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Pfeifer Vacuum
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wrn100
Operating Instructions Manual
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Pfeifer Vacuum wrn100 Operating Instructions Manual

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Page 1
TC 110
Electronic Drive Unit
Translation of the original instructions
Operating Instructions
EN
PT 0204 BEN/N (1407)
Page 2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4 Connection diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5 Connection "X3" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
6 The Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
7 Pfeiffer Vacuum Protocol for "RS-485". . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
8 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.4 Functional safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.2 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.4 General connection description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
5.1 Pin assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
5.2 Operation via "X3" connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
6.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.2 Parameter overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.3 Configuring the connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
6.4 Operation with the Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . 19
6.5 Switching on/off the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.1 Telegram frame. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.2 Telegrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.3 Applied data types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
8.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8.2 Operation display via LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8.3 Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
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About this manual

1 About this manual

1.1 Validity

This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refers to the current state of the product's development. The documen­tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from www.pfeiffer-vacuum.com.

1.2 Conventions

Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan­dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this document, the following hazard levels and information are considered:
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of which may result in damage to the product.
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About this manual
Pictographs
Instructions in the
Work instruction: here you have to do something.
Prohibition of an action or activity in connection with a source of danger, the disregarding of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of the unit or equipment
Command to perform an action or task associated with a source of dan­ger, the disregarding of which may result in serious accidents
Important information about the product or this document
text
Abbreviations DCU: Display Control Unit
HPU: Handheld Programming Unit TC: Electronic drive unit for turbopump TPS: Mains pack DI / DO: Digital input / digital output AI / AO: Analog input / analog output f: Rotation speed (derivated from frequency in Hz) [P:000]: Parameter of the electronic drive unit with number
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2Safety

2.1 Safety precautions

Duty to inform
Each person involved in the installation or operation of the unit must read and observe the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.Make sure that the system is integrated in an emergency off safety circuit.Consult Pfeiffer Vacuum for special requirements.
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.
Safety
WARNING
WARNING
● Power supply: The turbopump power supply must apply to the requirements of dou-
ble insulation between mains input voltage and operating voltage according to the reg­ulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum is able to guarantee the compliance of the European and North American guidelines.
● Observe all safety and accident prevention regulations.
● A safe connection to the protective earthing conductor (PE) is recommended (protec-
tion class III).
● Regularly check the proper observance off all safety measures.
● Before carrying out any work disconnect the unit and all associated installations safely
from the mains.
● Do not loosen any plug connection during operations.
● The unit has been accredited with protection class IP 30. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
● Keep leads and cables well away from hot surfaces (> 70 °C).
● Only separate the pump and the electronic drive unit from each other after disconnect-
ing the supply voltage and the complete standstill of the pump.
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Safety
warranty seal

2.2 Proper use

2.3 Improper use

NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord­ingly.
● The electronic drive unit TC 110 operates designated Pfeiffer Vacuum turbopumps
and their accessories.
Improper use will cause all claims for liability and warranties to be forfeited. Improper use is defined as usage for purposes deviating from those mentioned above, especially:
● use of accessories or spare parts, which are not named in this manual
● operation of the devices in areas with ionizing radiation
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the loss of liability and warranty entitlements.
Do not open the product within its warranty period!For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.

2.4 Functional safety

The drive unit (electronic drive unit) TC 110 performs the safety function "Safe Limited Speed" according to EN 61800-5-2. In case of excess rotation speed the commutation of the pump motor is switched off and the drive transferred into the safe condition.
Summary of characteristic data for use in safety-relevant applications:
Characteristics according to IEC 61508 and IEC 62061
Characteristic Safety Integrity Level PFH PFD Value SIL CL 2 4.2 * 10
Characteristics according to EN ISO 13849-1
Characteristic Performance Level Category MTTF Value PL d Cat. 3 high (134 a) medium (90 % - <99 %)
● During the expected device life span of up to 20 years no proof test is required.
● If the user calculates his safety application with the specified values for 20 years, the
safety control system must be taken out of operation after 20 years and returned to the manufacturer. A proof test cannot be accomplished by the user.
-9
/ h 3.7 * 10
d
av
Average Diagnostic Coverage DC
Proof Test Interval T
-4
20 a
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3 Product description

3.1 Product identification

This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, sec­ond edition, including Amendment 1, or a later version of the same standard incorporat­ing the same level of testing requirements.
For information about other certifications, if applicable, please see the signet on the prod­uct or:
● www.tuvdotcom.com
● TUVdotCOM-ID 0000021320
Product description
Product characteris­tics
The electronic drive unit TC 110 is an integrated component of the turbopump. It's pur­pose is to drive, monitor and control the entire pump.
Characteristics TC 110
Connection voltage TC 24 V DC ± 5 % Connection panel Standard (X3) Turbopump HiPace 10, 60, 80, 300
To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available.
D-35614 Asslar
Mod.:
HiPace 300 DN 100 ISO-K, 3P
M.-No.:
PM P03 900
Ser. -No.:
Fig. 1: Example for a rating plate

3.2 Range of application

Pfeiffer Vacuum electronic drive units TC 110 must be installed and operated in the fol­lowing ambient conditions.
Installation location weather protected (indoors) Protection category IP 30 Protection class III Temperature +5 °C to +40 °C (up to +35 °C with air cooling) Relative humidity max. 80 %, at T ≤ 31 °C, up to max. 50% at T ≤ 40 °C Atmospheric pressure 750 hPa - 1060 hPa Installation altitude 2000 m max. Degree of pollution 2 Overvoltage category II
---
Oil: S(N
):
260 l/s
2
6000 0 1/min, 1000 Hz
n,f:
6.7 kg
Weig ht:
Made in Germany
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Product description

3.3 Function

Fig. 2: Standard panel for the TC 110
c Connection "X3" d Service connection "PV.can"

3.4 General connection description

1
PV.can
M12 casing socket with screw coupling and LED for Pfeiffer Vacuum Service pur­poses.
X3
D-sub 15 pole female socket for the connection of a remote control. Casing socket on the rear side of the electronic drive unit for the connection to the
1. The connection "PV.can" serves to service purposes exclusively.
turbopump.
cd h
h LED "Operating display"
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4 Connection diagram

