Page 1
GAS MASS FLOW METERS
AND CONTROLLERS
For Clean Gases
With Optional Integral Display
FMA-A2000 Series
Standard
U ±1% Accuracy
U Linear Analog Output
U Low Cost
U Thermal Technology
U For Flow Rates Up to 100 SLM
U Power Supply Included
FMA-A2117 without display,
shown smaller than actual size.
FMA-A2417 with display,
shown smaller than actual size.
The FMA-A2000 Series electronic mass flow meters/
controllers provide high performance, versatility, and
state-of-the-art design in one compact package. The
FMA-A2000 uses capillary-type thermal technology to
directly measure mass flow of gases. No temperature,
pressure, or square root corrections are required.
The FMA-A2300/2400 Series comes with an LCD
display, and all models have linear 0 to 5 Vdc and
4 to 20 mA output.
The FMA-A2000 measures the mass flow rate of
gases in 24 ranges from 0 to 100 SLM. For the
complete listing, refer to the range table on page
D-20. The FMA-A2000 Series is compatible with most
non-corrosive gases. The user is advised to check the
wetted materials against gas compatibility.
OMEGA’s mass flow controllers use an internal
electromagnetic proportional valve to control the
mass flow rate. A command signal can be supplied
either by the internal setpoint pot or by a 0 to 5 Vdc
external source.
D-1
Page 2
SPECIFICATIONS
154
(6.05)
(0.687)
(1.50)
1/4 FNPT
19 (0.75)
17
38
FLOW
INLET
OUTLET
154
(6.05)
(0.687)
(1.50)
1/4 FNPT
19 (0.75)
(3.50)
(3.80)
(2.450)
(0.25)
(0.25)
0.10 Dia. x 0.25 DP
2 PLCS
(1.00)
17
38
25
62
6
6
89
97
Accuracy: ±1% of full scale
including linearity
Repeatability: ±0.15% full scale
or better
Turndown Ratio: 100:1
Response Time: 5 seconds
Gas Ambient Temperature:
0 to 50°C (32 to 122°F)
Temperature Coefficient:
0.05% full scale per 1°C or better
Pressure Coefficient:
0.01% full scale per psi or better
Minimum Pressure Requirements:
Meters: 1 inch of H
Controllers Up to 1 SLM: 1 psi
Controllers Greater than
20 SLM: 20 psi
Differential Pressure for
Mass Flow Controllers:
<5 LPM, 5 to 50 psi standard
>5 LPM, 20 to 40 psi standard
Maximum Gas Pressure:
Polyacetal: 250 psig
316 SS: 500 psig
Leak Integrity:
-6
cc/min of He or better
1 x10
Wetted Parts:
Standard: Polyacetal, FKM O-rings
Optional: 316 SS, FKM O-rings
Connections:
1
⁄4" compression fitting for all
stainless steel models
Input/Output Connection:
9-pin sub-D connector
Control Signal: 0 to 5 Vdc
Control Valve: Electromagnetic
normally closed
Output Signal: Linear 0 to 5 Vdc,
1000 Ω min load, 4 to 20 mA,
500 Ω loop resistance
Mounting Threads:
316 SS Body:
Polyacetal: Self tap #4/6 screw
Input Power:
Meters: 24 Vdc @ 150 mA,
115 Vac, 220 Vac with AC adaptor
Controller: 24 Vdc @ 300 mA,
115 Vac, 220 Vac with AC adaptor
Dimensions: See drawing
Weight: 1.25 kg (2.75 lb)
with power supply
2
O
1
⁄4 FNPT standard;
6
" thread
⁄
32
Range Table
Code SCCM Code SLM C Code SLM
00 0 to 10 06 0 to 1 14 0 to 35
01 0 to 20 07 0 to 2 15 0 to 40
02 0 to 50 08 0 to 5 16 0 to 45
03 0 to 100 09 0 to 10 17 0 to 50
04 0 to 200 10 0 to 15 18 0 to 55*
05 0 to 500 11 0 to 20 19 0 to 60*
— — 12 0 to 25 20 0 to 65*
— — 13 0 to 30 21 0 to 70*
— — — — 22 0 to 75*
— — — — 23 0 to100*
FMA-A2100/2300 Series only
*
Dimensions: mm (inch)
To Order
Model No. Description
FMA-A21(*)
FMA-A22(*)-SS-(**)
FMA-A23(*)
FMA-A24(*)-SS-(**)
Compatible Meters; DPF50, DPF60, DPF300, DPF5500, DPF403. Visit us online for
more details.
Mass flow meter without display, ranges 0 to 10 SCCM to
0 to 100 SLM
Mass flow controller without display, with control valve,
ranges 0 to 10 SCCM to 0 to 50 SLM, 316 SS body
Mass flow meter with display, ranges 0 to 10 SCCM to
0 to 100 SLM
Mass flow controller with display and control valve, ranges
0 to 10 SCCM to 0 to 50 SLM, 316 SS body
Tubing and fittings of various
materials and styles are available.
Visit us online for details.
Accessories
Model No. Description
FMA-200PWA
SSLK-14-14
Comes complete with operator’s manual, 9-pin sub-D connector, power supply and
NIST calibration (5 data points).
Insert range code from table at top of page to complete model number.
*
For optional 316 stainless steel body, add suffix “-SS” to model number for additional cost
1
(
" compression fittings standard). SS body standard on FMA-A22 and FMA-A24 controllers.
⁄4
Note: All controller flow ranges specified are for nitrogen or air at 20 psig; when used for other
gases, a correlation factor is needed to determine the flow rate.
Specify gas, inlet/outlet pressure, temperature.
**
For 10-point NIST calibration certificate, add suffix “-NIST10” to model number for additional cost.
Ordering Examples: FMA-A2316, mass flow meter with display, calibrated for nitrogen at
20 psig inlet, room temperature for 0 to 45 SLM. ∆P: 5 to 20 psi.
FMA-A2102-SS, 316 stainless steel body mass flowmeter without display, 0 to 50 SCCM.
Replacement socket plug-in power supply for 90 to 260 Vac
316 SS compression fitting
1
⁄4 NPT for 1⁄4" OD tube
D-2
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