............Unpacking and Installation ........................................................................................................................
...........Theory of Operation ................................................................................................................................
10.0
Appendix I
Appendix II - Warranty and Intellectual Property Coverage
RS-232 Serial Interface and Commands ..................................................................................................
....... How to Configure IQ+ for Your System ...................................................................................................
....... Overview and Setup ................................................................................................................................
......Object Model for the Process Control Valve Device ........
8.2
......Object State Transition Diagram ....................................
28
28
28
28
28
29
8
10
18
19
22
27
Information in this manual is subject to change without notice.
Call toll free 800-824-4166 or 530-842-4457 • FAX 530-842-9130
Contact Nor-Cal Products
Intellisys Customer Support
at 800-824-4166 ext. 186
or visit our website
at www.n-c.com
IQ+ OP-LIT 9/08
3
IntellIsys AdAptIve pressure Controllers
1.0 - Introduction
Thank you for purchasing the new Intellisys™ IQ+ downstream adaptive pressure controller from Nor-Cal Products. Before installing and operating the product,
please read this manual thoroughly as it contains critical correction, interface and operating tips. If you encounter any problems, or if you have any questions,
please contact our Intellisys Customer Service Support at 800-824-4166, ext. 186 or visit our web site at www.n-c.com.
Nor-Cal Products’ IQ+ pressure controllers are designed for downstream pressure control over a wide range of vacuum control applications. The IQ+ controller
is a self-contained unit that incorporates all control electronics and associated pressure control software. IQ+ controllers are available in Analog, DeviceNet and
Ethernet communication protocols. Buried box versions connect to the valve via a valve cable, while QPA, QPD and QPE controllers are mounted directly on the
valve. Any IQ+ controller, regardless of type, accepts the inputs from one or two pressure gauges as well as communications to the host controller, thus making
it the heart of a pressure control loop.
All models have local open/close switches, LED status lights and RS232 communication.
Important Personnel Safety and Product Protection Information
Throughout this manual, information that is of particular importance to the installation, the safety of operating personnel and the protection of equipment are highlighted by the following three symbols.
The WARNING symbol is also used on the equipment wherever necessary.
NOTE: Calls attention to helpful tips about proper
installation, maintenance or use of the controller.
CAUTION: Highlights areas of concern that, if overlooked, could
result in damage to the controller or surrounding equipment.
WARNING : Alerts the installation, operating or maintenance
personnel of hazardous aspects of the controller, which, if
ignored could result in serious personal injury or death.
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2.0 - Device Specification
The following tables summarize specifications essential to the installation and hook-up of the IQ+ product. Please note that the information herein is limited to
the IQ+ controller. For valve installation instructions and guidelines, please refer to the appropriate Valve Operating Manual.
TABLE 2.1 – IQ+ CONTROLLER GENERAL EQUIPMENT SPECIFICATIONS
FEATURESPECIFICATION
DimensionsPlease refer to the diagram specific to sections 3.1 to 3.5
Weight, in lbs (kg)1.1 lb (0.5 kg)
Rated Input Voltage24 VDC ±10%
Rated Current 5.0 A @ 24 VDC max, 1.5 A @ 24 VDC average
Rated Input
Protection
Gauge Power Supply
(Optional)
Protection ClassI
Degree of Protection
(IP)
Laser Class1 (LED’s)
Certifications/EU
Directives
Maximum Altitude6562 ft (2000 m)
Allowable Ambient
Operating
Temperature
Allowable Ambient
Humidity
Installation Clearance
FEATURESPECIFICATION
Analog (Gauge) Input0 to 10V differential
Analog Output0 to 10V unipolar @ 35 mA, short circuit protected
TTL Input
TTL OutputOpen collector, optically isolated, 25V @ 10 mA max
29 Volts max, reverse and current limited
± 15 VDC @ 1400 mA
X0
CE Standard for Process Equipment including EMC Directive
89/336/EC for D/C powered models..
32ºF to 113ºF (0ºC to 45ºC)
0 to 95% non-condensing
3” (75 mm) on all perforated sides. A minimum of 3½”
(90 mm) is needed to allow for connectors. If access and
line of sight is required for LED’s and switches a minimum
of 6” (150mm) is required on those sides.
TABLE 2.2 – IQ+ CONTROLLER ANALOG TTL I/O
Diode protected at –0.4 VDC, compatible with open
collector relay closure or standard logic signals, 25V max.
Maximum low input voltage is 0.6V and minimum sink
current is 1 mA. Minimum high input voltage is 2.5V, or
open.
TABLE 2.3 –IQ+ CONTROLLER RS-232 SERIAL I/O
FEATURESPECIFICATION
Communications Settings
Connections
Communications ProtocolSee Section 6.0 in this manual
End of line delimiter
TABLE 2.4 – IQ+ CONTROLLER PERFORMANCE
FEATURE
Valve speed
(open to closed)
Control range
Accuracy
Repeatability0.12% of reading0.12% of reading
FEATUREBUTTERFLY VALVESPENDULUM VALVE
Electronics MTBF>10,000 hours>10,000 hours
Warranty1 year1 year
BUTTERFLY
VALVES
125 to 250 msec,
depending on valve size
0.5% to 100% of
gauge
0.25% of reading (5mV
min)
TABLE 2.5 – IQ+ CONTROLLER RELIABILITY
Factory configured at 9600 baud, 1 stop bit,
no parity, 8-bit character
Rxd Data, Txd data and Common.
No handshake connections.
Carriage return (ASCII 0x0D) or Line Feed (ASCII
0x0A) or carriage return then line feed in that order
GATE & PENDULUM VALVES
2 to 5 sec, depending on valve size
0.5% to 100% of gauge
0.25% of reading (5mV min)
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IQ+ OP-LIT 9/08
5
IntellIsys AdAptIve pressure Controllers
3.0 - Unpacking and Installation
Inspect the shipping box before unpacking. Any damage should be reported to Nor-Cal Products or directly to the transportation carrier. Carefully remove
the product from the box and visually inspect it for damage. If return of the product to Nor-Cal Products should become necessary, please contact Intellisys
Customer Service to obtain a Return Materials Authorization (RMA) Number.
NOTE: Do not discard the packing materials until the product has been inspected to your satisfaction.
Pre-Installation Functionality Check
Nor-Cal Products carefully ensures that every product shipped is in perfect working condition. However, it is still a good idea to
quickly check the functionality of the unit prior to installation into the vacuum system. To do so, for buried box IQ+ controllers,
connect the controller to the valve and then to an appropriate +24DC, 4A power source. For all valve IQ+ controllers simply
apply the +24DC, 4A power source. The butterfly valves will complete a 30 second valve initialization sequence ... the valve will
stop in the open positoin. For soft shut (TSS) valves and pendulum (TPV) valves press the open and close buttons at the same
time. The valves will begin the valve initialization sequence like the butterfly valve. The length of time to complete this sequence
will vary from 40-60 seconds depending upon the type and size of valve. The valve will complete a 30-second initialization
sequence during which the valve plate will cycle back-and-forth a few times while the OPEN/CLOSE LEDs blink in an alternating pattern. The valve will eventually stop in the open position. Further verification of the system can be done by toggling the
“OPEN / CLOSE” switch (if available) on the controller front panel. If the valve does not operate as described please contact NorCal Technical Support.
avoid putting bodily parts in or near the valve gate mechanism or other moving parts. These may move
WARNING : When working with or troubleshooting Nor-Cal APC products extreme care must be taken to
suddenly and unexpectedly, and many of them are driven with sufficient force so as to cause significant harm
and possibly even dismemberment. Nor-Cal Products recommends that a lock-out and tag-out procedure be
strictly followed whenever human physical intervention is required on all of its control valves.
Installation
To allow for proper ventilation, make sure that at least 3 inches of unobstructed space is available adjacent to all perforated
sides of the IQ+ controller. Then, complete all cable connections as required referring to the figures and pin assignment
tables in Sections 3.1 – 3.3 of this manual. A list of pre-manufactured cable assemblies available from Nor-Cal Products
can be found in Appendix I.
CAUTION: The optional +15V and –15V power supply pins of the IQ+ gauge connector are power sources
that are intended to power the optional system pressure gauge(s). It can supply a maximum of 1500 mA. Do
not use for any other purpose and do not connect to the tool main 15V supply as the two supplies would
interfere with each other.
NOTE: Low voltage controller models do not have a power on/off switch. Consider installing an external
power on/off switch between the DC power supply and the controller to allow for de-energizing the unit
without having to disconnect the cable.
IQ+ OP-LIT 9/08
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Net Ctrl
Fault
0
2
4
6
8
0
2
4
6
8
VALVE
GAUGE
P O W ER
POWER
SVC
PORT
2
5
P
1
RATE
SW1
C LOS E
O P EN
IQ+ SERIES
ADAPTIVE PRESSURE CONTROLLER
Mod
3.1 - Master Buried Box Controllers
TABLE 3.1 – BURIED BOX CONTROLLERS (MASTER)
POWER (XLR)SERVICE PORTVALVEAUXILIARYDEVICENETGAUGE
PINFUNCTIONPINFUNCTIONPINSIGNAL
ASSIGNMENT
1+24VDC
Power Input
2Power Return2Authorized
3Drain
4N-C Net Hi
5NC- Net Low
1
2
2
1Authorized
Technicians Only
Technicians Only
3Authorized
Technicians Only
1Drive A +1Reserved1Drain1CDG1 +
2Drive A-2RS232 TX2DNET Power
3Drive B-3RS232 RX3DNET Power
4Drive B +4Digital
5Sense B -5Reserved5CAN L5CDG2 +
6Sense B +6RS485 A6CDG2 -
7Sense A -7Reserved7Reserved
8Sense A +8RS485 B8CDG1 -
9Reserved9TTL IN 09CDG Power Ground
10Reserved10TTL IN 1
11Reserved11Digital
12Reserved12TTL Com
13Reserved13TTL Out 0
14Reserved14TL Out 1
15Reserved15Chassis
PINFUNCTIONPINFUNCTIONPINFUNCTION
2+ 15VDC CDG Power
3- 15VDC CDG Power
Ground
Ground
Ground
in +
in -
4CAN H4Reserved
(Optional)
(Optional)
FIGURE 3.1 – BURIED BOX
CONTROLLER (MASTER)
1
Connect to Earth Ground at power supply
2
N-C Net is a proprietary communication protocol. Do not connect these pins to anything other than approved Nor-Cal items.