+U
B
PE
A
B
C
+U
B
PE
A
B
C
DC in DC in
1
2
3
4
5
24 VDC*
RS 485 +
RS 485 -
n.c.
1
2
3
4
5
24 VDC*
RS 485 +
RS 485 -
n.c.
RS485 RS485
23456
7
10
11
8
9
12
13
14
15
1
1
8
9
15
X3
TC 110
DI Remote Priority
DI1
DI2
DI Pumping station
DI Standby
24 VDC* (V+)
Accessory A1
Accessory B1
DO1
DO2
AO1
RS 485 D+
RS 485 D-
+U
B
FE
34
21
A
B
C
X3
23456
7
10
11
8
9
12
13
14
15
1
S2
S1
S2
S1
23456
7
10
11
8
9
12
13
14
15
1
134
134
Acc. A1
Acc. B1
34
21
A
B
C
4
31
4
31
X3
Connection cable
TC 110 - TPS/DCU, RS485
TPS 110 / 180 and DCU 002 / HPU 001
or
DCU 110 / 180
Connection cable TC 110 - TPS/DCU
with accessory ports, RS485
TPS 110 / 180 and DCU 002 / HPU 001
or
DCU 110 / 180
0 - 10 VDC
= 0 - 100 % *f
end
R ≥ 10kΩ
90 - 132 /
185 - 265
VAC
23456
7
10
11
8
9
12
13
14
15
1
+U
B
PE
B
A
C
TPS 110 / 180
DCU 110 / 180
X3
24 VDC / max. 200 mA
24 VDC / max. 200 mA
24 VDC / max. 50mA
24 VDC / max. 50mA
+24 VDC / 4,6 - 6,3 A ± 5 %
FE
DC out AC in
Contact current max. 6 mA / contact
Mains input /
Power supply
External connection
Fan
Venting
valve
Relay
Fan
Venting
valve
Relay
Connection diagram
Fig. 3: Connection diagram and assignment of the TC 110
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Connection "X3"

5 Connection "X3"

Remote control options and voltage supply are provided via the 15-pole D-sub connector
with the designation ”X3“ on the TC 110.
Shielded connectors and cables must be used.
Danger of the drive unit being destroyed
Cutting the plug connection "X3" can lead to the destruction of the electronic drive unit,
when the power supply is still switched on.
Before pulling the connector "X3" necessarily disconnect the power supply.
Switch off the power supply unit.
The following information display the factory setting. Configuration is possible using the Pfeiffer Vacuum parameter set.

5.1 Pin assignment

Pin Function Designation factory settings
1 +24 V DC input Voltage supply for the electronic drive unit 2 DI Remote priority Control via interface "X3"; open: off;
3 DI1 Enable venting; open: off; V+: on 4 DI2 Heating; open: off; V+: on 5 DI Pumping station open: off; V+: on and error acknowledgement 6 DI Standby
DI Error acknowledgement 7 +24 V 8 DO1 GND: no; V+: yes (I 9 DO2 GND: no; V+: yes (I 10 Accessory output A1 open: off; V+: on 11 Accessory output B1 open: off; V+: on 12 AO1 Actual rotation speed;
13 RS-485 D+ 14 RS-485 D­15 Ground (GND) Ground connection for the elctronic drive unit;
NOTICE
V+: set and priority over other digital inputs
Standby rotation speed; open: off; V+: on Error acknowledgement: V+ pulse (500 - 2000 ms)
DC* output (V+) Reference voltage for all digital inputs
= 50 mA/24 V)
max
= 50 mA/24 V)
max
DC is equivalent to 0-100%; R
0-10 V
Reference ground for all digital inputs and all outputs
> 10 kΩ
L

5.2 Operation via "X3" connection

Voltage supply +24 V DC Input / Pin 1
The electrical connection at "X3" is carried out via connecting cables of the Pfeiffer Vac-
uum accessories program or by customized configuration on Pin 1 and Pin 15.
+24 V DC* Output / Pin 7
Inputs 2 - 6 are activated by connecting them with +24 V DC to Pin 7 (active high). They can also be activated via an external PLC. The functions are deactivated by "PLC high level" and by "PLC low level".
● PLC high level: +13 V to +33 V
● PLC low level: -33 V to +7 V
● Ri: 7 kΩ
● I
< 200 mA (with RS-485, if existing)
max
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Connection "X3"
Inputs The digital inputs at connection "X3" are used to connect various functions of the elec-
tronic drive unit. Functions are assigned to the inputs DI1 - DI2 ex factory. These can be configured via interface RS-485 and the Pfeiffer Vacuum parameter set.
DI Remote priority / Pin 2
V+ : The connection "X3" has operation priority over all other digital inputs.
open: Remote priority inactive
DI1 (Enable venting) / Pin 3
V+ : Venting is enabled (venting according to venting mode)
open: Venting locked (no venting is performed)
DI2 (Heating) / Pin 4
V+ : Heating on
open: Heating off
DI Pumping station / Pin 5
The turbopump is placed in operation and connected pumping station components (e.g. backing pump, venting valve, air cooling unit) are triggered. Any ongoing error messages are reset when their cause has been eliminated.
V+ : Malfunction acknowledgement and pumping station on
open: Pumping station off
DI Standby - Error acknowledgement / Pin 6
In standby mode, the turbopump operates at a specified rotor speed < nominal rotation speed. Factory setting and recommended operation are 66.7 % of the nominal rotation speed.
V+ : Standby activated
V+ : Reset ongoing error messages when cause has been eliminated with a pulse of 500 - 2000 ms duration
open: Standby off, operation at nominal rotation speed
Outputs The digital outputs at the connection "X3" can be loaded with a maximum of 24 V / 50
mA per output. All outputs listed below are configurable by the Pfeiffer Vacuum parame­ter set via interface RS-485 (description related to factory settings).
DO1 (Rotation speed switchpoint attained) / Pin 8
Active high after the rotation speed switchpoint is attained. Rotation speed switchpoint 1 is factory-set to 80% of the nominal rotation speed. It can, for example, be used for a "pump operational" message.
DO2 (No errors) / Pin 9
When the supply voltage has been established, digital output DO2 permanently outputs 24 V DC which means "no errors". Active low in case of error (collective error message).
Accessory outputs / Pin 10 and Pin 11
The accessory outputs can be loaded with a maximum of 24 V / 200 mA per output. Ad­ditional functions can be assigned to the accessory inputs and outputs via DCU, HPU or PC. Works settings:
● Accessory output A1: A connected air cooling unit is activated.
● Accessory output B1: A connected venting valve is activated, if venting release is
transmitted via input DI1.
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Connection "X3"
AO1 Analog output 0-10 V DC / Pin 12
A rotation-speed-proportional voltage (0-10 V DC equals 0 - 100 % x f
Nominal
) can be
picked up via the analog output (load R ≥ 10 kΩ). Additional functions (optionally current/ power) can be assigned to the analog output via DCU, HPU or PC.
RS-485 One Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can be
connected respectively to the electronic drive unit via Pin 13 and Pin 14 of the connec-
tion "X3" on the electronic drive unit.
CAUTION
Danger of electric shock
The insulation measures of the bus system are designed only for use with safety extra­low voltage.
Connect only suitable devices to the bus system.
● The group address of the electronic drive unit is 961.
● All units connected to the bus must have differing RS-485 device addresses [P:797].
Designation Value
Serial interface RS-485 Baud rate 9600 bauds Data word length 8 bits Parity none (no parity) Start bits 1 Stop bits 1..2
Connecting Pfeiffer Vacuum display and control units or PC
USB/RS485-converter
M12
TPS
Fig. 4: Optional connection possibilities for interface RS485
DCU 002
DC in
DCU 110 - 310
M12
M12 M12
DC in
M12
HPU
RJ45
TC
RS485
RS485
Use the connection cable supplied with the control panel or from the range of acces-
sories.
The connection of respectively one external operating unit is possible on the interface
RS-485.
A USB interface (PC) can be connected via the USB/RS-485-converter.
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Cross-linking via the connection RS-485
USB/RS485-converter
Y-Connector
RS485
RS485
RS485 M12 M12
M12
M12
TC TC
D+
D-
USB/RS485-converter
RS 485
USB
PC
Connection "X3"
Fig. 5: Cross-linking via connection RS485 with connection cables and accessory
Establish the connections according to the specification of the interface RS-485.Connect all units with RS-485 D+ and RS-485 D- to the bus.
● The group address of the electronic drive unit is 961.
● All units connected to the bus must have differing RS-485 device addresses [P:797].
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The Pfeiffer Vacuum parameter set

