SMC XMD, XYD User Manual

Doc. no.XL-OMP0003-A

High Vacuum Angle Valve / Straight Valve

PRODUCT NAME

XMD/XYD Series

MODEL/ Series

Thank you for purchasing SMC product. For appropriate operation of this product, please read this operation manual thoroughly to understand. Also, refer to the drawing, product information for structure and specification of this product, Confirm operating environment is within specifications. Keep this operation manual with care so that it can be used at any time.

Contents of this operation manual is subject to change without notice.

Contents

Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 2

1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4 (Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance)

2. Product Specific Precautions 2 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6 (Maintenance parts)

3. Specifications - - - - - - - - - - - - - - - - - - - - - - - - - - - - 7

4. Construction - - - - - - - - - - - - -- - - -- - - - - - - - - - - - 8

5. Operation - - - - - - - - - - - - - - - - - - - - - - - - - - - - 9

6. Dimensions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 10

7. Guaranteed term and guaranteed range - - - - - - - - - - - - - - - - - - - - - - - - - - - - 11

8. Parts replacement procedure - - - - - - - - - - - - - - - - - - - - - - - - - - - - 12

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XL-OMP0003-A

Safety Instructions

These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1), and other safety regulations.

*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems

ISO 4413: Hydraulic fluid power -- General rules relating to systems IEC 60204-1: Safety of machinery -- Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -- Safety

Caution

Warning

Danger

Caution indicates a hazard with a low level of risk which, if not avoided, could result

in minor or moderate injury.

Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.

Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury

Warning

1. The compatibility of the product is the responsibility of the person who designs the

equipment or decides its specifications.

Since the product specified here is used under various operating conditions, its compatibility with specific equipment must be decided by the person who designs the equipment or decides its specifications based on necessary analysis and test results. The expected performance and safety assurance of the equipment will be the responsibility of the person who has determined its compatibility with the product. This person should also continuously review all specifications of the product referring to its latest catalog information, with a view to giving due consideration to any possibility of equipment failure when configuring the equipment.

2. Only personnel with appropriate training should operate machinery and equipment.

The product specified here may become unsafe if handled incorrectly. The assembly, operation and maintenance of machines or equipment including our products must be performed by an operator who is appropriately trained and experienced.

3. Do not service or attempt to remove product and machinery/equipment until safety is

confirmed.

1.The inspection and maintenance of machinery/equipment should only be performed after measures to

prevent falling or runaway of the driven objects have been confirmed.

2.When the product is to be removed, confirm that the safety measures as mentioned above are implemented and the power from any appropriate source is cut, and read and understand the specific product precautions of all relevant products carefully.

3.Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.

4. Contact SMC beforehand and take special consideration of safety measures if the product is

to be used in any of the following conditions.

1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight.

2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,

vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or other applications unsuitable for the standard specifications described in the product catalog.

3. An application which could have negative effects on people, property, or animals requiring special safety analysis.

4. Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a

mechanical protective function, and periodical checks to confirm proper operation.

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XL-OMP0003-A

Safety Instructions

Caution

1.The product is provided for use in manufacturing industries.

The product herein described is basically provided for peaceful use in manufacturing industries. If considering using the product in other industries, consult SMC beforehand and exchange specifications or a contract if necessary. If anything is unclear, contact your nearest sales branch.

Limited warranty and Disclaimer/Compliance Requirements

The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance Requirements”. Read and accept them before using the product.

Limited warranty and Disclaimer

The warranty period of the product is 1 year in service or 1.5 years after the product is delivered,

whichever is first.*2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch.

2.For any failure or damage reported within the warranty period which is clearly our responsibility, a

replacement product or necessary parts will be provided. This limited warranty applies only to our product independently, and not to any other damage incurred due to the failure of the product.

3.Prior to using SMC products, please read and understand the warranty terms and disclaimers noted in

the specified catalog for the particular products.

*2)

A vacuum pad is a consumable part, so it is warranted for a year after it is delivered. Also, even within the warranty period, the wear of a product due to the use of the vacuum pad or

Vacuum pads are excluded from this 1 year warranty.

failure due to the deterioration of rubber material are not covered by the limited warranty.

Compliance Requirements

1.The use of SMC products with production equipment for the manufacture of weapons of mass destruction(WMD) or any other weapon is strictly prohibited.

2.The exports of SMC products or technology from one country to another are govemed by the relevant security laws and regulation of the countries involved in the transaction. Prior to the shipment of a SMC product to another country, assure that all local rules goveming that export are known and followed.

