Page 1
PlasmalabSystem100
Modular Cluster System – TEOS
Installation Data
Issue 10: February 2011
Page 2
PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 2 of 24 Printed: 10-Feb-11, 9:07
Contents
Page
1. Introduction ............................................................................................................ 3
2. Installation information ........................................................................................... 4
2.1 Dimensions ........................................................................................................ 4
2.2 Weights .............................................................................................................. 4
2.3 Heat load ........................................................................................................... 4
3. Services connections ............................................................................................... 8
4. Gas handling ........................................................................................................ 10
5. Services ................................................................................................................ 14
5.1 Electrical Supply requirement ........................................................................... 14
5.2 Water Cooling requirement ............................................................................... 14
5.3 Top Electrode Temperature requirement .......................................................... 14
5.4 Compressed Air requirement ............................................................................ 14
5.5 Nitrogen requirement ....................................................................................... 15
5.6 Process gas requirement .................................................................................. 15
5.7 Extraction requirement ..................................................................................... 15
6. Pump set information ........................................................................................... 16
7. Heater/chiller information ..................................................................................... 18
8. PLC interlock chain ............................................................................................... 20
8.1 General description .......................................................................................... 20
8.2 Gas box interlocks ........................................................................................... 22
8.2.1 Incompatible gases .................................................................................... 22
8.2.2 System Link Configuration Table ................................................................ 23
8.2.3 System LED Monitoring Table ..................................................................... 24
9. OIPT locations worldwide ...................................................................................... 24
Fig 1: PECVD system layout (3-frame Base pressure turbo configuraton) ..................... 5
Fig 2: PECVD system layout (2-frame) ......................................................................... 6
Fig 3: PECVD Layout (2-frame cluster upgradeable) ..................................................... 7
Fig 4: PECVD services panel ......................................................................................... 8
Fig 5: Electrical connections ........................................................................................ 9
Fig 6: 4-Line gas pod ................................................................................................ 10
Fig 7: 8-Line gas pod ................................................................................................ 11
Fig 8: 12-line gas pod ............................................................................................... 12
Fig 9: TEOS pod ........................................................................................................ 13
Fig 10: TEOS oven ..................................................................................................... 13
Fig 11: Gas box interlock chain ................................................................................. 22
Table 1: RF enable interlock chain details .................................................................. 21
Table 2: Incompatible gases ...................................................................................... 22
Table 3: System link configuration............................................................................. 23
Table 4: System LED monitoring ................................................................................ 24
Page 3
Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 3 of 24 Issue 10: February 11
1. Introduction
This installation specification document gives information about the PlasmalabSystem100
to
enable customers to prepare the required environment for the system.
Note that all dimensions shown in these data sheets are typical; precise dimensions
depend on the actual equipment fit. All dimensions are given in millimetres unless
otherwise stated.
NOTE:
All information, services, dimensions etc., refer only to the
PlasmalabSystem100, i.e. plasma processing at up to 200 mm wafers in
MESC compatible chambers.
Consider access when planning the system installation. Ensure that good access is
available to parts of the system that require maintenance. Ensure that all isolation points
for the system services are easily accessible.
Oxford Instruments Plasma Technology conducts a programme of continual product
development, and reserves the right to change the design and/or specification of
equipment without notice. The details contained in this document were correct at the
time of printing but should be confirmed immediately prior to delivery. Details of the
clean room interface will be advised at the time of delivery.
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PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 4 of 24 Printed: 10-Feb-11, 9:07
2. Installation information
2.1 Dimensions
System dimensions are given in Fig 1, Fig 2 and Fig 3. Gas handling component
dimensions are given in Fig 6, Fig 7 and Fig 8. Teos pod and TEOS oven dimensions are
given in Fig 9 and Fig 10 respectively. Pump dimensions are given in Section 6.
Heater/chiller dimensions are given in Section 7.
2.2 Weights
Typical weights of system components:
2-frame system: 290 kg
3-frame system: 360 kg
6-line Gas pod: 35 kg
TEOS pod: 35 kg
TEOS oven: 30 kg
12-line Gas pod: 65 kg
Pumps: See Section 6 (Pump set information).
