Page 1
User’s Guide
TM
Shop online at
omega.com
e-mail: [email protected]
For latest product manuals:
www.omegamanual.info
FMA-2600/FVL-2600 SERIES
Mass and Volumetric
Flow Controllers
Page 2
omega.com [email protected]
Servicing North America:
U.S.A. Omega Engineering, Inc.
Headquarters: Toll-Free: 1-800-826-6342 (USA & Canada only)
Customer Service: 1-800-622-2378 (USA & Canada only)
Engineering Service: 1-800-872-9436 (USA & Canada only)
Tel: (203) 359-1660 Fax: (203) 359-7700
e-mail: [email protected]
For Other Locations Visit omega.com/worldwide
The information contained in this document is believed to be correct, but OMEGA accepts no liability for any errors it contains,
and reserves the right to alter specifications without notice.
Page 3
Thank you for purchasing an Omega FMA-2600A Series Gas Flow Controller.
help to ensure that you get the best possible service from your instrument. This
manual covers the following Omega instruments:
FMA-2600A Mass Gas Flow Controllers
FMA-LP2600A Low Pressure Drop Mass Gas Flow Controllers
FMA-2600A-LSS Mass Gas Flow Controllers
FMA-2600A-LSS Flow Controllers are for use with certain aggressive gases
(see page 67)
FMA-2600A-P Mass Gas Flow Controllers
the above instruments.
3
Page 4
TABLE OF CONTENTS Page
GETTING STARTED 6
MOUNTING 6
PLUMBING 7
PRESSURE 7
POWER AND SIGNAL CONNECTIONS 8
INPUT SIGNALS 9
Analog Input Signal 9
OUTPUT SIGNALS
DISPLAYS AND MENUS
MAIN
Gas Absolute Pressure
Gas Temperature
Set-Pt.
Mass Flow Rate
Flashing Error Message
SELECT MENU
CONTROL SETUP
Set-Point Source
PID Tuning 20
GAS SELECT 22
Composer 23
COMMUNICATION SELECT
Unit ID
MISCELLANEOUS 26
26
26
Pressure Averaging 26
Flow Averaging 26
LCD Contrast 26
MISC2 27
STP/NTP 27
DIAG TEST 28
Rotate Display 28
28
MANUFACTURER DATA 29
4
Page 5
TABLE OF CONTENTS Page
30
32
32
33
Gas Select 34
36
Data Format 36
37
37
38
39
47
49
Batch Processing
Accessories
67
Eight Pin Mini-DIN Pin-Out 72
DB15 Pin-Out Diagrams 73
Warranty / Returns See Inside of Back Cover
Page 6
GETTING STARTED
Power Jack
Control Valve 8 Pin MiniDIN
Display Screen
upstream
MOUNTING
6
Page 7
PLUMBING
Do not wrap
compounds can cause permanent damage to the controller should they get
from entering the measurement head of the instrument. Suggested maximum
PRESSURE
CAUTION!
7
Page 8
POWER AND SIGNAL CONNECTIONS
Mini-DIN connector.
Small Valve
4-20mA analog output
Large Valve
1 2
Standard 8 Pin Mini-DIN Pin-Out
3 4 5
6 7 8
Pin
2
Mini-DIN
Black
Brown
3
4
Controllers = Analog Set-Point Input
Orange
Yellow
6 Green
7 Blue
8 Purple
CAUTION!
8
Page 9
INPUT SIGNALS
7
6
5
4
3
2
1
8
5.12 Vdc
50 KOhm
Potentiometer
0-5 Vdc
Analog Input Signal
Apply analog input to Pin 4 as shown on page 8.
Standard 0-5 Vdc
CAUTION!
9
Page 10
15 3 24
1 532 4
9 8 7 6
PC Serial Port
1
2
5
8
7
4
3
6
8 Pin MiniDIN Connector
Pin Pin
8
3 Transmit Receive 3
2 Receive Transmit
9876
Page 11
OUTPUT SIGNALS
Standard Voltage (0-5 Vdc) Output Signal
have this output signal available on Pin 6. This output is generally available in
CAUTION!
Page 12
CAUTION!
Purple (Ground)
Red
Yellow
Purple
Yellow
2
3
5
Red
Purple
Red
Yellow
4
5
3
2
Unit A
Unit B
Unit C
1
9
8
7
6
Female Serial Cable Front
Page 13
GREEN
WHITE
RED
YELLOW
contrast.
Technical Data for TFT (Color Display) Meters, Gauges and Controllers
TFT
Meter or
Gauge
Supply Current
Small Valve
Controller
Large Valve
Controller
780 mA @
Page 14
DISPLAYS AND MENUS
Main
Main
PSIA
+13.60
+21.50
+0.00
+0.00
CCM
SETPT
TOTAL/
0123.4
TIMER
00123.45
REMAIN RESET
+0.00
SCCM
SCCM
+123.4
Scm3
2:05 h:m:s
MENU/
MAIN
The Main
SETPT
#C
0.000
SCCM
Air
MENU/
TOTAL
parameter will make that parameter
MENU
enter the Select Menu
TOTA L
MENU
will bring up the Select Menu
Select Menu
MISC
GAS
SELECT
MFG
DATA
CONTROL
SETUP
RS232
COMM
MAIN
Select Menu
From Select Menu you can change
Push MAIN
Page 15
MAIN
This
parameter.
SETPT
PSIA
+13.60
+0.00
CCM
UP
>#C
K
#F
#R
CANCEL SET
Set Point The set-point (SETPT
CCM in this
#C
+21.50
+0.00
SCCM
Air
+0.00
+0.00
SCCM
DOWN
MENU/
TOTAL
This sensor
local atmospheric pressure. This parameter
PSIA.
controllers measure the incoming
°C.
select F (Fahrenheit)
or R (Rankine) for the temperature scale.
Page 16
SCCM
S.
Pressing MENU switches the screen to the Select Menu
An error message (MOVVOV
POVTOV = temperature
.
Page 17
SELECT MENU
MODEL
INFO
OMEGA
MISC1
BACK
MISC2
DEVICE
UNITS
MAIN
Ph 800-826-6342
Fax 203-359-7700
BACK MAIN1
Manufacturer Data
UNIT ID
A
BACK MAIN
BAUD
19200
Miscellaneous
DOWN
UP
>Recent
Standard
Factory Custom
COMPOSER User Mixes
Bioreactor
Breathing
Chromatography
Fuel
CANCEL SELECT
PAGE
Gas Select
MISC
Select Menu
GAS
SELECT
SETPT
SOURCE
- ON AUTO
TARE
MFG
DATA
CONTROL
SETUP
LOOP
VAR
PID
RS232
COMM
MAIN
SETPT
+0.00
MAIN
SETPT
PSIA
+13.60
#C
0.000
+21.50
SCCM
+0.00
SCCM
Air
+ 0.00
+0.00
CCM MAIN
Main
Control Setup
Page 18
CONTROL SETUP
Control Setup
SETPT
SOURCE
- ON AUTO
TARE
LOOP
VAR
PID
UP
>Serial/ FRONT PANEL
ANALOG
CANCEL SET
DOWN
If your controller has the IPC
SETPT refers to the set-point
only if FRONT PANELSETPT. Then use SELECT to
SETPT
+0.0
MAIN
MODE
SETPT SOURCE
above SETPT SOURCE will allow you to
to your controller.
Press CANCEL to return to the previous
The controller will ignore any set-point
Front Panel
Front Panel input must be selected
prior to changing the set-point at
Analog refers to a remote analog set-
Page 19
CAUTION!
SETPT
SOURCE
-ONAUTO
TARE
UP
>Mass Flow
Volumetric Flow
BAbs Pressure
CANCEL SET
LOOP
VAR
PID
DOWN
SETPT
+0.0
MAIN
MODE
LOOP VAR
Pressing the LOOP VAR
Control Setup screen will allow you to
with the control valve upstream of the
can be set to control on outlet pressure
(absolute pressures only) or volumetric
The change from mass to volume can
When you change from controlling
See
page 20 – PID TUNING.
Contact Omega if you are having
dicules with this procedure.
ON AUTO / OFF AUTO—
Page 20
PID TUNING
SETPT
SOURCE
-ONAUTO
TARE
UP
> PD PID
PD2I PID
CANCEL SET
P
00100
BACK
LOOP
VAR
PID
DOWN
I
00000
LOOP
TYPE
SETPT
+0.0
MAIN
MODE
D
02501
MAIN
All units leave the factory with a generic
parameters may resolve the problem.
terms of the PID control loop.
PID.
Press LOOP TYPE.
PID control algorithm. Press SET.
P
PID loop.
I refers to the Integral term of the PID loop.
D
loop.
value so that it can be returned to
20
Page 21
The PD
promote
reduce
The PD2I algorithm is a PID algorithm used primarily for high performance
change of the process value.
control loop.
Because of these dierences, you will note the following:
gain is 200.
Page 22
GAS SELECT
Gas Select allows you to set your
composer to
UP
>Recent
Standard
Factory Custom
Composer User Mixes
Bioreactor
Breathing
Chromatography
Fuel
CANCEL SET
UP
> Fuel
Laser
O2 Concentrator
Pure Corrosive
Pure Non-Corrosive
Refrigerant
Stack
Welding
CANCEL SET
DOWN
DOWN
PAGE
PAGE
Press PAGE to view a new page in the gas category list.
* FMA-2600A-LSS Series
Gas Select
GAS SELECT on the Select
»
»
on earlier Omega instruments (page 37)
» Factory Custom: Present only if customer
»
» Bioreactor (page 43)
» Breathing (page 44)
» Chromatography (page 46)
»
»
» O2 Concentrator (page 46)
» Pure Corrosive* (page 40)
» Pure Non-Corrosive (page 39)
»
» Stack (page 46)
»
22
Page 23
COMPOSER
UP
>Add Mix: 20 Free
CANCEL SET
UP
Composer Mix name:
MyGas
------˄
BACK/
CANCEL
EDIT
NAME
Composer Mix: MyGAS
DOWN
DOWN
CHANGE
CASE
ADD GAS
NEXT
LETTER
SET
GAS
OPTNS
Composer allows you to program
Composer User Mixes on the GAS
CHANGE CASE
Press SET to save the name.
ADD GAS
component gas.