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1. Product Specific Precautions 1

Common Specific Precautions 1

Precautions on Design

Warning

●All models

1. The body material is SCS13, the bellows is SUS316L, and other metal seal material is SUS304. Standard seal material in the vacuum section is FKM that can be changed to the other materials (please refer “How to Order”). Use fluids those are compatible with using materials after confirming. Grease for vacuum is applied to the sliding part of the vacuum (Fluorine grease: Y-VAC2).

2. Select materials for the actuation pressure piping, and heat resistance for fittings that are suitable for the applicable operating temperatures.

●Models with auto switch

1. The switch section should be kept at the temperature no greater than 60 oC

Selection

Caution

●All models

When controlling valve responsiveness, take note of the size and length of piping, as well as the flow rate characteristics of the actuating solenoid valve.

Actuating pressure should be kept within the specified range.

0.4 MPa to 0.5 MPa is recommended.

Use within the limits of the operating pressure range.

●High temperature type

In the case of gases which cause a large amount of deposits, heat the valve body to prevent deposits in the valve.

Be sure to read before handling.

Mounting

Caution

● All models

In high humidity environments, keep the valve packed until the time of installation.

In case with switches, secure the lead wires so that they have sufficient slack, without any unreasonable force applied to them.

Perform piping so that excessive force is not applied to the flange sections. In case there is vibration of heavy objects or attachments, secure them so that torque is not applied directly to the flanges.

Vibration resistance allows for normal operation of up to 30 m/s2 (45 to 250Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibration or impacts.

●High temperature type (temperature specification / H0)

When a valve is to be heated, only the body section should be heated, excluding the bonnet section.

Piping

Caution

Before mounting, clean the surface of the flange seal and the O-ring with ethanol, etc.

There is an indentation of 0.1 to 0.2mm in order to protect the flange seal surface, and it should be handled so that the seal surface is not damaged in any way.

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XL-OMP0003-A

Maintenance

Warning

If the fluid or reaction product (deposit) may cause the valve to become unsafe, the valve should be disassembled, cleaned and re-assembled by an operator who has sufficient knowledge and experience (e.g. a specialist).

Caution

1. When removing deposits from the a valve, take care not to damage any part of its parts.

2. Replace the bonnet assembly and the O-ring when the end of its service life is approached. *For details regarding endurance cycles, please reference Section 7 of this Operation manual titled Period and scope of warranty . (pages 11)

3. If damage is suspected prior to the end of the service life, perform early maintenance.

4. SMC specified parts should be used for service. Refer to the Construction / Maintenance parts table.

5. When removing the valve seal and external seal, take care not to damage the sealing surfaces. When installing the valve seal and external seal, be sure that the O-ring is not twisted. (Refer to Section 8 Parts Replacement Procedure (pages 12 to 15) for details.)

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2. Product Specific Precautions 2

Common Specific Precautions 2

Maintenance Parts

Be sure to read before handling

Caution

Only SMC specified parts should be used. Please refer to operation manual. The handle assembly should also be replaced when changing the seal material. Due to the

different materials used, changing only the seal may prove inadequate.

Bonnet assembly/construction part number:1

Temperature

specifications

General use

High

temperature

25 40 50 63 80

XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD63-30-1 XLD80-30-1

XLD25-30-1H XLD40-30-1H XLD50-30-1H XLD63-30-1H XLD80-30-1H

Valve size

Note1) The magnet for auto switch is not provided. When the magnet for auto switch is

necessary, add “-M9//” at the suffix of the part number. (Not available for high

temperature models) Note2) An auto switch for high temperature is available with a different part number. Note3) List the optional sealant material symbol after the model number, except for the

standard sealant material (FKM: compound No. 1349-80). Note4)

The bonnet assembly includes the valve seal, S valve seal assembly and the initial

pumping valve seal.

External seal, valve seal

Description

Constructions No.

External seal (3)

Valve seal (2)

Ass’y (4)

valve seal (5).

Material

Standard AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V

Specific AS568-030 ** AS568-035 ** AS568-039 ** AS568-043 ** AS568-045 **

Standard B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V

Specific B2401-V24 ** B2401-P42 ** AS568-227 ** AS568-233 ** B2401-V85 **

Standard

Specific - XLD40-2-9-1A ** XLD50-2-9-1A ** XLD63-2-9-1A ** XLD80-2-9-1A **

Standard AS568-009V AS568-016V AS568-016V - - Initial pumping

Specific AS468-009 ** AS568-016 ** AS568-016 ** - -

25 40 50 63 80

- XLD40-2-9-1A XLD50-2-9-1A XLD63-2-9-1A XLD80-2-9-1A S Valve seal

Valve size

Note1) List the optional seal material symbol after the model number, except for the

standard seal material (FKM: compound no. 1349-80). Note2) Refer to the Construction on the page 8 for the construction numbers. Note3) Please contact SMC if you would to change the material of the valve seal from

ULTIC ARMOR to another material, or from another material to ULTIC ARMOR.

