Omega FMA1800A, FMA1700A User Manual

FMA1700A & FMA1800A

Mass Flow Meter

TM

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User’s Guide

NORWALK, CT

omega.com [e-mail]

The information contained in this document is believed to be correct, but OMEGA accepts no liability for any errors it contains,
and reserves the right to alter specifications without notice.

Servicing North America:

U.S.A. Omega Engineering, Inc.
Headquarters: Toll-Free: 1-800-826-6342 (USA & Canada only)

Customer Service: 1-800-622-2378 (USA & Canada only)
Engineering Service: 1-800-872-9436 (USA & Canada only)
Tel: [phone] Fax: [phone]
e-mail: [e-mail]

For Other Locations Visit omega.com/worldwide

TABLE OF CONTENTS

1. UNPACKING THE FMA1700A/1800A MASS FLOW METER.....................

1.1 Inspect Package for External Damage.................................................

1.2 Unpack the Mass Flow Meter...............................................................

1.3 Returning Merchandise for Repair.......................................................

2. INSTALLATION........................................................................................

2.1 Primary Gas Connections.................................................................

2.2 Electrical Connections......................................................................

2.3.1 Remote LCD Readouts.....................................................................

2.3.2 Panel Mounting Readouts................................................................

3. PRINCIPLE OF OPERATION...................................................................

4. SPECIFICATIONS...................................................................................

4.1 CE Compliance.................................................................................

5. OPERATING INSTRUCTIONS..................................................................

5.1 Preparation and Warm Up..................................................................

5.2 Flow Signal Output Readings..........................................................

5.3 Swamping Condition.......................................................................

6. MAINTENANCE.........................................................................................

6.1 Introduction......................................................................................

6.2 Flow Path Cleaning...........................................................................

6.2.1 Restrictor Flow Element (RFE)........................................................

6.2.2 FMA1700A/1800A Series Max. Flow 15 L/min...................................

7. CALIBRATION PROCEDURES.................................................................

7.1 Flow Calibration...............................................................................

7.2 Calibration of FMA1700A/1800A Mass Flow Meters........................

7.2.1 Connections and Initial Warm Up.....................................................

7.2.2 ZERO Adjustment.............................................................................

7.2.3 SPAN Adjustment............................................................................

7.3 Linearity Adjustment..........................................................................

7.3.1 Connections and Initial Warm Up....................................................

7.3.2 ZERO Adjustment.............................................................................

7.3.3 25% Flow Adjustment (using R33 potentiometer)...........................

7.3.4 10% Flow Adjustment......................................................................

7.3.5 25% Flow Adjustment (using R52 potentiometer)..........................

1
1
1
1

1
1
2
4
4

5

6
7

9
9
9

10

10
10
10
10
11

11
11
13
13
13
13
14
14
14
14
15
15

7.3.6 50% Flow Adjustment....................................................................

7.3.7 75% Flow Adjustment....................................................................

7.3.8 100% Flow Adjustment....................................................................

7.4 LCD Display Scaling.........................................................................

7.4.1 Access LCD Display Circuit..............................................................

7.4.2 Adjust Scaling..................................................................................

7.4.3 Change Decimal Point......................................................................

8. TROUBLESHOOTING.............................................................................

8.1 Common Conditions........................................................................

8.2 Troubleshooting Guide.....................................................................

8.3 Technical Assistance.......................................................................

9. CALIBRATION CONVERSIONS FROM REFERENCE GASES.......................

APPENDIX 1 COMPONENT DIAGRAM.........................................................

APPENDIX 2 GAS FACTOR TABLE (“K” FACTORS)........................................

APPENDIX 3 DIMENSIONAL DRAWINGS......................................................

PARTS OF THE FLOW METER..............................................

15
15
15
15
16
16
16

16
16
17
21

22

23

24

28
29

1

1. UNPACKING THE FMA1700A/1800A
MASS FLOW METER

1.1 Inspect Package for External Damage

Remove the Packing List and verify that you have received all equipment. If you
have any questions about the shipment, please call the OMEGA7 Customer

Service Department at 1-800-622-2378 or [phone].

Your FMA1700A/1800A Mass Flow Meter was carefully packed in a sturdy card­board carton, with anti-static cushioning materials to withstand shipping shock.
Upon receipt, inspect the package for possible external damage. In case of exter­nal damage to the package contact the shipping company immediately.

1.2 Unpack the Mass Flow Meter

Open the carton carefully from the top and inspect for any sign of concealed ship­ping damage. In addition to contacting the shipping carrier please forward a copy

of any damage report to OMEGA7 directly.

When unpacking the instrument please make sure that you have all the items
indicated on the Packing List. Please report any shortages promptly.

1.3 Returning Merchandise for Repair

Please contact an OMEGA7 customer service representative and request a

Return Authorization Number (AR).

It is mandatory that any equipment returned for servicing be purged and neutral­ized of any dangerous contents including but not limited to toxic, bacterially infec­tious, corrosive or radioactive substances. No work shall be performed on a
returned product unless the customer submits a fully executed, signed SAFETY
CERTIFICATE. Please request form from the Service Manager.

2. INSTALLATION

2.1 Primary Gas Connections

Please note that the FMA1700A/1800A Mass Flow Meter will not operate with liq­uids. Only clean gases are allowed to be introduced into the instrument. If gases
are contaminated they must be filtered to prevent the introduction of impediments
into the sensor.

CAUTION: Some of the IC devices used in the FMA1700A & FMA1800A are
Electro Static Discharge (ESD) sensitive and may be damaged by improper
handling. When wiring interface connector, adjusting or servicing the meter,
use of a grounded ESD protection wrist strap is required to prevent inadvertent
damage to the CMOS integral solid state circuitry. When 9 pin Interface
D-connector is not used do not remove factory installed ESD protection cover.

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2

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CAUTION: IT IS THE USERS RESPONSIBILITY TO DETERMINE IF THE
INSTRUMENT IS APPROPRIATE FOR THEIR OXYGEN APPLICATION, AND FOR
SPECIFYING O2 CLEANING SERVICE IF REQUIRED. OMEGA IS NOT LIABLE
FOR ANY DAMAGE OR PERSONAL INJURY, WHATSOEVER, RESULTING FROM
THE USE OF THIS INSTRUMENT FOR OXYGEN GAS.

Attitude sensitivity of the Mass Flow Meter is ±15. This means that the gas flow
path of the Flow Meter must be horizontal within those stated limits. Should there
be need for a different orientation of the meter, re-calibration may be necessary. It
is also preferable to install the FMA1700A/1800A transducer in a stable environ­ment, free of frequent and sudden temperature changes, high moisture, and
drafts.

Prior to connecting gas lines inspect all parts of the piping system including fer­rules and fittings for dust or other contaminant’s.

Be sure to observe the direction of gas flow as indicated by the arrow on the front
of the meter when connecting the gas system to be monitored.

Insert tubing into the compression fittings (except FMA1700A/1800A Series Max
Flow 1000 L/min) until the ends of the properly sized tubings home flush against
the shoulders of the fittings. Compression fittings are to be tightened according to
the manufacturer's instructions to one and one quarter turns. Avoid over tighten­ing which will seriously damage the Restrictor Flow Elements (RFE's)!

Using a Helium Leak Detector or other equivalent method perform a thorough
leak test of the entire system

. (All FMA1700A/1800A are checked prior to ship-

ment for leakage within stated limits. See specifications in this manual.)

2.2 Electrical Connections

CAUTION: Some of the IC devices used in the FMA1700A & FMA1800A are
Electro Static Discharge (ESD) sensitive and may be damaged by improper
handling. When wiring interface connector, adjusting or servicing the meter,
use of a grounded ESD protection wrist strap is required to prevent inadver
tent damage to the CMOS integral solid state circuitry. When 9 pin interface
D-connector is not used do not remove factory installed ESD protection cover.

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CAUTION: WIRING THE FMA1700A & FMA1800A METER WITH THE POWER
ON MAY RESULT IN INTERNAL DAMAGE! PLEASE MAKE ALL WIRING
CONNECTIONS BEFORE SWITCHING ON THE POWER.

