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Preifer Vaccum
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MDP 5011
User Manual
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Preifer Vaccum MDP 5011 User Manual

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User’s manual
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Original/ Translated from original version
MDP 5011
Molecular pump
User’s manual
The different version operating
adixen Vacuum Products - MDP 5011 User's Manual
principle
A 210
MDP 5011
The rotor, a smooth drum with a row of blades at the top, is mounted at the end of a shaft turning in two high-precision ball bearings lubricated with grease, and located in the low-vacuum area. All pumping elements are aluminium.
The pump is rotated by a single-phase electronically controlled electric motor. The rotor is mounted directly on the shaft, while the stator is attached to the pump body.
INLET
SHAFT
IMPELLER
ROTOR
HOUSING
G 02596 - Edition 02 - March 06
DRAG PUMP
DYNAMIC SEAL
ELECTRICAL CONNECTOR
MDP 5011 standard molecular pump
MOTOR
BALL BEARING
MOTOR HOUSING
EXHAUST
Cross section drawing
1/2
The different version operating
adixen Vacuum Products - MDP 5011 User's Manual
principle
A 210
MDP 5011 CP
version for
corrosive gases
The MDP 5011 CP is specially designed for aggressive environments. Ball bearings and motor are isolated from process gases by a dynamic inert gas purge system.
MDP 5011 CP can operate with the same controller than the MDP 5011 standard.
INLET
SHAFT
IMPELLER
ROTOR
HOUSING
DRAG PUMP
MOTOR
2/2
DYNAMIC SEAL
EXHAUST
ELECTRICAL CONNECTOR
MDP 5011 CP Molecular pump
PURGE SYSTEM DN 16
Cross section drawing
BALL BEARING
MOTOR
HOUSING
G 02596 - Edition 02 - March 06
A 400
adixen Vacuum Products - MDP 5011 User's Manual
Technical characteristics
Characteristics Units MDP 5011 MDP 5011 CP
Inlet flange DN 63 ISO-K Exhaust flange DN 16 ISO-KF Rotation speed tr/mn 27,000 Starting time (0 to 27000 tr/mn) mn < 1
N2
Pumping speed
Compression rate
Ultimate pressure (CP with purge 50 sccm)* mbar 1x10
Maximum pressure at inlet in continuous operation**
Maximum pressure at exhaust in continuous operation**
Ambient operating temperature
Recommanded primary pump Ultimate pressure < 20 mbar
Weight
Environmental conditions:
Ingress Protection
Use of the product Altitude
Maximum relative humidity
Pollution degree
He 4 H2 N2 He 2x10 H2
Natural convection Air cooling 10 Water cooling Natural convection Air cooling Water cooling Natural convection Air cooling 5 to 35°C (41 to 95 °F) Water cooling
Natural convection Air cooling 3 Water cooling
L/s
9
1x10
4
3
1x10
-6
mbar
mbar 40 5
5 to 35°C (41 to 95 °F)
°C
5 to 50°C (41 to 122 °F)
kg
up to 2000m (6562 pied)
80 % for temp. up to 31°C (87°F)
decreasing linearly to 50 % at 40°C (104°F)
7.5
3
-1
1x10
10
2.3
2.5
IP 20
indoor use
rate 2
1x10
250
50
1x10
6
-5
* According to Pneurop Specifications. ** The 2 maximum pressures can not occur at the same time.
G 02599 - Edition 03 - July 11
Note: the MDP 5011 pump must not be baked. The compression rate of the MDP 5011 CP is lower than this of the standard MDP 5011 pump. A part of the dynamic seal allows the protection against corrosion.
1/1
Pump dimensions
adixen Vacuum Products - MDP 5011 User's Manual
A 401
MDP 5011 DN 63 ISO-K
cooled by natural
convection
Exhaust DN 16 ISO-KF
Dimensions mm/inch
30
1.18301.18
INLET DN 63 ISO-KF
Ø95 h11 (Ø3.75 h0.43)
Screwing by 4 threaded holes diam. 0.16 (4) on diam.3.46 (88)
27.7
1.09
12
0.47
27.3
1.07
G 02600 - Edition 01 - Sept. 04
Ø95 (Ø3.75)
Ø86.2
(Ø3.39)
143
5.63
17
0.67
52
+ 12 mm (0.47)
(2.05)
Power supply - Connector
for disassembling
1/3
Pump dimensions
adixen Vacuum Products - MDP 5011 User's Manual
A 401
MDP 5011 DN 63 ISO-K
water cooling
Orientable 360 °
20
0.78
Exhaust DN 16 ISO-KF
Dimensions mm/inch
109.1
4.30
A
F
B
E
C
D
30
1.18
INLET DN 63 ISO-KF
Ø95 h11 (Ø3.75 h0.43)
101
3.98
30
1.18
Screwing by 4 threaded holes diam. 0.16 (4) on diam.3.46 (88)
27.7
1.09
12
0.47
27.3
1.07
Water cooling connections for
0.23 x 0.31 (6 x 8 mm) plastic tubing or copper tubing
Ø95 (Ø3.75)
Ø106.5 (Ø4.19)
Ø86.2
(Ø3.39)
143
5.63
17
0.67
52
+ 12 mm (0.47)
(2.05)
for disassembling
Power supply - Connector
G 02600 - Edition 01 - Sept. 04
2/3
Pump dimensions
adixen Vacuum Products - MDP 5011 User's Manual
A 401
MDP 5011 DN 63 ISO-K
Air cooling
Exhaust DN 16 ISO-KF
Dimensions mm/inch
80
3.15
A
F
B
E
C
D
30
1.18
INLET DN 63 ISO-KF
Ø95 h11 (Ø3.75 h0.43)
30
1.18
Screwing by 4 threaded holes diam. 0.16 (4) on diam.3.46 (88)
27.7
1.09
12
0.47
Fan
84.5
3.33
G 02600 - Edition 01 - Sept. 04
80
3.15
98
(3.86)
Ø95 (Ø3.75)
Ø86.2
(Ø3.39)
27.3
1.07
143
5.63
17
0.67
52
+ 12 mm (0.47)
(2.05)
for disassembling
Power supply - Connector
3/3
Pump accessories
adixen Vacuum Products - MDP 5011 User's Manual
A 510
Screen filter 2.5 mm
Compact filter
This filter protects the pump against solid particles 2.5 mm.