Additional symbols of the seal materials

Seal material

Combination No.

Symbol

EPDM

(Note 3)

2101-80

-XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1

Barrel

Perfluoro

70W 4079 SS592 SS630 SSE38 1232-70

KalrezR ChemrazR

VMQ

(Note 3)

Note1) Due to the different materials used, changing only the seal may prove inadequate. Note2) Barrel PerfluoroR is a registered trademark of MATSUMURA OIL Co.,Ltd.

KalrezR is a registered trademark of Dupont Co.,Ltd. ChemrazR is a registered trademark of Greene, Tweed & Co., ULTIC ARMORR is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD

Note3) MITSUBISHI CABLE INDUSTRIES, LTD.

FKM for

PLASMA

(Note 3)

3310-75 UA4640

ULTIC

ARMOR

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XMD-63

(Standard value)

when 1

△

P=0.1MPa

Adjustment nut rotations n

3. Specifications

Model XMD-25

Flange (valve) size 25 40,CF070 50 63,CF114 80 Actuating type Normally closed( Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type: 5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6

Note 1)

Leakage

Pa･m3/s

Flange type

Main pumping 14 45 80 160 200 Conductance l/s Initial pumping

Internal

External

XMD

XYD

XYD-25

0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18

at ambient temperatures , excluding gas permeation

KF(NW) KF (NW),CF

KF(NW) KF(NW) KF(NW)

Main material

Actuation pressure MPa (G) 0.4 to 0.7 Air consumption cm3 for 0.5MPa Note 3) Port size M5 Rc 1/8

Note1) Main exhaust valve conductance is the valve for the molecular flow of an elbow having the

Note2) A coating of vacuum grease (Y-VAC2) is applied to the seal-material sliding portion (initial

Note3) For one cycle of cylinder. Note4) Figures in ( ) indicates the mass of CF (conflate) fittings.

same dimensions. The initial exhaust valve is the value for the viscous flow.

exhaust valves sliding parts) of the vacuum part.

Main pumping

Initial pumping

XMD 0.65 1.5(1.86) 2.2 4.10(5.46) 6.80 Weight kg XYD 0.71 1.52 2.60 4.80 8.30

Main part: SUS304 and FKM (standard sealing material) Note 2)

46 200 360 660 1350

2.5 12 15.5 30 42

See the figure on the right for the relation between the numbers of revolution of adjustment nut (pitch 1mm) and conductance of the initial

exhausting valve.

(The conductance is just a reference.)

XMD-40

XYD-40

Pressurize to open, spring seal)[both main & initial exhaust valves]

1.3 x 10

Body: SCS13(Stainless) Bellows: SUS316L,

-10

for the standard material (FKM)

-11

XMD-50

XYD-50

for the standard material (FKM)

KF(NW)

流量を示す

Initial pumping conductance

XMD-63

XYD-63

KF (NW),

K(DN),CF

KF(NW),

K(DN)

目安

目安目安

初期排気弁ｺﾝﾀﾞｸﾀﾝｽ

XMD-80

XYD-80

KF(NW),

K (DN)

KF(NW),

K(DN)

XMD-40

XMD-80

XMD-50

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初期排気弁ｺﾝﾀﾞｸﾀﾝｽ L/s (粘性流) ΔP=0.1MPa 時

0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0

Initial exhaust valve condunctance l/s(Viscous flow) Shows flow rate

XMD-25

ｱｼﾞｬｽﾄﾅｯﾄ回転数 n

XL-OMP0003-A

The O ring of the S valve seal assembly

cannot be replaced.It is necessary to replace

valve

Construction of XMC series and XYC series

Adjusting the opening of the valve

4. Construction

Adjustment nut (knurled outside)

for initial exhausting

Auto switch (option)

Adjustment nut holding screw

Magnet (option)

Bellows holder

(material: SUS304)

Valve M

Body

(material: A6063)

Initial pumping valve (Enlarged view)

Bonnet assembly

(maintenance part)

Pilot port S

(For initial pumping valve)

Pilot port M

(For main pumping valve)

External seal

(maintenance part)

Bellows

(material: SUS316L)

Valve seal

(maintenance part)

Initial pumping valve (Refer to enlarged view)

XMD/XYD-25

Needle seat (Material SUS304)

S valve assembly (Maintenance part)

(Material SUS304 + Seal material)

Initial pumping valve seal (Maintenance part)

Fixing ring

O-ring for sliding of S valve

(material:

SUS304)

S valve

(material:

FKM)

Note 2

Note 1

S valve seal O ring

XMD/XYD-40，XMD/XYD-50

Note1)

the whole assembly.

