Omron D6F-PH User Manual

MEMS Differential pressure Sensor

D6F-PH

User’s Manual

MEMS Differential pressure Sensor

A288-E1-01

Contents

1. Outline ........................................................................................................................................2

2. Structure .....................................................................................................................................2

3. Dimensions .................................................................................................................................2

4. Principle of Pressure detection ..................................................................................................3

5. Features of Product ....................................................................................................................3

6. Usage .........................................................................................................................................5

6-1. Recommended tube connection method of D6F-PH......................................................... 5

6-2. Electrical connection method of D6F-PH ........................................................................... 6

7 Specification of Communication .................................................................................................7

7-1. Outline of I2C Interface ...................................................................................................... 7

7-2. Interface Configuration Registers ...................................................................................... 7

7-2-1. Access Address Registers (00h – 01h) .......................................................................... 9

7-2-2. Serial Control Register (02h) .......................................................................................... 9

7-2-3. Write Buffer Registers (03h – 06h) ............................................................................... 10

7-2-4. Read Buffer Registers (07h – 0Ah) .............................................................................. 10

7-2-5. Initialize (0Bh) ............................................................................................................... 11

7-2-6. Power Sequence Register (0Dh) ................................................................................. 11

7-2-7. Example of I2C Access Commands ............................................................................. 12

7-3. Description of Registers ................................................................................................... 13

7-3-1. Sensor Control (D040h) ............................................................................................... 13

7-3-2. Flags (D046h) ............................................................................................................... 14

7-3-3. CRC Calculation Control ( D049h ) .............................................................................. 15

7-3-4. Data Registers (D051h-D068h).................................................................................... 17

8. Explanation of output data .......................................................................................................18

8-1. D

8-2. Register content ............................................................................................................... 18

8-3. Example of Sensing data ................................................................................................. 19

8-4. Sensor Operation flow chart ............................................................................................ 20

9. I2C Instruction for Sensor Operation .......................................................................................21

10. Sample Source Code ...............................................................................................................24

10-1. D6F_PH_Sample.h ...................................................................................................... 24

10-2. D6F_PH_Sample.c....................................................................................................... 25

11. WARRANTY AND LIMITED LIABILITY....................................................................................32

ata alignment ................................................................................................................. 18

1 D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

基板

フローセンサチップ

基板

フローセンサチップ

Flow Sensor chip

Substrate

Inlet

1. Outline

This User's Manual note is intended to demonstrate how to use and interface with Omron’s MEMS differential pressure sensor(D6F-PH). It should be noted that this document is intended to supplement the datasheet, which should be referenced when using the sensor.

2. Structure

Fig.1 shows the internal cross-section view of the MEMS differential pressure sensor (D6F-PH). Air will flow from one inlet and out the other passing over the MEMS flow chip surface. The MEMS chip is able to measure the airflow as air passes over the chip.

Fig.1 the internal cross-section view of MEMS differential pressure sensor (D6F-PH)

3. Dimensions

Fig.2 Outline dimensions of D6F-PH

D6F-PH MEMS Differential pressure Sensor User’s Manual (A288) 2

Orange：thermal mass flow method

chip

vVout ∝

main

vp ∝∆

Thermal mass flow method

proportional to the square root of the gas flow rate through the

a conventional

square of the gas flow velocity

4. Principle of Pressure detection

By using a thermal mass flow sensor, Omron’s MEMS differential pressure sensor can detect

fine changes in differential pressure.

Fig. 3 Principle of differential pressure sensor (a) and relationship between flow rate

and differential pressure (b)

5. Features of Product

By using a thermal mass flow method, Omron’s MEMS differential pressure sensor is more sensitive compared with that of a conventional differential pressure sensor in the low-pressure range.

Blue：conventional method

Fig. 4 Comparison with conventional method and thermal mass flow method

The output of Omron’s sensor is

sensor chip surface.

Conventional method

The output of sensor is proportional to the

through the main channel.

3 D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

Item

Description

Min

Typ

Max

Unit

Note

Range of Differential

-50 - 50

D6F-PH0505AD3

Pressure

0 - 250

D6F-PH0025AD1

-500

500

D6F-PH5050AD3

Resolution

12 - bit

Zero point accuracy

-0.2

+0.2

Span accuracy

Note

-3 - +3

%R.D.

Span shift by Temperature

-0.5

+0.5

%R.D.

With respect to a change of 10 degC

Response Time

msec

12bit Resolution

Ambient Operating Temp

-20 - 80

degC

without freezing and condensation

Ambient Storage Temp

-40 - 80

degC

without freezing and condensation

Ambient Operating Humidity

35 - 85

%RH

without freezing and condensation

Ambient Storage Humidity

35 - 85

%RH

without freezing and condensation

Supply Voltage

2.3

3.3

3.6

VDC

Current Consumption

- - 6

Vcc=3.3V、25degC

Frequency of SCL

- - 400

kHz

FAST Mode

Table1. Specifications of D6F-PH□□□□

（Note）

（

）

（Note）Span accuracy and zero point accuracy are the independence errors, and are not satisfied

at the same

time.

D6F-PH MEMS Differential pressure Sensor User’s Manual (A288) 4

Orifice

Main Channel

Pressure Port

Flow direction

Bypass flow path length is 800[mm] or less

High Pressure side

Lower Pressure side

6. Usage

6-1. Recommended tube connection method of D6F-PH

When connecting the D6F-PH sensor in a bypass configuration, the sensor is able to detect fine pressure changes. This is achieved by providing an orifice in the main channel, which generates a small pressure change before and after the orifice. The D6F-PH will be connected to the bypass flow path from the pressure port which is provided before and after the orifice.

of main channel

Fig. 5 Recommended tube connection method of D6F-PH

Here, the inner diameter of the bypass tube which is connected to the D6F-PH is 4[mm] and its length is 800[mm] or less.

5 D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

Sensor

6-2. Electrical connection method of D6F-PH

For the I2C output, the D6F-PH will require a pull-up resistor to each clock line(SCL) and data line (SDA). A pull-up resistor of 2.2[kΩ] (recommended value) should be implemented between the Vcc as shown in Fig.6. In addition, please adjust the pull-up resistor’s value depending on the transfer rate of SCL and the I2C wire length.

Fig. 6 Electrical connection method of D6F-PH

* Precautions when connecting the flow sensor An error may occur during communications due to the effect of the noise of the customer’s environment. In such a case, check the following points, and correct the communications error.

(1) Checking the communications speed This product supports an SCL frequency of up to 400 kHz, however, if there is a likelihood of occurrence of a communications error, we recommend using the SCL frequency at 100 kHz.

(2) Checking the wiring cable If the length of the cable used to connect the customer-controlled microcontroller and an OMRON flow sensor is long, the effect of noise may be more prominent. In such a case, OMRON recommends using a shielded cable.

(3) Checking the pull-up resistor’s value A pull-up resistor is necessary for I2C communications of this product. Although the recommended resistor value is 2.2[kΩ], please select the optimum resistor value according to the length of the cable used to connect the customer-controlled microcontroller and the OMRON flow sensor. A communications error is judged unless an ACK is returned from the sensor side. The ACK response time is equal to one clock cycle of SCL. If an ACK response is not returned after this time has elapsed, it results in a communications error. In such a case, turn off the device.

D6F-PH MEMS Differential pressure Sensor User’s Manual (A288) 6

D6F-PH0025AD1

D6F-PH5050AD3

D6F-PH0025AD1-1

D6F-PH5050AD3-1

D6F-PH0025AD1-2

D6F-PH5050AD3-2

D6F-PH0025AD1-3

D6F-PH5050AD3-3

Communication

method

Slave

Address

HEX

0x6C

0x6D

0x6E

0x6F

BIN (7bit)

110_1100

110_1101

110_1110

110_1111

Communications

frequency

Signal

SCL

Serial Clock

SDA

Data Signal

Bit

Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1

Bit 0

R/W

Value

1 1 0 1 1 0 0

1/0

Address

Descriptions

D040h

SENS_CTRL

Sensor Control Register

D046h

FLAGS

Flag Register

D049h

INT_CTRL

CRC Calculation Control

D051h

COMP_DATA1_H

Compensated Flow rate Register

D052h

COMP_DATA1_L

D061h

TMP_H

Internal Temperature Register

D062h

TMP_L

D065h

REF_FLOW1_H

Sensor Reference Flow Register

D066h

REF_FLOW1_L

D067h

THRESH_FLOW1_H

Sensor Threshold Flow Register

D068h

THRESH_FLOW1_L

Digital

Signal

A/D converter

I2C

Configuration

7 Specification of Communication

7-1. Outline of I2C Interface

Table2. Basic specification of I2C communication

D6F-PH0505AD3

D6F-PH0505AD3-1

Max. 400k Hz

D6F-PH0505AD3-2

I2C

D6F-PH0505AD3-3

Table 3. I2C slave address is expressed as below. (Example of 0x6C)

During Write: Set LSB of slave address to “0” to form D8h (1101_1000b). During Read: Set LSB of slave address to “1” to form D9h (1101_1001b).

7-2. Interface Configuration Registers

The memory and registers access are controlled by writing to the interface configuration registers.

Table4. Internal Register Map

Conditioning

Processing

7 D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

Configuration Address

00h

Access Address 1 (Upper byte)

Upper byte of first Access Address

01h

Access Address 2 (Lower byte)

Lower byte of first Access Address

02h

Serial Control

Write / Read Access Control

03h

Write Buffer 0

Data to be written at Address

04h

Write Buffer 1

Data to be written at Address + 1

05h

Write Buffer 2

Data to be written at Address + 2

06h

Write Buffer 3

Data to be written at Address + 3

07h

Read Buffer 0

Data read from Address

08h

Read Buffer 1

Data read from Address + 1

09h

Read Buffer 2

Data read from Address + 2

0Ah

Read Buffer 3

Data read from Address + 3

0Bh

Initialize

0Dh

Power Sequence

Hardware reset control

I2C Configuration resister

HOST

Access address

ROM / Resister

Various internal registers

In case access to internal registers are needed, the target register’s address needs to be set to the Interface Configuration Register (address:00h and 01h).

Control R/W Data No. of bytes (Max. 4)

Fig. 7 Configuration overview

Table5. Interface Configuration Register Map

Function Note

Upper byte：bit[15:8] of 16bit data, Lower byte：bit[7:0] of 16bit data

D6F-PH MEMS Differential pressure Sensor User’s Manual (A288) 8

Address

MSB

D7 D6 D5 D4 D3 D2 D1

LSB

00h

A15

A14

A13

A12

A11

A10

01h

Address

MSB D7 D6 D5 D4 D3 D2 D1

LSB D0

02h

D_byte_ cnt[3]

D_byte_ cnt[2]

D_byte_ cnt[1]

D_byte_ cnt[0]

Req

R_WZ

Acc_ctl2 [1]

Acc_ctl2 [0]

7-2-1. Access Address Registers (00h – 01h)

The access address registers are used to access internal register blocks including sensor register map, ADC register map, and internal memory. It specifies the data transfer start address with auto increment for multiple byte data transfer.

Table6. Access Address Register

7-2-2. Serial Control Register (02h)

Table7. Serial Control Register (02h)

The serial control register contains various bits to modify the behavior of the serial access.

• Acc_ctl2 [1：0] – Access Control bits

0 0 = 16bits address (A15-A0) access ( internal ROM and registers) 0 1 = 8bits address (A7-A0) access and used to access MCU internal 256 byte dual

port RAM. 1 0 = reserved 1 1 = reserved

• R_WZ – Read or Write access select bit 0 = Write Access 1 = Read Access

• Req- Request bit 0 = the previous request is done 1 = new request. After the serial bus bridge controller finishes a request, it will clear

Req to 0. For write requests the bridge controller moves the data in write data buffers to the location pointed by access address. For read requests the bridge controller stores the read data into data buffer.

• D_byte_cnt3 [3：0] Transfer data byte count. It only supports 1, 2, 3, 4 data byte transfer.

9 D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)

7-2-3. Write Buffer Registers (03h – 06h)

There are four write data buffer registers at address: 03h – 06h. To perform a write, the host can either use a single command or perform separate writes to the following addresses.

The host can write to sensor register map in single byte transfer: The host can burst write data start from address = 00h with following data byte,

A[15:8]、A[7:0]、18h、data[0].

Or the host can do four serial bus writes and write one data byte into serial bus register with the following steps.

・Write A[15:8] to address = 00h of interface configuration registers. ・Write A[7:0] to address = 01h of interface configuration registers. ・Write data[0] to address = 03h of interface configuration registers. ・Write 18h to address = 18h of interface configuration registers.(1byte, new request, write)

[Note] Read Serial Control register(02h). If Req = 0 (02h[3]), controller is finished with write.

7-2-4. Read Buffer Registers (07h – 0Ah)

There are four read data buffer registers at address: 07h – 0Ah. To perform a read, the host can either use a single streaming command or perform separate commands to the following addresses. After the read request is done by the internal serial bus bridge controller, the Req bit is cleared to 0 and read data is stored in rd_buf1 – rd_buf4 (address = 07h – 0Ah).

For single byte read request the host can burst write A[15:8], A[7:0], 1Ch at start address = 00h. The host needs to read the command register until the Req bit is cleared to 0, then read “read data buffer” for read data at address = 07h.

The host can perform a single byte read by individually programming the following registers.

・Write A[15:8] to address = 00h of interface configuration registers. ・Write A[7:0] to address = 01h of interface configuration registers. ・Write 1Ch to address = 02h of interface configuration registers.(1byte, new request, read)

[Note] Read address = 02h. If Req = 0 (02h[3]), controller is finished with read data[0] from address = 07h.

D6F-PH MEMS Differential pressure Sensor User’s Manual (A288) 10

+ 25 hidden pages

Omron D6F-PH User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

1. Outline

2. Structure

3. Dimensions

4. Principle of Pressure detection

5. Features of Product

6. Usage

6-1. Recommended tube connection method of D6F-PH

6-2. Electrical connection method of D6F-PH

7 Specification of Communication

7-1. Outline of I2C Interface

7-2. Interface Configuration Registers

7-2-1. Access Address Registers (00h – 01h)

7-2-2. Serial Control Register (02h)

7-2-3. Write Buffer Registers (03h – 06h)

7-2-4. Read Buffer Registers (07h – 0Ah)