6 The Pfeiffer Vacuum parameter set

6.1 General

All function-relevant variables of a turbopump are anchored in the electronic drive unit as parameters. Each parameter has a three-digit number and a designation. Parameters can be used via Pfeiffer Vacuum display and control units or via RS-485 with the Pfeiffer Vacuum protocol.
Additional parameters in the control unit
For the control of connected external components (e.g. vacuum measurement devices) there are additional parameters fixed in the respective Pfeiffer Vacuum display and con­trol unit.
Please consider the respective operating instructions.
Conventions Parameters are displayed in square brackets as a three-digit number in bold font. The
designation may also be stated if necessary.
Example: [P:312] Software version

6.2 Parameter overview

Annotation
# Three figure number of the parameter Display Notification of the parameter in a Pfeiffer Vacuum display and control unit Designation Short description of the parameter Functions Functional description of the parameter Data type Type of formatting of the parameter for the use within the Pfeiffer Vacuum pro-
tocol
Access method R: read access; W: write access Unit Physical unit of the described characteristic min / max Permissible limits for value input default Factory settings (partially specific of the pump type)
Parameter can be stored non volatile in the electronic drive unit and may be re-
used after resetting of the mains supply.
Operation with DCU
Parameter set and Pfeiffer Vacuum display and control unit
Pfeiffer Vacuum display and control units DCU show the basic parameter set by default. Furthermore the DCU contains parameters, which are not positioned in the electronic drive unit.
Parameter [P:794] = 1 (Display of all available parameters).
# Display Designation Functions
Unit min max default
Data type
340 Pressure Active pressure value 7 R mbar 1E-101E3
350 Ctr Name Type of display and control unit 4 R 351 Ctr Software Software of display and control unit 4 R 738 Gaugetype Type of pressure gauge 4 RW 794 Param set Parameterset 0 = basic parameter set
1 = extended parameter set
795 Servicelin Insert service line 7 RW 795
14
Access
7RW 0 1 0
Page 15
The Pfeiffer Vacuum parameter set
Control commands
# Display Designation Functions
001 Heating Heating 0 = off
1 = on
002 Standby Standby 0 = off
1 = on
004 RUTimeCtrl Run-up time control 0 = off
1 = on 009 ErrorAckn Error acknowledgement 1 = Error acknowledgement 0 W 1 1 010 PumpgStatn Pumping station 0 = off
1 = on and error acknowledgement 012 EnableVent Enable venting 0 = no
1 = yes 017 CfgSpdSwPt Configuration rotation speed switchpoint 0 = Rotation speed switchpoint 1
1 = Rotation speed switchpoint 1&2 019 Cfg DO2 Configuration output DO2 0 = Rot. speed switchpoint attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate 023 MotorPump Motor pump 0 = off
1 = on 024 Cfg DO1 Configuration output DO1 0 = Rot. speed switchpoint attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate 025 OpMode BKP Backing pump mode 0 = Continuous operation
1 = Intermittent operation
2 = Delayed switching on
3 = Delayed intermittent operation 026 SpdSetMode Rotation speed setting mode 0 = off
1 = on 027 GasMode Gas mode 0 = Heavy gases
1 = Light gases
2 = Helium 030 VentMode Venting mode 0 = Delayed venting
1 = No venting
2 = Direct venting 035 Cfg Acc A1 Configuration accessory connection A1 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit
Unit min max default
Data type
Access
0RW 0 1 0 x
0RW 0 1 0 x
0RW 0 1 1 x
0RW 0 1 0 x
0RW 0 1 0 x
7RW 0 1 0 x
7RW 0 17 1 x
0RW 0 1 1 x
7RW 0 17 0 x
7RW 0 3 0 x
7RW 0 1 0 x
7RW 0 2 0 x
7RW 0 2 0 x
7RW 0 8 0 x
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The Pfeiffer Vacuum parameter set
# Display Designation Functions
036 Cfg Acc B1 Configuration accessory connection B1 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit 037 Cfg Acc A2 Configuration accessory connection A2 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit 038 Cfg Acc B2 Configuration accessory connection B2 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit 050 SealingGas Sealing gas 0 = off
1 = on 055 Cfg AO1 Configuration output AO1 0 = Actual rotation speed
1 = Power
2 = Current
3 = always 0 V
4 = always 10 V 060 CtrlViaInt Control via interface 1 = Remote
2 = RS-485
4 = PV.can
8 = Field bus
16 = E74
255 = Unlock interface selection 061 IntSelLckd Interface selection locked 0 = off
1 = on 062 Cfg DI1 Configuration input DI1 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
6 = Motor
Setting ≠[P:063]
063 Cfg DI2 Configuration input DI2 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
6 = Motor
Setting ≠[P:062]
Unit min max default
Data type
Access
7RW 0 8 1 x
7RW 0 8 3 x
7RW 0 8 2 x
0RW 0 1 0 x
7RW 0 4 0 x
7 RW 1 255 1 x
0RW 0 1 0 x
7RW 0 6 1 x
7RW 0 6 2 x
Status requests
# Display Designation Functions
300 RemotePrio Remote priority 0 = no
1 = yes
302 SpdSwPtAtt Rotation speed switchpoint attained 0 = no
1 = yes 303 Error code Error code 4R 304 OvTempElec Excess temperature electronic drive unit 0 = no
1 = yes 305 OvTempPump Excess temperature pump 0 = no
1 = yes 306 SetSpdAtt Set rotation speed attained 0 = no
1 = yes
16
Data type
0R 0 1
0R 0 1
0R 0 1
0R 0 1
0R 0 1
Unit min max default
Access
Page 17
The Pfeiffer Vacuum parameter set
# Display Designation Functions
307 PumpAccel Pump accelerates 0 = no
1 = yes 308 SetRotSpd Set rotation speed (Hz) 1 R Hz 0 999999 309 ActualSpd Active rotation speed (Hz) 1 R Hz 0 999999 310 DrvCurrent Drive current 2 R A 0 9999.99 311 OpHrsPump Operating hours pump 1 R h 0 65535 x 312 Fw version Firmware version electronic drive unit 4 R 313 DrvVoltage Drive voltage 2 R V 0 9999.99 314 OpHrsElec Operating hours electronic drive unit 1 R h 0 65535 x 315 Nominal Spd Nominal rotation speed (Hz) 1 R Hz 0 999999 316 DrvPower Drive power 1 R W 0 999999 319 PumpCylces Pump cycles 1 R 0 65535 x 326 TempElec Temperature electronic 1 R °C 0 999999 330 TempPmpBot Temperature pump bottom part 1 R °C 0 999999 336 AccelDecel Acceleration / Deceleration 1 R rpm/s 0 999999 342 TempBearng Temperature bearing 1 R °C 0 999999 346 TempMotor Temperature motor 1 R °C 0 999999 349 ElecName Name of electronic drive unit 4 R 354 HW Version Hardware version electronic drive unit 4 R 360 ErrHist1 Error code history, pos. 1 4 R x 361 ErrHist2 Error code history, pos. 2 4 R x 362 ErrHist3 Error code history, pos. 3 4 R x 363 ErrHist4 Error code history, pos. 4 4 R x 364 ErrHist5 Error code history, pos. 5 4 R x 365 ErrHist6 Error code history, pos. 6 4 R x 366 ErrHist7 Error code history, pos. 7 4 R x 367 ErrHist8 Error code history, pos. 8 4 R x 368 ErrHist9 Error code history, pos. 9 4 R x 369 ErrHist10 Error code history, pos. 10 4 R x 397 SetRotSpd Set rotation speed (rpm) 1 R rpm 0 999999 398 ActualSpd Actual rotation speed (rpm) 1 R rpm 0 999999 399 NominalSpd Nominal rotation speed (rpm) 1 R rpm 0 999999
Unit min max default
Data type
Access
0R 0 1
Set value settings
# Display Designation Functions
700 RUTimeSVal Set value run-up time 1 RW min 1 120 8 x 701 SpdSwPt1 Rotation speed switchpoint 1 1 RW % 50 97 80 x 707 SpdSVal Set value in rot. speed setting mode 2 RW % 20 100 65 x 708 PwrSVal Set value power consumption 7 RW % 10 100
710 Swoff BKP Switching off threshold backing pump in intermit-
711 SwOn BKP Switching on threshold backing pump in intermit-
717 StdbySVal Set value rotation speed at standby 2 RW % 20 100 66.7 x 719 SpdSwPt2 Rotation speed switchpoint 2 1 RW % 5 97 20 x 720 VentSpd Venting rot. speed at delayed venting 7 RW % 40 98 50 x 721 VentTime Venting time at delayed venting 1 RW s 6 3600 3600 x 777 NomSpdConf Nominal rotation speed confirmation 1 RW Hz 0 1500 0 x 797 RS485Adr RS-485 device address 1 RW 1 255 1 x
tend mode
tend mode
1. depending on the pump type
Unit min max default
Data type
Access
method
1
1 RW W 0 1000 0 x
1 RW W 0 1000 0 x
100

