3-Axis Subsystems
for Laser Beam Deflection
AXIALSCAN, FOCUSSHIFTER
This manual has been compiled by RAYLASE for its customers and employees.
RAYLASE reserves the right to change the product described in this manual and the infor-
mation contained therein without prior notice.
The software included in the product and this manual itself are protected by copyright. All
rights are reserved. Duplication of this manual in whole or in part, particularly by photocopying, scanning or imaging, and reproduction by any means are forbidden without the prior, written consent of RAYLASE.
Contents
CONTENTS
1 BASIC SAFETY INSTRUCTIONS .................................................................................. 5
1.1 Laser safety ..................................................................................................................... 5
1.2 Laser shutter.................................................................................................................... 5
1.3 Signs ................................................................................................................................ 6
1.4 Classification of laser devices ......................................................................................... 7
1.5 Laser area ....................................................................................................................... 8
1.6 Special hazards caused by mirrors made of beryllium ................................................... 9
1.7 Special hazards caused by lenses made of zinc selenide .............................................. 9
2 BASIC INFORMATION ................................................................................................. 10
2.1 Introduction .................................................................................................................... 10
2.2 Intended use .................................................................................................................. 10
2.3 Package contents .......................................................................................................... 10
2.4 Module overview ........................................................................................................... 11
2.5 Warranty ........................................................................................................................ 12
2.6 Manufacturer ................................................................................................................. 12
2.7 Customer Service .......................................................................................................... 12
2.8 Status LED of the linear translator module ................................................................... 13
2.8.1 Analog linear translator modules ................................................................................... 13
2.8.2 Digital linear translator modules .................................................................................... 13
2.9 Status LEDs of the deflection unit ................................................................................. 14
2.9.1 Analog deflection units .................................................................................................. 14
2.9.2 Digital deflection units ................................................................................................... 14
3 TECHNICAL DATA ....................................................................................................... 15
3.1 Rating plate code .......................................................................................................... 15
3.1.1 Deflection Unit ............................................................................................................... 16
3.1.2 Linear Translator Module .............................................................................................. 17
3.1.3 Linear Translator Module (FOCUSSHIFTER) ............................................................... 17
3.2 Conformity with directives ............................................................................................. 18
4 FUNCTIONAL DESCRIPTION ..................................................................................... 19
4.1 Laser beam subsystem ................................................................................................. 19
4.2 Functional principle of analog subsystems ................................................................... 20
4.3 Functional principle of digital subsystems ..................................................................... 21
4.4 Protection window ......................................................................................................... 26
4.5 F-Theta lens .................................................................................................................. 27
4.6 Interfaces of the linear translator module ...................................................................... 28
4.6.1 Analog input................................................................................................................... 28
4.6.2 Digital input .................................................................................................................... 29
4.6.3 Power supply ................................................................................................................. 30
4.6.4 Stepper motor interface ................................................................................................. 31
4.6.5 Digital output.................................................................................................................. 32
4.7 Interfaces of the deflection unit ..................................................................................... 33
4.7.1 Analog input................................................................................................................... 33
4.7.2 Power supply ................................................................................................................. 34
4.7.3 Digital interface .............................................................................................................. 35
5 INSTALLATION ............................................................................................................ 36
5.1 Installing the linear translator module ........................................................................... 37
5.2 Requirements to the cooling water ................................................................................ 37
5.3 Requirements to the cooling air..................................................................................... 37
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 3
5.4 Checking the beam coupling: AXIALSCAN (Standard), AXIALSCAN (motorized),
FOCUSSHIFTER (Standard) ......................................................................................... 38
5.4.1 Preparation .................................................................................................................... 38
5.4.2 Checking procedure ....................................................................................................... 39
5.4.3 Assembly ....................................................................................................................... 40
5.5 Checking the beam coupling: AXIALSCAN (water cooled) ........................................... 41
5.5.1 Preparation .................................................................................................................... 41
5.5.2 Checking procedure ....................................................................................................... 42
5.5.3 Assembly ....................................................................................................................... 43
5.6 Manually adjusting the field size .................................................................................... 44
5.6.1 Preparation .................................................................................................................... 44
5.6.2 Adjustment procedure:: AXIALSCAN (standard) ........................................................... 45
5.6.3 Adjustment procedure: AXIALSCAN (water cooled) ..................................................... 46
5.7 Motorized field size adjustment ..................................................................................... 47
6 MAINTENANCE AND CLEANING............................................................................... 48
6.1 Cleaning the housing ..................................................................................................... 48
6.2 Cleaning the optical system ........................................................................................... 48
6.2.1 Instructions for cleaning lenses and protective glasses ................................................ 49
6.2.2 Instructions for cleaning mirrors..................................................................................... 49
6.2.3 Special notes for mirrors made of beryllium and lenses made of zinc selenide ............ 50
7 TROUBLESHOOTING ................................................................................................. 51
8 DISPOSAL .................................................................................................................... 52
4 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Basic safety instructions Chapter 1
1 BASIC SAFETY INSTRUCTIONS
1.1 Laser safety
The user is responsible for safe operation and for safeguarding the surrounding area against
hazards that can be caused by laser radiation. OEM customers must ensure compliance with
all local and national regulations.
1.2 Laser shutter
The subsystem - consisting of a linear translator module and a deflection unit - is designed to
focus and deflect an input laser beam and output it again. The subsystem cannot block or
weaken the laser beam. To prevent unwanted emission of the laser beam, above a particular
danger class the laser device must be fitted with a shutter ( page 7, Classification of laser
devices).
The laser device must be of sufficient quality that the laser beam can only be emitted at the
beam output on the deflection unit.
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 5
Chapter 1 Basic safety instructions
The rating plates and the identification codes printed on them
can be used to determine the type of the linear translator module and the deflection unit ( page 15, Rating plate code). The
serial number and the item number are also used to identify the
subsystem.
The ground symbol identifies the ground connection on the
subsystem. This connection can be connected to the laser
housing via a plug connection to increase the interference resistance.
The CE symbol confirms the subsystem's compliance with
European directives. It indicates that the subsystem is approved for free trade within the EU.
The seal labels warn against unauthorized opening of the
subsystem. If a seal is broken, all warranty claims against
RAYLASE are void.
A laser warning sign must be attached at the point where
laser radiation is emitted. This provides information about the
type of radiation, specific hazards and the degree of protection.
The laser warning sign is attached by the OEM customer in
accordance with the laser device's classification ( page 7,
Classification of laser devices).
In the high-speed versions of the subsystem the mirrors are
made from beryllium.
To indicate this, these subsystems are labeled with the adjacent sign.
Also note page 9, Special hazards caused by mirrors made
of beryllium.
Lenses for CO2 laser deflection units with linear translator
modules are made of zinc selenide.
To indicate this, these subsystems are labeled with the adjacent sign.
Also note page 9, Special hazards caused by lenses made
of zinc selenide.
1.3 Signs
The following signs must be attached to the subsystem. These signs may not be removed.
Signs that have become illegible must be replaced.
6 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Basic safety instructions Chapter 1
Class
Description
1
The accessible laser radiation is not dangerous under reasonable foreseeable conditions.
1M
The accessible laser radiation is in the wavelength range of 302.5nm to 4,000nm. The accessible laser radiation is not dangerous to the eyes, as long as the cross-section is not reduced by optical instruments (magnifying glasses, lenses, telescopes).
2
The accessible laser radiation is in the visible spectrum (400nm to 700nm). Short-term exposure (up to 0.25s) is not dangerous to the eyes. Additional radiation components outside the
wavelength range from 400nm-700nm meet the requirements for class 1.
2M
The accessible laser radiation is in the visible spectrum from 400nm to 700nm. Short-term
exposure (up to 0.25s) is not dangerous to the eyes, as long as the cross-section is not reduced by optical instruments (magnifying glasses, lenses, telescopes). Additional radiation
components outside the wavelength range from 400nm-700nm meet the requirements for
class 1M.
3R
The accessible laser radiation is in a wavelength range of 302.5nm to 10,600nm and is dangerous to the eyes. The power or energy is a maximum of five times the limit for permissible
class 2 radiation in the wavelength range from 400nm to 700nm.
3B
The accessible laser radiation is dangerous to the eyes and frequently to the skin.
4
The accessible laser radiation is extremely dangerous to the eyes and dangerous to the skin.
Even diffuse scattered radiation can be dangerous. The laser radiation can cause fires or a
risk of explosion.
1.4 Classification of laser devices
The subsystem can be fitted on various laser devices. Every laser device is assigned to a
particular danger class, which must be specified at the point where laser radiation is emitted,
e.g. using a warning sign. The following classifications are defined in DIN EN 60825-1:
Note: Bear in mind that the subsystem changes the position at which the beam is emitted and
the new beam output must be marked with a warning sign showing the appropriate classification.
Note: The subsystem can change the classification of the laser device, particularly if it is fitted
with a focusing lens. The laser device may require additional protective equipment as a result.
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 7
Chapter 1 Basic safety instructions
laser
shutter
protection housing
reflected laser beam
deflected laser beam
operating surface
laser area
RAYLASE
linear translator module
RAYLASE
deflection unit
Fig. 1
Laser area
1.5 Laser area
For the purposes of accident prevention, the laser area is defined as the area in which the
maximum permitted radiation value can be exceeded. This is generally applicable for class
3B, 3R and 4 lasers. For class 1 to 2M laser devices, a laser area can be produced by focusing the laser beam.
A sufficient beam intensity produces a laser area that covers the entire radiation angle of the
subsystem and includes the reflection from all objects that can be exposed to the radiation as
a result. Note that even apparently diffuse surfaces can reflect laser radiation and a laser
beam that has been reflected several times can still be dangerous.
The laser area must be indicated by corresponding warning signs or lamps and protected by
appropriate shading and interlock switches.
No flammable or explosive objects or liquids should be located in the laser area.
This operating manual interprets a selection of accident prevention regulations from the point
of view of using laser subsystems in industrial plants. However, the applicable local and national standards, rules and regulations are binding.
8 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Basic safety instructions Chapter 1
1.6 Special hazards caused by mirrors made of beryllium
Beryllium mirrors can be destroyed by improper loading. This can lead to a release of beryllium dusts. These dusts can cause cancer, are toxic if swallowed and very toxic by inhalation.
Please observe the specified maximum applicable laser power in the data sheet.
Please note also, that soiled mirrors strengthen the absorption of laser power and thereby
increase the risk of destruction of the mirror.
page 50, Special notes for mirrors made of beryllium and lenses made of zinc selenide
1.7 Special hazards caused by lenses made of zinc selenide
Zinc selenide lenses can be destroyed by improper loading.This can lead to release of dust
with hydrogen selenide and selenium dioxide. These dusts can cause cancer, are toxic if
swallowed and very toxic by inhalation.
Please observe the specified maximum applicable laser power in the data sheet.
Please note also, that soiled lenses strengthen the absorption of laser power and thereby
increase the risk of destruction of the lens.
Therefore it is essential to ensure suitable suction in the production environment. In addition,
the outer protective glass of the F-Theta lens must be checked for dirt regularly and cleaned if
necessary. For non-removable deposits and after wear, which is caused by frequent cleaning,
the protective glass of the F-theta lens should be replaced.
page 50, Special notes for mirrors made of beryllium and lenses made of zinc selenide
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 9
Chapter 2 Basic information
2 BASIC INFORMATION
2.1 Introduction
Chapters 1 to 8 of this operating manual describe the general handling of subsystems the
following series: AXIALSCAN and FOCUSSHIFTER. See the data sheet in the appendix for
the different features. For details of the type you are using, refer to the rating plate.
This operating manual contains important information on qualified and safe handling of the
subsystem. You should therefore familiarize yourself with the content of this manual before
using the subsystem for the first time. In case of any queries, please contact RAYLASE.
The operating manual must be accessible to anyone who will be involved in developing, installing or using a laser device featuring the RAYLASE subsystem. If the subsystem is sold
on, this operating manual or an authorized copy must be passed on with it.
2.2 Intended use
The deflection unit is developed for two-dimensional deflection and focus laser radiation in a
suitable working range. If the materials to be processed generate toxic fumes, a secure suction must be ensured.
The deflection unit is designed for use in industrial environment and for use by trained professionals exclusively. It is made as a subassembly for laser devices. The deflection unit should
be operated only with the specified wavelengths, laser power and beam diameters listed in
the corresponding data sheet.
