Omron ZN-A2502, ZN Series, ZN-A2502D, ZN-A4105D, ZN-A4105 System Manual

Clean Sensing System

ZN Series

System Manual

Cat. No. Z267-E1-01

Introduction

Thank you for purchasing the ZN.
This manual provides only information, such as system components and setup procedures, that
is required when using the ZN Series in a system.
For details on product functions, performance and handling methods of individual products, refer
to the Instruction Sheet packaged with the respective product.
When using the ZN, be sure to observe the following:

• The ZN must be operated by personnel knowledgeable in electrical engineering.

• To ensure safe use of the product, please read the Instruction Sheet packaged with each
product and this manual to deepen your understanding of the product.

• Please keep this manual and the Instruction Sheet packaged with each product in a safe place
so that they can be referred to whenever necessary.

Introduction

Section 1

Section 2

Section 3

Section 4

APPLICATION CONSIDERATIONS (Please Read)

FEATURES

UPGRADING THE SYSTEM

BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

APPENDICES

Introduction
‚Í‚¶‚ß‚É ‘æ 1 Í‘æ 2 Í‘æ 3 Í‘æ 4 Í

Section 1 Section 2 Section 3 Section 4

System Manual

Clean Sensing System
ZN Series

Introduction

Introduction

READ AND UNDERSTAND THIS DOCUMENT

Please read and understand this document before using the products. Please consult your OMRON
representative if you have any questions or comments.

WARRANTY

OMRON’s exclusive w arranty is that the products are f ree from defects in materials a nd workmanship for a
period of one year (or othe r pe ri od if specified) from date of sale by OMRO N .

OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGA RDING NON­INFRINGEMENT, MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS.
ANY BUYER OR USER ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT
THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON
DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR IMPLIED.

LIMITATIONS OF LIABILITY

OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES,
LOSS OF PROFITS OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS,
WHETHER SUCH CLAIM IS BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY.

In no event shall responsi bility of OMRON for any act exceed the individual price of the product on which
liability is asserted.

IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS
REGARDING THE PRODUCTS UNLESS OMRON’S ANALYSIS CONFIRMS THAT THE PRODUCTS WERE
PROPERLY HANDLED, STORED, INSTALLED, AND MAINTAINED AND NOT SUBJECT TO
CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE MODIFICATION OR REPAIR.

SUITABILITY FOR USE

THE PRODUCTS CONTAINED IN THIS DOCUMENT ARE NOT SAFETY RATED. THEY ARE NOT DESIGNED OR
RATED FOR ENSURING SAFETY OF PERSONS, AND SHOULD NOT BE RELIED UPON AS A SAFETY COMPO­NENT OR PROTECTIVE DEVICE FOR SUCH PURPOSES.
Please refer to separate catalogs for OMRON’s safety rated products.

OMRON shall not be responsible for conform ity with any standards, codes, or regulations that apply to th e
combination of produc ts in the customer’s application or us e of th e pr oduct.

At the customer’s request, OMRON will provide applicable third party certification documents identifying ratings
and limitations of use that apply to the products. This information by itself is not sufficient for a complete
determination of the suitability of the produ cts in comb ination w ith the en d produc t, machi ne, syste m, or other
application or use.

The following are some examples of applications for which particular attention must be given. This is not
intended to be an exhaustive list of all possible uses of the products, nor is it intended to imply that the uses
listed may be suitable for the p ro ducts:

• Outdoor use, uses inv olving potential chemical contamination or electrical interference, or conditions or
uses not described in this document.

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ii

Introduction

• Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical
equipment, amu sem ent ma chi ne s, v eh ic le s, saf et y eq ui pme nt , an d ins t al la t io ns su bj ec t t o separate industry
or government regulations.

• Systems, machin es, and equipment that could present a ris k to lif e or pro per t y.

Please know and obse rv e all p ro hi bi tio ns of use applicable to the products.
NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR

PROPERTY WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO
ADDRESS THE RISKS, AND THAT THE OMRON PRODUCT IS PROPERLY RATED AND INSTALLED FOR
THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM.

PERFORMANCE DATA

Performance data given in this document is provided as a guide for the user in determining suitability and does
not constitute a warranty. It may represent the result of OMRON’s test conditions, and the users must correlate
it to actual application requirements. Actual performance i s su bj ect t o th e O M RO N Warranty and Limitations of
Liability.

CHANGE IN SPECIFICATIONS

Product specifications and accessories may be changed at any time based on improvements and other
reasons.

Introduction

It is our practice to change model numbers when published ratings or features are changed, or when significant
construction chang es are made. However, some specifications o f the product may be changed without any
notice. When in do ubt, special m odel numbe rs may be a ssigned to fix or establish key s pecificat ions for your
application on your request. Please consu lt with your OMRON repres entative at any time to conf irm actual
specifications of purchased products.

DIMENSIONS AND WEIGHTS

Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when
tolerances are shown.

ERRORS AND OMISSIONS

The information in this do cument has been carefully checked and i s believed to be accurate; however, no
responsibility is assum ed for clerical, typographical, or proofreading errors, or omissions.

PROGRAMMABLE PRODUCTS

OMRON shall not be responsible for the user’s prog ra m m in g of a pro gr ammable product, or any conse quence
thereof.

COPYRIGHT AND COPY PERMISSION

This document shall not be copied for sales or promotions w ithout permission.

This document is protected by copyri ght and is inten ded solely for use in conjunc tion with the pr oduct. P lease
notify us before cop ying or reproducing this docum ent in any manner, for any other purpose. I f copying or
transmitting this document to another, please copy or transmit it in its entirety.

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iii

Introduction
Precautions for Safe Use

Introduction

Precautions for Safe Use

The following points are important to ensure safety, so make sure that they are strictly observed.

■ Power Supply and Wiring

• When connecting multiple Air Clean Units to build a system, use a commercially
available LAN cable (straight type: Category 5E or higher).

• On models that can be connecte d t o A ir Clea n Units, such as the Air P artic le S ens or
(ZN-PDA12) and Interfac e Unit (ZN-SF12), use the cable from the body to directly
connect to the unit.

• To extend the cable mentioned above, a commercially available LAN connector
female to female, straight type) and a LAN cable (straight type: Category 5E or
higher) must be used.

• The cables must be 100 m or shorter in total length.

For details on other precautions for safe use and precautions for correct use,
refer to the Instruction Sheet for the respective device, and make sure that they
are strictly observed.

iv

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Editor's Note

● Title of each section

● Header

● Cross-header

● Index label

● Overview and points of the

function described

● Operation procedure and supplementary explanat ion

Indicates the contents of the page.

Shows the chapter number and contents.

Shows the operation flow and setup
method.

Explains the operation procedure and the display status
resulting from execution of the operation.
Helpful information regarding operation and reference
pages is introduced here using symbols.

* This page does not exist.

● Overview of the section

Page Format

Introduction

Editor's Note

Introduction

System Manu al

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v

Introduction
Editor's Note

Introduction

Notational Conventions

■ Menu

In this manual, menu items displayed on the screen are enclosed with [ ].

■ Operation procedure

Operation steps are numbered to indicate their order .

■ Visual Aids

Indicates points that are important to achieve the full product performance, such as operational
precautions and application procedures.

Indicates pages where related information can be found.

Indicates information helpful in operation.

vi

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CONTENTS

Introduction

CONTENTS

Introduction

Precautions for Safe Use iv
Editor's Note v

Page Format v
Notational Conventions vi

CONTENTS vii

Section 1 FEATURES 1

What is the "Clean Sensing System?" 2

System Features 2
Features of the Clean Sensing System 4

System Configuration Examples 7

Direct Clean Sensing System 7
Multi-Clean Sensing System 11

CONTENTS

Section 2 UPGRADING THE SYSTEM 13

Before Upgrading the System 14

Flow of Operations for Upgrading the System 14
Installing the Exclusive Monitoring Software 15

Setup Methods Suited to Specific Applications 18

Automatically Adjusting the Air Volume Level 18
Monitoring/Logging the Amount of Particles 25
Detecting the Cleanliness of Multiple Processes 31

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vii

Introduction
CONTENTS

Introduction

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS 35

Feedback Control 36

CONTENTS

What is "Feedback?" 36
How Feedback Control Works 40

Clean Sensing 44

Principle of "Particle Count" 44
What is "Cleanliness?" 45

Section 4 APPENDICES 47

Maintenance 48
Troubleshooting 50

Troubleshooting 50
Error Messages and Countermeasures 51

Specifications and Dimensions 53
List of Products 66
INDEX 69
Revision History 72

viii

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Section 1
FEATURES

What is the "Clean Sensing System?" 2

System Features 2
Features of the Clean Sensing System 4

System Configuration Examples 7

Direct Clean Sensing System 7
Multi-Clean Sensi ng Sy st em 11

Section 1 FEATURES

System Manu al

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1

Section 1

OPE1

OPE2

OPE3

■ Clean Monitoring System (ZN-SFW Series)

Monitoring the amount of particles at multiple points in
manufacturing processes is important in improving
product quality. By connecting Interface Units, you can
log the measured data of Air Particle Sensors at up to ten
locations at once on a personal computer.
The Electrostatic Sensor (ZJ-SD) also can be connected,
which means that you can al so asce rtain the re latio nship
between the amount of s tatic electricity and the amount
of particles.

The clean sensing system continuously s enses the amount of particles
in a clean boot h or cl ean b ench, and c ontrols the ai r vol ume le ve l of t he
Air Clean Unit. This way, it can easily ensure an environment having a
fixed cleanliness class at all times.
An environment for removing dust and neu tralizing static electri city can
be built by incorporating a new-concept Ionizer Unit in this system.

What is the "Clean Sensing System?"

What is the "Clean Sensing System?"

Section 1 FEATURES

System Features

OPE3

OPE2

OPE1

Z
N

­S
F

12

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2

What is the "Clean Sensing System?"

■ Air Clean Unit (ZN-A Series)

Unique twin-blower structure (ZN-A2502) achieves light weight
and large air volume.
Compact but more powerful.
Incorporating a clogged main filter (HEPA) detection function.
Visibility is improved by indicators located on two corners of
the body.

■ Air Particle Sensor (ZN-PD Series)

High-performance fan used for air suction to ensure
measurement at all times.
Use of a semiconductor laser and high-sensitivity optical
design in the sensor achieves measurement of minute
particles of 0.3 µm, 0.5 µm and 1.0 µm in diameter.

Thinnest in industry, large air volume

■ Ionizer Unit (ZN-J Series)

Directly mounted on Air Clean Unit
Open structure does not b lock the laminar ai rflow from the Ai r
Clean Unit.
No more troublesome wiring required. Installation man-hours
can be considerably reduced.

An industry first, one-touch dust removal and static neutralization

Smallest in industry, constant measuring

Main Applications

Electronic component
production processes

Storage or test

environments

Cell manufacturing

processes

Section 1

Section 1 FEATURES

System Manu al

ZN

3

Section 1
What is the "Clean Sensing System?"

