Page 1
Capacitance Diaphragm Gauge
Unheated
CDG025-OP-LIT (2010-1) 1
Operating Manual
Incl. Declaration of Conformity
Page 2
P/N:
S/N:
Range:
V W; LPS
Nor-Cal Products Inc., Yreka, CA 96097,USA
Product Identification
In all communications with Nor-Cal Products, please specify the
information given on the product nameplate. For convenient
reference copy that information into the space provided below.
2 CDG025-OP-LIT (2010-1)
Page 3
Part number
Flange
Torr
CDG025-T31
½" tube
CDG025-T31-NW1
DN 16 ISO-KF
8 VCR®
CDG025-T21-NW1
DN 16 ISO-KF
8 VCR®
CDG025-T12-NW1
DN 16 ISO-KF
CDG025-T12-CF
DN 16 CF-R
CDG025-T11
½" tube
CDG025-T11-CF
DN 16 CF-R
CDG025-T02
½" tube
CDG025-T02-NW1
DN 16 ISO-KF
8 VCR®
CDG025-T01-NW1
DN 16 ISO-KF
8 VCR®
Validity
This document applies to products with the following part numbers:
CDG025-T31-CF DN 16 CF-R
CDG025-T31-VCR
CDG025-T21 ½" tube
CDG025-T21-CF DN 16 CF-R
CDG025-T21-VCR
CDG025-T12 ½" tube
CDG025-T12-VCR
CDG025-T11-NW1 DN 16 ISO-KF
CDG025-T11-VCR
CDG025-T02-CF DN 16 CF-R
CDG025-T02-VCR
CDG025-T01 ½" tube
CDG025-T01-CF DN 16 CF-R
CDG025-T01-VCR
8 VCR®
8 VCR®
10-1 … 1000 (F.S.)
10-2 … 100 (F.S.)
2×10-3 … 20 (F.S.)
10-3 … 10 (F.S.)
2×10-4 … 2 (F.S.)
10-4 … 1 (F.S.)
The part number (P/N) can be taken from the product
nameplate.
CDG025-OP-LIT (2010-1) 3
Page 4
If not indicated otherwise in the legends, the illustrations in this
document correspond to Capacitance Diaphragm Gauges with
the DN 16 ISO-KF vacuum connection. They apply to other
vacuum connections by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The Capacitance Diaphragm Gauges are intended for absolute
pressure measurement of gases in their respective pressure
ranges (→ 3).
The gauges can be operated in connection with a Nor-Cal
Vacuum Gauge Controller or another appropriate controller.
Function
The Capacitance Diaphragm Gauge consists of a capacitive
sensor element made of aluminum oxide ceramics and electronics which convert the capacitance into a DC voltage output signal.
The output signal is linear to the measured pressure and independent of the gas type.
Trademarks
VCR® Swagelok Marketing Co.
Patents
EP 1070239, 1040333
US Patents 6528008, 6591687, 7107855, 7140085
4 CDG025-OP-LIT (2010-1)
Page 5
Scope of Delivery
1× Capacitance Diaphragm Gauge
1× Pin
1× Calibration Test Report
1× Operating Manual
CDG025-OP-LIT (2010-1) 5
Page 6
Contents
Product Identification 2
Validity 3
Intended Use, Function 4
Trademarks, Patents 4
Scope of Delivery 5
Safety 7
1
1.1 Symbols Used 7
1.2 Personnel Qualifications 7
1.3 General Safety Instructions 8
1.4 Liability and Warranty 8
2 Technical Data 9
3 Installation 14
3.1 Vacuum Connection 14
3.2 Electrical Connection 17
4 Operation 19
4.1 Displays 19
4.2 Zeroing the Gauge 19
4.2.1 <ZERO> Adjustment 20
4.3 Activating the Factory Setting (Factory Reset) 23
5 Deinstallation 24
6 Maintenance, Repair 26
7 Returning the Product 26
8 Disposal 27
Further Information 28
Declaration of Contamination 29
ETL Certification 30
EC Declaration of Conformity 31
For cross-references within this document, the symbol (→ XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→ [Z]).
