Siargo MF4003, MF4008 User Manual
Model MF4000
SIARGO MEMS FLOW SENSOR PRODUCTS
MEMS Mass Flow Meters
VB.4
© 2014 Siargo Ltd.
MEMS Mass Flow Meters
MF4000 Series
User Manual
Document No. 03-2014-2 EN
Issue date: 2014.03
Revision: VB.4
Siargo Ltd.
2041 Mission College Boulevard
Suite 250
Santa Clara, CA 95054
USA
Tel: +1(408)969.0368
Email: info@siargo.com
© Copyright 2014 by Siargo Ltd.
Siargo Ltd. and its subsidiaries reserve the rights to change the specifications and/or
descriptions without prior notice. For further information and updates, please visit:
www.Siargo.com
Contents
Features.............................................................................................................................
Introduction.......................................................................................................................
Applications........................................................................................................................
Working Principle and Package............................................................................................
Schematic of Electronics .....................................................................................................
The Meters ........................................................................................................................
Specifications.....................................................................................................................
Description.........................................................................................................................
Dimensions........................................................................................................................
Product Selection..............................................................................................................
Installation and User Interface..........................................................................................
Running Mode...................................................................................................................
Instant flow rate mode
Flow accumulation mode
Maximum / minimum mode
Menu Setting Mode..........................................................................................................
Keyboard lock
2
2
2
3
3
4
4
4
5
5
5
6
7
Flow accumulation reset
Automatic offset calibration
Response time setting
Display refresh setting
Maximum / minimum flow rate record clearing
System default retrieval
Decimal setting
Safety and Maintenance...................................................................................................
9
Wetted materials and compatibility
Safety precautions
Customer Service and Order.............................................................................................
Appendix RS232 Communication Protocol.......................................................................
10
11
Siargo MEMS Mass Flow Meters Siargo Ltd. Page 1
MEMS Mass Flow Meters
Model MF 4000
Features
Designed for gas flow in fixed flow channel of 3 mm and 8
mm, with accumulated flow
Compact design ready for manifold applications
Fast response time provides solutions for critical
applications
Excellent for electronic meters in anesthesia equipments
Exchangeable mechanical connectors for easy installation
at different applications
Intrinsic safe enclosure for wide applications
Low power consumption, can be operated by battery
Introduction
MF 4000 Series mass flow meters are designed for applications in gas flow within a flow channel diameter of 3 mm
and 8 mm, respectively. The compact design provides user friendly installation for multiple flow channel sensing
requirements. Plastic finishing with an easy change of the mechanical adaptors enables applications with different
connection thread requirements or one-touch approach. The meters can be used for electronic meters in
anesthesia equipments, environmental samplers and many other industrial applications.
The meters can be customized with flow range, gas specific requirements, user interface and others upon requests
to the manufacturer.
Applications
Environmental Monitoring
Aeration cable
Gas generated plasma monitor
Vacuum applications
Preservation of oxygen devices
Anesthesia
Ventilator
Ventilation equipment detection devices
Other industrial applications such as welding
Siargo MEMS Mass Flow Meters Siargo Ltd. Page 2
Amplifier
00
A/D
Converter
u1x1
(Pin3)VCC
MEMS
Sensor Chip
Buffer
Filter
Power
Module
Driving
Circuit
5V Power Supply
Signal Conditioning Circuit
5V / 3.3V
High-Speed 8-Bit
Microcontroller
RS232
Analog
Output
Select
(Pin2)Vout
(Pin4)GND
(Pin1)TX
(Pin5)RX
(Pin4)GND
EEPROM
D/A
Converter
u1x1
(8-24)V
DC
Display
and Key
Driver
4-digit
LED
display
Test-Key
Interface
Working Principle and Package
The MEMS calorimetric sensor is installed at the flow channel wall forming a plate that serves as an
additional flow conditioner from the boundary layer configuration resulting in a laminar flow. The mass
flow measurement is established as the fluid carries heat away from the heater causing the redistribution
of the temperature field. Accurate flow rate is obtained by calibration with the standard fluid at the preset
conditions.
Schematic of Electronics
Flow direction
MF4003 MF4008
Time-averaged velocity profile boundary layer
Free stream
Laminar
Sensor
Turbulent
Siargo MEMS Mass Flow Meters Siargo Ltd. Page 3
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