Philips KMZ10A, KMZ10A1, KMZ10B, KMZ10C, KMZ51 General Manual

...
2000 Sep 06
DISCRETE SEMICONDUCTORS
General
Magnetoresistive sensors for magnetic field measurement
2000 Sep 06 2
Magnetoresistive sensors for magnetic field measurement
General
CONTENTS General field measurement
Operating principles
Philips magnetoresistive sensors
Flipping
Effect of temperature on behaviour
Using magnetoresistive sensors
Further information for advanced users
Appendix 1: The magnetoresistive effect
Appendix 2: Sensor flipping
Appendix 3: Sensor layout.
Fig.1 Philips magnetoresistive sensors.
2000 Sep 06 3
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
The KMZ range of magnetoresistive sensors is characterized by high sensitivity in the detection of magneticfields,awideoperatingtemperaturerange,alow and stable offset and low sensitivity to mechanical stress. They therefore provide an excellent means of measuring both linear and angular displacement under extreme environmental conditions, because their very high sensitivity means that a fairlysmall movement of actuating components in, for example, cars or machinery (gear wheels, metal rods, cogs, cams, etc.) can create measurable changes in magnetic field. Other applications for magnetoresistive sensors include rotational speed measurement and current measurement.
Examples where their properties can be put to good effect can be found in automotive applications, such as wheel speed sensors for ABS and motor management systems and position sensors for chassis position, throttle and pedal position measurement. Other examples include instrumentation and control equipment, which often require position sensors capable of detecting displacements in the region of tenths of a millimetre (or even less), and in electronic ignition systems, which must be able to determine the angular position of an internal combustion engine with great accuracy.
Finally, because of their high sensitivity, magnetoresistive sensors can measure very weak magnetic fields and are thus ideal for application in electronic compasses, earth field correction and traffic detection.
Ifthe KMZ sensors are to be used tomaximum advantage, however, it is important to have a clear understanding of their operating principles and characteristics, and how theirbehaviourmay be affected by external influences and by their magnetic history.
Operating principles
Magnetoresistive (MR) sensors make use of the magnetoresistive effect, the property of a current-carrying magnetic material to change its resistivity in the presence of an external magnetic field (the common units used for magnetic fields are given in Table 1).
Table 1 Common magnetic units
The basic operating principle of an MR sensor is shown in Fig.2.
Figure 2 shows a strip of ferromagnetic material, called permalloy (19%Fe, 81%Ni). Assume that, when no external magnetic field is present, the permalloy has an internal magnetization vector parallel to the current flow (shown to flow through the permalloy from left to right). If an external magnetic field H is applied, parallel to the plane of the permalloy but perpendicular to the current flow,the internal magnetization vector of thepermalloy will rotate around an angle α. As a result, the resistance of R of the permalloy will change as a function of the rotation angle α, as given by:
(1)
R
o
and Ro are material parameters and to achieve optimum sensor characteristics Philips use Fe19Ni81, which has a high Rovalue and low magnetostriction. With this material, Ro is of the order of 3%. For more information on materials, see Appendix 1.
It is obvious from this quadratic equation, that the resistance/magneticfieldcharacteristicisnon-linearandin addition, each value of R is not necessarily associated with a unique value of H (see Fig.3). For more details on the essentials of the magnetoresistive effect, please refer to the Section “Further information for advanced users” laterinthischapterorAppendix 1,which examinestheMR effect in detail.
1 kA/m = 1.25 mTesla (in air) 1 mT = 10 Gauss
Fig.2 The magnetoresistive effect in permalloy.
handbook, halfpage
MLC127
I
Magnetization
Permalloy
H
Current
α
R = R R cos α
2
00
RRO∆ROcos2α+=
2000 Sep 06 4
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
In this basic form, the MR effect can be used effectively for angular measurement and some rotational speed measurements, which do not require linearization of the sensor characteristic.
In the KMZ series of sensors, four permalloy strips are arranged in a meander fashion on the silicon (Fig.4 shows one example, of the pattern on a KMZ10). They are connected in a Wheatstone bridge configuration, which has a number of advantages:
Reduction of temperature drift
Doubling of the signal output
The sensor can be aligned at the factory.
Fig.3 The resistance of the permalloy as a
function of the external field.
handbook, halfpage
MLC128
H
R
Fig.4 KMZ10 chip structure.
handbook, full pagewidth
MBC930
2000 Sep 06 5
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
Two further resistors, RT, are included, as shown in Fig.5. Theseare for trimming sensor offset down to (almost) zero during the production process.
Forsomeapplicationshowever,theMR effect can be used to its best advantage when the sensor output characteristic has been linearized. These applications include:
Weak field measurements, such as compass
applications and traffic detection;
Current measurement; and
Rotational speed measurement.
For an explanation of how the characteristic is linearized, please refer to the Section “Further information for advanced users” later in this chapter.
Philips magnetoresistive sensors
Based on the principles described, Philips has a family of basic magnetoresistive sensors. The main characteristics of the KMZ sensors are given in Table 2.
Fig.5 Bridge configuration with offset trimmed to
zero, by resistors RT.
handbook, halfpage
MLC129
2 1
GND
V
O
V
CC
V
O
R
T
R
T
34
Table 2 Main characteristics of Philips sensors
Notes
1. In air, 1 kA/m corresponds to 1.25 mT.
2. Data given for operation with switched auxiliary field.
SENSOR
TYPE
PACKAGE
FIELD
RANGE
(kA/m)
(1)
V
CC
(V)
SENSITIVITY
R
bridge
(k)
LINEARIZE
MR
EFFECT
APPLICATION
EXAMPLES
KMZ10A SOT195 0.5 to +0.5 9 16.0 1.2 Yes compass, navigation, metal
detection, traffic control
KMZ10A1
(2)
SOT195 0.05 to +0.05 9 22.0 1.3 Yes
KMZ10B SOT195 2.0 to +2.0 12 4.0 2.1 Yes current measurement,
angular and linear position, reference mark detection, wheel speed
KMZ10C SOT195 7.5 to +7.5 10 1.5 1.4 Yes
KMZ51 SO8 0.2 to +0.2 8 16.0 2.0 Yes compass, navigation, metal
detection, traffic control
KMZ52 SO16 0.2 to +0.2 8 16.0 2.0 Yes
mV V()
kA m()
---------------------
2000 Sep 06 6
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
Flipping
The internal magnetization of the sensor strips has two stable positions. So, if for any reason the sensor is influenced by a powerful magnetic field opposing the internal aligning field, the magnetization may flip from one position to the other, and the strips become magnetized in the opposite direction (from, for example, the ‘+x’ to the ‘x’ direction). As demonstrated in Fig.6, this can lead to drastic changes in sensor characteristics.
The field (e.g. ‘Hx’) needed to flip the sensor magnetization, and hence the characteristic, depends on the magnitude of the transverse field ‘Hy’: the greater the field ‘Hy’, the smaller the field ‘Hx’. This follows naturally, since the greater the field ‘Hy’, the closer the magnetization's rotation approaches 90°, and hence the easier it will be to flip it into a corresponding stable position in the ‘x’ direction.
Looking at the curve in Fig.7 where Hy= 0.5 kA/m, for such a low transverse field the sensor characteristic is stable for all positive values of Hx and a reverse field of 1 kA/m is required before flipping occurs. At Hy= 2 kA/m however, the sensor will flip even at smaller values of ‘Hx’ (at approximately 0.5 kA/m).