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All FMA1700A & FMA1800A models require power supplies with nominal current
rating of at least 200 mA. The operating power input is supplied via the DC power
jack or the 9-pin “D” connector located at the side of the flow transducer enclosure.
On FMA1700A & FMA1800A's purchased without an LCD readout, a readout
panel meter, digital multimeter, or other equivalent device is required to observe
the flow signal.

3

PIN FUNCTION

1 Remote LCD display signal
2 0 to 5 VDC output indication
3 0 to 5 VDC common
4 Power supply, positive
5 Power supply, common
6 Remote LCD display reference
7 (unassigned)
8 4 to 20 mA output indication

self-powered (sourcing type,
non-isolated)

9 4 to 20 mA common (return)

FIGURE 2.a - 9-PIN “D” CONNECTOR PINOUTS FOR FMA1700A/1800A TRANSDUCER

The FMA1700A & FMA1800A flow meters have universal power input and can be
used with any power supply voltage between +12 and +26 Vdc.

CAUTION: BEFORE CONNECTING POWER SUPPLY CHECK YOUR METER
SERIAL NUMBER AND POWER SUPPLY REQUREMENTS LABEL LOCATED ON
THE FLOW METER BACK COVER. DO NOT CONNECT POWER SUPPLY WITH
VOLTAGE ABOVE 26 VDC. EXCEEDING SPECIFIED MAXIMUM POWER SUPPLY
VOLTAGE LIMIT MAY RESULT IN DEVICE PERMANENT DAMAGE.

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IMPORTANT NOTES:

In general, “D” Connector numbering patterns are standardized. There are, how­ever, some connectors with nonconforming patterns and the numbering sequence
on your mating connector may or may not coincide with the numbering sequence
shown in our pin configuration table above. It is imperative that you match the
appropriate wires in accordance with the correct sequence regardless of the par­ticular numbers displayed on your mating connector.

Make sure power is OFF when connecting or disconnecting any cables in the
system.

When connecting power to the FMA1700A/1800A mass flow meter via the DC
power jack, do not connect any power supply to the 9-pin “D” Connector. The DC
power jack has a center positive polarity.

When battery use is required to power the FMA1700A/1800A, use only the
optional battery and accompanying charger available from OMEGA7.

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4

CAUTION: Resettable fuse will not protect meter if power supply voltage
exceeds maximum voltage specified for particular model.

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In order to operate flow meter within the specification the cable length for analog
0-5 Vdc output and remote LCD display may not exceed 9.5 feet (3 meters).

Use of the FMA1700A/1800A flow transducer in a manner other than that speci­fied in this manual or in writing from OMEGA7, may impair the protection provid-

ed by the equipment.

2.3.1 Remote LCD Readouts

FMA1700A/1800A Mass Flow Meters are available with optional remote reading
LCD displays supplied with a three foot long wire to accommodate most applica­tions. This configuration includes the upper block element which serves as the
LCD readout mounting. Special lengths of remote extension wiring (up to 9.5 feet
[3 meters]) are available on request.

2.3.2 Panel Mounting Readouts

Another option for the FMA1700A/1800A Mass Flow Meter is the Panel Mounting
Remote Readout. In this configuration the LCD readout is supplied with a three
foot long extension wire, and no aluminum housing around the LCD. The LCD
readout for panel mounting includes a bezel with two plastic screws which conve­niently fit into a rectangular cut-out for panel mounting (see Figure 2.b).

The power input is protected by 300 mA M (medium time-lag) resettable fuse. If a
shorting condition or polarity reversal occurs, the fuse will cut power to the flow
transducer circuit. Disconnect the power to the unit, remove the faulty condition,
and reconnect the power. The fuse will reset once the faulty condition has been
removed.

FIGURE 2.b - CUTOUT DIMENSIONS FOR LCD PANEL MOUNTING

3. PRINCIPLE OF OPERATION

The stream of gas entering the Mass Flow transducer is split by shunting a small
portion of the flow through a capillary stainless steel sensor tube. The remainder
of the gas flows through the primary flow conduit. The geometry of the primary con­duit and the sensor tube are designed to ensure laminar flow in each branch.
According to principles of fluid dynamics the flow rates of a gas in the two laminar
flow conduits are proportional to one another. Therefore, the flow rates measured
in the sensor tube are directly proportional to the total flow through the transducer.

In order to sense the flow in the sensor tube, heat flux is introduced at two sec­tions of the sensor tube by means of precision wound heater-sensor coils. Heat is
transferred through the thin wall of the sensor tube to the gas flowing inside. As
gas flow takes place heat is carried by the gas stream from the upstream coil to
the downstream coil windings. The resultant temperature dependent resistance
differential is detected by the electronic control circuit. The measured gradient at
the sensor windings is linearly proportional to the instantaneous rate of flow tak­ing place.

An output signal is generated that is a function of the amount of heat carried by
the gases to indicate mass-molecular based flow rates.

5

4. SPECIFICATIONS

FLOW MEDIUM: Please note that FMA1700A/1800A Series Max Flow 15, 50, 100, 200,
500 and 1000 L/min Mass Flow Meters are designed to work with clean gases only. Never
try to meter or control flow rates of liquids with any FMA1700A/1800A.

CALIBRATIONS: Performed at standard conditions [14.7 psia (1.01 bars) and 70

F

F

(21.1

F

C)] unless otherwise requested or stated.

ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II.

ACCURACY: FMA1700A/1800A Series Max Flow 15, 50 and 100 L/min ±1.0% F.S.

FMA1700A/1800A Series Max Flow 200, 500 and 1000 L/min. ±1.5% F.S.

REPEATABILITY: ±0.25% of full scale.

TEMPERATURE COEFFICIENT: 0.15% of full scale/

F

C.

PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).

RESPONSE TIME: 800 ms time constant; approximately 2 seconds to within ±2% of set

flow rate for 25% to 100% of full scale flow rate.

GAS PRESSURE: 1000 psig (69 bars) FMA1700A/1800A Series Max Flow 15, 50 and 100;
500 psig (34.5 bars) FMA1700A/1800A Series Max Flow 200, 500 and 1000 L/min.
Optimum pressure is 20 psig (1.4 bars).

GAS AND AMBIENT TEMPERATURE: 32

F

F to 122 FF (0 FC to 50 FC).

14

F

F to 122 FF (-10 FC to 50 FC) - Dry gases only.

RELATIVE GAS HUMIDITY: Up to 70%.

LEAK INTEGRITY: 1 x 10

- 7

sccs He max. to the outside environment.

ATTITUDE SENSITIVITY: Incremental deviation of up to 1% full scale from stated accuracy,
after re-zeroing.

OUTPUT SIGNALS: Linear 0-5 VDC (1000 Ω minimum load impedance) and 4-20 mA self-
powered sourcing type, non-isolated, (0-500 Ω loop resistance); 20 mV peak to peak max noise.

Contact Omega© for optional RS232 or RS485 interfaces.

6

TRANSDUCER INPUT POWER:

FMA1700A & FMA1800A models with universal power input between +12 and +25 VDC, 200
mA maximum;

Power input is protected by a 300 mA M (medium time-lag) resettable fuse, and a rectifier
diode for polarity protection.

7

WETTED MATERIALS:

FMA1700A/1800A Series Max Flow 15, 50, 100, 200, 500 and 1000 L/min: Anodized

aluminum, brass, and 316 stainless steel with FKM O-rings seals; BUNA, EPR or
Perfluoroelastomer O-rings are optional.

FMA1700A/1800A Series Max Flow 15, 50, 100, 200, 500 and 1000 L/min: 316 stain­less steel with FKM O-rings seals; BUNA, EPR or Perfluoroelastomer O-rings are optional.

OMEGA7 makes no expressed or implied guarantees of corrosion resistance of mass flow
meters as pertains to different flow media reacting with components of meters. It is the
customers' sole responsibility to select the model suitable for a particular gas based on the
fluid contacting (wetted) materials offered in the different models.

