Seiko MT-17E-003-D User Manual



      

STP-H600/H1000 Series

Turbomolecular Pump

INSTRUCTION MANUAL

(Third Edition-d)

MT-17E-003-D

Read through the Safety Precautions of this Manual carefully before using the STP pump.

Keep this Manual in a place where you can quickly access it at any time.

Seiko Instruments Inc.

Dec. 2001

STP-H600/H1000 Series Instruction Manual

CAU

SAFETY PRECAUTIONS

The Safety Precautions in this Manual constitute guidelines to protect operat ors, t he STP pump and its peripheral equipment. To avoid personal injury and prevent product and/or peripheral equipment damage, observe the Safety Precautions as well as the general safety rules (y our count ry’s laws, regulations, safety standards and so on). If the equipment is used in a manner not specified by the Seiko Instruments, the protection provided by the equipment may be impaired.

Symbols

◇ The following symbols are used in this manual:

WARNIN

Death or Serious Personal Injury

Failure to follow the guidelines marked with this symbol may result in death or serious personal injury.

Minor Personal Injury, Product and/or Peripheral equipment Damage

Failure to follow the guidelines marked with this symbol may result in minor personal injury, product and/or peripheral equipment damage.

NOTICE

Items you must follow during operation and maintenance.

◇ Symbols as Marked on the Equipment

ATTENTION : refer to this manual.

Seiko Instruments cannot perfectly anticipate circumstances of all of hazards or problems. The scope of anticipation is limited to the precautions included in the

specified in this manual.



WARNIN

and

STP-H600/H1000 Series Instruction Manual

WARNIN

◇ Check the properties of the gas to be used, referring to the Material Safety Data Sheet

(MSDS) you obtain from the gas supplier. Follow any and all safety precautions and/ or recommendations instructed by the gas supplier. Take appropriate measures specified in the MSDS to prevent a problem if you use any corrosive, reactive, flammable or other system gas. Dilute the pumped gas with a monitored inert gas if necessary. Take appropriate measures so as not to cause a problem due to the pumped gas

◇ The STP pump is provided with a high-speed rotor. Secure the STP pump according to the

specified method. Failure to do so may lead to serious personal injury, product and/or peripheral equipment damage if any abnormality/error occurs in the rotor.

◇ The STP pump operates at high temperatures while the baking heater is in operation.

NEVER touch the STP pump and its peripheral equipment while the baking heater is in operation. Operators can burn hands.

◇ Always exhaust residual gases thoroughly from the STP pump when removing the STP

pump from the vacuum equipment. Residual gases in the STP pump may cause an accident which, for certain gases, may involve serious injury or deat h. Confirm the characteristics of the gas to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier. Wear personal protective equipment if necessary.

◇ When covering the battery case, be sure not to catch the battery cable in the battery case.

Failure to do so may short-circuit the battery and result in a leakage, production of fire or explosion.

◇ NEVER throw the battery into fire nor heat it.

Failure to do so may result in an explosion, production of fire and/or serious personal injury. Observe the instructions given by t he bat t ery maker, the national and/or local government when disposing of the battery.

◇ Exhaust residual gas thoroughly when disposing of the STP pump. If the STP pump is

used for any toxic or reactive gas, always clean the STP pump and dispose of it as industrial waste in accordance with guidelines given by the national and/ or local government. Residual gas in the STP pump may cause an accident which, for certain gases, may involv e serious injury or death.

◇ Always remove the battery from the STP control unit when disposing of it . Failure t o do so

may result in fire or other accident.

STP-H600/H1000 Series Instruction Manual

CAU

◇ NEVER use any gas that is not specified as usable in this Manual. The use of such gas

may corrode the STP pump and damage it.

◇ A hazardous live voltage may exist at connect or/ terminal that marked .

DO NOT touch the terminal. Doing so may result in electric shock. When operating connection/disconnection to terminal, always power OFF the STP pump (Switch the breaker “OFF”).

◇ Always check the STP pump has stopped, then turn OFF the primary power (sw itch t he

breaker “OFF”) before proceeding to any of the following operations. Failure to do so may cause the STP pump to rotate accidentally, which may injure operators seriously or result in electric shock.

· Connect or disconnect cables;

· Connect an external battery;

· Perform maintenance and inspections such as replacement of the internal battery

and/or fuses as well as inspections of deposit and/or the air cooling fan (when replacing fuses, always disconnect the internal battery connector);

· Perform investigations into probable causes and action/measures taken in the event of occurrence of a problem; or

· Open and close the STP control unit front panel (hereinafter referred to as the front panel) in order to check or reset the "BATTERY NG" (hereinafter referred to as "BATTERY NG") lamp.

◇ The STP pump and the STP control unit are heavy products. Alway s use a crane or the

like when lifting them. When lifting the STP pump by hands for unavoidable reasons, it must always be lifted by two or more people. Failure to do so may damage their hipbone or injure them due to occurrence of an accident such as fall.

◇ Install the STP control unit not only by fitt ing it with the front panel fitting screws but also by

supporting it from the bottom side. Fitting the STP control unit with t he screw s only cannot sustain its weight, and therefore resulting in product damage.

◇ Always use the STP pump, STP control unit and STP connection cables of the same model

name, serial number and cable length, which are specified on their own name plate. Failure to do so may result in product damage. If you use units with the same model name but different serial number and cable length; they must be adjusted. If the model names are different, they may not be used even when performing adjustment. In both cases, contact Seiko Instruments.

