Nor-Cal CDG 100 OP Lit User Manual
Capacitance Diaphragm Gauge
100 °C heated
CDG100-OP-LIT (2010-1) 1
Operating Manual
Incl. EC Declaration of Conformity
P/N:
S/N:
Range:
V W; LPS
Nor-Cal Products Inc., Yreka, CA 96097,USA
Product Identification
In all communications with Nor-Cal Products, please specify the
information given on the product nameplate. For convenient
reference copy that information into the space provided below.
2 CDG100-OP-LIT (2010-1)
Part number
Flange
Torr
CDG100-T31
½" tube
CDG100-T31-NW1
DN 16 ISO-KF
8 VCR®
CDG100-T21-NW1
DN 16 ISO-KF
8 VCR®
CDG100-T12-NW1
DN 16 ISO-KF
CDG100-T12-CF
DN 16 CF-R
CDG100-T11
½" tube
CDG100-T11-CF
DN 16 CF-R
CDG100-T02
½" tube
CDG100-T02-NW1
DN 16 ISO-KF
8 VCR®
CDG100-T01-NW1
DN 16 ISO-KF
8 VCR®
CDG100-M11-NW1
DN 16 ISO-KF
CDG100-M11-CF
DN 16 CF-R
Validity
This document applies to products with the following part numbers:
CDG100-T31-CF DN 16 CF-R
CDG100-T31-VCR
CDG100-T21 ½" tube
CDG100-T21-CF DN 16 CF-R
CDG100-T21-VCR
CDG100-T12 ½" tube
CDG100-T12-VCR
CDG100-T11-NW1 DN 16 ISO-KF
CDG100-T11-VCR
CDG100-T02-CF DN 16 CF-R
CDG100-T02-VCR
CDG100-T01 ½" tube
CDG100-T01-CF DN 16 CF-R
CDG100-T01-VCR
CDG100-M11 ½" tube
CDG100-M11-VCR
8 VCR®
8 VCR®
8 VCR®
10-1 … 1000 (F.S.)
10-2 … 100 (F.S.)
2×10-3 … 20 (F.S.)
10-3 … 10 (F.S.)
2×10-4 … 2 (F.S.)
10-4 … 1 (F.S.)
10-5 … 0.1 (F.S.)
CDG100-OP-LIT (2010-1) 3
The part number (P/N) can be taken from the product
nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to Capacitance Diaphragm Gauges with
the DN 16 ISO-KF vacuum connection. They apply to other
vacuum connections by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The temperature controlled Capacitance Diaphragm Gauges are
intended for absolute pressure measurement of gases in their
respective pressure ranges (→ 3).
The gauges can be operated in connection with a Nor-Cal
Vacuum Gauge Controller or another appropriate controller.
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear output signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 100°C which results in a
compensation of changes in the ambient conditions and a reduced deposition of process products and by-products in process applications. An integr ated baffle protects the sensor
against coating.
Trademark
VCR® Swagelok Marketing Co.
4 CDG100-OP-LIT (2010-1)
Patents
EP 1070239, 1040333
US Patents 6528008, 6591687, 7107855, 7140085
Scope of Delivery
1× Capacitance Diaphragm Gauge
1× Insulation shell
1× Pin
1× Calibration Test Report
1× Operating Manual
CDG100-OP-LIT (2010-1) 5
Contents
Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Trademark 4
Patents 5
Scope of Delivery 5
1
Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2 Technical Data 10
3 Installation 15
3.1 Vacuum Connection 15
3.2 Power Connection 19
4 Operation 22
4.1 Status Indication 22
4.2 Zeroing the Gauge 23
4.2.1 <ZERO> Adjustment 24
4.2.2 <ZERO> Adjustment with Ramp Function 25
4.3 Switching Functions 27
4.3.1 Adjusting the Setpoints 28
4.4 Activating the Factory Setting (Factory Reset) 30
5 Deinstallation 31
5.1 Power Connection 31
5.2 Vacuum connection 31
6 Maintenance, Repair 34
7 Returning the Product 34
8 Disposal 35
6 CDG100-OP-LIT (2010-1)
Further Information 36
ETL Certification 36
Declaration of Contamination 37
EC Declaration of Conformity 38
For cross-references within this document, the symbol (→ XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→ [Z]).
