............Unpacking and Installation ........................................................................................................................
....... DC Powered Controllers with Serial I/O Interface .......................................................................................
3.4
....... DC Powered Controllers with Serial and Analog/TTL I/O Interface ............................................................
3.5
....... DC Powered Contollers with Serial and DeviceNet I/O Interface ..............................................................
3.6
....... DC Powered IQA Controlled Valve with Serial and Analog/TTL I/O Interface ............................................
3.7
....... DC Powered IQD Controlled Valve with Serial and DeviceNet I/O Interface ...............................................
4.0
............Theory of Operation ................................................................................................................................
12.0
Appendix I
Appendix II - Warranty and Intellectual Property Coverage
RS-232 Serial Interface and Commands ..................................................................................................
....... Overview and Setup ................................................................................................................................
....... Establishing a DeviceNet connection .......................................................................................................
..........LCD Front Panel Interface ...........................................................................................................................................................................
...... Commonly Used Function Buttons ..........................................................................................................34
.....Utility Menu ............................................................................................................................................38
Intellisys Downstream Pressure Control system .............
IQ Pressure Control valve ...............................................
Contact Nor-Cal Products
Intellisys Customer Support
at 800-824-4166 ext. 186
or visit our website
at www.n-c.com
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3
IntellIsys AdAptIve pressure Controllers
1.0 - Introduction
Thank you for purchasing a new Intellisys™ adaptive downstream pressure controller (APC) from Nor-Cal Products. Before installing and operating the product,
please read this manual thoroughly as it contains critical hook-up and operating tips. If you encounter any problems, or if you have any questions, please contact
our Intellisys Customer Service Support at 800-824-4166, ext. 186 or visit our web site at www.n-c.com.
Nor-Cal Products’ APCs are designed for downstream pressure control over a wide range of vacuum control applications. The APC is a self-contained unit that
incorporates all control electronics and associated pressure control software. APCs are available in different models. Line voltage and low voltage buried box
versions connect to the valve via a valve cable. IQA and IQD controllers are already mounted on the valve. Any APC, regardless of type, accepts the inputs from
one or two pressure gauges as well as communications to the host controller, thus making it the heart of a pressure control loop.
Limited local operation is possible on some models via the on valve open/close switches. Other models offer full programmability and operation via a front panel
display and interface. Local status lights also help the operator during operation, maintenance or troubleshooting. Remote operation or monitoring can be
effected either through the serial RS-232, Analog/TTL and in some cases the DeviceNet communication interfaces.
Important Personnel Safety and Product Protection Information
Throughout this manual, information that is of particular importance to the installation, the safety of operating personnel and the protection of equipment are highlighted by the following three symbols.
The WARNING symbol is also used on the equipment wherever necessary.
NOTE: Calls attention to helpful tips about proper
installation, maintenance or use of the controller.
CAUTION: Highlights areas of concern that, if overlooked, could
result in damage to the controller or surrounding equipment.
WARNING : Alerts the installation, operating or maintenance
personnel of hazardous aspects of the controller, which, if
ignored could result in serious personal injury or death.
APC-OP-LIT 1/12
44
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IntellIsys AdAptIve pressure Controllers
2.0 - Device Specification
The following tables summarize specifications essential to the installation and hook-up of the APC-Series product. Please note that the information herein is limited to the APC controller. For valve installation instructions and guidelines, please refer to the appropriate Valve Operating Manual.
