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IQ+ Adaptive Pressure Controller
User Manual
36 pgs1.25 Mb2

Nor-Cal IQ+ Adaptive Pressure Controller User Manual

Adaptive Pressure Controller
Tel: 800-824-4166
or 530-842-4457
Fax: 530-842-9130
www.n-c.com
1967 So. Oregon
Nor-Cal Products, Inc.
IQ+ OP-LIT 9/08
IntellIsys AdAptIve pressure Controllers
Table of Contents
1.0
............Introduction ..............................................................................................................................................
2.0
............Device Specification ..................................................................................................................................
............Unpacking and Installation ........................................................................................................................
3.0
3.1
....... Master Buried Box Controllers ...................................................................................................................
3.2
....... Slave Buried Box Controllers ......................................................................................................................8
3.3
....... Master On-Board Controllers ....................................................................................................................9
3.4
....... Slave On-Board Controller ......................................................................................................................
4.0
...........Theory of Operation ................................................................................................................................
5.0
............IQ+ Controller Module Interfaces ............................................................................................................
6.0 ..............
6.1
7.0
............DeviceNet Interface .................................................................................................................................
7.1
7.2
8.0
............DeviceNet Device Profile ..........................................................................................................................
8.1
8.2
8.3
8.4
8.5
8.6
8.7
8.8
8.9
8.10
8.11
8.12
8.13
9.0
............Battery Back-Up ......................................................................................................................................
10.0 Appendix I Appendix II - Warranty and Intellectual Property Coverage
RS-232 Serial Interface and Commands ..................................................................................................
....... How to Configure IQ+ for Your System ...................................................................................................
....... Overview and Setup ................................................................................................................................
....... DeviceNet Communications ...................................................................................................................
....... Identity Object ........................................................................................................................................
....... Message Router Object ...........................................................................................................................
....... DeviceNet Object ....................................................................................................................................
....... Assembly Object .....................................................................................................................................
....... I/O Assembly Instances ............................................................................................................................
....... Connection Object..................................................................................................................................
....... Discrete Input Point Object ......................................................................................................................
....... S-Device Supervisor Object ......................................................................................................................
....... S-Analog Sensor Object ..........................................................................................................................
...... S-Analog Actuator Object .......................................................................................................................
...... S-Single Stage Controller Object .............................................................................................................
...... Selection Object ......................................................................................................................................
...... Master / Slave Object ..............................................................................................................................
..........Product Support......................................................................................................................................
- Spare Parts and Ordering Information ..................................................................................................
.............................................................................................
4 5 6 7
10 11 12 13 16 18 18 20 22 23 23 23 23 24 25 25 25 27 28 28 30 31 32 33 35 36
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List of Tables
2.1
......IQ+ Controller General Equipment Specification .............
2.2
.....IQ+ Controller Analog TTL I/O .........................................
2.3
......IQ+ Controller RS-232 Serial I/O ......................................
2.4
......IQ+ Controller Performance ............................................
2.5
......IQ+ Controller Reliability .................................................
3.1
......Buried Box Controllers (Master) .......................................7
3.2
......Buried Box Controllers (Slave) ..........................................8
3.3
......Master On-Board Controllers ..........................................9
3.4
......Slave On-Board Controllers .......................................... 10
5.1
......Dip Switch Configuration ............................................. 12
6.1
.....RS-232 Serial ICommands .............................................
......RS-232 Serial Requests and Responses ..........................
6.2
6.3
......Values for xx for use with Dual Range Mode ..................
..... DeviceNet Commands ............................................................17
6.4 .
6.5 ...... RS-232 Serial Commands .......................................................17
6.6 .....RS-232 Serial Requests and Responses ......................... 17
7.1
......DeviceNet Module LED Status .......................................
7.2
......DeviceNet Network LED Status ......................................
7.3
......DeviceNet Explicit Messaging ........................................
7.4
......Output Assembly Formats .............................................
7.5
......Input Assembly Formats ................................................
8.1.1
... Identity Object Attributes and services ...........................
8.1.2 ..Identity Object Status Bit Map .......................................
8.3.1
... DeviceNet Object Attributes and Services ......................
8.4.1
... Assembly Object Attributes ...........................................
8.5.1
... Output Assembly Instances ...........................................