Features of the Clean Sensing System

Section 1 FEATURES

■ Feedback-based Automatic Adjustment of Air Volume

The air volume level of the Air Clean Unit can be automati cally controlled based on the
amount of particles measured by the Air Par ticle Sensor. The cleanli ness class in clean
booths can be maintained at the opt imum air volume level in propor tion to the amount of
particles from rapid air feed through to fine air volume operation in the power saving mode.

Setting Method p.18

4

■ Monitoring/Logging the Amount of Particles

The cleanlines s class i nside clean b ooths can be ver ified and ascertained by the amount of particle s
per unit volume. The amount of particles can be verified on the Sensor and the Amplifier Unit.
Measured values can be easily logged on a personal computer using Interface Units and the
exclusive monitoring software (Realtime Clean Air Monitor). Changes in the amount of particles
over time observed in this way can be made use of as data for improving product quality.

Setting Method p.25

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OPE3

OPE2

OPE1

Section 1

Max. 9 units connected

Max. 10 units connected

What is the "Clean Sensing System?"

■ Improving Product Quality by Multi-point Measurement

Since Air Clean Units and Air Particle Sensors can be conn ected to each other, the
amount of air particles in multiple clean booths installed in processes can be
comprehensively de tected and controlled. Which process is worseni ng in cleanliness
can be linked to quality control for continual management.

Setting Method p.31

Section 1 FEATURES

System Manu al

ZN

5

Section 1

Ion Balance Sensor

What is the "Clean Sensing System?"

■ Simultaneous Dust Removal and Static Neutralization

The Ionizer Unit ZN-J series, the first in industry to be added on later to an Air Clean

Section 1 FEATURES

Unit, provides you with a new clean environment capable of removing dust and
neutralizing static electricity.

• Sim ultaneous Removal of Particles and Static Electricity

A variable DC sy stem is used for electrostatic di scharge. This system c an neutralize
static electricity in wide spaces.
Two ion balance sensors provide c onstant feedback to maintain uniform neutr alizing
performance.

• Simultaneous Monitoring of Charged Amount of Workpieces

Electrostatic Sensor ZJ-SD can be connected to the clean sensing system. The
problem of adhesion of particles can be solv ed by acc urately asc ertaining the char ged
amount of the workpiece, and using the Ionizer Unit to approp riately neutralize static
electricity.
Also, since ZJ-SD data can also b e cap tured on a person al c omputer via the Inte rfac e
Unit, the amount of particles and charged amount can be acquired and collected
simultaneously, and made use of as basic data for improving product quality.

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6

System Configuration Examples

S

For details on settings, see p.25.

System Configuration Examples

Section 1

Direct Clean Sensing System

■ Data Logging

Clean Monitoring System

ZN-SFW11

Realtime
Clean Air Monitor

Interface

Unit

Z

N

­S
F

1
1

Amplifier
Unit

Section 1 FEATURES

Air Particle Sensor

ensor

ZN-PD03

ZN-PDA11

DC power supply

[Features]

• Monitoring/Logging the Amount of Particles

System Manu al

7

ZN

Section 1

S

r

A

For details on settings, see p.18.

To extend the cable mentioned above, a
commercially available LAN connector (female to
female, straight type) and a LAN cable (straight
type: Category 5E or higher) must be used.

System Configuration Examples

■ Feedback

Section 1 FEATURES

C adapter (provided)

Or, DC power supply

Air Clean Unit

ZN-A2502
ZN-A4105

Air Particle Sensor

enso

Amplifier
Unit

ZN-PD03

ZN-PDA12

Cable length: standard 2 m

[Features]

• Feedback-based Automatic Adjustment of Air Volume

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8

■ Feedback and Data Logging

Z
N

­S
F

1
1

Air Clean Unit

ZN-A2502
ZN-A4105

[Features]

• Feedback-based Automatic Adjustment of Air Volume

• Monitoring/Logging the Amount of Particles

Air Particle Sensor

Interface

Unit

Realtime
Clean Air Monitor

ZN-PD03

Amplifier
Unit

ZN-PDA12

Clean Monitoring System

ZN-SFW11

AC adapter (provided)

Or, DC power supply

Cable length: standard 2 m

For details on settings, see p.18, p.25.

To extend the cable mentioned above, a
commercially available LAN connector (female to
female, straight type) and a LAN cable (straight
type: Category 5E or higher) must be used.

Section 1

System Configuration Examples

Section 1 FEATURES

System Manu al

ZN

9

Section 1

For details on settings, see p.18, p.25.

To extend the cable mentioned above, a commercially available LAN
connector (female to female, straight type) and a LAN cable (straight type:
Category 5E or higher) must be used.

System Configuration Examples

■ Dust Removal and Static Neutralization

Connection Example with Different Models (Electrostatic Sensor)

Section 1 FEATURES

Air Clean Unit

AC adapter (provided)

Or, DC power supply

ZN-A2502
ZN-A4105

Connector cable
(provided)

Clean Monitoring System

Realtime
Clean Air Monitor

Electrostatic

Sensor

ZJ-SD100

ZN-SFW12

Interface

Unit

OPE3

OPE2

OPE1

ZN

­SF

1
2

Amplifier
Unit

ZJ-SDA11

Cable length: standard 2 m

Sensor

ZN-J25A
ZN-J41A

Ionizer Unit

Air Particle Sensor

Sensor

ZX-CAL2

Amplifier
Unit

ZN-PD03

ZN-PDA11

Calculating
Unit

OPE3

OPE2

OPE1

ZERO ENABLE

(kV)

Z
J

-S
D
A
1

1

DC power

supply

10

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System Manu al

[Features]

• Simultaneous Monitoring of the Ion Balance

• Feedback-based Automatic Adjustment of Air Volume

• Monitoring/Logging the Amount of Particles

ZN-A2502
ZN-A4105

Air Clean Unit

Air Particle Sensor

Calculating Unit

ZX-CAL2

ZN-PD03

Sensor

ace

Unit

e

r

ZN-SFW12

Clean Monitoring System

Commercially available LAN cable

(straight type: Category 5E or higher)

DC power

supply

[Features]

• Feedback-based Automatic Adjustment of Air Volume

• Monitoring/Logging the Amount of Particles

• Detecting the Cleanliness of Multiple Processes

AC adapter

(provided)

Or,

DC power supply

Cable length: standard 2 m

For details on settings, see p.31.

To extend the cable mentioned above, a commercially available LAN
connector (female to female, straight type) and a LAN cable (straight type:
Category 5E or higher) must be used.

Realtim
Clean Air Monito

Multi-Clean Sensing System

Interf

Section 1

System Configuration Examples

Section 1 FEATURES

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System Manu al

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11

Section 1
System Configuration Examples

MEMO

Section 1 FEATURES

12

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Section 2
UPGRADING THE SYSTEM

Before Upgrading the System 14

Flow of Operations for Upgrading the System 14
Installing the Exclusive Monitoring Software 15

Setup Methods Suited to Specific Applications 18

Automatically Adjusting the Air Volume Level 18
Monitoring/Logging the Amount of Particles 25
Detecting the Cleanliness of Multiple Processes 31

Section 2 UPGRADING THE SYSTEM

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13

Section 2

p.18 p.25 p.31

p.48

Before Upgrading the System

Before Upgrading the System

Flow of Operations for Upgrading the System

Section 2 UPGRADING THE SYSTEM

Preparation

Installation

Connections

Checks

Direct Clean Sensing System

Automatically Adjusting
the Air Volume Level

Refer to the Instruction Sheet packaged with each device.

• Setting the ID of the Air Clean
Unit

• Connecting the Air Clean Unit
and Air Particle Sensor

• Connecting the Air Clean Unit
power supply

Checking communications Checking system operation Checking system operation

Monitoring/Logging
the Amount of Particles

Installing the exclusive monitoring software

• Connecting the Air Particle
Sensor and Interface Unit
together

• Connecting the Interface Unit
and personal computer

• Connecting the Air Particle
Sensor power supply

Multi-Clean Sensing System

Detecting the Cleanliness of
Multiple Processes

• Setting the ID of the Air Clean Unit

• Connecting the Air Clean Unit
and Interface Unit
Connecting Air Clean Units to each other

•

• Connecting the Air Particle Sensor
and Interface Unit together

• Connecting the Interface Unit
and personal computer

• Connecting the Air Particle
Sensor power supply
Connecting the Air Clean Unit power supply

•

14

Operations
and settings

Resetting
during
operation

Maintenance

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System Manu al

Setting the feedback conditions

Starting operation

• Resetting the feedback method
Resetting the target cleanliness class

•

• Resetting the feedback cycle
Resetting the low power air volume level

•

•

Resetting the high power air volume level

• Resetting the high power time

Trend graph display/data logging

Starting monitoring/logging Starting operation

Setting the feedback conditions

• Resetting the feedback method
Resetting the target cleanliness class

•

• Resetting the feedback cycle
Resetting the low power air volume level

•

• Resetting the calculation type
Resetting the high power air volume level

•

• Resetting the high power time

Section 2

Clean Monitoring System

(ZN-SFW11/SFW12)

Realtime
Clean Air Monitor

Interface Unit

Numerical display of measured
amount of particles

Graphic display of changes in
measured values over time

Logging of data

Display and setting of Air Particle Sensor and Interface Unit settings

Before Upgrading the System

Installing the Exclusive Monitoring Software

The Exclusive Monitoring Software (Realtime Clean Air Monitor) tool is provided for the
ZN Series. This tool allows you to set sensing functions, acquire and collect the amount
of measured particles, and display this information as a graph on a personal computer.

ZN-SF12

• Monitoring of measurement results

Section 2 UPGRADING THE SYSTEM

• Function setup support

■ Operating Environment

The following operating environment for Exclusive Monitoring Software is
recommended. Check the environment before installing the software.

Item Condition
OS Windows 2000/XP
CPU PentiumIII 850 MHz or faster (2 GHz or faster recommended)
RAM 128 MB or more (256 MB or more recommended)
Free space on hard disk At least 50 MB
Display screen 1024 x 768 dots

High Color (16-dot) or higher

• Windows is a trademark or registered trademark of Microsoft Corporation.

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15

Section 2 UPGRADING THE SYSTEM

Section 2
Before Upgrading the System

■ How to Install/Uninstall the Software

The following describes the preparations for using Exclusive Monitoring Software.

• Installing Exclusive Monitoring Software

Before you install the software, quit all other programs that are running. Also, note that
installation may take a long time if antivirus software is installed on the personal
computer.
Log on as an Admin istrator or a us er, such as a computer adm inistrator, having rights
to change system settings.

1. Turn the personal computer's power supply ON to start up Windows.

2. Insert the "Exclusive Mo nitoring Software" CD- ROM into the CD-R OM drive on

the personal computer.

3. The program is launch ed autom aticall y and the in stallatio n screen is display ed.

Follow the on-screen instructions to install the software.

If the installation is not automatically started, execute "setup.exe" in the CD-ROM.

• Uninstalling Exclusive Monitoring Software

Before you uninstall the software, quit al l other programs that are running. A lso, note
that uninstallation may take a lon g time if antivirus software is installed on the per so nal
computer.
Log on as an Admin istrator or a us er, such as a computer adm inistrator, having rights
to change system settings.

1. Turn the personal computer's power supply ON to start up Windows.

2. Select [Settings]-[Control Panel] from the [Start] menu of your personal

computer.

