Nor-Cal Isolation Valv Service Manual

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Page 1

Isolation Valves

Section Three

3.1 General Information 

3.2 N-Series Valves 

3.3 Poppet Valves 

3.4 Ball Valves

3.5 Genesis Valves & Fittings 1

3.6 Manual Butterﬂy Valves

3.7 Pendulum Valves

3.8 Linear Gate Valves

3.9 Bellowless Poppet Valves & Leak Valves 2

3.10 Isolation Valve Heaters 2

3.11 Bakeable All Metal Valves

Nor-Cal Products, Inc.

1967 South Oregon Street

Yreka, CA 96097 USA

Tel: 800-824-4166

or 530-842-4457

Main Fax: 530-842-9130

Sales Fax: 530-841-9189

www.n-c.com

Page 2

SECTION 3.1

Isolation Valves

General Information

Since 1962, Nor-Cal Products has been improving our valve designs and expanding our product line in order to offer valves for almost every vacuum application. Our valves provide outstanding performance in the most demanding applications such as semiconductor and compound semiconductor processing.

Valve Applications

PROCESS

APPLICATION

HIGH-VACUUM

ROUGHING

VALV E

TYPE

N-Series

Poppet

Genesis

Bellowless

Poppet

Butterﬂy

UNIQUE

FEATUR ES

Compact. High Cycle.3/4 to 2 (19 to 50) Viton -20º to 150ºC 1000 to 10-9 mbar Pneumatic 3,000,000

Large stroke

Small footprint.

Low proﬁle

O-ring sealed shaft3/8 to 2 (10 to 50) Viton -20° to 150°C 1000 to 10-9 mbar Pneumatic 250,000

Low proﬁle. 1/4 swing3/4 to 11/2 (19 to 38) Viton -20º to 150ºC 1000 to 10-9 mbar Manual 30,000

SIZES

(NOMINAL ID)

/8 to 4 (10 to 100) Viton -20º to 150ºC 1000 to 10-9 mbar

/4 to 4 (19 to 100) Viton -20º to 150ºC 1000 to 10-9 mbar Pneumatic 1,000,000

SEAT SEAL

TEMPERATURE

RANGE

PRESSURE

RANGE

ACT UATI ON CYCLES

Manual

or Pneumatic

250,000

(1)

UHV ROUGHING

HV, UHV PUMP

ISO LAT ION

HIGH-VACUUM

PUMP ISOLATION

PUMP EXHAUST

GAS INTRODUCTION

(1) MTBF (2) Cycle life is reduced with high temperature bakeouts (3) Optional Million Cycle Valve is available.

Poppet Valves

Our poppet valves are fully opening for high conductance a

nd to prevent bellows contami nation while the valve is in the open position, reducing particle contamination when the valve is cycled. Our bodies are dieformed from 304 stainless steel to eliminate sharp inside corners and improve conductance. The valves are electropolished f

or lower outgassing and better corrosion resistance. The welded bellows are made from AM-350 stainless steel to provide excellent corrosion resistance and ﬂex ibility. They are designed with additional segments to provide extended life.

All-metal

Gate

Pendulum

Ball

Leak

Highest conductance 5/8 to 12 (16 to 300) Viton -20º to 150ºC 1000 to 10

Low particle generation.

/4 swing open/close3/4 to 2 (19 to 50) Teﬂon 20º to 150ºC 1000 to 10-4 mbar Manual 20,000

Ball Valves

Ball valves are a low cost, manually or pneumatically operated, straight through isola-

tion device. Their simple, robust d

esign provides high reliability in “dirty” applications. They are commonly used on MOCVD and CVD equipment downstream from the chamber or v

acuum pump to isolate traps or abatement tools. A stainless steel body and Teﬂon seat make these valves ideal for corrosive environments. Other applica tions include vacuum and other

acilities requirements.

All-metal seals

Low vibration

Variable leak N/A Copper -250° to 450°C 1000 to >1x 10

/4 to 11/2 (19 to 38) Copper -250º to 400ºC 1000 to 10

6 to 16 (150 to 400) Viton -20º to 150ºC 1000 to 10-9 mbar Pneumatic 200,000

Genesis Valves

The Genesis modular vacuum valve system provides semicon ductor equipment designers with unlimited possibilities for down stream vacuum subassemblies. Nippleless valve bodies and block ﬁttings can be assembled by two attachment methods using universal ISO-KF centering ring/ O-ring hardware, provid ing maximum ﬂexibility and the smallest footprint possible. Additionally these valves feature million cycle reliability, integrated

low-cost soft start circuit and modular heaters.

Linear Gate Valves

Our linear gate valves have an ultra-slim proﬁle, which makes

hem perfect for applications

where space is limited, and their

smaller volume results in lower outgassing and faster pump down. Larger sizes have a unique feature in the actuator, w

hich dampens the vibration,

which can arise when the

gate is opened. This makes these valves ideal for semiconductor and other vibration s

ensitive processes.

-11

mbar Manual 10,000

-10

mbar

-11

mbar Manual 300

Manual

or Pneumatic

100,000

All-Metal Valves

Nor-Cal’s bakeable all-metal seal angle valves are intended for use in UHV or cryogenic applications where temperature extremes preclude the use of our elastomer seal valves. Approved for use in

beamline facilities, these valves have a temperature operating range from -250°C to 400°C.

(2)

(3)

(2)



Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 3

Isolation Valves

Ultra-High Vacuum Components Since 1962 • www.n-c.com

SECTION 3.1

New Products

N-Series Poppet Valves

The new N-Series poppet valves are an innovative, compact design with an MTBF of 3

million cycles. A bellows-sealed stem and electropolished stainless steel body provides long life even in the most demanding applica tions. Standard pneumatic actuation is normally closed. N-series valves are available in right angle or angle-in-line body styles with tube ends, NW ﬂanges and CF rotatable ﬂanges. Optional air solenoids are available in multiple voltages and can be ordered factory installed or as separate kits for easy ﬁeld installation.

Leak Valves

Leak valves are used for controlling gas introduction into high and ultrah

igh vacuum systems. They utilize an optically ﬂat sapphire poppet and a metal seal seat, allowing bakeout temperatures to 450ºC.

General Information

Custom Valves

Nor-Cal frequently provides custom and modiﬁed standard isolation valves to meet our customer’s speciﬁc requirements. Single or multiple valves can be integrated with manifolds, chambers and other components. Many special features can be speciﬁed by adding options. See page 98.

Standard Options

• Normally open pneumatic actuation

• Microswitch position indication

• Special O-rings

• Various air solenoid voltages

• Fitting options for bypass lines

• Heater jackets, insulators

and controllers

Custom Features

• Special port lengths and

conﬁgurations for drop-in compatibility with other manufacturer’s valves

• Custom ﬂange conﬁgurations

• Special position indicators

• Pump out ports

• Custom ﬁnishes

• Gate shields for linear

gate valve O-rings

Manual Butterﬂy Valves

These Viton O-ring sealed valves provide a low-cost alternative to bellows sealed gate valves. Quarter-turn actuation, small f

ootprint and the shortest possible gas path make manual butterﬂy valves the preferred choice for many applications.

Machined Ball Valves

Our new ball valves are a low cost, manually or pneumatically operated, s

traight through isolation device. Their simple, robust design provides high reliability in “dirty” applications. They a

re commonly used on MOCVD and CVD equipment downstream from the chamber or vacuum pump to isolate traps or abatement tools. A stainless steel body and Teﬂon seat make these valves ideal for corrosive environments. A quarter turn of the handle quickly switches the valve from open to close. They are available with NW-16 through NW-50 ﬂanges as standards. Heater jackets are available to reduce process by-product accumulation.

Spring-to-close pneumatic actuator with gate shield

Custom

ﬁtting

option

Custom valve manifold



Page 4

SECTION 3.2

SPECIFICATIONS

Nomina l Port OD’s : ¾ (19), 1 (25) a nd 1 ½ (38)

inches (mm)

Materials Body: Electr opolishe d 304 stai nless ste el

Bellows: Welded A M-350 st ainless s teel Bonnet seal: Viton Poppet seal: Viton

Other O-ring compounds available

Actuation: Spring / Pneumatic Air-to-open, spring-to-close

Helium l eak tested : Operating Temperature: 150°C Max. Supply Pressure: 60 to100 p sig (4-7 bar) Differential pressure: Maximum 2 0psi (1.4bar)

diffe rential acro ss the valve sea t

Maximu m temperatu re with Viton s eals:

150 ºC M ax

acuum Ra nge: 10 00 to 1x10

V Options: Solenoids, optical sensors, Heater

jackets a nd controlle rs available fo r all valves.

<10-9 mbar l /sec.

-9

mbar

Isolation Valves

N-Series Valves

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.

The new N-Series poppet valves are an innovative, compact design with an MTBF of 3 million cycles. A bellowssealed stem and electropolished stainless steel body provides long life even in the most demanding applications. Standard pneumatic actuation is normally closed (Air-to-Open / Spring-to -Close). N-series valves are available in right angle or anglein-line body styles with tube ends, NW ﬂanges or CF rotatable ﬂanges. Optional air solenoids are available in multiple voltages and can be ordered

N-Series Options

Please use the following part numbering tree to add the appropriate options to a standard N-Series valve model number. See tables below for option codes.

O-ring Material Options

SEAL MATERIAL

Viton Default (no code) Kalr ez 4079 Kalrez 8085 Kalr ez 8575 Kalrez 9100 Chemr az E38 Dupra 192 Perlast G74P

CODE

-K79

-K85

-K75

-K91

-C38

-D19

-PP7

factory installed or as separate kits for easy ﬁeld installation.

Mounting slots for optional position indicators are incorporated into the actuator b

ody resulting in a reduction in overall size and elimination of the risk of physical damage to the sensors. Sensors are eas ily installed without adjustment. Optical switch sensors indicate both the open & closed valve positions. It is possible for each valve to have two sensors installed for redundancy. Position indicators can

Example: NAP-150-NW-NPN-K91-S11

Right angle N -Series valve with 1.5 inch (38.1) bore, NW-40 ﬂanges, optical position

indicator s, Kalrez 9100 O-rings, 120VAC and air solenoid option.

Valve

Model Number

be ordered factory installed or as separate kits for easy ﬁeld installation.

One rebuild kit ﬁts the four valve sizes from NW-16 through NW-50 to reduce maintenance inventory costs. Viton O-ring seals are standard, however the valve is designed to accept alternate seal

compounds to satisfy your application requirements.

Position

Indicator

O-ring

Type

Air

Solenoid

Air Solenoid Option

DESCRIPTION CODE KIT

120VAC, 5 0/60 Hz 24VDC 240VAC, 5 0/60 Hz 24VAC, 50/ 60 Hz

-S11 N-S11-K

-S21 N-S21-K

-S31 N-S31-K

-S41 N-S41-K

Position Indicator Option

DESCRIPTION CODE KIT

Optic al - main valv e open & clos ed Optic al - main valv e open & clos ed

NPN N-NPN-K PNP N-PNP-K



Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 5

SECTION 3.2

Isolation Valves

N-Series Valves

Pneumatic N-Series Angle Valve

MODEL NUMBER

NAP-075 NAP-075-NW NAP-075-CF NAP-100 NAP-100-NW NAP-100-CF NAP-150 NAP-150-NW NAP-150-CF NAP-200 NAP-200-NW NAP-200-CF

NOMINAL PORT O D

/4 (19) No Flanges 1.42 (36) 3.95 (10 0) 4.90 (124)

/4 (19) NW-16 1.57 (40) 4.10 (104) 5.05 (128)

/4 (19) CF-133, Rotatable 1.91 (48) 4.73 (120) 5 .68 (144) 1 (25) No Flanges 1.8 2 (46) 4. 35 (111) 5.30 (13 5) 1 (25) NW-25 1.97 (50) 4.50 (114) 5.45 (138) 1 (25) CF-212, Rotatable 2.2 8 (58) 4.8 1 (122) 5.76 (146)

/2 (38) No Flanges 2. 41 (61) 4.94 (125) 5.89 (150)

/2 (38) NW-40 2.56 (65) 5.09 (129) 6 .04 (153)

/2 (38) CF-275, Rotatable 2.62 (6 7) 5.15 (131) 6. 09 (155)

/2 (38) No Flanges 2.61 (6 6) 5.14 (131) 6. 09 (155)

/2 (38) NW-50 2.7 6 (70) 5.29 (134) 6.24 (159)

/2 (38) CF-338, Rotatable 2.84 ( 72) 5.37 (13 6) 6.32 (161)

DESCRIPTION

A B C

0.95 (24)

2.77 (70)

Pneumatic N-Series Angle In-Line Valve

MODEL NUMBER

NAIP-075 NAIP-075-NW NAIP-075-CF NA IP-100 NAIP-100-NW NAIP-100-CF NA IP-150 NA IP-150-NW NA IP-150-CF NAIP-200 NAIP-200-NW NAIP-200-CF

NOMINAL PORT O D

/4 (19) No Flanges 3.64 (9 2) 4. 60 (117)

/4 (19) NW-16 3.94 (10 0) 4. 60 (117)

/4 (19) CF-133, Rotatable 4 .20 (107) 4.60 (117) 1 (25) No Flanges 3.6 4 (92) 4 .00 (102) 1 (25) NW-25 3.94 (10 0) 4.00 (10 2) 1 (25) CF-212, Rotatable 4.75 (121) 4.00 (102 )

/2 (38) No Flanges 4.82 (12 2) 4.37 (111)

/2 (38) NW-40 5 .12 (130) 4. 37 (111)

/2 (38) CF-275, Rotatable 5.24 (133) 4 .37 (111)

/2 (38) No Flanges 5.21 (13 2) 4.37 (111)

/2 (38) NW-50 5.51 (140) 4 .37 (111)

/2 (38) CF-338, Rotatable 5.66 (14 4) 4.3 7 (111)

DESCRIPTION

A B

N-Series Seal Kit

MODEL NUMBER

NA-075-95

DESCRIPTION

Sea l kit for 0.75 (19) thro ugh 2 (50) inch (mm) si zes, Vito n. Includes (1) po ppet and (1) bonnet O-ring.

N-Series Rebuild Kit

MODEL NUMBER

NA-075-99

Note:

Seals are not included. Recommend use of the NA-075-95 Seal Kit.

DESCRIPTION

Valve r ebuild kit for 0 .75 (19) thro ugh 2 (50) inch (mm) s izes. Inclu des valve a ctuator/ bellows assembly.

2.77 (70)

0.95 (24)

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.



Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 6

SECTION 3.3

SPECIFICATIONS

Nomina l port ODs : Body:

Electro polished 304 s tainless stee l

Bellows: Welded A M-350 stainless s teel Bonnet seal: Poppet seal:

O ther O-ring co mpounds available

Flanges: Maximu m temperatur e with Viton sea ls

See bakeabi lity chart this pa ge

Sustained: Intermittent:

Helium l eak tested : Vacuum range

Viton bo nnet seal :

Vacuum

Coppe r bonnet sea l:

Manual actuation: Pneumatic actuation: Normally closed

Operating Pressure:

3/4 to 2 inch (19-5 0) ODs : spring-to-close

21/2 to 4 inch (6 3-101) ODs:

to- close

Differential pressure: Maximum 20psi (1.4bar) diffe rential acro ss the valve sea t

Options: See facing page. Thermal:

availab le for all valves. Call for details

3/8 to 4 inch (10 -102mm)

Viton or Copp er Viton

CF, NW, ISO or ASA

<150 °C

<204°C

<10-9 mbar l /sec.

Heater jacket s and controller s

-9

> 1 x 10

Bronze nuts /ACME threa ds

60 to 80 psig

Air-to-open/

Air- to- ope n/ air-

mbar - High

-10

mbar - UHV

Isolation Valves

Poppet Valve General Information

Construction

Bodies are die-formed from 304 stainless steel to eliminate sharp inside corners and improve conductance. The valves are electropolished for faster pumpdown, lower outgassing and better corrosion resistance. The welded bellows are made from AM-350 stainless steel to provide corrosion resistance and excellent ﬂexibility. The bellows fully retract from the side port when the valve is open, eliminating buildup of by-products on the bellows and subsequent particle generation during operation. They are designed with additional segments to provide extended life. Nor-Cal valves can be operated in any position and actuators can be removed quickly for routine inspection without disassembling the system.

Models

Our poppet valves are available in most port conﬁgurations with CF, NW, ISO or ASA ﬂanges. Valves through 3 inch (76mm) OD’s are available with manual or pneumatic actuators and Viton or copper bonnet seals. Valves over 3 inches (76mm) are available with pneumatic actuators only. Custom port lengths, ﬂange conﬁgurations and bellowless valves are also available.

Vacuum Range

Poppet seals have helium leak rates of

10-9

mbar l/sec.

valves can be used in the 10 while copper bonnet seal valves are suited for use in the 10

Viton bonnet sealed

-9

mbar range,

-10

range.

Copper Bonnet Seal

Copper bonnet seal poppet valves with CF ﬂanges provide metal seals between t

he inside of the valve and the atmo sphere. They are available in all standard sizes and port conﬁgurations.

Valve Actuation

Manually operated valves utilize Acme threads and a self-lubricating bronze nut for fewer turns and smooth, trouble-free operation. Pneumatic valves are normally air-to-open, spring-to-close in port ODs through 2 inches (50mm) for immediate closure in case of electrical or air failure. Larger valves are normally air-to-open, air-to-close. This actuation option is avail able on all valves. Most sizes are available

ith air-to open, air-to-close with spring assist as an option. Operating air pressure for all pneumatic valves is 60 to 80 psig (4-5.5 bar).

Thermal Products

All Nor-Cal poppet valves and gate valves can be provided with silicone foam or ﬁberglass insulated heater jackets to reduce resident time of corrosives or par ticle buildup in semiconductor applications. These jackets are av

ailable with PID controllers or thermo

stats with high temperature shutoffs.

Jacket and control speciﬁcations can be tailored to meet your speciﬁc needs. Call for price and model number. Refer to Section 11, Thermal Products, for more information.

ESVP

cutaway

view

Valve rebuild ki ts are on page 111

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.

Bakeability

The valve’s bakeout temperature should not exceed that of the elastomer that is used in it. See chart below. Standard Viton sealed valves are bakeable to 150ºC sustained and 204°C for intermittent periods. However, the Viton O-rings begin to take a set at 150°C. High temperature Kalrez O-rings are available as an option.

BONNET/POPPET

SEAL

Viton General purpose 150°C 12 0°C 150°C 12 0°C Kalr ez 4079 High temperature 280°C 220°C 280°C 220°C Kalrez 2037 Chemical resistant 218°C 2 18°C 218°C 2 18°C

Chemraz Chemical resistant 210°C 210°C 210°C 210°C

Silicone High temperature 232°C 232°C 232°C 232°C

APPLICATION

PN EUMATI C VALVES

OPEN C LOSED

MANUAL VALVES

OPEN C LOSED

Poppet Valve Conductance (Liters per second)

The conductance values in the table below have been calculated for air at room temperature using the formulas for tubes and elbows presented in the third edition of Roth’s Vacuum Technology: C Port lengths without ﬂanges and inner diameters for the valve sizes and conﬁgurations were used. This method is an approximation, use values accordingly.