2.3 Package contents
Standard:
Subsystem consisting of linear translator module and deflection unit
Connecting cable between linear translator module and deflection unit (only digital subsys-
tems)
Optional:
Protection window
Control card (only digital subsystems)
Connecting cable between control card and deflection unit (only digital subsystems)
Software package (only digital subsystems)
10 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Basic information Chapter 2
RAYLASE SP-ICE control card
or
RAYLASE RLC-PCI control card
Driver for RAYLASE control cards
Software:
RAYLASE weldMARK
or
RAYLASE RLScribe
or
customer-specific software
PC
Laser System
RAYLASE
Linear translator
module
Power Supply
RAYLASE
Deflection unit
Subsy stem
RAYLASE
RLC-USB unit
PC
Laser system
USB port
Power Supply
RAYLASE
Deflection unit
RAYLASE
Linear translator
module
Subsy stem
Driver for RAYLASE control cards
Software:
RAYLASE weldMARK
or
RAYLASE RLScribe
or
customer-specific software
RS232
PC
RAYLASE
SP-ICE control card
Stand-alone hardware
Laser system
Power
supply
(5V)
RAYLASE
Deflection unit
RAYLASE
Linear translator
module
Subsystem
Driver for RAYLASE control cards
Software:
RAYLASE weldMARK
or
RAYLASE RLScribe
or
customer-specific software
Power
supply
Fig. 2
Module overview
2.4 Module overview
The illustration below shows three typical digital laser devices that are equipped with
RAYLASE and customer-specific (indicated by dotted lines) modules.
Analog subsystems are controlled by using an analog current or voltage interface provided by
the customer.
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 11
Chapter 2 Basic information
2.5 Warranty
The rights of the customer in respect of any defects in quality or deficiencies in title are governed by the general conditions of business of RAYLASE AG. These conditions are available
for review on our website.
Pack the product in the original packaging or in packaging that provides equivalent protection
for shipping.
RAYLASE shall not be obliged to repair defects under the following circumstances:
If persons not authorized by RAYLASE have attempted to repair the product.
If persons not authorized by RAYLASE have modified the product.
If the product has been used improperly.
If the product has been connected to incompatible devices.
If the product has been damaged because of inadmissible high laser power or focusing the
laser on optical areas.
If the product has been damaged because of unqualified cleaning of the optical areas.
If the warranty period is expired.
Note: No implicit guarantee or warranty of suitability for specific purposes has been made.
RAYLASE is not responsible for damages arising from use of the product. Individual assemblies or other assemblies manufactured by RAYLASE may be subject to separate warranty
conditions. Refer to the corresponding manuals for further information.
2.6 Manufacturer
RAYLASE AG
Argelsrieder Feld 2+4
82234 Wessling
Germany
Tel.: +49 (0) 81 53 - 88 98 - 0
Fax: +49 (0) 81 53 - 88 98 - 10
http://www.raylase.de
E-mail: info@raylase.de
2.7 Customer Service
The RAYLASE support services are available for your problems either in respect to the deflection unit or this manual. Before calling for support, please make sure you refer to any
appropriate sections in the manuals on the supplied CD that may answer your questions.
If you need further assistance call RAYLASE customer service department, Monday through
Friday between 8 A.M. and 5 P.M. (Middle European Time).
The customer service personnel will be able to give you direct assistance and answers to your
questions.
Germany (Wessling)
+49 (0) 81 53 - 88 98 – 0
E-Mail: support@raylase.de
... ask for the customer service department
12 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Basic information Chapter 2
LED arrangement
Name
Color
Meaning
D4
green
Position acknowledge-Z
Data transfer when LEDs
are flickering. (not analyzable)
D5
green
not used
D8
red
Error Z
Galvanometer scanner or
driver electronics defective.
Power supply defective if
LEDs are flickering.
D9
red
not used
D10
green
+VCC
Power supplies ready for
being used if LEDs are lit.
D11
green
-VCC
LED arrangement
Name
Color
Meaning
D1
red
CLK error
Data transmission faulty.
Cable defective.
D2
red
Parity error Z
D3
---
not used
D4
green
Temp. status Z
Temperature status available if LEDs are lit.
D5
---
not used
D6
orange
New data Z
New data is being transferred if status LEDs are lit.
D7
---
not used
D8
red
Error Z
Galvanometer scanner or
driver electronics defective.
Power supply defective if
LEDs are flickering.
D9
---
not used
D10
green
+VCC
Power supplies ready for
being used if LEDs are lit.
D11
green
-VCC
2.8 Status LED of the linear translator module
The status LEDs allow you to check important functions and statuses on the linear translator
module. The LEDs are located behind a protection window on the top of the module.
For subsystems with analog interface only
2.8.1 Analog linear translator modules
For subsystems with digital interface only
2.8.2 Digital linear translator modules
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 13
Chapter 2 Basic information
LED arrangement
Name
Color
Meaning
D4
green
Position acknowledge-X
Data transfer when LEDs
are flickering. (not analyzable)
D5
green
Position acknowledge-Y
D8
red
Error X
Galvanometer scanner or
driver electronics defective.
Power supply defective if
LEDs are flickering.
D9
red
Error Y
D10
green
+VCC
Power supplies ready for
being used if LEDs are lit.
D11
green
-VCC
LED arrangement
Name
Color
Meaning
D1
red
CLK error
Data transmission faulty.
Cable defective.
D2
red
Parity error X
D3
red
Parity error Y
D4
green
Temp. status X
Temperature status available if LEDs are lit.
D5
green
Temp. status Y
D6
orange
New data X
New data is being transferred if status LEDs are lit.
D7
orange
New data Y
D8
red
Error X
Galvanometer scanner or
driver electronics defective.
Power supply defective if
LEDs are flickering.
D9
red
Error Y
D10
green
+VCC
Power supplies ready for
being used if LEDs are lit.
D11
green
-VCC
2.9 Status LEDs of the deflection unit
The status LEDs allow you to check important functions and statuses on the deflection unit. If
the deflection unit has status LEDs (depends on the type), they are located behind a protection window on the rear of the deflection unit.
For subsystems with analog interface only
2.9.1 Analog deflection units
For subsystems with digital interface only
2.9.2 Digital deflection units
14 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Technical data Chapter 3
3 TECHNICAL DATA
This section outlines the common features of all subsystems. For type-specific features, refer
to the data sheets in the appendix. The individual data can be assigned using the rating plates
on the linear translator module and the deflection unit in conjunction with the identification
code ( below, Rating plate code).
3.1 Rating plate code
The following type designation is used in the data sheets in the appendix:
Type designation
│ AS AXIALSCAN (subsystem consisting of LTM and deflection unit)
│
│ Beam input aperture of deflection unit (mm)
│ │
│ │ Coating
│ │ │
│ │ │ Min. field size (mm x mm)
│ │ │ │ BO = beam optimized
│ │ │ │ HP = high power
│ │ │ │ HS = high speed
└ └ └ └
XX-XX XX [XXX]
Type designation
│ FS FOCUSSHIFTER (subsystem consisting of LTM-FS and deflection unit)
│
│ Beam input aperture of deflection unit (mm)
│ │
│ │ Coating
└ └ └
XX-XX [XX]
Both modules − linear translator module and deflection unit − have separate rating plates.
Refer to the following sections to identify the modules.
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 15
Chapter 3 Technical data
3.1.1 Deflection Unit
---------------------------------------------------------------------------------------------------
┌ type designation
│ RL RL
│ RL-II RL-II
│ RLA RLA
│ MS MINISCAN
│ SS-II SUBERSCAN II
│ SS-II-LD SUPERSCAN II -LOW DRIFT
│ SS-II-HS SUPERSCAN II -HIGH SPEED
│ SS-II-HS-LD SUPERSCAN II -HIGH SPEED -LOW DRIFT
│ SS-II-UHS SUPERSCAN II -ULTRA HIGH SPEED
│ SS-II-UHS-LD SUPERSCAN II -ULTRA HIGH SPEED –LOW DRIFT
│ SS SUPERSCAN
│ SS-SC SUPERSCAN -SC (special version)
│ SS-LD SUPERSCAN -LOW DRIFT
│ TS TURBOSCAN
│ RS-AC RAZORSCAN -AUTO CALIBRATION
│ RL-KIT RL-KIT
│ RL-II-KIT RL-II –KIT
│ RLA-KIT RLA –KIT
│ SS-KIT SUPERSCAN –KIT
│ TS-KIT TURBOSCAN –KIT
│
│ ┌ aperture(mm)
│ │
│ │ ┌ wavelength
│ │ │ C 9000nm to 11000nm
│ │ │ AU 10600nm
│ │ │ Y 1064nm
│ │ │ DY 532nm
│ │ │ TY 355nm
│ │ │ AG 400nm to 1064nm
│ │ │ 405 405nm
│ │ │ DY+Y 532nm and 1064nm
│ │ │ 780-980 780nm to 980nm
│ │ │ 780-980+AL 780nm to 980nm and AL
│ │ │ 850-870+1064 850nm to 870nm and 1064nm
│ │ │ 900-1030+AL 900nm to 1030nm and AL
│ │ │ 900-1100+AL 900nm to 1100nm and AL
│ │ │ 915-975 915nm to 975nm
│ │ │ 975 975nm
│ │ │ 975-985+AL 975nm to 985nm and AL
│ │ │ AL 180nm to 700nm
│ │ │ AR 488nm to 514nm
│ │ │
│ │ │ ┌ version (optionally)
│ │ │ │
│ │ │ │ ┌ interface
│ │ │ │ │ D1 25pol Data/Power
│ │ │ │ │ D2 25pol Data/9pol Power
│ │ │ │ │ A Analog
│ │ │ │ │
│ │ │ │ │ ┌ additional or customer no. (optionally)
│ │ │ │ │ │
└ └ └ └ └ └
XX-XX [XX] Vx XX /X
---------------------------------------------------------------------------------------------------
Note: The linear translator is provided with its own nameplate.
16 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Technical data Chapter 3
3.1.2 Linear Translator Module
---------------------------------------------------------------------------------------------------
┌ TYPE DESIGNATION
│ LTM LINEAR TRANSLATOR MODULE
│
│ ┌ aperture (mm)
│ │
│ │ ┌ wavelength
│ │ │ C 10600nm
│ │ │ C* 9000-11000nm
│ │ │ Y 1064nm
│ │ │ DY 532nm
│ │ │ TY 355nm
│ │ │
│ │ │ ┌ default field size
│ │ │ │ 100BO 100mm × 100mm
│ │ │ │ 250BO 250mm × 250mm
│ │ │ │ 100 100mm × 100mm
│ │ │ │ 250 250mm × 250mm
│ │ │ │ 200HP 200mm × 200mm, MP5-Coating
│ │ │ │ 600 600mm × 600mm
│ │ │ │ 300HP 300mm × 300mm, MP5-Coating
│ │ │ │ 600HP 600mm × 600mm, MP5-Coating
│ │ │ │
│ │ │ │ ┌ extra (optionally)
│ │ │ │ │ -SR anti reflex coating
│ │ │ │ │ -HP MP5-Coating
│ │ │ │ │ -HS HIGH SPEED
│ │ │ │ │
│ │ │ │ │ ┌ version (optionally
│ │ │ │ │ │ V2 mono block version
│ │ │ │ │ │
│ │ │ │ │ │ ┌ interface
│ │ │ │ │ │ │ D2 25pol Date / 9pol Power / 25pol Data/Power
│ │ │ │ │ │ │ A Analog
│ │ │ │ │ │ │
│ │ │ │ │ │ │ ┌ additional or customer no. (optionally)
└ └ └ └ └ └ └ └
LTM-XX X [XXX] Vx X /X
--------------------------------------------------------------------------------------------------Note: The defection unit is provided with its own nameplate.
3.1.3 Linear Translator Module (FOCUSSHIFTER)
┌ TYPE DESIGNATION
│ LTM-FS LINEAR TRANSLATOR MODULE FOR FOCUSSHIFER
│
│ ┌ amplification factor
│ │ Lx Beam Expansion Factor x
│ │
│ │ ┌ aperture
│ │ │
│ │ │ ┌ wavelength
│ │ │ │ Y 1064nm
│ │ │ │ DY 532nm
│ │ │ │ TY 355nm
│ │ │ │ C 10600nm
│ │ │ │
│ │ │ │ ┌ tuning (optionally)
│ │ │ │ │ S step tuning
│ │ │ │ │ V vector tuning
│ │ │ │ │
│ │ │ │ │ ┌ version (optionally
│ │ │ │ │ │ V2 mono block version
│ │ │ │ │ │
│ │ │ │ │ │ ┌ interface
│ │ │ │ │ │ │ D2 25pol Date / 9pol Power / 25pol Data/Power
│ │ │ │ │ │ │
│ │ │ │ │ │ │ ┌ additional or customer no. (optionally)
└ └ └ └ └ └ └ └
LTM-FS Lx XX [X] X Vx X /X
--------------------------------------------------------------------------------------------------Note: The defection unit is provided with its own nameplate.
