Capacitance Diaphragm Gauge
100 °C heated
CDG100-OP-LIT (2010-1) 1
Operating Manual
Incl. EC Declaration of Conformity
P/N:
S/N:
Range:
V W; LPS
Nor-Cal Products Inc., Yreka, CA 96097,USA
Product Identification
In all communications with Nor-Cal Products, please specify the
information given on the product nameplate. For convenient
reference copy that information into the space provided below.
2 CDG100-OP-LIT (2010-1)
Part number
Flange
Torr
CDG100-T31
½" tube
CDG100-T31-NW1
DN 16 ISO-KF
8 VCR®
CDG100-T21-NW1
DN 16 ISO-KF
8 VCR®
CDG100-T12-NW1
DN 16 ISO-KF
CDG100-T12-CF
DN 16 CF-R
CDG100-T11
½" tube
CDG100-T11-CF
DN 16 CF-R
CDG100-T02
½" tube
CDG100-T02-NW1
DN 16 ISO-KF
8 VCR®
CDG100-T01-NW1
DN 16 ISO-KF
8 VCR®
CDG100-M11-NW1
DN 16 ISO-KF
CDG100-M11-CF
DN 16 CF-R
Validity
This document applies to products with the following part numbers:
CDG100-T31-CF DN 16 CF-R
CDG100-T31-VCR
CDG100-T21 ½" tube
CDG100-T21-CF DN 16 CF-R
CDG100-T21-VCR
CDG100-T12 ½" tube
CDG100-T12-VCR
CDG100-T11-NW1 DN 16 ISO-KF
CDG100-T11-VCR
CDG100-T02-CF DN 16 CF-R
CDG100-T02-VCR
CDG100-T01 ½" tube
CDG100-T01-CF DN 16 CF-R
CDG100-T01-VCR
CDG100-M11 ½" tube
CDG100-M11-VCR
8 VCR®
8 VCR®
8 VCR®
10-1 … 1000 (F.S.)
10-2 … 100 (F.S.)
2×10-3 … 20 (F.S.)
10-3 … 10 (F.S.)
2×10-4 … 2 (F.S.)
10-4 … 1 (F.S.)
10-5 … 0.1 (F.S.)
CDG100-OP-LIT (2010-1) 3
The part number (P/N) can be taken from the product
nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to Capacitance Diaphragm Gauges with
the DN 16 ISO-KF vacuum connection. They apply to other
vacuum connections by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The temperature controlled Capacitance Diaphragm Gauges are
intended for absolute pressure measurement of gases in their
respective pressure ranges (→ 3).
The gauges can be operated in connection with a Nor-Cal
Vacuum Gauge Controller or another appropriate controller.
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear output signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 100°C which results in a
compensation of changes in the ambient conditions and a reduced deposition of process products and by-products in process applications. An integr ated baffle protects the sensor
against coating.
Trademark
VCR® Swagelok Marketing Co.
4 CDG100-OP-LIT (2010-1)
Patents
EP 1070239, 1040333
US Patents 6528008, 6591687, 7107855, 7140085
Scope of Delivery
1× Capacitance Diaphragm Gauge
1× Insulation shell
1× Pin
1× Calibration Test Report
1× Operating Manual
CDG100-OP-LIT (2010-1) 5
Contents
Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Trademark 4
Patents 5
Scope of Delivery 5
1
Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2 Technical Data 10
3 Installation 15
3.1 Vacuum Connection 15
3.2 Power Connection 19
4 Operation 22
4.1 Status Indication 22
4.2 Zeroing the Gauge 23
4.2.1 <ZERO> Adjustment 24
4.2.2 <ZERO> Adjustment with Ramp Function 25
4.3 Switching Functions 27
4.3.1 Adjusting the Setpoints 28
4.4 Activating the Factory Setting (Factory Reset) 30
5 Deinstallation 31
5.1 Power Connection 31
5.2 Vacuum connection 31
6 Maintenance, Repair 34
7 Returning the Product 34
8 Disposal 35
6 CDG100-OP-LIT (2010-1)
Further Information 36
ETL Certification 36
Declaration of Contamination 37
EC Declaration of Conformity 38
For cross-references within this document, the symbol (→ XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→ [Z]).