Call toll free 800-824-4166 or 530-842-4457 • FAX 530-842-9130
N-C Net is a proprietary communication protocol. Do not connect these pins to anything other than approved Nor-Cal items.
1010
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Vacuum Chamber
Pump
DC power supply
Host system with
RS232/485 or DeviceNet
communications
Nor-Cal
IQ+ Valve
Vacuum
gauge(s)
Vacuum Chamber
Pump
DC power supply
Host system with
RS232/485 or DeviceNet
communications
IQ+ Controller
Nor-Cal
throttle
valve
Vacuum
gauge(s)
4.0 - Theory of Operation
All IQ+ controllers are designed for downstream pressure control (see Fig 4.1 and 4.2). As such, it is one of several important components in a pressure
control system. Other essential components include a host system computer, a throttle valve and one or two vacuum gauges, such as a Capacitance Diaphragm
Gauge (CDG), and a pump system. Most manufacturers’ vacuum gauges can be used to provide the vacuum measurement signal, provided they have a voltage
output proportional to pressure. The IQ+ controller requires a pressure gauge signal output that is 0-10V linear and proportional to pressure.
FIGURE 4.1 – TYPICAL INSTALLATION AND CONFIGURATION OF A BURIED
BOX IQ+ PRESSURE CONTROL SYSTEM
Initialization Sequence
When first powered up, butterfly valves with the IQ+ controller will run the
valve through an initialization sequence that lasts for approximately 30
seconds. The primary purpose for this operation is for the controller to
determine the fully open and closed points, as well as for certain motor and
position calibration steps to occur. While the initialization sequence is active,
the amber FAULT light will be illuminated and the OPEN/CLOSE LEDs both will
be extinguished. Once the initialization sequence is complete, the valve will
move to the fully open position and the green OPEN LED will
illuminate.
NOTE: The controllers for TPV pendulum valves and TSS
gate valves contain a valve initialization safety lock function.
This safety lock will prevent valve initialization to occur until
given a “clear-to-proceed” command. The RS-232 serial
command for this is T4.
CAUTION: Never attempt to initialize a throttle valve with
differential pressure across the sealing gate. Make sure the
pressure on both sides is equalized to ±20 Torr. Damage to pumps and other equipment can occur otherwise.
FIGURE 4.2 – TYPICAL INSTALLATION AND CONFIGURATION
OF AN IQ+ PRESSURE CONTROL VALVE
Normal Operation
After the initialization sequence is complete normal operation of the valve is
possible. There are two primary modes of operation, a) position control mode
and b) pressure control mode.
In position control mode, the valve will move to any position in its range
based on a position set-point command from the host. The valve will remain
in that position until instructed to do otherwise. Position control mode can
be useful in certain cases where pre-determined amount of throttling is
necessary.
Pressure control mode, is used whenever control to a specific process
pressure level is desired. The host provides the set-point value to the
controller which, in turn, moves the valve to achieve that set point as quickly as
possible. During pressure control mode, external perturbations such as flow
changes and plasma events will automatically be compensated for by the
controller so that the pressure set-point is maintained. The value can be
changed by the host at any time.
Tuning
The IQ+ controller contains an Adaptive Pressure Control Algorithm that
has been designed to work over a wide range of flow and pressure combinations. In some cases 3 system parameters may have to be adjusted. These
include system volume, system delay and speed. See Section 6.1: How to
configure IQ+ for your system.
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IQ+ OP-LIT 9/08
11
IntellIsys AdAptIve pressure Controllers
5.0 - IQ+ Controller Module Interfaces
IQ+ controllers have several interfaces available for communications and connectivity to peripheral devices, depending on model. These are described by function below. Please also refer to Figures 3.1 – 3.4 and their associated Tables for the specific connectors and their pin assignments.
Vacuum Gauge Interface
The pressure signal from one or two vacuum gauges can be interfaced to the
IQ+ controller module through the connector labeled GAUGE. In addition,
±15 VDC is available as an option to power such gauges from these ports.
NOTE: If the power requirement of the gauge(s) used
exceeds the rated power output, then a separate power
source must be used. ±15V@1500mA.
When only one gauge is used, then the pressure signal must be connected to
the CDG1+ and CDG1- signal pins. Use of two gauges requires adhering to
the following:
The full scale range of the two gauges used must be set prior to use. See section 6.0.
Serial interface
An RS-232 serial interface is available on all controller models. Please refer to
the Section 6.0 for a full description of the communications protocol and a
listing of all active serial commands. A three-wire connection completes the
communications consisting of Rxd (data from the IQ+), Txd (data to the IQ+)
and digital ground.
are neither needed nor available.
settings are 9600 Baud, 1 stop bit and no parity. These settings
Every serial input command sent by the HOST has an end-of-line delimiter, carriage return ASCII 0x0D [hex], or the line feed character ASCII 0x0A [hex], or
the carriage return and line feed character in that order. The IQ+ device endof-line delimiter is the carriage return and line feed characters.
NOTE: CTS, RTS and DSR connections
NOTE: The default factory RS-232 communications parameter
can only be changed on models with DIP switches, and changing
the setting requires cycling IQ+ input power off then back on.
DeviceNet Interface (not available on all models)
The five-pin circular DeviceNet port allows for complete remote control,
monitoring and power supply of the IQ+ controller in a cost effective and reliable way. In addition to the connector are two status LEDs labeled Mod and
Net, as well as three rotary switches labeled MSD, LSD and RATE. A complete
explanation of the DeviceNet physical and software interfaces can be found in
Sections 8 and 9.
Service Port
The Service Port is reserved for factory authorized service technicians
Indicating LEDs
There are a host of indicating LEDs on the IQ+ controller, depending on
model. In general, the green Power LED is illuminated whenever power is
applied to the device. The green Ctrl LED is illuminated whenever the IQ+ is
in set point control (pressure or position). The amber Fault LED is illuminated
briefly during the initialization sequence after power-up but primarily if the
IQ+ device enters a fault state. Two LEDs are located adjacent to the OPEN
and CLOSE switches, and are illuminated whenever the valve position is within
2% of either limit.
Switches
Some controller models have a bank of four DIP switches labeled SW1. These
switches are used to define valve size. Relative to the printed text on the overlay, switch 1 is on the left
switch in the “up’ position is OFF or “0”
A
A switch in the “down” position is ON or “1”
Refer to table 5.1 below for a complete listing of valid DIP switch settings.
Primarily intended for operation during installation or troubleshooting, the
IQ+ also features two push button switches on the face of the controller that
can be used to drive the valve fully open or closed. To prevent inadvertent
valve operation, these switches cannot be used if the IQ+ valve is in Control
Mode (green Ctrl LED on).
TABLE 5.1 – DIP SWITCH CONFIGURATION
SW1SW2SW3SW4VALVE SIZE
00001 inch
00011.5 inch
00102 inch
00112.5 inch
01003 inch
01014 inch
01106 inch
01118 inch
100010 inch
100112 inch
101014 inch
101116 inch
1100TBD
1101TBD
1110TBD
1111TBD
1212
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6.0 - RS-232 Serial Interface and Commands
Interface basics
All IQ+ controllers support RS-232 serial communications available though auxiliary port. A full description of the communications protocol and a listing of all
active serial commands follows in this section. A three-wire connection needs to be completed to provide the communications lines, with Rxd (data from the
IQ+), Txd (data to the IQ+) as well as signal common on. See Section 3.0 for details.
NOTE: Hardware handshaking is not available.
NOTE: The default factory RS-232 communications parameter settings are 9600 Baud, 1 stop bit, no parity and 8-bit character.
These settings can only be changed using a serial command.
Every serial input command sent by the HOST has an end-of-line delimiter, carriage return ASCII 0x0D [hex], or the line feed character ASCII 0x0A [hex],
or the carriage return and line feed character in that order. The IQ+ -device end-of-line delimiter is the carriage return and line feed characters.
Serial Commands Summary
Table 6.1 and 6.2 summarize the serial commands and responses available with the IQ+ controller. Additional commands
may be included to enable customer specific functions. Please contact Nor-Cal Products Intellisys Customer Support for more details.
TABLE 6.1 – RS-232 SERIAL COMMANDS
SERIAL
COMMAND DESCRIPTION
CClose the valveSame function as pressing the CLOSE button
OOpen the valveSame function as pressing the OPEN button
HHold the valve in the current positionStops active pressure control, if device is in that mode
T1x
S1xx.xx
D1Activates set-point #1.Put the device in control mode, effectively making the setpoint active.
Vxx.xxGo to valve positionxx.xx is 0 to 100% of full open
L0Auto select CDG1 or CDG2 for best resolutionDefault two gauge configuration.
L1Control to and report CDG1 values onlySelects Gauge 1 for manitenance function.
L2Control to and report CDG2 values onlySelects Gauge 2 for manitenance function.