TABLE 2.1 – APC CONTROLLER GENERAL EQUIPMENT SPECIFICATIONS
FEATURESPECIFICATION
DimensionsPlease refer to the diagram specific to sections 3.1 to 3.5
Weight, in lbs (kg)
Rated Input Voltage
Rated FrequencyA/C Powered models only: 50-60 Hz
Rated Current
Rated Input
Protection
Rated Output Power
(for gauge excitation)
Protection ClassI
Degree of Protection
(IP)
Laser Class1 (LED’s)
Certifications/EU
Directives
Maximum Altitude6562 ft (2000 m)
Allowable Ambient
Operating
Temperature
Allowable Ambient
Humidity
Installation Clearance
IQA and IQD models: N/A, included in valve weight
Low voltage models: 2.0 (0.9)
A/C powered models: 3.5 (1.6)
Low voltage models: 24 VDC ±10%, differential
A/C powered models: 100 to 240 VAC
Low voltage models: 3.0 A @ 24 VDC max,
1.0A @ 24 VDC average
A/C powered models: 1.0A typ @ 115 VAC 3A max
Low voltage models: 35 volts max, reverse-
and internal current resettable fuse
A/C powered models: 300 VA slow blow fuse
Low voltage models: ± 15 VDC @ 700 mA
A/C powered models: ± 15 VDC @ 800 mA, 2X
X0
CE Standard for Process Equipment including EMC Directive
89/336/EC for D/C powered models. Low Voltage Directive
2006/95/EC to EN 61010-1:2001 for A/C powered models
32ºF to 113ºF (0ºC to 45ºC)
0 to 95% non-condensing
3” (75 mm) on all perforated sides. A minimum of 3½”
(90 mm) is needed to allow for connectors. If access and
line of sight is required for LED’s and switches a minimum
of 6” (150mm) is required on those sides.
TABLE 2.2 – APC CONTROLLER ANALOG TTL I/O
FEATURESPECIFICATION
Analog (Gauge)
Input
Analog Output0 to 10V differential @ 35 mA, short circuit protected
TTL Input
TTL OutputOpen collector, optically isolated, 25V @ 10 mA max
FEATURESPECIFICATION
Communications Settings
Connections
Communications ProtocolSee Section 6.0 in this manual
End of line delimiter
FEATURE
Valve speed
(open to closed)
Control range
Accuracy
Repeatability0.12% of reading0.12% of reading
FEATUREBUTTERFLY VALVESPENDULUM VALVE
Electronics
MTBF
Warranty1 year1 year
0 to 10V differential
Diode protected at –0.4 VDC, compatible with open collector
relay closure or standard logic signals, 25V max. Maximum
low input voltage is 0.6V and minimum sink current is 1 mA.
Minimum high input voltage is 2.5V, or open.
TABLE 2.3 – APC CONTROLLER RS-232 SERIAL I/O
Factory configured at 9600 baud, 1 stop bit,
no parity, 8-bit character
Rxd Data, Txd data and Common.
No handshake connections.
Carriage return (ASCII 0x0D) or Line Feed (ASCII
0x0A) or carriage return then line feed in that order
TABLE 2.4 – APC CONTROLLER PERFORMANCE
BUTTERFLY
VALVES
125 to 250 msec,
depending on valve size
0.5% to 100% of
gauge
0.25% of reading 5mV
min
TABLE 2.5 – APC CONTROLLER RELIABILITY
>10,000 hours>10,000 hours
GATE & PENDULUM VALVES
2 to 5 sec, depending on valve size
0.5% to 100% of gauge
0.25% of reading 5mV min
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APC-OP-LIT 1/12
5
IntellIsys AdAptIve pressure Controllers
3.0 - Unpacking and Installation
Inspect the shipping box before unpacking. Any damage should be reported to Nor-Cal Products or directly to the transportation carrier. Carefully remove
the product from the box and visually inspect it for damage. If return of the product to Nor-Cal Products should become necessary, please contact Intellisys
Customer Service to obtain a Return Materials Authorization (RMA) Number.
NOTE: Do not discard the packing materials until the product has been inspected to your satisfaction.
Pre-Installation Functionality Check
Nor-Cal Products carefully ensures that every product shipped is in perfect working condition. However, it is still a good idea to
quickly check the functionality of the unit prior to installation into the vacuum system. To do so, connect the APC controller to
the valve and then to an appropriate power source. The valve will complete a 30-second initialization sequence during which
the valve plate will cycle back-and-forth a few times while the OPEN/CLOSE LEDs blink in an alternating pattern. The valve will
eventually stop in the open position. Further verification of the system can be done by toggling the “OPEN / CLOSE” switch
(if available) on the controller front panel. If the valve does not operate as described please contact Nor-Cal technical support.
other objects away from the valve opening and associated moving parts.