6 CDG025-OP-LIT (2010-1)
Page 7
DANGER
WARNING
Caution
Skilled personnel
1 Safety
1.1 Symbols Used
Information on preventing any kind of physical injury.
Information on preventing extensive equipment and environmental damage.
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-user
of the product.
CDG025-OP-LIT (2010-1) 7
Page 8
1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
Nor-Cal Products assumes no liability and the warranty becomes
null and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.)
on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination are not covered by the
warranty.
8 CDG025-OP-LIT (2010-1)
Page 9
Measurement range
"Validity"
Accuracy
0.20% of reading
(measuring signal)
Voltage range
–5 … +10.24 V
Measuring range
0 … +10 V
Relationship voltage-pressure
linear
>10 kΩ
Response time
30 ms
(Voltage at pin 10 ≤5 V)
"Electrical Connection"
2 Technical Data
1
)
Temperature effect on zero
≥10 Torr (F.S.)
1 / 2 Torr (F.S.)
Temperature effect on span 0.01% of reading / °C
Resolution
Gas type dependence none
Output signal analog
→
0.0050% F.S./ °C
0.015% F.S./ °C
0.003% F.S.
Output impedance
Loaded impedance
Gauge identification Resistance 13.2 kΩ refer-
RS232C interface
Transmission rate
Data format
Connection
Further information about the RS232C interface → [1]).
1)
Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C
ambient operating temperature without temperature effects after
operation of 2 h.
CDG025-OP-LIT (2010-1) 9
0 Ω (short-circuit proof)
enced to supply common
9600 baud
binary
8 data bits
one stop bit
no parity bit
no handshake
→
Page 10
Supply
DANGER
ripple
≤1 Vpp
(Polyfuse)
voltage.
Electrical connection
15-pin D-Sub, male
with switching functions
9-pin plus shielding
(R
cable
≤1.0 Ω).
"Electrical Connection"
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.
Supply voltage
at the gauge
+14 … +30 VDC
Class 2 / LPS
Current consumption <500 mA
(max. starting curren t)
Power consumption
(depending on supply voltage) ≤1 W
Fuse required
1 AT (slow), automatic reset
The gauge is protected against reverse polarity of the supply
Sensor cable
without switching functions
Cable length
5-pin plus shielding
≤100 m (0.14 mm² conductor)
For longer cables, larger conductor cross-sections are required
Grounding concept
Vacuum flange - signal common
→
Supply common - signal common conducted separately; for dif-
ferential measurement (10 Ω)
10 CDG025-OP-LIT (2010-1)
Page 11
Materials exposed to vacuum
(28% Ni, 23% Co, 49% Fe)
3.6 cm3
1 … 100 Torr (F.S.)
2 bar
Bursting pressure (absolute)
5 bar
Admissible temperatures
110 °C at the flange
at +40°C
2000 m NN
Degree of protection
IP 30
Flange, tube
Sensor and diaphragm
Sensor–diaphragm connection
Ceramics–metal connection
stainless steel AISI 316L
ceramics (Al
≥99.5%)
2O3
glass ceramics solder
AgTiCu hard solder, Vacon 70
Internal volume
Admissible pressure (absolute)
≥200 Torr (F.S.)
Storage
Operation
Bakeout (not in operation)
≤
3 bar
–40 °C … +65 °C
+5 °C … +50 °C
≤
Relative humidity ≤80% at temperatures
≤+31 °C decreasing to 50%
Use indoors only, altitude up to
CDG025-OP-LIT (2010-1) 11
Page 12
8 VCR
female
DN 16 ISO-KF
55
69
DN 16 CF-R
44
26
3.8
OD½"
370 g
Dimensions [mm]
Weight
≤
12 CDG025-OP-LIT (2010-1)
Page 13
1 2 3 4 5 6 7 8 9 10
0
0.9×F.S.
0.5×F.S.
0.6×F.S.
1.0×F.S.
0.7×F.S.
0.8×F.S.