Heater/chillers: See Section 7 (Heater/chiller information).
2.3 Heat load
The typical heat load for the clean room installation is:
Operating: 2 kW
Passive: 1.5 kW
Note that these specifications do not include externally sited components, e.g. pumps,
heater/chillers, transformers, etc..
Heat loads for typical chillers are given in the following table. The heat loads are quoted
for a bath temperature of 20°C and 100% cooling.
Chiller Model
Heat Load
FP51-SL
3.5 kW
FL601
1.1 kW
FC1600T
2.0 kW
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Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 5 of 24 Issue 10: February 11
1412
1630
747
550
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 1: PECVD system layout (3-frame Base pressure turbo configuraton)
NOTE: For services panel details, see Fig 4.
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PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 6 of 24 Printed: 10-Feb-11, 9:07
1412
1090
747
550
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 2: PECVD system layout (2-frame)
NOTE: For services panel details, see Fig 4.
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Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 7 of 24 Issue 10: February 11
1795
446
550
1412
514
244
865
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 3: PECVD Layout (2-frame cluster upgradeable)
NOTE: For services panel details, see Fig 4.
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PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 8 of 24 Printed: 10-Feb-11, 9:07
3. Services connections
711
738.5
746
781
816
851
886
921
956
Distance
to floor
level
385 415 461.5
3/8“ SWAGELOK
3/8“ SWAGELOK
3/8“ SWAGELOK
1/4“ SWAGELOK
1/4“ SWAGELOK
1/4“ VCR
(Additional
process gas
when required)
1/4“ VCR
TOP ELECTRODE
& AMU COOLING
OUTIN
OUT
IN
OUT
IN
OUTIN
LF GENERATOR COOLING
PROCESS CHAMBER
COOLING
TURBO COOLING
N2 IN
AIR IN
PROCESS
GAS
AIR OUT
CHAMBER BACKING
4 MM PUSH-FIT
LEGRIS
PLC SERVICE
ACCESS CONNECTOR
(THIS IS AN
ALTERNATIVE PC
COMMUNICATIONS
CONNECTION)
NOT
(Only used if
a turbo pump
is fitted)
(Only used if
chamber cooling
is fitted)
Distance
to left-hand
edge of frame
(viewed from rear
of system)
For the 3-frame system Automatic
Load Lock Services Panel, this
distance is 407 to the right-hand
edge of the frame (viewed from
rear of system).
For the 2-frame system Automatic
Load Lock Services Panel, this
distance is 1009 to the left-hand
edge of the frame (viewed from
rear of system)
Fig 4: PECVD services panel
NOTE: The Automatic load lock services panel is similar to that shown above but only
the CHAMBER BACKING connector is used.
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Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 9 of 24 Issue 10: February 11
POWER DISTRIBUTION
UNIT
(REMOVABLE COVER)
COOLING
FAN
SKT 7 SKT 10A
SKT 9
SKT 17SKT 16SKT 8
PUMP
PURGE
HEATER/
CHILLER
SKT 10
EARTH TERMINAL
SYSTEM POWER
CABLE GLAND
(CABLE LENGTH
= 4 METRES)
LOW VOLTAGE
FUSES
SKT 7
AUXILIARY
EMERGENCY OFF
SWITCH CONNECTOR
4-WAY BICC
PIN A EMO 1*
PIN B +24V
PIN C 0V
PIN D EMO 2*
(NOTE: EMO 1 & 2
MUST BE LINKED)
*EMO = EMERGENCY
OFF
2 AMP
FS1
+15V -15V +24V
FS2 FS3
2 AMP 2 AMP
1
2
3
4
5
6
PHASE 1
PHASE 2
PHASE 3
SPARE
SPARE
NEUTRAL
SUPPLY TO LOAD LOCK
ROTARY PUMP
SOCKET 10A
1
2
3
4
5
6
PHASE 1
PHASE 2
PHASE 3
SPARE
SPARE
NEUTRAL
SUPPLY TO ROTARY
PUMP 2
SOCKET 9
12
3 4
PHASE 1
PHASE 2
PHASE 3
SUPPLY TO ROTARY
PUMP 1
SOCKET 10
1
2 E
SUPPLY TO ROTARY
PUMP OIL FILTER
SOCKET 17
415V
Pin 1 Live
Pin 2 Neutral
Pin E Earth
208V
Pin 1 Phase 1
Pin 2 Phase 2
Pin E Phase 3
Fig 5: Electrical connections
Page 10
PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 10 of 24 Printed: 10-Feb-11, 9:07
4. Gas handling
IMPORTANT OIPT gas pods typically weigh >40kg. If you intend fixing your gas pod
to a wall, ensure the wall and gas pod fixings are sturdy enough to bear
at least four times the weight of the gas pod. Periodically, e.g. annua lly,
check the gas pod and its fixings are secure.