CDG100-OP-LIT (2010-1) 7
DANGER
WARNING
Caution
Skilled personnel
1 Safety
1.1 Symbols Used
Information on preventing any kind of physical injury.
Information on preventing extensive equipment and environmental damage.
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-user
of the product.
8 CDG100-OP-LIT (2010-1)
1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
Nor-Cal Products assumes no liability and the warranty becomes
null and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.)
on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination are not covered by the
warranty.
CDG100-OP-LIT (2010-1) 9
Measurement range
"Validity"
Accuracy
0.2% of reading )
(measurement signal)
Measurement range
0 … +10 V
0 Ω (short-circuit proof)
0.1 Torr (F.S.)
2 Technical Data
1
Temperature effect on zero
0.1 Torr (F.S.)
1 … 1000 Torr (F.S.)
Temperature effect on span 0.02% of reading / °C
Resolution
Gas type dependence none
Output signal analog
→
0.0050% F.S./ °C
0.0025% F.S./ °C
0.003% F.S.
Output impedance
Loaded impedance
Response time
Identification
1)
Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C
2)
Increase 10 … 90 % F.S.
10 CDG100-OP-LIT (2010-1)
Voltage range –5 … +10.24 V
(limited to +10.24 V)
Relationship voltage-pressure linear
>10 kΩ
30 ms
130 ms
≥1 Torr (F.S.)
2
)
Resistance R
Voltage
ambient operating temperature without temperature effects after
operation of 2 h.
Ident
13.2 kΩ referenced to
supply common
≤5 V
Switching functions
SP1, SP2
Setting range
0 … 99% F.S. (0 … 9.9 V)
Hysteresis
1% F.S.
floating (n.o.)
closed
p ≤ pSP (LED lit solid)
open
p ≥ pSP (LED off)
Status relay
warning
"Power Connection"
For further information on the RS232C interface → [1].
DANGER
be fused.
Relay contact
Switching time
30 VDC/ ≤0.5 ADC
≤50 ms
closed measurement mode
open no supply voltage
warming up
error
RS232C interface
Transmission rate
Data format
9600 baud
binary
8 data bits
one stop bit
no parity bit
no handshake
→
Supply
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
CDG100-OP-LIT (2010-1) 11
±15 V (±5%)
Ripple
≤1 Vpp
Electrical connection
15-pin D-Sub, male
Sensor cable
15-pin plus shielding
(R
cable
≤1.0 Ω).
Internal volume
4.2 cm3
Supply voltage
at the gauge
Class 2 / LPS
+14 … +30 VDC or
Power consumption
while being heated
at operating temperature
≤15 W
≤10 W
The gauge is protected against reverse polarity of the supply
voltage and overload.
Cable length
Supply voltage 15 V
≤ 4 m (0.14 mm²/conductor)
≤ 7 m (0.25 mm²/conductor)
Supply voltage 24 V
≤20 m (0.14 mm²/conductor)
≤35 m (0.25 mm²/conductor)
Supply voltage 30 V
≤40 m (0.14 mm²/conductor)
≤70 m (0.25 mm²/conductor)
For longer cables, larger conductor cross-sections are required
Grounding concept
→ "Power Connection"
Materials exposed to vacuum
ceramics (Al
stainless steel AISI 316L,
≥99.5%),
2O3
nickel, glass solder
≤
Admissible pressure (absolute)
1000 Torr (F.S.)
1 … 100 Torr (F.S.)
0.1 Torr (F.S.)
Burst pressure (absolute) 6 bar
3 bar
2 bar
1.3 bar
12 CDG100-OP-LIT (2010-1)
Admissible temperatures
Bakeout
110 °C at the flange
13
Weight
837 … 897 g
Storage
Operation
–40 °C … +65 °C
+10 °C … +50 °C
≤
Relative humidity ≤80% at temperatures
≤+31 °C, decreasing to 50%
at +40°C
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40
Dimensions [mm]
3.8
82
110.4
31.5
OD½"
DN 16 ISO-KF
DN 16 CF-R
8 VCR
female
CDG100-OP-LIT (2010-1) 13
1 2 3 4 5 6 7 8 9 10
0
0.9×F.S.
