Omron ZS-LD40T, ZS-LD20T, ZS-LD20ST, ZS-LD10GT, ZS-LD15GT Datasheet

Advanced Industrial Automation

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Sup er b scal ab il it y

ZS FAMILY SERIES

T h e s c a la b l e me a su r e m e n t s e ns o r fo r a l l s u r f a ce s

Key features

• Accurate and fast – 0.25 μm at less

than 110 μs sampling time

• One sensor fits all – stable

measurement of virtually any

material structure such as glass,

foil or rubber

• Powerful – can accurately measure

thickness, warpage and evenness

thanks to its multi-unit controller

• Smart – data storage unit for

traceability and data logging

• Easy to use – built-in user interface

and powerful, user-friendly PC

configuration tool

ZS laser displacement sensors comprise a smart,

modular and scalable family that offers a platform

approach to solve the most challenging measurement

tasks. Based on Omron CMOS technology, the ZS-L

measures at sub-micron accuracy in a fraction of a

millisecond – and virtually any texture. The ZS-L series

comes with a sensor controller, a data storage unit and

a multi-controller that coordinates up to 9 units.

It enables accurate measurement of material

thickness, evenness and warpage.

Enhanced flexibility
through smart scalability

Sensor heads ZS-LD

CMOS technology packed into an

ultra-compact sensor head.

• Wide choice of sensor head

from 20 mm to 350 mm

sensing distance

• Digital technology leads

to high immunity to noise

disturbance, allowing long

cable extension up to 22 m

• Up to IP67 protection class

• Laser class 2

Sensor

Head

20

50

80

350

40

200

130

ZS-LD350S
(long range)

ZS-LD200

ZS-LD130

ZS-LD80

ZS-LD50

ZS-LD40T

ZS-LD20T

900 x 25 µm

Laser spot/beam size

2000 x 35 µm

900 x 60 µm

900 x 60 µm

900 x 100 µm

600 x 70 µm

240 µm dia.

CMOS based sensor head

Regular-reflective
models

Diffuse-reflective
models

Measuring centre

distance

Advanced Industrial Automation

SmartMonitor tool

Professional tool for

configuration, set up and

monitoring.

• Provides high-speed

simultaneous multi-channel

graphs

• Includes Excel macro for

simple analysis

• Supports documentation and

quality assurance tasks

ZS-DSU data storage unit

Fast data storage allowing easy

debugging and system set up.

• High-speed sampling rate:

150 μs

• Powerful support for logging

data using various trigger

functions

• Supports compact flash card

for extended memory

ZS-MDC multi-sensing
controller unit

Coordinates data transfer between

sensor controllers and performs

high-speed calculation for

complex measurements tasks.

• Coordinates data between

up to nine controllers

• Fast calculation of

measurements such as:

- Thickness

- Evenness

- Warpage

- 4 different tasks

- Free math

ZS-LDC sensor controller

Ensures you always have the best

measurement performance.

• Supports a wide range of

sensor heads from short range

(20 mm) to long range

(350 mm)

• High accuracy – 0.4 μm

• Fast response time – 110 μs

• USB and RS-232 port

• Intuitive set up through

built-in keypad and digital

operator

Control

Operate

Measures various types of different targets, offering high accuracy on all surfaces

CMOS technology enables unique, surface-independent detection

Business Card size

Monitor Record

Up to 9 sensor controllers

Type profile inspection Wafer thickness and warping inspection Glass evenness inspection PC board height inspection

High-speed bus

Smart setting software for advanced functionality

The SmartMonitor Zero Professional software provides

a function that changes measurement levels (edge thresholds)

to reduce error caused by light penetration, enabling many

types of PCBs to be handled. The measurement level can be

increased to adjust the measurement position for peak light

reception. This function enables stable detection of PCB

surfaces. If there is insufficient light in high-speed mode,

gain settings (0 to 5) can be used to compensate.

To achieve stable sensing of PCBs, resins, black rubber, and

other light-penetrating objects, all you need to do is select the

surface type.

ZS-LD50/LD80
Stable measurements for PCBs, black resin and metal

Smart set up for
different surfaces

Direct measurement of PCB surface profile structure

Reflection signal quality is traced
during measurement. Reliable and
safe operation is ensured through
easy set up and control

Simply select your surface
type and the ZS smart
sensor concept sets all
specific parameters for
your application

Direct setting with
function keys

Advanced Industrial Automation

A New Glass Mode
Different reflections can be measured on the CMOS

Detecting transparent objects

When a light beam hits the surface of an object, a certain

amount of the light is reflected, some is transmitted through

the object and the rest is absorbed. In the case of transparent

materials such as glass, the ZS-L can obtain reflected light from

the top surface, from the middle and from the bottom section

of glass.

• Superior features for semiconductor wafer, glass and other

measurements requiring precision.

• An unprecedented stationary measurement precision

of 0.01 μm; the highest in this product class.

• Enables stable measurement of height and undulations

in transparent, coated glass on worktables. Menus let you

easily set the measurement conditions for a wide range

of glass to achieve stable measurements.

• Outstanding measurement stability and high-speed

response at submicron resolution enables measurement

of flat glass thickness during the production process.

ZS-LD20T/ZS-LD40T
The smart way to measure glass and mirror surfaces

Glass

Glass thickness

Glass gap

Set sensing directly

FUN (setting mode)

Direct setting with
function keys