356
426.3
496.6
566.9
637.2
707.5
322.2
0
650
45
SECONDARY GAS OUTLET
LINE TO SYSTEM (ONLY
USED IF A SPLIT MANIFOLD
IS FITTED)
¼"
PRIMARY GAS
OUTLET LINE TO
SYSTEM
HEATER
CONTROLLERS
(IF FITTED)
GAS INLET LINES
(¼"STAINLESS
STEEL TUBE
FOR WELDING TO
THE CUSTOMER'S
SUPPLY)
GAS 1
GAS 2
GAS 3
GAS 4
160
GAS POD COVER
INTERLOCK MICROSWITCH
COMPRESSED
AIR IN (LEFT-HAND
CONNECTOR) & OUT
(4mm push fit)
25-WAY ‘D’ CONNECTOR
FOR PLC/PCB
CONTROL SIGNALS
EARTH
STUD
FIXING HOLE
(6.5 mm DIA.)
LOCATED 20 mm
FROM EDGES
OF BACKPLATE
(ONE AT EACH
CORNER)
220
1030
100
100 mm DIAMETER
EXTRACTION COLLAR
Fig 6: 4-Line gas pod
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Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 11 of 24 Issue 10: February 11
356
426.3
496.6
566.9
637.2
707.5
777.8
848.1
918.4
988.7
41
0
650
45
SECONDARY GAS OUTLET
LINE TO SYSTEM (ONLY
USED IF A SPLIT MANIFOLD
IS FITTED)
¼"
PRIMARY GAS
OUTLET LINE TO
SYSTEM
HEATER
CONTROLLERS
(IF FITTED)
GAS INLET LINES
(¼"STAINLESS
STEEL TUBE
FOR WELDING TO
THE CUSTOMER'S
SUPPLY)
GAS 1
GAS 2
GAS 3
GAS 4
GAS 5
GAS 6
GAS 7
GAS 8
160
GAS POD COVER
INTERLOCK MICROSWITCH
COMPRESSED
AIR IN (LEFT-HAND
CONNECTOR) & OUT
(4mm push fit)
25-WAY ‘D’ CONNECTOR
FOR PLC/PCB
CONTROL SIGNALS
EARTH
STUD
FIXING HOLE
(6.5 mm DIA.)
LOCATED 20 mm
FROM EDGES
OF BACKPLATE
(ONE AT EACH
CORNER)
220
1030
100
100 mm DIAMETER
EXTRACTION COLLAR
Fig 7: 8-Line gas pod
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PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 12 of 24 Printed: 10-Feb-11, 9:07
356
426.3
496.6
566.9
637.2
707.5
777.8
848.1
918.4
988.7
1059
1129.3
1199.6
1269.9
0
650
SECONDARY GAS OUTLET
LINE TO SYSTEM (ONLY
USED IF A SPLIT MANIFOLD
IS FITTED)
¼"
PRIMARY GAS
OUTLET LINE TO
SYSTEM
HEATER
CONTROLLERS
(IF FITTED)
GAS INLET LINES
(¼"STAINLESS
STEEL TUBE
FOR WELDING TO
THE CUSTOMER'S
SUPPLY)
GAS 1
GAS 2
GAS 3
GAS 4
GAS 5
GAS 6
GAS 7
GAS 8
GAS 9
GAS 10
GAS 11
GAS 12
160
GAS POD COVER
INTERLOCK MICROSWITCH
COMPRESSED
AIR IN (LEFT-HAND
CONNECTOR) & OUT
(4mm push fit)
25-WAY ‘D’ CONNECTOR
FOR PLC/PCB
CONTROL SIGNALS
EARTH
STUD
FIXING HOLE
(6.5 mm DIA.)