Installation
To allow for proper ventilation, make sure that at least 3 inches of unobstructed space is available adjacent to all perforated
sides of the APC controller. Then, complete all cable connections as required referring to the figures and pin assignment
tables in Sections 3.1 – 3.3 of this manual. A list of pre-manufactured cable assemblies available from Nor-Cal Products
can be found in Appendix I.
WARNING : The valve plate movement presents a pinching hazard. Please keep fingers, hands or
CAUTION: The +15V and –15V power pins of the APC’s gauge connector are power sources
that are intended to power the system pressure gauge(s). It can supply a maximum of 700 mA.
Do not use for any other purpose and do not connect to the tool main 15V supply as the two
supplies would interfere with each other.
CAUTION: For all low voltage controller models, the Power V+ and Power V- pins of the DeviceNet or Analog/TTL connector are directly linked to the Power V+ and Power V- pins of the Auxiliary Connector.
Make sure to only use one or the other.
NOTE: Low voltage controller models do not have a power on/off switch. Consider installing an external
power on/off switch between the DC power supply and the controller to allow for de-energizing the unit
without having to disconnect the cable.
Refer to the following diagrams and tables when connecting to an A/C powered APC Touch Panel Controller including models APC-150-A, APC-250-A, APC-350-A, APC-
750-A and APC-850-A.
TABLE 3.1.1 - (J3 & J4)
“APC-X50-A” GAUGE
CONNECTOR DB-9 RECEPTACLE
(IDENTICAL PINOUTS)
SIGNAL
PIN
ASSIGNMENT
1Signal input from gauge
2N/C
3N/C
4+15VDC output to gauge
5-15VDC output to gauge
6N/C
7N/C
Refer to the following diagrams and tables when connecting to an A/C powered APC Buried Box Controller including models APC-100-A, APC-200-A, APC-300-A, APC-
700-A and APC-800-A.
TABLE 3.2.1 - (J3 & J4)
“APC-X00-A” GAUGE
CONNECTOR DB-9 RECEPTACLE
(IDENTICAL PINOUTS)
SIGNAL
PIN
ASSIGNMENT
1Signal input from gauge
2N/C
3N/C
4+15VDC output to gauge
5-15VDC output to gauge
6N/C
7N/C
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9
IntellIsys AdAptIve pressure Controllers
Status LEDs
3.4 – DC Powered Controllers with Serial and Analog/TTL I/O Interface
Refer to the following diagram and tables when connecting to a DC powered APC controller
including models APC-100L-A, APC-200L-A, APC-300L-A, APC-700L-A and APC-800L-A.
TABLE 3.4.2 - (SW1) “APC-X00L-A” DIP SWITCHES
SWITCH 1SWITCH 2SWITCH 3 SWITCH 4
TABLE 3.4.1 – (J4) “APC-X00L-A”
ANALOG / TTL CONNECTOR,
DB-25 RECEPTACLE
PINFUNCTION
1
Chassis GND
RS-232TX (data from IQ
2
to host)
RS-232RX (data from
3
host to IQ)
4
Analog CDG Out
5
Analog GND
6
Analog Valve Out
7
Digital GND
\Analog SP Control
8
Select In\
9
Analog SP+ In
10
Analog SP- In
11
Power RTN
12
Power 24V in
13
\CDG2 Select In\
14
See NOTE below
\Position Control Select
15
In\
16
N/C
17
Analog GND
18
\Close Valve In\
19
\Open Valve In\
20
Fault Out
21
N/C
22
\Valve Open Out\