3. Double-click [Add/Remove Programs].

4. Select [Realtime Clean Air Monitor] from the list, and click the [Change/Remove]

button.

5. Click [OK].

16

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Section 2

Side with no tab

Before Upgrading the System

■ Starting Up the Exclusive Monitoring Software

After installation is completed, start up E xclusive Monitoring S oftware by t he followin g
procedure.

1. Check that the current/voltage switc h on the

base of the Interface Unit is set to the side
that has no tab (default).

Section 2 UPGRADING THE SYSTEM

2. Set the Air Particle Sensor Amplifier Unit to

the RUN mode.

CNT/CF

3. Connect the Interface Unit to the personal computer.

To connect to a personal computer (PC/AT compatible), use a 9-pin D-sub cross cable (female to female).

p.64

4. Connect the Interface Unit to the Amplifier Unit.

5.

Turn the power supply of each device ON.

On the ZN-SF11, the ERR indicators for the sensor
communications indicator and external terminal
communications indicator go out.
On the ZN-SF12, the model indication when it is
started up goes out, and the indication changes to
the normal display (measured value display, etc.).
The Interface Unit is now ready for communications.

Power indicator

Sensor communication

indicator (BUSY/ERR)

External terminal communication
indicator (BUSY/ERR)

6.

Start up the exclusive monitoring software.

Communications is automatically started.

■ Exiting the Exclusive Monitoring Software

Exit Exclusive Monitoring Software by the following procedure.

1. Select [File]-[Close] from the Exclusive Monitoring Software menu bar.

System Manu al

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17

Section 2 UPGRADING THE SYSTEM

1. Setting the ID of the Air Clean
Unit

2. Connecting peripheral devices

3. Checking communications

4. Setting the feedback conditions

p.18

p.19

p.19

p.20

4-1. Rapid feedback
4-2.

Constant feedback

p.23

Section 2
Setup Methods Suited to Specific Applications

Setup Methods Suited to Specific Applications

Automatically Adjusting the Air Volume Level

Feedback control is perfor med between the Air Particle Sensor an d Air Clean Unit to
feed in highly clean air (i.e. air containing little dust).
The following describes an exam ple where the air vo lume le vel of the Air Cle an Unit is
automatically adjusted.

To use multiple Air Particle Sensors or multiple Air Clean Units to apply feedback on the control
loop, configure a multi-clean sensing system using the Interface Unit (ZN-SF12).

1. Setting the ID of the Air Clean Unit

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18

1. Set DIP switch SW1 on the rear of the Air Clean Unit to ON (external

communications control enabled).

2. Set the ID rotary switch on the rear of the Air Clean Unit to 0 (0ch).

p.11

The ID rotary switch must always be set to "0" (0ch) when using the Air Particle Sensor
(ZN-PDA12). Feedback communications cannot be performed when the ID is set to
other than "0" (0ch).

Section 2

Setup Methods Suited to Specific Applications

2. Connecting peripheral devices

Connect the Air Clean Unit to the Air Particle Sensor to supply power to the Air Clean Unit.

System Configuration Examples p.8

3. Checking communications

Check that communications between the units is being performed correctly by manually switching the air
volume level of the Air Clean Unit on the Air Particle Sensor.

1. Set the mode switch of the Ai r Parti cl e

Sensor Amplifier Unit to the FUN
mode.

2. Display [SPCL] on the main display.

Section 2 UPGRADING THE SYSTEM

3. Display [ACU] on the sub-display.

4. Press the ENT key.

5. Display [CNTRL] on the main display.

6. Select [MNUAL].

(default value: MANUAL)

7. Press the ENT key.

This sets the selected mode.

System Manu al

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19

Section 2 UPGRADING THE SYSTEM

Section 2
Setup Methods Suited to Specific Applications

8. Display [LWIND] on the main display.

9. Set the air volume level of the Air

Clean Unit.

Set the desired air volume level, and check that
the air volume level is changed. (range: 1 to 5,
default value: 1)

10. Press the ENT key.

Check the air volume level of the Air Clean Unit.
If the air volume changes, this indicates that
communications is being performed normally.

If the air volume does not change:
Check the Air Clean Unit settings, Air Particle Sensor operation, and the wiring of
connected cables.
When the Air Clean Unit settings have been changed, turn the power supply OFF and
then back ON to enable the settings.

4. Setting the feedback conditions

Set the feedback conditions for the Air Clean Unit.
There are two feedback methods, and each of their setup methods is different.

Rapid feedback p.20

Constant feedback p.23

For details on feedback operation and setup parameters, see "Feedback Methods."

p.38

4-1. Rapid feedback

Set this method to quickly improve the environment when a drop in cleanliness is detected.

Selecting the air volume level control method

1. Display [CNTRL] on the main display.

Set the method for controlling the air volume
level control of the Air Clean Unit.

2. Select [AUTO].

Set air volume level control of the Air Clean Unit
to automatic.

3. Press the ENT key.

This sets the selected mode.

20

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System Manu al

Setup Methods Suited to Specific Applications

Selecting the feedback method

4. Display [FBTYP] on the main display.

Set the feedback method.

Section 2

5. Display [RAPID] on the sub-display.

6. Press the ENT key.

This sets the rapid feedback method.

Setting the target cleanliness

7. Display [CLASS] on the main display.

8. Select the target cleanliness class.

9. Press the ENT key.

This sets the specified target value.

Section 2 UPGRADING THE SYSTEM

Setting the low power air volume level

10. Display [LWIND] on the main display.

11. Set the low power air volume level of

the Air Clean Unit.

Set the air volume level for when the target
cleanliness is satisfied.

12. Press the ENT key.

This sets the specified air volume level.

System Manu al

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21

Section 2
Setup Methods Suited to Specific Applications

Setting the high power air volume level

13. Display [HWIND] on the main display.

Section 2 UPGRADING THE SYSTEM

14. Set the high power air volum e level of

the Air Clean Unit.

Set the air volume level within 1 to 5 (default value: 5).
Set the air volume level for when the target
cleanliness is not satisfied.

For the high power air volume level, always set an air volume greater than the low power
air volume level.
Feedback will not function properly if a smaller value is set.

15. Press the ENT key.

This sets the specified air volume level.

Setting the high power time

16. Display [HTIME] on the main display.

Set the high power time.

17.

Set the high po wer time of th e A ir C lea n U nit.

Set the time (s) within 0 to 999 (default value: 60).
Set the time that the high power air volume level
is to be held for.

22

18. Press the ENT key.

This sets the specified time.

The time that the high power air volume level is actually held is an integer multiple of the
feedback cycle (i.e. measurement cycle).
Example:
Measurement cycle: 60 s
When the high power time is set to "100 s", the actual high power time is 120 s.

19. Set the mode switch to RUN.

This starts feedback control operation.

When the setting is next used, feedback is automatically started simply by turning the Air
Clean Unit power supply ON.

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System Manu al

Setup Methods Suited to Specific Applications

4-2. Constant feedback

Set this method to stabilize cleanliness in the booth (area) at all times.

Selecting the air volume level control method

1. Display [CNTRL] on the main display.

2. Select [AUTO].

Set air volume level control of the Air Clean Unit
to automatic.

3. Press the ENT key.

This sets the selected mode.

Selecting the feedback method

Section 2

Section 2 UPGRADING THE SYSTEM

4. Display [FBTYP] on the main display.

Set the feedback method.

5. Display [CONST] on the sub-display.

6. Press the ENT key.

This sets the constant feedback method.

Setting the target cleanliness

7. Display [CLASS] on the main display.

8. Select the target cleanliness class.

System Manu al

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23

Section 2
Setup Methods Suited to Specific Applications

9. Press the ENT key.

This sets the specified target value.

Setting the low power air volume level

Section 2 UPGRADING THE SYSTEM

10. Display [LWIND] on the main display.

11. Set the low power air volume level of

the Air Clean Unit.

Set the air volume level within 1 to 5 (default
value: 1).
Set a limit value for the air volume beyond which
air is not to be fed.

12. Press the ENT key.

This sets the specified air volume level.

13. Set the mode switch to RUN.

This starts feedback control operation.

When the setting is next used, feedback is automatically started simply by turning the Air
Clean Unit power supply ON.

24

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Section 2

3. Checking system operation

p.26

p.26

4-1. Displaying trend graphs

1. Installing the Exclusive
Monitoring Software

p.27

5-1. Starting monitoring

p.28

p.25

2. Connecting peripheral devices

4-2. Data logging

p.29

5-2. Starting logging

p.30

Setup Methods Suited to Specific Applications

Monitoring/Logging the Amount of Particles

Measured particle values can be easily c aptured on a personal computer by using a n
Interface Unit (sold separately) and the Exclusive Monitoring Software.
The following describe s an example where the amount of particles is displ ayed as a
trend graph and is saved as data.

OPE3

OPE2

OPE1

Section 2 UPGRADING THE SYSTEM

1. Installing the Exclusive Monitoring Software

Install the software (exclusive monitoring software) on the personal computer beforehand.

Installing the Exclusive Monitoring Software p.15

System Manu al

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25

Section 2 UPGRADING THE SYSTEM

Section 2
Setup Methods Suited to Specific Applications

2. Connecting peripheral devices

Connect the Air Clean Unit, Air Particle Sensor, Interface Unit, and the personal computer, and turn the
power supply of all of these devices ON.
Before connecting these devices, turn their power supplies OFF.

System Configuration Examples p.7, p.9

3. Checking system operation

Make sure that the Air Particle Sensor and Interface Unit have started up normally.

• W hen the Air Particle Sensor has not started up normally:
Check the Sensor connection. Also, refer to the Instruction Sheet for the Air Particle Sensor in the
case of other errors.

• W hen the Interface Unit has not started up normally:
Make sure that the Air Particle Sensor Amplifier Unit is in the RUN mode. Also, check the
connections of the peripheral devices.

26

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4-1.Displaying trend graphs

Select the number of planes to draw graphs in.
Single:All channels to be drawn as a waveform are

drawn in a single graph plane.

Multi: One waveform is drawn in one graph plane.

Select the type of the graph.
Line Chart: Displays the minimum and maximum

values within a specific time period.

Color Chart: The current value is displayed color-coded.
Select the channel No. to be drawn as a waveform.

Single CH:Select this item to draw only a specific

channel No.

Multi CH: Select this item to draw multiple channel Nos.

simultaneously.

CH No.: Select the channel No. to be drawn.

Up to five waveforms can be drawn
simultaneously.

Select the particle size to be drawn as a waveform.

Display the amount of particles as a trend graph.

1. Start up Exclusive Monitoring Software.

Starting Up the Exclusive Monitoring Software p.17

2. Click the [Graph] button and then [Edit graph ] button to display the Edit Graph

screen.

Section 2

Setup Methods Suited to Specific Applications

Section 2 UPGRADING THE SYSTEM

3. In the Edit Graph screen, set the graph drawing conditions.

System Manu al

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27

Section 2 UPGRADING THE SYSTEM

Sets the scale of the vertical axis.
Sets the value at the center of the vertical scale.

Sets the vertical axis to a scale that allows all
waveforms to be displayed.