0.1×F.S.
0.2×F.S.
0.3×F.S.
0.4×F.S.
1.1×F.S.
Pressure p
Measuring signal U
out
[V]
0.0×F.S.
Torr
mbar 2Pa ) 2)
Analog Measuring Signal vs. Pressure
p = (U
/ 10 V) × p (F.S.)
c 1.00
out
Conversion Torr ↔ Pascal
1013.25 / 760 =
101325 / 760 =
1.3332…
133.3224…
Example: Gauge with 10 Torr F.S.
Measuring signal U
out
= 6 V
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr
2)
Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /
1998
CDG025-OP-LIT (2010-1) 13
Page 14
WARNING
impacts.
DANGER
DANGER
Use O-rings provided with an outer centering ring.
3 Installation
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
3.1 Vacuum Connection
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withsta n d such pressures. Proces s
media can thus leak and possibly damage your
health.
14 CDG025-OP-LIT (2010-1)
Page 15
DANGER
Caution
damages.
Caution
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection according to EN 61010:
• CF and VCR flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
• For gauges with a ½" tube, take appropriate
measures to fulfill this requirement.
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
CDG025-OP-LIT (2010-1) 15
Page 16
Clamp
Seal with centering ring
or
Seal with centering ring
and filter
Protective lid
Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep condensates and particles from getting into the measuring
chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and
filter. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the buttons can be accessed with a pin (→ 19).
Remove the protective lid and connect the product to the vacuum system.
16 CDG025-OP-LIT (2010-1)
Keep the protective lid.
Page 17
DANGER
3.2 Electrical Connection
Make sure the vacuum connection is properly made
(→ 14).
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.
Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:
• Connect the cable shield to ground on one side via
the chassis ground. Do not connect the other side of
the shield.
• Connect the supply common with protective ground
directly at the power supply.
• Use differential measurement input (signal common
and supply common conducted separately).
• Potential difference between supply common and
housing ≤18 V (overvoltage protection).
CDG025-OP-LIT (2010-1) 17
Page 18
If no sensor cable is available, make one according to the
15
8
9
1
D-Sub,15-pole
female
soldering
side
Electrical connection
Pin 2 Signal Output
Pin 5 Supply common, GND
Pin 7, 11 Supply
Pin 10 Gauge identification Inficon
Pin 12 Signal common
Pin 13 RS232, TxD
Pin 14 RS232, RxD
Pin 15 Housing (Chassis Ground)
case Connector case
case
10
Ident
13
14
2
TxD
RxD
12
7
11
5
100k
15
100nF
18 V
10
following diagram.
Connect the sensor cable to the gauge and secure it using
Connect the sensor cable to the controller.
18 CDG025-OP-LIT (2010-1)
the lock screws.
Page 19
RUN
ZERO
LED
State
Meaning
<RUN>
4 Operation
Put the gauge into operation. If you are using a Nor-Cal controller, select the measurement range.
A warm-up time of at least 15 minutes should be allowed; for
exact pressure measurements a warm-up time of at least
2 hours is required.
4.1 Displays
lit Measurement mode
flashing Other mode, error
4.2 Zeroing the Gauge
The gauge is factory calibrated while "standing upright"
(→ "Calibration Test Report").
We recommend performing a zero adjustment, when the
gauge is operated for the first time.
Due to long time operation or contamination, a zero drift could
occur and zero adjustment may become necessary.
For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation
as normally.
CDG025-OP-LIT (2010-1) 19
Page 20
The output signal (measuring signal) is depending on the moun-
F.S.
U / 90°
1000 Torr
≈2 mV
100 Torr
≈10 mV
10 Torr
≈50 mV
1 Torr
≈300 mV
F.S.
for zero adjustment
ting orientation. The signal difference between the vertical and
horizontal mounting orientation is:
∆
If the gauge is operated via a controller, the zero of the
whole measuring system has to be adjusted on the
controller: first, adjust the zero of the gauge and then,
the zero of the controller.