NOMINAL

PORT O D

/2 (13) 60 3 - - 45 2 - -

/4 (19. 135 5 120 4 105 4 90 4

1 (25) 391 12 286 9 270 8 - -

11/8 (28) - - - - - - 436 11

11/2 (38) 1925 37 1324 25 1263 24 120 3 23

2 (50) 4677 65 3459 48 3113 44 - -

21/2 (63) 12332 136 7505 83 7610 84 - -

3 (76) 23263 217 12558 115 14258 130 - -

4 (100) 57994 396 - - 34577 236 - -

Note: P

=air at 1 mbar.

ANGLE O R TEE

VISCOUS MOLECULAR

L’=Laxial +1.33(0/180)D

ANGLE-IN-LINE

VISCOUS MOLECULAR

for elbows.

v=182 (D

/L’) P for viscous ﬂow or Cm=12( D3/L’) for molecular ﬂow.

IN-LINE

VISCOUS MOLECULAR

STRAIGHT-THROUGH

VISCOUS MOLECULAR



Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 7

Isolation Valves

Micro-Switch

Poppet Valve Options

One or more options can be added to a particular valve by adding the option sufﬁx to the basic valve model number as shown below. Heater jackets and controllers are also available for all poppet valves. Call for details and pricing.

dd option sufﬁxes in the following order:

SECTION 3.3

Valve

Model Number

Actuation

Type

MicroSwitch

O-ring

Type

Valve

Fitting

Air

Solenoid

Example of a model number with options: ESVP-1502-CF-AS-M-S11

Actuation Option

OPTION DESCRIPTION

-A Air-to-open/air-to-close

-AS Air-to-open/air-to-close with spring assist

-SA Spring-to-open/air-to-close

Pneumatic valves with port ODs through 2 inches (50) are normally air-to-open/ spring-to-close for immediate closure in case of electrical or air failure. Larger valves are normally air-to-open/air-to close. These actuation options are available on nearly all sizes and port conﬁgurations of Nor-Cal pneumatically actuated poppet valves.

Micro-Switch Option

OPTION

-M

Micro-switches are available on all pneumatically actuated Nor-Cal valves. A pair of 5-amp micro-switches are opened or closed by the movement of the valve stem. One switch closes when the valve is fully open and the other when it is fully closed. These can be connected to control panels with alarms or lights for positive position indication. Electrical leads are approximately 10 inches (254) long, but may be cut to any length upon request.

Right Angle Valve Fitting Option

OPTION

-F1

-F2

-F3

-F4

-F5

-F6

Note: Available on ESV, ESVP, CSV and CSVP models only.

All Nor-Cal right angle valves (ESV, CSV, ESVP and CSVP models) are available with the six ﬁtting options described in the table above. These options are designed to make it easy for our customers to retroﬁt our valves with thermocouple gauges, leak valves, up-to-air valves or gas introduction lines. Other ﬁttings or conﬁgurations are available.

Pneumatic

actuator

Manual

Left

profile

PROFILE

Left Left

Left Right Right Right

DESCRIPTION

⁄4 female VCR Both

⁄8 female VCR Both

⁄8 female NPT Bottom

⁄4 female VCR Both

⁄8 female VCR Both

⁄8 female NPT Bottom

NOMINAL PORT

/4 (19) 1.5 0 (38)

Right profile

1 (25) 1. 22 (31)

11/2 (38) 1.62 (41)

2 - 21/4 (50-57) 2.25 (57)

21/2 (63) 2.25 (57)

3 (76) 2.4 4 (62)

4 (100) 3.22 (8 2)

VALV E PORTS

NOMINAL

PORT OD

/8 (10) 2 .06 (52)

/2 (13) 2.06 (52)

/4 (19) 2 .06 (52) 1 (25) 2.06 (52)

11/2 (38) 2.06 (52)

2 (50) 3.54 (90) 3 (76) 3.54 (90)

4 (100) 5.0 1 (127)

O-ring Option

OPTION COMPOUND

Standard

-KT

-KC

-CR

-S

Viton -29 Kalr ez 4079 -50 Kalrez 2037 -54

Che mraz 513 -30

Silicone -55

Standard Nor-Cal valves use chemical resistant Viton O-rings. Viton O -rings shoul d not b e heated to above 204°C. Even prolonged exposures of 150°C may degrade the O-rings. High temp Kalrez O-rings allow valve bakeouts to higher temperature. Silicone O-rings provide adequate sealing performance in thermal cycling from -55°C to 230°C.

TEMPERATURE

MIN. M AX.

C 204°C Industry standard

C 316°C High temperatures

C 220°C Chemical resistant

C 210°C Chemical resistant

C 232°C High temperatures

APPLICATION

Air Solenoid Option

OPTION KIT NOMINAL PORT OD DESCRIPTION

-S11 S11-K

-S21 S21-K

-S31 S31-K

-S41 S41-K

-S12 S12-K

-S22 S22-K

-S32 S32-K

-S42 S42-K

Note:

Use 4-way solenoid option for 1.12 and 1.5 (28-38) OD STVP and CSTVP models.

All pneumatic poppet valves can be provided with air solenoids with several current ratings for electropneumatic actuation. Valves with air-to-open, spring-to-close actuation r

equire three-way air solenoids, while air-to-open, air-to-close actuators require four-way solenoids. Both three and four-way air solenoids are available in four current ratings. A pneumatic valve ordered with this option will arrive with an air solenoid i

nstalled. 18 inch (450) long electrical leads are pro vided for connection to the power supply. Air solenoids can be purchased separately in a kit complete with instructions for i

nstallation by the customer. When placing your order please specify the model number of the valve that the air solenoid will be installed on, so that our sales staff can conﬁrm whether a three-way or four-way solenoid is required.

/8 to 2 (10 to 50) 3-way, 120VAC, 5 0/60 Hz

/8 to 2 (10 to 50) 3-way, 24VDC

/8 to 2 (10 to 50) 3-way, 240VAC, 5 0/60 Hz

/8 to 2 (10 to 50) 3-way, 24VAC, 50 /60 Hz 21/2 to 3 (63 to 76) 4-way, 120 VAC, 50/60 H z 21/2 to 3 (63 to 76) 4-w ay, 24V DC 21/2 to 3 (63 to 76) 4-way, 24 0VAC, 50/60 H z 21/2 to 3 (63 to 76) 4-way, 24VAC, 5 0/60 Hz

Ultra-High Vacuum Components Since 1962 • www.n-c.com



Page 8

SECTION 3.3

SPECIFICATIONS

Port OD s:

3/8 to 3 inch es (10 to 76mm)

Materials

Body:

Electro polished 304 s tainless stee l

Bel lows: Welde d AM-350 stainle ss steel

Bonnet s eal: Poppet seal:

Other O -ring compounds available

Actuation:

with ACME thread s

Differential pressure: Maximum 20psi (1.4bar) differe ntial acros s the valve seat

Maximum

Sustained: Intermittent:

Vacuum range

Viton bo nnet seal : Coppe r bonnet se al:

Options: Thermal:

avai lable for all valves . See page 127

Copper or Vito n Viton

Self-lubricating bronze nuts

temperature with Viton seals

<150°C

<204°C

Fittings and O-rings. See p age 101

Heater jacket s and controller s

-9

>1x 10

mbar - High Vacuum

-10

>1x 10

mbar - UHV

Isolation Valves

Manual Angle Valves

Manual Viton Seal Angle Valves

MODEL NUMBER

ESV-03 8 ESV-0382-CF ESV-0382-NWB ESV-050 ESV-0502-CF ESV-0502-NWB ESV-075 ESV-0752-CF ESV-0752-NWB ESV-100 ESV-1002-CF ESV-1002-NWB ESV-150 ESV-150 2-CF ESV-1502-NWB ESV-200 ESV-2002-CF ESV-2002-NWB ESV-2002-ASA ESV-250 ESV-2502-CF ESV-2502-ISO ESV-2502-ASA ESV-300 ESV-3002-CF ESV-3002-ISO ESV-3002-ASA

NOMINAL

PORT OD DESCRIPTION

/8 (10) No ﬂanges 1. 50 ( 38.1 ) 4.06 (103) 4. 44 (113) 2.25 (57)

/8 (10) Rotat able 1.33 CF 1.60 (40.6) 4.16 (106) 4 .54 115 ) 2. 25 (57)

/8 (10) NW-10B 1.6 5 (41.9) 4. 21 (107) 4.59 (117) 2.25 (57)

/2 (13) No ﬂanges 1. 50 ( 38.1 ) 4.06 (103) 4. 56 (116) 2.25 (57)

/2 (13) Rota table 1.33 CF 1.60 (40.6) 4.16 (106) 4 .66 (118) 2.25 (57)

/2 (13) NW-10B 1. 65 (41.9 ) 4. 21 (107) 4.71 (120) 2.25 (57)

/4 (19) No ﬂanges 2.00 ( 50.8) 4.56 (116) 5.31 (13 5) 2. 25 (57)

/4 (19) Rotat able 1.33 CF 2.50 (63.5) 5.06 (129) 5.81 (148) 2.25 (57)

/4 (19) NW-16B 2.15 (54.6) 4.71 (120) 5.4 6 (139) 2.2 5 (57) 1 (25) No ﬂanges 1.88 (47.8) 4.32 (110) 5.32 (13 5) 2.2 5 (57) 1 (25) Rot atable 2.12 CF 2.05 (52.1) 4.49 (114) 5.49 (139) 2.25 (57)

1 (25) NW-25B 2. 03 (51.6 ) 4.47 (114) 5.47 (139) 2.25 (57) 11/2 (38) No ﬂanges 2.25 (57.2) 5.63 (143) 7.13 (181) 3 .00 (76) 11/2 (38) Rota table 2.75 CF 2.4 6 (62.5) 5.84 (148) 7.34 (186) 3.00 (76) 11/2 (38) NW-40B 2.40 (62.0) 5.78 (147) 7.28 (18 5) 3 .00 (76)

2 (50) No ﬂanges 3. 25 (82.6) 7.85 (19 9) 9.85 (250) 3.5 0 (89)

2 (50) Rotatable 3.38 CF 3.48 (88 .4) 8.08 (205) 10.0 8 (256) 3.5 0 (89)

2 (50) NW-50B 3.40 (86.4) 8.00 (203) 10.00 (254) 3.50 (89)

2 (50) Rotatable ASA-5-200R 3.50 (8 8.9) 8.1 0 (2 06) 10.10 (25 7) 3.5 0 (89)

/2 (63) No ﬂanges 3.00 (76.2) 8.27 (210) 1 0.77 (274) 4.00 (102 )

2 21/2 (63) Rotatable 4.50 CF 3. 38 (85.9) 8.65 (22 0) 1 1.15 (2 83 ) 4.00 (102) 21/2 (63) ISO-63-250-OF 3.25 (82 .6) 8 .52 (216) 11.02 (280) 4.00 (102) 21/2 (63) Rotatable ASA-5-250R 3.25 (8 2.6) 8.52 (2 16) 11.0 2 (28 0) 4.00 (102)

3 (76) No ﬂanges 3. 25 (82.6) 8.68 (22 0) 11.68 (297 ) 4.50 (114)

3 (76) Rot atable 4.6 2 CF 3.53 (8 9.7) 8. 96 (228) 11. 96 (3 04) 4. 50 (114)

3 (76) ISO-80-300-OF 3.50 (89.0) 8. 93 (227) 11.93 ( 303) 4.50 (114)

3 (76) Rotatable ASA- 6-300R 3.5 0 (89.0) 8.9 3 (227) 11.93 (3 03) 4.50 (114)

Manual Copper Seal Bonnet Angle Valves

MODEL NUMBER

CSV-038 CSV-0382-CF CSV-050 CSV-0502-CF

CSV-075 CSV-0752-CF CSV-100 CSV-1002-CF CSV-150 CSV-150 2-CF CSV-200 CSV-2002-CF CSV-250 CSV-2502-CF CSV-300 CSV-3002-CF

NOMINAL

PORT OD DESCRIPTION

/8 (10) No ﬂanges 1. 50 ( 38.1 ) 4.0 6 (103) 4.44 (113) 2.73 (6 9)

/8 (10) Rotat able 1.33 CF 1.60 (40.6) 4.16 (106) 4 .54 115 ) 2.73 (69)

/2 (13) No ﬂanges 1. 50 ( 38.1 ) 4.0 6 (103) 4 .56 (116) 2.73 (69)

/2 (13) Rota table 1.33 CF 1.60 (40.6) 4.16 (106) 4.66 (118) 2.73 (69)

/4 (19) No ﬂanges 2 .00 (50.8) 4.56 (116) 5.3 1 (135) 2.73 (69)

/4 (19) Rotat able 1.33 CF 2.50 (63.5) 5.06 (12 9) 5.81 (148) 2 .73 (69)

1 (25) No ﬂanges 1.88 (47.8) 4.32 (110) 5. 32 (135) 2.73 (6 9)

1 (25) Rot atable 2.12 CF 2.05 (52.1) 4 .49 (114) 5.49 (139) 2 .73 (69) 11/2 (38) No ﬂanges 2.25 (57.2) 5.6 3 (143) 7.13 (181) 3. 25 (83) 11/2 (38) Rota table 2.75 CF 2.46 (62.5) 5.84 (148) 7.34 (186) 3.25 (8 3)

2 (50) No ﬂanges 3.25 (82.6) 7.85 (199) 9. 85 (250) 4 .05 (103)

2 (50) Rotatable 3.38 CF 3 .48 (88.4) 8.08 (20 5) 10.08 ( 256) 4.0 5 (103) 21/2 (63) No ﬂanges 3.00 (76.2) 8 .27 (210) 1 0.77 (274) 4.6 1 (117) 21/2 (63) Rotatable 4.50 CF 3.3 8 (85.9) 8.6 5 (220) 11.15 (28 3) 4.61 (117)

3 (76) No ﬂanges 3.2 5 (82.6) 8.6 8 (220) 11.68 (297 ) 5.62 (143)

3 (76) Rot atable 4.6 2 CF 3.53 (89.7) 8.96 (22 8) 11. 96 (3 04) 5.62 (143)

CSV O-ring

ESV O-ring Kits

MODEL NUMBER

ESV-075-95 ESV-150 -9 5 ESV-200-95 ESV-250-95 ESV-300-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

& Gasket Kits

MODEL NUMBER

CSV-075-95 CSV-150 -9 5 CSV-200-95 CSV-250-95 CSV-300-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

Valve rebuild ki ts available. See pa ge 111



Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 9

Isolation Valves

Ultra-High Vacuum Components Since 1962 • www.n-c.com

SECTION 3.3

Pneumatic Angle Valves

Pneumatic Viton Seal Angle Valves

MODEL NUMBER

ESVP-038 ESVP-0382-CF ESVP-0382-NWB ESVP-050 ESVP-0502-CF ESVP-0502-NWB ESVP-075 ESVP-0752-CF ESVP-0752-NWB ESVP-100 ESVP-1002-CF ESVP-1002-NWB ESVP-150 ESVP-1502-CF ESVP-1502-NWB ESVP-200 ESVP-2002-CF ESVP-2002-NWB ESVP-2002-ASA ESVP-250 ESVP-2502-CF ESVP-2502-ISO ESVP-2502-ASA ESVP-300 ESVP-3002-CF ESVP-3002-ISO ESVP-3002-ASA ESVP-400 ESVP-4002-CF ESVP-4002-ISO ESVP-4002-ASA

NOMINAL

PORT OD DESCRIPTION

/8 (10) No ﬂanges 1. 50 (38 .1) 3.62 (9 2) 5.77 (147 ) 2.2 5 (57)

/8 (10) Rota table 1.33 C F 1.60 (40.6) 3 .72 (95) 5.87 (14 9) 2.2 5 (57)

/8 (10) NW -10B 1.6 5 (41.9) 3 .77 (96) 5.92 (15 0) 2. 25 (57)

/2 (13) No ﬂanges 1 .50 (38 .1) 3.62 (9 2) 5.77 (147 ) 2. 25 (57)

/2 (13) Rot atable 1.3 3 CF 1.60 (40.6) 3 .72 (95) 5.8 7 (149) 2. 25 (57)

/2 (13) NW-10B 1.6 5 (41.9) 3 .77 (96) 5.92 (15 0) 2.2 5 (57)

/4 (19) No ﬂanges 2. 00 (50.8) 4.12 (105) 6.26 (15 9) 2.2 5 (57)

/4 (19) Rota table 1.33 CF 2.50 (63.5) 4.62 (117) 6.76 (171) 2. 25 (57)

/4 (19) NW -16B 2.15 (54.6) 4.27 (109) 6 .41 (163) 2.25 (57) 1 (25) No ﬂanges 1.88 (47.8) 3.88 (98. 6) 6.02 (152) 2.25 (57) 1 (25) Ro tatable 2 .12 CF 2.05 (52.1) 4.0 5 (103) 6.19 (157) 2.25 (57) 1 (25) NW-25B 2.0 3 (51.6) 4.03 (102) 6.17 (157) 2.25 (57)

/2 (38) No ﬂanges 2.25 (57.2) 4.98 (127) 7.56 (192) 3.00 ( 76)

/2 (38) Rot atable 2.75 CF 2.46 (62.5) 5.19 (132) 7.77 (197) 3.0 0 (76)

/2 (38) NW-40B 2. 40 (61. 0) 5.13 (130) 7.71 (196) 3 .00 (76)

2 (50) No ﬂanges 3.25 (8 2.6) 6.74 (171) 11. 23 (2 85) 3.5 0 (89) 2 (50) Rotatable 3.38 CF 3.48 (8 8.4) 6.97 (177) 11.46 ( 291) 3. 50 (89) 2 (50) NW-50B 3.40 (8 6.4) 6.89 (175) 11.38 (289) 3.50 (8 9) 2 (50) Rotatable ASA-5-200R 3.50 (8 8.9) 6.99 (178) 11. 48 (2 92) 3.5 0 (89)

/2 (63) No ﬂanges 3.00 (76.2) 7.18 (182) 10 .1 (2 57 ) 4.00 (100)

/2 (63) 4.5 0 CF 3 .38 (85.9) 7.56 (192) 10.48 (2 66) 4.00 (10 0)

/2 (63) ISO-63-250-OF 3.25 (8 2.6) 7.43 (189) 10.3 5 (263) 4.0 0 (100)

/2 (63) Rotatable ASA-5-250R 3.25 (8 2.6) 7.43 (189) 10.3 5 (263) 4.0 0 (100)

3 (76) No ﬂanges 3.25 (8 2.6) 7.62 (194) 11.00 (297) 4.5 (114) 3 (76) Ro tatable 4. 62 CF 3.53 (9 0.0) 7. 90 (20 1) 11.28 (287) 4.5 (114) 3 (76) ISO-80-300-OF 3.50 (8 8.9) 7. 87 ( 20 0) 11. 25 (2 86) 4.5 (114)

3 (76) Rotat able ASA-6-3 00R 3.5 0 (88.9) 7. 87 (20 0) 11.2 5 (286 ) 4.5 (114) 4 (100) No ﬂanges 4.2 2 (107) 9.55 (24 3) 14.99 (381) 6.50 (165) 4 (100) Rot atable 6. 00 CF 4.66 (118) 9.99 (2 54) 15.4 3 (392) 6.50 (165) 4 (100) ISO-100-400-OF 4.47 (114) 9.80 (24 9) 15. 24 (387) 6.50 (165) 4 (100) Rotatable ASA-7.5-400R 4.47 (114) 9.8 0 (249) 15.24 (3 87) 6.50 (165 )

