RKC INSTRUMENT LE100 General Description Manual

Back-pressure Level Meter

LE100

R

CE marked, UL/CSA Pending

R

LE100

General Description

Specifically designed for the measurement of liquid chemical levels.

The specific gravity compensation function eliminates the need to set liquid level with actual liquid and is easily accomplished during chemical
change.
The LE100 measures liquid levels by supplying inactive gas at fixed pressure to the sensor tube installed in the storage tank. Back-pressure is
determined by measuring the changing liquid level. The sensor tube pressure varies proportionately to

Features

changes in liquid level.

Level settings 6 or 8 points
Measuring range 0 to 1000 mm
Selectable display units (mm, %, l, cc, Pa, KPa)
High repeatability 0.3% full scale
Specific gravity compensation
One - touch empty adjustment
One - touch span adjustment
Volume compensation
Digital communication (Optional)
Monitoring output (Optional)

Empty adjustment function

Empty adjustment function can adjust the displayed low limit measured
value to the purge pressure at the end of the sensor tube exposed to
atmosphere.

LE100

Low limit measured value

Specific gravity compensation

The high limit value is automatically computed and the liquid level is
displayed linearly by setting the specific gravity of the liquid and the low
limit measured value. If the specific gravity is known, the high limit
measured value can be set without presence of actual liquid.

Setting of specific gravity Low limit value setting

LE100

Specific gravity compensation
with actual liquid

The specific gravity and high/low limit measured values are computed
automatically and the liquid level (mm) is displayed linearly by inputting
two optional points of actual liquid levels.

LE100

Set measured value ( mm )

High limit value

Low limit value

LE100

Specific
gravity

Measured high limit
value

Measured low limit
value

Span adjustment function

The percentage value display within a 0 to 100% range is achieved by
setting the optional high and low limit adjustment points.

LE100

Setting

Optional adjustment
point for high limit

Optional adjustment
point for low limit

SET

SET

LE100

100%

0%

Chemical liquid

Specific gravity

1.1

High limit measured
value

Level

Low limit measured
value

www.rkc-usa.com

RKC

Distributed By

(800) 576 - 6308

Inc,

1LE100_01E

Back-pressure Level Meter

LE100

Features

Liquid volume measurement

LE100 converts the change of back-pressure caused by the rise and fall of chemical liquid level into the actual chemical liquid volume for display in milliliters

(ml) or liters (l).

• When specific gravity is known

Empty adjustment Volume compensation

Specific gravity compensation Measurement

• When specific gravity is unknown

Empty adjustment Specific gravity compensation with actual liquid

Volume compensation

Measurement

• When the tank has a simple shape

Liquid volume in a tank with simple shape changes linearly in
relationship to liquid level. When the liquid volumes (ml/l) of optional
high/low points are set, the liquid volume measurement is accurately
displayed.

Low level A mm Liquid volume a ml

High level B mm Liquid volume b ml

• When the tank has a complex shape

Liquid volume in a tank with a complex shape changes depending on
variations of the tank shape. The LE100 has up to 11 adjustment points
that compensate for these variations to linearize the displayed value
throughout the measurement range.

LE100

Setting Setting

Liquid volume a ml
at level A mm

LE100

LE100

Liquid volume b ml
at level B mm

The built-in linearizer has a maximum of 11 adjustment points.

The built-in linearizer accurately
displays liquid volume at any level.

Automatic specific gravity compensation

The LE100 automatically compensates for specific gravity according to the number of times a semiconductor wafer is chemically-processed in the same tank liquid.

Not processed The first time

Specific gravity: 1.100 Specific gravity: 1.110 Specific gravity: 1.120 Specific gravity: 1.200

This illustration shows how the LE100 automatically adjusts specific gravity compensation between 1.10 to 1.20 through ten processing cycles.
The counting of wafer processing cycles can be entered manually at the front keypad with contact input or digital communication.

