Scrollvac SC 5 D, SC15 D, SC 30 D, SC 60 D Operating Instructions Manual

SCROLLVAC

SC 5 D, SC15 D, SC 30 D, SC 60 D

Oil-free Vacuum Pump

Operating Instructions GA01423_002_C0

Part Nos.

133 000

133 001

133 002

133 003

133 004

133 008

133 100

133 101

133 102

Contents

2

GA01423_002_C0 - 10/2016 - © Leybold

Page

0 Important Safety Information 4

0.1 Mechanical Hazards 4

0.2 Electrical Hazards 4

0.3 Thermal Hazards 4

0.4 Hazards Caused by Materials and Substances 5

0.5 Danger of Damages to the Pump 5

1 Description 8

1.1 Design and Operation 8

1.2 Component Designations of the Individual Pump Types 10

1.2.1 Ordering Information 10

1.3 Technical Data 11

1.3.1 Motor Data 12

1.3.2 Dimensions 15

2 Transport and Storage 18

3 Installation 19

3.1 Checking the Product 19

3.2 Conforming Use 20

3.3 Ambient Conditions 21

3.4 Setting up the Pump 22

3.5 Electrical Connections 23

3.5.1 Single-phase Motors 23

3.5.2 Three-phase Motors 26

3.6 Connection to the Vacuum System 29

4 Operation 30

4.1 Start-up 31

4.2 Pumping 32

4.3 Purge Gas Operation (pumping of vapours) 32

4.4 Shutdown 34

5 Maintenance 35

5.1 Table - Maintenance 37

5.2 Leybold Service 38

5.3 Waste Disposal 38

6 Troubleshooting 39

7 Spare Parts 40

EC Declaration of Conformity 41

Safety Information

3

GA01423_002_C0 - 10/2016 - © Leybold

Original Operating Instructions.

Obligation to Provide Information

Before installing and commissioning the equipment, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.

The Leybold SCROLLVAC has been designed for safe and efficient opera­tion when used properly and in accordance with these Operating Instructions.
It is the responsibility of the user to carefully read and strictly observe all safe­ty precautions described in this section and throughout the Operating
Instructions. The pump must only be operated in the proper condition and
under the conditions described in the Operating Instructions. It must be oper­ated and maintained by trained personnel only. Consult local, state, and
national agencies regarding specific requirements and regulations. Address
any further safety, operation and/or maintenance questions to our nearest
office.

DANGER indicates an imminently hazardous situation which, if not avoid­ed, will result in death or serious injury.

WARNING indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.

CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.

NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.

We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.

Retain the Operating Instructions for further use.

NOTICE

DANGER

WARNING

CAUTION

NOTICE

Safety Information

4

GA01423_002_C0 - 10/2016 - © Leybold

0 Important Safety Information

0.1 Mechanical Hazards

1 Avoid exposing any part of the human body to the vacuum.

2 Never put fingers or foreign matter into the pump‘s inlet or the clear-

ance of fan blades. If done, it can cause injury.

3 Make sure that the gas flow from the exhaust port is not blocked or

restricted in any way.

4 Pumps with single-phase motors have an internal thermal protector.

These motors restart without warning after the protector trips back.

0.2 Electrical Hazards

1 Wiring must be done by a qualified electrician. Otherwise there is the

risk of suffering an electric shock.

2 Prevent short-circuits with a ground fault circuit interruptor (GFCI) of

proper capacity. Failure to do so can result in electric shock or fire.

3 Be sure to install a main disconnect switch. Failure to do so can result

in damage, fire, or injury.

4 Be sure to disconnect the electric source before changing the wiring or

before an inspection. Failure to do so can result in electric shock or
damage by the rotating fan.

5 Ensure proper grounding of the pump. Otherwise there exists the risk

of suffering an electric shock or igniting a fire.

6 Install in an area which is not exposed to moisture such as rain or

steam. Exposure to moisture can cause eIectric shock.

7 Be sure to check wiring diagram before connecting a power supply.

Failure to do so can result in damage.

8 Be sure to disconnect the electric source before changing the wiring or

before an inspection. Failure to do so can result in electric shock or
damage by the rotating fan.

0.3 Thermal Hazards

1 Do the maintenance after the pump has fully cooled down. Performing

maintenance on a hot pump can cause burns.

WARNING

DANGER

CAUTION

Safety Information

5

GA01423_002_C0 - 10/2016 - © Leybold

0.4 Hazards Caused by Materials and Substances

1 Never pump toxic, explosive, flammable, corrosive gases, chemicals,

solvents or powders. Flowing substances, explosion or fire can cause
bodily injury.

2 Install the pump in an area without explosive or flammable substances.

Otherwise, it can cause explosion or fire.

0.5 Danger of Damages to the Pump

1 Ask a specialist to perform repairs. Otherwise there exists the risk that

the pump may fail, is damaged or its service life is severely reduced.
Trained customers may perform maintenance themselves.

2 Use at ambient temperatures of 5 - 40 °C (during operation). Operating

outside of this range can cause damage or shorten service life.
Always operate the pump with the fan and terminal covers in place.
Always operate the single-phase pumps with the capacitor cover in
place.

3 Conduct periodic maintenance and inspections. Failure to do so can

cause damage or reduced service life.

4 Be sure to close the isolation valve between pump and vacuum sys-

tem (chamber) during startup and shutdown. If this valve is open,
debris attached to the inside of pump can be drawn back into the vac­uum chamber.

DANGER

NOTICE

Safety Information

6

GA01423_002_C0 - 10/2016 - © Leybold

Fig. 0.1 Placement of the warning stickers

Electric
shock

Terminal cover

Capacitor
cover

SC 5 D

Single-phase

SC 15 D

Single-phase

SC 15 D

Three-phase

Always keep warning stickers clean. If they become dirty or lost, replace them with new ones.
If you need stickers, contact Leybold.

Electric
shock

Terminal cover

Capacitor

cover

Cover for operating
hours counter

Electric
shock

Terminal cover

Cover for operating hours
counter

Safety Information

7

GA01423_002_C0 - 10/2016 - © Leybold

SC 30 D

Single-phase

SC 30 D

Three-phase

Electric
shock

Terminal
cover

Cover for operating
hours counter

Capacitor cover

Electric
shock

Terminal cover

Cover for operating hours
counter

Fig. 0.2 Placement of the warning stickers

Always keep warning stickers clean. If they become dirty or lost, replace them with new ones.
If you need stickers, contact Leybold.