Sets the scale of the horizontal axis.

Section 2
Setup Methods Suited to Specific Applications

4. Click the [Set] button.

5. Align the scales of the horizontal and vertical axes.

5-1.Starting monitoring

Click the [START] button to start drawing the graph.
To stop drawing the graph, click the [STOP] button.

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System Manu al

28

To save waveform data, click the [Save Waveform] button. (Data is saved in CSV format.)
The data for up to five planes including past data can be saved.

4-2.Data logging

Select the time data display method that is saved at the
same time as the data when performing logging.
Elapsed Time:The elapsed time is saved as the data

starting from the logging start time.

Real Time: The actual time is saved as data.

Select the particle size to be saved.
(Multiple selections are allowed.)

Select the channel and particle size to be drawn during
logging. Also, set the horizontal and vertical scales,
center of the vertical axis, and the display unit.

[Center Point] can be set directly by clicking
the [Input] button and entering a value.
The unit selected at [Unit] is also reflected in
the unit in the graph plane.

Select the sampling interval at which data is to be logged.

Click the [Output Data Selection] button to select the channel
to output data from in the output channel selection screen.

Select the logging end conditions.
Time Designation: None:

Logging is continued until it is
ended manually.

Log Time: Set the time up to when logging

ends after the [Input] button is
clicked. When the time set here has
elapsed, logging automatically ends.
(A time up to 24 hours can be set.)

When this item is selected, a logging file is
automatically created and saved at each new day.

Data logging saves the trends for the amount of particles in a clean booth as data.

1. Start up the Exclusive Monitoring Software.

2. Click the [Logging] button to display the Logging screen.

Section 2

Setup Methods Suited to Specific Applications

Section 2 UPGRADING THE SYSTEM

Starting Up the Exclusive Monitoring Software p.17

3. In the Logging screen, set the logging conditions.

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Section 2 UPGRADING THE SYSTEM

Section 2
Setup Methods Suited to Specific Applications

5-2.Starting logging

Click the [Exe.] button to start Logging.

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Section 2

4. Checking system operation

p.32

p.32

5. Setting the feedback conditions

1. Installing the Exclusive
Monitoring Software

p.32

p.31

3. Connecting peripheral devices

p.32

2. Setting the ID of the Air
Clean Unit

n units connected

m units connected

n: max. 9 units
m: max. 10 units

1ch2chnch 3ch

1ch2ch3chmch

Setup Methods Suited to Specific Applications

Detecting the Cleanliness of Multiple Processes

The cleanliness of multiple processes can be verified a t each individual process by
multiple Air Particle Sensors and multiple Air Clean Units. The air volume level also can
be controlled on individual equipment or booth (area).
The following describes an example where the cleanliness of multiple processes is
controlled.

Section 2 UPGRADING THE SYSTEM

1. Installing the Exclusive Monitoring Software

Install the software (exclusive monitoring software) on the personal computer beforehand.

Installing the Exclusive Monitoring Software p.15

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31

Section 2 UPGRADING THE SYSTEM

Section 2
Setup Methods Suited to Specific Applications

2. Setting the ID of the Air Clean Unit

1. Set DIP switch SW1 on the rear of the Air Clean Unit to ON (external

communications control enabled).

2. Set each of the channels (1 to n) by the ID rotary switch on the rear of the Air

Clean Unit.

Be sure to set unique ID numbers to each Unit.
The Units will not function properly when the same ID is set to multiple units.
When using the ZN-SF12 to perform feedback control, do not set the ID number to "0" (0ch).
A ZN-SF12 set to 0ch cannot be controlled.

3. Connecting peripheral devices

Connect the Air Clean Unit, Air Particle Sensor, Interface Unit, and the personal computer, and turn the
power supply of all of these devices ON.
Before connecting these devices, turn their power supplies OFF.

System Configuration Examples p.11

4. Checking system operation

Check operation of the Air Clean Unit, Air Particle Sensor and Interface Unit.

• When the Air Particle Sensor has not started up normally:
Check the Sensor connection. Also, refer to the Instruction Sheet for the Air Particle Sensor in the
case of other errors.

• W hen the Interface Unit has not started up normally:
Make sure that the Air Particle Sensor Amplifier Unit is in the RUN mode. Also, check the
connections of the peripheral devices.

• Check that the Air Clean Unit is in the standby mode.

5. Setting the feedback conditions

Operate the Exclusive Monitoring Software to set multiple feedback conditions.

1. Start up Exclusive Monitoring Software.

32

Starting Up the Exclusive Monitoring Software p.17

ZN

System Manu al

Section 2

Feedback destination Air Clean Unit:
Select the Air Clean Unit to be controlled.

Area selection:
Select the target area to be set.

Air Volume Level Control:
Select the method for controlling the air volume level.

Feedback source Sensor channel:
Select the Air Particle Sensors located in the target
areas.

Set the details.

Setup Methods Suited to Specific Applications

2. Click the [IFU Settings] button to display the Settings for Interface Unit screen.

3. In the Settings for Interface Unit screen, set the control conditions.

Set the information of the Air Clean Units and Air Particle Sensors located in the areas, and the
method for controlling the air volume level of the target areas.

Section 2 UPGRADING THE SYSTEM

The detailed settings are as follows:

Item Description

Calculation Type Selects the method for calculating the measured value.

Max: Select this parameter to set the maximum value of the

measurement result measured by the selected Air Particle
Sensor as the cleanliness of the target area.

Min: Select this parameter to set the minimum value of the

measurement result measured by the selected Air Particle
Sensor as the cleanliness of the target area.

Ave: Select this parameter to set the average value of the

measurement result measured by the selected Air Particle

Sensor as the cleanliness of the target area.
Feedback Type Selects the feedback method.
Feedback Cycle Selects the feedback cycle.
Target class(0.5µm) Selects the cleanliness class to be controlled.
Low Power(Wind) When "Constant" is selected at "Feedback Type", select the limit

value for the air volume beyond which air is not to be fed, and when
"Rapid" is selected, select the air volume level for when the
cleanliness has reached the target value.

High Power(Wind) Select the air volume level for when the cleanliness has not reached

High Power(Time) Select the time that the high power air volume level is to be held for.

the target value. This item can be selected only when "Rapid" is
selected at "Feedback Type".

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Section 2 UPGRADING THE SYSTEM

Section 2
Setup Methods Suited to Specific Applications

• For the high power air volume level, always set an air volume greater than the low power
air volume level. Feedback will not function properly if a smaller value is set.

• The time that the high power air volume level is actually held is an integer multiple of the
feedback cycle.
Example: When Feedback Cycle is set to "60 s" and High Power(Time) is set to "100 s",
the actual high power time is 120 s.

• We recommend setting the f eedback cycle to t he measurement cy cle of the Air Particle
Sensor or higher. Otherwise, feedback control will be endlessly executed based on the
same measurement result, and correct feedback control will not be possible.

How Feedback Control Works p.40

4. Click the [OK] button to start feedback controlled operation.

• When the setting is next used, feedback is automatically started simply by turning the Air
Clean Unit and Air Particle Sensor (and Interface Unit) power supplies ON.

• Feedback sometimes is not performed smoothly (i.e. a control lag occurs during
execution of feedback operation) when the power supply of the Air Clean Unit set as t he
control target in feedback control is not turned ON.
To solve this, either set feedback c ontrol so that it is performed only on po wered ON Air
Clean Units, or turn the power supply of all currently set Air Clean Units ON.

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Section 3
BASIC KNOWLEDGE OF CLEAN
SENSING SYSTEMS

Feedback Control 36

What is "Feedback?" 36
How Feedback Control Works 40

Clean Sensing 44

Principle o f "Particle Count" 44
What is "Cleanliness?" 45

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

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35

Section 3

OPE1

OPE2

OPE3

Air Clean Unit

Air Particle Sensor

(3) Air volume level increases

to improve cleanliness
inside the area.

(1) Cleanliness inside the area

falls and is about to exceed
the target cleanliness.

(2) The command for increasing

the air volume level is sent.

OPE1

OPE2

OPE3

Air Clean Unit

Air Particle Sensor

Feedback Control

Feedback Control

What is "Feedback?"

"Feedback" is th e control o f the air vol ume level o f the Air Clea n Unit in pr oportion to
the amount of particles to maintain the cleanliness of target spaces. The ZN series
incorporates the "F O feedback" (Fle xible & Optimu m Feedback) funct ion. This control
program performs fl exible and optimum fe edback suited to the user's environment s o

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

that a clean environment can be maintained and managed.

■ System Configuration

There are two system configurations that use the feedback function, a "direct clean
sensing system" and "multi-clean sensing system."

• Direct Clean Sensing System

In this system, the cleanliness of one area is managed by an Air Particle Sensor and an
Air Clean Unit.
Feedback processing is perfo rmed by the Air Parti cle Sen so r.
On the direct clean sensing system, you can select between "rapid feedback" and
"constant feedback" as the feedback method.

Feedback Methods p.38

Various feedback parameters (described later) can also be set.

ZN

System Manu al

36

Section 3

Air Clean Unit

Air Particl e Sensor

Interface Unit

Feedback Control

• Multi-Clean Sensing System

In this system, the cleanliness of multiple areas is managed by multiple Air Particle
Sensors and multiple Air Clean Units.
The Interface Units acquire the da ta from the Air Particle Sensors th at are connected
together to perform feedback processing on the entire system.
Besides feedback processing on individual Air Particle Sensors, correspondence
between Air Particle Se nso r and A ir Cle an Un it c han nel s a nd c alc ul ati on o f Ai r Par tic l e
Sensor data also are possible.

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

When using multiple Air Particle Sensors or multiple Air Clean Units, configure a multi-clean
sensing system using the ZN-SF12.

System Manu al

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37

Section 3

(2) When the high power

time elapses, the air
volume level returns
to low power.

(1) The air volume level is

changed to high power when
the cleanliness exceeds the
target cleanliness.

(3) The air volume level is

changed to high power when
the cleanliness exceeds the
target cleanliness again.

Amount of particles

Target cleanliness

High power air volume level

Low power air volume level

Feedback cycle

High power time

Time

Time

[Feedback Cycle]

• In a multi-clean sensing system:
The feedback cycle can be set on the Interface Unit.

• In a direct clean sensing system:
The feedback cycles equals the measurement time
of the Air Particle Sensor.

Feedback Control

■ Feedback Methods

There are two feedback methods, "rapid feedback" and "constant feedback."

• Rapid feedback

When cleanliness has deteriorated, rapid feedback quickly increases the air volume
level to recover the cleanliness.
This feedback method is effective in environments with relatively lots of change.

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

<Feedback Operation>

• When the high power time is set to a value other than "0":
The high power air volum e level is switch ed to regardle ss of changes in the amount
of particles when the hig h p owe r air vo lum e level c ont inu es un til th e high power time
elapses.

• When the high power time is set to "0":
The high power air volume level continues until the amount of particles falls to a fixed
level or lower, and the low power air volume level is switched to.

ZN

System Manu al

38

• For the high power air volume level, set an air volume greater than the lower power air volume
level. Otherwise, feedback will not function properly.