Fig.6 Sensor characteristics.
handbook, halfpage
MLC130
0
2424
O
(mV)
H (kA/m)
y
V
10
10
reversal
of sensor
characteristics
Fig.7 Sensor output ‘Vo’ as a function of the auxiliary field ‘Hx’ for several values of transverse field ‘Hy’.
handbook, full pagewidth
MLC131
0
1231
O
(mV)
H (kA/m)
x
H =
2 kA/m
y
0.5 kA/m
V
50
100
100
50
2
3
2000 Sep 06 7
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
Figure 7 also shows that the flipping itself is not instantaneous, because not all the permalloy strips flip at thesamerate.Inaddition, it illustrates the hysteresis effect exhibited by the sensor. For more information on sensor flipping, see Appendix 2 of this chapter.
Effect of temperature on behaviour
Figure 8 shows that the bridge resistance increases linearly with temperature, due to the bridge resistors’ temperature dependency (i.e. the permalloy) for a typical KMZ10B sensor. The data sheets show also the spread in this variation due to manufacturing tolerances and this should be taken into account when incorporating the sensors into practical circuits.
In addition to the bridge resistance, the sensitivity also varies with temperature. This can be seen from Fig.9, which plots output voltage against transverse field ‘Hy’ for various temperatures. Figure 9 shows that sensitivity falls with increasing temperature (actual values for given for every sensor in the datasheets). The reason for this is rather complex and is related to the energy-band structure of the permalloy strips.
Fig.8 Bridge resistance of a KMZ10B sensor as
a function of ambient temperature.
handbook, halfpage
40 160
3
1
MBB897
2
0 40 80 120
T ( C)
o
amb
bridge
R
(k)
2000 Sep 06 8
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
Fig.9 Output voltage ‘Vo’ as a fraction of the supply voltage of a KMZ10B sensor as a function of transverse field
‘Hy’ for several temperatures.
handbook, full pagewidth
3
0
15
32
2
MLC134
5
10
10
5
15
0
1
1
H (kA/m)
y
V
O
(mV/V)
T = 25 C
amb
o
25 C
o
75 C
o
125 C
o
operating range
2000 Sep 06 9
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
Figure 10 is similar to Fig.9, but with the sensor powered by a constant current supply. Figure 10 shows that, in this case, the temperature dependency of sensitivity is significantly reduced. This is a direct result of the increase in bridge resistance with temperature (see Fig.8), which
partly compensates the fall in sensitivity by increasing the voltage across the bridge and hence the output voltage. Figure 8 demonstrates therefore the advantage of operating with constant current.
Fig.10 Output voltage ‘Vo’ of a KMZ10B sensor as a function of transverse field ‘Hy’ for several temperatures.
handbook, full pagewidth
0
75
42
MLC135
25
50
50
25
75
2
0
4
H (kA/m)
y
V
O
(mV/V)
T = 25 C
amb
o
25 C
o
75 C
o
125 C
o
operating range
2000 Sep 06 10
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
Using magnetoresistive sensors
The excellent properties of the KMZ magnetoresistive sensors, including their high sensitivity, low and stable offset, wide operating temperature and frequency ranges and ruggedness, make them highly suitable for use in a wide range of automotive, industrial and other applications. These are looked at in more detail in other chapters in this book; some general practical points about using MR sensors are briefly described below.
ANALOG APPLICATION CIRCUITRY In many magnetoresistive sensor applications where
analog signals are measured (in measuring angular position, linear position or current measurement, for example), a good application circuit should allow for sensor offset and sensitivity adjustment. Also, as the sensitivity of many magnetic field sensors has a drift with temperature,thisalsoneeds compensation. A basic circuit is shown in Fig.11.
In the first stage, the sensor signal is pre-amplified and offset is adjusted. After temperature effects are compensated, final amplification and sensitivity adjustment takes place in the last stage. This basic circuit can be extended with additional components to meet specific EMC requirements or can be modified to obtain customized output characteristics (e.g. a different output voltage range or a current output signal).
Philips magnetoresistive sensors have a linear sensitivity drift with temperature and so a temperature sensor with
linear characteristics is required for compensation. Philips KTY series are well suited for this purpose, as their positive Temperature Coefficient (TC) matches well with the negative TC of the MR sensor. The degree of compensation can be controlled with the two resistors R7 and R8 and special op-amps, with very low offset and temperature drift, should be used to ensure compensation is constant over large temperature ranges.
Please refer to part 2 of this book for more information on the KTY temperature sensors; see also the Section “Further information for advanced users” later in this chapter for a more detailed description of temperature compensation using these sensors.
USING MAGNETORESISTIVE SENSORS WITH A COMPENSATION
COIL
For general magnetic field or current measurements it is useful to apply the ‘null-field’ method, in which a magnetic field (generated by a current carrying coil), equal in magnitude but opposite in direction, is applied to the sensor. Using this ‘feedback’ method, the current through the coil is a direct measure of the unknown magnetic field amplitudeandit has the advantage that the sensor is being operated at its zero point, where inaccuracies as result of tolerances, temperature drift and slight non-linearities in the sensor characteristics are insignificant. A detailed discussion of this method is covered in Chapter “Weak field measurement”.
Fig.11 Basic application circuit with temperature compensation and offset adjustment.
handbook, full pagewidth
MBH687
3
4
1
2
KMZ10B
offset
adjustment
R3
22 k
R4
14 k
R2
500 k
R1
100 k
2
3
4
1
8
R6
KTY82-210
TLC2272
R5
140 k
R7
2.4 k
R8
2.4 k
R9
33 k
R10
33 k
6
5
7
IC1
R11
22 k
R12
150 k
sensitivity
adjustment
C1
10 nF
V = 5 V
S
V = 0.2 V to 4.8 V
O (with resistive load greater than 10 k)
op-amp
op-amp
2000 Sep 06 11
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
Further information for advanced users
THE MR EFFECT In sensors employing the MR effect, the resistance of the
sensor under the influence of a magnetic field changes as it is moved through an angle α as given by:
(2)
It can be shown that
(3)
and
(4)
where H
o
can be regarded as a material constant comprising the so called demagnetizing and anisotropic fields.
Applying equations (3) and (4) to equation (2) leads to:
(5)
(6)
which clearly shows the non-linear nature of the MR effect. Moredetailedinformation on the derivation of the formulae
for the MR effect can be found in Appendix 1.
LINEARIZATION The magnetoresistive effect can be linearized by
depositing aluminium stripes (Barber poles), on top of the permalloy strip at an angle of 45° to the strip axis (see Fig.12).Asaluminium has a much higher conductivity than permalloy, the effect of the Barber poles is to rotate the current direction through 45° (the current flow assumes a ‘saw-tooth’ shape), effectively changing the rotation angle of the magnetization relative to the current from α to α−45°.
A Wheatstone bridge configuration is also used for linearized applications. In one pair of diagonally opposed elements, the Barber poles are at +45° to the strip axis, while in another pair they are at 45°. A resistance increase in one pair of elements due to an external magnetic field is thus ‘matched’ by a decrease in resistance of equal magnitude in the other pair. The resulting bridge imbalance is then a linear function of the amplitude of the external magnetic field in the plane of the permalloy strips, normal to the strip axis.
RR
O
ROcos2α+=
sin
2
α
H
2
H
O
2
------- -
for H HO≤=
sin
2
α 1 for H HO>=
RR
O
RO1
H
2
H
O
2
------- -