SC 60 D

Three-phase

Electric
shock

Terminal cover

Cover for operating hours
counter

Description

8

GA01423_002_C0 - 10/2016 - © Leybold

1 Description

1.1 Design and Operation

The SCROLLVAC vacuum pumps are oil-free vacuum pumps. Each
SCROLLVAC consists of two Archimedes spirals offset within each other by
180 °. Thus several crescent-shaped pockets of different sizes are created.
With the aid of an eccentric drive, the second spiral orbits about the fixed
spiral thereby reducing, respectively increasing the volume of the pockets
whereby the gases are conveyed from outside to inside thereby being com­pressed.

Fig. 1.1 Component designations (SC 5 D)

SC 5 D

Inlet

Fan

Motor

ON /OFF switch under the cover

Operating hours counter

Fixed scroll (1)

Orbiting scroll

Venting connection

Fixed scroll (2)

Fan

Fan cover

Inlet flange

(DN 25)

Fan cover

Venting connection

Exhaust flange

(DN 16)

Carrying handle

Motor

Direction indicating arrow

Motor terminal box

Description

9

GA01423_002_C0 - 10/2016 - © Leybold

Fig. 1.2 Component designations (SC 15 D/30 D)

SC 15 D

SC 30 D

Motor

Direction indicating arrow

Direction indicating arrow

Motor

Motor terminal box

Motor terminal box

Operating hours counter

Operating hours counter

Fan cover

Fan cover

Carrying handle

Venting connection

Rubber support

Outlet flange
DN 16

Inlet flange
DN 25

Crane eyelet

IN plate

OUT plate

Frame

Inlet flange
DN 40

Venting connection

Outlet flange
DN 25

Description

10

GA01423_002_C0 - 10/2016 - © Leybold

1.2 Component Designations of the Individual Pump Types

1.2.1 Ordering Information

Part No.
SC 5 D, single-phase motor, cable with Schuko plug 133 000
SC 15 D, single-phase motor, cable with Schuko plug 133 001
SC 30 D, single-phase motor, cable with Schuko plug 133 002

SC 15 D, three-phase motor 133 003
SC 30 D, three-phase motor 133 004
SC 60 D, three-phase motor 133 008

SC 5 D, single-phase motor, cable with NEMA plug 133 100
SC 15 D, single-phase motor, cable with NEMA plug 133 101
SC 30 D, single-phase motor, cable with NEMA plug 133 102

Fig. 1.3 Component designations (SC 60 D)

Belüftungsanschluss

Einlassflansch DN 40 KF

Auspuffflansch DN 40 KF

Ventilatorabdeckung

Drehrichtungsmarkierung

Motor

Motoranschlusskasten

Betriebsstundenzähler

Rahmen

Kranöse

SC 60 D

Fan opening

Direction indicating arrow

Motor

Motor terminal box

Fan cover

Venting connection

Outlet flange DN 40 KF

Inlet flange DN 40 KF

Operating hours counter

Crane eyelet

Frame

Description

11

GA01423_002_C0 - 10/2016 - © Leybold

1.3 Technical Data

Model SC 5 D SC 15 D SC 30 D SC 60 D
50 Hz 60 Hz 50 Hz 60 Hz 50 Hz 60 Hz 50 Hz 60 Hz

Displacement

l · min-1 90 108 250 300 500 600 1000 1200
(swept volume) m3 · h-1 5 6,48 15 18 30 36 60 72
cfm 3.1 3.8 8.8 10.6 17.6 21.2 35.3 42.3

Pumping speed

1

l · min-1 80 93 210 230 420 500 880 1020
m3 · h-1 4,8 6,2 13,6 16,4 26,3 31,5 52 62
cfm 2.8 3.6 8 9.6 15.4 18.5 31.0 36.0

Ultimate pressure

Pa  ≤5   ≤1.6   ≤1.0   ≤1.0   
  mbar  ≤0.05   ≤0.016   ≤0.01   ≤0.01  
  Torr ≤0.037  ≤0.012  ≤0.0075 ≤0.0075

Leak rate3 mbar · l · s-1 1.0 · 10-6 1.0 · 10-6 1.0 · 10

-6

1.0 · 10

-4

Max. inlet pressure Atmospheric pressure

Ambient operating °C 5 - 40 5 - 40 5 - 40 5 - 40
temperature range

Gas temperature at inlet °C max. 50 max. 50 max. 50 max. 50

Inlet connection DN 25 25 40 40

Exhaust connection DN 16 16 25 40

Cooling Air cooling

Protection class IP 20 20 20 20

Class of equipment Class 1

Miscellaneous With operating hours counter und
purge gas connection

Water vapour tolerance

g/day 5 25 25 25
at 25 °C, humidity 60 %,
with opened purge gas4 l · min-1 9 10 10 10

Description

12

GA01423_002_C0 - 10/2016 - © Leybold

1.3.1 Motor Data

Motor data SC 5 D

Type Single-phase induction motor / Motor 4P / totally enclosed
insulation class B IP 44
thermal protector TP 212 - automatic reset type

Power consumption W 150

Voltage V 100 115 200 230

Rated current 50 Hz A 2.6 – 1.3 1.6
60 Hz A 2.1 2.2 1.1 1.1

Speed at 50 Hz min-1 1430 – 1430 1440
60 Hz min-1 1730 1740 1730 1740

Noise level2at1m dB(A) ≤52

withpurgegasopen(ON) dB(A) ≤57

Direction of inlet Vertical

Dimensions (L x W x H) mm 308 x 214 x 225

Weight kg 14

Part numbers 133 100 133 000

Motor Data SC 15 D

Type Single ph. induction motor 4P Three-phase induction motor5 4P
totally enclosed totally enclosed
insulation class B / IP 44 insulation class B / IP 44
thermal protector TP 212
automatic reset type

Power consumption kW 0.4 0.4

Voltage V 100 115 200 230 200 208 230 380 400 415 460

Rated current 50 Hz A 4.8 - 2.6 2.4 1.6 - - 0.9 0.9 1.0 ­ 60 Hz A 4.8 4.3 2.8 2.4 1.9 1.9 1.8 - - - 1.0

Speed at 50 Hz min-1 1440 - 1430 1450 1420 - - 1440 1440 1440 ­ 60 Hz min-1 1710 1740 1700 1730 1660 1660 1690 - - - 1720