N1xxSets the full scale range of CDG1Values for xx can be found in Table 6.3
N2xxSets the full scale range of CDG2Values for xx can be found in Table 6.3
J4
Sets the type of set point #1. When x=0, the set-point type is position.
When x=1, the set-point type is pressure.
Used to program a value for set point xx.xx is any number between 0.00 and
100.00, representing the % of gauge full scale
Clears the “initialization safety lock feature” included on some TPV and TSS
controllers
RS-232 Commands Examples
The following section provides examples of the most commonly used commands and responses. The serial command protocol is not case sensitive, though all
the command examples in this section are listed in capital letters. Furthermore, whenever necessary the character Ø has been used to designate the number
zero, so as to not confuse it with the letter O.
TABLE 6.2 – RS-232 SERIAL REQUESTS AND RESPONSES
SERIAL
REQUEST DESCRIPTION
R1
R5
R6
R38
R26
GSN
RN1
RN2
RESET
Requests the set point valueS1+xxxx, where xxxx is a number from 0.00 to 100.00
Requests the current pressureP+xxxx, where xxxx is a number from 0.00 to 100.00
Requests the current valve positionV+xxxx, where xxxx is a number from 0.00 to 100.00
Requests the software versionIQ+3-[version #] [version date] (text)
Report set point type
Get the serial number of the deviceSN: xxxxxxxx
Requests full scale range of CDG1N1xx.xx, where xx.xx is the full scale range of CDG1 in Torr
Requests full scale range of CDG2N2xx.xx, where xx.xx is the full scale range of CDG2 in Torr
Resets the deviceSame as cycling power
NOTES /
EXAMPLES
S150, for example, programs the value of 50% for the setpoint. When using
a 1 Torr gauge, this corresponds to 500 mTorr..
Initializes Valve
RESPONSE
T1x, When x=0, the set-point type is position. When x=1, the set-point type
is pressure.
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IntellIsys AdAptIve pressure Controllers
6.0 - RS-232 Serial Interface and Commands (continued)
Modifying the Setpoint
The IQ+ controller normally has five programmable set point selectable
to be either pressure control or valve position control. Before using the set
point to control either pressure or valve position, the set point value must
be programmed. This is done by the following command:
S1xx.xx where xx.xx is a number from 0.00 to 100.00.
One or no decimal places may also be used i.e. x.x or x.
Reading the Setpoint
The set point can be read back to the Host
controller only through the serial port.
o verify the set point
R1 T
The IQ controller will respond with
S1+xx.xx where xx.xx is the set point value.
Selecting Valve Position Control or Pressure Control
The set point input value is common for both valve position and pressure
control. Therefore, it is necessary to program the IQ+ so that it controls
to the correct type. The factory default setting is pressure control.
Set set point type
T1x where X=0 g position control
T1x where X=1 g Pressure control (default)
Verifying the Control Mode
Before starting either pressure control or position control operations it
might be necessary to verify the setting of the set point type. This can
only be accomplished through the serial port with the command
R26
The IQ controller responds with:
here x is Ø for position control or 1 for pressure control (default).
T1x w
How to Control Valve Position
One of the two main functions of the IQ+ controller is Valve Position Control.
In this mode the IQ+ controller will simply move the throttle valve plate to a
prescribed position according to a set point. The set point is a value between
0% and 100%, where 0% is closed and 100% is open.
OPEN: The serial command is O.
The controller will only respond by opening the valve.
CLOSE: The serial command is C.
The controller will only respond by closing the valve.
HOLD: The serial command is H. The controller will
only respond by stopping the valve at the current position.
lve Position: Vxx.xx where xx.xx is a number from
Any Va
0.00 to 100.00% of full open. One or no decimal places
may also be used i.e. x.x or x.
Similarly use the T1Ø command to set the set point type to position control.
Then follow the information outlined in the How To Modify the Setpoint and
How To Control System Pressure sections.
Reading the Valve Position
The valve position may also be obtained through the serial port.
The valve position is reported as a % of full open using the command:
R6
The Controller responds with the valve position using the format:
xxx.xx where xx.xx is a number from 0.00 to 100%
V+
of valve open position.
How to Control System Pressure
The principal function of the IQ+ controller is to control system pressure. To
accomplish this, the controller needs to be put in “pressure control mode”
while being supplied a pressure set point. The pressure set point is proportional to the vacuum gauge’s full scale range.
Controlling pressure using the serial port provides additional flexibility.
To activate a set point issue the command:
D1
The active set point must be set to the correct value before activating the
pressure control set point. The set point can be modified any time before, during, or after pressure control. Also a different set point can be activated
at any time.
Note: For pressure control mode, the setpoint type must = 1, i.e. T11
Reading System Pressure
Pressure, as output by the system gauge(s) to the IQ+ Controller,
can be read directly from the controller. Both the signals from
CDG1 and CDG2 can be read independently.
The IQ+ controller will report the pressure via
the serial port with the following command:
R5
The controller will respond with:
P+xx.xx where + indicates the polarity of
the value and xx.xx is the valuein % relative to CDG1 full scale.
The range of xx.xx is from 0.00 to 100.00 and represents the pressure as a
percentage of the full scale of the CDG1 pressure gauge. The value can be less
than 0 if the vacuum gauge electronics have drifted or greater than 100 but
limited to 110%. For example, it the system uses a 100 Torr gauge and the
pressure is actually 10 Torr, the controller response will be P+10.00. On the
other hand, if the pressure is 10 Torr but the system has a 20 Torr gauge, the
controller response will be P+50.00.
When two CDG’s are used, the IQ+ will always report the pressure as a
percentage of the high range gauge. For example, if the system has a 100 Torr
gauge attached to CDG1 and a 1 Torr gauge attached to CDG2 and the actual
system pressure is 0.1 Torr the response to the R5 command will be P+0.100.
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6.0 - RS-232 Serial Interface and Commands (continued)
Activating Dual Pressure Sensor Configuration
When two pressure gauges are attached to the IQ+ controller, the controller
can operate in three distinct modes of operation.
Dedicated to the first gauge:
(This is the power-on default mode)
In that mode the controller only considers CDG1 for pressure control
as well as reporting. This mode is initiated by the L1 command
Dedicated to the second gauge:
In that mode the controller only considers CDG2 for pressure control.
as well as reporting. This mode is initiated by the L2 command. Pressure is still
reported as a % of full scale of CDG1.
The L1 and L2 commands particularly relevant to dual chamber
systems venting to one single downstream exhaust valve. In that situation
there are two distinct pressure gauges corresponding to each individual
vacuum chamber. The IQ+ controller is then used alternatively control
pressure in each chamber.
Dual range mode: (Default)
LØ activates this mode, in which the controller utilizes the two gauges to
optimize the pressure measurement. Two gauges are intended to be complementary in covering the dynamic pressure range. The high gauge is referred to
as the primary gauge. The low gauge is designed to be the secondary gauge
covering the low range measurements. In dual range mode gauges can be
switched. The gauge range needs to be predefined as illustrated in the next
section. The IQ+ controller will use the range information to determine the
pressure at which the controller will switch from reading one CDG to another.
The automatic switch over is at 90% of the full scale value of the lower range
gauge when the pressure is decreasing and greater than 99% of the full scale
value of the lower range gauge when the pressure is increasing. Please note
that in Dual Range Mode, all set point commands are with respect to the primary gauge range (CDG1).
L1 and L2 are normally used for maintenance purposes only. Restore the IQ+
to dual range made upon conpletion of maintenance usign the LØ serial com-
mand
TABLE 6.3 – VALUES TYPICAL OF
XX FOR USE WITH
DU
AL RANGE MODE
CDG1 OR
CDG2
FULL SCALE
(IN TORR)
0.10.1
0.20.2
0.50.5
11
22
55
1010 (CDG1 default)
5050
100100
500500
10001000
0
VALUE
OF
XX
Not connected
(CDG2 default)
NOTE: Any number can
be used for a gauge full scale.
How to Configure Pressure Sensor Parameters
When two pressure gauges are used it is necessary to program the IQ+
with sufficient information so that it knows the full scale of each gauge
and, hence, the ratio of the full scale pressure ranges. The factory default
full-scale range for CDG1 is 10 Torr, and that for CDG2 is 0 Torr ( not connected).
NOTE: Programming the gauge full scale range is not necessary
when only one gauge is installed. First, program the full scale
range of CDG1 using:
N1xx where xx is the number found in Table 6.3 describing the
full scale range of CDG1. For example, enter N1100 if CDG 1 is a
100 Torr gauge or N10.25 if it is a 250 milltorr gauge.
Then, program the CDG2 full scale range with:
N2xx where the value for xx can
also be found in Table 6.3,
epresenting the CDG2 full scale.
r
he full scale of CDG1 must always
T
e greater than that of CDG2.
b
x N210 is a 10 Toor gauge 2.
E
Reading the Pressure Sensor Configuration
The full scale setting of the CDG’s can only be accessed through the serial
port. Once the full scale ranges for CDG1 and CDG2 have been entered,
the IQ+ controller will automatically calculate their ratio. A ratio of 1000:1
is the limit between the two pressure gauges.
Verify the CDG entries by querying the IQ+ controller
for a CDG range report with the following commands:
RN1
The controller will respond with:
N1xx.xx where xx.xx is the full scale range of CDG1.
To check the full scale range of CDG2 send the command:
RN2
The controller will respond with
N2xx.xx where xx.xx is the full scale range of CDG2.
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6.1 - How to Configure IQ+ for Your System
System Configuration Parameters
There are three parameters to adjust that will affect how the valve will react
to changes in gas flow and pressure set points.