for H H
0
+=
RR
O
for H HO>=
Fig.12 Linearization of the magnetoresistive effect.
handbook, halfpage
MLC125
,,
,,
II
Magnetization
Permalloy
Barber pole
2000 Sep 06 12
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
For sensors using Barber poles arranged at an angle of +45° to the strip axis, the following expression for the sensor characteristic can be derived (see Appendix 1 on the MR effect):
(7)
The equation is linear where H/H
o
= 0, as shown in Fig.7. Likewise, for sensors using Barber poles arranged at an angle of 45°, the equation derives to:
(8)
This is the mirror image of the characteristic in Fig.7. Hence using a Wheatstone bridge configuration ensures the any bridge imbalance is a linear function of the amplitude of the external magnetic field.
F
LIPPING
As described in the body of the chapter, Fig.7 shows that flipping is not instantaneous and it also illustrates the hysteresis effect exhibited by the sensor. This figure and Fig.14 also shows that the sensitivity of the sensor falls with increasing ‘Hx’. Again, this is to be expected since the moment imposed on the magnetization by ‘Hx’ directly opposesthatimposedby ‘Hy’,therebyreducingthe degree of bridge imbalance and hence the output signal for a given value of ‘Hy’.
Fig.13 The resistance of the permalloy as a
function of the external field H after linearization (compare with Fig.6).
handbook, halfpage
MLC126
H
R
RR
O
R
O
2
----------- -
R
O
H
H
O
------- -


1
H
2
H
O
2
------- -
++=
RR
O
R
O
2
----------- -
R
O
H
H
O
------- -


1
H
2
H
0
2
------ -
+=
Fig.14 Sensor output ‘Vo’ as a function of the transverse field ‘Hy’ for several values of auxiliary field ‘Hx’.
handbook, full pagewidth
MLC132
0
24681012
O
(mV)
H (kA/m)
y
H =
4 kA/m
x
2 kA/m
1 kA/m
0
V
100
150
50
2000 Sep 06 13
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
The following general recommendations for operating the KMZ10 can be applied:
To ensure stable operation, avoid operating the sensor in an environment where it is likely to be subjected to negative external fields (‘Hx’). Preferably, apply a positive auxiliary field (‘Hx’) of sufficient magnitude to prevent any likelihood of flipping within he intended operating range (i.e. the range of ‘Hy’).
Beforeusingthe sensor for the first time, apply a positive auxiliaryfieldofatleast3 kA/m; this will effectively erase the sensor’s magnetic ‘history’ and will ensure that no residual hysteresis remains (refer to Fig.6).
Use the minimum auxiliary field that will ensure stable operation, because the larger the auxiliary field, the lower the sensitivity, but the actual value will depend on the value of Hd. For the KMZ10B sensor, a minimum auxiliaryfield of approximately 1 kA/m is recommended; to guarantee stable operation for all values of Hd, the sensorshould be operated in an auxiliaryfield of 3 kA/m.
These recommendations (particularly the first one) define a kind of Safe Operating ARea (SOAR) for the sensors. This is illustrated in Fig.15, which is an example (for the KMZ10B sensor) of the SOAR graphs to be found in our data sheets.
The greater the auxiliary field, the greater the disturbing field that can be tolerated before flipping occurs. For auxiliary fields above 3 kA/m, the SOAR graph shows that the sensor is completely stable, regardless of the magnitude of the disturbing field. It can also be seen from this graph that the SOAR can be extended for low values of ‘Hy’. In Fig.15, (for the KMZ10B sensor), the extension for Hy< 1 kA/m is shown.
TEMPERATURE COMPENSATION With magnetoresistive sensors, temperature drift is
negative. Two circuits manufactured in SMD-technology which include temperature compensation are briefly described below.
Thefirst circuit is the basic application circuit already given (see Fig.11). It provides average (sensor-to-sensor) compensationofsensitivity drift with temperature using the KTY82-210 silicon temperature sensor. It also includes offset adjustment (via R1); gain adjustment is performed with a second op-amp stage. The temperature sensor is partofthe amplifier’s feedback loop and thus increasesthe amplification with increasing temperature.
The temperature dependant amplification A and the temperature coefficient TCA of the first op-amp stage are approximately:
for R8=R
7
for R8=R
7
RTis the temperature dependent resistance of the KTY82. The values are taken for a certain reference temperature. This is usually 25 °C, but in other applications a different reference temperature may be more suitable.
Figure 16 shows an example with a commonly-used instrumentation amplifier. The circuit can be divided into two stages: a differential amplifier stage that produces a symmetrical output signal derived from the magnetoresistive sensor, and an output stage that also provides a reference to ground for the amplification stage.
To compensate for the negative sensor drift, as with the above circuit the amplification is again given an equal but positive temperature coefficient, by means of a KTY81-110 silicon temperature sensor in the feedback loop of the differential amplifier.
Fig.15 SOAR of a KMZ10B sensor as a function of
auxiliary field ‘Hx’ and disturbing field ‘Hd’ opposing ‘Hx’ (area I).
handbook, halfpage
012 4
12
0
4
8
MLC133
3
H
d
(kA/m)
H (kA/m)
x
I
II
SOAR
A
R
5
R
3
------ -
= 1
2R
T
R
7
---------- -
+


