Oxford Instruments PlasmalabSystem100 Installation Data
PlasmalabSystem100
Modular Cluster System – TEOS
Installation Data
Issue 10: February 2011
PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 2 of 24 Printed: 10-Feb-11, 9:07
Contents
Page
1. Introduction ............................................................................................................ 3
2. Installation information ........................................................................................... 4
2.1 Dimensions ........................................................................................................ 4
2.2 Weights .............................................................................................................. 4
2.3 Heat load ........................................................................................................... 4
3. Services connections ............................................................................................... 8
4. Gas handling ........................................................................................................ 10
5. Services ................................................................................................................ 14
5.1 Electrical Supply requirement ........................................................................... 14
5.2 Water Cooling requirement ............................................................................... 14
5.3 Top Electrode Temperature requirement .......................................................... 14
5.4 Compressed Air requirement ............................................................................ 14
5.5 Nitrogen requirement ....................................................................................... 15
5.6 Process gas requirement .................................................................................. 15
5.7 Extraction requirement ..................................................................................... 15
6. Pump set information ........................................................................................... 16
7. Heater/chiller information ..................................................................................... 18
8. PLC interlock chain ............................................................................................... 20
8.1 General description .......................................................................................... 20
8.2 Gas box interlocks ........................................................................................... 22
8.2.1 Incompatible gases .................................................................................... 22
8.2.2 System Link Configuration Table ................................................................ 23
8.2.3 System LED Monitoring Table ..................................................................... 24
9. OIPT locations worldwide ...................................................................................... 24
Fig 1: PECVD system layout (3-frame Base pressure turbo configuraton) ..................... 5
Fig 2: PECVD system layout (2-frame) ......................................................................... 6
Fig 3: PECVD Layout (2-frame cluster upgradeable) ..................................................... 7
Fig 4: PECVD services panel ......................................................................................... 8
Fig 5: Electrical connections ........................................................................................ 9
Fig 6: 4-Line gas pod ................................................................................................ 10
Fig 7: 8-Line gas pod ................................................................................................ 11
Fig 8: 12-line gas pod ............................................................................................... 12
Fig 9: TEOS pod ........................................................................................................ 13
Fig 10: TEOS oven ..................................................................................................... 13
Fig 11: Gas box interlock chain ................................................................................. 22
Table 1: RF enable interlock chain details .................................................................. 21
Table 2: Incompatible gases ...................................................................................... 22
Table 3: System link configuration............................................................................. 23
Table 4: System LED monitoring ................................................................................ 24
Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 3 of 24 Issue 10: February 11
1. Introduction
This installation specification document gives information about the PlasmalabSystem100
to
enable customers to prepare the required environment for the system.
Note that all dimensions shown in these data sheets are typical; precise dimensions
depend on the actual equipment fit. All dimensions are given in millimetres unless
otherwise stated.
NOTE:
All information, services, dimensions etc., refer only to the
PlasmalabSystem100, i.e. plasma processing at up to 200 mm wafers in
MESC compatible chambers.
Consider access when planning the system installation. Ensure that good access is
available to parts of the system that require maintenance. Ensure that all isolation points
for the system services are easily accessible.
Oxford Instruments Plasma Technology conducts a programme of continual product
development, and reserves the right to change the design and/or specification of
equipment without notice. The details contained in this document were correct at the
time of printing but should be confirmed immediately prior to delivery. Details of the
clean room interface will be advised at the time of delivery.
PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 4 of 24 Printed: 10-Feb-11, 9:07
2. Installation information
2.1 Dimensions
System dimensions are given in Fig 1, Fig 2 and Fig 3. Gas handling component
dimensions are given in Fig 6, Fig 7 and Fig 8. Teos pod and TEOS oven dimensions are
given in Fig 9 and Fig 10 respectively. Pump dimensions are given in Section 6.
Heater/chiller dimensions are given in Section 7.
2.2 Weights
Typical weights of system components:
2-frame system: 290 kg
3-frame system: 360 kg
6-line Gas pod: 35 kg
TEOS pod: 35 kg
TEOS oven: 30 kg
12-line Gas pod: 65 kg
Pumps: See Section 6 (Pump set information).
Heater/chillers: See Section 7 (Heater/chiller information).
2.3 Heat load
The typical heat load for the clean room installation is:
Operating: 2 kW
Passive: 1.5 kW
Note that these specifications do not include externally sited components, e.g. pumps,
heater/chillers, transformers, etc..
Heat loads for typical chillers are given in the following table. The heat loads are quoted
for a bath temperature of 20°C and 100% cooling.
Chiller Model
Heat Load
FP51-SL
3.5 kW
FL601
1.1 kW
FC1600T
2.0 kW
Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 5 of 24 Issue 10: February 11
1412
1630
747
550
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 1: PECVD system layout (3-frame Base pressure turbo configuraton)
NOTE: For services panel details, see Fig 4.
PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 6 of 24 Printed: 10-Feb-11, 9:07
1412
1090
747
550
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 2: PECVD system layout (2-frame)
NOTE: For services panel details, see Fig 4.
Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 7 of 24 Issue 10: February 11
1795
446
550
1412
514
244
865
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 3: PECVD Layout (2-frame cluster upgradeable)
NOTE: For services panel details, see Fig 4.
PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 8 of 24 Printed: 10-Feb-11, 9:07
3. Services connections
711
738.5
746
781
816
851
886
921
956
Distance
to floor
level
385 415 461.5
3/8“ SWAGELOK
3/8“ SWAGELOK
3/8“ SWAGELOK
1/4“ SWAGELOK
1/4“ SWAGELOK
1/4“ VCR
(Additional
process gas
when required)
1/4“ VCR
TOP ELECTRODE
& AMU COOLING
OUTIN
OUT
IN
OUT
IN
OUTIN
LF GENERATOR COOLING
PROCESS CHAMBER
COOLING
TURBO COOLING
N2 IN
AIR IN
PROCESS
GAS
AIR OUT
CHAMBER BACKING
4 MM PUSH-FIT
LEGRIS
PLC SERVICE
ACCESS CONNECTOR
(THIS IS AN
ALTERNATIVE PC
COMMUNICATIONS
CONNECTION)
NOT
(Only used if
a turbo pump
is fitted)
(Only used if
chamber cooling
is fitted)
Distance
to left-hand
edge of frame
(viewed from rear
of system)
For the 3-frame system Automatic
Load Lock Services Panel, this
distance is 407 to the right-hand
edge of the frame (viewed from
rear of system).
For the 2-frame system Automatic
Load Lock Services Panel, this
distance is 1009 to the left-hand
edge of the frame (viewed from
rear of system)
Fig 4: PECVD services panel
NOTE: The Automatic load lock services panel is similar to that shown above but only
the CHAMBER BACKING connector is used.
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