Declaration of incorporation of partly completed machinery . . . . . . . . . . . 51
3
About this manual
1About this manual
1.1Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documentation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
This document is a translation of the original French instructions.
This manual covers products with the following part numbers:
P/NDescription
ACP120Gxxxx1xxxx1 models for ACP 120G
ACG600Gxxxx1xxxx1 models for ACG 600G
1.1.1Applicable documents
ACP 120G/ACG 600GOperating instructions
Declaration of incorporationIncluded with this manual
1.2Conventions
1.2.1Safety instructions
The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification standards as specified by UL, CSA, ANSI Z-535, SEMI S2, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.
4
1.2.2Pictographs
Prohibition of an action to avoid any risk of accidents, the disregarding
of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of danger, the disregarding of which may result in serious accidents
Important information about the product or this document
1.2.3Instructions/Abbreviations used
About this manual
1.2.4Labels
Work instruction: you must perform an operation here.
BF/FBFunctional block
HPHigh pressure
BP/LPLow pressure
(M)Driving shaft
(m)Driven shaft
S1, S2, Sx Specific tools
Inspection instruction: you must check a key point on the illustration.
Instruction: you must discard the part when disassembling. When reassembling, this part
will be replaced by a new part.
Apply the stated tightening torque.
FCVariateur / Frequency converter
WATER INWater circuit connection: input
PRESSURE MAX
This label indicates the mains voltage of the installation on which the
pump must be connected.
This label indicates the full load current value at the exit of the motor de-
pending on the mains voltage (see 12.2.4).
xx A
yy A
5
About this manual
NOTICE
ROOTS PUMP SHIPPED WITHOUT OIL
DRY PUMP SHIPPED WITHOUT OIL
See Operating Instructions
CAUTION !
PUMP TESTED WITH:
OIL A113
FOMBLIN FLUID
5
HOT SURFACE
Contact with pump bodies may cause burn.
Switch off and wait until pumps cooled
before servicing.
WARNING
HOT SURFACE
Contact with pump bodies may cause burn.
Switch off and wait until pumps cooled
before servicing.
WARNING
1
1
4
2
3
6
WARNING
NOTICE
ROOTS PUMP SHIPPED WITHOUT OIL
DRY PUMP SHIPPED WITHOUT OIL
SEE OPERATING INSTRUCTIONS
6
1
5
It informs the user of the need to fill the pumps with oil (see 5.2).
This label warns the user against possible risk of injury due to any hand contact with
hot surfaces.
It states that protective gloves should be used before performing any intervention.
This label informs the user of oil to use.
6
1Hot surface label
2Full load current label (see 5.5.4)
3Full load current label
4Manufacturer label (see 4.1)
5Oil label
6Oil filling label
2Safety
2.1Safety precautions
Obligation to inform
Any person responsible for installing, using or maintaining the product must first read
the security instructions in this operating manual and comply with them.
It is the operating customer’s responsibility to protect all operators against the dan-
gers associated with the product, with the media pumped and with the entire installation.
Installation and use of the accessories
The products can be fitted with special accessories. The installation, use and refurbishment of the connected accessories are described in detail in the respective manuals.
Only use original accessories.
Accessory part numbers: see Accessories.
Hazards associated with non-compliant electrical installation
Safe operation after installation is the operator’s responsibility.
Connect the product to an installation that is compliant with local safety standards.
Do no carry out any alterations or modifications to the product on your own initiative.
Check that the pump is correctly connected to the emergency stop system for the
equipment (or pumping installation).
For specific questions, contact your service centers.
Safety
WARNING
WARNING
Electric shock hazard in case of contact
When the main isolator is set at O, or when the emergency stop is activated, some internal components still have an electrical charge
Make sure that the mains connection is always visible and accessible so that it can
be unplugged at any time.
Disconnect the power cable from all power sources before starting any work on the
product.
WARNING
Danger due to lack of lock out/tag out (LO/TO) electrical device.
In order to properly secure the pump for installation and/or maintenance, it is required
to lock out/tag out the pump properly in accordance with OSHA requirement
29 CFR.1910.147.
WARNING
Other localised hazardous energies
Electrical circuits and other pressurized circuits, such as nitrogen and water are potential hazards.
Always lock out these energy sources before working on the product.
7
Safety
WARNING
Thermal safety
The motor is equipped with thermal safeties which deliver an information about the motor temperature level.
It is imperative to cable these thermal safeties to protect the motor.
Do not neutralize these safeties during the use.
WARNING
Risk associated with process gases
The user and/or integrator of the product is/are fully responsible for the operational safety conditions of the equipment. The manufacturer has no control over the types of gases
this pump is exposed to. Frequently process gases are toxic, flammable, corrosive, explosive and/or otherwise reactive. It is the user and/or the integrator's responsibility to
follow the necessary safety requirements. Toxic gases can cause serious injury or
death. Operators and users must:
Take the appropriate safety recommendations to prevent injury. Consult the respon-
sible department for instructions and safety information.
Hazardous gases from the pump can cause serious injury or death. Regula-
tions require to connect the pump’s exhaust to a facility hazardous gas exhaust system which incorporates appropriate filters, scrubbers, etc. This system
must meet all air and water regulations.
Check that the pump is correctly connected to the equipment (see Installation).
Contact the service center for further information.
The potential risks with a dry pumping system involve electricity, the chemical processes,
hot surfaces, the pressurized nitrogen and water devices and the lubricant.
● Only qualified personnel trained in safety rules (EMC, electrical safety, chemical pollution) may carry out the installation and maintenance described in this manual. Our
service centers can provide the necessary training.
● Do not remove the blanking plates sealing the inlet and exhaust ports if the product is
not connected to the pumping line.
● Do not operate the product unless the inlet and exhaust are connected to a vacuum
and exhaust pumping line.
● Do not expose any part of the human body to the vacuum.
● Comply with all safety and risk prevention instructions in accordance with local safety
standards.
● Regularly check compliance with all precautionary measures.
● Do not turn on the product if the covers are not in place.
2.2Protective equipment
In some situations, personal protective equipment must be worn when handling the vacuum pump and its components. The owner must provide operators with the necessary
equipment. This equipment must be checked regularly and used in accordance with the
supplier's recommendations.
DANGER
Health risk due to contact with toxic materials
The vacuum pump, pumping line components, and operating media may be contaminated with toxic, corrosive, reactive, or radioactive materials, depending on the process.
Wear appropriate safety equipment when pump is disconnected for maintenance,
while it is being re-installed, and during filling and draining of operating media.
8
2.3Proper use
kg
Safety
WARNING
Risk of injury due to hot surfaces
For the operator's safety, the products are designed to avoid thermal risk. However, specific operating conditions may exist that require extra caution from users due to the high
temperatures (external surfaces > 70°C on the exhaust pipe).
Let the part cool before working on the product.
If necessary wear protective gloves according to directive EN 420.
WARNING
Risk of injury due to falling objects
When transporting parts/components and during maintenance there is a danger of loads
slipping and falling down.
Carry small and medium-size parts/components with both hands.
Carry parts/components > 20 kg with a suitable lifting device.
Wear safety shoes with a steel toe in accordance with directive EN 347.
2.4Improper use
NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accordingly.
● The vacuum pump may only be used to generate a vacuum while pumping gases.
● The product may be used in an industrial environment.
● The pumping of condensable vapors.
● The continuously pumping for the inlet pressure > 50 hPa.
● The G version pump is compatible with traces of corrosive gases.
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
● pumping of flammable and explosive mixtures
● pumping of corrosive gases (exception: pumps in G version)
● pumping of explosive media
● pumping of liquids
● pumping of dusts
● use of the vacuum pump to generate pressure
● operation in potentially explosive areas
● use of accessories or spare parts, which are not named in this manual
The product is not designed to carry people or loads and is not for use as a seat, stepladder or any other similar purpose.
