Omega 3200, 3400ST User Manual
FMA 3200/3200ST/3400/3400ST Series
Thermal Mass Flow Controllers
READ THIS MANUAL COMPLETELY BEFORE ATTEMPTING TO CONNECT OR
OPERATE YOUR FLOW SENSOR. FAILURE TO DO SO MAY RESULT IN INJURY
TO YOU OR DAMAGE TO THE FLOW CONTROLLER.
TABLE OF CONTENTS
A. Introduction .............................................................................................4
1. Unpacking...........................................................................................4
2. Product Overview And Principle Of Operation..........................................4
B. Installation...............................................................................................5
1. General Considerations.........................................................................5
2. Mounting The flow controller ...............................................................7
3. Tubing Connections..............................................................................7
5. Electrical Connections ...........................................................................8
a) Overview ....................................................................................8
b) Connecting The 6 Pin Mini Din Connector............................................9
c) Connecting The 6 Pin Mini Din Connector & FMA 3000C Cable ........... 10
d) Connections For The 9 Pin D Sub Connector ......................................11
e) Connections For The 15 Pin D Sub Connector.....................................12
f) Using a 0-5VDC Output / Input Power Adapter Package....................... 13
C. Operation .............................................................................................14
1. Warm-Up .......................................................................................... 14
2. Verification Of Zero ............................................................................14
3. Flow Readings....................................................................................14
4. Changing The Flow Rate Set-Point (Using An External Voltage Source) ....... 15
5. Changing The Flow Rate Set-Point – FMA3400 / 3400ST Only.................16
6. Power Save Mode............................................................................... 16
7. Zero Adjustments................................................................................17
8. Recalibration...................................................................................... 17
9. Changing The Calibration Gas – FMA3400 / 3400ST Only.....................17
D. Maintenance And Product Care................................................................ 18
1. General............................................................................................. 18
2. Returning Units For Repair Or Recalibration............................................18
E. Specifications......................................................................................... 19
F. Dimensions............................................................................................20
G. Gas K Factors ........................................................................................22
H. Trouble Shooting Guide .......................................................................... 23
M-4271/0707, pg. 3 of 26
A.
Introduction
1. Unpacking
All units are suitably packaged to prevent damage during shipping. If
external damage is noted upon receipt of the package, please contact
Omega Engineering immediately.
Open the package from the top, taking care not to cut too deeply into the
package. Remove all the documentation and contents. Take care to
remove all the items and check them against the packing slip. The
products should also be checked for any concealed shipping damage. If
any shortages or damage is noted, please contact Omega Engineering to
resolve the problem.
Typical Contents of Box: Controller, Calibration Certificate & Manual
FMA 3200/3200ST shown; FMA 3400/3400ST have an integrated display.
Caution: Take care not to
installation section of this manual before providing power or
tubing connections to the unit. Any damage caused by improper
installation or careless handling will not be repaired under
warranty (see limited warranty on page 25 for more details).
2. Product Overview and Principle of Operation
The FMA 3200/3400 Series Mass Flow Controllers from Omega
Engineering
any clean, dry gas as low as 0-20 sccm or as high as 0-10 l/min.
Repeatable results are achieved using a patented thermal mass flow
are capable of measuring and controlling the flow of virtually
drop
your controller. Read the
M-4271/0707, pg. 4 of 26
sensor design. This proven design minimizes zero drift while maintaining
fast response and linear outputs with virtually no maintenance.
The FMA 3200/3400 Series
utilizes thermal flow sensing
technology. A portion of the
gas flowing through the unit is
redirected into a small sensor
tube. This tube has two coils
on the outside. The first coil
introduces a small amount of
heat into the gas stream. As
the gas passes through the
tube heat is transferred from
one coil to the other. The flow
rate is proportional to the
amount of heat transfer. Smart
electronics analyze the amount
of temperature change in the
second coil and provide a
linearized analog output. A patented system insures that the zero remains
stable and the sensor is extremely repeatable.