• If the cleanliness is not restored after the high power time has elapsed, operation will continue at
the low power air volume level (i.e. the high power air volume level will not be switched to). When
this happens, either set a longer high power time or set the high power time to 0.

Section 3

(1) The air volume level is

increased a level when the
target cleanliness is about
to be exceeded.

(2) The air volume level is

lowered a level when the
amount of particles is at a
fixed level or below.

Amount of particles

Target cleanliness

Low power air vo lu me leve l

Feedback cycle

Time

Time

[Feedback Cycle]

• In a multi-clean sensing system:
The feedback cycle can be set on the Interface Unit.

• In a direct clean sensing system:
The feedback cycle equals the "measurement time x 16"
of the Air Particle Sensor.

(3) The air volume level is

increased a level again
when the target cleanliness
is about to be exceeded.

Feedback Control

• Constant feedback

The air volume level is altered so that the cleanliness stabilizes at the target value.
This feedback method is effective in environments with relatively little change since the
cleanliness is maintained at the bare minimum air volume level.

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

<Feedback Operation>

The air volume level is switched in stages according to the chang e in the amount of
particles.

The controlled air volume level never falls below the lower power air volume level.
Set the bare minimum air volume level as the lower power air volume level.

ZN

System Manu al

39

Section 3

(1)

(

Air Clean Unit

Air Particle Sensor

Control signal

Area 1

Feedback Control

How Feedback Control Works

The following describ es the "flow of d ata for feedback" and "measurement p rocessing
flow" during feedback con tr ol for each sy s tem con fig ur ati on.

■ Direct Clean Sensing System

• Flow of data for feedback

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

(3)

(2)

In a system configured as shown above:
(1) The a mou nt o f part ic les i n ar ea 1 i s detected by the Sensor, and the measuremen t

result is calculated by the Amplifier Unit.

(2) The control air volume level value of area 1 is calculated based on the

measurement results, pr eset target values and var ious feedback paramete rs, and
is sent to the Air Clean Unit.

(3) The air volume level is altered according to the controlled air volume level value

that arrives from the Air Particle Sensor.

40

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System Manu al

• Flow of processing on the Air Particle Sensor

Start of

measurement

Measurement result calculated
for each measurement time

Air Particle Sensor

1ch

Measurement result table (example)

Measured air volume level
calculated based on feedback
parameters

Setting values
to be used

Feedback Control

Measurement result

2000

Target level

1000

Feedback type

Constant

Low power air volume level

2

Section 3

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

Control air volume level value
is sent by communications.

Calculation of control air
volume level value (example)

Control air volume level value

2

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41

Section 3

Air Clean Unit

Air Particle Sensor

Control signal

Area 1

Interface Unit

Area 2

Feedback Control

■ Multi-Clean Sensing System

• Flow of data for feedback

3CH

4CH

2CH

(3)

1CH2CH

1CH

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

ZN-SF21

(1)

(2)

In a system configured as shown above:
(1) The a mount of par ticles in area 1 is detec ted by t he sens ors on ch annels 1 ch and

2ch, and the amount of particles in area 2 is detected by the sensors on ch annels
3ch and 4ch, the measureme nt result is calculated by the Am plifier Unit, and the
result is transferred to the Interface Unit.

(2) The controlled air volume level value of ea ch area is calculated based on preset

target values and various feedback parameters, the measurement results sent from
the Air Particle Sensor s on channels 1c h to 4ch, and is sen t to the Air Clean Units
on channels 1ch and 2ch.

(3) The air volume level is altered according to the controlled air volume level value

that arrives from the Interface Units.

42

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Section 3

Measurement result calculated
for each measurement time

Measured air volume level
calculated based on feedback
parameters

Measurement result

Air Particle Sensor

1 3500

Measurement result table (example)

Calculation method

Target level

Feedback type

MAX

1000

Constant

Control air volume level value
is sent by communications.

Start of

measurement

Area 1

Low power air volume level

3

2 2000

3 2500

4 3100

Calculation of control air volume
level value for each area

Enabled/
disabled

1ON

2ON

3 OFF

4 OFF

Air Particle
Sensor
Channel

Enabled/
disabled

1ON

2 OFF

Air Clean Unit
ID

Calculation method

Target level

Feedback type

AVE

1000

Constant

Area 2

Low power air volume level

2

Enabled/
disabled

1 OFF

2 OFF

3ON

4ON

Air Particle
Sensor
Channel

Enabled/
disabled

1 OFF

2ON

Air Clean Unit
ID

Calculation of control air volume level value
and measurement result for control (example)

1 3500

2 2800

Measurement result
for control

Area

Control air volume
level value

5

3

Setting values
to be used

Feedback Control

• Flow of processing on In terface Unit

The following shows an examp le of pr ocess ing flow du ring measure ment an d the da ta
to be used when feedback processing is performed under the following conditions:

• The Air Clean Unit (ID:1) is controlled based on the l arger value of the Air Particle
Sensors on channels 1ch and 2ch.

• The Air Clean Unit (ID:2) is controlled based on the average value of Air Particle
Sensors on channels 3ch and 4ch.

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

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Section 3

Particles

Suction inlet

Receiving lens

Light-receiving lens

Fan

Amplifier Comparator

Light source

Emission lens

Signal processing circuit

Received light signal

Threshold

Time

Comparator
output

Incident
value

Received light signal and comparator output

Clean Sensing

Clean Sensing

Principle of "Particle Count"

The ZN-PD series judges the cleanliness of target spaces by measuring the amount of particles
(dust or dirt) floating in the air. The amount of particles is measured using the "fan method" and
"scattered light method" m ounted on the Air Particle Sensor (Senso r + Amplifier Unit).

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

The ZN-PD series adopts the "fan method" for sucking in air. Compared with the "pump method"
used on handy-type particle sensors, for example, this method has a service life that is about 10
times longer. This enables the amount of particles to be measured stably over a long period of time.

(1)

(2)

(3)

(1) Air inside the clean booth is sucked in from the suction inlet by the fan.
(2) The sucked in air is illuminated by a laser beam.

If the air contains particles, the light is scattered.

(3) Particles a re detected by scattered lig ht entering the light receivi ng lens, and the

amount of particles is measured.
The scattered light ent ering the l ig ht rec ei ving lens is converted to electric si gnal by
the amplifier and comparator, and is sent to the signal processing circuit.
The amount of particles is measur ed ba se d on th e ele ctri ca l signals that are sent to
this circuit.

44

■ Measurement of the Amount of Particles

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System Manu al

The amount of particles is measured bas ed on
the incident value. However, this incident value
increases the larger the particles become.
Thresholds are set for each of the target
particle diameters of 0.3 µm/0.5 µm/1.0 µm,
and the particle dia meter is judged according
to the size of the incident value.

Section 3

1 max.
→ Class 1

100 max.
→ Class 100

10,000 max.
→ Class 10,000

1f
(approx.
30 cm)

1f
(approx.
30 cm)

1f
(approx.
30 cm)

Clean Sensing

What is "Cleanliness?"

Cleanliness is expressed by the size, number and weight of polluting substances (dust,
dirt, etc.) contained in a fixed area or volume. The degree of cleanliness that is
indicated by the amount of dust or dirt contained in specific air is called the "cleanliness
level." This is further broken down into classes called "cleanliness class."

■ Cleanliness Standards

Standards that relate to the clea nliness of c lean room s, for exampl e, include Fed-Std­209D in the United States and JIS B 9921 in Japan. The unit volume and particle
diameter of polluting su bstances that the criteria for these standards are based on are
different. The ZN series adopts cleanliness annotation that complies with Fed-Std­209D, the most widely used standard at production sites.

■ Definition of Cleanliness According to Fed-Std-209D

Cleanliness is defined by the number of particles of 0.5 µm or more in diameter that are
contained in 1 cubic foot (28.3 liters or approximately a 30 cm cube) of air, and is
broken into classes de fine d by mul tip le s of ten. Thi s class i fic ati on is i ntu iti ve and e as y­to-understand, and has been used the longest at production sites.

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

Number of
particles of

0.5 µm or
more/cf

Class

1

1 10 100 1,000 10,000 100,000

Class

10

Class

100

Class

1,000

Class

10,000

Class

100,000

ZN

System Manu al

45

Section 3
Clean Sensing

MEMO

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

46

ZN

System Manu al

Section 4
APPENDICES

Maintenance 48
Troubleshooting 50

Troubleshooting 50
Error Messages and Countermeasures 51

Specifications and Dimensions 53
List of Products 66
INDEX 69

Section 4 APPENDICES

System Manu al

ZN

47

Section 4
Maintenance

Maintenance

For details on inspection and maintenance, refer to the Instruction Sheet for the respective product.

■ Air Clean Unit

ZN-A series filters are in a double-filter s tructure comprising a HEPA filter and a pre­filter, and filter air that is sucked in.

• Periodic inspection

When the filter becomes dirty, highly clean air can no longer be suppl ied stably for a
long time. So, dust must be periodically removed from the pre-filter.

Section 4 APPENDICES

• Replacement

When the filter become s clogged, the two indicators (green/red) on the corner of the
body light simultaneously to notify that the filter must be replaced with a new one.
For details on how to repl ace the filter, refer to the Ins truction Sheet f or the Air Clean
Unit.

Indicator

■ Air Particle Sensor

The ZN-PDA series uses a high-performance fan on the suction module to enable
continuous operation.

• Periodic inspection

Dirt and dust car ried i n b y the fa n o n thi s sy st em caus es th e fil ter to become dirty over
extended use. When th e filter bec omes dir ty, the amount of particles can no longe r be
monitored accurately. So, dust must be periodically removed from the pre-filter.
If dirt on the pre-filter is stubbor n and cannot be removed, replace the pre-filter wit h
Filter Set ZN9-PF1 (sold separately).

• Cleaning

When the system has carried in air containing lots of particulates, install Cleaning Filter
ZN9-PC1 (sold separately) to maintain the inside of the Sensor in a clean state.

48

ZN

System Manu al

Section 4

Cleaning notice/
warning indicator

Maintenance

■ Ionizer Unit

The ZN-J series generates ions by applying a high voltage on the discharge needles to
cause corona discharge.

• Periodic inspection

If the discharge needles become dirty or worn, the amount of generated ions
decreases and causes the neutralizing performance to drop. So, the discharge needles
must be cleaned periodically.

• Replacement

The cleaning noti ce indicator flashes orange to notify you that the discharg e needles
are dirty and the product's neutralizing capabilities are about to drop. The cleaning
notice indicator wil l stop flashing and stay lit (cleaning warn ing) when the discharge
needles become even dir tier and the product's neutral izing capabilities can no longer
be sustained.
Replace the discharge needle s if the cleaning warning indicator stays lit after they are
cleaned.
If the cleaning warning indicator lights even after replacing the discharge needles,
contact your OMRON representative.
For details on how to replace the di scharge needles, r efer to the Instructi on Sheet for
the Ionizer Unit.

Section 4 APPENDICES

System Manu al

ZN

49

Section 4
Troubleshooting

Troubleshooting

Troubleshooting

This section describes countermeasures for temporary device problems. Check the
malfunction in this section before sending the hardware for repair.

For details on how to connect devices, refer to the Instruction Sheet for the respective product.