TC
A
TC
KTY
1
R
7
2R
T
---------- -
+
-------------------- -
=
2000 Sep 06 14
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
Fig.16 KMZ10B application circuit with instrumentation amplifier.
handbook, full pagewidth
MLC145
KMZ10B
offset
R2
V
O
V
S
R1
R3
OP2
R7
R4
R6
R
KTY82-110
R5
R9
R10
R12
R11
R13
R14
OP1
OP3
T
R
A
R
B
The amplification of the input stage (‘OP1’ and ‘OP2’) is given by:
(9)
where RT is the temperature dependent resistance of the KTY82 sensor and RB is the bridge resistance of the magnetoresistive sensor.
The amplification of the complete amplifier can be calculated by:
(10)
The positive temperature coefficient (TC) of the amplification is:
(11)
Forthe given negative ‘TC’ of themagnetoresistive sensor and the required amplification of the input stage ‘A1’, the resistance ‘RA’ and ‘RB’ can be calculated by:
(12)
(13)
where TC
KTY
is the temperature coefficient of the KTY sensor and TCA is the temperature coefficient of the amplifier. This circuit also provides for adjustment of gain and offset voltage of the magnetic-field sensor.
A1 1
R
TRB
+
R
A
-------------------- -
+=
AA1
R
14
R
10
---------
×=
TC
A
RTTC
KTY
×
R
ARBRT
++
---------------------------------- -
=
R
B
R
T
TC
KTY
TC
A
----------------- -
1
1
A1
-------


1×


×=
R
A
R
T
R
B
+
A1 1
-------------------- -
=
2000 Sep 06 15
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
APPENDIX 1: THE MAGNETORESISTIVE EFFECT
Magnetoresistive sensors make use of the fact that the electrical resistance ρ of certain ferromagnetic alloys is influenced by external fields. This solid-state magnetoresistiveeffect,or anisotropicmagnetoresistance, can be easily realized using thin film technology,so lends itself to sensor applications.
Resistance-field relation
The specific resistance ρ of anisotropic ferromagnetic metals depends on the angle Θ between the internal
magnetization M and the current I, according to:
ρ(Θ) = ρ
+(ρ⊥−ρ||) cos (1)
where ρ
and ρ||are the resistivities perpendicular and parallel to M. The quotient ⊥−ρ||)/ρ⊥= ∆ρ/ρ is called the magnetoresistive effect and may amount to several percent.
Sensors are always made from ferromagnetic thin films as this has two major advantages over bulk material: the resistance is high and the anisotropy can be made uniaxial. The ferromagnetic layer behaves like a single domain and has one distinguished direction of magnetization in its plane called the easy axis (e.a.), which is the direction of magnetization without external field influence.
Figure 17 shows the geometry of a simple sensor where the thickness (t) is much smaller than the width (w) which is in turn, less than the length (l) (i.e. t « w ‹ l). With the current (I) flowing in the x-direction (i.e. q = 0 or Q = f) then the following equation can be obtained from equation 1: R=R
0
+ DR cos2f(2)
and with a constant current Ι, the voltage drop in the x-direction Ux becomes:
U
x
= ρ⊥Ι (3)
Besides this voltage, which is directly allied to the resistance variation, there is a voltage in the y-direction, U
y
, given by:
U
y=ρ⊥
Ι (4)
This is called the planar or pseudo Hall effect; it resembles the normal or transverse Hall effect but has a physically different origin. All sensor signals are determined by the angle φ between the magnetization M and the ‘length’ axis and, as M rotates under the influence of external fields, these external fields thus directly determine sensor signals. We can assume that the sensor is manufacturedsuch that the e.a. is in the x-direction so that without the influence of external fields, M only has an x-component (φ = 0˚ or 180˚).
Two energies have to be introduced when M is rotated by external magnetic fields: the anisotropy energy and the demagnetizing energy. The anisotropy energy E
k
, is given by the crystal anisotropy field Hk, which depends on the material and processes used in manufacture. The demagnetizing energy Ed or form anisotropy depends on the geometry and this is generally a rather complex relationship, apart from ellipsoids where a uniform demagnetizing field Hdmay be introduced. In this case, for the sensor set-up in Fig.17.
(5)
where the demagnetizing factor N t/w, the saturation magnetization M
s
1 T and the induction constant
µ0=4π
-7
Vs/Am.
The field H
0
Hk + t/w(M0/m0) determines the measuring
range of a magnetoresistive sensor, as f is given by:
Fig.17 Geometry of a simple sensor.
handbook, halfpage
y
x
L
M
Ι
MBH616
ϕ
W
ϑ
L
wt
------