◇ Use the STP connection cable and the motor connection cable that have a label affixed

STP-H600/H1000

Series

The use of different cables may result in product damage.

◇ Connect the cables securely. NEVER bend nor place heavy objects on the cable. Doing

so may result in electric shock or product damage.

◇ Always use the power voltage specified on the name plate for the primary power voltage of

the STP control unit. Wire the power cable securely. Incorrect wiring may result in electric shock or product damage.

◇ NEVER remove the splinter shield from the STP pump. Doing so may result in product

damage.

STP-H600/H1000 Series Instruction Manual

CAU

◇ DO NOT put foreign objects into the STP pump. Doing so may result in product damage. ◇ NEVER turn OFF the primary pow er ( DO NO T switch the breaker “OFF”) while the STP

pump is rotating. Doing so may result in product damage.

◇ Perform investigations into probable causes and remove them before restarting the STP

pump in the event of occurrence of a problem. The use of the abnormal STP pump may result in product damage.

◇ Always replace batteries once a year. Failure to do so, t he bat t ery backup operation may

not run at the power failure.

◇ DO NOT connect internal batteries and external batt eries simultaneously. Failure to do so

may result in product damage.

◇ DO NOT move the STP pump and the STP control unit while the STP pump is in operation.

Doing so may result in product damage.

STP-H600/H1000 Series Instruction Manual

INTRODUCTION

Thank you very much for purchasing Seiko Instruments’s turbomolecular pump. The turbomolecular pump is designed to be installed in the vacuum equipment in to exhaust gases from it. This manual covers all items necessary to ensure safe installation, operation and maintenance of the following series of the STP-H600/H1000 turbomolecular pump:

Model Name Specification

· STP-H600 High-throughput type

· STP-H1000 High-throughput type

· STP-H600C High-throughput type, chemical specific

· STP-H1000C High-throughput type, chemical specific

For the specifications of other models of the STP-H600/H1000 pump series, contact Seiko Instruments. In this manual, the above STP pump series is collectively referred to as the “STP pump.”

APPLIED STANDARDS

The STP pump conforms to the following directives and standards:

◇ Applied Directives

· EC Machinery Directive

· EC Electromagnetic Compatibility Direct ive

· EC Low Voltage Directive

◇ Applied Standards

· EN292-1

· EN292-2

· EN60204-1

· EN55011 (class A)

· EN50082-2

◇ Applied Standards (Only a some model)

· UL3101-1,1993 (Electrical Equipment for Laboratory Use; Part 1 : General Requirements)

Chemical specif i c: STP pump with anti-corrosive t reat ment (responding to chlorine, fluori ne or other system gases)

Contact Seiko Instruments about recognized model.

STP-H600/H1000 Series Instruction Manual

PRECAUTIONS

1) No part of this manual may be reproduced in any form by any means without prior written permission from Seiko Instruments.

2) Seiko Instruments pursues a policy of continuing improvement in design and performance of this product. The right is, therefore, reserved to vary specifications and design without notice. Understand that the product you purchased and its contents including specifications described in this manual may differ.

REQUEST

If you find inaccuracies or errors in this manual, advise your nearest sales representative office of Seiko Instruments or the following sections of them:

Seiko Instruments Inc.

Sales Office (Japan)

Seiko Instruments Inc. Vacuum Innovative Products Sales Department

1-8 Nakase, Mihama-ku, Chiba-shi, Chiba 261-8507 JAPAN

Telephone: <Vacuum Innovative Products Sales Department, Direct>

Domestic 043-211-1401 International + 81-43-211-1401 Facsimile: Domestic 043-211-8075 International + 81-43-211-8075

Manufacturer, Sales Office (Japan)

Seiko Instruments Inc. Vacuum Innovative Products Division 4-3-1 Yashiki, Narashino-shi, Chiba 275-0004 JAPAN

Telephone: <Vacuum Innovative Products Service Section, Direct>

Domestic 047-475-3123

International +81-47-475-3123

Domestic 047-475-3111

International +81-47-475-3111

Facsimile: Domestic 047-471-1544

International +81-47-471-1544

Vacuum Innovative Products Sales Department 1-8 Nakase, Mihama-ku, Chiba 261, Japan Telephone: + 81-43-211-1401(Direct)

Facsimile: + 81-43-211-8075

STP-H600/H1000 Series Instruction Manual

LIMITED WARRANTY

This WARRANTY applies to the customer to whom Seiko Instruments has delivered this product.

1. WARRANTY PERIOD: Seiko Instruments warrants this product against defects for a period of

two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Seiko Instruments.

2. ITEM WARRANTED:

1) This warranty applies only to the product delivered from Seiko Instruments to the customer.

2) If any defect is found during this period, Seiko Instruments will, at its option, repair or recondition the product free of charge. The costs for repair or replacement of the product after the warranty period has passed will be at the customer's own charge.

