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ECONOMICAL GAS MASS FLOW
CONTROLLERS AND METERS
For Clean Gases
FMA3100 Series
Optional
U For Flow Rates
Up to 10 SLM
U 0 to 5 Vdc
Linear Output
U Cost Effective
FMA3100 Series mass
flow sensors represent a
breakthrough in mass flow
sensor technology. State-ofthe-art electronics, a compact
mechanical design, and mass
production tooling concepts are
combined into one high-performance,
cost effective product. The gas flow
sensor is suitable for many OEM
applications. A 0 to 5 Vdc linear
output is standard.
Using the basic FMA3100 thermal
mass flow sensor, the FMA3200
mass flow controllers offer
accurate, stable control of gas flows
in a compact package. In power-off
mode, the flow control valve is
closed with a minimal leak rate.
This cost-effective controller is ideal
for many OEM applications, with a
0 to 5 Vdc linear output and a
0 to 5 Vdc control input.
The FMA3300s combine the
features of the FMA3100 with an
adjustable 3
1
⁄2 digit LCD digital
display meter for viewing flow rate in
engineering units (i.e., mL/min or
L/min). These compact flowmeters
have proved effective in many
laboratory applications.
GENERAL SPECIFICATIONS
Output: 0 to 5 Vdc (2500 Ω minimum)
Input Setpoint Voltage
(FMA3200 Only): 0 to 5 Vdc
Accuracy: ±1.5% FS*
Repeatability: ±0.5% FS
Response Time: 2 seconds (typical)
to within ±2% of actual flow rate from
25 to 100% of full scale
FMA3206 mass flow
controller, shown actual size.
Operating Ambient:
10 to 50°C (50 to 122°F),
non-condensing atmosphere
Operating Pressure Range:
To 150 psi maximum at 25°C (77°F)
Temperature Coefficient:
±0.2% per °C
Pressure Coefficient: ±0.02% per psi
Leak Integrity: 1x10
He maximum to outside environments
Input Power:
FMA3100 and FMA3300:
12 to 15 Vdc, 100 mA (1.5 W)
FMA3200: 12 to 15 Vdc,
250 mA (3.75 W)
Connections:
flow ranges up to 1 L/min;
1
⁄4" compression fitting for up to 5 L/min;
3
⁄8" compression fitting for 10 L/min
Wetted Materials:
Anodized aluminum, FKM O-rings,
304 and 316 SS, epoxy, acetal
compression tube fittings standard
Turndown Ratio: 10:1
Gases: Most clean, dry gases (e.g., air,
nitrogen, carbon dioxide, argon,
hydrogen, helium, methane, oxygen)
Filtration: Requires 20-micron filter
if gas contains any particulate matter
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SCCS
1
⁄8" compression fittings,
SPECIFICATIONS
(FMA3200 Flow Controllers)
Differential Pressure: 15 to 40 psi
Valve Cycle Life: >1 million cycles;
valve is normally closed
Control Range: 50:1
Remote Setpoint Voltage: 0 to 5 Vdc
Weight:
FMA3100: 199 g (0.44 lb)
FMA3300: 249 g (0.55 lb)
FMA3200: 386 g (0.85 lb)
Size Without Fittings (Approx.):
FMA3100: 47 L x 26 W x 90 mm H
(1.87 x 1.03 x 3.55")
FMA3300: 47 L x 26 W x 127 mm H
(1.87 x 1.03 x 5.0")
FMA3200: 81 L x 26 W x 97 mm H
(3.17 x 1.03 x 3.80")
* Stated accuracy under general specifications
valid for the following conditions:
1. Temperature between
18 and 25°C (64 and 77°F)
2. Warm-up time: at least 10 min
3. Power input voltage stable
(12V ±0.1V) typical
4. Linearity: Add ±0.5% for ranges
up to 500 SCCM, ±1.0% over
500 SCCM
5. Accuracy range: 10 to 100%
6. Line pressure of 1 to 30 psi for
FMA3100 and FMA3300, and at
factory-specified settings
for FMA3200
7. Factory gas (specified) is used
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FMA3101
FMA3303
flow sensor
Models shown
smaller than
actual size.
flow sensor
To Order
Flow Meters
Model No.
Without Display
FMA3101 FMA3301
FMA3102 FMA3302
FMA3103 FMA3303
FMA3104 FMA3304
FMA3105 FMA3305
FMA3106 FMA3306
FMA3107 FMA3307
FMA3108 FMA3308
FMA3109 FMA3309
Comes complete with operator’s manual, and 0.6 m (24") signal/power cable (compatible only with power supplies below).
For optional 4-point NIST calibration certificate add suffix “-NISTAIR” to model number for additional cost.
Ordering Example: FMA3307, 0 to 2000 SCCM flow meter with display, and FMA3115PW, power supply/output cable.
Model No. P
With Display
Pressure Drop
Flow Rates**
0 to 20 SCCM
0 to 50 SCCM
0 to 100 SCCM
0 to 200 SCCM
0 to 500 SCCM
0 to 1 SLM
0 to 2 SLM
0 to 5 SLM
0 to 10 SLM 10" H2O
D
at Max Flow
1" H2O
2" H2O
3" H2O
Specify gas, inlet/outlet pressure and
*
temperature.
Flow ranges are based on dry air or
**
nitrogen as a standard; other gases available
(carbon dioxide, helium, argon, hydrogen,
methane, oxygen) for an additional cost.
For optional 4-point NIST calibration
certificate add suffix “-NISTAIR” to model
number, for additional cost.
Ordering Example: FMA3203-(Helium,
20/0 psig, 70°F), 0 to 100 SCCM flow
controller, and FMA3215PW, power supply/
output cable.
Made to Order
Accessories
Flow Meters: FMA3100 and FMA3300 Series
Model No. Description
FMA3115PW
FMA3230PW
Controllers Only: FMA3200 Series
FMA3215PW
FMA3223PW
Cable for FMA3100/3200/3300 Series
FMA3000C
Power supply/output cable (0 to 5 Vdc), 115 Vac
Power supply/output cable (0 to 5 Vdc), 230 Vac
Power supply/input/output cable (0 to 5 Vdc), 115 Vac
Power supply/input/output cable (0 to 5 Vdc), 230 Vac
1 m (3') cable with mating connector and stripped ends for use with power supplies that have
terminal connections
Controller (Without a Display)
Model No. Flow Rates** P Pressure Drop at Max Flow
FMA3202-(*)
FMA3203-(*)
FMA3204-(*)
FMA3205-(*)
FMA3206-(*)
0 to 50 SCCM
0 to 100 SCCM
0 to 500 SCCM
0 to 5 SLM
0 to 10 SLM
15 psi
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