Indicates procedures that must be strictly observed to prevent hazards to persons.
Indicates procedures that must be strictly observed to prevent damage to, or
destruction of the product.
Emphasizes additional application information and other useful information provided within these Operating Instructions.
The Oerlikon Leybold Vacuum PHOENIX L300i leak detector has been
designed for safe and efficient operation when used properly and in accordance
with these Operating Instructions. It is the responsibility of the user to carefully
read and strictly observe all safety precautions described in this section and
throughout the Operating Instructions. The PHOENIX L300i must only be oper
ated in the proper condition and under the conditions described in the Operating Instructions. It must be operated and maintained by trained personnel only.
Consult local, state, and national agencies regarding specific requirements and
regulations. Address any further safety, operation and/or maintenance ques
tions to our nearest office.
Failure to observe the following precautions could result in serious
personal injury!
Electrical hazards
During all maintenance and connection work, make sure that the mains cable have
been reliable disconnected and do not carry a mains voltage.The leak detector
must only be used in with the hoods closed. The electrical connections must only
be provided by a trained electrician as specified, for example, by the regulations EN
50110-1.
-
-
Warning
Caution
Note
Warning
Avoid exposing any part of the human body to the vacuum. Only handle the leak
detector when the pump is vented.
After a mains power failure the leak detector can run up automatically once more.
Before changing oil or fuses, make sure that the mains cable have been disconnected.
The leak detector is not suited for operation in explosion hazard areas.
During operation the pump can become so hot that there is a danger of burns
(>70°C, 158°F).Provide protection against contact with the hot components.
Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions when handling contaminated
parts.
Caution
Failure to observe the following precautions could result in damage to
the pump!
Unauthorized opening or modifications of the mechanical or electrical components
of the leak detector void the warranty.
The leak detector must only be opened by such persons who have been authorised by Oerlikon Leybold Vacuum to do so.
The leak detector can be damaged when using the wrong voltage. The voltage
must be in the range 230V (+/- 5%), 115V (+/- 5%) e.g. 100V (+/- 5%) depending
on the leak detector version. Make sure that the mains voltage rating on the PHOE
NIX L300i coincides with the locally available mains voltage.
When the PHOENIX L300i is running in closed rooms the exhaust has to be put out
of doors so that the oil vapor can not be breathed in.
Ensure a sufficient air cooling. The air inlet as well the air discharge openings must
never be obstructed. By using the optional iPad it is recommended to pull the fix
ture of the iPad into a raised position to optimize the cooling.
The PHOENIX L300i is designed for indoor use only.
Operate the PHOENIX L300i only in the permitted temperature range between
+10°C and +40°C.
-
-
Only Leybonol-LVO-310 (cat. no. L31001) must be used in the TIVAC D2,5E.
Pumping condensable gases and steams: When pumping test sample water
vapour that is inside the test object can attain to the forepump. With the water
vapor that is in the air - especially in humid areas or when using humid or wet test
samples - the acceptable compatibility of water vapor or capacity of water vapor
respectively can be exceeded.
The steam in the oil of the pump condenses when the water vapor rises over the
acceptable value. So the attribute of the oil changes and danger of corrosion
occurs for the pump.
While using the leak detector with condensable gases and steams the oil of the
forepump has to be controlled regularly. So you can recognize a condensation of
water vapor in the pump. Usually the oil is light and lucent. When water vapor is
inside it gets blear and milky at operating state temperature.
When turning the pump off water vapor condensates and raises the part of water in
the oil.
The leak detector must not directly be switched off after the process, in which condensable gases or steams are pumped, is finished. It must be running (at least 20
minutes) with opened gas ballast valve until the oil of the pump is freed from
detached steam.
When not taking care of this instruction there can be a corrosion within the pump,
which will not be covered by our warranty.
The height of the oil of the pump has to be controlled regularly.
The normal intervals of changing the oil from the producer have to be taken care of.
See instructions of the rotary vane pump.
The references to diagrams, e.g. (1/2) consist of the Fig. no. and the item No. in
that order.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating instructions for further use.
Figures
Symbols of vacuum technology
Given in the following are some important symbols which are used in this Operating
Instructions.
Vacuum pump in general
Turbo molecular pump
Measuring instrument
Valve
Definition of Terms
The range of the preamplifier and the vacuum ranges are selected automatically.