9
Transport and storage
3Transport and storage
Upon delivery, check that the product has not been damaged during transport. If the
product is damaged, take the necessary measures with the carrier and notify the manufacturer. In all situations we recommend:
Keeping the product in its original packaging so it stays as clean as it was when dis-
patched by us. Only unpack the product once it has arrived at the location where it will
be used.
Keeping the packaging (recyclable materials) in case the product needs to be trans-
ported or stored.
Keeping the blanking plates in place on the inlet, exhaust and purge ports while the
product is not connected to the pumping line.
3.1Transport
Risk of injury associated with heavy loads
Given the weight of the product, it should be removed from its packaging only by personnel qualified and trained in handling heavy materials.
Use the lifting rings and devices provided with the product.
The manufacturer cannot be held liable for the consequences of using lifting devices
other than those provided.
WARNING
WARNING
Risk of tilting
Even though compliance with EEC safety rules is guaranteed, all necessary precautions
should be taken when moving, installing and operating the product.
Do not place the product on an inclined plane: its weight could cause the operator to
be dragged.
Only use castors to move it short distances.
Place it on a flat, hard floor.
Do not push the product sideways.
Adjust the levelling feet for operation to make sure that the pump is not supported by
the castors. (Refer to Technical data and dimensions in these operating instruc-
tions for location of the center of gravity.)
10
ACP 120GACG 600G
Transport and storage
3.2Storage
To lift the product:
Use a lifting device suitable for the product's weight.
Use a lifting sling with 2 arms with the following characteristics:
– length of each arm> 500 mm
– load per arm > 350 kg
Screw the hoisting rings (delivered in the crate
in separate packaging) in the suitable holes.
With a sling, lift the pump using hoisting rings.
Adjust the leveling pads of the frame and lower
the pump on the castors to move it over short
distances.
Use the hoisting sling to lift the product with
the hoisting rings fixed on the arch.
Adjust the leveling pads of the frame and
lower the pump on the castors to move it
over short distances.
NOTICE
Duty to inform
In order to prevent moisture from entering the pump before installation, it has been pressurized before shipment with nitrogen and sealed with blanking plates.
Do not remove the blanking plates sealing the inlet and exhaust ports if the product
is not connected to the pumping line.
Do not operate the product unless the inlet and exhaust are connected to a vacuum
and exhaust pumping line.
If the new pump is going to be put into storage:
Keep the pump wrapped in its protective film.
It is absolutely necessary to leave the inlet and exhaust blanking plates in place be-
cause the pump has been pressurized with dry nitrogen.
Store the pump according to storage temperatures (see 12.2.1).
If the inlet and exhaust blanking plates have been removed, there is a risk of internal part
corrosion. We advise you to pressurize the pump with nitrogen.
Provide a nitrogen supply with the required characteristics (see 12.2.3).
Seal the inlet port with inlet blanking plate delivered with the pump.
Connect the nitrogen to the gas connection located on the inlet blanking flange.
Pressurize the pump with dry nitrogen to a relative pressure of 200 hPa.
11
Transport and storage
When the nitrogen flows out of the exhaust, seal it up with the provided accessories.
Disconnect the nitrogen purge connection.
Store the pump in a clean and dry area, at ambient temperature (see 12.2.1), for a
maximum period of 1 year.
Never store a pump which has been used. Return it to a service center according to the
product Service procedure (see 10).
12
4Product description
4.1Product identification
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
98 avenue de Brogny F-74000 ANNECY
213 kg 50/60 Hz
ACP120GSP21131
AP8035681ACP 120G
ACP120GSP21131
Fig. 1:Rating plate example
4.1.1Scope of delivery
● 1 vacuum pump
● 2 hoisting rings
● 1 funnel
● 2 water couplings
● 1 nitrogen coupling
● 1 operating instructions
● Oil can(s)
● 2 adaptators M/F NPT
Product description
- 2016
4.1.2Product presentation
Based on the multi-stages Roots pump technology, theACP 120G, ACG 600G provide
the benefits of clean and dry vacuum for applications in industiral and research
& development.
These pumps are characterised by their robustness, their availability for pumping cycles
on high volume and unrivaled long mainteanance intervals (up to four years in clean applications).
For each model, a "large volume" option is available. In this configuration, a frequency
converter is installed on the FB and on the Roos blower, to allow the pumping of large
chamber volumes > 1 m3 (max. Volume 10 m3).
13
Product description
V
4.2Man/machine interfaces
Fig. 2:Man/machine interfaces
InletExhaust
Nitrogen inletPower supply
Water inlet/outlet
14
5Installation
5.1Set-up
Installation
The pump must be operated in the horizontal position in support on its feet, with the
pumping axis vertical and the inlet opening upwards.
Determine where the pump will be placed.
Use the handling devices to position the pump in the desired location, lift the pump
using hoisting rings (see 3.1).
Lock the pump by adjusting the four leveling feet.
Use a spirit level to check that the frame is in horizontal position in both axis.
Unscrew and remove the lifting ring from ACP 120, inlet side.
Remove the lifting system fixed to frame on the model ACG 600G.
CAUTION
Risk of tear-out or trips
Route and secure cables, hoses and pipework during installation to avoid any possi-
ble risk of tripping.
5.2Oil filling
DANGER
Health risk in case of oil contact
The pumps are delivered empty of oil: the oil is delivered in separate containers.
Wear mask, gloves, protective glasses to fill the pumps with oil.
NOTICE
Only use approved operating fluids
The pumps are factory tested using Pfeiffer Vacuum oil.
The same oil must be used during operation. The oil safety data sheet is available
on the website.
ModelA113 Oil quantity (liter)
FBRoots housing Total
Gear sideMotor side
ACP 120G0.35––0.35
ACG 600G0.350.450.180.98
15
Installation
BF/FB
8
9
1
2
3
4
5
6
7
Roots
Roots
Fig. 3:Oil case filling
1 Roots motor side housing fill plug6FB drain plug
2 Roots motor side housing drain plug7Roots gear side housing fill plug
3 Roots motor side housing sight glass8Roots gear side housing sight glass
4 Functional block fill plug9Roots gear side housing drain plug
5 Functional block sight glassBF Functional block
5.2.1Oil filling caution
Make sure that the mains voltage cable is disconnected by any source of
energy.
Make sure the pump is positioned horizontally.
Use the funnel equipped with a flexible tube (delivered with the pump).
5.2.2Procedure
Fill the housings:
– Roots motor side, and Roots gear side,
– Functional block (FB).
For each housing, proceed as follows:
Remove the fill plug.
Position the funnel in the oil fill neck.
Fill the pump with oil according to the recommended quantities. Do not exceed the
indicated quantities. The oil level should be in the middle of the sight glass. For this
to be accurate, wait a few minutes for the oil to settle over all internal surfaces.
Replace the fill plug securely.
Max.
Min.
Fig. 4:Oil sight glass
16
5.3Connection to the water circuit
In order to limit corrosion and motor cooling circuit clogging, it is recommended to
use water with the required characteristics (see 12.2.2).
If the ”solid particle size“ and ”solid pollution” water characteristic values cannot be
reached, install a filter on the water input.
The use of uncontrolled city water can lead to water circuit clogging due to limescale deposition.
This may necessitate, in the worst case scenario, a complete cleaning and overhaul of
the cooling circuit.
The presence of micro-organisms like aquatic weeds and micro-biological substances like bacteria can lead to cooling problems in the pump.
An appropriate water treatment system must be used to prevent the growth of such
microorganisms.
5.3.1Procedure
Installation
NOTICE
NOTICE
Risk of water supply failure
If loss of cooling water creates a significant risk for the process:
Control the cooling circuit using an external system able to take over in case of fail-
ure.
WARNING
Pressurised circuit
In order to carry out operations on the product safely, the user must:
Fit a manual valve on the water circuit 3 m from the product allowing the cooling cir-
cuit to be locked.