Pneumatic Copper Seal Bonnet Angle Valves

MODEL NUMBER

CSVP-038 CSVP-0382-CF CSVP-050 CSVP-0502-CF CSVP-075 CSVP-0752-CF CSVP-100 CSVP-1002-CF CSVP-150 CSVP-1502 -CF CSVP-200 CSVP-2002-CF CSVP-250 CSVP-2502-CF CSVP-300 CSVP-3002-CF CSVP-400 CSVP-4002-CF

NOMINAL

PORT OD DESCRIPTION

/8 (10) No ﬂanges 1. 50 (38 .1) 3.7 5 (95) 5.7 7 (147) 2.7 3 (69)

/8 (10) Rotat able 1.33 CF 1.60 (40.6) 3.85 (9 8) 5.82 (148) 2 .73 (69)

/2 (13) No ﬂanges 1 .50 (38 .1) 3.7 5 (95) 5.7 7 (147) 2.73 (69)

/2 (13) Rota table 1.33 CF 160 (40.6) 3.8 5 (98) 5.82 (14 8) 2.73 (69)

/4 (19) No ﬂanges 2. 00 (50.8) 4.25 (108) 6.26 (15 9) 2 .73 (69)

/4 (19) Rotat able 1.33 CF 2.50 (63.5) 4.75 (12 1) 6 .76 (172) 2.73 (69) 1 (25) No ﬂanges 1.88 (47.8) 4.00 (102) 6 .02 (153) 2.73 (6 9)

1 (25) Rot atable 2.12 CF 2.05 (52.1) 4.17 (106) 6.19 (157) 2.73 (6 9) 11/2 (38) No ﬂanges 2.25 (57.2) 4.9 8 (126) 7.56 (192 ) 3.25 (8 3) 11/2 (38) Rota table 2.75 CF 2.46 (62.5) 5.19 (132) 7.77 (197) 3.2 5 (83)

2 (50) No ﬂanges 3.25 (8 2.6) 6.6 2 (168) 11. 23 (2 85) 4.0 5 (103)

2 (50) Rotatable 3.38 CF 3.4 8 (88.4) 6.85 (174) 11.4 5 (29 1) 4.0 5 (103) 21/2 (63) No ﬂanges 3.0 0 (76.2) 7.18 (182) 10.10 (25 7) 4.61 (117) 21/2 (63) Rotatable 4.50 CF 3.38 (8 5.9) 7.56 (192 ) 10.48 (2 66) 4.61 (117)

3 (76) No ﬂanges 3.25 (8 2.6) 7.62 (194 ) 11. 00 (27 9) 5.62 (14 3)

3 (76) Rot atable 4.6 2 CF 3. 53 (89.7) 7. 90 ( 20 1) 11.28 (287) 5.62 (14 3)

4 (100) No ﬂanges 4.2 2 (107) 9. 55 (243) 14.99 (381) 6.73 (171) 4 (100) Rota table 6.0 0 CF 4.66 (118) 9.99 ( 254) 15.4 3 (392) 6.7 3 (171)

SPECIFICATIONS

Port OD s:

3/8 to 4 inch es (10-100mm )

Materials

Body:

Electro polished 304 s tainless stee l

Bellows:

Other O-ring compounds available

Actuation: N ormally close d 3/8 to 2 in ch (10-50 ) ODs:

spring-to-close

air-to -clo se See page 101 for more actuatio n options

Operating pressure: Differential pressure: Maximum 6 p si (0.4 b ar)

dif ferential ac ross the valve s eat

Maximu m temperatur e with Viton sea ls

Vacuum range

Options:

micro-sw itches and actuato rs. See page 101

Thermal:

available for all valve s. See page 127

Welded AM -350 stainless s teel

Bonnet s eal: Poppet seal:

21/2

Sustained: Intermittent:

Viton bo nnet seal : Coppe r bonnet se al:

Copper or Vi ton

Viton

to 4 inch ( 63-100) ODs :

60 to 80 psig ( 4-5.5 bar)

<150°C

<204°C

>1x 10

Fittings, O-rings, air solenoids,

Heater jacket s and controller s

>1x 10

Air-to-open,

-9

mbar - High Vacuum

-10

mbar - UHV

CSVP O-Ring

ESVP O-Ring Kits

MODEL NUMBER

ESVP-075-95 ESVP-150- 95 ESVP-200-95 ESVP-250-95 ESVP-300-95 ESVP-400-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

4 (100)

& Gasket Kits

MODEL NUMBER

CSVP-075-95 CSVP-150- 95 CSVP-200-95 CSVP-250-95 CSVP-300-95 CSVP-400-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

4 (100)

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.



103

Page 10

SECTION 3.3

Isolation Valves

Manual Angle-In-Line Valves

Manual Viton Seal Angle-In-Line Valves

MODEL NUMBER

AIV-075 AIV-0752-CF AIV-0752-NWB AI V-100 AIV-1002-CF

AIV-1002-NWB AI V-150 AI V-1502- CF AIV-1502-NWB AIV-200 AIV-2002-CF AIV-2002-NWB AIV-250 AIV-2502-CF AIV-2502-ISO AIV-300 AIV-3002-CF AIV-3002-ISO

NOMINAL

PORT O D DESCRIPTION

/4 (19) No ﬂanges 3.7 0 (94) 3.47 (8 8) 4.01 (102) 2.25 (57)

/4 (19) Rota table 1.33 CF 4.70 (119) 3 .47 (88) 4.01 (102) 2.25 (57)

/4 (19) NW -16B 4.00 (10 2) 3.47 (88) 4.0 1 (102) 2.25 (57) 1 (25) No ﬂanges 3.90 (9 9) 3.4 2 (87) 4.14 (105) 2.25 (57) 1 (25) Ro tatable 2 .12 CF 4. 23 (107) 3.42 (87) 4.14 (105) 2.25 (57)

1 (25) NW-25B 4.20 (10 7) 3 .42 (87) 4.14 (105) 2.25 (57) 11/2 (38) No ﬂanges 4.82 (122) 4.55 (116) 5.6 1 (142) 3.0 0 (76) 11/2 (38) Rot atable 2.75 CF 5. 24 (133) 4.55 (116) 5.6 1 (142) 3.0 0 (76)

/2 (38) NW-40B 5 .12 (130) 4. 55 (116) 5.61 (142) 3.0 0 (76)

2 (50) No ﬂanges 6.70 (170) 6.19 (157) 9.15 ( 23 2) 3.5 0 (89)

2 (50) Rotatable 3.38 CF 7.15 (181) 6.19 (157) 9.15 (23 2) 3. 50 (89)

2 (50) NW-50B 7.00 (178) 6.19 (157) 9 .15 (2 32 ) 3 .50 (89)

/2 (63) No ﬂanges 7.75 (197) 6 .99 (178) 10.3 1 (262) 4.0 0 (100)

/2 (63) Rotatable 4.50 CF 8.5 0 (216) 6. 99 (178) 10 .31 (262 ) 4. 00 (100)

/2 (63) ISO-63-250-OF 8.25 (210) 6. 99 (178) 10.31 ( 262) 4.00 (100)

3 (76) No ﬂanges 10.05 (255) 7.71 (196) 11.38 (289) 4.50 (114)

3 (76) Ro tatable 4. 62 CF 10.61 (269) 7.71 (196) 11.38 (289) 4.5 0 (114)

3 (76) ISO-80-300-OF 10. 55 (268) 7.71 (196) 11.38 (289) 4.5 0 (114)

SPECIFICATIONS

Port OD s:

3/8 to 3 inch es (10 to 76mm)

Materials

Body:

Electro polished 304 s tainless stee l

Bel lows: Welde d AM-350 stainle ss steel

Bonnet s eal: Poppet seal:

Other O -ring compounds available

Actuation:

with ACME thread s

Differential pressure: Maximum 6 p si (0.4 b ar) differe ntial acros s the valve seat

Maximum

Sustained: Intermittent:

Vacuum range

Viton bo nnet seal : Coppe r bonnet se al:

Options: Thermal:

avai lable for all valves . See page 127

Copper or Vito n Viton

Self-lubricating bronze nuts

temperature with Viton seals

<150°C

<204°C

Fittings and O-rings. See p age 101

Heater jacket s and controller s

-9

>1x 10

mbar - High Vacuum

>1x 10

-10

mbar - UHV

Manual Copper Seal Bonnet Angle-In-Line Valves

MODEL NUMBER

CAIV-075 CAIV-0752-CF CA IV-100 CAIV-1002-CF CA IV-150 CAIV-1502-CF CAIV-200 CAIV-2002-CF CAIV-250 CAIV-2502-CF CAIV-300 CAIV-3002-CF

NOMINAL

PORT O D DESCRIPTION

/4 (19) No ﬂanges 3.70 (9 4) 3.47 (88) 4 .01 (102) 2.73 (69)

/4 (19) Rota table 1.33 CF 4.7 0 (119) 3.47 (8 8) 4 .01 (102) 2.73 (69)

1 (25) No ﬂanges 3 .9 0 (9 9.1) 3 .42 (87) 4.14 (105) 2.73 (6 9)

1 (25) Ro tatable 2 .12 CF 4.48 (114) 3.42 (87 ) 4.14 (105) 2.73 (6 9) 11/2 (38) No ﬂanges 4.8 2 (122) 4.55 (116) 5.6 1 (142) 3.25 (8 3) 11/2 (38) Rot atable 2.75 CF 5.24 (133) 4.55 (116) 5.61 (14 2) 3.25 (8 3)

2 (50) No ﬂanges 6.70 (170) 6.19 (157) 9.15 (23 2) 4.05 (103)

2 (50) Rotatable 3.38 CF 7.15 (182) 6.19 (157) 9.15 (23 2) 4.05 (103) 21/2 (63) No ﬂanges 7.75 (197) 6.9 9 (178) 10. 31 (262) 4.6 1 (117) 21/2 (63) Rotatable 4.50 CF 8. 50 (216) 6.99 (178) 10. 31 (262) 4.61 (117)

3 (76) No ﬂanges 10.05 (255) 7.71 (196) 11.38 (289) 5.6 2 (143)

3 (76) Ro tatable 4. 62 CF 10.61 (269) 7.71 (196) 11.38 (289) 5.62 (143)

AIV O-Ring Kits

MODEL NUMBER

ESV-075-95 ESV-150 -9 5 ESV-200-95 ESV-250-95 ESV-300-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

CAIVP O-Ring & Gasket Kits

MODEL NUMBER

CSVP-075-95 CSVP-150- 95 CSVP-200-95 CSVP-250-95 CSVP-300-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.

Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 11

Isolation Valves

Pneumatic Angle-In-Line Valves

Pneumatic Viton Seal Angle-In-Line Valves

MODEL NUMBER

AIVP-075 AIVP-0752-CF AIVP-0752-NWB AI VP-100 AIVP-1002-CF AIVP-1002-NWB AI VP-150 AI VP-1502-CF AIVP-1502-NWB AIVP-200 AIVP-2002-CF AIVP-2002-NWB AIVP-250 AIVP-2502-CF AIVP-2502-ISO AIVP-300 AIVP-3002-CF AIVP-3002-ISO

NOMINAL

PORT O D DESCRIPTION

/4 (19) No ﬂanges 3.70 (9 4) 4.32 (110) 2.25 (57)

/4 (19) Rot atable 1.3 3 CF 4.70 (119) 4.32 (110) 2. 25 (57)

/4 (19) NW-16B 4.00 (10 2) 4.32 (110) 2.2 5 (57) 1 (25) No ﬂanges 3.9 0 (99) 4.27 (108) 2.25 (57) 1 (25) R otatab le 2.12 CF 4 .23 (107) 4.27 (10 8) 2.25 (57)

1 (25) N W-25B 4. 20 (107) 4.27 (10 8) 2.25 (57) 11/2 (38) No ﬂanges 4.82 (12 2) 5. 69 (145) 3. 00 (76) 11/2 (38) Ro tatable 2 .75 CF 5.24 (133) 5. 69 (145) 3. 00 (76)

/2 (38) NW-40B 5.12 (130) 5.69 (145) 3.0 0 (76)

2 (50) No ﬂanges 6.7 0 (170) 7. 94 (2 02 ) 3. 50 (89)

2 (50) Rotatable 3.38 CF 7.15 (182) 7.9 4 ( 20 2) 3.50 (89)

2 (50) NW-50B 7.00 (178) 7. 94 (20 2) 3.50 (89)

/2 (63) No ﬂanges 7.75 (197) 7.64 (194 ) 4.0 0 (100)

/2 (63) Rotatable 4.50 CF 8. 50 (216) 7.64 (194) 4.0 0 (100)

/2 (63) ISO-63-250-OF 8.2 5 (210) 7.64 (19 4) 4 .00 (100)

3 (76) No ﬂanges 10.05 (255) 8 .7 (22 1) 4.50 (114)

3 (76) R otatab le 4.62 CF 10.61 (269) 8 .7 (221) 4.5 0 (114)

3 (76) ISO-80-300-OF 10.55 ( 268) 8. 7 (221) 4.50 (114)

SECTION 3.3

Pneumatic Copper Seal Bonnet Angle-In-Line Valves

MODEL NUMBER

CAIVP-075 CAIVP-0752-CF CA IVP-100 CAIVP-1002-CF CA IVP-150 CAIVP-1502-CF CAIVP-200 CAIVP-2002-CF CAIVP-250 CAIVP-2502-CF CAIVP-300 CAIVP-3002-CF

NOMINAL

PORT O D DESCRIPTION

/4 (19) No ﬂanges 3.70 (9 4) 4.32 (110) 2.7 3 (69)

/4 (19) Rot atable 1.3 3 CF 4.70 (119) 4.32 (110) 2.7 3 (69)

1 (25) No ﬂanges 3.9 0 (99) 4.27 (108) 2.73 (6 9)

1 (25) R otatab le 2.12 CF 4.4 8 (114) 4.27 (10 8) 2.7 3 (69) 11/2 (38) No ﬂanges 4.82 (122) 5.69 (145) 3. 25 (82) 11/2 (38) Ro tatable 2 .75 CF 5.24 (133) 5. 69 (145) 3.25 (82)

2 (50) No ﬂanges 6.7 0 (170) 7. 94 (2 02 ) 4.05 (103)

2 (50) Rotatable 3.38 CF 7.15 (182) 7.9 4 ( 20 2) 4.05 (10 3) 21/2 (63) No ﬂanges 7.75 (197) 7.64 (194 ) 4.61 (117) 21/2 (63) Rotatable 4.50 CF 8. 50 (216) 7.64 (194) 4.61 (117)

3 (76) No ﬂanges 10.05 (255) 8.70 (221) 5.62 (143)

3 (76) R otatab le 4.62 CF 10.61 (269) 8.70 (221) 5. 62 (143)

CAIVP O-Ring

AIVP O-Ring Kits

MODEL NUMBER

ESVP-075-95 ESVP-150- 95 ESVP-200-95 ESVP-250-95 ESVP-300-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

& Gasket Kits

MODEL NUMBER

CSVP-075-95 CSVP-150- 95 CSVP-200-95 CSVP-250-95 CSVP-300-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

SPECIFICATIONS

Port OD s:

3/8 to 3 inch es (10 to 76mm).

Materials

Body:

Electro polished 304 s tainless stee l

Bellows:

Other O-ring compounds available

Actuation: Normall y closed 3/8 t o 2 inch (9.5 -50.8 mm) ODs :

Air-to-open, spring-to-close

Air-to-open, air-to-close See page 101 for more actuatio n options

Operating pressure: Differential pressure: Maximum 6 p si (0.4 b ar)

dif ferential ac ross the valve s eat

Maximu m temperatur e with Viton sea ls

Vacuum range

Options:

micro-sw itches and actua tors. See pag e 101

Thermal:

available for all valv es. See page 127

Welded AM -350 stainless s teel

Bonnet s eal: Poppet seal:

21/2

Sustained: Intermittent:

Viton bo nnet seal : Coppe r bonnet se al:

Copper or Vi ton Viton

to 3 inch ( 63.5-76.2m m) ODs:

60 to 80 psig ( 4-5.5 bar)

<150°C

<204°C

>1x 10

Fittings, O-rings, air solenoids,

Heater jacket s and controller s

>1x 10

-9

mbar - High Vacuum

-10

mbar - UHV

Ultra-High Vacuum Components Since 1962 • www.n-c.com

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.

Page 12

SECTION 3.3

SPECIFICATIONS

Port OD s:

3/8 to 3 inches (10 to 76mm)

Materials

Body:

Electrop olished 304 st ainless steel

Be llows: Welded A M-350 stainles s steel

Bonnet s eal: Poppet seal:

Actuation:

w ith ACME threads

Differential pressure:

dif ferential a cross the val ve seat

Maximum

Sustained: Intermittent:

Vacuum range

Viton bo nnet seal: Copper b onnet seal :

Options:

Thermal:

a vailable for all valve s.

