minor or moderate injury.
Warning
Warning indicates a hazard with a medium level of risk which, if not avoided, could
result in death or serious injury.
Danger
Danger indicates a hazard with a high level of risk which, if not avoided, will result
in death or serious injury
.
Warning
1. The compatibility of the product is the responsibility of the person who designs the
equipment or decides its specifications.
Since the product specified here is used under various operating conditions, its compatibility with specific
equipment must be decided by the person who designs the equipment or decides its specifications based on
necessary analysis and test results.
The expected performance and safety assurance of the equipment will be the responsibility of the person who
has determined its compatibility with the product.
This person should also continuously review all specifications of the product referring to its latest catalog
information, with a view to giving due consideration to any possibility of equipment failure when configuring the
equipment.
2. Only personnel with appropriate training should operate machinery and equipment.
The product specified here may become unsafe if handled incorrectly.
The assembly, operation and maintenance of machines or equipment including our products must be
performed by an operator who is appropriately trained and experienced.
3. Do not service or attempt to remove product and machinery/equipment until safety is
confirmed.
1.The inspection and maintenance of machinery/equipment should only be performed after measures to
prevent falling or runaway of the driven objects have been confirmed.
2.When the product is to be removed, confirm that the safety measures as mentioned above are implemented
and the power from any appropriate source is cut, and read and understand the specific product precautions
of all relevant products carefully.
3.Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.
4. Contact SMC beforehand and take special consideration of safety measures if the product is
to be used in any of the following conditions.
1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to
direct sunlight.
2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,
vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and
beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or
other applications unsuitable for the standard specifications described in the product catalog.
3. An application which could have negative effects on people, property, or animals requiring special safety
analysis.
4. Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a
mechanical protective function, and periodical checks to confirm proper operation.
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XL*****-OMI0010-E
Safety Instructions
Caution
1.The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange
specifications or a contract if necessary.
If anything is unclear, contact your nearest sales branch.
Limited warranty and Disclaimer/Compliance Requirements
The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance
Requirements”.
Read and accept them before using the product.
Limited warranty and Disclaimer
1.
The warranty period of the product is 1 year in service or 1.5 years after the product is
delivered,whichever is first.*2)
Also, the product may have specified durability, running distance or replacement parts. Please consult
your nearest sales branch.
2.For any failure or damage reported within the warranty period which is clearly our responsibility, a
replacement product or necessary parts will be provided.
This limited warranty applies only to our product independently, and not to any other damage incurred
due to the failure of the product.
3.Prior to using SMC products, please read and understand the warranty terms and disclaimers noted in
the specified catalog for the particular products.
*2)
Vacuum pads are excluded from this 1 year warranty.
A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
Also, even within the warranty period, the wear of a product due to the use of the vacuum pad or
failure due to the deterioration of rubber material are not covered by the limited warranty.
Compliance Requirements
1.The use of SMC products with production equipment for the manufacture of weapons of mass
destruction(WMD) or any other weapon is strictly prohibited.
2.The exports of SMC products or technology from one country to another are govemed by the relevant
security laws and regulation of the countries involved in the transaction. Prior to the shipment of a
SMC product to another country, assure that all local rules goveming that export are known and
followed.
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XL*****-OMI0010-E
1. Product Specific Precautions 1
Common Precautions 1
Be sure to read before handling.
Design
Warning
●All models
1.
The material of the body and bonnet is A6063, and other metal components of the vacuum
part are made of SUS304. The sealing material of the vacuum part is FKM as standard, but
this can be changed to other materials (refer to “How to Order”). Confirm whether the fluid to
be used is compatible with the materials before use.
Grease for vacuum is applied to the sliding part of the vacuum (Fluorine grease: Y-VAC2).
2.
Select materials for the pilot pressure piping and fittings whose heat resistance is suitable for
the applicable operating temperature.
●Models with auto switch
1.
Keep the temperature of the switch below 60
o
C
●With heater (thermistor)
1.
When using a model with a heater, a mechanism to prevent overheating should be
installed.
Selection
●All models
1. When controlling valve responsiveness, take note of the size and length of piping, as well
as the flow rate characteristics of the actuating solenoid valve.
2. Keep the pilot pressure within the specified range.
The specified range of XLG-16, XLG-25 and XLG-40 is from 0.3MPa to 0.5MPa, and that
is for XLG-50, XLG-63, XLG-80, XLG-100 and XLG-160 is from 0.4MPa to 0.5MPa.
3. Keep within the specified range of the pilot pressure.
●High temperature type
1.
If using gases that cause a large amount of deposits, heat the valve body to prevent deposits
in the valve.
Mounting
● All models
1.
In high humidity environments, keep the valve packed until the time of installation.
2.
For models with switches, secure the lead wires so that they have sufficient slack, without
any unreasonable force applied to them.
3.
Perform piping so that excessive force is not applied to the flange sections. When there is
vibration from heavy objects or attachments, etc., fix piping so that vibration will not apply
torque directly to the flange section.
4.
Vibration resistance allows for normal operation of up to 30 m/s2 (45 to 250Hz), but
continuous vibration may cause a decline in durability.
Arrange piping to avoid excessive vibration or impacts.
●High temperature type (temperature specification / H0 H4 H5)
1.
In models with a heater (thermistor), take care not to damage the insulation components of the
lead wires and connector section.
2.
The set temperature for models with a heater should be established without any drafts or heat
insulation. It will change depending on conditions such as heat insulation measures and the
heating of other piping. Fine adjustment is not possible.
Caution
Caution
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XL*****-OMI0010-E
3.
When installing heater accessories or mounting a heater, check insulation resistance at the
actual operating temperature. A current leakage breaker or fuse should be installed.
4.
If the valve is to be insulated, only the body should be insulated, excluding the bonnet part.
5.
In models with a heater, when the heater is in operation, the entire valve becomes hot. Be
careful not to touch it with bare hands, as burns will result.
1.
Before mounting, clean the surface of the flange seal and the O-ring with ethanol, etc.
2.
There is an indentation of 0.1 to 0.2mm in order to protect the flange seal surface, and it
should be handled so that the seal surface is not damaged in any way.
If the fluid or reaction product (deposit) may cause the valve to become unsafe, the valve should
be disassembled, cleaned and re-assembled by an operator who has sufficient knowledge and
experience (e.g. a specialist).
1.
When removing deposits from the valve, take care not to damage any part of it.
2.
Replace the bonnet assembly when the valve is approaching the end of its service life.
* For details regarding endurance cycles, please reference Section 5 of this Operation
manual titled Period and scope of warranty . (pages 12)
3.
If damage is suspected prior to the end of the service life, perform early maintenance.
4.
SMC specified parts should be used for service. Refer to the Construction / Maintenance
parts table.
5.
When removing the valve seal and external seal, take care not to damage the sealing
surfaces. When installing the valve seal and external seal, be sure that the O-ring is not
twisted. (Refer to Section 6 Parts Replacement Procedure (pages 13 to 15) for details.)
Piping
Caution
Maintenance
Warning
Caution