Connect the water pipes to the coupling connections (packaged separately):
Water inlet = female connection,
Water outlet = male connection.
Connect the plugs on WATER IN and WATER OUT(see 4.2).
Check that there are no leaks in the pipes and connections of the water circuit.
WATER IN
WATER OUT
Fig. 5:Water circuit connection
17
Installation
Schematic diagram of
the water circuit device
Roots
FC
BF
FC
*
* customer’s responsability
Fig. 6:Water circuit device
Water ubket/outlet
BFFunctional block
FCFrequency converter
Assembly recommenda-
It is advised to equip the supply of cooling circuit with a regulator valve (customer’s
tion
responsability).
5.4Connection to the nitrogen circuit
Risk of explosion
If pyrophoric materials above the LEL (lower explosive limit) are sent to the pump, the
nitrogen supply must make it possible to dilute this concentration.
Ensure there is a sufficient flow of nitrogen to lower the concentration below the LEL.
Provide in addition an interlock to ensure that gas flow towards the pump is stopped
when nitrogen is lost.
A filtered dry nitrogen supply with the characteristics defined is required for opti-
mum performance (see 12.2.3).
DANGER
5.4.1Procedure
18
NOTICE
Risk of nitrogen supply failure
If loss of purge flow creates a significant risk for the process:
Control the nitrogen supply using an external system able to take over in case of fail-
ure.
Installation
*
BF
5
6
Roots
FC
R1
WARNING
Pressurised circuit
To work safely on the product, the operator must:
Install a manual valve on the nitrogen circuit at a distance of 3 m from the product, so
that the nitrogen supply can be locked.
Connect the nitrogen pipe to the coupling connection (packaged separately). Provide
a 6.35 OD (1/4 inch) pipe tubing (supplied by the customer).
Connect the plug onmarked N2(see 4.2).
Schematic diagram of
the nitrogen injection
device
1/8 NPT
NITROGEN
Fig. 7:Nitrogen circuit connection
1/8 NPT
4 mm
6 mm
NOTICE
Damage of internal parts
A sudden inrush of nitrogen into the pressurization circuit may result in damage to internal parts. It is recommended to equip the nitrogen circuit with a nitrogen pressure regulator and a nitrogen manometer (supplied by the customer). Before pressurizing the circuit, check that the pressure regulator is closed.
A gas purge circuit protects the low and high pressure bearings and dilutes trace
amounts of corrosive gases.
19
Installation
Fig. 8:Nitrogen injection device
R1 Pressure regulator *Nitrogen flow adjustment
5Injection manifold fitted with check valves and calibrat-
ed injectors
6Manometer * Measure the pressure
BF Functional block
* customer’s responsability
Adjust the nitrogen flow with the pressure regulator in a pressure indicated in the table
below according to the process. To define this pressure, contact the Pfeiffer Vacuum
customer service.
Pressure (hPa)Flow (slm)
3
0.7·10
3
1.4·10
3
2·10
3
2.6·10
3
3.2·10
5.5Electrical connection
Nitrogen flow distribution in BF
20
30
40
50
60
WARNING
Electric shock hazard
Voltage and current can cause electric shock. Only skilled, authorized operator trained
in the relevant health and safety aspects (EMC, electrical hazards, chemical pollution,
etc.) may carry out maintenance work.
Disconnect the power line cable from all power sources before doing any work on the
product and/or removing the covers.
WARNING
Risk of electromagnetic disturbance
The product’s EMC behavior is guaranteed only if the relevant EMC standards are followed during installation.
Use shielded cables and connections for the interfaces in interference-prone environ-
ments.
WARNING
Hazards associated with non-compliant electrical installation
Safe operation after installation is the operator’s responsibility.
Connect the product to an installation that is compliant with local safety standards.
Do no carry out any alterations or modifications to the product on your own initiative.
Check that the pump is correctly connected to the emergency stop system for the
equipment (or pumping installation).
For specific questions, contact your service centers.
20
The pump has neither command system nor electric protection. The three-phase motor
in compliance with the standards UL/CSA/CE is equipped with thermal safeties with dry
contacts which it is imperative to connect. The electric installation of the pump is of the
owner responsibility who has to:
Supply the system of command, locking and electric protection (circuit breaker, emer-
gency shutdown) according to the given recommendations (see 5.5.1).
Connect the pump with its electric installation according to the current safety stan-
dards.
Connect necessarily at least the thermal safety of 150 °C available in the motor termi-
nal box (see 5.5.1).
5.5.1Customer electrical installation protection
Installation protection with circuit breaker
The user must supply the pump from facilities equipped with main circuit breaker,
curve D (IEC 60947-2), in accordance with local regulations and with at least a 10 kA
short circuit cut-off capacity. This protection device should be in close proximity to the
pump (no further than 7 m) within line of sight of the pump.
This circuit breaker supply and wiring is a customer’s responsibility: main circuit breaker
rating (see 12.2.4).
Differential circuit breaker
In the event of an insulation defect, you must install a differential circuit breaker on the
main power supply to protect personnel (see 12.2.4). Contact your service center for ad-
vice. In all cases, comply with current local regulations.
Risk of earth fault
The user must provide a second protective earth (ground) conductor with a cross-sectional area at least equal to the conducting wire size.
Connect the protective earth stud to the suitable installation earth point such as the
host system frame or primary grounding point.
Ensure that the equipment and the electrical supply cable are suitably protected
against earth defects and that the earth wire is longer than the 3 conducting wires.
Installation
CAUTION
WARNING
Thermal safety
The motor is equipped with thermal safeties which deliver an information about the motor temperature level.
It is imperative to cable these thermal safeties to protect the motor.
Do not neutralize these safeties during the use.
21
Installation
UVW
U2V2W2
U
V
W
U1
V1
W1
W2
U2
V2
U1V1W1
GND
5.5.2Change of cabling in the motor terminal box
The pump is equipped with a three-phase motor to 6 threads whose cabling is given below. In case of doubt, only the plate appearing in the terminal box holds reference place.
In case of ACG 600G, there are 2 motors. At factory, the motor(s) is/are coupling in star.
Check that the coupling of motor(s) is in conformity with the mains voltage.
Motor characteristics
Coupling Mains voltage
(V)
∆200-230502820 - 2850 1,50,84 - 0,768
Y380-480502835 - 2850 1,50,84 - 0,766
Open the terminal box.
Do the coupling according to the mains voltage required.
Frequency
(Hz)
603420 - 3435 1,50,90 - 0,858
603420 - 3440 1,50,88 - 0,776
Speed
(min-1)
Power supply
(kW)
Cos φIntensity
(A)
Low voltage (200-230 V - 50/60 Hz)
Coupling ∆
High voltage (380-480 V - 50/60 Hz)
Coupling Y
U1
U2V2
V
U
U2
V2
W
GND
W
W2
U1V1
U
W2
W1
V1W1
V
Use an EEC cable in compliance with IEC 60227 and IEC 60245 standards with the
following characteristics:
– heatproof (because it can come into contact with hot surfaces),
– with conducting wire section suitable at current (see 12.2.4).
5.5.3Connecting of the thermal safeties
22
Connect separately the ground wire (PE) on the ground terminal.
Do a test of continuity of mass between the installation and the pump.
Identify by a label the mains voltage on the terminal box so that it corresponds to the
realized cabling.
Proceed at identical for each one of motors.
The symbol IEC 60417#5019 is located near the ground terminal in the terminal
box.
The functional block motor is equipped with 3 thermal safeties (100 °C, 120 °C and 150
°C): NC dry contact - 250 V max. - 0.5 A max.
Installation
WARNING
Thermal safety
The motor is equipped with thermal safeties which deliver an information about the motor temperature level.
It is imperative to cable these thermal safeties to protect the motor.
Do not neutralize these safeties during the use.