INLET AND OUTLET CONNECTIONS:

FMA1700A/1800A Series Max. Flow 15 and 50 L/min: 1/4" compression fittings.

Optional: 6mm compression, 1/4" VCR

®

, 3/8" or 1/8" compression fittings (Max. Flow 15).

FMA1700A/1800A Series Max. Flow 100 and 200 L/min: 3/8" compression fittings.
FMA1700A/1800A Series Max. Flow 500 L/min: 1/2" compression fittings.
FMA1700A/1800A Series Max. Flow 1000 L/min: 3/4" FNPT fittings or 3/4"

compression fittings.

LCD DISPLAY: 3½ digit LCD (maximum viewable digits “1999”), 0.5 inch high characters.
On FMA1700A/1800A aluminum or stainless steel models the LCD display is built into the
upper block element and may be tilted over 90 degrees for optimal viewing comfort.
Remote or panel mounting remote reading is optional.

Standard readings are in direct engineering units for the given gas and flow rate (i.e.
liters/minute [lpm], standard cubic centimeters/minute [sccm], standard cubic feet/hour
[scfh], etc.). 0 to 100% LCD calibration scaling is available upon request at time of order.
Contact OMEGA7 when non-standard display settings are desired.

TRANSDUCER INTERFACE CABLE: Optional shielded cable is available mating to the
FMA1700A/1800A transducer 9-pin “D” connector. In order to operate flow meter within the
specification the cable length for analog 0-5 Vdc output and remote LCD display may not
exceed 9.5 feet (3 meters).

4.1 CE Compliance

Any model FMA1700A/1800A bearing a CE marking on it, is in compliance with
the below stated test standards currently accepted.

EMC Compliance with 89/336/EEC as amended; Emission Standard: EN
55011:1991, Group 1, Class B Immunity Standard: EN 55082-2:1992.

8

FLOW RANGES

TABLE II FMA1700A/1800A

SERIES MAX FLOW 50 L/min

MEDIUM FLOW MASS FLOW METER*

TABLE III FMA1700A/1800A

SERIES MAX FLOW 100 L/min

HIGH FLOW MASS FLOW METER*

* Flow rates are stated for Nitrogen at STP

conditions [i.e. 70

F

F (21.1 FC) at 1 atm].

For other gases use the K factor as a
multiplier from APPENDIX 2.

CODE

L/min [N2]

23 15

24

20
26 30

27 40
28 50

CODE

L/min [N2]

40 60
41 80

42 100
43 200
44 500
45 1000

TABLE I FMA1700A/1800A

SERIES MAX FLOW 15 L/min

LOW FLOW MASS FLOW METER*

CODE

mL/min [N2]

02 0 to 10
04 0 to 20

06 0 to 50
08 0 to 100
10 0 to 200
12 0 to 500

CODE

L/min [N2]

14 0 to 1

16 0 to 2

18 0 to 5

20 0 to 10

TABLE IV PRESSURE DROPS

MAXIMUM

FLOW RATE

SERIES

FLOW RATE

[liters/min]

MAXIMUM PRESSURE DROP

[mm H2O]

[psid] [mbar]

10 L/min up to 10 25 0.04 2.5

50 L/min

15 63 0.09 6.4
20 300 0.44 30
30 800 1.18 81
40 1480 2.18 150
50 2200 3.23 223

100 L/min

60 3100 4.56 314

100 5500 8.08 557
200 L/min 200 2720 4.0 280
500 L/min 500 3400 5.0 340

1000 L/min 1000 6120 9.0 620

9

5. OPERATING INSTRUCTIONS

5.1 Preparation and Warm Up

It is assumed that the Mass Flow Meter has been correctly installed and thor­oughly leak tested as described in section 2. Make sure the flow source is OFF.
Apply power to the unit by plugging the power supply line into the DC power
jack (or 9-pin 'D' connector) on the side of the meter. Allow the Mass Flow
Meter to warm-up for a minimum of 15 minutes.

SUPPLYING DC POWER TO THE POWER JACK AND THE “D” CONNECTOR AT
THE SAME TIME WILL DAMAGE THE METER. DC POWER JACK POLARITY
IS CENTER POSITIVE.

During initial powering of the FMA1700A/1800A transducer, the flow output sig­nal will be indicating a higher than usual output. This is indication that the
FMA1700A/1800A transducer has not yet attained it's minimum operating tem­perature. This condition will automatically cancel within a few minutes and the
transducer should eventually zero. If after the 15 minutes warm-up period, the
display still indicates a reading of less than ± 3.0 % of F.S., readjust the ZERO
potentiometer [R34] through the access hole. Before zero adjustment it is good
practice to temporarily disconnect the gas source, to ensure that no see page or
leak occurs in to the meter.

5.2 Flow Signal Output Readings

Initiate a controlled gas flow after warm up. The flow signal output can be viewed
either on the LCD display, remote panel meter, digital multimeter, or other display
device.

If an LCD display has been supplied with the FMA1700A/1800A, the observed
reading is in direct engineering units (0 to 100% indication is optional).

Analog output flow signals of 0 to 5 VDC and 4 to 20 mA are attained at the appro­priate pins of the 9-pin “D” connector (see Figure 2.a) on the side of the
FMA1700A/1800A transducer.

Meter signal output is linearly proportional to the mass molecular flow rate of the
gas being metered. By default calibration is done against 0 to 5 VDC output sig­nal. If 4-20 mA output signal is used for flow indication on the FMA1700A/1800A,
which was calibrated against 0 to 5 VDC, the total uncertainty of the reading may
be in the range of +

2.5% of full scale. Optional calibration for 4-20 mA output sig­nal is available upon request at time of order. The full scale range and gas for
which your meter has been calibrated are shown on the flow transducers front
label.

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ADJUSTING ZERO READING MORE THAN ± 3.0% F.S. FROM THE FACTORY
SETTINGS MAY AFFECT DEVICE CALIBRATION ACCURACY. IF SUCH
ADJUSTMENT IS REQUIRED IT IS RECOMMENDED TO PERFORM METER
RECALIBRATION TO PRESERVE DEVICE ACCURACY.

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10

,

5.3 Swamping Condition

If a flow of more than 10% above the maximum flow rate of the Mass Flow Meter
is taking place, a condition known as “swamping” may occur. Readings of a
“swamped” meter cannot be assumed to be either accurate or linear. Flow must
be restored to below 110% of maximum meter range. Once flow rates are lowered
to within calibrated range, the swamping condition will end. Operation of the meter
above 110% of maximum calibrated flow may increase recovery time.

6. MAINTENANCE

6.1 Introduction

It is important that the Mass Flow Meter/Controller is used with clean, filtered
gases only. Liquids may not be metered. Since the RTD sensor consists, in part,
of a small capillary stainless steel tube, it is prone to occlusion due to impedi­ments or gas crystallization. Other flow passages are also easily obstructed.
Therefore, great care must be exercised to avoid the introduction of any potential
flow impediment. To protect the instrument a 50 micron (FMA1700A/1800A Series
Max Flow 15 L/min) or 60 micron (FMA1700A/1800A Series Max Flow 100 and
200 L/min) filter is built into the inlet of the flow transducer. The filter screen and
the flow paths may require occasional cleaning as described below. There is no
other recommended maintenance required. It is good practice, however, to keep
the meter away from vibration, hot or corrosive environments and excessive RF
or magnetic interference.

If periodic calibrations are required they should be performed by qualified per­sonnel and calibrating instruments, as described in section 7. It is recommended
that units are returned to OMEGA7 for repair service and calibration.

CAUTION: TO PROTECT SERVICING PERSONNEL IT IS MANDATORY THAT ANY
INSTRUMENT BEING SERVICED IS COMPLETELY PURGED AND NEUTRALIZED
OF TOXIC, BACTERIOLOGICALLY INFECTED, CORROSIVE OR RADIOACTIVE
CONTENTS.