0.5×F.S.
0.6×F.S.
1.0×F.S.
0.7×F.S.
0.8×F.S.
0.1×F.S.
0.2×F.S.
0.3×F.S.
0.4×F.S.
1.1×F.S.
Pressure p
Measuring signal U
out
[V]
0.0×F.S.
1.3332…
133.3224…
Analog Measurement Signal vs. Pressure
p = (U
/ 10 V) × p (F.S.)
Torr mbar
c 1.00
out
Conversion Torr ↔ Pascal
3
)
1013.25 / 760 =
101325 / 760 =
Pa
3)
Example: Gauge with 10 Torr F.S.
Measurement signal U
= 6 V
out
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr
3)
Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /
1998
14 CDG100-OP-LIT (2010-1)
WARNING
impacts.
DANGER
suited to overpressure.
DANGER
3 Installation
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
3.1 Vacuum Connection
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withsta n d such pressures. Proces s
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.
CDG100-OP-LIT (2010-1) 15
DANGER
measures to fulfill this requirement.
Caution
damages.
Caution
tools when working in this area.
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection according to EN 61010:
• CF and VCR flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
• For gauges with a ½" tube, take appropriate
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
16 CDG100-OP-LIT (2010-1)
Seal with centering ring
Protective lid
Clamp
Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep condensates and particles from getting into the measuring
chamber preferably choose a horizontal to upright position. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the buttons can be accessed with a pin (→ 23).
Remove the protective lid and connect the product to the
vacuum system.
CDG100-OP-LIT (2010-1) 17
Keep the protective lid.
Mount the insulation shell.
Insulation shell
18 CDG100-OP-LIT (2010-1)
DANGER
3.2 Power Connection
Make sure the vacuum connection is properly made
(→ 15).
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.
Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:
• Connect the cable shield to ground on one side via
the chassis ground. Do not connect the other side of
the shield.
• Connect the supply common with protective ground
directly at the power supply.
• Use differential measurement input (signal common
and supply common conducted separately).
• Potential difference between supply common and
housing ≤18 V (overvoltage protection).
CDG100-OP-LIT (2010-1) 19
If no sensor cable is available, make one according to the
15
8
9
1
15-pin
D-Sub
female
soldering
side
Electrical connection
Pin 1, 4 Relay SP1, closing contact
Pin 2 Signal ouput (measurement signal)
or thresholds SP1/2
Pin 3 Status
Pin 5 Supply common
Pin 6 Supply (-15 V)
Pin 7, 11 Supply (+14 ... +30 V or +15 V)
Pin 8, 9 Relay SP2, closing contact
Pin 10 Gauge identification
or Remote Zero Adjust
Pin 12 Signal common
Pin 13 RS232, TxD
Pin 14 RS232, RxD
Pin 15 Housing (Chassis Ground)
case Connector case
case
15 V
15 V
14…30 V
Remote
Zero Adjust
1 M
4
1
8
9
10
Ident
13
14
2
TxD
RxD
12
7
11
5
15
100nF
18 V
10
6
3
SP1
SP2
Status
following diagram (cable length and conductor crosssections → 12).
20 CDG100-OP-LIT (2010-1)
Connect the sensor cable to the gauge and secure it using
the lock screws.
Connect the sensor cable to the controller.
CDG100-OP-LIT (2010-1) 21
SP1
SP2
STATUS SP ZERO
LED
LED status
Meaning
<STATUS>
off
no supply voltage
long blinks
warming up
lit solid red
error
<SP1>
lit solid green
p ≤ setpoint 1
blinking green
waiting for setpoint 1 input
off
p > setpoint 1
p ≤ setpoint 2
blinking green
waiting for setpoint 2 input
off
p > setpoint 2
4 Operation
Put the gauge into operation. If you are using a Nor-Cal controller, define the measurement range.