4.2.1 <ZERO> Adjustment
Evacuate the gauge to a pressure according to the table
below:
1000 Torr
100 Torr
20 Torr
10 Torr
2 Torr
1 Torr
If the final pressure in the gauge is too high for zero adjustment (>25% of the F.S.), the zero cannot be reached
and the <RUN> LED flashes. If this is the case, activate
the factory setting and adjust the zero again (→ 23).
Recommended final pressure
-2
<5×10
Torr
<5×10-3 Torr
<1×10-3 Torr
<5×10-4 Torr
<1×10-4 Torr
<5×10-5 Torr
20 CDG025-OP-LIT (2010-1)
Operate the gauge for at least 15 minutes (until the signal
is stable).
Page 21
Briefly press the <ZERO> button with a pin (max.
Press the button briefly
max. ø1.1 mm
ø1.1 mm). The zero adjustment runs automatically. The
<RUN> LED flashes until the adjustment (duration ≤8 s) is
completed.
After zero adjustment the gauge automatically returns to
measurement mode. The <RUN> LED lits.
The zero can also be adjusted via the RS232C interface
(→ [1]).
The <RUN> LED flashes if
• the signal output is negative (< -20 mV) when the final pressure has been attained
• the zero adjustment has failed.
4.2.2 <ZERO> Adjustment with Ramp Function
The ramp function allows to adjust the zero at a known reference
pressure within the measurement range of the gauge.
CDG025-OP-LIT (2010-1) 21
Page 22
It also permits to adjust an offset of the characteristic curve in
max. ø1.1 mm
Keep the button depressed
order to
• compensate for the offset of the measuring system or
• obtain a slightly positive zero for a 0 … 10 V AD converter.
The offset should not exceed 2% of the F.S. (+200 mV). At a
higher positive offset, the upper limit of the measurement range
is exceeded.
Recommended procedure for adjusting the offset of a
measuring system: → Notice 20.
Operate the gauge for at least ¼ hour (until the signal is
stable).
Push the <ZERO> button with a pin (max. ø1.1 mm) and
keep it depressed. The <RUN> LED starts flashing. After
5 s, the zero adjustment value, starting at the current output value, keeps continually changing (ramp) until the button is released or until the setting limit (max. 25% F.S.) is
reached. The corresponding output signal is delayed by
about 1 s.
22 CDG025-OP-LIT (2010-1)
Page 23
Push the <ZERO> button again:
intervals of 1 s)
Fine adjustment
within 0...3 s:
the zero adjustment value changes
by one unit (push <ZERO> button in
Change of direction
within 3...5 s:
If the <ZERO> button is released for more than 5 s, the
gauge returns to the measurement mode.
The zero with Base-Pressure-Offset can also be ad-
justed via the RS232C interface (→ [1]).
The <RUN> LED flashes if the signal output is negative.
the zero adjustment changes its
direction (the flashing frequency of
the <RUN> LED changes briefly)
4.3 Activating the Factory Setting (Factory Reset)
All user defined parameters (e.g. zero, filter) are restored to their
default values.
Loading of the default parameters is irreversible.
Loading the default parameters:
Put the gauge out of operation.
Keep the <ZERO> button depressed for at least 5 s while
the gauge is being put into operation (Power ON).
CDG025-OP-LIT (2010-1) 23
Page 24
WARNING
impacts.
DANGER
Caution
damages.
5 Deinstallation
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
24 CDG025-OP-LIT (2010-1)
Page 25
Caution
tools when working in this area.
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
Vent the vacuum system.
Put the gauge out of operation.
Unfasten the lock screws and disconnect the sensor cable.
Remove the gauge from the vacuum system and install the
protective lid.
CDG025-OP-LIT (2010-1) 25
Page 26
WARNING
declaration of contamination.
6 Maintenance, Repair
Under clean operating conditions, the product requires no maintenance.
Gauge failures due to contamination are not covered by
the warranty.
We recommend checking the zero at regular intervals
(→ 20).
Nor-Cal assumes no liability and the warranty becomes null and
void if any repair work is carried out by the end-user or third
parties.