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 17
Chapter 3 Technical data
3.2 Conformity with directives
The subsystem conforms to the requirements of the following directives:
EU Directive 2004/108/EC (EMC)
WEEE Directive 2012/19/EC
RoHS II 2011/65/EU
Directive 2006/42/EC on machinery
For details of conformity with other directives, contact RAYLASE.
18 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Functional description Chapter 4
4 FUNCTIONAL DESCRIPTION
4.1 Laser beam subsystem
The laser beam subsystem consists of the deflection unit and the linear translator module.
The deflection unit can be used to deflect a laser beam in X and Y directions. This results in a
two-dimensional plane, within which a laser can be directed at any position. This area is
known as the "operating field" and is shown in Fig. 3 and Fig. 4. Deflection is performed by
two mirrors, each of which is moved by a galvanometer scanner. RAYLASE provides the appropriate deflection unit for the deflection properties required. The laser beam subsystem can
therefore be fitted with different deflection units. Refer to the rating plate to identify the deflection unit used ( page 15, Rating plate code).
The focusing properties of the laser beam subsystem are determined by the linear translator
module and, on some versions, also by an F-Theta lens on the deflection unit. The linear
translator module is fitted with one or two focusing lenses. An additional lens with linear
movement allows the focusing length to be adjusted.
Because of their different focusing properties, the subsystems are divided into four groups:
AXIALSCAN (standard)
In these systems, the lens with linear movement is moved within a small range by a galvanometer unit. This so-called linear translator allows the focusing length to be adjusted to the
relevant deflection angle of the deflection unit. Compared to an F-Theta lens, this provides a
relatively large operating field, in which the laser beam can be optimally focused at every
point. The size of the operating field is set manually during installation ( page 44, Manually
adjusting the field size). The optical system and the electronic components of the deflection
unit can be protected against contamination by installing a protection window over the beam
output ( page 26, Protection window).
AXIALSCAN (water cooled)
Like the standard AXIALSCAN, the water cooled version is also fitted with a motorized adjustable lens. Unlike the standard version, the lens is moved using two galvanometer units to
increase the speed.
As well as this version designed for high speed, a version designed for a high laser power is
available.
AXIALSCAN (motorized)
On this version of the AXIALSCAN, the entire linear translator can be moved by a motor. This
enables motorized adjustment of the size of the operating field ( page 5, Motorized field size
adjustment).
FOCUSSHIFTER (standard)
On the FOCUSSHIFTER, an F-Theta lens on the deflection unit is used for focusing and to
set the size of the operating field. With this configuration, the linear translator module can be
used to change the focusing plane. This allows almost three-dimensional operations to be
performed. For example, this is useful when creating a 3D image in a glass block or for deep
processing of materials.
Subsystems are available as analog or digital versions. Refer to the following functional principles.
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 19
Chapter 4 Functional description
1 Linear translator module
2 Beam input
3 Lens with linear movement
4 Focusing lens (or 2x, depending on model)
5 Spacer (depends on model) with mounting plate
for deflection unit
6 Deflection unit
7 Galvanometer scanner with mirror
8 Beam output
9 Operating field
10 Power supply of linear translator module
11 Analog input of linear translator module
12 Stepper motor interface (depends on model)
13 Analog input of deflection unit
14 Power supply of deflection unit
Fig. 3
Functional
principle of analog subsystems
For subsystems with analog interface only
4.2 Functional principle of analog subsystems
20 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Functional description Chapter 4
1 Linear translator module
2 Beam input
3 Lens with linear movement
4 Focusing lens (or 2x, depending on model)
5 Spacer (depends on model) with mounting plate
for deflection unit
6 Deflection unit
7 Galvanometer scanner with mirror
8 Beam output
9 Operating field
10 Digital input
11 Power supply
12 Digital output
13 Connecting cable
14 Stepper motor interface (depends on model)
15 Digital interface of deflection unit
Fig. 4
AXIALSCAN
(standard)
AXIALSCAN
(motorized)
FOCUSSHIFTER
(standard)
For subsystems with digital interface only
4.3 Functional principle of digital subsystems
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 21
Chapter 4 Functional description
1 Linear translator module
2 Beam input
3 Lens with linear movement
4 Focusing lens (or 2x, depending on model)
5 Spacer (depends on model) with mounting
plate for deflection unit
6 Deflection unit
7 Galvanometer scanner with mirror
8 Beam output
9 Operating field
10 Power supply of linear translator module
11 Digital Input
12 Digital Output
13 Connecting cable
14 Output coolant
15 Digital interface of deflection unit
16 Input coolant
Fig. 5
AXIALSCAN
(water-cooled)
Important information:
When connecting the water cooling, make sure that no coolant gets into the subsystem. The
units are not waterproof and liquids can damage both the optical system and the electronics.
22 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Functional description Chapter 4
1 Linear translator module
2 Beam input
3 Lens with linear movement
4 Focusing lens (or 2x, depending on model)
5 Deflection unit
6 Beam output with F-Theta lens
7 Operating field
8 Galvanometer scanner with mirror
9 Digital output
10 Power supply
11 Digital input
12 Connecting cable
13 Digital interface of deflection unit
Fig. 6
FOCUSSHIFTER
(standard)
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 23
Chapter 4 Functional description
1 Linear translator
2 Focusing lens
1 Linear translator
4 SENSOR CENTER
2 Motorized field size adjustment
5 SENSOR RIGHT
3 SENSOR LEFT
6 Focusing lens
Fig. 7
Linear translator
module from
AXIALSCAN
(standard) subsystem
Fig. 8
Linear translator
module from
AXIALSCAN
(motorized) subsystem
24 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Functional description Chapter 4
Fig. 9
Linear translator
module of subsystem:
AXIALSCAN
(water-cooled)
1 Linear translator
3 Focusing lens
2 Clamping screw (field size adjustment)
4 Adjusting screw (field size adjustment)
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 25
Chapter 4 Functional description
1 Mount
2 Protection window
3 Clamp ring
4 Protective cap
Fig. 10
Protection window
For subsystems fitted with a protection window only
4.4 Protection window
Installation instructions
o Before installation, check the protection window for dirt, scratches or cracks.
- If the protection window is dirty, it must be cleaned ( page 49, Instructions for
cleaning lenses and protective glasses).
- If the protection window is scratched or cracked, it must be replaced.
o Screw the protection window and mount into the beam output on the deflection unit until it
is positioned securely.
26 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Functional description Chapter 4
Distortion caused by two-mirror
deflection.
Distortion caused by F-Theta
lens.
Distortion caused by twomirror deflection and F-Theta
lens.
Fig. 11
Field distortion
with and without
F-Theta lens
Fig. 12
Example:
F-Theta lens for
Nd:YAG
1 Lens element inc. lens
2 Protection window
3 Clamp ring
4 Protective cap
For subsystems fitted with an F-Theta lens only
4.5 F-Theta lens
The F-Theta lens is specially designed for use with 2-axis deflection units or in
FOCUSSHIFTER 3-axis subsystems. It focuses the laser beam at optimum quality on any
position in the operating field. At the same time, it provides partial optical compensation for
the barrel-shaped distortion that is unavoidable when using a 2-axis deflection unit. The remaining distortion (see below) must be compensated by the deflection unit drive.
Installation instructions
o Before installation, check the lens and the protection window for dirt, scratches or cracks.
- If the optical system is dirty, it must be cleaned ( page 49, Instructions for cleaning
lenses and protective glasses).
- A scratched or cracked lens and/or protection window must be replaced. If necessary,
the protection window can be replaced separately.
o Screw the lens into the beam output on the deflection unit until it is positioned securely.
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 27
Chapter 4 Functional description
PIN
Signal
PIN
Signal
1
13
25
14
25 PIN D-SUB
1
GND
14
nu 2 GND
15
nu
3
GND
16
nu
4
GND
17
nu 5 nu
18
nu 6 GND
19
nu 7 GND
20
-Z Command
8
GND
21
+Z Command
9
GND
22
Z Position
10
GND
23
/Z Temp-ok
11
/Z Ready
24
/Z Pos-Error
12
GND
25
Z Velocity
13
GND
---
---
Fig. 13
Signal input
4.6 Interfaces of the linear translator module
For subsystems with analog interface only
4.6.1 Analog input
The terminal assignment of the analog interface is outlined below. To determine whether the
deflection unit is fitted with an analog or a digital interface, refer to the code on the rating plate
( page 15, Rating plate code).
28 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
nu = not used
To prevent errors, shielded cables should be used and signals must be input as shown below.
Functional description Chapter 4
PIN
Signal
PIN
Signal
1
13
25
14
25 PIN D-SUB
1 I -SENDCLOCK
14 I +SENDCLOCK
2 I -SYNC
15 I +SYNC
3 I -X-DAC CHANNEL
16 I +X-DAC CHANNEL
4 I -Y-DAC CHANNEL
17 I +Y-DAC CHANNEL
5 I -Z-DAC CHANNEL
18 I +Z-DAC CHANNEL
6 O -HEAD-STATUS
19 O +HEAD-STATUS
7 nc
20 nc 8
nc
21 nc 9
nc
22 nc
10 nc
23 GND
11 GND
24 GND
12 nc
25 nc
13 nc --- ---
Diff. Input-, Diff. Input+
-
Diff. Output-, Diff. Output+
Input voltage
5V Output low
max. 0.6V
max. 40mA
Input threshold
200mV
Output high
min. 2V @ 50Ω
max. 40mA
Hysteresis
typ. 45mV
ESD protection
±10kV
Input impedance
120Ω
ESD protection
±15kV
For subsystems with digital interface only
4.6.2 Digital input
The linear translator module is connected to a RAYLASE control card using the 25-pin D-SUB
connector. All signals are compatible with RAYLASE's extended function XY2-100 standard.
I = Diff. Input, nc = not connected, O = Diff. Output
Specifications
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 29
Chapter 4 Functional description
PIN
Designation
PIN
Designation
6
1
9
9 PIN D-SUB
1
-VSS
6 -VSS
2
-VSS
7 GND 3
GND
8
GND
4 +VSS
9
+VSS
5 +VSS
--- ---
4.6.3 Power supply
The 9-pin D-SUB connector provides the linear translator module with power. The power supply must be provided by the OEM customer. Refer to the following connection and parameter
table:
30 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Functional description Chapter 4
PIN
Signal
PIN
Signal
15 PIN
D-SUB
1 I -Motor W3
(yellow)
9 I +Motor W3
(black)
2 I -Motor W1
(brown)
10 I +Motor W1
(red)
3 I -Motor W4
(purple)
11 I +Motor W4
(blue)
4 I -Motor W2
(green)
12 I +Motor W2
(white)
5 nc
13 nc
6 O SENSOR CENTER
14 O SENSOR LEFT
7 O SENSOR RIGHT
15 I GND
8 I VSS (+24V)
---
Sensor Output
Output high
VSS - (≤ 3V)
Current low
max. 50mA
Current high
max. 100mA
Fig. 14
Stepper motor
and sensors,
schematic view
For subsystems fitted with motorized field size adjustment only
4.6.4 Stepper motor interface
The 15-pin D-SUB male connector is used to operate the stepper motor for motorized field
size adjustment.
I = Input, nc = not connected, O = Output
Specifications
Stepper motor and sensors
Manufacturer: Phytron
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 31
Chapter 4 Functional description
PIN
Signal
PIN
Signal
1
13
25
14
25 PIN D-SUB
1 O -SENDCLOCK
14 O +SENDCLOCK
2 O -SYNC
15 O +SYNC
3 O -X-DAC CHANNEL
16 O +X-DAC CHANNEL
4 O -Y-DAC CHANNEL
17 O +Y-DAC CHANNEL
5 nc
18 nc
6 I -HEAD-STATUS
19 I +HEAD-STATUS
7 nc
20 nc 8
nc
21 nc 9
+VSS
22 +VSS
10 +VSS
23 GND
11 GND
24 GND
12 -VSS
25 -VSS
13 -VSS
--- ---
Diff. Input-, Diff. Input+
-
Diff. Output-, Diff. Output+
Input voltage
5V Output low
max. 0.6V
max. 40mA
Input threshold
200mV
Output high
min. 2V @ 50Ω
max. 40mA
Hysteresis
typ. 45mV
ESD protection
±10kV
Input impedance
120Ω
ESD protection
±15kV
For subsystems with digital interface only
4.6.5 Digital output
The linear translator module uses the 25-pin D-SUB female connector to transmit data to the
deflection unit and supply it with power. All signals are compatible with RAYLASE's extended
function XY2-100 standard.