The filter stops particles
20 microns and is used in the event of high densities of dust or risk of implosion when pumping tubes or lamps.
Description P/N
DN 63 ISO-K 063117
Description P/N
DN 63 ISO-K 062912
G 02598 - Edition 03 - July 11
Electrical
venting valve
Cooling kit
This valve is used to refill the pump with air after pump stopping or after a power failure.
P/N of electrical venting valve compatible with ACT 100.
Description P/N
Electrical venting valve DN16- ISO-KF 100 V - 50/60 Hz 063165 Electrical venting valve DN16- ISO-KF 115 V - 50/60 Hz 063171 Electrical venting valve DN16- ISO-KF 200 V - 50/60 Hz 063173 Electrical venting valve DN16- ISO-KF 220 V - 50/60 Hz 063169 Electrical venting valve DN16- ISO-KF 240 V - 50/60 Hz 063172
It is easy to install or replace a cooling kit by another :
Description P/N
Water cooling kit 062184 Air cooling kit 110 V (ACT 100) 062187 Air cooling kit 220 V (ACT 100) 062186 Air cooling kit 12 V (ACT 200 TH) 118809
1/1
B 100
adixen Vacuum Products - MDP 5011 User's Manual
Safety instructions for pump and controller installation
Indicates a potentially hazardous situation which, if not avoided, could result in property damage.
Indicates a potentially hazardous situation which, if not avoided, could result in moderate or minor injury. It may also be used to alert against unsafe practices.
Indicates a potentially hazardous situation which, if not avoided, could result in death or severe injury.
Indicates an imminently hazardous situation that, if not avoided, will result in death or severe injury (extreme situations).
GB 00725 - Edition 04 - Aug 11
For emergencies
Overview
Before switching on the product, study the user’s manual and make
sure you follow the safety instructions. You can recognise these by the
‘Caution’, ‘Warning’ and ‘Danger’ symbols.
Good practice tips and manufacturer’s recommendations are in a blue
box.
The performance and operational safety of this product are guaranteed
provided it is used normally in the operating conditions defined in this
manual.
It is the customer’s task to:
–
train operators to use the product if they do not speak the language the manual is written in,
–
ensure operators know the safe practices to apply when using the product.
We took care to provide you with a clean product. To keep it in this
condition, unpack it only in contamination free area and at final place of
use.
For emergencies and breakdowns, contact the manager of your local
service center (see addresses at back of manual).
Make sure the equipment shows no sign of transport damage. If it has
been damaged, take the necessary steps to record this with the carrier
and inform the manufacturer. In all cases, we recommend keeping the
packaging (reusable materials) for further transport of the equipment or
for prolonged storage.
1/4
B 100
adixen Vacuum Products - MDP 5011 User's Manual
Safety instructions for pump and controller installation
Our products are designed to comply with current EEC regulations. Users making their own modifications to the product are liable to break its compliance with these regulations, degrade its EMC (electromagnetic compatibility) rating, and make it unsafe to use. The manufacturer declines all liability for the consequences of such operations.
The product’s EMC rating is obtained on the understanding that it is installed in compliance with EMC rules. Specially in environments that are prone to emit interference, use shielded cables and connections on interfaces.
This pump is not equipped with an emergency stop EMO device because it is designed for use on process tools and integration with the process tool EMO. Check that the pump is correctly connected to the equipment emergency stop device.
Electric shock hazard. Some components have capacitors charged to over 60VDC, or motor operating as generator. When power is switched off, they keep their charge for a time. Take precautions concerning the access to the connector pins. Wait at least 5 minutes after the turbopump comes to complete stop before starting any work on the product.