6.3 Configuring the connections

The electronic drive unit is pre-configured in the factory. Thereby the turbopump is im­mediately operational with the necessary functions. The connections of the electronic drive unit can be configured to suit individual requirements using the parameter set.
x
17
Page 18
The Pfeiffer Vacuum parameter set
Digital outputs on "X3"
Configuration via parameters [P:019] and [P:024].
Option Description
0 = Rotation speed switchpoint attained active, if switchpoint attained 1 = No error active, if failure-free operation 2 = Error active, if error message is active 3 = Warning active, if warning message is active 4 = Error and / or warning active, if error and / or warning is active 5 = Set rotation speed attained active, if set rotation speed is attained 6 = Pump on active, if Pumping station and Motor is on; No Error 7 = Pump accelerates active, if Pumping station is on;
Actual rotation speed < Set rotation speed
8 = Pump decelerates active, if Pumping station is on;
Actual rotation speed > Set rotation speed Pumping station is off;
Rotation speed > 3 Hz 9 = always 0 GND for the control of an external device 10 = always 1 +24 V DC for the control of an external device 11 = Remote priority active active, if Remote priority is active 12 = Heating Control is equal to parameter [P:001] 13 = Backing pump Control is equal to parameter [P:010] and [P:025] 14 = Sealing gas Control is equal to parameter [P:050] 15 = Pumping station Control is equal to parameter [P:010] 16 = Pump rotates active, if rotation speed > 1 Hz 17 = Pump does not rotate active, if rotation speed < 2 Hz
Analog output on "X3"
Accessory connec­tion
Configuration via parameter [P:055].
Option Description
0 = Rotation speed Rotation speed signal; 0 - 10 V DC = 0 - 100 % x f 1 = Power Power signal; 0 - 10 V DC = 0 - 100 % x P 2 = Current Current signal; 0 - 10 V DC = 0 - 100 % x I 3 = always 0 V always GND 4 = always 10 V output of continously 10 V DC
Nominal
max
max
Configuration via parameters [P:035] or [P:036].
The standard version electronic drive unit TC 110 only can control two accessory ports
via connection cable. Therefore the parameters [P:037] and [P:038] are ineffective.
Option Description
0 = Fan (continous operation) Control via parameter Pumping station 1 = Venting valve, normally closed Control via parameter Enable venting, when using a venting
2 = Heating Control via parameters Heating and Rotation speed switch-
3 = Backing pump Control via parameters Pumping station and operation
4 = Fan (temperature controlled) Control via parameter Pumping station and temperature
5 = Sealing gas Control via parameters Pumping station and Sealing gas 6 = always 0 GND for the control of an external device 7 = always 1 +24 V DC for the control of an external device 8 = Power failure venting unit Control via parameter Enable venting, when using a power
valve which is normally closed.
pont attained
mode backing pump
thresholds
failure venting unit.
18
Page 19
The Pfeiffer Vacuum parameter set
Control via interface Configuration via parameters [P:060] and [P:061].
Option [P:060] Description
1 = remote Operation via connection "remote" 2 = RS-485 Operation via connection "RS-485"
4 = PV.can For service purposes only 8 = Field bus Operation via field bus
16 = E74 Operation via connection "E74"
Option [P:061] Description
0 = off Interface selection via [P:060] 1 = on Interface selection locked
Digital inputs on "X3" Configuration via parameters [P:062] and [P:063].
Option Description
0 = deaktiviert Connection deactivated 1 = Enable venting Control is equal to parameter [P:012] 2 = Heating Control is equal to parameter [P:001] 3 = Sealing gas Control is equal to parameter [P:050] 4 = Run-up time control Control is equal to parameter [P:004] 5 = Rotation speed setting mode Control is equal to parameter [P:026] 6 = Motor Control is equal to parameter [P:023]