GAS OPTNS
0.00% of Total
BACK/
CANCEL
CHANGE
CASE
SET
23
Page 24
UP
DOWN
Percent of Air:
SELECT
50.00
˄
DIGIT
UP
DOWN
Percent of Ar Argon:
SELECT
30.00
˄
DIGIT
BACK/
CANCEL
Percent of He Helium:
UP
CLEAR
DOWN
20.00
˄
BACK/
CANCEL
CREATE
NEW
MAIN
CLEAR
COMPOSER USER MIX
MyGas
HAS BEEN SAVED
SET
SELECT
DIGIT
SET
CREATE
SIMILAR
SELECT
MIXTURE
BACK/
CANCEL
EDIT
NAME
Composer Mix: MyGAS
50% Air
30% AR Argon
20% He Helium
100.00% Total
CANCEL SAVE
CLEAR
ADD GAS
SET
GAS
OPTNS
may press CREATE SIMILAR to
Press CREATE NEW
Press SELECT MIXTURE to bring the
24
Page 25
COMMUNICATION SELECT
UNIT ID
A
BACK MAIN
UNIT ID
C
UP
BAUD
19200
DN
C
BACK
BAUD
RESET A
DN
SET
UP
Access by pressing
RS232 COMM or
COMM on the Select Menu
Unit ID
computer port.
Press UNIT ID
See RS232 Communicaons (page 31) for
informaon about the streaming mode.
Baud
Press BAUD
matches your computer. The choices are
19200
BACK SET
Page 26
MISCELLANEOUS
MiscellaneousMISC
MISC1 or MISC2.
MISC1
ZERO BAND
prevent electrical noise from showing up on the
ZERO BAND
Press ZERO BAND. Then use SELECT to choose
Pressure Averaging and Flow Averaging may
These are geometric running averages where
Press FLOW AVG. Then use SELECT to choose the
BACK
UP
PRESS
AVG
LCD
CONTRAST
DOWN
FLOW
AVG
MAIN
SELECT
ZERO
BAND
0.0
>
CANCEL
CLEAR
SET
Press PRESS AVG.
DOWN
UP
11
CANCEL
RESET
SET
26
Page 27
MISC2
STP/NPT
standard
STP/
NTP
DIAG
TEST
ROTATE
DISP
normal temperature
generally useful for comparison purposes to
parameters.
The STPSTP TEMP
BACK MAIN
STP PRESS screens.
STP TEMP allows you to select from
or
The NTPNTP
TEMPNTP PRESS screens.
using the SET
STP
TEMP
STP
PRESS
MAIN will revert screen to the
SET
MAIN
STP PRESS enables you to select from a
SET
Pressing SETSET
UP
Temperature: #C
DOWN
25.0000
BACK/
CANCEL
CLEAR
STP TEMP Display
SELECT
DIGIT
SET
27
UP
Pressure: PaA
DOWN
101355.0
BACK/
CANCEL SET
CLEAR
STP PRESS Display
SELECT
DIGIT
Page 28
SCROLL
R8: AP Sig 7871
R9: Temp Sig 39071
R10: DP Side 9986
R11: DP Brdg 36673
R13: AP Brdg 36673
R16: Meter Fun 199
R18: Power Up 32768
BACK MAIN
to making any changes. It is also helpful
service personnel.
Select the DIAG TESTMISC2
screen to view a list of select register values.
Pressing the SCROLL
Press ROTATE DISP Inverted 180
DEVICE UNITS
Press DEVICE UNITS to access menus of
DOWN
UP
Mass Flow
Volumetric Flow
Pressure
Temperature
Mass Totalizer
Totalizer Time
DONE SELECT
available units.
DOWN
UP
SCCM
Scm3/h
Sm3/h
Sm3/d
Sin3/m
SCFH
NmL/s
CANCEL SET
PAGE
28
PRESSING SET WILL
AFFECT DISPLAY
AND SERIAL VALUES
VERIFY CONNECTED
SERIAL DEVICES
EXPECT THE CHANGE
CANCEL
SET
Page 29
MANUFACTURER DATA
MODEL
INFO
OMEGA
Ph 800-826-6342
Fax 203-359-7700
BACK MAIN1
MODEL: FMA-2600A-10SLPM-D
SERIAL NO: 80003
DATE MFG: 10/7/2012
DATE CAL: 10/9/2012
CAL BY: DL
SW REV: 2V62
Manufacturer Data
the MFG DATA
telephone number of the manufacturer.
Press MODEL INFO to show important
BACK MAIN
29
Page 30
allowing it to open.
Three-way Solenoid Valve
FMA-2600A-P Controller
Air Supply
Vent
30
Page 31
2.
3.
4.
or Auto Detect.
6.
In the default
assignments.
Streaming Mode – Advanced
To read
To modify
To return
RS485 units do not have a streaming
mode
Page 32
2.
3.
Changing from Streaming
Mode to Polling Mode
32
Page 33
220
new value.
25
new value.
as it approaches the new set-point (controls the overshoot).
33
Page 34
Gas Select
# GAS
0 Air Air
1 Argon Ar
2 Methane
3 CO
CO2
5 Ethane C2H6
6 Hydrogen H2
7 Helium He
8 Nitrogen N2
9 Nitrous Oxide N2O
10 Neon Ne
11 Oxygen O2
12 Propane C3H8
13 normal-Butane
Acetylene C2H2
15 Ethylene
16 iso-Butane i-C2H10
17 Krypton Kr
18 Xenon Xe
19 SF6
20 75% Argon / 25% CO2 C-25
21 90% Argon / 10% CO2 C-10
22 92% Argon / 8% CO2 C-8
23 98% Argon / 2% CO2 C-2
75% CO2 / 25% Argon C-75
25 75% Argon / 25% Helium A-75
26 75% Helium / 25% Argon A-25
90% Helium / 7.5% Argon / 2.5% CO2
27
28
29 95% Argon / 5% Methane P-5
90% Argon / 8% CO2 / 2% Oxygen
A1025
Star29
34
Page 35
No All c
.
Create a Gas Mixture
Do not type the brackets.one space between
Gas Name
Percent 1
Percent 2
?
Delete a Gas Mixture
?"
Page 36
2.004 Air
2.004 Air
2.004 Air
2.004 Air
Pressure Temp Mass Flow Set Point Gas
FMA-2600A Mass Flow Controller Data Format
36
Page 37
A
A
A
A
A
enter as many as you like.
37
Page 38
Tex t
38
Page 39
14.696 PSIA
Compressibilty
14.696
Density
Viscosity
Absolute
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
PSIA
GAS SELECT > Standard:
FMA-2600A Controllers will display: Acetylene, Air, Argon, Butane, Carbon Dioxide, Carbon Monoxide, Ethane, Ethylene (Ethene), Helium,
Hydrogen, Iso-Butane, Krypton, Methane, Neon, Nitrogen, Nitrous Oxide, Oxygen, Propane, Sulfur Hexauoride, Xenon, HE-25, HE-75, A1025, C-2,
C-8, C-10, C-25, C-75, P-5, Star29.
FMA-2600A-LSS Controllers add the following: Ammonia, Hydrogen Sulde, Nitric Oxide, Nitrogen Triouride, Propylene,
PURE NON-CORROSIVE GASES 25°C 0°C
Nitrogen Dioxide to 0.5% in an inert carrier, Refrigerant gases.
Long Name
Short
Name
14 C2H2 Acetylene 104.44800 1.07200 0.9928000 97.374 1.1728 0.9905
Gas
Number
0 Air Air 184.89890 1.18402 0.9996967 172.574 1.2930 0.9994
1 Ar Argon 226.23990 1.63387 0.9993656 210.167 1.7840 0.9991
16 i-C4H10 i-Butane 74.97846 2.44028 0.9735331 68.759 2.6887 0.9645
13 n-C4H10 n-Butane 74.05358 2.44930 0.9699493 67.690 2.7037 0.9591
39
4 CO2 Carbon Dioxide 149.31840 1.80798 0.9949545 137.107 1.9768 0.9933
3 CO Carbon Monoxide 176.49330 1.14530 0.9996406 165.151 1.2505 0.9993
5 C2H6 Ethane 93.54117 1.23846 0.9923987 86.129 1.3550 0.9901
60 D2 Deuterium 126.59836 0.16455 1.0005970 119.196 0.1796 1.0006
7 He Helium 198.45610 0.16353 1.0004720 186.945 0.1785 1.0005
15 C2H4 Ethylene (Ethene) 103.18390 1.15329 0.9942550 94.697 1.2611 0.9925
6 H2 Hydrogen 89.15355 0.08235 1.0005940 83.969 0.0899 1.0006
17 Kr Krypton 251.32490 3.43229 0.9979266 232.193 3.7490 0.9972
2 CH4 Methane 110.75950 0.65688 0.9982472 102.550 0.7175 0.9976
10 Ne Neon 311.12640 0.82442 1.0004810 293.822 0.8999 1.0005
8 N2 Nitrogen 178.04740 1.14525 0.9998016 166.287 1.2504 0.9995
9 N2O Nitrous Oxide 148.41240 1.80888 0.9945327 136.310 1.9779 0.9928
12 C3H8 Propane 81.46309 1.83204 0.9838054 74.692 2.0105 0.9785
11 O2 Oxygen 205.50210 1.30879 0.9993530 191.433 1.4290 0.9990
19 SF6 Sulfur Hexauoride 153.53200 6.03832 0.9886681 140.890 6.6162 0.9849
18 Xe Xenon 229.84830 5.39502 0.9947117 212.157 5.8980 0.9932
Page 40
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
79.96139 2.36608 0.9692405 Liquid Liquid Liquid
Long Name
Short
Gas
PURE CORROSIVES* 25°C 0°C
Name
32 NH3 Ammonia 100.92580 0.70352 0.9894555 91.930 0.7715 0.9848612
Number
Cis-Butene
(cis-2-butene)
80 1Butene Butylene (1-Butene) 81.62541 2.35906 0.9721251 74.354 2.6036 0.9614456
81 cButene
82 iButene Iso-Butene 80.84175 2.35897 0.9721626 73.640 2.6038 0.9613501
83 tButene Trans-Butene 80.28018 2.36596 0.9692902 Liquid Liquid Liquid
84 COS Carbonyl Sulde 124.09600 2.48322 0.9888443 113.127 2.7202 0.985328
85 CH3OCH3 Dimethylether 90.99451 1.91822 0.9816453 82.865 2.1090 0.9745473
33 Cl2 Chlorine 134.56600 2.93506 0.9874470 125.464 3.1635 0.98407
30 NO NO (Nitric Oxide) 190.05950 1.22672 0.9997970 176.754 1.3394 0.9995317
34 H2S Hydrogen Sulfide (H2S) 123.86890 1.40376 0.9923556 112.982 1.5361 0.9898858
31 NF3 NF3 (Nitrogen Triuoride) 175.42500 2.91339 0.9963859 162.426 3.1840 0.9951506
40
36 C3H6 Propylene (Propylene) 85.59895 1.74509 0.9856064 78.129 1.9139 0.9809373
35 SO2 Sulfur Dioxide 127.83100 2.66427 0.9828407 116.717 2.9312 0.9750866
86 SiH4 Silane (SiH4) 115.94400 1.32003 0.9945000 107.053 1.4433 0.99282
*Pure Corrosive gases are only available on FMA-2600A-LSS Series instruments that are compatible with these gases. Gas numbers 33
and 35 are not available on controllers
Page 41
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
Long Name
Short
Gas
REFRIGERANTS* 25°C 0°C
Name
100 R-11 Trichlorouoromethane 101.60480 5.82358 0.9641448 Liquid Liquid Liquid
Number
101 R-115 Chloropentauoroethane 125.14780 6.43293 0.9814628 114.891 7.0666 0.9752287
102 R-116 Hexauoroethane 137.81730 5.70097 0.9895011 126.635 6.2458 0.9858448
103 R-124 Chlorotetrauoroethane 115.93110 5.72821 0.9738286 105.808 6.3175 0.963807
104 R-125 Pentauoroethane 129.61740 4.98169 0.9847599 118.793 5.4689 0.979137
105 R-134A Tetrauoroethane 118.18820 4.25784 0.9794810 108.311 4.6863 0.9713825
106 R-14 Tetrauoromethane 172.44680 3.61084 0.9962553 159.688 3.9467 0.9948964
107 R-142b Chlorodiuoroethane 104.20190 4.21632 0.9742264 95.092 4.6509 0.9640371
108 R-143a Triuoroethane 110.86600 3.49451 0.9830011 101.344 3.8394 0.9765755
109 R-152a Diuoroethane 100.81320 2.75903 0.9785245 91.952 3.0377 0.9701025
110 R-22 Diuoromonochloromethane 126.30390 3.58679 0.9853641 115.325 3.9360 0.9801128
111 R-23 Triuoromethane 149.13160 2.88404 0.9922734 136.997 3.1568 0.9895204
112 R-32 Diuoromethane 126.13140 2.15314 0.9875960 115.303 2.3619 0.9827161
115 R-407C 23% R-32 / 25% R-125 / 52% R-134A 123.55369 3.95268 0.9826672 112.698 4.3427 0.9762849
113 RC-318 Octauorocyclobutane 115.04690 8.42917 0.9700156 104.785 9.3017 0.9594738
114 R-404A 44% R-125 / 4% R-134A / 52% R-143A 120.30982 4.18002 0.9836342 111.584 4.5932 0.9770889
116 R-410A 50% R-32 / 50% R-125 130.24384 3.56538 0.9861780 122.417 3.9118 0.9811061
117 R-507A 50% R-125 / 50% R-143A 121.18202 4.23876 0.9838805 112.445 4.6573 0.9774207
*Refrigerant gases are only available on FMA-2600A-LSS Series instruments that are compatible with these gases.