I = Diff. Input, nc = not connected, O = Diff. Output
Specifications
32 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Functional description Chapter 4
PIN
Signal
PIN
Signal
1
13
25
14
25 PIN D-SUB
1
GND
14
-Y Command
2
GND
15
+Y Command
3
GND
16
Y Position
4
GND
17
/Y Temp ok
5
/Y Ready
18
Y Pos Error
6
GND
19
Y Velocity
7
GND
20
-X Command
8
GND
21
+X Command
9
GND
22
X Position
10
GND
23
/X Temp ok
11
/X Ready
24
/X Pos Error
12
GND
25
X Velocity
13
GND
---
---
Fig. 15
Signal input
4.7 Interfaces of the deflection unit
For subsystems with analog interface only
4.7.1 Analog input
The terminal assignment of the analog interface is outlined below. To determine whether the
deflection unit is fitted with an analog or a digital interface, refer to the code on the rating plate
( page 15, Rating plate code).
To prevent errors, shielded cables should be used and signals must be input as shown below.
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 33
Chapter 4 Functional description
PIN
Designation
PIN
Designation
6
1
9
9 PIN D-SUB
1
-VSS
6 -VSS
2
-VSS
7 GND
3
GND
8
GND
4 +VSS
9
+VSS
5 +VSS
--- ---
For subsystems with analog interface only
4.7.2 Power supply
The 9-pin D-SUB connector provides the deflection unit with power. The power supply must
be provided by the OEM customer. Refer to the following connection and parameter table:
34 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Functional description Chapter 4
PIN
Signal
PIN
Signal
1
13
25
14
25 PIN D-SUB
1 I -SENDCLOCK
14 I +SENDCLOCK
2 I -SYNC
15 I +SYNC
3 I -X-DAC CHANNEL
16 I +X-DAC CHANNEL
4 I -Y-DAC CHANNEL
17 I +Y-DAC CHANNEL
5 nc
18 nc
6 O -HEAD-STATUS
19 O +HEAD-STATUS
7 I -P-DAC CHANNEL
20 I +P-DAC CHANNEL
8 nc
21 nc 9
+VSS
22 +VSS
10 +VSS
23 GND
11 GND
24 GND
12 -VSS
25 -VSS
13 -VSS
--- ---
Diff. input-, Diff. input+
-
Diff. output-, Diff. output+
Input voltage
5V Output low
max. 0.6V
max. 40mA
Input threshold
200mV
Output high
min. 2V @ 50Ω
max. 40mA
Hysteresis
typ. 45mV
ESD protection
±10kV
Input impedance
120Ω
ESD protection
±15kV
For subsystems with digital interface only
4.7.3 Digital interface
The deflection unit uses the 25-pin D-SUB female connector to receive signals and its power
supply from the linear translator module. All signals are compatible with RAYLASE's extended
function XY2-100 standard. Refer to the following connection table:
I= Diff. Input, nc = not connected, O = Diff. Output
Specifications
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 35
Chapter 5 Installation
Warning:
The laser beam can cause severe injury to the eyes and the skin. Note that
even apparently matt objects can reflect the wavelength of laser beams. All
personnel in the room must wear appropriate laser protection goggles and, if
necessary, protective clothing.
Never look directly at the laser beam, even when wearing protective gog-
gles.
The subsystem may require the laser device to be assigned to a different
danger class ( page 7, Classification of laser devices).
The laser must be switched off during installation.
We recommend that the laser area is completely protected by an appropri-
ate working chamber. If this is not possible, appropriate protective measures
for the laser class must be implemented.
The mirrors in the deflection unit must move freely after installation of the
deflection unit. No components of the laser device may protrude into the deflection unit.
The laser device must be of sufficient quality that the laser beam can only be
emitted at the beam output on the deflection unit.
The "Laser radiation" accident prevention regulations (BGV B2) must be
observed.
Connecting cables may not be subjected to mechanical strain.
The subsystem must be protected against moisture, dust and corrosive va-
pors.
The optical components may only be touched when wearing unpowdered
latex gloves.
The subsystem must be protected against static discharge and strong elec-
tromagnetic fields.
The power density of the input laser radiation may not exceed the maximum
permissible power density of the optical components in the subsystem.
The beam path and the function of the subsystem must be tested after in-
stallation.
We recommend performing all tests with a danger class 1 or 2 laser to minimize the risk of injury. If this is not possible, the laser used must be set to
the lowest possible power. This setting must be secured against accidental
adjustment.
5 INSTALLATION
The following sections describe installation of the subsystem in a laser device. When doing
this, it is essential to check that the laser beam is input into the linear translator module and
output from the module centrally. Otherwise, misalignment of the laser beam will occur each
time the focus is changed. The linear translator module and the deflection unit are calibrated
to one another prior to delivery and do not need to be adjusted.
36 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Installation Chapter 5
Cooling water alternatives
Clean tap water
Deionized water
mixed with 50% clean tap water
Deionized water with additives
Recommended additives*
Industrial application: CCL105 (NALCO)
Food industry: Dowcal N (Dow Chemicals)
Recommended cooling temperature
22°C – 28°C
Avoid condensation
Temperature stability
+/- 1°C
Water pressure at the deflection unit
2 to 3 bar
Water flow
2-6 l/min (depending on the type of deflection unit)
Water hardness
< 10 ppm
Recommended pH
7-8.6
Bacterial content
< 1000 cfu/ml
Pore filter
Pore filter ≤ 0,05 mm
Required air pressure on the defection unit
1-1,5 bar
Air flow
ca 50 l/min
Max. oil shares
≤ 0,005 mg/m
3
Max. water shares
≤ 0,05 g/m
3
5.1 Installing the linear translator module
o Carefully remove the protective cover over the beam input with a small screwdriver.
o To install the subsystem, insert locating pins into the corresponding holes and attach the
subsystem to the prepared installation surface using screws.
Note: The subsystem may only be installed using the pins and screws specified by
RAYLASE. Follow the installation drawing supplied.
Only for water cooled deflection units
5.2 Requirements to the cooling water
To avoid destruction of the aluminum housing by pitting, the cooling water must meet the
requirements listed in the following table.
Note regarding cooling circuit: Avoid pure copper components in the cooling circuit (not
refrigerant cycle) of the cooler used. These lead without suitable additive to pitting in aluminum cooling channels.
Note: Damage caused by pitting is excluded from the warranty.
* Follow the dosage and application instructions of the manufacturer.
Only for deflection units with option "Air Flush"
5.3 Requirements to the cooling air
To avoid contamination of the mirror and the resulting destruction by the laser beam, the cooling air must meet the following requirements:
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 37
Chapter 5 Installation
Fig. 16
Preparing the
beam coupling
AXIALSCAN
(standard)
AXIALSCAN
(motorized)
FOCUSSHIFTER
(standard)
5.4 Checking the beam coupling: AXIALSCAN (Standard), AXIALSCAN (motorized), FOCUSSHIFTER (Standard)
5.4.1 Preparation
In order to be able to check the beam coupling, all components located in the beam path must
be removed and the deflection unit dismantled. The process for doing this is as follows:
38 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
o Remove the following components in turn:
- Connecting cable between linear translator module and deflection unit
- Linear translator module cover (1).
o Mark the installation position of the focusing lens (2) or the two focusing lenses for re-
installation.
o Remove the following components in turn:
- Focusing lens and second focusing lens if fitted.
- Deflection unit (4); in subsystems with spacer: Only dismantle the deflection unit, not
the spacer (3) and the mounting plate for the deflection unit.
- Linear translator, (5) or (6) depending on model.
o Protect the focusing lens, deflection unit and linear translator against dust.
Installation Chapter 5
Warning:
The laser beam can cause severe injury to the eyes and the skin. Make sure
that all personnel in the laser area are wearing appropriate protective goggles
and, if necessary, protective clothing.
Fig. 17
Checking the
beam coupling
AXIALSCAN
(standard)
AXIALSCAN
(motorized)
FOCUSSHIFTER
(standard)
5.4.2 Checking procedure
The following steps are used to check that the laser beam is input into the linear translator
module and output from the module centrally. If this is not the case, the input point and, if
necessary, the input angle of the laser beam must be adjusted as described below.
Checking the input point
o Insert the cross hair device into the beam input (1).
o Hold a piece of thermo transfer paper behind the cross hair device.
o Turn on the laser at low power for just long enough for a clearly visible effect to appear on
the thermo transfer paper (3).
o Check the beam diameter. It must be smaller than the input aperture specified in the data
sheet.
o Check that the laser beam appears in the center of the cross hairs. If not, the input point of
the laser beam needs to be adjusted.
Checking the input angle
o Insert the cross hair device into the beam output (2). In subsystems with spacer: Insert the
cross hair device into the opening in the mounting plate.
o Hold a piece of thermo transfer paper behind the cross hair device.
o Turn on the laser at low power for just long enough for a clearly visible effect to appear on
the thermo transfer paper.
o Check the beam diameter. It must be smaller than the input aperture specified in the data
sheet. If the beam diameter at the beam output is greater than that measured at the beam
input, this indicates excessive divergence of the laser beam. In this case, reduce the beam
diameter, e. g. by using beam expander with lower amplification.
o Check that the laser beam appears in the center of the cross hairs. If not, the input angle of
the laser beam needs to be adjusted.
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 39
Chapter 5 Installation
Fig. 18
Finalize the
checking procedure
AXIALSCAN
(standard)
AXIALSCAN
(motorized)
FOCUSSHIFTER
(standard)
Optimizing settings
o Repeat the entire adjustment process until optimum laser beam input point and input angle
settings are achieved.
5.4.3 Assembly
The process for assembling all of the components is as follows:
40 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
o Install the deflection unit (4).
o Install the focusing lens(es) (2). Pay attention to the corresponding markings.
o Install the linear translator, (5) or (6) depending on the model.
o If you are using a subsystem with manual field size adjustment, you now have to adjust the
field size ( page 44, Manually adjusting the field size). In subsystems with motorized field
size adjustment, this is done by the software.
o Fit the cover (1).
Installation Chapter 5
Fig. 19
Preparing the
beam coupling
AXIALSCAN
(water cooled)
5.5 Checking the beam coupling: AXIALSCAN (water cooled)
5.5.1 Preparation
In order to be able to check the beam coupling, all components located in the beam path must
be removed and the deflection unit dismantled. The process for doing this is as follows:
o Remove the following components in turn:
o Remove the following components in turn:
o Protect the focusing lens, deflection unit and linear translator against dust.
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 41
- Connection cable between linear translator module and deflection unit.
- Hose connections for water cooling.
Important information:
Make sure that no coolant gets into the subsystem. The units are not waterproof and
liquids can damage both the optical system and the electronics.
- Linear translator module cover (1).
- Focusing lens (3).
- Deflection unit (5);
in sub systems with spacer: Only dismantle the deflection unit, not the spacer (4) and
the mounting plate for the deflection unit.
- Linear translator (2).
Chapter 5 Installation
Warning:
The laser beam can cause severe injury to the eyes and the skin. Make sure
that all personnel in the laser area are wearing appropriate protective goggles
and, if necessary, protective clothing.
Fig. 20
Checking the
beam coupling
AXIALSCAN
(water cooled)
5.5.2 Checking procedure
The following steps are used to check that the laser beam is input into the linear translator
module and output from the module centrally. If this is not the case, the input point and, if
necessary, the input angle of the laser beam must be adjusted as described below.
Checking the input point
o Insert the cross hair device into the beam input (1).
o Hold a piece of thermo transfer paper behind the cross hair device.
o Turn on the laser at low power for just long enough for a clearly visible effect (3) to appear
on the thermo transfer paper.
o Check the beam diameter. It must be smaller than the input aperture specified in the data
sheet.
o Check that the laser beam appears in the center of the cross hairs. If not, the input point of
the laser beam needs to be adjusted.
Checking the input angle
o Insert the cross hair device (2) into the beam output and repeat the above steps in this
position.
In subsystems with a spacer, insert the cross hair device in the mounting plate.
o Hold a piece of thermo transfer paper behind the cross hair device.
o Turn on the laser at low power for just long enough for a clearly visible effect to appear on
the thermo transfer paper.
o Check the beam diameter. It must be smaller than the input aperture specified in the data
42 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
sheet. If the beam diameter at the beam output is greater than that measured at the beam
Installation Chapter 5
Fig. 21
Ending the
checking procedure
AXIALSCAN
(water cooled)
input, this indicates excessive divergence of the laser beam. In this case, reduce the beam
diameter, e.g. by using beam divergence with lower amplification.
o Check that the laser beam appears in the center of the cross hairs. If not, the input angle of
the laser beam needs to be adjusted on the laser.