Fire protection: The pump is not intended to be installed on process containing flammable
materials or in hazardous atmosphere. The pump body is made of aluminium. The main part enclosure and the majority of the non metallic parts (mainly electrical components and frequency converter) have a fire rating of UL94V0 and/or are UL approved.
Smoke hazard due to the presence of electrical components.
The smoke hazard is low due to the use of approve components and the
containment smoke in the pump cover.
Ensure that the product is connected to an electrical installation:
in compliance with the local and national safety requirements,
–
equipped with electrical protection (fuses, circuit breaker, …) which
–
has a suitable earth (ground) point, properly connected.
GB 00725 - Edition 04 - Aug 11
2/4
When units containing control circuits are equipped with dry contact outputs, it is the responsability of the customer to use these outputs in compliance with extra low voltage installation and security standards.
B 100
adixen Vacuum Products - MDP 5011 User's Manual
Safety instructions for pump and controller installation
The user and /or OEM are ultimately responsible for operating the equipment in a safe manner. The manufacturer has no control over the types of gases exposed to this pump. This is the user and/or the OEM’s responsibility to follow the necessary safety requirements. Frequently process gases are toxic, flammable, corrosive, explosive and/or otherwise reactive. Toxic gases can cause serious injury or death. Operators and users must take the appropriate safety recommendations to prevent injury. Consult the responsible department for instructions and safety information. Hazardous gases through the pump can cause serious injury or death. It’s mandatory by regulations to connect the turbomolecular pump’s exhaust to a rough pumping line compatible with the process gases. Check that pump is correctly connected to the equipment (B300).
Pump connection to the installation: It is strongly recommended to secure the turbopump installation to prevent any safety hazard to the user in standard operating conditions : (B 300).
GB 00725 - Edition 04 - Aug 11
The units containing control circuits are designed to guarantee normal safety conditions taking their normal operating environment into account (use in rack). In specific cases of use on tables, make sure that no objects enter the ventilation openings or block the openings when handling the units.
Operation
Do not operate the pump until it is securely fixed. If the pump seizes, the stored energy of the rotor can cause rapid movement of the pump, which may cause further damage and injury to people. It is mandatory to respect installation instructions described in the pump user’s manual. The adixen constructor declines any responsibility if the pump installation is not made in accordance with the installation specifications.
WARNING
MOVING PARTS PRESENT
Moving parts can crush and cut. Keep hands or feet away from moving parts.
This label informs the user that moving parts present inside the pump coud cause personal injury, like crushing or cutting. The user must keep all body parts away from moving parts.
3/4
B 100
adixen Vacuum Products - MDP 5011 User's Manual
Safety instructions for pump and controller installation
Do not expose any part of the human body to vacuum. The product is
supplied with the inlet and exhaust sealed. Remove these blanking plates
when you are ready to connect the product on your vacuum system.
As well as, don’t operate the product unless the inlet and exhaust are
connected to a vacuum and exhaust pumping line.
Risk of cut injury:
The access to the rotor of a turbomolecular pump with an unconnected inlet
port is dangerous. In the meantime, if the pump is not switched on, it may
be driven by another pump in operation.
Always connect the pump inlet port before starting the pump.
Risk of tilting: although the product meets EEC safety regulations (topple angle ± 10 °), it is advisable to guard against the risk of tilting during handling, installation, and use.
Storage
The products are factory tested to ensure they will not leak in normal
operating conditions. It is the user’s responsibility to ensure this level of
leak tightness is maintained.
The product is supplied with the inlet and exhaust sealed. These are to prevent foreign bodies entering the pump during transport and storage. Do not remove these blanking plates until you are ready to install the product on the vacuum line.
When the pump is new, if it is going to be put into storage, keep it in its packaging in the following conditions:
–
in a clean and dry environment,
–
at an ambient temperature between -5°C and +40°C,
–
for a period of 2 years maximum with a running period every 6 months
(refer to C100). If you need to store a pumping unit which has run on clean process, don’t forget to purge the pump with N2. Seal the inlet, exhaust and purge ports with blanking plates (refer to F100). Don’t store the pump more than 6 months in a clean and dry environment. Never store a pump which has been used on corrosive process. Return it to an adixen repair service center (refer to G200).
GB 00725 - Edition 04 - Aug 11
4/4
B 300
c
adixen Vacuum Products - MDP 5011 User's Manual
Pump connection to an installation
It is absolutely necessary to install the pump according to the following installation specifications to secure the user and the equipment.
The adixen constructor declines any responsibility if the pump installation is not designed in accordance with the installation specifications described in this section.
The connection of the
pump to the
installation must be
sufficiently rigid
The dimensions of the connection parts should be study carefully: reduce the following as much as possible:
–
dimensions a and b the flexibility of the connection plate
–
the overhang c between the pump and its anchor point.
Support plate
Spacer
a
Some examples of unrecommanded conncections:
b
G 02602 - Edition 02 - July. 11
Bellows
The equipment attachment devices should be sufficiently rigid to prevent potential risks in the event of failure of a rotary component or a violent shock on the pump (exceptional phenomena). For this use the rotary flange attachment holes.