LOCATED 20 mm
FROM EDGES
OF BACKPLATE
(ONE AT EACH
CORNER)
1311.5
42.3
45
220
100
100 mm DIAMETER
EXTRACTION COLLAR
Fig 8: 12-line gas pod
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Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 13 of 24 Issue 10: February 11
MAINS CABLE
TO MAIN UNIT
(3 METRES LONG)
600
60
60
600
200
100
25
NOTES:
MAXIMUM DISTANCE OF TEOS
POD FROM MAIN UNIT IS
2 METRES
ALL GAS LINES ARE 1/4“
STAINLESS STEEL TUBE,
PROTRUDING 160 mm
FROM POD FOR WELDING
EXTRACTION
COLLAR
510
4545
75
9mm Diameter
for M8 screws
Location of fixing holes
To PECVD system
Argon from
process gas pod
To TEOS
pot
From TEOS pot
6mm push-fit connector
for compressed air (CDA)
This line is heated and
should be 2 metres long
(max.) Pipe heaters and
insulation are supplied.
This line is heated and
should be 1.3 metres long
(max.) Pipe heaters and
insulation are supplied.
1)
2)
Fig 9: TEOS pod
460
490
526
FRONT VIEW LEFT-HAND SIDE VIEW
Fig 10: TEOS oven
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PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 14 of 24 Printed: 10-Feb-11, 9:07
5. Services
The required services are listed in the following sub-sections. For full details of services
specifications including connection diagrams, electrical connection schematic etc., read in
conjunction with the Oxford Instruments Plasma Technology ‘Services Specifications for
Plasmalab and Ionfab Systems’ document.
5.1 Electrical Supply requirement
Function
Connection
Parameter
Specification
System electrical
supply (208V
system)
Cable (4 meters
long)
Voltage
208Vac ±10%
Current
32 A
Frequency
50 / 60 Hz
Phases
3 phase, N + E
System electrical
supply (415V
system)
Cable (4 meters
long)
Voltage
380Vac –10% to
415Vac +6%
Current
32 A
Frequency
50 / 60 Hz
Phases
3 phase, N + E
5.2 Water Cooling requirement
Function
Connection
Parameter
Specification
Base Pressure
Turbo (if fitted)
1
/4” stainless steel
Swagelok
Flow
1 lpm (0.27 gpm (US))
Temperature
15 - 25°C (59 - 77°F)
LF Generator
(if required)
3
/8” stainless steel
Swagelok
Flow
2 lpm (0.53 gpm (US))
Temperature
10 - 25°C (50 - 77°F)
AMU
3
/8” stainless steel
Swagelok
Flow
1 lpm (0.27 gpm (US))
Temperature
10 - 25°C (50 - 77°F)
Load lock turbo (if
required)
1
/4” stainless steel
Swagelok
Flow
1 lpm (0.27 gpm (US))
Temperature
15 - 25°C (59 - 77°F)
5.3 Top Electrode Temperature requirement
Function
Connection
Parameter
Specification
Liquid controlled
top electrode
3
/8” stainless steel
Swagelok to heater
/ chiller unit
Flow
2 lpm (0.53 gpm (US))
Temperature
As required by process
5.4 Compressed Air requirement
Function
Connection
Parameter
Specification
System CDA
4mm push-fit
Legris
Flow
5 lpm (0.2 cfm)
(combined with gas
pod)
Pressure
4.0 – 6.0 Bar (60 – 90
psi)
Gas pod CDA
4mm push-fit
Legris
Flow
5 lpm (0.2 cfm)
(combined with
system)
Pressure
4.0 – 6.0 Bar (60 – 90
psi)
Page 15
Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 15 of 24 Issue 10: February 11
5.5 Nitrogen requirement
Function
Connection
Parameter
Specification
System N2
¼” stainless steel
Swagelok
Flow
8 lpm (0.32 cfm)
Pressure
3.0 Bar (45 psi)
minimum
Rotary pump purge
¼” stainless steel
Swagelok typically
Flow
Refer to sub-section
6.1 Rotary pump
purging
Pressure
Refer to sub-section
6.1 Rotary pump
purging
5.6 Process gas requirement
Function
Connection
Parameter
Specification
Process gas in
¼” stainless steel
welded pipe at gas
pod, ¼” stainless
steel VCR at
system.
