Omega Products 1827FMA5445ST User Manual

ECONOMICAL GAS MASS
FLOW CONTROLLERS

For Clean Gases
With Optional Integral Display

FMA5400 Series

Standard

U NIST-Traceable

Calibration

U Reads and Controls

Gas Mass Flow Without
Temperature or Pressure
Compensation

U Available in Economical

Aluminum or
Corrosion-Resistant
316 SS

U Tiltable LCD for

Easy Reading

The FMA5400/5500 Series
electronic gas mass flow
controllers can control the flow of a
wide variety of gases from 10 SCCM
up to 1000 SLM. Utilizing heat
transfer through a heated tube, the
FMA5400/5500 measures gas mass
flow rate directly, without needing
to compensate for variations in gas
temperature or pressure (within stated
limits). They are available in an
economical aluminum/brass
construction for typical gas flows and
a 316 SS construction for
applications that require more
corrosion resistance. The FMA5400
Series without integral display is
supplied with both an analog 0 to 5
Vdc and 4 to 20 mA output for remote
monitoring; the FMA5500 Series
features an integral 3¹⁄₂ digit display
and an analog output. The display is
tiltable over 90 degrees for viewing
convenience and is calibrated to read
out directly in SCCM or SLM for
nitrogen (other gas calibrations
available by special order).

The FMA5400/5500 mass flow
controllers feature a built-in
electromagnetic valve for maintaining
a constant flow rate regardless of
variations in inlet or outlet pressures.
The setpoint is controlled either
locally via a potentiometer
accessible through a window in the
case or remotely via an analog
0 to 5 Vdc or 4 to 20 mA signal
(field selectable).

FMA5512, shown

smaller than

actual size.

The FMA5400/5500 Series
controllers require 12 to 15 Vdc
power @ 800 mA maximum, which
can be supplied by the FMA545PW
wall plug-in socket power supply
(24 Vdc power input @ 650 mA is
available as an option). The
electronics are reverse-polarity
protected and have a resettable
fuse. Model number FMA545C
(supplied separately) provides a
mating 15-pin “D” connector with

2.4 m (8') of shielded cable for
accessing the analog output signals
and power input connections. The
LCD for the FMA5500 Series is
connected to the lower electronics
via a modular plug. The LCD can be
remotely located by purchasing an
FMA18RC remote cable assembly–
you must then build your own
assembly for panel mounting
the LCD.

SPECIFICATIONS

Accuracy: ±1.5% FS, including linearity

over 15 to 25°C (59 to 77°F)
and 0.7 to 4.2 kg/cm
±3% FS for units ≥100 SLM from
0 to 20% of range

Repeatability: ±0.5% of full scale
Temperature Coefficient: 0.15% FS/°C
Pressure Coefficient:

0.01% FS per psi (0.07 bar)

Maximum Pressure Drop: 50 psid
Response Time: 5 seconds to within

±2% of set flow rate over 25 to 100% FS

2

(10 to 60 psia)

D-27

FMA5402ST mass flow controller
without display, 316 SS body,
shown smaller than actual size.

Maximum Gas Pressure: 35 kg/cm2

gage (500 psig); 1.76 kg/cm (25 psig)
optimum
Gas and Ambient Temperature:
5 to 50°C (41 to 122°F)
Leak Integrity: 1 x 10
helium max to outside environment

Ma terials in Fluid Contact:
Aluminum Models:

Anodized aluminum, 316 SS,
brass and FKM O-rings

Stainless Steel Models:
316 SS and FKM O-rings

Output Signal:

Linear 0 to 5 Vdc: 1000 V
minimum load
4 to 20 mA: 50 to 500 V loop
resistance, ±20 mV max noise

Transducer Power: 12 Vdc @ 800 mA
standard; 24 Vdc @ 650 mA optional

Turndown Ratio: 50:1
Shipping Weight: 1.8 kg (4 lb)
Compliance: EN55011 class 1,

class B; EN50082-1

Minimum Pressure Drop:

SLM psid SLM psid
Up to 9 1.1 200 10

10 to 30 3.9 500 12
50 8 1000 15
60 to 100 18.9

Altitude Sensitivity: With horizontal
flow path, no shift in calibration up to
+20 degree pitch

Gas Relative Humidity: 0 to 70% RH

-7

cc/sec of

Dimensions: cm (inch)

Unit Maximum Lay Length Connection­ Flow Rate with Fittings Maximum Height Maximum Width Compression Fitting

10 SCCM to 10 SLM 16.0 (6.29) 14.2 (5.60) 2.5 (1.00) ¹⁄₄"
15 to 50 SLM 18.3 (7.21) 15.2 (5.98) 3.2 (1.25) ¹⁄₄"
60 to 100 SLM 18.6 (7.33) 15.2 (5.98) 3.2 (1.25) ³⁄₈"
200 SLM 31.2 (12.30) 16.8 (6.60) 4.4 (1.75) ³⁄₈"
500 SLM 31.5 (12.40) 19.2 (7.55) 7.6 (3.00) ¹⁄₂"
1000 SLM 26.7 (10.53) 21.7 (8.56) 10.2 (4.00) ³⁄₄ FNPT

To Order Visit omega.com/fma5400_5500 for Pricing and Details

Model No. Model No. Model No. Model No.
Aluminum/Brass Stainless Steel Aluminum/Brass Stainless Steel Body Maximum
Body with Display Body with Display Body without Display without Display Flow Rate

FMA5502 FMA5502ST FMA5402 FMA5402ST
FMA5504 FMA5504ST FMA5404 FMA5404ST
FMA5506 FMA5506ST FMA5406 FMA5406ST

FMA5508 FMA5508ST FMA5408 FMA5408ST 100 SCCM
FMA5510 FMA5510ST FMA5410 FMA5410ST 200 SCCM

FMA5512 FMA5512ST FMA5412 FMA5412ST
FMA5514 FMA5514ST FMA5414 FMA5414ST
FMA5516 FMA5516ST FMA5416 FMA5416ST
FMA5518 FMA5518ST FMA5418 FMA5418ST
FMA5520 FMA5520ST FMA5420 FMA5420ST
FMA5523 FMA5523ST FMA5423 FMA5423ST
FMA5524 FMA5524ST FMA5424 FMA5424ST
FMA5526 FMA5526ST FMA5426 FMA5426ST
FMA5527 FMA5527ST FMA5427 FMA5427ST
FMA5528 FMA5528ST FMA5428 FMA5428ST
FMA5540 FMA5540ST FMA5440 FMA5440ST
FMA5541 FMA5541ST FMA5441 FMA5441ST
FMA5542 FMA5542ST FMA5442 FMA5442ST
FMA5543 FMA5543ST FMA5443 FMA5443ST
FMA5544 FMA5544ST FMA5444 FMA5444ST
FMA5545* FMA5545ST* FMA5445* 1827FMA5445ST* 1000 SLM

10 SCCM
20 SCCM
50 SCCM

500 SCCM
1 SLM
2 SLM
5 SLM
10 SLM
15 SLM
20 SLM
30 SLM
40 SLM
50 SLM
60 SLM
80 SLM
100 SLM
200 SLM
500 SLM

D

Accessories

Model No. Description
FMA545C Female 15-pin D-connector, 2.4 m (8') of shielded cable
FMA545PW Socket plug-in power supply for 100 to 240 Vac
FMA545PW-220VAC Socket plug-in power supply for 220 Vac, European plug type
FMA18RC10 3.0 m (10') cable for remote LCD mounting
FMA18RC25 7.6 m (25') cable for remote LCD mounting

* Comes with 3⁄4 FNPT connections instead of compression fittings.
Comes complete with compression fittings, NIST certificate and operator’s manual. Power

supplies sold separately.
Flow ranges specified are for nitrogen or air at 20 psig inlet (up to 50 SLM) or 25 psig inlet

60 to 100 SLM units) and 0 psig outlet. When used with other gases, a multiplication factor is
used to determine the flow rate, and the digital display must be rescaled in the field.

To request a custom calibration add the gas abbreviation and inlet pressure/outlet pressure as
a suffix to the model number.

Calibration are done at ambient temperatures only, 20ºC (70ºF)
For 24 Vdc powered units, add suffix “-24VDC” to the model number, no additional cost.
For oxygen cleaned units, add suffix “02CLEAN” to model number for additional cost.
Ordering Examples: FMA5410–ARGON, 50/0 psig, 70°F calls for an AL/BR body flow

controller without an integral display, calibrated for Argon at 50 psig inlet pressure, 0 psig
outlet pressure, 70°F gas temperature, powered by 12 Vdc.

FMA5516, N2 controller with display, and FMA545PW, power supply.

D-28

FMA5512, shown smaller

than actual size.