3. DISCLAIMER:

Seiko Instruments makes no warranty with respect to any damage occurred

due to any of the following during the warranty period:

1) Handling, operation or maintenance other than that specified herein;

2) Failure to follow any of the warnings or cautions enumerated under

or ;

3) Installation, operation or maintenance using parts which are not specified by Seiko Instruments;

4) Maintenance personnel other than those authorized by Seiko Instruments or its specified plant have disassembled, reconditioned, or tampered the product;

5) Defect resulting from the not-specified use of the product;

6) When the product is used under special conditions without obtaining the written consent of Seiko Instruments (Particular gases, strong magnetic field and the radiation are added to the product.);

7) Defect resulting from deposit;

8) Water cooling system defect resulting from water quality used;

9) Defect resulting from the installation of the product (Exclude the installation by authorized personnel.);

10) Deterioration in the external because of use (Discoloration, scratches and so forth);

11) Product damage occurred during transport or other factors not attributable to Seiko Instruments;

12) Product breakage or damage due to natural disasters, fire or other external factors;

13) Deterioration in the basic performance due to the use of the product beyond limits of the use;

14) Any direct, incidental or consequential damage resulting from the use of the product;

15) When continuously operated without overhaul after the WARNING

STP-H600/H1000 Series Instruction Manual

indication (“WARNING” message) on the LCD display;

16) Overhaul and replacement of maintenance parts;

4. SPARE PARTS: ● Fuse and air cooling fan for control unit

● Touch down bearing

● Heater

STP-H600/H1000 Series Instruction Manual

TABLE OF CONTENTS

SAFETY PRECAUTION INTRODUCTION LIMITED WARRANTY

1 Precautions for Safe Operation of the STP Pump..................................... 1-1

1.1 Usable Gases............................................................................................................ 1-1

1.2 Maintenance Precautions.......................................................................................... 1-1

1.3 Inspection Precautions.............................................................................................. 1-2

1.4 Labels........................................................................................................................ 1-2

2 Unpacking.................................................................................................. 2-1

2.1 Unpacking the STP Pump......................................................................................... 2-1

2.2 Unpacking the STP Control Unit ............................................................................... 2-2

3 Installation of the STP pump...................................................................... 3-1

3.1 Name and Function of Each Part.............................................................................. 3-1

3.2 Precautions Before Installation ................................................................................. 3-3

3.2.1 Operating Environment................................................................................ 3-3

3.2.2 Installation Area ........................................................................................... 3-4

3.2.3 Bench........................................................................................................... 3-4

3.3 How to Install the STP Pump .................................................................................... 3-5

3.3.1 Cleaning the Seal......................................................................................... 3-6

3.3.2 STP Pump Installation Positions.................................................................. 3-7

3.3.3 How to Secure the STP Pump..................................................................... 3-8

3.3.4 Vacuum Piping........................................................................................... 3-12

3.3.5 Connecting the Emergency Vent. Valve .................................................... 3-14

3.3.6 Connecting the Purge Port......................................................................... 3-14

3.3.7 Connecting the Ground Cable.................................................................... 3-15

4 Installation of the STP Control Unit............................................................ 4-1

4.1 Name and Function of Each Part.............................................................................. 4-1

4.1.1 Front Panel................................................................................................... 4-1

4.1.2 Rear Panel................................................................................................... 4-4

4.1.3 Inside of the STP Control Unit...................................................................... 4-6

4.2 Precautions Before Installation ................................................................................. 4-8

4.2.1 Operating Environment................................................................................ 4-8

4.2.2 Installation Area ........................................................................................... 4-9

4.3 Attaching the STP Control Unit Front Panel to a Rack ........................................... 4-10

4.4 Cable Connection.................................................................................................... 4-11

4.4.1 Name and Dimensions of Each Cable....................................................... 4-11

4.4.2 How to Connect the Cables ....................................................................... 4-13

5 How to Start/Stop the STP Pump .............................................................. 5-1

5.1 Before Starting.......................................................................................................... 5-1

5.2 Starting/Stopping Time.............................................................................................. 5-1

5.3 Start Procedures ....................................................................................................... 5-2

5.4 Stop Procedures ....................................................................................................... 5-2

5.5 Manual Operation...................................................................................................... 5-3

5.5.1 Powering ON................................................................................................ 5-3

5.5.2 Starting the STP Pump ................................................................................ 5-3

5.5.3 Stopping the STP Pump............................................................................... 5-3

STP-H600/H1000 Series Instruction Manual

5.5.4 Starting the STP Pump after Stopping......................................................... 5-3

5.5.5 Powering OFF.............................................................................................. 5-4

5.6 Remote Operation..................................................................................................... 5-5

5.6.1 Powering ON................................................................................................ 5-5

5.6.2 Starting/Stopping the STP Pump ................................................................. 5-5

5.6.3 Starting the STP Pump After Stopping......................................................... 5-5

5.6.4 Powering OFF.............................................................................................. 5-6

6 Safety Functions When an Abnormality/Error Occurs ............................... 6-1

6.1 Safety Functions........................................................................................................ 6-1

6.1.1 Power Failure............................................................................................... 6-1

6.1.2 Abnormal State of Magnetic Bearing ........................................................... 6-3

6.1.3 Excessive Vibration...................................................................................... 6-3

6.1.4 Inverter Overload ......................................................................................... 6-3

6.1.5 Overheating Inside the STP pump............................................................... 6-3

6.1.6 Overheating Inside the STP Control Unit..................................................... 6-3

6.1.7 Overspeed.................................................................................................... 6-3

6.1.8 Abnormal Battery Voltage ............................................................................ 6-4

6.1.9 Failure of Brake............................................................................................ 6-4

6.2 Restarting after Any Safety Function Operates......................................................... 6-5

6.3 Operation of the Emergency Vent. Valve.................................................................. 6-7

7 Gas Suction, Cooling and Baking the STP Pump...................................... 7-1

7.1 Gas Suction............................................................................................................... 7-1