If the inlet flange is attached with claw clamps, use: – 6 claw clamps for flange < DN 100 – 8 claw clamps for flange ≥ DN 100.
Rigid support
1/4
B 300
adixen Vacuum Products - MDP 5011 User's Manual
Pump connection to an installation
In.
The pump can operate
in any position
Cooling
recommendations and
temperature limits
In.
In.
In.
Ambient operating temperature:
MDP with natural convection or air cooled T < 35°C (95°F)
MDP water cooled T < 50°C (122°F)
Pumping conditions
2/4
In cases of high pressure pumping or frequent cycling, the pump temperature is higher, so water or air cooling are recommended.
G 02602 - Edition 02 - July. 11
Pump line
adixen Vacuum Products - MDP 5011 User's Manual
connections
B 300
Pump connection to an installation
Do not expose any part of the human body to vacuum. The product is supplied with the inlet and exhaust sealed. Remove
these blanking plates when you are ready to connect the product on your vacuum system.
As well as, don’t operate the product unless the inlet and exhaust are connected to a vacuum and exhaust pumping line.
Make sure all parts and chambers connected to the inlet, exhaust and purge of the maglev pump can withstand a negative pressure of 1 bar below atmospheric pressure and that they are impervious to damage from vacuum (seals, etc.).
G 02602 - Edition 02 - July. 11
Risk of injury by cutting. Contact with the pump rotor cell may cause cuts. Alternatively, protective gloves may be worn when servicing the product.
For safety reasons, use accessories on the inlet and exhaust lines whose materials and sealing properties are compatible with the gases being used.
Materials in direct contact with process gases
COMPONENTS IN THE PUMP MATERIALS
From inlet to exhaust Stainless steel, aluminium alloy
O-ring Fluorinated elastomers, FPM
Pollution risk: Unclean and contaminated component can increase the pumping down time. Use only dry and clean pipe lines, and wear glooves to make the pump connections.
After connecting the product to the pumping line, check for leaks along the entire to ensure proper connections.
3/4
B 300
adixen Vacuum Products - MDP 5011 User's Manual
Pump connection to an installation
Inlet
Exhaust
Install the screen filter or compact filter accessory on the pump;
(1)
connect the pump to the installation
.
Inlet flange: DN 63 ISO-K
It is recommended to install an isolation valve between the chamber to allow chamber venting without stopping the pump.
Connect the Air inlet valve accessory to the pump.
(1)
Connect the pump to primary pumping circuit
.
Exhaust flange : DN 16 ISO-KF
When pumping on corrosive gases, or aggressive gases, the gas can cause injury or death. The exhaust of the turbopump must be connected to roughing pump line compatible with process gases.
It is highly recommended to install an isolation valve between the pump and the roughing circuit.
(1)
Different connection accessories can be found in the
Manufacturer’s catalog.
G 02602 - Edition 02 - July. 11
4/4
B 320
adixen Vacuum Products - MDP 5011 User's Manual
Nitrogen purge connection (MDP 5011CP)
For proper protection from reactive gases and particles the inert gas purge system must be used continuously.
Nitrogen
characteristics
Nitrogen connection
For maximum performance, a filtered dry nitrogen supply with the following characteristics is required:
O concentration < 1 ppm
H
2
concentration < 1 ppm
O
2
dew point < – 22° C,
particles < 1 μm
oil < 0,1 ppm
pressure range: 1 to 1.3 bar.
The cleanliness of the gas line must be correct.
The purge gas line must have an DN16 ISO-KF fitting to connect it directly to the MDP with a centering ring and quick connect clamp.
A
A
F
MDP 5011 CP
Filter
G 03078 - Edition 02 - July 11
Ni flowrate adjustment
Valve
F
Dry nitrogen
If the pressure in the purge gas line is greater than 1.4 bar (20.5 psi) absolute the check valve automatically opens in order to limit the flow into the MDP to 50 sccm.
We recommend that the pressure of the purge line be set at 1 to 1.3 bar (15 to 19 psi) absolute to avoid wasting the purge gas.
If the pressure of the purge line exceeds 1.3 bar (15 psi ) absolute the performance of the pump will be affected.
F view
1/1
B 330
adixen Vacuum Products - MDP 5011 User's Manual
Venting valve connection
Check the solenoid valve voltage : it must be compatible with line voltage (see A510).
Composition
Electrical wiring with
ACT 100
It consists of:
A solenoïd valve normally open (NO) mounted on
a DN 16 ISO-KF flanged fitting.
The fitting is installed between the outlet flange of the MDP and the foreline of the primary pump.
Connect the solenoïd valve cable to the J connector of the ACT 100 controller.
MDP
Venting valve system
Working
G 02604 - Edition 02 - July 11
Electrical wiring with
ACT 200 TH
to RVP
If there is a power failure, this device vents the MDP pump to atmosphere to prevent oil contamination from the roughing pump.
If the user want to make a venting, he must :
–
press the ”STOP” switch on the ACT 100 controller.
–
Disconnect the power cable on the ACT 100 controller.
Refer to controller User’s Manual.