The parameters only need to be set once and will cover the full range of process pressure setpoints. The three parameters are:
lume
Vo
Delay
Speed
Volume
Volume is a Dependent phase multiplier and is based on the size of the pressure chamber and controls how fast the valve will react.
No specific relationship to physical chamber size (example: a setting of 50
does not equal a 50L chamber).
ume is 0. Range is 1-100.
The default setting for Vo
If the pressure signal over shoots the set point, increase the value of Vo
l
FIGURE 6.1 – VOLUME TOO LOW
ume.
l
FIGURE 6.2 .1– VOLUME TOO HIGH
Delay
Feedback delay compensates for the physical properties of the vacuum
system that cause delays in the pressure gauge readings when a pressure
change occurs.
Keep the Delay setting as low as possible.
The default value of Delay is 0. Range is 0-10.
If Delay is adjusted, it should be set as low as possible.
If the pressure signal oscillates at set point then increase Delay.
If the pressure signal under shoots the set point, decrease the value of
Volume.
FIGURE 6.2 – VOLUME TOO HIGH
FIGURE 6.3 – DELAY TOO LOW
Speed
The default setting for Speed is 100 (100%). Range is 1-100. Normally
this parameter does not require adjustment.
Reducing speed will help reduce low frequency oscilations. Speed
should be reduced only after any adjustments to Vo
have failed. When reducing Speed, set Delay to 0..
Maximum valve speed during pressure control does not affect the
Open-Close, or Close-Open valve speed. If Speed is set too high the
pressure will oscillate at set point (See Fig. 6.4). If Speed is set too low
the valve will move slowly (See Fig. 6.5).
lume and Delay
1616
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6.1 - How to Configure IQ+ for Your System (continued)
FIGURE 6.4 – SPEED TOO HIGH
System Configuration Commands
DeviceNet Commands
Class ID 33 hex
Instance ID 1 (Process Control)
Setting Volume, Delay and Speed
FIGURE 6.5 – SPEED TOO LOW
E 6.4 – DEVICENET COMMANDS
TABL
ATTRIBUTE ID HEXACCESS CODENAMEFORMATVALUE
64OE (get) 10 (set)VolumeINT1-100, default = 0
65OE (get) 10 (set)DelayINT0-10, default = 0
66OE (get) 10 (set)SpeetINT1-100, default = 100
TABLE 6.5 – RS-232 SERIAL COMMANDS
SERIAL COMMANDDESCRIPTIONRESPONSE
SVxxxSet Volume where xxx is a number from 1 to 100PID VOLUME: xxx
SDxxxSet Delay where xxx is a number from 1 to 10PID DELAY: xxx
SSxxxSet Speed where xxx is a number from 1 to 100PID SPEED: xxx
TABLE 6.6 – RS-232 SERIAL REQUESTS AND RESPONSES
SERIAL REQUESTDESCRIPTIONRESPONSE
RVRequests Volume valuePIC VOLUME: xxx
RDRequests Delay valuePID DELAY: xxx
RSRequests Speed value PID SPEED: xxx
RPIRequests values of Volume, Delay and SpeedSPEED: xxx
VOLUME: xxx
DELAY: xxx
A Record the current Volume, Delay, and Speed parameters.
or serial interface set the serial port speed 100ms or less. For Devicenet
F
B
set to 50ms. Or less.
C Start pressure control at a process critical set point, or a set point halfway
between the system maximum and minimum process pressure set points.
With the system GUI or a PC that can graph data observe the pressure and
valve movement.
D If the pressure parameters need adjusting stop pressure control and Open
the valve. Enter new value for pressure parameters.
Setting Volume, Delay and Speed (Example)
The system has a 1 Torr pressure gauge. The pressure control range is
20mTorr - 600 mTorr. The process critical range is 120mTorr.
A Record values of Volume, Delay, and Speed.
Start pressure control with a set point 120mTorr. Adjust the parameters if
B
necessary.
C Start pressure control with a set point of 20mTorr. Adjust parameters if
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necessary. If any changes are made then re-check the 120mTorr set point.
D Start pressure control at 600mTorr.. Adjust the parameters if neces-
sary. If any changes are made then re-check the 120mTorr and 20mTorr set
points.
E Record new values of Volume, Delay, and Speed.
l
Parameters are adjusted in this order: Vo
ume
Delay
Speed
(not normally adjusted)
E If the pressure response is satisfactory, input a set point at the system
minimum pressure or another process critical set point. Make adjustments
as necessary. If a change was made re-check pressure set point in step C.
FIf the pressure response is satisfactory, input a set point at system maxi-
mum pressure. Adjust if necessary. If a change was made re-check set
points in steps C and D.
GRecord new parameters for Volume, Delay, and Speed.
IQ+ OP-LIT 9/08
17
IntellIsys AdAptIve pressure Controllers
250Kb
P
RATE
500Kb125Kb
1 Drain
4 CAN_H
3 V-
2 V+
5 CAN_L
MSD
LSD
4
6
2
8
2
4
6
P
ADDRESS
0
0
7.0 - DeviceNet Interface
7.1. Overview and setup
DeviceNet is a network communication protocol that provides a cost-effective
solution to low-level device networking for semiconductor equipment tools.
Process data and other information such as configuration parameters can
be communicated for up to 64 nodes per network at data rate up to 500K
baud. The DeviceNet pressure controller conforms to the ODVA & ControlNet
International, Ltd. Process Control Valve (PCV) device profile. This device
profile is available in the CIP Networks Library: Volume One, Edition 3.3 -- The
Common Industrial Protocol (CIP
Accordingly, the purpose of this manual is to provide an overview on the basic
use of the DeviceNet communication interface as it relates to the IQ+ pressure
controller, as well as report the different options supported by the controller software communication interface.
DeviceNet Connector:
The communication port is a sealed microstyle M12 male connector that conforms
to the DeviceNet specification. The
connector pin out is shown in Figure 7.1.
DeviceNet requires power input of 11-24
VDC provided through the DeviceNet connector. Separately, the controller unit
requires a 24 VDC +/- 10% power source, which is provided through the power
connector. See section 3.0.
TM
) of the official DeviceNet specification.
FIGURE 7.1 - DEVICENET
CONNECTOR PIN ASSIGNMENT
Mo
dule Status: A bicolor (red/green) Module status LED indicates the status
of the communication module according to the logic in Table 7.1.
TABLE 7.1 - DEVICENET MODULE LED STATUS
LEDSTATUS
GreenModule OK
RedFault condition
Flashing RedLost DeviceNet power
OFFNo DC power
Network Status:
A bicolor (red/green) Network status LED indicates the status of the communication link according to the logic in Table 7.2.
TABLE 7.2 - DEVICENET NETWORK LED STATUS
LEDSTATUS
Flashing GreenNetwork OK device online
GreenNetwork OK connection established
Flashing RedRecoverable fault
RedUnrecoverable fault
OFFNo network detected
ud Rate Selection:
Ba
The baud rate selector as shown in Figure 7.2 is a 4
position rotary switch used to select the desired baud
FIGURE 7.2 -
DEVICENET BAUD RATE
SELECTION SWITCH
rate of the controller, respectively 125Kb, 250Kb,
500Kb and software programmable.
The factory default setting is 125Kb. The software
programmable baud rate is kept
in non-volatile memory and settable through
the DeviceNet object.
CID Selector:
MA
Two rotary switches are used to set the MACID of the device on the network
between 0 and 63 and software programmable. Note that MACID 0 is com-
monly reserved for the DeviceNet network
master and should not be used by any device.
The factory default setting is MACID 63.
Additionally, positions 64 to 99 correspond
to the software programmable setting. The
MACID programmed in non-volatile memory
will then be used.
The software programmable MACID is
FIGURE 8.3 - DEVICENET
ADDRESS SWITCHES
configurable via DeviceNet. However, note
that a change to the baud rate and MACID
switches only becomes effective once the
device is reset. This happens automatically
hen setting the MACID in programmable
w
mode.
No network detected:
This is an indication from the software that multiple attempts to publish a
message (typically a duplicate MACID check message) have been made but no
acknowledgement of that message has been received. It is the normal mode
of operation if the network connection is not used.
Network OK
device online:
If the device successfully detects a live bus it will transition to flashing green,
that is the standby mode, the device is ready for the master node to establish
a connection.
Network OK
connection established:
When the device has successfully been attributed a connection by the master
the network LED will transition to solid green.
Recoverable fault:
If the master unexpectedly drops the DeviceNet connection (lets the slave time
out) the LED will transition to flashing red, signaling the occurrence of a time
out fault. If the network master re-establishes the connection the device will
then recover to normal operating mode.
Unrecoverable fault:
A red Network LED signals the occurrence of a major network fault such as
two devices having the same MACID, an incompatible baud rate setting or a
short in the communication signal lines.
1818
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SSTechnology
interface card
SST 5136 DN
Tool
system
CAN_H
CAN_L
V+
V-
Drain
Interface
Card
Power
Supply
+24v
GND
IQ+ based
Controller 1
Controller 2
Controller 3
Other Devices
Cordset
InterlinkBT RSC572-*M
Drop Junction
InterlinkBT VB2-FKM FKM FSM 57
BUS
IQ+ based
IQ+ based
7.1. Overview and setup (continued)
Required Hardware:
A DeviceNet network is composed of a host controller, a bus and one or more
external devices such as IQ+. The master node or host controller is commonly
composed of a computer equipped with a DeviceNet interface card. The bus
is made of cable connectors and junctions generally arranged in trunklinedropline configuration as shown in Figure 7.4.
Interface and bus system part numbers are given as indication only.