The auto ranging feature of the PHOENIX L300i covers the entire range or leak
rates depending on the selected operating mode. Not only the leak rate signal, but
also the pressure in the test sample (inlet pressure P1) and the fore vacuum pres
sure (P2) are used for control purposes. Range switching between the main ranges
is performed via valves. Fine range switching within the main ranges is imple
mented by switching over the gain factor of the preamplifier.
Mass alignment
This function automatically aligns the mass spectrometer so that a maximum leak
rate is displayed. The control processor changes the voltage which accelerates the
ions in the selected mass range until a maximum ion current is detected by the ion
Auto Zero
GROSS
detector. During each calibration the mass alignment is run automatically.
Determination and automatic adaptation of the internal background.
Through this function, the internal zero level of the instrument is determined which
is then subtracted from the current leak rate signal. This function is run during the
calibration process or when operating the start push button, provided the PHOE
NIX L300i has been running previously for at least 20 seconds in the standby or
vent mode.
GROSS is a measurement mode which allows high inlet pressure (15 to 0,2 mbar).
The smallest detectable leak rate is 1
-
· 10-7 mbar l / s.
FINE
PRECISION
Fore-Vacuum Pressure
Internal helium background
Minimum detectable leak
rate
Menu
Measurement mode
Default
FINE is a measurement mode with inlet pressure < 0.2 mbar. The minimum detectable leak rate is 5 · 10
Precision is a measurement mode for the PHOENIX L300i DRY only from an inlet
pressure < 0,01 mbar. In this mode the PHOENIX L300i DRY has the highest sen
sitivity, the minimum detectable leak rate is 3 · 10
Pressure in the fore vacuum between turbo pump and rotary vane pump.
The existing helium partial pressure in the measurement system. The level of the
internal helium background is measured in the standby mode and subtracted from
the measured signal.
The smallest leak rate the PHOENIX L300i is able to detect ( 5·10
vacuum mode.
The menu allows the user to program the PHOENIX L300i according to his requirements. The menu has a tree architecture.
The PHOENIX L300i measures the leak rate of the test sample.
Status of the PHOENIX L300i when supplied by the factory.
The PHOENIX L300i is a leak detector for helium or hydrogen. This instrument may
be used to detect the location and the size of leaks on objects under test in two dif
ferent ways:
When the test sample has been evacuated first and is sprayed with helium on the
outside. It is required that a vacuum connection is provided between the PHOENIX
L300i and the test sample (vacuum mode).
or
when a helium overpressure is provided in the test sample and the test sample is
searched from the outside with a sniffer probe which is attached to the inlet port
(sniffer mode).
Description
-
Fig. 1 View of the PHOENIX L300i
1 inlet flange2control panel
1.1 Design and Function
The PHOENIX L300i basically is a helium leak detector for vacuum applications, i.e.
the part under test is evacuated while the test is performed. The vacuum is
achieved with a pumping system that is part of the PHOENIX L300i. In addition the
vacuum can be generated by pumps which are set up in parallel to the PHOENIX
L300i.
The PHOENIX L300i MODUL needs a fore vacuum pump, dry or wet version, to be
connected because this unit has no internal roughing pump. The connection
(DN25 KF) is on the side or under the bottom of the PHOENIX L300i MODUL (
Another operating mode of the PHOENIX L300i is the Sniffer mode which can only
be used when a sniffer line (See Chapter
1.1.6) is hooked up.
1.1.1 Vacuum Diagram PHOENIX L300i
The vacuum diagram below shows the major components inside the PHOENIX
L300i.
Fig. 2 Vacuum diagram PHOENIX L300i
Pos. Description
1MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)
2Turbo molecular pump (TMP, provides high vacuum conditions in
the MS)
3Pirani gauge P2 (fore vacuum pressure)
4Fore pressure pump (provides the fore vacuum pressure for the
TMP and pumps down the parts under test)
5Inlet Port
6Pirani gauge P1 (inlet pressure)
V1 … V7: Electromagnetic Valves to control the gas flows
The mass spectrometer (MS) is mainly composed of the ion source with cathode,
the magnetic separator and the ion collector.
Gas molecules getting into the mass spectrometer are ionized by the ion source.
These positively charged particles are accelerated into the magnetic field following
a circular path, the radius of which depends on the mass-to-charge ratio of the
ions. When mass 4 is selected (Default setting) only helium ions can pass this filter
and reach the ion collector where the stream of the ions is measured as an electri
cal current. When selected another mass than 4, only the corresponding ions can
MS
P
1
V
1
V
2a
V
3
V
2b
P
2
V
V
4 a
4 b
V
6
V
5
V
7
1
2
3
6
5
4
Diaphragm pump
pass the filter.