Pressure
2.0 – 3.0 Bar (30 – 45
psi)
5.7 Extraction requirement
Function
Connection
Parameter
Specification
Gas pod
100mm (4”) tube
Flow
6-line gas pod – 1
m3/hour (0.6 cfm)
12-line gas pod – 3
m3/hour (1.8 cfm)
TEOS pod
100mm (4”) tube
Flow
1 m3/hour (0.6 cfm)
Rotary pump
exhaust
Refer to Section 6
Pump set
information
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PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 16 of 24 Printed: 10-Feb-11, 9:07
6. Pump set information
CAUTION
Where the rotary vane or Roots pumps are powered from a mains supply separate
from the PlasmalabSystem100, a separate 'emergency off' facility must be provided by the
customer.
6.1 Process pump options
6.1.1 Rotary pump purging
The requirements for rotary pump purging depend on the process used. Customers
should consult the pump manufacturer for their recommendations.
For Alcatel 2033 and 2063 rotary pumps, the recommended minimum N2 purge rate is
2 litres/minute at a pressure of 2bar to 5bar. For highly corrosive or pyrophoric gases,
4 litres/minute is recommended.
6.1.2 Dry pump water cooling
For Alcatel ADP122P and ADS602P dry pumps, the recommended minimum cooling water
flow rate is 1 litre/minute.
Available
pump
options
Length
mm
Width
mm
Height
mm
Pump inlet
connection
*Pump
outlet
connection
Weight
kg
Water
cooling
Power
consumption
kW
Minimum
N2 purge
rate
Adixen
2033C2
701
213
348
DN 40
DN 40
76
n/a
1.1 (50Hz)
1.3 (60Hz)
2 lpm
Adixen
2063C2
819
264
397
DN 40
DN 40
98
n/a
2.2 (50Hz)
2.6 (60Hz)
2 lpm
Adixen
ADP122P
830
390
580
DN 50
DN 40
245
1 lpm
1.3 (50Hz)
1.5 (60Hz)
10 lpm
Adixen
ADS602P
830
390
875
DN 100
DN 40
378
1 lpm
1.8 (50Hz)
2.0 (60Hz)
10 lpm
Adixen
RSV301 +
2033C2
1120
400
1090
DN 63
DN 40
220
n/a
2.8
(50/60Hz)
**2 lpm
Adixen
RSV601 +
2063C2
1120
400
1090
DN 100
DN 40
260
n/a
4.5
(50/60Hz)
**2 lpm
* All fittings and pipework connected to the rotary pump exhaust must be made from industry standard
stainless steel. Refer to the OIPT Services Specifications document, sub-section 6.1.