23
\Valve Closed Out\
24
TTL Out Common
25
Chassis GND
NOTE: For 100L-A, 200L-A
and 300L-A series controllers, pin
14 is defined as \Hold Valve Select In\
OFF (up)
ON (down)
9600 baud8 bit, no parity1 stop bit
19200 baud
Status
LEDs
TABLE 3.4.4 - (J3) “APC-X00L-A”
AUXILIARY CONNECTOR,
DB-15 RECEPTACLE
PINFUNCTION
1
Not used
RS-232 TX (data from IQ
2
to host)
RS-232 RX (data from
3
host to IQ)
4
Digital GND
5
Power RTN
6
Not used
7
Power +24V in
8
Not used
9
Analog CDG Out
10
Analog Valve Out
11
Analog GND
12
TTL Out Common
13
\Valve Open Out\
14
\Valve Closed Out\
15
Chassis GND
7 bit, even parity
(1 stop bit only)
4.78
5.74
2 stop bits
PIN FUNCTION
1
2
3
4
5
6
7
8
9
0-10 V Analog
in
0 to 5V
Analog in
2.51
5.69
TABLE 3.4.5 - (J2) “APC-X00L-A”
GAUGE CONNECTOR,
DB-9 RECEPTACLE
Signal input from gauge 1
+15 V supply to gauge
-15 V supply to gauge
Not used
Signal input from gauge 2
Signal common from gauge 2
Not used
Signal common from gauge 1
Power supply common
series controllers, pin 14 is defined as \Valve Initialization Enable In\
1010
APC-OP-LIT 1/12
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2.51
5.74
5.69
4.78
Indicating LEDs
1
4
3
2
5
3.5 - DC Powered Controllers with Serial and DeviceNet I/O Interface
Refer to the following diagrams and tables when connecting to an D/C powered APC controller including models APC-100L-D, APC-200L-D, APC-300L-D, APC-700L-D and
APC-800L-D.
9600 baud8 bit, no parity1 stop bit0 to 10 V Analog In
19200 baud
7 bit, even parity
(1 stop bit only)
POWER
Indicating
LEDs
CTRL
FAULT
SW1
2 stop bits0 to 5 V Analog In
Valve Open/Close
membrane switches
ANALOG/TTL
AUXILIARY
TM
GAUGE
TABLE 3.6.3 – (J2)
“IQA” GAUGE CONNECTOR,
DB-9 RECEPTACLE
PIN #FUNCTION
1
Signal input from gauge 1
2
+15 V supply to gauge
3
-15 V supply to gauge
4
Not used
5
Signal input from gauge 2
6
Signal common from gauge 2
7
N/C
8
Signal common from gauge 1
9
Power supply common
TABLE 3.6.4 – (J4) “IQA”
ANALOG/TTL CONNECTOR,
DB-25 RECEPTACLE
PINFUNCTION
1
Chassis GND
2
RS-232TX (data from IQ to host)
3
RS-232RX (data from host to IQ)
4
Analog CDG Out
5
Analog GND
6
Analog Valve Out
7
Digital GND
8
\Analog SP Control Select In\
9
Analog SP+ In
10
Analog SP- In
11
Power RTN
12
Power +24V in
13
\CDG2 Select In\
14
See NOTE below
15
\Position Control Select In\
16
N/C
17
Analog GND
18
\Close Valve In\
19
\Open Valve In\
20
Fault Out
21
N/C
22
\Valve Open Out\
23
\Valve Closed Out\
24
TTL Out Common
25
Chassis GND
NOTE: When IQA is installed on a
TBV valve, pin 14 is defined as \Hold
Valve Select In\
NOTE: When IQA is installed on a
TPV or TSS valve, pin 14 is defined
as \Valve Initialization Enable In\
1212
APC-OP-LIT 1/12
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IntellIsys AdAptIve pressure Controllers
1
4
3
2
5
3.7 - DC Powered IQD Controlled Valve with Serial and DeviceNet I/O Interface
Refer to the following diagram and tables when connecting to an IQD controller including models TBV-IQD, TSS-IQD and TPV-IQD.