Connecting the thermal
safety
Pass the cable (supplied by the customer) through the feedthrough and connect the
safeties according to the drawing below :
1P1
1P22P23P3
100°C120°C150°C
2P13P1
In case of an ACG 600G, there are 2 motors. Each motor is equipped with therminal safety which it is necessarily to cable.
NOTICE
It is recommended to cable the sensors of temperature 100 °C and 120 °C so as
to activate an alert in case of overheating.
The implementation of this protection is of the responsibility of the owner.
NOTICE
It is imperative to cable the sensor of temperature 150 °C so as to cut the motor
power supply in case of overheating.
The implementation of this protection is of the responsibility of the owner.
5.5.4Connecting to the electric cabinet of the customer
Check that the mains voltage label stuck on the motor terminal box (see 5.5.2) corre-
sponds to the mains voltage of the installation. If it is not the case, modify the motor
cabling (see 5.5.2).
Refer to the full load current label to know the maximal exit current of the motor (see
1.2.4).
Fig. 9:Full load current plate
Connect the pump to the electrical box of customer according to the characteristics of
electrical wires.
5.5.5Check of the rotation’s direction at initial start-up
Before the initial start-up:
Check that all the electrical connections were well made(see 5.5.2)(see 5.5.4)(see
5.5.3).
Check that the oil filling was realized (see 5.2).
23
Installation
Remove the blanking flanges at the inlet and exhaust of the pump: these elements
prevent the introduction of foreign body in the pump during the transport and the storage. It is dangerous to leave them on the pump in use.
Place a pressure gauge at the pump inlet (gauge at the customer expensive).
Start the pump hanging a few seconds then stop it.
– If the indicated pressure is lower than 5·10
– If the pressure increases, invert 2 phases of the electric plug of arrival of the electric
power supply cable on the pump.
ACG 600G pump Check the standalone FB direction of rotation according to the procedure described
above.
Start the Roots when the direction of rotation of FB is correct.
Check the Roots direction of rotation according to the procedure described above.
– the measured pressure must be lower than the pressure when the FB is stand-
alone.
5.6Connection to the pumping line
The user and/or product OEM is ultimately responsible for the equipment and must apply
the specific safety guidelines, in accordance with local legislation.
DANGER
-1
hPa, the rotation sens is correct.
Risk of ignition
When flammable materials are sent to the pump:
Provide a hardware-based LEL detection in the exhaust extraction system (detection
capability at 25% of the LEL) that will stop chemical supply to the pump when gas is
detected over 25% of the LEL for that flammable material.
DANGER
Risk of explosion
If any corrosive, reactive, flammable, pyrophoric, oxidizing processes gases can be sent
to the pump:
Use an exhaust gas monitoring to ensure that gas flow to the pump is stopped when
exhaust gas device is lost.
WARNING
Risk of crushing or cutting related to the rotating parts
Do not expose any part of the human body to the vacuum. The product is supplied with
the inlet and exhaust sealed.
Remove these blanking plates when you are ready to connect the product to your
vacuum system.
Do not operate the product unless the inlet and exhaust are connected to a vacuum
and exhaust pumping line.
Use accessories on the inlet and exhaust lines whose materials and sealing proper-
ties are compatible with gases being used.
Provide in the pumping line, accessories to isolate the pump from the vacuum and ex-
haust line, to make the maintenance easier (inlet and exhaust isolation valves, purges,…).
Remove the blanking plates blocking the inlet and exhaust ports.
Keep the blanking plates, screws and washers for reuse when transporting the pump.
Ensure that no screws, washers or other objects are dropped into the pump inlet.
Fit flexible flanged bellows in the pumping line to reduce the transmission of vibra-
tions.
24
The O-rings located under the blanking plates are compatible with standard applications.
Other types of connection accessories are available in the product catalogue. The inlet
and exhaust connections must not cause stress that could lead to leaks in the pumping
line.
5.6.1Connection at pump inlet
Limit of operation
Make sure that the parts or chambers connected to the inlet of our products withstand
a negative pressure of 1·10
The pump is not sized to support the weight of pumping line. It must be fixed to an other
support.
To improve pumping speed, the pumping line must be as short as possible and its internal diameter must not be less than the pump inlet flange.
If need, connect at the inlet an inlet pipe extension (see 11).
5.6.2Connection at pump exhaust
NOTICE
3
hPa in relation to atmospheric pressure.
Installation
5.7Leak test
DANGER
Health risk in case of contact with toxic substances
Exhaust of corrosive, reactive, flammable, pyrophoric or oxidizing process gases may
result in severe injury or death.
Always connect the pump exhaust to an exhaust extraction system.
NOTICE
Limit of operation
Ensure that all components in the exhaust pipeline have maximum pressure rating
which is greater than the highest pressure that can be generated in your system.
WARNING
Leak-tightness of the equipment
It is the user's responsibility to ensure this level of leak tightness is maintained, especially when dangerous gases are pumped. The operator must maintain this level of tightness, particularly when pumping dangerous gases. Proceed as follows:
Perform a leak test on the entire pumping line after installation.
Carry out regular checks to ensure that there are no traces of the gases pumped in
the surrounding environment and that no air is entering the pumping line while the
pump is running.
For more information concerning leak tests, please contact your service center.
25
Operation
6Operation
6.1Prerequisites to use
Risk associated with process gases
The user and/or integrator of the product is/are fully responsible for the operational safety conditions of the equipment. The manufacturer has no control over the types of gases
this pump is exposed to. Frequently process gases are toxic, flammable, corrosive, explosive and/or otherwise reactive. It is the user and/or the integrator's responsibility to
follow the necessary safety requirements. Toxic gases can cause serious injury or
death. Operators and users must:
Take the appropriate safety recommendations to prevent injury. Consult the respon-
sible department for instructions and safety information.
Hazardous gases from the pump can cause serious injury or death. Regula-
tions require to connect the pump’s exhaust to a facility hazardous gas exhaust system which incorporates appropriate filters, scrubbers, etc. This system
must meet all air and water regulations.
Check that the pump is correctly connected to the equipment (see Installation).
Contact the service center for further information.
Before initial start-up:
WARNING
6.2Pump start-up
6.2.1Switch on
Check of the rotation’s direction of the pump (see 5.5.5).
Before each pump start-up:
Check that the pump inlet is connected to the pumping line.
Check that oil levels of housings are visible in the middle of the sight glasses (see
5.2.2).
Switch on the supplies of cooling water and nitrogen.
Switch on the electrical supplies.
Check that exhaust pipe line is not clogged and that all the valves in the exhaust sys-
tem are open.
NOTICE
Roots starting on the model ACG 600G
Differ the Roots starting of approximately 3 seconds after functional block starting.
Activate the circuit breaker of the electrical cabinet to switch on the pump.
– the FB and Roots are powered.
6.3Pump shut-down
6.3.1Switching off
Activate the circuit breaker of the electrical cabinet to switch off the pump.
– the FB and Roots motor power is closed.
26
6.3.2Prolonged stop
Operation
If the pump has to be stopped for a prolonged period, apply the Decommissioning pro-
cedure (see 8).
NOTICE
Water solenoid valve
Close imperatively the water solenoid valve on the cooling circuit from stopping of motor
power supply motor(s).
27
Maintenance
7Maintenance
7.1Safety and maintenance information
Duty to inform
Every person who is involved in maintenance and servicing work on the pump must read
and follow the safety-relevant parts of all associated documents.
Exclusion of liability
Pfeiffer Vacuum accepts no responsibility concerning equipment damage, disrupted
service or physical injury resulting from maintenance carried out by technicians who
have not been trained in safety rules (EMC, electrical hazards, chemical pollution). Liability and warranty claims shall be inadmissible in this case.
Risk due to pumping conditions
Remaining process gases in the pump may cause severe injury or death. Before removing the pump from the installation:
Continue nitrogen flow from the process tool for 30 min. Nitrogen pressure and flow
rate should be identical to the programmed values during process.