6.4 Operation with the Pfeiffer Vacuum parameter set

Factory settings The electronic drive unit is pre-programmed in the factory. This guarantees proper, reli-
able turbopump operation without the need for additional configuration.
Checking the adjust­ments
Gas type dependent operations
Before operating with parameters, check set values and control commands for their
suitability for the pumping process.
Friction causes the rotor to heat up severely under gas load and high rotation speed. To avoid overheating, the electronic drive unit has implemented power-rotation speed-char­acteristics, whereby the pump can be operated at every rotation speed with the maxi­mum allowable gas load without danger of damage. The maximum power consumption depends on the gas type. Three characteristics are available in order to completely ex­haust the pump's capacity for each gas type.
NOTICE
Danger of the pump being destroyed
Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de­struction of the pump.
Ensure the gas mode is correctly set.Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).
● Gas mode "0" for gases with the molecular mass >39, e.g. argon.
● Gas mode "1" for gases with the molecular mass ≤ 39.
● Gas mode "2" for helium.
● Power characteristics according to the technical data of the turbopump.
Check and set-up the gas mode via [P:027].
19
Page 20
The Pfeiffer Vacuum parameter set
[P:708]
D
F
B
A
C
E
P
max
f
N
Run-up
Rotation speed
Power
C-D = gas mode "0" A-B = gas mode "1" E-F = gas mode "2"
Set value power con­sumption
Fig. 6: Principle of power characteristics lines for gas type dependent operations,
The turbopump runs up with maximum power consumption. When the nominal and/or set rotation speed is reached, the pump automatically switches over to the chosen power characteristic of the selected gas mode. Increasing gas load is initially compensated by a rise in power consumption in order to keep the rotation speed constant. Increasing gas friction, however, causes the turbopump to heat up more severely. When the gastype­dependent maximum power is exceeded, the rotation speed of the turbopump is reduced until an equilibrium between permissible power and gas friction is attained.
To avoid rotation speed fluctuations, Pfeiffer Vacuum recommends setting a some-
Adjust the parameter [P:708] to the desired value in %.
If adjusting the set value power consumption below 100 % the run-up time prolongs. To
avoid error messages, the parameter [P:700] RUTimeSVal should be adjusted accord-
ingly.
e.g. gas mode = 0
what lower frequency in rotation speed setting mode.
Run-up time The run-up of the turbopump is time-monitored ex factory. There are various causes of
prolonged run-up times, e.g.:
● Too high gas loads
● Leakage in the system
● The set value run-up time is too low
Adjusting the rotation speed switchpoint
20
Eliminate any external and application-related causes.Adjust the run-up time via parameter [P:700].
The rotation speed switchpoint can be used for the message "Pump operational for the process". Overrunning or underrunning the active rotation speed switchpoint activates or deactivates a signal at the pre-configured output on the electronic drive unit and at the
status parameter [P:302].
Rotation speed switchpoint 1
Adjust the parameter [P:701] to the desired value in %.Parameter [P:017] = 0
Signal output and status parameter [P:302] are based on the set value for rotation speed switchpoint 1 [P:701].
Page 21
The Pfeiffer Vacuum parameter set
Process
f
(%)
t
t
t
[P:010]
[P:302]
[P:719] [P:701]
[P:017] = 1
0
1
0
1
f
(%)
[P:017] = 0
[P:701]
t
[P:010]
[P:302]
Fig. 7: Example for the configuration rotation speed switchpoint 1 active
1
0
1
0
Process
t
t
Rotation speed switchpoint 1 & 2
Adjust the parameter [P:701] to the desired value in %.Adjust the parameter [P:719] to the desired value in %.Parameter [P:017] = 1
When the pumping station [P:010] is switched on, the rotation speed switchpoint 1 is the
signal generator. When the pumping station is switched off, signal output and status que­ry are based on the rotation speed switchpoint 2. The signal output is governed by the hysteresis between the two switchpoints.
f
(%)
[P:017] = 1
[P:701] [P:719]
t
[P:010]
[P:302]
Fig. 8: Example for the configuration rotation speed switchpoint 1+2 active; [P:701] > [P:719]
1
0
1
0
Process
t
t
Fig. 9: Example for the configuration rotation speed switchpoints 1+2 active; [P:701] < [P:719]
21
Page 22
The Pfeiffer Vacuum parameter set
Rotation speed set­ting mode
The rotation speed setting mode reduces the rotation speed and hence the throughput of the turbopump. The pumping speed of the turbopump changes proportional to rotation speed. Standby mode is ineffective during rotation speed setting mode. The set rotation
speed is adjusted by the set value in rotation speed setting mode [P:707]. The rotation
speed switchpoint varies with the set rotation speed. Underrunning or overrunning the set value in rotation speed setting mode activates and deactivates the status signal
[P:306] SetSpdAtt respectively.
Adjust the parameter [P:707] to the desired value in %.Parameter [P:026] = 1Read the parameters [P:308]/[P:397].
Permissible rotation speed range of the turbopump
Adjustments in the rotation speed setting mode or in the standby mode are subject to the permissible rotation speed range of the respective turbopump. Underrunning the
minimum permissible value causes the warning message Wrn100. The electronic drive
unit resets the set rotation speed automatically to the next valid value. Maintain the permissible rotation speed range of the turbopump (please refer to the
technical data in the operating instructions for the respective turbopump).
Standby Pfeiffer Vacuum recommends standby mode for the turbopump during process and pro-
duction stops. When standby mode is active, the electronic drive unit reduces the rotation speed of the turbopump. Standby mode is ineffective during rotation speed setting mode. The factory setting for the set value in standby mode is 66.7 % of the nominal rotation speed. Underrunning or overrunning the set speed in standby mode activates or deacti-
vates the status signal [P:306] SetSpdAtt.
Rotation speed set value
Operation mode backing pump
Adjust the parameter [P:717] to the desired value in %.Parameter [P:026] = 0Parameter [P:002] = 1Read the parameters [P:308]/[P:397].