The IQD Controllers come ready to plug into any qualified DeviceNet network.
Prior to power up, you must initially:
1.Select the appropriate baud rate.
All the devices on the network must operate
t the same baud rate.
a
2. Select an individual device MACID that is
not already in use by another device.
IQ+ controller devices can be plugged in and removed from the network live,
however, if an inappropriate baud rate setting is selected it will bring the IQ+
controller to a network fault and possibly bring other installed devices on the
bus to a fault. Upon connection the IQ+ controller will transmit a duplicate
MACID check to verify the uniqueness of its address. If another device with
the same MACID address is detected the IQ+ Controller transitions to a red
network LED status.
Power Supply System and Typical Configuration:
It is essential for the controller to have dedicated access to the pressure gauge.
Accordingly the preferred configuration is for the controller to host the gauge
through the analog signal link while the controller takes charge of reporting
the process parameter through the DeviceNet communication link.
The IQ+ controllers require external 24 VDC power for operation. This must
be applied to the XLR power port. The DeviceNet interface requires separate
power input via the DeviceNet cable connection. This DeviceNet link can be
powered from 11 to 24 VDC.
General Considerations for Valve Operation Using DeviceNet
DeviceNet is an object oriented communications protocol. The Process
Control Valve device type encompasses several objects from the
Hierarchy of Semiconductor Equipment Device Objects (see figure 9.1).
These objects are managed by the S-Device Supervisor Object, which
tasks include reporting device status. The interaction with the device can
be carried out in different ways. The Selection Object is a router object
which directs setpoint data to the desired destination – pressure control
or position control – via the S-Single Stage Controller Object. Instead of
setting a setpoint through the Selection Object, it can be set directly in
the S-Single Stage Controller Object. Process data is gathered from the
S-Analog Sensor Object, which provides pressure data from up to two
pressure gauges and valve position data. This document contains examples of how to set and get parameters through DeviceNet.
To be able to perform pressure or position control, the controller must
first be transitioned to the device Executing state. This can be done in
one of two ways; explicitly by means of executing a Start service request
or by sending valid polled I/O data to the controller. See the DeviceNet
Communications section for a more detailed description on how this is
done. See figure 9.2 for more details on device states.
Pressure control is performed based on the selected process variable
source. By default, the selection will be automatic based on the pressure range that each pressure gauge covers. Setting a setpoint using
automatic switching will be relative to the high gauge range, if multiple
gauges are used. The source can be forced to either the low or the high
range gauge. When the source used is set to “automatic”, the source
actually reporting the pressure data can be retrieved through the SAnalog Sensor Object.
Some Nor-Cal valves require initialization before they are ready for operation. Nor-Cal has an Initialize service designed solely for this purpose. See
S-Device Supervisor Object section for more information on which valve
models are affected.
FIGURE 7.4 - TYPICAL DEVICENET HARDWARE
INSTALLATION
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7.2 - DeviceNet Communications
This section describes how to communicate with and control the controller using the DeviceNet port. DeviceNet has two basic message types: Explicit and I/O
messaging
Explicit Me
Explicit messages are used to read or write an individual piece of information
in the device. They are mainly used for initial configuration. Explicit messages
include the path to locate the data of interest, this consists of the class ID,
attribute ID, and instance number. They also specify an action to be taken.
The table below lists some of the key information available through explicit
messaging. Please refer to Section 9 for the full device profile characteristic.
CLASS
ID
The most straightforward way of sending individual commands to the
controller is to use a node-commissioning software utility. These utilities
are part of the DeviceNet interface card package.
Explicit messaging connection examples:
• P
• L
• T
Note that in DeviceNet communications, data to and from the device is always
encoded least significant byte first as specified in the data management section of the DeviceNet protocol specification. For instance the value 12345678
hex is encoded as follow:
OCTET NUMBER
OU
How to get device identity information:
• S
• S
• S
• S
• T
or 612 dec, which is the vendor ID that has been attributed to
N
• C
• T
meaning 2B13A hex or 176442 dec, which is the serial number of the
d
(
ssaging:
TABLE 7.3 - DEVICENET EXPLICIT MESSAGING
INSTANCE
HEX
111
116
117
311
312
3116
3126
3136
2E15
2E19
ID
HEX
ATTRIBUTE
ID
HEX
SERVICE ID
0E (get)Vendor ID
0E (get)Serial Number
0E (get)Product Name
0E (get) 10 (set)MACID
0E (get) 10 (set)Baud Rate
0E (get)
0E (get)
0E (get)Valve position
0E (get) 10 (set)
0E (get) 10 (set)Process setpoint
HEX
VARIABLE
NAME
Process input
(low range)
Process input
(high range)
Pressure control
and position
control
ower up the device, the network LED will transition to flashing green
et the master open an explicit connection with the device
he network LED will transition to solid green
1st2nd3rd4th
TPUT DATA
78563412
elect the service code 0E (get attribute)
elect class ID 1 (select the identity object)
elect instance ID 1 (there is only instance supported)
elect attribute ID 1 (vendor ID attribute)
he device will respond with data bytes 64 02 meaning 264 hex
or-Cal Products Inc.
hange the attribute ID for 6 (serial number attribute)
he device will respond with data bytes on the form, 3A B1 02 00
evice.
Nor-Cal device serial numbers are composed of at least 6 digits)
How initialize the valve (not required on all valve types):
elect the service code 32 (initialize service)
• S
• Select class ID 30 (select the s-device supervisor object)
elect instance ID 1
• S
How to transition the controller to the executing state:
To be able to perform pressure or position control by means of explicit
messaging, the controller has to be transitioned to the device Executing state.
elect the service code 6 (start service)
• S
elect class ID 30 (select the s-device supervisor object)
• S
elect instance ID 1
• S
How to control valve position:
elect the service code 10 (set attribute)
• S
elect class ID 2E (select the selection object)
• S
elect instance ID 1 (setpoint)
• S
elect attribute ID 0E (destination used) followed by the data 02 (position
• S
control)
hen
t
elect the service code 10 (set attribute)
• S
elect class ID 2E (select the selection object)
• S
elect instance ID 1 (setpoint)
• S
elect attribute ID 0F (source data value) followed by the setpoint 00 40
• S
he device will move the valve to 50% of its stroke
• T
elect attribute ID 0F (source data value) followed by the
• S
setpoint 00 00 The device will move the valve to 0% of its
troke or closed
s
How to control pressure:
• Select the service code 10 (set attribute)
elect class ID 2E (select the selection object)
• S
elect instance ID 1 (setpoint)
• S
elect attribute ID 0E (destination used) followed by 01 (pressure control)
• S
then
elect the service code 10 (set attribute)
• S
• Select class ID 2E (select the selection object)
elect instance ID 1 (setpoint)
• S
elect attribute ID 0F (source data value) followed by the setpoint 00 20
• S
pressure control)
(
he device will try to control pressure at 25% of full scale of the selected
• T
ressure source
p
elect attribute ID 0F (source data value) followed by the setpoint FF 7F
• S
he device will try to control pressure at 100% of full scale of the selected
T
ressure source
p
How to read the valve limit switch:
elect the service code 0E (get attribute)
• S
elect class ID 8 (select the discrete input point object)
• S
elect instance ID 1 (closed limit switch)
• S
elect attribute ID 3
• S
he device will respond with data bytes 01 meaning that
• T
the close limit switch is activated and the valve is closed
elect instance ID 2 (open limit switch)
• S
elect attribute ID 3
• S
he device will respond with data bytes 00 meaning that
• T
the open limit switch is not activated and the valve is not opened
Note: The examples above assume that default data
type (INT) and data units (Counts) is used.
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7.2 - DeviceNet Communications (continued)
How to read system pressure and valve position:
elect the service code 0E (get attribute)
• S
• Select class ID 31 (select the s-analog sensor object)
elect instance ID 1 (process input low range)
• S
elect attribute ID 6 (value attribute)
• S
he device will respond with data bytes 00 00
• T
meaning that the measured pressure is 0
elect instance ID 3 (valve position)
• S
elect attribute ID 6 (value attribute). The device will respond
• S
with data bytes FF 7F meaning that the valve position is fully open.
OUTPUT ASSEMBLY FORMATS
INSTANCE HEXVARIABLES
7
(default)
17
97
(Master / Slave)
INSTANCE HEXVARIABLES
2
(default)
4
5
0B
12
1A
96
97
(Master / Slave)
TABLE 7.4
Control setpoint
Control instance
FP-Control setpoint
Control instance
Control mode
Pressure setpoint
Position setpoint
Control instance
Individual valve control (address)
Individual valve control (action)
INPUT ASSEMBLY FORMATS
TABLE 7.5
Exception status
Process variable
Exception status
Process variable
Control setpoint
Exception status
Process variable
Control setpoint
Valve position
Exception status
Process variable
Valve
Discrete
Input 2
Exception status
FP-Process variable
Exception status
FP - Process variable
FP - Valve
Discrete
Input 2
Exception status
Process variable input 1 (low range)
Process variable input 2 (high range)
Valve
Active process input instance
Discrete
Input 2
Control mode
Pressure setpoint
Position setpoint
Control instance
Individual valve control (address)
Individual valve control (action)
Discrete
Input 1
Discrete
Input 1
Discrete
Input 1
Input/Output Messaging:
I/O messaging is used to read and write data to the device on a periodic basis.
They are used for transmission of a continuous stream of data such as setpoint
or process pressure. I/O messages have limited overhead and rely on a
prearranged set of data called assemblies. The IQ+ controller handles input
assemblies and output assemblies in a poll connection. In an I/O poll
connection the tool DeviceNet controller periodically sends an output
assembly and the IQ+ responds with an input assembly. The IQ+ supports 3
output and 8 input assembly formats. For polled I /O connections, the device
will automatically transition to the device Executing state after the first valid
I/O data has been received.