8.5.2
... Input Assembly Instances ..............................................
8.6.1
... Connection Object Attributes .......................................
8.7.1
... Discrete Input Point Object Attribute; Instance ID 1........
8.7.2
... Discrete Input Point Object Attribute; Instance ID 2....... 25
8.8.1
... S-Device Supervisor Object Attributes and Services ........
8.8.2
... S-Device Supervisor Object Device Status Value ............
8.8.3
... S-Device Supervisor Object Exception Status Bit Map.... 25
8.8.4
..S-Device Supervisor Opject Exception Detail ................. 26
8.9.0
... S-Analog Sensor Object Class Attributes: Instance 0 ..... 27
8.9.1
... S-Analog Sensor Object Attributes; Instance 1,2 .......... 27
8.9.2
... S-Analog Sensor Object Attributes; Instance 3.............. 27
8.9.3
... S-Analog Sensor Object Status Bit Map .........................
13 13 15
18 18 20 21 21 23 23 23 23 24 24 25 25
25 25
27
8.10.1
5 5 5 5 5
.S-Analog Actuator Object Attibutes ..............................
8.10.2
.S-Analog Actuator Exception Status Bit Map .................
.S-Analog Actuator Object Override Value ......................
8.10.3
8.10.4
.S-Analog Actuator Object Safe State Value ...................
8.11.1
.S-Single Stage Controller Object Attributes; Instance 1 ..
8.11.2
.S-Single Stage Controller Object Attributes; Instance 2 ..
8.11.3 . S-Stage Controller Object Control Mode Value .
8.11.4 . S-Single Stage Controller Object Status Bit Map ......................29
8.11.5 . S-Single Stage Controller Object Safe State Value....................29
8.12.1 . Selection Object Attributes; Instance 1 ....................................29
8.12.2 . Selection Object Attributes; Instance 2 ....................................30
8.13.1 . Master/Slave Object Attributes ...............................................31
8.13.2 . Master/Slave Object Individual Valve Control (Action) Valve .....31
8.13.3 . Master/Slave Object Device Status Value .................................31
8.13.4 . Master/Slave Object Cluster Information Bit Map ....................31
8.13.5 . Slave Network LED Status .......................................................32
10.1 .... Possible Failure Modes and Recommended Actions ................33
10.2 .... Valid Status LED Combinations ...............................................34
......................29
List of Figures
3.1
......Buried Box Controller (Master) ........................................7
3.2
......Buried Box Controller (Slave) ...........................................
3.3 ...... On-Board Controller (Master) ...................................................9
3.4
......On-Board Controller (Slave) ...........................................
4.1 ...... Typical Installation and Configuration of a Buried Box IQ+ ..........
............ Pressure Control System .........................................................11
4.2 .....Typical Installation and Configuration of an IQ+ Pressure ..
...........Control Valve ............................................................... 11
6.1 .....Volume Too Low Slow Oscillations at set point .............. 16
6.2 .....Volume Too High Undershoot ...................................... 16
6.2.1 ..Volume Too High Slow Valve Movement, Slow ............ 16
6.3 .....Delay Too Low Overshoot and Pressure Oscillation........ 16
6.4 .....Speed Too High Low Speed Oscillations ........................ 17
6.5 .....Speed Too Low Undershoot, slow valve movement ...... 17
7.1 .....DeviceNet Connector Pin Assignment .......................... 18
7.2 .....DeviceNet Baud Rate Selection Switch ..........................
7.4
......Typical DeviceNet Hardware Installation ........................
8.1
......Object Model for the Process Control Valve Device ........
8.2
......Object State Transition Diagram ....................................
28 28 28 28 28 29
8
10
18 19 22 27
Information in this manual is subject to change without notice.
Call toll free 800-824-4166 or 530-842-4457 • FAX 530-842-9130
Contact Nor-Cal Products
Intellisys Customer Support
at 800-824-4166 ext. 186
or visit our website
at www.n-c.com
IQ+ OP-LIT 9/08
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IntellIsys AdAptIve pressure Controllers
1.0 - Introduction
Thank you for purchasing the new Intellisys™ IQ+ downstream adaptive pressure controller from Nor-Cal Products. Before installing and operating the product, please read this manual thoroughly as it contains critical correction, interface and operating tips. If you encounter any problems, or if you have any questions, please contact our Intellisys Customer Service Support at 800-824-4166, ext. 186 or visit our web site at www.n-c.com.