LE100 LE100 LE100 LE100

The 2nd time

The 10th time

2 LE100_01E

Specifications

Back-pressure Level Meter

LE100

Inputs

Number of inputs : 1 point
Input medium : Non-corrosive gas
Input pressure range : 0 to 9.8 kPa
Zero point revision range
Sampling time : 0.2 sec
PV digital filter : 1 to 100 sec (No filter when setting 0)

(First order lag filter)

:± 5.0% of full span

Level setting

Number of set points : 6 points ( 8 points optional)
Setting range : Same as units and range.
Setting resolution : Same as PV. (See Units and range table)

Display

Input display : 7 segments LED
Set display :  7 segments LED
Action display : Point LED (green, OUT1 to 8)
Unit display : Point LED (green, mm, %, l, ml, Pa, kPa)

(4 figures, green, height : 7.6 mm)
(4 figures, orange, height : 7.6 mm)

Performance

Repeatability : ± 0.3 % of full span
Non-linear : ± 0.5 % of full span
Temperature characteristic
 Span output : ± 0.04 % of full span / °C

•

All performance characteristics have a measuring accuracy of ± one digit.

: Zero output : ± 0.04 % of full span / °C

Specific gravity compensation

Number of set points : 1 point
Setting range : 0.800 to 2.500
Setting resolution : 0.001

Empty adjustment

Through the use of the empty adjustment, the tube tip can cancel an

offset to an atmospheric open state.

Outputs

Number of outputs : 1 to 6 points (1 to 8 points optional)
Output action :
Setting range : Same as input range.
Deviation setting range
Differential gap : 0.0 to 10.0% of span
Output timer : 0 to 600 sec.
Hold action : ON / OFF settable
Interlock : Settable independently for each output
Output type :
Output : Open collector output 24V DC 50 mA

Process high, Process low, Deviation high, Deviation low

:-10 to 10 mm

Selectable for each output either for ON or OFF at operation

Hold function

Peak hold : Highest measured value is held
Bottom hold : Lowest measured value is held

•The Hold function is always operational.

•After the Hold function is confirmed by operator, it can be reset at the
front panel keypad.

•When instrument power supply is OFF, Hold data is not backed up.

Contact input (Optional)

Number of inputs : 1 point

•Auto-zero (empty adjustment) activation or incremental count of the number
of processing times.

Input type : Non-voltage contact input
 a) OPEN : 500kΩ or more
 b) CLOSE : 10Ω or less

• Possible to be activated by open collector output.

Monitor output (Optional)

Number of outputs : 1 point
Output : 0 to 2.5V DC (Load resistance : More than 1kΩ)
Input impedance : Less than 0.1Ω
Output data type : Process value
Output scaling :
Output accuracy : ±0.3% of span
Ripple of output : ±0.1% of span or less than 1 mV (resistive load)
Output resolution : More than 10 bit

 Available to high and low setting

Specific gravity compensation with actual liquid

Number of set points : 2 points
Setting range : Scaling low limit to high limit.
Setting resolution : 1

•

A specific gravity compensation with actual liquid measurement determines the
liquid's specific gravity and allows calculation of either high or low limit values.

Span adjustment function

Number of set points : 2 points

•The percentage value display within a 0 to 100% range is achieved by
setting the optional high and low limit adjustment points.

Volume compensation function

Number of set points : 2 to 11 points
Setting range : Scaling low limit to high limit.
Setting resolution : Same as PV. (See Units and range table)

•Settable when unit is l or ml.

•Linearization setting allows the LE100 to display a liquid volume value.

•Measuring accuracy can not be guaranteed if the setting extends over
the inflection point or if a 1mm level change is greater than 4.4% of the
total volume.

Automatic specific gravity compensation

•Automatic specific gravity compensation is achieved by defining initial
and final specific gravity settings and the number of processing times.
Output activation point then becomes constant despite varying specific
gravity.

Level setting with actual liquid

Number of set points : 1 to 6 points (1 to 8 points optional)

•Each output activation point can be set in relation to actual liquid level.

Communications (Optional)

Communication method
Synchronous method : Start-stop synchronous
Communication speed
Bit configuration : a) Start bit : 1
 b) Data bit : 7 or 8
 c) Parity bit : Without, Odd or Even
 d) Stop bit : 1 or 2
Maximum connection

: Based on RS-485 (two-wire)
:

2400, 4800, 9600, 19200 BPS (Selectable)

: 31

General specifications

Supply voltage : 21.6 to 26.4V DC (Rating 24V DC)
Power consumption : Less than 130 mA
Memory backup : Backed up by EEP-ROM
 Data retaining period : Approx. 10 years
Insulation resistance : More than 20MΩ (500V) between measured  
 terminals and ground terminal
 More than 20MΩ (500V) between power
 terminals and ground terminal
Dielectric voltage : 1000V AC for one minute between measured
 terminals and ground terminal
 1200V AC for one minute between power
 terminals and ground terminal
Power failure : A power failure of 30 ms of less will not affect
 the control action.
Weight : Approx. 150g
Ambient temperature : 0 to 50°C (32 to 122°F)
Ambient humidity : 45 to 85% RH
Operating environment

:

Free from corrosive and flammable gas and dust.