** This figure applies only to the rotary vane pump; the roots blower does not require N2 purging.
Page 17
Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 17 of 24 Issue 10: February 11
6.2 Loadlock and wafer-handler pump options
Available
pump
options
Length
mm
Width
mm
Height
mm
Pump inlet
connection
*Pump
outlet
connection
Weight
kg
Water
cooling
Power
consumption
kW
**Minimum
N2 purge
rate
Adixen
2015C2
462
188
240
DN 25
DN 25
27
n/a
0.45 (50Hz)
0.55 (60Hz)
2 lpm
Adixen
2033C2
701
213
348
DN 40
DN 40
76
n/a
1.1 (50Hz)
1.3 (60Hz)
2 lpm
Adixen
ACP15G
515
205
280
DN 25
DN 16
23
n/a
0.6
(50/60Hz)
5 lpm
Adixen
ACP28G
650
195
325
DN 25
DN 25
30
n/a
1.2
(50/60Hz)
1.65 lpm
Adixen
ACP40G
650
195
325
DN 40
DN 25
32
n/a
1.2
(50/60Hz)
1.65 lpm
* All fittings and pipework connected to the rotary pump exhaust must be made from industry standard
stainless steel. Refer to the OIPT Services Specifications document, sub-section 6.1.
** N2 purge recommended if corrosive gases residues are likely to be present e.g. cassette loadlocks on
chlorinated process etch systems.
Page 18
PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 18 of 24 Printed: 10-Feb-11, 9:07
7. Heater/chiller information
Chiller
Width
mm
Length
mm
Height
mm
Weight
kg
Usable
Temperature
Range °C
Water
Connections
Electrical
Requirements
Julabo FP51
460
550
890
90
-30 to 80
3/8”
Swagelok
400V, 50Hz,
3 Phase,
14 Amps
Julabo FP51
460
550
890
90
-30 to 80
3/8”
Swagelok
230V, 60Hz,
3 Phase,
14 Amps
Julabo FP51
460
550
890
90
-30 to 80
3/8”
Swagelok
220V, 60Hz,
1 Phase,
14 amps
Julabo FC 1600T
460
610
490
67
0 to 80
3/8”
Swagelok
230V, 50Hz,
1 Phase,
13 Amps
Julabo FC 1600T
460
610
490
67
0 to 80
3/8”
Swagelok
230V, 60Hz,
1 Phase,
13 Amps
Julabo FL 601
320
500
600
48
0 to 30
3/8”
Swagelok
230V, 50Hz,
1 Phase,
5 Amps
Julabo FL 601
320
500
600
48
0 to 30
3/8”
Swagelok
230V, 60Hz,
1 Phase,
5 Amps
Neslab
Thermoflex TF
1400
361
625
694
60
5 to 80
3/8”
Swagelok
208V, 60Hz,
1 Phase,
13 Amps
IMPORTANT: Heater/chillers should be filled/topped up with one of the fluids listed I
the following table, as appropriate. Refer the OIPT ‘Services Specifications
for Plasmalab and Ionfab systems’ document, sub-section 2.1 for the
warranty impact of not using these products.
Page 19
Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 19 of 24 Issue 10: February 11
Part Number
Fluid
Usable Temperature
Range
Recommended
Application
94-G-WTR-SUN-909
Thermal G
-30 to 80°C
FL601.
FP51 when fitted to
systems with
electrically heated
tables and the
automatic liquid
nitrogen changeover
unit (ACU).
94-G-WTR-SUN-903
Thermal H5
-50 to 105°C
All other systems.
The following accessories are available for heater/chillers:
Part Number
Description
Application
94-G-G-WTR-SUN-921
Solenoid isolation valves
Fit these valves when the chiller
is located below the main
system.
Temperature range is -10°C to
+130°C.
94-100-12-23-1BL
LN2 Automatic Changeover Unit (ACU)
To automatically switch
between chiller fluid operation
and liquid nitrogen or
electrically heating of the table.
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PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 20 of 24 Printed: 10-Feb-11, 9:07
8. PLC interlock chain
8.1 General description
The interlocks form a continuous 24Vdc chain, which must be complete before the
process gases and RF power supplies are enabled. An output to disable external devices
unless the lid/ hoist is closed is also provided; this is typically used to disable a lidmounted endpoint detector laser.
The interlock chain is monitored by the software, but acts independently. It is also
supplemented by machine protection sensors, which operate only via the software.
To enable RF power:
The 600 mbar vacuum switch (‘Vacstat’) must be at low pressure
The process chamber lid must be shut (or its hoist down)
The primary process pump must be running
The primary process pressure gauge (normally a capacitance manometer) must be
on scale
The load lock inter-chamber valve (where fitted) must be closed
Customer-supplied external alarm devices must be in their safe state
The inert gas purge to the primary process pump must be flowing.