Problem Probable cause and possible countermeasure Pages

The sensor communications LED or

Section 4 APPENDICES

the external terminal
communications LED ERR indicator
does not light even after 5 seconds
has elapsed.

The Air Clean Unit power supply is
not ON.

The Air Particle Sensor power
supply is not ON.

No communications with personal
computer

(i)
The communications ports do
not match.

(ii)
The BUSY indicator does not
light up.

(iii)
There is no response from the
Interface Unit.

(iv)
An error message appears and
the Sensor cannot start up.

The respective product is not connected correctly.

• Is the mode switch on the Air Particle Sensor Amplifier Unit set to
RUN?

• Are the Amplifier Units connected correctly to each other, or is the
Interface Unit connected correctly to the Amplifier Unit?

• Has the Amplifier Unit started up properly?

• Check the power supply voltage if the DC power supply wire is
used.

• Is the AC adapter (provided) used?

• Check the power supply voltage if the DC power supply is used.

• Are all cables connected correctly?

Turn the power supplies of the Interface Unit and Air Particle Sensor
Amplifier Units OFF then back ON again.
If communications still does not start, check the following points (i) to
(iv), and then restart the Sensor.

• Set the same communications port No. as that on the personal
computer (the other communications conditions are set
automatically).

• Quit the application program that is using the communications
port.

No signal is being sent to the Interface Unit.

• Is the Sensor connected with the correct cable?
(Check if it is connected with a straight cable by mistake.)

• Is the sensor connected correctly?

• Is the correct communications port set?

• Is the switch on the rear of the Interface Unit set to the default
side?

• Is the mode switch on the Air Particle Sensor's Amplifier Unit set to
RUN?

Is the Interface Unit in use the correct one? (The dedicated Interface
Unit (ZN-SF11/SF12) is required to communicate with the ZN-PDA
series.)

-

-

-

-

-

-

p.17

-

50

ZN

System Manu al

Section 4

Troubleshooting

Error Messages and Countermeasures

This section outlin es the error m essages that a re displa yed and the c ountermeasur es
for those messages. Check the malfunction in this section before sending the hardware
for repair.

■ Air Clean Unit (ZN-A Series)

[Indicator]

Indication Error Countermeasure

Green, red
lit simultaneously

Red lit The fan is rotating irregularly. Turn the fan power supply OFF then back ON again.

Green, blue
flashing

The air outlet or air inlet is
blocked.

The filter is blocked. Replace the filter.

The fan has reached the end of its
service life.

A voltage outside the rated
voltage is applied to the fan.

The I/O terminal power supply and
AC adapter are connected at the
same time .

The top case is open. Clos e the top case, turn the power supply OFF then

Remove the object blocking the air outlet or air inlet.

If turning the power supply OFF then back ON again
does not remedy the problem, contact your OMRON
representative.

Turn the fan power supply OFF then back ON again.
If turning the power supply OFF then back ON again
does not remedy the problem, a probable cause is that
the fan has reached the end of its service life. Contact
your OMRON representative.

Check the power supply voltage.

Check the power supply.

back ON again, and press the ON/OFF switch.

Section 4 APPENDICES

■ Ionizer Unit (ZN-J Series)

[Cleaning notice indicator/cleaning warning indicator]

Indication Error Countermeasure

Orange
flashing

Orange lit The discharge needles are dirty.

The discharge needles are dirty.
Continued use in this state will
cause neutralizing performance to
drop.

The neutralizing performance has
already dropped.

[Error output indicator]

Indication Error Countermeasure

Red lit Abnormal discharge Turn the power supply OFF then back ON again.

Clean the discharge needles.

Clean the discharge needles.
If this does not solve the error, the discharge needles
are worn. Replace the discharge needles.

If turning the power supply OFF then back ON again
does not remedy the problem, contact your OMRON
representative.

System Manu al

ZN

51

Section 4
Troubleshooting

■ Air Particle Sensor (ZN-PDA Series)

[Main display]

Display Error Countermeasure

E-SEn
(flashing)

E-hEd
(flashing)

E-EEP
(flashing)

E-Sht
(flashing)

----- This error is indicated until the

Section 4 APPENDICES

[Sub-display (during communication status display)]

Display Error Countermeasure

Err-_ Communications timeout and

The Sensor fan or laser is in error
or has deteriorated.

The Sensor is not connected or is
in error.

The EEPROM is damaged or data
is in error.

One or all of the judgment outputs
is short-circuited.

initial data is obtained after the
power supply is turned ON or the
FUN mode is switched to the RUN
mode.

other communications errors

Check the connection with the Sensor and Amplifier
Unit, and turn the power supply OFF then back ON
again.
If this does not solve the problem, the Sensor is
malfunctioning. Replace the Sensor.

Hold down the ENT key for at least 3 seconds.
If this does not solve the error, the Amplifier Unit is
malfunctioning. Replace the Amplifier Unit.

Correct short-circuiting of short-circuited loads. (The
sensor is automatically restored after the short­circuited load is canceled.)

The time it takes to obtain the initial data depends on
the settings for the number of samples to average and
the measurement time.

• Check the cable connection with the Air Clean Unit.

• Make sure that the channel No. of the Air Clean Unit is "0".

• Switch DIP switch 1 on the Air Clean Unit to ON
(external communications control enabled).

■ Interface Unit for Clean Monitoring System (ZN-SF Series)

[Main display]

Display Error Countermeasure

E-AmP
(flashing)

E-EEP
(flashing)

Err__
(during
communications
status di spl a y)

The Amplifier Unit is not
connected or the adjacent
Amplifier Unit cannot be
recognized correctly.

The EEPROM is damaged or data
is in error.

Communications timeout and
other communications errors on
the channel indicated by __.

• Set all mode switches on the Amplifier Unit to the
RUN mode.

• Make sure that the Amplifier Unit and Calculating
Unit are connected correctly, and turn the power
supply back ON again.
If this does not solve the problem, the Amplifier Unit
or Calculating Unit is malfunctioning. Replace the
Amplifier Unit or Calculating Unit.

Hold down the ENT key for at least 3 seconds.
If this does not solve the error, the Amplifier Unit is
malfunctioning. Replace the Amplifier Unit.

• Check the cable connection with the Air Clean Unit.

• Check the channel No. of the Air Clean Unit and the
feedback function settings.

52

ZN

System Manu al

Specifications and Dimensions

276

250

250

97.5

45 160

28

220

226.6

205.6

4-M4, depth 17

Operation indicator

Operation indicator

Air volume level switch

Air volume level indicator

ON/OFF switch

(Unit: mm)

417

129.5

15

15 380

360

4-M5, depth 20

380
360

410

436

410

Operation indicatorOperation indicator

Air volume level switch

Air volume level indicator

ON/OFF switch

(Unit: mm)

Specifications and Dimensions

Air Clean Unit
ZN-A2502/A2502D

Section 4

Section 4 APPENDICES

ZN-A4105/A4105D

System Manu al

ZN

53

Section 4
Specifications and Dimensions

Item ZN-A2502/A2502D ZN-A4105/A4105D
Air outlet dimension 225 x 205 mm 360 x 360 mm
Particle outlet efficiency More than 99.99% for 0.3 µm particles
Air volume (m
Sound noise level (dB) Air volume level 3: 53 dB (typical)

Fan motor DC brushless compact centrifugal

Main filter HEPA filter
Main filter model ZN9-AHP25 ZN9-AHP41
Pre-filter model ZN9-APF25 ZN9-APF41
Power supply voltage 24 VDC ±10% Ripple (p-p) 10% max.
Current consumption

Section 4 APPENDICES

Indicator Operation: Green/Red

Output Alarm output 1: Alarm output 1 turns OFF when one of the following happens.

Functions Air volume selectable (Level 1 to 5), automatic control by ZN-PDA,

Ambient temperature Operating and storage: 0 to 40°C (with no icing or condensation)
Ambient humidity Operating and storage: 35 to 85% (with no condensation)
Material Upper case: ABS, Bottom frame: Steel
Dimensions (mm) 250 (W) x 250 (D) x 97.5 (H) 410 (W) x 410 (D) x 129.5 (H)
Weight (packed state) Approx. 2 kg (approx. 3.3 kg) Approx. 5.2 kg (approx. 8.6 kg)
Accessories Instruction Sheet, Sealing parts, Mounting screws, I/O connector (XW4B-06B1-H1),

(*1) AC adapter:

3

/min) 0.3 to 1.8 m3/min (typical) 1.0 to 5.0 m3/min (typical)

Air volume level 3: 53 dB (typical)

Air volume level 1: 41 dB (typical)

blower: 2

Air volume level 5:2.1 A max. (RMS value)
Air volume level 1:0.4 A max. (RMS value)

Air volume: Blue

(Normally, Alarm output 1 is ON.)
Check the indicator to find out which one is happening.

• Filter clogged

• Fan error

• Cleaning alarm for discharge needle (when ZN-J is used with)

• Discharge error (when ZN-J is used with)

Alarm output 2: Only for ZN-J used with

Alarm output 2 turns OFF with the cleaning notice for the discharge
needles. (Normally, Alarm output 2 is ON.)

30 VDC, 50 mA max.
Residual voltage: 1 V max. with load current 10 mA, 2 V max. with load current 50 mA

filter clogging alarm, available with ZN-J (Ionizer Unit), multi connection up to 9 units

AC adapter (*1) Not for ZN-A2502D, ZN-A4105D

made by Sanken Electric Co., Ltd. Model SEB100P2-24.0 (for ZN-A2502), Supply voltage 100 VAC to 240
VAC.
made by Sanken Electric Co., Ltd. Model SEC165P2-24.0 (for ZN-A4105), Supply voltage 100 VAC to 240
VAC.

Air volume level 1: 40 dB (typical)
DC brushless turbo fan: 1

Air volume level 5:3.5 A max. (RMS value),

(Peak: 5.5 A)

Air volume level 1:0.32 A max. (RMS value)

54

ZN

System Manu al

Ionizer Unit

Mount hole dimensions/panel cutout dimensions

252

6 3.3

33

45

310

AC adapter terminal

Power input
/signal output connector

GND terminal

/cleaning warning indicator
(orange lit)

Cleaning notice indicator
(orange flashing)

Ion balance adjustment buttons

Power switch

Error output indicator
(red flashing)

Power indicator
(green lit)

Discharge needles (4)

210

248

mm dia.