Nor-Cal Products’ IQ+ pressure controllers are designed for downstream pressure control over a wide range of vacuum control applications. The IQ+ controller is a self-contained unit that incorporates all control electronics and associated pressure control software. IQ+ controllers are available in Analog, DeviceNet and Ethernet communication protocols. Buried box versions connect to the valve via a valve cable, while QPA, QPD and QPE controllers are mounted directly on the valve. Any IQ+ controller, regardless of type, accepts the inputs from one or two pressure gauges as well as communications to the host controller, thus making it the heart of a pressure control loop.
All models have local open/close switches, LED status lights and RS232 communication.
Important Personnel Safety and Product Protection Information
Throughout this manual, information that is of particular importance to the installation, the safety of oper­ating personnel and the protection of equipment are highlighted by the following three symbols. The WARNING symbol is also used on the equipment wherever necessary.
NOTE: Calls attention to helpful tips about proper
installation, maintenance or use of the controller.
CAUTION: Highlights areas of concern that, if overlooked, could
result in damage to the controller or surrounding equipment.
WARNING : Alerts the installation, operating or maintenance
personnel of hazardous aspects of the controller, which, if ignored could result in serious personal injury or death.
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2.0 - Device Specification
The following tables summarize specifications essential to the installation and hook-up of the IQ+ product. Please note that the information herein is limited to the IQ+ controller. For valve installation instructions and guidelines, please refer to the appropriate Valve Operating Manual.
TABLE 2.1 – IQ+ CONTROLLER GENERAL EQUIPMENT SPECIFICATIONS
FEATURE SPECIFICATION
Dimensions Please refer to the diagram specific to sections 3.1 to 3.5 Weight, in lbs (kg) 1.1 lb (0.5 kg) Rated Input Voltage 24 VDC ±10% Rated Current 5.0 A @ 24 VDC max, 1.5 A @ 24 VDC average Rated Input
Protection Gauge Power Supply
(Optional) Protection Class I Degree of Protection
(IP) Laser Class 1 (LED’s) Certifications/EU
Directives Maximum Altitude 6562 ft (2000 m) Allowable Ambient
Operating Temperature
Allowable Ambient Humidity
Installation Clearance
FEATURE SPECIFICATION
Analog (Gauge) Input 0 to 10V differential Analog Output 0 to 10V unipolar @ 35 mA, short circuit protected
TTL Input
TTL Output Open collector, optically isolated, 25V @ 10 mA max
29 Volts max, reverse and current limited
± 15 VDC @ 1400 mA
X0
CE Standard for Process Equipment including EMC Directive 89/336/EC for D/C powered models..
32ºF to 113ºF (0ºC to 45ºC)
0 to 95% non-condensing
3” (75 mm) on all perforated sides. A minimum of 3½” (90 mm) is needed to allow for connectors. If access and line of sight is required for LED’s and switches a minimum of 6” (150mm) is required on those sides.
TABLE 2.2 – IQ+ CONTROLLER ANALOG TTL I/O
Diode protected at –0.4 VDC, compatible with open collector relay closure or standard logic signals, 25V max. Maximum low input voltage is 0.6V and minimum sink current is 1 mA. Minimum high input voltage is 2.5V, or open.
TABLE 2.3 –IQ+ CONTROLLER RS-232 SERIAL I/O
FEATURE SPECIFICATION
Communications Settings
Connections
Communications Protocol See Section 6.0 in this manual
End of line delimiter
TABLE 2.4 – IQ+ CONTROLLER PERFORMANCE
FEATURE
Valve speed (open to closed)
Control range
Accuracy
Repeatability 0.12% of reading 0.12% of reading
FEATURE BUTTERFLY VALVES PENDULUM VALVE
Electronics MTBF >10,000 hours >10,000 hours Warranty 1 year 1 year
BUTTERFLY VALVES
125 to 250 msec, depending on valve size
0.5% to 100% of gauge
0.25% of reading (5mV min)
TABLE 2.5 – IQ+ CONTROLLER RELIABILITY
Factory configured at 9600 baud, 1 stop bit, no parity, 8-bit character
Rxd Data, Txd data and Common. No handshake connections.