For operation the mass spectrometer requires a vacuum level in the range of 1·10
4
mbar and lower. This pressure is provided by the turbo molecular pump which in
turn is backed up by a fore vacuum pump.
Besides maintaining the pressure in the mass spectrometer the pump system is
used to evacuate the test parts. It is made sure that the pressure in the mass spec
trometer is low enough under all circumstances. The valves V1, V2a, V2b, V4a
control the gas flows when measuring. Valves V3 and V5 are used to vent the sys
tem and the Turbo pump, valve V6 controls the gas ballast function of the fore vacuum pump. Valve V7 opens and closes the internal test leak during calibration.
With the pressure in the test part being lower than ambient pressure sprayed
helium (or Hydrogen as forming gas) can penetrate into the part in case of a leak
age. As soon as the pressure conditions allow it one of the valves to the TMP
opens. Now Helium can penetrate into the mass spectrometer contrary to the
pumping direction of the TMP.
Description
-
1.1.2 Vacuum Diagram PHOENIX L300i DRY
The PHOENIX L300i DRY has a diaphragm pump as fore vacuum pump, making it
suitable for applications where oil sealed systems can not be used. Furthermore
the PHOENIX L300i DRY contains one more valve, the valve 4b. This valve opens
step by step to regulate the inlet pressure into the turbo pump.
1MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)
2Turbo molecular pump (TMP, provides high vacuum conditions in
the MS)
3Pirani gauge P2 (fore vacuum pressure)
4Diaphragm pump (provides the fore vacuum pressure for the TMP
and pumps down the parts under test)
5Inlet Port
6Pirani gauge P1 (inlet pressure)
V1 … V7: Electromagnetic Valves to control the gas flows
1.1.3 Vacuum Diagram PHOENIX L300i MODUL
The PHOENIX L300i MODUL has no roughing pump integrated as the other models. Therefore it can be used with an external pump only. This pump can be oil
sealed or a dry version with a roughing capacity between 2.5 and 65 m
3
/h. This
pump has to be connected to the DN25 KF at the side or under the bottom of the
PHOENIX L300i MODUL.
Pos. Description
1MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)
2Turbo molecular pump (TMP, provides high vacuum conditions in
the MS)
3Pirani gauge P2 (fore vacuum pressure)
4Fore pressure pump (provides the fore vacuum pressure for the
TMP and pumps down the parts under test)
5Inlet Port
6Pirani gauge P1 (inlet pressure)
V1 … V7: Electromagnetic Valves to control the gas flows
1.1.4 Vacuum Method
For the purpose of leak detection on a test sample (vacuum method), the sample
has to be evacuated so that Helium or Hydrogen which is sprayed on to the out
side, can enter through any leaks due to the pressure differential for detection by
the PHOENIX L300i.
Description
-
The test sample is evacuated - START button (Fig 16./10) - by the backing pump
or the external pump. In the case of larger test samples an additional external par
tial flow pump with a corresponding linking valve may be connected in parallel as
required.
Inlet valve V1 is opened so that the evacuation can take place. At the same time all
other valves are closed in order to prevent an unacceptable pressure increase in
the mass spectrometer.
In this context (valve V2a closed) the turbo molecular pump is operated without
being supported by the rotary vane pump. Since generally no gas is pumped out of
the mass spectrometer, p
The condition for the evacuation process described here is maintained until the
inlet pressure p1 has dropped <15
additionally. Possibly present Helium or Hydrogen may now flow upstream against
the pumping direction of the turbo molecular pump into the mass spectrometer
where it is detected. This measurement mode is called GROSS. In this mode, leak
rates down to 10
Since the rotary vane vacuum pump continues to evacuate the test sample via
valves V2a, V2b and V1 the inlet pressure p
sure drops below p1 < 0.2 mbar, the PHOENIX L300i will switch to the FINE mode,
i.e. valve V1and V2b closes and valve V4a opens so that the gas flow enters the
turbo molecular pump at the side. This offer two advantages:
-8
mbar l/s can be detected.
remains constant or increases only slowly.