Optimizing settings
o Repeat the entire adjustment process until optimum laser beam input point and input angle
settings are achieved.
5.5.3 Assembly
The process for assembling all of the components is as follows:
o Install the deflection unit (5).
o Install the focusing lens (3). Pay attention to the corresponding markings.
o Install the linear translator (2).
o Adjust the field size ( page 44, Manually adjusting the field size).
o Fit the cover (1).
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 43
Chapter 5 Installation
1
For subsystems with manual field size adjustment only
5.6 Manually adjusting the field size
The 3-axis laser beam subsystem can be adjusted to different field sizes as follows. The field
sizes that can be set are listed in the data sheet. If you want to set a different field size, you
must consult RAYLASE for assistance.
5.6.1 Preparation
o Load the correction file corresponding to the desired operating field size.
Make sure that you use the following identification code:
AXIALSCAN
The following identification code is used for AXIALSCAN type subsystems:
Type
AS AXIALSCAN
│ Aperture of associated deflection unit [mm]
│ │ Coating code Wavelength [nm] .............. Laser
│ │ DY 532 .............. ........... Nd:YAG
│ │ TY 355 ......................... Nd:YAG
│ │ Y 1064 ......................... Nd:YAG
│ │ C 10600 ........................ CO2
│ │ │ Field size range (min.-max.)
│ │ │ │ Type
│ │ │ │ st standard
│ │ │ │ bo beam optimized
│ │ │ │ hp high power
│ │ │ │ │
│ │ │ │ │ Operating field size
└─ └─ └─ └────────└── └
XX-XX-XX_XXXX-XXXXxxx_XXXX.gcd
FOCUSSHIFTER1
The following identification code is used for FOCUSSHIFTER type subsystems:
Type
FS FOCUSSHIFTER
│ Aperture of associated deflection unit [mm]
│ │ Coating code Wavelength [nm] .............. Laser
│ │ DY 532 .............. ........... Nd:YAG
│ │ TY 355 ......................... Nd:YAG
│ │ Y 1064 ......................... Nd:YAG
│ │ C 10600 ........................ CO2
│ │ │ Focal distance
│ │ │ │
└─ └─ └─ └──
XX-XX-XX_XXX.gcd
o Create all electrical connections for the power supply and for control of the 3-axis subsys-
tem ( page 9, Special hazards caused by mirrors made of beryllium).
o For details of connecting the deflection unit to a RAYLASE control card and operation with
RAYLASE software, refer to the corresponding manuals.
In general there are no special correction files for Focusshifter. The standard 2-axis correction files are used.
For using weldMARK in combination with FOCUSSHIFTER a special configuration file has to be generated in order to
compensate for different object sizes at different z-position.
44 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Installation Chapter 5
Warning:
The laser beam can cause severe injury to the eyes and the skin. Make sure
that all personnel in the laser area are wearing appropriate protective goggles
and, if necessary, protective clothing.
Fig. 22
Manual field size
adjustment
AXIALSCAN
(standard)
5.6.2 Adjustment procedure:: AXIALSCAN (standard)
o Loosen the two retaining screws (1).
o Move the linear translator to the distance (D) specified in the reference table in the appen-
dix. As shown above, the distance (D) is measured from the front edge of the linear translator to the inner side of the housing plate.
o Lightly screw in the linear translator at the set position.
Fine adjustment
Fine adjustment is used to adjust the linear translator to the laser-specific divergence.
o Place a target of the same size as the operating field at the specified working distance
from the deflection unit.
o In turn, use the laser to mark a square in the center of the field and at one corner.
o Check that the spot diameter is the same in the center of the field and at the corner.
o If necessary, move the linear translator within the range provided by the slots and repeat
the fine adjustment until a satisfactory result is obtained in the center of the field and at the
corner.
o Fix the linear translator in place with the two fastening screws (1).
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 45
Chapter 5 Installation
1 Linear translator
3 Focusing lens
2 Clamping screw
4 Adjusting screw
Warning:
The laser beam can cause severe injury to the eyes and the skin. Make sure
that all personnel in the laser area are wearing appropriate protective goggles
and, if necessary, protective clothing.
Fig. 23
Manual field
size adjustment
AXIALSCAN
(water cooled)
5.6.3 Adjustment procedure: AXIALSCAN (water cooled)
o Release the clamping screw (2).
o Move the linear translator (1) using the adjusting screw (4) until the required setting is ap-
proximately reached. The positions for the approximate setting are indicated by a sticker
attached on the inside, which can be seen when the cover is open.
Fine adjustment
Fine adjustment is used to adjust the linear translator to the laser-specific divergence.
o Place a marker the same size as the operating field at the specified
working distance from the deflection unit.
o In turn, use the laser to mark a square in the center of the field and at one corner.
o Check that the spot diameter is the same in the center of the field and at the corner.
o If necessary, move the linear translator using the adjusting screw (4) and repeat the fine
adjustment until a satisfactory result is obtained in the center of the field and at the corner.
o Fix the linear translator in place with the clamping screw (2).
46 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Installation Chapter 5
For subsystems with motorized field size adjustment only
5.7 Motorized field size adjustment
The 3-axis laser beam subsystem can be adjusted to different field sizes using the motor:
With motorized field size adjustment, the software adjusts the optical components.
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 47
Chapter 6 Maintenance and Cleaning
Warning:
The laser beam can cause severe injury to the eyes and the skin. Before cleaning, make sure that the laser device is switched off and secured against accidentally being switched on.
Warning:
The laser beam can cause severe injury to the eyes and the skin. Before cleaning, make sure that the laser device is switched off and secured against accidentally being switched on.
6 MAINTENANCE AND CLEANING
The subsystem doesn‘t contain any components that require regular maintenance.
Repairs may only be carried out by RAYLASE or RAYLASE certified service centers because
special know-how and comprehensive testing methods are required.
RAYLASE offers worldwide certified service and repair centers.
For a service and repair center in your area, see www.raylase.com.
6.1 Cleaning the housing
The deflection unit housing is dust proof. It can be cleaned with a duster. If it is very dirty, the
duster can be moistened with a light and non-aggressive cleaning solution (e.g. soap solution).
6.2 Cleaning the optical system
Dirty optical surfaces result in increased absorption of the laser radiation. This can cause the
dirt to heat up sufficiently, so that it burns into the optical surfaces and damage them permanently.
The following circumstances can cause increased accumulation of dirt:
The ambient atmosphere is contaminated with dirt, grease or other particles.
Vapors and particles are produced while working.
Talking, coughing or sneezing close to optical surfaces.
In general, all contamination of the optical system should be avoided wherever possible.
However, as contamination cannot be avoided completely, the optical system must be
cleaned at appropriate intervals. Regular checking and cleaning of the optical surfaces can
prevent permanent damage.
Note: RAYLASE accepts no liability for damaged optical components!
Note: Damage caused during the laser process, e.g. when processing metals, is irreversible
and cannot be resolved by cleaning.
48 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Maintenance and Cleaning Chapter 6
Warning:
The laser beam can cause severe injury to the eyes and the skin. Before cleaning, make sure that the laser device is switched off and secured against accidentally being switched on.
Warning:
The laser beam can cause severe injury to the eyes and the skin. Before cleaning, make sure that the laser device is switched off and secured against accidentally being switched on.
For deflection units with lens and protective glasses only
6.2.1 Instructions for cleaning lenses and protective glasses
Fingerprints contain aggressive substances that can damage the optical surfaces. Optical
surfaces should therefore only be touched when wearing suitable gloves or with a lens cleaning cloth.
o Only touch the optical elements when wearing suitable cotton gloves and only touch the
edges.
o Blow loose particles from the surface with clean and oil-free compressed air. Note that the
compressed air in workshops can contain oil particles and is therefore unsuitable for cleaning the optical system.
o Moisten a suitable lens cleaning cloth with ethanol suitable for cleaning optical compo-
nents.
o Place one end of the moistened cloth on the optical system and slowly move it over the
optical components. Do not exert any pressure and do not rub the optical components.
o Remove any remaining ethanol residue with a dry optical cloth.
o Repeat the procedure until the surface is completely clean. Use a new cleaning cloth for
each repetition.
6.2.2 Instructions for cleaning mirrors
The mirror surfaces are extremely sensitive and may only be cleaned by experienced personnel. We strongly recommend sending the deflection unit in to RAYLASE for the mirror cleaning, as opening of the deflection unit by unauthorized personnel voids the warranty.
However, if you want to clean the mirrors by yourself, follow the same procedure as for cleaning the lens but with even more care ( above, Instructions for cleaning lenses and protective
glasses).
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 49
Chapter 6 Maintenance and Cleaning
Warning:
If the deflection unit is provided with one of the adjacent signs, there
is a health hazard coming from the material of the optical components.
6.2.3 Special notes for mirrors made of beryllium and lenses made of zinc selenide
Behaviour if mirrors or lenses may be or are actually destroyed
Turn the laser device off immediately!
Leave the room for at least 30 minutes!
Under no circumstances remove the protective glass or the F-Theta lens of the deflection
unit, to check a possible destruction.
In the deflection unit, toxic dust or fragments may be created.
If the deflection unit has nevertheless been opened and fragments have been fallen out,
the fragments must be collected wearing appropriate protective clothing and respirators
and disposed of as a hazardous substance according to the local regulations.
Label the defective deflection unit with a clear warning and send the unit airtight and well
packaged to RAYLASE.
The persons commissioned with the dismantling of the deflection unit must wear suitable
protective clothing and respirators.
The room in which the beryllium mirror or the zinc selenide lens has been destroyed, must
be cleaned, decontaminated and ventilated sufficiently.
Wear gloves and a surgical mask for the following steps!
Gather all the broken pieces carefully and pack them in a sealed plastic container.
Clean all contaminated components and surfaces with a damp cloth and pack the cloth in a
sealed plastic container.
Send the container to your supplier. He is responsible for the proper disposal of the mate-
rial.
Hazardous properties of beryllium
With the destruction of a beryllium mirror by laser radiation beryllium dusts may be generated.
These dusts can cause cancer, are toxic if swallowed and very toxic by inhalation.
Hazardous properties of zinc selenide
With the destruction of the lenses made of zinc selenide, toxic dusts may be generated with
hydrogen selenide and selenium dioxide. These dusts can cause cancer, are toxic if swallowed and very toxic by inhalation.
In order to improve the optical properties of the material, zinc selenide is often provided with
an anti-reflective coating, which can contain thorium fluoride. Thorium is an α-emitter and
weakly radioactive. It is potentially hazardous to health if inhaled or swallowed. Since the thorium-containing coating is embedded between layers of non-radioactive layers, there is no risk
for the user under normal circumstances.
50 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Troubleshooting Chapter 7
Warning:
The laser beam can cause severe injury to the eyes and the skin.
Never look directly or indirectly into the laser beam during troubleshooting.
Do not disable any safety precautions to protect against laser radiation.
Wear protective clothing and/or goggles appropriate for the relevant laser
class.
Problem
Possible cause and remedy
Poor marking
quality
Defective power supply
Incorrect marking parameters
Marking quality
has deteriorated
Dirty optical
system
page 49, Instructions for cleaning lenses and protective
glasses
page 49, Instructions for cleaning mirrors
Laser power
decreasing
The RAYLASE weldMARK™ marking software can compensate
for a loss of laser power.
Menu: System > Global adjustments
Marking parameters changed
Beam expander changed
Laser spot
changed
Dirty optical
system
page 49, Instructions for cleaning lenses and protective
glasses
Dirty or damaged mirrors
page 49, Instructions for cleaning mirrors
Send deflection unit in for repair
Laser system out of adjustment
No laser beam,
although process started
from PC.
Beam path
blocked.
Remove protective cover from beam input and/or output
Fault in laser drive
Fault in laser system
The deflection
unit only deflects the laser
beam in one
direction or not
at all.
Data cable defective
page 13, Status LED of the linear translator module
X and Y axis
reversed
Incorrect cabling
7 TROUBLESHOOTING
In case of malfunctions, check whether the symptom and a possible remedy are included in
the following checklist.
If the fault cannot be resolved, contact RAYLASE Customer Service for further assistance.