NOTICE
DANGER
DANGER
Risk to the health in the event of contact with toxic substances
The vacuum pump, pumping line components, and operating media may be contaminated with toxic, corrosive, reactive, or radioactive materials, depending on the process.
Wear appropriate safety equipment when pump is disconnected for maintenance, or
reinstalled, and also for oil filling and draining.
Ventilate the premises well.
Do not eliminate maintenance waste via standard disposal channels. Have it de-
stroyed by a qualified company if necessary.
Install the inlet and exhaust blanking plates, accessories delivered with the pump or
available as accessories (see chapter Accessories).
WARNING
Electric shock hazard in case of contact
Voltage and current can cause electric shock.
Only skilled, authorized people may carry out maintenance work.
Disconnect the mains cable from all power sources.
WARNING
Tightness after maintenance
Insufficient tightness after servicing could result in chemical hazards.
Always perform a leak test after maintenance.
28
WARNING
Risk of injury due to hot surfaces
The exhaust temperature remains high even after the pump has stopped.
Wait for the product to cool completely before carrying out any operations on it.
Maintenance
WARNING
Other localised hazardous energies
Electrical circuits and other pressurized circuits, such as nitrogen and water are potential hazards.
Always lock out these energy sources before working on the product.
● Ensure that the maintenance technician is trained in the safety rules concerning
pumped gases.
● Surrounding lighting in maintenance area must be sufficient to work or make maintenance on the pump: higher than 300 lux.
● Allow the product to cool down before removing the covers for maintenance.
● Disconnect the mains cable on the product from all sources of power before carrying
out any work on the product.
● Wait 5 minutes after switching off the electricity supply before carrying out any operations on the electrical components.
● Route and secure cables, hoses and pipework to avoid any possible risk of trips.
● Wear suitable protective equipment and dismantle the product in a ventilated area or
under a ventilated hood.
● Collect the residues from the processes and call in a competent organisation to destroy them.
● Always protect the inlet and exhaust surfaces.
● Seal the inlet and exhaust orifices and pressurize the pump using nitrogen (see 7.7.4).
7.1.1How to contact us
Personnel trained by the manufacturer must perform the overhaul. Contact your nearest
service center at the following e-mail address: support.service@pfeiffer-vacuum.fr
7.2Maintenance frequency
Only qualified personnel trained in safety rules (EMC, electrical safety, chemical pollution) may carry out maintenance on its site..In this case, the manufacturer cannot be held
liable for this intervention type.
These operations of maintenance can be also realised by the manufacturer in its service
center.
The realization of these operations allows to increase the duration of the product life but
does not increase the guarantee period defined during the purchase of the product.
OperationPeriodicity
Funcitional block LP bearings replacementConsult us
Exhaust pipe1.5 years or 13 000 h
OperationPeriodicity
Overhaul 3 years or 26 000 h
The overhaul operations must be performed only by our service centers.
7.3Maintenance on the customer’s site
The pump does not require any maintenance on the customer’s site apart from that described in this manual. All other maintenance must be carried out by your service center
(see 10).
Clean the outer surfaces of the product using a clean, lint-free cloth and a product that
will not damage the screen-printed surfaces and adhesive labels.
Check that exhaust pipe line is not clogged.
29
Maintenance
Check the condition of the pipes and their connections and repair them if there is any
sign of corrosion or leaks.
Compare the colour of the oil with a sample of new oil. This will allow you to check the
level of pollution or the extent to which the lubricant has deteriorated. The oil is
changed during the ovherhaul by our service center.
7.4Freeing up the FB
Risk to the health in the event of contact with toxic substances
During pump disconnection, operator could be in contact with process residues on the
exhaust and inlet that could cause severe injury or death.
Take the appropriate safety measures to prevent injury. Consult the department man-
ager for instructions and safety information.
By-products generated by processes clogg the pump by deposition. When the FB rotation is no more possible, an alarm is displayed and the pump stops. It may be possible
to free it up manually.
Isolate and lock the power supply of the pump at the level of the electrical cabinet.
Remove the cover.
Remove the blanking plate (71) by unscrewing 3 screws CHc M4 x 10 (72).
Remove the O-ring of its groove.
Using a 21 mm female elbow wrench, move the driving shaft in both directions of ro-
tation until free rotation is obtained.
DANGER
NOTICE
Risk of damage to the pump
Using excessive force to rotate the FB may damage the pump.
71
72
There should not be any resistance point.
Otherwise, the pump must have returned to the closest Pfeiffer Vacuum service center.
Clean the O-ring and grease it lightly with vacuum grease.
Put the O-ring back in its groove.
Put the blanking plate (71) back and screw 3 screws CHc M4 x 10 (72): apply a couple
of tightening of 2 N·m.
Put the cover back.
Realize a tightness test.
Restart the pump (see 6).
30
Consumables
DescriptionP/N
Vacuum grease 064600
Maintenance
7.5Ball bearing maintenance
DANGER
Risk to the health in the event of contact with toxic substances
During pump disconnection, operator could be in contact with process residues on the
exhaust that could cause severe injury or death.
Take the appropriate safety measures to prevent injury. Consult the department man-
ager for instructions and safety information.
The pump bearings (low presssure side) are fitted with greased ceramic-ball bearings.
The fluorinated grease is resistant to high temperatures and corrosion resulting from vacuum applications. However, the bearings do need to be replaced at maintenance inter-
vals (see 7.2).
Maintenance featuresReplace all components (bearings, Borelly washers, washers, O-rings) during this oper-
Bearing extractor102084
Seal extractor063285
CVD lip seal kit
- Positioner for CVD lip seal
- Push rod for CVD lip seal
- Pusher for LP bearings
104070
7.5.1Cover disassembly
Unscrew and remove the lifting ring (motor side).
Unscrew the 4 screws Chc M8 x 20 that secure the cover.
Remove the 4 washers and remove the cover.
The parts 62-63-64-65-66-70-102 and 115 are included in the maintenance kit
Remove the end cap (71).
Extract the O-ring (70).
Remove the 2 LP bearing covers (67) and (68) from the LP (61).
Extract the O-rings (66), the Borelly washers (65) and the washers (64).
Use an open box wrench to block the driving shaft in order to loosen screws (104).
Recover the driving nut (103), the 2 screws (104), the 2 needles (100) and the washer
(115).
Insert a thin screwdriver in the front shield of the bearings in order to remove them.
32
Remove the excess gease on the balls.
Push in their ball races using a screwdriver.
Insert the 2 ends of the bearing extractor between the balls.
Turn its 2 fittings a quarter turn to lock them into the ball bearing.
Maintenance
Remove the bearings (102) and the 2 O-rings (63).
Remove the 2 lip seals (101) using the push available in the maintenance kit (see 7.5).
7.5.3Refitting ball bearings
Recommendations for fitting O-rings
Only use new O-rings available in the overhaul kit.
Grease the O-rings using vacuum grease before fitting them.
Stretch and grease the O-rings (63) with special grease obtained in the maintenance
kit (see 7.5) before fitting them the bearing housing of the LP support.
Lightly grease the bearing housings of the low pressure support and the outer ball
race of each bearing.
Place the O-ring (101) in the positioner.
Place the positioner against the friction ring (62).
Slide the push rod and push it to insert the seal into the friction ring. (62).
Position the 2 bearings (102) in their housings (marked side facing operator) then
push them home, taking care not to shear the O-rings.
This operation should be done manually and should not require any effort.
33
Maintenance
100
104
103
115
15 N·m
104
103
115
15 N·m
64
72
2 N·m
Temporarily clamp the bearings with the covers (67) and (68) and tighten with the 6
screws (69) to hold them.
Retaining the bearings Fit the 2 pins (100) on the Driving shaft.