7.1.1 How to Introduce a Purge Gas..................................................................... 7-1

7.2 Cooling the STP Pump.............................................................................................. 7-2

7.2.1 Water Cooling Method ................................................................................. 7-2

7.2.2 Air Cooling Method....................................................................................... 7-3

7.3 Baking the STP Pump............................................................................................... 7-4

7.3.1 Attaching a Baking Heater ........................................................................... 7-4

7.3.2 Interlocking the STP Pump Operation with Baking.......................................... 7-6

8 Remote Input/Output Signal Terminal Blocks............................................ 8-1

8.1 I/O TB2 Terminal Block............................................................................................. 8-1

8.2 DC I/O TB3 Terminal Block....................................................................................... 8-6

8.3 START STOP TB5 Terminal Block........................................................................... 8-8

8.4 START/STOP TB6 Terminal Block........................................................................... 8-9

9 Internal Battery........................................................................................... 9-1

9.1 Life of the Internal Battery......................................................................................... 9-1

9.2 Allowable Shelf Life of the Internal Battery................................................................ 9-1

9.3 How to Charge the Internal Battery........................................................................... 9-2

9.4 BATTERY NG Lamp................................................................................................. 9-3

9.5 How to Replace the Internal Battery.......................................................................... 9-4

9.5.1 How to Replace the Battery Case................................................................ 9-4

9.5.2 How to Replace the Battery in the Battery Case.......................................... 9-6

9.6 How to Dispose of the Internal Battery...................................................................... 9-8

10 External Battery ....................................................................................... 10-1

10.1 Specifications for the External Battery .................................................................... 10-1

10.2 Installation of the External Battery........................................................................... 10-2

10.3 How to Charge the External Battery........................................................................ 10-3

10.4 How to Dispose of the External Battery................................................................... 10-3

11 Operation Principle of the STP Pump...................................................... 11-1

STP-H600/H1000 Series Instruction Manual

12 Maintenance and Inspection.................................................................... 12-1

12.1 Replacing the Internal Battery................................................................................. 12-1

12.2 Inspecting the Air Cooling Fan................................................................................ 12-1

12.3 Replacing the Fuses ............................................................................................... 12-2

12.4 Inspecting for Deposit ............................................................................................. 12-3

12.5 Overhaul.................................................................................................................. 12-4

12.6 Transporting for Repair or Overhaul....................................................................... 12-5

13 Storage.................................................................................................... 13-1

13.1 The STP Pump........................................................................................................ 13-1

13.2 The STP Control Unit.............................................................................................. 13-2

13.3 Restarting Precautions............................................................................................ 13-2

14 Disposal................................................................................................... 14-1

14.1 The STP Pump........................................................................................................ 14-1

14.2 The STP Control Unit.............................................................................................. 14-1

14.3 The Battery.............................................................................................................. 14-2

15 Troubleshooting ....................................................................................... 15-1

15.1 Troubleshooting Immediately After An Abnormality/Error Occurs .......................... 15-1

15.2 Abnormalities When Powering ON ......................................................................... 15-2

15.3 Abnormalities When Performing The STP Pump Start Operation.......................... 15-3

15.4 Abnormalities While the STP Pump is Rotating...................................................... 15-3

15.5 When Any Abnormality/Error Warning Lamp Lights ............................................... 15-5

16 Specifications and Accessories ............................................................... 16-1

16.1 Specifications for the STP Pump............................................................................ 16-1

16.2 Specifications for the STP Control Unit................................................................... 16-2

16.3 Accessories............................................................................................................. 16-4

16.4 Recommended Spare Parts.................................................................................... 16-4

STP PUMP PROBLEM CHECK SHEET UNIT CONVERSION TABLE

STP-H600/H1000 Series Instruction Manual

TABLES

Table 3.1 Tightening torque of bolt....................................................................................... 3-8

Table 3.2 Maximum Torque predicted and

Recommended securing bolt for inlet port flange................................................. 3-9

Table 3.3 Number of Claw Clamps by Size of Flange........................................................ 3-10

Table 4.1 Connecting Primary Power Cable....................................................................... 4-15

Table 5.1 Starting/Stopping the STP Pump During Remote Operation................................ 5-5

Table 6.1 State of Lamps and REMOTE Output Signal at Power Failure............................ 6-2

Table 6.2 Operation of the STP Pump after Power Recovery.............................................. 6-2

Table 6.3 Safety Functions................................................................................................... 6-8

Table 7.1 Attaching Positions of the Cooling Unit and Baking Heater.................................. 7-5

Table 8.1 I/O TB2 Terminal Block ........................................................................................ 8-1

Table 8.2 Rated Contacts for Relays CR1 to 4, CR7, CR8 and CR10................................. 8-4

Table 8.3 Rated Contacts for Relays CR5 and 6.................................................................. 8-4

Table 8.4 DC I/O TB3 Terminal Block .................................................................................. 8-6