Noise level2at1m dB(A)  ≤58

withpurgegasopen(ON) dB(A) ≤66

Direction of inlet Vertical

Dimensions (L x W x H) mm 400 x 252 x 336 370 x 252 x 336

Weight kg 25 23

Part numbers 133 101 133 001 133 003

Description

13

GA01423_002_C0 - 10/2016 - © Leybold

Motor Data SC 30 D

Type Single-phase induction motor 4P Three-phase induction motor5 4P
totally enclosed totally enclosed
insulation class B / IP 44 insulation class B / IP 44
thermal protector TP 212
automatic reset type

Power consumption kW 0.6 0.6

Voltage V 100 115 200 230 200 208 230 380 400 415 460

Rated current 50 Hz A 8.5 - 4.3 3.9 2.7 - - 1.57 1.57 1.63 ­ 60 Hz A 10 8.6 4.8 4.0 2.8 2.6 2.5 - - - 1.47

Speed at 50 Hz min-1 1430 - 1430 1450 1460 - - 1470 1470 1470 ­ 60 Hz min-1 1660 1720 1690 1730 1740 1740 1760 - - - 1770

Noise level2at1m  dB(A) ≤62      ≤60       

withpurgegasopen(ON) dB(A) ≤70      ≤68

Direction of inlet Horizontal (arranged at the side)

Dimensions (L x W x H) mm 443 x 328 x 372 (443 x 298 x 397) 372 x 328 x 372 (372 x 298 x 397)

Weight kg 44 38

Part numbers 133 102 133 002 133 004

Motor Data SC 60 D

Type Three-phase induction motor5 4P
totally enclosed
insulation class B / IP44

Power consumption kW 1.4

Voltages V 200 208 230 380 400 415 460

Rated current 50 Hz A 5.5 -- -- 3.3 3.6 3.8 --
60 Hz A 5.8 5.8 5.7 -- -- -- 3.5

Speed at 50 Hz min-1 1460 -- -- 1470 1470 1470 --
60 Hz min-1 1730 1740 1750 -- -- -- 1760

Noise level2 at 1m dB(A) 67
with purge gas open (ON) dB(A) 74

Direction of inlet Horizontal (arranged at the side)

Dimensions (L x W x H) mm 467 x 390 x 421

Weight kg 60

Part number 133 008

*Cannot operate at 115V/50 Hz, 208V/50Hz, 230V/50Hz, 460V/50 Hz, 380V/60 Hz or 415V/60 Hz

Note 1: Pumping speed remains unchanged independently of whether the purge gas inlet is open or closed
Note 2: Noise level is measured at ultimate pressure in an anechoic room
Note 3: The leak rate is measured when the pump is stopped and the purge gas supply is closed (condition as delivered)
Note 4: When the pump is delivered, the purge gas inlet is closed
Note 5: The three-phase motors do not have internal thermal protection. Be sure to install the protection from the side of the remaining system.

Description

14

GA01423_002_C0 - 10/2016 - © Leybold

Fig. 1.4 Pumping speed curves of the SCROLLVAC SC 5 D to SC 60 D

0,10

1,00

10,00

100,00

0,0010,010 0,100 1,00010,000 100,000 1000,000

50 Hz with and without Purge
60 Hz with and without Purge

SC5D

SC15D

SC30D

SC60D

Pumping Speed

Pressure

m3/h

mbar

Description

15

GA01423_002_C0 - 10/2016 - © Leybold

1.3.2 Dimensions

Fig. 1.5 Dimensional drawing of the SC 5 D

SC 5 D

(Dimensions in mm)

Description

16

GA01423_002_C0 - 10/2016 - © Leybold

Fig. 1.6 Dimensional drawing of the SC 15 D

3-phasig

1-phasig

SC 15 D

(Dimensions in mm)

Three-phase

Single-phase

Description

17

GA01423_002_C0 - 10/2016 - © Leybold

Fig. 1.7 Dimensional drawing of the SC 30 D

3-phasig

1-phasig

SC 30 D

Fig. 1.8 Dimensional drawing of the SC 60 D

390

218

285

163

320

467

133

421

35055

42

168

SC 60 D

(Dimensions in mm)

Three-phase

Single-phase

Transport and Storage

18

GA01423_002_C0 - 10/2016 - © Leybold

2 Transport and Storage

Lift the pump only at the provided handles, respectively crane eyelets.

Exclusively use lifting facilities with sufficient lifting capability. Never stand
under the hanging pump when it is being moved.

Avoid any other orientations during transportation.

CAUTION

Installation

19

GA01423_002_C0 - 10/2016 - © Leybold

3 Installation

3.1 Checking the Product

Check that the package is right-side-up and then open it.

Check that model of the product is one that you ordered.

Check that there is no damage. If there is any damage, file a damage claim
with the carrier.

Remove inlet blank flange and outlet blank flange. If you operate the pump
with blank flanges in place, it can cause damage.

Check that the silencer for the purge gas inlet is present in the plastic bag.

NOTICE

Fig. 3.1 Product check (SC 5 D / SC 15 D)

SC 5 D

SC 15 D

Plastic bag

Silencer

Clamp
Blank flange
O-ring

Inlet

Outlet

Clamp

Blank flange

O-ring

Plastic bag

Silencer

Clamp
Blank flange

O-ring

Clamp

Blank flange

O-ring

Inlet

Outlet

Installation

20

GA01423_002_C0 - 10/2016 - © Leybold

3.2 Conforming Use

SCROLLVAC pumps can pump gases and vapours, and evacuate vessels or
vacuum systems in the fine vacuum range.

The pumps are suited for pumping water vapour within the specified water
vapour tolerance limits. Avoid vapours that can condense into liquids when
being compressed inside the pump, if these substances exceed the vapour
tolerance of the pump.

Fig. 3.2 Product check (SC 30 D / SC 60 D)

Blank flange

O-ring

Clamp

Inlet

Outlet

SC 60 D

SC 30 D

Plastic bag

Silencer

Clamp

Blank flange

O-ring

Clamp

Blank flange

O-ring

Inlet

Outlet

Plastic bag

60 D

60 72

8

1,4

Installation

21

GA01423_002_C0 - 10/2016 - © Leybold

3.3 Ambient Conditions

Danger of electric shock.
Install in an area which is not exposed to moisture such as rain or steam.
Moisture on electric power connections can cause bodily injury by short
circuit or electric shock.

Danger of explosion and fire.
Install in an area which is not exposed to explosives, flammable gas, or
other related hazards. Otherwise, the pump can cause an explosion or fire.

Operate at an ambient temperature of 5 °C - 40 °C. Operating outside of
this ambient temperature range can cause damage, fire or failure.

Ensure proper ventilation.