Copper or Vito n

Viton

Other O-ring compounds available

Self-lubricating bronze nuts

Maximum 6 p si (0.4 b ar)

temperature with Viton seals

<150°C

<204°C

>1x 10

Fittings and O-rings. See pa ge 101

Heater jacket s and controllers

>1x 10

-9

mbar - High Vacuum

-10

mbar - UHV

See page 127

Isolation Valves

Manual In-Line Valves

Manual Viton Seal In-Line Valves

MODEL NUMBER

ILV-038 ILV-0382-CF ILV-0382-NWB ILV-050 ILV-0502-CF ILV-0502-NWB ILV-075 ILV-0752-CF ILV-0752-NWB ILV-100 ILV-1002-CF ILV-1002-NWB ILV-150 ILV-1502-CF ILV-1502-NWB ILV-200 ILV-2002-CF ILV-2002-NWB ILV-2002-ASA ILV-250 ILV-2502-CF ILV-2502-ISO ILV-2502-ASA ILV-300 ILV-3002-CF ILV-3002-ISO ILV-3002-ASA

NOMINAL

PORT O D DESCRIPTION

/8 (10) No ﬂanges 1 .50 (38 .1) 0.94 ( 24) 1.5 0 (38) 4.0 6 (103) 2.25 (57) 4.44 (113)

/8 (10) Rot atable 1.3 3 CF 1.60 (40.6) 0.94 (24) 1.50 ( 38) 4.06 (103) 2.25 (57) 4.4 4 (113)

/8 (10) NW-10 B 1.6 5 (41.91 0.94 (24) 1.50 ( 38) 4 .06 (103) 2.25 (57) 4.44 (113)

/2 (13) No ﬂanges 1. 50 ( 38.1) 1.00 (25) 1.62 (41) 4.19 (106) 2.2 5 (57) 4.69 (119)

/2 (13) Ro tatable 1.3 3 CF 1.60 (40.6) 1.00 (25) 1.62 (41) 4 .19 (106) 2.25 (57) 4.69 (119)

/2 (13) N W-10B 1. 65 (41.9 ) 1.00 (25) 1.62 (41) 4.19 (106) 2.2 5 (57) 4.69 (119)

/4 (19) No ﬂanges 2.00 (50 .8) 1.12 (28 ) 1. 87 (47 ) 4.4 4 (113) 2.25 (57) 5.19 (132)

/4 (19) Rot atable 1.3 3 CF 2.50 (63.5) 1.12 (28 ) 1.87 (47) 4.4 4 (113) 2.25 (57) 5.19 (132)

/4 (19) NW-16B 2.15 (54.6) 1.1 2 (28 ) 1.87 (47) 4.4 4 (113) 2.25 (57) 5.19 (132) 1 (25) No ﬂanges 1.88 (47.8) 1.37 (3 5) 2.25 (57) 4.6 9 (119) 2.25 (57) 5 .69 (145) 1 (25) Rota table 2.12 CF 2.05 (52.1) 1.3 7 (35) 2.25 (57) 4.6 9 (119) 2.25 (57) 5.69 (14 5) 1 (25) NW-25B 2. 03 (51. 6) 1.37 (35) 2. 25 (57) 4.6 9 (119) 2.25 (57) 5.69 (145 )

/2 (38) No ﬂanges 2.2 5 (57.2) 1.8 8 (48) 3 .12 (7 9) 6.52 (16 6) 3.00 (7 6) 8. 02 (204)

/2 (38) Ro tatable 2.75 CF 2.4 6 (56.5) 1. 88 (4 8) 3.1 2 (7 9) 6 .52 (166) 3.0 0 (76) 8.0 2 (204)

1 11/2 (38) NW- 40B 2.40 (61.0) 1.8 8 (48) 3 .12 (7 9) 6.52 (16 6) 3.00 (76) 8.02 (2 04)

2 (50) No ﬂanges 3.2 5 (82.6) 2.62 (67 ) 4.12 (105) 8.73 (222) 3. 50 (89) 10.73 (273) 2 (50) Rotatable 3.38 CF 3.48 (8 8.4) 2 .62 (67) 4.12 (105) 8.73 (222) 3. 50 (89) 10.73 (273) 2 (50) NW-50B 3 .40 (86.4) 2.6 2 (67) 4.12 (105) 8.73 (222) 3.5 0 (89) 10.73 (273)

2 (50) Rotatable ASA-5-200R 3.50 (8 8.9) 2 .62 (67) 4.12 (105) 8.73 (222) 3. 50 (89) 10.73 (273) 21/2 (63) No ﬂanges 3.00 (76.2) 3 .12 ( 79) 4.93 (12 5) 10.2 (2 59) 4.00 (10 2) 12.7 ( 323) 21/2 (63) Rotatable 4.50 CF 3. 38 (85.9) 3 .12 (7 9) 4 .93 (125) 10. 2 (259) 4. 00 (102) 12.7 (3 23) 21/2 (63) ISO-63-250-OF 3.2 5 (82.6) 3.1 2 (7 9) 4.9 3 (125) 10.2 (259) 4.00 (102) 12 .7 (323)

/2 (63) Rotatable ASA-5-250R 3.25 (8 2.6) 3 .12 ( 79) 4.93 (12 5) 10.2 (2 59) 4.00 (10 2) 12.7 ( 323)

3 (76) No ﬂanges 3.25 (82.6 ) 3.68 (93) 5.6 2 (143) 11. 04 (2 80) 4.50 (114) 14.0 4 (357)

3 (76) Rota table 4.62 C F 3.5 3 (89.7) 3.68 (9 3) 5. 62 (143) 11.0 4 (28 0) 4.5 0 (114) 14 .04 (35 7)

3 (76) ISO-80-300-OF 3.50 (8 8.9) 3.68 (9 3) 5.6 2 (143) 11.0 4 (280 ) 4.5 0 (114) 14. 04 (357 )

3 (76) Rotatable ASA-6 -300R 3.50 (8 8.9) 3.68 (9 3) 5.6 2 (143) 11.0 4 (280 ) 4.50 (114) 14.0 4 (357 )

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.

Manual Copper Seal Bonnet In-Line Valves

MODEL NUMBER

CILV- 038 CILV- 0382-CF CILV- 050 CILV-0502-CF CILV- 075 CILV-0752-CF CILV-100 CILV-1002-CF CILV-150 CILV-150 2-CF CILV-200 CILV-2002-CF CILV-250 CILV-2502-CF CILV- 300 CILV-3002-CF

NOMINAL

PORT O D DESCRIPTION

/8 (10) No ﬂanges 1 .50 (38 .1) 0 .94 (24) 1.5 0 (38) 4.0 6 (103) 2.7 3 (69) 4.44 (113)

/8 (10) Rot atable 1.3 3 CF 1.60 (40.6) 0.9 4 (24) 1. 50 (38 ) 4.06 (10 3) 2.73 (69) 4.44 (113)

/2 (13) No ﬂanges 1. 50 ( 38.1) 1.00 (25) 1. 62 (41) 4.19 (106) 2.73 (6 9) 4.69 (119)

/2 (13) Ro tatable 1.3 3 CF 1.60 (40.6) 1.00 (25) 1.62 (41) 4.19 (106) 2.7 3 (69) 4.69 (119)

/4 (19) No ﬂanges 2.00 (50 .8) 1.12 (28 ) 1. 87 (47 ) 4.4 4 (113) 2.73 (6 9) 5.19 (132)

/4 (19) Rot atable 1.3 3 CF 2.50 (63.5) 1.12 (28 ) 1.87 ( 47) 4.4 4 (113) 2.73 (69 ) 5.19 (132)

1 (25) No ﬂanges 1.88 (47.8) 1.37 (35) 2.25 (57) 4.69 (119) 2.7 3 (69) 5.6 9 (145)

1 (25) Rota table 2.12 CF 2.05 (52.1) 1.3 7 (35) 2.25 (57) 4.6 9 (119) 2.73 (6 9) 5.69 (14 5)

/2 (38) No ﬂanges 2.2 5 (57.2) 1.8 8 (48) 3 .12 (7 9) 6.52 (16 6) 3.25 (8 3) 8. 02 (204)

1 11/2 (38) Ro tatable 2.75 CF 2.46 (62.5) 1. 88 (4 8) 3.1 2 (7 9) 6 .52 (166) 3. 25 (83) 8.0 2 (204)

2 (50) No ﬂanges 3.2 5 (82.6) 2.62 (67 ) 4.12 (105) 8.73 (222) 4.05 (10 3) 10.73 (273)

2 (50) Rotatable 3.38 CF 3.48 (8 8.4) 2 .62 (67) 4.12 (105) 8.73 (222) 4.05 (10 3) 10.73 (273)

/2 (63) No ﬂanges 3.00 (76.2) 3 .12 ( 79) 4.93 (12 5) 10.2 (2 59) 4.6 1 (117) 12.7 ( 323)

/2 (63) Rotatable 4.50 CF 3. 38 (85.9) 3 .12 (7 9) 4 .93 (125) 10. 2 (259) 4.61 (117) 12 .7 (323)

3 (76) No ﬂanges 3.25 (82.6) 3 .62 (92) 5.55 (141) 11.0 4 (28 0) 5.62 (14 3) 14.0 4 (357)

3 (76) Rota table 4.62 C F 3.5 3 (89.7) 3.62 (9 2) 5.55 (141) 11 .04 (2 80) 5. 62 (143) 14. 04 (357 )

ILV O-Ring Kits

MODEL NUMBER

ESV-075-95 ESV-150 -9 5 ESV-200-95 ESV-250-95 ESV-300-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

CILV O -Ring and Gasket Kits

MODEL NUMBER

CSV-075-95 CSV-150 -9 5 CSV-200-95 CSV-250-95 CSV-300-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

1

Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 13

Isolation Valves

Ultra-High Vacuum Components Since 1962 • www.n-c.com

SECTION 3.3

Pneumatic In-Line Valves

Pneumatic Viton Seal In-Line Valves

MODEL NUMBER

ILVP-038 ILVP-0382-CF ILVP-0382-NWB ILVP-05 0 ILVP-0502-CF ILVP-0502-NWB ILVP-075 ILVP-0752-CF ILVP-0752-NWB ILVP-100 ILVP-1002-CF ILVP-1002-NWB ILVP-150 ILVP-1502- CF ILVP-1502-NWB ILVP-200 ILVP-2002-CF ILVP-2002-NWB ILVP-2002-ASA ILVP-250 ILVP-250 2-CF ILVP-250 2-ISO ILVP-2502-ASA ILVP-30 0 ILVP-3002-CF ILVP-3002-ISO ILVP-3002-ASA ILVP-40 0 ILVP-4002-CF ILVP-4002-ISO ILVP-4002-ASA

NOMINAL

PORT O D DESCRIPTION

/8 (10) No ﬂanges 1.5 0 (3 8.1) 0. 94 (24) 1.5 0 (38) 3.6 2 (92) 2.25 (57) 5.76 (14 6)

/8 (10) Rot atable 1.3 3 CF 1.60 (40.6) 0 .94 (24) 1. 50 (38 ) 3.62 (92) 2.25 (57) 5.76 (14 6)

/8 (10) NW-10 B 1.6 5 (41.9) 0.9 4 (24) 1.5 0 (38) 3.62 (92) 2.25 (57) 5 .76 (146)

/2 (12) No ﬂanges 1. 50 ( 38.1 ) 1.00 (25) 1. 62 (41) 3.75 (9 5) 2. 25 (57) 5.8 9 (150)

/2 (12) Rotat able 1.33 CF 1.60 (40.6) 1.00 (25) 1. 62 (41) 3.75 (95) 2.25 (57) 5.8 9 (150)

/2 (12) N W-10B 1.6 5 (41.9) 1.00 (25) 1.6 2 (41) 3 .75 (95) 2.25 (57) 5. 89 (150)

/4 (19) No ﬂanges 2.0 0 (50.8) 1.1 2 (2 8) 1. 87 (47) 4.00 (10 2) 2.25 (57) 6 .14 (156)

/4 (19) Rot atable 1.3 3 CF 2.50 (63.5) 1 .12 (2 8) 1. 87 (47 ) 4.0 0 (102) 2.2 5 (57) 6.14 (156 )

/4 (19) NW-16B 2.15 (54.6) 1 .12 (2 8) 1.87 ( 47) 4.00 (102) 2.25 (57) 6.14 (15 6) 1 (25) No ﬂanges 1.88 (47.8) 1.37 (35) 2.25 (57) 4.2 5 (108) 2. 25 (57) 6.3 9 (162) 1 (25) Rota table 2.12 CF 2.05 (52.1) 1.37 ( 35) 2.25 (57) 4.25 (10 8) 2.25 (57) 6 .39 (162) 1 (25) NW-25B 2. 03 (51. 6) 1.37 (35) 2.25 (57) 4.2 5 (108) 2.2 5 (57) 6.39 (16 2)

/2 (38) No ﬂanges 2.25 (57.2) 1.8 8 (48) 3 .12 ( 79) 5.86 (149) 3.00 ( 76) 8 .45 (215)

/2 (38) Ro tatable 2.75 CF 2.46 (62.5) 1.8 8 (48) 3 .12 (7 9) 5 .86 (149) 3.0 0 (76) 8 .45 (215)

1 11/2 (38) NW- 40B 2.40 (61.0) 1.8 8 (48) 3 .12 (7 9) 5.86 (149) 3 .00 (76) 8.45 (215 )

2 (50) No ﬂanges 3 .25 (82.6) 2.6 2 (67) 4.12 (105) 7.62 (194) 3.5 0 (89) 12 .11 (3 08) 2 (50) Rotatable 3.38 CF 3.48 (88 .4) 2. 62 (67) 4.12 (105) 7.62 (194) 3.5 0 (89) 12 .11 (3 08) 2 (50) NW-50B 3.40 (86.4) 2. 62 (67) 4.12 (105) 7.62 (194) 3.5 0 (89) 12 .11 (3 08)

2 (50) Rotatable ASA-5-200R 3.5 0 (88.9) 2.62 (67 ) 4.12 (105) 7.62 (194) 3. 50 (89) 12 .11 (3 08 ) 21/2 (63) No ﬂanges 3.00 (76.2) 3 .12 (7 9) 4.93 (12 5) 9 .11 (2 31) 4.00 (102) 12.03 (306) 21/2 (63) Rotatable 4.50 CF 3.3 8 (85.9) 3.12 (7 9) 4. 93 (125) 9.11 (23 1) 4.00 (102) 12.03 (306) 21/2 (63) ISO-63-250-OF 3.2 5 (82.6) 3 .12 ( 79) 4. 93 (125) 9.11 (23 1) 4.00 (102) 12.03 (306) 21/2 (63) Rotatable ASA-5-250R 3.5 0 (88.9) 3.12 (79) 4.9 3 (125) 9 .11 (2 31) 4.00 (102) 12.03 (306)

3 (76) NNo ﬂanges 3.2 5 (82.6) 3.68 (9 3) 5.62 (14 3) 9.98 (2 53) 4. 50 (114) 13.38 (340)

3 (76) Rota table 4.62 C F 3.53 (8 9.7) 3.68 (93) 5.6 2 (143) 9.98 (2 53) 4 .50 (114) 13.38 (340)

3 (76) ISO-80-300-OF 3.50 (8 8.9) 3.68 (9 3) 5.62 (143) 9.9 8 (253) 4.50 (114) 13.38 (340)

3 (76) Rotatable ASA-6 -300R 3.5 0 (88.9) 3.68 (9 3) 5.62 (14 3) 9 .98 (253) 4.50 (114) 13.38 (340)

4 (100) No ﬂanges 4.22 (10 7) 4. 88 (124) 7.38 (187 ) 12. 83 (326 ) 6.50 (165 ) 18. 27 (46 4) 4 (100) R otatabl e 6.00 CF 4.6 6 (118) 4.8 8 (124) 7.38 (187) 12 .83 (3 26) 6.5 0 (165) 18.2 7 (464) 4 (100) ISO-100-400-OF 4.47 (114) 4.8 8 (124) 7.38 (187 ) 12.8 3 (326) 6.50 (165) 18. 27 (464)

4 (10) Rotatable ASA-7.5-400R 4.47 (114) 4.8 8 (124) 7.38 (187) 12 .83 (32 6) 6.50 (16 5) 18 .27 (46 4)

Pneumatic Copper Seal Bonnet In-Line Valves

MODEL NUMBER

CILVP-038 CILVP-0382-CF CILVP-050 CILVP-0502-CF CILVP-075 CILVP-0752-CF CILVP-100 CILVP-1002-CF CILVP-150 CILVP-1502-CF CILVP-20 0 CILVP-2002-CF CILVP-25 0 CILVP-25 02-CF CILVP-300 CILVP-3002-CF CILVP-4 00 CILVP-4002-CF

NOMINAL

PORT O D DESCRIPTION

/8 (10) No ﬂanges 1. 50 (38 .1) 0.9 4 (24) 1.5 0 (38) 3 .74 (9 5) 2.73 (6 9) 5.76 (146)

/8 (10) Rot atable 1.3 3 CF 1.60 (40.6) 0.94 (24) 1.5 0 (38) 3 .74 (9 5) 2.7 3 (69) 5.76 (14 6)

/2 (12) No ﬂanges 1 .50 (38 .1) 1.00 (25) 1.62 (41) 3. 88 (99) 2.73 (6 9) 5 .89 (150)

/2 (12) Rotat able 1.33 CF 1.60 (40.6) 1.00 (25) 1. 62 (41) 3. 88 (99) 2.73 (6 9) 5. 89 (150)

/4 (19) No ﬂanges 2.00 (50. 8) 1.1 2 (28 ) 1. 87 (47) 4.12 (105) 2.73 (6 9) 6 .14 (156)

/4 (19) Rot atable 1.3 3 CF 2.50 (63.5) 1.12 (28 ) 1.8 7 (47) 4.12 (105) 2 .73 (69) 6.14 (15 6) 1 (25) No ﬂanges 1.88 (47.8) 1.3 7 (35) 2.2 5 (57) 4.3 8 (111) 2.7 3 (69) 6.39 (16 2)

1 (25) Rota table 2.12 CF 2.05 (52.1) 1.3 7 (35) 2.2 5 (57) 4.3 8 (111) 2.7 3 (69) 6.39 (16 2) 11/2 (38) No ﬂanges 2.25 (57.2) 1.8 8 (48) 3.1 2 (7 9) 5. 86 (149) 3.2 5 (83) 8.4 4 (214) 11/2 (38) Ro tatable 2.75 CF 2.4 6 (62.5) 1. 88 (4 8) 3 .12 (7 9) 5.86 (149 ) 3 .25 (83) 8. 44 (214)

2 (50) No ﬂanges 3.25 (8 2.6) 2.6 2 (67) 4.12 (105) 7.50 (191) 4.05 (10 3) 1 2.11 ( 30 8)

2 (50) Rotatable 3.38 CF 3 .48 (88.4) 2.62 (6 7) 4.12 (105) 7.50 (191) 4.05 (10 3) 1 2.11 ( 308) 21/2 (63) No ﬂanges 3.00 (76.2) 3.1 2 (7 9) 4.93 (125 ) 9 .11 (2 31) 4.61 (117) 12.03 (306) 21/2 (63) Rotatable 4.50 CF 3.38 (8 5.9) 3.1 2 (7 9) 4.93 (125 ) 9 .11 (2 31) 4.61 (117) 12.03 (306)

3 (76) No ﬂanges 3 .25 (82.6) 3.62 (9 2) 5. 55 (141) 9.9 8 (253) 5. 62 (143) 13.38 (340)

3 (76) Rota table 4.62 C F 3.53 (89.7 ) 3 .62 (92) 5.5 5 (141) 9.98 (253) 5.6 2 (143) 13.38 (340)

4 (100) No ﬂanges 4.22 (10 7) 4.88 (124) 7.38 (187 ) 12.83 (326) 6.7 3 (171) 18. 27 (46 4) 4 (100) R otatabl e 6.00 CF 4.66 (118) 4.8 8 (124) 7.38 (187 ) 12.8 3 (326) 6 .73 (171) 18. 27 (46 4)

SPECIFICATIONS

Port OD s:

3/8 to 4 inch es (10 to 100mm )

Materials

Body:

Electro polished 304 s tainless stee l

Bellows:

Other O-ring compounds available

Actuation: N ormally closed 3/8 to 2 in ch (9.5- 50.8mm ) ODs:

spring-to-close

air-to -clo se See page 101 for more actuatio n options

Operating pressure: Differential pressure: Maximum 6 p si (0.4 b ar)

dif ferential ac ross the valve s eat

Maximu m temperatur e with Viton sea ls

Vacuum range

Options:

micro-sw itches and actuato rs. See page 101

Thermal:

available for all valve s. See page 127

Welded AM -350 stainless s teel

Bonnet s eal: Poppet seal:

21/2

Sustained: Intermittent:

Viton bo nnet seal : Coppe r bonnet se al:

Copper or Vi ton Viton

to 4 inch ( 63.5-102mm) OD s:

60 to 80 psig ( 4-5.5 bar)

<150°C

<204°C

>1x 10

Fittings, O-rings, air solenoids,

Heater jacket s and controller s

>1x 10

Air-to-open,

-9

mbar - High Vacuum

-10

mbar - UHV

CILVP O -Ring

ILVP O-Ring Kits

MODEL NUMBER

ESVP-075-95 ESVP-150- 95 ESVP-200-95 ESVP-250-95 ESVP-300-95 ESVP-400-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

4 (100)

& Gasket Kits

MODEL NUMBER

CSVP-075-95 CSVP-150- 95 CSVP-200-95 CSVP-250-95 CSVP-300-95 CSVP-400-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

4 (100)

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.