8- 5 Mount hole (thru hole)

210

25.50

220

70

210

160 ± 0.2

220 ± 0.2

220 ± 0.2

160 ± 0.2

210

8-5 mm dia. hole

(Unit: mm)

360

240 ± 0.2

380 ± 0.2

360

240 ± 0.2

380 ± 0.2

412

470

(3.3)

Power switch

Power indicator
(green lit)

Error output indicator
(red lit)

Ion balance
Adjustment buttons

Cleaning notice indicator
(orange flashing)
/cleaning warning indicator
(orange lit)

Power input/signal output connector

GND terminal

AC adapter terminal

45

33

6

Mount hole dimensions/panel cutout dimensions

12-6

mm dia. hol

e

Discharge
needles (4)

240

380

360

240

360

380

408

70

65.5

12-6 mm dia. mount hole (thru hole)

(Unit: mm)

ZN-J25/J25A

Section 4

Specifications and Dimensions

Section 4 APPENDICES

ZN-J41/J41A

System Manu al

ZN

55

Section 4
Specifications and Dimensions

Item ZN-J25A ZN-J25 ZN-J41A ZN-J41

Available Air Clean Unit ZN-A2502 - ZN-A4105 ­Power supply voltage 24 VDC±10% Ripple (p-p) 10% max.
Current consumption 300 mA max
Output voltage ±7 kV max.
Discharge method Variable DC
Neutralizing time (typical) *1 5 sec max.
Ion balance (typical) *2 ± 30 V max.
Indicator Power (green), Cleaning notice (orange blinking), Cleaning warning (orange)

Error (red)

Output Error output,

cleaning notice/alarm output: photo MOS relay (30 VDC 300 mA max.)

Functions Manual ion balance adjustment, cleaning alarm, error alarm

Section 4 APPENDICES

Ambient temperature Operating and storage: 0 to 40°C (with no icing or condensation)
Ambient humidity Operating and storage: 35 to 65% (with no condensation)
Materials Case: ABS, Discharge needles: Tungsten
Dimensions (mm) 248 (W) x 310 (D) x 45 (H) mm 408 (W) x 470 (D) x 45 (H) mm
Weight (packed state) Approx. 0.6 kg (approx. 1.4 kg) Approx. 1.5 kg (approx. 2.7 kg)
Accessories Instruction sheet,

Sealing parts,
Mounting screws,
Connector cable
for Air Clean Unit,
Ferrite core,
English warning
label

(*1) Measurement conditions: Distance 300 mm, Air Clean Unit: ZN-A series

with air level 5, At center of air outlet,
Neutralization: From ±1000 V down to ±100 V with Charge Plate monitor (150 x 150 mm, 20 pF)
Temperature: 18 to 28°C, Humidity: 35 to 55%
The performance might not be able to be satisfied when there is gas such as solvent gas in the measurement
area.

(*2) Measurement conditions: Distance 300 mm, Air Clean Unit: ZN-A series

with air level 5, At center of air outlet,
Measurement time: 10 seconds at Charge Plate monitor (150 x 150 mm, 20 pF)
Temperature: 18 to 28°C, Humidity: 35 to 55%
The performance might not be able to be satisfied when there is gas such as solvent gas in the measurement
area.

(*3) AC adapter: made by Sanken Electric Co., Ltd. Model SEA40N2-24.0, Supply voltage 100 VAC to 240 VAC.

Instruction sheet,
Sealing parts,
Mounting screws, I/
O cable (2 m), AC
adapter (*3),
Ferrite core,
English warning
label

Instruction sheet,
Sealing parts,
Mounting screws,
Connector cable
for Air Clean Unit,
Ferrite core,
English warning
label

Instruction sheet,
Sealing parts,
Mounting screws, I/
O cable (2 m), AC
adapter (*3),
Ferrite core,
English warning
label

56

ZN

System Manu al

Air Particle Sensor

1

a.

(Unit: mm)

Round vinyl insulated cable

5.2 mm dia., 10-wire
Standard length: 0.5 m

Suction inlet

Exhaust outlet

Mount hole dimensions

Mounting
screw holes
2-M4, depth 6

(Unit: mm)

Mount hole d ime n s i on s

Mounting
bracket

Oblong mount
hole

6-3.2 x 6.2

Mounting
screws
2-M4x6

• Sensor
ZN-PD03

76

Section 4

Specifications and Dimensions

21.5

39.4

120

14.3

46

44

22

70

14.4

22.4

15.85

36.8

25 70

35

When sensor mounting bracket (ZN9-PB1, sold separately) is used

70

0.

4545

6-M3

2

4.2 mm di

Section 4 APPENDICES

82 ± 0.1

42

2.6

82 44

(90)

(100)

455545

ZN

System Manu al

57

Section 4
Specifications and Dimensions

Item ZN-PD03

Available Amplifier Unit ZN-PDA 11/ZN-PDA12
Measurement method 90° sideway light-scattering method
Light source Semiconductor laser
Available particle size 0.3 µm/0.5 µm/1.0 µm
Available cleanliness class Class100 to 100,000 corresponding (FED-STD-209D)
Indicator Level indicator for Class100 to 100,000 (FED-STD-209D)
Suction tube Inside diameter: 4 mm, Length: 1 m max.
Ambient temperature Operating: 0 to 40°C, Storage: -15 to +50°C (with no icing or condensation)
Ambient humidity Operating and storage: 35 to 85% (with no condensation)
Dielectric strength 1,000 VAC, 50/60 Hz for 1 min
Vibration resistance 10 to 55 Hz, 0.7-mm double amplitude 80 min each in X, Y and Z directions

Section 4 APPENDICES

Shock resistance 150 m/s
Connection method Connector cable (standard cable length: 0.5 m)
Materials ABS
Weight (packed state) Approx. 300 g (approx. 450 g)
Accessories Instruction sheet, Suction tube

2

3 times each in six directions (up/down, left/right, forward/backward)

58

ZN

System Manu al

• Amplifier Unit

(Unit: mm)

(Unit: mm)

ZN-PDA11

Section 4

Specifications and Dimensions

Wide range indicatorPower indicator

Unit indicator

ZN-PDA12

OUT1 indicator

OUT2 indicator

30

(133)

44

15.5 mm dia.

13.2

Round vinyl insulated cable

5.1 mm dia. standard 100 mm

3

36.813

Main display indicator

Sub-display indicator

4.264.34.2

Round vinyl insulated cable

5.2 mm dia. standard 2 m

15.8

31.5

16.86

Section 4 APPENDICES

Power indicator

OUT1 indicator

OUT2 indicator

11.7

2.2

29

Wide range indicator
Unit indicator

Judgment output OUT2/reset input switch

11.7

(Default setting is judgment output.)

Judgment outputs

Modular jack

Main display indicator

Sub-display indicator

30

15.5 mm dia.

13.2

Round vinyl insulated cable

5.1 mm dia. standard 100 mm

21.46

6.6

31.5

16.86

Round vinyl insulated cable 5.1 mm dia., 10-wire
(conductor cross-sectional area: 0.08 mm
insulator diameter: 0.7 mm)
standard 2 m

15.8

2

/

11.7

3

36.813

29

(133)

44

2.2

4.264.34.2

11.7

ZN

System Manu al

59

Section 4
Specifications and Dimensions

Item ZN-PDA11 ZN-PDA12
Sampling time 1 to 599 s (selectable)
Average count setting 1/2/4/8/16/32/64
Indicator Operation indicators: OUT1 (orange),

OUT2 (yellow), 7-segment main display
(red), 7-segment sub-display (yellow)
Power (green), wide range display
(green), unit selection display (green)

Judgment outputs OUT1/
OUT2(*1)

Reset input *1 ON: Short-circuited with 0 V terminal or

Functions Measured value display, setting value

Section 4 APPENDICES

Communication
with Air Clean Unit

Power supply voltage 24 VDC±10% Ripple (p-p) 10% max. 24 VDC±10% Ripple (p-p) 10% max.

Current consumption 300 mA max.
Ambient temperature Operating: 0 to 40°C, Storage: -15 to +50°C (with no icing or condensation)
Ambient humidity Operating and storage: 35 to 85% (with no condensation)
Insulation resistance 20 MΩ at 500 VDC
Dielectric strength 1,000 VAC, 50/60 Hz for 1 min
Vibration resistance 10 to 150 Hz, 0.7-mm double amplitude 80 min each in X, Y and Z directions
Shock resistance 300 m/s
Connection method Cable

Materials Case: PBT (polybutylene terephthalate), Cover: polycarbonate
Weight (packed state) Approx. 180 g (approx. 350 g)
Accessories Instruction sheet

((*1) Judgment output OUT2 and reset input are switched by the DIP switch on the rear of the Amplifier Unit.

NPN open-collector outputs, 30 VDC
30mA max., Residual voltage: 1.2 V max.

1.5 V or less

OFF:Open

display, unit selection,
scaling, peak hold,
hysteresis setting, threshold level
selection,
wide range display, key lock,
ECO mode, display reverse,
display digit change, initial reset

- Unique communication specification

2

3 times each in six directions (up/down, left/right, forward/backward)

(standard cable length: 2 m)

7-segment main display (red), 7-segment
sub-display (yellow),
Power (green), wide range display
(green), unit selection display (green)

-

-

Measured value display, communication
status display, unit selection,
scaling, Air Clean Unit automatic control,
Air Clean Unit air level change, wide
range display, key lock,
ECO mode, display reverse,
display digit change, initial reset

(RJ-45 connector and straight wiring LAN
cable)

(supplied by Air Clean Unit)

Connector cable
(standard cable length: 2 m)

60

ZN

System Manu al

■ I/O Circuit Diagram

C

{

n

ue

y

W

e

(1) 24 VDC
(2) GND (0V)

(3) Warning judgment output

(4) Caution judgment output
(5) Reset input

NPN type (ZN-PDA11)

Brown

Section 4

Specifications and Dimensions

24 VDC

I/O switch

Caution judgment
output

White

Reset input

Warning judgment
output

Gray

Load

Load

24 VD

Internal circuit

GND (0V)

Blue

■ External I/O

Brow

Bl

Gra

hit

• Wire the cable correctly. Otherwise, the Amplifier Unit might be damaged.

• The function of the white lead can be selected by the switch on the rear of the Amplifier Unit.

(1)This is the power terminal. Connect the 24 VDC power supply to this terminal.
(2)This is the 0 V power s upply term inal. On an NP N type Am plifier Uni t, this termi nal

becomes the common terminal for inputs/outputs other than the linear output.

(3)This output turns ON when "measured value ≥ warning threshold".

Operation is the same as lighting of the OUT1 indicator.

(4)This output turns ON when "measured value ≥ caution threshold".

Operation is the same as lighting of the OUT2 indicator.

(5) This input is for resetting each of the outputs. When this input is ON, internal

calculations are stopped, and judgment outputs are fo rcibly tur ned OFF. This input
can also be used to clear the peak hold value.

Section 4 APPENDICES

System Manu al

ZN

61

Section 4

6

57

54.9

5

36.7

9

(Unit: mm)

Specifications and Dimensions

• Calculating Unit
ZX-CAL2

24.