Install in a well-ventilated area. Poor ventilation can cause abnormal over­heating, fire or failure since the scroll pump is air-cooled.

Necessary ventilation air:

SC 5 D over 2 m3 · min

-1

SC 15 D over 4 m3 · min

-1

SC 30 D over 8 m3 · min

-1

SC 60 D over 12 m3 · min

-1

Install in a proper location. Install in an area which is not exposed to dust or
corrosive gas. Failure to install in a proper location can result in damage or
failure.

Debris can clog silencers reducing the effectiveness of the purge gas.

Install in an area which is not exposed to sunshine. Direct sunshine can
cause high temperatures and failure.

DANGER

DANGER

Temperature

Avoid dust

Avoid direct sunlight

Installation

22

GA01423_002_C0 - 10/2016 - © Leybold

3.4 Setting up the Pump

The SC 5 D and SC 15 D are equipped with a carrying handle for transport­ing. The SC 30 D and SC 60 D are provided with a crane eyelet for trans­porting and placement.

Use lifting devices with sufficient carrying capacity. Never stand beneath
the suspended pump while it is being moved.

The place where the pump is installed should be free of dust or steel, stone
and wood dust. Moreover, the location should be free of corrosive gases.

Install the pump on a stable horizontal floor surface (sloping by no more than
5 °, see Fig. 3.3). Installing the pump on a sloping surface can cause the
pump to fail.

If the floor is unstable, secure the pump by using

■

4 x dia. 7 mm holes in the pump base (SC 5 D) or

■

4 x dia. 11 mm holes in the pump base (SC 15 D) or

■

4 x holes in the pump base for M10 screws and (SC 30 D)

■

4 x holes in the pump base for M10 screws and (SC 60 D).

When not observing these installation conditions, damage may occur, or
performance or service life may be impaired.

CAUTION

NOTICE

Fig. 3.3 Install on a firm, level floor

Angle < 5°

Installation

23

GA01423_002_C0 - 10/2016 - © Leybold

3.5 Electrical Connections

Wiring must be done by a qualified electrician. Otherwise, electric shock
or fire may occur.

Turn off the incoming main electrical power before wiring the pump. Failure
to do so can cause injury from electric shock.

Check eIectric power and voltage before doing the wiring.

The three-phase motor can be operated off two different mains voltages:
either 200/380V 50 Hz or 208/460 V 60 Hz.

The single-phase motor can be operated off two different mains voltages:
either 100/200V 50 Hz or 115/208-230V 60 Hz.

Check mains voltage and wiring.

3.5.1 Single-phase Motors

Be sure to install a reliable main disconnect switch (or breaker) for emer­gency stop. In addition, shut off the SC 5 D by turning off the switch on
the motor. Failure to do so can cause damage or fire.

The single-phase motor has an internal thermal protector. The motor
restarts without warning after the protector trips back.

CE Requirements

Min. circuit current capacity of conductor is 10 A. Max. branch circuit breaker
is 15 A (industrial rated).

Protect the motor by installing the recommended breaker (refer to Table 1).
Failure to do so can cause electrical shock or fire.

DANGER

NOTICE

DANGER

DANGER

Installation

24

GA01423_002_C0 - 10/2016 - © Leybold

Table 1: Single-phase connection

V Hz Rated current for the mains circuit breaker - A

SC 5 D SC 15 D SC 30 D

100 50 3.0 6.0 10.7

100 60 2.5 6.0 12.5

115 60 2.5 5.4 10.8

200 50 1.5 3.0 5.4

200 60 1.3 3.2 6.0

230 50 1.9 2.7 4.9

230 60 1.3 2.7 5.0

Installation Involving Different Mains Voltages

This vacuum pump must be equipped with a mains circuit breaker in accord­ance with requirements of EN 60204-1. It is recommended to use a circuit
breaker as main breaker which is suitable for isolation according to EN
60947-2 and is equipped with an operating handle which is lockable in the
OFF position and complies with the other requirements of EN 60947-3.

Remove the terminal cover of the motor and check the terminal block inside.
The wiring diagram is shown inside the terminal cover.

You can change between 100-115 V and 200-230 V connection by changing
the links. If you want to change the connection, remove the four nuts for the
power terminal and change the links as illustrated in Figure 3.4. Two links are
used at the 200-230 V connection. Connect the power cord through the
cable-gland on the bottom side of terminal blocks.

SC 5 D

SC 15 D / SC 30 D

Fig. 3.4 Single-phase connection

200-230 V mains connection
(EU wiring)

100-115 V mains connection
(US wiring)

Connection for the electric power supply

Link (two pieces)

Terminal block

Grounding connection

M5 screw

M4 nut

Installation

25

GA01423_002_C0 - 10/2016 - © Leybold

Activate the emergency stop by the main disconnect switch or breaker.

Protect the motor with a breaker.

Use power cord and ground wire rated at greater than 10 A.

Use round type terminal.

Fit cable-gland.

Connect ground wire to ground terminal.

After each modification of power supply cable wiring a new electrical safety
test has to be done according to the national rules.

Operate pump with inlet open, and check that air comes out from outlet.

If you plan to switch the pump ON-OFF with remote control, check the
pump’s rotation direction before connecting it to the vacuum system.

When checking rotation direction, avoid dropping foreign matter into inlet.
Dropping foreign matter into the pump can cause failure.

DANGER

NOTICE

Fig. 3.5 Checking the direction of rotation after having provided the wiring

Viewed from the motor side, clockwise direction of rotation

Direction of rotation

Direction indicating arrow

Motor

Fig. 3.6 Prevent foreign matter from entering
into the pump

Foreign matter

Inlet

Installation

26

GA01423_002_C0 - 10/2016 - © Leybold

3.5.2 Three-phase Motors

For SC 15 D / 30 D / 60 D only

Be sure to install a reliable main disconnect switch (or breaker) which
meets the IEC standard for emergency stop. Failure to do so can cause
damage or fire.

CE Requirements

The 3-phase motor is not protected. External protection must be provided.

■

Min. circuit current capacity of the conductors is:
SC 15 D - 3-phase 7 A
SC 30 D - 3-phase 15 A
SC 60 D - 3-phase 15 A

■

The main circuit breaker must be rated for the following maximum currents:
SC 15 D - 15 A
SC 30 D - 15 A
SC 60 D - 15 A

Protect the motor by installing the recommended breaker. Failure to do so
can result in injury from electrical shock or fire.

