nW
37
ms
°C
K
100
°C
Thermosensor
TS105-6
THERMOPILES
Any object emits infrared radiation. The radiation power is increasing with growing surface temperatures.
Based on this relation, THERMOPILES measure the emitted power and determine the object’s temperature
precisely.
Function Principle
THERMOPILES are based on the Seebeck effect, which is used since a long time for conventional
thermocouples. The application of micromechanics and thin film technology allows the production of
miniaturized and cost effective sensor elements.
are used for non-contact surface temperature measuring.
absorption area
(hot junctions)
silicon substrate
(cold junctions)
SiNx-membrane
A multitude of thermojunctions deposited on a silicon substrate is connected in series to form a
THERMOPILE. The hot junctions are thermally insulated from the cold junctions on the substrate by etching a
self-supporting extremly thin membrane. An absorbing layer on the hot junctions transforms the incoming
radiation into heat. A voltage proportional to the radiation is generated by the thermoelectric effect. The
sensors are delivered in TO5-packages. Different housings and filter types can be selected to find an optimal
solution for each application. Chips without housing are available as well.
Technical Data Filter
Parameter Symbol
Number of thermojunctions n
Material
Active Area A
Chip Size A
Resistance of Thermopiles R
TC of resistance TCR
Sensitivity of sensor S
TC of sensitivity TCS
Specific detectivity D* cm*Hz
Noise equivalent power NEP
Noise voltage U
Time constant t
Operation temperature T
Storage temperature T
A
C
C
N
63
Reference Resistor
Resistance R
Beta Value B
NTC
Unit
mm²
mm²
k
Ω
% / K -0.03
V / W typical 110 25°C, 500 K, DC
% / K -0.52
1/2
/ W
1/2
nV / Hz
k
Ω
BiSb, NiCr
0.7 * 0,7
2.0 * 2.0
50
2.1 * 10
40
-20 ... 100
-40 ... 100
100
3968
Value
100
±
15
±
0.02
±
0.08
0.35
±
10
±
0.5%
±
0.5%
8
Condition
+25...+75 °C
+25...+75 °C
500 K, 1 Hz
500 K, 1 Hz
500 K, 1 Hz
15 °C...35 °C
25 °C
500 K, DC
25 °C
90
80
70
60
50
40
30
20
10
0
4 5 6 7 8 9 10 11 12 13 14
Wavelength (um)
Sensors in thin film technology
HL-Planartechnik GmbH
Hauert 13 44 227 Dortmund Tel.: ++49 / (0)231 / 97400 Fax.: ++49 / (0)231 / 974020
105_6_e_00 August 2000
Object Temperature [°C]
Connecting Diagramm TS105-6
bottom view
3 4
Thermosensor
TS105-6
TP-
V
TP+
ϑ
2
1
Output Voltage versus Objekt Temperature
14
12
10
8
6
4
2
0
25 50 75 100 125 150 175 200 225
NTC/GND
Ω
NTC
Housing TO 5
Conditions:
Distance Thermopile/Black Body 5 cm,
emissivity= 1, surrounding temperature 25°C
Tables with emissivity of different materials
and surfaces are available.
Applications
• contactless measurement of surface temperatures or IR-Radiation
• temperature measurement at moving objects
• continous temperature control in manufacturing processes
• thermal alarm systems
• further applications in safety-, consumer-, environmental technics and automotive systems
• absorbing measurement for gas analysis (see special data sheet)
• climate control systems
• medical instruments
Further products with different filters and packages are available, see separate data sheets
Technical data are subject to change without notice
Sensors in thin film technology
HL-Planartechnik GmbH
Hauert 13 44 227 Dortmund Tel.: ++49 / (0)231 / 97400 Fax.: ++49 / (0)231 / 974020
105_6_e_00 August 2000
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