Example of I/O messaging transactions:
The following is an example format of a typical poll connection, using
default settings.
After having opened the I/O connection the master sends the following data:
BYTEDESCRIPTIONDATA RANGE
1
2
3
4
Setpoint (low byte)
Setpoint (high byte)
Setpoint destination
(low byte)
Setpoint destination
(high byte)
0 to 7FFFh
00 for no operation
01 for pressure control
02 for position control
Note: The setpoint is a number from 0000 hex to 7FFF hex covering the
range 0 to 100%. In other words, in pressure control mode, 7FFF hex
represent full scale of the selected pressure source. If the pressure gauge
used is 1 Torr then a set point of 4000 hex will control pressure to 0.5 Torr.
In valve position control mode, 7FFF hex represents full open stroke.
Respectively, 0000 hex setpoint corresponds to closing the valve and 7FFF hex
corresponds to fully opening the valve.
The controller response is formatted accordingly:
BYTEDESCRIPTIONDATA RANGE
1
exception statusSee table 8.8.2 on page 12
2
pressure (low byte)
3
pressure (high byte)
0 to 6000h
Note: Data types and data units may be changed in application objects
handling pressure and position related attributes. Data type can only be
changed if no I/O connection has been established using a related attribute
and the device is in idle state. Data units can only be changed when the device
is in idle state. Changes to these attributes in application objects are
non-volatile (recorded in NVRAM).
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Discrete
Input Class
Connection
Class
I/O
I/O
I/O
Explicit
Message
Explicit
Message
Explicit
Message
Message
Router
Assembly
Assembly
Assembly
S-Device
Supervisor
DeviceNet
Identity
Hierarchy of
Semiconductor Equipment
Device Objects
Selection Class
S-Analog Sensor
Class
Process 1
Process 2
S-Single Stage
Controller Class
Process
Position
Setpoint
Close
Limit
Open
Limit
S-Analog
Actuator
Position
Control
Variable
DeviceNet
(not a member
of the Hierachy)
Master/Slave
8.0 - DeviceNet Device Profile
Figure 8.1 - Object Model for the Process Control Valve Device
2222
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8.1 - Identity Object
Class ID 1 hex
Instance ID 1
•
Vendor ID: Assigned number to
Nor-Cal Products Inc. is 612
•
Device type: The value of 1Dhex
is used for process control valve
(cf. specification One, Edition 3.3,
page 6-182)
•
Product code: Nor-Cal Products
attributes a specific product code
as a function of the valve size or
type.
8.2 - Message Router Object
TABLE 8.1.1 – IDENTITY OBJECT ATTRIBUTES AND SERVICES
ATTRIBUTE IDHEXSERVICE IDHEXNAMEFORMATVALUE
10E (get)
20E (get)
30E (get)
40E (get)
50E (get)
60E (get)
70E (get)
1 = out of box reset (NVRAM reset + DeviceNet reset)
64h = device power cycle
TABLE 8.1.2 IDENTITY OBJECT STATUS BIT
BITDEFINITION
0
1
2
3
4-7
8
9
10
11
12-15
MAP
Owned
Reserved (=0)
Configured
Reserved (=0)
Extended device status
Minor recoverable fault
Minor unrecoverable fault
Major recoverable fault
Major unrecoverable fault
Reserved (=0)
Class ID 2hex
Instance ID 1
No class or instance attributes supported.
8.3 - DeviceNet Object
Class ID 3 hex
Instance ID 1
ATTRIBUTE ID HEXSERVICE IDHEXNAMEFORMATVALUE
•
The values of attribute 1 and 2
are retrieved from NVRAM if
the front panel switches are set to
program mode; otherwise, the
value selected by the front panel
switch is reported.
•
The set service of attribute 1 and 2
directly updates the value for these
attributes in NVRAM. When setting
the MAC ID, the device will auto-
matically reset. To update baud rate,
a manual hardware or software reset
has to be executed.
•
The value of attributes 2 and 9 are
decoded as follows: 0=125Kb, 1=250Kb, 2=500Kb
8.4 - Assembly Object
TABLE 8.3.1 – DEVICENET OBJECT ATTRIBUTES AND SERVICES
10E (get) 10 (set)
20E (get) 10 (set)
50E (get)
60E (get)
70E (get)
80E (get)
90E (get)
None4B
None4C
MAC IDUSINT0-63 (from NVRAM in P mode)
Baud RateUSINT0-2 (from NVRAM in P mode)
Allocation infoByte+ByteAllocation choice + master ID
Class ID 4 hex
Instance ID (see static assembly Table 9.5.1 and 9.5.2)
Get or set service selectively supported as a function of
the selected instance in the connection object.
ATTRIBUTE ID HEXSERVICE ID HEXNAMEFORMATVALUE
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TABLE 8.4.1 – ASSEMBLY OBJECT ATTRIBUTES
3
0E (get) 10 (set)DataARRAYStatic assembly
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IntellIsys AdAptIve pressure Controllers
8.5 - I/O Assembly Instances
TABLE 8.5.1 – OUTPUT ASSEMBLY INSTANCES
INSTANCE HEXBYTEVARIABLESEPATHHEX
0-1
7 (default)
17
97
(Master Slave)
Control setpoint
2-3
Control instance
0-3
FP - Control setpoint
4-5
Control instance
0
Control mode
1-2
Pressure setpoint
3-4
Position setpoint
5
Control instance
6
Individual valve control (address)
7
Individual valve control (action)
INSTANCE HEXBYTEVARIABLESEPATH HEX
2
(default)
40
5 0
0B0
120
1A0
960
98
(Master/Slave)
0
Exception status
1-2
Process variable
Exception status
Process variable
1-2
Control setpoint
3-4
Exception status
Process variable
1-2
Control setpoint
3-4
Valve position
5-6
Exception status
Process variable
1-2
Valve
3-4
5Discrete
Exception status
1-4
FP - Process variable
Exception status
FP - Process variable
1-4
FP - Valve
5-8
9Discrete
Exception status
Process variable input 1 (low range)
1-2
Process variable input 2 (high range)
3-4
Valve
5-6
Active process input instance
7
8Discrete
0
Exception Status
1-2
Process variable input 1 (low range)
3-4
Process variable input 2 (high range)
5-6
Valve
7
Device Status
8
Cluster information (address 00 - Master)
...
8 +
...
nn
Cluster information (address
20 04 24 07 30 03
20 04 24 17 30 03
20 04 24 97 30 03
TABLE 8.5.2 – INPUT ASSEMBLY INSTANCES
The control instance indicates the significance of the control
setpoint:
1 = pressure control 2 = position control.
20 04 24 07 30 03
20 04 24 04 30 03
20 04 24 05 30 03
20 04 24 0B 30 03
input 2
input 2
input 2
nn – Slave nn)
Discrete
Input 1
20 04 24 12 30 03
20 04 24 1A 30 03
Discrete
Input 1
20 04 24 96 30 03
Discrete
Input 1
20 04 24 98 30 03
2424
Note: The process variable will be based on the full scale
range of the active sensor except for instance 96 hex
and instance 98 hex, where it is based on the full scale
range of each individual sensor. The active sensor can
be determined from attribute 5F hex, Active instance
number, of the
S-Analog Sensor Object, class instance 0.
Note: Assembly instances 97 hex and 98 hex are
described in detail in the Master/Slave Object section.
Note: After establishing an I/O connection, data types of appli-
cation objects related to attributes included in the I/O assemblies will self-adjust to give consistency in data type between
pressure related and position related attributes. This applies
to attributes of the S-Analog Sensor Object, the S-Analog
Actuator Object and the
S-Single Stage Controller Object
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TABLE 8.6.1 – CONNECTION OBJECT ATTRIBUTES
ATTRIBUTE ID HEXSERVICE ID HEXNAMEFORMATVALUE
10E (get)
State
UINT
0-5, 0=no cxn, 3=cxnted
20E (get)
Instance type
UINT
0=explicit, 1=IO
30E (get)
Transport class trigger
BYTE
80,82,83
40E (get)
Produced connection ID
UINT
FBh 05h (EC), FFh 03h (IO)
50E (get)
Consumed connection ID
UINT
FCh 05h (EC), FDh 05h (IO)
60E (get)
Initial com. char.
BYTE
21 for EC, 01 for IO
70E (get)
Produced connection size
UINT
12h (EC), 7h (IO)
80E (get)
Consumed connection size
UINT
12h (EC), 3h (IO)
90E (get) 10 (set)
Expected packet rate
UINT
Connection timing
0C0E (get)
Watchdog time out action
UINT
1 for EC, 0 for IO
0D0E (get)
Produced connection length
UINT
0 in EC, 6 in IO
0E0E (get) 10 (set)
Produced connection path
EPATH
IO input assembly path
0F0E (get)
Consumed connection length
UINT
0 in EC, 6 in IO
100E (get) 10 (set)
Consumed connection path
EPATH
IO output assembly path
110E (get)
Production inhibit time
UINT
00
8.6 - Connection Object
Class ID 5 hex
Instance ID 1, 2 (1=EC, 2=IO)
• Attribute 0E &10: Setting of this
attribute is allowed only when in
configure I/O state.
