Omron EtherCAT User Manual

Machine Automation Controller NJ/NX-series

EtherCAT®

Connection Guide

INFICON Co., Ltd

Bayard-Alpert Pirani Gauge
(BPG402-SE)

P730-E1-01

About Intellec t ua l Property Right s and Trademarks

Microsoft product screen shots reprinted with permission from Microsoft Corporation.

Windows is a registered trademark of Microsoft Corporation in the USA and other countries.
EtherCAT® is a reg istere d trade mar k and pate nted t echn olo gy, licensed by Be ckhof f Automation
GmbH, Germany.
Sysmac is a trademark or r egist ered trademark of OMRON Cor por at ion in Japan and other
countries for OMRON fact or y automation products.
Company names and product names in this guide are trademar ks or registered trademarks of
their respective companies.

Table of Contents

1. Related Manuals .......................................................................................... 1

2. Terms and Definitions ................................................................................. 2

3. Precautions .................................................................................................. 3

4. Overview ...................................................................................................... 4

5. Applicable Devices and Device Configuration ........................................ 5

5.1. Applicable Devices .................................................................................. 5

5.2. Device Configurat ion ............................................................................... 6

6. EtherCAT Settings ....................................................................................... 8

6.1. Parameter ................................................................................................ 8

6.2. Device Variables ...................................................................................... 9

7. EtherCAT Connection Procedure ............................................................ 10

7.1. Work Flow ............................................................................................. 10

7.2. INFICON Gauge Setup .......................................................................... 11

7.3. Controller Setup .................................................................................... 12

7.4. EtherCAT Communication Status Check .............................................. 24

8. Initialization Method .................................................................................. 26

8.1. Initializing a Controller ........................................................................... 26

9. Revision History ........................................................................................ 27

1．Related Manuals

1

1. Related Manuals

To ensure system safety, make sure to always read and follow the information pr ovided in all
Safety Precautions and Precaut ions for Safe Use in the manuals for each device used in the
system.
The table below lists the manuals provided by INFICON Co., Lt d. (hereinafter referred to as
"INFICON") and OMRO N Corporation (hereinafter referr ed to as "OMRON"), which pert ain to
this guide.

Manufacturer Cat. No. Model Manual name
OMRON W500 NJ501-□□□□

NJ301-□□□□
NJ101-□□□□

OMRON W535 NX701-□□□□ NX-series CPU Unit

OMRON W593 NX102-□□□□

OMRON W578 NX1P2-□□□□ NX-series NX1P2 CPU Unit

OMRON W501

OMRON W505

OMRON W504 SYSMAC-SE2□□□ Sysmac Studio Version 1

INFICON tirb53e1 BPG402-SE Communication Protocol

NX701-□□□□
NX102-□□□□
NX1P2-□□□□
NJ501-□□□□
NJ301-□□□□
NJ101-□□□□

NJ-series CPU Un it
Hardware User's Manual

Hardware User's Manua l
NX-series NX102 CPU U nit

Hardware User's Manua l

Hardware User's Manua l
NJ/NX-series CPU Unit

Software User's Manual

NJ/NX-series
CPU Unit Built-i n EtherCAT® Port
User's Manual

Operation Manual

EtherCAT® for Bayard-Alpert Pirani
Gauge

INFICON tina46e1 BPG402-Sx

Operating Manual
Bayard-Alpert Pirani Gau ge

2

2. Terms and Definitions

The terms and definitions used in this guide are given below.

Term Explanation and Definition

2．Terms and Definitions

PDO communications
(communications using
process data objects)

SDO communications
(communications using
service data objects)

PDO communications is used for const ant data exchang e betw een
a master and slaves. PDO dat a (i.e., I/O data that is mapped to
PDOs) that is allocated in adv ance is input and output each
EtherCAT process data communications cycle (i.e., the task period
of primary periodic task). The NJ/NX-series Machine Automation
Controllers use PDO com mu nications for commands to refresh I /O
data in a fixed control period, including I/O data for slave units a nd
the position control data for ser vomotors. It is accessed from
NJ/NX-series Machine Automation Controllers in the fo llowing
ways.

・With device variables for EtherCAT slave I/O
・With axis variables for a s er vo drive and encoder input slaves to

which an axis is assigned

SDO communications is u sed t o r ead and write specified slave
data from a master when r equired. The NJ/NX-serie s M achine
Automation Controllers use SDO communications fo r com m ands
to read and write data, such as f or paramet er transf ers, at specified
times. The NJ/NX-series Machine A uto mation Cont roll ers can
read/write the specified s l ave data (parameters and error
information, etc.) with t he EC _CoESDORead (Read CoE S DO)
instruction or the EC_CoE SDOWrite (Write C oE SDO) instruction.

slave unit A generic name for a device that performs EtherCAT

communications with a n Et herCAT master. There are various ty pes
of slave units such as servo drives that handle position data and

I/O terminals that handle bit signals.
node address An address to identify a slave unit connected to EtherCAT.
ESI file (EtherCAT slave

information file)

It contains information un i que t o Et herCAT slave units in X M L

format. The ESI file can be loaded into Sysmac Studio, t o allocate

EtherCAT slave process data and make other setti ngs.

3．Precautions

3

Precautions for Correct Use

Additional Information

Symbol

3. Precautions

(1) Understand the speci fications of devices which are used in t he system. A ll ow s ome

margin for ratings and performance. Provide safety measures, such as installing a safety
circuit, in order to ensure safety and minimize the risk of abnormal occurrence.