Table 8.5 START STOP TB5 Terminal Block....................................................................... 8-8

Table 8.6 START/STOP TB6 Terminal Block....................................................................... 8-9

Table 10.1 Specifications for the External Battery................................................................ 10-1

Table 15.1 Troubleshooting After Powering ON................................................................... 15-2

Table 15.2 Troubleshooting When Performing The STP Pump Start Operation.................. 15-3

Table 15.3 Troubleshooting While the STP Pump Is Rotating............................................. 15-3

Table 15.4 Cross Reference of Items of Abnormality Warning Lamps ................................ 15-5

Table 15.5 Troubleshooting When Any of Abnormality/Error Warning

Lamp Lights ........................................................................................................ 15-6

Table 16.1 Specifications for the STP Pump........................................................................ 16-1

Table 16.2 Specifications for the STP Control Unit .............................................................. 16-2

Table 16.3 Accessories ........................................................................................................ 16-4

Table 16.4 Recommended Spare Parts ............................................................................... 16-4

STP-H600/H1000 Series Instruction Manual

FIGURES

Figure 2.1 Example of Lifting the STP Pump......................................................................... 2-1

Figure 3.1 Configuration of the STP Pump............................................................................ 3-2

Figure 3.2 Installation of the STP Pump to the Vacuum Equipment...................................... 3-5

Figure 3.3 STP Pump Installation Positions........................................................................... 3-7

Figure 3.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump.. 3-7

Figure 3.5 Example of securing the STP pump (When securing the inlet port with bolts)..... 3-9

Figure 3.6 Example of securing the STP pump

(When securing the inlet port flange with claw clamps)...................................... 3-10

Figure 3.7 Example of securing the STP pump

(When installing the damper in the inlet port flange) .......................................... 3-11

Figure 3.8 Connecting the Purge Port and Emergency Vent. Valve.................................... 3-15

Figure 4.1 STP Control Unit Front Panel ............................................................................... 4-3

Figure 4.2 STP Control Unit Rear Panel................................................................................ 4-5

Figure 4.3 Inside of the STP Control Unit .............................................................................. 4-7

Figure 4.4 Peripheral Space of the STP Control Unit ............................................................ 4-9

Figure 4.5 Example of Securing the STP Control Unit......................................................... 4-10

Figure 4.6 External Dimensions of Each Cable................................................................... 4-11

Figure 4.7 External Dimensions of he Power Cable ............................................................ 4-12

Figure 4.8 How to Secure Primary Power Cable ................................................................. 4-16

Figure 8.1 I/O TB2 Remote Output Signal Terminal Block.................................................... 8-3

Figure 8.2 Example of Connecting I/O TB2 R. Pump Terminal............................................. 8-5

Figure 8.3 Example of Securing the Remote Cable............................................................... 8-5

Figure 8.4 DC I/O TB3 Remote Input Signal Terminal Block................................................. 8-7

Figure 8.5 START STOP TB5 Remote Input Signal Terminal Block..................................... 8-8

Figure 8.6 START/STOP TB6 Remote Input Signal Terminal Block..................................... 8-9

Figure 9.1 Life of the Internal Battery..................................................................................... 9-2

Figure 9.2 Allowable Shelf Life of the Internal Battery........................................................... 9-2

Figure 9.1 How to Replace the Internal Battery..................................................................... 9-7

Figure 11.1 Cross Sectional View of the STP Pump ............................................................. 11-2

Figure 16.1 External Appearance of the STP Pump

(Example: STP-H1000 Series) ........................................................................... 16-5

Figure 16.2 External Appearance of the STP Control Unit.................................................... 16-6

Figure 16.3 Label Affixing Positions for the STP Pump......................................................... 16-7

Figure 16.4 Label Affixing Positions for the STP Control Unit ............................................... 16-8

Figure 16.4 Label Affixing Positions for the Special Accessory............................................. 16-9

STP-H600/H1000 Series Instruction Manual

1 Precautions for Safe Operation of the STP Pump

1.1 Usable Gases

Chlorine or fluorine system gases can be used in chemical specific pumps (STPH600C/H1000C or other models). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Seiko Seiki.

WARNING

◇ Check the properties of the gas to be used, referring to the Material Safety Data

Sheet (MSDS) you obtain from the gas supplier. Follow any and all safety precautions and/or recommendations instructed by the gas supplier. Take appropriate measures specified in the MSDS to prevent a problem if you use any corrosive, reactive, flammable or other system gas. Dilute the pumped gas with a monitored inert gas if necessary. Take appropriate measures so as not to cause a problem due to the pumped gas

CAUTION

◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the

STP-H600/STP-H1000 pump or other models without anti-corrosion treatment.

◇ Introduce a dry N

using reactive or corrosive gases.

gas (purge gas) to protect the inside of the STP pump when

◇ Cool the STP pump to within the operating pressure range to prevent the STP

pump from overheating when sucking gases.

1.2 Maintenance Precautions

Perform any maintenance of the STP pump and the STP control unit (battery replacement, fuse replacement), following Section 12, "Maintenance and Inspection".

CAUTION

◇ Always turn OFF the primary power (switch the breaker "OFF") before

performing any maintenance.

◇ Disconnect internal battery connector before performing maintenance of the STP

control unit.

◇ NEVER touch any portions other than those designated when performing

maintenance. Careless touch may cause electric shock and/or a short-circuiting of the internal circuit, resulting in product damage or a problem.