6.2 Flow Path Cleaning

Before attempting any disassembly of the unit for cleaning, try inspecting the
flow paths by looking into the inlet and outlet ends of the meter for any debris that
may be clogging the flow through the meter. Remove debris as necessary. If the
flow path is not unclogged, then proceed with steps below.

Do not attempt to disassemble the sensor. If blockage of the sensor tube is not alle­viated by flushing through with cleaning fluids, please return meter for servicing.

NOTE: DISASSEMBLY MAY COMPROMISE CURRENT CALIBRATION.

6.2.1 Restrictor Flow Element (RFE)

The Restrictor Flow Element (RFE) is a precision flow divider inside the trans­ducer, which splits the inlet gas flow by a preset amount to the sensor and main
flow paths. The particular RFE used in a given Mass Flow Meter depends on the
gas and flow range of the instrument.

6.2.2 FMA1700A/1800A Series Max Flow 15 L/min models

Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow
Element (RFE) is connected to the inlet fitting.

Carefully disassemble the RFE from the inlet connection. The 50 micron filter
screen will now become visible. Push the screen out through the inlet fitting. Clean
or replace each of the removed parts as necessary. If alcohol is used for clean­ing, allow time for drying.

Inspect the flow path inside the transducer for any visible signs of contaminant. If
necessary, flush the flow path through with alcohol. Thoroughly dry the flow paths
by flowing clean dry gas through.

Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming
the RFE. Be sure that no dust has collected on the O-ring seal.

NOTE: OVER TIGHTENING WILL DEFORM AND RENDER THE RFE DEFECTIVE.

It is advisable that at least one calibration point be checked after re-installing the
inlet fitting-See section (g).

IT IS NOT RECOMMENDED TO ATTEMPT TO DISASSEMBLE, OR REPAIR
MAXIMUM FLOW RATE SERIES MODELS 50 L/min, 100 L/min, 200 L/min,
500 L/min or 1000 L/min. DISASSEMBLY NECESSITATES RE-CALIBRATION.

7. CALIBRATION PROCEDURES

NOTE: REMOVAL OF THE FACTORY INSTALLED CALIBRATION SEALS AND/OR
ANY ADJUSTMENTS MADE TO THE METER, AS DESCRIBED IN THIS SECTION,
WILL VOID ANY CALIBRATION WARRANTY APPLICABLE.

7.1 Flow Calibration

OMEGA7 Engineering Flow Calibration Laboratory offers professional calibration
support for Mass Flow Meters, using precision calibrators under strictly controlled
conditions. NIST traceable calibrations are available. Calibrations can also be per­formed at customers' site using available standards.

Factory calibrations are performed using NIST traceable precision volumetric
calibrators incorporating liquid sealed frictionless actuators. Generally, calibra­tions are performed using dry nitrogen gas. The calibration can then be corrected
to the appropriate gas desired based on relative correction [K] factors shown in
the gas factor table - see Appendix 2. A reference gas, other than nitrogen, may
be used to better approximate the flow characteristics of certain gases.

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11

,

NOTE: REMOVAL OF THE FACTORY INSTALLED CALIBRATION SEALS AND/OR
ANY ADJUSTMENTS MADE TO THE METER, AS DESCRIBED IN THIS SECTION,
WILL VOID ANY CALIBRATION WARRANTY APPLICABLE.

,

This practice is recommended when a reference gas is found with thermodynamic
properties similar to the actual gas under consideration. The appropriate relative
correction factor should be recalculated - see section 9. It is standard practice to

calibrate Mass Flow Meters with dry nitrogen gas at 70

0

F (21.1 FC), 20 psig (1.4
bars) inlet pressure and 0 psig (0 bar) outlet pressure. It is best to calibrate the
FMA1700A/1800A transducers to actual operating conditions. Specific gas cali­brations of non-toxic and non-corrosive gases are available at specific conditions.

Please contact your OMEGA7 for a price quotation. It is recommended that a flow
calibrator of at least four times better collective accuracy than that of the Mass
Flow Meter to be calibrated be used. Equipment required for calibration includes
a flow calibration standard and a certified high sensitivity multimeter (which
together have a collective accuracy of ±0.25% or better), an insulated (plastic)
screwdriver, a flow regulator (example: metering needle valve) installed upstream
from the Mass Flow Meter and a pressure regulated source of dry filtered nitro­gen gas (or other suitable reference gas).

The gas and ambient temperature, as well as inlet and outlet pressure conditions
should be set up in accordance with actual operating conditions.

12

R52-25%

(IF ENABLED)

R1

J1A (R52)

J1B (R38) J1C (R39)

J1D (R40)

R33-SPAN

(25% or 10%)

R34-ZERO

R38-50%

R39-75% R40-100%

POWER JACK

D-CONNECTOR

MODULAR JACK

INCREASE

DECREASE

FIGURE 7.a - CALIBRATION POTENTIOMETER AND JUMPER LOCATIONS

7.2 Calibration of FMA1700A/1800A Mass Flow Meters

All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument.

FMA1700A/1800A Mass Flow Meters may be field recalibrated/checked for the
same range they were originally factory calibrated for. When linearity adjustment
is needed, or flow range changes are being made proceed to step 7.3. Flow
range changes may require a different Restrictor Flow Element (RFE). Consult

OMEGA7 for more information.

7.2.1 Connections and Initial Warm Up

At the 9-pin “D” connector of the FMA1700A/1800A transducer, connect the mul­timeter to output pins [2] and [3] for 0-5 VDC (or pins [8] and [9] for 4-20 mA)-(see
Figure 2.a).

Power up the Mass Flow Meter for at least 30 minutes prior to commencing the
calibration procedure.

7.2.2 ZERO Adjustment

Shut off the flow of gas into the Mass Flow Meter. To ensure that no seepage or leak
occurs into the meter, it is good practice to temporarily disconnect the gas source.
Using the multimeter and the insulated screwdriver, adjust the ZERO potentiometer

[R34] through the access window for 0 VDC (or 4 mA respectively) at zero flow.

13

CAUTION: The minimum voltage on 0-5 Vdc output can be in the range of 7
to 25 mV. Trying to reduce voltage below this level may increase negative
zero shift. This shift may be invisible on devices without LCD display. Stop
R34 zero potentiometer adjustment if voltage on 0-5 Vdc output is in the
range from 7 to 25 mV and does not decrease any lower.



7.2.3 SPAN Adjustment

Reconnect the gas source. Using the flow regulator, adjust the flow rate to 100% of
full scale flow. Check the flow rate indicated against the flow calibrator. If the devia­tion is less than ±10% of full scale reading, correct the SPAN potentiometer [R33]
setting by using the insulated screwdriver through the access window, to eliminate
any deviation. If the deviation is larger than ±10% of full scale reading, a defective
condition may be present.

LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE:

✓ Occluded or contaminated sensor tube.
✓ Leaking condition in the FMA1700A/1800A transducer or the gas line and fittings.
✓ For gases other than nitrogen, recheck appropriate “K” factor from the Gas Factor Table.
✓ Temperature and/or pressure correction errors.

14

See also section 8. TROUBLESHOOTING. If after attempting to remedy the
above conditions, a malfunction still persists, return the meter for factory
service, see section 1.1.

At this point the calibration is complete. However, it is advisable that several
additional points between 0 and 100%, such as 25%, 50%, and 75% flow be
checked. If discrepancies are found, proceed to step 7.3 for Linearity Adjustment.

7.3 Linearity Adjustment

7.3.1 Connections and Initial Warm Up

At the 9-pin “D” connector of the FMA1700A & FMA1800A transducer, connect
the multimeter to output pins [2] and [3] for 0-5 VDC (or pins [8] and [9] for 4-20
mA)-(see Figure 2.a). If calibration to a new flow range or different gas is being
performed, it may be necessary to remove any jumpers at J1.A, J1.B, J1.C, and
J1.D before the beginning the linearizing procedure.

Power up the Mass Flow Meter for at least 30 minutes prior to commencing the
calibration procedure.