Use a power cord and ground wire of over 2 mm2 (rated at 7 A, 3-phase for
SC 15 D) / (rated at 15 A, 3-phase for SC 30 D) / (rated at 15 A, 3-phase for
SC 60 D).

When using power cords which are only rated for lower currents, there then
exists the risk of excessively heating the wires (risk of starting a fire).

Firmly fit proper round crimp style terminals to electric cord using the
appropriate tool and connect to motor terminal. If the connection is loose,
it can cause bodily injury or electrical fire

DANGER

DANGER

Fig. 3.7 Three-phase connection

SC 15 D / 30 D / SC 60 D

208-230 V connection

(as delivered)

(Asia / USA)

380-460 V connection

(Europe)

Links

Grounding connec­tion screw M5

Terminal block

Mains connection
Nut M4

Installation

27

GA01423_002_C0 - 10/2016 - © Leybold

Table 2: Three-phase connection

V Hz Rated current for mains power circuit breaker- A

SC 15 D SC 30 D SC 60 D

200 50 1.8 3.1 5.9

200 60 2.2 3.2 6.2

208 60 2.2 3.0 6.2

230 60 2.2 2.9 6.1

380 50 1.1 1.8 3.7

415 50 1.2 1.9 4.0

460 60 1.2 1.7 3.9

Be sure to connect the electric cord to the terminals by using cable-gland
the 20 mm dia. hole at motor terminal box. If the connection is loose, it can
cause bodily injury or electrical fire.

Firmly connected the ground cable of the power cord within the motor ter­minal box. If this connection is loose, this may then cause injury or electric
shock.

You can change to 208-230 V or 380-460 V connection by changing the
links. It is wired to 208-230 V connection when delivered to you. If you want
to change to 380-460 V connection, remove the electric source terminal M4
nuts and change the links as illustrated in Figure 3.8. Connect the power
cord through the cable-gland on the bottom side of terminal box. Connect
L1-L2-L3 to U1-V1-W 1 terminals of the motor, respectively.

Activate the emergency stop by the main disconnect switch or breaker.

Protect the motor with a breaker.

Use a power cord and ground wire rated for currents over 10A.

Use round type terminal.

Fit cable-gland.

Connect ground wire to ground terminal.

After each modification of power supply cable wiring, a new electrical safe­ty test has to be done according to the national rules.

DANGER

DANGER

Installation

28

GA01423_002_C0 - 10/2016 - © Leybold

Operate the pump with inlet open, and check that air comes out from outlet.

If you plan to switch the pump ON-OFF with remote control, check the
pump’s rotation direction before connecting it to the vacuum system.

When checking rotation, avoid dropping foreign matter into the inlet.
Dropping foreign matter into the pump can cause failure.

If the direction of rotation is wrong, ensure that the incoming power is OFF
and then interchange two of the input leads.

NOTICE

Fig. 3.8 Checking the direction of rotation after having provided the wiring

Viewed from the motor side, clockwise direction of rotation!

Direction of rotation

Direction indicating arrow

Motor

Fig. 3.9 Prevent foreign matter from entering into the pump

Foreign matter

Inlet

Installation

29

GA01423_002_C0 - 10/2016 - © Leybold

3.6 Connection to the Vacuum System

Inlet of the SC 5 D is DN 25 and the exhaust is DN 16.

Inlet of the SC 15 D is DN 25 and the exhaust is DN 16.

Inlet of the SC 30 D is DN 40 and the exhaust is DN 25.

Inlet of the SC 60 D is DN 40 and the exhaust is DN 40.

Install an isolation valve between the vacuum chamber and the pump’s inlet
to prevent the drawback of debris from the vacuum pump into the vacuum
chamber during start-up or shutdown.

We recommend the use of an automatic valve as isolation valve which closes
during power failure to prevent the drawback of debris from inside the pump
into the vacuum chamber.

Install a purge gas valve between the isolation valve and the pump’s inlet.
Opening this purge gas valve during operation removes dirt and water vapour
from the pump.

Use the clean connecting tubing between vacuum chamber and vacuum
pump. We recommend the use of flexible tubing between the inlet of pump
and the vacuum chamber so that the pump’s vibration is not transmitted to
the vacuum chamber.

When connecting an exhaust line to the outlet of the vacuum pump, we
recommend the following maximum straight length:

SC 5 D: 30 m DN 16 line

SC 15 D: 5 m DN 16 line

SC 30 D: 15 m DN 25 line

SC 60 D: 40 m DN 40 line

Make sure that the exhaust line is not clogged during operation.

Ensure that the pressure at the pump’s exhaust is at atmospheric pressure.

Fig. 3.10 Block diagram of the connection to the vacuum system

Exhaust line

Vacuum chamber

Isolation valve

(automatic valve)

Additional purge

gas valve

Inlet

Outlet

Vacuum pump

Operation

30

GA01423_002_C0 - 10/2016 - © Leybold

4 Operation

Do not pump hazardous gases to humans, or explosive, flammable, toxic
or corrosive gases or substances which contain chemicals, solvents or
powders. Pumping such gases can cause bodily injury from exposure to
harmful substances, explosion or fire.

Never put your fingers or foreign matter into ventilation holes of the fan
cover, motor set or clearance between cooling fans of stage 1 and stage

2. If done, you can injure your fingers or foreign matter can blow into your
eyes.

In order to ensure an adequate air supply, the front side of SCOLLVAC SC
60 D must not be obstructed.

DANGER

NOTICE

Pump clean gas!

Pump clean gas!

SC 5 D / SC 15 D

SC 30 D / SC 60 D

Fig. 4.1 Never pump hazardous gases

Fig. 4.2 Hazardous points on the pump

Finger, foreign
matter

Fan cover

Ventilation opening
for the motor

Finger, foreign
matter

Finger, foreign matter

Clearance for cooling fins of stage 1 and stage 2

Operation

31

GA01423_002_C0 - 10/2016 - © Leybold

Never remove or alter safety equipment or covers.
Removing or altering this equipment can cause electric shock or bodily
injury by rotating objects.
Operate at the pump only with the fan cover and the terminal cover in
place.
Operate in the single-phase pump only with the capacitor cover in place.

4.1 Start-up

Remove blank flanges from the inlet and outlet before starting the pump.
Operation with blank flanges can cause damage.

If you will be pumping humid air or condensable vapors, open the purge gas
valve (refer to Sec. 4.3) before starting the pump as described below.

The pump takes 6-8 hours to reach its ultimate pressure during its initial
start-up or after a long idle period.