1-1

STP-H600/H1000 Series Instruction Manual

1.3 Inspection Precautions

Perform inspections of the STP pump and the STP control unit (check of the air cooling fan and reset of the "BATTERY NG" lamp), following Section 12, "Maintenance and Inspection" When performing inspections (check of the air cooling fan and reset of the "BATTERY NG" lamp), always turn OFF the primary power (switch the breaker "OFF") before opening the front panel, then turn ON the primary power again (switch the breaker "ON").

CAUTION

◇ NEVER touch any portions other than those designated when performing

inspections. Careless touch may cause electric shock and/or a short-circuiting of the internal circuit, resulting in product damage or a problem.

1.4 Labels

The following labels are affixed to the STP pump and STP control unit. Read the contents of the labels before operation. For the positions of the labels, see Figures “Label Affixing Positions”.

(1) STP Pump Caution Label This label describes precautions for operating the STP pump.

Follow these precautions.

(2) STP Control Unit Caution Label This label describes precautions for operating the STP control unit.

Follow these precautions.

1-2

STP-H600/H1000 Series Instruction Manual

(3) Heavy Product Caution Label This label is affixed to the product with a mass of 20 kg or more.

Follow the precautions of Section 2, "Unpacking" so as not to cause any accident during handling.

(4) STP Pump Installation Warning Label This label describes installation of the STP pump.

Install the STP pump according to the precautions of Section 3, "Installation of the STP Pump. "

(5) Emergency Vent. Valve Caution Label This label describes the emergency vent. valve installation position.

Connect the emergency vent. valve before use.

1-3

STP-H600/H1000 Series Instruction Manual

(6) Connector Caution Label

◇ This label describes lock of the connector. ◇ This label instructs operators to prevent the connectors from being disconnected while

the STP pump is in operation.

(7) STP Control Unit Safety Instruction Label This label describes instructions before operating the STP control unit.

(8) High Voltage Device Caution Label The STP control unit is equipped with a high voltage device. This label warns operators to

pay attention to the high voltage device.

1-4

STP-H600/H1000 Series Instruction Manual

(9) Battery Instruction Label This label instructs operators to replace batteries once a year.

The next replacement date of batteries is specified upon delivery of the STP pump. Record the next replacement date (after one year) of batteries in the blank of the label when replacing them. This label describes precautions for use of external batteries.

(10) Rotational Direction Instruction Label

This label describes the rotational direction of the STP pump. The STP pump rotates in this direction.

ROTATION

(11) Voltage Rating Label This label describes the rated voltage of the STP control unit.

Use voltage specified in this label.

200〜240V

1-5

STP-H600/H1000 Series Instruction Manual

(12) Hot Surface Warning Label This label instructs operators so as not to touch the hot surface of the STP pump.

The use of the baking heater (optional accessory) may lead to a considerable rise in temperatures outside the STP pump. This label warns operators so as not to burn hands. (only when using the baking heater.)

(13) Tuning Caution Label This label describes precautions for performing the tuning.

Tuning should be performed by Seiko Seiki trained or authorized personnel only.

注意!

浮上調整を行う場合は弊社のトレーニングまたは許可を受けてください。

CAUTION

Tuningmustbeperformed bySeikoInstrumentsInc.or authorizedpersonnelonly.

1-6

STP-H600/H1000 Series Instruction Manual

CAU

2 Unpacking

2.1 Unpacking the STP Pump

Check the following before unpacking the STP pump.

1) Check the package for bruises, breakage, wetness, etc. If there is any abnormality/error or it is judged necessary to return the product, contact Seiko Seiki.

2) Check the contents of the package. See Section 16.3, "Accessories."

◇ The mass of the STP pump is approx. 30 kg. Use a crane or other appropriate

means to lift the STP pump. Lift the STP pump with an eyebolt or a similar tool that uses the fitting hole attached to the inlet port flange. Lift it with the aid of a suspension tool under the base when installing the STP pump without fitting hole.

◇ Observe national laws/regulations, safety standards and so on when lifting the

STP pump.



◇ Use a crane or other appropriate means sufficient enough to withstand the load

when lifting the STP pump.

◇ Always lift the STP pump in stable places free of excessive shock or vibration to

prevent it from shaking or dropping.

◇ Have at least two people lift the STP pump when doing so by hand.

NOTICE

◇ Be careful not to scratch the flange of the STP pump.

Before installing the STP pump, check whether or not there are scratches on the surface.

◇ It is recommended to keep the packaging materials, such as the corrugated

fiberboard container and cushioning material for possible reuse.

Figure 2.1 Example of Lifting the STP Pump



2-1

STP-H600/H1000 Series Instruction Manual

CAU

2.2 Unpacking the STP Control Unit

Check the following before unpacking the STP control unit.

1) Check the package for bruises, breakage, wetness, etc. If there is any abnormality/error or it is judged necessary to return the product, contact Seiko Seiki.

2) Check the contents of the package. See Section 16.3, "Accessories."

◇ The mass of the STP control unit is approx. 40 kg. Use a crane or appropriate

means to lift the STP control unit. Lift the STP control unit using the two handles attached to t he front panel.

◇ Observe national laws/regulations, safety standards and so on when lifting the

STP control unit.