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 51
Chapter 8 Disposal
8 DISPOSAL
For the disposal of the deflection unit, note local policies, regulations and laws. If the mirrors
are made of beryllium, the local Hazardous Substance Regulations must be considered. The
signs shows which deflection units are concerned ( page 6, Signs).
52 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Index
INDEX
A
Adjusting the field size ...................................44
Analog input
Deflection unit ............................................33
Linear translator module ............................28
B
Beryllium ....................................................9, 50
C
CE symbol ....................................................... 6
Classification of laser devices ......................... 7
Cleaning .........................................................48
Conformity with directives ..............................18
Customer Service...........................................12
Customer Support ..........................................12
D
Digital input
Deflection unit ............................................35
Linear translator module ............................29
Digital interface ........................................28, 33
Digital output
Linear translator module ............................32
M
Manufacturer ................................................. 12
Module overview ........................................... 11
P
Package contents .......................................... 10
Power supply
Deflection unit ........................................... 34
Linear translator module ........................... 30
R
Rating plate code .......................................... 15
Requirements to the cooling air ..................... 37
Requirements to the cooling water ................ 37
S
Safety instructions ........................................... 5
Seal label ........................................................ 6
Shutter............................................................. 5
Signs ............................................................... 6
Status LEDs
Deflection unit ........................................... 14
Linear translator module ........................... 13
Stepper motor interface ................................. 31
E
Earth symbol ................................................... 6
F
Functional description ....................................19
I
Installation ................................................36, 37
Intended use ..................................................10
L
Laser area ....................................................... 8
Laser beam subsystem ..................................19
Laser safety .................................................... 5
T
Technical data ............................................... 15
Troubleshooting ............................................ 51
W
Warranty ........................................................ 12
X
XY2-100 Standard ......................................... 34
Z
Zinc selenide ............................................. 9, 50
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 53
Appendix
APPENDIX
Data Sheets:
AXIALSCAN-20-C [100]
AXIALSCAN-20-C [250]
AXIALSCAN-20-DY [200]
AXIALSCAN-20-TY [200]
AXIALSCAN-20-Y [200]
AXIALSCAN-20-Y [600]
AXIALSCAN-30-C [100BO]
AXIALSCAN-30-C [200HP]
AXIALSCAN-30-C [250BO]
AXIALSCAN-30-C [300BO]
AXIALSCAN-30-C [600HP]
AXIALSCAN-30-Y
FOCUSSHIFTER
54 RAYLASE 3-Axis Subsystems for Laser Beam Deflection MN025 / v2.1.0
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
09/2014
AXIALSCAN-20-C [100]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
100x100 to 500x500 mm²
Ambient Temperature
+15 to +35 °C
Lens Positions
Storage Temperature
-10 to +60 °C
Humidity
≤ 80 % non-condensing
Weight
approx. 12.0 kg
Specifications for Linear Translator Modules
Field size
100 x 100 mm²
200 x 200 mm²
300 x 300 mm²
400 x 400 mm²
500 x 500 mm²
Mechanical Data:
Distance D1)
83.1 mm
129.93 mm
147.84 mm
157.28 mm
163.11 mm
Working Distance2)
89.7 mm
213.4 mm
337.2 mm
460.9 mm
584.7 mm
Dynamic Data:
Spot Diameter 1/e
3)
154.0 µm
278.1 µm
402.0 µm
525.4 µm
648.3 µm
Resolution
< 4 µm
< 7 µm
< 10 µm
< 13 µm
< 16 µm
Acceleration Time
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
Focus Range in Z Direction
-------
32.0 mm
107.0 mm
242.0 mm
463.0 mm
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M2 = 1,0
Specifications for associated Deflection Units
SUPERSCAN-20
SUPERSCAN-IIE-20L
Mechanical Data:
Beam Displacement
26.0 mm
25.633)/26.28 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
Repeatability (RMS)
3 µrad
2 µrad
Max. Gaindrift1)
< 50 ppm/K
< 15 ppm/K
Max. Offsetdrift1)
< 30 µrad/K
< 10 µrad/K
Long-term Drift
1,2)
< 300 µrad
< 150 µrad
Long-term Drift with water tempering
[W] [W2]
1,2,)
< 100 µrad
Mirrors QU
SI
BE
Acceleration Time (10-90%) (ms)
≤ 0.6
≤ 0.58
≤ 0.61
≤ 0.40
1) Drift per axis 2) after warming-up, variations of ambient temperature < 1K , variations of cooling water <1K 3) Specification for QU fused Silica mirrors
Specifications for Optics
CO2
Wavelength
10,600 nm
Coating
AR Coating
Max. Laser Power, cw
700 W/cm2
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-20-C [250]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
250x250 to 1,500x1,500 mm²
Ambient Temperature
+15 to +35 °C
Lens Positions
Storage Temperature
-10 to +60 °C
Humidity
≤ 80 % non-condensing
Weight
approx. 12.0 kg
Specifications for Linear Translator Modules
Field size
250 x 250 mm²
500 x 500
mm²
750 x 750
mm²
1.000 x 1.000
mm²
1.250 x 1.250
mm²
1.500 x 1.500
mm²
Mechanical Data:
Distance D1)
54.77 mm
98.25 mm
116.88 mm
126.32 mm
132.02 mm
135.83 mm
Working Distance2)
275 mm
584.7 mm
894.1 mm
1,203.4 mm
1,512.8 mm
1,822.2 mm
Dynamic Data:
Spot Diameter 1/e
3)
281.0 µm
548.79 µm
816.7 µm
1, 085.03 µm
1, 353.66 µm
1, 622.61 µm
Resolution
< 8 µm
< 16 µm
< 24 µm
< 32 µm
< 40 µm
< 48 µm
Acceleration Time
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
Focus Range in Z Direction
-------
67.0 mm
270.0 mm
647.0 mm
1,287mm
2,357 mm
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M2 = 1, 0
Specifications for associated Deflection Units
SUPERSCAN-20
SUPERSCAN-IIE-20L
Mechanical Data:
Beam Displacement
26.0 mm
25.633)/26.28 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
Repeatability (RMS)
3 µrad
2 µrad
Max. Gaindrift1)
< 50 ppm/K
< 15 ppm/K
Max. Offsetdrift1)
< 30 µrad/K
< 10 µrad/K
Long-term Drift
1,2)
< 300 µrad
< 150 µrad
Long-term Drift with water tempering
[W] [W2]
1,2)
< 100 µrad
Mirrors QU
SI
BE
Acceleration Time (10-90%) (ms)
≤ 0.6
≤ 0.58
≤ 0.61
≤ 0.40
1) Drift per axis 2) after warming-up, variations of ambient temperature < 1K , variations of cooling water <1K 3) Specification for QU fused Silica mirrors
Specifications for Optics
CO2
Wavelength
10,600 nm
Coating
AR Coating
Max. Laser Power, cw
700 W/cm2
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-20-DY [200]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
200x200 to 1.200x1.200 mm²
Ambient Temperature
+15 to +35 °C
Lens Positions
Storage Temperature
-10 to +60 °C
Humidity
≤ 80 % non-condensing
Weight
approx. 12.0 kg
Specifications for Linear Translator Modules
Field size
200 x 200 mm²
500 x 500 mm²
800 x 800 mm²
1,000 x 1,000 mm²
1,200 x 1,200 mm²
Mechanical Data:
Distance D1)
183.45 mm
127.11 mm
110.1 mm
104.4 mm
100.59 mm
Working Distance2)
239.9 mm
491.7 mm
862.9 mm
1110.4 mm
1357.9 mm
Dynamic Data:
Spot Diameter 1/e
3)
15.76 µm
35.19 µm
56.06 µm
69.96 µm
83.84 µm
Resolution
< 7 µm
< 17 µm
< 26 µm
< 35 µm
< 42 µm
Acceleration Time
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
Focus Range in Z Direction
------
119 mm
520 mm
1041 mm
1918 mm
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M2 = 1,0
Specifications for associated Deflection Units
SUPERSCAN-20
SUPERSCAN-IIE-20L
Mechanical Data:
Beam Displacement
26.0 mm
25.634)/26.28 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
Repeatability (RMS)
3 µrad
2 µrad
Max. Gaindrift1)
< 50 ppm/K
< 15 ppm/K
Max. Offsetdrift1)
< 30 µrad/K
< 10 µrad/°K
Long-term Drift
1,2)
< 300 µrad
< 300 µrad
Long-term Drift with water tempering
[W] [W2]
1,2,3)
< 100 µrad
Mirrors QU
SI
BE
Acceleration Time (10-90%) (ms)
≤ 0.6
≤ 0.58
≤ 0.61
≤ 0.40
1) From bearing surface of lens ring, incl. 1 mm safety clearance, 2) Drift per axis, 3) after warming-up, variations of ambient temperature < 1K, variations of
cooling water < 1K 4) Specification for QU fused Silica mirrors
Specifications for Optics
Nd:YAG doubled
Wavelength
532 nm
Coating
AR Coating
Max. Laser Power, cw
500 W/cm2
Max. Laser Power, 100ns Pulse
Width
250 MW/cm2
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-20-TY [200]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V, 0-10 V
±20 mA, 0-40 mA
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
200x200 to 1.200x1.200 mm²
Ambient Temperature
+15 to +35 °C
Lens Positions
Storage Temperature
-10 to +60 °C
Humidity
≤ 80 % non-condensing
Weight
approx. 12.0 kg
Specifications for Linear Translator Modules
Field size
200 x 200 mm²
500 x 500 mm²
700 x 700 mm²
1,000 x 1,000 mm²
1,200 x 1,200 mm²
Mechanical Data:
Distance D1)
166.83 mm
121.65 mm
112.18 mm
104.89 mm
102 mm
Working Distance2)
214 mm
585 mm
832 mm
1,204 mm
1,451 mm
Dynamic Data:
Spot Diameter 1/e
3)
10 µm
24 µm
33 µm
46 µm
55 µm
Resolution
< 7 µm
< 17 µm
< 24 µm
< 35 µm
< 42 µm
Acceleration Time
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
Focus Range in Z Direction
10 mm
237mm
628 mm
2,002 mm
4,283 mm
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M2 = 1,0
Specifications for associated Deflection Units
SUPERSCAN-20
SUPERSCAN-IIE-20L
Mechanical Data:
Beam Displacement
26.0 mm
25.633)/26.28 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
Repeatability (RMS)
3 µrad
2 µrad
Max. Gaindrift1)
50 ppm/K
15 ppm/K
Max. Offsetdrift1)
30 µrad/K
10 µrad/K
Long-term Drift
1,2)
< 300 µrad
< 150 µrad
Long-term Drift with water tempering
[W] [W2]
1,2)
< 100 µrad
Mirrors QU
SI
BE
Acceleration Time (10-90%) (ms)
≤ 0.6
≤ 0.58
≤ 0.61
≤ 0.40
1) Drift per axis 2) after warming-up, variations of ambient temperature < 1K , variations of cooling water <1K 3) specification for QU fused Silica mirrors
Specifications for Optics
Nd:YAG tripled
Wavelength
355 nm
Coating
AR Coating
Max. Laser Power, cw
100 W/cm
2
Max. Laser Power, 10ns Pulse Width
20 MW/cm
2
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-20-Y [200]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
200x200 to 600x600 mm²
Ambient Temperature
+15 to +35 °C