Note2)

The material of the O ring for sliding of S is FKM. This cannot be changed.

Note3)

are the same except the Body shape.

S valve seal O ring

XMD/XYD-63，XMD/XYD-80

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XYC series / Straight Valve

XL-OMP0003-A

5. Operation

5-1. Adjusting the opening of the valve for initial pumping

Adjust the initial pumping amount with no air pressure to the pilot port S before using. Initial flow

is reduced by turning the adjustment nut clockwise. It is increased by turning it counterclockwise.

The location where the nut gently stops during rotation clockwise and counterclockwise indicates

the initial flow zero and the maximum flow. If the nut is rotated too much, it may damage the nut.

The adjustment nut shall be operated by hand. Do not use any tool. If the rotation of the

adjustment nut feels heavy, please refer to the following items.

The adjustment nut is fully closed when the completed product is shipped. The nut is fully open

when the bonnet assembly (maintenance part) is shipped. Use caution.

5-2. Fixing adjustment nuts

The adjustment nut does not rotate during the operation of the valve. It can be fixed to prevent

incorrect operation, if required. If the adjustment nut is fixed after adjusting the initial flow, tighten

the adjustment nut set screw to the tightening torque shown in the table below. When loosening

the set screw, loosen until it stops gently. Do not remove the adjustment nut set screw.

The adjustment nut is not fixed when the product is shipped. If the rotation of the adjustment nut

feels heavy, loosen the adjustment nut set screw.

Adjustment nut tightening torque

XMD/XYD-25

Model

Tightening torque 0.08 N・m or less 0.3 N・m or less

XMD/XYD-40 XMD/XYD-50

XMD/XYD-63 XMD/XYD-80

5-3. Opening the valve (s valve) for initial pumping

When the air pressure is applied to the pilot port S, the S valve will release from the S valve seal

assembly and open to the adjusted opening.

5-4. Opening the valve (valve M) for main pumping

When the air pressure is applied to the pilot port M, the valve will release from the body seat

and fully open. It operates even when air pressure is not applied to the pilot port S.

5-5. Closing the valve for initial pumping and main pumping

When the air pressure is released from the pilot port S and M, S and M valve will return and

start sealing.

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Flange

)

(KF

Flange

)

6. Dimensions

Model A B C D Fn Fd Fc G H J KK P.C.D. L1

XMD-25 50 123 48 1 40 - - 26 41 16 7.5 - -

XMD-40

XMD-50

XMD-63

XMD-80

65 170 66 2 55 - 70 41 63 20 15 P.C.D 58.7

70 183 79 2 75 - - 52 68 20 17.5

88 217 100

90 256 117

Model A B C D E Fn Fd G H J K

XYD-25 100.2 86.7 48 1 23.5

XYD-40 130 114 66 2 38 55 - 41 84 20 15

XYD-50 178 128 79 2 53 75 - 52 95 20 17.5

XYD-63 209 163 100 3 61 87 95 70 121 20 19.5

XYD-80 268 193 117 3 80 114 110 83 144 20 26.5

(KF

Flange

)

3 87 95 114 70 72 20 19.5 P.C.D 92.1

3 114 110

45°

Flange

)

- 83 98 20 26.5

40 - 26 66 16 7.5

(CF

Flange

)

φFd

(φFc)

φFn

- -

Unit: mm

6xφ6.6

8xφ 8.4

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7. Guaranteed term and guaranteed range

The guaranteed period covers the period which finishes the earliest among 2 million operating cycles [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customer’s place.

If the specification is not kept, or any non-conformance derived from mounting or replace of a device, an assembly, or an O-ring at your place occurs, the guarantee cannot be applied.

Note: The product durability is varied depending on the operating conditions (such as a use with

large flow rate).

If any failure occurs due to our fault during the guaranteed period, we will guarantee the non-conformance by delivering a substitute in the worst case. However, responsibility of any damage which is led by the product failure is not taken by us.

Result of durability test (with the circuit shown on the right)

Internal/ external leakage and operation were checked by opening and closing a valve in internally evacuated condition at ordinary temperature (room temperature).

It was confirmed that this product satisfied the specification up to 2 million cycles.

The test was performed with FKM, the standard sealing material.

