Oerlikon Leybold Vacuum TURBOLAB 80 Operating Instructions Manual
TURBOLAB 80
Turbomolecular pump system with dry
compressing backing pump
Operating Instructions GA501591_002_A2
Material number
501591Vxxx
Contents
Description 3
1
1.1 Ordering Information 3
1.2 Supplied Equipment 3
1.2.1 Pump System Components 3
1.2.2 Accessories 3
1.3 Technical Data 4
2 Connections 4
2.1 Conforming Utilisation 5
3 Operation 6
3.1 Electrical Connection 6
3.2 Switching the System on 7
3.3 Changing the Default Settings of the System 7
3.3.1 Selecting the HV Gauge Head 8
3.3.2 Selecting the Forevacuum Gauge Head 9
3.3.3 Selecting the Language 9
3.4 Commissioning the System 10
3.4.1 Changing the Display Settings 11
3.4.2 Pressure History 11
3.4.3 Operating Hours 11
3.4.4 Venting Valve 12
3.4.5 Pressure Units 13
3.5 Shutting the System Down 13
3.6 Operating Information 13
4 Spare Parts 14
5 Options 14
GA501591_002_A2 – 08/2010 – © Oerlikon Leybold Vacuum 2
Description
1 Description
Described in these Operating Instructions is the equipment and operation of
the turbomolecular pump system TURBOLAB 80.
1.1 Ordering Information
TURBOLAB 80, DN63ISO-K 501591V1xyz*
TURBOLAB 80, DN63CF 501591V2xyz*
*xyz indicate the precise version of the system together with the possible options.
1.2 Supplied Equipment
TURBOLAB 80
Mains cord 230V/1ph/50Hz
Operating Instructions for the pump system
Operating Instructions for the turbomolecular pump
Inlet screen for the turbomolecular pump
1.2.1 Pump System Components
x Turbomolecular pump SL80
x Frequency converter TURBO.DRIVE 400
x 24 V DC power supply unit
x Diaphragm pump
x Control unit
1.2.2 Accessories
Optional accessories for the pump systems are:
x High vacuum gauge ITR90
x High vacuum gauge PTR90
x Forevacuum gauge TTR91
x Venting valve
GA501591_002_A2 – 08/2010 – © Oerlikon Leybold Vacuum 3
Description
1.3 Technical Data
Pumping speed for N2 60 l/s
-7
Attainable ultimate pressure range 10
Run-up time for the turbomolecular pump 1.5 minutes
Pumping speed of the diaphragm pump 0.7 m³/h
Ultimate pressure of the diaphragm pump 3 mbar
Mains voltages 100-240V, 1ph,
Main fuses (at the main switch) 10 A
Dimensions 255 x 355 x 355 mm
Ambient conditions
Temperature 0 – 35°C
Humidity 5 – 95%,
Weight 14.5 kg
* At ambient temperature 20°C.
mbar *
50-60Hz
non-condensing
2 Connections
Never expose any parts of the body to the vacuum.
The turbomolecular pump must be firmly attached using
bolts.
If the pump is not affixed adequately, parts from inside the
pump may come loose and fly around should the pump
seize.
Never operate the pump system without having flanged it to
the vacuum chamber first in the course of a benchtop test,
for example.
Operate the pump system only off the mains voltage which
has been specified on the nameplate.
GA501591_002_A2 – 08/2010 – © Oerlikon Leybold Vacuum 4
Description
After a mains power failure in the pump may run up automatically as soon as
the mains power returns.
If the pump has been pumping hazardous gases before, then introduce
suitable precautions before opening the intake or exhaust connections.
If necessary, wear protection gloves, breathing protection or protective
clothing and work under a fume hood.
The turbomolecular pump system is not suited for pumping of dusty,
aggressive or corrosive media.
The turbomolecular pump system must only be uninstalled when not in
operation.
Accelerating forces must be avoided or reduced to such a level that the rotor
unit is not excited by vibrations. In critical applications consult our application
department first.
The pump must be only opened by persons duly authorised by Leybold.
2.1 Conforming Utilisation
Vacuum pump systems as described in the catalogue are not suited for
pumping of:
oxygen at levels exceeding the concentration present in the
atmosphere,
hazardous gases,
easily flammable, explosive or toxic gases,
extremely aggressive or corrosive media
liquids
or solid materials.
The operator is responsible for assessing the danger potential of the process
media which as to their composition differ from the normal atmosphere.
GA501591_002_A2 – 08/2010 – © Oerlikon Leybold Vacuum 5
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