Carriage return (ASCII 0x0D) or Line Feed (ASCII 0x0A) or carriage return then line feed in that order
GATE & PENDULUM VALVES
2 to 5 sec, depending on valve size
0.5% to 100% of gauge
0.25% of reading (5mV min)
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IQ+ OP-LIT 9/08
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IntellIsys AdAptIve pressure Controllers
3.0 - Unpacking and Installation
Inspect the shipping box before unpacking. Any damage should be reported to Nor-Cal Products or directly to the transportation carrier. Carefully remove the product from the box and visually inspect it for damage. If return of the product to Nor-Cal Products should become necessary, please contact Intellisys Customer Service to obtain a Return Materials Authorization (RMA) Number.
NOTE: Do not discard the packing materials until the product has been inspected to your satisfaction.
Pre-Installation Functionality Check
Nor-Cal Products carefully ensures that every product shipped is in perfect working condition. However, it is still a good idea to quickly check the functionality of the unit prior to installation into the vacuum system. To do so, for buried box IQ+ controllers, connect the controller to the valve and then to an appropriate +24DC, 4A power source. For all valve IQ+ controllers simply apply the +24DC, 4A power source. The butterfly valves will complete a 30 second valve initialization sequence ... the valve will stop in the open positoin. For soft shut (TSS) valves and pendulum (TPV) valves press the open and close buttons at the same time. The valves will begin the valve initialization sequence like the butterfly valve. The length of time to complete this sequence will vary from 40-60 seconds depending upon the type and size of valve. The valve will complete a 30-second initialization sequence during which the valve plate will cycle back-and-forth a few times while the OPEN/CLOSE LEDs blink in an alternat­ing pattern. The valve will eventually stop in the open position. Further verification of the system can be done by toggling the “OPEN / CLOSE” switch (if available) on the controller front panel. If the valve does not operate as described please contact Nor­Cal Technical Support.
avoid putting bodily parts in or near the valve gate mechanism or other moving parts. These may move
WARNING : When working with or troubleshooting Nor-Cal APC products extreme care must be taken to
suddenly and unexpectedly, and many of them are driven with sufficient force so as to cause significant harm and possibly even dismemberment. Nor-Cal Products recommends that a lock-out and tag-out procedure be strictly followed whenever human physical intervention is required on all of its control valves.
Installation
To allow for proper ventilation, make sure that at least 3 inches of unobstructed space is available adjacent to all perforated sides of the IQ+ controller. Then, complete all cable connections as required referring to the figures and pin assignment tables in Sections 3.1 – 3.3 of this manual. A list of pre-manufactured cable assemblies available from Nor-Cal Products can be found in Appendix I.
CAUTION: The optional +15V and –15V power supply pins of the IQ+ gauge connector are power sources
that are intended to power the optional system pressure gauge(s). It can supply a maximum of 1500 mA. Do not use for any other purpose and do not connect to the tool main 15V supply as the two supplies would
interfere with each other.
NOTE: Low voltage controller models do not have a power on/off switch. Consider installing an external
power on/off switch between the DC power supply and the controller to allow for de-energizing the unit
without having to disconnect the cable.
IQ+ OP-LIT 9/08
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IntellIsys AdAptIve pressure Controllers
Net Ctrl
Fault
0
2
4
6
8
0
2
4
6
8
VALVE
GAUGE
P O W ER
POWER
SVC
PORT
2
5
P
1
RATE
SW1
C LOS E
O P EN
IQ+ SERIES
ADAPTIVE PRESSURE CONTROLLER
Mod
3.1 - Master Buried Box Controllers
TABLE 3.1 – BURIED BOX CONTROLLERS (MASTER)
POWER (XLR) SERVICE PORT VALVE AUXILIARY DEVICENET GAUGE
PIN FUNCTION PIN FUNCTION PIN SIGNAL
ASSIGNMENT
1 +24VDC
Power Input
2 Power Return 2 Authorized
3 Drain
4 N-C Net Hi
5 NC- Net Low
1
2
2
1 Authorized
Technicians Only
Technicians Only
3 Authorized
Technicians Only
1 Drive A + 1 Reserved 1 Drain 1 CDG1 +
2 Drive A- 2 RS232 TX 2 DNET Power
3 Drive B- 3 RS232 RX 3 DNET Power
4 Drive B + 4 Digital
5 Sense B - 5 Reserved 5 CAN L 5 CDG2 +
6 Sense B + 6 RS485 A 6 CDG2 -
7 Sense A - 7 Reserved 7 Reserved
8 Sense A + 8 RS485 B 8 CDG1 -
9 Reserved 9 TTL IN 0 9 CDG Power Ground
10 Reserved 10 TTL IN 1
11 Reserved 11 Digital
12 Reserved 12 TTL Com
13 Reserved 13 TTL Out 0
14 Reserved 14 TL Out 1
15 Reserved 15 Chassis
PIN FUNCTION PIN FUNCTION PIN FUNCTION
2 + 15VDC CDG Power
3 - 15VDC CDG Power
Ground
Ground
Ground
in +
in -
4 CAN H 4 Reserved
(Optional)
(Optional)
FIGURE 3.1 – BURIED BOX
CONTROLLER (MASTER)
1
Connect to Earth Ground at power supply
2
N-C Net is a proprietary communication protocol. Do not connect these pins to anything other than approved Nor-Cal items.