•
EPATH returns an “invalid
• The current assembly path is
• Watch dog timeout action:
0 = transition to timeout, (IO only)
1= auto delete
2= auto reset (IO only)
3= deferred delete (EC only)
• Attribute 7 and 8: report 12 for
explicit connection or the actual
8.7 - Discrete Input Point Object
Class ID 8 hexInstance ID 1 1 = closed 0 = not closed
Instance ID 2 1 = open 0 = not open
8.8 - S - Device Supervisor Object
Attempt to set unsupported
attribute value” error.
stored in the device’s NVRAM
and restored on power up.
* Only used in the warning exception detail. This bit is always = 0 in the Alarm exception detail
† Warning and alarm levels for S-Analog Sensor Object are the full scale and zero sensor readings
†† Warning and alarm bits are set for S-Single Stage Controller when setpoint cannot be reached
NOTE: The bitmap for Warning exception detail and Alarm exception detail is the
same.
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Self-Testing
Self-Test
Exception
Idle
Abort
Executing
Critical Fault
Self test failed
Condition cleared
Power on
Reset
Diagnostic request
Self-test
passed
Stop request
Time out
Connection deleted
Start request
Or first valid
IO data
Abort request
Recover request
Abort request
Abort request
Critical Fault
from any state
FIGURE 8.2 - OBJECT STATE TRANSITION DIAGRAM
8.9 - S-Analog Sensor Object
Class ID 31 hex
Instance ID 0 (class-level)
NOTE: This class subclass only apply to
instances 1 and 2.
• Identifies the gauge providing the
pressure value for input Assemblies and
S-Single Stage Controller Object,
Instance 1
Instance ID 1, 2 (process input)
ATTRIBUTE ID HEXSERVICE ID HEXNAMEFORMATVALUE
ATTRIBUTE ID HEXSERVICE ID HEXNAMEFORMATVALUE
TABLE 8.9.0 - S-ANALOG SENSOR OBJECT CLASS ATTRIBUTES; INSTANCE 0
5A0E (get) 10 (set)Sensor crossover low Specified by data type 100% of low range gauge full scale (default)
5COE (get)PhaseREALDerivative gain
5COE (get)KapREALSecond derivative gain
Data type determined by
S-Analog Actuator data type
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8.13 - Master/Slave Object
Class ID 64 he
Instance ID 1 (master)
ATTRIBUTE ID HEXSERVICE ID HEXNAMEFORMATVALUE
• When setting attribute 70,
Number of slaves, to a
number greater than 0, the
controller will automati-
cally transition to Master
mode. This attribute is only
settable when no I/O
connection using assembly
instance 98 has been
established.
TABLE 8.13.2 – MASTER/SLAVE OBJECT INDIVIDUAL
VALVE CONTROL (ACTION) VALUE
ATTRIBUTE
VALUE
0, 3-254No individual control
1Freeze and close
2Freeze and open
255Unfreeze
I
NDIVIDUAL VALUE
ACTION
TABLE 8.13.1 – MASTER/SLAVE OBJECT ATTRIBUTES
700E (get) 10 (set)
730E (get) 10 (set)
740E (get) 10 (set)
750E (get)
760E (get)
None05 (reset)
None32 (initialize valve)
None33 (reset faulted valve)
TABLE 8.13.3 – MASTER/SLAVE OBJECT DEVICE
STATUS VALUE
ATTRIBUTE
VALUE
0Unknown
2Position control
3Closed
4Open
5Pressure control
6Hold
12Power failure
13Safety mode
14Fatal error
Number of
Slaves
Individual
valve control
(address)
Individual
valve control
(action)
Device status
information
Cluster
information
Invokes power reset service: 0
255=reset all valves
Initializes valve and transitions device from self-testing state to Idle
state (not needed for all valve types)
0-nn=initialize valve number nn
255= initialize all valves
Invokes power reset service on faulted valves:
0-nn=reset faulted valve number nn
255= reset all faulted valves
STATE
USINTRange 0-10
Range 0 - nn = total number
USINT
USINTSee table 8.13.2
BYTESee table 8.13.3
Array of BYTESee table 8.13.4
TABLE 8.13.4 – MASTER/SLAVE OBJECT
of Slaves
(invalid value = no individual
control)
-
nn=reset valve number nn
CLUSTER INFORMATION BITMAP
BITDEFINITION
None setNormal operation
0Closed
1Open
2Closed and frozen
3Open and frozen
4Fatal error
5Power fail not ready
6Reserved
7Offline
warning
Master/Slave Operation:
If not previously set in the factory, set the number of Slaves through attribute 70 hex. After updating the attribute, the device will require a DeviceNet reset for all
Master/Slave functions to work properly. Setting the ‘Number of Slaves’ attribute to a non-zero number will automatically configure the DeviceNet controller to
act as a Master controller. After the DeviceNet controller has been set up as a Master, all connected Slaves will follow the Master’s movements unless instructed
differently by the Master.
The Master/Slave system is best controlled using assembly output instance 97 hex and assembly input instance 98 hex. Using these assemblies, the slave valves
will follow the Master movements. The Master and slaves can be individually operated by setting the individual valve control attributes to desired values.
For system safety reasons, should any valve have a problem (valve fault, communication problem, loss of power), all other valves will stop at their current position.
Should there be a problem with DeviceNet, all valves will close. This could happen if DeviceNet power is lost or if a DeviceNet connection times out.
NOTE: Slave device addresses have to be set up sequentially,
i.e. for a system with three Slaves, the Slave addresses should be set to 01, 02, and 03 respectively. The Master controller will automatically have address 00.
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IQ+ OP-LIT 9/08
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IntellIsys AdAptIve pressure Controllers
8.13 - Master/Slave Object
E
– 8.13.5 SLAVE NETWORK LED STATUS
TABL
LEDSTATUS
Flashing GreenNetwork OK device online
GreenNetwork OK connection
Flashing RedConnection timed out
NOTE: If a Slave valve has a problem of any kind, the Master
will indicate this by flashing the fault LED. For all other conditions, the Master LEDs operate the same as a standard IQ+ controller.
(continued)
established
9.0 - Battery Back-Up
Some APC models, including the IQ+ controller, are available with a power safe battery back-up option. When installed, this feature will drive the valve closed
in the event of a power interruption to the APC controller. This is more commonly of interest when throttling gate- or pendulum valves are used, because these
valves typically also serve as the vacuum line isolation valve. The following describes the general functionality and specifications of the battery back-up feature.
Depends on various factors including temperature, number of discharge
cycles, battery age, starting charge and valve type. Generally, however, a
new freshly charged battery should close a typical gate- or pendulum valve
ten times, or more, without being depleted to the point where full
actuation is no longer possible.
Recharge Time
Depends on various factors including battery age, state of discharge and to a
lesser degree temperature. Under normal conditions, a fully depleted battery
should charge completely in approximately 5 hours. Recharging occurs automatically provided that the battery is still capable of being charged.
Battery Status
The battery voltage can be read by issuing the RS232 serial command GV. The
controller will respond with the internal Power Supply voltage and the battery
voltage as measured on the main PCB.
Battery Back-up Activation and Operation
The controller software continuously monitors the operating voltage delivered
to it by the internal Power Supply. If that voltage drops below a certain threshold level for more than 50 msec, then the IQ+ disconnects all external power
outputs (such as ±15 VDC), exits its present operational state and drives the
valve closed using battery power. Once the valve is closed, the
IQ+ disconnects itself altogether and shuts down.
Valve Close Speed
The speed at which the valve closes under battery
power is the same as during normal operation.
Resuming Normal Operation
Once normal power is back on, the IQ+ controller will reinitialize the butterfly
valve and be ready for operation after about 30 seconds. However, if the IQ+
controller is configured with the valve initialization safety lock function, then
the J4 serial command needs to be issued before valve initialization can occur.
NOTE: The battery voltage reported may not be a true
indication of the battery’s condition, because the voltage is read
while the battery is in an unloaded state. Nor-Cal recommends
replacing the battery approximately every 24 months, irrespective
of apparent condition or usage history. Please refer to
Appendix I for ordering information. Always obtain replacement battery packs from Nor-Cal Products.
3232
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IntellIsys AdAptIve pressure Controllers
10.0 - Product Support
WARNING: When working with or troubleshooting Nor-Cal APC products extreme care must be taken to avoid putting bodily parts
in or near the valve gate mechanism or other moving parts. These may move suddenly and unexpectedly, and many of them are driven
with sufficient force so as to cause significant harm and possibly even dismemberment. Nor-Cal Products recommends that a lock-out
and tag-out procedure be strictly followed whenever human physical intervention is required on any of its control valves.
CAUTION: DO NOT open the enclosure. Damage to equipment may occur, and unauthorized access to internal parts will void the warranty.
Troubleshooting
Some basic troubleshooting can be done by the user referring to the instructions and suggestions in the table below which describes common symptoms
and recommended actions. The Nor-Cal Products’ IQ+ controller module is designed for years of maintenance free operation. Electronics MTBF has been
determined to be in excess of 10,000 hours continuous operation. There are no user serviceable parts or components inside the enclosure. If a problem does
occur with the IQ+ control electronics or software, please refer to the basic troubleshooting instructions below or contact Nor-Cal Products Intellisys Customer
Support to obtain additional instructions or a Return Materials Authorization number.
TABLE 10.1 – POSSIBLE FAILURE MODES AND RECOMMENDED ACTIONS
SYMPTOMPOSSIBLE CAUSESRECOMMENDED ACTION
IQ+ does not appear to turn on.
No LEDs are illuminated
The IQ+ is on (one or more
LEDs illuminated) but it will not
respond to commands
The IQ+ does not operate and
only the amber FAULT LED is on.
Pressure control performance is
unsatisfactory
The controller / valve will not
respond to a new set-point value
The LEDs are illuminated in an
unknown fashion
The IQ+ is not receiving power properly
The initialization safety lock function is active.