Close the inlet isolation valve and continue operation for further 6-8 hours.
Open the purge gas valve for 3-5 seconds to atmosphere 2-3 times per hour.
While the pump was off, moisture may have entered the pump extending the
time needed to reach ultimate pressure.

Close the isolation valve between the vacuum pump and vacuum chamber
during start-up and shutdown of pump. Otherwise, debris from the pump
can be drawn back into the vacuum chamber.

When restarting a pump that is already at operating temperature, open the
purge gas valve for 3-5 seconds to atmosphere before restarting the pump.
Otherwise, the pump‘s temperature can become unbalanced causing it to
fail.

DANGER

NOTICE

Fig. 4.3 Never alter equipment

Fan cover

Capacitor cover

Terminal
cover

Operation

32

GA01423_002_C0 - 10/2016 - © Leybold

ZProceed as follows to start the pump:

1. Close the isolation valve to prevent drawback of debris from the vacuum
pump into vacuum chamber (open the purge gas valve if one is installed).

2. Switch the vacuum pump ON.

3. Open the isolation valve (close purge gas valve if one is installed) and
pump the vacuum chamber.

4.2 Pumping

Operating the pump continuously near its ultimate pressure (for example,
backing a turbomolecular pump) can cause deposits of foreign matter or
moisture in the pump resulting in failure.

Operate the pump with the purge gas valve open (see Sec. 4.3 “Purge Gas
Operation”), or close the isolation valve and open the purge gas valve for 3-5
seconds to atmosphere several times once a day to remove foreign matter
from inside the pump.

Operate at specified temperature

When pumping vapour, the inlet gas temperature must be Iess than 50 °C.
When vapour temperature is more than 50 °C, install a chiller or trap in the
piping between the vacuum chamber and the pump to reduce the inlet
vapour temperature to less than 50 °C. Pumping vapour of over 50 °C can
cause failure.

4.3 Purge Gas Operation (pumping of vapours)

When pumping vapour, open the purge gas port of the SCROLLVAC. If you
pump vapour with the purge gas valve port closed, condensed moisture
remains in the pump, resulting in failure.

Use care to avoid damaging the purge gas valve port (especially the silenc­er).

When the purge gas valve is open, noise level increases and ultimate pres­sure deteriorates slightly.

Purpose of the Purge Gas

The moisture volume drawn into pump varies depending on the temperature
and pressure in the vacuum chamber. Pumping humid gas can result in
moisture condensing in the pump. This remaining moisture can cause a dete­rioration of the ultimate pressure or pump failure. When the vacuum chamber
contains gas with humidity of over 60 % RH, the pump must be operated
with the purge gas valve open. Operating the pump with the purge gas valve
open removes the moisture which allows the pump to reach its ultimate pres­sure.

NOTICE

Operation

33

GA01423_002_C0 - 10/2016 - © Leybold

Never change the purge gas conditions during operation (ON/OFF)

Open or close the purge gas valve port only after shutting down the pump.
Opening or closing the purge gas valve during operation can cause the
pump to fail and cause bodily injury.

To open the purge gas supply, shutdown the pump, remove the plug from
the purge gas port and screw the silencer into the purge gas port. (Fig. 4.4).

To close the purge gas valve, shutdown the pump. Remove the silencer from
the purge gas valve port and replace it with the plug. Lightly tighten the plug
with a wrench.

When supplying nitrogen gas or dry air to the purge gas valve port, set the
pressure equivalent to atmospheric pressure while keeping the flow below:

■

9 l · min-1 for the SC 5 D or

■

10 l · min-1 for the SC 15 D, SC 30 D and SC 60 D.

Exceeding a purge gas flow of 9 or 10 l/min cause pump failure.

NOTICE

SC 5 D

Fig. 4.4 Setting up the pump for purge gas operation

SC 15 D

Remove screw

Screw in
silencer

Remove screw

Screw in
silencer

Purge gas port

SC 30 D

Purge gas inlet

Remove screw

Screw in
silencer

SC 60 D

Remove
screw

Screw in
silencer

Purge gas inlet

Purge gas port

Operation

34

GA01423_002_C0 - 10/2016 - © Leybold

4.4 Shutdown

After vapour has been pumped, continue to operate the pump with the purge
gas valve open for over one hour. If you close the purge gas valve port or
stop the pump soon after vapour has been pumped, condensed moisture
remains in the pump, resulting in failure.

■

To prevent the drawback of debris from the vacuum pump into vacuum
chamber during shutdown, close the isolation valve (open the purge gas
valve if one is installed).

■

Switch the vacuum pump off.

When the pump stops, atmospheric air is drawn back from the purge gas
valve port to the inside of pump, and pressure inside pump rises to about
atmospheric pressure. To maintain vacuum in the vacuum chamber and pre­vent the drawback of debris from vacuum pump into vacuum chamber, close
the isolation valve to the vacuum chamber before shutting off the pump.

Maintenance

35

GA01423_002_C0 - 10/2016 - © Leybold

5 Maintenance

Neglecting maintenance and inspection can cause poor performance and
pump failure.

To remove debris accumulated in the vacuum pump, operate the pump seve­ral times for 3-5 seconds (once a day) with its inlet open to atmospheric air
(or open the purge gas valve if one is installed).

Allow the pump to cool down before doing maintenance. Performing main­tenance immediately after shutdown can cause bodily injury such as burns.

Be careful of automatic restart
The thermal protection on the single-phase motor automatically resets.
This motor restarts without warning after the protector trips back. Be sure
to switch off the electric power before maintenance or inspection.

Switch off electric source
Be sure to switch off the electrical power before maintenance or inspec­tion. Failure to do so can cause bodily injury from electric shock or rotating
objects.

More frequent maintenance is required if the ambient temperature is too high.
The maintenance interval is based on 5 - 40 °C ambient temperature and

25°Caverageyearlytemperature.

Shorten the maintenance interval if the ambient temperature is higher.
Otherwise, the pump may fail prematurely.

The maintenance schedule assumes that the pump is exposed to clean gas
only.

You must shorten the maintenance interval when pumping vapour since
vapour temperature, disposal volume, disposal frequency and substances in
the vapour influence the pump‘s operation.

NOTICE

DANGER

Maintenance

36

GA01423_002_C0 - 10/2016 - © Leybold

Fan cover

Fan

Electric shock!

During inspection and
maintenance work keep
the power supply
switched off.

SC 30 D / SC 60 D

SC 5 D / SC 15 D

Fig. 5.2

During inspection and
maintenance work keep
the power supply
switched off.

Electric shock!