15.1

12

8

2

.4

Section 4 APPENDICES

Item ZX-CAL2
Available Amplifier Unit ZN-PD series, ZX series, ZJ-SD series
Current consumption 12 mA or less (supplied from the Amplifier Unit)
Ambient temperature Operating: 0 to 50°C, Storage: -15 to +60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35 to 85% (with no condensation)
Connection method Connector
Dielectric strength 1,000 VAC, 50/60 Hz for 1 min
Insulation resistance 100 MΩ at 500 VDC
Vibration resistance 10 to 150 Hz, 0.7-mm double amplitude 80 min each in X, Y and Z directions
Shock resistance 300 m/s
Materials Display: Acrylic, Case: ABS resin
Weight (packed state) Approx. 50 g

2

3 times each in six directions (up/down, left/right, forward/backward)

ZN

System Manu al

62

Interface Unit for Clean Monitoring System

(Unit: mm)

(Unit: mm)

ZN-SF11

Section 4

Specifications and Dimensions

ZN-SF12

Sensor communications indicator (busy)

Sensor communications indicator (communications error)

Power indicator

30

15

Round vinyl insulated cable

13.2

5.2 mm dia. standard 300 mm

(33.1)

Connector

(46)

(336)

Power indicator

4.2
3

11. 7

Connector

External terminal communications indicator (busy)

External terminal communications indicator
(communications error)

64.3

36.813

29

2.2

Status indicator

4.2

31.5

4.3

3

11. 7

5

6.55

Modular jack

Section 4 APPENDICES

Operation indicator

30

(336)

(46)

15

13.2

Round vinyl insulated cable

5.2 mm dia. standard 300 mm

(33.1)

Connector

3

29

11.7

Main display indicator

Sub-display indicator

36.813

2.2

4.3

4.264.34.2

21.46

6.6

31.5

15.8

Round vinyl insulated cable 5.1 mm dia., 10-wire
(conductor cross-sectional area: 0.08 mm
insulator diameter: 0.7 mm)
standard 2 m

11.7

3

5

6.55

2

/

ZN

System Manu al

63

Section 4

Connect the ZN-SF11/SF12
and the personal computer
using a 9-pin D-sub cross
cable (female-female).

Personal computer side (PC/AT compatible)ZN-SF11/SF12 side

* Pin Nos. may vary with the type and

model of the external device to be
connected. For details, refer to the
instruction manual of your programmable
controller or personal computer.

Specifications and Dimensions

■ Connector Pin Arrangement and Connection Example with
Personal Computer

12 3 45

67 89

Pin No.Name

1 N.C.

Section 4 APPENDICES

2RD

3SD

4 N.C.

5SG

6 N.C.

7 N.C.

8 N.C.

9 N.C.

12 3 45

67 89

Pin No.Name

1CD

2RD

3SD

4ER

5SG

6DR

7RS

8CS

9CI

Connector
hood

FG

64

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System Manu al

Section 4

Specifications and Dimensions

Clean Monitoring System

Item ZN-SFW11 ZN-SFW12
Power supply voltage Supplied from ZN-PDA
Current consumption 45 mA with 24 VDC without Amplifier Unit
Available Sensor Amplifier ZX series, ZJ-SD series, ZN-PD series
Available Sensor Amplifier

software version

Available number of connected
Sensor Amplifiers

Indicator Power : green

Functions - Air Clean Unit automatic control

Communication

Ambient temperature Operating: 0 to 40°C, Storage: -15 to +50°C (with no icing or condensation)
Ambient humidity Operating and storage: 35 to 85% (with no condensation)
Insulation resistance 20 MΩ at 500 VDC
Dielectric strength 1,000 VAC, 50/60 Hz for 1 min
Vibration resistance 10 to 150 Hz, 0.7-mm double amplitude 80 min each in X, Y and Z directions
Shock resistance 300 m/s
Connection method - Connector cable

Materials Case: PBT (polybutylene terephthalate), Cover: polycarbonate
Weight (packed state) Approx. 100 g (approx. 480 g) Approx. 200 g (approx. 550 g)
Accessories CD-ROM (Realtime Clean Air Monitor), Instruction sheet, two clamps

Port RS-232C (9-pin D-sub connector)
Protocol CompoWay/F
Baud rate 38400 bps
Data configuration Data bits: 8, Parity: none, Start bits: 1, Stop bits: 1, Flow control: none
For external

device 2

ZX-LDA__-N V1,000 or higher
ZX-EDA__ V1,300 or higher
ZX-TDA__ V1,100 or higher
ZX-SDA__ V1,000 or higher
ZX-PDA__ V1,000 or higher

10 max. (for ZN-PDA)

Power (POWER: green)
Sensor communications busy: green
Sensor communications error: red
Serial communications: green
Serial communications error: red

- Unique communication specification

2

3 times each in six directions (up/down, left/right, forward/backward)

Serial communications (STA1: green)

Not Clean (OPE1: orange)

Clean (OPE2: green)

(multiple unit system control)

Air Clean Unit air level change

(RJ-45 connector and straight wiring

LAN cable)

(standard cable length: 2 m)

Section 4 APPENDICES

System Manu al

ZN

65

Section 4
List of Products

List of Products

■ Air Clean Unit

• Main unit

Type Model Remarks
250 mm Square ZN-A2502
250 mm Square ZN-A2502D Without AC adaptor
410 mm Square ZN-A4105
410 mm Square ZN-A4105D Without AC adaptor

When connecting multiple Air Clean Units to build a system, use a commercially available LAN
cable (straight type: Category 5E or higher).

Section 4 APPENDICES

• Accessories

Type Model Remarks
Replacement filter ZN9-AHP25 1 (for 250 mm Square filter)

ZN9-AHP41 1 (for 410 mm Square filter)

Replacement pre-filter ZN9-APF25 2 (for 250 mm Square filter)

ZN9-APF41 1 (for 410 mm Square filter)

■ Ionizer Unit

• Main Unit

Type Model Remarks
250 mm Square ZN-J25A When used together with the Air Clean Unit (ZN-A2502) as

a set

410 mm Square ZN-J41A When used together with the Air Clean Unit (ZN-A4105) as

a set
250 mm Square ZN-J25
410 mm Square ZN-J41

• Accessories

Type Model Remarks
Replacement needles ZN9-JH04 4 (with needle holder)
Single-ended connector

cable 5 m
Single-ended connector

cable 10 m

ZN-JC05 1 (for DC power supply, I/O cable connection)

ZN-JC10 1 (for DC power supply, I/O cable connection)

66

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System Manu al

■ Air Particle Sensor

• Main Unit

Type Model Remarks
Sensor ZN-PD03
Amplifier Units ZN-PDA11 Cable type 2 m

ZN-PDA12 Connector type 2 m

• Accessories

Type Model Remarks
Calculating Unit ZX-CAL2
Double-ended connector

cable 1 m
Double-ended connector

cable 4 m
Double-ended connector

cable 8 m
(Sensor)

Replacement filter set
Cleaning filter ZN9-PC1 1
Sensor mounting bracket ZN9-PB1 1

ZX-XC1A 1 (for extension between Sensor and Amplifier Unit)

ZX-XC4A 1 (for extension between Sensor and Amplifier Unit)

ZX-XC8A 1 (for extension between Sensor and Amplifier Unit)

ZN9-PF1 1

Section 4

List of Products

Section 4 APPENDICES

■ Clean Monitoring System

Type Model Remarks
Interface Unit (ZN-SF11)/

Realtime Clean Air
Monitor set

Interface Unit (ZN-SF12)/
Realtime Clean Air
Monitor set

ZN-SFW11 Personal computer to RS-232C connection only

ZN-SFW12 Personal computer to RS-232C connection, for Air Clean

Unit feedback connection

System Manu al

ZN

67

Section 4
List of Products

MEMO

Section 4 APPENDICES

68

ZN

System Manu al

INDEX

Section 4

INDEX

A

Accessories

List of Products 66

Air Clean Unit 3

Dimensions 53
Error Messages 51
Indicator 48
List of Products 66
Maintenance 48
Specifications 54

Air Particle Sensor 3

Dimensions 57, 59
Error Messages 52
Flow of processing 41
List of Products 67
Maintenance 48

Specifications 58, 60
Automatic adjustment of air
volume level 4
Automatically Adjusting the Air
Volume Level 18

C

Calculating Unit

Dimensions 62

Specifications 62
Clean Monitoring System 2, 15

List of Products 67

Specifications 65
Cleaning notice indicator 49
Cleaning warning indicator 49
Cleanliness 45
Cleanliness Class of Multip le
Processes 5
Cleanliness of Multiple Processes

Constant feedback 23, 39

D

Dimensions

Air Clean Unit 53

Air Particle Sensor 57, 59

Calculating Unit 62

Interface Unit 63

Ionizer Unit 55
Direct Clean Sensing System

System Configuration 7, 36
Dust Removal and Static

31

Neutralization 6, 10

E

Electrostatic Sensor 10
Error Messages 51
Exclusive Monitoring Software

Exiting 17
Installing 16
Operating Environment 15
Starting Up 17
Uninstalling 16

F

Feedback 4, 8 , 9, 36
Flow of data

Direct Clean Sensing System 40

Multi-clean Sensing Sys tem 4 2
Flow of Operations for Upgrading
the System 14

I

Interface Unit

Connector Pin Arrangement 64

Dimensions 63

Error Messages 52

Example with Personal Computer

Exclusive Monitoring Software 17

Flow of processing 43
Ion Balance Sensor 6
Ionizer Unit 3

Dimensions 55

Error Messages 51

List of Products 66

Maintenance 49

Specifications 56

L

Logging 4, 7, 9, 25

M

Main Applications 3
Monitoring

Amount of Particles 4, 25

Charged Amount 6
Multi-Clean Sensing System

How Feedback Control Works 42

System Configuration 11, 37

Section 4 APPENDICES

64

System Manu al

ZN

69

Section 4
INDEX

P

Principle of "Particle Count" 44

R

Rapid feedback 20, 38

S

Scattered light method 44
Setting the feedback conditions

20, 32

Specifications 53

Air Clean Unit 54
Air Particle Sensor 58, 60
Calculating Unit 62
Clean Monitoring System 65

Section 4 APPENDICES

Ionizer Unit 56

Static Electricity Sensor 6

T

Troubleshooting 50

70

ZN

System Manu al

MEMO

Section 4

INDEX

Section 4 APPENDICES

System Manu al

ZN

71

Section 4

Revision History

Revision History

A manual revision cod e appears as a s uffix to the catalog number at the bottom of the fron t
and back covers of this manual.

Cat. No.

Revision code Date Revised contents

01 June 2007 Original production

Z267-E1-01

Revision code

Section 4 APPENDICES

72

ZN

System Manu al

OMRON Corporation
Industrial Automation Company

Sensing Devices Division H.Q.
Application Sensors Division

Shiokoji Horikawa, Shimogyo-ku,
Kyoto, 600-8530 Japan
Tel: [phone]/Fax: [phone]

Regional Headquarters

OMRON EUROPE B.V.

Sensor Business Unit
Carl-Benz-Str. 4, D-71154 Nufringen,
Germany
Tel: [phone]/Fax: [phone]

OMRON ELECTRONICS LLC

One Commerce Drive Schaumburg,
IL 60173-5302 U.S.A.
Tel: [phone]/Fax: [phone]

OMRON ASIA PACIFIC PTE. LTD.

No. 438A Alexandra Road # 05-05/08 (Lobby 2),
Alexandra Technopark, Singapore 119967
Tel: [phone]/Fax: [phone]

OMRON (CHINA) CO., LTD.

Room 2211, Bank of China Tower,
200 Yin Cheng Zhong Road,
Pu Dong New Area, Shanghai, 200120, China
Tel: [phone]/Fax: [phone]

Authorized Distributor:

Cat. No. Z267-E1-01

©OMRON Corporation 2007 All Rights Reserved.

Note: Specifications subject to change without notice.

Printed in Japan.

0707- 0.5C (0707) (M)