7.3.2 ZERO Adjustment

Shut off the flow of gas into the Mass Flow Meter. To ensure that no seepage or
leak occurs into the meter, it is good practice to temporarily disconnect the gas
source. Using the multimeter and the insulated screwdriver, adjust the ZERO
potentiometer [R34] through the access window for 0 VDC (or 4 mA respectively)
at zero flow.

CAUTION: The minimum voltage on 0-5 Vdc output can be in the range of 7
to 25 mV. Trying to reduce voltage below this level may increase negative
zero shift. This shift may be invisible on devices without LCD display. Stop
R34 zero potentiometer adjustment if voltage on 0-5 Vdc output is in the
range from 7 to 25 mV and does not decrease any lower.

7.3.3 25% Flow Adjustment (using R33 potentiometer)

Reconnect the gas source. Using the flow regulator, adjust the flow rate to 25%
of full scale flow. Check the flow rate indicated against the flow calibrator.

Adjust the setting for potentiometer [R33] by using the insulated screwdriver
through the access window, until the output of the flow meter reads 1.25VDC
±63mV (or 8mA ±0.25mA).

Using the flow regulator, adjust the flow rate until the output of the flow meter
reads 0.5 VDC (or 5.6mA). Check the flow rate against the flow calibrator. If the
flow rate indicated by the calibrator is within 10% ± 1.5% of F.S. then skip para­graphs 7.3.4, 7.3.5 and proceed directly to paragraph 7.3.6, if not, perform 10%
flow adjustment according to paragraph 7.3.4.



7.3.4 10% Flow Adjustment

Using the flow regulator, adjust the flow rate to 10% of full scale flow according to the
calibrator. Check the flow rate indicated against the flow calibrator. Adjust the setting
for potentiometer [R33] by using the insulated screwdriver through the access win­dow, until the output of the flow meter reads 0.5VDC ±63mV (or 5.6mA ±0.25mA).

7.3.5 25% Flow Adjustment (using R52 potentiometer)

Using the flow regulator, adjust the flow rate to 25% of full scale flow according to
the calibrator. Check the flow rate indicated against the flow calibrator. The output
of the flow meter should read 1.25VDC ±63mV (or 8.0mA ±0.25mA). If the reading
is outside of that range, place the jumper at [J1.A] as appropriate to increase or
decrease the signal. Adjust the setting for potentiometer [R52] by using the insu­lated screwdriver through the access window, until reading is within specification.

7.3.6 50% Flow Adjustment

Using the flow regulator, increase the flow rate to 50% of full scale flow according
to the calibrator. Check the flow rate indicated against the flow calibrator. The out­put of the flow meter should read 2.50VDC ±63mV (or 12mA ±0.25mA). If the read­ing is outside of that range, place the jumper at [J1.B] as appropriate to increase
or decrease the signal. Adjust the setting for potentiometer [R38] by using the insu­lated screwdriver through the access window, until reading is within specification.

7.3.7 75% Flow Adjustment

Using the flow regulator, increase the flow rate to 75% of full scale flow according
to calibrator. Check the flow rate indicated against the flow calibrator. The output of
the flow meter should read 3.75VDC ±63mV (or 16mA ±0.25mA). If the reading is
outside of that range, place the jumper at [J1.C] as appropriate to increase or
decrease the signal. Adjust the setting for potentiometer [R39] by using the insu­lated screwdriver through the access window, until reading is within specification.

7.3.8 100% Flow Adjustment

Using the flow regulator, increase the flow rate to 100% of full scale flow. Check
the flow rate indicated against the flow calibrator. The output of the flow meter
should read 5.00VDC ±63mV (or 20mA ±0.25mA).

If the reading is outside of that range, place the jumper at [J3] as appropriate to
increase or decrease the signal. Adjust the setting for potentiometer [R40] by using the
insulated screwdriver through the access window, until reading is within specification.

Repeat steps 7.3.3 to 7.3.6 at least once more.

7.4 LCD Display Scaling

It may be desirable to re-scale the output reading on the LCD readout supplied with
certain model FMA1700A/1800A transducers. Re-calibration for a new flow range
or different engineering units are two examples of when this may be necessary.

15

16

7.4.2 Adjust Scaling

Using a digital multimeter connected to either the 0 to 5 VDC or 4 to 20 mA sig­nal at the 9-pin “D” connector, set the flow rate on the FMA1700A/1800A to full
scale flow (5 VDC or 20mA). Maintain full scale flow, and adjust the potentiome­ter [R3] on the LCD printed circuit board to desired full scale flow reading.

7.4.3 Change Decimal Point

To change the decimal place on the LCD display readout, simply move the jumper
to the appropriate location on the 8-pin header block. The numbers are printed to
the side of the connections. Do not attempt to place more than one jumper for
decimal setting.

8. TROUBLESHOOTING

8.1 Common Conditions

Your Mass Flow Meter was thoroughly checked at numerous quality control points
during and after manufacturing and assembly operations. It was calibrated
according to your desired flow and pressure conditions for a given gas or a mix­ture of gases.

It was carefully packed to prevent damage during shipment. Should you feel that
the instrument is not functioning properly please check for the following common
conditions first:

Are all cables connected correctly? Are there any leaks in the installation? Is the
power supply correctly selected according to requirements? When several meters
are used a power supply with appropriate current rating should be selected.

Were the connector pinouts matched properly? When interchanging with other
manufacturers' equipment, cables and connectors must be carefully wired for cor­rect pin configurations. Is the pressure differential across the instrument sufficient?

JUMPER POSITION MAXIMUM SCALABLE DISPLAY READING

“0”

1999

“3” 199.9

“2” 19.99
“1” 1.999

7.4.1 Access LCD Display Circuit

Carefully remove the LCD from the FMA1700A/1800A or panel mounted surface.
Remove the aluminum housing on the side of the connection cable. Slide the
LCD assembly out of the aluminum housing.

17

8.2 Troubleshooting Guide

INDICATION

Lack of reading or output.

Unstable or no zero reading.

Full scale output at “no
flow” condition or with valve
closed.

Calibration off.

LIKELY REASON

Power supply off

Fuse blown

Filter screen
obstructed at inlet.

Occluded sensor tube.

PC board defect.

Power supply problem.

Gas leak.

PC board defective.

Defective sensor.

Gas leak.

Gas metered is not the
same as what meter was
calibrated for.

Composition of gas
changed.

Gas leak.

PC board defective.

RFE dirty.

Occluded sensor tube.

Filter screen obstructed at
inlet.

Transducer
is not mounted properly.

REMEDY

Check connection of power
supply.

Disconnect FMA1700A/1800A
transducer from power
supply; remove the shorting
condition or check polarities;
fuse resets automatically.

Flush clean or disassemble
to remove impediments or
replace.

Flush clean or or return to
factory for replacement.

Return to factory for replacement.

Check power supply for
appropriate output.

Locate and correct.

Return to factory for replacement.

Return to factory for replacement.

Locate and correct.

Use matched calibration.

See K factor tables in
APPENDIX 2.

Locate and correct.

Return to factory for replacement.

Flush clean or disassemble
to remove impediments.

Flush clean or return to
factory for replacement.

Flush clean or disassemble to
remove impediments or replace.

Check for any tilt or change
in the mounting of the
transducer; generally, units
are calibrated for horizontal
installation
(relative to the sensor tube).

18

INDICATION

No zero reading after 15
minute warm up time and no
flow condition.

No zero reading after 15
minute warm up time and no
flow condition. Display
reading does not response
on zero adjustment.

No zero reading after 15
minute warm up time and
no flow condition. Display
reading does not response
on zero adjustment. But
analog output 0-5 Vdc can
be adjusted from 10mV up
to 0.5 Vdc with zero
potentiometer R34.

LCD Display remains blank
when unit is powered up.
But flow can be observed
on analog output 0-5 Vdc
(pis 2 and 3 of the
D-connector).

LCD Display remains blank
when unit is powered up. No
response on the flow from
analog output 0-5 Vdc
(voltage is less than 15 mV).

LIKELY REASON

Embedded temperature has
been changed.

Power supply voltage is
less than 11.0 Vdc.