The typical nominal rotation speed of a turbopump is factory-set in the electronic drive unit. If the electronic drive unit is replaced or a different pump type is used, the reference set value of the nominal rotation speed must be confirmed. This procedure is part of a redundant safety system for avoiding excess rotation speeds.
HiPace Nominal rotation speed confirmation [P:777]
10 / 60 / 80 1500 Hz 300 1000 Hz
Adjust the parameter [P:777] according to the pump type.
Once the nominal rotation speed is attained, the pump will run idle unless additional gas loads are entered. Depending on process or application requirements, the nominal rota­tion speed can be reduced in rotation speed setting mode or standby mode.
Operation of a connected backing pump via the electronic drive unit depends on the backing pump type.
Operating mode [P:025] Recommended backing pump
"0" Continuous operation All backing pumps "1" Intermittent operation Diaphragm pumps only "2" Delayed switching on All backing pumps "3" Delayed intermittent operation Diaphragm pumps only
Adjust the parameter [P:025] to the desired value.
22
Page 23
The Pfeiffer Vacuum parameter set
Continous operation
With "pumping station on", the electronic drive unit sends a signal to the configured ac­cessory connection to switch on the backing pump. This signal can also be used for con­trolling a fore-vacuum safety valve.
Intermittend operation (diaphragm pumps only)
Intermittend operation can extend the life expectancy of the membrane of a connected diaphragm pump. Either a diaphragm pump with built-in semiconductor relay or an inter­connected relay box with semiconductor relay is required for intermittend operation. The backing pump is switched on and off in dependence of the turbopump's power consump­tion. A relation to the supplied fore-vacuum pressure is derived from the power consump­tion. The switching off and switching on thresholds for the backing pump are adjustable. Fluctuations in the power consumption of idling turbopumps and type-dependent varying fore-vacuum pressures of the backing pumps require the switching thresholds to be set separately for the intermittend mode.
Pfeiffer Vacuum recommends the intermittend mode between 5 and 10 hPa. A pressure gauge and a dosing valve are required to set the switching thresholds.
Switch on the vacuum system via the function "pumping station" and await the run-up.Generate a fore-vacuum pressure of 10 hPa by gas inlet via dosing valve.Read and note the parameter [P:316]. Adjust the switch on threshold backing pump via parameter [P:711] to the determined
drive power for a fore-vacuum pressure of 10 hPa.
Reduce the fore-vacuum pressure to 5 hPa.Read and note the parameter [P:316]. Adjust the switch off threshold backing pump via parameter [P:710] to the determined
drive power for a fore-vacuum pressure of 5 hPa.
Operation with acces­sories
Delayed switching on
Switching on the turbopump and the backing pump at the same time can result in un­wanted gas flows. Depending on process or application requirements, the backing pump can be switched on with a delay. The switch-on delay depends on the rotation speed of the turbopump and is fixed in the electronic drive unit at 6 Hz.
The signal can also be used for switching a fore-vacuum safety valve.
Delayed intermittent operation
Fluctuations during intermittent operation can result in the specified switching thresholds being exceeded or not reached, and may cause the backing pump to switch when not required. Depending on the process or application requirements, intermittent operation can be activated with a delay. The switching delay is dependent on the specified switch­ing thresholds being exceeded or not met on an uninterrupted basis over a period of time.
● Switch-off threshold, parameter [P:710]
● Switch-on threshold, parameter [P:711]
● Delay 8 s.
The signal can also be used for switching a fore-vacuum safety valve.
Depending on the configuration, various accessories can be connected to the turbopump and controlled via parameter of the electronic drive unit.
Heating
Switch on or off the heating via parameter [P:001].
The activation of a connected casing heating depends on rotation speed switchpoint 1 (factory setting: 80 % x f
Nominal
).
23
Page 24
The Pfeiffer Vacuum parameter set
Fan
Two options in the connection configuration enable continuous or temperature controlled
operation of a connected air cooling unit (see p. 17, chap. 6.3). Threshold values are
type-specific and are anchored in the electronic drive unit.
Sealing gas valve
Switch on or off a sealing gas valve which is connected to a pre-configured output via
parameter [P:050].
Vent modes The turbopump can be vented only after the function "pumping station" has been
switched off. Signals are sent to configured outputs with a fixed delay of 6 s. There are three options for operation with a venting valve connected.
 Enable venting via parameter [P:012].  Select the venting mode via parameter [P:030].
Delayed venting
Start and venting time after "pumping station off" are configurable and depend on the ro­tation speed of the turbopump.
Parameter [P:030] = 0Adjust the venting rotation speed in % of the nominal rotation speed via parameter
[P:720].
Adjust the venting time in s via parameter [P:721].
Monitoring the ther­mal load
If the venting rotation speed is underrun, the venting valve will open for the set venting time. In the event of a power failure, venting will occur if the set venting rotation speed is underrun. In this case, the venting period depends on the residual energy delivered by the moving rotor. When power is restored, the venting process is interrupted.
No venting
No venting is performed during this operation mode.
Parameter [P:030] = 1
Direct venting
Start and venting time are not configurable. Venting starts with a delay of 6 s after "pump­ing station off". When the function "pumping station" is switched on renewed, the venting valve closes automatically. In the event of a power failure, venting will occur if an an­chored type-specific rotation speed is underrun. When power is restored, the venting process is interrupted.
Parameter [P:030] = 2
If threshold values are overrun, output signals from temperature sensors allow the pump to be brought to a safe condition. Depending on pump type, temperature threshold val­ues for warnings and error messages are saved fixed in the electronic drive unit . For information purposes, various status queries are prepared in the parameter set.
24
Page 25
The Pfeiffer Vacuum parameter set