Fan

Fan cover

Fan

Maintenance

37

GA01423_002_C0 - 10/2016 - © Leybold

5.1 Table - Maintenance

When the maintenance interval has been reached, contact Leybold to arran­ge the required maintenance. Never disassemble, reassemble or alter the
pump yourself. We are not responsible for any accidents caused by disas­sembly, assembly or alteration which was done by the user or non-specialist.

Maintenance interval

Where to inspect Yearly or every Every two years or After having Remarks
8,000 hours every 16,000 hours pumped vapours
400x

Ball bearing

grease / ▲ ❍ ▲

Tip seal – ❍ ▲

Seal ✽ ❍ ▲

O-ring ✽ ❍ ▲

Exhaust valve ✽ ❍ ▲

Purge ✽ ❍ ▲

Pin crank ▲ ▲ ▲

Stopper ▲ ▲ ▲

Vacuum pump itself inside cleaning / ▲ inside cleaning / ▲ inside cleaning / ▲

✽ Small maintenance kit
❍ Large maintenance kit
▲ Replace in case of malfunction

Note 1: Exclusively use the specified DIS grease.
Note 2 : The maintenance interval is the time interval or running hours whichever is reached first.

Maintenance

38

GA01423_002_C0 - 10/2016 - © Leybold

5.2 Leybold Service

Whenever you send us equipment, indicate whether the equipment is conta­minated or is free of substances which could pose a health hazard. If it is
contaminated, specify exactly which substances are involved. You must use
the form we have prepared for this purpose.

A copy of the form has been reproduced at the end of these Operating
Instructions: “Declaration of Contamination for Compressors, Vacuum Pumps
and Components”. Another suitable form is available from
www.leybold.com → Documents → Download Documents.

Attach the form to the equipment or enclose it with the equipment.

This statement detailing the type of contamination is required to satisfy legal
requirements and for the protection of our employees.

We must return to the sender any equipment which is not accompanied by a
contamination statement.

Pack the pump in such a way, that it will not be damaged during shipping
and so that any contaminants are not released from the package.

5.3 Waste Disposal

The pump may be contaminated by the process or by environmental influ­ences. In this case it must be decontaminated in accordance with the rele­vant regulations. We offer this service at fixed prices. Further details are
available upon request.

Contaminated parts can be detrimental to health and environment. Before
beginning to work, find out whether any parts are contaminated. Adhere to
the relevant regulations and take the necessary precautions when handling
contaminated parts.

Separate clean components according to their materials, and dispose of
accordingly.

If you send equipment to Leybold mind the regulations given in Section 5.2.
“Leybold Service”.

WARNING

WARNING

Troubleshooting

39

GA01423_002_C0 - 10/2016 - © Leybold

6 Troubleshooting

If the pump malfunctions, please refer to the following chart for help in solving
the problems. If you cannot solve the problem, please contact Leybold.

Fault Possible cause Remedy

Pump does not rotate. Breaker malfunction. Inspect and repair.

Wiring becomes loose or cut. Repair or replace.

Voltage drops. Check length and size of cable.

Motor malfunctions. Inspect and repair.

Pump malfunctions. Inspect and repair.

SC 5 D only Switch is turned OFF. Turn switch ON.

SC 5 D only ON-OFF switch is damaged. Replace.

Thermal protector trips. Inspect connection

Inspect voltage.

Inspect and repair.

Ultimate pressure is insufficient. Air leaks for pumping. Check tightness of piping.

Moisture or solvent has condensed Open inlet to atmosphere and operate
in pump. for a few minutes and then operate for
about 24 hours with the inlet closed.

Install a trap or a filter to prevent water
and solvent from entering the pump.

O-ring is damaged. Replace.

Purge gas valve port is clogged. Clean silencer. - Replace

Abnormal sound, vibration. Connections loose. Tighten connections.

The pump is not level. Level the pump.

Foreign matter enters inside of Pump. Inspect and clean.

Failure of exhaust valve. Inspect and replace.

Failure of motor. Inspect and replace.

Failure of pump. Inspect and change resp. replace.

Spare Parts

40

GA01423_002_C0 - 10/2016 - © Leybold

7 Spare Parts

Part No. for SCROLLVAC

SC 5 D SC 15 D SC 30 D SC 60 D

Small maintenance kit
(after 8,000 h) Minor Kit

EK 870000496 EK 870000497 EK 870000498 EK 870000519

Large maintenance kit
(after 16,000 h) Major Kit

EK 870000499 EK 870000500 EK 870000501 EK 870000520

Toolkit EK 870000502 EK 870000503 EK 870000503 EK 870000521

Scroll profiled seal (Tip Seal) E 870000510 E 870000511 E 870000512 E 870000522

Shaft installation kit (Pin Crank Kit) EK 870000507 EK 870000508 EK 870000509 EK 870000523

Eccentric shaft EK 870000504 EK 870000505 EK 870000506 EK 870000534

Airflush inlet filter EK 870000515 EK 870000515 EK 870000515 EK 870000515

41

GA01423_002_C0 - 10/2016 - © Leybold

EC Declaration of Conformity

42

GA01423_002_C0 - 10/2016 - © Leybold

Declaration of Contamination of Compressors, Vacuum Pumps and Components

The repair and / or servicing of compressors, va cuum pumps and components will be carried out only if a correctly completed declaration has
been submitted. Non-completion will result in delay

. The manufacturer can refuse to accept any equipment without a declaration.

A separate declaration has to be completed for each single component.

This declaration may be completed and signed only by authorized and qualified staff.

Customer/Dep./Institute : Reason for return: applicable please mark
Address : Repair: chargeable warranty

Exchange: chargeable warranty

Exchange already arranged / received

Person to contact: Return only: rent loan for credit
Phone : Fax: Calibration: DKD Factory-calibr.

End user: Quality test certificate DIN 55350-18-4.2.1

A. Description of the Leybold product:

Failure description:

Material description :
Catalog number: Additional parts:
Serial number: Application-Tool:
Type of oil (ForeVacuum-Pumps) : Application- Process:

B. Condition of the equipment

No1) Yes No Contamination : No1) Yes

11.

. Has the equipment been used

toxic

2. Drained (Product/service fluid)

corrosive

3. All openings sealed airtight

flammable

4. Purged

explosive 2)

If yes, which cleaning agent

radioactive

2)

and which method of cleaning

microbiological

2)

1)

If answered with “No”, go to D. other harmful substances

C. Description of processed substances (Please fill in absolutely)

1. What substances have come into contact with the equipment ?

Trade name and / or chemical term of service fluids and substances processed, properties of the substances
According to safety data sheet (e.g. toxic, inflammable, corrosive, radioactive)

X Tradename: Chemical name:

a)
b)
c)
d)

No Yes

2. Are these substances harmful ?

3. Dangerous decomposition products when heated ?
If yes, which ?

2)

Components contaminated by microbiological, explosive or radioactive products/substances will not be accepted without written

evidence of decontamination.