1
∆ρ
ρ
-------


cos
2
φ+


1 t
-- -


∆ρ
ρ
-------


sinφcosφ
H
d
t
w
--- -
M
s
µ
0
-------


2000 Sep 06 16
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
sinφ= (6)
where |H
y
| |H0+Hx| and Hxand Hyare the components
of the external field. In the simplest case H
x
= 0, the volt-
ages U
x
and Uy become:
U
x=ρ⊥
l (7)
U
y=ρ⊥
l (8)
(Note: if H
x
= 0, then H0 must be replaced by
H
0+Hx
/cos φ).
Neglecting the constant part in U
x
, there are two main
differences between U
x
and Uy:
1. The magnetoresistive signal U
x
depends on the
square of H
y/H0
, whereas the Hall voltage Uyis linear
for H
y
« H0.
2. The ratio of their maximum values is L/w; the Hall voltage is much smaller as in most cases L » w.
Magnetization of the thin layer
The magnetic field is in reality slightly more complicated than given in equation (6). There are two solutions for angle φ:
φ1 < 90˚ and φ2 > 90˚ (with φ1+φ2 = 180˚ for H
x
= 0).
Replacing φ by 180˚ - φ has no influence on U
x
except to change the sign of the Hall voltage and also that of most linearized magnetoresistive sensors. Therefore, to avoid ambiguity either a short pulse of a proper field in the x-axis (|H
x
|>Hk) with the correct sign must be applied, which will switch the magnetization into the desired state, or a stabilizing field Hst in the x-direction can be used. With the exception of H
y
« H0, it
is advisable to use a stabilizing field as in this case, H
x
values are not affected by the non-ideal behaviour of the layer or restricted by the so-called ‘blocking curve’.
The minimum value of Hstdepends on the structure of the sensitive layer and has to be of the order of H
k
, as an insufficient value will produce an open characteristic (hysteresis) of the sensor. An easy axis in the y-direction leads to a sensor of higher sensitivity, as then H
o=Hk−Hd
.
Linearization
As shown, the basic magnetoresistor has a square
resistance-field (R-H) dependence, so a simple magnetoresistive element cannot be used directly for linear field measurements. A magnetic biasing field can be used to solve this problem, but a better solution is linearization using barber-poles (described later). Nevertheless plain elements are useful for applications using strong magnetic fields which saturate the sensor, where the actual value of the field is not being measured, such as for angle measurement. In this case, the direction of the magnetization is parallel to the field and the sensor
signal can be described by a cos
2
α function.
Sensors with inclined elements Sensorscanalso be linearized by rotating the currentpath,
by using resistive elements inclined at an angle θ, as shown in Fig.18. An actual device uses four inclined resistive elements, two pairs each with opposite inclinations, in a bridge.
The magnetic behaviour of such is pattern is more complicatedasM
o
isdetermined bytheangleofinclination θ, anisotropy, demagnetization and bias field (if present). Linearity is at its maximum for φ + θ≈ 45˚, which can be achieved through proper selection of θ. A stabilization field (Hst) in the x-direction may be necessary for some applications, as this arrangement only works properly in one magnetization state.
H
y
H
o
H
x
cosφ
------------
+
--------------------------
L
wt
------


1
∆ρ
ρ
-------


1
H
y
H
0
------ -


2


+


1
t
-- -


∆ρ
ρ
-------


H
y
H
0
------ -


1H
yH0
()
2
Fig.18 Current rotation by inclined elements
(current and magnetization shown in quiescent state).
handbook, halfpage
MBH613
M
0
M
0
Ι
Ι
ϑ
ϑ
ϕ
ϕ
2000 Sep 06 17
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
BARBER-POLE SENSORS A number of Philips’ magnetoresistive sensors use a
‘barber-pole’construction to linearize the R-Hrelationship, incorporating slanted strips of a good conductor to rotate the current. This type of sensor has the widest range of linearity, smaller resistance and the least associated distortion than any other form of linearization, and is well suited to medium and high fields.
The current takes the shortest route in the high-resistivity gaps which, as shown in Fig 19, is perpendicular to the barber-poles. Barber-poles inclined in the opposite direction will result in the opposite sign for the R-H characteristic, making it extremely simple to realize a Wheatstone bridge set-up.
The signal voltage of a Barber-pole sensor may be calculated from the basic equation (1) with Θ = φ + 45˚ (θ = + 45˚):
U
BP=ρ⊥
l (9)
whereaisaconstantarising from the partial shorting of the resistor, amounting to 0.25 if barber-poles and gaps have
equal widths. The characteristic is plotted in Fig 20 and it can be seen that for small values of H
y
relative to H0, the R-H dependence is linear. In fact this equation gives the same linear R-H dependence as the planar Hall-effect sensor, but it has the magnitude of the magnetoresistive sensor.
Barber-pole sensors require a certain magnetization state. A bias field of several hundred A/m can be generated by the sensing current alone, but this is not sufficient for sensor stabilization, so can be neglected. In most applications, an external field is applied for this purpose.
Sensitivity
Due to the high demagnetization, in most applications field components in the z-direction (perpendicular to the layer plane) can be ignored. Nearly all sensors are most sensitive to fields in the y-direction, with Hx only having a
limited or even negligible influence. Definition of the sensitivity S contains the signal and field
variations (DU and DH), as well as the operating voltage U
0
(as DU is proportional to U0):
S
o
= (10)
Fig.19 Linearization of the magnetoresistive effect
with barber-poles (current and magnetization shown in quiescent state).
handbook, halfpage
Magnetization
Barber pole
Permalloy
Ι
Ι
y
+
Ι
x
ϑ
,,
,,
MBH614
L
wt
------


α1
1 2
-- -
∆ρ
ρ
-------


∆ρ
ρ
-------
±
H
y
H
0
------ -
1
H
y
H
0
------ -


2
+



Fig.20 Calculated R-H characteristic of a
barber-pole sensor.
handbook, halfpage
MBH615
0.5 0
0
R
0
R
R
0.5 1 H
Y
H
0
1
UH
--------
1
U
0
------ -