6.5 Switching on/off the pump

Switching on The function "pumping station" comprises turbopump operation with control of all con-
nected accessories (e.g. backing pump).
Switch on the supply voltage with switch S1 on the power supply.Parameter [P:023] = 1 (default)Parameter [P:010] = 1
Ongoing (and removed) error messages are reset. After a successfully completed self­test, the electronic drive unit sets the turbopump motor and all connected accessories into operation depending on their configuration.
When the pumping station is activated, the motor of the turbopump can be switched off
and on via the function [P:023].
Switching off Parameter [P:010] = 0
The electronic drive unit switches off the turbopump and activates preset accessory op­tions (e.g. venting, backing pump).
Wait for the complete standstill of the pump.Cut off the supply voltage with switch S1 on the power supply.
25
Page 26
Pfeiffer Vacuum Protocol for "RS-485"

7 Pfeiffer Vacuum Protocol for "RS-485"

7.1 Telegram frame

The telegram frame of the Pfeiffer Vacuum protocol contains only ASCII code characters [32; 127], the exception being the end character of the message (e.g. a PC) sends a telegram, which is answered by a slave (e.g. electronic drive unit or gauge).
a2 a1 a0 * 0 n2 n1 n0 l1 l0 dn ... d0 c2 c1 c0
a2 - a0 Unit address for slave
– Individual address of the unit ["001";"255"] – Group address "9xx" for all identical units (no response) – global address "000" for all units on the bus (no response)
* Action (see p. 26, chap. 7.2)
n2 - n0 Pfeiffer Vacuum parameter numbers l1 - l0 Data length dn ... d0
dn - d0 Data in data type concerned (see p. 27, chap. 7.3)
c2 - c0 Checksum (sum of ASCII values of cells a2 to d0) modulo 256 C
R
carriage return (ASCII 13)
C
. Basically, a master
R
C
R

7.2 Telegrams

Data request ?
a2 a1 a0 0 0 n2 n1 n0 0 2 = ? c2 c1 c0
Control command !
a2 a1 a0 1 0 n2 n1 n0 l1 l0 dn ... d0 c2 c1 c0
Data response / control command understood 
a2 a1 a0 1 0 n2 n1 n0 l1 l0 dn ... d0 c2 c1 c0
Error message 
a2 a1 a0 1 0 n2 n1 n0 0 6 N O _ D E F c2 c1 c0
NO_DEF The parameter n2 - n0 does not exist _RANGE Data dn - d0 are outside the permitted range _LOGIC Logic access violation
Example 1 Data request
Actual rotation speed (parameter [P:309], device address slave: "123")
? 1230030902=?112
ASCII 49 50 51 48 48 51 48 57 48 50 61 63 49 49 50 13
_RANGE
_LOGI C
C
R
C
R
C
R
C
R
C
R
26
Data response: 633 Hz Actual rotation speed (parameter [P:309], device address slave: "123")
 1231030906000633037
ASCII 49 50 51 49 48 51 48 57 48 54 48 48 48 54 51 51 48 51 55 13
C
R
Page 27
Example 2 Control command
Switch on pumping station (parameter [P:010], device address slave: "042")
! 0421001006111111020
ASCII 4852504948484948485449494949494948504813
Control command understood Switch on pumping station (parameter [P:010], device address slave: "042")
! 0421001006111111020
ASCII 4852504948484948485449494949494948504813

7.3 Applied data types

Data type De sc ri pti on Size l1 - l0 Example
0 False / true 06 000000 / 111111 1 Positive integer number 06 000000 to 999999 2 Positive fixed comma number 06 001571 equal to 15.71 4 Symbol chain 06 TC_400 7 Positive integer number 03 000 to 999 10 Exponential value 06 100023 equal to 1.0 · 10 11 Symbol chain 16 BrezelBier&Wurst
Pfeiffer Vacuum Protocol for "RS-485"
C
R
C
R
3
27
Page 28
Malfunctions

8 Malfunctions

8.1 General

Turbopump and electronic drive unit malfunctions always result in a warning or error message. In both cases, the electronic drive unit outputs an error code. Operating mes­sages are generally displayed via the LEDs on the electronic drive unit. If an error occurs, the turbopump and connected devices will be switched off. The selected venting mode will be triggered after the preset delay.
Automatic start-up after power failure or malfunction acknowledgement
The function "pumping station" of the electronic drive unit remains active after power failure or errors that lead to shut down the pump or the system. The turbopump runs up automatically after power ist restoresd or malfunction acknowledgement.
Switch off the function "pumping station" if necessary.Provide safety measures against interference in the high vacuum flange while the tur-
bopump is running.