◇ Use a crane or appropriate means sufficient enough to withstand the load when

lifting the STP control unit.

◇ Always lift the STP control unit in stable places free of excessive shock or

vibration to prevent it from shaking or dropping.



◇ Have at least two people lift the STP control unit w hen doing so by hand.

NOTICE

◇ It is recommended to keep the packaging materials, such as the corrugated

fiberboard container and cushioning material for possible reuse.



2-2

3 Installation of the STP pump

CAU

3.1 Name and Function of Each Part

(1) Inlet Port Flange (ICF

l Connected to the vacuum equipment (at the high vacuum side).

◇ A splinter shield is attached to the inlet port flange to prevent foreign particles

from falling into the STP pump. NEVER remove it.

, VG

, ASA, ISO, etc.)

STP-H600/H1000 Series Instruction Manual



(2) Outlet Port Flange (KF

l Connected to the inlet port side of the auxiliary pump.

(3) STP Connector (41 pins)

l Connected to the STP connection cable.

(4) Motor Connector (5 pins)

l Connected to the motor connection cable.

(5) Purge Port (KF

l Introduces a purge gas.

In order to protect the inside of the STP pump when sucking reactive or corrosive gases. The STP pump is delivered with a blank flange attached to this port.

(6) Cooling Water Port (PT

l Connected to the STP pump cooling water pipe.

This port is used when water cooling the STP pump.

(7) Emerge ncy Vent. Valve

l Protects the STP pump.

It functions immediately after any abnormality/error occurs inside the STP pump.

(8) Ground Terminal

Used for grounding. Connect the ground cable between this terminal and the ground terminal of the STP control unit .

10)

40)

(R/C)1/4 Female Screw)

The ground terminal is marked with label

(9) Temperature Sensor Connector (optional accessory)

l A temperature sensor is attached.

For use with the Temperature Management System (TMS) unit only.

: JVIS

: JIS

3-1

(1) Inlet Port Flange

(9) Temperature Sensor

Connector

Optional Accessory

STP-H600/H1000 Series Instruction Manual



(6) Cooling Water Port

(3) STP Connector

(4) Motor Connector

(8) Ground Terminal

(2) Outlet Port Flange

(6) Cooling Water Port

(5)PurgePort(7)EmergencyVent.Valve

Figure 3.1 Configuration of the STP Pump

3-2

3.2 Precautions Before Installation

CAU

STP-H600/H1000 Series Instruction Manual



3.2.1 Operating Environment

◇ Chlorine or fluorine system gases can be used in chemical specific pumps (type

C). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, Sn, or HBr, contact Seiko Instruments.

◇ NEVER use corrosive gases (chlorine, fluorine, or ot her system gases) in the

STP-H600/STP-H1000 pump or other models without anti-corrosion treatment (see Section 1.1, "Usable Gases").

Install the STP pump in a place meeting the following requirements: Ambient Temperature 0 to 40 °C Ambient Relative Humidity 30 to 95 % (no dew condensing) Environment l A place free of externally-applied mechanical shock.

STP Pump Installation Equipment Conditions

l A place free of a heat source

(Keep clean of the heat source or attach a thermal shield plate).

l A place free of a strong magnetic field

(Range: up to 15mT (150G) in the axial direction, and up to 3mT (30G) in the radial direction with respect to the rotational axis of the STP pump).

l A place free of a strong electric field. l A place free of exposure to radiation. l No discharge of high voltage (more than 500 V)

(If more than 500 V is discharged, contact Seiko Instruments).

l Install the STP pump securely so that foreign

particles will easily fall into the STP pump (Ex. : Si wafers or samples are positioned above the STP pump) (To prevent foreign particles from falling int o the STP pump, design a shield plate with large conductance).

3-3

STP-H600/H1000 Series Instruction Manual

3.2.2 Installation Area

Leave enough space for the following in addition to that for the STP pump:

· Space for maintenance and inspection

· Space for connecting cables

◇ The minimum bending radius of the STP connection cable is 150 mm (see

Figure 16.1, "External Appearance of the STP Pump" [bending dimensions of the STP connection cable]). DO NOT excessively bend the cables and beware of any obst acles when installing the STP pump. Also, leave enough space to install other cables without bending them excessively.



3.2.3 Bench

A bench must be prepared by the customer to secure the STP pump. The shape and size of the bench differ de pe nding upo n t he t ype of STP pump. Follow the precautions of the WARNING, CAUTION, or NOTICE (See Section 3.3.3, "How to Secure the STP Pump").

◇ The STP pump is provided with a high-speed rotor. Any internal

abnormality/error may result in a jump in rotational torque leading to personal injury or peripheral equipment damage. Design and secure the bench for the STP pump so that it can withstand the maximum torque generated due to the occurrence of an abnormality/error. Refer to Section 3.3.3 “How to Secure the STP Pump” for abnormal torque.

◇ Secure the customer-prepared bench and the vacuum equipment on the floor or

peripheral equipment and other equipment in accordance with the customer application. NEVER move them while the STP pump is in operation. Use fitting bolts with a strength equal to or higher than SUS 304 strength class

: 50 or more as a target)

. (Tensile

◇ The screw hole for leg for securing the STP pump is M12

, and the depth is 24mm (8 positions). For the external appearance of the STP pump, see Figure 16.1, "External Appearance of the STP Pump."