Wire is disconnected inside
of the LCD Display.

LCD Display connector is
not attached to the
FMA1700A/1800A or
connection is loose.

Wire is disconnected inside
of the LCD Display.

Power supply is bad or
polarity is reversed.

PC board is defective.

REMEDY

Readjust ZERO
potentiometer R34 through
the access hole
(see page 13 for details).

Measure voltage on pins
[4] and [5] of the 9-pin
D-connector. If voltage is
less than 11.0Vdc replace
power supply with new one
(regulated 12.0 to 24.0
Vdc, 250 mA minimum is
recommended).

Carefully remove the LCD
from FMA1700A/1800A.
Remove the aluminum
housing on the side of the
connection cable. Side the
LCD assembly out of the
aluminum housing. Check
connection for all four
wires. If any wire is
disconnected restore
connection and readjust
zero potentiometer R34 to
get zero reading on the
display (ensure gas source
is disconnected and no
seepage or leak occurs in
to the meter).

Check LCD connector
(remove and reinstall LCD
connector).

See instructions for pos. 3.

Measure voltage on pins
[4] and [5] of the 9-pin
D-connector. If voltage is
less than 11.0Vdc replace
power supply with new one
(regulated 12.0 to 24.0
Vdc, 250 mA minimum is
recommended). If polarity
is reversed (reading is
negative) make correct
connection.

Return FMA1700A/1800A
to factory for repair.

19

INDICATION

LCD Display reading does
not correspond the correct
flow range according analog
output 0-5 Vdc signal.

LCD Display reading and
analog output 0-5Vdc
signal are fluctuate in wide
range during the flow
measurement.

LCD Display reading does
correspond the correct flow
range, but 0-5 Vdc output
signal does not change
(always the same reading
or around zero).

LCD Display reading and
0-5 Vdc output voltage do
correspond the correct flow
range, but 4-20 mA output
signal does not change
(always the same or
reading around 4.0 mA).

Calibration is off
(no more than 3.0 % F.S.).

REMEDY

Readjust LCD Display
scaling for required full scale
flow (see 7.4 on page 15).

Check external connections
to pins [2] and [3] of the
D-connector. Make sure the
load resistance is more
than 1000 Ohm.

Return FMA1700A/1800A to
factory for repair.

Check external connections
to pins [8] and [9] of the
D-connector. Make sure the
loop resistance is less than
500 Ohm.

Return FMA1700A/1800A to
factory for repair.

Shut off the flow of gas into
the FMA1700A/1800A
(ensure gas source is dis­connected and no seepage
or leak occurs in to the
meter). Wait for 15 minute.
with no flow
condition and readjust zero
potentiometer R34 to get
zero reading on the display.

LIKELY REASON

LCD Display is adjusted for
wrong flow range or
engineering units.

Output 0-5 Vdc signal (pins
[2] and [3] of the
D-connector) is shorted on
the GND or overloaded.

Output 0-5Vdc schematic is
burned out or damaged.

External loop resistance is
open or more than 500
Ohm.

Output 4-20 mA schematic
is burned out or damaged.

FMA1700A/1800A has initial
zero shift.

20

INDICATION

LCD Display reading is
above maximum flow range
and output voltage 0-5 Vdc
signal is more than 5.5 Vdc
when gas flows through the
FMA1700A/1800A.

Gas flows through the
FMA1700A/1800A, but LCD
Display reading and output
voltage 0-5 Vdc signal do
not responds on the flow.

Gas does not flow through
the FMA1700A/1800A with
inlet pressure applied to the
inlet fitting. LCD Display
reading and output voltage
0-5 Vdc signal show zero
flow.

Gas flows through the
FMA1700A/1800A, but LCD
Display reading is negative
and output voltage 0-5 Vdc
signal do not responds on
the flow (reading near
10mV).

Gas flows through the
FMA1700A/1800A, but LCD
Display reading is negative
and does not change
according to gas flow.
Output voltage
0-5 Vdc signal corresponds
correct gas flow.

REMEDY

Lower the flow through
FMA1700A/1800A within
calibrated range or shut
down the flow completely.
The swamping condition will
end automatically.

Return FMA1700A/1800A to
factory for repair.

Check maximum flow range
on transducer's front panel
and make required flow
adjustment.

Unscrew the inlet compres­sion fitting of the meter and
reinstall RFE (see 6.2.2 on
page 11). NOTE: Calibration
accuracy can be affected.

Return FMA1700A/1800A to
factory for repair.

Flush clean or disassemble
to remove impediments or
replace the filter screen
(see 6.2 on page 9).
NOTE: Calibration accuracy
can be affected.

Check the direction of gas
flow as indicated by the
arrow on the front of the
meter and make required
reconnection in the installation.

Locate and correct gas leak in the
system. If FMA1700A/1800A
has internal leak return it to
factory for repair.

Carefully remove the LCD
from FMA1700A/1800A.
Remove the aluminum
housing on the side of the
connection cable. Side the
LCD assembly out of the
aluminum housing. Check
connection for green wire
(5.00 Vdc reference voltage).
If any wire is disconnected
restore connection.

LIKELY REASON

Sensor under swamping
conditions (flow is more
than 10% above maximum
flow rate for particular
FMA1700A/1800A).

PC board is defective.

The gas flow is too low for
particular model of
FMA1700A/1800A.

FMA1700A/1800A Series
Max Flow 15 L/min models:
RFE is not connected prop­erly to the inlet fitting.

Sensor or PC board is
defective.

Filter screen obstructed at
inlet.

Direction of the gas flow is
reversed.

FMA1700A/1800A is installed
in the installation with back
pressure conditions and gas
leak exist in the system.

5.00 Vdc reference voltage
(green wire) is disconnected
inside of the LCD Display.

21

INDICATION

FMA1700A/1800A is
disconnected from the
source of the gas (no flow
conditions) but LCD Display
reading is fluctuating in
wide range. Output voltage
0-5 Vdc signal also
fluctuating. The power
supply voltage is 12.0 to

24.0 Vdc and stable.

Reading on the LCD Display
ten (hundreds) times less
or more than actual gas
flow. Output voltage
0-5 Vdc signal corresponds
correct gas flow.

REMEDY

Return FMA1700A/1800A to
factory for repair.

Carefully remove the LCD
from FMA1700A/1800A.
Remove the aluminum
housing on the side of the
connection cable. Side the
LCD assembly out of the
aluminum housing.
Reinstall jumper to the
appropriate location on the
8-pin header block
(see 7.4.3 on page 16).

LIKELY REASON

Sensor or PC board is
defective.

Decimal point jumper is
installed in wrong position
on the LCD Display Circuit.

For best results it is recommended that instruments are returned to the factory
for servicing. See section 1.3 for return procedures.

8.3 Technical Assistance

OMEGA7 Engineering will provide technical assistance over the phone to quali­fied repair personnel. Please call our Flow Department at 800-872-9436 Ext.

2298.

Q

O2

= Q

a

= Q

r

X K = 1000 X 0.9926 = 992.6 sccm

where K = relative K factor to reference gas (oxygen to nitrogen)

1

d X C

p

where d = gas density (gram/liter)
C

p

= coefficient of specific heat (cal/gram)

Q

a

K

a

Q

r

K

r

where Qa= mass flow rate of an actual gas (sccm)
Q

r

= mass flow rate of a reference gas (sccm)

K

a

= K factor of an actual gas

K

r

= K factor of a reference gas

22

=

9. CALIBRATION CONVERSIONS FROM

REFERENCE GASES

The calibration conversion incorporates the K factor. The K factor is derived from
gas density and coefficient of specific heat. For diatomic gases:

=

K

=

K

gas

Note in the above relationship that d and Cp are usually chosen at the same con­ditions (standard, normal or other).

If the flow range of a Mass Flow Meter remains unchanged, a relative K factor is
used to relate the calibration of the actual gas to the reference gas.