A warm-up time of at least 90 minutes should be allowed; for
precise pressure measurements a warm-up time of at least
3 hours is required.
4.1 Status Indication
22 CDG100-OP-LIT (2010-1)
lit solid green measurement mode
blinking green
short blinks
warning
<SP2> lit solid green
1000 Torr
≈2 mV
100 Torr
≈10 mV
10 Torr
≈50 mV
1 Torr
≈300 mV
0.1 Torr
≈1.8 V
4.2 Zeroing the Gauge
The gauge is factory calibrated while "standing upright"
(→ "Calibration Test Report").
We recommend performing a zero adjustment, when the
gauge is operated for the first time.
Due to long time operation or contamination, a zero drift could
occur and zero adjustment may become necessary.
For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation
as normally.
The output signal (measuring signal) is depending on the mounting orientation. The signal difference between the vertical and
horizontal mounting orientation is:
If the gauge is operated via a controller, the zero of the
whole measuring system has to be adjusted on the
controller: first, adjust the zero of the gauge and then,
the zero of the controller.
F.S. ∆U / 90°
CDG100-OP-LIT (2010-1) 23
F.S.
for zero adjustment
0.1 Torr
4.2.1 <ZERO> Adjustment
The zero can be adjusted via
• the <ZERO> button on the gauge,
• the digital input "Remote Zero" (briefly apply the
supply voltage (+14 … +30 V) to pin 10),
• the RS232C interface (→ [1]),
• a Nor-Cal Vacuum Gauge Controller.
While the gauge is being heated and/or under atmos-
pheric pressure, the zeroing function is locked in order
for operating errors to be prevented.
Evacuate the gauge to a pressure according to the table
below:
Recommended final pressure
-2
<5×10
Torr
<5×10-3 Torr
<1×10-3 Torr
<5×10-4 Torr
<1×10-4 Torr
<5×10-5 Torr
<5×10-6 Torr
1000 Torr
100 Torr
20 Torr
10 Torr
2 Torr
1 Torr
If the final pressure is too high for zero adjustment (>25%
of the F.S.), the zero cannot be reached and the
<STATUS> LED blinks green. If this is the case, activate
the factory setting and adjust the zero again (→ 30).
Operate the gauge for at least 90 minutes under constant
ambient conditions (until the signal is stable).
24 CDG100-OP-LIT (2010-1)
Briefly press the <ZERO> button with a pin (max.
Press the button briefly
max. ø1.1 mm
ø1.1 mm). The zero adjustment runs automatically. The
<STATUS> LED blinks until the adjustment (duration ≤8 s)
is completed.
After zero adjustment, the gauge automatically returns
to the measurement mode.
The <STATUS> LED blinks green if
• the signal output is negative (< -20 mV) when the final pressure has been attained
• the z ero adjustment has failed.
4.2.2 <ZERO> Adjustment with Ramp Function
The ramp function allows to adjust the zero at a known reference
pressure within the measurement range of the gauge.
It also permits to adjust an offset of the characteristic curve in
order to
• compensate for the offset of the measuring system or
• obtain a slightly positive zero for a 0 … 10 V AD converter.
CDG100-OP-LIT (2010-1) 25
The offset should not exceed 2% of the F.S. (+200 mV). At a
Keep the button depressed
max. ø1.1 mm
higher positive offset, the upper limit of the measurement range
is exceeded.
Zero adjustment using the ramp function can be
performed via
• the <ZERO> button on the gauge,
• the RS232C interface (→ [1]).
Recommended procedure for adjusting the offset of a
measuring system: → Notice 23.
Operate the gauge for at least 90 minutes under constant
ambient conditions (until the signal is stable).
Push the <ZERO> button with a pin (max. ø1.1 mm) and
keep it depressed. The <STATUS> LED starts blinking.
After 5 s, the zero adjustment value, starting at the current
output value, keeps continually changing (ramp) until the
button is released or until the setting limit (max. 25% F.S.)
is reached. The corresponding output signal is delayed by
about 1 s.