Lens Positions
Storage Temperature
-10 to +60 °C
Humidity
≤ 80 % non-condensing
Weight
approx. 12.0 kg
Specifications for Linear Translator Modules
Field size
200 x 200 mm²
300 x 300 mm²
400 x 400 mm²
500 x 500 mm²
600 x 600 mm²
Mechanical Data:
Distance D1)
122.3 mm
98.07 mm
85.61 mm
78.04 mm
72.95 mm
Working Distance2)
221.1 mm
344.9 mm
468.6 mm
592.4 mm
716.1 mm
Dynamic Data:
Spot Diameter 1/e
3)
29.9 µm
44 µm
58.2 µm
72.3 µm
86.3 µm
Resolution
< 7 µm
< 10 µm
< 13 µm
< 16 µm
< 19 µm
Acceleration Time
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
Focus Range in Z Direction
8.0 mm
56.0 mm
143.0 mm
280.0 mm
486.0 mm
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M2 = 1,0
Specifications for associated Deflection Units
SUPERSCAN-20
SUPERSCAN-IIE-20L
Mechanical Data:
Beam Displacement
26.0 mm
25.633)/26.28 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
Repeatability (RMS)
3 µrad
2 µrad
Max. Gaindrift1)
50 ppm/K
15 ppm/K
Max. Offsetdrift1)
30 µrad/K
10 µrad/K
Long-term Drift
1,2)
< 300 µrad
< 150 µrad
Long-term Drift with water tempering
[W] [W2]
1,2,)
< 100 µrad
Mirrors QU
SI
BE
Acceleration Time (10-90%) (ms)
≤ 0.6
≤ 0.58
≤ 0.61
≤ 0.40
1) Drift per axis 2) after warming-up, variations of ambient temperature < 1K , variations of cooling water <1K 3) Specification for Qu fused Silica mirrors
Specifications for Optics
Nd:YAG
Wavelength
1,064 nm
Coating
AR Coating
Max. Laser Power, cw
1000 W/cm2
Max. Laser Power, 100ns Pulse
Width
500 MW/cm2
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-20-Y [600]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
600x600 to 1,200x1,200 mm²
Ambient Temperature
+15 to +35 °C
Lens Positions
Storage Temperature
-10 to +60 °C
Humidity
≤ 80 % non-condensing
Weight
approx. 12.0 kg
Specifications for Linear Translator Modules
Field size
600 x 600
mm²
700 x 700
mm²
800 x 800
mm²
900 x 900
mm²
1,000 x 1,000
mm²
1,100 x 1,100
mm²
1,200 x 1,200
mm²
Mechanical Data:
Distance D1)
76.1 mm
67.0 mm
60.3m
55.3 mm
51.2 mm
48.0 mm
45.3 mm
Working Distance2)
716 mm
840 mm
964 mm
1,087 mm
1,211 mm
1,335 mm
1,459 mm
Dynamic Data:
Spot Diameter 1/e
3)
82 µm
97 µm
112 µm
128 µm
143 µm
158 µm
173 µm
Resolution
< 19 µm
< 22 µm
< 25 µm
< 28 µm
< 31 µm
< 34 µm
< 37 µm
Acceleration Time
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
Focus Range in Z Direction
49.0 mm
108.0 mm
187.0 mm
287.0 mm
412.0 mm
566.0 mm
753.0 mm
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the edge of deflection unit to the processing field; the distance will
vary with laser divergence and lens tolerance. 3) Input beam quality: M2 = 1,0
Specifications for associated Deflection Units
SUPERSCAN-20
SUPERSCAN-IIE-20L
Mechanical Data:
Beam Displacement
26.0 mm
25.633)/26.28 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
Repeatability (RMS)
3 µrad
2 µrad
Max. Gaindrift1)
50 ppm/K
15 ppm/K
Max. Offsetdrift1)
30 µrad/K
10 µrad/K
Long-term Drift
1,2)
< 300 µrad
< 150 µrad
Long-term Drift with water tempering
[W] [W2]
1,2,)
< 100 µrad
Mirrors QU
SI
BE
Acceleration Time (10-90%) ms
≤ 0.6
≤ 0.58
≤ 0.61
≤ 0.40
1) Drift per axis 2) after warming-up, variations of ambient temperature < 1K ,variations of cooling water <1K 3) Specification for Qu fused Silica mirrors
Specifications for Optics
Nd:YAG
Wavelength
1,064 nm
Coating
AR Coating
Max. Laser Power, cw
1000 W/cm2
Max. Laser Power, 100ns Pulse
Width
500 MW/cm2
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-30-C [100BO]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
100x100 to 500x500 mm²
beam optimized
Ambient Temperature
+15 to +35 °C
Lens Positions
Storage Temperature
-10 to +60 °C
Humidity
≤ 80 % non-condensing
Weight
approx. 13.5 kg
Specifications for Linear Translator Modules
Field size
100 x 100 mm²
200 x 200 mm²
300 x 300 mm²
400 x 400 mm²
500 x 500 mm²
Mechanical Data:
Distance D1)
177.9 mm
132.0 mm
114.8 mm
105.5 mm
99.7 mm
Working Distance2)
77.0 mm
201.0 mm
325.0 mm
449.0 mm
572.0 mm
Dynamic Data:
Spot Diameter 1/e
3)
96 µm
173 µm
250 µm
327 µm
403 µm
Resolution
< 4 µm
< 7 µm
< 10 µm
< 13 µm
< 16 µm
Acceleration Time
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
Focus Range in Z Direction
-----
34 mm
111 mm
248 mm
473 mm
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M2 = 1,0
Specifications for associated Deflection Units
TURBOSCAN-30
SUPERSCAN-IIE-30
SUPERSCAN-III-30
Mechanical Data:
Beam Displacement
35.7mm
35.384)/35.82 mm
35.44)/36.0 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
±0.393 rad
Repeatability (RMS)
2 µrad
2 µrad
2 µrad
Max. Gaindrift1)
70 ppm/K
15 ppm/K
15 ppm/K
Max. Offsetdrift1)
35 µrad/K
10 µrad/K
10 µrad/K
Long-term Drift
1,2)
< 400 µrad
< 150 µrad
Long term Drift with water
tempering
[W] [W2]
1,2,3)
< 100 µrad
< 60 µrad3)
Mirrors QU
SI
SC
BE
QU
SI
SC
BE
Tunings LN
RA
LA
RN
LA
RN
LA
RN
Acceleration Time (10-90%) (ms)
0.90
0.90
0.84
0.52
0.50
0.90
0.77
0.85
0.76
0.60
0.52
0.56
0.49
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) Specification for Qu fused Silica mirrors
Specifications for Optics
CO2
Wavelength
10,600 nm
Coating
AR Coating
Max. Laser Power, cw
700 W/cm2
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-30-C [250BO]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
250x250 to 1,250x1,250 mm²
beam optimized
Ambient Temperature
+15 to +35 °C
Lens Positions
Storage Temperature
-10 to +60 °C
Humidity
≤ 80 % non-condensing
Weight
approx. 13.5 kg
Specifications for Linear Translator Modules
Field size
250 x 250 mm²
500 x 500 mm²
750 x 750 mm²
1,000 x 1,000 mm²
1,250 x 1,250 mm²
Mechanical Data:
Distance D1)
161.7 mm
123.3 mm
110.5 mm
104.0 mm
100.2 mm
Working Distance2)
263.0 mm
572.0 mm
882.0 mm
1,191.0 mm
1,500.0 mm
Dynamic Data:
Spot Diameter 1/e
3)
221.0 µm
440.0 µm
658.0 µm
877.0 µm
1095.0 µm
Resolution
< 8 µm
< 16 µm
< 23 µm
< 31 µm
< 39 µm
Acceleration Time
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
Focus Range in Z Direction
6 mm
173 mm
602 mm
1540 mm
3710 mm
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M2 = 1,0
Specifications for associated Deflection Units
TURBOSCAN-30
SUPERSCAN-IIE-30
SUPERSCAN-III-30
Mechanical Data:
Beam Displacement
35.7mm
35.384)/35.82 mm
35.44)/36.0 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
±0.393 rad
Repeatability (RMS)
2 µrad
2 µrad
2 µrad
Max. Gaindrift1)
70 ppm/K
15 ppm/K
15 ppm/K
Max. Offsetdrift1)
35 µrad/K
10 µrad/K
10 µrad/K
Long-term Drift
1,2)
< 400 µrad
< 150 µrad
Long term Drift with water tempering
[W] [W2]
1,2;3)
< 100 µrad
< 60 µrad3)
Mirrors QU
SI
SC
BE
QU
SI
SC
BE
Tunings LN
RA
LN
RA
LN
RA
LN
RA
Acceleration Time (10-90%) (ms)
0.90
0.90
0.84
0.52
0.50
0.90
0.77
0.85
0.76
0.60
0.52
0.56
0.49
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) Specification for QU fused Silica mirrors
Specifications for Optics
CO2
Wavelength
10,600 nm
Coating
AR Coating
Max. Laser Power, cw
700 W/cm2
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-30-C [300BO]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
300x300 to 750x750 mm²
beam optimized
Ambient Temperature
+15 to +35 °C
Lens Positions
Storage Temperature
-10 to +60 °C
Humidity
≤ 80 % non-condensing
Weight
approx. 13.5 kg
Specifications for Linear Translator Modules
Field size
300 x 300 mm²
400 x 400 mm²
500 x 500 mm²
600 x 600 mm²
750 x 750 mm²
Mechanical Data:
Distance D1)
206.0 mm
187.0 mm
175.0 mm
167.0 mm
159.0 mm
Working Distance2)
325.0 mm
448.0 mm
572.0 mm
696.0 mm
882.0 mm
Dynamic Data:
Spot Diameter 1/e
3)
200.0 µm
265.0 µm
330.0 µm
390.0 µm
490.0 µm
Resolution
< 10 µm
< 13 µm
< 16 µm
< 19 µm
< 23 µm
Acceleration Time
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
≤ 3 ms
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M2 = 1,0
Specifications for associated Deflection Units
TURBOSCAN-30
SUPERSCAN-IIE-30
SUPERSCAN-III-30
Mechanical Data:
Beam Displacement
35.7mm
35.384)/35.82 mm
35.44)/36.0 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
±0.393 rad
Repeatability (RMS)
2 µrad
2 µrad
2 µrad
Max. Gaindrift1)
70 ppm/K
15 ppm/K
15 ppm/K
Max. Offsetdrift1)
35 µrad/K
10 µrad/K
10 µrad/K
Long-term Drift
1,2)
< 400 µrad
< 150 µrad
Long term Drift with water
tempering
[W] [W2]
1,2;3)
< 100 µrad
< 60 µrad3)
Mirrors
QU
SI
SC
BE
QU
SI
SC
BE
Tunings
LN
RA
LN
RA
LN
RA
LN
RA
Acceleration Time (10-90%) (ms)
0.90
0.90
0.84
0.52
0.50
0.90
0.77
0.85
0.76
0.60
0.52
0.56
0.49
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) Specification for Qu fused Silica mirrors
Specifications for Optics
CO2
Wavelength
10,600 nm
Coating
AR Coating
Max. Laser Power, cw
700 W/cm2
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN HP
AXIALSCAN-30-C [200HP]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Input Aperture (fbd)
20 mm
Field Size
200x200 bis 600x600 mm²
beam optimized
Ambient Temperature
+15 to +35 °C
Lens Position
Storage Temperature
-10 to +60 °C
Humidity
≤ 80 % non-condensing
Weight
approx 16.5 kg
Specifications for Linear Translator Modules
Field size
200 x 200 mm²
300 x 300 mm²
400 x 400 mm²
500 x 500 mm²
600 x 600 mm²
Mechanical Data:
Distance D1)
112mm
88 mm
76 mm
68 mm
63 mm
Working Distance2)
199.2 mm
322.9 mm
446.7 mm
570.4 mm
694.2 mm
Dynamic Data:
Spot Diameter 1/e
3)
173.7 µm
255.4 µm
337.1 µm
418.8 µm
500.5 µm
Resolution
< 7 µm
< 10 µm
< 14 µm
< 17 µm
< 20 µm
Acceleration Time
≤ 2.5 ms
≤ 2.5 ms
≤ 2.5 ms
≤ 2.5 ms
≤ 2.5 ms
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M2 = 1,0
Specifications for associated Deflection Units
SUPERSCAN-IIE-30
SUPERSCAN-III-30
Mechanical Data:
Beam Displacement
35.384)/35.82 mm
35.44)/36.0 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
Repeatability (RMS)
2 µrad
2 µrad
Max. Gaindrift1)
15 ppm/K
15 ppm/K
Max. Offsetdrift1)
10 µrad/K
10 µrad/K
Long-term Drift
1,2)
< 150 µrad
Long term Drift with water tempering
[W] [W2]
1,2,3)
< 100 µrad
< 60 µrad3)
Mirrors
QU
SI
SC
BE
QU
SI
SC
BE
Tunings
LN
RA
LN
RA
LN
RA
LN
RA
Acceleration Time (10-90%) (ms)
0.90
0.84
0.52
0.50
0.90
0.77
0.85
0.76
0.60
0.52
0.56
0.49
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) specification for QU fused Silica mirrors
Specifications for Optics
CO
2
Wavelength
10.600 nm
Coating
AR Coating
Max. Laser Power, cw
700 W/cm
2
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN HP
Water tempering
Requirements
Flow rate
Pressure loses
Wasser1)
Clean tap water with additives
2 l / min
0.3 bar
Temperatur
22-28°C
4 l / min
0.6 bar
Druck Maximum
2-3 bar
6 l / min
0.9 bar
(1) Caution: When using cooling water including deionized water, suitable additives must be used to prevent the growth of algae and protect the aluminium
parts against corrosion.