U
U
0
H
--------------- -


=
2000 Sep 06 18
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
This definition relates DU to a unit operating voltage. The highest (HG) and lowest (H
min
) fields detectable by
the sensor are also of significance. The measuring range H
G
is restricted by non-linearity - if this is assumed at 5%,
an approximate value for barber-pole sensors is given by:
(11)
From this and equation (9) for signal voltage (U
BP
) for a
barber-pole sensor, the following simple relationship can be obtained: (12)
Other sensor types havea narrower range of linearity and therefore a smaller useful signal.
The lowest detectable field H
min
is limited by offset, drift and noise. The offset is nearly cancelled in a bridge circuit and the remaining imbalance is minimized by symmetrical designandoffsettrimming, with thermal noise negligible in most applications (see section on sensor layout). Proper film deposition and, if necessary, the introduction of a stabilization field will eliminate magnetization switching duetodomain splitting and the introduction of ‘Barkhausen noise’. Sensitivity S0 is essentially determined by the sum of the anisotropy(H
k
), demagnetization (Hd) and bias (Hx) fields.
The highest sensitivity is achievable with H
x
= 0 and
H
d«Hk
, although in this case S0 depends purely on H
k
which is less stable than Hd. For a permalloy with a thickness greater than or equal to 20 µm, a width in excess of 60 µm is required which, although possible, has the drawback of producing a very low resistance per unit area. The maximum theoretical S
0
with this permalloy (at
H
k
= 250 A/m and ∆ρ/ρ = 2.5%) is approximately:
(13)
For the same reasons, sensors with reduced sensitivity should be realized with increased H
d
, which can be esti-
mated at a maximum for a barber-pole sensor at 40 kA/m. A further reduction in sensitivity and a corresponding growth in the linearity range is attained using a biasing field. A magnetic shunt parallel to the magnetoresistor or only having a small field component in the sensitive direc­tion can also be employed with very high field strengths.
A high signal voltage U
x
can only be produced with a
sensor that can tolerate a high supply voltage Uo. This
requires a high sensor resistance R with a large area A, since there are limits for power dissipation and current density. The current density in permalloymaybe very high (j > 10
6
A/cm2 in passivation layers), but there are weak points at the current reversal in the meander (see section on sensor layout) and in the barber-pole material, with five-fold increased current density.
A high resistance sensor with U0 = 25 V and a maximum S0 results in a value of 2.5 x 10
-3
(A/m)-1for Su or, converted to flux density, ST= 2000 V/T. This value is severalorders of magnitude higher than for a normal Hall effect sensor, but is valid only for a much narrower measuring range.
Materials
There are five major criteria for a magnetoresistive material:
Large magnetoresistive effect Dr/r (resulting in a high
signal to operating voltage ratio)
Large specific resistance r (to achieve high resistance
value over a small area)
Low anisotropy
Zero magnetostriction (to avoid influence of mechanical
stress)
Long-term stability. Appropriate materials are binary and ternary alloys of Ni,
Fe and Co, of which NiFe (81/19) is probably the most common.
Table 1 gives a comparison between some of the more common materials, although the majorityofthe figures are only approximations as the exact values depend on a number of variables such as thickness, deposition and post-processing.
Table 3 Comparison of magnetoresistive sensor
materials
∆ρ is nearly independent of these factors, but r itself increases with thickness (t 40 nm) and will decrease during annealing. Permalloys have a low H
k
and zero
magnetostriction; the addition of Cowill increase ∆ρ/ρ,but
H
G
0.5 H0Hx+()
H
G
S
0
0.5
∆ρ
ρ
-------