CDG100-OP-LIT (2010-1) 7
DANGER
WARNING
Caution
Skilled personnel
1 Safety
1.1 Symbols Used
Information on preventing any kind of physical injury.
Information on preventing extensive equipment and environmental damage.
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-user
of the product.
8 CDG100-OP-LIT (2010-1)
1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
Nor-Cal Products assumes no liability and the warranty becomes
null and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.)
on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination are not covered by the
warranty.
CDG100-OP-LIT (2010-1) 9
Measurement range
"Validity"
Accuracy
0.2% of reading )
(measurement signal)
Measurement range
0 … +10 V
0 Ω (short-circuit proof)
0.1 Torr (F.S.)
2 Technical Data
1
Temperature effect on zero
0.1 Torr (F.S.)
1 … 1000 Torr (F.S.)
Temperature effect on span 0.02% of reading / °C
Resolution
Gas type dependence none
Output signal analog
→
0.0050% F.S./ °C
0.0025% F.S./ °C
0.003% F.S.
Output impedance
Loaded impedance
Response time
Identification
1)
Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C
2)
Increase 10 … 90 % F.S.
10 CDG100-OP-LIT (2010-1)
Voltage range –5 … +10.24 V
(limited to +10.24 V)
Relationship voltage-pressure linear
>10 kΩ
30 ms
130 ms
≥1 Torr (F.S.)
2
)
Resistance R
Voltage
ambient operating temperature without temperature effects after
operation of 2 h.
Ident
13.2 kΩ referenced to
supply common
≤5 V
Switching functions
SP1, SP2
Setting range
0 … 99% F.S. (0 … 9.9 V)
Hysteresis
1% F.S.
floating (n.o.)
closed
p ≤ pSP (LED lit solid)
open
p ≥ pSP (LED off)
Status relay
warning
"Power Connection"
For further information on the RS232C interface → [1].
DANGER
be fused.
Relay contact
Switching time
30 VDC/ ≤0.5 ADC
≤50 ms
closed measurement mode
open no supply voltage
warming up
error
RS232C interface
Transmission rate
Data format
9600 baud
binary
8 data bits
one stop bit
no parity bit
no handshake
→
Supply
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
CDG100-OP-LIT (2010-1) 11
±15 V (±5%)
Ripple
≤1 Vpp
Electrical connection
15-pin D-Sub, male
Sensor cable
15-pin plus shielding
(R
cable
≤1.0 Ω).
Internal volume
4.2 cm3
Supply voltage
at the gauge
Class 2 / LPS
+14 … +30 VDC or
Power consumption
while being heated
at operating temperature
≤15 W
≤10 W
The gauge is protected against reverse polarity of the supply
voltage and overload.
Cable length
Supply voltage 15 V
≤ 4 m (0.14 mm²/conductor)
≤ 7 m (0.25 mm²/conductor)
Supply voltage 24 V
≤20 m (0.14 mm²/conductor)
≤35 m (0.25 mm²/conductor)
Supply voltage 30 V
≤40 m (0.14 mm²/conductor)
≤70 m (0.25 mm²/conductor)
For longer cables, larger conductor cross-sections are required
Grounding concept
→ "Power Connection"
Materials exposed to vacuum
ceramics (Al
stainless steel AISI 316L,
≥99.5%),
2O3
nickel, glass solder
≤
Admissible pressure (absolute)
1000 Torr (F.S.)
1 … 100 Torr (F.S.)
0.1 Torr (F.S.)
Burst pressure (absolute) 6 bar
3 bar
2 bar
1.3 bar
12 CDG100-OP-LIT (2010-1)
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