1

Page 14

SECTION 3.3

SPECIFICATIONS

Port OD s:

3/8 to 3 inch es (10 to 76mm)

Materials Body: Elect ropolished 30 4 stainless ste el Bellows: Welded A M-350 stainles s steel Bonn et seal: Coppe r or Viton Poppet seal : Viton Other O -ring compounds available

Actuation: Self-lubricating bronze nuts with ACM E threads

Differential pressure: Maximum 6 p si (0.4 b ar) dif ferentia l across the va lve seat

Maximu m temperatur e with Viton sea ls

Sustained: <150°C Intermittent: <204°C

Vacuum range Vito n bonnet se al: >1x 10-9 mbar - High Vacuum Cop per bonnet s eal: >1x 10

Options: Fittings and O-rings. Se e page 101 Thermal: Heater jackets and cont rollers

availa ble for all valves.

See page 127

-10

mbar - UHV

Isolation Valves

Manual Tee Valves

Manual Viton Seal Tee Valves

MODEL NUMBER

ESV-03 8T ESV-0383T-CF ESV-0383T-NWB ESV-050T ESV-0 50 3T- CF ESV-0503T-NWB ESV-075T ESV-0753T-CF ESV-0753T-NWB ESV-100 T ESV-1003T-CF ESV-1003T-NWB ESV-150 T ESV-1503T-CF ESV-1503T-NWB ESV-200 T ESV-2003T-CF ESV-2003T-NWB ESV-2003T-ASA ESV-250T ESV-2503T-CF ESV-2503T-ISO ESV-2503T-ASA ESV-300T ESV-3003T-CF ESV-3003T-ISO ESV-3003T-ASA

NOMINAL

PORT O D DESCRIPTION

/8 (10) No ﬂanges 1 .50 (38 .1) 4.06 (103) 4.4 4 (113) 2.25 (57)

/8 (10) Rota table 1.33 C F 1.60 (40.6) 4.16 (106) 4 .54 (115) 2.25 (57)

/8 (10) NW -10B 1. 65 (41.9 ) 4.21 (107 ) 4. 59 (117) 2.25 (57)

/2 (12) No ﬂanges 1.5 0 (3 8.1) 4.06 (10 3) 4. 56 (116) 2.25 (57)

/2 (12) Rot atable 1.3 3 CF 1.60 (40.6) 4.16 (106) 4.54 (115) 2.25 (57)

/2 (12) NW-10B 1. 65 (41.9 ) 4.21 (107 ) 4.71 (12 0) 2.25 (57)

/4 (19) No ﬂanges 2. 00 (50.8) 4.56 (116) 5.31 (135) 2.25 (57)

/4 (19) Rota table 1.33 CF 2.50 (63.5) 5.06 (12 9) 5.81 (14 8) 2.25 (57)

/4 (19) NW -16B 2.15 (54.6) 4.71 (120) 5.46 (139) 2.25 (57) 1 (25) No ﬂanges 1.88 (47.8) 4.32 (110) 5.32 (135) 2.25 (57) 1 (25) Ro tatable 2 .12 CF 2.0 5 (52.1) 4.49 (114) 5.49 (140) 2.25 (57) 1 (25) NW-25B 2. 03 (51. 6) 4.47 (114) 5.47 (139) 2.25 (57)

/2 (38) No ﬂanges 2.25 (57.2) 5.6 3 (143) 7.13 (181) 3 .00 (76)

/2 (38) Rot atable 2.7 5 CF 2.46 (62.5) 5.84 (148) 7.34 (186) 3.00 (76)

1 11/2 (38) NW-40B 2.4 0 (61.0) 5.78 (147 ) 7.28 (18 5) 3. 00 (76)

2 (50) No ﬂanges 3.25 (8 2.6) 7.85 (19 9) 9.85 (250) 3 .50 (89) 2 (50) Rotatable 3.38 CF 3 .48 (88.4) 8.08 (20 5) 10.0 8 (256) 3. 50 (89) 2 (50) NW-50B 3.40 (86.4) 8.00 (203) 10.00 (254) 3.50 (89)

2 (50) Rotatable ASA-5-200R 3.2 5 (82.6) 8.10 (20 6) 10.10 (257) 3 .50 (89) 21/2 (63) No ﬂanges 3.0 0 (76.2) 8 .27 (210) 10.7 7 (2 74) 4. 00 (100) 21/2 (63) Rotatable 4.50 CF 3.3 8 (85.9) 8.6 5 (220) 11.15 (28 3) 4.00 (100) 21/2 (63) ISO-63-250-OF 3.2 5 (82.6) 8 .52 (216) 11.02 ( 280) 4.00 (10 0) 21/2 (63) Rotatable ASA-5-250R 3.2 5 (82.6) 8 .52 (216) 11.02 ( 280) 4.00 (10 0)

3 (76) No ﬂanges 3.25 (8 2.6) 8.68 (220) 11.68 (2 97) 4.5 0 (114)

3 (76) Ro tatable 4 .62 CF 3.53 (8 9.7) 8.96 (2 28) 11.96 (304 ) 4. 50 (114)

3 (76) ISO-80-300-OF 3.50 (8 8.9) 8.93 (2 27) 11.9 3 (30 3) 4.50 (114)

3 (76) Rotat able ASA-6-3 00R 3.5 0 (88.9) 8.9 3 (227) 11.9 3 (30 3) 4.50 (114)

Manual Copper Seal Bonnet Tee Valves

MODEL NUMBER

CSV-038T CSV-0383T-CF CSV-050T CSV-0 50 3T- CF CSV-075T CSV-0753T-CF

CSV-100 T

CSV-1003T-CF CSV-150 T CSV-1503T-CF CSV-200 T CSV-2003T-CF CSV-250T CSV-2503T-CF CSV-300T CSV-3003T-CF

NOMINAL

PORT O D DESCRIPTION

/8 (10) No ﬂanges 1 .50 (38 .1) 4.06 (103 . 4.4 4 (113) 2.73 (69)

/8 (10) Rota table 1.33 C F 1.60 (40.6) 4.16 (106) 4 .54 (115) 2.73 (6 9)

/2 (12) No ﬂanges 1.5 0 (3 8.1) 4.06 (10 3) 4. 56 (116) 2.73 (69)

/2 (12) Rot atable 1.3 3 CF 1.60 (40.6) 4.16 (106) 4.66 (118) 2.7 3 (69)

/4 (19) No ﬂanges 2. 00 (50.8) 4.56 (116) 5.31 (135) 2.73 (6 9)

/4 (19) Rota table 1.33 CF 2.50 (63.5) 5.06 (12 9) 5.81 (14 8) 2.73 (69)

1 (25) No ﬂanges 1.88 (47.8) 4.32 (110) 5.32 (135) 2.73 (6 9)

1 (25) Ro tatable 2 .12 CF 2.0 5 (52.1) 4.49 (114) 5.49 (139) 2.7 3 (69) 11/2 (38) No ﬂanges 2.25 (57.2) 5.6 3 (143) 7.13 (181) 3 .25 (83) 11/2 (38) Rot atable 2.7 5 CF 2.46 (62.5) 5.84 (148) 7.34 (186) 3. 25 (83)

2 (50) No ﬂanges 3.25 (8 2.6) 7.85 (199) 9.85 (2 50) 4.0 5 (103)

2 (50) Rotatable 3.38 CF 3 .48 (88.4) 8.08 (20 5) 10.0 8 (256) 4.05 (103) 21/2 (63) No ﬂanges 3.0 0 (76.2) 8 .27 (210) 10.7 7 (2 74) 4.61 (117) 21/2 (63) Rotatable 3.38 CF 3. 38 (85.9) 8. 65 (220) 11.1 5 (283 ) 4.61 (117)

3 (76) No ﬂanges 3.25 (8 2.6) 8.68 ( 220) 11.6 8 (297 ) 5.6 2 (143)

3 (76) Ro tatable 4 .62 CF 3.53 (8 9.7) 8.96 (2 28) 11.96 (304 ) 5.62 (14 3)

CSV-T O-Ring

ESV-T O-Ring Kits

MODEL NUMBER

ESV-075-95 ESV-150 -9 5 ESV-200-95 ESV-250-95 ESV-300-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

& Gasket Kits

MODEL NUMBER

CSV-075-95 CSV-150 -9 5 CSV-200-95 CSV-250-95 CSV-300-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.

1

Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 15

Isolation Valves

Ultra-High Vacuum Components Since 1962 • www.n-c.com

SECTION 3.3

Pneumatic Viton Seal Tee Valves

MODEL NUMBER

ESVP-038T ESVP-0383T-CF ESVP-0383T-NWB ESVP-050T ESVP-0503T-CF ESVP-0503T-NWB ESVP-075T ESVP-0753T-CF ESVP-0753T-NWB ESVP-100T ESVP-1003T-CF ESVP-1003T-NWB ESVP-150T ESVP-1503T-CF ESVP-1503T-NWB ESVP-200T ESVP-2003T-CF ESVP-2003T-NWB ESVP-2003T-ASA ESVP-250T ESVP-2503T-CF ESVP-2503T-ISO ESVP-2503T-ASA ESVP-300T ESVP-3003T-CF ESVP-3003T-ISO ESVP-3003T-ASA ESVP-400T ESVP-4003T-CF ESVP-4003T-ISO ESVP-4003T-ASA

Pneumatic Copper Seal Bonnet Tee Valves

MODEL NUMBER

CSVP-038T CSVP-0383T-CF CSVP-050T CSVP-0503T-CF CSVP-075T CSVP-0753T-CF CSVP-100T CSVP-1003T-CF CSVP-150T CSVP-1503T-CF CSVP-200T CSVP-2003T-CF CSVP-250T CSVP-2503T-CF CSVP-300T CSVP-3003T-CF CSVP-400T CSVP-4003T-CF

NOMINAL

PORT O D DESCRIPTION

/8 (10) No ﬂanges 1 .50 (38 .1) 3.62 (92) 5.7 7 (147) 2.25 (57)

/8 (10) R otatabl e 1.33 CF 1.60 (40.6) 3.6 7 (93) 5.87 (149) 2.25 (57)

/8 (10) N W-10B 1.6 5 (41.9) 3.77 (9 6) 5.92 (150) 2.25 (57)

/2 (12) No ﬂanges 1. 50 ( 38.1 ) 3.6 2 (92) 5.77 (147) 2.25 (57)

/2 (12) Rota table 1.33 CF 1.60 (40.6) 3.67 (93) 5 .87 (149) 2.25 (57)

/2 (12) NW -10B 1. 65 (41.9 ) 3.7 7 (96) 5.92 (150) 2.25 (57)

/4 (19) No ﬂanges 2.00 (50 .8) 4.12 (105) 6.2 6 (159) 2.25 (57)

/4 (19) Ro tatabl e 1.33 CF 2.50 (63.5) 4.62 (117) 6.7 6 (172) 2.2 5 (57)

/4 (19) N W-16B 2.15 (54.6) 4.27 (108) 6.41 (163) 2.25 (57) 1 (25) No ﬂanges 1.88 (47.8) 3.8 8 (99.0) 6.02 (153) 2.25 (57) 1 (25) Rot atable 2.12 CF 2.05 (52.1) 4.05 (102) 6.19 (157) 2.25 (57) 1 (25) NW-25B 2. 03 (51.6 ) 4.03 (102) 6.17 (157) 2.25 (57)

/2 (38) No ﬂanges 2.25 (57.2) 4.98 (126) 7.56 (19 2) 3.00 (7 6)

/2 (38) Rota table 2.75 CF 2.45 (62.2) 5.19 (132) 7.77 (197) 3.00 (76)

1 11/2 (38) NW-40B 2 .40 (6 1.0) 5.13 (130) 7.71 (196) 3.00 (76)

2 (50) No ﬂanges 3.25 (82.6) 6.74 (171) 11. 23 (2 85) 3.50 (89) 2 (50) Rotatable 3.38 CF 3.4 8 (88.4) 6.97 (17 7) 11. 46 (2 91) 3. 50 (89) 2 (50) NW-50B 3.4 0 (86.4) 6.89 (175 ) 11.38 (289) 3.5 0 (89) 2 (50) Rotatable ASA-5-200R 3. 50 (88.9) 6. 99 (178) 11. 48 (29 2) 3 .50 (89)

21/2 (63) No ﬂanges 3.00 (76. 2) 7.18 (182) 10.10 (257 ) 4 .00 (100) 21/2 (63) Rotatable 4.50 CF 3.3 8 (85.9) 7.56 (192) 10.4 8 (266) 4.0 0 (100) 21/2 (63) ISO-63-250-OF 3 .25 (82.6) 7.43 (189) 10.35 (2 63) 4.00 (100 ) 21/2 (63) Rotatable ASA-5-250R 3. 25 (82.6) 7.43 (189) 10.35 (2 63) 4.00 (100)

3 (76) No ﬂanges 3.25 (82.6) 7.62 (194) 11.00 (279) 4.50 (114) 3 (76) Rot atable 4.6 2 CF 3 .53 (89.7) 7.9 0 (2 0 1) 11.28 (287) 4.50 (114) 3 (76) ISO-80-300-OF 3. 50 (88.9) 7. 87 (2 00 ) 11. 25 (2 86) 4.50 (114) 3 (76) Rotatable ASA- 6-300R 3. 50 (88.9) 7. 87 (2 00 ) 11. 25 (2 86) 4 .50 (114)

4 (100) No ﬂanges 4.22 (107) 9. 55 (243) 14.99 (381) 6.5 0 (165) 4 (100) Rota table 6.0 0 CF 4. 66 (118) 9.9 9 (254) 14.4 3 (392) 6.50 (165) 4 (100) ISO-100-400-OF 4.47 (114) 9.8 0 (249) 15. 24 (387) 6.5 0 (165) 4 (100) Rotatable ASA-7.5- 400R 4 .47 (114) 9.8 0 (249) 15. 24 (387) 6.5 0 (165)

NOMINAL

PORT O D DESCRIPTION

/8 (10) No ﬂanges 1 .50 (38 .1) 3.75 (95) 5.77 (147) 2.73 (69)

/8 (10) R otatabl e 1.33 CF 1.60 (40.6) 3.8 5 (98) 5.8 2 (148) 2.73 (6 9)

/2 (12) No ﬂanges 1. 50 ( 38.1 ) 3.7 5 (95) 5.77 (147 ) 2.73 (6 9)

/2 (12) Rota table 1.33 CF 1.60 (40.6) 3 .85 (98) 5.82 (14 8) 2.7 3 (69)

/4 (19) No ﬂanges 2.00 (50 .8) 4.25 (108) 6.2 6 (159) 2.7 3 (69)

/4 (19) Ro tatabl e 1.33 CF 2.50 (63.5) 4.75 (121) 6.7 6 (172) 2.73 (69) 1 (25) No ﬂanges 1.88 (47.8) 4.00 (102) 6.0 2 (153) 2 .73 (69) 1 (25) Rot atable 2.12 CF 2.05 (52.1) 4.17 (106) 6.19 (157) 2 .73 (69)

11/2 (38) No ﬂanges 2.25 (57.2) 4.98 (126) 7.56 (19 2) 3.25 (8 3) 11/2 (38) Rota table 2.75 CF 2.46 (62.5) 5.19 (132) 7.77 (197) 3.25 (83)

2 (50) No ﬂanges 3.25 (82.6) 6. 62 (168) 11. 23 (28 5) 4.0 5 (103) 2 (50) Rotatable 3.38 CF 3.4 8 (88.4) 6 .85 (174) 10.58 (269) 4. 05 (103)

21/2 (63) No ﬂanges 3.00 (76. 2) 7.18 (182) 10.10 (257 ) 4.61 (117) 21/2 (63) Rotatable 4.50 CF 3.3 8 (85.9) 7.56 (192 ) 10.4 8 (266) 4.61 (117)

3 (76) No ﬂanges 3.25 (82.6) 7.62 (194) 11.00 (279) 5.62 (143) 3 (76) Rot atable 4.6 2 CF 3 .53 (89.7) 7.9 0 (2 01) 11.28 (287) 5.62 (143)

4 (100) No ﬂanges 4.22 (10 7. 2) 9 .55 (243) 14.99 (381) 6.73 (171) 4 (100) Rota table 6.0 0 CF 4.66 (118.4 ) 9.99 ( 254) 15.43 (3 92) 6.73 (171)

Pneumatic Tee Valves

SPECIFICATIONS

Port OD s:

3/8 to 4 inch es (10 to 100mm )

Materials

Body:

Electro polished 304 s tainless stee l

Bellows:

Other O-ring compounds available

Actuation: N ormally closed 3/8 to 2 in ch (9.5- 50.8mm ) ODs:

spring-to-close

air-to -clo se See page 101 for more actuatio n options

Operating pressure: Differential pressure: Maximum 6 p si (0.4 b ar)

dif ferential ac ross the valve s eat

Maximu m temperatur e with Viton sea ls

Vacuum range

Options:

micro-sw itches and actuato rs. See page 101

Thermal:

available for all valve s. See page 127

Welded AM -350 stainless s teel

Bonnet s eal: Poppet seal:

21/2

Sustained: Intermittent:

Viton bo nnet seal : Coppe r bonnet se al:

Copper or Vi ton Viton

to 4 inch ( 63.5-102mm) OD s:

60 to 80 psig ( 4-5.5 bar)

<150°C

<204°C

>1x 10

Fittings, O-rings, air solenoids,

Heater jacket s and controller s

>1x 10

Air-to-open,

-9

mbar - High Vacuum

-10

mbar - UHV

CSVP-T O-Ring

ESVP-T O-Ring Kits

MODEL NUMBER

ESVP-075-95 ESVP-150- 95 ESVP-200-95 ESVP-250-95 ESVP-300-95 ESVP-400-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

4 (100)

& Gasket Kits

MODEL NUMBER

CSVP-075-95 CSVP-150- 95 CSVP-200-95 CSVP-250-95 CSVP-300-95 CSVP-400-95

NOMINAL

PORT O D

/8-1 (10-25)

11/2 (38)

2 (50)

21/2 (63)

3 (76)

4 (100)

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.