1/1
Water cooling connection
adixen Vacuum Products - MDP 5011 User's Manual
B 340
Water characteritics
In order to limit corrosion and motor cooling circuit clogging, it is recommended to use cooling water with the following characteristics:
Treated soft water or non-corrosive industrial water
pH between 7.5 and 11
Hardness < 7 milli-equivalent/dm = 350 mg/l of CaCO3 (calcium carbonate) = 35 °f (French degree)
Resistivity: 1,500
Particles maximum size: 0.2 mm
Solid pollution < 100 mg/dm Maximum pressure 7 bar
 
Temperature from 50 to 77°F (10 to 25°C)
The use of uncontrolled city water can lead to water circuit clogging due to limestone deposition, which may necessitate in the worst case a complete cleaning and overhaul of the cooling circuit.
The presence of micro-organisms like aquatic weed and micro-biological substances like bacteria can lead to cooling problem in the pump. Appropriate water treatment system need to be use to prevent such growth of micro-organisms.
.cm < R < 20,000 .cm
3
3
G 02603 - Edition 03 - July 11
Connection
Provide a water inlet pipe and a tap to adjust the flow rate.
It consists of a water circulator ring which can be equipped on the MDP housing.
It is recommended for use at ambient temperature between 95 and 122°F, or in continuous use at high pressure.
1/2
Water cooling connection
adixen Vacuum Products - MDP 5011 User's Manual
B 340
Connection
(cont’)
When the air cooling device must be replaced by a water cooling device, proceed as follows:
–
Install the cooling ring (1) on the MDP housing in the specific groove and put it facing the water line.
–
Screw the 2 water fittings (2) to the cooling ring and orientate them.
–
Secure the device by screwing the hose clamp (3) with a screwdriver : the cooling ring does not rotate.
2
3
1
Water cooling device
Connection to the
water line
Water flow
adjustment
Use a flexible or a rigid 6 x 8 mm hose to connect one of the
–
water fittings to the water line. The user must provide some method of controlling water flow. Use a flexible or a rigid 6 x 8 mm hose to connect the other
–
fitting to the drain.
Control the flow of water depending on ambient temperature, and water temperature using the following graph.:
Water flow l/mn
1.4
1.2
1
0.8
0.6
0.4
0.2
0 68 86 104 12250
θ water = 68°F (20°C)
θ eau = 59°F (15°C)
θ eau = 50°F (10°C)
Ambient temperature (°F)
G 02603 - Edition 03 - July 11
2/2
Air cooling kit connection
adixen Vacuum Products - MDP 5011 User's Manual
B 350
Mechanical
connection
Electrical connection
Functional limits
When the water cooling kit must be replaced by an air cooling device, proceed as follows:
Install the fan on the pump housing by a bracket. This last is
–
assembled on the pump rear tape with 3 screws M4 (refer
page 3/3
–
Connect the contact plug of the minus wire to a fan assembling screw.
With the ACT 100 controller
Connect the fan cable to the K connector of the controller.
With the ACT 200 TH controller
Power the fan with the provided 12V connector on the pump/ controller cable connection.
The fan provides sufficient cooling for ambient temperature up to 95 °F.
If the ambient temperature is above 95 °F, the user should install a water cooling collar.
).
A401
G 02605 - Edition 03 - July 11
It is recommended for use at ambient temperature between 95 and 132 ° F, or in continuous use at high pressure.
1/1
First pump start-up
adixen Vacuum Products - MDP 5011 User's Manual
C 150
Molecular pump operation in a pumping application
Study the safety instructions for product use (see C 100)
When the pump is new, or after a prolonged shut-down of 3 months or more (under normal storage conditions), it is recommended to operate the pump at atmospheric pressure for 10 minutes (inlet and exhaust open to atmosphere) in order to ensure a slow rotation and grease re­distribution in the pump ball-bearings.
The access to the rotor of a molecular pump with an unconnected inlet is dangerous. Similarly, if the pump is not switched on, it may be driven by another pump in operation (risk of injury).
Example of a single
valve assembly
G 02608 - Edition 02 - March 06
The chamber and pipes are at atmospheric pressure, the pumps are switched off, the valves are closed
Start-up:
–
start up the MDP cooling system
–
open the E1 valve
–
start up the primary pump
–
start up the MDP pump.
Stop:
–
close E1
–
stop the primary pump
–
stop the MDP pump
–
stop the cooling system.
Chamber to be
evacuated
E1
MDP
Roughing
pump
1/2
Molecular pump operation
adixen Vacuum Products - MDP 5011 User's Manual
in a pumping application
C 150
Example of a 3 valve
assembly (example 1)
Example of a 3 valve
assembly (example 2)
The chamber and pipes are at atmospheric pressure, the pumps are off, the valves are closed.
Pre-evacuation of the chamber:
start up the primary pump
– –
start up the MDP cooling system
–
open the E2 valve.
When the pressure in the chamber
1 mbar, the secondary
is pumping can be started up:
–
close E2
–
start up the MDP pump
–
open E1 and E3.
The chamber in atmospheric , the pumps are operating, the valves E2 and E3 are closed, the cooling circuit is operating.