Position the Driving nut (103). Place a drop of Loctite 222e glue on the drilled screw
CHc M8 x 17 (104).
Use an open socket wrench to hold the Driving shaft (M) in place.
Tighten the screw (104). Apply a clamping torque of 15 N·m.
Repeat the same operations for the screw (104) on the driven shaft (m) with the
washer (115).
Remove the covers (67) and (68).
Removing the axial play
on the stopped shafts
Refitting the cover
( Driving shaft)
Fit the protection washers (64) on the bearings.
Place the Borelly washers (65) (2 washers per shaft).
Grease the 2 O-rings (66) and fit them in the grooves on the 2 LP bearing covers (67)
and (68).
Fix the 2 covers (67) and (68) with the 6 screws CHc M6 x 16 (69). Apply a clamping
torque of 15 N·m.
Check the correct operation by turning the Driving shaft (M) using a wrench.
There should be no tight spots.
34
Grease (lightly) the end cap O-ring (70) and place it in its groove.
Refit the end cap (71) with the 3 screws CHc M4 x 10 (72). Apply a clamping torque
72
2 N·m
of 2 N·m.
Refitting the cover Fit the cover.
Fix the cover with the 4 CHc M8 x 20 screws equipped with their flat washers.
Screw the lifting ring (motor side).
Helium testIt is recommended to carry out an helium test after intervention on the LP bearings
(see 7.6.3)
7.6Exhaust pipe maintenance
Maintenance
DANGER
Risk to the health in the event of contact with toxic substances
During pump disconnection, operator could be in contact with process residues on the
exhaust that could cause severe injury or death.
Take the appropriate safety measures to prevent injury. Consult the department man-
ager for instructions and safety information.
DANGER
Risk to the health in the event of contact with toxic substances
The vacuum pump, pumping line components, and operating media may be contaminated with toxic, corrosive, reactive, or radioactive materials, depending on the process.
Wear appropriate safety equipment when pump is disconnected for maintenance, or
reinstalled, and also for oil filling and draining.
Ventilate the premises well.
Do not eliminate maintenance waste via standard disposal channels. Have it de-
stroyed by a qualified company if necessary.
Install the inlet and exhaust blanking plates, accessories delivered with the pump or
available as accessories (see chapter Accessories).
Maintenance operation (see 12.2.3).
DescriptionP/N
Exhaust maintenance kit108180
7.6.1Dismantling
Remove the lifting ring (motor side).
Remove the 4 screws CHc M8 x 20 of cover.
Remove the 4 washers and remove the cover.
35
Maintenance
22
3
4
19
25
24
8
9
11
14
8
9
21
1
5
6
10
13
7
18
12
23
2
15 N·m
Graisse
Grease
15 N·m
Graisse
Grease
15 N·m
15 N·m
Graisse
Grease
Graisse
Grease
Graisse
Grease
Rep. DescriptionQtyRepDescriptionQty
1O-ring 112O-ring 1
2O-ring213O-ring1
3M8 nut214Exhaust nozzle1
4Washer W8218Spring DN25
5O-ring119Silencer pipe body1
6O-ring 121O-ring 1
7Partition silencer *122Barrière PTFE Diam.561
8Wavy washer SS Diam.6823Exhaust collector1
9CHc 6 x 16 (12-9) screw824W8 washer2
10O-ring MSE 20 503302125H M 8 x 25 screw2
11Antisuck back valve1
* Partition silencer P/N: A214750S
The parts 1-2-5-6-10-12-13 and 21 are included in the maintenance kit
Exhaust pipe Unscrew and remove the 2 screws H M8 (25) and washers (24) (if presents) .
Remove the silencer sub-assembly.
Silencer Unscrew and remove the 4 vis CHc M6 (9) and remove the washers (8).
Remove the partition silencer (7).
Remove and discard the 2 O-rings (5 and 6).
Unscrew and remove the 2 nuts H M8 (3) and remove the washers (4).
Remove the exhaust collector (23).
Remove and discard the 3 O-rings (1-2-21).
Anti suckback valve Unscrew and remove the 4 screws CHc M6 (9) exhaust pipe (14) fiwing and remove
the washers (8).
Remove the exhaust nozzle(14), the anti suckbakck valve (11), the spring (18) and the
O-rings (10-12 et 13).
36
7.6.2Reassembly
BF/FB
Roots
Detecteur de fuite
Leak detector
Part cleaning Clean the parts.
Recommendations for fitting O-rings
Only use new O-rings available in the overhaul kit.
Grease the O-rings using vacuum grease before fitting them.
Anti-suckback valve Refit the new O-rings (10) on the anti-suckback valve (11).
Place the O-rings (12) and (13) in their housing of exhaust pipe (14).
Refit the anti-suckback valve (11) on the spring (18), and the spring (18) on the ex-
haust pipe (14) (spring axe and exhaust pipe axe aligned).
Refit the exhaust pipe (14) on the partition silencer (7) and secure it with the 4 screws
CHc M6 (9) equipped with washers (8).
Silencer Place the O-rings (1,2 and 21) in their housing of exhaust collector (23).
Refit the exhaust collector (23) on the silencer pipe body (19) and secure it with the 2
nuts (3) equipped with washer (4).
Place the O-rings (5) and (6) in the housing of partition silencer (7).
Put the partition silencer (7) on the silencer pipe body (19) and fix it using the 4 screws
CHc M6 (9) equipped with washer (8).
Maintenance
It is recommended to carry out an helium test after intervention on the silencer.
Exhaust pipe Refit the silencer sub-assembly and secure it with the 2 screws H M 8 (25) equipped
with washer (24).
Cover Place the cover and secure it with the 4 screws CHc M8 x 20 equipped with the
washer.
Fit the lifting rings.
7.6.3Leak test
Preliminary operation Drain the gear box casing and keep oil apart (see 7.7.3).
Leak tightnessHelium spray measurement condition:
Connect the pump to the leak detector.
Pump inside the pump and measure the residual helium rate.
– Result of the measurement: Leak rate 1·10-7 hPa l/s
Spray the outside of the pump with helium and check the helium rate.
– Result of the measurement: Leak rate Q ≤ 10
-6
hPa l/s
Filling the machine oil
housing
Fill the oil gear box casing with kept apart oil (see 5.2.2).
37
Maintenance
WATER IN
WATER OUT
A
B
7.7Standard repair exchange
To proceed with a standard exchange, key steps must be followed in sequential order:
– Disconnecting the pump from the installation (see 7.7.1)
– Draining the water circuit (see 7.7.2)
– Conditioning the pump for shipping (see 7.7.4)
– Declaration of contamination (see 10)
– Handling the new pump (see 3)
– Installing the new pump (see 5)
When returning a product to our service center, please consult the Service procedure
(see 10) and fill in the contamination declaration available on our website.
7.7.1Disconnecting the pump from the installation
Risk to the health in the event of contact with toxic substances
During pump disconnection, operator could be in contact with process residues on the
exhaust that could cause severe injury or death.
Take the appropriate safety measures to prevent injury. Consult the department man-
ager for instructions and safety information.
DANGER
Continue nitrogen flow from the process tool for 30 min. Nitrogen pressure and flow
rate should be identical to the programmed values during process.
Activate the circuit breaker of the electrical cabinet to switch off the pump.
Disconnect the mains voltage cable by any source of energy.
– note: l’AGG 600 is equipped with 2 motors
Disconnect the nitrogen purge connection.
Disconnect the WATER IN connection then the WATER OUT connection(see 4.2).
Disconnect the pump from the inlet piping and fit a blanking plate on the inlet (see 1 1).
Disconnect the pump from the exhaust and fit a blanking plate on the exhaust port
(see 11).
Adjust the levelling feet so that the pump rests on the castors.
Remove the pump from the installation.
7.7.2Draining the water circuit
Water must be drained to prevent hoses freezing during shipment.