Flow in the FMA 3200/3400 Series is controlled by a proportional solenoid
valve with active servo electronics. The flow measurement signal is
analyzed by micro-processor controlled electronics and compared to a setpoint. Adjustments are then made to the valve in order to achieve the
required flow rate. The set point can be either externally input via a 05VDC signal or in the case of the FMA 3400/3400ST Series it can be input
manually on the unit.
The output of the thermal mass flow sensor is directly related to the
specific heat characteristic of the gas being measured. A sensor is
calibrated for one gas but may be used with other gases by applying a
correction factor to the output. The calibration gas for each specific flow
controller is detailed on the product label.
B.
Installation
Caution: Do not exceed the pressure, temperature or power
operating ranges detailed in the SPECIFICATIONS section of this
manual. Omega Engineering shall not be liable for any damage
or injury caused by incorrect operation of their products.
1. General Considerations
It is recommended that a safety shut-off valve be installed upstream
(before) of the controller.
All wetted parts should be checked for compatibility with the gas to be
used. If there are any incompatibilities eg. highly corrosive gas, then the
M-4271/0707, pg. 5 of 26
unit may be damaged or fail prematurely. Such damage will not be
repaired under warranty.
Units should be installed in a clean, dry environment with an ambient
temperature that is as stable as possible. Avoid areas with strong magnetic
fields, strong air flows or excessive vibration.
In order to operate the differential pressure across the controller should be
in the range 15-45psid (1-3 bar). For optimum performance a differential
pressure of 25psid is recommended.
For Example, consider the following system:
The differential pressure across the flow controller in this system would be
100 psi – 14 psi = 86 psid. Consequently the flow controller would NOT be
able to control flow. For the unit to operate at optimum performance the
supply pressure from the gas cylinder would need to be lowered to 39 psig
to give 39 psi -14 psi = 25 psid.
M-4271/0707, pg. 6 of 26
2. Mounting the Flow Controller.
The FMA 3200/3400 Series controllers have no particular orientation or
installation requirements so may be mounted in any convenient position.
It is recommended that units be fixed to a suitable substrate using the two
4-40 mounting holes provided.
Mounting View from Bottom
(mounting hardware not included with sensor)
3. Tubing Connections
All tubing must be clean, dry and purged with clean dry air before
installation of the FLO-CONTROLLER
If the gas to be used may contain particles then a filter (20 microns or
less) should be installed upstream of (before) the unit.
When connecting the sensor to the tubing, take care not to over-tighten
the fittings or leaking may occur.
Caution: Only use the fittings factory installed on the unit. If
the fittings are removed the calibration of the unit may be
effected and leaking may occur. If different fittings are required
please contact the Omega Engineering Customer Service
Department for assistance.
®
.
M-4271/0707, pg. 7 of 26
4. Electrical Con ne ctions
Caution: Incorrect wiring may cause severe damage to the unit.
Applying an AC voltage (115VAC or 230VAC) directly to the unit
will cause damage. Read the following instructions carefully
before making any connections.
a) Overview
The FMA 3200/3400 Series provides a 0-5VDC analog output proportional
to the flow rate. This output may be connected to a display, data
acquisition system or voltmeter with an impedance of greater than 2.5 kΩ
(kilo ohms).
The flow controller needs to be supplied with a 0-5 VDC set point signal to
enable control. On the FMA 3400/3400ST Series this may be generated
internally by altering the set-point potentiometer on the front panel of the
unit.
A stable D.C. power supply is required to operate the unit. The voltage
and current requirements depend on the configuration of the unit. Full
details may be found in the Specification section of this manual.
Connecting wires should be as short as possible to avoid voltage drops.
Twisted conductor cable should be used if the length of the wiring is to be
longer than 2 meters.
Units are supplied with either a 6 pin mini DIN type connector (requires
mating cable assembly), a 9 Pin D Sub connector or 15 Pin D Sub
connector.
Caution: Cutting off the integrated connectors on the unit IS
NOT RECOMMENDED and will void the product warranty. Mating
cables should be ordered along with each unit.
Electrical connections to the units are made as detailed in the following
sections.
M-4271/0707, pg. 8 of 26
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