(2) To ensure system safety, make sure to always read and follow the information provided in

all Safety Precautions and Precaut ion s for Saf e Use in the manua ls for each dev ice use d
in the system.

(3) The user is encouraged t o conf irm the standards and regulatio ns that the system must

conform to.

(4) It is prohibited to copy, to reproduce, and to distribute a part or t he whole of this guide

without the permission of O M RON Corporation.

(5) The information contai ned in this guide is current as of July 2020. It is subject to change

for improvement without notice.

The following notations are used in this guide.

Indicates a potentially hazardous situation which, if not av oided,
may result in minor or moderate injury, or may result in serious
injury or death. Additionally, there may be significant property
damage.

Indicates a potentially hazardous situation which, if not av oided,
may result in minor or moderate injury or property dam age.

Precautions on what to do and w hat not to do to ensure proper operati on and performance.

Additional information to read as required.
This information is provid ed to increase understanding or make operation easier.

The filled circle symbol indicates operations that you must do.
The specific operation is shown in the circle and ex plained in the text.
This example shows a general precaution for something that you must do.

4

4. Overview

This guide describes proc edur es for connecting an INFICON Bay ar d-Alpert Pirani Gauge
BPG402-SE (hereinaft er r eferr ed to as the "Gauge") to an OMRON NJ/NX-series Machine
Automation Controller ( hereinafter referred to as the "Contr oller") via EtherCAT and for
checking their communication status.
Refer to Section 6. EtherCAT Settings and Section 7 . Et her CAT Connection Procedure to
understand setting metho ds and key points to perform PDO com m unications via EtherCAT.

4．Overview

5．Applicable Devices and Device Configuration

5

Precautions for Correct Use

Additional Information

5. Applicable Devices and De vice Configuration

5.1. Applicable Devices

The applicable devices are as follows:

Manufacturer Name Model

OMRON NJ/NX-series CPU Unit NX701-□□□□

NX102-□□□□
NX1P2-□□□□
NJ501-□□□□
NJ301-□□□□
NJ101-□□□□

INFICON Gauge BPG402-SE

In this guide, the devices with models and versions listed in 5.2. Dev ice Conf igurat ion are
used as examples of applicabl e devices to describe the procedur es for connecting the
devices and checking their connection. You cannot use devices with versions lower than
those listed in 5.2. To use the above devices with models not listed in 5.2 or versions higher
than those listed in 5.2, chec k the differences in the specific ation s by referri ng t o the manu al s
before operating the devic es.

This guide describes the procedures for establishing t he net work connection.
It does not provide inform at ion on operation, installation, wirin g method, device functionality,
or device operation, which is not r elat ed to the connection procedures.
Refer to the manuals or cont act the manufacturers of the appl icable devices.

5．Applicable Devices and Device Configuration

6

Precautions for Correct Use

Precautions for Correct Use

BPG402-SE

Personal computer

NX102-1200

LAN cable

Power

supply

5.2. Devic e Configuration

The hardware components to replicate t he connection procedures in this guide are as follows:

(Sysmac Studio installed,
OS: Windows 10)

(Built-in EtherCAT port)

Power supply

Ethernet cable

Manufacturer Name Model Version

OMRON NX-series CPU Unit

NX102-1200 Ver.1.40

(Built-in EtherCAT port)

－

Power supply
(24 VDC for Controller)

－

OMRON Sysmac Studio SYSMAC-SE2□□□ Ver.1.29

－ Personal computer

－

(OS: Windows 10)

－

LAN cable (STP (shielded,

－
twisted-pair) cable of Ethernet
category 5 or higher)

OMRON

Ethernet cable (with indus trial

XS5W-T421-□M□-K
Ethernet connector)

INFICON Gauge BPG402-SE Rev.

0x00000201
INFICON ESI file Inficon BPG402 V2_0_1_6.xml
－

Power supply

－

(24 VDC for Gauge)

Contact INFICON Co., Ltd. to obtain the ESI file specified above before proceeding.

The connection line of Ether CAT communications cannot be shared with other Ethern et
networks. Do not use devices for Ethern et such as an Ethernet switch. Use an Et hernet cable
(double shielding with alum inum tape and braiding) of Category 5 or higher, and use a
shielded connector of Category 5 or higher. Connect the cable shield to t he c onnector hood
at both ends of the cable.

5．Applicable Devices and Device Configuration

7

Precautions for Correct Use

Additional Information

Additional Information

Update Sysmac Studio to t he version 1.29 or to a higher version. If you use a version higher
than the one specified, the pr ocedures and related screenshot s described in Section 7 and
the subsequent sections may not be applicable. In that case, use the equivalent procedures
described in this guide by referr i ng t o t he Sysmac Studio Version 1 Operation Manual (Cat.
No. W504).

For information on the specifications of Ethernet cables and the network wiring, refer to

Section 4. EtherCAT Network Wiring of the NJ/NX-series CPU Unit Built -in EtherCAT® Port
User's Manual (Cat. No. W505).

For information on the pow er supply s pecifications of the Controller, refer to the NX-series
NX102 CPU Unit Hardware User's Manual (Cat. No. W593).

Additional Information

For information on the pow er supply s pecifications of the Gauge, ref er t o t he Operating
Manual Bayard-Alpert P irani G auge (tina46e1).