To enable process gases:
RF power must be enabled
The gas box lid must be shut
Specific gases can be set in the gas box hardware to be mutually exclusive, so that
they cannot be turned on together.
Machine protections fitted where appropriate:
A nitrogen pressure switch, to detect adequate purge pressure to turbomolecular
pump bearings.
OR:
A nitrogen flow meter, to detect purge gas flow to pump bearings.
Water flow switch(es).
Page 21
Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 21 of 24 Issue 10: February 11
RF enable interlock chain details are given in Table 1; Refer to drawing 94-SE00A26865
(PC2003 interface schematic).
INTERLOCK
DEVICE
PCB
input
PCB1
LED
Link out
Comments
Vacuum
Switch
Vacuum Switch
BLK17
11
NONE
Pressure below 600 mBar
Hoist /Lid
a) Air cylinder
switch/microswitc
h
or
b) Guardmaster
Switch N/O Switch
BLK18
BLK19
12
13
NONE
Lid closed or hoist down. Enables
end point laser via JP51
Primary
pump
running
Current monitor in
Power Box
JP44
6
15
Interlock disabled if an
independent/dry pump fitted
Process
pressure
gauge on
scale
Capacitance
Manometer (e.g.
Baratron™)
JP16
5
NONE
Analogue input below 11.5V.
Switches comparator U5.
Spare
interlock 1
External Voltage Free
contact or 24V DC
input to PCB
JP52
14
Can be
bypassed
using
LK19
Customer-supplied device. Volt
free contact JP52 pins 1 and 4.
OR
24V DC input JP52 pin 4.
Spare
interlock 2
Or
Load lock
valve
External Voltage Free
contact
Inter-chamber valve
must be shut
JP53
15
20
Customer-supplied device
Or
Used on 100 and 133 systems
Process
pump purge
Gas Flow Switch at
Primary Pump
JP55
16
LK21A
Fit LK21B if fitted
Table 1: RF enable interlock chain details
If above satisfied, then 24V is at BLK20, 21 & 22 pin 1. This enables the K4 contactor to
supply power to the RF Generator.
Page 22
PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 22 of 24 Printed: 10-Feb-11, 9:07
8.2 Gas box interlocks
Refer to drawing: 94-SE81B26657 (PC2003 gas pod loom).
To enable process gases, the RF interlock chain must be complete. The gas box interlock
is shown in Fig 11.
1
BLK
20
24VDC
LID
SWITCH
PCB 94-PC00S26866 REAR SERVICES
PANEL
SKT25W
PIN4
PL25W
PIN4
GAS BOXSYSTEM CONSOLE
SERVICES
PANEL
SKT25W
PIN4
PL24W
PIN4
PCB 94-PC81S26655
JP6
PIN1
JP6
PIN2
JP6
PIN3
Via JP3 to CAN unit
controlling gases 1 - 4.
See NOTE.
NOTE:The function of the signal is to supply
24Vdc power to the digital outputs of
the CAN unit. The interlock continues
through idendical boards (where fitted)
which drive gases 5 - 8 and 9 - 12.
Fig 11: Gas box interlock chain
8.2.1 Incompatible gases
1st PCB Gas
2nd PCB Gas
3rd PCB Gas
Type A
Type B
Type X
1st Gas
1 5 9
LK3A + 4
LK3B
LK3A
2nd Gas
2 6 10
LK5A + 6
LK5B
LK5A
3rd Gas
3 7 11
LK7A + 8
LK7B
LK7A
4th Gas
4 8 12
LK9A + 10
LK9B
LK9A
Gases are designated as one of three types:
Gas type A: Typically oxidising gases (e.g. oxygen)
Gas type B: Typically fuel gases (e.g. hydrogen)
Gas type X: Gases normally miscible with most other gas types.
If ANY gas Type A is enabled, then ALL gas Type B lines are disabled.
Table 2: Incompatible gases
The gas box has a facility to prevent incompatible gases from being enabled
simultaneously, using soldered links.