2
mbar. Now the valves V2a and V2b are opened
will continue to drop. When the pres-
1
-
a)A part of the high pumping speed of the turbo molecular pump
remains available for further evacuation of the test sample. The
response time is inversely proportional to pumping speed.).
b)The advantages offered by the counter flow principle can still be uti-
lized
In the FINE mode the full sensitivity of the PHOENIX L300i is reached.
Because of the higher base pressure of the diaphragm pump the switching from
GROSS to FINE mode of the PHOENIX L300i DRY is done by the valve V4b. When
the pressure drops below 3,5
opens step by step. When valve V4b is open completely, pressure < 0,1 mbar, V4a
will open also to get the maximum pumping speed. In PRECISION mode the
PHOENIX L300i DRY opens the valve V4b only, with the disadvantage of low
pumping speed but with the highest sensitivity.
When the leak detection process is stopped – STOP-button – all valves except
valve V2a are closed.
Valve V3 is opened during venting of the inlet or test sample.
1.1.5 Partial Flow Method
In the partial flow mode the test sample is additionally evacuated by an auxiliary
pump. Using the optional partial flow pump set offers to the user the following
advantages (PHOENIX L300i
- faster response time
- entry into the measure mode already at an inlet pressure of 1000 mbar
- faster venting of large test objects
and PHOENIX L300i MODUL:
Alternatively to a partial flow pump set an external auxiliary pump may also be connected via a tee, this option is possible for the PHOENIX L300i dry and PHOENIX
L300i MODUL also. However, in such a case the PHOENIX L300i will not be able to
make measurements already at an inlet pressure of 1000
1.1.6 Sniffer Mode
The PHOENIX L300i may simply be converted into a sniffer leak detector via the
rugged sniffer line (Cat. No. 252003)
For this the KF flange of the sniffer line is connected to the inlet flange (Fig. 1/1) and
the sniffer mode is selected through menu mode. After pressing START, the inlet
valve V1 (
PHOENIX L300i is operated in the FINE mode. If the fore vacuum pressure P2
increases over 0,2 mbar respectively 0,1 mbar a warning sign and audio alarm
comes up in the display
In the measurement mode the helium present in the ambient air is now indicated as
the leak rate (about 2
the ZERO-button. In sniffer mode the smallest detectable leak rate is < 1· 10
mbarl/s.
1.2 Supplied Equipment
The PHOENIX L300i will be shipped in a special cardboard packed separately in a
plastic foil as protection against dust.
Supplied equipment includes:
Fig. 2) opens. The sniffer lines have been designed in such a way that the
· 10-6 mbar l/s). Smaller leaks may be detected by pressing
mbar.
-7
Leak Detector PHOENIX L300i
Set of fuses
Power cord
Folder with documents (Operating instructions, Spare part list)
2 L-type screwed connections (hose connections)
1 hose nozzle
Blank flange DN 25 KF
Clamping ring DN 25 KF
Centering ring DN 25 KF
By use of the sniffer line the PHOENIX L300i can easily be converted to a sniffer
leak detector. The length of the sniffer line is 4m (i.e. 12 feet).
Installation:
The sniffer line is to be adapted to the KF 25 of the PHOENIX L300i (Fig. 1/1) with
the small flange. The electrical plug of the sniffer line is to be connected to the input
„Options“ (
Function:
The green LED is on when
- the PHOENIX L300i is ready for use and
- the selected trigger level is not exceeded
The red LED is on when
- the PHOENIX L300i is not ready for use or
- the selected trigger level is exceeded.
The push button in the grip is for the zero function. When pushing the button the
helium background will be suppressed. For cancelling the zero function push the
button once more.
Options for the sniffer line:
Fig. 9/9) of the PHOENIX L300i.
Sniffer line SL300
Sniffer tip rigid 120 mm12213
Sniffer tip rigid 385 mm12215
Sniffer tip flexible 120 mm12214
Sniffer tip flexible 385 mm12216
Capillary filter metal (for rough conditions)12217
For further information of the remote control RC310WL and RC310C see instruction manual with the document number 300306406_002_A1.
Partial Flow System (PHOENIX L300i and PHOENIX L300i
In the partial flow mode the test sample is additionally evacuated by an auxiliary
pump. Using the optional partial flow pump set offers to the user the following
advantages:
- faster response time
- entry into the measurement mode already at an inlet pressure of 1000 mbar
- faster venting of large test objects
The partial flow system consists of the components partial flow valve block, right
angle valve DN 25 KF, control cable and vacuum hose with flange connections.