Additive recommendations: Standard industrial applications e.g. CCL105 (NALCO)
Food & beverage, packaging applications: e.g. polypropylene glycol (Dow Chemical)
Please consult your additive supplier for dosage information
Air flushing
Air
oil-free, technically pure
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN HP
AXIALSCAN-30-C [600HP]
General Specifications
Power
Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp,
@20MHz bandwidth
Input Aperture (fbd)
20 mm
Field Size
600x600 to 1200x1200 mm²
beam optimized
Ambient Temperature
+15 to +35 °C
Lens Position
Storage Temperature
-10 to +60 °C
Humidity
≤ 80 % noncondensing
Weight
approx 16.5 kg
Specifications for Linear Translator Modules
Field size
600 x 600 mm²
800 x 800 mm²
1000 x 1000 mm²
1200 x 1200 mm²
Mechanical Data:
Distance D1)
162 mm
143 mm
131 mm
123 mm
Working Distance2)
694 mm
941 mm
1189 mm
1436 mm
Dynamic Data:
Spot Diameter 1/e
3)
492 µm
653 µm
813 µm
974 µm
Resolution
< 20 µm
< 27 µm
< 34 µm
< 40 µm
Acceleration Time
≤ 2.5 ms
≤ 2.5 ms
≤ 2.5 ms
≤ 2.5 ms
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M2 = 1,0
Specifications for associated Deflection Units
SUPERSCAN-IIE-30
SUPERSCAN-III-30
Mechanical Data:
Beam Displacement
35.384)/35.82 mm
35.44)/36.0 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
Repeatability (RMS)
2 µrad
2 µrad
Max. Gaindrift1)
15 ppm/K
15 ppm/K
Max. Offsetdrift1)
10 µrad/K
10 µrad/K
Long-term Drift
1,2)
< 150 µrad
Long term Drift with water tempering
[W] [W2]
1,2,3)
< 100 µrad
< 60 µrad3)
Mirrors
QU
SI
SC
BE
QU
SI
SC
BE
Tunings
LN
RA
LN
RA
LN
RA
LN
RA
Acceleration Time (10-90%) (ms)
0.90
0.84
0.52
0.50
0.90
0.77
0.85
0.76
0.60
0.52
0.56
0.49
2) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) specification for QU fused Silica mirrors
Specifications for Optics
CO
2
Wavelength
10,600 nm
Coating
AR Coating
Max. Laser Power 1/e², cw
700 W/cm
2
Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN HP
Water tempering
Requirements
Flow rate
Pressure loses
Wasser1)
Clean tap water with additives
2 l / min
0.3 bar
Temperatur
22-28°C
4 l / min
0.6 bar
Druck Maximum
2-3 bar
6 l / min
0.9 bar
(1) Caution: When using cooling water including deionized water, suitable additives must be used to prevent the growth of algae and protect the aluminium
parts against corrosion.
Additive recommendations: Standard industrial applications: e.g. CCL105 (NALCO)
Food & beverage, packaging applications: e.g. polypropylene glycol (Dow Chemical)
Please consult your additive supplier for dosage information
Air flushing
Air
oil-free, technically pure
Data Sheet 3-Axis Laser Beam Subsystems
03/2013
AXIALSCAN-30-Y [300HP]
General Specifications
Power Supply
Voltage
±15 V to ±18 V
Interface Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
20 mm
Field Size
300x300 mm² to 1200x1200 mm²
Beam optimized
Ambient Temperature
+15 °C to +35 °C
Lens Positions
Storage Temperature
-10 °C to +60 °C
Humidity
≤ 80 % non condensing
Weight
approx. 16.5 kg
Specifications for Linear-Translator-Modules
Field Size
300 x 300 mm²
500 x 500 mm²
800 x 800 mm²
1000 x 1000 mm²
1200 x 1200 mm²
Mechanical Data:
Distance D
1)
132 mm
104 mm
87 mm
81 mm
77 mm
Working Distance
2)
332 mm
579 mm
950 mm
1198 mm
1446 mm
Dynamic Data:
Spot Diameter 1/e
3)
27µm
44µm
70 µm
87 µm
104 µm
Resolution
< 10 µm
< 17 µm
< 27 µm
< 34 µm
< 41 µm
1) From the font edge of the linear translator to the inner side of the housing plate, 2) From the bottom edge of the deflection unit to the processing field; the
distance will vary with laser divergence and lens tolerance. 3) Input Beam Quality: M2 = 1.0
Specifications for associated Deflection Units
SUPERSCAN-IIE-30
SUPERSCAN-III-30
Mechanical Data:
Beam Displacement
35.384)/35.82 mm
35.44)/36.0 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
Repeatability (RMS)
2 µrad
2 µrad
Max. Gaindrift1)
15 ppm/K
15 ppm/K
Max. Offsetdrift1)
10 µrad/K
10 µrad/K
Long-term Drift
1,2)
< 150 µrad
Long term Drift with water tempering
[W] [W2]
1,2,3)
< 100 µrad
< 60 µrad3)
Mirrors
QU
SI
SC
BE
QU
SI
SC
BE
Tunings
LN
RA
LN
RA
LN
RA
LN
RA
Acceleration Time (10-90%) (ms)
0.90
0.84
0.52
0.50
0.90
0.77
0.85
0.76
0.60
0.52
0.56
0.49
1)Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) specification for QU fused Silica mirrors
Specifications for Optics
Nd:YAG
Wavelength
1,064 nm
Coating
AR Coating
Max. Laser Power, cw, W/cm
2
1000 W/cm
2
Beam
Moving
Lens
Focusing
Lens
Data Sheet 3-Axis Laser Beam Subsystems
03/2013
Water Tempering
Specifications
Flow rate
Pressure loss
Water1)
Clean tap water with additives
2 l / min
0.5 bar
Temperature
22°C to 28°C
4 l / min
0.8 bar
Maximum Pressure
2 bar to 3 bar
6 l / min
1.1 bar
(1) Caution: When using cooling water including deionized water, suitable additives must be used to prevent the growth of algae and protect the aluminium
parts against corrosion.
Additive recommendations:
Standard industrial applications e.g. CCL105 (NALCO)
Food & beverage, packaging applications: e.g. polypropylene glycol (Dow Chemical)
Please consult your additive supplier for dosage information
Data Sheet 3-Axis Subsystems for Laser Beam Deflection FOCUSSHIFTER
03/2013 FOCUSSHIFTER
AXIALSCAN-30-Y [260]
General Specifications
Power Supply
Voltage
±15 V to ±18 V
Interface Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
260x260 mm² to 600x600 mm²
Beam optimized
Ambient Temperature
+15 °C to +35 °C
Lens Positions
Storage Temperature
-10 °C to +60 °C
Humidity
≤ 80 % non condensing
Weight
approx. 16.5 kg
Specifications for Linear-Translator-Modules
Field Size
260 x 260 mm²
300 x 300 mm²
400 x 400 mm²
500 x 500 mm²
600 x 600 mm²
Mechanical Data:
Distance D
1)
135 mm
128 mm
116 mm
109 mm
104 mm
Working Distance
2)
282 mm
332 mm
455 mm
579 mm
703 mm
Dynamic Data:
Spot Diameter 1/e
3)
22.9 µm
26.15 µm
34.27 µm
42.39 µm
50.5 µm
Resolution
< 8 µm
< 10 µm
< 13 µm
< 16 µm
< 19 µm
1) From the font edge of the linear translator to the inner side of the housing plate, 2) From the bottom edge of the deflection unit to the processing field; the
distance will vary with laser divergence and lens tolerance. 3) Input Beam Quality: M2 = 1.0
Specifications Deflection Unit
TS-II-30
SS-III-30
Mechanical Data:
Beam Displacement
35.7 mm
35.44)/36.0
Dynamic Data:
Typical Deflection
35.7 mm
±0.393 rad
Repeatability (RMS)
2 µrad
< 2 µrad
Max. Gaindrift
1)
< 70 ppm/K
< 15 ppm/K
Max. Offsetdrift
1)
< 35 µrad/K
< 10 µrad/K
Long-term Drift
1,2)
< 400 µrad
Long-term Drift with water tempering
[W] [W2]
1,2,3)
< 60 µrad3)
Mirrors QU
SI
SC
BE
Tunings
LN
RA
LN
RA
LN
RA
LN
RA
Acceleration Time (10-90%) (ms)
≤ 0.90
≤ 0.90
≤ 0.77
≤ 0.85
≤ 0.76
≤ 0.60
≤ 0.52
≤ 0.56
≤ 0.49
1) Drift per Axis, 2) After warming-up, variations of ambient temperature < 1K, variations of cooling water < 1K 3) with water tempering at 4.5 l/min and
22˚C water temperature after 0.5 h warm up 4) Specification for QU fused Silica mirrors
Specifications for Optics
Nd:YAG
Wavelength
1,064 nm
Coating
AR Coating
Max. Laser Power, cw, W/cm
2
1000 W/cm
2
Beam
Moving
Lens
Focusing
Lens
Data Sheet 3-Axis Subsystems for Laser Beam Deflection FOCUSSHIFTER
03/2013 FOCUSSHIFTER
FOCUSSHIFTER
General Specifications
Power Supply
Voltage
±15 to ±18 V
Ambient Temperature
+15 to +35 °C
Current
7.5 A, RMS, max. 10 A
Storage Temperature
-10 to +60 °C
Ripple/ Noise
Max.200 mVpp, @20MHz
bandwidth
Humidity
≤ 80 % non-condensing
Interface
Signals
Analog
±5 V, ±10 V
Digital
XY2-100 Protocol
Specifications for Linear Translator Modules
Nd:YAG
Nd:YAG doubled
Nd:YAG Tripled
CO2
CO2
Input Aperture
5.0 mm
5.0 mm
5.0 mm
10.0 mm
10.0 mm
Beam Expansion Factor
3.0
3.0
2.0
1.5
2.0
Focus Range in Z-Direction
+/- 15.0 mm1)
+/- 10.0 mm1)
+/- 25.0 mm1)
+/- 10.0 mm2)
+/- 15.0 mm2)
Weight
approx. 7.5 kg
approx. 7.5 kg
approx. 7.5 kg
approx. 7.5 kg
approx. 7.5 kg
1) with F-Theta Lens f = 160 mm, 2) with F-Theta Lens f = 250 mm
Specifications for associated Deflection Units
SS-IIE-15
SS III-15
SUPERSCAN IIE-20
Mechanical Data:
Input Aperture (mm)
15.0
15.0 mm
20.0 mm
Beam Displacement (mm)
18.05
4)
/18.55
18.1
4)
/18.6
26.28
4)
/25.63
Weight (without Lens) (kg)
approx. 3.8
approx. 2.9 kg
approx. 3.3 kg
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
±0.393 rad
Repeatability (RMS)
2 µrad
2 µrad
2 µrad
Max. Gaindrift
1)
(ppm/K)
< 15
< 15
< 15
Max. Offsetdrift
1) (
µrad/K)
< 10
< 10
< 10
Long-term Drift
1,2)
µrad
< 150 < 150
Long-term Drift with water
tempering [W] [W2]
1,2,3)
< 100
< 60 3)
< 100
Mirrors
QU
BE
QU
SI
BE
QU
SI
BE
Tunings
LN
RA
LN
RA
LN
RA Acceleration Time (10-90%) ms
≤ 0.36
≤ 0.24
≤ 0.36
≤ 0.31
≤ 0.30
≤ 0.27
≤ 0.23
≤ 0.20
≤ 0.58
≤ 0.61
≤ 0.40
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water 3) with water tempering at 4.5 l/min and 22˚ C water
temperature after 0.5 h warm up. 4) Specification for QU fused Silica mirrors
Specifications for Optics
Nd:YAG
Nd:YAG doubled
Nd:YAG Tripled
CO2
Wavelength
1,064 nm
532 nm
355 nm
10,600 nm
Coating
AR Coating
AR Coating
AR Coating
AR Coating
Max. Laser Power, cw (W/cm2)
1000
500
100
700
Specifications for F-Theta Lenses
Nd:YAG
Nd:YAG doubled
Nd:YAG Tripled
CO2
Wavelength
1,064 nm
532 nm
355 nm
10,600 nm
Lens
f = 160 mm
f = 160 mm
f = 160 mm
f = 250 mm
Typical Field Size
95 mm x 95 mm
95 mm x 95 mm
95 mm x 95 mm
150 mm x 150 mm
Spotdiameter 1/e², TEM00
Aperture 15 mm / 20 mm
30 µm / -
15 µm / -
10 µm / -
270 µm / 220 µm
Working Distance
209 mm +/- focus range
208 mm +/- focus range
248 mm +/- focus range
193 mm +/- focus range
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