S0(max) 10
4–
A
m
---- -


1
100
m
V
V
-------- -


kA
m
-------


--------------
==
Materials ρ (10
8
m) ∆ρ/ρ(%) ΙΙk(∆/m)
NiFe 81:19 22 2.2 250 NiFe 86:14 15 3 200 NiCo 50:50 24 2.2 2500 NiCo 70:30 26 3.7 2500 CoFeB 72:8:20 86 0.07 2000
2000 Sep 06 19
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
this also considerably enlarges Hk. If a small temperature coefficient of ∆ρ is required, NiCo alloys are preferable. The amorphous alloy CoFeB has a low ∆ρ/ρ, high Hk and slightly worse thermal stability but due to the absence of grain boundaries within the amorphous structure, exhibits excellent magnetic behaviour.
APPENDIX 2: SENSOR FLIPPING
During deposition of the permalloystrip, a strong external magnetic field is applied parallel to the strip axis. This accentuates the inherent magnetic anisotropy of the strip andgivesthem a preferredmagnetizationdirection,sothat even in the absence of an external magnetic field, the magnetization will always tend to align with the strips.
Providing a high level of premagnetization within the crystal structure of the permalloy allows for two stable premagnetization directions. When the sensor is placed in a controlled external magnetic field opposing the internal aligning field, the polarity of the premagnetization of the strips can be switched or ‘flipped’ between positive and negative magnetization directions, resulting in two stable output characteristics.
The field required to flip the sensor magnetization (and hence the output characteristic) depends on the magnitude of the transversefield H
y
. The greater this field,
the more the magnetization rotates towards 90˚ and therefore it becomes easier to flip the sensor into the corresponding stable position in the ‘-x’ direction. This means that a smaller -H
x
field is sufficient to cause the
flipping action As can be seen in Fig 22, for low transverse field strengths
(0.5kA/m)thesensor characteristic is stable forallpositive values of Hx, and a reverse field of approximately 1 kA/m is required to flip the sensor. However at higher values of Hy (2 kA/m), the sensor will also flip for smaller values of Hx (at 0.5 kA/m). Also illustrated in this figure is a noticeable hysteresis effect; it also shows that as the permalloy strips do not flip at the same rate, the flipping action is not instantaneous.
The sensitivity of the sensor reduces as the auxiliary field H
x
increases, which can be seen in Fig 22 and more clearly in Fig 23. This is because the moment imposed on the magnetization by Hx directly opposes that of Hy, resulting in a reduction in the degree of bridge imbalance and hence the output signal for a given value of Hy.
Fig.21 Sensor characteristics.
handbook, halfpage
MLC130
0
2424
O
(mV)
H (kA/m)
y
V
10
10
reversal
of sensor
characteristics
Fig.22 Sensor output ‘Vo’ as a function of the
auxiliary field Hx.
MLC131
0
1231
O
(mV)
H (kA/m)
x
H =
2 kA/m
y
0.5 kA/m
V
50
100
100
50
2
3
2000 Sep 06 20
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
Fig.23 Sensor output ‘Vo’ as a function of the transverse field Hy.
handbook, full pagewidth
MLC132
0
24681012
O
(mV)
H (kA/m)
y
H =
4 kA/m
x
2 kA/m
1 kA/m
0
V
100
150
50
A Safe Operating ARea (SOAR) can be determined for magnetoresistive sensors, within which the sensor will not flip, depending on a number of factors. The higher the auxiliary field, the more tolerant the sensor becomes to external disturbing fields (Hd) and with an Hxof 3 kA/m or greater, the sensor is stabilized for all disturbing fields as long as it does not irreversibly demagnetize the sensor. If Hdisnegativeand much larger than the stabilising field Hx, the sensor will flip.This effect is reversible,with the sensor returning to the normal operating mode if Hd again becomes negligible (see Fig 24). However the higher Hx, the greater the reduction in sensor sensitivity and so it is generally recommended to have a minimum auxiliary field that ensures stable operation, generally around 1 kA/m. The SOAR can also be extended for low values of Hx as long as the transverse field is less than 1 kA/m. It is also recommended to apply a large positive auxiliary field before first using the sensor, which erases any residual hysteresis
Fig.24 SOAR of a KMZ10B sensor as a function of
auxiliary field ‘Hx’ (MLC133).
handbook, halfpage
012 4
12
0
4
8
MLC133
3
H
d
(kA/m)
H (kA/m)
x
I
II
SOAR
2000 Sep 06 21
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
APPENDIX 3: SENSOR LAYOUT
In Philips’ magnetoresistive sensors, the permalloy strips areformedinto a meander pattern on thesilicon substrate. With the KMZ10 (see Fig 25) and KMZ51 series, four barber-pole permalloy strips are used while the KMZ41 series has simple elements. The patterns used are
different for these three families of sensors in every case, theelementsarelinked in the same fashiontoformthe four arms of a Wheatstone bridge. The meander pattern used in the KMZ51 is more sophisticated and also includes integratedcompensation andflippingcoils (see chapter on weak fields); the KMZ41 is described in more detail in the chapter on angle measurement.
Fig.25 KMZ10 chip structure.
handbook, full pagewidth
MBC930
2000 Sep 06 22
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
In one pair of diagonally opposed elements the barber-poles are at +45˚ to the strip axis, with the second pair at 45˚. A resistance increase in one pair of elements due to an external magnetic field is matched by an equal decrease in resistance of the second pair. The resulting bridge imbalance is then a linear function of the amplitude of the external magnetic field in the plane of the permalloy strips normal to the strip axis.
This layout largely eliminates the effects of ambient variations (e.g. temperature) on the individual elements and also magnifies the degree of bridge imbalance, increasing sensitivity.
Fig 26 indicates two further trimming resistors (RT) which allow the sensors electrical offset to be trimmed down to zero during the production process.
Fig.26 KMZ10 and KMZ11 bridge configuration.
handbook, halfpage
MLC129
2 1
GND
V
O
V
CC
V
O
R
T
R
T
34
2000 Sep 06 23
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
WEAK FIELD MEASUREMENT Contents
Fundamental measurement techniques
Application note AN00022: Electronic compass design
using KMZ51 and KMZ52
Application circuit: signal conditioning unit for compass
Example 1: Earth geomagnetic field compensation in
CRT’s
Example 2: Traffic detection
Example 3: Measurement of current.
Fundamental measurement techniques
Measurement of weak magnetic fields such as the earth’s geomagneticfield(which has a typical strength of between approximately30 A/m and 50 A/m), or fields resulting from very small currents, requires a sensor with very high sensitivity. With their inherent high sensitivity, magnetoresistive sensors are extremely well suited to sensing very small fields.
Philips’ magnetoresistive sensors are by nature bi-stable (refer to Appendix 2). ‘Standard’ techniques used to stabilizesuchsensors, including the application of a strong field in the x-direction (Hx) from a permanent stabilization magnet, are unsuitable as they reduce the sensor’s sensitivityto fields in the measurement, or y-direction (Hy). (Refer to Appendix 2, Fig. A2.2).
To avoid this loss in sensitivity, magnetoresistive sensors can instead be stabilized by applying brief, strong non-permanent field pulses of very short duration (a few µs). This magnetic field, which can be easily generated by simply winding a coil around the sensor, has the same stabilizing effect as a permanent magnet, but as it is only present for a very short duration, after the pulse there is no loss of sensitivity. Modern magnetoresistive sensors specifically designed for weak field applications incorporate this coil on the silicon.
However, when measuring weak fields, second order effects such as sensor offset and temperature effects can greatly reduce both the sensitivity and accuracy of MR sensors. Compensation techniques are required to suppress these effects.
O
FFSET COMPENSATION BY FLIPPING
Despite electrical trimming, MR sensors may have a maximum offset voltage of ±1.5 mV/V. In addition to this
static offset, an offset drift due to temperature variations of about 6 (µV/V)K