Pre-evacuation of the chamber:
–
close E1 and open E2.
Chamber to be
evacuated
E3
E2
E1
MDP
Roughing
pump
To refill the chamber
with air
To stop pumping
The pressure in the chamber is 1 mbar:
–
close E2
–
open E1 and E3.
Close the E3 valve (E1 remains open) and open an air inlet on the chamber.
Pumps are isolated by closing the valves.
–
close the E3 valve.
MDP pump and primary pump rotating
–
stop the MDP pump
–
close the E1 valve
–
stop the primary pump
–
stop the cooling circuit.
G 02608 - Edition 02 - March 06
2/2
D 100
adixen Vacuum Products - MDP 5011 User's Manual
Safety recommendations related to maintenance
Maintenance must be performed by a skilled maintenance operator trained in the relevant health and safety aspects (EMC, electrical hazards, chemical pollution, etc.).
Isolate the product from all energy sources (mains electricity, compressed air, water, gas ...) before starting work.
Standard precautions before any maintenance operations: Before performing a maintenance operation, stop the pump. When
the pump is at rest, switch off the pump by setting the controller main switch to «0», wait 5 minutes before disconnecting the main cable. If this last one remains connected, some components will still be energized.
G 02610 - Edition 03 - July 11
Risk of injury by cutting. The inlet of the pump musn’t be disconnected as long as the rotor is
moving and without having disconnecting the power line cable.
After pumping on corrosive or toxic gases, it is strongly recommended to seal the pump with blanking plates in case of return to the repair service
centers. Refer to F 100 for connecting accessories.
Risk due to pumping conditions. Remaining process gases in the pump may cause severe injury or death.
Before removing the pump from the installation, continue N2 flow from the process tool for 30 min. Nitrogen pressure and flow rate should be identical to the programmed values during process.
During pump removal, operator could be in contact with process residues on the exhaust which could cause severe injury or death. Ask your safety department for instructions according to the local regulations.
Chemical supplies coming from the tool, as well as the water and the nitrogen need also to be locked out/tagged out.
1/2
D 100
adixen Vacuum Products - MDP 5011 User's Manual
Safety recommendations related to maintenance
Users are advised:
–
Wear gloves, protective glasses and, if required for the used gases, a
breathing mask. –
Ventilate the premises well. –
Do not dispose of residue in the usual waste disposal network but,
have it destroyed by a qualified organization.
Install the inlet and exhaust blanking plates, thus delivered with the
–
pump.
The outside of the appliance and control box can be cleaned with a lint free wiper. Avoid using cleaning products that deteriorate printed surfaces and self adhesive labels. All other cleaning operations must be done by our service centers.
Decontamination – product dismantling
According to the regulations 2002/96/CE about Waste of electrical and electronical equipments, and 2002/95/CE about Restriction of Hazardous substances, the manufacturer provides a recycling paid service for the end of-life of waste electrical and electronic equipment. Any obligation of the manufacturer to take back such equipment shall apply only to complete not amended or modified equipment, using adixen Vacuum Products original spare parts, delivered by adixen Vacuum Products, containing i.e. all its components and sub-assemblies. This obligation will not cover the shipping cost to an adixen take back facility. Before returning the product, fill in the safety form available in appendix of the user’s manual. Attach it to the product before shipping to the service­repair office closest to you.
How to contact us?
2/2
The partial and full overhaul must be performed by manufacturer trained personnel.
Contact nearest service center or the service support at the following e-mail address:
support.service@adixen.fr
G 02610 - Edition 03 - July 11
18000
adixen Vacuum Products - MDP 5011 User's Manual
D 300
MDP 5011 pump maintenance frequency
16000
14000
12000
10000
8000
6000
4000
10 20 30 40 50
In continuous operation at ultimate pressure
In cycle less than 1 hour at maximum inlet pressure
Housing temperature (
°C)
G 02609 - Edition 02 - July 11
Maintenance frequency
20 °C temperature
16 000 hours 10 000 hours 1st lubrication E 200
32 000 hours 20 000 hours 2nd lubrication E 200
48 000 hours 30 000 hours Ball bearings replacement Consult us
Housing temperature measuring point
Maintenance frequency
35 °C temperature
Operation to be carried out Section
1/1
F 000
adixen Vacuum Products - MDP 5011 User's Manual
Spare parts - Instructions of use
Replacement of parts
and use of non genuine
parts
Our products are designed to comply with current EC regulations and guarantee optimal operating conditions with maximum safety conditions for the user.
Any modification of the product made by the user is liable to lead to non-compliance with the regulations, or even to put into doubt the performance of the product and the user’s safety.
Replacement of defective components with parts that are not genuine, jeopardizes the initial safety conditions of the equipment.
In such cases, the EC declaration of conformity becomes null: The manufacturer withdraws responsibility for such operations.
Besides, counterfeiting and unfair trading of parts are condemned under civil and criminal laws.
GB 01390 - Edition 04 - May 09
The manufacturer urges the user not to use «imitation parts», or the misappropriation and pirating of intellectual property performed by some dishonest operators.