The amber FAULT LED should be on and the
OPEN/CLOSE LEDs should be blinking
The RS-232 serial connections are not
properly made.
Communication settings disagree between
the IQ+ and the host
A communications timeout has occurredCall for Intellisys Technical Support
The valve plate and/or actuator is jammed
There is something wrong with the motor
drive circuitry or the internal power supply
circutry
The IQ+ is not receiving the gauge pressure
signal, or the signal is very noisy
The IQ+ is in valve position control modePut the IQ+ in the correct mode by issuing the proper RS-232 or DeviceNet command
System design or operating range may be
outside the capabilities of the Adaptive
Pressure Control Algorithm
The new set-point value is too close to the
old set-point vlaue
There is too much noise on the Gauge signalChange the Gauge Cable
Check external power supply, cabling and pin assignments. Try to restart the IQ+ by
reconnecting power supply. Operate OPEN/CLOSE switches.
Execute an initialization sequence. Issue a DeviceNet initialization command or send the J4
command via the RS-232 serial port.
Check cabling and pin assignments. Make sure CTS, RTS and DSR connections are not made.
If RS-232 is used, make sure host is set for 9600 Baud, 1 stop bit and no parity. Cycle power
to the IQ+ to refresh dip switch setting.
Cycle power to attempt re-initialization of the valve. For Butterfly Valves, turn power OFF
and try to move the valve plate by hand. If the valve plate is stuck, call of Intellisys Technical
Support
Call to obtain an RMA#
Check the gauge cabling and signal stability. Also, check for electrical noise or system
vibrations, especially if a 100 m Torr (or similar) gauge is used.
Adjust System Parameters: Volume, Delay, Speed
When using serial communications, the difference between two set-point values should be
more than 0.01%
Please refer to Table 12.2 describing valid LED combinations.
Call toll free 800-824-4166 or 530-842-4457 • FAX 530-842-9130
IQ+ OP-LIT 9/08
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IntellIsysAdAptIvepressureControllers
IntellIsys AdAptIve pressure Controllers
10.0 - Product Support (continued)
TABLE 12.2 KEY
O = LED Off
= Green
G
= Flashing Green
FG
= Red
R
FR = Flashing Red
A = Amber
MOD NET CTRL FAULT
OOOOO / O
GGGAG / G
GOOOO / O
ROOOO / O
GFGOOO / O
GFROOO / O
GGOOO / O
GROOO / O
GGGOO / O
OOOAO / O
GGGOG or G
GOGOO / O
GOGOG or G
OOOAFG / FG
TABLE 10.2 – VALID STATUS LED COMBINATIONS
OPE
N/
CLOSE CO
MMENTS
All LEDs off. IQ+ is not receiving power, or internal software is corrupt.
All LEDs on. This is valid for about 1 second after
power-up for initial check-up sequence.
Mod, only, is illuminated (green) during initialization sequence.
Mod, only, is illuminated (red) when the DeviceNet module is
in a non-recoverable fault mode
Mod on (green), Net blinking (green) means
DeviceNet module OK but waiting for a connection
Mod on (green), Net blinking (red) means DeviceNet
module OK but connection has timed out (a recoverable fault)
Mod and Net on (both green) means DeviceNet module OK and device is online
Mod (green) and Net (red) on means DeviceNet
module OK but network has experienced an unrecoverable fault
(Mod, Net and Ctrl are green) IQ+ is in DeviceNet communications mode and it is
acting on a set point with the valve somewhere between open and closed positions
Mod (green) and Fault (amber) are on indicates that IQ+ has either failed part of the
initialization sequence, or the valve plate has jammed
(Mod, Net, Ctrl and OPEN or CLOSE are green) IQ+ is in DeviceNet communications
mode and it is acting on a set point with the valve either in open or closed positions
(Mod and Ctrl are green) IQ+ is in RS-232 communications mode and it is acting on a
set point with the valve somewhere between open and closed positions
(Mod, Ctrl and OPEN or CLOSE are green) IQ+ is in DeviceNet communications mode
and it is acting on a set point with the valve either in open or closed positions
Fault (amber) is on and OPEN / CLOSE are flashing.
This is an indication that the “initialization safety lock function” is active.
3434
Global Sales and Service
Nor-Cal Products maintains sales and service
centers in over 30 countries worldwide.
Please visit our website at www.n-c.com
to find the center nearest you.
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IntellIsysAdAptIvepressureControllers
Diagram 1
Diagram 2
IntellIsys AdAptIve pressure Controllers
APPENDIX I – Spare Parts and Ordering Information
To make the completion of an Intellisys downstream pressure control system easy, Nor-Cal Products offers a comprehensive selection of cables and related accessories. These include signal
and communications cables, power cords, power supplies as well as spare parts.
Model Number Matrix for Adaptive Pressure Controllers IQ+
Use the model number tree at right with the matrix below to define
a valid Nor-Cal Products adaptive pressure controller model number.
Most cable and cord part numbers listed below end with the number 10 as a suffix, which represents the cable length, measured in feet. Thus, Nor-Cal’s standard cable length is 10’
(3m). However, any length between 1’ (0.3m) and 30’ (9.1m) can be supplied as a special request. Please contact Nor-Cal Products for price and availability information.
VALVE CABLELENGTHDESCRIPTION
TBV-CRD-1010’APC-to-Valve cable
GAUGE CABLESLENGTHDESCRIPTION
CDG-IQ-CRD-1010’DC powered APC-to-gauge cable, where gauge has 5-pole terminal block
CDG-IQ-CRD-DB9-1010’DC powered APC-to-gauge cable, where gauge has DB-9 plug connector
CDG-IQ-CRD-DB15-1010’DC powered APC-to-gauge cable, where gauge has DB-15 plug connector
CDG-IQ-CRD-Y1’
Y-cable to be used with DC powered APCs when two-gauge connection is
required. Use of this Y-cable also requires the use of CDG-CRD-10, CDG-CRDDB9-10 or CDG-CRD-DB15-10 cables.
SERIAL CABLESLENGTHDESCRIPTION
IQ-CRD-RS232-1010’Connects any DC powered IQ+ to a standard PC or laptop DB-9 serial port
POWER CORDSDIAGRAM # LENGTH DESCRIPTION
AC Power Cord Plug Configurations
APC -PSM -DB15 Power Supply
CRD-PWR-US1
CRD-PWR-US2
CRD-PWR-UK
CRD-PWR-EU
POWER SUPPLYPART NUMBER
IQ+ Power SupplyPart number pending, call representative for information
BATTERY BACK-UP SPARE PART NUMBER
IQ+ replacement batteryPart number pending, call representative for information
GAUGE POWER SUPPLYPART NUMBER
17’
27’
37’
47’
TBDPart number pending, call representative for information
Call toll free 800-824-4166 or 530-842-4457 • FAX 530-842-9130
10A-125V rated appliance cable.
10A-250V rated appliance cable.
10A-250V rated appliance cable. For use in the UK
10A-250V rated appliance cable. For use in Continental Europe
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IntellIsysAdAptIvepressureControllers
IntellIsys AdAptIve pressure Controllers
Appendix II - Limited Warranty and Intellectual Property Coverage
Products manufactured by Nor-Cal Products, Inc. (hereinafter referred to as “Nor-Cal”) are warranted against defects in material and workmanship for a
period of twelve (12) months from the date of shipment from Nor-Cal to the buyer. Any modification to the product by the buyer or their agent voids this warranty. Liability under this warranty is expressly, limited to replacement or repair (at Nor-Cal ’s option) of defective parts. Nor-Cal may at any time discharge its
warranty as to any of it products by refunding the purchase price and taking back the products. This warranty applies only to parts manufactured, and labor
provided, by Nor-Cal under valid warranty claims received by Nor-Cal within the applicable warranty period and shall be subject to the terms and conditions
hereof. Expendable items such as tubes, heaters, sources, bellows, etc., by their nature may not function for one year; if such items fail to give reasonable service
for a reasonable period of time, as determined solely by Nor-Cal, they will be repaired or replaced by Nor-Cal at its election. All warranty replacement or repair
of parts shall be limited to equipment malfunctions which, in the sole opinion of Nor-Cal, are due or traceable to defects in original materials or workmanship.
Malfunctions caused by abuse or neglect of the equipment are expressly not covered by this warranty. Nor-Cal expressly disclaims responsibility for any loss or
damage caused by the use of its products other than in accordance with proper operating and safety procedures. Reasonable care must be taken by the user to
avoid hazards. In-warranty repaired or replacement parts are warranted only for the remaining unexpired portion of the original warranty period applicable to
the parts that have been repaired or replaced. After expiration of the applicable warranty period, the buyer shall be charged at Nor-Cal’s then current prices for
parts and labor plus transportation. Except as stated herein, Nor-Cal makes no warranty, expressed or implied (either in fact or by operation of law), statutory or
otherwise: and, except as stated herein, Nor-Cal shall have no liability for special or consequential damages of any kind or from any cause arising out of the sale,
installation, or use of any of its products. Statements made by any person, including representatives of Nor-Cal, which are inconsistent or in conflict with the
terms of this warranty shall not be binding upon Nor-Cal unless reduced to writing and approved by an officer of Nor-Cal. Merchandise may be returned at the
sole discretion of Nor-Cal Products, but not more than 60 days after shipment. A fee may be charged for restocking the item. An RMA number must be obtained
from Nor-Cal before returning any merchandise.
Intellectual Property Coverage
The products described in this manual are covered under U.S. Patent numbers 5,134,349; 5,202,613; 5,321,342; and 6,612,331. Additional patents are pending.
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