1

Page 16

SECTION 3.3

SPECIFICATIONS

Port OD s:

3/4 to 11/2 inche s (19 to 38mm)

Materials

Body:

Electro polished 304 s tainless stee l

Bellows:

Other O -ring compounds available

Manual actuation:

bronze nuts w ith ACME threads

Pneumatic actuation: Norma lly closed 3 /4 inc h (19.05mm ) ODs:

spring-to-close

air- to- clos e See page 99 fo r more actuation opti ons

Operating pressure: Differential pressure: Maximum 20psi (1.4bar)

dif ferentia l across the va lve seat

Maximum

Vacuum range

Options:

micro- switches and a ctuators. Se e page 101

Thermal:

available for all v alves. See page 127

Welded AM -350 stainless s teel

Bonnet s eal: Poppet seal:

11/8

Sustained: Intermittent:

Viton bo nnet seal : Coppe r bonnet seal :

Copper or Vi ton

Viton

Self-lubricating

to 11/2 inch ( 29-38m m) ODs:

60 to 80 psig ( 4-5.5 bar)

temperature with Viton seals

<150 °C

<204° C

>1x 10-9 mbar - High Vacuum

>1x 10

Fittings, O-rings, air solenoids,

Heater jacket s and controllers

Air-to-open,

-10

mbar - UHV

Isolation Valves

Straight-Through Valves

Straight-Through ValvesStraight-Through Valves

Manual Viton Seal Straight-Through Valves

MODEL NUMBER

STV-075 STV-0752-CF STV-0752-NWB ST V-112 ST V-112 2-CF STV-1122-NWB ST V-15 0 ST V-15 02- CF STV-1502-NWB

Manual Copper Seal Bonnet Straight-Through Valves

MODEL NUMBER

CSTV-075 CSTV-0752-CF CSTV-150 CSTV-1502-CF

Pneumatic Viton Seal Straight-Through Valves

MODEL NUMBER

STVP-075 STVP-0752-CF STVP-0752-NWB ST VP-112 ST VP-1122-CF STVP-1122-NWB

ST VP-150 ST VP-150 2-C F STVP-1502-NWB

PORT IDNOMINAL

0.65 (16. 5)

0.65 (16. 5)3/4 (19) Rota table 1.33 CF 6.0 0 (152) 3.3 0 (84) 4.5 0 (114) 2.25 (57)

0.65 (16. 5)

1.0 0 (25.4 ) 1

1.0 0 (25.4 ) 11/8 (29) Rot atable 2.12 CF 5 .83 (148) 3. 86 (98) 5.15 (131) 3.00 ( 76)

1.0 0 (25.4 ) 11/8 (29) NW-40B 5.80 (147 ) 3.86 (98) 5 .15 (131) 3.00 ( 76)

1. 38 ( 35.1) 11/2 (38) No ﬂanges 7.00 (178) 5.47 (13 9) 7.69 (195) 3.50 (89)

1. 38 ( 35.1) 11/2 (38) Rot atable 2.75 CF 7.42 (188) 5.47 (139) 7.69 (195 ) 3.50 (89)

1. 38 ( 35.1) 1

PORT IDNOMINAL

0.65 (16. 5)

0.65 (16. 5)3/4 (19) Rota table 1.33 CF 6.00 (15 2) 3.51 (89) 4.71 (120 ) 2.73 (6 9)

1. 38 ( 35.1) 11/2 (38) No ﬂanges 7.00 (178) 5. 47 (139) 7.69 (195) 4.0 5 (103)

1. 38 ( 35.1) 1

PORT O D DESCRIPTION

/4 (19) No ﬂanges 5.00 (127) 3.30 (84 ) 4.50 (114) 2.25 (57)

/4 (19) NW -16B 5.3 0 (135) 3.30 (84) 4.50 (114) 2.2 5 (57)

/8 (29) No ﬂanges 5.50 (14 0) 3.86 (98) 5.15 (131) 3. 00 (76)

/2 (38) NW-40B 7.30 (18 5) 5.47 (139) 7.69 (195) 3. 50 (89)

PORT O D DESCRIPTION

/4 (19) No ﬂanges 5.0 0 (127) 3. 51 (89) 4.71 (120) 2.7 3 (69)

/2 (38) Rot atable 2.75 CF 7.42 (188) 5.47 (139) 7.69 (195) 4.05 (103)

PORT IDNOMINAL

0.65 (16. 5)

0.65 (16. 5)3/4 (19) Rota table 1.33 CF 6.0 0 (152) 3.9 2 (100) 2.25 (57)

0.65 (16. 5)3/4 (19) NW -16B 5.30 (135) 3.92 (100) 2. 25 (57)

1.0 0 (25.4 ) 11/8 (29) No ﬂanges 5.50 (14 0) 5.10 (130) 3. 00 (76)

1.0 0 (25.4 ) 11/8 (29) Rot atable 2.12 CF 5.83 (148) 5.10 (130) 3.0 0 (76)

1.0 0 (25.4 ) 11/8 (29) NW-40B 5.80 (147) 5.10 (130) 3. 00 (76)

1. 38 ( 35.1) 11/2 (38) No ﬂanges 7.00 (178) 6.11 (155) 3. 50 (89)

1. 38 ( 35.1) 11/2 (38) Rot atable 2.75 CF 7.42 (188) 6 .11 (155) 3.5 0 (89)

1. 38 ( 35.1) 11/2 (38) NW-40B 7.30 (185) 6.11 (155) 3 .50 (89)

PORT O D DESCRIPTION

/4 (19) No ﬂanges 5. 00 (127) 3.9 2 (100) 2. 25 (57)

STV O-Ring Kits

MODEL NUMBER

ESV-075-95 ST V-112-95 ST V-15 0-95

NOMINAL

PORT O D

/4 (19) 11/8 (29) 11/2 (38)

CSTV O-Ring & Gasket Kits

MODEL NUMBER

CSV-075-95 CSV-150 -9 5

NOMINAL

PORT O D

/4 (19)

11/2 (38)

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless other wise noted.

1

Pneumatic Copper Seal Bonnet Straight-Through Valves

MODEL NUMBER

CSTVP-075 CSTVP-0752-CF CSTVP-150 CSTVP-1502-CF

PORT IDNOMINAL

0.65 (16. 5)

1.3 8 (35. 0) 11/2 (38) No ﬂanges 7.00 (178) 6.11 (155) 4. 05 (103)

1.3 8 (35. 0) 11/2 (38) Rot atable 2.75 CF 7.42 (188) 6.11 (155) 4.05 (103)

PORT O D DESCRIPTION

/4 (19) No ﬂanges 5.0 0 (127) 3.92 (10 0) 2.7 3 (69)

/4 (19) Rota table 1.33 CF 6 .00 (152) 3.92 (10 0) 2.7 3 (69)

CSTVP O-Ring

STVP O-Ring Kits

MODEL NUMBER

ESVP-075-95 ST VP-112-95 ST VP-150 -9 5

Ultra-High Vacuum Components Since 1962 • www.n-c.com

NOMINAL

PORT O D

/4 (19) 11/8 (29) 11/2 (38)

& Gasket Kits

MODEL NUMBER

CSVP-075-95 CSTVP-150-95

NOMINAL

PORT O D

/4 (19)

11/2 (38)

Page 17

Isolation Valves

Ultra-High Vacuum Components Since 1962 • www.n-c.com

Replacement Parts & Rebuild Kits

Complete Valve Rebuild Kits

Contains all items except valve body (#7), refer to kit contents diagram at right.

MODEL NUMBER

CSV-075-99 CSV-150 -9 9 CSV-200-99 CSV-250-99 CSV-300-99 CSVP-075-99 CSVP-150- 99 CSVP-200-99 CSVP-250-99 CSVP-300-99 CSVP-400-99 ESV-075-99 ESV-150 -9 9 ESV-200-99 ESV-250-99 ESV-300-99 ESVP-075-99 ESVP-150- 99 ESVP-200-99 ESVP-250-99 ESVP-300-99 ESVP-400-99 ST V-112-99 ST VP-112-99 ST V-15 0-99 ST VP-150 -9 9

FO R VALVE MODEL NUMBERS

CSV, CILV and C AIV, -038 to -10 0 CSV, CILV and C AIV-150 CSV, CILV and C AIV-200 CSV, CILV and C AIV-250 CSV, CILV and C AIV-300 CSVP, CILVP and C AIVP, -038 to -100 CSVP, CILVP and CAIVP-150 CSVP, CILVP and CAIVP-200 CSVP, CILVP and CAIVP-250 CSVP, CILVP and CAIVP-300 CSVP, CILVP and CAIVP-400 ESV, ILV, AIV, ST V, -03 8 to -100 ES V, ILV, A IV, ST V, -15 0 ESV, ILV and A IV-200 ESV, ILV and A IV-250 ESV, ILV and A IV-300 ESVP, ILVP, AIVP, STVP, -038 t o -100 ESVP, ILVP, AIVP, STVP, -150 ESVP, ILVP and AIVP-200 ESVP, ILVP and AIVP-250 ESVP, ILVP and AIVP-300 ESVP, ILVP and AIVP-400 ST V-112 ST VP-112 ST V-150 ST VP-15 0

Kit Contents Diagram

1. Air cylinder

2. Stem O -ring*

3. Retaining plate

4. Center plate

5. Stem shaft

6. Set screw

7. Body

8. Air ﬁlter

9. Air cylinder spring

10. Jam nut

11. Spring retainer

12. Piston cup

13. Bonnet screws

14. Air cylinder O-ring

15. Body ﬂange O-ring or gasket

16. Bellows assembly

17. Poppet O-ring

* 2 inch (50) ID valves are assembl ed

with two ste m O-rings.

SECTION 3.3

12 13

O-Ring or Gasket Kits

MODEL NUMBER

ESV-075-95 ESV-150 -9 5 ESV-200-95 ESV-250-95 ESV-300-95 ST V-112-95 ST V-15 0-95 ESVP-075-95 ESVP-150- 95 ESVP-200-95 ESVP-250-95 ESVP-300-95 ESVP-400-95 ST VP-112-95 ST VP-150 -9 5 CSV-075-95 CSV-150 -9 5 CSV-200-95 CSV-250-95 CSV-300-95 CSTV-150-95 CSVP-075-95 CSVP-150- 95 CSVP-200-95 CSVP-250-95 CSVP-300-95 CSVP-400-95 CSTVP-150-95

KIT CONTENTS

(See drawing) FOR VALVE MODEL NUMBERS

2, 14, 15, 17 ESV, AI V, ILV, ESV-T, STV, -038 to -100 2, 14, 15, 17 ESV, AI V, ILV, ESV-T, -150 2, 14, 15, 17 ESV, AI V, ILV, ESV-T, -200 2, 14, 15, 17 ESV, AI V, ILV, ESV-T, -250 2, 14, 15, 17 ESV, AI V, ILV, ESV-T, -300 2, 14, 15, 17 ST V-112 2, 14, 15, 17 ST V-150 2, 14, 15, 17 ESV P, AI VP, ILVP, ESVP-T, STVP, -03 8 to -100 2, 14, 15, 17 ESVP, AIVP, ILVP, ESVP-T, -150 2, 14, 15, 17 ESVP, AIVP, ILVP, ESVP-T, -200 2, 14, 15, 17 ESVP, AIVP, ILVP, ESVP-T, -250 2, 14, 15, 17 ESVP, AIVP, ILVP, ESVP-T, -300 2, 14, 15, 17 ESVP, AIVP, ILVP, ESVP-T, -400 2, 14, 15, 17 ST VP-112 2, 14, 15, 17 ST VP-15 0 2, 14, 15, 17 CSV, CAIV, CILV, CSTV, -0 38 to -100 2, 14, 15, 17 CS V, CA IV, CI LV, -150 2, 14, 15, 17 CS V, CA IV, CI LV, -20 0 2, 14, 15, 17 CS V, CA IV, CI LV, -25 0 2, 14, 15, 17 CS V, CA IV, CI LV, -30 0 2, 14, 15, 17 CSTV-150 2, 14, 15, 17 CSV P, CA IVP, CILVP, CSTV P, -0 38 to -100 2, 14, 15, 17 CSVP, CAIVP, CILVP, -150 2, 14, 15, 17 CSVP, CAIVP, CILVP, -200 2, 14, 15, 17 CSVP, CAIVP, CILVP, -250 2, 14, 15, 17 CSVP, CAIVP, CILVP, -300 2, 14, 15, 17 CSVP, CAIVP, CILVP, -400 2, 14, 15, 17 CSTVP-150

Bellows Assembly Kits

MODEL NUMBER

CSV-075-16K CSV-150 -16K CSV-200-16K CSV-250-16K CSV-300-16K CSVP-400-16K ESV-075-16K ESV-150 -16K ESV-200-16K ESVP-200-16K ESV-250-16K ESVP-250-16K ESV-300-16K ESVP-300-16K ESVP-400-16K

CONTENTS

(See drawing) FOR VALVE MODEL NUMBERS

6, 16, 17 CSV, CILV, CAI V, CST V, manu al or pneuma tic, -03 8 to -100 6, 16, 17 CSV, CILV, CAI V, CST V, manu al or pneuma tic, -150 6, 16, 17 CSV, CILV, CAI V, manu al or pneuma tic, -200 6, 16, 17 CSV, CILV, CAI V, manu al or pneuma tic, -250 6, 16, 17 CSV, CILV, CAI V, manu al or pneuma tic, -300 6, 16, 17 CSV P and CILVP-4 00 6, 16, 17 ESV, ILV and A IV, manual or p neumatic, -03 8 to -100 6, 16, 17 ESV, ILV and A IV-150, manu al or pneuma tic 6, 16, 17 ESV, ILV and A IV-200, m anual 6, 16, 17 ESV P, ILVP a nd AIVP- 200, pneu matic 6, 16, 17 ESV, ILV and A IV-250, m anual 6, 16, 17 ESV, ILV and A IV-250, p neumatic 6, 16, 17 ESV, ILV and A IV-300 , manual 6, 16, 17 ESV, ILV and A IV-300 , pneumati c

16, 17 ESV, ILV and A IV-400, manua l or pneumat ic

1

Page 18

SECTION 3.5

SPECIFICATIONS

Port OD s: 3/4 to 2 inches (19 to 50mm).

Lar ger sizes and metric tu bing diameters available on request

Mating ﬂanges: Air ﬁtt ings: 5/32 inch (4 ) One-Touch Materials

Body: Bell ows: W O -rings:

Other compounds available.

Air cylinder:

Service interval: Actuation: Operating pressure: 60 to 80 psig ( Differential pressure: Maximum 20 psi (1.4bar)

differenti al across the valve se at.

Helium l eak rate: < Operating temperature

Sustained: < Intermittent: <

Options:

oriﬁce, position indicators, air solenoids, and various O -ring compound s

Thermal:

Se e page 120

Heaters , insulators, replace ment parts and valve rebuil d kits are located o n Page 120

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.

NW -16 through 50 stand ard

Electro less nickel coated alum inum

elded AM -350 stainless s teel

Viton standard

Teﬂon coated alumi num

One million cycles

Air-to-open/spring-to-close

1x10-9 mbar l /sec.

150 ºC

204ºC

Soft Star t actuator with or w ithout

Heaters and insulators available.

4 -5.5 bar)

Isolation Valves

Genesis Modular Valves

The Genesis modular vacuum valve system provides equipment designers with unlimited possibilities for d

ownstream vacuum subassemblies. Nippleless valve bodies and block ﬁttings can be assembled by two attachment methods using universal I

SO-KF centering ring/O -ring hardware, providing maximum ﬂexibility and the smallest footprint possible.

Simple and robust, Genesis valves are rated at one million cycles before service. During testing, these valves were cycled millions of times while maintaining vacuum integrity. The welded bellows is AM-350 stainless steel for corrosion r

esistance, longevity and ﬂexibility. The bellows fully retract from the side port when the valve is open, eliminating buildup of process by-products on the bellows and subsequent particle genera tion during operation. Valve center plates have been eliminated in order to provide precise alignment between the poppet and valve seat. A composite stem bush ing resists wear even at high temperatures. Valve return springs are shot peened in order to provide millions of cycles without loss of force. Teﬂon coated air cylinders feature a 15 micron air ﬁlter to prevent particle migration either into or out of the air cylinder.

Genesis Aluminum Modular Valves

MODEL

NOMINAL

NUMBER

GNV-072

GNV-102

GNV-152

GNV-202

Note:

PORT O D FLANGE A

/4 (19) N W-16 1.15 (2 9.2 ) 2.31 (58.7 ) 3 .0 4 ( 77. 2) 1 .4 6 (3 7.1) 12-24

1 (25) NW-25 1.0 6 (26.9 ) 2 .13 ( 54.1 ) 3.1 4 (7 9.8 ) 1 .4 6 (3 7.1) 12-24

/2 (38) NW-40 1. 25 (3 1.8) 2.50 (63.5) 3.71 (94.2) 1.88 (47.8) 12-24

2 (50) NW-50 1.6 3 (41.4) 3.2 5 (82.6) 4.44 (113) 2.25 (57.2)

For option descriptions and how to add options, see next page.

Teflon Coated Air Cylinder

Double Acting Air Piston

Main Valve Stem

Genesis valves and ﬁttings have a patented nippleless body, which provides the highest conductance and smallest footprint avail able. Air solenoids, open /closed position i

ndicators, and soft start actuators can be added with no addition to size. All valves are designed for easy O-ring or bellows replacement. Design symmetr y allows the air actuator to be oriented at 90º increments for easy access to the air solenoid and visibil ity of position indicators.

Soft Start Stem Option

High Temp. Composite Stem Bushing

Welded AM-350 Bellows

Interchangeable Orifice

Nickel Coated Aluminum Body

Bulkhead Attachment to Chamber with

Genesis Valve with Soft Start Actuator

Double Stud Fasteners

enesis valve bodies and ﬁttings are

electroless nickel coated aluminum for

excellent thermal characteristics and

Optional Modular Heater

Genesis Tee Fitting

Foreline to

Vacuum Pump

VCR Test Port attached with Finger Clamps

Finger Clamp Attachment

corrosion resistance. Components are machined from solid 6061-T6 aluminum to eliminate welds, leak paths and entrapments. All tapped holes are supplied with stainless steel threaded i

nserts for long term serviceability.

D THREAD

/4-20

BOLT

CIRCLE

2.031

(51.59)

2.031

(51.59)

2.616

(66.45)

3.406

(86.51)

Conductance

The conductance values in the table below have been calculated for air at room temperature using the formulas for tubes and elbows presented in the third edition of Roth’s Vacuum Technology:

ﬂow, Port lengths without ﬂanges and inner diameters for the valve sizes and conﬁgurations were used. This method is an approxima tion, use values accordingly.

Note: P

v=182 (D

/L’) P for viscous ﬂow or Cm=12( D3/L’) for molecular

GENESIS

VALV E

GN V-10 21 717 GN V-15 59 3115 GNV-20 114 8183

=air at 1 mbar.

MOLECULAR FLOW

CM (LITERS/ SEC.)

L’=Laxial +1.33(0/180)D

VISCOUS FLOW

CV (LITERS/ SEC.)

for elbows.

1

Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 19

Isolation Valves

Ultra-High Vacuum Components Since 1962 • www.n-c.com

Genesis Modular Valve Options

SECTION 3.5

Follow this part tree to add one or more options to a Genesis valve. Add options to the basic valve part number in the order shown. E

Orifice Option Position Indicator O-ringValve Model Number Air Solenoid

xample: GNV-152-S2-P10-KT-B21

Soft Start Valve Actuator Option

For reduced particle contamination in load locks and process chambers, Genesis valves can be provided with a patented low cost soft start actuator with no increase in valve size. A double-acting air piston, opens a soft start circuit inside the valve when air is supplied to the top of the air cylinder. The soft start by-pass opening can be provided fully open or with a speciﬁed oriﬁce, depending on the desired pumpdown. (See diagram.) After the chamber has been pumped from atmosphere to the desired cross over pressure, the main valve circuit is opened by supplying air to t

he bottom of the air c ylinder. Each circuit can be operated independently and is

air-to-open, spring-to-close.

Oriﬁce Option

OPTION

-S0

-S1

-S2

-S3

NOTE:

VALV E

SIZE

No oriﬁce

/4 - 2 (19-50) .14 7 (3. 7)

/4 - 2 (19-50) .10 9 (2 .8)

/4 - 2 (19-50) .070 (1.8)

Refer to diagrams for oriﬁce selection

ORIFICE

SIZE

Oriﬁce Parts & Kits

MODEL NUMBER

GNV-075-SO-1 GNV-075-SO-2 GNV-075-SO-3 GNV-075-SO-K GNV-075-SO-T

* Kits include all oriﬁce sizes and an installation

wrench for the speciﬁed valve size

VALV E

SIZE

/4 - 2 (19-50) .070 (1.8)

/4 - 2 (19-50) .10 9 (2 .8)

/4 - 2 (19-50) .14 7 (3 .7)

/4 - 2 (19-50) Kit*

All Wrench

ORIFICE

SIZE

Position Indicator Option

Nor-Cal’s CE certiﬁed, shielded, open /closed position indicators detect the piston position in the valve’s air cylinder. The technician has a visual indication of power to t he c

ircuit (12 to 24 VDC) and the valve position, as does the operator watching the panel. With the soft start option only one position indicator can be provided for the fully open position. Operating temperature range is -25ºC to 70ºC for valves with position indica tors. Call for more information on heated valves with position indicators.