Page 42
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
219.79340 1.64099 0.9991638 203.890 1.7918 0.998798
Long Name
Short
Gas
WELDING GASES 25°C 0°C
Name
23 C-2 2% CO2 / 98% Ar 224.71480 1.63727 0.9993165 208.673 1.7877 0.998993
Number
22 C-8 8% CO2 / 92% Ar 220.13520 1.64749 0.9991624 204.199 1.7989 0.9987964
21 C-10 10% CO2 / 90% Ar 218.60260 1.65091 0.9991086 202.706 1.8027 0.9987278
140 C-15 15% CO2 / 85% Ar 214.74960 1.65945 0.9989687 198.960 1.8121 0.9985493
20 C-25 25% CO2 / 75% Ar 206.97630 1.67658 0.9986652 191.436 1.8309 0.9981609
141 C-20 20% CO2 / 80% Ar 210.86960 1.66800 0.9988210 195.198 1.8215 0.9983605
142 C-50 50% CO2 / 50% Ar 187.53160 1.71972 0.9977484 172.843 1.8786 0.9969777
24 C-75 75% CO2 / 25% Ar 168.22500 1.76344 0.9965484 154.670 1.9271 0.995401
25 He-25 25% He / 75% Ar 231.60563 1.26598 0.9996422 216.008 1.3814 0.9999341
143 He-50 50% He / 50% Ar 236.15149 0.89829 0.9999188 220.464 0.9800 1.00039
26 He-75 75% He / 25% Ar 234.68601 0.53081 1.0001954 216.937 0.5792 1.000571
27 A1025 90% He / 7.5% Ar / 2.5% CO2 214.97608 0.31460 1.0002511 201.175 0.3433 1.000556
144 He-90 90% He / 10% Ar 222.14566 0.31041 1.0003614 205.813 0.3388 1.00057
42
8% CO2 / 2% O2
Stargon CS 90% Ar /
28 Star29
Page 43
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
Long Name
Short
Gas
BIOREACTOR GASES 25°C 0°C
Name
145 Bio-5M 5% CH4 / 95% CO2 148.46635 1.75026 0.9951191 136.268 1.9134 0.9935816
Number
146 Bio-10M 10% CH4 / 90% CO2 147.54809 1.69254 0.9952838 135.383 1.8500 0.993893
147 Bio-15M 15% CH4 / 85% CO2 146.55859 1.63484 0.9954484 134.447 1.7867 0.9941932
148 Bio-20M 20% CH4 / 80% CO2 145.49238 1.57716 0.9956130 133.457 1.7235 0.994482
149 Bio-25M 25% CH4 / 75% CO2 144.34349 1.51950 0.9957777 132.407 1.6603 0.9947594
150 Bio-30M 30% CH4 / 70% CO2 143.10541 1.46186 0.9959423 131.290 1.5971 0.9950255
151 Bio-35M 35% CH4 / 65% CO2 141.77101 1.40424 0.9961069 130.102 1.5340 0.9952803
152 Bio-40M 40% CH4 / 60% CO2 140.33250 1.34664 0.9962716 128.834 1.4710 0.9955239
153 Bio-45M 45% CH4 / 55% CO2 138.78134 1.28905 0.9964362 127.478 1.4080 0.9957564
154 Bio-50M 50% CH4 / 50% CO2 137.10815 1.23149 0.9966009 126.025 1.3450 0.9959779
155 Bio-55M 55% CH4 / 45% CO2 135.30261 1.17394 0.9967655 124.462 1.2821 0.9961886
156 Bio-60M 60% CH4 /40% CO2 133.35338 1.11642 0.9969301 122.779 1.2193 0.9963885
157 Bio-65M 65% CH4 /35% CO2 131.24791 1.05891 0.9970948 120.959 1.1564 0.9965779
43
158 Bio-70M 70% CH4 / 30% CO2 128.97238 1.00142 0.9972594 118.987 1.0936 0.9967567
159 Bio-75M 75% CH4 / 25% CO2 126.51146 0.94395 0.9974240 116.842 1.0309 0.9969251
160 Bio-80M 80% CH4 / 20% CO2 123.84817 0.88650 0.9975887 114.501 0.9681 0.9970832
161 Bio-85M 85% CH4 / 15% CO2 120.96360 0.82907 0.9977533 111.938 0.9054 0.9972309
162 Bio-90M 90% CH4 / 10% CO2 117.83674 0.77166 0.9979179 109.119 0.8427 0.9973684
163 Bio-95M 95% CH4 / 5% CO2 114.44413 0.71426 0.9980826 106.005 0.7801 0.9974957
Page 44
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
180.95936 1.20909 0.9994833 170.051 1.3200 0.9992587
Short
Gas
BREATHING GASES 25°C 0°C
Long Name
Name
164 EAN-32 32% O2 / 68% N2 186.86315 1.19757 0.9996580 174.925 1.3075 0.9993715
165 EAN 36% O2 / 64% N2 187.96313 1.20411 0.9996401 175.963 1.3147 0.9993508
Number
166 EAN-40 40% O2 / 60% N2 189.06268 1.21065 0.9996222 176.993 1.3218 0.9993302
167 HeOx-20 20% O2 / 80% He 217.88794 0.39237 1.0002482 204.175 0.4281 1.000593
168 HeOx-21 21% O2 / 79% He 218.15984 0.40382 1.0002370 204.395 0.4406 1.000591
169 HeOx-30 30% O2 / 70% He 219.24536 0.50683 1.0001363 205.140 0.5530 1.000565
170 HeOx-40 40% O2 / 60% He 218.59913 0.62132 1.0000244 204.307 0.6779 1.000502
171 HeOx-50 50% O2 / 50% He 216.95310 0.73583 0.9999125 202.592 0.8028 1.000401
172 HeOx-60 60% O2 / 40% He 214.82626 0.85037 0.9998006 200.467 0.9278 1.000257
173 HeOx-80 80% O2 / 20% He 210.11726 1.07952 0.9995768 195.872 1.1781 0.9998019
174 HeOx-99 99% O2 / 1% He 205.72469 1.29731 0.9993642 191.646 1.4165 0.9990796
44
177 EA-80 Enriched Air-80% O2 200.15060 1.27727 0.9994412 186.937 1.3946 0.9991288
176 EA-60 Enriched Air-60% O2 194.79159 1.24578 0.9995295 182.261 1.3602 0.9992266
175 EA-40 Enriched Air-40% O2 189.42518 1.21429 0.9996177 177.396 1.3258 0.9993261
Metabolic Exhalant (16% O2 /
178 Metabol
78.04% N2 / 5% CO2 / 0.96% Ar)
Page 45
14.696 PSIA
Compressibilty
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
111.49608 0.68980 0.9980410 102.980 0.7534 0.9974725
81.45829 1.83428 0.9836781 74.933 2.0128 0.9784565
Density
14.696 PSIA
Viscosity
Absolute
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
Short
Gas
FUEL GASES 25°C 0°C
Long Name
Name
186 Syn Gas-2 64% H2 + 28% CO + 1% CO2 + 7% CH4 151.98915 0.43715 1.0001064 142.249 0.4771 1.000263
185 Syn Gas-1 40% H2 + 29% CO + 20% CO2 + 11% CH4 155.64744 0.79774 0.9989315 144.565 0.8704 0.9992763
Number
188 Syn Gas-4 83% H2 + 14% CO + 3% CH4 133.63682 0.24825 1.0003901 125.388 0.2709 1.000509
189 Nat Gas-1 93% CH4 / 3% C2H6 / 1% C3H8 / 2% N2 / 1% CO2 111.77027 0.70709 0.9979255 103.189 0.7722 0.9973965
187 Syn Gas-3 70% H2 + 4% CO + 25% CO2 + 1% CH4 147.33686 0.56024 0.9991225 136.493 0.6111 0.9997559
C4H10 / 1.3% N2 / 0.7% CO2
95.2% CH4 / 2.5% C2H6 / 0.2% C3H8 / 0.1%
191 Nat Gas-3
190 Nat Gas-2 95% CH4 / 3% C2H6 / 1% N2 / 1% CO2 111.55570 0.69061 0.9980544 103.027 0.7543 0.9974642
192 Coal Gas 50% H2 / 35% CH4 / 10% CO / 5% C2H4 123.68517 0.44281 0.9993603 115.045 0.6589 0.996387
193 Endo 75% H2 + 25% N2 141.72100 0.34787 1.0005210 133.088 0.3797 1.000511
194 HHO 66.67% H2 / 33.33% O2 180.46190 0.49078 1.0001804 168.664 0.5356 1.000396
Long Name
C3H6 / 1.9% n-C4H10
LPG 96.1% C3H8 / 1.5% C2H6 / 0.4%
Short
Name
195 HD-5
196 HD-10 LPG 85% C3H8 / 10% C3H6 / 5% n-C4H10 81.41997 1.85378 0.9832927 74.934 2.0343 0.9780499
LASER GASES 25°C 0°C
Gas
Number
181 LG-7 7% CO2 / 14% N2 / 79% He 197.00519 0.41548 0.9999919 186.204 0.4533 1.000514
179 LG-4.5 4.5% CO2 / 13.5% N2 / 82% He 199.24300 0.36963 1.0001332 187.438 0.4033 1.000551
180 LG-6 6% CO2 / 14% N2 / 80% He 197.87765 0.39910 1.0000471 186.670 0.4354 1.00053
182 LG-9 9% CO2 / 15% N2 / 76% He 195.06655 0.45805 0.9998749 184.835 0.4997 1.000478
183 HeNe-9 9% Ne / 91% He 224.68017 0.22301 1.0004728 211.756 0.2276 1.000516
184 LG-9.4 9.4% CO2 / 19.25% N2 / 71.35% He 193.78311 0.50633 0.9998243 183.261 0.5523 1.000458
Page 46
14.696 PSIA
Compressibilty
14.696 PSIA
Compressibilty
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
Density
14.696 PSIA
Viscosity
Absolute
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
Density
14.696 PSIA
Viscosity
Absolute
14.696 PSIA
Compressibilty
Density
14.696 PSIA
Viscosity
Absolute
Short
Gas
O2 CONCENTRATOR GASES 25°C 0°C
Long Name
Name
198 OCG-93 93% O2 / 3% N2 / 4% Ar 205.62114 1.31687 0.9993670 191.795 1.4379 0.9990499
197 OCG-89 89% O2 / 7% N2 / 4% Ar 204.53313 1.31033 0.9993849 190.897 1.4307 0.9990695
Number
199 OCG-95 95% O2 / 1% N2 / 4% Ar 206.16497 1.32014 0.9993580 192.241 1.4414 0.99904
Short
Gas
STACK GASES 25°C 0°C
Long Name
Name
200 FG-1 2.5% O2 / 10.8% CO2 / 85.7% N2 / 1% Ar 175.22575 1.22550 0.9992625 165.222 1.3379 0.9990842
201 FG-2 2.9% O2 / 14% CO2 / 82.1% N2 / 1% Ar 174.18002 1.24729 0.9991056 164.501 1.3617 0.9989417
Number
202 FG-3 3.7% O2 / 15% CO2 / 80.3% N2 / 1% Ar 174.02840 1.25520 0.9990536 164.426 1.3703 0.9988933
203 FG-4 7% O2 / 12% CO2 / 80% N2 / 1% Ar 175.95200 1.24078 0.9991842 166.012 1.3546 0.9990116
204 FG-5 10% O2 / 9.5% CO2 / 79.5% N2 / 1% Ar 177.65729 1.22918 0.9992919 167.401 1.3419 0.9991044
46
205 FG-6 13% O2 / 7% CO2 / 79% N2 / 1% Ar 179.39914 1.21759 0.9993996 168.799 1.3293 0.9991932
CHROMATOGRAPHY GASES 25°C 0°C
Long Name
Short
Name
29 P-5 5% CH4 / 95% Ar 223.91060 1.58505 0.9993265 207.988 1.7307 0.9990036
Gas
Number
206 P-10 10% CH4 90% Ar 221.41810 1.53622 0.9992857 205.657 1.6774 0.99895
Page 47
Supported Units: This device supports many dierent units. You may select the desired units (see
page 28). Note that only units appropriate to this device are available for selection.
Pressure Units
Absolute Gauge Dierential Notes
PaA PaG PaD pascal
hPaA hPaG hPaD hectopascal
kPaA kPaG kPaD kilopascal
MPaA MPaG MPaD megapascal
mbarA mbarG mbarD millibar
barA barG barD bar
g/cm2A g/cm2G g/cm2D gram force per square centimeter
kg/cmA kg/cmG kg/cmD kilogram force per square centimeter
PSIA PSIG PSID pound force per square inch
PSFA PSFG PSFD pound force per square foot
mTorrA mTorrG mTorrD millitorr
torrA torrG torrD torr
mmHgA mmHgG mmHgD millimeter of mercury at 0 C
inHgA inHgG inHgD inch of mercury at 0 C
mmH2OA mmH2OG mmH2OD millimeter of water at 4 C (NIST conventional)
mmH2OA mmH2OG mmH2OD millimeter of water at 60 C
cmH2OA cmH2OG cmH2OD centimeter of water at 4 C (NIST conventional)
cmH2OA cmH2OG cmH2OD centimeter of water at 60 C
inH2OA inH2OG inH2OD inch of water at 4 C (NIST conventional)
inH2OA inH2OG inH2OD inch of water at 60 C
atm atmosphere
m asl meter above sea level (only in /ALT builds)
ft asl foot above sea level (only in /ALT builds)
V volt; no conversions are performed to or from other units
count count count setpoint count, 0 – 64000
% % % percent of full scale
Flow Units
Volumetric Standard Normal Notes
uL/m SuL/m NuL/m microliter per minute
mL/s SmL/s NmL/s milliliter per second
mL/m SmL/m NmL/m milliliter per minute
mL/h Sml/h NmL/h milliliter per hour
L/s SL/s NL/s liter per second
LPM SLPM NLPM liter per minute
L/h SL/h NL/h liter per hour
US GPM US gallon per minute
US GPH US gallon per hour
CCS SCCS NCCS cubic centimeter per second
CCM SCCM NCCM cubic centimeter per minute
cm3/h Scm3/h Ncm3/h cubic centimeter per hour
m3/m Sm3/m Nm3/m cubic meter per minute
m3/h Sm3/h Nm3/h cubic meter per hour
m3/d Sm3/d Nm3/d cubic meter per day
in3/m Sin3/m cubic inch per minute
CFM SCFM cubic foot per minute
CFH SCFH cubic foot per hour
count count count setpoint count, 0 – 64000
% % % percent of full scale
kSCFM 1000 cubic feet per minute
47
Page 48
True Mass Flow Units
Label Notes
mg/s milligram per second
mg/m milligram per minute
g/s gram per second
g/m gram per minute
g/h gram per hour
kg/m kilogram per minute
kg/h kilogram per hour
oz/s ounce per second
oz/m ounce per minute
lb/m pound per minute
These can be used for mass ow on gas devices. These can also be used for volumetric ow on liquid
devices calibrated in one of these units (liquid density is not yet supported).
lb/h pound per hour
Totalizer Units
Volumetric Standard Normal Notes
uL SuL NuL microliter
mL SmL NmL milliliter
L SL NL liter
US GAL US gallon
cm3 Scm3 Ncm3 cubic centimeter
m3 Sm3 Nm3 cubic meter
in3 Sin3 cubic inch
ft3 Sft3 cubic foot
uP
kSft3 1000 cubic feet
micropoise, a measure of viscosity; no conversions are performed to or from
other units
Total Mass Units
Label Notes
mg milligram
g gram
kg kilogram
oz ounce
These can be used for totalized mass on gas devices. These can also be used for totalized
volume on liquid devices calibrated in one of these units (liquid density is not yet supported).
lb pound
Temperature Units
Label Notes
°C degree Celsius
°F degree Farenheit
K Kelvin
°R degree Rankine
Time Units
Label Notes
h:m:s Displayed value is hours:minutes:seconds
ms millisecond
s second
m minute
hour hour
day day
Valve Drive Units
Label Notes
count +/- 65536 at full drive
% Percent of full scale drive
48
Page 49
TROUBLESHOOTING
valve upstream of the meter. If you suspect that your pressure sensor is
49
Page 50
FMA-2600A Controllers feature a programmable Geometric Running Average
Page 51
(page 29).
Page 52
TOTAL/TIMERMAIN
TOTAL/
TIMER
SETPT
+123.4
SCCM
+123.4
Scm3
Rollover
+123.45
BATCH RESET
50:56 h:m:s
MENU/
MAIN
RESET
TOTAL/TIMER
Pushing SETPT will allow you to change the controller's set-point.
RESET
Page 53
BATCH PROCESSING MODE – CONTROLLERS ONLY
Press BATCH . Then use
SELECT DIGIT
DOWN
UP
Batch Size: Scm3
00123.45
˄
BACK/
CANCEL CLEAR
SELECT
DIGIT
SET
Press CLEAR SET
SETPT to
select a Set-Point.
REMAIN
TOTAL/TIMER to
toggle these values.
REMAINDone Batch
simply press
SETPT
TOTAL/
123.4
TIMER
00123.45
+100
REMAIN RESET
SCCM
+123.4
Scm3
4:14 h:m:s
MENU
The new batch begins when you press RESET.
volume, increase the Batch value. Flow resumes as
you press SET in the Set-Point screen.
SET.
Page 54
The makes it convenient
Ø .156 Thru 4 Places
Ø .156 Thru 4 Places
1.75
1.75
3.46
3.46
Ø .340 Thru 2 PL
Ø .340 Thru 2 PL
FMA1600-MDB Multi-Drop Box
6.75
6.75
6.75
7.56
BB-9 Multi-Drop
1.55
Box
1.55
Ø .175 Thru 2 PL
5.06
5.06
Page 55
Accessories
Part Number Description
FMA1600-C1
FMA1600-C2
FMA1600-C3
FMA1600-PSU
FMA1600-CRA
FMA1600-C1-25FT
FMA1600-C2-25FT
FMA1600-MDB Multi-Drop Box
8 Pin Male Mini-DIN connector cable, single ended,
6 foot length
8 Pin Male Mini-DIN connector cable, double ended,
6 foot length
8 Pin Male Mini-DIN to DB9 Female Adapter, 6 foot
length
Universal 100-240 VAC to 24 Volt DC Power Supply
Adapter
8 Pin Male Right Angle Mini-Din Cable, single ended,
6 foot length
8 Pin Male Mini-DIN connector cable, single ended,
25 foot length
8 Pin Male Mini-DIN connector cable, double ended,
25 foot length
Page 56
Technical Data for FMA-2600A Mass Flow Controllers
0 to 0.5 sccm Full Scale through 0 to 3000 slpm Full Scale
Standard Operating Specications (Contact Omega for available options)
Performance FMA-2600A Mass Flow Controller
Accuracy at calibration
conditions after tare
High Accuracy at calibration
conditions after tare
High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.
Repeatability ± 0.2% Full Scale
Zero Shift and Span Shift 0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio 0.5% to 100% Full Scale / 200:1 Turndown
Maximum Controllable Flow Rate 102.4% Full Scale
Typical Response Time 100 ms (Adjustable)
Warm-up Time < 1 Second
Operating Conditions FMA-2600A Mass Flow Controller
Mass Reference Conditions (STP) 25ºC & 14.696 psia (standard — others available on request)
Operating Temperature −10 to +50 ºCelsius
Humidity Range
(Non–Condensing)
Maximum Pressure 145 psig
Mounting Attitude Sensitivity Small Valve: None Large Valve: Mount with valve cylinder vertical & upright
Valve Type Normally Closed
Ingress Protection IP40
Small Valve: 303 & 302 Stainless Steel, FKM, Heat Cured Silicone Rubber, Glass
Reinforced Polyphenylene Sulde, Heat Cured Epoxy, Aluminum, Gold, Brass, 430FR
Stainless Steel, Silicon, Glass.
Wetted Materials
Large Valve: 303 & 302 Stainless Steel, FKM, Heat Cured Silicone Rubber,
Glass Reinforced Polyphenylene Sulde, Heat Cured Epoxy, Aluminum, Gold, 416
Stainless Steel, Silicon, Glass. If your application demands a different material,
please contact Omega.
Communications / Power FMA-2600A Mass Flow Controller
Monochrome LCD Display with
Digital Input/Output Signal
integrated touchpad
Analog Input/Output Signal
Optional Secondary Analog
1
Options RS232 Serial / RS485 Serial
2
Options 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Input/Output Sig nal
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
2
Electrical Connection Options 8 Pin Mini-DIN / 15-pin D-sub (DB15)
Supply Voltage Small Valve: 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) Large Valve: 24 to 30 Vdc
Supply Current Small Valve: 0.250 Amp Large Valve: 0.750 Amp
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass
Flow, Volumetric Flow, Pressure or Temperature
Range Specic Specications
Full Scale Flow Mass
Controller
0.5 sccm to 50 sccm 1.0 3.9”H x 3.4”W x 1.1”D M-5 (10-32) Female Thread
100 sccm to 500 sccm 1.0
1 slpm 1.5
2 slpm 3.0
5 slpm 2.0
10 slpm 5.5
20 slpm 20.0
50 slpm 9.0
250 slpm 2.4
500 slpm 6.5
1000 slpm 14.0
1500 slpm 17.0
2000 slpm 28.6 5.5”H x 8.1” W x 2.9” D
3000 slpm 16.8 5.5”H x 8.9” W x 2.9” D 1-1/4” NPT Female
1. Lower Pressure Drops Available, please contact Omega.
2. Compatible with Swagelok® tube, Parker®, face seal, push connect and compression adapter ttings. VCR and SAE
connections upon request.
Pressure Drop
(psid) venting to atmosphere
± (0.8% of Reading + 0.2% of Full Scale)
± (0.4% of Reading + 0.2% of Full Scale)
0 to 100%
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
1
at FS Flow
Mechanical
Dimensions
4.1”H x 3.6”W x 1.1”D 1/8” NPT Female
4.4”H x 6.4”W x 2.3”D 1/4” NPT Female100 slpm 11.7
5.5”H x 7.4”W x 2.3”D
Process Connections
3/4” NPT Female
(A 1-1/4” NPT Female process
connection is available for
2000 slpm controllers.)
2
Page 57
FMA-2600A
Upstream Valve
0 - 0.5 sccm
0 - 1 sccm
0 - 2 sccm
0 - 5 sccm
0 - 10 sccm
0 - 20 sccm
0 - 50 sccm
8.53mm
.336in
13.34mm
.525in
FMA-2600A
Downstream Valve*
0 - 0.5 sccm
0 - 1 sccm
0 - 2 sccm
0 - 5 sccm
0 - 10 sccm
0 - 20 sccm
0 - 50 sccm
26.67mm
1.050in
98.98mm
3.897in
84.77mm
(10-32 UNF)M5X0.8
BOTH SIDES
8-32 UNC .175in[4.45mm]
3.338in
56.52mm
2.225in
3.81mm
.150in
0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
26.67mm
1.050in
3.18mm
.125in
23.50mm
.925in
8.53mm
.336in
13.34mm
.525in
98.98mm
3.897in
8.53mm
.336in
13.34mm
.525in
8-32 UNC .175in[4.45mm]
M5X0.8 (10-32 UNF)
Both Sides
3.81mm
.150in
23.50mm
.925in
84.77mm
3.338in
56.52mm
2.225in
3.18mm
.125in
13.34mm
* Note process connection port locations for downstream valve in this ow range.
0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
4.93mm
.525in
.194in
Page 58
FMA-2600A
0 - 100 sccm
0 - 200 sccm
0 - 500 sccm
0 - 1 slpm
0 - 2 slpm
0 - 3 slpm
0 - 5 slpm
0 - 10 slpm
0 - 20 slpm
8.89mm
.350in
13.34mm
.525in
FMA-2600A
0 - 50 slpm
0 - 100 slpm
26.67mm
1/8
NPT
Both Sides
2X
8-32 UNC .350in[8.89mm]
100 sccm to 20 slpm approximate weight: 1.2lb
1.050in
94.95mm
3.738in
56.52mm
2.225in
103.30mm
4.067in
3.81mm
.150in
3.18mm
.125in
23.50mm
.925in
8.89mm
.350in
13.34mm
.525in
50 slpm to 100 slpm approximate weight: 7.0 lb.
Page 59
1/7/2016
DATE
28.45mm
1.120in
20.32mm
.800in
139.56mm
.320in
5.495in
8.13mm
194.31mm
7.650in
1.600in
40.64mm
2.250in
57.15mm
28.45mm
1.120in
1/2" NPT
Both Sides
28.58mm
1.125in
4.45mm
.175in
.750in
19.05mm
3.250in
82.55mm
.575in
14.61mm
3.075in
78.11mm
REF1.325in
33.66mm
.328in 8.33mm4X 8-32 UNC
8-32 UNC 9.53mm4X .375in
.375in
9.53mm
1.875in
47.63mm
36.20mm
1.425in
FMA-2600A
.800in
20.32mm
.800in
20.32mm
40.64mm
1.600in
57.15mm
2.250in
184.79mm
7.2750in
DATE
12/09/20 15
28.58mm
1.125in
1.120in
28.45mm
Both Sides
3/4 NPT
.375in
2.700in
4X 8-32 UNC
.375in[9.53mm]
82.550mm
3.250in
.750in
68.58mm
19.050mm
4.45mm
.175in
36.20mm
1.425in
47.63mm
1.875in
9.53mm
5.08mm
.200in
.328in[8.33mm] 4 8-32 UNCX
1.325in REF
33.66mm
139.56mm
5.495in
8.13mm
.320in
133.88mm
5.2710in
0 - 250 slpm
FMA-2600A
0 - 500 slpm
0 - 1000 slpm
0 - 1500 slpm
250 slpm approximate weight: 9.0 lb.
1500 slpm approximate weight: 9.0 lb.
Page 60
5.495in
139.56mm
8.100in
205.74mm
2.900in
73.66mm
2.250in
57.15mm
X 8-32 UNC4 .330in[8.38mm]
107.95mm
4.250in
68.58mm
2.700in
.200in
5.08mm
9.53mm
6.750in
.375in
171.45mm
5.08mm
68.58mm
2.700in
.200in
1.875in
47.63mm
4X 8-32 UNC
.328in[8.33mm]
28.45mm
1.120in
1.125in
28.58mm
DATE
12/11/2015
28.45mm
NPT3/4
BOTH SIDES
1.120in
1.450in
36.83mm
2.700in
.200in
68.58mm
9.53mm
.375in
5.08mm
88.90mm
3.500in
.330in[8.38mm] 4 8-32 UNCX
.328in[8.33mm]
47.63mm
8-32 UNCX 4
1.350in
34.29mm
3.850in
97.79mm
1.875in
REF1.550in
39.37mm
25.40mm
1.000in
2.900in
73.66mm
2.250in
57.15mm
Both Sides
36.83mm
1.450in
1-1/4 NPT
24.38mm
.960in
24.38mm
.960in
1.125in
28.58mm
1
12/09/2015
DATE
MCR-3000SLPM-D-MSPEC
REV.
139.56mm
5.495in
226.06mm
8.900in
FMA-2600A
0 - 2000 slpm
FMA-2600A
0 - 3000 slpm
2000 slpm approximate weight: 12.0 lb.
60
3000 slpm approximate weight: 12.0 lb.
Page 61
Technical Data for FMA-LP2600A Low Pressure Drop Mass Flow Controllers
0 to 0.5 sccm Full Scale through 0 to 500 slpm Full Scale
Standard Specications (Contact Omega for available options.)
Performance FMA-LP2600A Mass Flow Controller
Accuracy at calibration
conditions after tare
High Accuracy at calibration
conditions after tare
Zero Shift and Span Shift 0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio 0.5% to 100% Full Scale / 200:1 Turndown
Maximum Controllable Flow Rate 102.4% Full Scale
Mass Reference Conditions (STP) 25ºC & 14.696 psia (standard — others available on request)
Mounting Attitude Sensitivity Small Valve: None Large Valve: Mount with valve cylinder vertical & upright
Communications / Power FMA-LP2600A Mass Flow Controller
Monochrome LCD Display with
Digital Input/Output Signal
Analog Input/Output Signal
Optional Secondary Analog
Electrical Connection Options 8 Pin Mini-DIN /15-pin D-sub (DB15)
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass
Flow, Volumetric Flow, Pressure or Temperature
Repeatability ± 0.2% Full Scale
Typical Response Time 100 ms (Adjustable)
Warm-up Time < 1 Second
Operating Conditions FMA-LP2600A Mass Flow Controller
Operating Temperature −10 to +50 ºCelsius
Humidity Range
(Non–Condensing)
Maximum Pressure 50 psig Higher line pressures available, please contact Omega.
Valve Type Normally Closed
Ingress Protection IP40
Wetted Materials
integrated touchpad
1
Options
2
Options
Input/Output Sig nal
Supply Voltage Small Valve: 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) Large Valve: 24 to 30 Vdc
Supply Current Small Valve: 0.250 Amp Large Valve: 0.750 Amp
High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.
Small Valve: 303 & 302 Stainless Steel, FKM, Silicone RTV (Rubber), Glass
Reinforced Nylon, Aluminum, Brass, 430FR Stainless Steel, Silicon, Glass.
Large Valve: 303 & 302 Stainless Steel, FKM, Silicone RTV (Rubber), Glass
Reinforced Nylon, Aluminum, 416 Stainless Steel, Nickel, Silicon, Glass.
If your application demands a different material, please contact Omega.
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
2
± (0.8% of Reading + 0.2% of Full Scale)
± (0.4% of Reading + 0.2% of Full Scale)
0 to 100%
RS232 Serial / RS485 Serial
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Range Specic Specications
Full Scale Flow Mass
Controller
0.5 sccm to 2 sccm 0.06
5 sccm to 10 sccm 0.08
20 sccm 0.07
50 sccm to 200 sccm 0.07
500 sccm 0.08
1 slpm 0.10
2 slpm 0.18
5 slpm 0.10
10 slpm 0.12
20 slpm 0.26
40 slpm 0.14
50 slpm 0.17
250 slpm 0.69
500 slpm 0.69 5.5”H x 8.1”W x 2.7”D 3/4” NPT Female
1. Compatible with, Swagelok® tube, Parker®, face seal, push connect and compression adapter ttings. VCR and SAE
connections upon request.
Pressure Drop at FS Flow
(psid) venting to atmosphere
Mechanical
Dimensions
3.9”H x 3.4”W x 1.1”D
4.1”H x 3.6”W x 1.1”D 1/8” NPT Female
5.5”H x 7.7”W x 2.3”D 1/4” NPT Female
5.5”H x 7.7”W x 2.3”D 1/2” NPT Female
5.5”H x 7.3”W x 2.3”D 3/4” NPT Female100 slpm 0.30
Process Connections
M-5 (10-32) Female
Thread
1
Page 62
FMA-LP2600A
0 - 0.5 sccm
0 - 1 sccm
0 - 2 sccm
0 - 5 sccm
0 - 10 sccm
0 - 20 sccm
8.53mm
.336in
13.34mm
.525in
FMA-LP2600A
0 - 50 sccm
0 - 100 sccm
0 - 200 sccm
0 - 500 sccm
0 - 1 slpm
0 - 2 slpm
26.67mm
1.050in
98.98mm
3.897in
84.77mm
(10-32 UNF)M5X0.8
BOTH SIDES
3.338in
56.52mm
2.225in
3.81mm
.150in
2X 8-32 UNC .175in[4.45mm]
0.5 sccm to 20 sccm approximate shipping weight: 1.1 lb.
26.67mm
1.050in
3.18mm
.125in
23.50mm
.925in
8.53mm
.336in
13.34mm
.525in
8.89mm
.350in
13.34mm
.525in
1/8 NPT
Both Sides
2X
8-32 UNC .350in[8.89mm]
91.12mm
3.588in
56.52mm
2.225in
50 sccm to 2 slpm approximate weight: 1.2lb
62
103.30mm
4.067in
3.81mm
.150in
3.18mm
.125in
23.50mm
.925in
8.89mm
.350in
13.34mm
.525in
Page 63
20.32mm
.800in
20.32mm
.800in
82.55mm
3.250in
9.53mm4X 8-32 UNC .375in
1.425in
36.20mm
14.61mm
.575in
4.45mm
.175in
4X 8-32 UNC .328in 8.33mm
19.05mm
.750in
.375in
9.53mm
1.875in
47.63mm
78.11mm
3.075in
28.45mm
1.120in
28.58mm
1.125in
1/2 NPT
Both Sides
1/11/2016
DATE
40.64mm
1.600in
57.15mm
2.250in
194.31mm
7.650in
8.13mm
.320in
5.495in
139.56mm
12/10/2015
DATE
FMA-LP2600A
0 - 5 slpm
0 - 10 slpm
0 - 20 slpm
57.15mm
2.250in
194.31mm
7.650in
40.64mm
1.600in
28.45mm
1.120in
28.58mm
1.125in
FMA-LP2600A
0 - 40 slpm
139.56mm
5.495in
1/4 NPT
Both Sides
47.63mm
1.875in
4X 8-32 UNC .375
5.08mm
9.53mm
.375in
.200in
68.58mm
2.700in
33.66mm
1.325in REF
5 slpm to 20 slpm approximate weight: 6.4 lb.
126.67mm
4.987in
15.75mm
82.55mm
3.250in
.620in
19.05mm
.750in
4.45mm
.175in
4X 8-32 UNC .375in[9.53mm]
36.20mm
1.425in
12.70mm
.500in
20.32mm
.800in
40 slpm approximate weight: 9.0 lb.
63
Page 64
DATE
1/7/2016
28.45mm
NPT3/4
BOTH SIDES
1.120in
1.450in
36.83mm
2.900in
73.66mm
2.250in
57.15mm
171.45mm
.375in
6.750in
5.08mm
107.95mm
4.250in
68.58mm
2.700in
.200in
5.08mm
68.58mm
4 8-32 UNC
.330in[8.38mm]X
2.700in
9.53mm
.200in
1.875in
47.63mm
4X 8-32 UNC
.328in[8.33mm]
28.45mm
1.120in
1.125in
28.58mm
139.56mm
5.495in
8.100in
205.74mm
28.58mm
1.125in
1.120in
28.45mm
Both Sides
3/4 NPT
1.600in
40.64mm
57.15mm
2.250in
184.79mm
7.275in
.800in
20.32mm
.800in
20.32mm
8.13mm
.320in
5.495in
139.56mm
3.250in
82.55mm
.375in
2.700in
4X 8-32 UNC
.375in[9.53mm]
.750in
68.58mm
19.05mm
4.45mm
.175in
36.20mm
1.425in
47.63mm
1.875in
9.53mm
5.08mm
.200in
.328in[8.33mm] 4 8-32 UNCX
1.325in REF
33.66mm
FMA-LP2600A
0 - 50 slpm
0 - 100 slpm
0 - 250 slpm
FMA-LP2600A
0 - 500 slpm
50 slpm to 250 slpm approximate weight: 9.0 lb.
500 slpm approximate weight: 11.0 lb.
64
Page 65
Technical Data for FMA-2600A-P & FMA-2600A-P-LSS Mass Flow Controllers
0 to 0.5 sccm Full Scale through 0 to 20 slpm Full Scale
The FMA-2600A-P
FMA-2600A-P-LSS controllers are for use with some aggressive gases (page 64).
Standard Specications (Contact Omega for available options.)
Performance FMA-2600A-P Mass Flow Controller
Accuracy at calibration conditions
High Accuracy at calibration
Zero Shift and Span Shift 0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio 0.5% to 100% Full Scale / 200:1 Turndown 1% to 100% Full Scale / 100:1 Turndown
Maximum Controllable Flow Rate 102.4% Full Scale
Typical Response Time 100 ms (Adjustable)
Integrated Valve Leak Integrity 1 x 10
Operating Conditions FMA-2600A-P Mass Flow Controller
Mass Reference Conditions (STP) 25ºC & 14.696 psia (standard — others available on request)
Operating Temperature −10 to +50 ºCelsius
Humidity Range (Non–Condensing) 0 to 100%
Mounting Attitude Sensitivity None
Communications / Power FMA-2600A-P & FMA-2600A-P-LSS Mass Flow Controller
Monochrome LCD Display with
Digital Input/Output Signal
Analog Input/Output Signal
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass
integrated touchpad
Optional Secondary Analog
Input/Output Sig nal
Electrical Connection Options 8 Pin Mini-DIN / 15-pin D-sub (DB15)
Flow, Volumetric Flow, Pressure or Temperature
after tare
conditions after tare
Repeatability ± 0.2% Full Scale
Warm-up Time < 1 Second
Maximum Pressure 145 psig
Valve Type Normally Closed
Ingress Protection IP40
Wetted Materials
1
Options RS232 Serial / RS485 Serial
2
Options 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
2
Supply Voltage 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)
Supply Current 0.250 Amp
High Accuracy option not available for units ranged under 5 sccm.
FMA-2600A-P:
forced Polyphenylene Sulde, Heat Cured Epoxy, Aluminum, Gold, Brass, 430FR Stainless
Steel, Silicon, Glass.
FMA-2600A-P-LSS: 316LSS, 303SS, 430FRSS, Peruoroelastomer standard, FKM,
EPDM, Buna, Neoprene as needed for some gases.
If your application demands a different material, please contact Omega.
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
303 & 302 Stainless Steel,FKM, Heat Cured Silicone Rubber, Glass Rein-
Range Specic Specications
Full Scale Mass Flow Controller Mechanical Dimensions Process Connections
FMA-2600A-P 0.5SCCM to 20SLPM 4.8”H x 6.8”W x 1.5”D 1/4” VCR® Male
FMA-2600A-P-LSS 0.5SCCM to 20SLPM 5.5”H x 6.8”W x 1.5”D 1/4” VCR® Male
Welded VCR® process connections are recommended for FMA-2600A-P and FMA-2600A-P-LSS applications.
Please contact Omega.
-9
FMA-2600A-P-LSS Mass Flow
Controller
± (0.8% of Reading + 0.2% of Full Scale)
± (0.4% of Reading + 0.2% of Full Scale)
-9
atm scc/sec Helium max
FMA-2600A-P-LSS Mass Flow
Controller
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Page 66
FMA-2600A-P
All ranges
15.94mm
.628in
19.05mm
.750in
141.73mm
5.580in
160.78mm
6.330in
170.71mm
6.721in
28.58mm
1.125in
1/4" VCRM
Both Sides
38.10mm
1.500in
9.53mm
.375in
120.76mm
4.755in
FMA-2600A-P approximate weight: 3.0 lb.
4X
6.10mm
.240in THRU
4.76mm
.188in
15.94mm
.628in
19.05mm
.750in
FMA-2600A-P-LSS
All ranges
15.94mm
.628in
19.05mm
.750in
141.73mm
5.580in
160.78mm
6.330in
170.71mm
6.721in
28.58mm
1.125in
38.10mm
1.500in
9.53mm
.375in
138.54mm
5.455in
FMA-2600A-P-LSS approximate weight: 3.2 lb.
4X
6.10mm
.240in THRU
4.76mm
.188in
15.94mm
.628in
19.05mm
.750in
66
Page 67
Technical Data for FMA-2600A-LSS Mass Flow Controllers
FMA-2600A-LSS instruments are built for use with aggressive gases. For the
0 Air Air
1 Argon Ar
2 Methane
3 CO
CO2
5 Ethane C2H6
6 Hydrogen H2
7 Helium He
8 Nitrogen N2
9 Nitrous Oxide N2O
10 Neon Ne
11 Oxygen O2
12 Propane C3H8
13 normal-Butane
Acetylene C2H2
15 Ethylene
16 iso-Butane
17 Krypton Kr
18 Xenon Xe
19 SF6
20 75%Ar / 25% CO2 C-25
21 90% Ar / 10% CO2 C-10
22 92% Ar / 8% CO2 C-8
23 98% Ar / 2% CO2 C-2
75% CO2 / 25% Ar C-75
25 75% Ar / 25% He A-75
26 75% He / 25% Ar A-25
90% He / 7.5% Ar /
27
28
29 P-5
30 Nitric Oxide NO
31 NF3
32 Ammonia NH3
H2S
36 Propylene C3H6
Nitrogen Dioxide to 0.5%
in an inert carrier
Refrigerant gases to 100%
Other gases to 1000 ppm in an inert
carrier
2.5% CO2
90% Ar / 8% CO2 /
2% O2
A1025
Star29
NO2
.
67
Page 68
DATE
1/5/2016
FMA-2600A-LSS
0 – 0.5 sccm
0 – 1 sccm
0 – 2 sccm
0 – 5 sccm
0 – 10 sccm
0 – 20 sccm
0 – 50 sccm
8.53mm
.336in
13.34mm
.525in
FMA-2600A-LSS
0 – 100 sccm
0 – 200 sccm
0 – 500 sccm
0 – 1 slpm
0 – 2 slpm
0 – 5 slpm
0 – 10 slpm
0 – 20 slpm
26.67mm
1.050in
84.77mm
(10-32 UNF)M5X0.8
Both Sdes
3.338in
56.52mm
2.225in
3.81mm
2X 8-32 UNC .175in[4.45mm]
0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
26.67mm
1.050in
111.68mm
4.397in
.150in
3.18mm
.125in
8.53mm
.336in
13.34mm
.525in
23.50mm
.925in
8.89mm
.350in
13.34mm
.525in
1/8 NPT
Both Sides
2X 8-32 UNC .350in 8.89mm
100 sccm to 20 slpm approximate weight: 1.2 lb
91.12mm
3.588in
56.52mm
2.225in
68
116mm
4.567in
3.81mm
.150in
3.18mm
.125in
23.50mm
.925in
8.89mm
.350in
13.34mm
.525in
Page 69
DATE
12/10/15
139.56mm
5.495in
8.13mm
.320in
5.987in
152.07mm
40.64mm
1.600in
2.250in
57.15mm
194.31mm
7.650in
.750in
19.05mm
82.55mm
3.250in
47.63mm
36.20mm
.375in[9.53mm]
14.61mm
.575in
4.45mm
.175in
4X 8-32 UNC
9.53mm
.375in
.328in[8.33mm]4X 8-32 UNC
1.875in
1.425in
78.11mm
3.075in
28.45mm
NPT1/2
Both Sides
1.120in
1.125in
28.58mm
20.32mm
.800in
20.32mm
.800in
1.600in
40.64mm
57.15mm
2.250in
194.31mm
7.650in
28.45mm
1.120in
1.125in
28.58mm
Both Sides
1/4 NPT
.800in
20.32mm
.500in
12.70mm
7.275in
184.79mm
139.56mm
5.495in
15.75mm
.620in
5.687in
144.45mm
.175in
4.45mm
5.08mm
.200in
2.700in
.750in
68.58mm
9.53mm
.375in
47.63mm
1.875in
19.05mm
4X 8-32 UNC .375
3.250in
82.55mm
1.425in
36.20mm
4X 8-32 UNC .375in[9.53mm]
DATE
12/09/2015
FMA-2600A-LSS
0 – 50 slpm
0 – 100 slpm
FMA-2600A-LSS
0 – 250 slpm
50 slpm to 100 slpm approximate weight: 9.0 lb.
250 slpm approximate weight: 9.0 lb.
69
Page 70
NPT
28.45mm
3/4
Both Sides
1.120in
1.450in
36.83mm
DATE
12/10/2015
28.45mm
1.120in
1.125in
28.58mm
5.987in
152.07mm
205.74mm
8.100in
5.495in
139.56mm
.200in
2.700in
68.58mm
4
4
.328 8-32 UNCX
1.350in
34.29mm
.330in[8.38mm]X
8-32 UNC
.375in
9.53mm
3.850in
97.79mm
68.58mm
2.700in
5.08mm
1.875in
47.63mm
.200in
5.08mm
1.550in REF
39.37mm
2.900in
73.66mm
2.250in
57.15mm
28.45mm
1.120in
1.125in
28.58mm
4X 8-32 UNC
.375in 9.53mm
28.45mm
1.120in
3/4 NPT
Both Sides
28.58mm
.188in
4.76mm
13.21mm
1.125in
.520in
4X 8-32 UNC
.438in 11.11mm
DATE
12/10/2015
2.250in
57.15mm
40.64mm
1.600in
5.976in
151.79mm
.309in
7.85mm
139.28mm
5.484in
184.79mm
7.275in
.328in4X 8-32 UNC 8.33mm
9.53mm .375in4X 8-32 UNC
68.58mm
2.700in
.175in
4.45mm
.750in
19.05mm
9.53mm
.375in
.200in
5.08mm
3.250in
82.55mm
1.325in REF
33.66mm
1.432in
36.36mm
47.63mm
1.875in
FMA-2600A-LSS
0 – 500 slpm
0 – 1000 slpm
0 – 1500 slpm
FMA-2600A-LSS
0 – 2000 slpm
500 slpm to 1500 slpm approximate weight: 9.0 lb.
2000 slpm approximate weight: 12.0 lb.
70
Page 71
226.06mm
8.900in
152.07mm
5.987in
2.900in
73.66mm
2.250in
57.15mm
DATE
MCRS-3000SLPM-D-MSPEC
1
12/11/2015
REV.
88.90mm
3.500in
9.53mm
.375in
5.08mm
2.700in
.200in
68.58mm
.330in[8.38mm] 4 8-32 UNCX
.328in[8.33mm]
47.63mm
8-32 UNCX 4
1.350in
34.29mm
3.850in
97.79mm
1.875in
REF1.550in
39.37mm
25.40mm
1.000in
Both Sides
36.83mm
1.450in
1-1/4 NPT
24.38mm
.960in
24.38mm
.960in
1.125in
28.58mm
FMA-2600A-LSS
0 – 3000 slpm
3000 slpm approximate weight: 12.0 lb.
Page 72
Eight Pin Mini-DIN Connector Pin-Outs
If your FMA-2600A instrument was ordered with the standard Eight Pin MiniDIN connection, please be sure to reference the following pin-out diagram.
1 2
Standard 8 Pin Mini-DIN Pin-Out
3 4 5
6 7 8
Pin
Mini-DIN
Black
2
Brown
3
4
Controllers = Analog Set-Point Input
Orange
Yellow
6 Green
7 Power In Blue
8
Purple
72
Page 73
DB15 Pin-Outs
If your instrument was ordered with a DB15 connection, be sure to check the
Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when
connecting a non-FMA-2600A Series DB15 wire to a DB15 equipped FMA-2600A Series. Not
all features may be available between brands, but the common denominators are featured in
our DB15 offerings, along with some options for customization.
DB15
2
9
Male Connector Front View Female Connector Front View
Pin Number Function
1 Ground
2 Primary Analog Signal Output
3 Ground
4 N/C
5 Power Supply (+Vdc)
6 N/C
7 N/C
8
9 Power Supply Common
10 Ground
11 Secondary Analog Signal Output / xed 5.12Vdc
12 N/C
13 RS232 RX (receive) or RS485 –
14 Ground
15 RS232 TX (send) or RS485 +
Check your device’s calibration certicate and user manual for the actual electrical input/
output requirements, as all instruments are custom congured to some extent.
NOTE: Pins 1, 3, 9, 10, and 14 are connected together inside of the device and are
common grounding points.
N/C = Not Connected/Open (can be used for custom pin assignments – please consult factory).
5
11
8
15
13
Analog Tare (meters — when grounded)
Analog Set-Point Input (controllers)
8
15
13
11
2
9
5
73
Page 74
DB15 Pin-Outs
If your instrument was ordered with a DB15 connection, be sure to check the
Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when
connecting a non-FMA-2600A Series DB15 wire to a DB15 equipped FMA-2600A Series. Not
all features may be available between brands, but the common denominators are featured in
our DB15 offerings, along with some options for customization.
DB15A (XFM)
2
9
5
3
12
8
7
15
8
15
5
7
12
2
3
9
Male Connector Front View Female Connector Front View
Pin Number Function
1 Ground
2 Primary Analog Signal Output
3
4 Ground
5 Power Supply Common
6 Ground
7 Power Supply (+Vdc)
8 RS232 Tx (send) / RS485 –
9 Ground
10 N/C
11 N/C
12 Secondary Analog Signal Output / xed 5.12Vdc*
13 N/C
14 N/C
15 RS232 Rx (receive) / RS485 +
Check your device’s calibration certicate and user manual for the actual electrical input/
output requirements, as all instruments are custom congured to some extent.
NOTE: Pins 1, 4, 5, 6 and 9 are connected together inside of the device and are common
grounding points.
N/C = Not Connected/Open (can be used for custom pin assignments – please consult factory).
* Added to allow for full use of features on FMA-2600A devices, may not be present on host wiring.
Analog Tare (meters — when grounded)*
Analog Set-Point Input (controllers)*
74
Page 75
DB15 Pin-Outs
If your instrument was ordered with a DB15 connection, be sure to check the
Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when
connecting a non-FMA-2600A Series DB15 wire to a DB15 equipped FMA-2600A Series. Not
all features may be available between brands, but the common denominators are featured in
our DB15 offerings, along with some options for customization.
DB15B
2
9
Male Connector Front View Female Connector Front View
Pin Number Function
1 Ground
2 Primary Analog Signal Output
3 N/C
4 N/C
5 Power Supply (+Vdc)
6 N/C
7 N/C
8
9 Power Supply Common
10 Ground
11 Secondary Analog Signal Output / xed 5.12Vdc
12 N/C
13 N/C
14 RS232 RX (receive) or RS485 –*
15 RS232 TX (send) or RS485 +*
Check your device’s calibration certicate and user manual for the actual electrical input/
output requirements, as all instruments are custom congured to some extent.
NOTE: Pins 1, 9, and 10 are connected together inside of the device and are common
grounding points.
N/C = Not Connected/Open (can be used for custom pin assignments – please consult factory)
* Added to allow for full use of features on FMA-2600A devices, may not be present on host wiring.
5
11
8
15
14
Analog Tare (meters — when grounded)*
Analog Set-Point Input (controllers)*
8
15
14
5
11
2
9
Page 76
DB15 Pin-Outs
If your instrument was ordered with a DB15 connection, be sure to check the
Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when
connecting a non-FMA-2600A Series DB15 wire to a DB15 equipped FMA-2600A Series. Not
all features may be available between brands, but the common denominators are featured in
our DB15 offerings, along with some options for customization.
DB15K
2
9
5
13
7
8
14
8
7
1314
25
9
Male Connector Front View Female Connector Front View
Pin Number Function
1 N/C
2 Primary Analog Signal Output
3 N/C
4 N/C
5 Power Supply Common
6 N/C
7 Power Supply (+Vdc)
8
9
10 N/C
11 Ground
12 Ground
13
14
15 Ground
Check your device’s calibration certicate and user manual for the actual electrical input/
output requirements, as all instruments are custom congured to some extent.
NOTE: Pins 5, 11, 12 and 15 are connected together inside of the device and are common
grounding points.
N/C = Not Connected/Open (can be used for custom pin assignments – please consult factory).
* Added to allow for full use of features on FMA-2600A devices, may not be present on host wiring.
Analog Tare (meters — when grounded)
Analog Set-Point Input (controllers)
Secondary Analog Signal Output / xed 5.12Vdc
RS232 RX (receive) or RS485 –
RS232 TX (send) or RS485 +
*
*
*
76
Page 77
DB15 Pin-Outs
If your instrument was ordered with a DB15 connection, be sure to check the
Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when
connecting a non-FMA-2600A Series DB15 wire to a DB15 equipped FMA-2600A Series. Not
all features may be available between brands, but the common denominators are featured in
our DB15 offerings, along with some options for customization.
DB15H
2
10
Male Connector Front View Female Connector Front View
Pin Number Function
1 N/C
2 RS232 RX (receive) or RS485 – *
3 N/C
4 N/C
5 Ground
6 Primary Analog Signal Output
7 Power Supply Common
8 N/C
9 N/C
10 Secondary Analog Signal Output / xed 5.12Vdc *
11 Power Supply (+Vdc)
12 Ground
13 N/C
14
15 RS232 TX (send) or RS485 + *
Check your device’s calibration certicate and user manual for the actual electrical input/
output requirements, as all instruments are custom congured to some extent.
NOTE: Pins 5, 11, 12 and 15 are connected together inside of the device and are common
grounding points.
N/C = Not Connected/Open (can be used for custom pin assignments – please consult factory).
* Added to allow for full use of features on FMA-2600A devices, may not be present on host wiring.
11
6
7
1514
Analog Tare (meters — when grounded)
Analog Set-Point Input (controllers)
15
7
6
14
11
2
10
77
Page 78
DB15 Pin-Outs
If your instrument was ordered with a DB15 connection, be sure to check the
Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement
when connecting a non-FMA-2600A Series DB15 wire to a DB15O equipped FMA-2600A
Series. Not all features may be available between brands, but the common denominators are
featured in our DB15 offerings, along with some options for customization.
DB15O
14
7
15
15
7
5
14
11
2
9
2
9
5
11
Male Connector Front View Female Connector Front View
Pin Number Function
1 Ground
2 N/C
3 N/C
4 Primary Analog Signal Output
5 Power Supply (+Vdc)
6 N/C
7
8 N/C
9 Power Supply Common
10 Ground
11 Secondary Analog Signal Output / xed 5.12Vdc
12 N/C
13 N/C
14 RS232 RX (receive) or RS485 –*
15 RS232 TX (send) or RS485 +*
Check your device’s calibration certicate and user manual for the actual electrical input/
output requirements, as all instruments are custom congured to some extent.
NOTE: Pins 1, 9, and 10 are connected together inside of the device and are common
grounding points.
N/C = Not Connected/Open (can be used for custom pin assignments – please consult factory)
* Added to allow for full use of features on FMA-2600A devices, may not be present on host wiring.
Analog Tare (meters — when grounded)*
Analog Set-Point Input (controllers)*
78
Page 79
DB15 Pin-Outs
If your instrument was ordered with a DB15 connection, be sure to check the
Calibration Label on the device and reference the appropriate pin-out diagram.
The following pin-out chart describes the safest and generally compatible arrangement when
connecting a non-FMA-2600A Series DB15 wire to a DB15 equipped FMA-2600A Series. Not
all features may be available between brands, but the common denominators are featured in
our DB15 offerings, along with some options for customization.
DB15S
2
9
11
12
Male Connector Front View Female Connector Front View
Pin Number Function
1 Ground
2 Primary Analog Signal Output
3 N/C
4 N/C
5 Ground
6 N/C
7 N/C
8
9 Power Supply Common
10 Ground
11 Secondary Analog Signal Output / xed 5.12Vdc *
12 RS232 RX (receive) or RS485 – *
13 Power Supply (+Vdc)
14 RS232 TX (send) or RS485 + *
15 Ground
Check your device’s calibration certicate and user manual for the actual electrical input/
output requirements, as all instruments are custom congured to some extent.
NOTE: Pins 1, 5, 9, 10 and 15 are connected together inside of the device and are common
grounding points.
N/C = Not Connected/Open (can be used for custom pin assignments – please consult factory).
* Added to allow for full use of features on FMA-2600A devices, may not be present on host wiring.
8
14
13
Analog Tare (meters — when grounded)
Analog Set-Point Input (controllers)
14
8
13
12
11
2
9
79
Page 80
80
Page 81
WARRANTY/DISCLAIMER
OMEGA ENGINEERING, INC. warrants this unit to be free of defects in materials and
workmanship for a period of 13 months from date of purchase. OMEGA’s WARRANTY adds
an additional one (1) month grace period to the normal one (1) year product warranty to
cover handling and shipping time. This ensures that OMEGA’s customers receive maximum
coverage on each product.
If the unit malfunctions, it must be returned to the factory for evaluation. OMEGA’s Customer
Service Department will issue an Authorized Return (AR) number immediately upon phone
or written request. Upon examination by OMEGA, if the unit is found to be defective, it
will be repaired or replaced at no charge. OMEGA’s WARRANTY does not apply to defects
resulting from any action of the purchaser, including but not limited to mishandling, improper
interfacing, operation outside of design limits, improper repair, or unauthorized modification.
This WARRANTY is VOID if the unit shows evidence of having been tampered with or shows
evidence of having been damaged as a result of excessive corrosion; or current, heat, moisture
or vibration; improper specification; misapplication; misuse or other operating conditions
outside of OMEGA’s control. Components in which wear is not warranted, include but are not
limited to contact points, fuses, and triacs.
OMEGA is pleased to offer suggestions on the use of its various products. However,
OMEGA neither assumes responsibility for any omissions or errors nor assumes
liability for any damages that result from the use of its products in accordance
with information provided by OMEGA, either verbal or written. OMEGA warrants
only that the parts manufactured by the company will be as specified and free of
defects. OMEGA MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY
KIND WHATSOEVER, EXPRESSED OR IMPLIED, EXCEPT THAT OF TITLE, AND ALL
IMPLIED WARRANTIES INCLUDING ANY WARRANTY OF MERCHANTABILITY AND
FITNESS FOR A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED. LIMITATION
OF LIABILITY: The remedies of purchaser set forth herein are exclusive, and the
total liability of OMEGA with respect to this order, whether based on contract,
warranty, negligence, indemnification, strict liability or otherwise, shall not exceed
the purchase price of the component upon which liability is based. In no event shall
OMEGA be liable for consequential, incidental or special damages.
CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used: (1)
as a “Basic Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or
activity; or (2) in medical applications or used on humans. Should any Product(s) be used in or
with any nuclear installation or activity, medical application, used on humans, or misused in
any way, OMEGA assumes no responsibility as set forth in our basic WARRANTY / DISCLAIMER
language, and, additionally, purchaser will indemnify OMEGA and hold OMEGA harmless from
any liability or damage whatsoever arising out of the use of the Product(s) in such a manner.
Direct all warranty and repair requests/inquiries to the OMEGA Customer Service Department.
RETURN REQUESTS/INQUIRIES
BEFORE RETURNING ANY PRODUCT(S) TO OMEGA, PURCHASER MUST OBTAIN AN
AUTHORIZED RETURN (AR) NUMBER FROM OMEGA’S CUSTOMER SERVICE DEPARTMENT
(IN ORDER TO AVOID PROCESSING DELAYS). The assigned AR number should then be
marked on the outside of the return package and on any correspondence.
The purchaser is responsible for shipping charges, freight, insurance and proper packaging to
prevent breakage in transit.
FOR WARRANTY RETURNS, please have
the following information available BEFORE
contacting OMEGA:
1. Purchase Order number under which
the product was PURCHASED,
2. Model and serial number of the product
under warranty, and
3. Repair instructions and/or specific
problems relative to the product.
OMEGA’s policy is to make running changes, not model changes, whenever an improvement is possible.
This affords our customers the latest in technology and engineering.
OMEGA is a trademark of OMEGA ENGINEERING, INC.
© Copyright 2018 OMEGA ENGINEERING, INC. All rights reserved. This document may not be copied, photocopied,
reproduced, translated, or reduced to any electronic medium or machine-readable form, in whole or in part, without
the prior written consent of OMEGA ENGINEERING, INC.
FOR NON-WARRANTY REPAIRS,
consult
OMEGA for current repair charges. Have the
following information available BEFORE
contacting OMEGA:
1. Purchase Order number to cover the
COST of the repair,
2. Model and serial number of theproduct, and
3. Repair instructions and/or specific problems
relative to the product.
Page 82
Where Do I Find Everything I Need for
Process Measurement and Control?
OMEGA…Of Course!
Shop online at omega.com
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M3791/0118
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