Endurance test conditions

The pumping direction is not limited, but if the pumping creates a flow stream, the durability of the

product could be impaired.

Therefore, the pumping direction shown on the right figure (bellows side pumping) is recommended.

Also, the operating conditions should be checked beforehand because it affects the life.

ブランクフランジ

耐久試験条件

Blank flange

ブランクフランジ

試験品姿勢:横向き

Test piece posture : lateral

1～10 Pa

真空ポンプ

Vacuum Pump

Valve side

バルブ側

Bellows side

ベローズ側

Chamber

Recommended direction of exhaust

Bellows side

Vacuum pump

真空ポンプ

チャンバ

Chamber

推奨排気方向

Vacuum pump

Recommended direction of exhaust

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8. Parts Replacement Procedure

8-1. Precautions

Be sure to follow [1. Precautions 1] when disassembling the product for maintenance. Along

with the precautions above, comply with the following precautions too.

Warning

• If it is expected that product materials may get stuck to the product, ensure safety is assured before handling. It is recommended to wear gloves and a mask.

• Pay attention to the handling of components according to the procedure in the next item onwards. Do not apply excessive force or impact. This will not only damage the product but also decrease its performance and life expectancy.

• It is not possible to disassemble the bonnet assembly of this product. If the components and assembly are damaged, or damage is expected, exchange the bonnet assembly itself.

• Do not disassemble the parts that are not explained in this operation manual. The performance and life may decrease. Also, it may cause danger.

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S valve seal

Mounting surface of

8-2. Disassembly procedure

Step 1 Step 2

Bolt b

Bonnet assembly

Pilot port M

O-ring

Bolt c

assembly

Body

Apply 0.2MPa of air pressure to the pilot port M. Loosen bolt b in numerical order to disassemble the body and the bonnet assembly.

Step 3 Step 4

O-ring

Bottom surface of the groove to discharge gas.

Pilot port S

Apply 0.3MPa of air pressure to the pilot port S. Loosen bolt c to remove S valve seal assembly. Initial pumping valve seal O ring is removed from 25, 40 and 50.

O ring

Remove the O ring from the groove for discharging gas using a tool (plastic) whose height is the same as the groove for discharging gas. <Take care not to damage the O ring groove>

Body

Remove the external seal O ring from the body <Take care to prevent the mounting surface of O ring from being damaged>

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8-3. Assembly Procedure

Step 1 Step 2 Step 3

O ring groove

Clean cloth

Ethanol

Assemble parts eliminating dust. Wipe off dust with a clean cloth soaked with ethanol. Blow parts with clean air if necessary. <Ensure there is no fiber or dust>

M valve

Eliminate the dust of O ring groove of pilot valve M.

Step 4 Step 5

O ring

Wipe off the dust on the valve seal O ring surface. Place the O ring on the O ring groove. Press the O-ring into the groove in numerical order (press diagonally) to fit the O-ring into the groove. Take care not to twist the O ring. <Use dust-free gloves>

O ring

S valve

M valve

Wipe off the dust of the S valve and around it.

Needle

seat

(XLD-25)

S valve seal

assembly

(XLD-63,80)

Remove dust from the needle seat or S valve seal assembly. For size 25, 40 and 50, remove the dust from the initial pumping valve seal O ring. Mount the needle seat or S valve seal assembly.

S valve seal assembly

(XLD-40,50)

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Tightening torque of bolt C

Step 6 Step 7

N・m

Model

X*D-25 0.36±0.1

Other than

X*D-25

Apply 0.3MPa of air pressure to the pilot port S. Place the needle seat or S valve seal assembly, and tighten bolt c to fix them. When tightening bolt c, first tighten manually until the O ring is compressed, then perform extra tightening.

Tightening

torque

0.63±0.1

Pilot port S

Bolt C

S valve seal Ass'y or Needle seat

O ring

Mounting surface of O ring

Body

Wipe off the dust from the external seal O ring surface and the mounting surface of the body O ring. Place the O ring on the O ring mounting surface.

Step 8

Tightening torque of bolt b N・m

Valve

Size

X*D-25

-40

-50

-63

-80

Tightening

Torque

1.5

2.5 6 6

Bolt b

Bonnet assembly

Pilot port M

Body

Apply 0.2MPa of air pressure to the pilot port M (for main pumping). Tighten bolt b in numerical order to assemble the body and the bonnet assembly. When tightening bolt b, tighten manually until the O ring is compressed, then perform extra tightening in diagonal order.

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Revision history

A Limited warranty and Disclaimer Ro

1st Printing :PV

4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

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SMC XMD, XYD User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual