11.5 Determining the tool center point (TCP) using the FocusMonitorFM+......................................38
11.5.1
Position of the aperture in the measuring tip (pinhole) in relation to the horizontal carrier
.39
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12 Troubleshooting 40
13 Maintenance and service 40
14 Product disposal measures 40
15 Declaration of conformity 41
16 Technical data 42
17 Dimensions 44
18 Appendix 46
18.1 System control (option) ...........................................................................................................46
18.2 Variety of detectors and measuring tips ...................................................................................47
18.3 Limit values for measuring operation with CO
18.4 Limit values for measuring operation with YAG high div measuring tip .....................................50
18.5 Check/replace the measuring tip .............................................................................................52
18.5.1 Check the measurung tip ............................................................................................ 52
18.5.2 Disassemble the measuring tip ................................................................................... 52
18.5.3 Assemble the measuring tip ........................................................................................ 53
18.6 Replace the detector ............................................................................................................... 54
18.6.1 Disassemble the detector ........................................................................................... 55
18.6.2 Assemble the detector ................................................................................................ 56
high power measuring tip ................................48
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PRIMES - The Company
PRIMES manufactures measuring devices used to analyze laser beams. These devices are employed for
the diagnostics of high-power lasers ranging from CO
length range from infrared through to near UV is covered, offering a wide variety of measuring devices to
determine the following beam parameters:
• Laser power
• Beam dimensions and position of an unfocused beam
• Beam dimensions and position of a focused beam
• Beam quality factor M²
PRIMES is responsible for both the development, production, and calibration of the measuring devices. This
guarantees optimum quality, excellent service, and a short reaction time, providing the basis for us to meet all
of our customers' requirements quickly and reliably.
lasers and solid-state lasers to diode lasers. A wave-
The FocusMonitorFM+ has been designed exclusively for measurements carried out in or near the optical
path of high-power lasers. Please observe and adhere to the specifications and limit values given in chapter16, „Technical data“, on page42. Other uses are considered to be improper. The information contained
in this operating manual must be strictly observed to ensure proper use of the device.
Using the device for unspecified use is strictly prohibited by the manufacturer. By usage other than intended
the device can be damaged or destroyed. This poses an increased health hazard up to fatal injuries. When
operating the device, it must be ensured that there are no potential hazards to human health.
The device itself does not emit any laser radiation. During the measurement, however, the laser beam is
guided onto the device which causes reflected radiation (laser class 4). That is why the applying safety regulations are to be observed and necessary protective measures need to be taken.
Observing applicable safety regulations
Please observe valid national and international safety regulations as stipulated in ISO/CEN/TR standards as
well as in the IEC-60825-1 regulation, in ANSI Z 136 “Laser Safety Standards” and ANSI Z 136.1 “Safe Use
of Lasers”, published by the American National Standards Institute, and additional publications, such as the
“Laser Safety Basics”, the “LIA Laser Safety Guide”, the “Guide for the Selection of Laser Eye Protection”
and the “Laser Safety Bulletin”, published by the Laser Institute of America, as well as the “Guide of Control
of Laser Hazards” by ACGIH.
Necessary safety measures
DANGER
Serious eye or skin injury due to laser radiation
Depending on the measuring principle used, the laser beam is reflected at the measuring tip
(laser class4). The reflected beam is usually not visible.
In measurement mode, a safety distance of one meter to the FocusMonitorFM+ must be
X
maintained even when wearing safety goggles and safety clothing.
Please take the following precautions.
X
If people are present within the danger zone of visible or invisible laser radiation, for example near laser
systems that are only partly covered, open beam guidance systems, or laser processing areas, the following
safety measures must be implemented:
• Please wear safety goggles (OD 6) adapted to the power, power density, laser wave length and operating
mode of the laser beam source in use.
• Depending on the laser source, it may be necessary to wear suitable protective clothing or protective gloves.
• Protect yourself from direct laser radiation, scattered radiation, and beams generated from laser radiation
(by using appropriate shielding walls, for example, or by weakening the radiation to a harmless level).
• Use beam guidance or beam absorber elements that do not emit any hazardous substances when they
come in to contact with laser radiation and that can withstand the beam sufficiently.
• Install safety switches and/or emergency safety mechanisms that enable immediate closure of the laser
shutter.
• Ensure that the device is mounted securely to prevent any movement of the device relative to the beam
axis and thus reduce the risk of scattered radiation. This in the only way to ensure optimum performance
during the measurement.
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Employing qualified personnel
The device may only be operated by qualified personnel. The qualified personnel must have been instructed
in the installation and operation of the device and must have a basic understanding of working with highpower lasers, beam guiding systems and focusing units.
Conversions and modifications
The device must not be modified, neither constructionally nor safety-related, without our explicit permission.
The device must not be opened e.g. to carry out unauthorized repairs. Modifications of any kind will result in
the exclusion of our liability for resulting damages.
Liability disclaimer
The manufacturer and the distributor of the measuring devices do not claim liability for damages or injuries
of any kind resulting from an improper use or handling of the devices or the associated software. Neither the
manufacturer nor the distributor can be held liable by the buyer or the user for damages to people, material
or financial losses due to a direct or indirect use of the measuring devices.
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2 Symbol explanations
The following symbols and signal words indicate possible residual risks:
DANGER
Means that death or serious physical injuries will occur if necessary safety precautions are not
taken.
WARNING
Means that death or serious physical injuries may occur if necessary safety precautions are not
taken.
CAUTION
Means that minor physical injury may occur if necessary safety precautions are not taken.
NOTICE
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Means that property damage may occur if necessary safety precautions are not taken.
The following symbols indicating requirements and possible dangers are used on the device:
Laser radiation warning
Hand injuries warning
Read and observe the operating instructions and safety guidelines before startup!
Further symbols that are not safety-related:
Here you can find useful information and helpful tips.
With the CE designation, the manufacturer guarantees that its product meets the requirements of
the relevant EC guidelines.
Call for action
X
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FocusMonitor FM+
3 About this operating manual
This documentation describes the installation and configuration of the FocusMonitorFM+ and the execution
of measurements with the LaserDiagnosticsSoftware LDS.
The LaserDiagnosticsSoftware LDS must be installed on the PC for measuring operation of the
FocusMonitorFM+. The basic version of the LaserDiagnosticsSoftware LDS is included in the scope of delivery for the device.
For a detailed description of the software installation, file management and evaluation of the measured data,
please refer to the separate operating manual LaserDiagnosticsSoftware LDS.
4 Conditions at the installation site
• The device must not be operated in a condensing atmosphere.
• The ambient air must be free of organic gases.
• Protect the device from splashes of water and dust.
• Operate the device in closed rooms only.
DANGER
Fire and explosion hazards due to scattered or directed laser radiation
When the FocusMonitorFM+ is being operated, the irradiation must be fully absorbed behind the measurement zone. Fire bricks or other partly-absorbing surfaces are not suitable.
Use an adequate absorber. Dependent on the application, PRIMES offers suitable absorbers,
X
such as the PowerMonitor PM48/100.
Don’t store any flammable materials or highly flammable substances at the measuring loca-
X
tion.
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5 Introduction
5.1 System description
The FocusMonitorFM+ is an opto-mechanical scanning measurement system for analyzing continuous
irradiation. The laser beam is scanned with a rotating measuring tip on the x-axis. Using the horizontal and
vertical carriers, the measuring tip is moved along the y- and z-axes so that the beam characteristics of the
focused laser beam can be spacially measured.
The housing of the FocusMonitorFM+ is symmetrically constructed so that it can be mounted overhead
without additional components.
The FocusMonitorFM+ has an Ethernet interface for fast and secure data exchange with computers or system controls.
Fig. 5.1: Main components FocusMonitorFM+
z-axis
Vertical carrier
Horizontal carrier
y-axis
Detector
Measuring tip
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FocusMonitor FM+
5.2 Measuring principle
The FocusMonitorFM+ is designed to analyze the focused laser beam. The device measures the spatial
power density distribution in the focus range of the processing optics. Using this information, the system
calculates the focus radius, focus position in the space, and the beam quality factor M2.
The power density distribution in the focus is measured with the FocusMonitorFM+ using a rotating measuring tip that scans the beam cross section line by line in the y-direction. The tiny aperture of the measuring tip
(pinhole) separates out a small part of each beam. Mirrors then guide the measuring signal to a detector. The
measuring system can be moved automatically via an integrated z-axis. This ensures that the propagation
parameters can be determined in full by moving along the beam caustic.
Laser beam
z
x
y
Fig. 5.2: Optomechanical design of the FocusMonitorFM+
The use of different detectors and measuring tips ensure that the FocusMonitorFM+ can be adjusted to specific beam diagnosis requirements within a broad wavelength and power density range. The system applications range from a few MW/cm2 up to a few W/cm2. Detailed descriptions of other detectors and measuring
tips (e.g. suitable for the detection of strongly divergent beams, such as those generated by high-power
diode lasers) can be found in chapter 18.2 on page47.
Detector
Measuring tip
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5.3 Short overview installation
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1. Installing the LaserDiagnosticsSoftware LDS on the computer
• Software is part of the scope of delivery
2. Taking safety precautionsChapter 1 on page 7
3. Prepare Installation
• Observe safety instructions
• Make preparations
• Set installation position
4. Electrical connection
• Establish voltage supply
5. Connect with the computer
• Via Ethernet or LAN
See separate Operating Manual
of the LaserDiagnosticsSoftware
LDS
Chapter 7.1 on page 14
to
chapter 7.3 on page 17
Chapter 8 on page 21
Chapter 8.3 on page 23
6. Connect with the PowerMonitor PM48/100
• Via RS485
7. Inert gas connection
• At very high power density
(CO
> 15 – 30MW/cm²; NIR > 8 – 10MW/cm²)
2
8. Complete installation
• Align the device
• Mount the device firmly
9. Perform the measurement
• Observe safety instructions
• Configure FocusMonitorFM+
• Perform a sample measurement
Chapter 8.4 on page 24
Chapter 9 on page 25
Chapter 7.4 on page 18
and
chapter 7.5 on page 20
Chapter 11 on page 26
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FocusMonitor FM+
6 Transport
NOTICE
Damage/Destruction of the device
The device’s axes and carriers may be damaged if the device is subjected to hard shocks or
is allowed to fall.
Handle the device carefully when transporting or installing it.
X
Only transport the device in the original PRIMES transport box.
X
We recommend removing the measuring tip and placing it in the enclosed plastic case.
7 Installation
7.1 Safety instructions
Areas on the device that could be particularly hazardous for hand injuries are marked with the following pictogram:
Hand injuries warning
CAUTION
Risk of injury caused by rotating parts
The measuring tip of the FocusMonitorFM+ rotates at high speed during the measuring
operation. Even after the motor has been turned off, the measuring tip will continue to rotate
for a certain amount of time.
Do not reach into or hold any objects into the beam entrance of the measuring device (see
X
Fig. 7.1 on page 15).
After the motor has been turned off, wait until the measuring tip comes to a complete stop
X
(pay attention to the status display on the connection side).
CAUTION
Risk of crushing
Unlike the housing, the measuring head of the FocusMonitorFM+ can move along the z-and
y-axis.
Do not reach into the movement range of the measuring head (see Fig. 7.2 on page 15).
X
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Mesuring tip
Fig. 7.1: Danger posed by rotating parts
z-axis
y-axis
Fig. 7.2: Crushing hazard at the FocusMonitorFM+
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FocusMonitor FM+
7.2 Preparation
Before installation, check the available space, especially to ensure that there is enough room for the movement range of the FocusMonitorFM+.
The device must be firmly assembled and must be mounted with screws (see chapter 7.5 on page20). Its
symmetrical construction allows the device to be set up and mounted overhead without additional aids. The
position and diameter of the mounting holes on the top/bottom are identical.
NOTICE
Damage/Destruction of the device
Obstacles in the movement range of the FocusMonitorFM+ can lead to collisions and damage the device.
Keep the movement range free of obstacles (cutting nozzle, pressure rolls, etc.).
X
Please note that the measuring head automatically moves into its resting position after the
power supply has been turned off and on again or following a reset. Keep this area clear.
z=120mm
Fig. 7.3: Movement range of the measuring head
In the LaserDiagnosticsSoftwareLDS you have the option to restrict the movement range of the
FocusMonitorFM+ (locked area, for further informationen see chapter 11.4.4 on page 32).
DANGER
Fire and explosion hazards due to scattered or directed laser radiation
When the FocusMonitorFM+ is being operated, the irradiation must be fully absorbed behind the measurement zone. Fire bricks or other partly-absorbing surfaces are not suitable.
Use an adequate absorber. Dependent on the application, PRIMES offers suitable absorbers,
X
such as the PowerMonitor PM48/100.
Don’t store any flammable materials or highly flammable substances at the measuring loca-
X
tion.
y= max. 22mm
16
NOTICE
Damage/Destruction of the absorber (e. g. PowerMonitor PM48/100)
If the focused laser hits the absorber, it may be destroyed.
Ensure there is enough distance between the FocusMonitorFM+ and the absorber (themax-
X
imum permissible power density of the absorber must not be exceeded).
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7.3 Installation position
You can install the device in different positions (see Fig. 7.4 on page 17). The standard position is intended
for beam incidence from above.
When accessibility is limited, you have the option of installing the device upside down with a rotated measuring tip (see chapter 18.5 on page 52).
Standard installation
Beam incidence
A
Mounting surface
Fig. 7.4: Mounting options for the FocusMonitorFM+
To prevent transport damage, the measuring tip is disassembled when delivered. It is installed with the
curved part facing towards the beam source (see Fig. 7.5 on page 17). Further information on mounting
the measuring tip is provided in chapter 18.5 on page52.
Upside down installation
with
turned measuring tip
B
Mounting surface
Beam incidence
Fig. 7.5: Direction of the measuring tip during installation
The FocusMonitorFM+ can also be mounted on a vertical surface so that it can be operated with
the beam entering horizontally. Ensure that it is fastened securely in the horizontal direction.
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FocusMonitor FM+
7.4 Align the FocusMonitorFM+
7.4.1 Device's position in relation to the laser beam
For the FocusMonitorFM+, the beam must enter vertically to the x-y-plane (see Fig. 7.6 on page 18).
The vertical alignment (z-axis) is primarily dependent on the expected focal length. The maximum vertical
stroke of the measuring device is 120mm.
The beam focus should be in the middle of the movement range of the z-axis. This is approx. 60mm above
the resting position of the measuring head (see Fig. 7.6 on page 18).
z
Focal length f
Focusing
plane
Fig. 7.6: Measuring range of FocusMonitorFM+
7.4.2 Align the FocusMonitorFM+ with the alignment tool
An alignment tool (see Fig. 7.7 on page 19) is provided with every device to ensure the seamless alignment (x-y plane) with the laser beam. The alignment tools differ depending on the size of the measuring window. The offset (distance from the aperture in the measuring tip (pinhole) in the resting position to the middle
of the measuring window in the y-direction) is given on the alignment tool (see Fig. 7.8 on page 19).
Resting position
60mm
y
Measuring range
120mm
FocusMonitorFM+
CAUTION
Risk of injury caused by rotating or moving parts
18
The linear movement of the horizontal and vertical carriers and the rotating measuring tip
pose an injury hazard.
Do not place your hand in the traversing range of the measuring head.
X
Only align the FocusMonitorFM+ while the measuring tip is stationary.
X
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1. Connect the FocusMonitorFM+ with the LaserDiagnosticsSoftware LDS as described in chapter 11.3 on
page 28.
2. Choose the function of the FocusMonitorFM+ as described in chapter 11.4.1 on page 29.
3. In accordance with chapter 11.4.3 on page 31, enter the value of 60mm in the Device Control > Advanced > Move axes menu.
• The horizontal carrier will move to the position 60mm above its resting position (see Fig. 7.6 on page 18)
without a rotated measuring tip.
4. Place the alignment tool on the measuring head.
5. Turn on the pilot laser and align the device:
• If the laser beam hits perpendicular to and in the middle of the small marking in the alignment tool, the
device is properly aligned.
Pilot beam
Measuring head
Alignment tool with the
offset specified
Fig. 7.7: Alignment tool at the measuring head of FocusMonitorFM+
x-axis
Fig. 7.8: Offset of a measurement window size of 8 x 8mm
Adjustment tool
FM 120
Offset: 14mm
y-axis
Measuring tip
Offset = 14mm
NOTICE
Marking
8 x 8mm
max. 22mm
Damage/destruction of the alignment tool
The exposure with laser radiation will destroy the alignment tool.
Remove the alignment tool before turning on the laser.
X
Five to twelve seconds after the supply voltage is switched on, the FocusMonitorFM+ moves into
the resting position (lowest z-position).
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7.5 Install the FocusMonitorFM+
DANGER
Serious eye or skin injury due to laser radiation
If the device is moved from its calibrated position, increased scattered or directed reflection
of the laser beam occurs during measuring operation (laser class 4).
Mount the device so that it cannot be moved by an unintentional knock or cables being
X
pulled accidentally.
FocusMonitor FM+
The mounting surface of the housing has six slotted holes Ø6.4mm and four alignment holes Ø6
assembly on a support bracket provided by the customer (see Fig. 7.9 on page 20).
Use at least four M6screws to fasten the housing.
The total length of the screws depends on the dimensions of the customer’s support bracket.
The dimensioned arrangement of the mounting holes is specified in chapter17, „Dimensions“, on
page44.
If the laser beam hits the measuring tip in the beam path, it could be destroyed.
Remove the measuring tip from the beam path following installation.
X
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8 Electrical connections
The FocusMonitorFM+ requires a voltage supply of 24V±5% (DC) for the operation. A suitable power supply is included in the scope of delivery.
Data is transmitted between the FocusMonitorFM+ and PC via the Ethernet connection.
Another device, such as a PowerMonitor PM48/100, can be connected to the FocusMonitorFM+ via the
RS485 interface (PRIMES bus). The signal from the PowerMonitor PM48/100 is transmitted through the
FocusMonitorFM+ to the PC via the Ethernet interface. The additional measuring device is powered by the
power supply of the FocusMonitorFM+.
Please use only the provided connection lines.
Please ensure that all electrical connections have been established and switch the device on before
starting the LaserDiagnosticsSoftware LDS.
The FocusMonitorFM+ serves as a dongle for the software on the computer in order to enable
certain software functions.
8.1 Connections
Trigger (option)
Power supply
connection
Power
On/OffPower In
Trigger
+
FM
Status displayOn/Off switch
+
FM
FocusMonitor
EthernetInert GasPRIMES-Bus
RS 485
FocusMonitor f
Ethernet
RS485
Inert gas
Fig. 8.1: FocusMonitorFM+ connections
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8.2 Pin assignment
8.2.1 Power supply
Harting M12-P-PCB-THR-2PC-5P-LCOD-M-STR
FocusMonitor FM+
23
4
FE
Tab. 8.1: Connection socket for the power supply
1
PinFunction
1+24V
2Not assigned
3GND
4Not assigned
5FE (functional earth)
8.2.2 PRIMES bus RS485
Pin arrangement D-sub socket, 9-pin (view of plug-in side)
PinFunction
1GND
5
1
69
2RS485 (+)
3+24V
4Not assigned
5Not assigned
6GND
7RS485 (–)
8+24V
9Not assigned
Tab. 8.2: D-sub socket, PRIMES bus
8.2.3 Trigger output (option)
As an option, the FocusMonitorFM+ can be delivered with a trigger output (3.3V). The trigger signal is
coupled with the rotation of the measuring tip and can thus be used for the synchronization of pulsed lasers.
Pin arrangement Binder M8 series 786/718, 6-pole (view from plug-in side)
PinFunction
1Trigger +
2Trigger -
3Rotational pulse
4Not assigned
5Not assigned
6GND
Tab. 8.3: Trigger socket
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8.3 Connection to the PC and establishing the power supply
PRIMES power supply
L
= 1.8m
Max
+
FM
FocusMonitor
Power
On/OffPower In
Trigger
EthernetInert Gas PRIMES-Bus
FocusMonitorFM+
RS 485
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FocusMonitor f
FM
+
= 2.0m
L
Max
Crossover cable
Ethernet
PC
or
Ethernet
LAN
Patch cable
Fig. 8.2: Connection of FocusMonitorFM+
Connect the FocusMonitorFM+ to the PC via a crossover cable or to the network via a patch cable.
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FocusMonitor FM+
8.4 Connection of the FocusMonitorFM+ and PowerMonitor PM48/100 to the PC
For full absorption of the radiation behind the measurement zone, you can use the PRIMES PowerMonitor
PM48/100. The water-cooled PowerMonitor PM48/100 will show you the power, water flow rate, and water
temperature.
FocusMonitorFM+
PRIMES power supply
PRIMES-Bus
RS485
L
=10m
Max
PowerMonitor PM48/100
Fig. 8.3: Connection of the FocusMonitorFM+ and PowerMonitor PM48/100 to the PC
NOTICE
Damage/Destruction of the device due to overvoltage
When disconnecting the electric cables during operation (when the supply voltage is connected), voltage peaks can be generated that could destroy the communication modules of
the measuring devices.
PC
Ethernet
24
Turn off the power supply before disconnecting the bus cables.
X
Only ever use one power supply (typically original PRIMES power supply) when connecting several
devices.
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9 Inert gas connection
When measuring high power densities (CO2 > 15 – 30MW/cm²; NIR > 8 – 10MW/cm²), plasma may be
ignited onthe surface of the measuring tip. This could destroy the measuring tip (see chapter 18.3 on
page48 and chapter 18.4 on page50). A suitable inert gas connection is therefore integrated into the
devices (seeFig. 9.1 on page 25).
NOTICE
Damage/Destruction of the device
The effects of uncontrolled gas flow (e.g. process gas) could distort the measurement or
even damage the device.
Only use helium, nitrogen or argon as the inert gas at the intended connection. The pressure
X
may not exceed a maximum of 0.5bar.
+
FM
FocusMonitor
Power
On/OffPower In
Trigger
FocusMonitor f
FM
+
Fig. 9.1: Inert gas connection on the FocusMonitorFM+
EthernetInert GasPRIMES-Bus
RS 485
Inert gas connector Ø 4mm
10 Status display
The status display consists of a light ring that indicates different states of the FocusMonitorFM+ with different colors and static or rotating lights.
ColorLighting stateMeaning
WhiteThe entire ring
illuminates
YellowRotating lightThe measuring tip rotates and the different rotational
The supply voltage is connected
speeds are indicated.
RedRotating lightThe measuring tip rotates and the y-axis is moved.
Tab. 10.1: States of the status display
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The measurement is in progress, the different rotational speeds are indicated.
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11 Measuring
11.1 Safety instructions
DANGER
Serious eye or skin injury due to laser radiation
Depending on the measuring principle used, the laser beam is reflected at the measuring tip
(laser class4). The reflected beam is usually not visible.
Please wear safety goggles (OD6) adapted to the power, power density, laser wave length
X
and operating mode of the laser beam source in use.
Wear suitable protective clothing and protective gloves.
X
Protect yourself from laser radiation by separating protective devices (e.g. by using appro-
X
priate shielding).
In measurement mode, a safety distance of one meter to the FocusMonitorFM+ must be
X
maintained even when wearing safety goggles and safety clothing.
FocusMonitor FM+
DANGER
Serious eye or skin injury due to laser radiation
If the device is moved from its calibrated position, increased scattered or directed reflection
of the laser beam occurs during measuring operation (laser class 4).
Mount the device so that it cannot be moved by an unintentional knock or cables being
X
pulled accidentally.
DANGER
Fire and explosion hazards due to scattered or directed laser radiation
When the FocusMonitorFM+ is being operated, the irradiation must be fully absorbed be-
hind the measurement zone. Fire bricks or other partly-absorbing surfaces are not suitable.
Use an adequate absorber. Dependent on the application, PRIMES offers suitable absorbers,
X
such as the PowerMonitor PM48/100.
Don’t store any flammable materials or highly flammable substances at the measuring loca-
X
tion.
CAUTION
Risk of injury caused by rotating parts
26
The measuring tip of the FocusMonitorFM+ rotates at high speed during the measuring
operation. Even after the motor has been turned off, the measuring tip will continue to rotate
for a certain amount of time.
Do not reach into or hold any objects into the beam entrance of the measuring device.
X
After the motor has been turned off, wait until the measuring tip comes to a complete stop
X
(pay attention to the status display on the connection side).
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CAUTION
Risk of crushing
Unlike the housing, the measuring head of the FocusMonitorFM+ can move along the z-and
y-axis.
Do not reach into the movement range of the measuring head.
X
11.2 Configure FocusMonitorFM+
1. Based on Tab. 18.1 on page 47, check whether the installed measuring tip is suitable for your measuring task. You will find instructions for switching out measuring tips in chapter 18.5 on page 52.
2. Based on Tab. 18.2 on page 47, check whether the installed detector is suitable for your measuring
task. You will find instructions for switching out detectors in chapter 18.6 on page 54.
3. Determine the necessary revolution speed of the measuring tip, taking into account the permissible
power density based on Tab. 18.4 on page 49 or Tab. 18.6 on page 51.
NOTICE
Damage/Destruction of the measuring tip
In case of very high power densities (CO
may be ignited on the surface of the measuring tip. This could destroy the measuring tip.
Increase the speed according to the Tab. 18.4 on page49 or Tab. 18.6 on page51 and
X
purge it with inert gas, if necessary.
> 15 – 30MW/cm²; NIR > 8 – 10MW/cm²), plasma
2
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FocusMonitor FM+
11.3 Connect the FocusMonitorFM+ with the LaserDiagnosticsSoftwareLDS
11.3.1 Connect device
1. Switch on the FocusMonitorFM+.
The operating mode is shown in the
status display (see chapter 10 on
page 25).
2. Start the
LaserDiagnosticsSoftwareLDS.
3. Click on the Devices tab.
4. Click on the + Connect to device
button under the tab.
The Connections window appears.
5. Click on the desired device.
6. Click on the Connect to device but-
ton.
11.3.2 Change the network address of a connected device
Proceed as follows in order to assign a different IP address to a connected device:
1. Right-click on the device and select
the Device settings menu point.
2. Enter in the desired IP address or
use the Use DHCP option and confirm the entry with OK.
3. Turn the FocusMonitor FM+ off and
on again.
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11.4 Performing an automatic caustic measurement
This chapter aims to provide some basic information as you get to know the FocusMonitorFM+, discussing
the example of an automatic caustic measurement with the LaserDiagnosticsSoftwareLDS.
For a detailed description of the software installation, file management and evaluation of the measured data,
please refer to the separate operating manual LaserDiagnosticsSoftware LDS.
11.4.1 Selecting the measuring mode automatic caustic
1. Connect the device according to
chapter 11.3 on page 28 with the
LaserDiagnosticsSoftware LDS.
The FocusMonitorFM+ is established
as a connected device.
2. Click on the Scanner function.
The Device control menu opens.
3. Click on the Automatic caustic button or
on the drop-down list measurement
mode and Automatic caustic.
The corresponding Device control
opens.
The Automatic caustic tool bench
opens with the following tools:
• Caustic analysis
• Plane analysis
Function Scanner
Drop-down list Measuring mode
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11.4.2 Configuring the settings (Device control > Settings)
1. Click on the Settings tab.
2. Enter the laser wavelength used in
nm.
3. Enter the laser output in W.
4. Enter the focal length of the focusing
lens in mm.
Only when measuring a time series
5. Enter the number of automatic caustic measurements.
6. Enter the measuring break between
automatic caustic measurements in s.
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11.4.3 Configuring advanced settings (Device control > Advanced)
1. Click on the Advanced tab.
2. Enter the number of pixels in the
x/y-direction in order to configure the
resolution on the CCD sensor.
3. Enter the number of planes.
Specifying 21planes already generates a valid measurement.
4. Enter in the rotation speed of the
measuring tip 1875, 3750, 7500 min
.
Locked area
X Define a locked area when there are
obstacles in the measuring area.
• More detailed information on locked
areas can be found in chapter 11.4.4
on page 32.
Move axes
X To align the device (see Fig. 7.6 on
page 18) or to initiate a measurement at this position, enter 60mm for
the z-position.
• The vertical carriermoves to the specified position.
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• More detailed information on traversing the axes can be found in chapter
11.4.5 on page 33.
Measuring tip
You will find the entry values on the label
attached to the packaging of the measuring tip used.
5. Choose the type of measuring tip
used.
6. Enter the serial number S/N of the
measuring tip.
7. Enter the sensitivity of the measuring
tip used in cts/(MW/cm²).
8. Enter the pinhole diameter of the
measuring tip used.
Rotated measuring tip
X Click on one of the < > buttons if
you are using the FocusMonitorFM+
mounted upside down with a rotated
measuring tip.
The top of the measuring tip always
has to be facing the incident laser
beam.
• More detailed information on a rotated measuring tip can be found in
chapter 11.4.6 on page 34.
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11.4.4 Defining the locked area (Device control > Advanced > Locked area)
A locked area is a spacial limitation of the measurement area in the y- and z-direction ensuring that, for example, the measurement tip moves around any obstacles in this area.
For standard installation
The origin of the locked area is defined by
the opening in the measuring tip (pinhole).
The position z=0 and y=0 defines the the
lower left corner of the locked area.
X Pull the mouse button to three points
P1, P2, P3 to define the locked area.
• As an alternative, you can numerically enter the locked area in the entry
fields below.
Example
In the figure, the locked area is set to
z=100 mm for the z-axis in Point P3.
• This causes the device’s vertical carrier to move in the z-direction from
z=0mm to z=100mm.
The z-coordinate of the point P1 is already
defined by the resting position of the measuring tip and cannot be changed.
For upside down installation with rotated measuring tip
The origin of the locked area is defined by
the opening in the measuring tip (pinhole).
The position z=120 and y=0 defines the
the top left corner of the locked area.
Example
In the figure, the locked area is set to 100
mm for the z-axis in Point P3.
This causes the device’s vertical carrier to
move in the z-position from z=0 mm to
z=100 mm.
Device must be in the resting position
before it can be stored in the transport
box
Since the locked area is saved in the
device, it will no longer be possible to
move to the resting position in the position
z=120.
X Reset the locked area before turning
off the device.
z
Laser
Measuring tip
Laser
Measuring tip
z
z=100mm
Locked area
y
z=100mm
Locked area
y
z=120mm
Resting position
z=0mm
Resting position
z=120mm
z=0mm
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11.4.5 Traversing the axes (Device control > Advanced > Move axes)
1. Enter the desired z-position of the
measuring tip into the entry field
numerically.
• As an alternative, you can set the zposition on the slide control.
2. Click on the Move to z-position
button.
• The measurement tip is positioned at
the selected position.
Move to the determined focus
You can also move to the determined
focus of a caustic that has already been
recorded if, for example, you want to
measure a similar beam. During this
process, the z
ments algorithm is used:
1. Choose a caustic for this in the project tree (see separate operating manual of the LaserDiagnosticsSoftware
LDS).
2. Then click on the Move to focus of selected caustic button.
value of the Invariant mo-
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11.4.6 Rotated measuring tip (Device control > Advanced > Measuring tip)
When necessary, you can turn the measuring tip or the entire device by 180 degrees and measure in this
position. If you rotate the measurement tip of the FocusMonitorFM+, to carry out a measurement “upside
down” for example, you will have to configure and save this in Device control > Advanced.
1. Click on one of the < > buttons
next to the figure showing the
FocusMonitorFM+
The figure is rotated 180degrees.
2. Click on Save device parameters.
The confirmation window will ap-
pear. You will receive notification that
the locked area, if defined, must be
adjusted.
3. Check the checkbox next to Ac-knowledge and click on OK.
• The locked area is reset.
• The measuring tip is saved in the
device in its rotated state
• The rotated measuring tip is applied
to all measuring modes.
FocusMonitor FM+
4. Adapt the locked area to the rotated
measuring tip as described in chapter
11.4.4 on page 32.
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11.4.7 Coordinate system for measurements with rotated measuring tip
The coordinates given as the z-position when measuring always relate to the device coordinate system,
which changes when the device or measurement tip is rotated.
For standard installation
The figure shows the device in its resting
position.
z-axis
z=120mm
Laser
For upside down installation with rotated measuring tip
The figure shows the device in its resting
position.
If the device is operated in its rotated
position and the Measuring tip rotated
option has been selected, the orientation
of the z-axis is rotated.
y-axis
Device coordinate system
z-axis
y-axis
Device coordinate system
z=0mm
Zero position
Laser
z=120mm
z=0mm
Zero position
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11.4.8 Starting an automatic caustic measurement
1. Follow the safety instructions in chap-
ter 11.1 on page 26.
2. Turn on the laser.
3. Click on the Start button.
The progress of the measurement is
indicated when Pre-caustic, Mea-
suring caustic and then Measuring
completed are displayed:
Pre-caustic
As the indication is being displayed, the
optimal measuring parameters such as
measuring window position, measuring
window size, integration time, and the
z-range (measuring range along the beam
propagation) are determined automatically.
Measuring caustic
The actual measurement is carried out
during the indication.
FocusMonitor FM+
Measuring completed
The measurement has been completed.
4. Turn off the laser.
5. Press the Stop Rotation button to
stop the rotation of the measuring tip.
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11.4.9 Measuring results display
The measuring results are displayed in the opened tools once the measurement has been completed (see below).
A detailed description of the tools and the assessment of the measuring results can be found in the separate
operating manual for the LaserDiagnosticsSoftware LDS.
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11.5 Determining the tool center point (TCP) using the FocusMonitorFM+
The tool center point (TCP) is usually located on the beam axis on the focus plane.
1. Set up the FocusMonitorFM+ as de-
scribed in chapter 7.4 on page 18.
2. Install the FocusMonitorFM+ as de-
scribed in chapter 7.5 on page 20.
3. Perform an automatic caustic mea-
surement as described in chapter
11.4 on page 29.
4. Move the measuring carrier of the
FocusMonitorFM+ to the determined
focus plane as described in chapter
11.4.5 on page 33.
• The FocusMonitorFM+ moves the
reference plane to the focus position
(see figures in chapter 11.5.1 on page
39).
5. Measure the Distancez between
the reference plane of the horizontal
carrier (see figure in chapter 11.5.1 on
page 39) and the reference plane
on the laser processing head.
Beam axis
Laser processing head
x-axis
y-axis
Coordinate system of the TCP
z
x
y
Device coordinate system
Laser processing head
6. Position the laser processing head at
distance z above the workpiece.
• Here z is the distance from the refer-
ence plane at the laser processing
head to the workpiece surface.
7. Specify a short laser pulse with low
output on the workpiece.
8. Align the reticle of the coaxial obser-
vation camera with the penetration
(x, y-position).
9. Use the reticle to align the laser pro-
cessing head with a known fixed point
in the machine coordinate system.
10. Set the correct working distances be-
tween the laser processing head and
the previously selected fixed point.
11. Apply the axis values for this position.
• The tool center point (TCP) has been
determined.
z
Standard installation
Laser processing head
z
38
Upside down installation with turned measuring tip
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11.5.1 Position of the aperture in the measuring tip (pinhole) in relation to the horizontal carrier
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Fig. 11.1: Distance from the aperture in the measuring tip (pinhole) to the reference plane of the horizontal carrier
5.9 ±0,2
Fig. 11.2: Distance from the aperture in the measuring tip (pinhole) to the reference plane on the bottom of the
horizontal carrier
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12 Troubleshooting
ErrorPossible causeRemedy
FocusMonitor FM+
Error during a
measurement
Apart from the ambient
noise and zero offset, no
measuring signal is available.
The measuring tip is
destroyed during the
measurement.
• Data transmission error
• Processor crash in the
measuring system
• Program execution error
The device is not aligned
correctly.
The power density in the
focus is too low.
The selected resolution is too
low for smaller focus spots
(e.g. r
= 80µm) and a maxi-
f
mum measuring window.
The measuring tip is defective.
The measuring tip is installed
incorrectly.
The signal enhancement is
too low.
The power density is too
high, igniting plasma on the
surface of the measuring tip.
1. Restart the software.
2. Turn off the supply voltage, turn it on again, and
start another reset cycle.
3. Restart the computer.
Check the device alignment to the laser beam.
Increase the laser power. The absolute power density in
the focus typically has to be several hundred kW/cm² to
achieve a significant measuring signal with a standard
measuring tip.
First measure outside the direct focus area. If this
does not lead to a result, increase the resolution
(e.g.256x256).
Insert a new measuring tip (also see chapter 18.5 on
page52).
Turn the measuring tip around.
Set the maximum enhancement and select the maximum measuring range.
Increase the speed of the measuring tip (see Tab. 18.4
on page 49 and Tab. 18.6 on page 51) and purge
the measuring area with inert gas.
When measuring small
beams, an offset of the
recorded measuring
tracks to one another is
observed.
Fluctuations in the synchronism of the rotation disc
and delays in triggering the
trigger signal.
Position the beam as close to the left edge of the window as possible. The time interval between the trigger
signal and start of the measurement is then smaller and
errors can thus be reduced. Averaging is also often
helpful in this case.
13 Maintenance and service
The operator is responsible for determining the maintenance intervals for the measuring device.
PRIMES recommends a maintenance interval of 12 months for inspection and validation or calibration.
If the device is used only sporadically, the maintenance interval can also be extended up to 24 months.
14 Product disposal measures
In accordance with the Electrical and Electronic Equipment Act (Elektro-G), PRIMES is obliged to dispose of
PRIMES measuring devices manufactured after August 2005 free of charge.
PRIMES is registered in the German Used Appliance Register (Elektro-Altgeräte-Register (EAR)) as a manufacturer with the number WEEE reg. no. DE65549202.
Within the EU, you are welcome to send your PRIMES measuring devices to the following address to dispose of them free of charge:
All dimensions in mm (general tolerance ISO2768-v)
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ViewA
All dimensions in mm (general tolerance ISO2768-v)
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18 Appendix
18.1 System control (option)
An optional connection to the system control is available. Please contact your PRIMES sales partner with any
questions.
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18.2 Variety of detectors and measuring tips
Different measuring tips and detectors are available for different wavelengths, power density ranges, or beam
divergences so that measurements can be recorded at a maximum power in each case. This ensures that
an optimum configuration of the FocusMonitorFM+ is achieved. Only one value can be exploited fully for the
power or power density.
Measuring tipsCO2 high powerNIR high divDiode
Typical pinhole diameter in µm20 – 252050
Beam divergence/acceptance angle in mrad <240<200<500
Tab. 18.1: Variety of measuring tips and detectors
)
—21
*) Please note the damage threshold in Tab. 18.4 on page49 and Tab. 18.6 on page51.
Depending on the model, the measuring tips are suitable for different power densities. The power density is
dependent on the laser power and focus size.
Different detectors are used, depending on the application:
Detector typeLaserType of sensorAmplificationWavelength range in μm
DFC+CO
DFY-PS+NIR/VISPhotodiodeAutomatic adjustment of
2
Pyroelectric detector19 − 12
0.4 − 1.1
the sensitivity
DFIG-PS+NIRPhotodiodeAutomatic adjustment of
the sensitivity x
Tab. 18.2: Variety of detectors
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0.9 − 1.7
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18.3 Limit values for measuring operation with CO2 high power measuring tip
Measuring tips can be operated up to the following maximum power densities:
PowerMaximum power density
Up to 6kW 30MW/cm²
6kW bis 12kW 20MW/cm²
Up to 20 kW15MW/cm²
Tab. 18.3: Power and maximum power density
The calculations assume a Gaussian profile.
The maximum power density in real beams with the same dimensions is often slightly smaller (typically minus
10 – 20%, minus 50% for a tophat distribution). In case of doubt, start with a lower laser power.
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Arrangement in the table
Table elementWhiteGreenYellowOrangeWhite with red values
Speed in rpm1875375075007500 with inert gas purgingRisk of destruction!
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Focus diameter in µm
Power in kW
Tab. 18.4: Power density in MW/cm²
The durability of the measuring tips is not only dependent on the power density, but also on the purity of the
surface (dust, particles, fingerprints). Measuring tips must therefore be handled with the utmost care.
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18.4 Limit values for measuring operation with YAG high div measuring tip
Measuring tips can be operated up to the following maximum power densities:
PowerMaximum power density
Up to 5kW 10MW/cm²
Up to 12 kW8MW/cm²
Up to 20 kW6MW/cm²
Tab. 18.5: Power and maximum power density
The calculations are based on a tophat profile.
The maximum power density in actual beams with the same dimensions is often higher (typically plus 10%
to 60%, plus 100% for a Gaussian distribution). In case of doubt, start with a low laser power.
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Arrangement in the table
Table elementWhiteGreenYellowOrangeWhite with red values
Speed in rpm1875375075007500 with inert gas purgingRisk of destruction!
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Focus diameter in µm
Power in kW
Tab. 18.6: Power density in MW/cm²
The durability of the measuring tips is not only dependent on the power density, but also on the purity of the
surface (dust, particles, fingerprints). Measuring tips must therefore be handled with the utmost care.
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18.5 Check/replace the measuring tip
18.5.1 Check the measurung tip
NOTICE
Damage/Destruction of the measuring tip
The very small pinhole of the measuring tip can quickly become blocked by dirt particles or
when touched with the bare hands.
Wear powder-free latex gloves during assembly/disassembly and ensure that the environ-
X
ment is free of dirt and dust.
You can use the HeNe laser to check that there is space for the measuring tip to pass through when in
doubt. Remove the measuring tip and light up the measuring tip with a 0.5 to 1.0mW laser from behind.
There should be a clear red reflex through the pinhole.
18.5.2 Disassemble the measuring tip
1. Turn off the supply voltage.
2. Turn the FocusMonitorFM+ upside down.
3. Turn the rotational disk until the measuring tip becomes visible in the housing recess.
4. Remove the fastening screws of the retaining plate (TorxT8) (see Fig. 18.1 on page 52).
Fastening Screws
Retaining Plate
Measuring Tip
Fig. 18.1: Measuring, view from below
5. Carefully push the measuring tip and retaining plate upwards through the housing bore using a screwdriver (see Fig. 18.2 on page 52).
Fig. 18.2: Pushing out the measuring tip
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6. Pull the retaining plate up slightly and then forwards until it loosens and can be removed easily.
7. Carefully remove the measuring tip.
18.5.3 Assemble the measuring tip
1. Insert the new measuring tip (note that the inlet aperture is located on the convex side, see Fig. 18.3 on
page 53) or turn the measuring tip around.
Pinhole
Fig. 18.3: Inlet aperture (pinhole) in the measuring tip
2. Use up and down movements to insert the retaining plate into the rotational disc at an angle of about
45degrees, ensuring that the guide groove is pointing upwards. Then push it down into the recess
(seeFig. 18.4 on page 53).
3. Check whether the retaining plate is positioned correctly by lightly pressing the front edge.
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Fig. 18.4: Inserting the retaining plate
4. Insert the fastening screws (Torx T8) and tighten manually.
If you have turned the measuring tip, use the arrow buttons to select the “Measuring Tip” setting in
LaserDiagnosticsSoftware LDS in the menu Device control > Advanced > Measuring tip.
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18.6 Replace the detector
Generally, the FocusMonitorFM+ is equipped with a DFIG-PS+ or DFC+ detector (see Fig. 18.5 on page
54). Detectors with different sensitivity or different time behavior can be used for special applications.
More information regarding the variety of detectors to ensure an optimum configuration of the
FocusMonitorFM+ is provided in the Tab. 18.1 on page47.
FocusMonitor FM+
NOTICE
Damage of the detector
Touching the sensor surface will damage the detector. This can negatively affect the measuring results.
Do not touch the detector with your fingers on the sensor surface.
X
Don’t set the detector on the sensor surface.
X
Fig. 18.5: Sensor surface on the detector
Sensor surface
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18.6.1 Disassemble the detector
1. Turn off the power supply.
2. Remove the plastic screws(D) from the detector (see Fig. 18.6 on page 55).
D
D
Fig. 18.6:
3. Carefully remove the detector from the position.
X Please do not pull the cables.
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4. First loosen the golden angle plug(A), then the black plug(B) (see Fig. 18.7 on page 55).
B
A
Touch here
Touch here
Do not
compress here!
Fig. 18.7: Releasing the plugs from the detector
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18.6.2 Assemble the detector
Only use isolating plastic screws to fasten the detector to prevent any electric noise signals from
being interspersed. Do not forget the foam rubber spacer during installation, otherwise the rotational disc could be mechanically blocked by the screws. The foam rubber spacer also ensures
mechanical decoupling of the detector.
1. To install the new detector, first place the foam rubber spacer(C) on the mounting surface of the detector. Then connect the cables. Align the detector in such a way that a space is maintained to the housing
on both sides (see Fig. 18.8 on page 56).
FocusMonitor FM+
NOTICE
Blocking the rotational disc
If the screws are tightened too firmly, they might block the rotational disc!
Only tighten the screws hand-tight. The foam rubber spacer must only be compressed to no
X
more than half its original thickness.
2. Fasten the detector with the two plastic screws(D).
C
Fig. 18.8: Assembling a new detector
Maintain distances!
D
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