:JIS

3-4

STP-H600/H1000 Series Instruction Manual

CAU

3.3 How to Install the STP Pump

Install the STP pump to the vacuum equipment as shown in Figure 3.2.



The STP pump can be

installed through the damper (optional accessory).

To Power Supply

STP Control Unit

Front Panel

Figure 3.2 Installation of the STP Pump to the Vacuum Equipment

Vacuu m Equipment

Power Cable

Emergency

Vent. Valve Cable

STP Connection Cable

Motor Connection Cable

Ground Cable

Remote Cable

To Vacuum Equipment Control Circuit

Emergency

Vent.Valve

Inlet Port

STP Pump

Inlet Port Flange

Vacuum Valve

Dry Pump,etc.

Aux ilia ry

Pump

Outlet Port

Leg

◇ Chlorine or fluorine system gases can be used in chemical specific pumps (type

C). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Seiko Instruments.

◇ NEVER use corrosive gases (chlorine, fluorine, or ot her system gases) in the

STP-H600/H1000 pump or other models without anti-corrosion treatment (see Section 1.1, "Usable Gases").

◇ When you use the STP pump in a place subjected to exposure to radiation,

contact Seiko Instruments.

◇ DO NOT open the STP pump through the flange to atmospheric air while the

STP pump is running. If atmospheric air flows into the STP pump, it may not function normally.

◇ Depending upon the type of the auxiliary pump used, atmospher ic air may

reverse flow into the STP pump when t he auxiliar y pump stops. Attach a vacuum valve to the middle of the piping between the STP pump outlet port flange and the auxiliary pump, and close the vacuum v alve when the auxiliary pump stops.

3-5

STP-H600/H1000 Series Instruction Manual

CAU



NOTICE

◇ The STP pump cannot be used with the outlet port open to atmospheric air.

Always use the auxiliary pump (dry pump or similar one).

◇ Use an auxiliary pump with a pumping speed of 240 L/min or more. ◇ Depending upon the type of the auxiliary pump used, oil vapor may contaminate

the inside of the STP pump. Some oil viscosity could cause a malfunction when there is a strong reverse flow of oil. Take the following measures to ensure the correct flow of oil:

· Attach a vacuum valve to the middle of the piping betw een t he STP pump outlet port flange and the auxiliary pump.

· Attach an absorption trap adjacent to the vacuum v alve.

3.3.1 Cleaning the Seal

Inspect the seals of inlet and outlet port flanges for dirt or oil spots befo re inst alling the STP pump in the vacuum equipment. Take the following measures for cleaning the seals:

· Clean off with a pure gas.

· Wipe with proper solvent (such as alcohol).

◇ A splinter shield is attached to the inlet port flange to prevent foreign particles

from falling into the STP pump. Always leave the splinter shield attached during operat ion.

NOTICE

◇ The splinter shield cannot perfectly prev ent foreign materials from falling into the

STP pump. DO NOT install the STP pump in such a manner that foreign materials can easily fall into it (for example, Si wafers or samples are positioned above the STP pump). If installing the STP pump in such a manner, always attach a shield plate with sufficient conductance above the STP pump to prevent foreign materials from falling into it. Foreign materials falling into the STP pump through the splinter shield may result in product damage.

◇ Be careful not to scratch the flange of the STP pump.

Check whether or not there are scratches on the surface, before installing the STP pump.

3-6

STP-H600/H1000 Series Instruction Manual

3.3.2 STP Pump Installation Positions

The STP pump can be installed vertically, horizontally, upside-down and slanted.

Upside-down

Horizontal

STP Pump

Slante d



Vertical

Figure 3.3 STP Pump Installation Positions

When installing the STP pump in a horizontal or slanted position, it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity. This makes it possible to reduce the load on the magnetic bearing and the heat generated by the STP pump.

Outlet Port

Direction of Gravity

Figure 3.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump

Outlet Port

3-7

3.3.3 How to Secure the STP Pump

◇ The STP pump is provided with a high-speed rotor. The worst-case failure may

result in a jump in rotational torque leading to personal injury or peripheral equipment damage. The method of securing the STP pump will depend on the installation requirements. Secure the STP pump to the vacuum equipment as follows:

◇ Design and secure the mounting for the STP pump so that it can withstand the

maximum rotational torque. Refer to

STP-H600/H1000 Series Instruction Manual

Table 3.2 for torque in pump abnormality.



Secure the inlet port

Damper

with bolts

with Claw Clamps

Refer to “1) When se curing the inlet port with bolts”

Refer to “2) When se curing the inlet port flange wi th claw clamps”

Refer to “3) When installing the damper in the inlet port flange”

◇ In some cases, the damper and the claw clamper securing cannot be used

depend on the type of the STP pump.

◇ Refer to Table 3.1 for tightening torque of the bolt.

Table 3.1 Tightening torque of bolt

Size of bolt Tightening torque of bolt (Nm)

M8 12.0 M10 24.1 M12 42.1

◇ When making the leg to secure the base, make them shortened more than ones

attached to the STP pump. Use a material that has a tensile strength of 600N/mm

or more.

◇ When securing the base, use stainless steel securing bolts with a tensile

strength class is 70 or more.

◇ When using any securing method other than that specified in this manual,

contact Seiko Instruments.

3-8

+ 94 hidden pages