D. Legally binding declaration
I / we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level.

Name of authorized person (block letters) :

Date signature of authorized person

firm stamp

Notes

43

GA01423_002_C0 - 10/2016 - © Leybold

Headquarter
Leybold GmbH

Bonner Strasse 498
D-50968 Cologne
T: [phone]
F: [phone]
[e-mail]

Germany

Leybold GmbH

Sales, Service, Support Center (3SC)
Bonner Strasse 498
D-50968 Cologne
T:

[phone]

F:

[phone]

[e-mail]
www.leybold.com

Leybold GmbH
Sales Area North

Branch Office Berlin
Industriestrasse 10b
D-12099 Berlin
T:

[phone]

F:

[phone]

[e-mail]

Leybold GmbH
Sales Office South

Branch Office Munich
Karl-Hammerschmidt-Strasse 34
D-85609 Aschheim-Dornach
T:

[phone]

F:

[phone]

[e-mail]
[e-mail]

Leybold Dresden GmbH
Service Competence Center

Zur Wetterwarte 50, Haus 304
D-01109 Dresden
Service:
T:

[phone]

F:

[phone]

[e-mail]

Europe

Belgium

Leybold Nederland B.V.
Belgisch bijkantoor

Leuvensesteenweg 542-9A
B-1930 Zaventem
Sales:
T:

[phone]

F:

[phone]

[e-mail]
Service:
T:

[phone]

F:

[phone]

[e-mail]

France

Leybold France S.A.S.

Parc du Technopolis, Bâtiment Beta
3, Avenue du Canada
F-91940 Les Ulis cedex
Sales and Service:
T:

[phone]

F:

[phone]

[e-mail]
[e-mail]

Leybold France S.A.S.

Valence Factory
640, Rue A. Bergès
B.P. 107
F-26501 Bourg-lès-Valence Cedex
T:

[phone]

F:

[phone]

[e-mail]

Great Britain

Leybold UK LTD.

Unit 9
Silverglade Business Park
Leatherhead Road
Chessington
Surrey (London)
KT9 2QL
Sales:
T: [phone]
F: [phone]
[e-mail]
Service:
T: [phone]
F: [phone]
[e-mail]

Italy

Leybold Italia S.r.l.

Via Trasimeno 8
I-20128 Mailand
Sales:
T: [phone]
F: [phone]
[e-mail]
Service:
T: [phone]
F: [phone]
[e-mail]

Netherlands

Leybold Nederland B.V.

Floridadreef 102
NL-3565 AM Utrecht
Sales and Service:
T: [phone]
F: [phone]
[e-mail]
[e-mail]

Switzerland

Leybold Schweiz AG, Pfäffikon

Churerstrasse 120
CH-8808 Pfäffikon
Warehouse and shipping address:
Riedthofstrasse 214
CH-8105 Regensdorf
Sales:
T: [phone]
F: [phone]
[e-mail]
Service:
T: [phone]
F: [phone]
[e-mail]

Spain

Leybold Spain, S.A.

C/. Huelva, 7
E-08940 Cornellà de Llobregat
(Barcelona)
Sales:
T: [phone]
F: [phone]
[e-mail]
Service:
T: [phone]
F: [phone]
[e-mail]

America

USA

Leybold USA Inc.

5700 Mellon Road
USA-Export, PA 15632
T: [phone]
F: [phone]
[e-mail]
Sales:
T: [phone]
F: [phone]
Service:
T: [phone]
F: [phone]

Brazil

Leybold do Brasil

Rod. Vice-Prefeito Hermenegildo Tonolli,
nº. 4413 - 6B
Distrito Industrial
Jundiaí - SP
CEP 13.213-086
Sales and Service:
T: [phone]
F: [phone]
[e-mail]
[e-mail]

Asia

P. R. China

Leybold (Tianjin)
International Trade Co. Ltd.

Beichen Economic
Development Area (BEDA),
No. 8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
T: [phone]
F: [phone]
F: [phone]
[e-mail]
[e-mail]

India

Leybold India Pvt Ltd.

No. 82(P), 4th Phase
K.I.A.D.B. Plot
Bommasandra Industrial Area
Bangalore - 560 099
Indien
Sales and Service:
T: [phone]
F: [phone]
[e-mail]
[e-mail]

Japan

Leybold Japan Co., Ltd.

Headquarters
Shin-Yokohama A.K.Bldg., 4th floor
3-23-3, Shin-Yokohama
Kohoku-ku, Yokohama-shi
Kanawaga 222-0033
Japan
Sales:
T: [phone]
F: [phone]
[e-mail]

Leybold Japan Co., Ltd.

Tsukuba Technical Service Center
1959, Kami-yokoba
Tsukuba-shi, Ibaraki-shi 305-0854
Japan
Service:
T: [phone]
F: [phone]
[e-mail]

Malaysia

Leybold Malaysia
Leybold Singapore Pte Ltd.

No. 1 Jalan Hi-Tech 2/6
Kulim Hi-Tech Park
Kulim, Kedah Darul
Aman 09000
Malaysia
Sales and Service:
T: [phone]
F: [phone]
[e-mail]
[e-mail]

South Korea

Leybold Korea Ltd.

3F. Jellzone 2 Tower
Jeongja-dong 159-4
Bundang-gu Sungnam-si
Gyeonggi-do
Bundang 463-384, Korea
Sales:
T: [phone]
F: [phone]
[e-mail]
Service:
623-7, Upsung-Dong
Cheonan-Si
Chungcheongnam-Do
Korea 330-290
T: [phone]
F: [phone]
[e-mail]

Singapore

Leybold Singapore Pte Ltd.

8 Commonwealth Lane #01-01
Singapore 149555
Singapore
Sales and Service:
T: [phone]
F: [phone]
[e-mail]
[e-mail]

Taiwan

Leybold Taiwan Ltd.

No 416-1, Sec. 3
Chunghsin Rd., Chutung
Hsinchu County 310
Taiwan, R.O.C.
Sales and Service:
T: [phone]
F: [phone]
[e-mail]
[e-mail]

Sales and Service

LVCorp_13786_2016 10.16