The manufacturer supplies maintenance components, spare parts or kits to perform the maintenance of its products (see F10).
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First level of maintenance
adixen Vacuum Products - MDP 5011 User's Manual
F 100
Lubrication syringe
Air inlet electrovalves
accessories
Ready-to-use, it contains the grease load required for a regreasing operation on the 2 bearings.
Description P/N
Electrovalve coil 100 V - 50/60 Hz 038126 Electrovalve coil 115 V - 50/60 Hz 038122 Electrovalve coil 200 V - 50/60 Hz 038125 Electrovalve coil 220 V - 50/60 Hz 038121 Electrovalve coil 240 V - 50/60 Hz 038124 Electrovalve operator 038102 Silencer 075990
P/N
200027
accessories at inlet
G 02613 - Edition 03 - July 11
Connecting
and exhaust
After pumping on corrosive or toxic gases, it is strongly recommended to seal the pump with blanking plates in case of return to the repair service centers.
At inlet DN63 ISO-K P/N
Blank-off flange 068285
Centrering ring with o-ring 068432
Double claw clamps (set of 4) 303056
At exhaust DN 16 IS0-KF and at purge port P/N
Blank-off flange 068195
Centrering ring with o-ring (set of 15) 068228
Stepped lugs and fasteners (set of 4) 053221
1/1
/h
adixen Vacuum Products - MDP 5011 User's Manual
3
MDP 5011 with RVP 2 m
Pumping curves
G 10
2
N
He
1,00E+02
1,00E+01
Pumping speed
G 02623 - Edition 01 - Sept. 04
1,00E+00
1,00E-01
Inlet pressue (mbar)
1,00E-02
1,00E-03
8
7
6
5
4
3
2
pumping speed (l/s)
1
0
1,00E-04
1/2
/h
adixen Vacuum Products - MDP 5011 User's Manual
3
MDP 5011 with RVP 2 m
Pumping curves
G 10
2
N
He
1,00E+02
1,00E+01
Flow rate
1,00E+00
1,00E-01
Inlet pressure (mbar)
1,00E-02
1,00E-03
G 02623 - Edition 01 - Sept. 04
2/2
1,00E+03
1,00E+02
1,00E+01
1,00E+00
1,00E-01
Flow (sccm)
1,00E-04
1,00E-02
G 200
adixen Vacuum Products - MDP 5011 User's Manual
Safety questionnaire
Procedure for returning adixen products
You wish to return an adixen product for maintenance. The equipment will be dismantled and possibly cleaned by a technician from our Service Centre. In compliance with European Community’s L360 directives, French labor code L231 - R231 and Federal OSHA Safety Standard 1910-1200, adixen Vacuum Products requires this form to be completed to preclude the potential health risk to its service personnel that can occur when receiving, disassembling, or repairing potentially contaminated products.
Equipment returned without this form completed and secured to outside of package will be returned to customer unprocessed.
Equipment must be drained of fluids and residue, securely packaged and shipped prepaid. Concerning the closing of the ports (inlet & outlets of the product), metallic airtight blank flanges should be used if toxic or copper gases have been pumped.
We wish to draw your attention to the following points:
• The risk may be of the following nature:
- Chemical: Danger to health, risks of explosion, fire, risks for the environment. Please indicate the chemical formula and name of the gases or substances that have been in contact with the equipment (pump or detector).
- Biological: In case of contamination (such as pathogenic germs, micro-organisms (bacteria, viruses, etc.) classes 1 to 4 and group E), our Service Center is currently unable to decontaminate and recycle such material without risk to the safety of our staff. Please contact us before
sending the product to the Service center.
- Radioactive: In case of contamination, our Service Center is currently unable to decontaminate and recycle such material without risk to the safety of our staff. Please contact us before sending the product to the Service center.
- Copper contamination: Copper based by products formed in sputtering or etching processes
are considered as a poison in some semi-conductor processes.
If following inspection and quotation, customer elects to not proceed with repair, he will be subject to service fee to cover product decontamination, disassembly, cleaning and evaluation costs. Please to fill in the following form, print it and attach it to the product before shipping to the service-repair office closest to you.
In the event of chemical contamination, please indicate the following gases or substances:
Substances produced
by reaction
C
B
Pump or pump unit
GB 00956 - Edition 08 - Juin 11
• Gases (or substances) introduced into the reactor and which may be found at the exhaust (A).
• Gases (or substances) resulting from the reaction or process (B).
• Gases (or substances) that may possibly be formed inside the pump (due to a thermodynamic or
Gases
introduced
Reactor
A
chemical reaction, condensation, deposition, precipitation, etc.) (C).
• Precautions need to be taken before transferring contaminated products.
Please contact Service Center for recommendations.
Exhaust
A B C
1/2
QUESTIO
NNAIRE DE SECURITE - SAFETY QUESTIONNAIRE
q
d
g
SOC
-
CO
Y
Société
e
)
ctio
.
)
- Date of consignment : ...............................
ment : ....
