Pumping Port Size ...............................................................................................................19
Schematic (SpectraDrive Units only).................................................................................... 20
Section I. General Description
1.1 Description
The Princeton Instruments Model VM-502 is a nominal 0.2 meter vacuum scanning
monochromator, with an optimum wavelength range in the vacuum ultraviolet region.
However, with other gratings and coatings, the instrument is useful from the extreme UV to
the infrared.
The Model VM-502 is designed to use an aberration-corrected concave holographic grating,
which provides and aperture ratio of f/4.5.
The Model VM-502 is set up as specified in the conventional “V” configuration (Model VM-502V), in a straight through configuration (Model VM-502-S), or a combination of both
(Model VM-502).
1.2 Specifications
Specifications are with standard 1200 G/mm gratings unless otherwise noted.
Reciprocal Linear Dispersion: Nominally 4.0 nm/mm, with 1200 G/mm grating in the first
order
Wavelength Range: Mechanical scanning range is zero order to 546.1 nm, with a 1200
G/mm grating. Low wavelength limit is dependent upon light source and detector; typically
less than 30 nm
Grating Coating: Standard coating is Princeton Instruments #1200 VUV Aluminum and MgF2,
with reflectance of 80% typical at 121.6 nm. Iridium coatings are optional for the extreme UV,
and are supplied if specified
Grating Holder: The grating holder is kinematically mounted in the instrument, allowing
gratings to be interchanged without requiring realignment. Each grating holder contains the
classical grating adjustments for initial alignment of the grating to the instrument
Scanning Mechanism: A sine drive mechanism provides a linear wavelength change with the
rotation of a precision lead screw. A Model SD3 controller is provided for scanning drive
control using a computer (customer provided).
Slits: Standard bilateral slits are supplied and are adjustable from 5 micrometers to 3
millimeters. A precision micrometer provides for slit adjustment under vacuum conditions, and
is graduated in 10 micrometer increments. The slit height is adjustable from 0 to 20 mm.
1
If specified, standard fixed width slits 1m high are supplied to customer’s specified width.
Movable Diverter Mirror (optional): A movable diverter mirror is provided to divert the beam
from the V slit position to the straight through position. A knob in the instrument cover allows
the mirror to be moved under vacuum conditions
Slit Chamber Isolation Valve (optional): Vacuum valves are provided to isolate the slit
chambers form the main instrument chamber. Ports (1/8 NPT) are provided in the slit
chambers for gauge and roughing accessories
Air Inlet Valve (optional): An air inlet valve is located in the instrument housing to vent the
instrument to atmospheric pressure.
2
Section II.
Instrument
2.1 General Description:
The instrument is shipped completely assembled, tested and ready for immediate installation. If
the instrument is to be stored before use, contact Princeton Instruments for storage instructions.
For shipping purposes, some optical components are covered, and mechanical components
are tied or placed in specific positions. The following procedure is recommended to prepare
the instrument for use.
2.2 Unpacking and Inspection:
Carefully unpack and examine both the VM-502 monochromator and the scan controller
unit. If there is any indication of physical damage, report the condition immediately to
the carrier and Princeton Instruments. Save all packing material.
2.3 Removal of Protective Cover and Shipping Ties:
To remove the protective cover on the optical component and the shipping tie, the instrument
must be vented and the cover removed. This should be done only by personnel familiar with
optical surfaces and instrumentation.
Setup
1. Locate the air inlet valve in the instrument housing. Remove the protective cap.
Connect the air inlet valve to a dry nitrogen tank if possible. Open the air inlet valve
slowly by rotating the handle until it is in line with the valve body.
2. Remove the instrument cover by rotating the two cover knobs until they are loose, and
lift off the cover.
--------------------------------------------------------------------------------------------------------------------CAUTION: THE OPTICAL SURFACE IS NOW EXPOSED--DO NOT TOUCH, TALK, OR
3. If the instrument is equipped with a movable diverter mirror, it is held in position with
rubber bands for shipment. Locate the rubber bands holding the movable diverter
mirror in position; cut and remove these rubber bands.
4. A protective cover is attached to the grating mask with rubber bands. Verify that all
rubber bands are removed from the chamber. Remove the shipping grating cover.
NOTE: Save this cover to protect the grating if interchanging gratings.
5. Replace the instrument cover after checking the o-ring and mating surface for
cleanliness.
NOTE: If the instrument has a movable diverter mirror, make sure that the diverter
mirror and the control knob on the cover align before replacing the instrument cover.
Refer to Section 3.5 for more information
6. Close the air inlet valve by rotating the handle 90º to the valve body.
3
2.4 Pumping System Mounting:
The instrument is now ready for mounting to a pumping system. The VM-502 and Pumping
Port Size drawings (pages 18 and 19, respectively) show the location and dimensions of a
pumping port in the instrument base. The instrument may be supported by the pumping port or
by the three pads provided.
--------------------------------------------------------------------------------------------------------------------------CAUTION: DO NOT APPLY EXCESS PRESSURE BETWEEN THE PUMPING PORT AND
THE THREE PADS PROVIDED ON THE BASE OF THE INSTRUMENT!
The figure below shows the cable connections necessary for operation from a computer
through the RS-232 or USB port.
Power
Connection
USB
Interface
RS-232
Interface
Monochromator
Connection
1. Locate the SD3 controller, two interconnecting cables, the power supply and power
cable.
2. Connect the motor drive cable between the 15 pin D connector (J1) on the
monochromator and the 15 pin D connector (MONO) on the SD3-502.
Pin #-MonochromatorDescription Pin #-SD3
1 Motor – A1 1
2 Motor – A2 2
3 Motor – B1 3
4 Motor – B2 4
5 Open 5
6 Shield–(Controller Only) 6
7 Interrupt Module +5V 7
8 Interrupt Module GND 8
9 Interrupt Module 1 LED K 9
10 Interrupt Module 2 LED K 10
11 Interrupt Module 1 LED A 11
12 Interrupt Module 1 OUT WORM 12
13 Interrupt Module 2 LED A 13
14 Interrupt Module 2 OUT MOTOR 14
15 Open
4
Table 1: J1 - Motor Drive Connector at Monochromator and SD3-502
3. Make sure that power supply is switched OFF and connect it to POWER connector on
the SD3. Connect the line cord provided with the SD3 to the power supply and the AC
line. The power supply will operate with line voltages between 100 and 250 volts AC
50/60 Hz and provides +5 volts DC for the SD3 control logic and +24 volts DC for the
motor drives.
Pin # Description
1 +5V
2 GND
3 GND
4 +24V
Table 2: Power Input Pin Arrangement:
4. Connect the SD3 to a computer.
Computer: Use one of the two-supplied computer cables:
RS-232 IBM PC or compatible 9-pin female (DB9S) connector to 9-pin male
connector ( DB9P).
USB USB Cable Type A to Type B.
NOTE: If neither of these cables is compatible with your system, consult Princeton
Instruments for a custom cable. If you have facilities for constructing a custom cable,
use the RS232 pin arrangement shown in Table 3.
Pin # Description
1 open
2 RD data from SD3 to computer
3 TD data from computer to SD3
4 open
5 ground
6 open
7 RTS
8 CTS
9 open