26 CDG100-OP-LIT (2010-1)
Push the <ZERO> button again:
intervals of 1 s)
Fine adjustment
within 0...3 s:
the zero adjustment value changes
by one unit (push <ZERO> button in
Change of direction
within 3...5 s:
If the <ZERO> button is released for more than 5 s, the
gauge returns to the measurement mode.
The <STATUS> LED blinks green if the signal output is negative
(< -20 mV).
the zero adjustment changes its
direction (the blinking frequency of
the <STATUS> LED changes
briefly)
4.3 Switching Functions
The two switching functions can be set to any pressure within
the measurement range of the gauge (→ 14).
The current setpoint setting
• is output at the D-Sub connector instead of the measurement
signal (→ 20) and can be measured with a voltmeter after
the <SP> button is pressed, or
• can be read/written via the RS232C interface.
If the pressure is lower than the setpoint, the corresponding LED
(<SP1> or <SP2>) is lit solid and the corresponding relay
(→ 20) is energized.
CDG100-OP-LIT (2010-1) 27
Measurement signal (pressure p)
Time t
M
e
a
s
u
r
e
m
e
n
t
v
a
l
u
e
Off
On
Hysteresis
(1% F.S.)
Off
Threshold value
Setpoint
DANGER
4.3.1 Adjusting the Setpoints
The setpoints can be adjusted via
• the buttons on the gauge,
• the RS232C interface (→ [1]).
Adjusting Setpoint <1>
Push the <SP> button with a pin (max. ø1.1 mm). The
gauge changes to the switching function mode and outputs
the current threshold value at the measurement value
output for about 10 s (LED <1> blinks).
28 CDG100-OP-LIT (2010-1)
DANGER: malfunction
If processes are controlled via the signal output,
keep in mind that by pushing the <SP> button the
measurement signal is suppressed and the corresponding threshold value is output instead. This
can cause malfunctions.
Push the <SP> but ton only if you are sure that no
damages can arise from a malfunction.
Press the button
max. ø1.1 mm
Keep the button depressed
max. ø1.1 mm
For changing the threshold value, push the <ZERO> button
and keep it depressed. The threshold keeps changing from
the current value (ramp) until the button is released or until
the limit of the setting range is reached.
CDG100-OP-LIT (2010-1) 29
Push the <ZERO> button again:
within 0...3 s:
by one unit
Fine adjustment
the zero adjustment value changes
Change of direction
within 3...5 s:
If the <ZERO> button is released for more than 5 s, the
gauge returns the measurement mode.
The upper threshold is automatically set 1% F.S. above
the lower one (hysteresis).
the zero adjustment changes its
direction (the blinking frequency of
the <STATUS> LED changes
briefly)
Adjusting Setpoint <2>
Push the <SP> button twice (the LED <2> blinks). The
adjustment procedure is the same as for setpoint <1>.
4.4 Activating the Factory Setting (F actory Reset)
All user defined parameters (e.g. zero, filter) are restored to their
default values.
Loading of the default parameters is irreversible.
Loading the default parameters:
Put the gauge out of operation.
Keep the <ZERO> button depressed for at least 5 s while
the gauge is being put into operation (Power ON).
30 CDG100-OP-LIT (2010-1)
DANGER
down.
WARNING
5 Deinstallation
Preconditions:
• Vacuum system vented
• Vacuum system cooled to <50 °C
5.1 Power Connection
Put the gauge out of operation.
Unfasten the lock screws and disconnect the sensor cable.
5.2 Vacuum connection
DANGER: hot surface
Touching the hot surface (>50 °C) can cause
burns.
Put the product out of operation and allow it to cool
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
impacts.
CDG100-OP-LIT (2010-1) 31
DANGER
when handling contaminated parts.
Caution
damages.
Caution
tools when working in this area.
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
32 CDG100-OP-LIT (2010-1)
Remove the insulation shell.
Insulation shell
both sides open
Seal with centering ring
Protective lid
Clamp
Remove the gauge from the vacuum system and install the
protective lid.
CDG100-OP-LIT (2010-1) 33
WARNING
declaration of contamination.
6 Maintenance, Repair
Under clean operating conditions, the product requires no maintenance.