Page 23
Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 23 of 24 Issue 10: February 11
8.2.2 System Link Configuration Table
NAME
FUNCTION
NOTES
LK1
ANALOGUE 0V TO CHASSIS
LK2
DIGITAL 0V TO ANALOGUE 0V
LK3
NON – CONTROLLER CRYO ENABLE
LK4
HEATER SNAP SWITCH BYPASS
LK5
FIT IF NO OEM CONTROLLER
LK6 A/B
LK6A = NON PM140 ENDPOINT
LK6B = PM140 ENDPOINT
SEE LK7 A/B
LK7 A/B
LK7A = NON PM140 ENDPOINT
LK7B = PM140 ENDPOINT
SEE LK 6 A/B
LK8
+24V DC TO RL2 COM1
LK9
+24V DC TO RL2 COM2
LK10
+24V DC TO RL6 COM1
LK11
+24V DC TO RL6 COM2
LK12
+24V DC TO RL7 COM1
LK13
+24V DC TO RL7 COM2
LK14 A/B
LK14A = NON DRY PUMP FITTED
LK14B = DRY PUMP FITTED
LK15
PUMP CURRENT BYPASS
LK16
+24V DC TO RL8 COM2
LK17
NON – CONTROLLER HEATER
ALARM
LK18
NON – CONTROLLER HEATER
ENABLE
LK19
SPARE INT/LOCK 1 BYPASS
NOT FITTED 100/133
LK20
SPARE INT/LOCK 2 BYPASS
LK21 A/B
LK21A = PURGE SWITCH NOT
FITTED
LK21B = PURGE SWITCH FITTED
Table 3: System link configuration
Page 24
PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 24 of 24 Printed: 10-Feb-11, 9:07
8.2.3 System LED Monitoring Table
NAME
COLOUR
MONITORING
LED1
GREEN
+24V DC
LED2
RED
+15V DC
LED3
YELLOW
-15V DC
LED4
GREEN
+5V DC
LED5
RED
CM COMP OK
LED6
RED
PUMP CURRENT SWITCH
LED7
RED
N2 PRESSURE SWITCH
LED8
RED
WATER ONE
LED9
RED
WATER TWO
LED10
RED
WATER THREE
LED11
RED
VAC STAT
LED12
RED
RL10 (HOIST CONTROL)
LED13
RED
HOIST
LED14
RED
SPARE INTERLOCK 1
LED15
RED
SPARE INTERLOCK 2
LED16
RED
PUMP PURGE SWITCH
LED17
RED
RL15 (MASTER/SLAVE) ACTIVE SLAVE
Table 4: System LED monitoring
Note that when the interlock chain is complete, all LEDs are illuminated.
9. OIPT locations worldwide
UK
Oxford Instruments Plasma Technology
North End, Yatton,
Bristol, BS49 4AP
Tel: +44(0)1934 837000
Fax: +44(0)1934 837001
Email: plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
300 Baker Avenue, Suite 150
Concord, MA 01742
Phone: +1 978-369-9933
Toll Free: +1 800-447-4717
Fax: +1 978-369-8287
Email: pt.usa@oxinst.com
Germany
Oxford Instruments GmbH
Otto-von-Guericke Ring 10,
D-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122 937175
Email: plasma@oxford.de
Japan
Oxford Instruments K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email: oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People’s Republic of China (Beijing)
Oxford Instruments China
Room 714, Office Tower 3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86 106518 8160/1/2
Fax: +86 106518 8155
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
People’s Republic of China
(Shanghai)
Oxford Instruments China
Room 14-F, No.1 Plaza
800 Nanjing East Road
Shanghai 200001
Tel: +86 216360 8530
Fax: +86 216360 8535
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte. Ltd
371 Beach Road,
#02-07 Keypoint
Singapore 199597
Tel: +65 6337 6848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.sg
Taiwan
Oxford Instruments Overseas Marketing
Ltd.
1F, No 23 Jing-Shang 19th Street,
Hsinchu, Taiwan
Tel: +65 6337 6848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.sg
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