38
7.7.3Draining the pump
Maintenance
Prepare a flexible pipe (A) with a female connection and another flexible pipe (B) with
a male connection (supplied by the customer).
Connect one end of pipe (B) on WATER OUT connection and place the other end in
a vessel (total water volume will be greater than one liter).
Connect one end of pipe (A) on WATER IN connection and connect the other end to
a compressed air circuit (2 to 5 · 10
Inject compressed air into the pump until the water has been completely evacuated
from the circuit.
Note: in case of a transfer of the pump towards another site for new installation, it is necessary to drain away the housing(s) before transport.
3
hPa).
DANGER
Health hazard in case of contact with the operating fluid
Contact with or inhaling products such as oil from the pump can cause irritation.
Wear appropriate protective equipment when carrying out maintenance or adding/
draining oil.
Risk of intoxication in case of contact with substances hazardous to health.
Appropriate precautions should always be taken when handling waste oil:
Wear appropriate protective equipment when draining and flushing the pump.
Do not pour waste oil down the drain. Have it destroyed by a qualified company if nec-
essary.
Take the necessary safety precautions to avoid generating health risks or polluting
the environment in case of contamination.
Decontaminate the parts affected before performing maintenance work.
The draining procedure must be realized for each housing of Roots and FB
(see 5.2)
Unfasten the fill plug in order to eliminate any excess pressure in the housing.
Place a container under the drain plug to get back the used oil (Mini capacity: 0.5 li-
ter).
Remove the drain plug and allow the used oil to flow into the container.
Replace the drain plug with its O-ring.
Screw the fill plug.
Repeat the operation for the 2 housings of Roots.
7.7.4Conditioning the pump for shipping
WARNING
Install the connecting accessories provided with the pump when it was first delivered.
Contact the service center to order accessories if necessary (see 11).
Provide a nitrogen supply with the required characteristics (see 12.3).
Seal the inlet port with inlet blanking plate delivered with the pump.
Connect the nitrogen to the gas connection located on the inlet blanking flange.
Pressurize the pump with dry nitrogen to a relative pressure of 200 hPa.
When the nitrogen flows out of the exhaust, seal it up with the provided accessories.
Disconnect the nitrogen purge connection.
Drain the pump (see 7.7.3).
39
Decommissioning
8Decommissioning
8.1Shutting down for longer periods
Risk of build-up of process residues
All process pumps are designed for continuous operation in pumping process gas and
should not be stopped. Pfeiffer Vacuum will be released from any warranty and liability
claims if a process pump is stopped for a prolonged time leading to condensation of byproducts, powder build-up or corrosion inside the pump. The only guaranteed solution
by Pfeiffer Vacuum to restart a process pump after a prolonged stop is to perform a complete overhaul of the pump.
Despite this recommendation, if the pump is shut down for a prolonged time, it is advisable to follow the precautions mentioned below in order to reduce the risks of condensation, powder build-up and corrosion inside the pump.
From the process chamber, flush the pump using a dry inert gas, such as nitrogen,
through the inlet port during 30 minutes.
Stop inert gas supply and let the pump running at ultimate pressure for 5 minutes.
Stop the pump and close inlet port with the appropriate blank-off flange.
Close the pump exhaust with the appropriate blank-off flange.
Turn off the cooling water supply.
Isolate and lock the power supply of the pump at the level of the electrical cabinet.
NOTICE
8.2Re-starting
8.3Disposal
The only guaranteed solution by Pfeiffer Vacuum to restart a process pump after a prolonged stop is to perform a complete overhaul of the pump. In case of trouble, contact
your service center.
According to the regulations 2012/19/EC about Waste of electrical and electronic equipment, and 2011/65/EC about Restriction of Hazardous substances, the manufacturer
provides a paid recycling service for the end of life of the equipment.
Any obligation of the manufacturer to take back such equipment shall apply only to complete not amended or modified equipment, using Pfeiffer Vacuum SAS original spare
parts, delivered byPfeiffer Vacuum, containing e.g. all its components and subassemblies.
This obligation will not cover the shipping cost to a Pfeiffer Vacuum reclamation facility.
Before returning the product, please consult the Service procedure (see 10). Fill in the
declaration of contamination form available on our website. Attach it to the product before shipping to the closest service-repair office.
40
Decommissioning
WARNING
Environmental protection
The product or its components must be disposed of in accordance with the applicable
regulations relating to environmental protection and human health, with a view to reducing natural resource waste and preventing pollution.
Our products contain various materials which can be recycled: iron, steel, stainless steel,
cast iron, brass, aluminum, nickel, copper, fluoroelastomers, PTFE, FEP.
Take particular precautions for:
● fluoroelastomers which may breakdown if they are subjected to high temperatures.
● components in contact with the products resulting from the processes which may have
been contaminated.
41
Malfunctions
9Malfunctions
Study the safety instructions related to maintenance (see 7.1).
9.1What happens in the event of a defect
The pump is equipped with thermal safeties which protect the pump in case of overheat-
ing. The implementation of this protection is of the responsibility of the owner (see 5.5.3).
9.2Troubleshooting guide
IncidentCauseTroubleshooting
Bad vacuum or no vacuum● Polluted od clogged pump Pump maintenance.
Mechanical noise● Damaged ball bearing
Pump(s) does not start● Motor(s) does not start Check the wiring(s).
Pump(s) is stopped● The customer circuit breaker starts.
● Rotor seizing
● The internal temperature of the motor(s) is too
high and the thermal safety of 150 °C, cabled by
the customer, stopped the pump.
● Pump seizing due to the process.
Contact your service center
Pump maintenance.
Contact your service center.
Check the main power.
Check the customer command system.
Check the circuit breaker rating.
Check the water cooling circuits.
Free up the FB (see 7.4).
Contact your service center.
● Fast replacement with refurbished exchange products in mint condition
● Advice on the most cost-efficient and quickest solution
Detailed information, addresses and forms at: www.pfeiffer-vacuum.com (Service).
Overhaul and repair at the Pfeiffer Vacuum Service Center
The following general recommendations will ensure a fast, smooth servicing process:
Fill out the "Service Request/Product Return" form and send it to your local Pfeiffer
Vacuum Service contact.
Include the confirmation on the service request from Pfeiffer Vacuum with your ship-
ment.
Fill out the declaration of contamination and include it in the shipment (mandatory!).
The Declaration of contamination is valid for any product/device including a part exposed to vacuum.
Dismantle all accessories and keep them.
Close all the flange opening ports by using the original protective covers or metallic
airtight blank flanges for contaminated devices.
If possible, send the pump or unit in its original packaging.
Sending contaminated pumps or devices
No devices will be accepted if they are contaminated with micro-biological, explosive, or
radioactive substances. "Hazardous substances" are substances and compounds in accordance with the hazardous goods regulations (current version).
Neutralize the pump by flushing it with nitrogen or dry air.
Close all openings airtight.
Seal the pump or device in suitable protective film.
Return the pump/device only in a suitable and sturdy transport container and send it
in while following applicable transport conditions.
Pump or device returned without declaration of contamination form fully completed and/
or not secured in suitable packaging will be decontaminated and/or returned at the shipper’s expense.
Exchange or repair
The factory operating parameters are always pre-set with exchange or repaired devices.
If you use specific parameters for your application, you have to set these again.
Service orders
All service orders are carried out exclusively according to our general terms and conditions for the repair and maintenance, available on our website.