Gauge failures due to contamination are not covered by
the warranty.
We recommend checking the zero at regular intervals
(→ 24).
Nor-Cal assumes no liability and the warranty becomes null and
void if any repair work is carried out by the end-user or third
parties.
7 Returning the Product
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.
34 CDG100-OP-LIT (2010-1)
WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to Nor-Cal should preferably be
free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed
DANGER
when handling contaminated parts.
N
WARNING
relevant local regulations.
8 Disposal
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
WARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the
Separating the components
After disassembling the product, separate its components according to the following criteria:
• Contaminated components
Contaminated components (radioactive, toxic, caustic or bio-
logical hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.
• Other components
Such components must be separated according to their ma-
terials and recycled.
CDG100-OP-LIT (2010-1) 35
3103457
Further Information
[1] www.n-c.com
Communication Protocol
RS232C Interface
tnra49e1
Nor-Cal Products, Inc., Yreka, CA 96097, USA
ETL Certification
ETL LISTED
The product Capacitance Diaphragm
Gauge complies with the requirements
of the following Standards:
UL 61010-1, Issued: 2004/07/12 Ed: 2
Rev: 2005/07/22
CAN/CSA C22.2#61010-1,
Issued: 2004/07/12
36 CDG100-OP-LIT (2010-1)
Declaration of Contamination
The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed decla ra ti on has
been submitted. Non-completion will res ult in del ay.
This declaration may only be completed (in block letters) and signed by authorized and qualified staff.
Description of product
Type
Part number
Serial number
Reason for return
Operating fluid( s ) us e d
(Must be drained before shipping.)
Used in copper process
no yes
The product is free of any substances which are damaging to
health. yes
Harmful substances, gases and/or by-products
Please list all substances, gases, and by-products which t he pro duc t may have come into contact with:
Trade/product name
Legally binding declaration:
We hereby declare that the information on this form is complete and accurate and that we will assume any further costs that may
arise. The contaminated product will be dispatched in accordance with the applicable regulations.
Organization/company
Address Post code, place
Phone Fax
Email
Name
Date and legally binding signature Company stamp
This form can be d ownloaded
from our website.
Process related contamination of product:
toxic no 1) yes
caustic no 1) yes
biological hazard no yes 2)
explosive no yes 2)
radioactive no yes 2)
other harmful substances no 1) yes
1) or not containing any amount
of hazardous residues that
exceed the permissible ex posure limits
Chemical name
(or symbol)
Copies:
Original for addresee - 1 copy for accom pa nying documents - 1 copy for file of se nde r
Seal product in plastic bag and
mark it with a corresponding label.
Precautions associated
with substance
2) Products thus contami nated will not be ac cepted without written
evidence of decontami nation.
Action if human c ontact
CDG100-OP-LIT (2010-1) 37
5 January 2010
5 January 2010
Director of Product Marketing
Quality Manager
EC Declaration of Conformity
We, Nor-Cal Product s, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electrical equipment designed for use within certain
voltage limits 2006/95/EC and the Directive relating to electromagnetic compatibility 2004/108/EC.
Capacitance Diaphragm Gauge
100 °C heated
Standards
Harmonized and international/national standards and specifications:
• EN 61000-3-2:2006
• EN 61000-3-3:1995 + A1:2001 + A2:2005
(EMC: limitation of voltage changes, voltage fluctuations and flicker)
• EN 61000-6-2:2005
• EN 61000-6-3:2007
• EN 61010-1:2001
measurement, control and laboratory use)
Signatures
Nor-Cal Products, Inc., Yreka, CA 96097, USA
(EMC: limits for harmonic current emissions)
(EMC: generic immunity standard)
(EMC: generic emission standard)
(Safety requirements for electrical equipment for
Per M. Cederstav
38 CDG100-OP-LIT (2010-1)
Cheri Clemons
Notes
CDG100-OP-LIT (2010-1) 39
t nna52e1
Original: English tnna52e1 (2009-11)
1967 South Oregon St.
Yreka, CA 96097, USA
Tel: 800-824-4166
Fax: 530-842-9130
www.n-c.com
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