1
can be expected and assuming an ambient temperature up to 100 °C, the resulting offset can be of the order of 2 mV/V. Taking these factors into account, with no external field a sensor with a typical sensitivity of 15 mV/V (kA/m)−1 can have an offset equivalent to a field of 130 A/m, which is itself about four times the strength of a typical weak field such as the earth’s geomagnetic field. Clearly, measures to compensate for the sensor offset value have to be implemented in weak field applications.
A technique called ‘flipping’ (patented by Philips) can be used to control the sensor. Comparable to the ‘chopping’ technique used in the amplification of small electrical signals, it not only stabilizes the sensor but also eliminates the described offset effects.
When the bi-stable sensor is placed in a controlled, reversible external magnetic field, the polarity of the premagnetization(Mx)ofthesensor strips can be switched or flipped between the two output characteristics (see Fig.27).
This reversible external magnetic field can be easily achieved with a coil wound around the sensor, consisting of current carrying wires, as described above. Depending on the direction of current pulses through this coil, positive andnegativeflippingfieldsinthex-direction(+Hxand Hx) are generated (see Fig.28).
Fig.27 Butterfly curve including offset.
MLC764
V
O
M
x
offset
H
y
M
x
2000 Sep 06 24
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
Flipping causes a change in the polarity of the sensor output signal and this can be used to separate the offset signal from the measured signal. Essentially, the unknown field in the ‘normal’ positive direction (plus the offset) is measured in one half of the cycle, while the unknown field in the ‘inverted’ negative direction (plus the offset) is measured in the second half. This results in two different outputs symmetrically positioned around the offset value. After high pass filtering and rectification a single, continuous value free of offset is output, smoothed by low pass filtering. See Figs 29 and 30.
Offset compensation using flipping requires additional external circuitry to recover the measured signal.
Fig.28 Flipping coil.
MLC762
H
y
H
x
coil
V
O
current
pulses
sensor
Fig.29 Block diagram of flipping circuit.
handbook, full pagewidth
MBH617
L
F
I
F
FLIPPING
SOURCE
PRE-
AMPLIFIER
CLOCK
T
OFFSET
FILTER
V
out
PHASE
SENSITIVE
DEMODULATOR
2000 Sep 06 25
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
Fig.30 Timing diagram for flipping circuit (a) output voltage; (b) filtered output voltage; (c) output voltage filtered
and demodulated.
handbook, full pagewidth
MBH618
offset
internal magnetization
flipping current I
F
V
O
T
time
time
V
O
time
V
O
time
V
O
H
y
T T
(a)
(b)
(c)
2000 Sep 06 26
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
SENSOR TEMPERATURE DRIFT The sensitivity of MR sensors is also temperature
dependent, with sensitivity decreasing as temperature increases (Fig.31).The effect on sensor output is certainly
not negligible, as it can produce a difference of a factor of three within a 25 °C to +125 °C temperature range, for fieldsup to 0.5 kA/m. This effectis not compensated for by the flipping action described in the last section.
Fig.31 Output voltage ‘Vo’ as a fraction of the supply voltage for a KMZ10B sensor, as a function of transverse
field ‘Hy’, at several temperatures.
handbook, full pagewidth
3
0
15
32
2
MLC134
5
10
10
5
15
0
1
1
H (kA/m)
y
V
O
(mV/V)
T = 25 C
amb
o
25 C
o
75 C
o
125 C
o
operating range
2000 Sep 06 27
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
The simplest form of temperature compensation is to use a current source to supply to the sensor instead of a voltage source. In this case, the resulting reduction in sensitivity due to temperature is partially compensated by a corresponding increase in bridge resistance. Thus a current source not only improves the stability of the
output voltage ‘Vo’, and reduces the variation in sensitivity to a factor of approximately 1.5 (compared to a factor of three using the voltage source). However, this method requires a higher supply voltage, due to the voltage drop of the current source.
Fig.32 Output voltage ‘Vo’ of a KMZ10B sensor as a function of transverse field ‘Hy’ using a current source, for
several temperatures.
handbook, full pagewidth
0
75
42
MLC135
25
50
50
25
75
2
0
4
H (kA/m)
y
V
O
(mV/V)
T = 25 C
amb
o
25 C
o
75 C
o
125 C
o
operating range
2000 Sep 06 28
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
The optimal method of compensating for temperature dependent sensitivity differences in MR measurements of weak fields uses electro-magnetic feedback. As can be seen from the sensor characteristics in Figs 31 and 32, sensor output is completely independent of temperature changes at the point where no external field is applied (the null-point). By using an electro-magnetic feedback set-up, it is possible to ensure the sensor is always operated at this point.
To achieve this, a second compensation coil is wrapped aroundthe sensor perpendicular to the flipping coil, so that the magnetic field produced by this coil is in the same plane as the field being measured.
Should the measured magnetic field vary, the sensor’s output voltage will change, but the change will be different at different ambient temperatures. This voltage change is converted into a current by an integral controller and supplied to the compensation coil, which then itself produces a magnetic field proportional to the output voltage change caused by the change in measured field.
Themagnetic field produced by the compensation coil is in the opposite direction to the measured field, so when it is added to the measured field, it compensates exactly for the change in the output signal, regardless of its actual, temperature-dependent value. This principle is called current compensation and because the sensor is always used at its ‘zero’ point, compensation current is independent of the actual sensitivity of the sensor or sensitivity drift with temperature.
Information on the measured magnetic signal is effectively given by the current fed to the compensating coil. If the field factor of the compensation coil is known, this simplifies calculation of the compensating field from the compensating current and therefore the calculation of the measured magnetic field. If this field factor is not precisely known, then the resistor performing the current/voltage conversion must be trimmed. Figure 34 shows a block diagram of a compensated sensor set-up including the flipping circuit.
Fig.33 Magnetic field directions and the flipping and compensation coils.
handbook, full pagewidth
flipping coil
sensor KMZ10A1
compensation coil
compensation field
flipping field
earth's field
MLC757
2000 Sep 06 29
Philips Semiconductors
Magnetoresistive sensors for magnetic field measurement
General
The influence of other disturbing fields can also be eliminated provided they are well known, by adding a second current source to the compensating coil. Such fields might be those arising from the set-up housing, ferromagnetic components placed close to the sensor or magnetic fields from electrical motors.
The brief summary in Table 3 compares the types of compensation and their effects, so they can be assessed for their suitability in a given application. Because these options encompass a range of costs, the individual requirements of an application should be carefully analysedinterms of the performance gains versus relative costs.
Table 4 Summery of compensation techniques
TECHNIQUE EFFECT
Setting avoids reduction in sensitivity due to constant stabilization field Flipping avoids reduction in sensitivity due to constant stabilization field, as well as
compensating for sensor offset and offset drift due to temperature Current supply reduction of sensitivity drift with temperature by a factor of two Electro-magnetic feedback accurate compensation of sensitivity drift with temperature
Fig.34 Block diagram of compensation circuit.
handbook, full pagewidth
MBH619
L
F
L
C
CURRENT
REGULATOR
FLIPPING
SOURCE
CLOCK
VOLTAGE & CURRENT
OUTPUT
PRE-AMPLIFIER
WITH
SUPRESSION
OF OFFSET
PHASE-
SENSITIVE
DEMODULATOR
Loading...