CE
)
SS
No
:
)
l
- Toxic
No
-
bustible -
Combustible
-
e
-
e
Biological
-
ve -
i
-
o
.........................................................................................................
E
:
h.
)
é
)
)
y
)
.
ctio
.
n
/
t
Seal
t
X
m
adixen Vacuum Products - MDP 5011 User's Manual
Ce questionnaire est téléchargeable sur le site : www.adixen.com
This
uestionnaire can be downloaded from: www.adixen.com
Procé
(Ce formulaire ne peut être rempli et signé que par une personne habilitée)
Procedure for returnin
(This questionnaire is only to be filled in and signed by an authorized person)
Fon
INTERVENTION- SERVI
Intervention souhaitée (Révision, réparation,...) - Service required (overhaul, repair, etc.
Type d’anomalie constatée -
PROCEDE CUIVRE - COPPER PROCE
Produit utilisé sur un procédé Cuivre - Product used on a Copper process Oui
ASPECT SECURITE -
ure de retour des produits ADIXEN
ADIXEN products
IETE
m
om personne - Name of person : ..................................................
Qui remplit ce formulaire) -Who has filled in questionnair
n -
° Tél.Tel. no : ...............................................................................
Fax-Fax no : ...............................................................................
Pour renseignements éventuels sur les produits utilisés)
MPAN
-
ame of company : ...........................
n : .........................................................................
(for any information on products used)
ype of anomaly observed :
AFETY ASPECT
UIPEMENT
EQUIPMENT
escription : ........................................................................
° de Série
pe de procédé - Type of process : .............................................
(Pour lequel l’équipement est utilisé) - (for which equipement is used
ate de l’expédition
rial no : ......................................................
G 200
ollowing substances
(nom et formule chimique) - (name and chemical formula
Chimique -Chemica
oxique
Cancérigène -
m
Corrosive - Corrosiv
xplosive - Explosive
Biologiqu
arcinogenic
ui -
ui
ui -
es
No
No
No
n
N
utre -
IGNATUR
avec l’équipement sus-mentionné, et que les procédures de préparation, d’emballage, et de transport ont été respectées.
You have replied “yes” to one of the above questions
I confirm that only the substances mentioned have been in contact with the above equipment and that the preparation, packing and transport procedures have been complied wit
ponseOui”
R
eplyYes”
om -
ame : ..................................................................................
Fon
n -
ate :..............................................................
Signature autorisée - Authorised signature : .................................
fermeture étanche de l’aspiration et du refoulement
seal inlet and outlet ports with blank flanges
n : ..............................................
Detailed explanation
If «Yes», what type of risk
.........................................................................................................
.........................................................................................................
.........................................................................................................
.........................................................................................................
J
confirme que le matériel sus-mentionné n’a été en contact
vec aucune substance dangereuse, et a été vidé de son huile.
Si applicable
confirm that the above equipment has not been in contact
with any dangerous substance and has been emptied of oil. (If
pplicable)
ponse
om -
ame : ...................................................................................
onction - Position : ........................................................................
:...............................................................................
ignature autorisée -Authorised signature : .............................
Repl
on”(sans risque)
No”
no risk
.........
......
.
GB 00956 - Edition 08 - Juin 11
Tampo
ache
adixen Vacuum Products - 98, avenue de Brogny - B.P. 2069 - 74009 ANNECY CEDE
el. (33) 4 50 65 77 77 - Fax (33) 4 50 65 75 77 - Web site : www.adixen.co
2/2
Tampon /
ache
tamp /l
Pfeiffer Vacuum stands for innovative and custom vacuum solutions worlwide. For German engineering art, competent advice and reliable services.
Even since the invention of the turbopump, we’ve been setting standards in our industry. And this claim to leadership will continue to drive use in the future.
Leading. Dependable. Customer Friendly.
You are looking for a perfect vacuum solution? Please contact us:
Pfeiffer Vacuum Products GmbH
Berliner Strasse 43 35614 Asslar - Germany T +49 6441 802-0 F +49 6441 802-202 Info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.de
adixen Vacuum Products
98 avenue de Brogny 74009 Annecy Cedex - France T +33 (0) 4 50 65 77 77 F +33 (0) 4 50 65 77 89 info@adixen.fr
www.adixen.com
Ed 14-Date: 07/11-P/N:062199
Leading. Dependable. Customer Friendly.
Pfeiffer Vacuum stands for innovative and custom vacuum solutions worlwide. For German engineering art, competent advice and reliable services.
Even since the invention of the turbopump, we’ve been setting standards in our industry. And this claim to leadership will continue to drive use in the future.
You are looking for a perfect vacuum solution? Please contact us:
Pfeiffer Vacuum Products GmbH
Berliner Strasse 43 35614 Asslar - Germany T +49 6441 802-0 F +49 6441 802-202 Info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.de
adixen Vacuum Products
98 avenue de Brogny 74009 Annecy Cedex - France T +33 (0) 4 50 65 77 77 F +33 (0) 4 50 65 77 89 info@adixen.fr
www.adixen.com
Ed 14-Date: 07/11-P/N:062199 *062199*
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