For example, if we want to know the flow rate of oxygen and wish to calibrate
with nitrogen at 1000 SCCM, the flow rate of oxygen is:

23

APPENDIX 1

COMPONENTS DIAGRAM

FMA1700A/1800A METERING PC BOARD

24

APPENDIX 2

GAS FACTOR TABLE (“K” FACTORS)



CAUTION: K-Factors at best are only an approximation. K factors should not

be used in applications that require accuracy better than +/- 5 to 10%.

* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.

ACTUAL GAS

K FACTOR

Relative to N

2

Cp

[Cal/g]

Density

[g/I]

Acetylene C2H

2

.5829 .4036 1.162
Air 1.0000 .240 1.293
Allene (Propadiene) C3H

4

.4346 .352 1.787
Ammonia NH

3

.7310 .492 .760
*Argon Ar

*Argon AR-1 (>10 L/min)

1.4573

1.205

.1244
.1244

1.782

1.782

Arsine AsH

3

.6735 .1167 3.478
Boron Trichloride BCl

3

.4089 .1279 5.227
Boron Trifluoride BF

3

.5082 .1778 3.025
Bromine Br

2

.8083 .0539 7.130
Boron Tribromide Br

3

.38 .0647 11.18
Bromine PentaTrifluoride BrF

5

.26 .1369 7.803
Bromine Trifluoride BrF

3

.3855 .1161 6.108
Bromotrifluoromethane (Freon-13 B1) CBrF

3

.3697 .1113 6.644

1,3-Butadiene C4H

6

.3224 .3514 2.413

Butane C4H

10

.2631 .4007 2.593

1-Butene C4H

8

.2994 .3648 2.503

2-Butene C4H8 CIS

.324 .336 2.503

2-Butene C4H8TRANS

.291 .374 2.503

*Carbon Dioxide CO

2

*Carbon Dioxide CO2-1 (>10 L/min)

.7382
.658

.2016
.2016

1.964

1.964

Carbon Disulfide CS

2

.6026 .1428 3.397

Carbon Monoxide C0

1.00 .2488 1.250

Carbon Tetrachloride CCl

4

.31 .1655 6.860

Carbon Tetrafluoride (Freon-14)CF

4

.42 .1654 3.926

Carbonyl Fluoride COF

2

.5428 .1710 2.945

Carbonyl Sulfide COS

.6606 .1651 2.680

Chlorine Cl

2

.86 .114 3.163

Chlorine Trifluoride ClF

3

.4016 .1650 4.125

Chlorodifluoromethane (Freon-22)CHClF

2

.4589 .1544 3.858

Chloroform CHCl

3

.3912 .1309 5.326

Chloropentafluoroethane(Freon-115)C2ClF

5

.2418 .164 6.892

Chlorotrifluromethane (Freon-13) CClF

3

.3834 .153 4.660

CyanogenC2N

2

.61 .2613 2.322

CyanogenChloride CICN

.6130 .1739 2.742

Cyclopropane C3H

5

.4584 .3177 1.877

25

* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.

ACTUAL GAS

K FACTOR

Relative to N

2

Cp

[Cal/g]

Density

[g/I]

Deuterium D

2

1.00 1.722 1.799

Diborane B2H

6

.4357 .508 1.235

Dibromodifluoromethane CBr2F

2

.1947 .15 9.362

Dichlorodifluoromethane (Freon-12) CCl2F

2

.3538 .1432 5.395

Dichlofluoromethane (Freon-21) CHCl2F

.4252 .140 4.592

Dichloromethylsilane (CH3)2SiCl

2

.2522 .1882 5.758

Dichlorosilane SiH2Cl

2

.4044 .150 4.506

Dichlorotetrafluoroethane (Freon-114) C2Cl2F

4

.2235 .1604 7.626

1,1-Difluoroethylene (Freon-1132A) C2H2F

2

.4271 .224 2.857

Dimethylamine (CH3)2NH

.3714 .366 2.011

Dimethyl Ether (CH3)2O

.3896 .3414 2.055

2,2-Dimethylpropane C3H

12

.2170 .3914 3.219

Ethane C2H

6

.50 .420 1.342

Ethanol C2H6O

.3918 .3395 2.055

Ethyl Acetylene C4H

6

.3225 .3513 2.413

Ethyl Chloride C2H5Cl

.3891 .244 2.879

Ethylene C2H

4

.60 .365 1.251

Ethylene Oxide C2H4O

.5191 .268 1.965

Fluorine F

2

.9784 .1873 1.695

Fluoroform (Freon-23) CHF

3

.4967 .176 3.127

Freon-11 CCl3F

.3287 .1357 6.129

Freon-12 CCl2F

2

.3538 .1432 5.395

Freon-13 CClF

3

.3834 .153 4.660

Freon-13B1 CBrF

3

.3697 .1113 6.644

Freon-14 CF

4

.4210 .1654 3.926

Freon-21 CHCl2F

.4252 .140 4.592

Freon-22 CHClF

2

.4589 .1544 3.858

Freon-113 CCl2FCClF

2

.2031 .161 8.360

Freon-114 C2Cl2F

4

.2240 .160 7.626

Freon-115 C2ClF

5

.2418 .164 6.892

Freon-C318 C4F

8

.1760 .185 8.397

Germane GeH

4

.5696 .1404 3.418

Germanium Tetrachloride GeCl

4

.2668 .1071 9.565

*Helium He
*Helium He-1 (>50 L/min)
*Helium He-2 (>10-50 L/min)

1.454

2.43

2.05

1.241

1.241

1.241

.1786
.1786
.1786

Hexafluoroethane C2F6(Freon-116)

.2421 .1834 6.157

Hexane C6H

14

.1792 .3968 3.845

*Hydrogen H2-1
*Hydrogen H

2

-2 (>10-100 L)

*Hydrogen H

2

-3 (>100 L)

1.0106

1.35

1.9

3.419

3.419

3.419

.0899
.0899
.0899

26

* Flow rates indicated ( ) is the maximum flow range of the Mass Flow meter being used.

ACTUAL GAS

K FACTOR

Relative to N

2

Cp

[Cal/g]

Density

[g/I]

Hydrogen Bromide HBr

1.000 .0861 3.610

Hydrogen Chloride HCl

1.000 .1912 1.627

Hydrogen Cyanide HCN

.764 .3171 1.206

Hydrogen Fluoride HF

.9998 .3479 .893

Hydrogen Iodide HI

.9987 .0545 5.707

Hydrogen Selenide H2Se

.7893 .1025 3.613

Hydrogen Sulfide H2S

.80 .2397 1.520

Iodine Pentafluoride IF

5

.2492 .1108 9.90

Isobutane CH(CH3)

3

.27 .3872 3.593

Isobutylene C4H

6

.2951 .3701 2.503

Krypton Kr

1.453 .0593 3.739

*Methane CH

4

*Methane CH4-1 (>10 L/min)

.7175
.75

.5328
.5328

.7175
.7175

Methanol CH

3

.5843 .3274 1.429

Methyl Acetylene C3H

4

.4313 .3547 1.787

Methyl Bromide CH3Br

.5835 .1106 4.236

Methyl Chloride CH3Cl

.6299 .1926 2.253

Methyl Fluoride CH3F

.68 .3221 1.518

Methyl Mercaptan CH3SH

.5180 .2459 2.146

Methyl Trichlorosilane (CH3)SiCl

3

.2499 .164 6.669

Molybdenum Hexafluoride MoF

6

.2126 .1373 9.366

Monoethylamine C2H5NH

2

.3512 .387 2.011

Monomethylamine CH3NH

2

.51 .4343 1.386

Neon NE

1.46 .246 .900

Nitric Oxide NO

.990 .2328 1.339

Nitrogen N

2

1.000 .2485 1.25

Nitrogen Dioxide NO

2

.737 .1933 2.052

Nitrogen Trifluoride NF

3

.4802 .1797 3.168

Nitrosyl Chloride NOCl

.6134 .1632 2.920

Nitrous Oxide N2O

.7128 .2088 1.964

Octafluorocyclobutane (Freon-C318) C4F

8

.176 .185 8.397

Oxygen O

2

.9926 .2193 1.427

Oxygen Difluoride OF

2

.6337 .1917 2.406

Ozone

.446 .195 2.144

Pentaborane B5H

9

.2554 .38 2.816

Pentane C5H

12

.2134 .398 3.219

Perchloryl Fluoride ClO3F

.3950 .1514 4.571

Perfluoropropane C3F

8

.174 .197 8.388

Phosgene COCl

2

.4438 .1394 4.418

Phosphine PH

3

.759 .2374 1.517

27

ACTUAL GAS

K FACTOR

Relative to N

2

Cp

[Cal/g]