Compliance with standards

• CE marked pending

• UL recognized pending

• CSA certified pending

R

R

3LE100_01E

Back-pressure Level Meter

Model and Suffix Code

LE100

Specifications
Model

Number of outputs

Power supply

Contact input (DI)

Communication

Monitor output

Waterproof and dustproof

Connector type

Attached connector

LE100-

6 points
8 points
24V DC
Not supplied
External contact input
Not supplied
RS-485
Not supplied
Monitor output
Not supplied
Waterproof and dustproof (To be released soon)
10 pins type *1
16 pins type *1
Not supplied
For 10 pins type (Model code: W-BP-01-N or equivalent) *2

Model and Suffix Code

6
8

6

For 16 pins type (Model code: W-BP-02-N or equivalent) *2

*1 When 8 output points, contact input or communication functions are selected, only the 16 pin connector is available.
*2 When using a connector (W-BP-03-N or equivalent) intended for monitor use, AWG # 28 ~ 22 wire is required.

Units and range

Set code

Unit Range
0
1
2
3
4
5

0 to 400 (1250) •High limit value is decided by the measurement of specific gravity.

mm

0.0 to 100.0

%

0 to 360 •Decimal point is decided by the setting of decimal point position.

l

0 to 360 •Decimal point is decided by the setting of decimal point position.

ml

0 to 9.807

kPa

0 to 9807

Pa

Cable

Specifications
Cable name

W-BP­10 pins type, Power supply / Output connector

Connector type

16 pins type, Power supply / Output connector
Monitor output connector

Cable length

Unit : mm (1,000 to 10,000 mm, Specify every 1000 mm units) No connector on open end.

• Model code of connector without cable : For 10 pins type: W-BP-01-N, For 16 pins type: W-BP-02-N, For monitor: W-BP-03-N

Model and Suffix Code

Y

N
1

N
5

N
1

N
1

1
2

N
1
2

000
0 1
0 2
0 3

000

External Dimensions and Rear Terminals

Power supply / Output connector

16 pins type

1
2

Power supply / Output connector Monitor output connector

Pin number

16 pins 10 pins

1
2
3
4

1

5

2

6

3

7

4

8

5

9

6

10
11
12

7

13

8

14

9

15

10

16

T/R(A)
T/R(B)
SG/DI
DI
OUT1
OUT2
OUT3
OUT4
OUT5
OUT6
OUT7
OUT8
COM(
COM(
+24V DC
+24V DC

-

)/ 24V DC

-

)/ 24V DC

Description

Communications

Contact input

Open collector
output

Power supply

10 pins type

2

1

4

3

6

5
7

9
11
13
15

1

8
10
12
14
16

2

3

4

5

6

7

8

9

10

Pin number Description

1
2

Ground terminal
Tube connection screw

Connector type

Power supply / output connector
10 pins type : PS-10PE-D4LT1-LP1 *1

16 pins type : PS-16PE-D4LT2-M1 *1
*1 Manufactured by Japan Aviation Electronics Industry, Limited
*2 Manufactured by JST Mfg. Co., Ltd.

+

-

Tube connection screw : M5 X 10

Fitting Tube

Fitting : Recommended unit : One-touch fitting PC6-M5SUS (NIHON PISCO CO., LTD)

Tube : Fluorocarbon resin tube φ 6 x φ 4

•The fitting and tube shall be prepared separately.

Unit : mm

48

48

Monitor output

Screw size : M3 X 6

Quick-action fitting TS6-M5-SUS (Koganei Corporation)

3 100

• Panel cutouts

25 2545

Panel thickness : 1 to 9 mm

Monitor output connector
S2B-XH-A *2

+0.6

44 44

0

+0.6

45

0

25 25

4 LE100_01E

www.rkc-usa.com

RKC

Distributed By

(800) 576 - 6308

Inc,