43
Accessories
11Accessories
AccessoryTypeDimensionP/N
Isolation valve at pump inletManual valve (Stainless steel)DN 50 ISO-KF30501M
Centering ring with FPM72 O-ring + PTFE protection DN 40 ISO-KF108785
DN 50 ISO-KF123716
Centering ring with FPM72 O-ringDN 40 ISO-KF068230
DN 50 ISO-KF087168
Inlet blank-off flange with1/8’’ gas injectorDN 50 ISO-KF082981+106314
Inlet blank-off flange for ACG 600 with 1/8’’ gas injector DN 100 ISO-K082981+090467
Inlet adapterDN 50 ISO-KF106308
Anti-noise deviceDN 40 ISO-KF109418
Others: see manufacturer’s catalog
44
Technical data and dimensions
12Technical data and dimensions
12.1 Technical data
CharacteristicsUnitACP 120G / ACP 120G Large Volume ACG 600G/ ACG 600G Large volume
Peak pumping speed (50/60 Hz)m3/h 95/112480/560
Maximum ultimate pressure
(without N
purge) (50/60 Hz)
2
Maximum ultimate pressure
(with N
purge 50 slm) (50/60 Hz)
2
Maximum pumped volume
(2)
Maximum continuous inlet flow
Supply voltage
(1)
(3)
hPa5·10
hPa3·10
m311
slm8060
V 200-230 V / 380-480 V - 3 phases - 50/60 Hz
Full load current (200-230 V)A1525
Full load current (380-480 V)A1015
Power consumption at ultimate pressure
kW1.3/1.51.8/2.0
(50/60 Hz)
Maximum exhaust pressure (absolute)hPa12001200
Cooling water flowl/mn11
N
(1) According to CE regulations. Pumps can withstand a supply voltage variation of ± 10 %.
(2) This pump is certified for pumping a volume of 1 m
ume or a higher cycling frequency, consult us.
(3) At maximum rotational speed.
(4) Measured at 1 m length. and 1.6 m height. according to ISO 9614-2 standard (pump equipped with
a silencer and a check valve).
-2
/2·10
-1
/1·10
-2
-1
2·10-3/2·10
1·10-2/6·10
-3
-3
Version "Large volume": 10
3
, with 20-minute cycling. In case of larger vol-
Conversion table: pressure units
mbarbarPahPakPaTorr
mbar11 · 10
bar100011 · 10
Pa0.011 · 10
hPa11 · 10
-3
-5
-3
10010.10.75
5
10.011 · 10
1000100750
-3
10010.10.75
kPa100.0110001017.5
-3
Tor r
1.331.33 · 10
133.321.330.1331
mm Hg
1 Pa = 1 N/m
2
Conversion table: gas throughput units
mbar·l/sPa·m3/ssccmTorr·l/satm·cm3/s
mbar·l/s10.159.20.750.987
3
Pa·m
/s1015927.59.87
sccm1.69 · 10
Torr·l/s1.330.13378.911.32
3
atm·cm
/s1.010.10159.80.761
-2
1.69 · 10
-3
11.27 · 10
-2
1.67 · 10
mm Hg
7.5 · 10
-3
-2
45
Technical data and dimensions
12.2 Facilities characteristics
12.2.1 Environmental conditions
Useindoor use
Installation altitudeup to 2000 m
Ingress protectionIP 30
Ambient operating temperature5-40 °C
Storage temperature-25-+55 °C
Relative humiditymax. 80% at T ≤ 31°C, up to max. 50% at T ≤ 40°C
Pollution degreerate 2
Overvoltage protection
1) Transient overvoltage up to the levels of overvoltage cat-
egory II. Temporay overvoltage occuring on the mains sup-
ply.
12.2.2 Water characteristics
1)
category II
100
Chloride (ppm)
pH 5.5 to 9
Chlorine
Hardness< 10 °fH (french degree)
50
40
20
0
5678910
pH
Total dissolved solids< 300 mg/L
LSI (LANGELIER Saturation Index)- 0.5 < LSI < 0 to +20°C
Particles size< 0.2 mm
Resistivity2000 Ω·cm < R < 1 000000 Ω·cm
Input temperature
Relative input pressure2 ·10
Differential pressure (inlet/outlet)> 2·10
(3) The oxidising action of the chlorine depends on the pH (aggressiveness of the water). The chlorine
content must be within the coloured area on the graph opposite.
(4) Depend on pumping conditions. Contact Pfeiffer Vacuum.
Connection
Water inlet1/4’’ NPT male connectionStainless steel
Water outlet1/4’’ NPT female connection Stainless steel
12.2.3 Nitrogen characteristics
H2O concentration< 10 ppm v
O
concentration< 5 ppm v
2
Dust< 1 µm
Oil< 0.1 ppm v
Relative pressure2 · 10
(3)
100 to 20 ppm depending on the pH
< 2 milli-equivalent/L
< 100 mg/L of CaCO
(4)
3
to 6 ·103 hPa
10-35 °C
3
to 6·103 hPa
3
hPa
(Calcium carbonate)
3
46
Connection
Nitrogen inlet1/8’’ NPT male connection Stainless steel
12.2.4 Electrical characteristics
Technical data and dimensions
Circuit breaker with a minimum interrupting short circuit current10 kA
GFI (or RCD) type B, differential circuit breaker compatible with type T.T
electrical network
1) For other networks, types T.N or I.T, use the proper protection device
VoltageMain circuit breaker rating (mini-
Cable wire specifications
100 mA
mum values)
200-230 V 50/60 Hz15 A2,5 mm
380-480 V 50/60 Hz10 A1,5 mm
2
2
1)
AWG-14
AWG-14
47
Technical data and dimensions
157
141
18
36
18
176
276
180
168
112
452
472
508
176
42
872
55,7
370
157
145
726,7
972,72
12.3 Dimensions
ACP 120G
370
157
145
ACP 120G with freqency
converter
872
726,7
55,7
508
472
452
36
18
18
276
176
157
141
42
176
48
ACG 600G
591,7
157
370
280
872
55,7
472
782
176
157
17642
141
452
276
110
18
18
36
Technical data and dimensions
ACG 600G with fequency
converter
370
157
280
872
552
591,7
55,7
36
18
18
782
1121 6 8
655
472
452
276180
176
157
42
176
110
141
49
Technical data and dimensions
X
Y
Z
12
34
S
S
240
65
Ø16
Ø40
728
36
Section S-S
589
552
600 mm
700 mm
700 mm
1000 mm
12.4 Weight distribution
12.5 Maintenance area
Center of gravity (mm)Weight by foot (DaN)
XYZ1234
163.4331.5315.15174.735.451.9
Luminosity > 300 lux
50
Declaration of incorporation of
partly completed machinery
We hereby declare that the product cited below satisfies all relevant provisions according to the following EC directives:
● Machinery 2006/42/EC (Annex II, no. 1 A)
● Electromagnetic Compatibility 2014/30/EU
● Restriction of the use of certain Hazardous Substances 2011/65/EU
This partly completed machinery must not be put into operation until the machinery into
which it is to be incorporated has been declared in conformity with the provisions of the
2006/42/EC Directive.
We, authorized representatives undertake to transmit, in response to a reasoned request by national authorities, relevant information on the partly completed machinery.
The technical file is drawn up by Mr Frédéric Rouveyre, Pfeiffer Vacuum SAS, [simplified
joint stock company], 98, avenue de Brogny · B.P. 2069, 74009 Annecy cedex.
Signatures:
(M.Taberlet)
Président
ACP 120G, ACG 600G
Harmonised standards and national standards and specifications which have been applied:
Normes NF EN-61000-6-2 : 2005
Normes NF EN-61000-6-3 : 2007
Normes NF EN-61000-6-4 : 2007
Normes NF EN-1012-2 : 2009
Normes NF EN-61010-1 : 2011
Pfeiffer Vacuum SAS
98, avenue de Brogny
B.P. 2069
74009 Annecy cedex
France
(M. Rouveyre)
Responsable Recherche & Développement
03/10/16
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Ed 06 - Date 2016/10 - P/N:110098OEN
*110098*
Are you looking for a
perfect vacuum solution?
Please contact us:
www.pfeiffer-vacuum.com
Pfeiffer Vacuum GmbH
Headquarters • Germany
T +49 6441 802-0
info@pfeiffer-vacuum.de
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