Density

[g/I]

Phosphorous Oxychloride POCl

3

.36 .1324 6.843

Phosphorous Pentafluoride PH

5

.3021 .1610 5.620

Phosphorous Trichloride PCl

3

.30 .1250 6.127

Propane C3H

8

.35 .399 1.967

Propylene C3H

6

.40 .366 1.877

Silane SiH

4

.5982 .3189 1.433

Silicon Tetrachloride SiCl

4

.284 .1270 7.580

Silicon Tetrafluoride SiF

4

.3482 .1691 4.643

Sulfur Dioxide SO

2

.69 .1488 2.858

Sulfur Hexafluoride SF

6

.2635 .1592 6.516

Sulfuryl Fluoride SO2F

2

.3883 .1543 4.562

Tetrafluoroethane (Forane 134A) CF3CH2F

.5096 .127 4.224

Tetrafluorohydrazine N2F

4

.3237 .182 4.64

Trichlorofluoromethane (Freon-11) CCl3F

.3287 .1357 6.129

Trichlorosilane SiHCl

3

.3278 .1380 6.043

1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl

2

FCClF

2

.2031 .161 8.36

Triisobutyl Aluminum (C4H9)AL

.0608 .508 8.848

Titanium Tetrachloride TiCl

4

.2691 .120 8.465

Trichloro Ethylene C2HCl

3

.32 .163 5.95

Trimethylamine (CH3)3N

.2792 .3710 2.639

Tungsten Hexafluoride WF

6

.2541 .0810 13.28

Vinyl Bromide CH2CHBr

.4616 .1241 4.772

Vinyl Chloride CH2CHCl

.48 .12054 2.788

Xenon Xe

1.44 .0378 5.858

28

APPENDIX 3

DIMENSIONAL DRAWINGS

FLOW

2.38

0.95

F

G

J

H

A

B

C

C

*

*

*

E

D

E

D

NO LCD

VERSION

DASHED LINE FOR
HIGH FLOW UNITS

NOTES: OMEGA7 reserves the right to change designs and dimensions at its sole discretion at any

time without notice. For certified dimensions please contact OMEGA7.

MAXIMUM

FLOW

SERIES

CONNECTION

Compression Fitting

(Except Model

FMA1700A/1800A

Series Max Flow

1000 L/min)

DIMENSION (INCH)

LCD VERSION

NO

LCD

A B C/*C D/*D E/*E F G H

10 L/min

¹/₄" Tube O Diameter

5.60 1.00 1.00 3.00 5.02 0.69 2.69 4.50

50 L/min

¹/₄" Tube O Diameter

5.98 1.37 1.25 4.13 6.15 0.69 2.69 4.88

100 L/min

³/₈" Tube O Diameter

5.98 1.37 1.25 4.13 6.27 0.69 2.69 4.88

200 L/min

³/₈" Tube O Diameter

6.60 2.00 1.75 6.69 8.83 0.99 4.69 5.50

500 L/min

¹/₂" Tube O Diameter

7.60 3.00 3.00 7.25 9.67 2.250 6.750 6.50

1000 L/min

³/₄" NPT Female

8.60 4.00 4.00 7.30 - 3.000 6.800 7.50

29

PARTS OF THE FLOW METER

LEFT AND RIGHT VIEWS

FRONT VIEW

NOTES:

30

WARRANTY/DISCLAIMER

OMEGA ENGINEERING, INC. warrants this unit to be free of defects in materials and
workmanship for a period of 13 months from date of purchase. OMEGA’s WARRANTY adds
an additional one (1) month grace period to the normal one (1) year product warranty to
cover handling and shipping time. This ensures that OMEGA’s customers receive maximum
coverage on each product.

If the unit malfunctions, it must be returned to the factory for evaluation. OMEGA’s Customer
Service Department will issue an Authorized Return (AR) number immediately upon phone
or written request. Upon examination by OMEGA, if the unit is found to be defective, it
will be repaired or replaced at no charge. OMEGA’s WARRANTY does not apply to defects
resulting from any action of the purchaser, including but not limited to mishandling, improper
interfacing, operation outside of design limits, improper repair, or unauthorized modification.
This WARRANTY is VOID if the unit shows evidence of having been tampered with or shows
evidence of having been damaged as a result of excessive corrosion; or current, heat, moisture
or vibration; improper specification; misapplication; misuse or other operating conditions
outside of OMEGA’s control. Components in which wear is not warranted, include but are not
limited to contact points, fuses, and triacs.

OMEGA is pleased to offer suggestions on the use of its various products. However,
OMEGA neither assumes responsibility for any omissions or errors nor assumes
liability for any damages that result from the use of its products in accordance
with information provided by OMEGA, either verbal or written. OMEGA warrants
only that the parts manufactured by the company will be as specified and free of
defects. OMEGA MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY
KIND WHATSOEVER, EXPRESSED OR IMPLIED, EXCEPT THAT OF TITLE, AND ALL
IMPLIED WARRANTIES INCLUDING ANY WARRANTY OF MERCHANTABILITY AND
FITNESS FOR A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED. LIMITATION
OF LIABILITY: The remedies of purchaser set forth herein are exclusive, and the
total liability of OMEGA with respect to this order, whether based on contract,
warranty, negligence, indemnification, strict liability or otherwise, shall not exceed
the purchase price of the component upon which liability is based. In no event shall
OMEGA be liable for consequential, incidental or special damages.

CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used: (1)
as a “Basic Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or
activity; or (2) in medical applications or used on humans. Should any Product(s) be used in or
with any nuclear installation or activity, medical application, used on humans, or misused in
any way, OMEGA assumes no responsibility as set forth in our basic WARRANTY / DISCLAIMER
language, and, additionally, purchaser will indemnify OMEGA and hold OMEGA harmless from
any liability or damage whatsoever arising out of the use of the Product(s) in such a manner.

RETURN REQUESTS/INQUIRIES

Direct all warranty and repair requests/inquiries to the OMEGA Customer Service Department.
BEFORE RETURNING ANY PRODUCT(S) TO OMEGA, PURCHASER MUST OBTAIN AN
AUTHORIZED RETURN (AR) NUMBER FROM OMEGA’S CUSTOMER SERVICE DEPARTMENT
(IN ORDER TO AVOID PROCESSING DELAYS). The assigned AR number should then be
marked on the outside of the return package and on any correspondence.

The purchaser is responsible for shipping charges, freight, insurance and proper packaging to
prevent breakage in transit.

OMEGA’s policy is to make running changes, not model changes, whenever an improvement is possible.
This affords our customers the latest in technology and engineering.

OMEGA is a trademark of OMEGA ENGINEERING, INC.
© Copyright 2018 OMEGA ENGINEERING, INC. All rights reserved. This document may not be copied, photocopied,

reproduced, translated, or reduced to any electronic medium or machine-readable form, in whole or in part, without
the prior written consent of OMEGA ENGINEERING, INC.

FOR WARRANTY RETURNS, please have
the following information available BEFORE
contacting OMEGA:

1. Purchase Order number under which
the product was PURCHASED,

2. Model and serial number of the product
under warranty, and

3. Repair instructions and/or specific
problems relative to the product.

FOR NON-WARRANTY REPAIRS,

consult
OMEGA for current repair charges. Have the
following information available BEFORE
contacting OMEGA:

1. Purchase Order number to cover the

COST of the repair,

2. Model and serial number of the product, and

3. Repair instructions and/or specific problems
relative to the product.

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OMEGA…Of Course!

Shop online at omega.com

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