7 Returning the Product
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.
26 CDG025-OP-LIT (2010-1)
WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to Nor-Cal should preferably be
free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed
Page 27
DANGER
when handling contaminated parts.
N
WARNING
8 Disposal
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
WARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the
relevant local regulations.
Separating the components
After disassembling the product, separate its components according to the following criteria:
• Contaminated components
Contaminated components (radioactive, toxic, caustic or bio-
logical hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.
• Other components
Such components must be separated according to their ma-
terials and recycled.
CDG025-OP-LIT (2010-1) 27
Page 28
Further Information
[1] www.n-c.com
Communication Protocol
RS232C Interface
tnra49e1
Nor-Cal Products, Inc., Yreka, CA 96097, USA
28 CDG025-OP-LIT (2010-1)
Page 29
Declaration of Contamination
The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed decla ra ti on has
been submitted. Non-completion will res ult in del ay.
This declaration may only be completed (in block letters) and signed by authorized and qualified staff.
Description of product
Type
Part number
Serial number
Reason for return
Operating fluid( s ) us e d
(Must be drained before shipping.)
Used in copper process
no yes
The product is free of any substances which are damaging to
health. yes
Harmful substances, gases and/or by-products
Please list all substances, gases, and by-products which t he pro duc t may have come into contact with:
Trade/product name
Legally binding declaration:
We hereby declare that the information on this form is complete and accurate and that we will assume any further costs that may
arise. The contaminated product will be dispatched in accordance with the applicable regulations.
Organization/company
Address Post code, place
Phone Fax
Email
Name
Date and legally binding signature Company stamp
This form can be d ownloaded
from our website.
Process related contamination of product:
toxic no 1) yes
caustic no 1) yes
biological hazard no yes 2)
explosive no yes 2)
radioactive no yes 2)
other harmful substances no 1) yes
1) or not containing any amount
of hazardous residues that
exceed the permissible ex posure limits
Chemical name
(or symbol)
Copies:
Original for addresee - 1 copy for accom pa nying documents - 1 copy for file of se nde r
Seal product in plastic bag and
mark it with a corresponding label.
Precautions associated
with substance
2) Products thus contami nated will not be ac cepted without written
evidence of decontami nation.
Action if human c ontact
CDG025-OP-LIT (2010-1) 29
Page 30
3103457
Issued: 2004/07/12
ETL Certification
ETL LISTED
The Capacitance Diaphragm Gauge
complies with the requirements of the
following Standards:
UL 61010-1, Issued: 2004/07/12 Ed: 2
Rev: 2005/07/22
CAN/CSA C22.2#61010-1,
30 CDG025-OP-LIT (2010-1)
Page 31
2 December 2009
2 December 2009
Director of Product Marketing
Quality Manager
EC Declaration of Conformity
We, Nor-Cal Products, hereby declare that the equipment
mentioned below complies with the provisions of the Directive
relating to electrical equipment designed for use within certain
voltage limits 2006/95/EC and the Directive relating to electromagnetic compatibility 2004/108/EC.
Capacitance Diaphragm Gauge
Unheated
Standards
Harmonized and international/national standards and specifications:
• EN 61000-3-2:2000 + A2:2005
(EMC: limits for harmonic current emissions)
• EN 61000-3-3:1995 + A1:2001 + A2:2005
(EMC: limitation of voltage changes, voltage fluctuations and flicker)
• EN 61000-6-2:2005
• EN 61000-6-3:2001
• EN 61010-1:2001
measurement, control and laboratory use)
Signatures
Nor-Cal Products, Inc., Yreka, CA 96097, USA
(EMC: generic immunity standard)
(EMC: generic emission standard)
(Safety requirements for electrical equipment for
Per M. Cederstav
CDG025-OP-LIT (2010-1) 31
Cheri Clemons
Page 32
t nna49e1
Original: English tnna49e1 (2009-11)
1967 South Oregon St.
Yreka, CA 96097, USA
Tel: 800-824-4166
Fax: 530-842-9130
www.n-c.com
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