8.2 Operation display via LED

LEDs in the front panel of the electronic drive unit show basic operating conditions of the turbopump. A differentiated malfunction and warning display is possible only for opera­tion with DCU or HPU.
WARNING
LED Symbol LED status Display Meaning
Green Off currentless
On, flashing "Pumping Station OFF", rotation speed ≤ 60 min
On, invers flashing "Pumping Station ON", set rotation speed not at-
tained
On, constantly "Pumping Station ON", set rotation speed attained
On, blinking "Pumping Station OFF", rotation speed > 60 min
Yellow Off no warning
On, constantly Warning
Red Off no malfunction
On, constantly Malfunction
Fig. 10: Behaviour and meaning of LEDs on the electronic drive unit

8.3 Error codes

Error code
Err001 Excess rotation speed Contact Pfeiffer Vacuum Service
Err002 Overvoltage – Wrong mains pack used Check type of mains pack
Err006 Run-up time error – Run-up time too short
Err007 Operating fluid deficiency – Operating fluid deficiency Check operating fluid
Err008 Connection electronic drive unit - pump
Problem Possible cause Remedy
Reset at rotation speed f = 0 only
Check mains pack voltageAdjust run-up time to process
Check the vacuum chamber for leaks or
closed valves
Adjust rotation speed switchpoint
Reset at rotation speed f = 0 only
Reset at rotation speed f = 0 only
faulty
– Gas flow in the vacuum chamber caused
by leakage or open valves
– Rotation speed switchpoint is underrun
after run-up time is expired
– Connection to the pump is faulty Check the connection
-1
-1
28
Page 29
Malfunctions
Error
Problem Possible cause Remedy
code
Err010 Internal device fault Contact Pfeiffer Vacuum Service
Err021 Electronic drive unit does not recognize
Err043 Internal configuration fault Contact Pfeiffer Vacuum Service Err044 Excess temperature electronic – Cooling deficient Optimize cooling
Err045 Excess temperature motor – Cooling deficient Optimize cooling
Err046 Internal initialization fault Contact Pfeiffer Vacuum Service Err091 Internal device fault Contact Pfeiffer Vacuum Service Err092 Unknown connection panel Contact Pfeiffer Vacuum Service Err093 Temperature analysis motor faulty Contact Pfeiffer Vacuum Service Err094 Temperature analysis electronic faulty Contact Pfeiffer Vacuum Service Err098 Internal communication fault Contact Pfeiffer Vacuum Service Err107 Collective fault power stage Contact Pfeiffer Vacuum Service
Err108 Rotation speed measurement faulty Contact Pfeiffer Vacuum Service
Err109 Firmware not confirmed Contact Pfeiffer Vacuum Service Err110 Operating fluid analysis faulty Contact Pfeiffer Vacuum Service
Err111 Communication fault operating fluid pump Contact Pfeiffer Vacuum Service
Err112 Collective fault operating fluid fault Contact Pfeiffer Vacuum Service
Err114 Temperature analysis power stage faulty Contact Pfeiffer Vacuum Service Err117 Excess temperature pump bottom part – Cooling deficient Optimize cooling
Err118 Excess temperature power stage – Cooling deficient Optimize cooling
Err119 Excess temperature bearing – Cooling deficient Optimize cooling
Err143 Excess temperature operating fluid pump – Cooling deficient Optimize cooling
Err777 Nominal rotation speed not confirmed – Nominal rotation speed not confirmed af-
Wrn001 TMS heating time elapsed – internal heating-up timer elapsed Check the ambient conditions Wrn003 TMS heating circuit sensor – TMS temperature not in the permissible
Wrn007 Low voltage / mains power failure – Mains failure Check mains supply Wrn018 Remote priority conflict – Pumping station is switched on via
Wrn045 High temperature motor – Cooling deficient Optimize cooling
Wrn076 High temperature electronic – Cooling deficient Optimize cooling
Wrn097 Pump information invalid – Pump data faulty Reset for default values Wrn098 Pump information incomplete – Connection to the pump is faulty Contact Pfeiffer Vacuum Service Wrn100 Rotation speed raised to minimum value – Permissible adjustments for the rotation
Wrn115 Temperature analysis pump bottom part
Wrn116 Temperature analysis bearing faulty Contact Pfeiffer Vacuum Service Wrn117 High temperature pump bottom part – Cooling deficient Optimize cooling
Wrn118 High temperature power stage – Cooling deficient Optimize cooling
Wrn119 High temperature bearing – Cooling deficient Optimize cooling
pump
faulty
ter replacement of the electronic drive unit
range between +5 °C and 85 °C
[P:010], whereas the E74-input "start/ stop" is off (opened)
speed setting mode or standby are in­correct
Reset at rotation speed f = 0 onlyContact Pfeiffer Vacuum Service
Reset at rotation speed f = 0 only
Check the ambient conditions
Check the ambient conditions
Reset at rotation speed f = 0 only
Reset at rotation speed f = 0 only
Reset at rotation speed f = 0 only
Reset at rotation speed f = 0 only
Reset at rotation speed f = 0 only
Check the ambient conditions
Check the ambient conditions
Check the ambient conditions
Check the ambient conditionsReset at rotation speed f = 0 only
Confirm the nominal rotation speed via
P:777]
[
Reset at rotation speed f = 0 only
Check the ambient conditionsContact Pfeiffer Vacuum Service
Switch on the pumping station via E74Switch off [P:010]
Check the ambient conditions
Check the ambient conditions
Check [P:707] or [P:717]Find the valid rotation speed range in
the technical data of the turbopump
Contact Pfeiffer Vacuum Service
Check the ambient conditions
Check the ambient conditions
Check the ambient conditions
29
Page 30
Malfunctions
Error
Problem Possible cause Remedy
code
Wrn143 High temperature operating fluid pump – Cooling deficient Optimize cooling
Wrn168 High deceleration – Rate of pressure rise too high; Venting
rate to high
Check the ambient conditionsCheck and optimize the venting rate
(pump specific)
30
Page 31

Declaration of conformity

We hereby declare that the product cited below satisfies all relevant provisions accord-
ing to the following EC directives:
● Electromagnetic Compatibility 2004/108/EC
● Low Voltage 2006/95/EEC
TC 110
Harmonised standards and national standards and specifications which have been ap­plied:
DIN EN 61000-3-2 : 2008
DIN EN 61000-3-3 : 2006
DIN EN 61010-1 : 2010
DIN EN 61326-1 : 2006
DIN EN 62061 : 2005
Semi F47-0200
Semi S2-0706
Signatures:
(M.Bender) Managing Director
(Dr. M. Wiemer) Managing Director
Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany
CE/2013
Page 32
Vacuum solutions from a single source
Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service.
Complete range of products
Competence in theory and practice
Are you looking for a perfect vacuum solution? Please contact us
From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio.
Benefit from our know-how and our portfolio of training opportunities! We can support you with your plant layout and provide first-class on-site-service worldwide.
Pfeiffer Vacuum GmbH
Headquarters • Germany T +49 6441 802-0 info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.com
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