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IQ+ OP-LIT 9/08
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IntellIsys AdAptIve pressure Controllers
O P EN
C L OSE
Ctrl
Fault
1
3
5
7
9
SLAVE ID
POWER
Net
SVC
PORT
IQ+ SERIES
AADDAAPPTTIIVVEE PPRREESSSSUURREE CCOONNTTRROOLLLLEERR
P O W E R
VALVE
3.2 - Slave Buried Box Controllers
POWER (XLR) SERVICE PORT VALVE
PIN FUNCTION PIN FUNCTION PIN SIGNAL ASSIGNMENT
1 +240VDC Power Input 1 Authorized Technicians
2 Power Return 2 Authorized Technicians
3 Drain
4 N-C Net Hi
5 NC- Net Low
1
2
2
TABLE 3.2 – BURIED BOX CONTROLLERS (SLAVE)
Only
Only
3 Authorized Technicians
Only
1 Drive A +
2 Drive A -
3 Drive B -
4 Drive B +
5 Sense B -
6 Sense B +
7 Sense A -
8 Sense A +
9 Reserved
10 Reserved
11 Reserved
12 Reserved
13 Reserved
14 Reserved
15 Reserved
FIGURE 3.2 – BURIED BOX CONTROLLER (SLAVE)
1
Connect to Earth Ground at power supply
2
N-C Net is a proprietary communication protocol. Do not connect these pins to anything other than approved Nor-Cal items.
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RATE
Net
Mod
Ctrl
Fault
0
2
4
6
8
0
2
4
6
8
MSD
LSD
AUXILIARY
GAUGE
POWER
SVC
PORT
IQ + SERIES
A DAP TIVE P R ES SU RE C ON TR OLL ER
C L O SE
O P E N
2
5
P
1
3.3 - Master On-Board Controllers
TABLE 3.3 – ON-BOARD CONTROLLER S(MASTER)
POWER (XLR) SERVICE PORT AUXILIARY DEVICENET GAUGE
PIN FUNCTION PIN FUNCTION PIN FUNCTION PIN FUNCTION PIN FUNCTION
1 +24VDC Power
Input
2 Power Return 2 Authorized
3 Drain
4 N-C Net Hi
5 NC- Net Low
1
2
2
1 Authorized
Technicians Only
Technicians Only
3 Authorized
Technicians Only
1 Reserved 1 Drain 1 CDG1 +
2 RS232 TX 2 DNET Power
3 RS232 RX 3 DNET Power
4 Digital Ground 4 CAN H 4 Reserved
5 Reserved 5 CAN L 5 CDG2 +
6 RS485 A 6 CDG2 -
7 Reserved 7 Reserved
8 RS485 B 8 CDG1 -
9 TTL IN 0 9 CDG Power Return
10 TTL IN 1
11 Digital Ground
12 TTL COM
13 TTL OUT 0
14 TL OUT 1
15 Chassis Ground
in +
In -
2 + 15VDC CDG Power
(Optional)
3 - 15VDC CDG Power
(Optional)
(Optional)
FIGURE 3.3 – ON-BOARD CONTROLLER (MASTER)
IQ+ OP-LIT 9/08
1
Connect to Earth Ground at power supply
2
N-C Net is a proprietary communication protocol. Do not connect these pins to anything other than approved Nor-Cal items.