TABLE 3.7.1 –
(J1) “IQD” DEVICENET
NETWORK CONNECTOR
PIN FUNCTION
1
Drain
2
Power In +
3
Power In -
4
CAN H
5
CAN L
Indicating LEDs
AUXILIARY
TM
Valve Open/Close
membrane switches
GAUGE
TABLE 3.7.2 – (J2) “IQD”
AUXILIARY CONNECTOR,
DB-15 RECEPTACLE
PINFUNCTION
1
Not used
RS-232 TX (data from IQ to
2
host)/485 (A)
RS-232 RX (data from host to
3
IQ)/485 (B)
4
Digital GND
5
Power RTN
6
Not used
7
Power +24V in
8
Not used
9
Analog CDG1 Out
10
Analog Valve Out
11
Analog GND
12
TTL Out Common
13
\Valve Open Out\
14
\Valve Closed Out\
15
Chassis GND
TABLE 3.7.3 – (J3) “IQD”
GAUGE CONNECTOR,
DB-9 RECEPTACLE
PIN #FUNCTION
1
Signal input from gauge 1
2
+15 V supply to gauge
3
-15 V supply to gauge
4
Not used
5
Signal input from gauge 2
6
Signal common from gauge 2
7
Not used
8
Signal common from gauge 1
9
Power supply common
APC-OP-LIT 1/12
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13
IntellIsys AdAptIve pressure Controllers
4.0 - Theory of Operation
All APC controllers are designed for downstream pressure control (see Fig 4.1 and 4.2). As such, it is one of four important components in a pressure
control system. The other three essential components include a host system computer, a throttle valve and one or two vacuum gauges, such as a
Capacitance Diaphragm Gauge (CDG). Most manufacturers’ vacuum gauges can be used to provide the vacuum measurement signal, provided
they have a voltage output proportional to pressure.
AC or DC power supply
APC Controller
Host system with
RS232/485 or DeviceNet
communications
FIGURE 4.1 – TYPICAL INSTALLATION AND CONFIGURATION OF A BURIED
BOX INTELLISYS DOWNSTREAM PRESSURE CONTROL SYSTEM
Vacuum
gauge(s)
Vacuum Chamber
Pump
Nor-Cal
throttle
valve
Initialization Sequence
When first powered up, the APC controller will run the valve through an
initialization sequence that lasts for approximately 30 seconds. The primary
purpose for this operation is for the controller to determine the fully open
and closed points, as well as for certain motor and position calibration steps
to occur. While the initialization sequence is active, the amber FAULT light will
be illuminated and the OPEN/CLOSE LEDs will blink in an alternating fashion.
Once the initialization sequence is complete, the valve will move to the fully
open position and the green OPEN LED will illuminate.
NOTE: The controllers for TPV pendulum valves and TSS
gate valves contain a valve initialization safety lock function.
This safety lock will prevent valve initialization to occur until
given a “clear-to-proceed” command. The RS-232 serial
command for this is JC. Alternatively, the \Valve Initialization Enable In\ TTL pin can be pulled low to initiate this sequence.
CAUTION: Never attempt to initialize a throttle valve with
differential pressure across the sealing gate. Make sure the
pressure on both sides is equalized. Damage to pumps and
other equipment can occur otherwise.
Vacuum
gauge(s)
DC power supply
Host system with
RS232/485 or DeviceNet
communications
FIGURE 4.2 – TYPICAL INSTALLATION AND CONFIGURATION
OF AN IQ PRESSURE CONTROL VALVE
Vacuum Chamber
Pump
Nor-Cal
IQ-series
Valve
Normal Operation
After the initialization sequence is complete normal operation of the valve is
possible. There are two primary modes of operation, a) position control mode
and b) pressure control mode.
In position control mode, the valve will move to any position in its range
based on a position set-point command from the host. The valve will remain
in that position until instructed to do otherwise. Position control mode can
be useful in certain cases where pre-determined amount of baffling or
throttling is necessary.
Pressure control mode, on the other hand, is used whenever control to a
specific system pressure level is desired. The host provides the set-point value
to the controller which, in turn, moves the valve to achieve that set point as
quickly as possible. During pressure control mode, external perturbations
such as flow changes and plasma events will automatically be compensated
for by the controller so that the pressure set-point is maintained. The set
point value can be changed by the host at any time.
Tuning
The APC controller contains an Adaptive Pressure Control Algorithm that
has been designed to work over a wide range of flow and pressure combinations. The APC controller therefore does not have a “learn mode” and there
is no need for the user to set PID parameters. In some instances, however,
vacuum system design may affect the closed loop pressure control time
constants. As a result, pressure control performance may at times be
affected. If satisfactory pressure control cannot be achieved with the
Adaptive Pressure Control Algorithm, please contact Nor-Cal Products’
Intellisys Customer Support.
1414
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