OPTION

-P1O

-P1C

-P2

Refer to diagram below for dimensions.

VALV E

ACT UATO R

Soft Start/St andard 1 pos ition indica tor - main val ve open only

Standard 1 pos ition indica tor - main val ve closed onl y Standard 2 pos ition indica tors - main va lve open & clo sed

DESCRIPTION

Valve/Oriﬁce Pumpdown Curves Charts

Diagram A -

11/2 or 2 inch valve on 30 Liter Chamber

800

700

600

500

400

300

Chamber Pressure (Torr)

200

100

05 10 15 20 25

800

700

600

500

400

300

200

Chamber Pressure (Torr)

100

0306090 120 150 180 210

Main Valve

11/2 & 2 inch valves tested on a 30 liter chamber

TYPICAL PUMP-DOWN

WITH SOFT-START

Open soft-start with 0.070" orifice

Open valve at desired

cross-over pressure

Only

TIME (Seconds)

No Orifice

0.147" Orifice

0.109" Orifice

0.070" Orifice

TIME (Seconds)

35 40

Air Solenoid & Position Indicator Dimensions

SIZE A B C D

2.55

4.82

/4 (19)

1 (25)

/2 (38)

2 (50)

(64.8)

2.55

(64.8)

2.73

(69.3)

3.11

(79.0)

(122)

4.82

(122)

5.31

(135)

6.05

(154)

3.76

(95.5)

3.76

(95.5)

4.06

(103)

4.42

(112)

1.66

(42.2)

1.66

(42.2)

1.82

(46. 2)

2.03

(51.6)

O-ring Option

Genesis modular valves use chemical resistant Viton O -rings for closure. Viton O-rings should not be heated to above 204°C. Even prolonged exposures of 150°C may degrade the O -rings. High temp Kalrez O-rings allow valve bakeouts to 220°C inter mittently or 170°C for extended periods. Silicone O-rings provide adequate sealing p

erformance in thermal cycling from -55°C to 230°C.

OPTION

Standard

-KT

-KC

-CR

-S

COMPOUND

Viton -29ºC 204ºC Industry standard Kalr ez 4079 -50ºC 316 ºC High temperatures Kalrez 2037 -54ºC 220ºC Chemical resistant

Che mraz 513 -30ºC 210ºC Chemical resistant

Silicone -55ºC 232ºC Extreme temps

TEMPERATURE

MIN. M AX. DESCRIPTION

Air Solenoid Option

Low 1.8 wattage, CE certiﬁed air solenoids in several current ratings can b e provided on the valve, ready to attach to the house air supply. One three-way air solenoid is required for a standard Genesis valve and two thre e-way air solenoids are required for a soft star t v

ersion. This option includes 24 inch (610) quick disconnect elec trical leads and one-touch air ﬁttings. Remote mount required on heated valves. Air solenoids can also be supplied as a kit with assembly hardware and instructions. Kit part numb ers are in the second column below.

OPTION

-A11 A11-K

-A21 A21-K

-A31 A31-K

-A41 A41-K

-B11 B11-K

-B21 B21-K

-B31 B31-K

-B41 B41-K

Refer to diagram at left for dimensions.

KIT

ACT UATO R DESCRIPTION

Standard 120 VAC, 50/ 60 Hz 1 Standard 24 VDC 1 Standard 240 VAC, 50 /60 Hz 1 Standard 24 VAC, 50/6 0 Hz 1 Sof t Start 120 VAC, 50/ 60 Hz 2 Sof t Start 24 VDC 2 Sof t Start 240 VAC, 50/ 60 Hz 2 Sof t Start 24 VAC, 50/6 0 Hz 2

Valve heaters , insulators, rebuild a nd replaceme nt part kits are lo cated on page 120

/32 inch (4)

QUANTITY

1

Page 20

SECTION 3.5

0.815

0.15

0.375

Isolation Valves

Genesis Modular Valve Assembly Hardware

Finger Clamp Component Assembly

Stainless steel ﬁnger clamps allow a standard ISO-KF ﬂange to be attached directly to a Genesis valve or ﬁtting using a standard ISO-KF centering ring and O -ring. Elbows, reducers, chamber ports, roughing l

ines, or other vacuum components can be attached directly to valve bodies or ﬁttings with ﬁnger clamps. Unnecessary valve ports have been eliminated, shortening the gas path and increasing system conductance. For ultimate versatility standard nipples and elbows can be attached with ﬁnger clamps in order to make a drop-in replacement valve, such as an angle-in-line or tee valve. Once the ﬁnger clamp bolt is loosened it can be pivoted out of the way in order to r

emove or install the ﬂange and centering ring. The ﬁnger clamp does not need to be removed from the valve or ﬁtting. The clamp is self-aligning when tight ened, for ease of ﬂange installation. Each kit contains four ﬁnger clamps, hex h

ead bolts and washers for one connection.

MODEL NUMBER

GNC P-15 0- S GNCP-200-S

VALV E

SIZE

/4 to 11/2 (19 to 38) 12-24 x 7/8 6.8 N m.

2 (50)

BOLT

/4-20 x 7/8 11.3 Nm.

TORQUE

Block Subassemblies with Double Stud Fasteners

Stainless steel double stud fasteners allow two Genesis components to be connected using a standard ISO-KF centering ring and O-ring. Special subassemblies, such as diverter valves or roughing/high vacuum circuits can be assembled quickly using double stud fasteners with valves and block ﬁttings. These subassemblies can be provided as a unit from Nor-Cal or you may choose to assemble them from individual components. They are ideal for limited space i

nstallations, such as on cluster tool frames, and provide highest conductance, while eliminating unnecessary hardware. Double stud fasteners can be used to make a bulkhead attachment from a valve directly to a chamber. Stud fasteners can be installed using a jeweler’s screw driver and a 3/8 inch (9.53) ignition wrench. An installation tool for stud fasteners is provided with each stud fastener kit or assembly, or one can be purchased separately. Each kit contains four double stud fasteners for one connection and an installation tool.

MODEL NUMBER

GNS F-15 0 GNS F-15 0 GNS F-15 0- K GNSF-200 GNSF-200-K GNSF-T

VALV E

SIZE

/4 to 1 (19 to 25) (4) dou ble stud fa steners 12-24 0.63 (15.9) 2.3 (57.9) 4. 40 (111.8 )

11/2 (38) (4) double stu d fasten ers 12-24 0.63 (15. 9) 2. 7 (6 7.3 ) 5.15 (130.8)

/4 to 11/2 (19 to 38) (4) d ouble stud f astene rs with inst all tool 12-24 0.6 3 (15.9) - -

2 (50) (4) do uble stud f astener s 2 (50) (4) do uble stud f astener s with inst all tool

All Do uble stud ins tall tool - - - -

DESCRIPTION

THREAD

/4-20 0.73 (18.5) 3.4 (8 6.4) 6. 65 (168.9)

/4-20 0.73 (18.5) - -

Valve heaters , insulators, rebuild a nd replaceme nt part kits are lo cated on page 120



Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 21

Isolation Valves

Ultra-High Vacuum Components Since 1962 • www.n-c.com

SECTION 3.5

A Typ.

B Typ.

Genesis Modular Fittings

Genesis ﬁttings provide the most compact, highest conductance, corrosion resistant

OPTIONAL HEATER

vacuum connection available when used with Genesis valves, ﬁttings and double stud fasteners. These ﬁttings can also attach with ﬁnger clamps to standard ISO-KF components with universal O -rings, which are also available from Nor-Cal Products.

0.750B Typ.

90º Elbow

OPTIONAL HEATER

MODEL

NUMBER

GNF-102 GNF-152 GNF-202

VALV E

SIZE

1 (25) 2 .125 (54 .0) 1.063 (27.0) 12-24 2 .031 (51.6)

/2 (38) 2.500 (63.5) 1. 250 (3 1.8) 12-24 2.6 16 (66.4)

2 (50) 3.2 50 (82.6) 1.6 25 (41.3 )

THREA D

/4-20 3.406 (8 6.4)

Tee

MODEL NUMBER

GNF-103 GNF-153 GNF-203

VALV E

SIZE

1 (25) 2 .125 ( 54. 0) 1.063 (27.0) 12-24 2 .031 ( 51.6)

/2 (38) 2.500 (63.5) 1. 250 (3 1.8) 12-24 2 .616 (66. 4)

2 (50) 3. 250 (82.6) 1.62 5 (41.3)

THREA D

/4-20 3.40 6 (86.4)

BOLT

CIRCLE

BOLT

CIRCLE

SPECIFICATIONS

Port OD s:

50mm). Other size tubing diameters available

Body:

aluminum with SS thread ed inserts

O-rings : Assembly

Fitting to ﬁt ting:

Helium l eak rate: < Operating temperature

Sustained: Intermitten t:

Options:

1, 11/2 and 2 inch es (25, 38 and

Electro less nickel coated 6 061 T-6

Viton standard

Fittin g to ﬂange:

Double-stud fasteners Finger clamps

1x10-9 mbar l /sec.

150 ºC

Modular he aters and heater jacket s

204ºC

A Typ.

B Typ.

4-Way Cross

MODEL NUMBER

GNF-104 GNF-154 GNF-204

VALV E

SIZE

1 (25) 2 .125 ( 54. 0) 1.063 (27.0) 12-24 2 .031 ( 51.6)

2 (50) 3. 250 (82.6) 1.62 5 (41.3)

5-Way Cross

MODEL NUMBER

GNF-105 GNF-155 GNF-205

VALV E

SIZE

1 (25) 2 .125 (54 .0) 1.063 (27.0) 12-24 2 .031 (51.6)

2 (50) 3.2 50 (82.6) 1.6 25 (41.3 )

6-Way Cross

MODEL NUMBER

GNF-106 GNF-156 GNF-206

VALV E

SIZE

1 (25) 2 .125 (54 .0) 1.063 (27.0) 12-24 2 .031 (51.6)

2 (50) 3.2 50 (82.6) 1.6 25 (41.3 )

Tri-Bow

MODEL NUMBER

GNF-107 GNF-157 GNF-207

VALV E

SIZE

1 (25) 2 .125 (54 .0) 1.063 (27.0) 12-24 2 .031 (51.6)

2 (50) 3.2 50 (82.6) 1.6 25 (41.3 )

/2 (38) 2.500 (63.5) 1. 250 (3 1.8) 12-24 2 .616 (66. 4)

/2 (38) 2.500 (63.5) 1. 250 (3 1.8) 12-24 2.6 16 (66.4)

THREA D

/4-20 3.40 6 (86.4)

THREA D

/4-20 3.406 (8 6.4)

THREA D

/4-20 3.406 (8 6.4)

THREA D

/4-20 3.406 (8 6.4)

CIRCLE

BOLT

Heaters a nd insulators are availa ble on page 120



Page 22

SECTION 3.5

SPECIFICATIONS

Port OD s: 3/4 to 4 inches (19 to 100mm).

Lar ger sizes and metric tu bing diameters available on request

Mating ﬂanges:

standard

Air ﬁtt ings: 5/32 inch( 4mm) One-Touch Materials

Body: Bell ows: W O-rings:

(Other compounds available.)

Air cylinder:

Service interval: Actuation: Normally closed

Air-to-open/spring-to-close

Operating pressure: 60 to 80 psig ( Differential pressure: Maximum 20psi (1.4bar)

dif ferentia l across the va lve seat

Helium l eak rate: Operating temperature

Sustained: < Intermittent: <

Option:

indicator s, soft star t with various oriﬁ ce sizes and vario us O-ring comp ounds

NW -16 through ISO-100

304 st ainless steel

elded AM -350 stainless s teel

Viton standard

Teﬂon coated alumi num

One million cycles

<1x10-9 mbar l /sec.

150 ºC

Air solenoids, open/clo sed position

204ºC

4-5.5 b ar)

Isolation Valves

Genesis Stainless Steel Valves

Genesis stainless steel poppet valves offer equipment designers the high performance and optimized conductance of Genesis modular valves in Nor-Cal’s standard stainless steel poppet valve body. These simple, robust valves are available with standard and s

oft start air-to-open/spring-to-close actuation in port sizes from Other O-ring compounds, open /closed position indicators and air solenoids are available as options. Heater jackets and insulators are also available.

During testing, the valves were cycled millions of times while maintaining vacuum integrity. The welded bellows is AM-350 for corrosion resistance, longevity and ﬂexibility. The bellows fully retracts from the side port when the valve is open, eliminating b

uildup of process by-products on the bellows and subsequent particle generation during operation. Valve center plates have been eliminated in order to provide precise alignment between the poppet and valve seat. A composite stem bushing resists wear even at high temperatures. Valve return springs are shot peened in order to provide millions of cycles without loss of force. Teﬂon coated air cylinders feature a 15 micron air ﬁlter to prevent particle migration either into or out of the air cylinder. All valves are designed for easy O-ring or bellows replacement. Design symmetry allows the air actuator to be oriented at 90º increments for easy access to the air solenoid and visibility of position indicators.

For reduced particle contamination in load locks and process chambers, Genesis stainless steel valves are offered with a patented low cost soft start actuator with no increase in valve size. A double-acting air piston, opens a soft start circuit inside the valve when air is supplied to the top of the air cylinder. The soft start by-pass opening can be provided fully open or with a speciﬁed oriﬁce, depending on the desired pump down. After the chamber has been pumped from atmosphere to the desired cross over pressure, the main v

alve circuit is opened by supplying air to the bottom of the air cylinder. Each circuit can be operated independently and is air-toopen/spring-to-close. Soft start Genesis stainless steel valves are offered standard with no oriﬁce. Various oriﬁce size options and multiple size oriﬁce kits are available. See next page.

Conductance

This table has been calculated in liters per second for air at room temperature using the formulas for tubes and elbows presented in the third edition of Roth’s Vacuum Technology.

Cv=182 (D4/L’) P for vis-

cous ﬂow or C for molecular ﬂow

Note:

Calculations were based on port lengths without ﬂanges and inner diameters for the valve sizes and conﬁgurations.

= air at 1 mbar.

L’=Laxial +1.33(0/180)D

elbows.

/4 to 4 inches (19.05-101.6mm). Viton O-ring seals are standard.

m=12 (D

for

NOMINAL

PORT O D

/2 (13) 60 3 - -

/L’)

/4 (19) 135 5 120 4

1 (25) 391 12 285 9 11/8 (29) - - - 11/2 (38) 192 5 37 1324 25

2 (50) 4677 65 3459 48 21/2 (63) 123 32 136 7505 83

3 (76) 23763 217 12558 115

4 (100) 57994 396 - -

ANGLE

VISCOUS MOLECULAR

ANGLE-IN-LINE

VISCOUS MOLECULAR

Valve rebuild an d replacement par t kits are ava ilable on page 120

Genesis Stainless Steel Angle Valves

MODEL NUMBER

GNVS-072-NWB GNVS-072-NWB-S0 GNVS-102-NWB GNVS-102-NWB-S0

GNVS-152-NWB GNVS-152-NWB-S0 GNVS-202-NWB GNVS-202-NWB-S0 GNVS-302-ISO GNVS-302-ISO-S0 GNVS-402-ISO GNVS-402-ISO-S0

ACT UATIO N

Standard NW-16 Sof t Start NW -163/4 (19) 1. 50 ( 38.1 ) 3.4 0 (86) 4.78 (121) 1.4 6 (37) 2.1 3 (5 4) Standard NW-25 1 (25) 2.42 (61.47) 4.19 (106) 5.57 (141) 1. 46 (37 ) 2.1 3 (5 4) Sof t Start NW-25 1 (2 5) 2.42 (61.47) 4.19 (106) 5.57 (141) 1. 46 (37 ) 2.1 3 (5 4) Standard NW-40 11/2 (38) 2.49 (6 3.2) 4.51 (115) 6.2 0 (157) 1.8 8 (48) 2 .50 (63) Sof t Start NW-40 11/2 (38) 2.49 (6 3.2) 4.51 (115) 6.2 0 (157) 1.8 8 (48) 2 .50 (63) Standard NW-50 2 (50) 3.22 (81.9) 5.5 6 (141) 7.66 (19 5) 2.25 (57) 3. 25 (83) Sof t Start NW-50 2 (5 0) 3. 22 (81.9) 5. 56 (141) 7.66 (195) 2.25 (57) 3. 25 (83) Standard ISO-80 3 ( 76) 3.8 6 (98.0) 7.33 (18 6) 10.8 5 (276) 4.13 (105) 5.45 (13 8) Sof t Start ISO-80 3 (7 6) 3.86 (9 8.0) 7.33 (186 ) 10.85 ( 276) 4.13 (105) 5 .45 (138) Standard IS O-10 0 4 (100) 4.25 (108) 8.38 (213) 13. 04 (3 31) 5.00 (127 ) 6.40 (16 3) Sof t Start ISO-10 0 4 (100) 4.25 (108) 8.38 (213) 13. 04 (33 1) 5.00 (127) 6.4 0 (163)

FLANGE

TYPE

NOMINAL

PORT O D

/4 (19) 1. 50 ( 38.1 ) 3.4 0 (86) 4.78 (121) 1.4 6 (37) 2.1 3 (5 4)

Genesis Stainless Steel Angle-In-Line Valves

MODEL NUMBER

GNVSAI-072-NWB GNVSAI-072-NWB-S0 GNVSAI-102-NWB GNVSAI-102-NWB-S0 GNVSAI-152-NWB GNVSAI-152-NWB-S0 GNVSAI-202-NWB GNVSAI-202-NWB-S0 GNVSAI-30 2-ISO GNVSAI-302-ISO-S0 GNVSAI-402-ISO GNVSAI-402-ISO-S0

ACT UATI ON

Standard N W-16

Sof t Start NW-16

Standard NW-25 1 (2 5) 4.0 0 (102) 3.8 5 (98) 4.6 3 (118) 1.4 6 (37) 2.1 3 (5 4)

Sof t Start NW-25 1 (25 ) 4.00 (10 2) 3.85 (9 8) 4.63 (118) 1.46 (3 7) 2.1 3 (5 4)

Standard NW-40 1

Sof t Start NW-40 11/2 (38) 5.12 (130) 4.47 (114) 5.28 (13 4) 1. 88 (48 ) 2 .50 (63)

Standard NW-50 2 (50) 7.00 (178) 5.79 (147 ) 7.00 (178) 2.25 (57) 3. 25 (83)

Sof t Start NW-50 2 (50) 7.00 (178) 5.7 9 (147) 7.00 (178) 2.25 (57) 3.25 (83)

Standard ISO-80 3 (76) 10 .55 (26 8) 8.88 (2 26) 11. 62 (29 5) 4.13 (105) 5.45 (13 8)

Sof t Start ISO-80 3 ( 76) 10.5 5 (268) 8.8 8 (226) 11. 62 (2 95) 4.13 (105) 5.4 5 (138)

Standard I SO-10 0 4 (100) 12.00 (305) 10.7 5 (273) 13. 81 (351) 5.00 (127 ) 6.40 (16 3)

Sof t Start I SO -100 4 (10 0) 12.00 (305) 10.75 (2 73) 13 .81 (3 51) 5 .00 (127) 6 .40 (163)

FLANGE

TYPE

NOMINAL

PORT O D

/4 (19) 4. 20 (107) 3.76 (95) 4 .37 (111) 1.46 ( 37) 2 .13 (5 4)

/2 (38) 5.12 (130) 4.47 (114) 5.28 (13 4) 1. 88 (48 ) 2 .50 (63)

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Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 23

Isolation Valves

Ultra-High Vacuum Components Since 1962 • www.n-c.com

SECTION 3.5

Genesis Stainless Steel Valve Options

Follow this part tree to add one or more options to a Genesis valve. Add options to the basic valve part number in the order shown.