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9
IntellIsys AdAptIve pressure Controllers
O P EN
C LO S E
Ctrl
Fault
POWER
Net
1
3
5
7
9
SVC
PORT
IQ+ SERIES
AADDAAPPTTIIVVEE PPRREESSSSUURREE CCOONNTTRROOLLLLEERR
SLAVE ID
P O W ER
3.4 - Slave On-Board Controllers
POWER (XLR) SERVICE PORT
PIN FUNCTION PIN FUNCTION
1 +24VDC Power Input 1 Authorized Technicians Only
2 Power Return 2 Authorized Technicians Only
3 Drain
4 N-C Net Hi
5 NC- Net Low
TABLE 3.4 - ON-BOARD CONTROLLERS (SLAVE)
1
2
2
3 Authorized Technicians Only
FIGURE 3.4 – ON-BOARD CONTROLLER (SLAVE)
1
Connect to Earth Ground at power supply
2
N-C Net is a proprietary communication protocol. Do not connect these pins to anything other than approved Nor-Cal items.
1010
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Vacuum Chamber
Pump
DC power supply
Host system with
RS232/485 or DeviceNet
communications
Nor-Cal IQ+ Valve
Vacuum gauge(s)
Vacuum Chamber
Pump
DC power supply
Host system with
RS232/485 or DeviceNet
communications
IQ+ Controller
Nor-Cal throttle valve
Vacuum gauge(s)
4.0 - Theory of Operation
All IQ+ controllers are designed for downstream pressure control (see Fig 4.1 and 4.2). As such, it is one of several important components in a pressure control system. Other essential components include a host system computer, a throttle valve and one or two vacuum gauges, such as a Capacitance Diaphragm Gauge (CDG), and a pump system. Most manufacturers’ vacuum gauges can be used to provide the vacuum measurement signal, provided they have a voltage output proportional to pressure. The IQ+ controller requires a pressure gauge signal output that is 0-10V linear and proportional to pressure.
FIGURE 4.1 – TYPICAL INSTALLATION AND CONFIGURATION OF A BURIED BOX IQ+ PRESSURE CONTROL SYSTEM
Initialization Sequence
When first powered up, butterfly valves with the IQ+ controller will run the valve through an initialization sequence that lasts for approximately 30 seconds. The primary purpose for this operation is for the controller to determine the fully open and closed points, as well as for certain motor and position calibration steps to occur. While the initialization sequence is active, the amber FAULT light will be illuminated and the OPEN/CLOSE LEDs both will be extinguished. Once the initialization sequence is complete, the valve will move to the fully open position and the green OPEN LED will illuminate.
NOTE: The controllers for TPV pendulum valves and TSS
gate valves contain a valve initialization safety lock function.
This safety lock will prevent valve initialization to occur until given a “clear-to-proceed” command. The RS-232 serial command for this is T4.
CAUTION: Never attempt to initialize a throttle valve with
differential pressure across the sealing gate. Make sure the
pressure on both sides is equalized to ±20 Torr. Damage to pumps and other equipment can occur otherwise.
FIGURE 4.2 – TYPICAL INSTALLATION AND CONFIGURATION OF AN IQ+ PRESSURE CONTROL VALVE
Normal Operation
After the initialization sequence is complete normal operation of the valve is possible. There are two primary modes of operation, a) position control mode and b) pressure control mode.
In position control mode, the valve will move to any position in its range based on a position set-point command from the host. The valve will remain in that position until instructed to do otherwise. Position control mode can be useful in certain cases where pre-determined amount of throttling is necessary.
Pressure control mode, is used whenever control to a specific process
pressure level is desired. The host provides the set-point value to the controller which, in turn, moves the valve to achieve that set point as quickly as possible. During pressure control mode, external perturbations such as flow changes and plasma events will automatically be compensated for by the controller so that the pressure set-point is maintained. The value can be changed by the host at any time.
Tuning
The IQ+ controller contains an Adaptive Pressure Control Algorithm that has been designed to work over a wide range of flow and pressure combina­tions. In some cases 3 system parameters may have to be adjusted. These include system volume, system delay and speed. See Section 6.1: How to
configure IQ+ for your system.
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