The partial flow valve block with the right angle valve has to be connected to the
inlet flange of the PHOENIX L300i. Connect the control cable to the Option port
and the vacuum hose to the auxiliary pump. The PHOENIX L300i has to be config
urated as described in chapter.
For further detailed information please refer to operating instructions GA 10.277
partial flow system.
1.6 Default Settings
The following parameters are set like shown when in the menu of the PHOENIX
L300i under Settings > Parameters, Load / Save is chosen.
Unpack the PHOENIX L300i immediately after delivery, even if it will be installed
later on.
Examine the shipping container for any external damage. Completely remove the
packaging materials.
Check the PHOENIX L300i is complete (see Chapter 1.2) and carefully examine the
PHOENIX L300i visually.
If any damage is discovered, report it immediately to the forwarding agent and
insurer. If the damaged part has to be replaced, please contact the orders depart
ment.
Retain the packaging materials in the case of complaints about damage.
2.2 Conforming Utilisation
The PHOENIX L300i is a leak detector for Helium or Hydrogen. This instrument
may be used to detect the location and the size of leaks on objects under test in
two different ways:
-
Ambient temperatures
when the test sample has been evacuated first and is sprayed with helium on the
outside. It is required that a vacuum connection is provided between the PHOENIX
L300i and the test sample (vacuum mode).
or
when a helium overpressure is provided in the test sample and the test sample is
searched from the outside with a sniffer probe which is attached to the inlet port
(sniffer mode).
The PHOENIX L300i is to be used for leak detection only. It must not be used as a
pumping system (esp. pumping aggressive or humid gases.)
The leak detector is not suitable for
- pumping liquids or gases containing dust or particles
- pumping corrosive or reactive gases
2.3 Ambient Conditions
The permissible ambient temperature is between +10°C (50°F) and +40°C (104°F).
The PHOENIX L300i must not be operated in explosive gas atmospheres.
Generally the local regulations for electrical connections must be observed.
Before connecting the PHOENIX L300i to the mains you must make sure that the
mains voltage rating of the PHOENIX L300i coincides with the locally available
mains voltage. The instrument must exclusively be connected to a single phase
supply with fuses for installation (Circuit breaker 10A max. according to IEC/EN
60898 with tripping characteristic B).
Only 3-core mains cables having a protection ground conductor must be used.
1
2
3
4
5
9
7
11
8
12
6
10
Operation of the PHOENIX L300i where the ground conductor has been left
unconnected is not permissible. The PHOENIX L300i can be damaged when using
the wrong voltage. The voltage must be in the range 230V (+/- 5%), 115V (+/- 5%)
or 100V (+/- 5%) depending on the version.
The mains voltage rating for the PHOENIX L300i can be read off from the name
plate beneath the mains socket
not be changed.
A separate fuse for each of the mains conductors has been integrated into the
mains switch.
The mains voltage is applied to the instrument via the detachable mains cable
which is supplied with the instrument. A mains socket
purpose at the side of the instrument.
Fig. 9/4 at the side. This voltage is fixed and can
2.4.2 Connection for the Controller Signal and Accessories
OPTION
Digital out (CONTROL)
Caution
Option (Accessories)
The sniffer line SL300 or the partial flow system may be connected to the option
port (
Fig. 9/9):
Contact pins 1 and 3 are fused together with a 0.8 A slow-blow fuse. The amount
of power which can be drawn is limited to 10 W.
The contacts are numbered from bottom to top.
PinAssignment
1+24 V, constantly applied, power supply for the Leybold
partial flow valve or sniffer line.
2GND
3, +24V switched by the PHOENIX L300i for an external
venting valve
4, 5, 6, 7, 8These pins are used in connection with accessories.
Digital Out (CONTROL)
The following relay outputs Fig. 9/8 are available for further signal processing. The
maximum rating for the relay contacts is 60V AC/1A.
All pins of digital I/O, digital out and recorder must not be connected with voltages higher than 60V DC/25V AC (to grounding equipment conductor) or reach
this threshold.
The contacts are numbered from bottom to top.
PinAssignment
1PLC in free selectable
2PLC in free selectable
3PLC in free selectable
4GND
5 to 7Digital out free selectable, 5 center contact, 6 normally open
contact, 7 normally closed contact
8 to 10Digital out free selectable
11 to 13Digital out free selectable
14 to 16Digital out free selectable
The pin assignment for contacts 8 to 16 follows the same order as for pins 5 to 7.