Orifice Option Position Indicator O-ringValve Model Number Air Solenoid

xample: GNVSAI-302-ISO-P1O-KT-A11

Oriﬁce Option

Genesis stainless steel valves with Soft Start actuation come standard with no oriﬁce. To order these valves with an oriﬁce replace the “S0” par t number sufﬁx with one of the following options. Example: Change standard valve part number

GNVS-072-NWB-S0

ORIFICE OPTION

-S0

-S1

-S2

-S3

-S4

3 & 4 (76 & 100) .05 5 (1.4)

-S5

3 & 4 (76 & 100) . 093 (2.4)

-S6

3 & 4 (76 & 100) .128 (3.3)

-S7

NOTE:

oriﬁce option selection

3 & 4 (76 & 100) .201 (5.1)

Refer to diagrams for

to GNVS-072-NWB-S1.

VALV E

SIZE

/4 to 2 (19-50) .14 7 (3 .7)

/4 to 2 (19-50) .10 9 (2 .8)

/4 to 2 (19-50) .070 (1.8)

No oriﬁce

ORIFICE

SIZE

ORIFICE REPLACEMENTS

GNV-075-S0-1 GNV-075-S0-2 GNV-075-S0-3 GNV-300-S0-1 GNV-300-S0-2 GNV-300-S0-3 GNV-300-S0-4 GNV-075-S0-K GNV-300-S0-K GNV-075-S0-T

* Kits include all oriﬁce sizes and an installation

wrench for the speciﬁed valve size

VALV E

SIZE

/4 to 2 (19-50) .070 (1.8)

/4 to 2 (19-50) .10 9 (2 .8)

/4 to 2 (19-50) .1 47 (3 .7) 3 & 4 (76 & 100) .055 (1.4) 3 & 4 (76 & 100) .09 3 (2.4) 3 & 4 (76 & 100) .128 (3.3) 3 & 4 (76 & 100) .201 (5.1)

/4 to 2 (19-50) Kit* 3 & 4 (76 & 100) Kit*

/4 to 4 (76 & 100) Wrench

ORIFICE

SIZE

Open/Closed Position Indicator Option

Nor-Cal’s CE certiﬁed, shielded, open /closed position indicators detect the piston position in the valve’s air cylinder. The technician has a visual indication of power to t he c

ndicators. Call for more information on high temperature position indicators.

OPTION

-P1O

-P1C

-P2

VALV E

ACT UATO R

Soft Start/St andard 1 po sition indic ator - main va lve open onl y

Standard 1 posi tion indica tor - main valv e closed onl y Standard 2 posi tion indicators - main valve open & closed

DESCRIPTION

Valve/Oriﬁce Pumpdown Curves Charts

800

700

600

500

400

300

200

Chamber Pressure (Torr)

100

0306090 120 150 180 210

800

700

600

500

400

300

200

Chamber Pressure (Torr)

100

0306090 120

11/2 & 2 inch valves tested on a 30 liter chamber

No Orifice

0.147" Orifice

0.109" Orifice

0.070" Orifice

TIME (Seconds)

3 and 4 inch valves tested with various Soft-Start orifices on a 30 liter

chamber and 232 CFM Edwards mechanical blower pump package.

No Orifice

0.201" Orifice

0.128" Orifice

0.093" Orifice

0.055" Orifice

10 20 40 50 70 80 100 110

TIME (Seconds)

O-ring Option

Standard Genesis valves are furnished with Viton O-rings which are resistant to most chemicals, but should not be heated to temperatures in excess 204ºC. Even prolonged e

xposures of 150ºC may degrade the O-rings. High temperature Kalrez O-rings allow the valve to be heated to 220ºC intermittently or 170ºC for prolonged periods .

OPTION

-KT

-KC

-CR

-S

COMPOUND

4079 K alrez High temperature 2037 Kalrez Chemical resistant 513 Chemraz Chemical resistant Silicone Extreme temperatures

APPLICATIONS

Air Solenoid Option

Low 1.8 wattage, CE certiﬁed three-way air solenoids can b e provided on the valve in several electrical current ratings, with 24 inch (610mm) quick disconnect electrical leads, and

/32 inch (3.97mm) one-touch air ﬁttings - ready to at tach to the house air supply. One sole noid is required for standard Genesis stainless valves. Two solenoids are required for sof t s

tart versions. Remote mount is required on heated valves. Air solenoid kit s with assembly hardware and instructions are available. Kit part numbers are in the second column below.

OPTION

-A11 A11-K

-A21 A21-K

-A31 A31- K

-A41 A41-K

-B11 B11-K

-B21 B21-K

-B31 B31-K

-B41 B41-K

KIT

ACT UATO R DESCRIPTION

Standard 120 VAC, 50 /60 Hz 1 Standard 24 VDC 1 Standard 240 VAC, 50 /60 Hz 1 Standard 24 VAC, 50/ 60 Hz 1 Sof t Start 12 0 VAC, 50/60 H z 2 Sof t Start 24 VDC 2 Sof t Start 24 0 VAC, 50/60 H z 2 Sof t Start 24 VAC, 50/6 0 Hz 2

QUANTITY



Page 24

SECTION 3.5

Optional Heater

SPECIFICATIONS

Compatible Valves: Genesis Modular Valves

Heaters a nd controllers for s tainless steel

Genesis Valves available. Call for details.

Insula tor Body: 1/2 inch (13mm) thick , trimable,

molded s ilicone construc tion. Touch safe exter ior

Heater Voltage:

11/2 and 2 inch (38 -50mm) val ves

Connections Powe r cord:

3-pin

AMP MR conn ectors stan dard on 11/2 & 2 (38 & 50 mm) inch valves

Certiﬁcation Insulators :

120 or 240 VAC standard

Set points: Manual reset: Low temperature alert:

Aler t cords:

Heater s:

120ºC or 150ºC

200º C with over temp shuto ff

12 inch (305mm) wi th AMP

Two 12 inch (305mm) with

UL 94 V- O

UL listed . CE certiﬁcatio n pending

standard on

Molded Insulator

Replaceable Set Point Thermostat

Resetable High Temp Thermostat

Isolation Valves

Genesis Heaters & Replacement Kits

Genesis Modular Valve Heaters & Insulators

A unique, UL listed modular heater provides 120ºC or 150ºC internal temperatures in valves or ﬁttings at a fraction of the cost of other heaters. Genesis heaters use thick ﬁlm technology to provide uniform heat throughout the component. Each heater contains a control set point and a resetable high temperature shut off. The 1 low temperature alert that can be connected to a remote alarm. Each thermostat can be replaced without destroying the heater. The same heater can be attached to a valve body or ﬁtting with two screws. A trim-to-ﬁt, molded insulator covers the heated component and mating ﬂanges. These clean room compatible insulators are constructed of silicone. When in use, the exterior surface remains touch-safe. Insulators meet UL 94 V-O requirements. Insulators for other components are available upon request. Heater jackets and controllers for Genesis Stainless Steel Valves are available. Call for information and pricing.

Heaters

MODEL NUMBER

HT-GN-100-120-1 HT-GN-100-150-1 HT-GN-150-120-1 HT-GN-150-150-1 HT-GN-200-120-1 HT-GN-200-150-1

NOTE: Replace “-1” with “-2” for 240V heaters.

VALV E

SIZE

/4 & 1 (19 & 25) 120ºC 120 2.13 (54 )

/4 & 1 (19 & 25) 150ºC 120 2 .13 (5 4)

11/2 (38) 120ºC 120 2.5 0 (63)

/2 (38) 150 ºC 120 2.5 0 (63)

2 (50) 120ºC 160 3.25 (8 3) 2 (50) 150ºC 160 3. 25 (83)

SET

POINT WATT S

Heater Insulators

MODEL NUMBER

HI- GN V-100 HI-GNV-150 HI-GNV-200

VALV E

SIZE

/4 & 1 (19 & 25) 6. 00 (152) 4.50 (114) 3.13 (80) 2 .50 (63) 3 .64 (92)

11/2 (38) 6. 63 (168) 5. 00 (127) 3.6 3 (92) 2.88 ( 73) 4.25 (108)

2 (50) 8.00 (203) 5. 88 (149) 4. 38 (111) 3 .31 (84) 5 .00 (127)

Heater Power Cords

MODEL NUMBER

HT-GN-PCD-6 HT-GN-PCD-12

LENGTH

6 ft .

12 ft .

/2 and 2 inch (38.1 and 50.8mm) sizes also have a

/2 inch (12.7mm) thick molded

0.75

Modular Thick

Film Heater

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.

Genesis Valve Assembly Kits and Replacement Hardware

The kits below are for use with Genesis modular valves and with Genesis stainless steel valves. First maintenance is recommended at one million cycles, depending on the cleanliness of the process. Typical valve service will require O-ring replacement.

Bellows assembly

Bellows Assembly Kits

Includes bellows, top ﬂange and poppet weldment assembly. Requires O -ring kit to seal.

KIT NUMBER

GNV-100 -16 GNV-100-16-S0 GNV-150 -16 GNV-150 -16-S0 GNV-200-16 GNV-200-16-S0 GNV-300-16 GNV-300-16-S0 GNV-400-16 GNV-400-16-S0

VALV E

SIZE

/4 & 1 (19 & 25) Standard

/4 & 1 (19 & 25) So ft Star t

11/2 (38) Standard

11/2 (38) S oft Star t

2 (50) Standard 2 (50) Sof t Start 3 (76) Standard

3 (76) Sof t Star t 4 (100) Standard 4 (100) Soft S tart

ACT UATO R

Viton O-Ring Kits

Includes bellows O-ring and poppet O-ring. Other O-ring compounds are available on request.

KIT NUMBER

GNV-100-95 GNV-100-95-S0 GNV-150-95 GNV-150-95-S0 GNV-200-95 GNV-200-95-S0 GNV-300-95 GNV-300-95-S0 GNV-400-95 GNV-400-95-S0

VALV E

SIZE

/4 & 1 (19 & 25) Standard

/4 & 1 (19 & 25) Soft S tart

11/2 (38) Standard 11/2 (38) S oft Star t

2 (50) Standard 2 (50) Soft St art 3 (76) Standard

3 (76) Soft St art 4 (100) Standard 4 (100) Sof t Start

ACT UATO R

Valve Rebuild Kits

Includes all standard parts except valve body and p osition indicator. Your valve’s position indicator type must be speciﬁed w

hen ordering. Example: GN V-150-99-S0- P10

KIT NUMBER

GNV-100-99 GNV-100-99-S0 GNV-150-99 GNV-150-99-S0 GNV-200-99 GNV-200-99-S0 GNV-300-99 GNV-300-99-S0 GNV-400-99 GNV-400-99-S0

VALV E

SIZE

/4 & 1 (19 & 25) Standard

/4 & 1 (19 & 25) Soft S tart

11/2 (38) Standard 11/2 (38) S oft Star t

2 (50) Standard

2 (50) Soft St art

3 (76) Standard

3 (76) Soft St art 4 (100) Standard 4 (100) Sof t Start

ACT UATO R

2

Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 25

SECTION 3.9

Isolation Valves

Bellowless Poppet Valves & Leak Valves

Pneumatic Bellowless Angle Valves

Right angle bellowless poppet valves are now available in sizes from 3/8 thru 11/2 inches (9.53-38.1mm). These valves are typically used for applications with large differential pressures, extremely high cycle rates or “dirty” processes that cause frequent bellows failures. Poppet shafts are sealed with double O-rings. Heater jackets and other port and ﬂange conﬁgurations are available on request.

MODEL NUMBER

ESVP-0382-NWB-5 ESVP-0752-NWB-5 ESVP-1002-NWB-5 ESVP-1502-NWB-5

NOMINAL

PORT O D

/8 (10) NW-10B 0.66 1.6 5 (41.9) 3.77 (96) 5.92 (15 0) 2.25 (57)

/4 (19) NW-16B 5.00 2.15 (54.6) 4 .27 (108) 6.41 (163) 2.25 (57) 1 (25) NW-25B 12.00 2 .03 (51. 6) 4. 03 (102) 6.17 (157) 2.25 (57)

/2 (38) NW-40B 128.00 2.4 0 (61.0 ) 5.13 (130) 7.71 (196) 3.00(76)

FLANGE

TYPE

L/SEC

(molecular)

SPECIFICATIONS

Nomina l Port ODs :

(10 to 38mm)

Materials

Body: Bonnet s eal: Poppet seal:

Other O-ring compounds available

Actuation: N ormally close d 3/8 to 11/2 inch

spring-to- close See page 101 for actu ation options

Operating pressure: Differential pressure

Por t side: Poppet:

differenti al across the valve se at.

Maximu m temperatur e with Viton sea ls

Sustained: Intermittent:

Vacuum range: Options:

micro- switches and a ctuators. Se e page 101

3/8 to 11/2 inches

Electro polished 304 s tainless stee l

Viton Viton

(10 to 38mm)

Maximum 100 p sig (7 bar)

Maximum 6 psi (0.4 bar)

<150°C

<204°C

>1x 10

Fittings, O-rings, air solenoids,

ODs:

Air-to-o pen,

60 to 80 psig ( 4-5.5 bar)

-9

mbar - High Vacuum

SPECIFICATIONS

Materials

Body:

Electro polished 304 s tainless stee l

Flanges

clearance bolt holes

Actuation: Maximum temperature

Vacuum range: Minimum l eak rate

Normal:

Inlet ga s pressure :

(34 bar)

Poppe t seat life

Unbaked: <250 ºC: <450ºC :

Inlet:

1.33 CF, rotatabl e,

Outlet:

2.75 CF, nonrotata ble,

Poppet:

Sapphire

Poppet seat:

Sustained: Intermittent:

Non-condensible gas:

Copp er

Manual, adjus table set point

<250°C

<450°C

>1x 10

-10

1x10

mbar l/sec.

maximum 50 0 psig

250 to 300 clo sures

80 to 100 closu res

20 to 30 closures

-11

mbar - UHV

1x10-8 mbar l/sec.

Replacement O-Ring & Valve Rebuild Kits

MODEL NUMBER

ESVP-075-95-5 ESVP-150-95-5

ESVP-075-99-5

ESVP-150-99-5

NOMINAL

PORT O D DESCRIPTION

/8-1 (10-25) O -ring kit

11/2 (38) O-r ing kit

/8-1 (10-25)

11/2 (38)

Compl ete rebuild k it, include s all valve pa rts exce pt valve body

Leak Valves

Leak valves are used for controlling gas introduction into high- and ultra-high vacuum systems. They utilize an optically ﬂat sapphire poppet and a metal seal seat, allowing bakeout temperatures to 450ºC. These valves are manually actuated by a cantilever arm with precision adjustment threads. The adjustment knobs can be set to allow controlled leak rates as small as 1x10 Replacement sapphire and gasket assemblies are available. Call for pricing.

MODEL NUMBER

LL-275 -133

1.750

(44.45)

Rotatable

4.350

(110.49)

-10

mbar l/sec

All dimensi ons are in inches (mm ) & weights are in pounds ( kg), unless othe rwise noted.

2

1.298

(32.97)

1.717

(43.61)

1.190

(30.23)

Nonrotatable

Ultra-High Vacuum Components Since 1962 • www.n-c.com

Page 26

Isolation Valves

Ultra-High Vacuum Components Since 1962 • www.n-c.com

SECTION 3.10

Isolation Valve Heaters

Poppet Valve, Ball Valve and Gate Valve Heaters

Many semiconductor processes are carried out in vacuum chambers with internal temperatures of several hundred degrees Celsius. Process by-products exit the chamber in vapor phase, but subli mate in the foreline and vacuum pump e

xhaust when gas temperatures drop sufﬁciently for them to form solids. The resultant buildup can increase wafer defects from particle backstreaming, reduce throughput of vacuum lines, impede the function of throttle valves and isolation valves, damage some dr y

pumps and reduce the ef ﬁciency of the scrubber. This buildup can be reduced or eliminated by heating vacuum lines and associated components from the chamber to the scrubber, or by using a combination of heaters and foreline traps, which collect the by-products preventing them from continuing downstream.

Heater jackets with a UL recognized electronic thermostat for ﬁxed set-point applications is available for temperatures up to 150ºC. For fully adjustable

temperature set-points up to 200 ºC, a UR/CE certiﬁed heater with a Type K thermocouple and PID controller can provide precise temperature control.

tandard ½” insulation add-on heaters are available for all poppet valves and gate valves. (Aluminum Genesis valves have their own integrated heater.) These can be purchased and installed separately provided that the valve is ﬁtted with the proper high temperature seals and other thermally compatible components.

Heater Jacket Part Number and Ordering Information

Please use the following part numbering tree to specif y the heater jacket to ﬁt your poppet valve or gate valve.

ote: All part number combinations may not be valid or available. Contact Nor-Cal

Product s for the latest pricing, availability and other options.

Control Type

CONTROL TYPE

PID con trol* Electronic thermostat

* Requires separate PID controller.

(See controllers Section 6.)

CODE

Valve Typ e

HC HTE

VALV E TYPE

Angle-in-line Manual Ball valve Pneumatic Ball Valve Angle valve SS Genesis (stainless steel) SS Gen esis angle -in-line Gate v alve with CF ﬂ ange Gate v alve with IS O ﬂange In-line valve N-Series angle N-Seri es angle-in-line

Example: HTE-NAP-150-091

Electronic thermostatically controlled heater jacket for 1.5 inch (38mm) N-Series angle valve, 90

CODE

AIV BVM BVP ESV GNVS GNVSAI GVC GVI ILV NAP NAIP

ºC, 120VAC.

Valve Size

4.00 (10 0)

6.00 (15 0)

8.00 (200)

10.00 (254)

VALV E SIZE

0.38 (10)

0.50 (13)

0.75 (19)

1.00 (25)

1.5 0 (38)

2.00 (5 0)

2.50 (6 3)

3.00 ( 76)

Control Type

Valve Type

CODE

038 050 075 100 150 200 250 300 400 600 800 1000

Valve Size Temp. / Voltage

Temperature/Voltage

TEMPERATURE & VOLTAGE

HC ty pe, 120 VAC HC Type, 2 08 VAC HTE t ype, 90 ºC, 120 VAC HTE t ype, 90 ºC, 208 VAC HTE t ype, 120º C, 120 VAC HTE t ype, 120º C, 208 VAC HTE t ype, 150º C, 120 VAC HTE t ype, 150º C, 208 VAC

CODE

201 202 091 092 121 122 151 152



2

Nor-Cal Isolation Valv Service Manual

Specifications and Main Features

Frequently Asked Questions

User Manual